TW202108506A - Metal halide lamp and UV light illuminating device including a luminous tube and an electrode - Google Patents

Abstract

The subject of the present invention is to suppress deteriorations and ensure necessary illuminance characteristics. In some embodiments, a metal halide lamp includes a luminous tube and an electrode. The luminous tube is filled with rare gases, mercury, iron, thallium iodide and magnesium iodide. The electrode is arranged inside the luminous tube. The filling amount of thallium iodide (A) and the filling amount of magnesium iodide (B) satisfy a relationship of 2.00 ≤ A/B ≤ 3.33.

Description

Metal halide lamp and ultraviolet irradiation device

The embodiment of the present invention relates to a metal halide lamp and an ultraviolet irradiation device.

For example, in the semiconductor exposure step, ultraviolet (ultraviolet, UV) ink or UV coating drying step, resin curing step, etc., in order to use ultraviolet rays for photochemical reactions, a metal halide lamp is used as a light source that emits ultraviolet rays. . [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2014-26845

[The problem to be solved by the invention]

In the metal halide lamp, the arc tube deteriorates due to blackening, and the ultraviolet transmittance of the arc tube may decrease. In addition, if the composition of an enclosure such as a metal or halogen enclosed in the arc tube is changed in order to suppress blackening of the arc tube, the luminous intensity may decrease and the desired illuminance may not be obtained. As described above, there is room for improvement in terms of suppressing deterioration and ensuring necessary illuminance characteristics.

The problem to be solved by the present invention is to provide a metal halide lamp and an ultraviolet irradiation device that can not only suppress deterioration but also ensure necessary illuminance characteristics. [Means to solve the problem]

The metal halide lamp of the embodiment includes an arc tube and an electrode. Enclosed in the luminous tube are rare gases, mercury, iron, thallium iodide and magnesium iodide. The electrode is arranged inside the luminous tube. The enclosed amount A [mg] of thallium iodide and the enclosed amount B [mg] of magnesium iodide satisfy the relationship of 2.00≦A/B≦3.33. [Effects of the invention]

According to the present invention, not only can the deterioration be suppressed, but also the necessary illuminance characteristics can be ensured.

The metal halide lamp 5 of the embodiment described below includes an arc tube 6 and an electrode 7. The arc tube 6 contains rare gases, mercury, iron, thallium iodide, and magnesium iodide. The electrode 7 is provided inside the luminous tube 6. The enclosed amount A [mg] of thallium iodide and the enclosed amount B [mg] of magnesium iodide satisfy the relationship of 2.00≦A/B≦3.33.

In addition, the enclosed amount A [mg] of thallium iodide and the amount C [mg] of halogen enclosed in the arc tube 6 in the embodiment described below satisfy the relationship of 0.12≦A/C≦0.20.

In addition, the ultraviolet irradiation device 1 of the embodiment described below includes a metal halide lamp 5 and a mounting part 3. The assembling part 3 assembles the metal halide lamp 5.

Hereinafter, an embodiment of the present invention will be described based on the drawings. In addition, the embodiments shown below do not limit the technology disclosed in the present invention.

[Implementation] Hereinafter, the metal halide lamp of the embodiment will be described with reference to the drawings. Fig. 1 is a schematic diagram showing a metal halide lamp according to an embodiment. As shown in FIG. 1, the metal halide lamp 5 of the embodiment is mounted on, for example, the mounting part 3 included in the ultraviolet irradiation device 1, and is used, for example, to irradiate an irradiated body such as ink, paint, and adhesive with irradiated light.

The assembling part 3 includes a pair of holding members 4 for holding the metal halide lamp 5, and includes a holding member not shown, which uses the pair of holding members 4 to hold the metal halide lamp 5 The included pair of base members 13 described later are held. The holding member is formed of a conductive metal material, and is electrically connected to a power supply device not shown. The holding member supplies electric power to the metal halide lamp 5 via an external lead 14 which will be described later. In addition, in order to improve the heat dissipation of the base member 13, the holding member may be formed of a material with high thermal conductivity.

(Structure of metal halide lamp) As shown in FIG. 1, the metal halide lamp 5 of the embodiment includes a luminous tube 6, an electrode 7, a sealing portion 11, a heat insulating film 12, a base member 13 and an external lead 14.

The arc tube 6 is formed in a tube shape, and is sealed by sealing portions 11 provided at both ends in the tube axis direction. The arc tube 6 is, for example, quartz glass and transmits ultraviolet rays. In addition, the arc tube 6 has a discharge space 6a inside, and at least metal halide, iron, and mercury are enclosed in the discharge space 6a. The metal halide enclosed in the discharge space 6a contains at least thallium iodide (TlI) and magnesium iodide (MgI ₂ ). If thallium whose vapor pressure is higher than that of iron is enclosed in the arc tube 6, in the lighting of the metal halide lamp 5, the thallium vaporized near the inner wall of the arc tube 6 acts as a buffer material, thereby suppressing The effect of iron adhering or entering the luminous tube 6. In addition, as the halogen of the metal halide enclosed in the discharge space 6a, for example, chlorine, bromine, etc. can be used. In addition, the details of the enclosed component or enclosed amount in the discharge space 6a will be described later.

The electrodes 7 are respectively arranged at both ends of the discharge space 6a of the arc tube 6. Although the electrode 7 is not shown, it includes an electrode shaft and a coil. One end of the electrode shaft faces the discharge space 6a side, and one end is provided in the discharge space 6a. The other end of the electrode shaft is welded and joined to the metal foil described later. The coil is wound around the outer peripheral surface of one end of the electrode shaft, and is arranged in the discharge space 6a. The electrode shaft and the coil are formed of a metal material mainly composed of tungsten, such as thoriated tungsten.

The sealing portion 11 is formed at both ends of the arc tube 6 and seals the discharge space 6a. The sealing portion 11 is a cylindrical shrink seal portion formed by a so-called shrink seal that is sealed by heat shrinking (shrinking the diameter) of both ends of the arc tube 6. In addition, the sealing portion 11 may be formed in a plate shape by a pinch seal.

The thermal insulation film 12 is provided on the outer peripheral surface of both ends of the arc tube 6 and is provided across the outer peripheral surface of the sealing portion 11 from both ends of the discharge space 6a. The heat insulating film 12 is formed of, for example, zirconium oxide (ZrO ₂ ), and heats both ends of the discharge space 6 a of the arc tube 6.

Although not shown, a metal foil is embedded in the sealing portion 11. One end of the metal foil is connected to the other end of the electrode shaft, and the other end is connected to one end of an internal lead (not shown) embedded in the sealing portion 11. The metal foil is, for example, a rectangular molybdenum foil. The inner wire is, for example, a molybdenum rod.

The base members 13 are respectively arranged to cover the outer peripheries of the sealing portions 11 formed at both ends of the arc tube 6 in the tube axis direction, and support the arc tube 6. The base member 13 is joined to the sealing portion 11 of the arc tube 6 with, for example, an adhesive.

The external lead 14 is arranged outside the arc tube 6. One end of the external lead 14 is connected to the other end of the internal lead drawn from the sealing portion 11. One end of the outer lead 14 and the other end of the inner lead are connected via a connecting part (not shown) formed by, for example, welding. Moreover, when the metal halide lamp 5 is mounted on the mounting part 3 of the ultraviolet irradiation device 1, the base member 13 is held by the pair of holding members 4 provided in the mounting part 3, and the external lead 14 and the power supply unit (not shown) connection.

(The enclosed amount of thallium iodide and the enclosed amount of magnesium iodide) Table 1 is a table showing the results of comparing the relationship between the enclosed components and the enclosed amount and the available time. In addition, in Experimental Example 1-1 to Experimental Example 1-5 shown in Table 1, as the metal halide lamp 5, an arc tube 6 with an outer diameter of 26.0 mm, an arc tube 6 with an inner diameter of 22.5 mm, and discharge A lamp in which the volume of the space 6a is 440 cc, the distance between the electrodes 7 is 1095 mm, and the wire diameter of the thorium-containing tungsten electrode shaft constituting the electrode 7 is 3.0 mm. In addition, in Experimental Example 2-1 to Experimental Example 2-5 described later in Table 2, the same metal halide lamp 5 as Experimental Example 1-1 to Experimental Example 1-5 was also used, respectively. [Table 1] project Experimental example 1-1 Experimental example 1-2 Experimental example 1-3 Experimental example 1-4 Experimental example 1-5 Enclosed gas Xe Enclosed air pressure [Pa] 5333 Enclosed ingredients and enclosed amount Mercury iodide [mg] 35 Mercury bromide [mg] 6 Magnesium iodide (B) [mg] 1.5 Iron [mg] 9 Mercury [mg] 56.2 Thallium iodide (A) [mg] 2 3 4 5 6 A[mg]/B[mg] 1.33 2.00 2.67 3.33 4.00 Available time [hr] 2250 3175 4100 5025 5950

In addition, as shown in Table 1, in Experimental Example 1-1 to Experimental Example 1-5, the pressure of the enclosed gas enclosed in the discharge space 6a of the arc tube 6, that is, a kind of rare gas, xenon, and mercury iodide, The enclosed amounts of mercury bromide, magnesium iodide, iron, and mercury were each set to be constant, and metal halide lamps 5 were produced.

On the other hand, as shown in Table 1, in Experimental Example 1-1 to Experimental Example 1-5, the enclosed amount A [mg] of thallium iodide enclosed in the discharge space 6a and the enclosed amount A [mg of thallium iodide ] The ratio (A[mg]/B[mg]) to the enclosed amount of magnesium iodide B[mg] is different, and a lighting test is performed to confirm whether there is a degradation inhibitory effect.

The lighting test is to place an illuminance meter with peak sensitivity to 330 nm to 380 nm on the surface of the arc tube 6 located in the center of the tube axis direction of the arc tube 6 at a position 1 m away from the radial direction of the arc tube 6 ( ORC Manufacturing Co., Ltd.: UV-M03A, illuminance meter head: UV-SD35), and measure the illuminance of the metal halide lamp 5, which is continuously lit with an input density of 80 W/cm, every 1 hour. The elapsed time when the illuminance maintenance rate based on the illuminance at the start of lighting of the metal halide lamp 5 (the lighting time is zero) fell to less than 70% is shown in Table 1 as the "usable time".

As shown in Table 1, when A[mg]/B[mg] is 1.33, the available time ends at 2250 Hr, and the necessary illuminance characteristics cannot be ensured. In contrast, when A[mg]/B[mg] is 2.00 or more, the usable time of the metal halide lamp 5 exceeds 3000 Hr. That is, by setting A[mg]/B[mg] to 2.00 or more, the effect of suppressing deterioration is obtained.

(The enclosed amount of thallium iodide and the enclosed amount of magnesium iodide) Table 2 is a table comparing enclosed components and enclosed amounts. Fig. 2 is a graph showing the result of comparing relative intensities. In addition, in the experimental examples 2-1 to 2-5 shown in Table 2 and FIG. 2, the same metal halide lamps 5 as the lamps used in the experimental examples 1-1 to 1-5 were used, respectively. [Table 2] project Experimental example 2-1 Experimental example 2-2 Experimental example 2-3 Experimental example 2-4 Experimental example 2-5 Enclosed gas Xe Enclosed air pressure [Pa] 5333 Enclosed ingredients and enclosed amount Mercury iodide [mg] 35 Mercury bromide [mg] 6 Magnesium iodide (B) [mg] 1.5 Iron [mg] 9 Mercury [mg] 56.2 61.5 61.9 65.9 66.3 Thallium iodide (A) [mg] 2 3 4 5 6 A[mg]/B[mg] 1.33 2.00 2.67 3.33 4.00 A[mg]/halogen amount C[mg] 0.08 0.12 0.16 0.20 0.23

In addition, as shown in Table 2, in Experimental Example 2-1 to Experimental Example 2-5, the gas pressure of the sealed gas enclosed in the discharge space 6a of the arc tube 6, that is, the gas pressure of xenon, which is a kind of rare gas, is compared with mercury iodide and bromine. The enclosed amounts of mercury, magnesium iodide, iron, and mercury were each set to be constant, and metal halide lamps 5 were produced.

On the other hand, as shown in Table 2, in Experimental Example 2-1 to Experimental Example 2-5, the enclosed amount A [mg] of thallium iodide and the enclosed amount A [mg] of thallium iodide enclosed in the discharge space 6a The ratio (A[mg]/B[mg]) of the enclosed amount B[mg] of magnesium iodide, and the enclosed amount of thallium iodide A[mg] relative to the amount of halogen enclosed in the discharge space 6a C[mg] The ratio (A[mg]/C[mg]) is different, and a lighting test is performed to confirm the presence or absence of the necessary illuminance characteristics.

The lighting test is to place an illuminance meter with peak sensitivity to 330 nm to 380 nm on the surface of the arc tube 6 located in the center of the tube axis direction of the arc tube 6 at a position 1 m away from the radial direction of the arc tube 6 ( ORC Manufacturing Co., Ltd.: UV-M03A, illuminance meter head: UV-SD35), and measure the illuminance immediately after the start of lighting of the metal halide lamp 5, which is lit with an input density of 80 W/cm. In FIG. 2, each is shown as relative intensities based on the illuminance of the metal halide lamp 5 produced in Experimental Example 2-1.

As shown in FIG. 2, when A[mg]/C[mg] is 0.12 or more and 0.20 or less, the relative strength is higher than when A[mg]/C[mg] is 0.08. On the other hand, when A[mg]/C[mg] is 0.23, the relative strength is low compared with the case where A[mg]/C[mg] is 0.08. That is, by setting A[mg]/C[mg] to 0.12 or more and 0.20 or less, the initial illuminance can be increased and the necessary illuminance characteristics can be ensured.

In addition, although the shape of the metal halide lamp 5 was fixed and demonstrated in the said embodiment, it is not limited to this, It can change suitably according to a use.

In addition, in the above embodiment, an example in which a certain amount of mercury iodide or mercury bromide is enclosed in the discharge space 6a has been shown, but it is not limited to this, as long as at least A[mg]/B[mg] of iodine is enclosed Thallium and magnesium iodide are sufficient. That is, the enclosed components different from the components shown in Table 1 or Table 2 may be separated from the enclosed components shown in Table 1 or Table 2, or may be enclosed instead of a part of the enclosed components shown in Table 1 or Table 2.

In addition, in the above-mentioned embodiment, the gas pressure of the enclosed gas or the enclosed amount of iron is fixed and explained, but it is not limited to this, and the enclosed amount can be adjusted according to the required performance.

As described above, the metal halide lamp 5 of the embodiment includes the arc tube 6 and the electrode 7. The arc tube 6 contains rare gases, mercury, iron, thallium iodide, and magnesium iodide. The electrode 7 is provided inside the luminous tube 6. The enclosed amount A [mg] of thallium iodide and the enclosed amount B [mg] of magnesium iodide satisfy the relationship of 2.00≦A/B≦3.33. As a result, not only can the deterioration of the arc tube 6 be suppressed, but also the necessary illuminance characteristics can be ensured.

In addition, the enclosed amount A [mg] of thallium iodide and the amount C [mg] of halogen enclosed in the arc tube 6 satisfy the relationship of 0.12≦A/C≦0.20 in the embodiment. As a result, not only can the deterioration of the arc tube 6 be suppressed, but also the necessary illuminance characteristics can be ensured.

In addition, the ultraviolet irradiation device 1 of the embodiment described below includes a metal halide lamp 5 and a mounting part 3. The assembling part 3 assembles the metal halide lamp 5. As a result, not only can the deterioration of the arc tube 6 be suppressed, but also the necessary illuminance characteristics can be ensured.

Although the embodiment of the present invention has been described, the embodiment is presented as an example and is not intended to limit the scope of the invention. These embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments or their modifications are included in the scope or gist of the invention, and are also included in the invention described in the scope of the invention application and its equivalent scope.

1: Ultraviolet irradiation device 3: Assembly Department 4: Holding member 5: Metal halide lamp 6: luminous tube 6a: discharge space 7: Electrode 11: Sealing part 12: Insulation film 13: Lamp holder components 14: External wire

Fig. 1 is a schematic diagram showing a metal halide lamp according to an embodiment. Fig. 2 is a graph showing the result of comparing relative intensities.

1: Ultraviolet irradiation device

3: Assembly Department

4: Holding member

5: Metal halide lamp

6: luminous tube

6a: discharge space

7: Electrode

11: Sealing part

12: Insulation film

13: Lamp holder components

14: External wire

Claims (3)

A metal halide lamp, including: The luminous tube is enclosed with rare gases, mercury, iron, thallium iodide and magnesium iodide; and The electrode is arranged inside the luminous tube; and The enclosed amount A [mg] of thallium iodide and the enclosed amount B [mg] of magnesium iodide satisfy the relationship of 2.00≦A/B≦3.33. The metal halide lamp according to claim 1, wherein the enclosed amount of thallium iodide A [mg] and the amount of halogen enclosed in the arc tube C [mg] satisfy the relationship of 0.12≦A/C≦0.20. An ultraviolet irradiation device, including: The metal halide lamp as described in claim 1 or claim 2; and The assembling part assembles the metal halide lamp.

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