TW201226309A - Micro-pump - Google Patents

Abstract

The present invention relates to a micro-pump for conveying a work fluid comprising: a vibrating chamber for containing the work fluid; an inlet and an outlet respectively communicated with the vibrating chamber for providing the work fluid entering the vibrating chamber via the inlet and flowing out of the vibrating chamber via the outlet; and a first flow pattern developing region having a flow pattern developing space for the work fluid to develop its flow pattern, where the vibrating chamber is communicated with the inlet and the outlet via the first flow pattern developing region.

Description

201226309 VI. Description of the invention: [Technical field to which the invention pertains] The present invention refers to a kind of non-dispensing micro-push, especially - a thief without a reading micro-[previous technique] Can be divided into two types: face and non-mechanical. The biggest advantage of mechanical micro-help is limited by special red fluid, which depends on the actuator ___ each design; the surface-type gang is based on the nature of its working fluid, such as electrophoresis, electro-osmosis The formula is only _ with a charge or a polar molecule X for the seam, which is low, usually requires a large working voltage. Other micro-pulls such as bubble type, magnetic power type, etc. There are restrictions on its application. In the mechanical micro-pump, the film displacement type (referred to as the thin film type) accounts for the majority of the 'mainstream of the current research. If the literature and patent search for the micro-pull navigation parts and valves, it can be found that "Electric" is the field of production and research in various types of actuators. If the type depends on the type, the piezoelectric micro-pull can be divided into two categories: "existing type" and "no valve type". It can be divided into two types: silk with _ with passive width, _ in the near scale has been riding a man», the light research has been trending towards f°, and the number of patent-free pieces without valve is less than other valves. Type, but because of its simple structure: 'No = parts and no need to consume energy and no, blocking and other issues, has become the mainstream of academic research in recent years' shows that the valveless micro-pull is still in the nascent development period, with high development The space of sex and invention. The valveless pump of the diffuser/nozzle geometry proposed by Stemme et al., US Patent No. US62〇329i, et al. (Tu Zhikai, “New Type No Valve 201226309 Micro-Pulse Development” The Master's thesis of the Institute of Applied Mechanics, National Taiwan University, 2004) also proposes a one-piece valveless micro-pull design. In 2005, Ng et al., Singapore, proposed the use of a wing shape in US Patent No. US691〇869. The airfoil) is used for the design of the pump runner, and in 2006 Izzo et al. (Ivano l2zo, Dino Accoto, Arianna Menciassi, Lothar Schmitt, Paolo Dario, <{Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves^, Sensors and Actuators A-Physical, Vol. L33: 128-140, 2007) Changing the geometry of the diffuser/nozzle' allows fluid directivity to be improved. In the same year, Y〇on et al. (jae Sung Yoon, Jong Won Choi, II Hwan Lee, Min Soo Kim, eiA valveless micropump for bidirectional applications", Sensors and Actuators A-Physical, Vol.  135: 833-838, 2〇07) proposes another innovative valveless design and proposes that this pump has dual-direction fluidity. It is clear from the above literature that the study of valveless pumps is currently very popular. Theme of. At present, the valveless micro-pull can be mainly divided into the following four categories: (1) Nozzle/diffuser: the difference between the smaller flow resistance (forward) and the larger flow resistance (reverse) with divergence, The net flow rate, which accounts for about 6〇% of the valveless micro-pull design, is currently the main valveless research theme. (2) Main and side branch runners: This type of design is based on the difference in flow resistance between the main and side branch runners. For example, the ride is carried out by the Wei (4) inspection, and the straight flow path is forward. The flow resistance is small, and the flow channel is added to the entanglement to cause a difference between the forward and reverse, which accounts for about 15% of the valveless micro-pump design, as disclosed in U.S. Patent No. 5,876,187. In addition, in the 6-year γ〇〇η proposed in the straight flow channel plus the side branch channel to connect the vibration cavity to achieve the design of the asymmetric structure; and f try to reverse the series of two micro-pulls The purpose of two-way transport of fluids. 201226309 (3) Block type: Adding people in the straight flow channel (_, wing body), which is the extension deformation design of the nozzle/diffusion it, which accounts for 5% of the valveless micro-pull design. (4) vascular flow: in the mammal _ fetal _, has not yet developed, the blood in the vascular towel is also a flawless concept, that is, at the asymmetry point of the flow channel structure Point shouting volume production such as ___, accounting for about 15% of the valveless micro-pull design. % The above-mentioned various types of valveless micro-pull research focuses on the design and optimization of rectifiers (4) and (4), while the shadows of other parts are rarely added and discussed. The reason is that there is no thief. Gu is the pressure of the rectifier for one week (four) compared with the «money to the money ^ net ^, and the purpose of fluid transmission; so in the past no-valve micro-pull research, all from the pressure point of view of other departments The function of the component, such as the vibration, is only considered to provide the rectifier-pressure source, and the fluid and the outlet are only considered as interfaces to communicate with the outside world. In the following year, Higashi et al. proposed a new valveless drive concept in the US patent. The rectifier is designed to be connected to the short-long asymmetric flow path on both sides of the vibrating cavity. Then use a pressure change source with an asymmetric duty cycle (ie, a _ not equal to 5 〇 /.) to achieve flow, and a buffer is proposed in the New Zealand patent (pressure absorption _ design concept can improve the scale of fluid transmission, However, its starting point is still in line with the past (four) general force scale squad, _, did not really consider the impact of changes in the flow field of other components other than the rectifier. 2 〇〇 9 years by Wang et al (Xie Mingzhe, "no valve Research on the Design and Actuation Mechanism of Micro-Pulse Cavity", Master's thesis of Taiwan University's Institute of Fine Mechanics 2_) proposed a new type of micro-pull cavity design, which found that there is a nucleus flow field. However, the development of the engraving flow field and the performance of the micro-pump have significant and highly relevant characteristics. According to this-vortex development, the flow guiding element is added in the vibrating cavity, so that the micro (four) efficiency is significantly improved. In view of this, the applicant After careful experimentation and research, and I have never thought of the case, I have finally conceived the case of "Micro-Pu Pu", and overcoming the above shortcomings, the town is a brief description. 'Invention> The present invention is in the fluid inlet (out) Between the mouth and the rectifier, a proper size and number of "fluid development zones" are added. In the flow development zone, the population is difficult/common and the vortex/vortex can be fully developed, and at the same time, the σ and σ can be reduced. Because the cylinder fluid can easily flow into the inlet, it can also be easily discharged from the outlet, which can greatly improve the fluid transmission efficiency of the pump and increase the flow rate of the delivery flow. The step is designed and changed to a variety of different sizes, sizes, hybrids, _ micro pump working curve, so that the hair _ micro pump has more and more applications. Therefore, according to the invention - envisioning a miniature pump for delivering a working fluid comprising: a vibrating chamber for receiving and driving the working fluid; an inlet port and an outlet port, respectively, and the vibrating chamber Connected to each other Flowing into the vibration chamber through the inlet port and flowing out of the vibration chamber through the outlet port; and a first flow development zone having a first-class development space for the working fluid to develop its flow state, the vibration chamber The chamber is in communication with the inflow port or the outflow port via the first fluid state development zone. Therefore, according to the second concept of the present invention, a micro pump is provided for transporting helium fluid, which includes: an inlet and an inlet An outlet; a first-rate development zone having a flow development space for the fluid to develop its fluid state; a vibrating cavity that communicates with the inlet or the outlet via the fluid development zone and houses and drives the fluid. [Embodiment].  This case will be fully understood by the following examples. Making people who are familiar with the art can be based on Yuan Chengzhi. However, the implementation of this case may not be limited to its implementation by the following implementation cases.  First Embodiment Please refer to Figures 1A and 1B. The micro-pull 1 disclosed therein mainly includes a vibration chamber 110, Inlet port 120, Outlet 130, Inlet section rectifier 14〇, Outlet section rectifier 150, Vibration film 160, Actuator 170, The inflow section fluid state development zone 18〇 and the outflow section fluid development zone 190.  The inlet port 120 is connected to the inflow section fluid state development zone 18〇, It is used to engage the external delivery line' to introduce fluid in a vertical or horizontal manner; The outflow port 13〇 is connected to the outflow section fluid state development zone 190, It is used to connect the external conveying pipeline, The fluid can be exported in a vertical or horizontal manner.  As shown in Figure 1B, The vibrating membrane 16 is disposed above the vibrating chamber 11〇; The actuator Π0 is connected to the diaphragm 1 (30, It is used for vibrating film 16 〇 for reciprocating vibration,  The actuator 170 preferably may be a piezoelectric element, Electromagnetic drive components, Thermal drive components, Air moving film element, Mechanical vibration element or hot gas drive element; for example, When the actuator 17 is a piezoelectric element, By reciprocating expansion and contraction of the piezoelectric element, The diaphragm 16 can be deformed by reciprocating expansion and extrusion. Further, the vibrating film 16 is reciprocated (m: Iprocatingmotion), Thereby, the fluid in the vibrating chamber 11 is moved.  As mentioned earlier, When the actuator Π0 drives the diaphragm 16 to reciprocate, The internal space or volume of the vibration chamber 110 can produce a reciprocating increase and decrease. In more detail, When the vibrating membrane 160 moves upward (inhalation mode), The pressure in the vibration chamber 11〇 will be lower than the external pressure to generate a negative pressure state. Thus the fluid is passed through the inlet port 12〇, Inflow 201226309 section of the development zone 180, The outflow section fluid state development zone 19〇 and the outflow port 130 are drawn into the vibration chamber 110; on the contrary, When the vibrating membrane 160 moves downward (discharge mode), The pressure in the vibration chamber 110 will be higher than the external pressure' thus causing fluid to pass through the inlet port 120,  Inflow section fluid state development zone 180, The outflow section fluid state development zone 190 and the outflow port 130 exit the vibration chamber 110.  The inlet section rectifier 140 is connected between the vibration chamber 110 and the inflow section fluid development zone 18〇. The fluid used to collect and buffer the flow back and forth between the inflow section fluid development zone 180 and the vibrating chamber no; The outflow section rectifier 150 is connected between the vibration chamber ι1 〇 and the biL state development zone 190. It is used for collecting and buffering between the vibration chamber 11 〇 and the outflow section fluid development zone 190. Fluid The inlet section rectifier and the outflow section rectifier are designed to change their geometry, And the flow resistance is directional, To enhance the operational efficiency of the thin film micro-pull. The inflow section rectifier M0 and the outflow section rectifier 15 are connected as a connecting element. The inlet port 120 and the outlet port 130 are in communication with the vibration chamber 110 via two communication members, respectively.  More specifically, The inflow section rectifier M0 has a shape that gradually expands from the in-flow state development zone 18 to the vibration chamber 110. The outflow section rectifier 15 has a shape that gradually develops from the vibration chamber 110 in the inflow section. When the vibrating membrane moves upward (inhalation mode), For fluid flow through the inflow section rectifier (10) compared to the flow through the outflow section rectifier 150 to the vibrating chamber g 11〇, Its flow resistance is small; on the contrary, When the vibration film _ moves downward (discharge mode), For fluid flow from the vibrating chamber ιι via the outflow section rectifier 150 compared to the flow through the inflow section rectifier 14 Its flow resistance is small,  Therefore, the operational efficiency of the micro-pull is achieved. In the embodiment of the present invention, the rectifier and the rectifying section of the outlet section can also be used for the nozzle, Royal ^, It is possible to achieve a structure and treatment with different flow resistance (such as surface sulfur hydrophobic treatment).  The inflow section fluid state development zone 180 is connected between the inflow section rectifier U0 and the inlet port 120 201226309, It can buffer fluid flowing into and out of the vibration chamber 110; The outflow section fluid state development zone 190 is in communication with the outlet section rectifier 150 and the outlet port 130 which buffers fluid flowing into and out of the vibrating chamber 110. Inflow section fluid state development zone 180 and outflow section fluid state development zone 190, After research, it was found that It can reduce the flow resistance of the working fluid flowing into the inflow port 120 or out of the outflow port 130, That is, due to the low flow resistance of the inlet port 120 and the outlet port 130,  Therefore, the working fluid can easily flow into the inlet port 120, It is also easy to discharge the outlet 130. Therefore, the flow rate of the fluid delivered from the vibration chamber 110 to the outflow port 130 can be effectively increased. Thereby increasing the overall conveying flow of the micro-powder 100.  The flow regime of the inflow section 18〇 and the outflow section fluid development zone 190 can also suppress the back flow of the vibrating chamber. The return flow is prevented from flowing to the inflow port 120 or the outflow port 130' and the inflow section fluid state development zone 180 and the outflow section fluid state development zone 190' are respectively connected to the inflow section rectifier 140 and the outflow section rectifier 150, It is possible to provide a vortex induced by the vortex at the inlet port 120 when the vibration chamber is squeezed and deformed to develop its flow state. Therefore, it also has a fluid buffer, The function of temporary storage.  By changing the inflow section fluid state development zone 180 and the outflow section fluid state development zone 19〇 in the inflow segment and the outflow segment in series, the number of connections is different, or, Change the size of the inflow and outflow segments, It can also cause asymmetry in the flow resistance and has a similar rectifier effect. Cooperate with the periodic movement of the diaphragm (discharge and suction mode), The micro-pull thus has a net flow.  In addition to improving the fluid transmission efficiency, the geometry of the inflow section fluid state development zone 180 and the outflow section fluid state development zone It is also one of the main factors affecting the resonant frequency of the system. This provides the designer with an intuitive set of design parameters. And can be connected by _ to several; The magnetic development zone has a variety of working scales from Shun Pump (4). Respond to the different needs of the user.  It is worth noting that When the actuator 17 is reciprocating, According to the flow field visual printing (10) technique, it can be observed that there is a first fluid vortex and a second fluid vortex pair F2 respectively at the surface entrance (1) of the vibration chamber and the outlet outlet m of the 201226309. As shown in the figure, When the actuator 17 reciprocates at a resonance frequency, With the inflow section fluid state development zone (10) and the outflow section fluid state development zone (10), The fluid in the vibration (10) room (10) is difficult (4) and F2 (4) to complete the money exhibition. Reading in the general body exchange and transmission 'thus can greatly improve the fluid transmission efficiency of the film type micro crane 1 () ().  This design concept is quite different from the prior art in that the pressure difference is the main consideration factor. The present invention provides additional space in the weaving chamber 11 (ie, the stage flow development zone (10) and the outflow section fluid state development zone. ), As a development zone in the flow field, When the vortex is fully developed in the inflow section fluid state development zone 180 and the outflow section fluid state development zone 19〇, The fluid vortex in the vibration chamber 110 can accelerate the F1 and F2 to a fully developed state. Thereby, the overall transmission capacity of the thin film micro pump 100 will be increased.  Please continue to refer to Figure 1C. It is worth noting that In the foregoing embodiment, The angle between the center line of the inlet and the wall normal of the inlet buffer is zero. , But it is not limited to this as long as it is between ±90. Yes; The angle between the center line of the outflow port and the wall normal of the exit buffer is 0°', but it is not limited to this. As long as it is between 9 土. Yes; E.g, In the figure c, The angle φ between the center line C3 of the inlet port and the center line α of the flow development zone of the inflow section is about 45°. The angle Ψ between the center line C4 of the outflow port and the center line C2 of the outflow section fluid development zone is about 45°; In addition, The angle α between the flow development zone of the inflow section and the fluid development zone of the outflow section is not limited to 180°. As long as it is between ±180. Yes, Fig. 1C shows the case where the angle α is 45°.  Second Embodiment Please refer to Figure 2 and Figure 2, The thin film micro-pump 200 disclosed therein mainly includes a vibration cavity 210, Inlet 220, Outlet 230, Inflow section connector 240, Outlet section connector 250, Vibration film 260, Actuator 270, The inflow section fluid state development zone 280 and the outflow section fluid state development zone 290.  201226309 Inlet port 220 is connected to the inflow section fluid development zone. It is used to connect the external conveying line, a vertical or horizontal square wire human fluid; The addition (10) is connected to the outflow section of the flow state of the welfare 290. The fluid can be exported vertically or horizontally.  For example, the 2B_showing 'vibration _ is set on the fine portion of the vibrating cavity. The actuator 27 is connected to the diaphragm, It is used for vibration _ to perform reciprocating vibration;  The actuator 270 can preferably be a fort electrical component, Electromagnetic drive components, Thermal drive components, Air moving film element, Mechanical vibration element or hot gas drive element. for example, When the actuator 27 is a piezoelectric element, By the reciprocating side of the domain electrical component, The Lin Zhenlin film can produce the deformation of the reciprocating expansion bribe pressure. In turn, the effect of recording the vibration of the fiber is achieved.  As stated, When the actuator 270 drives the vibrating diaphragm 260 to reciprocate, The vibration chamber plus the internal space or volume can produce a reciprocating increase and decrease. In more detail, Although the vibrating film 260 moves upward (inhalation mode), The pressure in the vibrating cavity 21 () will be lower than the external pressure to generate a negative pressure state. Thus the fluid is caused to flow through the inlet 22 Entrance vortex/spin development 280, The outflow section fluid state development zone 290 and the outflow port 230 are drawn into the vibration chamber 210; on the contrary, When the vibrating membrane 26 is moved downward (discharge mode), The pressure in the vibrating cavity 210 will be higher than the external pressure. Thus the fluid is caused to flow through the inlet 22 Inflow section, fluid development zone 280, The outflow section fluid state development zone 290 and the outflow port 230 exit the vibrating cavity 210. When the actuator 270 is reciprocating, The fluid vortex in the inflow section fluid development zone 280 introduces fluid into the vibrating cavity 21〇 to F2', And the fluid vortex in the vibration chamber 21 is vortexed to F1,  The fluid flowing in from the inflow section fluid development zone is directed to the fluid vortex pair F3 in the outflow section fluid development zone 290 'the last outflow section fluid development zone 29 〇, Directing fluid to the outflow port 230; By the asymmetric design of the geometry of the inflow section, the development zone 28〇 and the outflow section fluid development zone, A similar rectifier effect can be achieved with a net flow rate of -11 - 201226309.  The inflow section communicater 240 is for connecting to the vibrating cavity 210 and the inflow section fluid state development zone 280. The fluid used to be collected and transported back and forth between the inflow section fluid state development zone 280 and the vibrating cavity 210; The outflow section connector 250 is connected to the vibrating chamber 21〇 and the outflow section fluid state development zone 290' for rectifying and transporting between the vibrating cavity 21〇 and the outflow section fluid state development zone 290 Fluid flowing back and forth.  Inflow section connector 24〇 and outflow section connector 250, It can also be as disclosed in the first embodiment. Preferably a rectifier, To provide directional flow resistance to the working fluid, To enhance the fluid directivity of the thin film micro-pump, Further improve the operational efficiency of the thin film micro-pull.  Broadly speaking, The inflow section communicater 24〇 and the outflow section linker 25〇 may exist in a flow path that does not have fluid directing. for example, A straight line with a fixed area is shown in Figure 2A. The connector can also be designed with a rectifier. By changing its geometry design, And the flow resistance is directional, It can further enhance the operational efficiency of the thin film micro-pull. More specific and s, The inlet section communicater can be designed to have a shape that gradually expands from the inflow section fluid state development zone 28 to the vibration chamber. The outflow section connector can also adopt a shape that gradually expands from the main outlet of the vibration chamber 21M. #田振动; | When the membrane 26〇 moves upward (inhalation mode), For the flow of fluid through the inflow section communicater compared to the flow through the outflow section n 25〇 to the vibrating cavity body, Its flow resistance is small', conversely, When the vibrating membrane 26 is moved downward (discharge mode), For the flow of fluid from the vibrating cavity 210 via the outflow section communicater 25, it is compared to the flow through the inflow section rectifier, In terms of 'the flow resistance is small, Thereby improving the directivity of the fluid, It can enhance the operation efficiency of the thin film micro-help 4. The inlet section of the actual section and the outlet section of the outlet section: It is possible to use a Tesla valve or any other structure and treatment that can achieve flow resistance differences (such as surface hydrophobic treatment).  12-201226309 The inflow section fluid state development zone 280 is connected between the inflow section interconnector 240 and the vibrating cavity 21'' to buffer the fluid flowing into and out of the vibrating cavity 210; The outflow section fluid state development zone 290 is connected between the outflow section communicater 250 and the vibrating cavity 210 to buffer the inflow and outflow of the vibrating cavity 2! 0 fluid. In the second embodiment, The inflow section fluid state development zone 28〇 and the outflow section fluid state development zone 290 have different sizes, However, in the first embodiment, both the inflow section fluid state development zone 180 and the outflow section fluid state development zone 19〇 have the same size.  Third Embodiment Please refer to Figure 3A and Figure ,, The thin film micro-push 3〇〇 disclosed therein mainly includes a vibration cavity 310, Inlet 32, Outlet 330, First inflow section connector M〇a,  a second inflow section connector 340b, First outflow section connector 350a, Second outflow section connector 350b, Second outflow section connector 35〇c, Vibration film 36〇, Actuator wo, Inflow section fluid development zone 380, The first outflow section fluid state development zone 39〇a and the second outflow section fluid state development zone 390b.  The inlet port 320 is connected to the first inflow section rectifier 34A, It is used to connect the external conveying line, Introducing fluid in a vertical or horizontal manner; The outflow port 33〇 is connected to the second outflow section communicater 350c, It is used to connect the external conveying pipeline, The fluid is exported in a vertical or horizontal manner.  As shown in the figure, The vibrating membrane 360 is disposed above the vibrating cavity 31〇. The actuator 37 is connected to the vibration film 360, It is used for vibrating film 36〇 for reciprocating vibration,  Actuator 370 can preferably be a piezoelectric element, Electromagnetic drive components, Thermal drive components, Air moving film element, Mechanical vibration element or hot gas drive element. for example, When the actuator 37 is a piezoelectric 7G piece, By reciprocating expansion and contraction of the piezoelectric element, This allows the vibration _36 〇 to produce a reciprocating expansion and deformation of the extrusion ‘and thus achieves the effect of the reciprocating vibration of the vibrating membrane 36 。.  a -13- 201226309 As mentioned earlier, When the actuator 370 drives the vibrating membrane 360 to reciprocate, The internal space or volume of the vibrating cavity 310 can produce a reciprocating increase and decrease. In more detail, when the vibration 4 film 360 moves upward (inhalation mode), The pressure in the vibration chamber (10) will be lower than the external pressure to generate a negative pressure state. Thus the fluid is caused to flow through the inlet 32 Inflow section fluid state development zone 380, The first outflow section fluid state development zone 39〇a, The second outflow section fluid state development zone 390b and the outflow port 330 are drawn into the vibration chamber 31〇; on the contrary, When the vibrating membrane 360 moves downward (discharge mode), The pressure inside the vibrating cavity 31 is higher than the external pressure.  Thus, the fluid is caused to flow through the inlet port 320, Inflow section fluid state development zone 380, The first outflow section fluid development zone 390a, The second outflow section fluid state development zone 39〇b and the outflow port 33〇 exit the vibrating cavity 310. When the actuator 370 is reciprocating, The fluid in the flow regime of the inflow section 38〇 is vortexed to the F2" to introduce the fluid into the vibrating cavity 31〇, The fluid vortex in the vibration chamber 31〇 introduces the fluid into the first outflow section fluid development zone 390a. The fluid vortex in the first outflow section fluid state development zone 390a communicates with each other, F3" and F4", Re-introducing the fluid into the second outflow section fluid development zone 390b, The fluid vortex in the second outlet buffer 390b is directed to F5" to introduce fluid into the outflow port 330; By setting different buffer numbers on both sides of the vibrating cavity 310 (take the 3A picture as an example, An entry buffer 38〇 and two exit buffers 39〇a, 390b asymmetric design), The asymmetry of this geometry can achieve a rectifier-like effect with a net flow. In order to achieve the operational function of the thin film micro-pump 300.  The first inflow section interconnector 340a is connected between the inflow section fluid state development zone 380 and the inflow port 320. It is used to collect and buffer the fluid flowing back and forth between the inflow port 32〇 and the inflow section fluid development zone 380; The second inflow section communicater 340b is connected between the vibrating cavity 310 and the inlet vortex zone 380. It is used to collect and buffer the fluid flowing back and forth between the vibrating cavity 310 and the inflow section fluid development zone 380.  The first outflow section interconnector 350a is connected between the vibrating cavity 310 and the first outflow section fluid state development zone 380a. 'It is used for collecting and buffering in the vibrating cavity 310 and the first outflow section flow 201226309 state a fluid that flows back and forth between development zones 380a; The second outflow section communicater 35〇b is connected between the first outflow section fluid state development zone 380a and the second outflow section fluid state development zone 380b. The fluid used for reciprocating back and forth between the first outflow section fluid state development zone 3S0a and the second outflow section fluid development zone 380b; The third outflow section communicater 35〇c is connected between the second outflow section fluid state development zone 380b and the outflow port 330. It is used to collect and buffer the fluid flowing back and forth between the second outflow section fluid development zone 380b and the outflow port 330. Broadly speaking, Inflow section connector 340a, 340b and the outflow section linker 35〇a, 350b,  The 350c can exist in a flow path that is not fluid-guided (also moved from the river). for example, a straight flow path with a fixed cross-sectional area, As shown in Figure 3A. The connector can also be designed with a rectifier. By changing the geometry of the design, And the flow resistance is directional, In order to improve the operational efficiency of the thin film micro-pull. More specifically, In the thin film micro pump 300 as shown in Fig. 3C, The first inflow section communicater 34A has a shape that gradually expands from the inlet 32 to the inlet buffer 380. The second inflow section 34b has a flow development zone 380 from the inflow section to the vibrating chamber. The shape of the body 31 is gradually enlarged; And the first outflow section connector 35〇&  Having a shape that gradually expands from the vibrating cavity 310 to the first outflow section fluid state development zone 39〇a,  The second outflow section of the iterative device now has a function from the first outflow section fluid state development zone to the second outflow section fluid state development zone. The third turbulent section has a shape from the 39% to the outflow port 33 () of the first-outflow section. When the vibrating membrane 36 is moved upward (inhalation mode), For the fluid through the first inflow section of the communicator and the third-job-job 34Gb, she is connected to the 35Ga via the first turbulent section. The second outflow 4 is in turn connected to the flow of the €35Gb and the second turbulent section i^通m to the vibration chamber body training and s 'the" _L resistance is small, on the contrary, When the vibrating membrane 36 is moved downward (discharge mode),  For the fluid to be applied by the vibrating cavity 31〇 via the first outflow section connector, The second outflow section connector 35〇b彳n is connected to the channel. Compared with the flow through the first-inflow section interconnector -15-201226309 34〇a and the first inflow section interconnector 34〇b, Its flow resistance is small, Therefore, the directivity of the fluid is improved, It can enhance the operation efficiency of the thin film micro-pull. The inlet section and the outlet section of the embodiment may also employ a Tesla valve or any other structure and treatment that can achieve flow resistance (e.g., surface hydrophobic treatment).  The inflow section fluid state development zone 380 is connected to the first inflow section interconnector 34〇& And between the second inflow section communicater 340b' which buffers the fluid flowing into and out of the vibrating cavity 31; The first outflow section fluid state development zone 390a is connected to the first outflow section porter 35〇& Between the second outflow segment connector 350b, It can buffer the fluid flowing into and out of the vibrating cavity 31; The second outflow section fluid state development zone 390b is connected between the second outflow section communicater 35〇b and the third outflow section interconnector 350c. It buffers the fluid flowing into and out of the vibrating cavity 31.  In addition, the difference in the number of flow development zones in the inflow section and the flow development zone in the outflow section can make the flow channel have fluid directivity. This design provides a broad flow peak performance curve. The flow development zone and the outflow section flow development zone of multiple inflow sections may also be different due to different needs. There are different geometry development zones.  Fourth Embodiment Please refer to Figure 4A and Figure ,, The thin film micro pump 4〇0 disclosed therein mainly includes a first vibration cavity 4l〇a, The second vibrating cavity 410b, Inlet 42〇, Outlet 430,  First inflow section connector 440a, a second inflow section connector 440b, First outflow section connector 450a, a second outflow section connector 450b, Third outflow section connector 45〇c, The first vibration film 460a, Second vibrating film 460b, First actuator 470a, Second actuator 470b,  The inflow section fluid state development zone 480 and the outflow section fluid state development zone 490.  The intake port 420 is connected to the first inflow section communicater 440a. It is used to connect the external delivery line, Introducing fluid in a vertical or horizontal manner; The outflow port 430 is connected to the third outflow segment connector 450c. It is used to connect the external conveying pipeline, The fluid is directed in a vertical or horizontal manner.  201226309 As shown in Figure 4B, The first vibrating film is disposed on the first vibrating cavity (4). The second vibrating film is disposed on the second vibrating cavity. The first actuator is connected to the first-strip. It has a reciprocating vibration. The second actuator is connected to the second diaphragm, It is used for the second vibration _ Na to reciprocate vibration, The first aligning gamma and the second actuator are preferably piezoelectric elements, Electromagnetic drive components, Thermal drive components, Pneumatic membrane components,  Mechanical vibration components or hot air cranes; Green, When the bribe and the second actuator 47〇b are - piezoelectric elements, By reciprocating expansion and contraction of the piezoelectric element, The deformation of the first vibrating film strip and the second vibrating fine film to the seam and the wrap is caused.  Further, the effect of the reciprocating vibration of the first vibrating film 460a and the second vibrating film 46b is achieved. The transmission efficiency is changed by the phase difference of the reciprocating vibrations of the two actuators (the first actuator and the second actuator 470b) in response to the different needs of the end.  Multiple actuators (more than two actuators) can also be used depending on the requirements. By controlling the timing of actuation of each actuator, Can also achieve a fluid transmission purpose, This is the operating principle of the screw-type micro-pumps that the world is familiar with. The concept of the flow-state launching and outflow section flow development zones of the inflow section can also be used for such micro-pulls. As one of the ways to improve the efficiency of the micro pump, It's not just limited to the valveless micro-pump.  As mentioned above, When the first actuator 470a and the second actuator 470b respectively drive the first vibration film 460a and the second vibration film 460b to reciprocate, The internal space or volume of the first vibrating cavity 41〇a and the second vibrating cavity 41〇b can be reciprocally enlarged and reduced. In more detail, If both the first actuator 47〇a and the second actuator 47〇b are in-phase vibration, When the first vibrating film 460a and the second vibrating film 46〇b move upward (inhalation mode), The pressure in the first vibrating chamber body 410a and the second vibrating chamber body 410b is lower than the external pressure to generate a negative pressure state. Thus, the fluid is caused to flow through the inlet port 42, Inflow section fluid state development zone 480, The outflow section fluid state development zone 490 and the outflow port 430 are drawn into the first vibrating cavity -17-201226309 410a and the second vibrating cavity body; on the contrary, When the first vibrating film is shame~ and the second vibrating film 460b is moved downward (discharge mode), The pressure in the first vibrating cavity 41a and the second vibrating cavity 410b is higher than the external pressure. Thus, the fluid is caused to flow through the inlet port 42, Inflow section fluid state development zone 480, The first outflow section fluid state development zone 49〇a and the outflow port 43〇 flow out of the first vibrating cavity 410a and the second vibrating cavity body. When the first vibrating cavity 41a and the second vibrating cavity 410b reciprocate, a fluid vortex pair in the flow regime of the inflow section 48〇 introduces the fluid into the first vibrating cavity 4l〇a, The fluid vortex pair in the first vibrating cavity 410a then introduces the fluid into the second vibrating cavity 41〇b, The fluid vortex in the second vibrating cavity 410b interacts with the two to re-introducing the fluid out of the vortex development zone 490, The fluid vortex in the outflow section fluid state development zone 490 introduces fluid into the outflow port 43〇; With the inflow section fluid state development area 480, Asymmetric design of the outflow section fluid state development zone 490, It can be made to have fluid orientation and a net flow rate is generated to achieve the operational function of the thin film micro-pump 400.  The first inflow section communicater 440a is connected between the inflow section fluid state development zone 480 and the inflow port 420. It is used to collect and buffer the fluid flowing back and forth between the inflow port 42〇 and the inflow section fluid development zone 48〇; The second inflow section communicater 44〇b is connected between the vibrating cavity 410 and the inflow section fluid development zone 480. It is used to collect and buffer the fluid flowing back and forth between the first vibrating cavity 410a and the inlet buffer 480.  The first outflow section connector 450a is connected between the first vibrating cavity 410a and the second vibrating cavity 410b. The fluid for collecting and buffering between the first vibrating cavity 4 and the second vibrating cavity 410b to reciprocate back and forth; The second outflow section communicater 450b is connected between the second vibrating chamber body 410b and the outflow section fluid state development zone 480. The fluid is used for collecting and buffering between the second vibrating cavity 410b and the outflow section fluid development zone 480 to reciprocate back and forth; The third outflow section connector 450c is connected between the outflow section fluid state hairpin area 480 and the outflow port 430. It is used to collect and buffer the fluid flowing back and forth between the outflow section fluid state development zone 480 and the outflow port 430.  201226309 Broadly speaking, the inflow segment connector 440a, 440b and outflow section connector 45〇a, Μ% 45〇c can be fluid-free (fl〇wdirectin illusion flow form exists, for example,  A straight flow path having a fixed cross-sectional area is shown in Fig. 4A. This connector can also be designed with a rectifier. By changing the geometry of the design, The flow resistance is directional to enhance the operational efficiency of the thin film micro-pump. Specifically, The first-inflow section interconnector* has a shape that gradually expands from the inflow port 420 to the inflow section fluid development zone. The second inflow section communicater 440b has a shape that gradually expands from the inflow section fluid state development zone 48 to the first vibrating cavity 41; The first outflow section communicater 450a has a shape that gradually expands from the first vibrating cavity 41 to the second vibrating cavity 41bb. The second outflow section communicating member 45 has a shape which gradually expands from the second vibrating cavity body 41b to the outflow section fluid state development zone 49〇. The third outflow section communicater 450c has a shape that gradually expands from the outflow section fluid state development zone 49 to the outflow port 43. for example, When the t-vibrating film strip and the second vibrating film are moved upward (inhalation mode), For fluid passing through the first inflow section communicater 44〇& Compared with the second inflow section communicater 440b, via the first outflow section communicater 45a, For the flow of the second outflow section connector 450b and the second outflow section connector 450c to the first vibrating cavity 4 and the second vibrating cavity 410b, Its flow resistance is small; on the contrary, When the first vibrating film strip and the second vibrating film 460b move downward (discharge mode), For the fluid from the first vibrating cavity 410a and the second vibrating cavity 410b via the first outflow segment connector 45%, The second outflow section communicater 450b and the third outflow section communicater 450c are compared to the flow through the first inflow section interconnector 440a and the first inflow section interconnector 440b, Its flow resistance is small, Therefore, the directivity of the fluid is improved, It can enhance the operational performance of the thin film type. The inlet section and the outlet section of the embodiment may also employ a Tesla valve or any other structure and treatment that can achieve flow resistance (e.g., surface hydrophobic treatment).  The inflow section fluid state development zone 480 is connected between the first inflow section communicater and the second inflow section of the interconnector. It can buffer the flow of the person and the fluid flowing out of the first vibration chamber and the vibration chamber 410b of the 201226309; The outflow section fluid state development zone 49 is connected to the second outflow section communicater 450b and the third outflow section interconnector 450c, It can buffer the fluid flowing into and out of the first vibration chamber 410a and the second vibration chamber 41〇b.  In addition, the inflow section fluid development zone, The flow development zone and the vibration chamber of the outflow section can be configured in different ways to meet the needs of various working curves of the end. for example, Either or both of the inflow section fluid state development zone 480 or the outflow section fluid state development zone 490 may be placed between the two vibrating bodies. As shown in Figure 4C, Figure 4D shows.  More specifically, taking the 4C figure as an example, From the inlet 420 to the outlet 430, The configuration manner is that the inflow section fluid state development area 480 is connected between the first inflow section interconnector 440a and the second inflow section interconnector 44〇b; The first vibrating cavity 41〇a is connected between the second inflow section communicater 440b and the first outflow section rectifier 450a; The exit buffer 490 is connected between the first outflow section interconnector 450a and the second outflow section interconnector 45〇b; At last,  The second vibrating chamber 41 Ob is coupled between the second outflow section communicater 45b and the third outflow section coupler 450c.  Fifth Embodiment Please refer to Figures 5A and 5B. The thin film micro-pull 5 disclosed therein mainly includes a vibration cavity 510, First inlet 520a, Second inlet 520b, Outlet 530,  First inflow section connector 540a, Second inflow section connector 54〇b, Third inflow section connector 540c, a fourth inflow section connector 540d, First outflow section connector 550a, Second outflow section connector 550b, Vibration film 560, The first inflow section fluid state development area 58〇a, The second inflow section fluid state development zone 580b and the outflow section fluid state development zone 590.  The first inflow port 52〇a is connected to the first inflow segment connector 540a, It is used to connect the external delivery line 'to introduce fluid in a vertical or horizontal manner; The second inflow port 520b is connected to the third inflow segment connector 540c, It is used to connect the external conveying pipeline, Introducing fluid in a vertical or horizontal manner; The outflow port 530 is connected to the second outflow section communicater 55〇b, It uses 201226309 to connect the external service pipeline. Export fluids in either "or".  The actuator 57 is connected to the diaphragm, It is used for vibrating film (10) for repetitive vibration, The actuator may preferably be a piezoelectric element, Electromagnetic drive components, Heat-driven components, Pneumatic Components, Mechanical vibration element or shaft reduction element. For example, when the actuator 57 is a neon element, By reciprocating expansion and contraction of the piezoelectric element, The vibration film 560 can be deformed by reciprocating expansion and extrusion. In turn, the vibration _ is achieved.  As stated, When the actuator 570 drives the vibrating diaphragm 56 to reciprocate, The internal space or volume of the vibrating cavity 510 can produce a reciprocating increase and decrease. In more detail, when the vibrating membrane 56〇 moves upward (inhalation mode), The pressure in the vibration chamber (10) will be lower than the external pressure to generate a negative pressure state. Thus, the two fluids are respectively passed through the first inlet port 520a, Second inlet 520b, The first inflow section fluid state development zone 58 and the second inflow section fluid state development zone 580b, The outflow section fluid state development zone 590 and the outflow port 53〇 are drawn into the vibration cavity 510; on the contrary, When the vibrating membrane 56 is moved downward (discharge mode), The pressure in the vibrating cavity 510 is higher than the external pressure. Thus, the fluid is caused to pass through the first inlet port 52〇a,  Second inlet port 52〇b, The first inflow section fluid state development area 58〇a, Second inlet port 52〇b, The outflow section fluid state development zone 590 and the outflow port 530 exit the vibrating cavity 510. When the vibrating cavity 51 is reciprocating, the fluid vortex pair in the first inflow section fluid state development zone 580a and the fluid vortex pair in the second inflow section fluid state development zone 580b introduce fluid into the vibrating cavity 51. Oh, The fluid vortex in the vibrating cavity 510 directs the fluid to the outflow port 530; The asymmetric design of the geometry and size of the first inflow section fluid state development zone 580a and the second inflow section fluid state development zone 580b can cause different flows in the flow path from the two inlet ports to the vibrating cavity. Resistance size, Therefore, the first inlet port 520a and the second inlet port 520b can be introduced into two fluids of unequal proportions. Achieve a certain proportion of fluid mixing; Simultaneously, Also because of the entrance, The geometric asymmetry of the development of the export vortex, It also makes the flow channel design have fluid directivity and net flow to and from -21 - 201226309 In order to achieve the operational function of the thin film micro pump 500.  The first inflow section interconnector 540a is connected between the first inflow section fluid state development zone 58〇a and the first inflow port 52〇a. The fluid used for reciprocating back and forth between the first inlet port 52〇a and the first inlet section fluid development zone 580a; The second inflow section communicater 540b is a fluid that is connected to the vibrating cavity 510 and flows back and forth between the first inflow section fluid state development zone 58A; The third inflow section interconnector 540c is connected between the second inflow section fluid state development zone 58〇b and the first inflow port 52〇b. The fluid used to flow back and forth between the second inlet port 52〇c and the second inlet section fluid state development zone 580b; The fourth inflow section coupler 540d is connected between the vibrating cavity 510 and the second inflow section fluid state development zone 58〇b. It is used to collect and buffer the fluid flowing back and forth between the vibrating cavity 510 and the second inflow section fluid development zone 58〇b.  The first outflow section communicater 550a is connected between the vibration chamber body 51 and the outflow section fluid state development zone 590. It is used to collect and buffer the fluid flowing back and forth between the vibrating cavity 51〇 and the outflow section fluid development zone 590; The second outflow section communicater 55〇b is connected between the outflow section fluid state development zone ’ and the outflow port 53〇. It is used to collect and buffer the fluid flowing back and forth between the outflow section fluid state development zone 590 and the outflow port 530.  Broadly speaking, the inflow segment connector 54〇a, M〇b, 54〇c, M〇d and the outflow section are connected to the device 55〇a, 550b can exist in the form of a flow channel without fluid guiding (fl〇wdirecting).  for example, a straight flow path with a fixed area As shown in Figure 5A. And this connector can also be designed in m. Through the new currency, the shape design, Chad flow resistance has directionality to enhance the operational efficiency of the thin film micro-pull. More specifically, The first inflow section communicater 540a has a shape that gradually enlarges from the first inflow port 52A to the first inflow section fluid state development zone 58. The second inflow section linker 5 has the first inflow. The shape of the segmental flow development zone 5S〇a gradually expands toward the vibration cavity 510, The third inflow section communicater 74〇c has a shape that gradually expands from the first inflow port 52〇b to the second inflow section fluid state development zone, -22-201226309 The four-inlet section interconnector 540d has a shape that gradually expands from the second inflow section fluid state development zone 580b to the vibrating cavity 510; The first outflow section communicater 550a has a shape that gradually expands from the vibrating cavity 51 to the outflow section fluid development zone 590. The second outflow section coupler 550b has a shape that gradually expands from the outflow section fluid state development zone 590 to the outflow port 53〇.  For example, when the diaphragm 560 and the upward movement (inhalation mode), For the fluid via the first inflow section communicater 54a, a second inflow section connector 540b, The third inflow section connector 540c, The fourth inflow section communicater 54〇d is compared to the first outflow section communicator 55〇a, In terms of the flow of the second outflow section communicating member 55〇b to the vibrating cavity 51〇, Its flow resistance is relatively small; on the contrary, When the vibration film 500 moves downward (discharge mode), For the fluid to pass from the vibrating cavity 510 via the first outflow segment connector 55〇a, The second outflow section communicater 55 is compared to the first inflow section communicater 54A, Second inflow section connector Mob, The third inflow section connector 540c, In terms of the flow of the fourth inflow section connector 54〇d, Its flow resistance is small, Thus increasing the directivity of the fluid, It can enhance the operating efficiency of the thin film micro-pump 5 (8). H segment H ^ and & The flow section rectification II can also be applied to a Tesla valve or any other structure and treatment that can be made with a differential shaft (such as surface hydrophobic treatment).  The first inflow section fluid state development zone 58〇a is connected between the first inflow section interconnector 5 and the second inflow section connected n times. It can buffer the fluid flowing into and out of the vibrating cavity 51; The second inflow section fluid state development zone is written between the third inflow section connector and the fourth inflow section interconnector 54〇d. It buffers the fluid flowing into and out of the vibrating cavity 51.  Please continue to refer to section 5C. It is also possible to use a plurality of inflow section flow development zones and a plurality of outflow sections to have a vortex ship. And the number of ships in the inflow section and the flow development zone of the city segment are different or entered. The geometry of the exit vortex develops differently, In addition to improving the operational performance of the diaphragm-type micro pump 500, It can also achieve a series of control actions such as fluid mixing and distribution. Specifically, As shown in Figure 5C, The angle β ΐ between the center line C6 of the first inflow section fluid state development zone 580a and the center line CIO of the vibration chamber inlet side is about 45. , The angle β2 between the center line C7 of the second inflow section fluid state development zone 580b and the center line C10 of the entrance side of the vibrating cavity is about 45. ; The angles γ ΐ and γ2 between the center lines C8 and C9 of the outflow section fluid development zone and the center line C11 of the exit side of the vibration chamber are about 45. . its_, The first inflow section fluid state development zone 580a and the second inflow section fluid state development zone 580b are used to simultaneously introduce the two fluid bodies into the vibration cavity 510, It is used to increase the flow into the vibration chamber 510 and to perform fluid mixing. The outflow section fluid development zone is for guiding fluid from the vibrating cavity 510 to the first outflow port 530a, The second outflow port 530b flows out, In addition to improving fluid transfer performance, It also has the function of fluid distribution.  Sixth Embodiment Please refer to Figure 6, The thin film micro-pump 600 disclosed therein mainly includes a vibration cavity 610, Inlet 620, Outlet 630, Inflow section connector 640, Outflow section connector 650,  a vibrating membrane (located on the vibrating cavity, Not shown in the figure), Inflow section fluid state development zone 680,  Outflow section fluid development zone 690, Two first flow guiding portions 613, Two second flow guiding portions 614,  Inflow guide 6 a first outflow diversion portion 691 and two second outflow diversion portions 692, The first flow guiding portion 613 is symmetric with the cavity inlet 611. And it is located near the entrance 611 of the cavity. Used to reduce the flow of fluid to the inlet; The second flow guiding portion 614 is symmetrical to the cavity outlet 612, And is part of the side wall of the vibrating cavity, Increase fluid flow to the outflow, , Used to provide a positive fluid flow toward the outlet; The inflow deflecting portion 681 is for guiding the design of the inflow port to the vibrating cavity 610. The first outflow diversion portion 691 is a guide fluid flowing from the vibration chamber 610 to the outflow port 630. The second outflow diversion portion 692 is for reducing the flow of fluid back to the vibrating cavity 610.  The inlet 620 is connected to the inflow section fluid development zone 680, which is used to connect the external delivery line. Introducing fluid in a vertical or horizontal manner; The outflow port 630 is connected to the outflow 201226309 section of the fluid development zone 690. It is used to connect the external conveying pipeline, The fluid is exported in a vertical or horizontal manner.  As mentioned earlier, When the actuator is placed on the vibrating membrane, Not shown in the figure) When the diaphragm is driven to reciprocate, The internal space or volume of the vibrating cavity 610 can produce a reciprocating increase and decrease. In more detail, When the vibrating membrane moves upward (inhalation mode), The pressure in the vibration chamber 610 is lower than the external pressure to generate a negative pressure state. Thus, the fluid is caused to flow through the inlet 620, Entrance vortex development 680, Outflow section fluid development zone <390 and the outflow port 630 are drawn into the vibrating cavity 610; conversely, when the vibrating membrane moves downward (discharge mode), the pressure in the vibrating cavity 610 is higher than the external pressure, thereby causing the fluid to flow through the inflow The port 620, the inflow section fluid state development zone 680, the outflow section fluid state development zone 690, and the outflow port 630 exit the vibrating cavity 610. When the actuator reciprocates, the fluid vortex in the inflow section fluid development zone 680 directs the fluid into the vibrating cavity 610, and the fluid vortex pair in the vibrating cavity 610 will be from the inflow section fluid state development zone. The inflowing fluid is directed to the outflow section fluid state development zone 690, and the fluid vortex in the last outflow section fluid state development zone 690 directs the fluid to the outflow port 630; The geometrical asymmetry of the 680 and the outflow section fluid state development zone can achieve a similar rectifier effect and a net flow generation. The inflow section interconnector 640 is configured to be coupled to the vibrating cavity 610 and the inflow section fluid state development zone 680 for being integrated and transported between the inflow section fluid state development zone 68 and the vibrating cavity 61. The fluid flowing back and forth; the outflow section communicater 65 is connected to the vibrating cavity 61〇 and the outflow section fluid state development zone 690 for collecting and transporting to the vibrating cavity 61〇 and the outflow section flow The development zone 690 reciprocates back and forth fluid flow. Broadly speaking, the inflow section interconnector 640 and the outflow section interconnector 650 may be present in a flow path that is not fluid directing, for example, a straight flow path having a fixed cross-sectional area, as shown in FIG. Show. The connector can also be designed with a rectifier. By changing the geometry of the -25-201226309, the flow resistance is directional, which further enhances the operation efficiency of the thin film micro-pull. More specifically, the inflow section connector 64 can be designed to gradually expand from the inflow section development region 680 to the vibrating cavity 610, and the outflow section connector anvil can also adopt a slave vibrating chamber. The body 610 is gradually enlarged in the exit buffer zone 69. When the vibrating diaphragm moves upward (inhalation mode), the flow resistance is smaller for the fluid to flow through the inflow section than the flow via the outflow section rectifier 650 to the vibrating cavity 61〇; When the vibrating membrane moves downward (discharge mode), the flow resistance of the fluid from the vibrating chamber 61 via the outflow section communicater 650 is smaller than that of the flow via the inflow section interconnector 64, thus Enhancing the directivity of the fluid enhances the operational performance of the thin film micro-pump 600. The inflow section communicater and the outflow section communicater of this embodiment can also adopt a Tesla valve or a method thereof to achieve the difference and treatment (such as surface dehydration treatment). The inflow section fluid state development zone 680 is connected between the inflow section rectifier 64〇 and the vibrating cavity 61〇, which can buffer the fluid flowing into and out of the vibrating cavity 61〇; the outflow section fluid state development zone 690 is connected Between the outflow section rectifier 65A and the vibrating cavity 61〇, it can buffer the fluid flowing into and out of the vibrating cavity 610. In addition, the center line CI2 of the inflow section fluid development zone and the centerline CI3 refresh angle α of the outflow section fluid development zone are not limited to (10). As long as it is between (10). That is, the stone diagram is the case where the angle ^ is 45°. The sixth embodiment is characterized in that, for the characteristics of the vortex development, one or more flow guiding portions are respectively added to the vibrating cavity 610, the inflow section fluid state development zone 68〇, and the outflow section fluid state development zone 69〇, respectively. The vortex in the field can be more complete development, and this concept can be applied to the above-mentioned first-county five real-time, and the transmission efficiency of the micro-beauty is further improved. In summary, the invention is an innovative design of a mechanical thin film micro-piston vibrating cavity, which can effectively improve the efficiency of the micro-pump and increase the flow rate of the fluid that can be transported, and can also be widely connected with other -26-201226309 kinds of thin film micro (four) The depth of development and the potential of money. Embodiment 4 (1) A micro pump for conveying a working fluid, comprising: a vibrating chamber for accommodating the working fluid; an inflow port and an outflow port respectively communicating with the vibrating chamber Providing the working fluid flowing into the vibration chamber through the inlet port and flowing out of the vibration chamber through the outlet port; and a first fluid development zone having a first-class development space for the working fluid to develop its flow state, The hybrid chamber is connected to the inlet or the outlet via the first-in-a-hair room. (2) The micro pump according to the embodiment (1), further comprising: a second fluid development zone having a first-class development space for the working fluid to develop its fluid state, the vibration chamber being via the second The fluid development zone is in communication with the inlet or the outlet. (3) The micro pump according to the embodiment (7), further comprising: a vibrating film disposed on the vibrating chamber; and an actuator that is in contact with the vibrating film to drive the vibrating The film reciprocates to drive the working fluid to flow into the vibration chamber through the inlet port and out of the vibration chamber through the outlet port; and a first communication element and the first communication element, the vibration The chamber is in communication with the first fluid state development zone and the second fluid state development zone via the first communication element and the second communication element, respectively. (4) The micro-pump of the embodiment (1) wherein the first communication element and the second communication element are a rectifier, which can provide a directional flow resistance to the working fluid, the rectifier being a nozzle, a diffuser, a Tesla valve, a hydrophilic surface or a hydrophobic surface. (5) The micro pump according to the embodiment (1), wherein the inlet port and the outlet port guide the working fluid in a vertical or horizontal manner. (6) The micro pump according to the embodiment (1), wherein the actuator is a piezoelectric element, an electromagnetic driving element, a heat driving element, a pneumatic film element, and a mechanical vibration -27-201226309 Element or a hot gas drive element. (7) The micro pump according to the embodiment (1), wherein an angle between a center line of the first fluid development zone or the second fluidity development zone and a center line of the vibration chamber is between 〇° and 360° between. (8) The micro pump according to the embodiment (1), wherein an angle between the center line of the inlet section rectifier and the wall normal of the first fluid development zone is between 0° and 360° The angle between the center line of the rectifier section rectifier and the wall normal of the second fluid state development zone is between 0° and 360°. (9) The micro pump according to the embodiment (1), wherein an angle between the center line of the inlet and the wall normal of the first fluid development zone is 〇. Between ~360°, the angle between the center line of the outflow port and the wall normal of the second fluid state development zone is between 〇. ~36〇. The angle between the center line of the inlet port and the center line of the first or second fluid state development zone is between 0° and 360°' the center line of the outflow port and the first or second flow state The angle between the centerlines of the development zone is between 0° and 360°. (10) a micro-filter for transporting a fluid, comprising: an inlet and an outlet; a first-stage development zone having a flow development space for the fluid to develop its fluid state; and a vibrating cavity, The fluidic development zone is in communication with the inlet or the outlet and houses and drives the fluid. This case is a rare and rare invention that is worth cherishing, but the above is only the best practice of the present invention, and the scope of the present invention cannot be limited thereto. That is to say, according to the invention, the scale change made by the patent side is _, and Lai still belongs to the scope of the invention patent _ 'Please review the review committee (four), and pray for the right, is the prayer to the zero [simplified description -28- 201226309 f1A, iimic diagram is a schematic diagram of the first embodiment of the invention; 2A and 2B® are schematic diagrams of the second example of the invention; 3A and 3B® are the third (3) third compensation 4A, 4B, 4C, and 4D are schematic views of a fourth embodiment of the present invention; 5A, 5B, and 5C are schematic views of a fifth embodiment of the present invention; and FIG. 6 is a A schematic diagram of a six embodiment.

[Main component symbol description] _ : Micro pump 120 = Inlet 140 : Inlet section rectifier 160 : Vibrating film 180 = Inflow section fluid state development zone F1 : First fluid vortex pair

Cl, C2, ¢3, C4: Center, line 200: Miniature pump 220: Inlet 240: Inlet section 260: Vibrating membrane 280: Inflow section fluid development zone F1, F2', F3' : Fluid vortex pair 300 : Micro pump 320 = Inlet 340a : First inflow section Communicator 35 〇 a : First outflow section Trunk 110 : Vibrating chamber 130 : Outlet 150 = Outlet Rectifier 170: Actuator 190: Outflow section fluid state development zone F2: Second fluid vortex pair Φ, Ψ, α: Angle 210: Vibrating cavity 230: Outlet 250: Outlet section 270: Actuator 290: outflow section fluid state development zone 310: vibrating cavity 330: outflow port 340b: second inflow section interconnector 350b: second outflow section interconnector -29-201226309 350c: third outflow section Communicator 370: Actuator 390a: first outflow section fluid state development zone 36: vibrating membrane 380: inflow section fluid state development zone 390b: second outflow section fluid state development zone FI", F2", F3 ", F4", F5": fluid vortex pair 4〇〇: micro-pull 41〇b: second vibrating cavity 430: outlet port 44〇b: second inflow section connector 450b: second The flow segment connector 46〇a: the first vibrating membrane 47〇a: the first actuator 480: the inflow section fluid state development zone 5〇〇: the micro pump 520a: the first inflow port 530 = the outflow port 54 〇b: second inflow section communicater 54〇d: fourth inflow section interconnector 550b ··second outflow section interconnector 580a: first inflow section fluid state development zone 590: outflow section flow state development Zone C6, C7, C8, C9, CIO, C11: 6〇〇: Micro pump 620: Inlet 640: Inlet section 680: Inflow section Fluid development zone 4l〇a: First vibrating cavity 420: intake port 44〇a: first inflow section communicater 45〇a: first outflow section communicater 450c: third outflow section interconnector 460b: second vibrating membrane 47〇b: second actuation 490: outflow section fluid state development zone 510: vibrating cavity 520b: second inflow port 540a: first inflow section interconnector 540c: third inflow section interconnector 550a: first outflow section interconnector 560 : vibrating film 580b: second inflow section fluid state development zone βΐ, β2, γΐ, γ2: angled center line 610: vibrating cavity 630: outflow port 650: outflow section connector 690: outflow section flow state development Area

30-201226309 613: first flow guiding portion 614: 681: inflow diversion portion 691: 692: second outflow diversion portion 611: 612: cavity outlet C12 second diversion portion first outflow diversion portion Cavity inlet C13: centerline

Claims (1)

201226309 VII. Patent application scope: 1. A micro-cracking pump 'for conveying a working fluid' includes: a vibrating chamber for accommodating the working fluid; an inflow port and an outflow port, respectively The vibration chamber is in communication, the working fluid flows into the vibration chamber through the inlet port and flows out of the vibration chamber through the outlet port; and a first fluid development zone having a first-class development space for the work The fluid develops its fluid state, and the vibrating chamber communicates with the inflow port or the outflow port via the first fluid state development zone. 2. The micro pump as described in claim 1 of the patent scope further includes: A second fluid state development zone has a first-rate development space for the working fluid to develop its fluid state, and the vibration chamber is in communication with the inlet port or the outlet port via the second fluid state development zone. 3. The micro pump of claim 2, further comprising: a vibrating membrane disposed on the vibrating chamber; an actuator that is in contact with the vibrating membrane to drive the The vibrating membrane reciprocates to drive the working fluid to flow into the vibrating chamber through the inlet port and out of the vibrating chamber through the outlet port; and a first connecting member and a second connecting member, The vibration chamber is in communication with the first fluid state development zone and the second fluid state development zone via the first communication element and the second communication element, respectively. 4. If you apply for a patent scope! The micro-pull of the item, wherein the first connecting element and the second connecting tree are -completed, and the tactile hexagram provides a __ direction, and the whole device is a nozzle, a detector, and Tesla valve, - hydrophilic surface or - hydrophobic surface. 5. The micro pump of claim 4, wherein the inlet port and the outlet port direct the working fluid in a vertical or horizontal manner. -32- 201226309 6. The micro pump according to claim t, wherein the actuator is a piezoelectric element, an electromagnetic driving element, a thermal driving element, a pneumatic film element, a mechanical vibration Element or a hot gas drive element. 7. The micro pump of claim i, wherein the angle between the center of the first fluid development zone or the first fluidity development zone and the centerline of the vibration chamber is between 〇» Between 360°. 8. If you apply for a patent scope! The micro pump of the item, wherein an angle between the center line of the inlet section rectifier and the wall normal of the first fluid development zone is between 〇. ~360. The angle between the center line of the flow segment rectifier and the wall normal of the second flow development zone is between 〇360°. 9. The micro pump according to claim 1, wherein the angle between the center line of the inlet and the wall normal of the first-order development zone is 〇. ~360. The angle between the center line of the outlet and the wall normal of the second fluid development zone is between 〇. ~360. The angle between the center line of the inlet and the center line of the first or second fluid development zone is between 〇. The angle between the centerline of the outlet of the ~360° and the centerline of the first or second fluidic development zone is between 0° and 360°. Φ 10. A micro-pump for transporting a fluid comprising: an inlet and an outlet; a first-order development zone having a flow development space for the fluid to develop its fluid state; and a vibrating cavity The fluidic development zone is in communication with the inlet or the outlet and houses and drives the fluid. -33 -