CN102588256A - Single-layer dual-cavity vacuum drive peristaltic pump with automatically-closed one-way valve - Google Patents

Single-layer dual-cavity vacuum drive peristaltic pump with automatically-closed one-way valve Download PDF

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CN102588256A
CN102588256A CN2012100405992A CN201210040599A CN102588256A CN 102588256 A CN102588256 A CN 102588256A CN 2012100405992 A CN2012100405992 A CN 2012100405992A CN 201210040599 A CN201210040599 A CN 201210040599A CN 102588256 A CN102588256 A CN 102588256A
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flow path
layer
way valve
liquid
flow
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CN102588256B (en
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崔建国
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Chongqing University of Technology
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Chongqing University of Technology
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Abstract

The invention discloses a single-layer dual-cavity vacuum drive peristaltic pump with an automatically-closed one-way valve. All structures are arranged inside an identical structure layer; the upper surface of the structure layer comprises a liquid input port for penetrating the layer, a liquid output port for penetrating the layer, and a negative pressure gas circuit interface for penetrating the layer; a flow channel for connecting the liquid input port and the liquid output port, and the automatically-closed one-way valve embedded at the tail end of the flow channel are arranged in a central area of the lower surface of the structure layer, and at least two negative pressure gas drive chambers are arranged at the side of the flow channel along the length direction of the flow channel. According to the single-layer dual-cavity vacuum drive peristaltic pump, sequential suction actions are generated by a gas channel flow resistance structure to achieve the peristaltic movement; a pumping sample is prevented from being damaged by high-pressure gas extruding the flow channel, air bubbles in the micro-flow channel are sucked outside a flow path by vacuum negative pressure so as to prevent the flow path from being blocked, and meanwhile, higher back pressure (reversed pressure) can be obtained by utilizing the automatically-closed one-way valve embedded inside the micro-flow channel.

Description

A kind of vacuum controlled peristaltic pump of individual layer two-chamber with self closing one-way valve
Technical field
The present invention relates to a kind of improvement of microflow control technique, in particular a kind of vacuum controlled peristaltic pump of individual layer two-chamber with self closing one-way valve.
Background technique
In recent ten years; Along with developing rapidly of BioMEMS and micro-processing technology; Microflow control technique has been widely used in numerous areas such as biology, chemical analysis, medical clinic applications, drug development; Micropump can be the supply and the transmission of microfluidic system sampling, so receive researcher's concern day by day as the core drive part of microfluidic system.At present, on all kinds of academic journals, reported multiple micropump, the overwhelming majority is Piezoelectric Driving, Electromagnetic Drive or positive air pressure driving etc.The main flow mode of research is a film compression-type micropump at present; Its FLOW CONTROL mode be through the to-and-fro motion that drives film cause micropump stream cavity volume and pressure change realize fluid-operated; Aspect the control that drives film, because forward pneumatic drive convenient rapidly, and favored.But, because sneak into micro-bubble in the pumping sample easily, and when using the forward gas-powered; Be more prone to quicken the introducing process of bubble; Bubble will block stream in the gathering of stream tube wall, influences pump-conveying property, so air bubble problem is a hang-up in this micro-fluidic field.
The micropump kind that development in recent years is got up is a lot; The micropump of wherein processing and can adopting pneumatic mode to drive through photetch; Generally form by the double-layer structure layer at least; Bottom is that fluid passage layer generally is the microfluidic circuit passage that is used for the transfer pump feeding sample, and the upper strata is that the gas circuit layer generally contains many driving gas channels spaced apart, and is as shown in Figure 1.Through the surface plasma bonding techniques double-layer structure is bonded together, many gas channels of gas circuit layer are connected with high-pressure air source through a plurality of solenoid valves, and come the order extruding of control gaseous passage through the working state of sequence control solenoid valve; Form peristaltic action, and then drive the interior flow of fluid of microfluidic circuit passage (referring to Marc A. Unger, Hou-Pu Chou; Todd Thorsen; Axel Scherer, Stephen R. Quake Science288,113 (2000); ).
Above-mentionedly thisly push the micropump that liquid flow path forms peristaltic action in proper order by a plurality of gas channels; Because adopt the drive of high-pressure gas mode, be prone to cause the destruction and the damage of pumped medium sample, and because the material of composition micropump is an air-permeable elastic material; So when working long hours, be prone to make pressurized gas see through elastic material; In the miniature stream of micropump lower floor, form micro-bubble, influence the micropump mobile performance, also can block stream when serious.In order to realize the order deformation of gas flow path, form peristaltic action simultaneously, also need complicated control circuit to go the coherent switch motion of order of the solenoid valve of every gas channel of control connection.Cause thus that miniature pump structure is comparatively complicated, flow velocity is lower, flow is less, can not satisfy the liquid pumping needs of micro-fluidic chip fully.Therefore, there is defective in existing technology, still haves much room for improvement and develops.
It is thus clear that the development of current microflow control technique presses for a kind of effectively pumping sample simple in structure and can remove the micropump of sneaking into bubble in the stream.
Summary of the invention
The technical problem that the present invention will solve has been to design a kind of vacuum controlled peristaltic-type pump arrangement of individual layer two-chamber with self closing one-way valve; Realize peristaltic action with its distinctive gas channel flow resistance structure generation order suction action; Avoided because pressurized gas extruding runner damages the pumping sample; And utilize negative pressure of vacuum that the bubble in the microfluidic circuit passage is aspirated out stream to prevent that stream from blocking; Improve the flow velocity and the flow of micropump, utilize the self closing one-way valve that is embedded in the micro channel to obtain higher back pressure (backpressure) simultaneously, reach the liquid pumping requirement of micro-fluidic chip.
Technological scheme of the present invention is conceived as follows:
A kind of vacuum controlled peristaltic-type pump arrangement of individual layer two-chamber with self closing one-way valve, described micropump adopts the negative pressure of vacuum driving work mode.All structures of said peristaltic pump are arranged among the same construction layer.
Wherein, the upper surface at said construction layer comprises that one connects the liquid input interface of this layer, a liquid output interface that connects this layer and a negative pressure air-path interface that connects this layer.
Said construction layer combines with a substrate through lower surface; A flow path channel that flow of liquid incoming interface and flow of liquid outgoing interface are coupled together is arranged in the center region of said construction layer lower surface; And the one-way valve that can close automatically that is embedded in said flow path channel end; Be used to realize that the order of flow path channel opens and close, and then allow the one-way flow of fluid in stream; Side at said flow path channel is furnished with at least two negative-pressure gas driving chambers along its length direction; Negative-pressure gas drives between the chamber and connects through gas channels, and wherein the negative-pressure gas near the flow of liquid incoming interface drives chamber through gas channels connection negative pressure air-path interface.
Said negative pressure drives divider wall structure between chamber and the flow path channel and constitutes deformable and drive film, and this drivings film deforms under the effect of negative-pressure gas, and then changes the volume of flow path channel, and driving liquid flows to and flows out micropump.
Further, also be formed with a gas compensation channel at the lower surface of said construction layer, said gas compensation channel one end drives chamber with negative-pressure gas near the flow of liquid incoming interface and is communicated with, and an end directly passes to the construction layer edge, with atmosphere.
In addition, said negative-pressure gas driving chamber is arranged as best in the bilateral symmetry of flow path channel.
Said construction layer adopts PDMS (dimethyl silicone polymer) material with gas permeability and printing opacity, and entire infrastructure can carry out processing and fabricating by photetch and form.PDMS material because of the formation micropump has gas permeability like this, when negative-pressure gas forces the driving deformation of thin membrane to change flow path volume, can also catch the micro-bubble that flows in the microfluidic circuit, and through breathable driving film it is aspirated away from stream.
The described one-way valve that can close automatically is made up of two movable valve blocks and two open chambers jointly; Channel connection between the end of said flow path channel and two the movable valve blocks, the passage between the valve block is the import of one-way valve; Two open chambers lay respectively at two movable valve block both sides, and and valve block between channel connection; Two open chambers are communicated with the flow of liquid outgoing interface through common passage again, and this common passage is the outlet of one-way valve; When the liquid in the miniature flow path channel flows forward; The valve block of one-way valve is in open mode; And when the liquid reverse flow in the miniature flow path channel, the extruding that the valve block of one-way valve receives the indoor increase liquid of open cavity deforms valve block and closes the purpose that flow path channel realizes forbidding the anti-stream of liquid.
In addition; This micropump only needs the conducting of an electromagnetic valve negative pressure source of the gas and cuts out; And then utilize gas connecting passage order UNICOM to drive chamber; And utilize the negative pressure of the indoor order generation of actuator chamber and the tonifying Qi of gas compensation channel, the order spill of controlling and driving film is out of shape (for flow path channel) and order recovery original-shape.When the negative pressure source of the gas in the closed electromagnetic valve external world; The elastic force that drives restoring force that film returns to its original-shape position and be by himself produces; More near its home position the time; This power is more little, can not damage and destroy the sample media that is pumped so this micropump utilization driving film is out of shape the driving sample in proper order, like blood, cell etc.
Peristaltic pump provided by the present invention by a plurality of pneumatic drive chambers under the setting that connects the gas channels flow resistance; Deform in proper order in microfluidic circuit passage both sides; The driven pump feeding sample takes place to flow in flow path channel, and under the help of self closing one-way valve, realizes one-way flow and higher back pressure.And this micropump implementation structure is very simple, and all functions unit all is in one deck structure, only needs a solenoid valve to carry out gas circuit control, can reach the requirement of sample pumping fully.
It is thus clear that; Peristaltic pump provided by the present invention is a kind of improvement to existing micropump pumping liquid technology; Its improved main aspect has: one, the driving mode of this micropump is that negative pressure of vacuum drives, avoided the damage of extruding type driving mode to pumping sample in the miniature flow path channel; Negative pressure of vacuum can be aspirated out the micro-bubble in the miniature flow path channel through ventilative driving membrane structure, and the bubble that prevents to sneak in the pumping sample is to the Effect on Performance that flows; Two, the repertoire parts of micropump and structure all are arranged in the flexible material of layer of transparent, and its structure is very simple, and are convenient to observe the working condition of micropump; Three, be embedded in self closing one-way valve in the miniature flow path channel, can when taking place that liquid is counter to flow, block stream by self-pressure liquid self acting stop valve sheet, this has just further improved the flow velocity and the back pressure of micropump.
Description of drawings
Fig. 1 is the schematic top plan view of micropump apparatus of the present invention.
Fig. 2 is the schematic side view of micropump apparatus of the present invention.
Fig. 3 is an one-way valve structures partial schematic diagram in the micropump apparatus of the present invention.
Fig. 4 is the entire block diagram of micropump apparatus of the present invention.
 
Embodiment:
Further specify embodiment of the present invention below in conjunction with the accompanying drawing act.
Referring to Fig. 1 and Fig. 2, micropump of the present invention is made up of one deck construction layer 11 and one deck substrate 12, and all structures all are to be processed in the construction layer through photetch; Adopt the PDMS material; Has certain gas permeability, light-permeable, the pumping situation of available vision direct observation micropump interior media.Substrate can be adopted glass, silicon, PMMA materials such as (plexiglass).Construction layer plasma oxidation capable of using is handled bonding techniques and is realized the permanent on-dismountable encapsulation between this and the base layer, and the adhesive force between PDMS material also capable of using and the substrate material is made into detachable encapsulation.
In this construction layer 11, comprise the liquid input interface 1, liquid output interface 2 and the negative pressure air-path interface 3 that connect this layer from upper surface.Be processed with a miniature flow path channel 4 that flow of liquid incoming interface 1 and flow of liquid outgoing interface 2 are coupled together in the center region of the lower surface of this construction layer; And be embedded in the one-way valve that can close automatically 10 in the flow path channel; Be used to realize that the order of miniature flow path channel opens and close, and then allow the one-way flow of fluid in stream.Be processed with two negative-pressure gas respectively in the both sides of said flow path channel 4 and drive chamber; Two negative pressure of the same side drive chamber 8 and are connected by gas circuit connecting passage 6 with 9; Negative pressure near liquid input interface 1 direction drives chamber 8 by gas circuit connecting passage 7 connection negative pressure air-path interfaces 3, simultaneously also through a gas compensation channel 5 and atmosphere.The gas circuit compensation channel is in order to guarantee when the negative pressure source of the gas is closed, and drives film order recovery shape and gets back to its home position and design, and its flow resistance can be carried out calculus of approximation optimization through the RC model.
Because negative pressure drives the side of chamber 8 at flow path channel 4; Between separate by divider wall; This divider wall structure just constitutes deformable driving film; Warpage can take place in this driving film under the effect of negative-pressure gas, and then changes the volume of flow path channel, drives liquid and flows to and flow out micropump.And because of the PDMS material of formation micropump has gas permeability, when negative-pressure gas forces the driving deformation of thin membrane to change flow path volume, can also catch the micro-bubble that flows in the microfluidic circuit, and it aspirated away from stream through breathable driving film.The big I of deformation that drives film is limited size and the negative-pressure gas pressure size that spill drives chamber jointly.
The structure of one-way valve 10 is as shown in Figure 3 in the micropump stream, is made up of jointly two movable valve blocks 101 and two open chambers 102.Channel connection between the end of flow path channel 4 and two the movable valve blocks 101, the passage between the valve block is the import of this one-way valve.Two open chambers 102 lay respectively at two movable valve block both sides, and and valve block between channel connection.Two open chambers are communicated with flow of liquid outgoing interface 2 through common passage again, and this common passage is the outlet of one-way valve.Like this when the liquid in the miniature flow path channel 4 flows forward; The valve block 101 of one-way valve is in open mode; And when the liquid reverse flow in the miniature flow path channel 4, the valve block 101 of one-way valve receives the extruding that increase liquid in the open chamber 102 and valve block is deformed close the anti-stream that flow path channel is forbidden liquid.
Negative pressure pneumatic drive chamber is connected with extraneous negative pressure source of the gas through gas circuit connecting passage, gas circuit connection interface and solenoid valve; And the time that switches on and off of action sequence control gas circuit that can be through solenoid valve; And then realize that micropump drives the operating frequency control of film; In order to guarantee to drive the sequentially-operating of film, the flow resistance of gas circuit connecting passage can be optimized through the calculus of approximation of RC model.
The entire block diagram of this micropump is as shown in Figure 4, when micropump moves, connects the break-make of the negative pressure source of the gas of micropump air-path interface through electromagnetic valve; And can partly regulate and control the speed of solenoid valve operating frequency by control circuit, under the pumping action of negative pressure source of the gas, there is flow resistance owing to connect gas circuit; So drive the distortion of film order of occurrence; Change the volume of miniature flow path channel, form creeping type and drive, thereby the pumping sample that drives in the said miniature flow path channel takes place to flow; And, realize driving to said pumping sample because the reverse of one-way valve makes the sample of pumping only forwarding can take place by effect.
The implementation structure of apparatus of the present invention and method for driving is very simple, is convenient to be integrated into micro-fluidic chip inside, has reached the requirement of sample delivery, can satisfy the needs that the micro-fluidic chip sample transmits and analyzes.
Control circuit part among the present invention can adopt existing various possible scheme with the technology such as liquid of being carried according to practical application, is well known to those skilled in the art, so no longer tired stating.
It should be noted that for the person of ordinary skill of the art, can improve and conversion, for example increase the number of miniature flow path channel, increase the number of pneumatic drive chamber or change pneumatic drive chamber size size etc. according to above-mentioned explanation.And all these improvement and conversion all belong to the protection domain of accompanying claims of the present invention.

Claims (5)

1. vacuum controlled peristaltic pump of individual layer two-chamber with self closing one-way valve, it is characterized in that: all structures of said peristaltic pump are arranged among the same construction layer;
Wherein, the upper surface at said construction layer comprises that one connects the liquid input interface of this layer, a liquid output interface that connects this layer and a negative pressure air-path interface that connects this layer;
Said construction layer combines with a substrate through lower surface; A flow path channel that flow of liquid incoming interface and flow of liquid outgoing interface are coupled together is arranged in the center region of said construction layer lower surface; And the one-way valve that can close automatically that is embedded in said flow path channel end; Be used to realize that the order of flow path channel opens and close, and then allow the one-way flow of fluid in stream; Side at said flow path channel is furnished with at least two negative-pressure gas driving chambers along its length direction; Negative-pressure gas drives between the chamber and connects through gas channels, and wherein the negative-pressure gas near the flow of liquid incoming interface drives chamber through gas channels connection negative pressure air-path interface;
Said negative pressure drives divider wall structure between chamber and the flow path channel and constitutes deformable and drive film, and this drivings film deforms under the effect of negative-pressure gas, and then changes the volume of flow path channel, and driving liquid flows to and flows out micropump.
2. the vacuum controlled peristaltic pump of individual layer two-chamber with self closing one-way valve according to claim 1; It is characterized in that: the lower surface at said construction layer also is formed with a gas compensation channel; Said gas compensation channel one end with drive chamber near the negative-pressure gas of flow of liquid incoming interface and be communicated with; The other end directly passes to the construction layer edge, with atmosphere.
3. the vacuum controlled peristaltic pump of individual layer two-chamber with self closing one-way valve according to claim 1 is characterized in that: said negative-pressure gas drives chamber and arranges in the bilateral symmetry of flow path channel.
4. the vacuum controlled peristaltic pump of individual layer two-chamber with self closing one-way valve according to claim 1; It is characterized in that: said construction layer adopts PDMS (dimethyl silicone polymer) material with gas permeability and printing opacity; When negative-pressure gas forces the driving deformation of thin membrane to change flow path volume; Also can catch the micro-bubble that flows in the microfluidic circuit; And see through breathable and drive film it is aspirated away from stream, the entire infrastructure of construction layer can carry out processing and fabricating by photetch and form.
5. like the described micropump of claim 1 to 4, it is characterized in that: the described one-way valve that can close automatically is made up of two movable valve blocks and two open chambers jointly; Channel connection between the end of said flow path channel and two the movable valve blocks, the passage between the valve block is the import of one-way valve; Two open chambers lay respectively at two movable valve block both sides, and and valve block between channel connection; Two open chambers are communicated with the flow of liquid outgoing interface through common passage again, and this common passage is the outlet of one-way valve; When the liquid in the miniature flow path channel flows forward; The valve block of one-way valve is in open mode; And when the liquid reverse flow in the miniature flow path channel, the extruding that the valve block of one-way valve receives the indoor increase liquid of open cavity deforms valve block and closes the purpose that flow path channel realizes forbidding the anti-stream of liquid.
CN201210040599.2A 2012-02-22 2012-02-22 Single-layer dual-cavity vacuum drive peristaltic pump with automatically-closed one-way valve Expired - Fee Related CN102588256B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI547694B (en) * 2015-01-30 2016-09-01 國立陽明大學 Microfluidic bio-reactor device, its kits and methods thereof
TWI612289B (en) * 2013-02-26 2018-01-21 國立大學法人九州大學 Optical analysis method and optical analysis device using microchip, and microchip for optical analysis device and processing device for optical analysis
CN111530514A (en) * 2020-04-30 2020-08-14 东莞市东阳光诊断产品有限公司 Micro-flow air control chip

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050000900A1 (en) * 2001-04-06 2005-01-06 Fluidigm Corporation Microfluidic chromatography
US20050279412A1 (en) * 2004-06-18 2005-12-22 Harris Corporation Embedded microfluidic check-valve
WO2006009724A2 (en) * 2004-06-17 2006-01-26 Micronics, Inc. Microfluidic devices for fluid manipulation and analysis
CN101947124A (en) * 2010-06-25 2011-01-19 博奥生物有限公司 Integrated microfluidic chip device and using method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050000900A1 (en) * 2001-04-06 2005-01-06 Fluidigm Corporation Microfluidic chromatography
WO2006009724A2 (en) * 2004-06-17 2006-01-26 Micronics, Inc. Microfluidic devices for fluid manipulation and analysis
US20050279412A1 (en) * 2004-06-18 2005-12-22 Harris Corporation Embedded microfluidic check-valve
CN101947124A (en) * 2010-06-25 2011-01-19 博奥生物有限公司 Integrated microfluidic chip device and using method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI612289B (en) * 2013-02-26 2018-01-21 國立大學法人九州大學 Optical analysis method and optical analysis device using microchip, and microchip for optical analysis device and processing device for optical analysis
TWI547694B (en) * 2015-01-30 2016-09-01 國立陽明大學 Microfluidic bio-reactor device, its kits and methods thereof
CN111530514A (en) * 2020-04-30 2020-08-14 东莞市东阳光诊断产品有限公司 Micro-flow air control chip
CN111530514B (en) * 2020-04-30 2022-01-11 东莞市东阳光诊断产品有限公司 Micro-flow air control chip

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