201234412 六、發明說明： 【發明所屬之技術領域】 本發明係關於金屬鹵素燈及金屬鹵素燈點燈裝置。 【先前技術】 於液晶顯示器面板的製造工程中貼合玻璃基板時’作 爲用以使塗佈於玻璃基板與玻璃基板之間的密封劑硬化的 紫外線光源，適合利用金屬鹵素燈。於相關製造工程中’ 使用具備棒狀之金屬鹵素燈與配置於其背面之反射鏡的點 燈裝置。 於圖6揭示此裝置。於燈室60內配置金屬鹵素燈61 。於金屬鹵素燈61的上方配置有反射鏡62，來自燈的放 射光照射至設置於下方的工件W。工件W係如上述般， 於玻璃基板63與玻璃基板64之間塗佈密封劑65者。 於此種用途中，因密封劑65的特性而要求波長300〜 4OOnm範圍的紫外線照射，適合使用將於前述波長帶中可 獲得優良光放射之鐵封入發光管內部的金屬鹵素燈61。 於此金屬鹵素燈中，公知會產生於發光管的內壁附著 鐵而形成薄膜，逐漸地管的透射率降低而無法獲得所定發 光特性之現象，作爲其對策，採用藉由與鐵一起封入鉈或 鉍等的金屬，抑制鐵與發光管（亦即石英玻璃）的反應之 技術。依據此種金屬鹵素燈，能以較長之使用壽命來放射 所希望區域之波長帶的光線。 於專利文獻1揭示有封入鐵的金屬鹵素燈。在此文獻 201234412 所記載之金屬鹵素燈中，爲與水銀、稀有氣體、鐵、鹵素 —起封入鉈、鉍，而發光管內壁每1 cm2的負載超出 2 5W/cm2，以58W/cm2以下點燈之金屬鹵素燈，前述封入 物中，鉍相對於鉈的原子數比Bi/Tl爲1/8〜5/1 »又，進 而前述封入物中，鉈與鉍之克原子數的和，係發光管內容 積每lcm2爲2x1 0·8〜2.5x1 (Γ7。又，相對於鐵、鉈及鉍之 總原子量的鹵素之總原子量爲1.0〜1.4。 以下，更具體舉出專利文獻1所記載之金屬鹵素燈的 規格之一例。 金屬鹵素燈係額定消費電力7kW，發光管的內徑爲 22mm，電極間距離250mm，封入物係金屬水銀260mg， 碘化汞9.1mg’鐵1.3mg，碘化鉈1.2mg，碘化鉍2.9mg， 氙氣2.13xl04Pa(160torr)。亦即，於此金屬鹵素燈中， 鉍相對於鉈的克原子數比Bi/Tl係1.33，鐵與鉈的原子量 比Fe/Tl係6.4 ’鐵與鉍的原子量比Fe/Bi係4.7。再者， 發光管內壁每lcm2的負載係41W/cm2，發光管內容積每 lcm2的鉈與鉍之克原子數的和爲8.5xl(T8。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開平6-275234號公報 [專利文獻2]日本特開2006-035436號公報 [專利文獻3]日本特開2009-05964號公報201234412 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a metal halide lamp and a metal halide lamp lighting device. [Prior Art] When a glass substrate is bonded to a manufacturing process of a liquid crystal display panel, a metal halogen lamp is suitably used as an ultraviolet light source for curing a sealant applied between a glass substrate and a glass substrate. In the relevant manufacturing process, a lighting device with a rod-shaped metal halide lamp and a mirror disposed on the back side is used. This device is disclosed in Figure 6. A metal halide lamp 61 is disposed in the lamp chamber 60. A mirror 62 is disposed above the metal halide lamp 61, and the emitted light from the lamp is irradiated to the workpiece W provided below. The workpiece W is applied to the sealant 65 between the glass substrate 63 and the glass substrate 64 as described above. In such an application, ultraviolet light having a wavelength in the range of 300 to 400 nm is required due to the characteristics of the sealing agent 65, and a metal halide lamp 61 in which iron having excellent light emission in the wavelength band is sealed inside the arc tube is suitably used. In the metal halide lamp, it is known that iron is formed on the inner wall of the arc tube to form a thin film, and the transmittance of the tube is gradually lowered to obtain a predetermined luminescent property. As a countermeasure, it is sealed with iron. Or a metal such as ruthenium, a technique for suppressing the reaction of iron with an arc tube (ie, quartz glass). According to such a metal halide lamp, light of a wavelength band of a desired region can be radiated with a long service life. Patent Document 1 discloses a metal halide lamp in which iron is enclosed. In the metal halide lamp described in Japanese Patent No. 201234412, mercury, rare gas, iron, and halogen are enclosed in 铊 and 铋, and the load per 1 cm 2 of the inner wall of the arc tube exceeds 25 W/cm 2 and is less than 58 W/cm 2 . a metal halide lamp for lighting, in which the atomic ratio of 铋 to 铊 is 1/8 to 5/1 of the enthalpy, and further, in the above-mentioned enclosure, the sum of the gram atoms of ruthenium and osmium, The internal volume of the light-emitting tube is 2x1 0·8 to 2.5x1 per 1 cm 2 (Γ7. Further, the total atomic weight of the halogen relative to the total atomic weight of iron, lanthanum and lanthanum is 1.0 to 1.4. Hereinafter, Patent Document 1 is more specifically described. An example of the specifications of the metal halide lamp is described. The metal halide lamp has a rated power consumption of 7 kW, the inner diameter of the arc tube is 22 mm, the distance between electrodes is 250 mm, the enclosed material is 260 mg of metallic mercury, and the mercury iodide is 9.1 mg 'iron 1.3 mg, iodine. 1.2mg of bismuth oxide, 2.9mg of cesium iodide, and 2.13xl04Pa (160torr) of helium. That is, in this metal halide lamp, the atomic ratio of lanthanum to yttrium is 1.33, and the atomic weight ratio of iron to lanthanum is Fe. /Tl is 6.4 'The atomic weight ratio of iron to bismuth is 4.7 for Fe/Bi. Furthermore, the inner wall of the arc tube is 1 cm2 The load is 41 W/cm 2 , and the sum of the number of yt and yt atoms per 1 cm 2 of the inner volume of the arc tube is 8.5 x 1 (T8. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. Hei 6-275234 [Patent Document 2] JP-A-2006-035436 [Patent Document 3] JP-A-2009-05964
-6- S 201234412 【發明內容】 [發明所欲解決之課題] 近來，在上述之液晶製造工程的製造工程中，以將製 造時所耗之電力量抑制爲較低爲目的，在工件照射時與非 照射時之間切換金屬鹵素燈的輸入電力，降低被照射時的 電力來進行。例如，爲了處理1個工件，對於工件在數十 秒間以比較高的電力使燈點燈，之後，移動照射結束之工 件，到下個工件被搬送來爲止之間，數十秒間遮斷光線的 照射，切換成比較低的電力來點燈。 再者，在此所謂「比較高的電力」係額定消費電力的 約80%以上，「比較低的電力」係相對於額定消費電力.， 約5 0 %以下的電力。 如此，利用所謂虛擬間歇點燈，以省電力來驅動金屬 鹵素燈，並且比燈的ΟΝ/OFF進行切換還要迅速進行燈的 始動性，實現連續處理多數工件。 又進而，於前述金屬鹵素燈中，以彌補燈之點燈時間 的經過所伴隨之照度的降低爲目的，逐漸提升前述之比較 高的電力之數値，實現工件面之照度的一定化。爲此，接 近燈的壽命末期的話，輸入電力會變得更高，不得不在嚴 苛之點燈狀態下點燈。 採用此種點燈方法的結果，相較於先前之點燈方法的 燈，金屬鹵素燈的照度降低更爲明顯，燈的使用壽命也會 減半。 本案發明者們針對產生此種短壽命化之問題進行檢討 201234412 燈在早期發生照度降低之問題係在下模式中發生。 首先，燈的壽命特性係除了上述之點燈方法之外，冷 卻條件也有所相關，冷卻條件不穩定的話’壽命會產生大 幅差異。具體來說，於對工件照射光線的光照射裝置中， 於低電力時爲了遮斷對於搬送中之工件的光線’採用藉由 兼用於反射鏡的光閘機構來遮住光線的手段。例如，如圖 5，於燈10的周圍具備兼用於鏡片的光閘1 2，如（a )照 射時（b )被照射時，進行開閉動作。 另一方面，以謀求燈溫度的一定化爲目的，利用切換 電力値並且改變冷卻用的吹氣機（未圖示）之選轉數來進 行調整，但是，吹氣機係位於燈的上部，因爲光閘被關閉 ，成爲非常難以進行涵蓋燈的全長之溫度調整。尤其，在 此種裝置中，並排多數個燈進行配置來實現面照射，因爲 燈配置（中央與緣部）及光閘的開閉動作及其他要因，燈 容易產生溫度不均。因爲此種溫度不均，燈溫度從超出適 切範圍時，會引起燈的動作異常。 具體來說，過度冷卻的狀況係身爲鹵化物的碘化物之 蒸氣壓降低而引起燈的動作異常，過熱的狀況係容易產生 身爲鹵化物的碘化物與石英玻璃之反應而碘化物會消失。 此種狀況係因爲伴隨液晶面板大型化而燈的發光長度 (電極間距離）變長，發光管的全長也變長，成爲燈之溫 度控制的困難性增加的原因。 在此，本發明所欲解決之課題，其目的係提供將燈的-6-S 201234412 [Problem to be Solved by the Invention] In the manufacturing process of the liquid crystal manufacturing project described above, in order to suppress the amount of electric power consumed during manufacturing, the workpiece is irradiated. The input power of the metal halide lamp is switched between the time of non-irradiation and the electric power at the time of irradiation is lowered. For example, in order to process one workpiece, the lamp is turned on with a relatively high power for several hours, and then the workpiece that has finished the irradiation is moved, and the light is blocked for several tens of seconds until the next workpiece is transported. Illumination, switching to a relatively low power to light up. In addition, the "higher power" is about 80% or more of the rated power consumption, and the "lower power" is about 50% or less of the rated power. In this way, the so-called virtual intermittent lighting is used to drive the metal halogen lamp with power saving, and the start-up property of the lamp is quickly performed to switch the ΟΝ/OFF of the lamp, thereby realizing continuous processing of a large number of workpieces. Further, in the above-described metal halide lamp, in order to compensate for the decrease in the illuminance associated with the elapse of the lighting time of the lamp, the number of relatively high electric powers is gradually increased, and the illuminance of the workpiece surface is made constant. For this reason, the input power will become higher at the end of the life of the lamp, and it will have to be turned on under the severe lighting conditions. As a result of this lighting method, the illuminance of the metal halide lamp is more pronounced and the life of the lamp is halved compared to the lamp of the previous lighting method. The inventors of this case reviewed the problem of such short life. 201234412 The problem of illuminance reduction in the early stage of the lamp occurred in the lower mode. First, the life characteristics of the lamp are related to the above-mentioned lighting method, and the cooling conditions are also related. If the cooling conditions are unstable, the life expectancy will vary greatly. Specifically, in the light irradiation device that irradiates the workpiece with light, in order to block the light to the workpiece being conveyed at the time of low power, a means for blocking the light by the shutter mechanism which is also used for the mirror is employed. For example, as shown in Fig. 5, a shutter 1 2 for a lens is provided around the lamp 10, and when (a) is irradiated (b), an opening and closing operation is performed. On the other hand, in order to achieve a certain temperature of the lamp, the electric power is switched and the number of revolutions of the air blower (not shown) for cooling is changed. However, the air blower is located at the upper portion of the lamp. Because the shutter is closed, it becomes very difficult to adjust the temperature of the full length of the covered lamp. In particular, in such a device, a plurality of lamps are arranged side by side to realize surface illumination, and the lamps are prone to temperature unevenness due to the lamp arrangement (center and edge) and the shutter opening and closing operation and other factors. Because of this uneven temperature, the lamp will malfunction due to the temperature exceeding the appropriate range. Specifically, the state of excessive cooling is such that the vapor pressure of the iodide of the halide is lowered to cause abnormal operation of the lamp, and the state of overheating is likely to cause the reaction of the iodide which is a halide and the quartz glass, and the iodide disappears. . In such a situation, the length of the light emitted from the lamp (the distance between the electrodes) becomes longer as the size of the liquid crystal panel increases, and the entire length of the arc tube also becomes longer, which increases the difficulty in controlling the temperature of the lamp. Here, the object of the present invention is to provide a lamp
-8- S 201234412 點燈狀態，設爲在比較高之電力與比較低之電力之間間歇 性點燈，結果，即使在燈溫度產生差離之狀況中，使用壽 命也比較長的金屬鹵素燈。 [用以解決課題之手段] 本案發明者們係利用使用供給矩形波電壓、電流的電 源來使金屬鹵素燈點燈，發現可使金屬鹵素燈的長度方向 之軸方向的發光分布狀態均一化，進而，考慮包含可使封 入物的量比先前（專利文獻1)更最佳化的可能性，嘗試 針對不被冷卻條件的不均一性所左右，與先前之金屬鹵素 燈不同封入物的最佳範圍進行檢討。 結果，本案發明者們發現鉍（Bi )是即使在燈產生溫 度變化之狀況中，也難以使電弧之狀態變化的物質。Bi即 使在金屬鹵素燈的溫度條件改變之狀況中，也可抑制Fe 與發光管的反應。亦即，利用增加相對於Fe之Bi添加量 ，可抑制Fe與石英的反應，提升照度維持率。另一方面 ，因爲加入過多Bi的話，會招致電極的異常及發光效率 的降低，必須選擇此種副作用不明顯之適切區域。 進而，作爲適合的條件，將相對於鐵、鉈及鉍之總原 子量（ΣΜ)的鹵素之總原子量（ΣΧ)，亦即ΣΧ/ΣΜ 設爲1.6〜2.0的範圍。如此，利用增加封入量，即使有在 產生燈的過熱狀態時會消失之碘化物，也可長期間維持適 切之鹵素循環，可實現燈的長壽命化。 藉由以上發現，於本發明中，設爲具備後述構造之金 201234412 屬鹵素燈及金屬鹵素燈點燈裝置。 (1 )關於第1發明的金屬鹵素燈，係於由石英玻璃 所構成之發光管內部，對向配置有一對的電極，並封入水 銀、稀有氣體、鐵、鉈及鉍，進而封入有至少包含碘之鹵 素所構成的金屬鹵素燈，其特徵爲： 鐵與鉈的原子量比Fe/Tl爲15〜25的範圍， 鐵與鉍的原子量比Fe/Bi爲2〜4的範圍， 鉍與鉈的原子量比Bi/T丨爲5〜10的範圍。 (2)關於第2發明的金屬鹵素燈，係於前述第1金 屬鹵素燈中， 鹵素的總原子量（ΣΧ)，與鐵、鉈及鉍的總原子量 (ΣΜ)的比ΣΧ/ΣΜ爲1.6〜2.0的範圍。 (3 )又，關於本案發明的金屬鹵素燈點燈裝置， 係具備前述第1發明或第2發明之金屬鹵素燈，與對 於此金屬鹵素燈供給電力之供電裝置的金屬鹵素燈點燈裝 置，其特徵爲： 前述供電裝置，係具備恆定電力點燈模式，與以比前 述恆定電力點燈模式還低之電力來供給電流的省電力點燈 模式，且對前述金屬鹵素燈供給矩形波電流者》 [發明的效果] (1 ) 依據關於前述本案第1發明的金屬鹵素燈，利用將T1 及Bi的金屬，作爲抑制Fe所致之發光管的黑化現象的金 -10- 201234412 屬，切換成以Bi爲主體的比例，對於金屬鹵素燈的溫度 爲過冷卻狀態•過熱狀態之任一，皆可維持耐性，可抑制 Fe的損失而將照度維持在高狀態。 (2) 又，依據關於本案第2發明的金屬鹵素燈，因爲相對 於金屬的鹵素之封入量比例較高，故即使有在燈的過熱狀 態產生時會消失之碘化物，也可長期間維持適切之鹵素循 環，可實現燈的長壽命化。 又，依據關於本案第3發明的金屬鹵素燈點燈裝置， 藉由供給矩形波電流、電壓，相較於先前之金屬鹵素燈， 可利用提升鹵素之相對於鐵、鉈及鉍之總和的封入量，消 除溫度變化所致之問題。 【實施方式】 以下，依據實施例來說明本發明的實施形態。 圖1係揭示以管軸方向切斷關於此發明之金屬齒素燈 的基本構造的剖面圖。如同圖所示，金屬鹵素燈（以下也 稱爲燈）10係於由石英玻璃所構成之發光管1內的兩端， 由鎢所構成之一對的電極2以相互對向於管軸方向之方式 配置，經由封止於發光管1之兩端的密封部1 a之由鉬所 構成的金屬箱3 ’電性連接電極2與外部導線4。此燈的 -11 - 201234412 發光管內壁每 1cm2的負載係 35〜125W/cm2 ( 80〜 280冒/(：111)。發光管的全長約600〜80〇111111，電極間距離 約 550 〜750mm。 於此金屬鹵素燈，於發光管的內部，封入有金屬水銀 、碘化汞、鐵、碘化鉈、碘化鉍及作爲稀有氣體的氙氣。 再者，除了前述之碘化物之外，一起封入溴化汞、碘化鐵 亦可。 鐵係爲了獲得主要發光之波長3 00〜4 OOnm之範圍的 紫外光而封入之必須發光物質。 鉈係利用於同區域中獲得發光，並且與鐵一起封入， 抑制構成發光管之石英玻璃與鐵產生反應，擔任抑制發光 管的黑化之作用。 鉍也利用與鐵一起封入而抑制鐵與發光管的反應，與 鉈相同，抑制發光管的黑化。尤其，鉍因爲金屬鹵素燈的 點燈狀態，以所定時間切換高輸入與低輸入來進行點燈， 且在冷卻條件不一定化之狀況下，換句話說，過熱與過冷 卻交互重覆而進行使用之嚴苛狀態下，使電弧的狀態穩定 化’使放電空間內維持鐵與發光管難以反應之狀態。 尤其將鐵（Fe )與鉈（T1 )的原子量比Fe/Tl設爲15 〜25的範圍，將鐵（Fe)與鉍（Bi)的原子量比Fe/Bi設 爲2〜4的範圍。然後，將鉍（Bi)與鉈（T1)的原子量 比’亦即Bi/Tl設爲5〜1 0，利用使相對於鐵之鉍的封入 比例相較於先前之金屬_素燈有所增加，謀求鉍的電弧穩 定化。另一方面，因爲Bi加入過多的話，會招致電極的-8- S 201234412 Light-on state, set to intermittently light between relatively high power and relatively low power. As a result, metal halide lamps with a long service life even in the case where the lamp temperature is different. . [Means for Solving the Problem] The inventors of the present invention have used a power source that supplies a rectangular wave voltage and a current to light a metal halide lamp, and have found that the state of light distribution in the axial direction of the metal halide lamp can be made uniform. Further, it is considered that it is possible to optimize the amount of the encapsulant more than the prior art (Patent Document 1), and it is attempted to be different from the non-uniformity of the uncooled condition, and the best encapsulation is different from the previous metal halide lamp. The scope is reviewed. As a result, the inventors of the present invention have found that bismuth (Bi) is a substance which is difficult to change the state of the arc even in a state where the temperature of the lamp changes. Bi can suppress the reaction of Fe with the arc tube even in the case where the temperature condition of the metal halide lamp is changed. That is, by increasing the amount of Bi added to Fe, the reaction between Fe and quartz can be suppressed, and the illuminance maintenance rate can be improved. On the other hand, since excessive Bi is added, the abnormality of the electrode and the decrease in luminous efficiency are caused, and it is necessary to select an appropriate region in which such side effects are not conspicuous. Further, as a suitable condition, the total atomic weight (ΣΧ) of the halogen relative to the total atomic quantity (ΣΜ) of iron, lanthanum and cerium, that is, ΣΧ/ΣΜ is set to a range of 1.6 to 2.0. By increasing the amount of encapsulation, even if there is an iodide which disappears when the lamp is overheated, a suitable halogen cycle can be maintained for a long period of time, and the life of the lamp can be extended. According to the above findings, in the present invention, a gold 201234412 halogen lamp and a metal halide lamp lighting device having the structure described later are provided. (1) The metal halide lamp according to the first aspect of the invention is characterized in that a pair of electrodes are disposed opposite to each other in an arc tube composed of quartz glass, and mercury, a rare gas, iron, krypton, and xenon are sealed, and at least A metal halide lamp composed of a halogen of iodine, characterized in that the atomic weight ratio of iron to bismuth is in the range of 15 to 25, and the atomic weight ratio of iron to bismuth is in the range of 2 to 4, 铋 and 铊The atomic weight ratio Bi/T丨 is in the range of 5 to 10. (2) The metal halide lamp according to the second aspect of the invention is characterized in that, in the first metal halide lamp, the total atomic weight (ΣΧ) of the halogen and the total atomic weight (ΣΜ) of iron, lanthanum and lanthanum are 1.6/ΣΜ of 1.6~ The scope of 2.0. (3) The metal halide lamp lighting device according to the invention of the present invention, comprising the metal halide lamp of the first invention or the second invention, and the metal halide lamp lighting device for supplying power to the metal halide lamp, The power supply device includes a constant power lighting mode, a power saving lighting mode in which a current is supplied with power lower than the constant power lighting mode, and a rectangular wave current is supplied to the metal halide lamp. [Effects of the Invention] (1) According to the metal halide lamp according to the first aspect of the present invention, the metal of T1 and Bi is used as a genus of gold-10-201234412 which suppresses the blackening phenomenon of the arc tube by Fe. In the case where the temperature of the metal halide lamp is supercooled or overheated, the resistance can be maintained, and the loss of Fe can be suppressed to maintain the illuminance at a high level. (2) In the metal halide lamp according to the second aspect of the present invention, since the ratio of the amount of encapsulation of the halogen with respect to the metal is high, the iodide which disappears even when the lamp is overheated can be maintained for a long period of time. A suitable halogen cycle can achieve long life of the lamp. Further, according to the metal halide lamp lighting device of the third invention of the present invention, by supplying a rectangular wave current and a voltage, it is possible to use a halogen-enhanced sealing with respect to the sum of iron, niobium and tantalum as compared with the prior metal halide lamp. Quantity, eliminating problems caused by temperature changes. [Embodiment] Hereinafter, embodiments of the present invention will be described based on examples. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the basic configuration of a metal gutta lamp according to the invention cut in the tube axis direction. As shown in the figure, a metal halide lamp (hereinafter also referred to as a lamp) 10 is attached to both ends of the arc tube 1 made of quartz glass, and the pair of electrodes 2 made of tungsten are opposed to each other in the tube axis direction. In this manner, the metal case 3' made of molybdenum, which is sealed by the sealing portion 1a at both ends of the arc tube 1, is electrically connected to the electrode 2 and the external lead 4. This lamp -11 - 201234412 The inner wall of the light-emitting tube is 35~125W/cm2 per 1cm2 (80~280//::111). The total length of the light-emitting tube is about 600~80〇111111, and the distance between electrodes is about 550~750mm. In the metal halide lamp, inside the arc tube, metal mercury, mercury iodide, iron, cesium iodide, cesium iodide, and xenon gas as a rare gas are enclosed. Further, in addition to the aforementioned iodide, together It is also possible to enclose mercury bromide or iron iodide. The iron-based luminescent material is enclosed in order to obtain ultraviolet light having a wavelength of mainly illuminating in the range of 300 to 400 nm. The lanthanum is used in the same region to obtain luminescence, and together with iron Sealing, suppressing the reaction between the quartz glass constituting the arc tube and iron, and suppressing the blackening of the arc tube. The crucible is also sealed with iron to suppress the reaction between the iron and the arc tube, and the blackening of the arc tube is suppressed similarly to the crucible. In particular, because of the lighting state of the metal halide lamp, the high input and the low input are switched for a predetermined time to perform lighting, and in the case where the cooling condition is not necessarily, in other words, the overheating and the supercooling are heavy. In a severe state in which the coating is used, the state of the arc is stabilized, and the state in which the iron and the arc tube are hardly reacted in the discharge space is maintained. In particular, the atomic weight ratio of iron (Fe) to strontium (T1) is set to Fe/Tl. In the range of 15 to 25, the atomic weight ratio of Fe (Fe) to bismuth (Bi) is in the range of 2 to 4. Then, the atomic weight ratio of bismuth (Bi) to strontium (T1) is also referred to as Bi/ Tl is set to 5 to 10, and the sealing ratio with respect to the iron is increased as compared with the previous metal-based lamp, and the arc of the crucible is stabilized. On the other hand, since Bi is excessively added, it may cause Electrode
-12- S 201234412 異常及發光效率的降低，故藉由將Fe/Bi設爲4以下， Bi/Tl設爲10以下，使此種副作用不明顯。 又，作爲發光管內部所封入之鹵素，至少封入碘，理 想爲與碘一起封入溴。碘（或碘與溴）的總鹵素原子量（ ΣΧ)係與加上鐵、鉈及鉍的原子量的總原子量（ΣΜ) 比較時，ΣΧ/ΣΜ爲1.6〜2.0的範圍爲佳。 利用具備此種鹵素的總量，相對於金屬之鹵素的封入 量變爲比較大，即使有在產生燈的過熱狀態時會消失之碘 化物，也可長期間維持適切之鹵素循環，故可實現金屬鹵 素燈的長壽命化。 圖2係揭示關於本發明之金屬幽素燈的點燈裝置之一 例的電路區塊圖。 於同圖中，交流電源21的輸出側連接於升壓整流電 路22。升壓整流電路22係例如輸入側爲藉由連接於交流 電源21之升壓變壓器Τ1、整流二極體D1、平流電容器 C 1所構成的整流電路，將交流_電流轉換成直流電壓並加 以輸出。 之後，此直流電壓係利用藉由線圈L 3、交換元件S 1 、整流二極體D2、平流電容器C2所構成之升壓斬波電路 來升壓，輸出被極性逆轉電路23平流化之直流電流。 於升壓斬波電路的交換元件S 1 (例如IGBT、FET ) ，連接控制電路24，藉由使此交換元件S1之開關的頻率 及ΟΝ/OFF期間變化，可供給所希望之電壓。 藉此，可進行投入電力的切換，藉由來自控制電路24 -13- 201234412 的訊號，可將金屬鹵素燈ίο的驅動狀態，切換成對於工 件之照射模式，與工件搬送時之待機模式的兩個模式。 連接於整流電路22的輸出側的極性逆轉電路23，例 如以橋接電路所構成的反相器電路所成，由連接成橋狀之 IGBT、FET等的交換元件Q1〜Q4所構成。極性逆轉電路 23的交換元件Q1〜Q4之ΟΝ/OFF控制係藉由包含於控制 電路25之驅動器電路來驅動。 極性逆轉係藉由交換元件Q1及Q4之驅動訊號的極 性逆轉電路驅動訊號X，與交換元件Q2及Q3之驅動訊號 的極性逆轉電路驅動訊號Y交互重覆ΟΝ/OFF的動作，矩 形波交流電壓被供給至金屬鹵素燈1 〇。 燈的始動動作係從啓動電路26施加脈衝電壓至串聯 連接於燈的啓動線圈L2，藉由絕緣破壞封入至燈之氣體 來進行。 在此，參照之前揭示之圖5，說明金屬鹵素燈點燈裝 置的點燈狀況的話，如圖5 ( a )照射時，（b )被照射時 ，鏡片會進行開閉動作。於圖5 ( a )的照射模式中，例如 供給額定電壓之80%以上的電力來進行點燈，此狀態約持 續1分鐘的話，燈的投入電力會被切換，降低至額定消費 電力之40〜60%程度。同時，如圖5(b)所示，關閉鏡片 ，到搬送來之工件設置於所定位置爲止，保持此狀態。鏡 片關閉之狀態係例如30〜50秒之間。 如此，伴隨鏡片之開閉的冷卻狀態之變化、燈之投入 電力的增減同時發生，金屬鹵素燈係形成電弧難以穩定化 -14--12- S 201234412 Abnormality and luminous efficiency are reduced. Therefore, by setting Fe/Bi to 4 or less and Bi/Tl to 10 or less, such side effects are not obvious. Further, as the halogen enclosed in the inside of the arc tube, at least iodine is sealed, and it is desirable to enclose bromine together with iodine. When the total atomic weight of iodine (or iodine and bromine) is compared with the total atomic weight (ΣΜ) of the atomic weight of iron, cerium and lanthanum, the range of ΣΧ/ΣΜ is preferably 1.6 to 2.0. By using the total amount of such a halogen, the amount of encapsulation of the halogen with respect to the metal becomes relatively large, and even if there is an iodide which disappears when the lamp is overheated, the appropriate halogen cycle can be maintained for a long period of time, so that the metal can be realized. Long life of halogen lamps. Fig. 2 is a circuit block diagram showing an example of a lighting device for a metal-shadow lamp of the present invention. In the same figure, the output side of the AC power source 21 is connected to the boost rectifier circuit 22. The boost rectifier circuit 22 is, for example, a rectifier circuit including a step-up transformer Τ1, a rectifying diode D1, and a smoothing capacitor C1 connected to the AC power source 21, and converts the AC current into a DC voltage and outputs it. . Thereafter, the DC voltage is boosted by a boost chopper circuit composed of a coil L3, a switching element S1, a rectifying diode D2, and a smoothing capacitor C2, and outputs a DC current that is parallelized by the polarity reversing circuit 23. . The switching element S 1 (for example, IGBT or FET) of the boost chopper circuit is connected to the control circuit 24, and the desired voltage can be supplied by changing the frequency and the ΟΝ/OFF period of the switching element of the switching element S1. Thereby, switching of the input power can be performed, and the driving state of the metal halide lamp ίο can be switched to the irradiation mode for the workpiece and the standby mode when the workpiece is conveyed by the signal from the control circuit 24-13-201234412. Modes. The polarity reversal circuit 23 connected to the output side of the rectifier circuit 22 is formed, for example, by an inverter circuit composed of a bridge circuit, and is composed of switching elements Q1 to Q4 such as IGBTs and FETs connected in a bridge shape. The ON/OFF control of the switching elements Q1 to Q4 of the polarity reversing circuit 23 is driven by a driver circuit included in the control circuit 25. The polarity reversal is driven by the polarity of the driving signals of the switching elements Q1 and Q4 to reverse the driving signal X, and the polarity of the driving signals of the switching elements Q2 and Q3 is reversed by the circuit driving signal Y to repeat the ΟΝ/OFF action, the rectangular wave AC voltage It is supplied to the metal halide lamp 1 〇. The starting operation of the lamp is performed by applying a pulse voltage from the start circuit 26 to the start coil L2 connected in series to the lamp, and insulating the gas enclosed in the lamp. Here, referring to Fig. 5 disclosed above, when the lighting condition of the metal halide lamp lighting device is described, when the lens (b) is irradiated as shown in Fig. 5 (a), the lens is opened and closed. In the illumination mode of Fig. 5 (a), for example, power of 80% or more of the rated voltage is supplied for lighting. When the state lasts for about 1 minute, the input power of the lamp is switched to 40 to the rated power consumption. 60%. At the same time, as shown in Fig. 5 (b), the lens is closed, and the workpiece is placed in a predetermined position until the conveyed workpiece is held. The state in which the lens is closed is, for example, between 30 and 50 seconds. As a result, the change in the cooling state of the opening and closing of the lens and the increase or decrease in the input power of the lamp occur simultaneously, and the formation of the arc by the metal halide lamp is difficult to stabilize.
S 201234412 之狀況，藉由封入發光管內部之鉈及鉍的作用，抑制 發光管的反應，謀求燈的長壽命化。 以下，說明本發明的實施例。 [實施例] 依據圖1的構造，製作多數使鐵與鉈的原子 Fe/Tl、鐵與鉍的原子量比Fe/Bi、Bi/Tl的原子量比 並加以封入的金屬鹵素燈。以下記載燈的規格。 發光管：石英玻璃、全長73 0mm (基座間距離） 徑Φ 26.1mm、內徑 2 2 · 5 m m、發光長度（電極間距 600mm、燈輸入 17000W( 280 (W/cm) x60 ( cm )) 電極：鶴 封入物質：以所定比例封入水銀（Hg )、鐵（Fe 碘（I )、鉈（T1 )、鉍（Bi )。水銀（Hg )的封入 0.54 〜0.80mg/cm3，鐵（Fe)的封入量係 0.02mg/cm3 再者，於本實施例中，以Fe/Tl成爲15〜25的範 Fe/Bi成爲2〜4的範圍之方式調整，製作Bi/Tl比不 各種燈。作爲封入物及封入量，將碘化鉈（T1I ) 0.001〜0.009mg/cm3的範圍，將碘化鉍（Bil3)設爲 〜0.11mg/cm3的範圍。 [比較例] 又，作爲比較例，針對發光管及電極的規格，製 前述實施例相同，僅封入物的封入比例變更成後述先 鐵與 量比 不同 '外 離） 量係 圍， 同之 設爲 0.001 作與 前技 -15- 201234412 術的比例之比較例的金屬鹵素燈。 封入組成係水銀（Hg)爲130mg，鐵（Fe)爲5.5mg ，碘化汞（Hgl2)爲23mg，溴化汞（HgBr2)爲lmg，碘 化鉍（Bil3)爲 lmg，氣氣（Xe)爲 50mmHg。 將前述實施例之金屬鹵素燈，使用先前說明之交換電 源，作爲矩形波電流而供給電力，對於額定消費電力，以 A.高電力時爲100%，B.低電力時爲 28%之比，藉由於 A . 5 5秒-B . 3 5秒來切換電力値的間歇點燈使燈點燈。 之後，檢正每小時點燈（老化）後之燈的發光效率與 電極的耗損狀態。又，檢正1 〇〇〇h點燈後的照度維持率。 並彙整此結果，於圖3(表1)揭載》 [發光效率] 發光效率係以相同點燈方法使比較例之金屬鹵素燈點 燈，進行壽命試驗時的發光效率作爲基準’發光效率相同 程度者爲〇，效率明顯降低者爲X。效率提高時則設爲◎ [電極的耗損狀態] 電極的耗損狀態係依據以下基準而目視評估者。 〇係無耗損或些微耗損’幾乎無對發光管之電極物質 飛散所製附著者，X係耗損較大’嚴重發生對發光管之電 極物質飛散所製附著者。 -16 - 201234412 [照度維持率] 照度維持率的評估中，藉由以下基準來附加記號。 相對於初始照度，維持90%以上的照度時爲◎，相對 於初始照度，維持70 %以上的照度時爲〇，相對於初始照 度，未滿7 0 %時爲X。 根據前述結果可知，依據Bi/Tl比爲5〜10的金屬鹵 素燈，關於前述各項目，可確認優良機能。 進而，在Bi/Tl比爲5〜10的金屬鹵素燈中，鹵素的 總原子量（ΣΧ)，與鐵、鉈及鉍的總原子量（ΣΜ)的 比，以Σ X/ Σ Μ標準化，從對發光管之附著物的狀態、電 極表面的耗損狀態、壽命特性之3觀點來進行評估。發光 管之附著物的狀態係燈點燈後經過1 〇〇〇h之附著物的狀態 ，雖然可確認幾乎沒有◎，僅有些許的〇，但是在使用上 並沒有問題之程度，X爲附著物較多而影響照度者。又， 電極的耗損狀態，〇係無耗損或些微耗損，幾乎無對發光 管之電極物質飛散所製附著者’ X係耗損較大，嚴重發生 對發光管之電極物質飛散所製附著者。燈壽命特性係將照 度維持率成爲70%之時間點設爲燈壽命，此爲1 500h以上 者設爲◎，l〇〇〇h以上者設爲〇’未滿1 000h者設爲X。 並於圖4的表2揭示此結果。 根據此結果可明顯得知’依據鹵素的總原子量（Σ X )，與鐵、鉈及鉍的總原子量（Σ Μ )的比Σ X/ Σ Μ爲 1.6〜2.0的範圍之金屬鹵素燈’於發光管的髒汙、電極的 耗損狀態及壽命特性之所有項目中表示優良的結果。 -17- 201234412 【圖式簡單說明】 [圖1]揭示本案之金屬鹵素燈的管軸方向剖面圖。 [圖2]說明金屬鹵素燈之點燈裝置的電路圖。 [圖3]揭示實驗結果的表格。 [圖4]揭示實驗結果的表格。 [圖5]說明製造液晶面板之光照射裝置的光閘開閉狀 態的圖。 [圖6]液晶顯示器面板的製造工程所使用之金屬鹵素 燈點燈裝置的說明圖。 【主要元件符號說明】 1 〇 :金屬鹵素燈 1 :發光管 la :封止部 2 :電極 3 :金屬箔 4 :外部導線棒In the case of S 201234412, the reaction of the arc tube is suppressed by the action of the crucible and the crucible enclosed in the arc tube, and the life of the lamp is prolonged. Hereinafter, embodiments of the invention will be described. [Examples] According to the structure of Fig. 1, a metal halide lamp in which a ratio of atomic weights of Fe/T1, iron and lanthanum of iron and lanthanum to Fe/Bi and Bi/Tl was filled and sealed was prepared. The specifications of the lamp are described below. Luminous tube: quartz glass, full length 73 0mm (distance between pedestals) diameter Φ 26.1mm, inner diameter 2 2 · 5 mm, luminous length (electrode spacing 600mm, lamp input 17000W (280 (W/cm) x 60 (cm)) electrode : Crane sealed material: sealed in the specified proportion of mercury (Hg), iron (Fe iodine (I), strontium (T1), bismuth (Bi). Mercury (Hg) is enclosed in 0.54 ~ 0.80mg / cm3, iron (Fe) In the present embodiment, the amount of the Fe/Tl is 15 to 25, and the Fe/Bi ratio is adjusted to a range of 2 to 4, and the Bi/Tl ratio is not used. The amount of the substance and the amount of the cerium iodide (T1I) was in the range of 0.001 to 0.009 mg/cm3, and the cerium iodide (Bil3) was in the range of ～0.11 mg/cm3. [Comparative Example] Further, as a comparative example, the luminescence was carried out. The specifications of the tube and the electrode are the same as in the above-described embodiment, and only the encapsulation ratio of the encapsulation is changed to the difference between the first iron and the amount ratio, which is described later, and is set to 0.001 as the pre-technology -15-201234412. A metal halide lamp of a comparative example. The encapsulation composition is mercury (Hg) of 130 mg, iron (Fe) of 5.5 mg, and mercury iodide (Hgl2) of 2 3 mg, 1 part of mercury bromide (HgBr2), 1 mg of cesium iodide (Bil3), and 50 mmHg of gas (Xe). The metal halide lamp of the foregoing embodiment was supplied as a rectangular wave current using the previously described exchange power source. Electricity, for rated power consumption, is 100% for A. high power, and 28% for low power, and intermittent lighting for switching power 藉 by A. 5 5 seconds - B. 3 5 seconds After the light is turned on, the luminous efficiency of the lamp after the hourly lighting (aging) and the wear state of the electrode are corrected. Also, the illuminance maintenance rate after the lighting of 1 〇〇〇h is corrected, and the result is summarized. Fig. 3 (Table 1) reveals that [Luminous efficiency] Luminous efficiency is achieved by the same lighting method in which the metal halide lamp of the comparative example is lit, and the luminous efficiency at the time of the life test is used as a reference. The decrease is marked by X. When the efficiency is improved, it is set to ◎ [The state of wear of the electrode] The state of wear of the electrode is visually evaluated according to the following criteria. The system is free of wear or slight loss, and there is almost no scattering of the electrode material of the light-emitting tube. The system is attached, the X system is more expensive. -16 - 201234412 [Illuminance maintenance rate] In the evaluation of the illuminance maintenance rate, the symbol is added by the following reference. When the illuminance is maintained at 90% or more with respect to the initial illuminance, ◎, when the illuminance is 70% or more with respect to the initial illuminance, it is 〇, and when it is less than 70% with respect to the initial illuminance, it is X. According to the above results, it was found that the metal halide lamp having a Bi/Tl ratio of 5 to 10 can be confirmed for each of the above items. Further, in a metal halide lamp having a Bi/Tl ratio of 5 to 10, the ratio of the total atomic weight (ΣΧ) of the halogen to the total atomic weight (ΣΜ) of iron, lanthanum and cerium is standardized by Σ X / Σ , The evaluation was made from the viewpoint of the state of the deposit of the arc tube, the state of wear of the electrode surface, and the life characteristics. The state of the attached matter of the light-emitting tube is a state in which the attached material has passed the light of 1 〇〇〇h after the lamp is turned on. Although it is confirmed that there is almost no ◎, there is only a slight flaw, but the degree of use is not problematic, and X is attached. More people affect the illuminance. Further, in the state of wear of the electrode, there is no loss or slight loss of the lanthanum, and there is almost no wearer of the electrode material scattered by the light-emitting tube, and the X-type wear is large, and the electrode material of the light-emitting tube is scattered. The lamp life characteristic is set to a lamp life when the illuminance maintenance rate is 70%, and is set to ◎ for 1,500 hours or longer, and X for 〇〇〇' or less for less than 1 000h. This result is revealed in Table 2 of FIG. According to this result, it is apparent that the ratio of the total atomic weight of halogen (Σ X ) to the total atomic weight of iron, lanthanum and lanthanum (Σ Μ ) Σ X / Σ Μ is in the range of 1.6 to 2.0. Excellent results were obtained in all items of the contamination of the arc tube, the state of wear of the electrode, and the life characteristics. -17- 201234412 [Simple description of the drawing] [Fig. 1] A cross-sectional view of the metal halide lamp in the tube axis direction of the present invention is disclosed. Fig. 2 is a circuit diagram showing a lighting device of a metal halide lamp. [Fig. 3] A table showing the results of the experiment. [Fig. 4] A table showing the results of the experiment. Fig. 5 is a view for explaining a state in which the shutter of the light-emitting device for manufacturing a liquid crystal panel is opened and closed. Fig. 6 is an explanatory view of a metal halide lamp lighting device used in the manufacturing process of a liquid crystal display panel. [Description of main component symbols] 1 〇 : Metal halide lamp 1 : Light-emitting tube la : Sealing part 2 : Electrode 3 : Metal foil 4 : External wire rod
S -18-S -18-