TW201314737A - Excimer lamp - Google Patents

Abstract

The object of the present invention is to produce ultraviolet light and ozone suitably in the excimer lamp. This excimer lamp is provided with a light emitting tube having an outer tube and an inner tube disposed within the outer tube, and an outside electrode is disposed on the peripheral side of the outside tube. On the other hand, an inside electrode is disposed along the axial direction in a space formed inside the inner tube. A discharge space is formed between the outer tube and inner tube, and discharge gas is sealed therein. Furthermore, the inside electrode is not in contact with the inner tube, so a dielectric barrier discharge arises in the discharge space while a corona discharge arises between the inner tube and the inside electrode.

Description

Excimer lamp

The present invention relates to an excimer lamp that emits light using a dielectric discharge, and more particularly to the construction of an excimer lamp.

An electrodeless discharge lamp that emits ultraviolet rays such as an excimer lamp is often used as a light source for sterilization, sterilization, decontamination, washing treatment, and the like. There is an electrodeless discharge lamp in which ultraviolet rays are irradiated to the air in the arc tube to generate ozone having the same germicidal ability as ultraviolet rays (see Patent Document 1).

In the above configuration, the exciting coil is wound around a cylindrical outer tube disposed inside the water conduit, and the inner tube is inserted through the inside of the outer tube. The coil is supplied with a high-frequency current to discharge, and the ultraviolet ray is sterilized by the water in the flow pipe. At the same time, the air that is irradiated with ultraviolet rays into the inner tube can generate ozone. By spraying ozone into the tube, ultraviolet light and ozone can sterilize the running water in the tube together.

[Advanced technical literature]

Patent Document 1: Japanese Patent Publication No. Hei 10-134779

In the above-described electrodeless discharge lamp, a part of the amount of ultraviolet radiation is used to generate ozone. Since the amount of ozone generated is related to the amount of ultraviolet radiation, the amount of ozone generated cannot be individually adjusted.

Therefore, there is a need for a discharge lamp capable of adjusting ozone generation independently of the amount of ultraviolet radiation.

The excimer lamp of the present invention has an arc tube, and the arc tube includes an outer tube and an inner tube disposed in the outer tube. An outer electrode is disposed on the outer peripheral surface side of the outer tube. The space formed in the inner tube (hereinafter referred to as an open space) has an inner electrode disposed along the axial direction. A discharge space is formed between the outer tube and the inner tube, and the 'electric gas is sealed.

The light-emitting tube can be constructed in various shapes. Only one end of the light-emitting tube is open, or both ends of the light-emitting tube are open. The term "opening" means that the open space is not closed and communicates with the outer space of the lamp. An oxygen-containing gas such as air may be present in the open space.

The external electrode and the internal electrode may be composed of various shapes. For example, A plurality of strip-shaped external electrodes are placed in contact with the outer peripheral surface of the outer tube in the axial direction. Alternatively, the wire-shaped external electrode can be arranged in a mesh shape. The inner electrode may be a columnar electrode, and its cross-sectional shape may be various shapes such as a circular shape, an elliptical shape, a cross shape, a plate shape, and a polygonal shape.

The inner electrode of the excimer lamp of the present invention is not in contact with the inner tube. Therefore, when a voltage is applied between the electrodes to light up, the discharge space generates a dielectric discharge, and a corona discharge is generated between the inner tube and the inner electrode. As a result, oxygen in the open space reacts to generate ozone, which is released from the open space to the outside of the lamp.

As described above, in the present invention, ultraviolet rays are not irradiated to the open space to generate ozone, but ozone is obtained by corona discharge. Therefore, as long as the conditions for generating the corona discharge are considered, the amount of ozone generated can be adjusted regardless of the change in the amount of ultraviolet radiation and the amount of ultraviolet radiation.

Such an excimer lamp can be mounted in a processing apparatus for sterilization, sterilization, sterilization, washing, and the like. The excimer lamp in the processing device is capable of emitting ultraviolet rays in the radial direction while also generating ozone in the axial direction.

The generation of the corona discharge is affected by the arrangement of the arc tube and the inner electrode. However, in the present invention, since the inner electrode is not in contact with the arc tube, it can be held separately. In this way, the light-emitting tube and the inner electrode can be individually replaced, and various light-emitting tubes and inner electrodes can be selectively disposed, or the relative positions of the inner electrode and the light-emitting tube can be changed.

The amount of ozone produced will vary with the size of the spatial domain in which corona discharge occurs in open spaces. Therefore, it is possible to produce a structure that can be changed in the space field in which corona discharge occurs in accordance with specifications. Specifically, the shape of the light-emitting tube and the shape of the inner electrode (cross-sectional size, cross-sectional shape, and outer shape) can be changed. The shape of the inner electrode, the arrangement position of the inner electrode with respect to the arc tube, and the like are used to create a structure in which the spatial field in which corona discharge occurs can be changed.

When the position of the inner electrode is changed, for example, the inner electrode can be moved in the axial direction, that is, the position of the inner electrode can be changed. The inner electrode can be moved in the axial direction relative to the outer electrode in the open space. Alternatively, when the axial length of the inner electrode is set in accordance with the axial length of the open space, the inner electrode can be partially inserted into the open space.

The amount of ozone produced will vary with the length of the insertion. Alternatively, the electrode tube can be formed by an electrode tube through which the electrode rod and the electrode rod pass, so that the electrode tube moves relative to the electrode rod in the axial direction.

On the other hand, the amount of ozone generated can be adjusted by adjusting the axial direction length of the inner electrode, the axial direction appearance (profile) viewed from the side, and the cross-sectional shape without moving the inner electrode relative to each other. When the axial length of the inner electrode is adjusted, the axial length of the inner electrode can be shortened by a predetermined length from the axial length of the outer electrode. The amount of ozone generated varies depending on the length difference of the electrodes.

On the other hand, when the external shape is adjusted, the plurality of electrode portions having different radial lengths can be arranged in the axial direction to form the inner electrode. The amount of ozone generated varies in the axial direction by the difference in the distance between the inner electrode and the inner tube surface. In addition, an inner electrode having a tapered portion may also be formed. In particular, it is possible to change the corona discharge field more finely by changing the relative movement of the inner electrode and the appearance shape, and to adjust the amount of ozone generation more precisely.

In the case of considering the cross-sectional shape of the inner electrode, the cross-sectional shape Differences can cause differences in the field of corona discharge and can be used to adjust the amount of ozone produced.

The inner electrode is also used in dielectric discharge. Therefore, the shape and arrangement position of the inner electrode also affect the amount of ultraviolet radiation. Therefore, an auxiliary electrode may be disposed between the inner tube and the inner electrode to adjust the ozone generation amount completely independently of the dielectric discharge. The auxiliary electrode may be provided on the inner circumferential surface of the inner tube or may be provided in such a manner as not to be in contact with the inner tube.

In the lighting method of the discharge lamp of the present invention, the discharge lamp is provided with an arc tube; the outer electrode is disposed on the outer peripheral surface side of the arc tube; and the inner electrode is disposed on the inner peripheral surface side of the arc tube. The discharge lamp in the space is caused by applying a high-frequency voltage between the outer electrode and the inner electrode to cause dielectric discharge in the arc tube, which is characterized in that the inner electrode is disposed in a state of not contacting the arc tube, so that it is open. A corona discharge is generated in the space.

It is considered that the amount of ozone generation can be adjusted by changing the space area in which the corona discharge is generated, irrespective of the amount of ozone generated.

According to the present invention, ultraviolet rays and ozone can be appropriately generated in the excimer lamp.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is a schematic plan view of the excimer lamp of the first embodiment viewed from the axial direction. Fig. 2 is a schematic cross-sectional view of the excimer lamp taken along line II-II of Fig. 1.

The excimer lamp 10 is a discharge lamp including a cylindrical arc tube 20 composed of quartz, strip-shaped outer electrodes 50A and 50B, and a columnar inner electrode 60, and is disposed to sterilize and sterilize equipment, substrates, liquids, gases, and the like. The treatment device 15 for work such as sterilization or washing.

The arc tube 20 is a U-shaped cylindrical quartz glass tube in which the quartz outer tube 30 and the inner tube 40 are integrated. The tube end portion 20E1 communicates with the lamp outer space, and the other tube end portion 20E2 closes the lamp outer space. Both the inner tube 40 and the outer tube 30 are bottomed cylindrical tubes which are integrally joined at the tube end portion 20E1 to form the surface of the tube end portion 20E1.

With the configuration of the light-emitting tube 20, a cylindrical recessed space (hereinafter referred to as an open space) 80 is formed in the arc tube 20 (the inner tube 40), and between the outer tube 30 and the inner tube 40, that is, the light-emitting tube 20 A sealed space (hereinafter referred to as a discharge space) 70 is formed in the pipe wall. The open space 80 is connected to the outside air. On the other hand, the discharge space 70 is sealed with an inert gas such as Xe or a mixed gas (discharge gas) of an inert gas and a halogen gas.

The outer electrodes 50A and 50B are fixed to the outer peripheral surface 30S of the outer tube 30. The strip-shaped outer electrodes 50A, 50B extending along the lamp axis C are disposed at positions opposite to the lamp axis C. On the other hand, the cylindrical inner electrode 60 has its electrode axis overlapped with the lamp axis C, and is coaxially disposed in the open space 80.

The inner electrode 60 does not contact the inner peripheral surface 40S of the inner tube 40, and the arc tube 20 and the inner electrode 60 are independently mounted. Therefore, the arc tube 20 and the inner electrode 60 can be individually replaced. The arc tube 20 is held by the holding mechanism 16, and the inner electrode 60 is held by the holding mechanism 18.

The outer electrodes 50A, 50B and the inner electrode 60 are connected to the alternating current power supply unit 90. At the time of lighting, a high-frequency high voltage of several kV is applied between the outer electrodes 50A, 50B and the inner electrode 60. Thereby, a corona discharge is generated at the same time as the dielectric discharge.

Fig. 3 is a schematic cross-sectional view showing an excimer lamp in a discharge state at the time of lighting. Now use Figure 3 to explain the discharge state when lighting.

When a high voltage is applied between the outer electrodes 50A, 50B and the inner electrode 60, dielectric discharge occurs between the inner tube 40 and the outer tube 30 of the same dielectric. Since the discharge space 70 is sealed with an inert gas, excimer light of ultraviolet light is generated in the discharge space 70. As a result, ultraviolet light is emitted from the excimer lamp 10 toward the lamp diameter.

On the other hand, since the inner electrode 60 is not in contact with the inner tube 40, a significant unequal electric field is generated between the inner electrode 60 and the inner tube 40 after the high voltage is applied. As a result, a streamer corona discharge occurs between the inner electrode 60 and the inner tube 40 in the open space 80 (in the field of corona discharge space).

Since the open space 80 is in communication with the outside air, ozone is generated from the oxygen in the air by corona discharge. The generated ozone flows out from the tube end 20E1.

The amount of ultraviolet irradiation and the amount of ozone generated depend on the structure of the corona discharge space, the applied voltage, and the like depending on the distance between the inner electrode 60 and the inner tube 40. Here, it is determined by the amount of ultraviolet radiation and the amount of ozone generated by the specifications of the processing device 15 and the like.

Instead of generating ozone by ultraviolet light, ozone is generated by corona discharge. Therefore, it is not necessary to use a part of the amount of ultraviolet radiation for ozone. There is no need to change the amount of ultraviolet radiation to adjust the amount of ozone generated. The amount of ozone generated can be adjusted by appropriately changing the electrode arrangement, the electrode shape, the shape of the arc tube, and the like.

Since the ultraviolet rays do not need to be radiated toward the open space 80, the inner tube 40 is formed by using a material that does not transmit ultraviolet rays, and the ozone is not affected. Further, it is also possible to adopt a structure in which all of the ultraviolet rays are radiated to the outside of the lamp. For example, the surface of the inner tube of the discharge space 70 is mirrored so that all of the generated ultraviolet rays are radiated to the outside of the tube.

According to the present embodiment, in the excimer lamp 10 including the arc tube 20, the outer electrodes 50A and 50B, and the inner electrode 60 including the outer tube 30 and the inner tube 40, the open space 80 of the arc tube 20 is disposed so as not to be in contact with each other. Inner electrode 60. At the time of lighting, the discharge space 70 in the sealed state in the wall of the arc tube 20 is subjected to dielectric discharge to emit ultraviolet rays, and on the other hand, corona discharge occurs between the inner tube 40 and the inner electrode 60 to generate ozone.

Although the open space 80 formed in the arc tube 20 communicates with the outside of the lamp (atmosphere), the present invention is not limited thereto, and an oxygen-containing gas other than the outside of the lamp may be filled in the open space 80, and the lamp outer space existing with the gas may be present. Connected. Further, an electrode (coil electrode) or the like other than the mesh electrode may be disposed.

Next, the excimer lamp of Example 2 will be described using FIG. In the second embodiment, both ends of the discharge tube have an open configuration. The other construction is the same as that of the first embodiment.

Fig. 4 is a schematic cross-sectional view showing the excimer lamp of the second embodiment.

The excimer lamp 100 includes an arc tube 120 composed of an outer tube 130 and an inner tube 140, outer electrodes 150A and 150B, and an inner electrode 160. Outer tube 130 A discharge space 170 is formed between the inner tube 140 and the inner electrode 160 is coaxially disposed in the open space 180 formed in the inner tube 140 in a non-contact manner.

The arc tube 120 is open at both ends. Therefore, at the same time as the ultraviolet light is emitted from the discharge space 170, the ozone generated by the corona discharge is also diffused from both sides of the open space 180. By changing the shape of the arc tube as described above, ozone can be efficiently diffused.

Next, the excimer lamp of Example 3 will be described using FIG. In the third embodiment, the cross-sectional dimension of the inner electrode is larger than that of the first embodiment, and the other structures are the same as those of the first embodiment.

Fig. 5 is a schematic cross-sectional view showing the excimer lamp of the third embodiment.

The excimer lamp 200 includes an arc tube 220 composed of an outer tube 230 and an inner tube 240, outer electrodes 250A and 250B, and an inner electrode 260. A discharge space 270 is formed between the outer tube 230 and the inner tube 240, and the inner electrode 260 is coaxially disposed in the open space 280 formed in the inner tube 240 in a non-contact manner.

As described above, the inner electrode 260 is held independently of the arc tube 220 and is replaceable. Here, the inner electrode different from the inner electrode shown in the first embodiment is provided in accordance with specifications and the like.

The radius P of the columnar inner electrode 260 is only slightly smaller than the radius J of the open space 280, and the distance M between the inner electrode 260 and the inner tube 240 is short. That is to say, the corona discharge space field is very narrow compared to the first embodiment. Therefore, the amount of ozone generated is less than that of the first embodiment.

By selectively arranging such an inner electrode 260, the amount of ozone generated can be suppressed. The diameter of the inner electrode 260 may vary depending on the specifications of the processing apparatus, the operating environment, and the like.

Alternatively, as shown in the second embodiment, both ends of the arc tube may be opened.

Next, the excimer lamp of Example 4 will be described using FIG. In the fourth embodiment, the axial length of the inner electrode is shorter than the axial length of the outer electrode, and the other structure is the same as that of the first embodiment.

Fig. 6 is a schematic cross-sectional view showing the excimer lamp of the fourth embodiment.

The excimer lamp 300 includes an arc tube 320 composed of an outer tube 330 and an inner tube 340, outer electrodes 350A and 350B, and an inner electrode 360. A discharge space 370 is formed between the outer tube 330 and the inner tube 340, and the inner electrode 360 is coaxially disposed in the open space 380 formed in the inner tube 340 in a non-contact manner.

The axial length L of the inner electrode 360 is shorter than the axial length N of the outer electrodes 350A and 350B. therefore. Compared with Example 1, the corona discharge space is narrow, and thus the amount of ozone generation can be suppressed. In addition, the amount of ultraviolet light generated can also be suppressed.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment.

Next, the excimer lamp of Example 5 will be described using FIG. In the fifth embodiment, the cross-sectional shape of the inner electrode is a cross, and the other structures are the same as those of the first embodiment.

Fig. 7 is a schematic plan view of the excimer lamp of Example 5 as seen from the axial direction.

The excimer lamp 400 includes an arc tube 420 composed of an outer tube and an inner tube (all not shown), four outer electrodes 450A to 450D, and an inner electrode 460. A discharge space (not shown) is formed between the outer tube and the inner tube, and the inner electrode 460 is coaxially disposed in the open space 480 formed in the inner tube in a non-contact manner.

The cross section of the inner electrode 460 is formed in a cross shape, and the inner electrode 460 is located at a position where the distance between the cross end portions 460A to 460D and the arc tube 420 is equal to each other and opposite to the outer electrodes 450A to 450D. The corona discharge is generated between the ends 460A to 460D of the inner electrode 460 and the arc tube 420 (inner tube).

The amount of ozone generated can be changed by the cross-sectional shape of such an inner electrode. That is, by changing the distance between the inner electrode and the inner tube in the circumferential direction, the field of corona discharge generation can be changed, and the amount of ozone generated can be adjusted. In addition to the cross shape, the cross-sectional shape can also be applied to various shapes such as a plate shape, a polygonal shape, and an elliptical shape.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment, or the inner electrode may be shortened as shown in the fourth embodiment. Length in the axial direction.

Next, the excimer lamp of Example 6 will be described using FIG. In the sixth embodiment, the insertion length of the inner electrode was changed and adjusted along the axial direction. Other configurations are the same as in the first embodiment.

Fig. 8 is a schematic cross-sectional view showing the excimer lamp of the sixth embodiment.

The excimer lamp 500 includes an arc tube 520 composed of an outer tube 530 and an inner tube 540, outer electrodes 550A and 550B, and an inner electrode 560. A discharge space 570 is formed between the outer tube 530 and the inner tube 540, and the inner electrode 560 is coaxially disposed in the open space 580 formed in the inner tube 540 in a non-contact manner.

The inner electrode 560 is supported in such a manner that a part thereof protrudes outward from the arc tube 520 by a length K. By adjusting the protruding length K of the inner electrode 560, in other words, by changing and adjusting the inner electrode 560 relative to the open space 580 The axial direction insertion length can adjust the amount of ozone generated. Further, the amount of ultraviolet light generated may be adjusted in accordance with the insertion length of the inner electrode 560 in the axial direction.

The adjustment of the position of the inner electrode 560 in the axial direction is permeable, for example, by a holding mechanism (not shown) that can move the inner electrode 560 in the axial direction. In the present embodiment, the axial length of the inner electrode 560 and the axial length of the outer electrodes 550A and 550B match the axial length of the open space 580, but the inner electrode and the outer electrode which are shorter than the length in the open space axis direction may be prepared. The inner electrode is relatively moved within the open space.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment. In this case, the range of variation in the amount of ozone generated can be increased by expanding the range in which the insertion length of the inner electrode is changed.

Alternatively, the diameter of the inner electrode may be changed as shown in the third embodiment, or the axial length of the inner electrode may be shortened as shown in the fourth embodiment, or the sectional shape of the inner electrode may be changed as shown in the fifth embodiment. .

Next, the excimer lamp of Example 7 will be described using FIG. In the seventh embodiment, the cross-sectional shape of the inner electrode changes along the axial direction. Other configurations are the same as in the first and sixth embodiments.

Fig. 9 is a schematic cross-sectional view showing the excimer lamp of the seventh embodiment.

The excimer lamp 600 includes an arc tube 620 composed of an outer tube 630 and an inner tube 640, outer electrodes 650A and 650B, and an inner electrode 660. A discharge space 670 is formed between the outer tube 630 and the inner tube 640, and the inner electrode 660 is coaxially disposed in the open space 680 formed in the inner tube 640 in a non-contact manner.

The inner electrode 660 has a structure in which the electrode portion 660A having a relatively small diameter and the electrode portion 660B having a relatively large diameter are arranged along the axial direction. Inner electrode The 660 is movable along the axis. Therefore, by changing the insertion length of the inner electrode 660, the amount of ozone generated changes in accordance with the ratio of the electrode portion 660A and the electrode portion 660B in the open space 680, so that the amount of ozone generated can be finely adjusted.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment, or the inner electrode may be shortened as shown in the fourth embodiment. The axial direction length, or the cross-sectional shape of the inner electrode can be changed as shown in the fifth embodiment.

Next, the excimer lamp of Example 8 will be described using FIG. In Embodiment 8, the inner electrode has a tapered shape. Other configurations are the same as in the first, sixth, and seventh embodiments.

Fig. 10 is a schematic cross-sectional view showing the excimer lamp of the eighth embodiment.

The excimer lamp 700 includes an arc tube 720 composed of an outer tube 730 and an inner tube 740, outer electrodes 750A and 750B, and an inner electrode 760. A discharge space 770 is formed between the outer tube 730 and the inner tube 740, and the inner electrode 760 is coaxially disposed in the open space 780 formed in the inner tube 740 in a non-contact manner.

The inner electrode 760 is composed of a tapered electrode portion 760A and an electrode portion 760B having a constant radial length. The inner electrode 760 is movable in the axial direction. Therefore, the amount of ozone generation can be finely adjusted by changing the position of the tapered electrode portion 760A.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment, or the inner electrode may be shortened as shown in the fourth embodiment. The length in the axial direction, or the cross-sectional shape of the inner electrode can be changed as shown in the embodiment 5, or can be A tapered portion was formed on the electrode of Example 7.

Next, the excimer lamp of Example 9 will be described using Figs. In Embodiment 9, the inner electrode is a partially movable structure. Other configurations are the same as in the first embodiment.

Fig. 11 is a schematic cross-sectional view showing the excimer lamp of the ninth embodiment. Fig. 12 is a schematic cross-sectional view showing the excimer lamp when the internal electrode is partially moved.

The excimer lamp 800 includes an arc tube 820 composed of an outer tube 830 and an inner tube 840, outer electrodes 850A and 850B, and an inner electrode 860. A discharge space 870 is formed between the outer tube 830 and the inner tube 840, and the inner electrode 860 is coaxially disposed in the open space 880 formed in the inner tube 840 in a non-contact manner.

The inner electrode 860 has a structure in which the electrode core rod 860B passes through the electrode tube 860A, and the electrode tube 860A is slidable relative to the electrode core rod 860B (refer to Fig. 12). Therefore, when the ozone generation amount is adjusted, the insertion length of the inner electrode 860 to the open space 880 can be changed without moving the inner electrode 860 itself in the axial direction.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment, or the inner electrode may be shortened as shown in the fourth embodiment. The length in the axial direction may be changed as shown in the fifth embodiment, or the outer shape of the inner electrode in the axial direction may be changed as shown in the embodiments 8 and 9.

Next, the excimer lamp of Example 10 will be described using FIG. In the tenth embodiment, an auxiliary electrode is provided between the inner electrode and the outer electrode. Other configurations are the same as in the first and sixth embodiments.

Fig. 13 is a schematic cross-sectional view showing the excimer lamp of the tenth embodiment.

The excimer lamp 900 includes an arc tube 920 composed of an outer tube 930 and an inner tube 940, outer electrodes 950A and 950B, and an inner electrode 960. A discharge space 970 is formed between the outer tube 930 and the inner tube 940, and the inner electrode 960 is coaxially disposed in the open space 980 formed in the inner tube 940 in a non-contact manner.

The inner peripheral surface 940S of the inner tube 940 is provided with a pair of strip-shaped auxiliary electrodes 910A and 910B extending in the axial direction. The auxiliary electrodes 910A and 910B are respectively fixed to the inner peripheral surface 940S in contact with the outer electrodes 950A and 950B. The electrodes of the outer electrodes 950A and 950B, the auxiliary electrode 910, and the inner electrode 960 are connected to the power supply unit 990, and the application of a voltage causes electrodes to be different from each other.

A corona discharge is generated between the inner electrode 960 and the auxiliary electrodes 910A, 910B through the auxiliary electrodes 910A, 910B. On the other hand, dielectric discharge occurs between the auxiliary electrode 910 and the outer electrodes 950A, 950B. Therefore, the amount of ozone generated can be adjusted regardless of the state of discharge of the dielectric discharge.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment, or the inner electrode may be shortened as shown in the fourth embodiment. The axial direction length, or the cross-sectional shape of the inner electrode can be changed as shown in the fifth embodiment.

Alternatively, the outer shape of the inner electrode along the axial direction may be changed as shown in the embodiments 7 and 8, or the inner electrode may be partially moved in the axial direction as shown in the embodiment 9.

Next, the excimer lamp of Example 11 will be described using Fig. 14 . In Example 11, the auxiliary electrode was not in contact with the inner tube. Other configurations are the same as in the first, sixth, and tenth embodiments.

Fig. 14 is a schematic cross-sectional view showing the excimer lamp of the eleventh embodiment.

The excimer lamp 1000 includes an arc tube 1020 composed of an outer tube 1030 and an inner tube 1040, outer electrodes 1050A and 1050B, and an inner electrode 1060. A discharge space 1070 is formed between the outer tube 1030 and the inner tube 1040, and the inner electrode 1060 is coaxially disposed in the open space 1080 formed in the inner tube 1040 in a non-contact manner.

The pair of auxiliary electrodes 1010A and 1010B are provided in the open space 1080 of the inner tube 1040, but the auxiliary electrodes 1010A and 1010B are held so as not to be in contact with the inner peripheral surface 1040S of the inner tube 1040. Thereby, corona discharge is generated even between the auxiliary electrodes 1010A, 1010B and the inner tube 1040.

Alternatively, both ends of the arc tube may be opened as shown in the second embodiment, or the diameter of the inner electrode may be changed as shown in the third embodiment, or the inner electrode may be shortened as shown in the fourth embodiment. The axial direction length, or the cross-sectional shape of the inner electrode can be changed as shown in the fifth embodiment.

Alternatively, the outer shape of the inner electrode along the axial direction may be changed as shown in the embodiments 7 and 8, or the inner electrode may be partially moved in the axial direction as shown in the embodiment 9.

As described above, the embodiments 1 to 11 can be combined with each other. Further, any of the embodiments 1 to 11 can be combined with one or any other of the plurality of embodiments within the scope of obtaining the same effect or effect. .

10, 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000‧‧ ‧ excimer lamps

15‧‧‧Processing device

16, 18‧‧‧ Keeping institutions

20, 120, 220, 320, 420, 520, 620, 720, 820, 920, 1020‧‧‧ luminous tubes

20E1, 20E2‧‧‧ tube end

30, 130, 230, 330, 530, 630, 730, 830, 930, 1030‧‧‧ external management

30S‧‧‧ outer perimeter

40, 140, 240, 340, 540, 640, 740, 840, 940, 1040‧‧‧

40S, 940S, 1040S‧‧‧ inner circumference

50A, 50B, 150A, 150B, 250A, 250B, 350A, 350B, 450A, 450B, 450C, 450D, 550A, 550B, 650A, 650B, 750A, 750B, 850A, 850B, 950A, 950B, 1050A, 1050B‧‧ Outer electrode

60, 160, 260, 360, 460, 560, 660, 760, 860, 960, 1060‧‧‧ inner electrodes

70, 170, 270, 370, 570, 670, 770, 870, 970, 1070‧‧ ‧ discharge space

80, 180, 280, 380, 480, 580, 680, 780, 880, 980, 1080‧‧‧ open space

90, 990‧‧‧ AC Power Supply Department

460A, 460B, 460C, 460D‧‧‧ end

660A, 660B, 760A, 760B‧‧‧ electrode parts

860A‧‧‧electrode tube

860B‧‧‧electrode heart stick

910A, 910B‧‧‧ auxiliary electrode

C‧‧‧Light shaft

Fig. 1 is a schematic plan view of the excimer lamp of the first embodiment viewed from the axial direction.

Fig. 2 is a schematic cross-sectional view of the excimer lamp taken along line II-II of Fig. 1.

Fig. 3 is a schematic cross-sectional view showing an excimer lamp in a discharge state at the time of lighting.

Fig. 4 is a schematic cross-sectional view showing the excimer lamp of the second embodiment.

Fig. 5 is a schematic cross-sectional view showing the excimer lamp of the third embodiment.

Fig. 6 is a schematic cross-sectional view showing the excimer lamp of the fourth embodiment.

Fig. 7 is a schematic plan view of the excimer lamp of Example 5 as seen from the axial direction.

Fig. 8 is a schematic cross-sectional view showing the excimer lamp of the sixth embodiment.

Fig. 9 is a schematic cross-sectional view showing the excimer lamp of the seventh embodiment.

Fig. 10 is a schematic cross-sectional view showing the excimer lamp of the eighth embodiment.

Fig. 11 is a schematic cross-sectional view showing the excimer lamp of the ninth embodiment.

Fig. 12 is a schematic cross-sectional view showing the excimer lamp when the internal electrode is partially moved.

Fig. 13 is a schematic cross-sectional view showing the excimer lamp of the tenth embodiment.

Fig. 14 is a schematic cross-sectional view showing the excimer lamp of the eleventh embodiment.

10‧‧‧Excimer lamp

16, 18‧‧‧ Keeping institutions

20‧‧‧Light tube

20E1, 20E2‧‧‧ tube end

30‧‧‧External management

30S‧‧‧ outer perimeter

40‧‧‧Inside

40S‧‧‧ inner circumference

50A, 50B‧‧‧ outer electrode

60‧‧‧ inside electrode

70‧‧‧discharge space

80‧‧‧Open space

90‧‧‧AC Power Supply Department

C‧‧‧Light shaft

Claims (17)

An excimer lamp comprising: an illuminating tube having an outer tube and an inner tube disposed in the outer tube; an outer electrode disposed on an outer peripheral side of the outer tube; and an inner electrode along the axial direction Disposed in an open space formed in the inner tube, wherein a discharge space enclosing a discharge gas is formed between the outer tube and the inner tube, and a dielectric discharge is generated in the discharge space, the inner tube and the inner electrode are not in contact with each other A corona discharge is generated between the inner tube and the inner electrode. The excimer lamp of claim 1, wherein the space area in which the corona discharge is generated can be changed. The excimer lamp according to any one of claims 1 to 2, wherein the position of the inner electrode is changeable in the axial direction. The excimer lamp of any one of claims 1 to 3, wherein the inner electrode is partially inserted into the open space. The excimer lamp according to any one of claims 1 to 2, wherein the inner electrode has an electrode core rod and an electrode tube that is passed through the electrode core rod, and the electrode tube is movable relative to the electrode core rod in the axial direction. . The excimer lamp according to any one of claims 1 to 5, wherein the length of the inner electrode in the axial direction is shorter than the axial length of the outer electrode by a predetermined length. The excimer lamp according to any one of claims 1 to 6, wherein the inner electrode is composed of a plurality of different lengths along the axial direction The number electrode portion is formed. The excimer lamp according to any one of claims 1 to 7, wherein the inner electrode has a conical portion. The excimer lamp according to any one of claims 1 to 8, wherein the inner electrode has a cross-sectional shape of any one of a circular shape, an elliptical shape, a cross shape, a plate shape, and a polygonal shape. The excimer lamp according to any one of claims 1 to 9, further comprising: an auxiliary electrode disposed between the inner tube and the inner electrode. The excimer lamp of claim 10, wherein the auxiliary electrode is disposed on an inner circumferential surface of the inner tube. The excimer lamp of claim 10, wherein the auxiliary electrode is not disposed in contact with the inner tube. The excimer lamp according to any one of claims 1 to 12, wherein only one end portion of the arc tube has an opening. The excimer lamp according to any one of claims 1 to 12, wherein both ends of the arc tube have openings. A processing apparatus comprising: the excimer lamp according to any one of claims 1 to 14 for performing at least one of sterilization, sterilization, sterilization, and washing. A lighting method for a discharge lamp, comprising: an arc tube enclosing a discharge gas; an outer electrode disposed on an outer peripheral side of the arc tube; and an inner electrode disposed on an inner peripheral side of the arc tube Opened In the discharge space, the lighting method of the discharge lamp generates a dielectric discharge in the light-emitting tube by applying a high-frequency voltage between the outer electrode and the inner electrode, wherein the inner electrode is not connected to the light-emitting tube Disposed in a contact state to cause corona discharge in the open space. The lighting method of a discharge lamp according to claim 16, wherein the ozone generation amount is adjusted by changing a space area generated by corona discharge.