201248225 六、發明說明： 【發明所屬之技術領域】 本發明係關於-種光導波體、具備該光導波體之雷射光 照射裝置、及組裝該雷射光照射裝置之方法。 【先前技術】 專利文獻1中記載有將於光束剖面中一方向上較長之雷 射光照射關象物之雷射光照㈣置。該絲所記載之雷 射光照射裝置包括：複數個雷射光源；光纖陣列，其包含 複數條光纖；及光導波體，其包含沿自入射端向出射端之 特定方向延伸之纖芯。 光纖陣列所包含之複數條光纖各自之第丨端與複數個雷 射光源中之任一個光學連接。複數條光纖各自之第2端係 一維地排列《光纖陣列係對自雷射光源入射至光纖之第i 端之光進行導波而將該光自第2端出射。 光導波體包括：纖芯，其沿自入射端向出射端之特定方 向延伸；及包層，其包圍該纖芯。光導波體係於與上述特 定方向垂直之剖面中，相互正交之第1方向及第2方向中的 第1方向上纖芯之寬度較第2方向寬。若自光纖陣列之各光 纖之第2端出射之雷射光一入射至入射端，則光導波體對 該光進行導波並合成從而自出射端作為長條光束出射。 先前技術文獻 專利文獻 專利文獻1:曰本專利特開2007-115729號公報 【發明内容】 162664.doc 201248225 發明所欲解決之問題 專利文獻1中未記載光纖陣列與光導波體之調芯方法， 因此’未記載組裝雷射光照射裝置之方法。然而，作為雷 射光照射裝置之組裝方法考慮有如下方法。首先，使光纖 陣列之複數條光纖各自之第2端與光導波體之入射端相互 地光學耦合。其次，改變複數條光纖與光導波體之相對配 置關係’並且檢測於使光入射至複數條光纖各自之第1端 時自光導波體之出射端出射之光之功率。最後，利用該檢 測出之光之功率成為波峰之相對配置關係將複數條光纖各 自之第2端與光導波體之入射端相互地固定。 然而，本發明者發現此種調芯方法存在精密之調芯較為 困難之情形。於與光纖之纖芯直徑相比光導波體之纖芯之 第2方向之寬度充分地大之情形時，使自光纖之第2端出射 之光入射至光導波體之纖芯較為容易。然而，於與光纖之 纖芯直徑相比光導波體之纖芯之第2方向之寬度較小之情 形（或為相同程度之情形）時，不易使自光纖之第2端出射之 光入射至光導波體之纖芯，且自光纖之第2端出射之光之 一部分入射至光導波體之包層。於此種情形時，自光導波 體之出射端出射且經功率檢測之光不僅包含入射至光導波 體之入射端之纖芯且經導波之光，而且亦包含入射至光導 波體之入射端之包層且到達第2端之光。由此，如上所述 之調芯方法之精密之調芯較為困難。 、本發㈣絲如域叙本發@者之見解及課題認識而 完成者，其目的在於提供一種可容易地進行調芯之雷射光 162664.doc 201248225 照射裝置、較佳地用於此種雷射光照射裝置之光導波體、 及組裝此種雷射光照射裝置之方法。 解決問題之技術手段 本發明之光導波體係對人射至人射端之光進行導波而將 該光自出射端出射者。光導波體包括：纖芯，纟沿自入射 端朝向出射端之特定方向延伸，且於相料特^方向垂直 之剖面中，相互正交之第π向及第2方向中的上述第2方 向上寬度較上述第!方向寬；及包層，其包圍該纖芯。光 導波體係於包層之外周面設置有去除包層模光之包層模光 去除部。 於本發明之光導波體中，於相對於特定方向垂直之剖 面’纖芯亦可為矩形狀’且與第2方向平行之纖芯之邊較 與第1方向平行之纖芯之邊長。於本發明之光導波體中， 層模光去除。亦可為形成於包層之外周面之粗面。 本發明之雷射光照射裝置包括：⑴複數個雷射光源； ()光纖陣列’（3)上述任—之光導波體4纖陣列包含分 別具有第1端及第2端之複數條光纖，且複數條光纖各自之 ^端與複數個雷射光源中之任一個光學連接。光纖陣列 係複數條光纖各自之第2 一維排列’對入射至複數條 、，自之第1端之光進行導波而將該光自第2端出射。於 光導波體中’自複數條光纖各自之第2端出射 射至光導波體之入射端。 尤入 於本發明之雷射光照射裝置中，光導波體之包層模光去 除部亦可為形成於包層之外周面之粗面。於該情形時，雷 162664.doc 201248225 射光照射裝置亦可更包括檢測自粗面向外部散射之光之功 率之受光部。受光部係設置於形成於包層之外周面之粗面 上之入射端附近。 本發明之雷射光照射裝置之組裝方法包括：（1)準備光 纖陣列及光導波體之第丨步驟；（2)檢測自光導波體之出射 端出射之光之功率之第2步驟；（3)將複數條光纖各自之第2 端與光導波體之入射端相互地固定之第3步驟。第1步驟係 準備光纖陣列，並且準備上述任一光導波體，上述光纖陣 列包含複數條光纖，且複數條光纖各自之第2端係一維排 列對入射至複數條光纖各自之第1端之光進行導波而將 該光自第2端出射。第2步驟係首先使光纖陣列之複數條光 纖各自之第2端與光導波體之入射端相互地光學耦合。其 次’改變複數條光纖與光導波體之相對配置關係，並檢測 於使光入射至複數條光纖各自之第丨端時自光導波體之出 射端出射之光之功率。第3步驟係根據第2步驟中檢測之光 之功率成為波♦之相對配置關係，將複數條光纖各自之第 2端與光導波體之入射端相互地固定。 本發明之雷射光照射裝置之組裝方法包括：⑴準備光 纖陣列及光導波體之第丨㈣；⑺檢測自光導波體之包層 之外周面出射之光之功率之第2步驟；（3)將複數條光纖各 自之第2端與光導波體之入射端相互地固定之第3步驟。第 1步驟係準備光纖陣列，並且準備上述任一光導波體，上 述光纖陣列包含複數條光纖，且複數條光纖各自之第2端 係-維排列’對入射至複數條光纖各自之^端之光進行 162664.doc 201248225 導波而將該光自第2端出射。第2步驟係首先使光纖陣列之 複數條光纖各自之第2端與光導波體之入射端相互地光學 耦合。其次，改變複數條光纖與光導波體之相對配置關 係，並檢測於使光入射至複數條光纖各自之第丨端時自光 . ^皮體之包層之外周面出射之光之功率。第3步驟係根據 • 帛2步驟中檢測之光之功率成為波峰之相對配置關係，將 複數條光纖各自之第2端與光導波體之入射端相互地固 定。 本發明之雷射光照射裝置之組裝方法係於第2步驟中， 首先，求出於使光入射至複數條光纖中之任一光纖之 端時於光導波體之入射端反射並返回至該光纖之趵端之 光之波長特性。其次，亦可基於該波長特性調整複數條光 纖各自之第2端與光導波體之入射端之間隔。又，本發明 之雷射光照射裝置之組裝方法係於第2步驟中，首先，對 於複數條光纖中之任2條以上之光纖求出波長特性。其 次’亦可基於該波長特性調整複數條光纖各自之第2端與 光導波體之入射端之間隔。 發明之效果 根據本發明’可容易地對雷射光照射裝置進行調芯並組 裝。 【實施方式】 以下’參照隨附圖式’對料波體、雷射光照射裝置及 雷射光照射裝置之組裝方法詳細地進行說明。於圖式之說 明中，對於相同之要素標註相同之符號，並省略重複之說 162664.doc 201248225 明》於圖中，為方便說明而表示有χγζ正交座標系統。 圖1係表示本實施形態之光導波體10之構成之圖。圖1之 (a)係表不端面’圖1之（1))係表示沿圖1之⑷之I]f線之剖 面。本實施形態之光導波體1〇係對入射至入射端n之光進 行導波而將該光自出射端12出射。光導波體1〇包括：纖芯 13’其沿自入射端u朝向出射端12之特定方向（z方向）延 伸；及包層14，其包圍該纖芯13。光導波體1〇包含石英玻 璃。纖芯13之折射率較包層14之折射率高。 光導波體10係於與特定方向（z方向）垂直之剖面中，相 互正交之第1方向（X方向）及第2方向（γ方向）中的第2方向 (Y方向）上纖芯13之寬度較第i方向（X方向）寬。於與特定 方向（Z方向）垂直之剖面，較佳為纖芯丨3為矩形狀，與第2 方向（Y方向）平行之纖芯13之邊較與第1方向（X方向）平行 之纖芯13之邊長。 光導波體10係於包層14之外周面設置有去除包層模光之 包層模光去除部14a。較佳為該包層模光去除部i4a為形成 於包層14之外周面之粗面。作為包層模光去除部之粗 面係藉由利用包層14之外周面之蝕刻或研磨紙之研磨而形 成。 圖2係表示本實施形態之光導波體1〇之光透過特性之一 例之圖表。圖3係表示本實施形態之光導波體1〇之光透過 特性之一例之曲線。此處’將光導波體10之尺寸設為直徑 5.3 mmxlOO mm(Z方向）’將纖芯13之橫剖面之尺寸設為 〇.〇4 mm(X方向）x4 mm(Y方向）。就包層14之外周面而言， 162664.doc -8 - 201248225 有未形成粗面之情形、藉由姓刻而形成有粗面之情形、及 藉由利用研磨紙之研磨而形成有粗面之情形之3種。用以 於包層14之外周面形成粗面之蝕刻係直接使用FROSTEC公 司製造之石英玻璃用蝕刻材（型式：QE-FG1)之原液作為蝕 刻液，於溫度2 5 °C下進行2小時。姓刻部分既可為包層14 之特定方向（Z方向）之全長亦可為一部分，此處，對全長 100 mm中之中央之70 mm進行蝕刻。 於光導波體10之入射端11，使波長4〇5 nm之光分別入射 至纖芯中央位置、自纖芯中央位置向+γ方向（右方向）相隔 僅1.5 mm之位置 '自纖芯中央位置向_γ方向（左方向）相隔 僅1.5 mm之位置、及分別自該等3個位置向+χ方向相隔之 包層14中之位置。該光係經由纖芯直徑為3〇 μπι且NA(開 口數：numerical aperture)為0.12之光纖而入射至各個位 置。測定自光導波體1〇之出射端12之纖芯π及包層14之兩 者出射之光之功率，並對於各個情形求出透過率。 如由圖2及圖3而明確般，於在包層14之外周面未形成粗 面之情形時’入射至光導波體1〇之入射端U之包層14之光 之大部分自出射端12之包層14出射。相對於此，於形成對 包層14之外周面進行蝕刻而形成粗面之包層模光去除部 14&之情形時，於入射至光導波體10之入射端11之包層14 之光中自出射端12之包層14出射之光之比例為48%以下。 於形成利用研磨紙研磨包層外周面而形成粗面之包層模光 去除部l4a之情形時，於入射至光導波體1〇之入射端之包 層14之光中自出射端12之包層14出射之光之比例為35%以 162664.doc 201248225 下。 如此，於包層14之外周面形成有包層模光去除部14a之 本實施形態之光導波體10係即便於監測自出射端12之纖芯 13及包層14之兩者出射之光之功率之情形時，亦可基於其 監測結果高精度地檢測入射端11中之光入射位置。因此， 可容易地進行與光纖之高精度之調芯。 圖4係表示本實施形態之雷射光照射裝置丨之構成之圖。 本實施形態之雷射光照射裝置丨包括上述本實施形態之光 導波體10。更包括雷射光源20丨〜2 0N、透鏡21广21N、光纖 陣列30及透鏡40。圖4中亦表示有用於調芯時之平台5〇。 此處，N為2以上之整數，後面出現之na〗以上下之整 數。 各雷射光源20n為輸出可見光區域或近紅外區域之波長 之雷射光之光源。各雷射光源2〇n較佳為包含雷射二極 體。各透鏡21„設置於雷射光源2〇n與光纖31n之間❶各透鏡 21„係使自雷射光源20n輸出之雷射光耦合於光纖31"之第i 端之纖芯。 光纖陣列30包含分別具有第i端及第2端之N條光纖 31丨〜31N。各光纖31n之第1端經由透鏡2ln而與雷射光源 光學連接。N條光纖3h〜31N各自之第2端係一維排列。光 纖陣列30係對入射至N條光纖31i〜31n各自之第1端之光進 行導波而將該光自第2端出射。 為將光纖陣列30之N條光纖31l〜3。各自之第2端進行一 維排列，而如亦示於圖5般，固定構件32、33設置於雷射 162664.doc 201248225 光照射裝置1。固定構件32為於相同平面上相互地平行之n 條V槽以一定間距形成之玻璃基板，且於各v槽收納光纖 31n。平板上之固定構件33係固定收納於固定構件32之各V 槽之光纖31n。 如圖4所示，光導波體1〇係使自光纖陣列3〇之n條光纖 31丨~31!^各自之第2端出射之雷射光入射至光導波體1〇之入 射端11，並對該入射之光進行導波從而自出射端12出射。 透鏡40係將光導波體1〇之出射端12中之光之光束分佈成 像於對象物90。只要進行光纖陣列30之各光纖3in之第2端 與光導波體10之入射端11之調芯，則照射至對象物9〇之光 之圖案就會如圖6所示般成為於一方向上較長之線狀。 本實施形態之光導波體10係於包層14之外周面設置有去 除包層模光之包層模光去除部14a。因此，即便人射端u 之光入射至包層14，亦可藉由包層模光去除部i4a而將該 包層模光之大部分向外部出射，因而自出射端12向外部出 射之包層模光很少。 用於調芯時之平台5 0可使光纖陣列3 〇之經一維排列之n 條光纖3 1广3。各自之第2端側相對於光導波體丨〇相對地於 X方向、γ方向及z方向上分別平行移動。平台50可向以z 轴為中心之θζ旋轉方向旋轉移動。藉此，可進行光纖陣列 30之各光纖31η之第2端與光導波體1〇之入射端^之調芯。 以下，對雷射光照射裝置1之調芯方法即組裝方法進行說 明。 圖7係說明本實施形態之雷射光照射裝置之組裝方法之 162664.doc 201248225 第1例之圖。於第1例中，首先於第1步驟準備光纖陣列30 及光導波體10。其次’於第2步驟，使光纖陣列30之N條光 纖31丨〜31N各自之第2端與光導波體1〇之入射端11相互地光 學耦合。於保持該光學耦合之狀態下藉由平台50而改變兩 者間之相對配置關係，並且利用光檢測器61檢測於使光入 射至N條光纖31〗〜3 1N之第1端時自光導波體1〇之出射端12 出射之光之功率。其次，於第3步驟，利用於第2步驟中檢 測之光之功率如圖8所示般成為波峰之相對配置關係，將n 條光纖31!〜31N各自之第2端與光導波體1〇之入射端11相互 地固定。於該第1例中，可由光檢測器61接收自光導波體 10之出射端12出射之所有光，亦可由分光器使自光導波體 10之出射端12出射之光之一部分分支後由光檢測器61接 收。 圖9係說明本實施形態之雷射光照射裝置之組裝方法之 第2例之圖。於第2例中，首先於第1步驟準備光纖陣列3 〇 及光導波體10 ^其次，於第2步驟，使光纖陣列3 〇之n條光 纖31〗〜31>!各自之第2端與光導波體1〇之入射端丨丨相互地光 學耦合。於保持該光學耦合之狀態下藉由平台5〇而改變兩 者間之相對配置關係’並且利用光檢測器（受光部）62檢測 於使光入射至N條光纖31〗〜31N之第1端時自光導波體1〇之 包層14之外周面出射之光之功率。其次，於第3步驟利 用第2步驟中檢測之光之功率如圖1〇所示般成為波谷之相 對配置關係，將N條光纖31广3 1N各自之第2端與光導波體 10之入射端11相互地固定。於該第2例中，隨著向光導波 162664.doc 201248225 體10之出射端12前進’自包層14向外部透出之散射光變 弱’故為了進行高感光度檢測而較佳為將光檢測器62設置 於入射端11附近。只要將光檢測器62安裝於光導波體丨〇， 並將平台50設為自動平台，則自動主動調芯成為可能。 圖11係說明本實施形態之雷射光照射裝置之組裝方法之 第3例之圖》於第3例中’求出於上述第1例或第2例之第2 步驟中’使光入射至N條光纖31〗〜3 1N中之任一光纖之第1 端時於光導波體ίο之入射端η反射並返回至該光纖之第1 端之光之波長特性。基於該波長特性調整Ν條光纖31丨〜31ν 各自之第2端與光導波體1〇之入射端丨丨之間隔。 例如，於第3例中，如圖11所示，使用有寬頻帶光源 71、3 dB轉合器72及頻譜分析儀（spectrum analyzer)73。自 寬頻帶光源71輸出之波長範圍1.2〜1.7 μιη之寬頻帶光係經 由3 dB耦合器72而導入至光纖3 1Ν。來自光導波體1〇之入 射端11之反射回光係經由3 dB耦合器72而由頻譜分析儀73 接收。 此處，將光纖31N及光導波體10各自之折射率設為ηι。 將光纖31N之第2端與光導波體10之入射端11之間之空間之 折射率設為η。將光纖31N之第2端與光導波體1〇之入射端 11之間之距離設為S。將來自光纖31N之出射光之功率設為 Pi。將向光纖31N之反射回光之功率設為ρΓ。此時，由光 纖3 1N之第2端與光導波體10之入射端11所構成之法布裏· 珀羅共振器（fabry perot resonator)之反射特性相對於波長入 由下式表示，如圖12所示’相對於波長λ之變化反覆增 162664.doc -13- 201248225 減。圖12係表示端面間隔8為5〇4〇1之情形時之計算結果。 [數1]201248225 VI. [Technical Field] The present invention relates to an optical waveguide, a laser light irradiation device including the optical waveguide, and a method of assembling the laser irradiation device. [Prior Art] Patent Document 1 describes a laser illumination (four) in which a laser beam that is long in one of the beam sections is irradiated with a laser beam. The laser light irradiation device described in the wire includes: a plurality of laser light sources; an optical fiber array including a plurality of optical fibers; and an optical waveguide body including a core extending in a specific direction from the incident end to the exit end. The respective ends of the plurality of optical fibers included in the optical fiber array are optically coupled to any one of the plurality of laser light sources. The second end of each of the plurality of optical fibers is arranged one-dimensionally. The optical fiber array guides light incident from the laser light source to the i-th end of the optical fiber to emit the light from the second end. The optical waveguide body includes a core extending in a specific direction from the incident end to the exit end, and a cladding surrounding the core. In the optical waveguide system, in the cross section perpendicular to the specific direction, the width of the core in the first direction and the second direction orthogonal to each other is wider than the second direction. When the laser light emitted from the second end of each of the optical fibers of the optical fiber array is incident on the incident end, the optical waveguide guides the light and combines it to be emitted as a long beam from the exit end. PRIOR ART DOCUMENT Patent Document Patent Document 1: JP-A-2007-115729 SUMMARY OF INVENTION Technical Problem 162664.doc 201248225 Problem to be Solved by the Invention Patent Document 1 does not describe a method of aligning an optical fiber array and an optical waveguide. Therefore, the method of assembling the laser light irradiation device is not described. However, as a method of assembling the laser light irradiation device, the following method is considered. First, the second end of each of the plurality of optical fibers of the optical fiber array and the incident end of the optical waveguide are optically coupled to each other. Next, the relative arrangement relationship between the plurality of optical fibers and the optical waveguide body is changed and the power of light emitted from the exit end of the optical waveguide body when light is incident on the first end of each of the plurality of optical fibers is detected. Finally, the second end of each of the plurality of optical fibers and the incident end of the optical waveguide body are fixed to each other by the relative arrangement relationship of the detected light power to the peak. However, the inventors have found that such a aligning method has a situation in which it is difficult to perform precise aligning. When the width of the core of the optical waveguide is sufficiently larger than the core diameter of the optical fiber, it is easier to make the light emitted from the second end of the optical fiber incident on the core of the optical waveguide. However, when the width of the second direction of the core of the optical waveguide is smaller than the core diameter of the optical fiber (or the same degree), it is difficult to cause the light emitted from the second end of the optical fiber to be incident on the optical fiber. The core of the optical waveguide, and a portion of the light emerging from the second end of the optical fiber is incident on the cladding of the optical waveguide. In this case, the light emitted from the exit end of the optical waveguide includes not only the light incident to the core of the incident end of the optical waveguide but also the guided light, and also the incident incident on the optical waveguide. The end of the cladding and the light reaching the second end. Thus, the precision alignment of the alignment method as described above is difficult. The present invention is intended to provide a laser device that can be easily aligned with laser light, 162664.doc 201248225 illumination device, preferably for use in such a mine. A light guide body of a light-emitting device and a method of assembling such a laser light-emitting device. Means for Solving the Problem The optical waveguide system of the present invention conducts a wave that directs light emitted from a person to a human end and emits the light from an exit end. The optical waveguide includes: a core extending in a specific direction from the incident end toward the exit end, and the second direction in the π-direction and the second direction orthogonal to each other in a cross section perpendicular to the phase of the phase The upper width is wider than the first! direction; and the cladding surrounds the core. The optical waveguide system is provided with a cladding mode light removing portion for removing the cladding mode light on the outer peripheral surface of the cladding. In the optical waveguide of the present invention, the core may be rectangular in shape with respect to a plane perpendicular to a specific direction, and the side of the core parallel to the second direction may be longer than the side of the core parallel to the first direction. In the optical waveguide of the present invention, the layer mode light is removed. It may also be a rough surface formed on the outer surface of the cladding. The laser light irradiation device of the present invention comprises: (1) a plurality of laser light sources; () an optical fiber array' (3) the above-mentioned optical waveguide body 4 fiber array includes a plurality of optical fibers each having a first end and a second end, and Each of the plurality of optical fibers is optically coupled to any one of a plurality of laser sources. The optical fiber array is a second one-dimensional array of a plurality of optical fibers. The light is incident on a plurality of beams, and the light from the first end is guided to emit the light from the second end. In the optical waveguide, the second end of each of the plurality of optical fibers is emitted to the incident end of the optical waveguide. In the laser light irradiation apparatus of the present invention, the cladding mode light removing portion of the optical waveguide may be a rough surface formed on the outer peripheral surface of the cladding. In this case, the Ray 162664.doc 201248225 light-emitting device may further include a light-receiving portion that detects the power of light scattered from the thick surface toward the outside. The light receiving portion is provided in the vicinity of the incident end formed on the rough surface of the outer peripheral surface of the cladding. The assembling method of the laser light irradiation device of the present invention comprises: (1) a second step of preparing an optical fiber array and an optical waveguide; (2) a second step of detecting power of light emitted from an exit end of the optical waveguide; (3) A third step of fixing the second end of each of the plurality of optical fibers to the incident end of the optical waveguide. The first step is to prepare an optical fiber array, and prepare any one of the optical waveguides, wherein the optical fiber array includes a plurality of optical fibers, and the second ends of the plurality of optical fibers are arranged in one dimension to each of the first ends of the plurality of optical fibers. The light is guided to emit the light from the second end. In the second step, the second end of each of the plurality of optical fibers of the optical fiber array and the incident end of the optical waveguide are optically coupled to each other. Secondly, the relative arrangement relationship between the plurality of optical fibers and the optical waveguide is changed, and the power of the light emerging from the exit end of the optical waveguide when the light is incident on the respective ends of the plurality of optical fibers is detected. In the third step, the second end of each of the plurality of optical fibers and the incident end of the optical waveguide are mutually fixed, according to the relative arrangement relationship of the power of the light detected in the second step. The assembling method of the laser light irradiation device of the present invention comprises: (1) preparing a second array of the optical fiber array and the optical waveguide; (7) a second step of detecting the power of the light emitted from the outer surface of the cladding of the optical waveguide; (3) A third step of fixing the second end of each of the plurality of optical fibers to the incident end of the optical waveguide. The first step is to prepare an optical fiber array, and prepare any of the optical waveguides, wherein the optical fiber array includes a plurality of optical fibers, and the second ends of the plurality of optical fibers are arranged in a line-dimensional arrangement for each of the plurality of optical fibers. The light is directed to 162664.doc 201248225 to direct the light from the second end. In the second step, the second end of each of the plurality of optical fibers of the optical fiber array and the incident end of the optical waveguide are optically coupled to each other. Secondly, the relative arrangement relationship between the plurality of optical fibers and the optical waveguide is changed, and the power of the light emitted from the outer periphery of the cladding of the sheath is detected when the light is incident on the respective ends of the plurality of optical fibers. In the third step, the second end of each of the plurality of optical fibers and the incident end of the optical waveguide are mutually fixed according to the relative arrangement relationship of the power of the light detected in the step •2. The assembling method of the laser light irradiation device of the present invention is in the second step. First, it is determined that when light is incident on the end of any one of the plurality of optical fibers, it is reflected at the incident end of the optical waveguide and returned to the optical fiber. The wavelength characteristic of the light at the end. Next, the interval between the second end of each of the plurality of optical fibers and the incident end of the optical waveguide may be adjusted based on the wavelength characteristic. Further, in the second step of assembling the laser light irradiation apparatus of the present invention, first, wavelength characteristics are obtained for any two or more of the plurality of optical fibers. Secondly, the interval between the second end of each of the plurality of optical fibers and the incident end of the optical waveguide may be adjusted based on the wavelength characteristic. EFFECTS OF THE INVENTION According to the present invention, the laser light irradiation device can be easily aligned and assembled. [Embodiment] Hereinafter, a method of assembling a wave body, a laser beam irradiation device, and a laser beam irradiation device will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and the description thereof will be omitted. 162664.doc 201248225 ′′, in the drawings, the χγζ orthogonal coordinate system is shown for convenience of explanation. Fig. 1 is a view showing the configuration of the optical waveguide 10 of the present embodiment. Fig. 1(a) shows the end face of Fig. 1 (1), and Fig. 1 shows a section along the line I] f of Fig. 1 (4). In the optical waveguide 1 of the present embodiment, light incident on the incident end n is guided to emit light from the exit end 12. The optical waveguide 1 includes a core 13' extending in a specific direction (z direction) from the incident end u toward the exit end 12; and a cladding 14 surrounding the core 13. The light guide body 1〇 contains quartz glass. The refractive index of the core 13 is higher than the refractive index of the cladding 14. The optical waveguide 10 is in a cross section perpendicular to a specific direction (z direction), and a core 13 in a first direction (X direction) orthogonal to each other and a second direction (Y direction) in a second direction (γ direction) The width is wider than the i-th direction (X direction). Preferably, the core 丨 3 has a rectangular shape in a cross section perpendicular to a specific direction (Z direction), and the side of the core 13 parallel to the second direction (Y direction) is parallel to the first direction (X direction). The side of the core 13 is long. The optical waveguide 10 is provided with a cladding mode light removing portion 14a for removing the cladding mode light on the outer peripheral surface of the cladding layer 14. Preferably, the cladding mode light removing portion i4a is a rough surface formed on the outer peripheral surface of the cladding layer 14. The rough surface of the cladding mode light removing portion is formed by etching using the outer peripheral surface of the cladding layer 14 or grinding of the polishing paper. Fig. 2 is a graph showing an example of light transmission characteristics of the optical waveguide 1 of the present embodiment. Fig. 3 is a graph showing an example of light transmission characteristics of the optical waveguide 1 of the present embodiment. Here, the size of the optical waveguide 10 is set to 5.3 mm x 100 mm (Z direction). The size of the cross section of the core 13 is set to 〇.4 mm (X direction) x 4 mm (Y direction). Regarding the outer peripheral surface of the cladding 14, 162664.doc -8 - 201248225 has a case where no rough surface is formed, a rough surface is formed by a surname, and a rough surface is formed by grinding using a polishing paper. Three kinds of situations. The etching for forming the rough surface on the outer peripheral surface of the cladding layer 14 was carried out by directly using a stock solution of an etching material for quartz glass (type: QE-FG1) manufactured by FROSTEC Co., Ltd. as an etching solution at a temperature of 25 ° C for 2 hours. The portion of the engraved portion may be a full length or a part of the specific direction (Z direction) of the cladding layer 14, and here, 70 mm of the center of the total length of 100 mm is etched. At the incident end 11 of the light guide body 10, light having a wavelength of 4 〇 5 nm is incident on the center of the core, and is separated from the center of the core by a position of only 1.5 mm from the center of the core (the right direction) from the center of the core. The position is separated by a position of only 1.5 mm in the _γ direction (left direction) and a position in the cladding 14 separated from the three positions by the three positions. This light was incident on each position via an optical fiber having a core diameter of 3 μm and a NA (numerical aperture) of 0.12. The power of light emitted from both the core π and the cladding 14 of the exit end 12 of the optical waveguide 1 is measured, and the transmittance is determined for each case. As is clear from FIGS. 2 and 3, when the rough surface is not formed on the outer surface of the cladding 14, the majority of the light incident on the cladding 14 of the incident end U of the optical waveguide 1 is self-exiting. The cladding 14 of 12 exits. On the other hand, in the case of forming the cladding mode light removing portion 14 & which is formed by etching the outer peripheral surface of the cladding layer 14 to form a rough surface, it is incident on the light of the cladding layer 14 of the incident end 11 of the optical waveguide body 10 The ratio of light emitted from the cladding 14 of the exit end 12 is 48% or less. In the case of forming a cladding mode light removing portion 14a that forms a rough surface by polishing the outer peripheral surface of the cladding, the package is incident on the light from the exit end 12 of the cladding 14 incident on the incident end of the optical waveguide 1〇. The ratio of light emitted by layer 14 is 35% to 162664.doc 201248225. As described above, the optical waveguide 10 of the present embodiment in which the cladding mode light removing portion 14a is formed on the outer peripheral surface of the cladding layer 14 is light that is emitted even from both the core 13 and the cladding 14 of the emission end 12 is monitored. In the case of power, the incident position of the light in the incident end 11 can also be detected with high precision based on the result of the monitoring. Therefore, the high-precision alignment with the optical fiber can be easily performed. Fig. 4 is a view showing the configuration of a laser beam irradiation apparatus 本 according to the present embodiment. The laser light irradiation apparatus 本 of the present embodiment includes the optical waveguide 10 of the above-described embodiment. Further, it includes a laser light source 20丨~2 0N, a lens 21 wide 21N, an optical fiber array 30, and a lens 40. Also shown in Fig. 4 is a platform 5 for alignment. Here, N is an integer of 2 or more, and the following is an integer of the above. Each of the laser light sources 20n is a light source that outputs laser light of a wavelength in a visible light region or a near-infrared region. Each of the laser light sources 2〇n preferably includes a laser diode. Each of the lenses 21 is disposed between the laser light source 2〇n and the optical fiber 31n, and the respective lenses 21 are coupled to the core of the i-th end of the optical fiber 31" by the laser light output from the laser light source 20n. The optical fiber array 30 includes N optical fibers 31 丨 31 31 N having an ith end and a second end, respectively. The first end of each of the optical fibers 31n is optically connected to the laser light source via the lens 2ln. The second ends of the N optical fibers 3h to 31N are arranged in one dimension. The optical fiber array 30 guides light incident on the first end of each of the N optical fibers 31i to 31n, and emits the light from the second end. The N fibers 31l to 3 of the optical fiber array 30 are used. The second ends of the respective ones are arranged in one dimension, and as also shown in Fig. 5, the fixing members 32, 33 are disposed on the laser illuminating device 162664.doc 201248225. The fixing member 32 is a glass substrate formed at a constant pitch in n V-grooves which are parallel to each other on the same plane, and accommodates the optical fiber 31n in each of the v-grooves. The fixing member 33 on the flat plate fixes the optical fiber 31n accommodated in each of the V grooves of the fixing member 32. As shown in FIG. 4, the optical waveguide 1 is made to emit laser light emitted from the second ends of the n optical fibers 31 丨 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 The incident light is guided to exit from the exit end 12. The lens 40 distributes the light beam of the light in the exit end 12 of the optical waveguide 1 to the object 90. When the second end of each of the optical fibers 3in of the optical fiber array 30 and the incident end 11 of the optical waveguide 10 are aligned, the pattern of the light that is incident on the object 9 is as shown in FIG. Long line shape. The optical waveguide 10 of the present embodiment is provided with a cladding mode light removing portion 14a for removing the cladding mode light on the outer peripheral surface of the cladding layer 14. Therefore, even if the light of the human end u is incident on the cladding 14, the cladding mode light removing portion i4a can be used to emit most of the cladding mode light to the outside, and thus the package is emitted from the exit end 12 to the outside. There is very little layer mode light. The platform 50 for aligning the cores allows the optical fiber array 3 to be arranged in a one-dimensional array of n fibers 3 1 . The respective second end sides are respectively moved in parallel with respect to the optical waveguide 丨〇 in the X direction, the γ direction, and the z direction. The platform 50 is rotatable in the direction of rotation θ 为 centered on the z-axis. Thereby, the alignment of the second end of each of the optical fibers 31n of the optical fiber array 30 and the incident end of the optical waveguide 1〇 can be performed. Hereinafter, a method of aligning the laser light irradiation apparatus 1 and a method of assembling the same will be described. Fig. 7 is a view showing a first example of the method of assembling the laser beam irradiation apparatus of the embodiment 162664.doc 201248225. In the first example, the optical fiber array 30 and the optical waveguide 10 are first prepared in the first step. Next, in the second step, the second ends of the N optical fibers 31 丨 to 31 N of the optical fiber array 30 are optically coupled to the incident end 11 of the optical waveguide 1 相互. The relative arrangement relationship between the two is changed by the stage 50 while maintaining the optical coupling, and the photodetector 61 detects the self-optical wave when the light is incident on the first end of the N optical fibers 31 ??? 3 1N. The power of the light exiting the exit end 12 of the body. Next, in the third step, the power of the light detected in the second step is a relative arrangement relationship of the peaks as shown in FIG. 8, and the second end of each of the n optical fibers 31! to 31N and the optical waveguide 1〇 The incident ends 11 are fixed to each other. In the first example, all of the light emitted from the exit end 12 of the optical waveguide 10 can be received by the photodetector 61, or a part of the light emitted from the exit end 12 of the optical waveguide 10 can be branched by the spectroscope. The detector 61 receives. Fig. 9 is a view showing a second example of the method of assembling the laser beam irradiation apparatus of the embodiment. In the second example, first, in the first step, the optical fiber array 3 and the optical waveguide 10 are prepared. Secondly, in the second step, the second ends of the optical fibers 31 to 31 are formed. The incident end turns of the optical waveguide 1〇 are optically coupled to each other. The relative arrangement relationship between the two is changed by the stage 5 while maintaining the optical coupling, and the light detector (light receiving portion) 62 detects that light is incident on the first end of the N optical fibers 31 ??? to 31N. The power of light emitted from the outer peripheral surface of the cladding 14 of the optical waveguide 1 时. Next, in the third step, the power of the light detected in the second step is a relative arrangement relationship between the troughs as shown in FIG. 1A, and the N-th optical fiber 31 is widely incident from the second end of each of the optical fibers 31 and the optical waveguide 10 The ends 11 are fixed to each other. In the second example, as the light-transmitting end of the optical waveguide 162664.doc 201248225 body 10 advances, the scattered light that is transmitted from the cladding layer 14 to the outside is weakened, so it is preferable to perform high-sensitivity detection. A photodetector 62 is disposed adjacent the incident end 11. As long as the photodetector 62 is mounted on the optical waveguide body and the platform 50 is set to an automatic platform, automatic active alignment is possible. Fig. 11 is a view showing a third example of the method of assembling the laser beam irradiation apparatus according to the embodiment. In the third example, 'the second step of the first example or the second example is obtained. The wavelength characteristic of light reflected at the incident end η of the optical waveguide ίο and returned to the first end of the optical fiber at the first end of any of the optical fibers 31 ??? to 3 1N. Based on the wavelength characteristics, the distance between the second end of each of the bundled optical fibers 31丨 to 31ν and the incident end of the optical waveguide 1〇 is adjusted. For example, in the third example, as shown in Fig. 11, a wide-band light source 71, a 3 dB switch 72, and a spectrum analyzer 73 are used. The wide-band optical system having a wavelength range of 1.2 to 1.7 μm output from the broadband light source 71 is introduced into the optical fiber 3 1 through the 3 dB coupler 72. The reflected return light from the incident end 11 of the optical waveguide 1 is received by the spectrum analyzer 73 via the 3 dB coupler 72. Here, the refractive index of each of the optical fiber 31N and the optical waveguide 10 is set to ηι. The refractive index of the space between the second end of the optical fiber 31N and the incident end 11 of the optical waveguide 10 is η. The distance between the second end of the optical fiber 31N and the incident end 11 of the optical waveguide 1〇 is set to S. The power of the outgoing light from the optical fiber 31N is set to Pi. The power of the reflected light returned to the optical fiber 31N is set to ρΓ. At this time, the reflection characteristic of the Fabry Perot resonator composed of the second end of the optical fiber 3 1N and the incident end 11 of the optical waveguide 10 is expressed by the following equation with respect to the wavelength. 12 shows a change relative to the wavelength λ, which is increased by 162664.doc -13- 201248225 minus. Fig. 12 is a view showing the calculation results when the end face interval 8 is 5 〇 4 〇 1. [Number 1]
光纖陣列30之第2端與光導波體1〇之入射端i丨之間之端 面間隔S越狹小，兩者間之光耦合效率越高，相對於軸偏 移越強。然而，若於端面間隔8進入異物等之狀態下使光 束振盪，則光纖陣列30或光導波體1〇之端面損傷之風險變 高。因此，較理想的是於光耦合效率不大幅下降之範圍内 隔開端面間隔。於第3例中，可高精度地測定端面間隔s。 可根據反射回光之波長特性求出端面間隔S。 於第3例中，只要對於N條光纖31i〜31n中任2條以上之光 纖，測定反射回光之波長特性並求出端面間隔s，則可以 一維排列之N條光纖31广31N之第2端與光導波體1〇之入射 端Π相互地平行之方式進行調芯。只要對於n條光纖 31 i〜31N中兩端之光纖31丨、31N測定反射回光之波長特性並 求出端面間隔S’則兩者之平行出射之精度提高，故較 佳。作為其結果，可避免於通道間端面間隔S變化而耦合 效率出現差異之情況。 如上，於本實施形態中，藉由於光導波體1〇之包層14之 外周面設置去除包層模光之包層模光去除部14a，而可容 易地對雷射光照射裝置1進行調芯並組裝。 如本實施形態般，於光導波體1〇之包層14之外周面設置 162664.doc •14· 201248225 去除包層模光之包層模光去除部14a，無法根據將光纖之 包層之外周面粗面化之技術而容易地想到。關於此方面於 以下進行說明。 於進行光纖之調芯時進行主動校準（active alignment)。 此時，來自某一第1光纖之出射光耦合於其他第2光纖並進 行強度檢測，故第1光纖中之包層模光於被覆部分被去 除。然而，具有與複數條光纖一維排列之光纖陣列耦合之 長條纖芯的光導波體因纖芯寬度較大，故無法耦合於其他 光纖。因此’只能使來自出射端之出射光直接地耦合於光 檢測器。本發明者發現此種雷射光照射裝置之課題，並想 到於光導波體之包層之外周面設置包層模光去除部之本發 明。 先前’於光導波體之包層之外周面設置包層模光去除部 之必要性較小’因而未產生本發明所欲解決之課題。原因 是即便先前包層模光傳輸光導波體從而自出射端出射，亦 於藉由設置於該出射端之後段之聚光光學系統而限制纖芯 光期間，放射該包層模光，故未產生雷射加工精度等問 題。用於雷射光照射裝置之光導波體與光纖不同，全長較 紐，故不要求具有耐彎曲性等，且無於包層外周形成樹脂 被覆之情況。因此’即便為高功率密度光，亦未產生因包 層模光之漏出而被覆著火等之類的問題點（傳輸高功率密 度光之光纖中之問題點）。因此，並無於包層外周形成粗 面之動機。 如上，如本實施形態般，於光導波體10之包層14之外周 162664.doc -15· 201248225 面設置去除包層模光之包層模光去除部14a無法僅由將光 纖之包層之外周面粗面化之技術容易地想到，又，亦無法 由先前之雷射光照射裝置之構成容易地想到。 產業上之可利用性 根據光導波體、雷射光照射裝置及雷射光照射裝置之組 裝方法’可局精度地檢測光導波體之入射端中之光入射位 置，故可容易地進行光導波體與光纖之高精度之調芯。 【圖式簡單說明】 圖1 (a)、（b)係表示本實施形態之光導波體丨〇之構成之 圖。 圖2係表示本實施形態之光導波體1〇之光透過特性之一 例之圖表。 圖3係表示本實施形態之光導波體1 〇之光透過特性之一 例之曲線。 圖4係表示本實施形態之雷射光照射裝置1之構成之圖。 圖5係表示用以將本實施形態之雷射光照射裝置丨之光纖 陣列30中N條光纖31广31N各自之第2端進行一維排列之構 成之圖。 圖6係表示藉由本實施形態之雷射光照射裝置1而照射至 對象物90之光之強度分佈之圖。 圖7係說明本實施形態之雷射光照射裝置之組裝方法之 第1例之圖。 圖8係表示於本實施形態之雷射光照射裝置之組裝方法 之第1例中由光檢測器61檢測之光之功率分佈之圖。 162664.doc -16- 201248225 圖9係說明本實施形態之雷射光照射裝置之組裝方法之 第2例之圖。 圖10係表示於本實施形態之雷射光照射裝置之組裝方法 之第2例中由光檢測器62檢測之光之功率分佈之圖。 圖11係說明本實施形態之雷射光照射裝置之組裝方法之 第3例之圖。 圖！2係表示包含光纖31n之第2端與光導波體1()之入射端 11之法布裏-站羅共振器之反射特性之圖。 【主要元件符號說明】 1 雷射光照射裝置 10 光導波體 11 入射端 12 出射端 13 纖芯 14 包層 14a 包層模光去除部 201〜2〇n 雷射光源 21i~21n 透鏡 30 光纖陣列 31ι~31N 光纖 32 ' 33 固定構件 40 透鏡 50 平台 61 ' 62 光檢測器 162664.doc -17· 201248225 71 寬頻帶光源 72 3 dB耦合器 73 頻譜分析儀 162664.docThe narrower the end surface spacing S between the second end of the optical fiber array 30 and the incident end i of the optical waveguide 1〇, the higher the optical coupling efficiency between the two, and the stronger the deflection with respect to the axis. However, if the light beam is oscillated while the end face interval 8 enters a foreign matter or the like, the risk of damage to the end faces of the optical fiber array 30 or the optical waveguide 1 变 becomes high. Therefore, it is desirable to separate the end face intervals within a range in which the optical coupling efficiency is not greatly lowered. In the third example, the end surface interval s can be measured with high precision. The end face interval S can be obtained from the wavelength characteristics of the reflected return light. In the third example, as long as the wavelength characteristics of the reflected light return are measured for any two or more of the N optical fibers 31i to 31n, and the end surface spacing s is obtained, the N optical fibers 31 can be arranged one-dimensionally. The two ends are aligned with the incident end turns of the optical waveguide 1〇 in parallel with each other. As long as the wavelength characteristics of the reflected light return are measured for the optical fibers 31 丨 and 31 N at both ends of the n optical fibers 31 i to 31 N and the end surface interval S' is obtained, the accuracy of parallel ejection of both is improved, which is preferable. As a result, it is possible to avoid a difference in coupling efficiency between the end face spacings S between the channels. As described above, in the present embodiment, the laser beam irradiation device 1 can be easily aligned by providing the cladding mode light removing portion 14a for removing the cladding mode light on the outer peripheral surface of the cladding 14 of the optical waveguide 1〇. And assembled. As in the present embodiment, the cladding mode light removing portion 14a for removing the cladding mode light is provided on the outer peripheral surface of the cladding 14 of the optical waveguide 1〇, and cannot be used according to the outer periphery of the cladding of the optical fiber. It is easy to think of the technique of roughening the surface. This aspect will be described below. Active alignment is performed when aligning the fiber. At this time, since the outgoing light from a certain first optical fiber is coupled to the other second optical fibers and the intensity is detected, the cladding mode light in the first optical fiber is removed in the covered portion. However, an optical waveguide having a long core coupled to a fiber array in which a plurality of optical fibers are arranged one-dimensionally has a large core width and cannot be coupled to other optical fibers. Therefore, only the outgoing light from the exit end can be directly coupled to the photodetector. The inventors of the present invention have found the subject of such a laser beam irradiation apparatus, and have conceived the present invention in which a cladding mode light removing portion is provided on the outer peripheral surface of the cladding of the optical waveguide body. In the prior art, it was less necessary to provide a cladding mode light removing portion on the outer surface of the cladding of the optical waveguide body, and thus the problem to be solved by the present invention was not caused. The reason is that even if the cladding optical mode transmits the optical waveguide body and then exits from the exit end, the cladding mode light is emitted during the limitation of the core light by the collecting optical system disposed at the rear end of the exit end, so Problems such as laser processing accuracy. The optical waveguide used in the laser beam irradiation device differs from the optical fiber in that it has a full length, so that it is not required to have bending resistance and the like, and no resin coating is formed on the outer periphery of the cladding. Therefore, even in the case of high-power-density light, there is no problem such as coating of fire due to leakage of the cladding mode light (a problem in an optical fiber transmitting high-power density light). Therefore, there is no incentive to form a rough surface on the outer periphery of the cladding. As described above, as in the present embodiment, the cladding mode light removing portion 14a for removing the cladding mode light is provided on the outer periphery of the cladding layer 14 of the optical waveguide 10, 162664.doc -15·201248225, and the cladding of the optical fiber cannot be used only. The technique of roughening the outer peripheral surface is easily conceived, and it cannot be easily conceived from the configuration of the prior laser light irradiation device. INDUSTRIAL APPLICABILITY According to the optical waveguide body, the laser beam irradiation device, and the assembly method of the laser beam irradiation device, the light incident position in the incident end of the light guide body can be accurately detected, so that the light guide body can be easily performed. High precision alignment of fiber optics. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 (a) and (b) are views showing the configuration of an optical waveguide 丨〇 according to the present embodiment. Fig. 2 is a graph showing an example of light transmission characteristics of the optical waveguide 1 of the present embodiment. Fig. 3 is a graph showing an example of light transmission characteristics of the optical waveguide 1 of the present embodiment. Fig. 4 is a view showing the configuration of the laser beam irradiation apparatus 1 of the embodiment. Fig. 5 is a view showing a configuration in which the second ends of the N optical fibers 31 and 31N in the optical fiber array 30 of the laser light irradiation device of the present embodiment are arranged one-dimensionally. Fig. 6 is a view showing the intensity distribution of light irradiated onto the object 90 by the laser light irradiation device 1 of the present embodiment. Fig. 7 is a view showing a first example of a method of assembling the laser beam irradiation apparatus of the embodiment. Fig. 8 is a view showing the power distribution of light detected by the photodetector 61 in the first example of the method of assembling the laser beam irradiation apparatus of the embodiment. 162664.doc -16- 201248225 Fig. 9 is a view showing a second example of the method of assembling the laser beam irradiation apparatus of the present embodiment. Fig. 10 is a view showing the power distribution of light detected by the photodetector 62 in the second example of the method of assembling the laser beam irradiation apparatus of the embodiment. Fig. 11 is a view showing a third example of the method of assembling the laser beam irradiation apparatus of the embodiment. Figure! 2 shows a reflection characteristic of a Fabry-Syram resonator including the second end of the optical fiber 31n and the incident end 11 of the optical waveguide 1 (). [Description of main components] 1 Laser light irradiation device 10 Optical waveguide 11 Incident end 12 Exit end 13 Core 14 Cladding 14a Cladding mode light removing portion 201~2〇n Laser light source 21i~21n Lens 30 Fiber array 31ι ~31N Fiber 32 ' 33 Fixing member 40 Lens 50 Platform 61 ' 62 Photodetector 162664.doc -17· 201248225 71 Broadband source 72 3 dB coupler 73 Spectrum analyzer 162664.doc