CN112447491A - Metal halide lamp and ultraviolet irradiation device - Google Patents

Abstract

The invention provides a metal halide lamp and an ultraviolet irradiation device. The invention aims to suppress deterioration and ensure required illuminance characteristics. The metal halide lamp of the embodiment includes a light emitting tube and an electrode. Rare gas, mercury, iron, thallium iodide, and magnesium iodide are sealed in the light-emitting tube. The electrode is arranged inside the luminotron. The amount of thallium iodide sealed A [ mg ] and the amount of magnesium iodide sealed B [ mg ] satisfy a relationship of 2.00. ltoreq. A/B. ltoreq.3.33.

Description

Metal halide lamp and ultraviolet irradiation device

Technical Field

Embodiments of the present invention relate to a metal halide lamp and an ultraviolet irradiation device.

Background

For example, in a semiconductor exposure step, a drying step of Ultraviolet (UV) ink or UV paint, a curing step of resin, or the like, a metal halide lamp is used as a light source for emitting ultraviolet rays in order to perform a photochemical reaction by ultraviolet rays.

[ Prior art documents ]

[ patent document ]

[ patent document 1] Japanese patent application laid-open No. 2014-26845

Disclosure of Invention

[ problems to be solved by the invention ]

In the metal halide lamp, the light-emitting tube may be deteriorated due to blackening, and the ultraviolet transmittance of the light-emitting tube may be decreased. Further, if the composition of the sealed material such as metal or halogen sealed inside the arc tube is changed in order to suppress blackening of the arc tube, the emission intensity may be reduced, and the desired illuminance may not be obtained. As described above, there is room for improvement in terms of suppressing deterioration and ensuring necessary illuminance characteristics.

The present invention addresses the problem of providing a metal halide lamp and an ultraviolet irradiation device that can ensure necessary illumination characteristics while suppressing degradation.

[ means for solving problems ]

The metal halide lamp of the embodiment includes a light emitting tube and an electrode. Rare gas, mercury, iron, thallium iodide, and magnesium iodide are sealed in the light-emitting tube. The electrode is arranged inside the luminotron. The amount of thallium iodide sealed A [ mg ] and the amount of magnesium iodide sealed B [ mg ] satisfy a relationship of 2.00. ltoreq. A/B. ltoreq.3.33.

[ Effect of the invention ]

According to the present invention, not only deterioration can be suppressed, but also necessary illuminance characteristics can be ensured.

Drawings

Fig. 1 is a schematic view showing a metal halide lamp according to an embodiment.

Fig. 2 is a graph showing the results of comparing relative intensities.

[ description of symbols ]

1: ultraviolet irradiation device

3: assembling part

4: holding member

5: metal halide lamp

6: luminous tube

6 a: discharge space

7: electrode for electrochemical cell

11: sealing part

12: heat-insulating film

13: lamp holder component

14: external lead

Detailed Description

The metal halide lamp 5 of the embodiment described below includes an arc tube 6 and an electrode 7. The light-emitting tube 6 is filled with rare gas, mercury, iron, thallium iodide, and magnesium iodide. The electrode 7 is provided inside the light-emitting tube 6. The amount of thallium iodide sealed A [ mg ] and the amount of magnesium iodide sealed B [ mg ] satisfy a relationship of 2.00. ltoreq. A/B. ltoreq.3.33.

In addition, the amount A [ mg ] of thallium iodide sealed and the amount C [ mg ] of halogen sealed in the arc tube 6 in the embodiments described below satisfy a relationship of 0.12 ≦ A/C ≦ 0.20.

The ultraviolet irradiation device 1 of the embodiment described below includes a metal halide lamp 5 and a mounting portion 3. The fitting portion 3 fits the metal halide lamp 5.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments described below do not limit the technology disclosed in the present invention.

[ embodiment ]

The metal halide lamp according to the embodiment will be described below with reference to the drawings. Fig. 1 is a schematic view showing a metal halide lamp according to an embodiment. As shown in fig. 1, the metal halide lamp 5 according to the embodiment is mounted on, for example, a mounting portion 3 included in the ultraviolet irradiation device 1, and is used to irradiate an irradiation target such as ink, paint, or adhesive with irradiation light.

The mounting portion 3 includes a pair of holding members 4 for holding the metal halide lamp 5, and includes a holding member, not shown, for holding a pair of base members 13, described later, included in the metal halide lamp 5 by the pair of holding members 4. The holding member is made of a conductive metal material and is electrically connected to a power supply device, not shown. The holding member supplies electric power to the metal halide lamp 5 via an external lead 14 described later. In addition, the holding member may be formed of a material having high thermal conductivity in order to improve heat dissipation of the cap member 13.

(Structure of Metal halide Lamp)

As shown in fig. 1, the metal halide lamp 5 of the embodiment includes an arc tube 6, an electrode 7, a sealing portion 11, a heat insulating film 12, a base member 13, and an external lead 14.

The arc tube 6 is formed in a tubular shape and is sealed by sealing portions 11 provided at both ends in the tube axis direction. The arc tube 6 is made of, for example, quartz glass and transmits ultraviolet rays. The arc tube 6 has a discharge space 6a therein, and at least metal halide (metal halide), iron, and mercury are sealed in the discharge space 6 a. The metal halide sealed in the discharge space 6a contains at least thallium iodide (TlI) and magnesium iodide (MgI)₂). When thallium having a higher vapor pressure than iron is sealed inside the light-emitting tube 6, thallium evaporated in the vicinity of the inner wall of the light-emitting tube 6 acts as a buffer material during lighting of the metal halide lamp 5, and has the effect of suppressing adhesion or entry of iron into the light-emitting tube 6. As the halogen of the metal halide sealed in the discharge space 6a, chlorine, bromine, or the like can be used, for example. The details of the sealing component and the sealing amount sealed in the discharge space 6a are described later.

The electrodes 7 are provided at both ends of the discharge space 6a of the arc tube 6, respectively. The electrode 7 includes an electrode shaft and a coil, although not shown. One end portion side of the electrode shaft faces the discharge space 6a side, and the one end portion is provided in the discharge space 6 a. The other end of the electrode shaft is welded and joined to a metal foil described later. The coil is wound around the outer peripheral surface of one end of the electrode shaft and is disposed in the discharge space 6 a. The electrode shaft and the coil are formed of a metal material containing tungsten as a main component, for example, thoriated tungsten (thoriated tungsten).

The sealing portions 11 are formed at both ends of the arc tube 6 and seal the discharge space 6 a. The sealed portion 11 is a cylindrical shrunk sealed portion formed by so-called shrink sealing (shrink seal) in which both end portions of the arc tube 6 are sealed by heat shrinkage (diameter reduction). The seal portion 11 may be formed in a plate shape by pinch sealing (pinch seal).

The heat insulating film 12 is provided on the outer peripheral surface of both end portions of the arc tube 6, spanning the outer peripheral surface of the sealing portion 11 from both ends of the discharge space 6 a. The heat insulating film 12 is made of, for example, zirconium oxide (ZrO)₂) And the like, for keeping both ends of the discharge space 6a of the arc tube 6 warm.

Although not shown, a metal foil is embedded in the sealing portion 11. One end of the metal foil is connected to the other end of the electrode shaft, and the other end is connected to one end of an internal lead (not shown) embedded in the sealing portion 11. The metal foil is, for example, a rectangular molybdenum foil. The inner wire is, for example, a molybdenum rod.

The base members 13 are disposed so as to cover the outer peripheries of the sealing portions 11 formed at both ends of the light-emitting tube 6 in the tube axis direction, respectively, and support the light-emitting tube 6. The cap member 13 is bonded to the sealing portion 11 of the arc tube 6 with an adhesive, for example.

The external lead 14 is disposed outside the light-emitting tube 6. One end of the external lead 14 is connected to the other end of the internal lead drawn out from the sealing portion 11. One end of the external lead 14 and the other end of the internal lead are connected to each other via a connection portion (not shown) formed by, for example, welding. When the metal halide lamp 5 is mounted on the mounting portion 3 of the ultraviolet irradiation device 1, the base member 13 is held by the pair of holding members 4 provided on the mounting portion 3, and the external lead 14 is connected to a power supply portion (not shown).

(amount of thallium iodide and magnesium iodide)

Table 1 shows the results of comparison of the sealing components and the relation between the sealing amount and the usable time. In experimental example 1-1 to experimental example 1-5 shown in table 1, the metal halide lamp 5 used was a lamp in which the outer diameter of the light-emitting tube 6 was 26.0mm, the inner diameter of the light-emitting tube 6 was 22.5mm, the volume of the discharge space 6a was 440cc, the distance between the electrodes 7 was 1095mm, and the linear diameter of the thoriated tungsten electrode axis constituting the electrode 7 was 3.0 mm. In experimental example 2-1 to 2-5 described later in table 2, the same metal halide lamps 5 as those used in experimental example 1-1 to 1-5 were used.

[ Table 1]

As shown in table 1, in each of experimental example 1-1 to experimental example 1-5, the metal halide lamp 5 was produced by setting the gas pressure of xenon, which is a kind of rare gas, sealed gas sealed in the discharge space 6a of the arc tube 6 and the sealed amounts of mercury iodide, mercury bromide, magnesium iodide, iron, and mercury to be constant.

On the other hand, as shown in table 1, in experimental example 1-1 to experimental example 1-5, a lighting test was performed with different sealing amounts a [ mg ] of thallium iodide sealed in the discharge space 6a and different ratios (a [ mg ]/B [ mg ]) of the sealing amounts a [ mg ] of thallium iodide to the sealing amount B [ mg ] of magnesium iodide, and the presence or absence of the effect of suppressing deterioration was confirmed.

In the lighting test, an illuminometer (manufactured by Ouche (ORC): UV-M03A, illuminometer head: UV-SD35) having a peak sensitivity of 330nm to 380nm was disposed at a position 1M away from the light-emitting tube 6 in the radial direction from the surface of the light-emitting tube 6 located at the center of the light-emitting tube 6 in the tube axis direction, and the illuminance of the metal halide lamp 5 continuously lit at an input density of 80W/cm was measured every 1 hour. The elapsed time when the illuminance maintenance rate based on the illuminance at the start of lighting of the metal halide lamp 5 (lighting time is zero) was decreased to less than 70% is shown in table 1 as "available time".

As shown in Table 1, when A [ mg ]/B [ mg ] is 1.33, the usable time is 2250Hr, and the required illuminance characteristic cannot be ensured. On the other hand, when A mg/B mg is 2.00 or more, the usable time of the metal halide lamp 5 exceeds 3000 Hr. That is, it is shown that the effect of suppressing deterioration is obtained by setting A [ mg ]/B [ mg ] to 2.00 or more.

(amount of thallium iodide and magnesium iodide)

Table 2 is a table comparing the sealing components and the sealing amounts. Fig. 2 is a graph showing the results of comparing relative intensities. In experimental example 2-1 to 2-5 shown in table 2 and fig. 2, the same metal halide lamps 5 as those used in experimental example 1-1 to 1-5 were used.

[ Table 2]

As shown in table 2, in each of experimental example 2-1 to experimental example 2-5, the metal halide lamp 5 was produced with the gas pressure of xenon, which is a kind of rare gas, sealed gas sealed in the discharge space 6a of the arc tube 6, and the sealed amounts of mercury iodide, mercury bromide, magnesium iodide, iron, and mercury, respectively, being constant.

On the other hand, as shown in table 2, in experimental example 2-1 to experimental example 2-5, the lighting test was performed to confirm the presence or absence of the required illuminance characteristic by making the ratio (a [ mg ]/B [ mg ]) of the amount a [ mg ] of thallium iodide sealed in the discharge space 6a, the ratio (a [ mg ]/B [ mg ]) of the amount a [ mg ] of thallium iodide sealed relative to the amount B [ mg ] of magnesium iodide sealed, and the ratio (a [ mg ]/C [ mg ]) of thallium iodide sealed relative to the amount C [ mg ] of halogen sealed in the discharge space 6a different, respectively.

The lighting test was conducted by placing an illuminometer having a peak sensitivity to 330nm to 380nm (manufactured by Ouche (ORC): UV-M03A, illuminometer head: UV-SD35) at a position 1M away from the light-emitting tube 6 in the radial direction from the surface of the light-emitting tube 6 located at the center of the light-emitting tube 6 in the tube axis direction, and measuring the illuminance immediately after the start of lighting of the metal halide lamp 5 lighted at an input density of 80W/cm. Fig. 2 shows the relative intensity of the metal halide lamp 5 produced in experimental example 2-1 with reference to the illuminance.

As shown in FIG. 2, when A [ mg ]/C [ mg ] is 0.12 or more and 0.20 or less, the relative strength is higher than that when A [ mg ]/C [ mg ] is 0.08. On the other hand, when A [ mg ]/C [ mg ] is 0.23, the relative strength is lower than that when A [ mg ]/C [ mg ] is 0.08. That is, setting A [ mg ]/C [ mg ] to 0.12 or more and 0.20 or less enables the initial illuminance to be increased and the necessary illuminance characteristic to be ensured.

In the above embodiment, the shape of the metal halide lamp 5 is fixed, but the shape is not limited to this, and can be changed as appropriate depending on the application.

In the above-described embodiment, an example in which a certain amount of mercury iodide or mercury bromide is sealed in the discharge space 6a has been shown, but the present invention is not limited thereto, and at least thallium iodide and magnesium iodide of a [ mg ]/B [ mg ] may be sealed. That is, the encapsulating component different from the components shown in table 1 or table 2 may be encapsulated separately from the encapsulating components shown in table 1 or table 2 or instead of a part of the encapsulating components shown in table 1 or table 2.

In the above-described embodiment, the gas pressure of the enclosed gas or the enclosed amount of iron is fixed, but the present invention is not limited thereto, and the enclosed amount can be adjusted according to the required performance.

As described above, the metal halide lamp 5 of the embodiment includes the arc tube 6 and the electrode 7. The light-emitting tube 6 is filled with rare gas, mercury, iron, thallium iodide, and magnesium iodide. The electrode 7 is provided inside the light-emitting tube 6. The amount of thallium iodide sealed A [ mg ] and the amount of magnesium iodide sealed B [ mg ] satisfy a relationship of 2.00. ltoreq. A/B. ltoreq.3.33. This can ensure necessary illuminance characteristics while suppressing deterioration of arc tube 6.

In addition, the amount A [ mg ] of thallium iodide sealed and the amount C [ mg ] of halogen sealed in the arc tube 6 satisfy a relationship of 0.12. ltoreq. A/C. ltoreq.0.20. This can ensure necessary illuminance characteristics while suppressing deterioration of arc tube 6.

The ultraviolet irradiation device 1 of the embodiment described below includes a metal halide lamp 5 and a mounting portion 3. The fitting portion 3 fits the metal halide lamp 5. This can ensure necessary illuminance characteristics while suppressing deterioration of arc tube 6.

Although the embodiments of the present invention have been described, the embodiments are presented as examples, and are not intended to limit the scope of the invention. These embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the invention described in the claims and the equivalent scope thereof.

Claims (3)

1. A metal halide lamp comprising:

a light emitting tube in which rare gas, mercury, iron, thallium iodide, and magnesium iodide are sealed; and

an electrode disposed inside the light emitting tube; and is

The amount of thallium iodide sealed A [ mg ] and the amount of magnesium iodide sealed B [ mg ] satisfy a relationship of 2.00. ltoreq. A/B. ltoreq.3.33.

2. The metal halide lamp of claim 1,

the amount of thallium iodide sealed A [ mg ] and the amount of halogen sealed in the arc tube C [ mg ] satisfy a relationship of 0.12. ltoreq. A/C. ltoreq.0.20.

3. An ultraviolet irradiation apparatus comprising:

the metal halide lamp of claim 1 or 2; and

a fitting portion that fits the metal halide lamp.

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