CN103028830A

CN103028830A - Welding apparatus

Info

Publication number: CN103028830A
Application number: CN2012100184966A
Authority: CN
Inventors: 百濑一久
Original assignee: AKIM AUTOMATIC EQUIPMENT Co Ltd
Current assignee: AKIM AUTOMATIC EQUIPMENT Co Ltd; AKIM Corp
Priority date: 2011-10-07
Filing date: 2012-01-16
Publication date: 2013-04-10
Anticipated expiration: 2032-01-16
Also published as: KR101378835B1; TW201315553A; TWI481461B; JP2013081975A; KR20130038122A; JP5802920B2; CN103028830B

Abstract

The invention provides a welding apparatus which can inhibit operation cost and improve productivity. The welding apparatus (1) comprises a vacuum chamber (100) having an internal vacuum environment, an X-direction welding unit (200). In the vacuum chamber (100), welding is conducted on a plurality of workpieces (10) along the X-axial direction, and the plurality of workpieces (10) are arranged in a rectangular shaft having X-axial and Y-axial directions. The welding apparatus (1) also comprises a Y-direction welding unit (300). In the vacuum chamber (100), welding is conducted on the plurality of workpieces (10) along the Y-axial direction.

Description

Welder

Technical field

The present invention relates to be applied to stitch the welder of weldering.

Background technology

By on the opening of encapsulation, welding electronic units (for example, with reference to patent documentation 1～3) such as making quartz vibrator as the cover (lid) that covers (below, will encapsulate and cover is generically and collectively referred to as workpiece) etc. by seam.Seam weldering is to become on the rectangular a plurality of workpiece of X, Y-direction by circular electrode being pressed against alignment arrangements, on one side and on one side the pair roller electrode voltage that applies pulse type make it rotate to carry out.

Such seam is welded under the nitrogen that is filled with nitrogen in the chamber and carries out, and perhaps remains under the vacuum environment of vacuum environment (substantial vacuum) to carry out in the chamber.Thus, can prevent from entering in the workpiece air.

In addition, respectively along directions X stitches weldering to whole workpiece after, respectively along Y-direction whole workpiece stitched weldering for the row of each Y-direction for the row of each directions X.Thus, can make at short notice efficiently a plurality of electronic units.

Patent documentation 1:JP JP 2009-147097 communique;

Patent documentation 2:JP JP 2009-147288 communique;

Patent documentation 3:JP JP 2010-194544 communique.

When under nitrogen, stitching weldering, need to continue to fill nitrogen.In this case, in the chamber abnormal and eliminated this unusual after, need to refill nitrogen and restore.And, in order to reduce dew point, need to refill enough nitrogen.Like this, owing to consume nitrogen, so there is the problem such as operation cost height.In addition, occured in the chamber in the unusual situation, the time that refills the nitrogen cost is long, has degradation problem under the electronic unit production capacity.

In addition, the price of electronic unit has the trend of reduction, in order to remedy the impact of the trend that price reduces, wishes to improve production capacity.

Summary of the invention

The present invention proposes in view of the above problems, and its purpose is to provide a kind of welder that suppresses operation cost and can improve production capacity.

Reached above-mentioned purpose by conscientiously studying by following means of the inventor.

(1) welder of the present invention is characterized in that, has: vacuum chamber, and its inside remains vacuum environment; The directions X welding unit in described vacuum chamber, welds a plurality of workpiece along this directions X respectively for the row of each directions X, and these a plurality of workpiece alignment arrangements become the rectangular of described directions X and the Y-direction vertical with this directions X; The Y-direction welding unit in described vacuum chamber, welds described a plurality of workpiece along described Y-direction respectively for the row of each described Y-direction; Buffer station is after having welded described a plurality of workpiece by a welding unit in described directions X welding unit and the described Y-direction welding unit, by another these a plurality of workpiece of welding unit welding.

(2) in addition, the present invention is such as above-mentioned (1) described welder, it is characterized in that, described directions X welding unit has the first Y-direction offset assembly that described a plurality of workpiece is offset in described Y-direction, described directions X welding unit is to welding at described a plurality of workpiece that described Y-direction is offset by this first Y-direction offset assembly, described Y-direction welding unit has the second Y-direction offset assembly that described a plurality of workpiece is offset in described Y-direction, and described Y-direction welding unit is to welding at described a plurality of workpiece that described Y-direction is offset by this second Y-direction offset assembly.

(3) in addition, the present invention is such as above-mentioned (2) described welder, it is characterized in that, at described directions X welding unit and described Y-direction welding unit in the two, be provided with the carrying path of carrying point-blank described a plurality of workpiece on described directions X, this carrying path is for from moving into workpiece in the path of described vacuum chamber till workpiece is taken out of from described vacuum chamber.

(4) in addition, the present invention is such as above-mentioned (3) described welder, it is characterized in that, described directions X welding unit has: the first Y-direction detent bracket, it is described the first Y-direction offset assembly, the described a plurality of workpiece of alignment arrangements on tray for work pieces and this tray for work pieces can be loaded together, and can be mobile in described Y-direction, the directions X plumb joint, be positioned at the top of described the first Y-direction detent bracket, and can be mobile at described directions X, directions X welding roll (welding roller), can be provided in rotatably on the described directions X plumb joint around the Y-axis parallel with described Y-direction, and can be mobile at described directions X with this directions X plumb joint; Described directions X welding unit makes described directions X plumb joint move to make described directions X welding roll to move on one side, Yi Bian weld, and described the first Y-direction detent bracket is moved, switch the described row of described a plurality of workpiece that will weld; Described Y-direction welding unit has: the second Y-direction detent bracket, it is described the second Y-direction offset assembly, the described a plurality of workpiece of alignment arrangements on described tray for work pieces and this tray for work pieces are loaded together, and can be mobile in described Y-direction, the Y-direction plumb joint, be positioned at the top of described the second Y-direction detent bracket, and can be mobile at described directions X, the Y-direction welding roll, can be provided in rotatably on the described Y-direction plumb joint around the X-axis parallel with described directions X, and can be mobile at described directions X with this Y-direction plumb joint; Described Y-direction welding unit makes described the second Y-direction detent bracket move to make described a plurality of workpiece movable on one side, Yi Bian weld, and described Y-direction plumb joint is moved, switch the described row of described a plurality of workpiece that will weld.

(5) in addition, the present invention is such as above-mentioned (4) described welder, it is characterized in that, described directions X plumb joint has: directions X plumb joint pedestal, the one Z direction movable link, can be with respect to described directions X plumb joint with pedestal mobile with the described directions X Z direction vertical with described Y-direction respectively, directions X welding roll maintaining part, be provided on the described Z direction movable link, described directions X welding roll is remained and can rotate around described Y-axis, and supply with electric current to this directions X welding roll; A described Z direction movable link has heat conductivity, heat radiation and insulating properties, the sweating heat that produces at described directions X welding roll, be delivered on the described Z direction movable link via described directions X welding roll maintaining part, simultaneously, from the surface radiating of a Z direction movable link to the outside, and, make described directions X welding roll maintaining part and described directions X plumb joint with insulating between the pedestal by a described Z direction movable link.

(6) in addition, the present invention is such as above-mentioned (5) described welder, it is characterized in that, a described Z direction movable link is that the above material of 170W/ (mK) forms by pyroconductivity.

(7) in addition, the present invention is such as above-mentioned (5) or (6) described welder, it is characterized in that, a described Z direction movable link is that material more than 0.8 forms by thermal emissivity rate.

(8) in addition, the present invention is such as each described welder in (5)～(7), it is characterized in that, a described Z direction movable link is 10 by the insulation impedance value ³The above material of Ω cm forms.

(9) in addition, the present invention is such as each described welder in (5)～(8), it is characterized in that, a described Z direction movable link is formed by pottery.

(10) in addition, the present invention is characterized in that such as above-mentioned (9) described welder described pottery is carborundum or aluminium nitride.

(11) in addition, the present invention is such as each described welder in above-mentioned (4)～(10), it is characterized in that, described Y-direction plumb joint has: Y-direction plumb joint pedestal, the 2nd Z direction movable link, can be mobile in described Z direction with pedestal with respect to described Y-direction plumb joint, Y-direction welding roll maintaining part, be provided on described the 2nd Z direction movable link, described Y-direction welding roll is remained and can rotate around described X-axis, and supply with electric current to this Y-direction welding roll; Described the 2nd Z direction movable link has heat conductivity, heat radiation and insulating properties, the sweating heat that produces at described Y-direction welding roll, be passed to described the 2nd Z direction movable link via described Y-direction welding roll maintaining part, simultaneously, from the surface radiating of the 2nd Z direction movable link to the outside, and, make described Y-direction welding roll maintaining part and described Y-direction plumb joint with insulating between the pedestal by described the 2nd Z direction movable link.

(12) in addition, the present invention is such as each described welder in above-mentioned (4)～(11), it is characterized in that, described directions X welding unit has the first carrying bar, this the first carrying bar is provided on the described directions X plumb joint, and can and the first approximated position of being close of described the first Y-direction detent bracket and away from the first separation point position of this first Y-direction detent bracket between mobile, described the first carrying bar is in the situation that is positioned at described the first approximated position, mobile and push described tray for work pieces at described directions X with described directions X plumb joint, so that this tray for work pieces and described a plurality of workpiece are carried at described directions X together.

(13) in addition, the present invention is such as above-mentioned (12) described welder, it is characterized in that, be positioned in the situation of described the first separation point position at described the first carrying bar, described directions X welding unit makes described directions X plumb joint move to make described directions X welding roll to move on one side, Yi Bian weld.

(14) in addition, the present invention is such as each described welder in above-mentioned (4)～(13), it is characterized in that, described Y-direction welding unit has the second carrying bar, this the second carrying bar is provided on the described Y-direction plumb joint, and can and the second approximated position of being close of described the second Y-direction detent bracket and away from the second separation point position of this second Y-direction detent bracket between mobile, described the second carrying bar is in the situation that is positioned at described the second approximated position, mobile and push described tray for work pieces at described directions X with described Y-direction plumb joint, so that this tray for work pieces and described a plurality of workpiece are carried at described directions X together.

(15) in addition, the present invention is such as above-mentioned (13) or (14) described welder, it is characterized in that, be positioned in the situation of described the second separation point position at described the second carrying bar, described Y-direction welding unit moves described Y-direction plumb joint, switches the row of described a plurality of workpiece that will weld.

(16) in addition, the present invention is such as each described welder in above-mentioned (4)～(15), it is characterized in that, described directions X welding unit has the first supporting mechanism, this first support machine supports the described tray for work pieces that is positioned on described the first Y-direction detent bracket, or remove this support, described Y-direction welding unit has the second supporting mechanism, this second supporting mechanism supports the described tray for work pieces that is positioned on described the second Y-direction detent bracket, or removes this support.

(17) in addition, the present invention is such as above-mentioned (16) described welder, it is characterized in that, described the first supporting mechanism has: the first abutting member, on described Y-direction, can move, and can with the described tray for work pieces butt that has moved in described Y-direction, the first pushing member, mobile in described Y-direction with described the first Y-direction detent bracket, at the described tray for work pieces of described Y-direction pushing with described the first abutting member butt, the first force application component, in described the first abutting member in the situation that described Y-direction has moved, this first force application component to the direction that will restore to this first abutting member application of force; Described the second supporting mechanism has: the second abutting member, can be mobile in described Y-direction, and can with the described tray for work pieces butt that has moved in described Y-direction, the second pushing member, mobile in described Y-direction with described the second Y-direction detent bracket, at the described tray for work pieces of described Y-direction pushing with described the second abutting member butt, the second force application component, in described the second abutting member in the situation that described Y-direction has moved, this second force application component to the direction that will restore to this second abutting member application of force.

(18) in addition, the present invention is such as each described welder in above-mentioned (4)～(17), it is characterized in that, described directions X welding unit has first and changes carriage, this the first replacing carriage mounting has the described directions X welding roll of changing usefulness, and can be mobile in described Y-direction with described the first Y-direction detent bracket, described directions X welding unit is changed automatically to being provided in the described directions X welding roll on the described directions X plumb joint and being positioned in the described first described directions X welding roll of changing the described replacing usefulness on the carriage, described Y-direction welding unit has second and changes carriage, this the second replacing carriage mounting has the described Y-direction welding roll of changing usefulness, and can be mobile in described Y-direction with described the second Y-direction detent bracket, described Y-direction welding unit is changed automatically to being provided in the described Y-direction welding roll on the described Y-direction plumb joint and being positioned in the described second described Y-direction welding roll of changing the described replacing usefulness on the carriage.

(19) in addition, the present invention is such as each described welder in above-mentioned (1)～(18), it is characterized in that, in described vacuum chamber, has buffer station, at this buffer station, to having carried out welding by a welding unit in described directions X welding unit and the described Y-direction welding unit afterwards and having welded described a plurality of workpiece before by another welding unit and cool off.

(20) in addition, the present invention is such as each described welder in above-mentioned (1)～(19), it is characterized in that described welder has the external refrigeration unit that cools off described vacuum chamber from the outside.

According to the present invention, can obtain to suppress operation cost, and can prevent the useful effect that yield rate reduces.

Description of drawings

Figure 1A is the top view of the welder of embodiments of the present invention, shows the below of this welder.

Figure 1B is the top view of welder, shows the top of welder.

Fig. 2 is the rearview of welder.

Fig. 3 A is the right view of welder, shows the directions X welding unit of upstream side.

Fig. 3 B is the right view of welder, shows the Y-direction welding unit in downstream.

Fig. 4 A is the stereogram of the first supporting mechanism.

Fig. 4 B is the stereogram of the second supporting mechanism.

Fig. 5 A is that the master of directions X plumb joint looks enlarged drawing.

Fig. 5 B is the side-looking enlarged drawing of directions X plumb joint.

Fig. 5 C is that the master of Y-direction plumb joint looks enlarged drawing.

Fig. 5 D is the side-looking enlarged drawing of Y-direction plumb joint.

Fig. 6 shows the stereoscopic figure of external refrigeration unit.

Fig. 7 is that expression is stitched the flow chart of the order of weldering by welder.

Fig. 8 A～8E is that the figure of the order of a plurality of workpiece is welded respectively in explanation along X-direction for the row of each X-direction in the directions X welding unit.

Fig. 9 A～9E is that the figure of the order of a plurality of workpiece is welded respectively in explanation along Y direction for the row of each Y direction in the Y-direction welding unit.

The specific embodiment

Below, the example of the embodiment that present invention will be described in detail with reference to the accompanying.In addition, in the following description, come direction take illustrated X, Y, Z axis as benchmark.X, Y-axis are the trunnion axis that is perpendicular to one another, and Z axis is perpendicular to the vertical axis of X, Y-axis.X-direction among the figure is directions X of the present invention, and Y direction is Y-direction of the present invention, and Z-direction is Z direction of the present invention, the invention is not restricted to this.In each figure, suitably omit the diagram of a part of structure, and simplified accompanying drawing.

Figure 1A is the top view of the welder 1 of embodiments of the present invention, shows the below of this welder 1.Figure 1B is the top view of welder 1, shows the top of this welder.Fig. 2 is the rearview of welder 1.Fig. 3 A is the right view of welder 1, shows the directions X welding unit 200 of upstream side.Fig. 3 B is the right view of welder 1, shows the Y-direction welding unit 300 in downstream.In addition, in Figure 1A, 1B～Fig. 3 A, 3B and other figure that the following describes, a part is dissectd, represented the cross section part with oblique line.

Welder 1 shown in these figure is arranged on the production line of making electronic unit, and, use when in vacuum environment, workpiece 10 being stitched weldering.Workpiece 10 is in the opening mounting of encapsulation or temporarily is assembled with under the state as the cover of lid that alignment arrangements is on tray for work pieces 20.Be a plurality of grooves that forming of X, Y direction is useful on accommodating workpiece 10 rectangularly at tray for work pieces 20, a plurality of workpiece 10 alignment arrangements become the rectangular of X, Y direction.

Welder 1 with a plurality of workpiece 10 of alignment arrangements on tray for work pieces 20 as a whole, welding is concentrated in edge X-direction carrying on one side.Specifically, welder 1 has: vacuum chamber 100, and inside remains vacuum environment; Directions X welding unit 200, the upstream side in this vacuum chamber 100 welds along X-direction; Y-direction welding unit 300, weld along Y direction in the downstream in vacuum chamber 100; Buffer station (buffer station) 400, the middle reaches in vacuum chamber 100 make the workpiece 10 temporary transient standbies in the welding way; External refrigeration unit 500 is from cooling vacuum chamber, the outside 100; Enter chamber (Sample Room) 600, spread configuration is at the upstream side of vacuum chamber 100; Take out chamber (sampling room) 700, spread configuration is in the downstream of vacuum chamber 100; Upstream side carrying unit 800 is used for workpiece 10 is sent into vacuum chamber 100; Carrying unit 900, downstream is used for sending workpiece 10 from vacuum chamber 100; Control module (omitting diagram) etc.

The each several part of above-mentioned welder 1 is by the whole control of control module.Control module comprises CPU, RAM and ROM etc., carries out various controls.CPU is so-called central operation treating apparatus, carries out various programs and realizes various functions (function of for example, welding times being counted).RAM uses in the operation field of CPU.The program that the ROM storage is carried out by CPU.

The control module that consists of like this such as back are described in detail and are controlled, and by the replacing opportunity of welding times judgement directions X welding roll 240, opportunity directions X welding roll 240 are replaced by the directions X welding roll 292 of replacing usefulness in this replacing.Equally, control module is controlled, and by the replacing opportunity of welding times judgement Y-direction welding roll 340, opportunity Y-direction welding roll 340 is replaced by the Y-direction welding roll 392 of replacing usefulness in this replacing.

Vacuum chamber 100 has roughly, and hexahedral box describe device is cavity main body 110, vavuum pump 120 and atmospheric open valve 130.On cavity main body 110, be formed with and the first opening 112 that enters chamber 600 and be communicated with at the sidewall of upstream side, and the sidewall in the downstream is formed with and the second opening 114 that takes out chamber 700 and be communicated with.The first opening 112 separates door 615 by the upstream side that enters chamber 600 described later and opens or closes.The downstream of the second opening 114 by taking-up described later chamber 700 separates door 715 and opens or closes.The action of vacuum chamber 100 under the first opening 112 and the second opening 114 pent states by vavuum pump 120 is controlled to be from atmosphere the air pressures in the cavity main body 110 and is pressed onto any pressure in the scope till the vacuum environment.Atmospheric open valve 130 uses when maintenance waits.In addition, in cavity main body 110, in order to dispose directions X plumb joint travel mechanism 260 described later and Y-direction plumb joint travel mechanism 360, and be formed with the beam 116 along X-direction.In addition, in cavity main body 110, in order to dispose a Z direction travel mechanism 270 described later and the 2nd Z direction travel mechanism 370, and be formed with the support member 118 that extends from beam 116 to Y direction.

Under a plurality of workpiece 10 alignment arrangements became rectangular situation, directions X welding unit 200 welded a plurality of workpiece 10 along X-direction respectively for the row of each X-direction.Specifically, directions X welding unit 200 has: the first Y-direction detent bracket 205 has a plurality of workpiece 10 with tray for work pieces 20 mountings; The first Y-direction detent bracket travel mechanism 210 makes this first Y-direction detent bracket 205 mobile in Y direction; The first supporting mechanism 220 is supported on tray for work pieces 20 on the first Y-direction detent bracket 205, perhaps removes this support; Directions X plumb joint 230 has a pair of directions X welding roll 240 and three (two pairs) first carrying bar (finger) 250; Directions X plumb joint travel mechanism 260 makes this directions X plumb joint 230 mobile in X-direction; An a pair of Z direction movable link 268 is configured in the directions X plumb joint of formation directions X plumb joint 230 with also moving in Z-direction on the pedestal 231; A pair of directions X welding roll housing 269 can be provided on the Z direction movable link 268 with loading and unloading, and directions X welding roll 240 is supported for and can rotates; The one Z direction travel mechanism 270 makes directions X welding roll 240 in movements such as Z-directions, or makes the first carrying bar 250 mobile in Z-direction; First changes carriage 290, and mounting has the directions X welding roll 292 of changing usefulness.

The function of the first Y-direction detent bracket 205 performance the first Y-direction offset assembly makes to be a plurality of workpiece that carrying in upright arrangement comes 10 by the first carrying bar 250 of describing in detail later in X-direction and to be offset in Y direction.200 pairs of directions X welding units weld at a plurality of workpiece 10 that Y direction is offset by the first Y-direction detent bracket 205.Specifically, the first Y-direction detent bracket 205 is provided on the upstream side bottom surface in the cavity main body 110, and can be on Y direction traveling priority.The first Y-direction detent bracket travel mechanism 210 power sources as the first Y-direction detent bracket 205 are provided in the upstream side bottom surface in the cavity main body 110.Specifically, the first Y-direction detent bracket travel mechanism 210 has: two the first Y-direction detent brackets set along Y direction in parallel to each other with rail 211; Two pairs of the first Y-direction detent brackets are with slide block 212, along above-mentioned two the first Y-direction detent brackets rail 211 traveling priority on Y direction; The first Y-direction detent bracket driving shaft 213 is formed with external screw thread at outer peripheral face; A pair of the first Y-direction detent bracket driving shaft is supported for this first Y-direction detent bracket driving shaft 213 can rotate with bearing 214,215; The first Y-direction detent bracket is screwed on the first Y-direction detent bracket driving shaft 213 with nut 216; The first Y-direction detent bracket is connected with the first Y-direction detent bracket driving shaft 213 with Position Control motor 217.

The first Y-direction detent bracket foundation of rail 211 formations the first Y-direction detent bracket travel mechanism 210, and, the foundation of the first supporting mechanism 220 that formation describes in detail later.That is, the rail of the first abutting member 221 usefulness of the rail of the first Y-direction detent bracket 205 usefulness and back constitutes one.With slide block 212 the first Y-direction detent bracket 205 is installed at two pairs of the first Y-direction detent brackets, makes this first Y-direction detent bracket 205 can be along two the first Y-direction detent brackets with rails 211 traveling priority on Y direction.The first Y-direction detent bracket driving shaft 213 and two the first Y-direction detent brackets are provided between the two abreast with rail 211.The sidewall that one end of this first Y-direction detent bracket driving shaft 213 connects cavity main body 110 is exposed to the outside, and is connected with Position Control motor 217 with the first Y-direction detent bracket.First Y-direction detent bracket driving shaft is configured on the bottom surface in the cavity main body 110 with bearing 214.Another the first Y-direction detent bracket driving shaft is magnetic fluid seal spares etc. with bearing 215, is provided in the perforation part on the sidewall of cavity main body 110, seals this perforation part.This first Y-direction detent bracket driving shaft will remain vacuum environment in the cavity main body 110 in can and stopping in 213 rotations of the first Y-direction detent bracket driving shaft with bearing 215.The first Y-direction detent bracket is fixed on the lower surface of the first Y-direction detent bracket 205 with nut 216, along with by the rotation of the first Y-direction detent bracket with the first Y-direction detent bracket driving shaft 213 of Position Control motor 217 drivings, make the first Y-direction detent bracket 205 traveling priority on Y direction.In addition, the first Y-direction detent bracket driving shaft 213 and the first Y-direction detent bracket are formed in to screw togather partly with nut 216 has the so-called ball-screw of ball, thereby can reduce the resistance that slides and cause.

At this, describe the structure of the first supporting mechanism 220 in detail.Fig. 4 A is the stereogram of the first supporting mechanism 220.

The first supporting mechanism 220 shown in this figure is provided in the upstream side below in the cavity main body 110.Specifically, the first supporting mechanism 220 has: the first abutting member 221, can with the first Y-direction detent bracket 205 at mobile tray for work pieces 20 butts of Y direction, and can be mobile in Y direction; Two the first Y-direction detent brackets are also used as the first Y-direction detent bracket travel mechanism 210 with rail 211; A pair of the first abutting member is with slide block 222, along two the first Y-direction detent brackets rail 211 traveling priority on Y direction; The first pushing member 223, mobile in Y direction with the first Y-direction detent bracket 205, push tray for work pieces 20; The first force application component 224, in the first abutting member 221 in the situation that Y direction has moved, to the direction of restoring to these the first abutting member 221 application of forces; The first limiter 225 is to being limited in the moving range of restoring on the direction by the first abutting member 221 of these the first force application component 224 application of forces.

The first abutting member 221 is to be provided in the side of tray for work pieces 20 with the first pushing member 223 mode in opposite directions along X-direction.The first pushing member 223 has moved in Y direction in the situation of ormal weight, and this first abutting member 221 is supported on it on the first Y-direction detent bracket 205 with these the first pushing member 223 holding workpiece pallets 20.With slide block 222 the first abutting member 221 is installed in a pair of the first abutting member, this first abutting member 221 can be along two the first Y-direction detent brackets rail 211 traveling priority on Y direction.The first pushing member 223 is to be provided on the first Y-direction detent bracket 205 along X-direction with the first abutting member 221 mode in opposite directions.This first pushing member 223 has moved in Y direction in the situation of ormal weight, tray for work pieces 20 is sandwiched and it is supported on the first Y-direction detent bracket 205 with the first abutting member 221.

At this, describe the structure of directions X plumb joint 230 in detail.Fig. 5 A is that the master of directions X plumb joint 230 looks enlarged drawing.Fig. 5 B is the side-looking enlarged drawing of directions X plumb joint 230.

Directions X plumb joint 230 has: as the directions X plumb joint pedestal 231 on basis; A pair of Y-direction rail 232 is provided in this directions X plumb joint with on the front surface of pedestal 231 in parallel to each other along Y direction; Two pairs of Y-direction slide blocks 233 of tubular linear motor driven are along a pair of Y-direction rail 232 traveling priority on Y direction; An a pair of Z direction rail 234 is provided on two pairs of Y-direction slide blocks 233 in parallel to each other along Z-direction; Two couple of tubular linear motor driven the one Z direction slide block 235 can be along an a pair of Z direction rail 234 traveling priority on Z-direction; An a pair of Z direction movable link 268 is installed on two pairs of Z direction slide blocks 235, can be mobile in Z-direction; A pair of directions X welding roll maintaining part 236 is provided in the lower end of an a pair of Z direction movable link 268; A pair of directions X welding roll housing 269 can be provided on a pair of directions X welding roll maintaining part 236 with installing and removing; A pair of directions X welding roll 240, its directions X welding roll can be supported on a pair of directions X welding roll housing 269 rotatably with rotating shaft 237.

Returning Figure 1A～Fig. 3 describes.Directions X plumb joint 230 is provided on the beam 116 in the cavity main body 110 above the first Y-direction detent bracket 205, and can be on X-direction traveling priority.Directions X plumb joint travel mechanism 260 power sources as directions X plumb joint 230 are provided in the top of the first Y-direction detent bracket 205.Specifically, directions X plumb joint travel mechanism 260 has: two root bead joints are provided on the side of beam 116 with rail 261 in the mode that connects support member 118 in parallel to each other along X-direction; Two pairs of directions X plumb joint slide blocks 262 can be along two root bead joints rail 261 traveling priority on X-direction; Directions X plumb joint driving shaft 263 is formed with external screw thread at outer peripheral face; A pair of directions X plumb joint driving shaft is supported for this directions X plumb joint driving shaft 263 can rotate with bearing 264,265; The directions X plumb joint is screwed on the directions X plumb joint driving shaft 263 with nut 266; The directions X plumb joint is connected with directions X plumb joint driving shaft 263 with Position Control motor 267.

This plumb joint consists of the foundation of directions X plumb joint travel mechanisms 260 with rail 261, and consists of the foundation of Y-direction plumb joint described later travel mechanism 360.That is, the rail of the rail of directions X plumb joint 230 usefulness and Y-direction plumb joint 330 usefulness described later constitutes one.Be fixed with directions X plumb joint 230 at two pairs of directions X plumb joints with slide block 262, this directions X plumb joint 230 can be along two root bead joints rail 261 traveling priority on X-direction.Directions X plumb joint driving shaft 263 upstream side and two plumb joints in cavity main body 110 are provided between the two abreast with rail 261.One end of this directions X plumb joint driving shaft 263 connects the sidewall of cavity main body 110 and is exposed to the outside, and is connected with Position Control motor 267 with the directions X plumb joint.A directions X plumb joint driving shaft is provided on the side of the support member 118 in the cavity main body 110 with bearing 264.Another directions X plumb joint driving shaft is magnetic fluid seal spares etc. with bearing 265, is provided in the perforation part of the sidewall of cavity main body 110, seals this perforation part.This directions X plumb joint driving shaft will remain vacuum environment in the cavity main body 110 in can and stopping in the rotation of directions X plumb joint driving shaft 263 with bearing 265.The directions X plumb joint is fixed on the directions X plumb joint with on the rear surface of pedestal 231 with nut 266, along with by the rotation of directions X plumb joint with the directions X plumb joint driving shaft 263 of Position Control motor 267 drivings, make directions X plumb joint 230 at the X-direction traveling priority.In addition, directions X plumb joint driving shaft 263 and directions X plumb joint are formed in nut 266 and screw togather the so-called ball-screw that part has ball, thereby reduce the resistance that slides and cause.

The one Z direction movable link 268 is being provided in the directions X plumb joint with on the front surface of pedestal 231 in the mobile mode of Z-direction.The one Z direction movable link 268 is formed by the material with heat conductivity, heat radiation and insulating properties, thereby has improved the heat dispersion of the heat that the seam weldering produces.The sweating heat that produces at directions X plumb joint 230 is passed to a Z direction movable link 268 via directions X welding roll maintaining part 236, meanwhile, and from the surface radiating of a Z direction movable link 268 to the outside.In addition, make directions X welding roll maintaining part 236 and directions X plumb joint with insulating between the pedestal 231 by a Z direction movable link 268.In addition, preferably set as far as possible the area of the front surface of a Z direction movable link 268 greatly, improve heat dispersion.Specifically, a Z direction movable link 268 has the radiating surface 268A of regulation area, and the area of guaranteeing this radiating surface is 3cm ²More than, preferably guarantee 5cm ²More than.

The pyroconductivity of the material of a preferred Z direction movable link 268 is more than the 170W/ (mK).And the thermal emissivity rate of the material of a preferred Z direction movable link 268 is more than 0.8, namely near 1.In addition, the insulation impedance of the material of a preferred Z direction movable link 268 is 10 ³More than the Ω cm.And the material of a preferred Z direction movable link 268 has rust-preventing characteristic, light weight.Material as a Z direction movable link 268 is used pottery, wherein, more preferably uses carborundum or aluminium nitride.The thermal emissivity rate of the preferred pottery that adopts is more than 0.8 and below 1.0, more preferably more than 0.93 and below 0.95.That is, with the thermal emissivity rate of aluminium namely 0.02 or more and the thermal emissivity rate of 0.1 following or iron namely 0.5 with and upward compare the thermal emissivity rate height of pottery below 0.9.The pyroconductivity of carborundum is 170W/ (mK), and thermal emissivity rate is more than 0.8 and below 1.0, and insulation impedance is 10 ³Ω cm is above and 5 * 10 ⁶Below the Ω cm.The pyroconductivity of aluminium nitride is that 170W/ (mK) is above and below the 230W/ (mK), thermal emissivity rate is 0.93, and insulation impedance is 10 ¹³More than the Ω cm.In addition, carborundum and aluminium nitride satisfy above-mentioned preferred full terms.

Directions X welding roll maintaining part 236 is provided in the lower end of a Z direction movable link 268, directions X welding roll 240 is remained and can rotate, and supply with electric current to this directions X welding roll 240, can weld by directions X welding roll 240.

Directions X welding roll housing 269 is built-in with the conductive paste that is in the energising usefulness between this directions X welding roll housing 269 and the directions X welding roll 240.This directions X welding roll housing 269 is integrally formed with directions X welding roll 240, can change integratedly with this directions X welding roll 240.

A pair of directions X welding roll 240 can be provided in with loading and unloading the directions X plumb joint with pedestal 231 on the face of Y-axis, this a pair of directions X welding roll 240 can and can move in Z-direction around the Y-axis rotation, and a pair of directions X welding roll 240 can be mobile in X-direction with pedestal 231 with this directions X plumb joint.And a pair of directions X welding roll 240 is mobile in Y-direction by Y-direction slide block 233, thereby can adjust mutual interval.Specifically, the top of the first replacing carriage 290 that a pair of directions X welding roll 240 describes in detail in the back, mobile in Z-direction, thus can automatically be replaced by integratedly the directions X welding roll 292 of changing usefulness with directions X welding roll housing 269.A pair of directions X welding roll 240 consists of welding electrode, and workpiece 10 is stitched weldering.That is, on one side a pair of directions X welding roll 240 rotates the voltage that workpiece 10 applies pulse type by one side, this workpiece 10 is stitched weldering.Therefore, a pair of directions X welding roll 240 need to insulate with pedestal 231 with the directions X plumb joint, and this insulation can realize by the Z direction movable link 268 with insulating properties.

The one Z direction travel mechanism 270 has: a Z direction moves with driving shaft 271, sets along X-direction in the mode that connects directions X plumb joint 230; An a pair of Z direction moves with driving shaft bearing 272,273, a Z direction is moved with driving shaft 271 be supported for and can rotate; Directions X welding roll power-supply change-over mechanism (omitting diagram), the one Z direction moved with driving shaft 271 be transformed to the locomotivity that a pair of directions X welding roll 240 is moved to Z-direction to the revolving force that the first direction (when for example, moving with 274 unilateral observation of Position Control motor from a Z direction left to) of regulation rotates; The first carrying bar power-supply change-over mechanism (omitting diagram), the one Z direction is moved the revolving force that rotates to the second direction (right when for example, moving with 274 unilateral observation of Position Control motor from a Z direction) of regulation with driving shaft 271 be transformed to the locomotivity that 3 first carrying bars 250 are moved to Z-direction; The one Z direction moves with Position Control motor 274, moves with driving shaft 271 with a Z direction to be connected; Directions X welding roll interval change mechanism (omitting diagram) is used for changing the mutual interval of a pair of directions X welding roll 240; The change of directions X welding roll interval is connected with this directions X welding roll interval change mechanism with Position Control motor (omitting diagram).

The one Z direction moves with driving shaft 271 and adopts splined shaft.The one Z direction moves the sidewall that connects cavity main body 110 with an end of driving shaft 271 and is exposed to the outside, and moves with Position Control motor 274 with a Z direction and to be connected.The one a Z direction moves with driving shaft and is provided on the side of the support member 118 in the cavity main body 110 with bearing 272.It is magnetic fluid seal spares etc. with bearing 273 that another Z direction moves with driving shaft, is provided on the perforation part of sidewall of cavity main body 110, seals this perforation part.The one Z direction will remain vacuum environment in the cavity main body 110 in moving and can and stopping in a Z direction moves with the rotation of driving shaft 271 with bearing 273 with driving shaft.The directions X welding roll is provided on the directions X plumb joint 230 with power-supply change-over mechanism, with driving shaft 271 to the first direction of stipulating (for example move along with moved a Z direction that drives with Position Control motor 274 by a Z direction, when moving with 274 unilateral observation of Position Control motor from a Z direction left to) rotation, make directions X welding roll 240 traveling priority on Z-direction.Directions X welding roll interval change mechanism and the change of directions X welding roll interval are provided on the directions X plumb joint 230 with the Position Control motor.Directions X welding roll interval change mechanism is driven with the Position Control motor by the change of directions X welding roll interval, changes the mutual interval of a pair of directions X welding roll 240 on Y direction.

3 first carrying bar 250 performances are in X-direction function of carrying the Handling device of a plurality of workpiece 10 in upright arrangement.3 first carrying bars 250 are provided on the directions X plumb joint 230, carry bars 250 along the spaced interval of X-direction for 3 first, and can be mobile in Z-direction, and can be mobile in X-direction with this directions X plumb joint 230.Specifically, 3 first carrying bars 250 can be on Z-direction, mobile between the first approximated position and the first separation point position, wherein, described the first approximated position refers to, near the first Y-direction detent bracket 205 and with its position apart from predetermined distance, described the first separation point position refers to, leaves the position of these the first Y-direction detent bracket 205 predetermined distances.In addition, 3 first carrying bars 250 are when being positioned at the first approximated position, utilize two front and back at tray for work pieces 20 wherein that tray for work pieces 20 is sandwiched, at mobile this tray for work pieces 20 that pushes of X-direction, carry a plurality of workpiece 10 with this tray for work pieces 20 in X-direction with directions X plumb joint 230.On the other hand, 3 first carrying bars 250 do not push tray for work pieces 20 when being positioned at the first separation point position.Above-mentioned a pair of the first mutual interval of carrying bar 250 on X-direction keeps constant.

The first above-mentioned carrying bar is provided on the directions X plumb joint 230 with power-supply change-over mechanism, with driving shaft 271 to the second direction of stipulating (for example move along with moved a Z direction that drives with Position Control motor 274 by a Z direction, right when moving with 274 unilateral observation of Position Control motor from a Z direction) rotation makes the first carrying bar 250 traveling priority on Z-direction.

First changes the end on the Y direction that carriage 290 is fixed on the first Y-direction detent bracket 205, can be mobile in Y direction with this first Y-direction detent bracket 205.On this first replacing carriage 290, be useful on a plurality of directions X welding rolls maintenance platform 294 of the directions X welding roll 292 that keeps replacing usefulness along the Y direction mounting.At a plurality of directions X welding rolls with the directions X welding roll 292 that keeps having along the Y direction mounting respectively on the platform 294 a pair of replacing usefulness.

Under a plurality of workpiece 10 alignment arrangements became rectangular situation, Y-direction welding unit 300 welded along Y direction respectively for the row of each Y direction.Specifically, Y-direction welding unit 300 has: the second Y-direction detent bracket 305 loads a plurality of workpiece 10 with tray for work pieces 20; The second Y-direction detent bracket travel mechanism 310 makes this second Y-direction detent bracket 305 mobile in Y direction; The second supporting mechanism 320 is supported on tray for work pieces 20 on the second Y-direction detent bracket 305, perhaps removes this support; Y-direction plumb joint 330 has a pair of Y-direction welding roll 340 and a pair of the second carrying bar 350; Y-direction plumb joint travel mechanism 360 makes this Y-direction plumb joint 330 mobile in X-direction; The 2nd Z direction movable link 368 can be provided on the Z-direction on the Y-direction plumb joint 330 movably; A pair of Y-direction welding roll housing 369 can be provided on the 2nd Z direction movable link 368 with loading and unloading, and Y-direction welding roll 340 is remained and can rotate; The 2nd Z direction travel mechanism 370 makes Y-direction welding roll 340 in movements such as Z-directions, or makes the second carrying bar 350 mobile in Z-direction; Second changes carriage 390, and mounting has the Y-direction welding roll 392 of changing usefulness.

The function of the second Y-direction detent bracket 305 performance the second Y-direction offset assembly makes a plurality of workpiece 10 by second carrying bar 350 carrying in upright arrangement on X-direction of describing in detail later be offset in Y direction.A plurality of workpiece 10 that 300 welding of Y-direction welding unit are offset in Y direction by the second Y-direction detent bracket 305.Specifically, the second Y-direction detent bracket 305 is provided on the bottom surface, downstream in the cavity main body 110, can be on Y direction traveling priority.The second Y-direction detent bracket travel mechanism 310 power sources as the second Y-direction detent bracket 305 are provided on the bottom surface, downstream in the cavity main body 110.Specifically, the second Y-direction detent bracket travel mechanism 310 has: two the second Y-direction detent brackets set along Y direction in parallel to each other with rail 311; Two pairs of the second Y-direction detent bracket slide blocks 312 can be along two the second Y-direction detent brackets rail 311 traveling priority on Y direction; The second Y-direction detent bracket driving shaft 313 is formed with external screw thread at outer peripheral face; A pair of the second Y-direction detent bracket driving shaft is supported for this second Y-direction detent bracket driving shaft 313 can rotate with bearing 314,315; The second Y-direction detent bracket is screwed on the second Y-direction detent bracket driving shaft 313 with nut 316; The second Y-direction detent bracket is connected with the second Y-direction detent bracket driving shaft 313 with Position Control motor 317.

The second Y-direction detent bracket consists of the foundation of the second Y-direction detent bracket travel mechanism 310 with rail 311, and consists of the foundation of the second supporting mechanism 320 that describes in detail later.That is, the rail of the rail of the second Y-direction detent bracket 305 usefulness and the second abutting member 321 usefulness of describing in detail later constitutes one.With slide block 312 the second Y-direction detent bracket 305 is installed at two pairs of the second Y-direction detent brackets, this second Y-direction detent bracket 305 can be along two the second Y-direction detent brackets rail 311 traveling priority on Y direction.The second Y-direction detent bracket driving shaft 313 and two the second Y-direction detent brackets are provided between the two abreast with rail 311.The sidewall that one end of this second Y-direction detent bracket driving shaft 313 connects cavity main body 110 is exposed to the outside, and is connected with Position Control motor 317 with the second Y-direction detent bracket.Second Y-direction detent bracket driving shaft is provided on the bottom surface in the cavity main body 110 with bearing 314.Another the second Y-direction detent bracket driving shaft is magnetic fluid seal spares etc. with bearing 315, is provided in the perforation part of the sidewall of cavity main body 110, seals this perforation part.The second Y-direction detent bracket is fixed on the lower surface of the second Y-direction detent bracket 305 with nut 316, along with by the rotation of the second Y-direction detent bracket with the second Y-direction detent bracket driving shaft 313 of Position Control motor 317 drivings, make the second Y-direction detent bracket 305 traveling priority on Y direction.In addition, the second Y-direction detent bracket driving shaft 313 and the second Y-direction detent bracket are formed in nut 316 and screw togather the so-called ball-screw that part has ball, thereby lower the resistance that slides and cause.

At this, describe the structure of the second supporting mechanism 320 in detail.Fig. 4 B is the stereogram of the second supporting mechanism 320.

The second supporting mechanism 320 shown in this figure is provided in the below, downstream in the cavity main body 110.Specifically, the second supporting mechanism 320 has: the second abutting member 321, can with the second Y-direction detent bracket 305 at mobile tray for work pieces 20 butts of Y direction, and can be mobile in Y direction; Two the second Y-direction detent brackets are also used as the second Y-direction detent bracket travel mechanism 310 with rail 311; A pair of the second abutting member is with slide block 322, along two the second Y-direction detent brackets rail 311 traveling priority on Y direction; The second pushing member 323, mobile in Y direction with the second Y-direction detent bracket 305, and pushing tray for work pieces 20; The second force application component 324, in the situation that the second abutting member 321Y direction of principal axis has moved, to the direction of restoring to these the second abutting member 321 application of forces; The second limiter 325 is to being limited in the moving range of restoring on the direction by the second abutting member 321 of these the second force application component 324 application of forces.

The second abutting member 321 is to be provided in the side of tray for work pieces 20 with the second pushing member 323 mode in opposite directions along X-direction.The second pushing member 323 has moved in Y direction in the situation of ormal weight, and this second abutting member 321 sandwiches tray for work pieces 20 and it is supported on the second Y-direction detent bracket 305 with this second pushing member 323.With slide block 322 the second abutting member 321 is installed in a pair of the second abutting member, this second abutting member 321 can be along two the second Y-direction detent brackets rail 311 traveling priority on Y direction.The first pushing member 323 is to be provided on the second Y-direction detent bracket 305 along X-direction with the second abutting member 321 mode in opposite directions.This second pushing member 323 has moved in Y direction in the situation of ormal weight, sandwiches tray for work pieces 20 and it is supported on the second Y-direction detent bracket 305 with the second abutting member 321.

At this, describe the structure of Y-direction plumb joint 330 in detail.Fig. 5 C is that the master of Y-direction plumb joint 330 looks enlarged drawing.Fig. 5 D is the side-looking enlarged drawing of Y-direction plumb joint 330.

Y-direction plumb joint 330 has: as the Y-direction plumb joint pedestal 331 on basis; A pair of directions X rail 332 is provided in this Y-direction plumb joint with on the front surface of pedestal 331 in parallel to each other along X-direction; Two pairs of directions X slide blocks 333 of tubular linear motor driven are along a pair of directions X rail 332 traveling priority on X-direction; A pair of the 2nd Z direction rail 334 is provided on two pairs of directions X slide blocks 333 in parallel to each other along Z-direction; Two couple of tubular linear motor driven the 2nd Z direction slide block 335 is along a pair of the 2nd Z direction rail 334 traveling priority on Z-direction; A pair of the 2nd Z direction movable link 368 is installed on two pairs of the 2nd Z direction slide blocks 335, can be mobile in Z-direction; A pair of Y-direction welding roll maintaining part 336 is provided in the lower end of a pair of the 2nd Z direction movable link 368; A pair of Y-direction welding roll housing 369 can be provided on a pair of Y-direction welding roll maintaining part 236 with loading and unloading; A pair of Y-direction welding roll 340, its Y-direction welding roll can be supported on a pair of Y-direction welding roll housing 369 rotatably with rotating shaft 337.

Returning Figure 1A, 1B～Fig. 3 A, 3B describes.Y-direction plumb joint 330 is formed by the high material of the pyroconductivities such as carborundum or aluminium nitride, has high heat-sinking capability.This Y-direction plumb joint 330 is provided in above the second Y-direction detent bracket 305 on the beam 116 in the cavity main body 110, can be on X-direction traveling priority.Y-direction plumb joint travel mechanism 360 power sources as Y-direction plumb joint 330 are provided in the top of the second Y-direction detent bracket 305.Specifically, Y-direction plumb joint travel mechanism 360 has: two root bead joints are also used as directions X plumb joint travel mechanism 260 with rail 261; Two pairs of Y-direction plumb joints are with slide block 362, along two plumb joints rail 261 traveling priority on X-direction; Y-direction plumb joint driving shaft 363 is formed with external screw thread at outer peripheral face; A pair of Y-direction plumb joint driving shaft is supported for this Y-direction plumb joint driving shaft 363 can rotate with bearing 364,365; The Y-direction plumb joint is screwed on the Y-direction plumb joint driving shaft 363 with nut 366; The Y-direction plumb joint is connected with Y-direction plumb joint driving shaft 363 with Position Control motor 367.

Be fixed with Y-direction plumb joint 330 at two pairs of Y-direction plumb joints with slide block 362, this Y-direction plumb joint 330 can be along two root bead joints rail 361 traveling priority on X-direction.Y-direction plumb joint driving shaft 363 downstream and two plumb joints in cavity main body 110 are provided between the two abreast with rail 261.The sidewall that one end of this Y-direction plumb joint driving shaft 363 connects cavity main body 110 is exposed to the outside, and is connected with Position Control motor 367 with the Y-direction plumb joint.A Y-direction plumb joint driving shaft is provided on the side of the support member 118 in the cavity main body 110 with bearing 364.Another Y-direction plumb joint driving shaft is magnetic fluid seal spares etc. with bearing 365, is provided on the perforation part of sidewall of cavity main body 110, seals this perforation part.This Y-direction plumb joint driving shaft will remain vacuum environment in the cavity main body 110 in can and stopping in the rotation of Y-direction plumb joint driving shaft 363 with bearing 365.The Y-direction plumb joint is fixed on the Y-direction plumb joint with on the rear surface of pedestal 331 with nut 366, along with by the rotation of Y-direction plumb joint with the Y-direction plumb joint driving shaft 363 of Position Control motor 367 drivings, make Y-direction plumb joint 330 traveling priority on X-direction.In addition, Y-direction plumb joint driving shaft 363 and Y-direction plumb joint are formed in nut 366 and screw togather the so-called ball-screw that part has ball, thereby reduce the resistance that slides and cause.

The 2nd Z direction movable link 268 is provided in the Y-direction plumb joint with on the front surface of pedestal 331, can be mobile in Z-direction.The 2nd Z direction movable link 368 is formed by the material with heat conductivity, heat radiation and insulating properties, has improved the heat dispersion of the heat that is produced by the seam weldering.The sweating heat that produces at Y-direction plumb joint 330 is passed to the 2nd Z direction movable link 368 via Y-direction welding roll maintaining part 336, meanwhile, and from the surface radiating of the 2nd Z direction movable link 368 to the outside.In addition, make Y-direction welding roll maintaining part 336 and Y-direction plumb joint with insulating between the pedestal 331 by the 2nd Z direction movable link 368.In addition, preferably set as much as possible the area of the front surface of the 2nd Z direction movable link 368 greatly, improve heat dispersion.Specifically, the 2nd Z direction movable link 368 has the radiating surface 368A of regulation area, guarantees that the area of this radiating surface is at 3cm ²More than, preferably at 5cm ²More than.The material of preferred the 2nd Z direction movable link 368 has the physical parameter same with the material of a Z direction movable link 268.The material of the 2nd Z direction movable link 368 is used pottery, wherein more preferably carborundum or aluminium nitride.

Y-direction welding roll maintaining part 336 is provided in the lower end of the 2nd Z direction movable link 368, Y-direction welding roll 340 is remained and can rotate, and supply with electric current to this Y-direction welding roll 340, can weld by Y-direction welding roll 340.

Y-direction welding roll housing 369 is built-in with the conductive paste that is in the energising usefulness between this Y-direction welding roll housing 369 and the Y-direction welding roll 340.This Y-direction welding roll housing 369 constitutes one with Y-direction welding roll 340, can change integratedly with this Y-direction welding roll 340.

A pair of Y-direction welding roll 340 can be provided in with loading and unloading the Y-direction plumb joint with pedestal 331 on the face of X-axis, this a pair of Y-direction welding roll 340 can and can move in Z-direction around the X-axis rotation, and can be mobile in X-direction with pedestal 331 with this Y-direction plumb joint.And a pair of Y-direction welding roll 340 is mobile at directions X by directions X slide block 333, and can adjust mutual interval.Specifically, the top of the second replacing carriage 390 that a pair of Y-direction welding roll 340 passes through to describe in detail in the back, mobile in Z-direction, thus automatically be replaced by integratedly the Y-direction welding roll 392 of changing usefulness with Y-direction welding roll housing 369.A pair of Y-direction welding roll 340 consists of welding electrode, comes workpiece 10 is stitched weldering.That is, on one side a pair of Y-direction welding roll 340 on one side the voltage that workpiece 10 applies pulse type is rotated, thereby this workpiece 10 is welded.Therefore, a pair of Y-direction welding roll 340 need to insulate with pedestal 331 with the Y-direction plumb joint, and this insulation is realized by the 2nd Z direction movable link 368 with insulating properties.

The 2nd Z direction travel mechanism 370 has: the 2nd Z direction moves with driving shaft 371, sets along X-direction in the mode that connects Y-direction plumb joint 330; A pair of the 2nd Z direction moves with driving shaft bearing 372,373, the 2nd Z direction is moved with driving shaft 371 be supported for and can rotate; Y-direction welding roll power-supply change-over mechanism (omitting diagram), the 2nd Z direction moved with driving shaft 371 be transformed to the locomotivity that a pair of Y-direction welding roll 340 moves to Z-direction to the revolving force that the first direction (when for example, moving with 374 unilateral observation of Position Control motor from the 2nd Z direction left to) of regulation rotates; The second carrying bar power-supply change-over mechanism (omitting diagram), the 2nd Z direction is moved the revolving force that rotates to the second direction (right when for example, moving with 374 unilateral observation of Position Control motor from the 2nd Z direction) of regulation with driving shaft 371 be transformed to the locomotivity that a pair of the second carrying bar 350 is moved to Z-direction; The 2nd Z direction moves with Position Control motor 374, moves with driving shaft 371 with the 2nd Z direction to be connected; Y-direction welding roll interval change mechanism (omitting diagram) changes the mutual interval of a pair of Y-direction welding roll 340; The change of Y-direction welding roll interval is connected with this Y-direction welding roll interval change mechanism with Position Control motor (omitting diagram).

The 2nd Z direction moves with driving shaft 371 and adopts splined shaft.The 2nd Z direction moves the sidewall that connects cavity main body 110 with an end of driving shaft 371 and is exposed to the outside, and moves with Position Control motor 374 with the 2nd Z direction and to be connected.The 2nd a Z direction moves with driving shaft and is provided on the side of the support member 118 in the cavity main body 110 with bearing 372.It is magnetic fluid seal spares etc. with bearing 373 that another the 2nd Z direction moves with driving shaft, is provided on the perforation part of sidewall of cavity main body 110, seals this perforation part.The 2nd Z direction will remain vacuum environment in the cavity main body 110 in moving and can and stopping in the 2nd Z direction moves with driving shaft 371 rotation with bearing 373 with driving shaft.The Y-direction welding roll is provided on the Y-direction plumb joint 330 with power-supply change-over mechanism, with driving shaft 371 to the first direction of stipulating (for example move along with moved the 2nd Z direction that drives with Position Control motor 374 by the 2nd Z direction, when moving with 374 unilateral observation of Position Control motor from the 2nd Z direction left to) rotation, make Y-direction welding roll 340 traveling priority on Z-direction.Y-direction welding roll interval change mechanism and the change of Y-direction welding roll interval are provided on the Y-direction plumb joint 330 with the Position Control motor.Y-direction welding roll interval change mechanism is driven with the Position Control motor by the change of Y-direction welding roll interval, is used for changing the mutual interval of a pair of Y-direction welding roll 340 on X-direction.

The function of a pair of the second carrying bar 350 performances Handling device of a plurality of workpiece 10 of carrying in upright arrangement on directions X.A pair of the second carrying bar 350 is provided on the Y-direction plumb joint 330, along the spaced interval of X-direction, and can be mobile in Z-direction, a pair of the second carrying bar 350 can be mobile in X-direction with this Y-direction plumb joint 330.Specifically, a pair of the second carrying bar 350 is on Z-direction, mobile between the second approximated position and the second separation point position, wherein, described the second approximated position refers to, near the second Y-direction detent bracket 305 and be spaced from the position at the interval of regulation, described the second separation point position refers to, leaves the position at the interval of these the second Y-direction detent bracket 305 regulations.In addition, a pair of the second carrying bar 350 is in the situation that is positioned at the second approximated position, from the front and back of tray for work pieces 20 tray for work pieces 20 is sandwiched, push this tray for work pieces 20 with Y-direction plumb joint 330 in the X-direction movement, thereby carry a plurality of workpiece 10 with this tray for work pieces 20 in X-direction.On the other hand, a pair of the second carrying bar 350 does not push tray for work pieces 20 in the situation that is positioned at the second separation point position.Mutual interval on the X-direction of a pair of the second carrying bar 350 keeps constant.

In addition, about welder 1, carry the Handling device of a plurality of workpiece 10 as straight line on X-direction, have three (two pairs) first carrying bar 250 at the first welding unit 200, and have a pair of the second carrying bar 350 at the second welding unit 300, but be not limited to this.That is, as this Handling device of welder 1, can be in the first welding unit 200 or the second welding unit 300 one has four (three pairs) carrying bar.

The second above-mentioned carrying bar is provided on the Y-direction plumb joint 330 with power-supply change-over mechanism, with driving shaft 371 to the second direction of stipulating (for example move along with moved the 2nd Z direction that drives with Position Control motor 374 by the 2nd Z direction, right when moving with 374 unilateral observation of Position Control motor from the 2nd Z direction) rotation makes the second carrying bar 350 traveling priority on Z-direction.

Second changes the end on the Y direction that carriage 390 is fixed on the second Y-direction detent bracket 305, can be mobile in Y direction with this second Y-direction detent bracket 305.On this second replacing carriage 390, be useful on a plurality of Y-direction welding rolls maintenance platform 394 of the Y-direction welding roll 392 that keeps replacing usefulness along the X-direction mounting.At a plurality of Y-direction welding rolls with the Y-direction welding roll 392 that keeps having along the X-direction mounting respectively on the platform 394 a pair of replacing usefulness.

Buffer station 400 is for fear of directions X welding unit 200 itself or be positioned at workpiece 10 and the Y-direction welding unit 300 itself on this directions X welding unit 200 or be positioned at workpiece 10 on this Y-direction welding unit 300 and interfere and set.This buffer station 400 has with tray for work pieces 20 with by welding the function that a plurality of workpiece 10 before cool off together after 200 welding of directions X welding unit and by Y-direction welding unit 300.Specifically, buffer station 400 has: carrying face 410 is provided in the below of the first carrying bar 250 and the second carrying bar 350 scope that can move along X-direction; A pair of side guides 420,430 is provided in the side of carrying face 410 along X-direction; A pair of internal cooling pipe arrangement 440,450; Internal cooling heat exchanger 460; Internal cooling pump 470.

Carrying face 410 is received in the tray for work pieces 20 of carrying on the first Y-direction detent bracket 205 by the first carrying bar 250.Water cooling in the side guides 420 that the tray for work pieces 20 of accepting is described in detail later afterwards, passes out to the second Y-direction detent bracket 305 by the second carrying bar 350.The tray for work pieces 20 of a pair of side guides 420,430 on X-direction guiding carrying face 410.A side guides 420 consists of the reservoir that refrigerant is used, and is connected with a pair of internal cooling pipe arrangement 440,450.A pair of internal cooling uses pump 470 to connect side guides 420 and the internal coolings outside being connected cavity main body 110 respectively with pipe arrangement 440,450.An internal cooling will be sent to side guides 420 with the refrigerant of pump 470 from internal cooling with pipe arrangement 440.Another internal cooling will carry out circulation in side guides 420 with pipe arrangement 450 refrigerant is recovered to internal cooling pump 470 via internal cooling with heat exchanger 460.Internal cooling is provided in outside the cavity main body 110 with pump 470 with heat exchanger 460 and internal cooling.Internal cooling uses in cooling with heat exchanger 460, cools off the refrigerant with heat.Internal cooling makes refrigerant circulation with pump 470.Make water etc. as refrigerant.

At this, describe the structure of external refrigeration unit 500 in detail.Fig. 6 is the stereoscopic figure of external refrigeration unit 500.

External refrigeration unit 500 shown in this figure is provided on the outer surface of cavity main body 110.This external refrigeration unit 500 absorbs the workpiece welding and produces the also heat of radiation, and then cools off workpiece 10 etc.Specifically, external refrigeration unit 500 has water jacket (jacket) 510, pair of outer cooling pipe arrangement 520,530, external refrigeration heat exchanger 540 and the external refrigeration pump 550 of the reservoir of using as refrigerant.

Water jacket 510 forms " コ " font, the thickness with several millimeter.Be connected with pair of outer cooling pipe arrangement 520,530 at the two ends of this water jacket 510.The pair of outer cooling is connected water jacket 510 respectively pump 550 to connect with pipe arrangement 520,530 with external refrigeration.An external refrigeration will be sent to water jacket 510 with the refrigerant of pump 550 from external refrigeration with pipe arrangement 520.Another external refrigeration will be carried out circulation in water jacket 510 with pipe arrangement 530 refrigerant is that to be recovered to pump P with heat exchanger 540 be external refrigeration usefulness pump 550 to external refrigeration via heat exchanger XE.External refrigeration is used when cooling off with heat exchanger 540, cools off the refrigerant with heat.External refrigeration makes refrigerant circulation with pump 550.Make water etc. as refrigerant.

Entering chamber 600 has and on one side vacuum chamber 100 is remained vacuum environment is sent into a plurality of workpiece 10 this vacuum chamber 100 on one side from atmosphere function.Specifically, enter chamber 600 and have roughly that hexahedral box describe device namely enters chamber main body 610, enter the chamber main body with vavuum pump 620 and enter the chamber main body with atmospheric open valve 630.The sidewall of the upstream side that enters chamber main body 610 be formed be communicated with the outside enter the chamber main body with outside opening 612, and have and open or close this and enter the chamber main body and enter chamber main body usefulness external door 613 with outside opening 612.In addition, be formed with via what the first opening 112 was communicated with vacuum chamber 100 at the sidewall of vacuum chamber 100 1 sides that enter chamber main body 610 and enter the chamber main body with connected entrance 614, have and open or close this and enter the chamber main body and separate 615 with the upstream side of connected entrance 614.Enter the chamber main body with outside opening 612 and enter the chamber main body with entering chamber 600 under the connected entrance 614 pent states, by entering the chamber main body with the action of vavuum pump 620, be controlled to be from atmosphere and be pressed onto any pressure in the scope of vacuum environment entering air pressures in the chamber main body 610.In addition, vavuum pump 120 can be also used as enter chamber 600 enter the chamber main body with vavuum pump 620, also can omit and enter the chamber main body with vavuum pump 620.

Taking out chamber 700 has and vacuum chamber 100 is remained vacuum environment on one side and from this vacuum chamber 100 a plurality of workpiece 10 are sent function to the atmosphere on one side.Specifically, taking out chamber 700 has roughly that hexahedral box describe device namely takes out chamber main body 710, takes out the chamber main body with vavuum pump 720 and takes out the chamber main body with atmospheric open valve 730.Sidewall in the downstream of taking out chamber main body 710 is formed with the taking-up chamber main body usefulness outside opening 712 that is communicated with the outside, and has the taking-up chamber main body external door 713 that opens or closes this taking-up chamber main body usefulness outside opening 712.In addition, be formed with the taking-up chamber main body usefulness connected entrance 714 that is communicated with vacuum chamber 100 via the second opening 114 at the sidewall of vacuum chamber 100 1 sides of taking out chamber main body 710, have and open or close this taking-up chamber main body and separate 715 with the downstream of connected entrance 714.Taking-up chamber main body usefulness outside opening 712 and taking-up chamber main body are used the taking-up chamber 700 under the connected entrance 714 pent states, by taking out the chamber main body with the action of vavuum pump 720, be controlled to be from atmosphere and be pressed onto arbitrarily pressure in the scope of vacuum environment taking out air pressures in the chamber main body 710.In addition, vavuum pump 120 can be also used as the taking-up chamber main body vavuum pump 720 that takes out chamber 700, also can omit and take out chamber main body vavuum pump 720.

Upstream side carrying unit 800 has upstream side the first carrying mechanism 810, upstream side the second carrying mechanism 820 and upstream side the 3rd carrying mechanism 830, and these carrying mechanisms begin to set successively from upstream side.The chamber main body that enters that upstream side the first carrying mechanism 810 is provided on the outside bottom surface that enters chamber main body 610 is used near the external door 613, from the inboard carrying in the lateral tray for work pieces 20 that enters chamber main body 610.Specifically, upstream side the first carrying mechanism 810 has a plurality of upstream sides the first carrying roller 812 that sets continuously on X-direction.A plurality of upstream side the first carrying rollers 812 can be respectively around the Y-axis rotation, at X-direction carrying tray for work pieces 20.Upstream side the second carrying mechanism 820 is provided on the inside bottom surface that enters chamber main body 610, from entering chamber main body 610 to cavity main body 110 carrying tray for work pieces 20.Specifically, upstream side the second carrying mechanism 820 has a plurality of upstream sides the second carrying roller 822 that sets continuously on X-direction.A plurality of upstream side the second carrying rollers 822 can around the Y-axis rotation, be used at X-direction carrying tray for work pieces 20 respectively.Upstream side the 3rd carrying mechanism 830 is provided near the first opening 112 on the inside bottom surface of cavity main body 110, is used for upstreams in the cavity main body 110 to middle reaches carrying tray for work pieces 20.Specifically, upstream side the 3rd carrying mechanism 830 has a plurality of upstream sides the 3rd carrying roller 832 that sets continuously on X-direction.A plurality of upstream side the 3rd carrying rollers 832 can be respectively around the Y-axis rotation, at X-direction carrying tray for work pieces 20.

Carrying unit 900, downstream has downstream the first carrying mechanism 910, downstream the second carrying mechanism 920 and downstream control three carrying mechanisms 930, and these carrying mechanisms downstream side set successively.Downstream the first carrying mechanism 910 is provided near the second opening 114 on the inside bottom surface of taking out chamber main body 710, and tray for work pieces 20 is carried in the middle reaches that are used in the cavity main body 110 downstream.Specifically, downstream the first carrying mechanism 910 has a plurality of downstreams the first carrying roller 912 that sets continuously on X-direction.A plurality of downstreams the first carrying roller 912 can be respectively around the Y-axis rotation, at X-direction carrying tray for work pieces 20.Downstream the second carrying mechanism 920 is provided on the inside bottom surface of taking out chamber main body 710, is used for carrying laterally tray for work pieces 20 from the inboard of taking out chamber main body 710.Specifically, downstream the second carrying mechanism 920 has a plurality of downstreams the second carrying roller 922 that sets continuously on X-direction.A plurality of downstreams the second carrying roller 922 can respectively around the Y-axis rotation, be used at X-direction carrying tray for work pieces 20.The taking-up chamber main body that downstream control three carrying mechanisms 930 are provided on the outside bottom surface of taking out chamber main body 710 is used near the external door 713, is used for making it away from taking out chamber main body 710 from the outside carrying tray for work pieces 20 that takes out chamber main body 710.Specifically, downstream control three carrying mechanisms 930 have a plurality of downstream controls three carrying rollers 932 that set continuously on X-direction.A plurality of downstream control three carrying rollers 932 can respectively around the Y-axis rotation, be used at X-direction carrying tray for work pieces 20.

In this welder 1, in directions X welding unit 200, make the first Y-direction detent bracket 205 mobile in Y direction, and make directions X plumb joint 230 mobile in X-direction, be rectangular alignment arrangements on the arbitrarily workpiece 10 on the tray for work pieces 20 thereby a pair of directions X welding roll 240 can be configured in.In addition, in Y-direction welding unit 300, make the second Y-direction detent bracket 305 mobile in Y direction, and make Y-direction plumb joint 330 mobile in X-direction, be rectangular alignment arrangements on the arbitrarily workpiece 10 on the tray for work pieces 20 thereby a pair of Y-direction welding roll 340 can be configured in.

Below, use Fig. 7 explanation to utilize welder 1 to stitch the order of weldering.Fig. 7 is that expression utilizes welder 1 to stitch the flow chart of the order of weldering.

At first, a plurality of workpiece 10 of alignment arrangements on tray for work pieces 20 are sent into (step S 100) in the vacuum chamber 100.In directions X welding unit 200, along X-direction a plurality of workpiece 10 of sending in the cavity main body 110 are welded (step S200) respectively for the row of each X-direction.Then, determined whether the replacing opportunity (step S210) of directions X welding roll 240, changed (step S220) having arrived replacing during opportunity (in step S210 in the situation of "Yes").Afterwards, the carrying from directions X welding unit 200 to Y-direction welding unit 300, at buffer station 400 cooling a plurality of workpiece 10 (step S300).In Y-direction welding unit 300, weld a plurality of workpiece 10 (step S400) along Y direction respectively for the row of each Y direction.Then, judged whether the replacing opportunity (step S410) of Y-direction welding roll 340, changed (step S420) having arrived replacing during opportunity (in step S310 in the situation of "Yes").Afterwards, a plurality of workpiece 10 after the welding are sent in vacuum chamber 100 to atmosphere (step S500).

Then, to the detailed sequence of step S100, that is, the order that a plurality of workpiece 10 of alignment arrangements on tray for work pieces 20 are sent in the vacuum chamber 100 describes.In this order, vacuum chamber 100, enter chamber 600 and upstream side carrying unit 800 and move.

Close in advance upstream side separate door 615 and downstream separate door 715 and make cavity main body 110 interior airtight after, vavuum pump 120 is moved, the pressure in the cavity main body 110 are reduced, remain vacuum environment.At first, open and enter the chamber main body with external door 613, and drive a plurality of carrying rollers 812,822 and make its rotation.Thus, it is mobile in X-direction with tray for work pieces 20 to be positioned in a plurality of workpiece 10 of carrying on the roller 812,822, is moved to outside opening 612 and enters in the chamber main body 610 via entering the chamber main body.Then, close enter the chamber main body make with external door 613 enter chamber main body 610 interior airtight after, make to enter the chamber main body and move with vavuum pump 620, reduce to enter the pressure in the chamber main body 610, and remain vacuum environment.Then, open upstream side and separate door 615, and drive a plurality of carrying rollers 822,832 and make its rotation.Thus, a plurality of workpiece 10 that are positioned on the carrying roller 822,832 are mobile in X-direction with tray for work pieces 20, are moved in the cavity main body 110 with connected entrance 614 and the first opening 112 via entering the chamber main body.Afterwards, close upstream side and separate door 615, make cavity main body 110 interior airtight.

Below, use Fig. 8 A～Fig. 8 E, the detailed sequence of step S200, step S210 and step S220 is described, that is, and to describing along the sequential scheduling that X-direction is welded a plurality of workpiece 10 respectively for the row of each X-direction at directions X welding unit 200.Fig. 8 A～Fig. 8 E is that the figure of the order of a plurality of workpiece 10 is welded respectively in explanation along X-direction for the row of each X-direction in directions X welding unit 200.

At first, the first carrying bar 250 is moved to the top of Z-direction and be positioned at the first separation point position.Then, move to make after the first carrying bar 250 moves to above upstream side the 3rd carrying roller 832 at the upstream side that makes directions X plumb joint 230 to X-direction, this first carrying bar 250 is moved to the below of Z-direction and be positioned at the first approximated position.Then, make directions X plumb joint 230 move to make the first carrying bar 250 to move to the downstream of X-direction to the downstream of X-direction, a plurality of workpiece 10 are transported on the first Y-direction detent bracket 205 with tray for work pieces 20.And then, make the first carrying bar 250 move to the top of Z-direction and be positioned at the first separation point position, and make directions X welding roll 240 mobile and move to the height of the expectation that can weld in Z-direction.Thus, finished weld preparation in the directions X welding unit 200.

When having finished preparation, at first, make directions X plumb joint 230 mobile in X-direction at the mobile directions X welding roll 240 that makes of X-direction, along X-direction the first row workpiece in a plurality of workpiece 10 is welded (with reference to Fig. 8 A).Then, make (with reference to Fig. 8 B) after the distance of first Y-direction detent bracket 205 mobile delegation on Y direction, make directions X plumb joint 230 move to make directions X welding roll 240 to move to the direction of turning back on the X-direction to the direction of turning back on the X-direction, along X-direction the second row workpiece of a plurality of workpiece 10 is welded (with reference to Fig. 8 C).Same later on, make the first Y-direction detent bracket 205 after Y direction moves the distance of delegation (with reference to Fig. 8 D), make directions X plumb joint 230 move to make directions X welding roll 240 to move to the direction of turning back on the X-direction to the direction of turning back on the X-direction, the row for each X-direction welds a plurality of workpiece 10 (with reference to Fig. 8 E) along X-direction respectively thus.Like this, weld while directions X welding unit 200 makes directions X plumb joint 230 move to make directions X welding roll 240 to move, and the first Y-direction detent bracket 205 is moved, switch the row of a plurality of workpiece 10 that will weld.In addition, directions X welding unit 200 is positioned in the situation of the first separation point position at the first carrying bar 250 on one side, makes directions X plumb joint 230 move to make directions X welding roll 240 to move, Yi Bian weld.In addition, in the directions X welding unit 200 of present embodiment, directions X plumb joint 230 is relatively moved with respect to a plurality of workpiece 10 with being bending, also can make directions X plumb joint 230 be " three " word shape with respect to a plurality of workpiece 10 and relatively move.

After in directions X welding unit 200, welding end, the welding times of X-direction is added 1.The number of times (for example, 25000 times) that whether reaches regulation with the welding times after the addition has judged whether the replacing opportunity of directions X welding roll 240.In the situation of the number of times that has reached regulation, directions X welding roll 240 is replaced by the directions X welding roll 292 of changing usefulness.

The the first carrying bar 250 that is positioned at the first Y-direction detent bracket 205 tops is moved to the below of Z-direction and be positioned at the first approximated position.Then, make directions X plumb joint 230 move to make the first carrying bar 250 to move to the downstream of X-direction to the downstream of X-direction, a plurality of workpiece 10 are transported on the carrying face 410 with tray for work pieces 20.Thus, a plurality of workpiece 10 are handed on the buffer station 400.

Then, use Fig. 9 A～9E, the detailed sequence of step S400, step S410 and step S420 is described, that is, and in Y-direction welding unit 300, describing along the sequential scheduling that Y direction is welded a plurality of workpiece 10 respectively for the row of each Y direction.Fig. 9 A～9E is to weld the figure that the order of a plurality of workpiece 10 describes along Y direction respectively for the row of each Y direction in Y-direction welding unit 300.

At first, the second carrying bar 350 is moved to the top of Z-direction and be positioned at the second separation point position.Then, the upstream side that makes Y-direction plumb joint 330 to X-direction move to make the second carrying bar 350 move to carrying face 410 above after, this second carrying bar 350 moved to the below of Z-direction and be positioned at the second approximated position.Then, make Y-direction plumb joint 330 move to make the second carrying bar 350 to move to the downstream of X-direction to the downstream of X-direction, a plurality of workpiece 10 are transported on the second Y-direction detent bracket 305 with tray for work pieces 20.And then, make the second carrying bar 350 move to the top of Z-direction and be positioned at the second separation point position, and make Y-direction welding roll 340 mobile and move to the height of the expectation that can weld in Z-direction.Thus, finished weld preparation work in the Y-direction welding unit 300.

When being ready to complete, the second Y-direction detent bracket 305 is moved in Y direction make a plurality of workpiece 10 mobile in Y direction, along Y direction the first row workpiece in a plurality of workpiece 10 is welded (with reference to Fig. 9 A).Then, make Y-direction plumb joint 330 after X-direction moves a distance that is listed as (with reference to Fig. 9 B), make the second Y-direction detent bracket 305 move to make a plurality of workpiece 10 to move to the direction of turning back on the Y direction to the direction of turning back on the Y direction, along Y direction the secondary series workpiece in a plurality of workpiece 10 is welded (with reference to Fig. 9 C).Similarly later on, make Y-direction plumb joint 330 after the distance of the mobile row of X-direction (with reference to Fig. 9 D), make the second Y-direction detent bracket 305 move to make a plurality of workpiece 10 to move to the direction of turning back on the Y direction to the direction of turning back on the Y direction, the row for each Y direction weld a plurality of workpiece 10 (with reference to Fig. 9 E) along Y direction respectively thus.Like this, weld while Y-direction welding unit 300 makes the second Y-direction detent bracket 305 move to make a plurality of workpiece 10 to move, and Y-direction plumb joint 330 is moved, switch the row of a plurality of workpiece 10 that will weld.In addition, Y-direction welding unit 300 is positioned in the situation of the second separation point position at the second carrying bar 350, Y-direction plumb joint 330 is moved, the row of a plurality of workpiece 10 that switching will be welded.In addition, in the Y-direction welding unit 300 of present embodiment, Y-direction plumb joint 330 is relatively moved with respect to a plurality of workpiece 10 with being bending, Y-direction plumb joint 330 is relatively moved with respect to a plurality of workpiece 10 with being " river " word shape.

After the welding carried out finishes, the welding times of Y direction is added 1 in Y-direction welding unit 300.Whether reached the replacing opportunity that the number of times (for example, 25000 times) of stipulating determines whether Y-direction welding roll 340 by the welding times after the addition.In the situation that has reached stipulated number, Y-direction welding roll 340 is replaced by the Y-direction welding roll 392 of changing usefulness.

The the second carrying bar 350 that is positioned at the second Y-direction detent bracket 305 tops is moved to the below of Z-direction and be positioned at the second approximated position.Then, make Y-direction plumb joint 330 move to make the second carrying bar 350 to move to the downstream of X-direction to the downstream of X-direction, thereby a plurality of workpiece 10 are transported on the first carrying roller 912 of downstream with tray for work pieces 20.Thus, a plurality of workpiece 10 are handed off on the carrying unit 900, downstream.

Then, to the detailed sequence of step S500, that is, the order that a plurality of workpiece 10 after the welding are passed out to the atmosphere in vacuum chamber 100 describes.In this order, vacuum chamber 100, taking-up chamber 700 and carrying unit 900, downstream move.

At first, close take out the chamber main body make with external door 713 take out chamber main body 710 airtight after, make and take out the chamber main body and move with vavuum pump 720, reduce the interior pressure of taking-up chamber main body 710, and remain vacuum environment.Then, open the downstream and separate door 715, and drive a plurality of carrying rollers 912,914 rotations.Thus, a plurality of workpiece 10 that are positioned on the carrying roller 912,914 are mobile in X-direction with tray for work pieces 20, are moved to connected entrance 714 via the second opening 114 and taking-up chamber main body and take out in the chamber main body 710.Then, take out the chamber main body moves to make the pressure that takes out in the chamber main body 710 to raise and remain atmospheric pressure with atmospheric open valve 730 after making, open taking-up chamber main body external door 713, and drive a plurality of carrying rollers 914,916 and make its rotation.Thus, a plurality of workpiece 10 that are positioned on the carrying roller 914,916 are mobile in X-direction with tray for work pieces 20, are moved to outside the taking-up chamber main body 710 with outside opening 712 via taking out the chamber main body.Then, close the downstream and separate door 715, make taking-up chamber main body 710 airtight.

Then, the path that seam welds the heat that produces is passed through in explanation as an example of directions X welding unit 200 example.

Be welded in the heat that produces on workpiece 10 and the directions X welding roll 240 by seam and be transferred to directions X welding roll housing 269.The heat of transferring on the directions X welding roll housing 269 is transferred on the Z direction movable link 268 from this directions X roller housing 269.Transfer to heat on the Z direction movable link 268 in a Z direction movable link 268 interior conduction, diffuse to the front surface of a Z direction movable link 268.Diffuse to heat radiation in vacuum environment of the front surface of a Z direction movable link 268, and be released to the outside of vacuum chamber 100.

As described above, the welder 1 of present embodiment is equipped with in vacuum chamber 100: directions X welding unit 200, weld a plurality of workpiece 10 along X-direction respectively for the row of each X-direction; Y-direction welding unit 300 welds a plurality of workpiece 10 along Y direction respectively for the row of each Y direction.And, carried out welding by 200 pairs of a plurality of workpiece 10 of directions X welding unit after, by Y-direction welding unit 300 these a plurality of workpiece 10 of welding.

Therefore, can in the vacuum chamber 100 that remains vacuum environment, finish the seam weldering, thereby can improve production capacity.In addition, compare with the situation of in being filled with the chamber of nitrogen, stitching weldering and will consume nitrogen, can suppress operation cost.And, in being filled with the chamber of nitrogen, occured in the unusual situation, eliminated this unusual after, need to refill enough nitrogen and reduce dew point.As a result, the time that spends is long, and has the problems such as electronic unit production capacity reduction, and the present invention does not need nitrogen, thereby does not have such problem.

In addition, a plurality of workpiece 10 that make of directions X welding unit 200 have the first Y-direction detent bracket 205 at the first Y-direction offset assembly that Y direction is offset, and come welding at a plurality of workpiece 10 that Y-direction is offset by this first Y-direction detent bracket 205.Y-direction welding unit 300 has the second Y-direction detent bracket 305 that a plurality of workpiece 10 are offset in Y direction, to welding at a plurality of workpiece 10 that Y-direction is offset by this second Y-direction detent bracket 305.Therefore, a plurality of workpiece 10 are in the process that X-direction is carried by straight line, and are only just soldered by the movement that is offset in Y direction.That is, a plurality of workpiece 10 do not carry out unnecessary motion.As a result, can shorten the required time of welding, further improve production capacity, and can save the space.

And, directions X welding unit 200 and Y-direction welding unit 300 are in the two, be provided with the carrying path of carrying point-blank a plurality of workpiece 10 on X-direction, this carrying path is for from moving into workpiece in the path of vacuum chamber 100 till workpiece is taken out of from vacuum chamber 100.Therefore, a plurality of workpiece 10 do not carry out unnecessary motion.As a result, can shorten the required time of welding, further improve production capacity, and can save the space.

And directions X welding unit 200 is equipped with: the first Y-direction detent bracket 205, and can be mobile in Y direction; Directions X plumb joint 230 can above this first Y-direction detent bracket 205, move in X-direction; Directions X welding roll 240 can be provided on this directions X plumb joint 230 rotatably around Y-axis.And, weld while directions X welding unit 200 makes directions X plumb joint 230 move to make directions X welding roll 240 to move, and the first Y-direction detent bracket 205 is moved, switch the row of a plurality of workpiece 10 that will weld.Therefore, can be for the row of each X-direction respectively along X-direction at short notice, high efficiency and concentrated area welding alignment arrangements become rectangular a plurality of workpiece 10 of X, Y direction.

Then, Y-direction welding unit 300 is equipped with: the second Y-direction detent bracket 305, and can be mobile in Y direction; Y-direction plumb joint 330 can above this second Y-direction detent bracket 305, move in X-direction; Y-direction welding roll 340 can be provided on this Y-direction plumb joint 330 rotatably around X-axis.And, weld while Y-direction welding unit 300 makes the second Y-direction detent bracket 305 move to make a plurality of workpiece 10 to move, and Y-direction plumb joint 330 is moved, switch the row of a plurality of workpiece 10 that will weld.Therefore, can be for the row of each Y direction respectively along Y direction at short notice, high efficiency and concentrated area welding alignment arrangements become rectangular a plurality of workpiece 10 of X, Y direction.

In addition, directions X plumb joint 230 has directions X plumb joint pedestal 231, can use pedestal 231 in Z-direction mobile a Z direction movable link 268, directions X welding roll maintaining part 236 with respect to this directions X plumb joint, this directions X welding roll maintaining part 236 is provided on the Z direction movable link 268, directions X welding roll 240 is remained and can rotate around Y-axis, and supply with electric currents to this directions X welding roll 240.

And a Z direction movable link 268 has insulating properties.Therefore, need to be in order to make directions X plumb joint 230 and 240 insulation of directions X welding roll, and between directions X welding roll housing 269 and a Z direction movable link 268 the installing insulating body.In the situation that does not have such insulator, can not hinder because seam welds the heat that produces at directions X welding roll 240 and shift to a Z direction movable link 268 from directions X welding roll housing 269.In addition, a Z direction movable link 268 has heat conductivity.Therefore, can make from directions X welding roll housing 269 and transfer to thermal diffusion on the Z direction movable link 268 to the front surface of a Z direction movable link 268.And a Z direction movable link 268 has heat radiation.Therefore, can make the heat radiation of the front surface that is diffused into a Z direction movable link 268, and then, can prevent from accumulating heat at directions X welding roll 240 and directions X welding roll housing 269.That is, improved heat dispersion.As a result, can prevent from being in conductive paste between directions X welding roll 240 and the directions X welding roll housing 269 and melt and flow out to the outside, and then, can prevent the energising abnormal to directions X welding roll 240.As a result, can long-time continuous use welder 1.

Similarly, Y-direction plumb joint 330 has Y-direction plumb joint pedestal 331, can use pedestal 331 in Z-direction mobile the 2nd Z direction movable link 368 and Y-direction welding roll maintaining part 336 with respect to the Y-direction plumb joint, this Y-direction welding roll maintaining part 336 is provided on the 2nd Z direction movable link 368, Y-direction welding roll 340 is remained and can rotate around X-axis, and supply with electric currents to this Y-direction welding roll 340.And the 2nd Z direction movable link 368 has heat conductivity, heat radiation and insulating properties.Therefore, play the effect same with a Z direction movable link 268.

In addition, directions X plumb joint 230 not only has directions X welding roll 240, also has the first carrying bar 250 at a plurality of workpiece 10 of X-direction carrying.In addition, Y-direction plumb joint 330 not only has Y-direction welding roll 340, also has the second carrying bar 350 at a plurality of workpiece 10 of X-direction carrying.Therefore, the power of directions X welding roll 240 and Y-direction welding roll 340 can be also used as the power of carrying workpiece 10, and then, the structure for carrying workpiece 10 can be simplified.In addition, because straight line carrying workpiece 10 on X-direction only so the layout that comprises the production line integral body of welder 1 linearly can be disposed, can form effective layout.

And directions X welding unit 200 has the first supporting mechanism 220, and the tray for work pieces 20 that 220 pairs of this first supporting mechanisms are positioned on the first Y-direction detent bracket 205 supports.In addition, Y-direction welding unit 300 has the second supporting mechanism 320, and the tray for work pieces 20 that 320 pairs of this second supporting mechanisms are positioned on the second Y-direction detent bracket 305 supports.Therefore, can prevent tray for work pieces 20 and workpiece 10 skews in welding, and then, weldering can be stitched accurately.

Then, the first supporting mechanism 220 has: the first abutting member 221, can be mobile in Y direction, and be used for tray for work pieces 20 butts that move in Y direction with the first Y-direction detent bracket 205; The first pushing member 223, mobile in Y direction with the first Y-direction detent bracket 205, and pushing tray for work pieces 20; The first force application component 224, in the situation that the first abutting member 221 has moved along Y direction, to the direction of restoring to these the first abutting member 221 application of forces.Therefore, move in Y direction by the first Y-direction detent bracket 205 of mounting by tray for work pieces 20, can automatically tray for work pieces 20 be sandwiched and support.That is, although simple in structure, the supporting workpiece pallet 20 reliably.

And directions X welding unit 200 has the first replacing carriage 290 that mounting has the directions X welding roll 292 of changing usefulness.This first replacing carriage 290 can be mobile in Y direction with the first Y-direction detent bracket 205.In addition, Y-direction welding unit 300 has the second replacing carriage 390 that mounting has the Y-direction welding roll 392 of changing usefulness.This second replacing carriage 390 can be mobile in Y direction with the second Y-direction detent bracket 305.Therefore, the power of the first Y-direction detent bracket 205 and the second Y-direction detent bracket 305 can be also used as the power that the directions X welding roll 292 of changing usefulness and the Y-direction welding roll 392 of changing usefulness are moved, and then, can simplify be used to the structure that the directions X welding roll 292 of changing usefulness and the Y-direction welding roll 392 of changing usefulness are moved.

In addition, have buffer station 400 in vacuum chamber 100,400 pairs of this buffer stations weld afterwards by directions X welding unit 200 and cool off by a plurality of workpiece 10 before 300 welding of Y-direction welding unit.Therefore, at buffer station 400, can temporarily cool off a plurality of workpiece 10 in the welding way, can prevent from producing the situation that defective products reduces yield rate because of heat.In addition, in the situation of not taking hot countermeasure, the first Y-direction detent bracket 205 and the second Y-direction detent bracket 305 can bend, prolong, and perhaps cavity main body 110 each member such as grade deform, but the hot countermeasure by in the buffer station 400 can prevent each deformation of member.

And welder 1 has from the external refrigeration unit 500 in cooling vacuum chamber, the outside 100 at the outer surface of cavity main body 110.Therefore, can further prevent from producing the situation that defective products reduces yield rate because of heat.In addition, can prevent further that the first Y-direction detent bracket 205, the second Y-direction detent bracket 305 from producing crooked, prolongation, perhaps cavity main body 110 each deformation of member such as grade.

The invention is not restricted to above-mentioned embodiment, can in the scope that does not break away from its aim and technological thought, carry out various distortion.

Namely, in the above-described embodiment, at buffer station 400, to cooling off along a plurality of workpiece 10 before the Y direction welding after the X-direction welding and by Y-direction welding unit 300 by directions X welding unit 200, but the invention is not restricted to this, can cool off by a plurality of workpiece 10 before 400 pairs of buffer stations weld after the Y direction welding and along X-direction.

In addition, in the above-described embodiment, about first, second Z direction movable link 268,368, not only can whole be formed by the material with heat conductivity, heat radiation and insulating properties, and can a part be formed by the material with heat conductivity, heat radiation and insulating properties.In this case, importantly, the contact part that an above-mentioned at least part is in the roller maintaining part is guaranteed to insulate and the heat of recycling roll maintaining part.In addition, a preferred above-mentioned at least part guarantees the surface with the arbitrarily inwall degree in opposite directions of vacuum chamber.This be because, can with should the surface as radiating surface, the heat that will reclaim from the roller maintaining part is to the inwall radiation of vacuum chamber.

Welder of the present invention can be used in making electronic equipment, electronic unit or other various field of articles or logistics field.

Claims

1. a welder is characterized in that,

Have:

Vacuum chamber, its inside remains vacuum environment,

The directions X welding unit in described vacuum chamber, welds along directions X a plurality of workpiece, and described a plurality of workpiece alignment arrangements become described directions X to reach the rectangular of the Y-direction vertical with this directions X,

The Y-direction welding unit in described vacuum chamber, welds along described Y-direction described a plurality of workpiece;

After coming by a welding unit in described directions X welding unit and the described Y-direction welding unit described a plurality of workpiece to have been carried out welding, come these a plurality of workpiece are welded by another welding unit in described directions X welding unit and the described Y-direction welding unit.

2. welder as claimed in claim 1 is characterized in that,

Described directions X welding unit has the first Y-direction offset assembly that described a plurality of workpiece is offset in described Y-direction, and described directions X welding unit is to welding at described a plurality of workpiece that described Y-direction is offset by this first Y-direction offset assembly,

Described Y-direction welding unit has the second Y-direction offset assembly that described a plurality of workpiece is offset in described Y-direction, and described Y-direction welding unit is to welding at described a plurality of workpiece that described Y-direction is offset by this second Y-direction offset assembly.

3. welder as claimed in claim 2 is characterized in that,

Described directions X welding unit and described Y-direction welding unit are in the two, be provided with the carrying path of carrying point-blank described a plurality of workpiece on described directions X, this carrying path is for from moving into workpiece in the path of described vacuum chamber till workpiece is taken out of from described vacuum chamber.

4. welder as claimed in claim 3 is characterized in that,

Described directions X welding unit has:

The first Y-direction detent bracket, it is described the first Y-direction offset assembly, the described a plurality of workpiece of alignment arrangements on tray for work pieces and this tray for work pieces can be loaded together, and can be mobile in described Y-direction,

The directions X plumb joint is positioned at the top of described the first Y-direction detent bracket, and can be mobile at described directions X,

The directions X welding roll can be provided on the described directions X plumb joint rotatably around the Y-axis parallel with described Y-direction, and can be mobile at described directions X with this directions X plumb joint;

Described directions X welding unit makes described directions X plumb joint move to make described directions X welding roll to move on one side, Yi Bian weld, and described the first Y-direction detent bracket is moved, switch the described row of described a plurality of workpiece that will weld;

Described Y-direction welding unit has:

The second Y-direction detent bracket, it is described the second Y-direction offset assembly, the described a plurality of workpiece of alignment arrangements on described tray for work pieces and this tray for work pieces can be loaded together, and can be mobile in described Y-direction,

The Y-direction plumb joint is positioned at the top of described the second Y-direction detent bracket, and can be mobile at described directions X,

The Y-direction welding roll can be provided on the described Y-direction plumb joint rotatably around the X-axis parallel with described directions X, and can be mobile at described directions X with this Y-direction plumb joint;

Described Y-direction welding unit makes described the second Y-direction detent bracket move to make described a plurality of workpiece movable on one side, Yi Bian weld, and described Y-direction plumb joint is moved, switch the described row of described a plurality of workpiece that will weld.

5. welder as claimed in claim 4 is characterized in that,

Described directions X plumb joint has:

Directions X plumb joint pedestal,

The one Z direction movable link, can be with respect to described directions X plumb joint with pedestal mobile with the described directions X Z direction vertical with described Y-direction respectively,

Directions X welding roll maintaining part is provided on the described Z direction movable link, described directions X welding roll is remained and can rotate around described Y-axis, and supply with electric current to this directions X welding roll;

A described Z direction movable link has heat conductivity, heat radiation and insulating properties,

The sweating heat that produces at described directions X welding roll, be delivered on the described Z direction movable link via described directions X welding roll maintaining part, simultaneously, from the surface radiating of a Z direction movable link to the outside, and, make described directions X welding roll maintaining part and described directions X plumb joint with insulating between the pedestal by a described Z direction movable link.

6. welder as claimed in claim 5 is characterized in that,

A described Z direction movable link is that the above material of 170W/ (mK) forms by pyroconductivity.

7. such as claim 5 or 6 described welders, it is characterized in that,

A described Z direction movable link is that material more than 0.8 forms by thermal emissivity rate.

8. such as each described welder in the claim 5～7, it is characterized in that,

A described Z direction movable link is 10 by the insulation impedance value ³The above material of Ω cm forms.

9. such as each described welder in the claim 5～8, it is characterized in that,

A described Z direction movable link is formed by pottery.

10. welder as claimed in claim 9 is characterized in that,

Described pottery is carborundum or aluminium nitride.

11. such as each described welder in the claim 4～10, it is characterized in that,

Described Y-direction plumb joint has:

Y-direction plumb joint pedestal,

The 2nd Z direction movable link can be mobile in described Z direction with pedestal with respect to described Y-direction plumb joint,

Y-direction welding roll maintaining part is provided on described the 2nd Z direction movable link, described Y-direction welding roll is remained and can rotate around described X-axis, and supply with electric current to this Y-direction welding roll;

Described the 2nd Z direction movable link has heat conductivity, heat radiation and insulating properties,

The sweating heat that produces at described Y-direction welding roll, be passed to described the 2nd Z direction movable link via described Y-direction welding roll maintaining part, simultaneously, from the surface radiating of the 2nd Z direction movable link to the outside, and, make described Y-direction welding roll maintaining part and described Y-direction plumb joint with insulating between the pedestal by described the 2nd Z direction movable link.

12. such as each described welder in the claim 4～11, it is characterized in that,

Described directions X welding unit has the first carrying bar, this the first carrying bar is provided on the described directions X plumb joint, and can and the first approximated position of being close of described the first Y-direction detent bracket and away from the first separation point position of this first Y-direction detent bracket between mobile

Described the first carrying bar is in the situation that is positioned at described the first approximated position, and is mobile and push described tray for work pieces at described directions X with described directions X plumb joint, so that this tray for work pieces and described a plurality of workpiece are carried at described directions X together.

13. welder as claimed in claim 12 is characterized in that,

Be positioned in the situation of described the first separation point position at described the first carrying bar, on one side described directions X welding unit makes described directions X plumb joint move to make described directions X welding roll to move, Yi Bian weld.

14. such as each described welder in the claim 4～13, it is characterized in that,

Described Y-direction welding unit has the second carrying bar, this the second carrying bar is provided on the described Y-direction plumb joint, and can and the second approximated position of being close of described the second Y-direction detent bracket and away from the second separation point position of this second Y-direction detent bracket between mobile

Described the second carrying bar is in the situation that is positioned at described the second approximated position, and is mobile and push described tray for work pieces at described directions X with described Y-direction plumb joint, so that this tray for work pieces and described a plurality of workpiece are carried at described directions X together.

15. such as claim 13 or 14 described welders, it is characterized in that,

Be positioned in the situation of described the second separation point position at described the second carrying bar, described Y-direction welding unit makes described Y-direction plumb joint move to switch the row of described a plurality of workpiece that will weld.

16. such as each described welder in the claim 4～15, it is characterized in that,

Described directions X welding unit has the first supporting mechanism, and this first support machine supports the described tray for work pieces that is positioned on described the first Y-direction detent bracket, or removes this support,

Described Y-direction welding unit has the second supporting mechanism, and this second supporting mechanism supports the described tray for work pieces that is positioned on described the second Y-direction detent bracket, or removes this support.

17. welder as claimed in claim 16 is characterized in that,

Described the first supporting mechanism has:

The first abutting member can be mobile in described Y-direction, and can connect with the described tray for work pieces that has moved in described Y-direction,

The first pushing member, mobile in described Y-direction with described the first Y-direction detent bracket, at the described tray for work pieces of described Y-direction pushing with described the first abutting member butt,

The first force application component, in described the first abutting member in the situation that described Y-direction has moved, this first force application component to the direction that will restore to this first abutting member application of force;

Described the second supporting mechanism has:

The second abutting member can be mobile in described Y-direction, and can with the described tray for work pieces butt that has moved in described Y-direction,

The second pushing member, mobile in described Y-direction with described the second Y-direction detent bracket, at the described tray for work pieces of described Y-direction pushing with described the second abutting member butt,

The second force application component, in described the second abutting member in the situation that described Y-direction has moved, this second force application component to the direction that will restore to this second abutting member application of force.

18. such as each described welder in the claim 4～17, it is characterized in that,

Described directions X welding unit has first and changes carriage, and this first replacing carriage mounting has the described directions X welding roll of changing usefulness, and can be mobile in described Y-direction with described the first Y-direction detent bracket,

Described directions X welding unit is changed automatically to being provided in the described directions X welding roll on the described directions X plumb joint and being positioned in the described first described directions X welding roll of changing the described replacing usefulness on the carriage,

Described Y-direction welding unit has second and changes carriage, and this second replacing carriage mounting has the described Y-direction welding roll of changing usefulness, and can be mobile in described Y-direction with described the second Y-direction detent bracket,

Described Y-direction welding unit is changed automatically to being provided in the described Y-direction welding roll on the described Y-direction plumb joint and being positioned in the described second described Y-direction welding roll of changing the described replacing usefulness on the carriage.

19. such as each described welder in the claim 1～18, it is characterized in that,

In described vacuum chamber, has buffer station, at this buffer station, to having carried out welding by a welding unit in described directions X welding unit and the described Y-direction welding unit afterwards and having welded described a plurality of workpiece before by another welding unit and cool off.

20. such as each described welder in the claim 1～19, it is characterized in that,

Described welder has the external refrigeration unit that cools off described vacuum chamber from the outside.