TW201222576A - Coil-type electronic component and its manufacturing method - Google Patents

Abstract

A coil-type electronic component has a coil inside or on the surface of its base material and is characterized in that: the base material is constituted by a group of grains of a soft magnetic alloy containing iron, silicon and other element that oxidizes more easily than iron; the surface of each soft magnetic alloy grain has an oxide layer formed on its surface as a result of oxidization of the grain; this oxide layer contains the other element that oxidizes more easily than iron by a quantity larger than that in the soft magnetic alloy grain; and grains are bonded with one another via this oxide layer.

Description

201222576 VI. Description of the Invention: [Technical Field] The present invention relates to a coil type electronic component and a manufacturer thereof, and more particularly to a small-sized coil type electronic suitable for surface mounting on a circuit substrate A coil type electronic component using a soft magnetic alloy for a part and a method of manufacturing the same. [Prior Art] Conventionally, as a magnetic core of a choke coil used at a high frequency, a ferrite core, a cut core of a metal thin plate, or a powder magnetic core is used. The use of metal magnets has the advantage of achieving high saturation flux density compared to ferrite. On the other hand, the metal magnet itself has low insulation, so it is necessary to carry out insulation treatment. Patent Document 1 proposes a technique in which a mixture containing a surface oxide film and a mixture of a powder and a binder is compression-molded and then heat-treated in an oxidizing atmosphere. According to this patent document, by performing heat treatment in an oxidizing atmosphere, an oxide layer (oxidation fg) can be formed when the insulating layer on the surface of the alloy powder is destroyed during compression molding, thereby obtaining a DC overlap characteristic with low core loss. Composite magnetic material. Patent Document 2 describes a metal magnet layer formed by using a metal magnet paste containing metal magnet particles as a main component and a conductor pattern formed of a conductor paste containing a metal such as silver, and laminated thereon. A laminated electronic component in which a coil pattern is formed in the body, and a technique of calcining the laminated electronic component in a nitrogen atmosphere at a temperature of 400 ° C or higher. [Prior Art Document] 154655.doc 201222576 [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-11563 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2007-27354 Problem to be Solved The composite magnetic material of Patent Document 1 is formed by using Fe-Al-Si powder having an oxide film formed on its surface in advance, so that a large pressure is required for compression molding. In addition, when it is applied to an electronic component such as a power inductor that requires a larger current to flow, there is a problem that it is not possible to sufficiently cope with further miniaturization. The laminated electronic component of Patent Document 2 requires the control glass to be uniformly coated with the metal magnet particles. It is necessary to utilize the nitrogen atmosphere, and there is a problem that the production cost rises. The present invention has been made in view of the above circumstances, and provides a coil type electronic component which can be produced at low cost and which has both high magnetic permeability and high saturation enthalpy density. The magnet. [Means for Solving the Problem] The inventors of the present invention have diligently studied to achieve the above object, and as a result, have found that the soft magnetic green gold particles containing iron, broken, and iron easily oxidized are mixed with the bonding material. Forming, heat-treating the shaped body in an oxygen environment to decompose the bonding material, and oxidizing the surface of the soft magnetic alloy particles to smear the layer, the magnetic material after the reduction is higher than the heat treatment of the heat treatment 154655.doc 201222576 刖rate. Further, the inventors have found that the soft magnetic alloy particles in the heat-treated molded body are bonded to each other via the oxide layer. The present invention has been completed based on the discovery of the edge, which is as follows. (1) A coil type electronic component characterized in that it has a coil inside or on a surface of an element body, and the element body is a soft magnetic alloy particle containing iron, bismuth and an element which is easily oxidized by iron (also called "Alloy particles" and "soft magnetic particles" are grouped; an oxide layer formed by oxidation of the particles is formed on the surface of each soft magnetic alloy particle, and the smectic oxide layer contains more than the s-alloy particles. An element in which iron is easily oxidized; particles are bonded to each other via the oxide layer. (7) The coil type electronic component of (1), wherein a portion of the oxide layer in which the soft magnetic particles are bonded to each other is thicker than an oxide layer which does not involve the surface of the bonded soft magnetic particle. (3) The coil-type electronic component of (1) wherein the thickness of the oxide layer of the portion where the soft magnetic particles are bonded to each other is thinner than the oxide layer which does not involve the surface of the bonded soft magnetic particle. (4) The coil type electronic component of (1) or (7), wherein at least a portion of the soft magnetic particles is a particle containing an oxide layer having a thickness of 50 nm or more. (5) The coil type electronic component of any one of (1) to (4), wherein the oxide layer in which the particles are bonded to each other is the same phase. The above-mentioned iron-like alloys are more likely to be oxidized by the coil-type electronic parts of any one of (1) to (5). (7) The coil type electronic component according to any one of (1) to (5), which is easily oxidized, is an element. 154655.doc 201222576 (8) The coil type electronic component of (6), wherein the composition of the soft magnetic alloy is 2 to 8 wt%, 1.5 to 7 wt%, and 88 to 96.5 wt% of iron. (9) The coil type electronic component according to (7), wherein the composition of the soft magnetic alloy is 2 to 8 wt% of aluminum, 1.5 to 12 wt% of ruthenium, and 80 to 96.5 wt0 / Torr of iron. (10) The coil type electronic component according to any one of (1) to (9) wherein the soft magnetic particle has an arithmetic mean particle diameter of 30 μm or less. (11) The coil-type electronic component according to any one of (1) to (10), wherein the oxide layer is sequentially included from the side of the soft magnetic particle side toward the outer side: the content of the iron component is lowered and the element is easily oxidized The first oxide layer having an increased content and the second oxide layer having a reduced content of the iron component and a reduced content of the element which is easily oxidized. (12) The coil-type electronic component according to (1), wherein the crucible has an inflection point in the first oxide layer as viewed from the soft magnetic particle side. (13) The coil type electronic component of any one of (1) to (12), wherein the oxide layer in the crucible is analyzed by energy dispersive ray ray using a scanning electron microscope and the element which is easily oxidized by the ZAF method is relative to The intensity ratio of the peak of the iron is greater than the ratio of the element which is easily oxidized in the above-mentioned particles to the intensity of the wave of iron. 0 (14) The coil type electronic part of any one of (1) to (13) wherein the end of the coil is The conductor film formed on the surface of the above-mentioned element body is electrically connected. f is a wire-type electronic component characterized in that it has a coil, and the element body is composed of a soft magnetic alloy particle group; and an oxide layer formed by oxidation of the particle is formed on the surface of each soft magnetic alloy particle. The oxide layer 154655.doc 201222576 contains a larger amount of metal which is more easily oxidized than iron than the alloy particles; the particles are bonded to each other via the oxide layer; and a coil conductor is formed inside the element body. (16) The coil type electronic component of (15), wherein the coil conductor is a conductor pattern and is a conductor which is simultaneously calcined with the element body. (17) The coil type electronic component of (15) or (16), wherein the metal in the oxide layer which is more easily oxidized by iron is a network. (18) The coil type electronic component of (15) or (16), wherein the metal in the oxide layer which is easily oxidized by iron is aluminum. (19) A method of manufacturing a coil type electronic component in which a coil is provided in a body, the manufacturing method comprising the steps of: pressurizing a mixture of a binder and a soft magnetic alloy particle to obtain a shape The molded body is heat-treated in an atmosphere containing oxygen to form an oxide layer on the surface of the soft magnetic alloy particles, and the soft magnetic alloy particles are bonded to each other via an oxide layer to obtain an element body; and a coil is provided in the element body and externally derived use. (20) - Manufacturer of coil type electronic parts

The manufacturing method of the coil type electronic component comprises the steps of: processing a mixture of the sub-sheet into a sheet shape; and obtaining a formed body by using a conductive pattern; and heat-treating the shaped body to cause the soft magnetic alloy particles to be wired to each other Body; and I54655. The method of manufacturing a coil type electronic component according to (19) or (20), wherein the oxygen environment is an atmospheric environment. [Effect of the Invention] According to the present invention, since the oxide layer formed by oxidation of the particles is used as the insulating layer of each of the soft magnetic particles, it is not necessary to mix the resin or the glass into the soft magnetic particles for the purpose of achieving insulation. Further, it is not necessary to apply a large pressure during molding as compared with the Fe-Al-Si powder whose surface has been previously oxidized. Therefore, a magnet which can be produced at low cost and which has both high magnetic permeability and high saturation magnetic flux density can be obtained. [Embodiment] In the present specification, the "oxidation layer formed by oxidation of particles" is an oxide layer formed by an oxidation reaction of natural oxidation of particles, which means that a molded body of particles is formed in an oxidizing atmosphere. The heat treatment is an oxide layer in which the surface of the particles reacts with oxygen to grow. Furthermore, a "layer" is a layer that can be clearly identified according to composition, structure, physical properties, appearance, and/or manufacturing steps, including those whose boundaries are clearly defined, whose boundaries are not clear, and which are included in the particles as continuous films, Some have a non-continuous part. In some cases t, the "oxide layer" is a continuous oxide film covering the entire particle. Further, such an oxide layer has any of the features specified in the present specification, and the oxide layer grown by the oxidation reaction of the particle surface can be distinguished from the oxide film layer which is coated by other methods. In addition, in the present specification, "comparative with ·", "comparable with", etc., means that the expression of comparison means that the difference in substance indicates a difference in the degree of significant difference in function, structure, and effect. Hereinafter, referring to FIG. 1 and FIG. 2, the use of soft magnetic 154655 for electronic parts of the present invention. Doc 201222576 The first embodiment of the elemental body of the alloy is described. Fig. 1 is a side elevational view showing the appearance of the element body 1 using a soft magnetic alloy for electronic parts according to the embodiment. In the present embodiment, the soft body of the soft magnetic alloy for electronic components is used as the magnetic core for winding the coil of the wound wire type inductor. The magnetic core 11 includes a plate-shaped core portion 11a for winding a coil in parallel with a mounting surface of a circuit board or the like, and a respective one of the opposite ends of the winding core portion 11a. The flange portions lib and lib have a drum shape. The ends of the coils are electrically connected to the conductor film 14 formed on the surfaces of the flange portions lib and lib. The element body 1 using a soft magnetic alloy for an electronic component according to the present embodiment is characterized in that it is composed of a group of soft magnetic alloy particles containing iron (Fe), bismuth (Si), and an element which is easily oxidized by iron. An oxide layer formed by oxidation of the particles is formed on the surface of the soft magnetic particles, and the oxide layer contains a larger amount of chromium than the alloy particles, and the particles are bonded to each other via the oxide layer. The following § contains the element name or element symbol. 2 is an enlarged schematic view showing a cross section of the element body 10 using a soft magnetic alloy for an electronic component according to the embodiment, and is a composition image obtained by taking a cross section of the thickness direction of the element body by SEM (scanning electron microscope) at 3000 times. .  And the map made. .  The plurality of particles and the oxide layer in the above pattern diagram can be identified by the means described below. First, the surface was exposed by a cross section in the thickness direction of the center of the element body, and the obtained image was obtained by scanning the obtained cross section at 3,000 times using a scanning electron microscope (SEM). Scanning electron microscopy (SEM) will make the difference between the constituent elements and the composition like I54655. Doc 201222576 is presented in terms of contrast (brightness). Then, each pixel of the composition image obtained in the above is classified into three levels of brightness levels. Regarding the brightness level 'the simple average value of the major axis dimension ^ and the minor axis dimension d2 of the profile of each particle in the particle which can be completely confirmed in the above-mentioned composition image D = (dl + d2) / 2 The composition contrast of the particles larger than the raw material particles (the average particle size of the alloy particles in which the oxide layer is not formed) is large, and the portion of the composition image that satisfies the brightness level is determined as the particle. Further, it is possible to judge the portion of the brightness level which is darker than the above-described central brightness level as the oxide layer 2. Further, it is preferred to carry out a plurality of measurements. Further, it is possible to judge the portion of the brightness level which is brighter than the above-mentioned central brightness level as the gap 3. Regarding the measurement of the thickness of the oxide layer 2, the thickness of the oxide layer 2 can be determined by the shortest distance from the interface between the particle and the oxide layer 2 to the interface between the oxide layer 2 and the gap 3 as the thickness of the oxide layer 2. . Specifically, the thickness of the oxide layer 2 can be found by the following method. The SEM (scanning electron microscope) was used to take a section of the thickness direction of the element body 10 at a magnification of 1 to 3 or 3, and the center of one particle of the obtained composition image was obtained using an image processing software. Eds (energy dispersive ray ray analysis device) performs linear analysis from the center point in the radial direction. A region in which the oxygen concentration is three times or more the oxygen concentration at the center point is determined as an oxide (that is, considering that the jitter of the measurement is three times as a threshold value, and that the non-oxidized layer is determined to be less than three times, the actual oxidation is performed. The oxygen concentration of the layer may also be 1 〇〇 2 (above), and the length to the outer peripheral portion of the particles is measured as the thickness of the oxide layer 2. Yu 154655. Doc 10 201222576 Some of the methods described in this manual can be used according to the identification method of the brightness level, the identification method according to the oxygen concentration, the identification method according to the composition ratio described later, and the identification based on the peak intensity ratio. The method of delineating the oxide layer is appropriately selected by any of the known methods relating to the presence or concentration of oxygen species (concentration). Further, in some aspects, the average particle diameter of the soft magnetic particles having an oxide layer is substantially the same as or substantially the same as the average particle diameter of the raw material particles (particles before forming and heat treatment). The thickness of the oxide layer 2 formed on the surface of the alloy particles may be different in thickness depending on the portion of the (10) alloy particles. As a state, a high strength effect is obtained by forming the entirety into alloy particles bonded to each other with a thicker oxide layer than the oxide layer on the surface of the alloy particles (the oxide layer adjacent to the void 3). Further, as another aspect, the effect of high magnetic permeability is obtained by forming the entirety into alloy particles which are bonded to the oxide layer which is thinner than the oxide layer of the alloy particles (the oxide layer adjacent to the void 3). * Further, 'as a different aspect', at least the soft magnetic particle group is partially an oxide layer having a thickness of 50 nm or more (as a surface oxidized particle. ^ As another aspect, the above particles are combined with each other) The oxide layer is preferably the same phase. The term "the same phase" means substantially I = in the oxide layer between the particles (except for the void adjacent to the oxide layer), and each particle is formed by the same crystal and The oxide layer is combined, and this matter can be confirmed by a transmission electron microscope (TEM). In addition, the structure of the crystal is shown in Figure 4, which can be borrowed from 154655. Doc 201222576 Confirmed by the x-ray diffraction analysis device. As will be described later, the structure, composition, thickness and the like of the oxide layer can be controlled by the composition of the raw material particles, the distance between the particles (filling ratio), the heat treatment temperature, the heat treatment time, the amount of oxygen in the heat treatment environment, and the like. The thickness of the oxide layer is also non-uniform between the particles. In some aspects, substantially all or most of the oxide layer has a thickness in the range of 10 to 200 nm. In other aspects, the oxide layer is preferably viewed from the side of the alloy particles, and includes: a first oxide layer having a reduced content of the iron component and an increased content of the element which is easily oxidized, and a content of the iron component being lowered and A second oxide layer having a reduced content of elements that are easily oxidized. Further, it is more preferable that the content of the ruthenium in the first oxide layer has an inflection point as viewed from the side of the alloy particles. Further, the boundary between the first oxide layer and the second oxide layer may be clearly or blurred. This structure can be confirmed by an EDS (Energy Dispersive Xenon Radiation Analyzer) as shown in Fig. 5, and an effect of suppressing a decrease in saturation magnetic flux density can be obtained. The composition ratio of the particles in the element body using the soft magnetic alloy for electronic parts described above can be confirmed as follows. First, the raw material particles are polished so that the cross section passing through the center of the particle is exposed, and the cross section obtained by polishing is obtained by scanning electron microscopy (SEM) at 3,000 times to obtain a composition image for which the energy dispersive X-ray is obtained. Analysis (EDS), the composition of 1 μηι □ near the center of the particle was calculated by the ZAF method. Then, the cross section in the thickness direction of the substantially center of the soft magnetic alloy body for the electronic component is exposed, and the cross section obtained by polishing is scanned using electron microscopy 154655. Doc 201222576 Mirror (Let) obtains a composition image by taking 3× times of shooting. From the composition image, the rim of the particle profile can be completely confirmed. The long axis dimension of each particle section (4) Short axis rule is 2 simple The particles having a larger average value D=(di+d2)/2 than the average particle diameter _% of the raw material particles are calculated by the energy dispersive ray ray analysis (EDS), and the intersection of the major axis and the minor axis is calculated by the ZAF method. The composition of the i μιη□ is compared with the composition ratio of the above-mentioned raw material particles, whereby the composition ratio of the alloy particles in the element body using the soft magnetic alloy for electronic parts is known (since the composition of the raw material particles is known) Therefore, the composition of the alloy particles in the element body can be determined by comparing the compositions calculated by the ZAF method with each other. The thickness of the oxide layer in the element body using the soft magnetic alloy for electronic parts described above is a simple average value of the following thickness tl and thickness t2 of the oxide layer existing on the surface of the particle identified by the above method and the surface of the crucible. The obtained average thickness T = (tl + t2) / 2, the thickness tl is the thickness of the thickest portion of the thickness of the oxide layer from the surface of the particle crucible, and the thickness t2 is the thickness of the thinnest portion. As an aspect of the present invention, examples of the element which is easily oxidized include a chromium form. The use of a soft magnetic alloy for electronic parts, including the chromium wt%, 矽1. 5 to 7 wt%, iron 88 to 96 5 wt% of a plurality of particles 1, 1 and an oxide layer 2 formed on the surface of the particle 1. The oxide layer 2 contains at least iron and chromium, and the peak intensity ratio R2 of chromium relative to iron obtained by energy dispersive X-ray analysis using a transmission electron microscope is substantially larger than the peak intensity ratio R1 of chromium in the particles (for example, a ruler). 2 is several times or more and several tens of times or more of R1). In addition, there are gaps between the plurality of particles 3 154655. Doc 13 The part of 201222576. In the soft magnetic alloy body for an electronic component, the peak ratio R2 of chromium to iron in the oxide layer 2 and the intensity ratio R1 of chromium in the particle 1 with respect to iron can be obtained as follows. . First, the particles in the above composition image are obtained by SEM-EDS! The inner portion has a composition in which the long axis is 1 μιη α centered on the point intersecting the short axis d2. Next, by SEM-EDS, the center point of the thickness of the oxide layer in the thickness portion of the oxide layer corresponding to the average thickness T = (tl + t2) / 2 of the oxide layer 2 on the surface of the particle J in the composition image is obtained. The average thickness T = (tl + t2) / 2 of the composition of 1 μm η □ is determined by the thickness 丨丨 of the thickest portion of the oxide layer 2 and the thickness t2 of the thinnest portion. Then, by the particles! The strength of the inner iron ^^^, the strength of the chromium, ClCrKa, can be determined as the peak intensity ratio of chromium to iron R1 == ClCrKa / ClFeKa. Further, from the strength C2FeKa of the iron at the center of the oxide layer 2 and the strength C2CrKa of the chromium, the peak intensity ratio of chromium to iron can be determined as R2 = C2crKe / C2peKa. Further, in the element body using the soft magnetic alloy for electronic parts of the present invention, it is bonded via an oxide layer formed on the surfaces of the adjacent particles 1 and 1, and can be produced by the composition image as shown in FIG. Confirmed by the pattern diagram. Further, the combination of the oxide layers formed on the surfaces of the adjacent particles 1 and 1 results in an improvement in the magnetic properties and strength of the element body using the soft magnetic alloy for electronic parts. In the production of the element body of the soft magnetic alloy for electronic parts of the present invention, first, a binder such as a thermoplastic resin is added to the raw material particles containing chromium, bismuth or iron, and the mixture is stirred and mixed to obtain a granulated product. . Following 154655. Doc 201222576, the granulated product is compression-molded to form a molded body, and the obtained molded body is heat-treated in the air at a temperature of a bark. By heat-treating in the atmosphere, the mixed thermoplastic resin can be degreased, and the chromium which is originally present in the particles by the heat treatment and moved to the surface, and the iron which is the main component of the particles are combined with oxygen, An oxide layer containing a metal oxide is formed on the surface of the particle, and the oxide layers on the surface of the adjacent particle are bonded to each other. The resulting oxide layer (metal oxide layer) is mainly composed of an oxide composed of a complex, which ensures insulation between particles, and provides a soft body using a soft magnetic alloy for electronic parts. Examples of the raw material particles include (IV) particles produced by a water-cut method, and examples of the shape of the raw material particles include a spherical shape and a flat shape. In the present invention, if the heat treatment temperature is raised in an oxygen atmosphere, the binder will be divided: and the soft magnetic alloy body will be oxidized. Therefore, as a heat treatment of the molded body, the car is kept at atmospheric temperature for 400 minutes at 400 ° C. By performing heat treatment in this temperature (4), an excellent oxide layer can be formed: _~8〇〇t. The heat treatment may also be carried out in an environment other than the atmosphere, such as an oxygen partial pressure or a large = same degree. In the reducing environment or in the non-匕%蜒, the heat treatment does not generate oxidation containing metal oxides, so the particles are sintered to each other, resulting in a significant decrease in volume resistivity. The oxygen concentration and the amount of water vapor in the environment are not particularly limited. If it is produced or considered, it is preferably atmospheric or dry air. For 4GG (: when 'excellent strength and excellent = resistivity. On the other hand, if the heat treatment temperature is greater than Jing, B & increase, but the volume resistivity decreases. 154655. Doc 15 201222576 By setting the holding time in the above heat treatment temperature to 丨min or more, an oxide layer containing a metal oxide containing Fe and chromium is easily formed. The thickness of the oxide layer is saturated at a certain value, so the upper limit of the holding time is not particularly set, but it is considered that the productivity is set to be 2 hours or less. As described above, by setting the heat treatment conditions to the above range, it is possible to simultaneously satisfy the excellent strength and the excellent volume resistivity, and it is possible to obtain an element body using a soft magnetic alloy having an oxide layer. That is, the formation of the oxide layer is controlled by heat treatment temperature, heat treatment time, oxygen enthalpy in the heat treatment environment, and the like. In the soft magnetic alloy body for an electronic component of the present invention, high magnetic permeability and high saturation magnetic flux density can be obtained by subjecting the iron powder to an alloy powder of an element which is easily oxidized by iron. Also, with this high magnetic permeability, it is possible to obtain an electronic component which flows more current than the previously smaller soft magnetic alloy body. Further, unlike the coil component in which the soft magnetic alloy particles are bonded by resin or glass, the present invention can be produced at low cost without using a resin or a glass, and without applying a large pressure to form. In addition, the soft magnetic alloy body for electronic parts of the present embodiment can maintain a high saturation magnetic flux density and prevent the glass component and the like from floating to the surface of the element body after heat treatment in the atmosphere, and can provide a small size with high dimensional stability. Wafer-like electronic parts. Next, a first embodiment of an electronic component according to the present invention will be described with reference to Figs. 1, 2, 6, and 7. The circular cymbal and Fig. 2 are the same as the above-described embodiment of the soft magnetic alloy body for an electronic component, and thus the description thereof is omitted. Figure 6 is 154655. Doc • 16· 201222576 A side view showing a part of a perspective view of the electronic component of the embodiment. Fig. 7 is a vertical cross-sectional view showing the internal structure of the electronic component of the embodiment. The electronic component 20 of the present embodiment is a wound-type wafer inductor of a coil type electronic component. The electronic component 20 includes the above-described soft magnetic alloy body 10 for electronic components, that is, a drum-shaped magnetic core 11, and a pair of plate-shaped magnetic cores 12 and 12. The illustration of the pair of plate-shaped magnetic cores 12 and 12 is omitted. This is composed of the above-described element body 10, and connects the flange portions 11b and 11b of the drum-shaped magnetic core 11 to each other. A pair of outer conductor films 14, 14 are formed on the mounting faces of the flange portions lib and lib of the magnetic core 11, respectively. Further, a coil 15 including an insulated coated wire is wound around the core portion Ua of the magnetic core to form a wound portion 15a, and both end portions 15b and 15b are thermocompression bonded to the flange portions nb and lib, respectively. On the outer conductor films 14 and 14 of the mounting surface, the outer conductor films 14 and 14 include a fired conductor layer 14a formed on the surface of the element body 10, and a Ni plating layer Mb laminated on the fired conductor layer Ma and The Sn layer is plated with Me. The plate-like cores 12 and 12 described above are attached to the flange portions lib and lib of the drum core i! by a resin-based adhesive. The electronic component 20 of the present embodiment includes the above-described element body 10 using a soft magnetic alloy for electronic components as a magnetic core 11, and the element body 1 includes a plurality of particles containing chromium, lanthanum, and iron, and an oxide layer The surface generated on the surface 'at least containing iron and chromium, by energy dispersive X-ray analysis using a scanning electron microscope', the ratio of the peak intensity of chromium to iron calculated by the ZAF method is greater than that of the above-mentioned particles relative to iron The peak intensity ratio is combined with the oxide layers formed on the surfaces of the adjacent particles. Further, at least one pair of outer conductor films 14, 154655 are formed on the surface of the element body 10. Doc • 17-201222576 14° The use of the soft body of the soft magnetic alloy for electronic components in the electronic component 2 of the present embodiment is the same as that described above, and thus the description thereof is omitted. The magnetic core 11 has at least a core portion 丨丨a, and the shape of the cross section of the core portion 1 丨 & can be a plate-like (rectangular) circular or elliptical shape. Further, it is preferable that at least the flange portion 11 is provided at the end portion of the winding core portion 1丨3, and if the flange portion 11 is present, the position of the coil relative to the core portion 11a can be easily controlled by the flange portion i丨. Inductive and other characteristics are stable. The magnetic core 11 has a state of having a flange and having two flanges (drum core), and the axial length of the core portion 丨a is arranged to be perpendicular to the mounting surface. In the aspect, the axial length direction of the core portion 丨丨a is arranged to be horizontal with respect to the mounting surface. In particular, it is preferable that the one end of the shaft of the winding core portion 11a has a flange, and the axial length direction of the winding core portion 11a is arranged to be perpendicular to the mounting surface, which is preferable for having a low-returning effect. The conductor film 14 is formed on the surface of the element body (7) using a soft magnetic alloy for electronic parts, and the end portion of the coil is connected to the conductor film 14. The conductor film 14 has a fired conductor film and a resin conductor film. As an example of forming a fired conductor film on the soft magnetic alloy body 10 for an electronic component, there is a method of firing at a specific temperature using a paste in which silver is added to silver. As an example of forming a resin conductor film on a body of a soft magnetic alloy for an electronic component, there is a method of applying a paste containing silver and an epoxy resin, and then performing a specific degree of treatment. In the case of firing a conductor film, heat treatment may be performed after forming a conductor film. I54655. Doc 201222576 '·The material of the circle is copper and silver. Preferably, the coil is coated with an insulating film. The shape of the coil has a flat line, a square line, and a round line. In the case of a flat wire or a square wire, the gap between the winding wires can be made small, which is preferable for miniaturizing the electronic component. A specific example of the conductive film layer a on the surface of the element body 1G of the soft magnetic alloy for the electronic component for use in the electronic component 20 of the present embodiment, which can be formed by the following, can be formed as follows. A fired electrode material paste containing metal particles and a glass frit is applied to the mounting surface of the flange portion Ub and the crucible of the magnetic core u, which is the above-mentioned element body 1 (the tenth embodiment is a fired Ag|* The heat treatment is performed in the atmosphere, whereby the electrode material is directly sintered and fixed on the surface of the element body 10. Further, a metal plating layer of Sn and Sn may be formed by electrolytic plating on the surface of the formed fired conductor layer 14a. Further, as an aspect, the electronic component 2 of the present embodiment can also be obtained by the following manufacturing method. The package $ contains the network 2~8*1; /.矽1. 5~7~1. /. , iron 88~96. 5\^0/〇 is formed as a material sample of a specific composition example and a material of a binder, and a baked electrode material paste containing a metal powder and a glass frit is applied to at least a surface of the obtained molded body which is a mounting surface. Thereafter, the obtained shaped body is subjected to heat treatment in the atmosphere at 400 to 900 °C. Further, a metal plating layer may be formed on the formed fired conductor layer. According to this method, a soft magnetic alloy body for an electronic component in which an oxide layer is formed on the surface of the particle and an oxide layer on the surface of the adjacent particle is bonded to each other, and a conductor layer of the conductor film on the surface of the element body can be simultaneously formed. The manufacturing process can be simplified. 154655. Doc •19- 201222576 Since iron is more oxidized than iron, it can suppress excessive oxidation of iron during heating in an oxidizing environment compared to pure iron. As an element which is easy to oxidize other than chromium, aluminum is mentioned. Hereinafter, a modification of the embodiment of the soft magnetic alloy body for an electronic component of the present invention will be described with reference to Fig. 8 . Fig. 8 is a perspective view showing the internal structure of a soft body using a soft magnetic alloy for an electronic component, which is an example of a modification. The element body of the present modification has a rectangular parallelepiped shape, and an inner coil 35 wound in a spiral shape is embedded therein, and the extraction portions at both end portions of the inner coil 35 are exposed to one another in the mutual orientation of the element body 10·. To the end face. The elementary body ι is formed of a laminated body wafer 31 together with the inner coil 35 embedded therein. The soft magnetic alloy body of the electronic component according to the first modification is characterized in that it contains a plurality of particles containing chromium, stellite, and iron in the same manner as the soft magnetic alloy body of the electronic component according to the first embodiment. And an oxide layer formed on the surface of the particles, containing at least iron and chromium, and the peak intensity ratio of chromium to iron obtained by energy dispersive X-ray analysis using a scanning electron microscope is larger than that of chromium in the particles. The peak intensity ratio of iron and the oxide layers formed on the surfaces of adjacent particles are combined with each other. The soft magnetic alloy body of the electronic component according to the present modification has the same effects and effects as those of the soft magnetic alloy body of the electronic component of the above-described embodiment. Next, a description will be given of a soft magnetic alloy for use in an electronic component according to an embodiment of the electronic component of the present invention. The electronic component 40 is opposite to the opposite end of the element body 10' of the above modification. The doc 201222576 surface and its vicinity include a pair of outer conductor films 34, 34 which are formed to be connected to the drawn portion where the inner coil 35 is exposed. In the same manner as the outer conductor films 14 and 14 of the electronic component 20 of the above-described first embodiment, the outer conductor films 34 and 34 include a fired conductor layer and a plating layer formed on the fired conductor layer. See layers, plated with layers. The electronic component 40 of the present modification also has the same functions and effects as those of the electronic component 2 of the above-described first embodiment. Further, the composition of the plurality of particles constituting the soft magnetic alloy body for an electronic component in the present invention preferably contains 2% of chromium and 8% by weight, and 丨矽$7 m〇/. '嶋铁狐5 wt%. When the composition is within this range, the soft magnetic alloy body for electronic parts of the present invention exhibits higher strength and higher volume resistivity. In general, the more Fe content of a soft magnetic alloy towel, the higher the magnetic flux density (1) and the DC superposition characteristic are favorable, but when used as a magnetic element, the rust or the rust falls off at high temperature and high humidity. Waiting to become a problem. Further, as a representative of stainless steel, it is known that adding a complex to a magnetic alloy has an effect on the resistance to the button. However, the powder magnetic core obtained by heat-treating the alloy powder containing the above-mentioned alloy powder in a non-oxidizing environment has an specific resistance of 10 - «Qcm" measured by an insulation resistance meter, although it has a degree of no thirst loss between particles. The value 'but to form an outer conductor film requires a specific resistance of ι 〇 5 ^ or more 'cannot form a metal ore layer on the fired conductor layer of the outer conductor film. Therefore, the present invention is based on an oxidation environment in which a shaped body comprising a raw material particle having the above composition and a binder is heat-treated to form a surface of the particle. Doc 201222576 comprises an oxide layer of a metal oxide layer and bonds the oxide layers of the adjacent particle surfaces to each other, thereby obtaining high strength. The obtained volume resistivity Pv of the soft magnetic alloy body for electronic parts is greatly increased to be 1〇5 Qcm or more, and the plating conductor layer of the outer conductor film formed on the surface of the element body can be formed without plating extension. A metal plating layer of Ni, Sn, or the like is formed. Further, the reason why the composition is limited in the soft magnetic alloy body for electronic parts of the present invention in a preferred embodiment will be described. The chromium content in the composition of a plurality of particles is less than 2 wt ° /. The volume resistivity is low, and it is impossible to form a metal plating layer on the fired conductor layer of the outer conductor film without causing plating extension. Further, in the case where the chromium is more than 8 wt%, the volume resistivity is also low, and it is impossible to form a metal plating layer on the fired conductor layer of the outer conductor film without causing the plating extension. In addition, as described in the above-mentioned Patent Document 1, an oxide-based coating layer in which an oxide coating layer is formed by heat treatment in the atmosphere by using Fe_Si_A powder is not contained in the oxide. Therefore, the volume resistivity is less than 1 〇 5, and it is impossible to form a metal plating layer on the fired conductor layer of the outer conductor film without causing plating extension. In the soft magnetic alloy body for an electronic component, Si in a composition of a plurality of particles has an effect of improving volume resistivity, but if Si is less than 5"%, the effect cannot be obtained, and on the other hand, it is greater than 7 wt. In the case of %, the effect is also insufficient, and the volume resistivity of the soft magnetic alloy body for electronic parts is less than 105 Qcm, so that it is impossible to form a metal ore on the fired conductor layer of the outer conductor film without causing plating extension. In addition, Si also has a change of 154655. Doc -22- 201222576 Good magnetic permeability, but when Si is more than 7 wt%, the saturation magnetic flux density is lowered due to the relative decrease in content, and the magnetic permeability and saturation magnetic permeability are accompanied by deterioration of formability. The pass density is reduced. When aluminum is used as an element which is easily oxidized other than chromium, it is preferably aluminum 2 to 8 wt%, 矽 1. 5~12 wt%, iron 80~96. 5 wt%. If the aluminum content in the composition of the plurality of particles is less than 2 m%, the volume resistivity is low, and the metal plating layer cannot be formed on the fired conductor layer of the outer conductor film without causing the plating extension. In addition, when the aluminum content is more than 8 «, the saturation magnetic flux density is lowered due to a relatively low Fe content. From the viewpoint of rust prevention, it is preferably 2 to 8 wt% of chromium, 5 to 7 wt% of ruthenium, and 88 to 96 of iron. The composition of 5 wt%. Further, it is also possible to use an alloy particle of iron, aluminum, and antimony in an alloy particle of iron-chromium-bismuth (for example, a total of 5 Å of the alloy particles). In the soft magnetic alloy body for an electronic component, if the iron content S in the composition of the plurality of particles is less than 88% by weight, the saturation magnetic flux density is lowered and the magnetic permeability and the saturation magnetic flux density are lowered as the formability is deteriorated. In addition, the iron content is greater than 96. In the case of 5 wt%, the volume resistivity is lowered due to a relative decrease in the chromium content and the niobium content. Further, in the present invention, the average particle diameter of the plurality of particles is more preferably 5 to 3 Å μηη in terms of the average particle diameter d5〇% (arithmetic mean) of the raw material particles. Further, the average particle diameter of the plurality of particles may be approximated to a value obtained by selecting a particle from a composition image obtained by scanning a scanning electron microscope (SEM) at a magnification of 3,000 times. The profile of the profile can be completely confirmed by the particle, using the long axis dimension of the profile of each particle (4) I54655. Doc -23- 201222576 The simple average value of the short axis dimension d2 is D = (4) The total sum of /2 is divided by the number of the above particles. The alloy metal particle group has a particle size distribution and is in the shape of an ellipse and is not - defined as a spherical shape. Further, when the three-dimensional (planar) observation of the three-dimensional alloy metal particles is performed, the apparent size differs depending on the position of the observed cross section. Therefore, the average particle diameter of the present invention is determined by measuring a large number of particles, and it is preferable to measure at least (10) or more of the particles satisfying at least the condition. The specific method is as follows: The diameter of the largest particle section is taken as the long axis, and the point where the length of the long axis is equally divided is found. = The diameter containing this point and having the smallest particle profile as the short axis. The temple is defined as the long axis size and the short axis size. The particle size of the measurement is as follows. The largest orthogonal particle of the particle profile is arranged in order from largest to smallest, and the particle profile is tired. The ratio is based on the image of the scanning electron microscope (SEM). The particles of the cross section of the particle are removed. The particles of the size of y 5 /❶ which are not completely confirmed by the particles, voids, and oxide layer. When the average particle diameter on the right side is within the range, a high saturation magnetic flux density (= Τ or more) and a high magnetic permeability (27 or more) can be obtained, and at a frequency higher than the above, the eddy current can be suppressed in the particles. loss. The meaning of the specific numerical values disclosed in the specification is the upper limit in the description of the numerical range of the numerical values in some cases and / 154655. Doc •24- 201222576 or the lower limit values are included in the range in some cases and are not included in the range in some cases. In addition, in some aspects, numerical values indicate average values, typical values, median values, and the like. [Examples] Hereinafter, the present invention will be specifically described by way of Examples and Comparative Examples, but the present invention is not limited thereto. In order to judge the magnetic characteristics of the soft magnetic alloy using the soft magnetic alloy for electronic parts, the forming pressure is adjusted between 6 and 12 ton/cm2 in a manner of filling the raw material particles at a rate of 8 〇V0% to form an outer diameter of 丨4 mm. a ring having an inner diameter of 8 mm and a thickness of 3 mm. After heat treatment in the atmosphere, the obtained element body will have a diameter of 0. A 3 mm urethane-coated copper wire coil was wound 20 turns to obtain a test sample. The saturation magnetic flux density Bs' was measured using a vibrating sample magnetometer (manufactured by Toei Industrial Co., Ltd.: VSM) using an inductance-capacitance resistance meter (LCR-meter) (manufactured by Agilent Technologies, Inc.: 4285A) 'measuring frequency 1 〇〇 kHz The magnetic permeability μ was measured. The saturation magnetic flux density Bs is 0. 7 Τ or more is judged to be good. It was judged to be good in the case where the magnetic permeability μ was 2 〇 or more. In order to judge the strength of the element using the soft magnetic alloy for electronic parts, the three-point bending fracture stress was measured as follows using the measurement method shown in Fig. 10 . The test piece for measuring the three-point bending fracture stress was obtained by adjusting the forming pressure between 6 to 12 ton/cm 2 in such a manner that the filling ratio of the raw material particles was 80 vol%, and forming it into a length of 50 mm and a width. After a plate-shaped molded body of 10 mm and a thickness of 4 mm, heat treatment is performed in the atmosphere. 154655. Doc -25- 201222576 It is judged that the fracture stress at the point f is 10 kgf/mm2 or more. It is judged that the saturation magnetic flux density Bs, the magnetic permeability μ, and the three-point bending fracture stress are good. In addition, in order to judge the volume resistivity of the element using the soft magnetic alloy for electronic parts, As shown in Fig. 10, the measurement was carried out in accordance with JIS_K69U. The test piece for measuring the volume resistivity was obtained by adjusting the filling ratio of the raw material particles to 80 vol% to 6 to 12 t〇n/cm2. The molding pressure is formed into a disk shape of 100 mm in diameter and 2 mm in thickness and then heat-treated in = gas. The case where the volume resistivity is W0-3 ncm or more is judged to be acceptable, and 1×10·丨Qcm or more. It is judged to be good, and it is judged to be excellent in the case of lxl 〇 5 ftcm or more. β If the volume resistivity is 1×10-丨, the loss due to eddy current at the time of use at a high frequency can be reduced. Further, if it is lxl05 ncm or more, The metal plating layer can be formed by wet plating on the conductor layer. In addition, the quality of the metal plating layer on the fired conductor layer of the outer conductor film on the surface of the soft magnetic alloy body for electronic components can be judged. , as described below In the embodiment, the shape of the soft magnetic alloy body for the electronic component is set to a drum shape. The quality of the formation of the metal layer on the outer conductor film of the obtained electronic component sample is judged by using a magnifying glass to visually judge the appearance. The Ni and Sn plating layers were continuously formed on the fired conductor layer, and the case where the self-fired conductor layer was not plated to the periphery thereof was judged as 〇, and the other case was judged as 154655. Doc -26- 201222576 is broken as X. (Example 1) As a raw material particle for obtaining a soft magnetic alloy body for an electronic component, an average particle diameter (d50°/.) was used as 10 μm, and the composition ratio was chromium: 5 wt%, 矽: 3 wt%. , Iron: 92 wt% of an alloy powder as a water atomized powder (PF-20F manufactured by Epson Atmix Co., Ltd.). The average particle diameter d50% of the above-mentioned raw material particles was measured by using a particle size analyzer (manufactured by Seiko Co., Ltd.: 93 20HHRA). Further, the particles were polished until the cross section of the particle center was exposed, and a cross section obtained by photographing the obtained cross section at 3,000 times using a scanning electron microscope (SEM, SS-4300SE/N manufactured by Hitachi High-Technologies Co., Ltd.) was obtained. The composition image was calculated by energy dispersive X-ray analysis (EDS), and the composition of 1 μπι □ near the center of the particle and the vicinity of the surface was calculated by the ZAF method, and the above composition ratio near the center of the particle and the composition ratio near the surface of the particle were confirmed. Almost equal. Then, the above particles and polyvinyl butyral (manufactured by Sekisui Chemical Co., Ltd.: S-LEC BL: a solution having a solid content concentration of 30% by weight) were mixed by a wet rotary stirring device to obtain a granulated product. Using the obtained granulated powder, the forming pressure was adjusted between 6 and 12 ton/cm 2 in such a manner that the filling ratio of the plurality of particles was 80 vol%, and a square plate having a length of 50 mm, a width of 10 mm, and a thickness of 4 mm was obtained. The molded body, a circular plate-shaped formed body having a diameter of 100 mm and a thickness of 2 mm, an annular molded body having an outer diameter of 14 mm, an inner diameter of 8 mm, and a thickness of 3 mm, and a core portion (width 1. 0 mmx height 0. 36 mmx length 1. 4 mm) with square flanges at both ends (width 1. 6 mmx height 0. 6 mmx thickness 0. 3 mm) drum core shape, 154655. Doc -27- 201222576 and a pair of plate cores (length 2. 0 mmx width 0. 5 mmx thickness 0. 2 mm) 圆 The disk-shaped molded body, the annular molded body, the drum-shaped molded body, and the pair of plate-shaped molded bodies obtained in the above were heat-treated at 70 ° C for 60 minutes in the air. . The disk-shaped element body obtained by heat-treating the above-mentioned disk-shaped molded body was measured for volume resistivity in accordance with JIS-K6911, and the results are shown in Table 1. In addition, the drum-shaped element body obtained by heat-treating the above-mentioned drum-shaped molded body is polished so as to expose a cross section in the thickness direction passing through substantially the center of the core portion, and is scanned using a scanning electron microscope (SEM). The cross section was taken 3 times to obtain a composition image. Then, each pixel in the composition image obtained in the above is classified into three levels of brightness levels, and the long axis size of the cross section of each particle is dl and short among the particles in which the contour of the particle profile of the composition image is completely confirmed. A simple average value of the axial dimension d2 (4) 组成 The composition contrast of the particles larger than the average particle diameter (d5〇%) of the raw material particles is determined as the breadth level 'the portion of the composition image that satisfies the brightness level as a grain, and the other' The composition contrast is judged to be the oxide layer 2 as compared with the above-described central luminance level dark level ί portion. In addition, the straight result of the above-mentioned self-confidence is bright and the result is shown in the pattern diagram; 2^ is judged as the gap 3, and the obtained = child: the circle of the extracted particle profile in the above composition image In the particles, 'each particle ^ simply flattened the mandrel size dl and the short axis size of the heart is early + mean D = (dl + d2) / particles, by UAW thousand thousand average particle size _%) Calculated by energy dispersive X-ray analysis (EDS) by ZAF method 154655. Doc -28- 201222576 The composition of 1 μΓΠ□ near the intersection of the major axis and the minor axis, compares the composition with the composition ratio of the above-mentioned raw material particles, and confirms the composition ratio of the plurality of particles in the above-mentioned element body and the raw material particles The composition ratio is approximately or substantially equal. Then, the composition of the i μιη port centered on the point where the long axis di and the short axis d2 intersect in the inside of the particle 1 in the composition image is obtained by SEM-EDS, and the result is shown in Fig. 3(A). Next, # by SEM_EDS, the oxide layer 2 on the surface of the particle 1 in the composition image is determined, and the thickness of the oxide layer corresponding to the average thickness T = (tl + t2) / 2 is centered on the center point of the thickness of the oxide layer. In the composition of 丄μηι□, the average thickness T=(u+t2)/2 is obtained from the thickness ^ of the thickest portion of the oxide layer 2 and the thickness 12 of the thinnest portion, and the obtained composition is shown in Fig. 3. (B) Medium. According to Fig. 3(a), the intensity of iron inside the particle i is 4200 count, the strength of chromium (: 1 (: the heart is 1〇〇c〇unt, the peak intensity ratio of chromium to iron is R1=ClcrKa/clFeKa According to Fig. 3(b), the strength of the iron at the center of the thickness of the oxide layer 2 is 3〇〇〇count, the strength of the network is C2CrK^18〇〇count, and the chromium is relative to the iron. The peak intensity ratio R2-C2CrKa/C2FeKa* 〇. 6〇, which is larger than the peak intensity ratio of chromium in the above particles relative to iron. Further, in the soft magnetic alloy body for an electronic component of the present invention, the oxide layers 2 and 2 formed on the surfaces of the adjacent particles 1 and 1 may be bonded to each other by the composition shown in Fig. 2 based on the composition image. Confirmed by the pattern diagram. From the above results, it was confirmed that the soft magnetic alloy body for electronic parts of the present embodiment contains chromium 2 to 8 wt%.矽1. 5~7 wt%, iron 88~96. 5 wt% of multiple particles! , i, and an oxide layer formed on the surface of the particle i, and the oxide layer contains at least iron and chromium, using a transmission electron microscope 154655. Doc •29· 201222576 The intensity ratio of chromium to iron peak obtained by energy dispersive ray ray analysis is greater than the peak intensity ratio of chromium to iron in the particles. Further, on a ring-shaped element body obtained by heat-treating the above-mentioned annular molded body, a coil containing a urethane-coated copper wire having a diameter of 〇·3 mm was wound 20 times to obtain a test sample. The saturation magnetic flux density Bs was measured using a vibrating sample magnetometer (manufactured by Toray Industries, Inc., VSM), and the magnetic permeability μ was measured at a measurement frequency of 100 kHz using an LCR meter (manufactured by Agilent Technologies, Inc.: 4285A). The results obtained are shown in Table 1. In addition, the heat-treated temperature of 150 ° C and 20 (TC, 30 (TC, 500, 〇, 700 ° C, 800 ° C) in the atmosphere of the molded article obtained in the above-mentioned square plate shape. The square plate-shaped element obtained by heat-treating at 1000 ° C for 60 minutes and the square-shaped molded body placed at room temperature were measured for three-point bending fracture stress, and the results are shown in Table 1 and Table 2. Further, a fired Ag conductor film paste was applied to the mounting surface of the two flange portions of the above-mentioned drum-shaped body, and the temperature was raised to 7 Torr (rc at atmospheric temperature for about 30 minutes, and kept at 700 ° C for 1 〇. Then, the temperature is lowered for about 30 minutes, thereby performing a firing treatment of the conductor film material to form a fired conductor layer of the outer conductor film. Further, Ni is formed on the surface of the conductor film by electrolytic plating (thickness 2) Μπι), Sn (thickness 7 μπι). The results obtained are shown in Table 1. As a result, the strength of the element was 7. 4 kgf/mm2, as the saturation of the magnetic properties, the magnetic flux density Bs is 1. 51 T, magnetic permeability μ is 45, and volume resistivity is 4. 2Χ105 Dcm, the formation of the metal plating layer is 〇, and good measurement results and judgment results are obtained respectively. Furthermore, the magnetic permeability μ 154655 is also performed before the heat treatment. Doc -30- 201222576 Determination. The results are shown in Table 3. Then, a coil including an insulated coated wire is wound around the core portion of the drum-shaped body, and both end portions of the coil are thermocompression bonded to the outer conductor film, and further, the plate-shaped formed body is heat-treated. The obtained plate-like element body was obtained by using a resin-based adhesive agent on both sides of the flange portion of the above-mentioned drum-shaped element body to obtain a wound-line type wafer inductor. (Example 2) In addition to the composition ratio of the raw material particles: chromium: 3 wt%, 矽: 5 wt%, iron: 92 wt%, and examples! The evaluation sample was produced in the same manner. The results obtained are shown in Tables 1 and 2. As shown in Tables 1 and 2, the saturation magnetic flux density 仏 as the magnetic property is 146 T, the magnetic permeability μ is 43, the strength of the element body is 28 kgf/mm 2 , and the volume resistivity is 2. 0X105 Qcm, the formability of the metal plating layer was 〇, and good measurement results and judgment results were obtained in the same manner as in the example. Further, as a result of analysis by EDS, it was confirmed that the particles were bonded to each other by a metal oxide (oxide layer) formed on the surface of the particles by heat treatment, and the oxide layer contained more iron than the alloy particles. An oxide of an oxidized element (here, a network). (Example 3) An evaluation sample was produced in the same manner as in the Example except that the average particle diameter (d50%) of the raw material particles was 6 μm, and the results obtained are shown in Tables 1 and 2. As shown in Tables 1 and 2, the saturation magnetic flux density as the magnetic property is Τ' magnetic permeability μ is 27 ′. The strength of the element body is 66 kgf/mm 2 and the volume resistivity is 154655. Doc 31 201222576 is 3. 0xl ° 5 ncm, the formation of the metal plating layer is. Good measurement results and judgment results were obtained in the same manner as in Example 1I5. Further, as a result of analysis by (4)_EDS, it was confirmed that the particles (4) were heat-treated and bonded to a metal oxide (oxide layer) formed on the surface of the particles, and the oxide layer contained more iron than the alloy particles. The oxide of the S element (here, the complex). (Example 4) An evaluation sample was prepared in the same manner as in Example 1 except that the average particle diameter (d50%) of the raw material particles was changed to 3 Å. The results obtained are shown in Tables 1 and 2. Table 1 and Table 2 do not, as the magnetic property, the saturation magnetic flux density is 〖π T, the magnetic permeability is 2 〇, and the strength of the element is 7. 6 kgf / mm2, volume resistivity is 7 chest 5 (10), the formation of metal ore layer is. Good measurement results and judgment results were obtained in the same manner as in the examples. Further, as a result of analysis by SEM_EDS, it was confirmed that the particles were bonded to each other by a metal oxide (oxide layer) formed on the surface of the particles by heat treatment, and the oxide layer contained more than the alloy particles. An oxide of S (here, a complex) which is more easily oxidized than iron. (Example 5) The composition ratio of the raw material particles was set to be a complex: 9. 5 wt%, Shi Xi: 3 wt%, line 7.5 wt/o. An evaluation sample was prepared in the same manner as in Example 1, and the obtained measurement results and judgment results are shown in Tables 1 and 2. As shown in Tables 1 and 2, the saturation magnetic flux density Bs as the magnetic property is 1 dd, the magnetic permeability μ is 33, and the strength of the plasto is 7 4 kgf / 2 ′. The volume resistivity is I54655. Doc •32· 201222576 4. 7x10-3 ncm, the forming core of the metal bond layer. It can be seen that in the present embodiment in which the complex is over (four) wt%, the volume resistivity is lowered. In addition, it is confirmed that the particles are bonded to each other by a metal oxide (oxide layer) formed on the surface of the particles by heat treatment, and the oxide layer is more contained than the alloy particles. An oxide of an element (here, a network) that is more susceptible to oxidation by iron. (Example 6) ^ An evaluation sample was prepared in the same manner as in Example} except that the composition ratio of the raw material particles was set to chromium: 5 wt%, 矽: i wt〇 / 〇, iron: 94 wt%. The measurement results and judgment results obtained are shown in Tables and Table 2. As shown in Table 1 and Table 2, it is understood that the saturation magnetic flux density Bs as the magnetic property is [π T magnetic permeability μ is 26, the strength of the element body is 18 kgf/mm 2 , and the volume resistivity is 8. 3X10·3 Qcm, the formability of the metal plating layer is X. Further, as a result of analysis by SEM-EDS, it was confirmed that the particles were bonded to each other by a metal oxide (oxide layer) formed on the surface of the particles by heat treatment, and the oxide layer contained more than the alloy particles. An oxide of an element of iron which is easily oxidized (here, chromium). (Example 7) An inductor component was obtained in the same manner as in Example i except that the treatment temperature in the atmosphere was set to 1 °C. The measurement and judgment results are shown in Table 1. As shown in Tables 1 and 2, the saturation magnetic flux density 仏 as the magnetic property is 15 〇 T, the magnetic permeability μ is 50, the strength of the element body is 2 〇 kgf/mm 2 , and the volume resistivity is 2. 0><102卩(^11, the formability of the metal plating layer is ><. In the present embodiment, the heat treatment temperature is increased, although the 3-point bending fracture stress is increased, but the volumetric electric power is 154655.doc •33·201222576. The resistivity is lower than that of the embodiment. In addition, the analysis of the fruit by sem_eds can confirm that the particles are mutually By forming a dimetal oxide (oxide layer) on the surface of the particle by heat treatment, the oxide layer contains more elements which are more easily oxidized than iron (here, the oxidation of (6) (Example) 8) An evaluation sample was prepared in the same manner as in Example 1 except that the composition ratio of the raw material particles was set to 矽: 9.5, aluminum: 5 $ wt% 'iron: 85 wt%, and the obtained measurement results and The judgment results are shown in the illusion and Table 2. Table 1 and Table 2 do not, the saturation magnetic flux density as the magnetic property is m Τ 'the magnetic permeability μ is 32, the strength of the element body is 14 kgf / _2, and the volume resistivity is 8. When 1〇3(10) is added, the formability of the metal bond layer is "it is known that the volume resistivity is low, and it is impossible to form a metal plating layer on the fired conductor layer of the outer conductor film. In addition, analysis by SEM-EDS is performed. As a result, it was confirmed that the particles were subjected to heat treatment with each other. The metal oxide (oxide layer) formed on the surface of the particle is combined, and the oxide layer contains more oxides than the alloy particles which are easily oxidized by an element (here, aluminum). (Comparative Example 1) The composition ratio of the raw material particles was set to 1 : 〇 / /, 夕 夕 : 6.5 wt %, and iron: 92.5 wt %, and the evaluation test # was prepared in the same manner as in Example 1, and the obtained measurement results and judgments were obtained. The results are shown in Tables i and 2. In Tables 1 and 2, the saturation magnetic flux density as the magnetic property is 〖%, the magnetic permeability μ is 〖7, the strength of the element body is 4 2 , and the volume resistivity is 4.9. X101 fiCm, the formation of the metal money layer is X. In addition, the results of the analysis by SEM EDS show that the surface of the particle is not treated by the comparison of I54655.doc * 34 - 201222576 The formation of the metal oxide layer) is not the same as that of the human body (the oxidation contains more oxides that are more easily oxidized than iron (here, the complex), so the volume resistivity is lower. ', ( Reference Example 1) A price was produced in the same manner as in Example (1) except that the heat treatment was not carried out. For the sample, the obtained enthalpy results and judgment results are shown in h and Table 2°, and Table 2, as the magnetic property, the saturation magnetic flux density Bs is 1.50, and the rate is 1 Γ rate ^ 35, the body The strength is 〇.54 kgf/mm2, and the volume resistance is 1G ΩεΠ1 °. In addition, the test (4) for the formation of the metal bond layer is omitted in this reference example. By analyzing the result, the reference is known. In the example, an oxide layer containing a metal oxide is not formed on the surface of the particle. Therefore, the volume resistivity is slightly lower than that of the embodiment (Reference Example 2) except that the treatment temperature of the atmosphere is set to 3 Gn, and the embodiment (I) In the same manner, an evaluation sample was prepared, and the obtained measurement result and judgment result 2 were shown in Table 1 and Table 2. As shown in Table 1 and Table 2, the saturation magnetic flux density as the magnetic property is 1.5 〇τ, the magnetic permeability ^ is ^, and the strength of the element body is 〇μ kgf/mm2' volume resistivity is i 4χ1〇5 ^. Further, in the present reference example, the preparation and evaluation of the sample regarding the formability of the metal bond layer were omitted. As a result of analysis by SEM-EDS, it was found that in the present reference example, since the heat treatment temperature was lower than 40 〇c ', an oxide layer containing a metal oxide was not sufficiently formed on the surface of the particles. Therefore, the volume resistivity is slightly lower than that of the embodiment. (Embodiment 9) 154655.doc 35·201222576 Next, an embodiment of a laminated type will be described. Using the same alloy particles as in Example 1, a coil type electronic component having a coil inside the element body of 20 layers and having a shape of 3.2 mm x 1.6 mm x 8 mm was prepared. First, 85 wt% of alloy metal particles and 13 wt% of butyl carbitol (solvent) were used using a slit coater. /. A mixture of polyvinyl butyral (adhesive) 2 wt / 〇 was processed into a sheet having a thickness of 4 〇 μηι, and then Ag particles were 85 wt 0 / 〇, butyl carbitol (solvent) 13 wt. /. A conductive paste of polyvinyl butyral (adhesive) 2 wt〇/〇 is applied to the sheet to form a conductive pattern. Then, a sheet in which a conductive pattern was formed was laminated, and a laminate was obtained at a press pressure of 2 ton/cm 2 . The laminate was heat-treated under the conditions of 800 ° C and 2 hr to obtain an element body. A paste containing Ag is formed on the surface on which the lead portion of the coil in which the wire is formed, and the paste is coated on the mounting surface, and heat-treated at 7 ° C for 1 minute to obtain a coil type in which a metal plating layer is formed. Electronic parts. The saturation magnetic flux density Bs as the magnetic property was K41T, and the magnetic permeability μ was 15. Further, the magnetic permeability μ before the heat treatment was 13. The formation of a metal plating layer is a crime. In addition, the analysis was carried out by SEM-EDS | 'It was confirmed that the particles were bonded to each other by a metal oxide (oxide layer) formed on the surface of the particles by heat treatment, and the oxide layer contained more than the alloy particles. An oxide of an element (here chromium) that is more susceptible to oxidation by iron. Further, it was confirmed that in the particles of Examples 1 to 4, the thickness of the bonded portion was thicker than that of the surface of the alloy particles. In the particles of Examples 5 and 6, the bonding portion 154655.doc • 36·201222576 is thinner than the deuterated layer on the surface of the alloy particles. It was confirmed that the thickness of the oxide layer of the particles of Example 8 was 50 nm or more. [Table 1] . S and into [Wt0/〇] Particle size dSO [μηι] Heat treatment temperature [°C] Bs [T] μ 3-point bending fracture stress [kgf/mm2] Volume resistivity [Ωαη] Metal plating layer Forming Cr Si A1 Fe Example 1 5 3 - 92 10 700 1.51 45 7.4 4.2χ105 实施 Example 2 3 5 - 92 10 700 1.46 43 2.8 2.〇χ105 实施 Example 3 5 3 - 92 6 700 1.45 27 6.6 3_〇χ105 ο Example 4 5 3 - 92 3 1 700 1.38 20 7.6 7.〇χ105 ο Example 5 9.5 3 - 87.5 10 700 1.36 33 7.4 4.7χ1〇·3 X Example 6 5 1 - 94 10 700 1.58 26 18 8.3 χ10·3 X Example 7 5 3 - 92 10 1000 1.50 50 20 2.〇χ102 X Example 8 - 9.5 5.5 85 10 700 0.77 32 1.4 8·〇χ103 X Comparative Example 1 1 6.5 _ 92.5 10 700 1.36 17 4.2 4.9x10' X Reference Example 1 5 3 - 92 10 - 1.50 35 0.54 1·4χ105 _ Reference Example 2 5 3 - 92 10 300 1.50 35 0.83 1.4χ105 - [Table 2] Heat treatment temperature and 3 points of praise Fracture stress [lcgf/mm2] heat treatment temperature rc) Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 8 Comparative Example 1 25 0.54 0.48 0.51 0.52 0.48 0.53 0.25 0.55 150 1.1 1.2 1.1 1 .3 1.0 1.3 0.89 1.2 200 0.45 0.31 0.42 0.55 0.48 0.72 0.19 0.58 300 0.83 0.72 0.90 1.01 0.92 0.92 0.23 0.82 500 3.4 1.2 2.0 3.7 3.6 5.7 0.26 2.4 600 4.5 1.7 3.5 5.1 4.9 8.0 0.43 3.9 700 7.4 2.8 6.6 7.6 7.4 18 1.4 4.2 800 12 4.5 10 16 17 24 5.7 6.5 1000 20 7.3 15 27 28 33 7.8 8.2 * Heat treatment temperature of Example 1 1000X: Corresponding Example 7 154655.doc -37· 201222576 [Table 3] Heat treatment temperature and μ heat treatment temperature ( 0〇Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 8 Comparative Example 1 25 35 32 23 19 28 23 24 30 700 45 43.0 27 20 33 26 32 17 Δμ 29 36 17 7 18 13 33 -43 △μ=(μ when the heat treatment temperature is 7〇〇°C, μ when the heat treatment temperature is 25°C)/μ热处理 when the heat treatment temperature is 25°C [Industrial Applicability] The soft magnetic alloy body for an electronic component of the invention and the electronic component using the same are suitable as a miniaturized electronic component that can be surface-mounted on a circuit board. In particular, when it is used in the case of a power inductor in which a large current flows, it is preferable in terms of miniaturization of parts. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a first embodiment of an element body using a soft magnetic alloy for electronic parts according to the present invention. Fig. 2 is an enlarged schematic view showing a cross section of an element body using a soft magnetic alloy for an electronic component according to the first embodiment. 3(A) and 3(B) are diagrams showing the results of analyzing the element body of the soft magnetic alloy for electronic parts of the first embodiment by energy dispersive X-ray analysis using a scanning electron microscope. Fig. 4 is a view showing the results of analyzing the oxide layer of the element body of the soft magnetic alloy for electronic parts of the first embodiment, which is analyzed by the X-ray diffraction analysis apparatus. Fig. 5 is a graph showing the results of linear analysis of 154655.doc -38 - 201222576 of the soft magnetic alloy for electronic parts according to the first embodiment by energy dispersive X-ray analysis using a scanning electron microscope. Fig. 0 is a side view showing a perspective portion of the first embodiment of the coil type electronic component of the present invention. Fig. 7 is a longitudinal sectional view showing the internal structure of a coil type electronic component according to the first embodiment. Fig. 8 is a perspective view showing an internal structure of an example of a modification of the embodiment of the soft magnetic alloy for an electronic component according to the present invention. Fig. 9 is a perspective view showing an internal structure of an example of a modification of the embodiment of the electronic component of the present invention. Fig. 1 is an explanatory view showing a method of measuring a sample of a 3-point bending fracture stress according to an embodiment of the present invention. Fig. 11 is an explanatory view showing a method of measuring a sample having a volume resistivity according to an embodiment of the present invention. [Description of main component symbols] 1 Particle 2 Oxide layer 3 Void 10, 10, Soft magnetic alloy for electronic parts 11 Drum core 1 la Core lib Flange 12 Plate core 14, 34 External conductor film 14a fired conductor film layer 154655.doc •39- 201222576 14b Ni plating layer 14c ore Sn layer 15 coil 15a winding portion 15b end portion (joining portion) 20 electronic parts (winding type wafer inductor) 31 laminated body wafer 34 external Conductor film 35 Internal coil 40 Electronic parts (Laminated chip inductor) dl Long axis dimension d2 Short axis dimension tl Thickest part thickness t2 Thickest part thickness 154655.doc -40-

Claims (1)

201222576 VII. Patent application scope: 1. - A coil type electronic component, characterized in that it is attached to the inside or the surface of the element body, and the element body is composed of elements containing iron, stone stalk and iron which are easily oxidized. a soft magnetic alloy particle group is formed; an oxide layer formed by oxidation of the particles is formed on the surface of each of the soft magnetic alloy particles; and the oxide layer contains more elements which are more easily oxidized than iron than the alloy particles. 'The particles are bonded to each other via the oxide layer. The soft magnetic particles of the soft magnetic particles are combined with each other. 2. The coil-type electronic component of claim 1, wherein the portion of the oxide layer is thicker than the oxide layer on the surface of the non-sub-surface. An oxide layer in which the soft magnetic particles are bonded to each other without involving soft magnetic particles 3. The portion of the oxide layer of the oxide layer of the portion of the coil-type electronic component of claim 1 is bonded. a particle of an oxide layer having a thickness above the soft magnetic particle. 4. The coil type electronic component of claim 1 or 2, at least a part of which comprises 5 nanometers to a sub-zero, wherein the particles are bonded to each other, wherein the iron is It is easy to oxidize, wherein the above-mentioned iron is easily oxidized. 5. The coil-type electronic component of claim 1 is a homo-phase. 6. The element of the coil type electronic component of claim 1 is chromium. The element of the coil type electronic component of claim 1 is aluminum. 8. The coil type electron of claim 6 wherein 154655.doc 201222576 of the above soft magnetic alloy is composed of chromium 2 to 8 wt%, Shixi 1.5 to 7 wt%, and iron 88 to 96.5 wt%. 9) The coil type electronic component according to claim 7, wherein the composition of the soft magnetic alloy is 2 to 8 wt/min of aluminum, 1.5 to 12 wt% of Shixia, and 80 to 96.5 wt% of iron. 10. The coil-type electronic component of the claim ,, wherein the soft magnetic particles have an arithmetic mean particle size of 30 μm or less. 11. The coil-type electronic component according to claim 1, wherein the oxide layer is sequentially included from the side of the soft magnetic particle side toward the outer side: the first oxide layer having a reduced content of the iron component and an increased content of the easily oxidizable element, And a second oxide layer having a reduced content of the iron component and a reduced content of the element which is easily oxidized. 12. The coil type electronic component of claim 11, wherein the content of the ruthenium has an inflection point in the first oxide layer as viewed from the soft magnetic particle side. 13. The coil-type electronic component of claim i, wherein the oxide layer is analyzed by energy dispersive ray ray analysis by a scanning electron microscope and the ratio of the easily oxidized element to the iron peak intensity calculated by the zaf method is larger than the above particle The ratio of the easily oxidized element to the peak intensity of iron. 14. The coil type of the claim 1 of the present invention, wherein the end portion of the coil is electrically connected to a conductor film formed on a surface of the element body. K is a coil-type electronic component characterized in that it has a coil and the element body is composed of a group of soft magnetic alloy particles; and an oxide layer formed by oxidizing the particles on each surface of each soft magnetic alloy particle; The layer contains a larger amount of metal which is more easily oxidized than iron than the 5 gold particles; the particles 154655.doc 201222576 are bonded to each other via the oxide layer; a coil conductor is formed inside the element body. 16. 17. 18. 19. 20. The coil-type electronic component of claim 15, wherein the coil conductor is a conductor pattern and is a conductor that is simultaneously fired with the element body. In the coil type electronic component of claim 15 or 16, the metal in the oxide layer which is more easily oxidized than iron is chromium. The coil type electronic component of claim 15 or 16, wherein the oxide layer is more susceptible to oxidation of the metal. A method for manufacturing a coil type electronic component, wherein the coil type electronic component is in a body and further provided with a coil, the manufacturing method comprising the steps of: pressurizing a mixture of the binder and the soft magnetic alloy particles to obtain a formed body; The molded body is heat-treated in a nuclear environment of 3, an oxide layer is formed on the surface of the soft magnetic alloy particles, and the soft magnetic alloy particles are bonded to each other via an oxide layer to obtain an element body; and a coil is provided in the element body. And external lead electrodes. A method for manufacturing a coil type electronic component, wherein the coil type electronic component is provided with a coil in a body, the manufacturing method comprising the steps of: processing a mixture of a binder and a soft magnetic alloy particle into a sheet; Forming and laminating a conductive pattern for a coil to obtain a molded body; forming an oxide layer on the surface of the soft magnetic It sheet metal in an atmosphere containing oxygen, and forming the soft magnetic alloy particles from each other The oxide layer is combined to obtain an element body having a coil inside; and 154655.doc 201222576 An external lead electrode is provided in the above-mentioned element body. 21. The method of manufacturing a coil type electronic component according to claim 19 or 20, wherein the oxygen atmosphere is an atmospheric environment. 154655.doc