201226093 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種移除玻璃板材邊緣微小缺陷之裝 置及其方法，特別是有關於一種利用照射雷射光線之高溫 度梯度差而在玻璃板材端面產成劈裂效應的裝置及其方 法。 【先前技術】 目前在加工玻璃板材時，如加工應用在LCD面板的玻 璃基板’在玻璃基板經過輪刀切割、裂片（breaking)後，在 斷面會有切割裂片過程產生的微裂紋(micro-crack)，此微裂 紋會造成玻璃強度的降低。其改善方法，有利用相對較耗 時的機械磨邊(grinding)，其處理的速度約為1〇〜80 mm/s。 另一種改善微裂紋方法，如台灣第1317667號專利所揭示， 係利用於玻璃基板端面長邊方向70度以内、板厚方向70 度以内的雷射光線照射玻璃基板端面，相對於玻璃基板速 度為0.1〜200 mm/s，同時以冷卻氣體對雷射光線照射部， 進行送風，使加熱而溶融玻璃端面及其微裂紋，使平滑化 玻璃基板的端面。 【發明内容】 本發明係提供一種移除玻璃板材邊緣缺陷之裝置’其 結構包含：一用以承載玻璃板材的載台° 一用以輸出一雷 201226093 射光線的雷射輸出單元。一光路引導單元，係配置於雷射 光線之光路上，用以引導雷射光線成為一雷射光束而照射 於玻璃板材邊緣之一端面’該玻璃板材包括玻璃基板或鏡 片等片狀材料。以及一控制單元’係電性耦接雷射輸出單 元和光路引導單元’用以控制雷射輸出單元之雷射光線觸 .發時程及能量密度，與控制光路引導單元對雷射光束的照 .射路徑及移動速度，以在端面劈裂出一層玻璃削屑，以達 成移除玻璃板材邊緣之缺陷，另可形成光滑面的端面。 【實施方式】 在進行本發明研究開始時，係先在玻璃板材端面上之 缺陷放置玻璃粉，再利用雷射光照射於玻璃板材端面，因 雷射光照射時會將玻璃粉喷開，或先利用雷射光照射於玻 璃板材端面，再放置玻璃粉，均無法移除玻璃板材邊緣之 缺陷，另外一種方法為利用雷射光照射於玻璃板材端面成 • 高溫狀態，再用外力壓平，因當雷射光線照射於玻璃板材 端面移除雷射光時，光線照射後之能量迅速降低，仍無法 壓平而將玻璃板材邊緣之缺陷移除。茲將本發明實驗成功 說明如下。 本發明係利用雷射光束照射於玻璃板材端面，以產生 咼的溫度梯度差，進而在端面產生劈裂效應，以達成移除 玻璃板材邊緣之缺陷，另可使端面形成光滑面。 茲配合圖式將本發明諸實施例詳細說明如下。 如圖1所示，本實施例之移除玻璃板材10邊緣微小缺 201226093 陷之裝置包含：一載台2〇,可押制 載玻璃板材1〇，其玻璃板材1〇二可被固向運動，以承 欲加工的端面11朝向外側。_雷射輸出單，20上’並 31。一光路引導單元4。，該光:元輸二 可為一知描裝置，係配置於雷射光線31之光 用該光路引導單元4〇内之光學上，係可應 射光'㈣導引為雷射光束:未/出)’將雷 璃板材10邊緣之-端面„上。 接雷射輸出單元30和光路引導 係電性耦 ，發時程及能量密度，控制單元5。之輸出電田背：51 :=亥光路引導單元4〇之該重塑的雷射光束：的照 面iiU么速Λ。藉由雷射光束41的照射，可在該端 玻璃板材邊緣之缺陷，另可使該端面11形成-光滑t。 抑本實施例中，移除玻璃板材10邊緣微小 法的步驟包含：步驟sl〇，以一雷射光束41照射 、玻璃板材10端面u。以及步驟S20，控制該雷射 ’使該雷射光束41依序走完該玻璃板材10 (或者疋走完要劈裂加工區域的起點至終點），該 玻璃板材10端面U因該雷射光束41的照射與未照射之間 t高的溫度梯度差，而在該端面u產生劈裂出—層玻璃 S (如圖5所示）’使該端面㈣成光滑加工面。而其 劈裂方向為沿著該雷射光束41的照射路徑t的方向。^ 再請參照圖3,並同時參考圖丨所示，上述實施例中， 201226093 载口 20’可控制x，y，z軸方向運動，使得該雷射光束41的 照射路徑t包含與該玻璃板材1G端面u之—短邊12形成 複數個平行線，每一平行線之間維持一間距p，而其照射 路控t的^勢依序為：觸發該f射域31.照射後，利用該 $路引導單to 4G使該雷射光束41行走平行該短邊12的路 k ti，再停止該雷射光線31的照射，並將該雷射光束w 的照射位置按照路徑t2移動；再次觸發該雷射光線3ι的 照射，並依路徑t3移動，再停止照射並依路徑t4移動，且 春重覆此-照射及移動方式走完整個端面u區域（或者是走 完要劈裂的起點至終點）。 請參照圖4,並同時參考圖！所示，上述實施例中， 該雷射光束41的照射路徑t包含與該玻璃板材1()端面u 長邊1 3升y成複數個平行線，每一平行線之間維持一間 距p ’而其照射路徑t的走勢依序為：觸發該雷射光線^ 照射後’利用該光路引導單元40使該㈣雷射光束41行 走平行該長邊13的路徑t5;再使該雷射光束31停止昭射， 並將該雷射光束41的照射位置按照路徑t6移動；再次觸 發該雷射光束31的照射，並依路徑π移動，再停止照射 =路 =8移動，且重覆此—照射及移動方式走完整個端 面11區域。 在上述實施中，該雷射輸出單元30所輸出該雷射光束 『的，出波長最好為3至12職波段之間，或更佳波 9至12 um波段之間。 上述實施中，控制雷射光束41的照射能量，使其劈裂 201226093 出之該層玻璃削屑厚度係可介於丨um至丨mm之間。 上述實施中，該雷射光束41相對於該玻璃板材1〇端 面11的速度係大於500 mm/s。 上述實施中，玻璃板材10端面u的雷射光束41照射 路徑t的間距P係為：（光斑直徑d/25)$間距光斑直徑 d，其中，光斑直徑d係為該重塑雷射光束41的聚焦後光 斑直徑大小’該聚焦後光斑直徑d係以能量分佈降低至最 尚部分的Ι/e2時的寬度，e為自然對數函數的底數。且該 雷射光束41的能量密度介於”⑺4至l5N1〇6w/cm2之間。 請再參閱圖5及圖6所示，在本實施例中與前揭實施 例的裝置或施作步驟大部分相同，但更包含有設置一送風 喷嘴60，該送風喷嘴60可對該玻璃板材1〇或者是對該重 塑雷射光束41照射後之該端面u區域輸出冷卻氣體g， 藉以更提高該溫度梯度差，進而提升劈裂速度。 值付一k的疋，如圖2、圖5所示，在施行步驟 之剛，該玻璃板材10端面11可預刻一刻痕14，作為劈裂 的起點或終點，當然也可同時預刻一起點及一終點。而該 刻痕14係可利用機械式刀具或雷射光線而刻成。 本發明之特點係在於，本發明利用雷射光線在玻璃板 材端面照射，玻璃板材吸收雷射光線的熱量後形成高溫度 梯度產生的熱服冷縮形成一熱應力，使玻璃板材端面劈 裂一層玻璃屑，藉此消除玻璃板材邊緣表面上的微裂紋， 使玻璃板材端面光滑平整，可以提升玻璃應力強度。 綜上所述，乃僅記載本發明為呈現解決問題所採用的 201226093 技術手段之實施方式或實施例而已，並非用來限定本發明 專利實施之範圍。即凡與本發明專利申請範圍文義相符， 或依本發明專利範圍所做的均等變化與修飾，皆為本發明 專利範圍所涵蓋。 201226093 【圖式簡單說明】 圖1繪示本發明之移除玻璃板材邊緣微小缺陷之裝置之實 施例的系統方塊示意圖； 圖2繪示本發明之移除玻璃板材邊緣微小缺陷之方法的步 驟流程圖； 圖3繪示圖1之照射路徑第一實施例的立體示意圖； 圖4繪示圖1之照射路徑第二實施例的立體示意圖； 圖5繪示本發明加設一送風喷嘴以提供玻璃板材冷卻氣體 實施例之立體示意圖；以及 圖6繪示本發明加設一送風喷嘴以提供玻璃板材端面冷卻 氣體實施例之立體示意圖。 【主要元件符號說明】 10 玻璃板材 11 端面 12 短邊 13 長邊 14 刻痕 20 載台 30 雷射輸出單元 31 雷射光線 40 光路引導單元 41 雷射光束 50 控制單元 51 電訊信號 10 201226093 60 送風喷嘴 d 光斑直徑 g 冷卻氣體 s 玻璃削屑 t 照射路徑 tl,t2,t3,t4 路徑 t5,t6,t7,t8 路徑 P 間距 歩驟S10、 歩驟S20方法步驟 11201226093 VI. Description of the Invention: [Technical Field] The present invention relates to an apparatus and method for removing minute defects of a glass sheet edge, and more particularly to a glass having a high temperature gradient difference using irradiated laser light A device for producing a splitting effect on a sheet end face and a method thereof. [Prior Art] At the time of processing glass sheets, such as processing on glass substrates of LCD panels, after the glass substrate is cut by a wheel cutter and cracked, there will be micro-cracks generated in the process of cutting and splitting in the cross section (micro- Crack), this microcrack will cause a decrease in the strength of the glass. The improvement method utilizes relatively time-consuming mechanical grinding, which is processed at a speed of about 1 〇 to 80 mm/s. Another method for improving microcracking, as disclosed in Japanese Patent No. 1317667, is to irradiate the end surface of the glass substrate with laser light within 70 degrees of the longitudinal direction of the end surface of the glass substrate and within 70 degrees of the thickness direction of the glass substrate, and the speed of the glass substrate is 0.1 to 200 mm/s, while irradiating the laser beam with a cooling gas, the air is blown, and the end face of the glass substrate and the microcracks are melted by heating to smooth the end surface of the glass substrate. SUMMARY OF THE INVENTION The present invention provides a device for removing edge defects of a glass sheet, the structure of which comprises: a stage for carrying a glass sheet, and a laser output unit for outputting a light of 201226093. An optical path guiding unit is disposed on the optical path of the laser beam to guide the laser light into a laser beam and illuminate one end surface of the edge of the glass sheet. The glass sheet comprises a sheet material such as a glass substrate or a mirror. And a control unit 'electrically coupled to the laser output unit and the optical path guiding unit' for controlling the laser light exposure of the laser output unit, the time history and the energy density, and the control of the light path guiding unit to the laser beam The path of the shot and the speed of movement are such that a layer of glass shavings is split at the end face to achieve the defect of removing the edge of the glass sheet, and the end surface of the smooth surface can be formed. [Embodiment] At the beginning of the research of the present invention, the glass powder is first placed on the defect on the end surface of the glass sheet, and then the laser light is irradiated on the end surface of the glass sheet, and the glass powder is sprayed or irradiated by the laser light. The laser light is irradiated on the end surface of the glass plate, and then the glass powder is placed, and the defects of the edge of the glass plate cannot be removed. Another method is to use the laser light to illuminate the end surface of the glass plate to a high temperature state, and then flatten it with an external force, because the laser is used. When the light is irradiated on the end face of the glass sheet to remove the laser light, the energy after the light is irradiated rapidly decreases, and the defect of the edge of the glass sheet can not be removed by flattening. The experiment of the present invention was successfully described as follows. The invention utilizes a laser beam to illuminate the end surface of the glass sheet to produce a temperature gradient difference of the crucible, thereby generating a splitting effect on the end surface to achieve the defect of removing the edge of the glass sheet, and further forming a smooth surface on the end surface. The embodiments of the present invention are described in detail below with reference to the drawings. As shown in FIG. 1 , the device for removing the edge of the glass sheet 10 with a small amount of 201226093 in this embodiment comprises: a loading table 2 〇, which can hold a glass plate 1 〇, and the glass plate 1 〇 2 can be fixed movement. The end face 11 to be processed is oriented to the outside. _ laser output list, 20 on 'and 31. An optical path guiding unit 4. The light: the meta-transmission can be a known device, and the light disposed in the laser beam 31 is optically guided by the optical path guiding unit 4, and can be guided by the incident light '(4) as a laser beam: not/ Out) 'On the edge of the glass plate 10 - end face „. The laser output unit 30 and the optical path guiding system are electrically coupled, the time history and energy density, the control unit 5. The output of the electric field back: 51:=hai The refraction of the laser beam of the optical path guiding unit 4: the surface of the laser beam iiU. The illumination of the laser beam 41 can cause defects at the edge of the end glass sheet, and the end surface 11 can be formed to be smooth-t In this embodiment, the step of removing the edge micro method of the glass sheet 10 includes: step sls, irradiating with a laser beam 41, the end surface u of the glass sheet 10, and step S20, controlling the laser to make the laser The light beam 41 sequentially walks through the glass sheet 10 (or the starting point to the end point of the processing region to be split), and the end surface U of the glass sheet 10 has a high temperature gradient between the irradiation and the non-irradiation of the laser beam 41. Poor, and at this end face u is produced by splitting - the layer of glass S (as shown in Figure 5) 'make the end The surface (4) is a smooth processed surface, and the splitting direction is the direction along the irradiation path t of the laser beam 41. Referring again to Fig. 3, and referring to the figure 丨, in the above embodiment, the 201226093 carrier 20' can control the movement in the x, y, and z-axis directions, so that the illumination path t of the laser beam 41 includes a plurality of parallel lines with the short side 12 of the end surface u of the glass sheet 1G, and one line is maintained between each parallel line. The pitch p, and the illumination path t is sequentially: triggering the f-field 31. After the illumination, the laser beam 41 is guided by the $-way guide to 4G to walk parallel to the short side 12 And stopping the irradiation of the laser beam 31, and moving the irradiation position of the laser beam w according to the path t2; triggering the irradiation of the laser beam 31 again, and moving according to the path t3, stopping the illumination and moving according to the path t4 And the spring repeats this - the illumination and movement method takes the entire end surface u area (or the starting point to the end point to be split). Referring to Figure 4, and referring to the figure!, in the above embodiment, The irradiation path t of the laser beam 41 includes the long side 1 of the end face u of the glass sheet 1 () 3 liters y into a plurality of parallel lines, maintaining a distance p ' between each parallel line and the direction of the illumination path t is sequentially: triggering the laser light ^ after irradiation, using the light path guiding unit 40 to make the (four) ray The beam 41 travels parallel to the path t5 of the long side 13; the laser beam 31 is stopped, and the irradiation position of the laser beam 41 is moved according to the path t6; the irradiation of the laser beam 31 is triggered again, and Move according to the path π, then stop the illumination = road = 8 movement, and repeat this - the illumination and movement mode goes through the entire end face 11 region. In the above embodiment, the laser output unit 30 outputs the laser beam " The wavelength is preferably between 3 and 12, or better than 9 to 12 um. In the above embodiment, the irradiation energy of the laser beam 41 is controlled to be cleaved. The thickness of the layer of glass shavings from 201226093 may be between 丨um and 丨mm. In the above embodiment, the speed of the laser beam 41 with respect to the end face 11 of the glass sheet is greater than 500 mm/s. In the above embodiment, the pitch P of the irradiation beam 41 of the end face u of the glass sheet 10 is: (spot diameter d/25) $ pitch spot diameter d, wherein the spot diameter d is the reshaped laser beam 41. The spot size after focusing is 'the spot diameter d after the focus is reduced by the energy distribution to the width of the most partial Ι/e2, and e is the base of the natural logarithm function. And the energy density of the laser beam 41 is between "(7) 4 and l5N1 〇 6w / cm 2 . Please refer to FIG. 5 and FIG. 6 again, in this embodiment, the device or the application step of the previous embodiment is large. The portion is the same, but further includes a supply air blowing nozzle 60, which can output the cooling gas g to the glass sheet 1 or the end surface u region after the reshaping the laser beam 41 is irradiated, thereby further improving the The temperature gradient is poor, and the splitting speed is increased. The value of one k is as shown in Fig. 2 and Fig. 5. At the beginning of the execution step, the end face 11 of the glass sheet 10 can be pre-engraved with a score 14 as the starting point of the splitting. Or the end point, of course, it is also possible to pre-engage both the point and the end point. The indentation 14 can be engraved with a mechanical cutter or laser light. The invention is characterized in that the invention utilizes laser light in the glass sheet. After the end face is irradiated, the glass plate absorbs the heat of the laser light and forms a high temperature gradient to form a thermal stress to form a thermal stress, so that the end face of the glass plate cracks a layer of glass chips, thereby eliminating microcracks on the edge surface of the glass plate. Glass plate The surface is smooth and flat, and the stress strength of the glass can be increased. In summary, only the embodiments or examples of the technical means of the present invention used to solve the problem are described, and are not intended to limit the scope of implementation of the patent of the present invention. The equivalent changes and modifications made in accordance with the scope of the patent application of the present invention or the scope of the invention are covered by the scope of the invention. 201226093 [Simplified illustration of the drawings] Figure 1 illustrates the removal of the glass of the present invention. 2 is a schematic block diagram of an embodiment of a device for removing micro-defects at the edge of a sheet; FIG. 2 is a flow chart showing the steps of a method for removing micro-defects at the edge of a glass sheet of the present invention; FIG. 3 is a perspective view of the first embodiment of the illumination path of FIG. Figure 4 is a perspective view of the second embodiment of the illumination path of Figure 1; Figure 5 is a perspective view of the embodiment of the present invention with a supply air nozzle to provide a glass plate cooling gas; and Figure 6 illustrates the present invention. A schematic diagram of a cooling nozzle for providing a glass plate end face cooling gas is provided. 】 10 Glass sheet 11 End face 12 Short side 13 Long side 14 Scoring 20 Stage 30 Laser output unit 31 Laser light 40 Optical path guiding unit 41 Laser beam 50 Control unit 51 Telecommunications signal 10 201226093 60 Air supply nozzle d Spot diameter g Cooling gas s glass shavings t irradiation path tl, t2, t3, t4 path t5, t6, t7, t8 path P spacing step S10, step S20 method step 11