201222359 六、發明說明： 【發明所屬之技術領域】 本發明係關於在檢測靜電電容之變化的檢測裝置、或其 他方式之檢測裝置或顯示裝置等中使用之表面形成有電極 層的電極基板，尤其係關於構造為在相鄰之第一電極層之 間設置第二電極層、並且第一電極層彼此跨及第二電極層 而連接的電極基板及其製造方法。 【先前技術】 檢測裝置或顯示裝置中所使用之先前之電極基板之構造 係’將電極層之圖案區別形成於基板之表背兩面，或者在 极數個電極層之圖案之間爽設有絕緣層。最近，為了實現 裝置之薄型化，使用在一個基板之一個表面上形成有複數 種電極層之圖案的電極基板。該電極基板係採用在相鄰之 電極層之間夾有其他電極層之狀態下利用連接電極層將相 鄰之電極層彼此連接的構造。 就連接電極層而言，當其寬度尺寸過大時，存在與位於 其下方之其他電極層之間的電容變大之問題，因此需要控 制圖案形狀而形成。尤其是在設置於顯示裝置前方之檢測 裝置或顯示裝置本身所使用之透光性的電極基板中，若連 接導電層之寬度尺寸無法控制地變大，則會產生連接導電 層之圖案被看到的問題。 在以下之專利文獻1及2中，公開了 一種使用於靜電電容 式之檢測裝置中的電極基板。 專利文獻1中所記載之電極基板中，於透光性基板之一個 158350.doc 201222359 表面上形成有向γ方向延伸之複數個γ電極層、及配置於Y 電極層之間的複數個又電極層。γ電極層及X電極層係由陰 型抗蝕劑之絕緣膜覆蓋，在該絕緣膜上形成使又電極層露出 之接觸孔。在絕緣膜之上方形成有ΙΤΟ之導電膜，利用蝕刻 將ΙΤΟ分離，從而形成藉由ΙΤ〇之一部分而將相鄰之X電極 連接的連接導電層。 專利文獻2中所記載之電極基板中，於透光性基板之一個 表面上形成有複數個χ電極層、及配置於χ電極層之間的複 數個Υ電極層，利用層間絕緣膜來覆蓋乂電極層之窄幅部201222359 VI. [Technical Field] The present invention relates to an electrode substrate in which an electrode layer is formed on a surface of a detecting device for detecting a change in electrostatic capacitance or a detecting device or a display device of another type, in particular The present invention relates to an electrode substrate configured to provide a second electrode layer between adjacent first electrode layers, and to connect the first electrode layers across the second electrode layer, and a method of manufacturing the same. [Prior Art] The structure of the previous electrode substrate used in the detecting device or the display device is formed by distinguishing the patterns of the electrode layers on the front and back sides of the substrate, or providing insulation between the patterns of the electrode layers. Floor. Recently, in order to reduce the thickness of the device, an electrode substrate in which a pattern of a plurality of electrode layers is formed on one surface of one substrate is used. In the electrode substrate, a structure in which adjacent electrode layers are connected to each other by a connection electrode layer in a state in which another electrode layer is interposed between adjacent electrode layers is used. In the case of connecting the electrode layers, when the width dimension thereof is too large, there is a problem that the capacitance between the electrode layers and the other electrode layers located under them becomes large, and therefore it is necessary to control the shape of the pattern to be formed. In particular, in the translucent electrode substrate used in the front of the display device or the display device itself, if the width of the connecting conductive layer is uncontrollably large, a pattern in which the conductive layer is connected is seen. The problem. In the following Patent Documents 1 and 2, an electrode substrate used in an electrostatic capacitance type detecting device is disclosed. In the electrode substrate described in Patent Document 1, a plurality of γ electrode layers extending in the γ direction and a plurality of further electrodes disposed between the Y electrode layers are formed on one surface of the light-transmissive substrate 158350.doc 201222359. Floor. The γ electrode layer and the X electrode layer are covered with an insulating film of a negative resist, and a contact hole for exposing the electrode layer is formed on the insulating film. A conductive film of tantalum is formed over the insulating film, and the tantalum is separated by etching to form a connecting conductive layer connecting adjacent X electrodes by one portion of the tantalum. In the electrode substrate described in Patent Document 2, a plurality of tantalum electrode layers and a plurality of tantalum electrode layers disposed between the tantalum electrode layers are formed on one surface of the light-transmitting substrate, and are covered with an interlayer insulating film. Narrow section of the electrode layer
分。於層間絕緣膜之上方形成有ΙΤ〇之透明電極層，將〖TO 蝕刻，從而形成將相鄰之γ電極層連接之連接導電層。 [先行技術文獻] [專利文獻] [專利文獻1]日本特開2〇〇9_265748號公報 [專利文獻2]曰本特開2008_31〇55〇號公報 【發明内容】 [發明所欲解決之問題] 專利文獻1及2中所記載之電極基板中 ’為了形成將相鄰Minute. A transparent electrode layer of tantalum is formed over the interlayer insulating film, and TO is etched to form a connecting conductive layer connecting adjacent γ electrode layers. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In the electrode substrate described in Patent Documents 1 and 2, 'to be formed adjacent to each other
導致電極基板之製造成本提高。 丄汴I丄吋孝父多，因此會 而且，由於加熱工序較多， 158350.doc 201222359 m ，吏用之材料受到限定，基板之材料亦被限定為玻璃 等，從而無法使用合成樹脂製之基板等。 解决上述先前之課題，本發明之目的在於提供一種 電極基板’纟可以通過簡單之構造而規制ϋ接導電層之寬 度尺寸來形成連接導電層。 另外本發明之目的在於提供一種電極基板之製造方 法其實施進行光微影工序、蝕刻工序，而能夠控制連接 導電層之寬度尺寸來形成連接導電層。 [解決問題之技術手段] 本發明提供一種電極基板，其係於基板之表面設有複數 個第一電極層、位於相鄰之第一電極層之間的第二電極 層、以及將相鄰之第一電極層彼此連接的連接導電層者， 其特徵在於， 设有覆蓋第二電極層之絕緣層，於上述絕緣層上一體形 成有空開間隔而相向之堰體，且由相向之兩個堰體之間規 制寬度尺寸而形成上述連接導電層。 本發明之電極基板中，在設置於基板之表面上之絕緣層 上形成有堰體’並形成由該堰體規制寬度尺寸之連接導電 層。連接導電層之寬度尺寸受到規制從而形成為窄幅，因 此能夠減少連接導電層與其下方的之電極層之間的電容， 從而能夠防止電特性之劣化。 本發明之上述基板、第一電極層、第二電極層以及上述 絕緣層可構成為具有透光性者。 於透光性電極基板中，連接導電層係以其寬度尺寸被規 158350.doc 201222359 制得較細之方式而开； 丁资 !成’因此在觀察時連接導電層之存在 不顯眼。因此，在蛊龜_ -^ /、頌不裂置一併使用、或者作為構成顯 不裝置的電極基板來 _ ^ 使用時，能夠防止連接導電層成為顯 不之障礙。 方6 I發明係將相互正交之方向設為第-方向及第二 複㈣第二電極層於第—方向上空開間隔分別於第 一方向延伸，複數個 ㈣個第-電極層藉由上述連接導電層而朝 间第—方向進行i車纟士 ju a _ 、，"° 由上述連接導電層連結之第一電極 之行朝向第二方向空開間隔而設置有多行。 本發明中’上述絕緣層可部分形成於相鄰之第—電極芦 之間。 曰 而且’本發明較佳為，上 及第二電極層該兩者之寬度 成上述堰體，並形成有使上 接之孔。 述絕緣層係以覆蓋第一電極層 而形成，於該絕緣層上部分形 述連接導電層與第一電極層連 在上述構成中，藉由絕緣層覆蓋並保護第一電極層及第 層來進行保護，因此第—電極層及第二電極層難以 '、化。在經由黏著劑層將電極基板與透光性 之情形時，亦可以保護第一電極層及第二電極層之表 以免直接接觸黏著劑。 =如γ本發明之電極基板可構成檢測手指接近上述電極 層時之靜電電容之變化的檢測裝置。 本發月之電極基板之製造方法之特徵在於： 使用設有複數個第-電極層及位於相鄰之第—電極層之 158350.doc 201222359 間的第二電極層之基板， 供給覆蓋上述第二電極層之液狀樹脂，於相鄰之第一電 極層之間形成空開間隔而相向之液狀樹脂之凸起部，於上 述凸起部因液狀樹脂之黏度而消散之前，使上述液狀樹脂 硬化，而—體形成覆蓋第二電極層之絕緣層及空開間隔而 相向之堰體， 對上述絕緣層上供給導電性材料，形成由上述堰體之間 Ο Ο 規制寬度尺寸之連接導電層，將上述連接導電層之兩端部 與相鄰之第一電極層之各個連接。 一本發明之電極基板之製造方法中，對基板之表面供給規 定黏度之液狀樹脂時，根據場所之不同而使其供給量變 化’從而能夠形成堰體，並藉由該堰體能夠規制連接導電 層之寬度。在該製造方法中’由於不需要光微影工序和敍 刻工序’或者能夠減少其次數，因此可以縮減工時從而降 低成本。而且，由於加妖 脂製之基板。 一咸V，因此亦可使用合成樹 攄埸：月巾彳母★少夏地向基板表面喷佈液狀樹脂，根 不同而使其喷佈量不同，從而形成上述凸起部。 本發明較佳為，上述基板、第-電極層、第-電極層以 及液狀樹脂具有透紐。 本發明中，可向相鄱 而H… 電極層之間供給液狀樹脂， 而4刀形成上述絕緣層。 而且本發明中，可向 — 狀榭& π 電極層及第二電極層上供給液 狀树月日，從而形成覆蓋第— 電極層及第二電極層該兩者之 158350.doc 201222359 面積的絕緣層，在該絕緣層上部分形成上述堰體，並形成 使上述導電層與第一電極層連接之孔。 [發明之效果] 作為本發明之電極基板，在基板上形成覆蓋第二電極層 之絕緣層，並藉由該絕緣層上所設置之堰體來規制連接電 極層之寬度尺寸。由此，能夠使連接電極層成為窄幅之形 狀，能夠防止電特性之劣化，而且在構成透光性電極基板 之情形時’不易看到連接導電層。 本發明之電極基板之製造方法中，藉由使供給至基板表 面之液狀樹脂之供給量根據場所之不同而不同的簡單工 序此夠成寬度尺寸經規制之連接導電層。而且，工時 減少，成本降低，加熱工序減少，因此能夠擴大材料之選 擇範圍。 【實施方式】 圖1所示之靜電電容式之檢測裝置丨具有本發明之實施形 態之電極基板10。電極基板10具有包含PET(聚對苯二曱酸 乙二酯）等透光性合成樹脂薄膜之基板丨丨，基板^之電極形 成面11a係經由黏著劑層2而與操作面板3之背面3a接合。黏 著劑層2係由丙烯酸系等的透光性黏著劑形成。操作面板3 係由聚碳酸酯等透光性合成樹脂板或透光性玻璃板等形 成。 在本說明書中，透光性係指整體光線透過率為6〇%以 上’較佳為80°/。以上。 圖1所示之檢測裝置1係配置於具備背光之液晶顯示裝置 158350.doc 201222359 :自發光型顯示裝置之前方’透過檢測裝置i可以目視顯示 裝置之顯示内容。 7、=裝置1之操作面板3之前表面係操作面3b。如圖1〇所 當大致接地電位之導電體即人之手指觸摸操作面外 日了’可以檢測出電極基板1〇上所設置之電極層與手指之間 - 形成的靜電電容之變化。 圖2係表示構成電極基板10之基板u之電極形成面m。 0 電極基板10中，在與電極形成面lla平行之平面上相互正交 之X方向及Y方向中，x方向為第一方向，γ方向為第二方向。 如圖2所示，在電極形成面lla上形成有複數個第二電極 層14。各個第二電極層14係沿著γ方向（第二方向）連續地延 伸，且於X方向上（第一方向）上空開固定的間隔而形成。各 個第二電極層14中，連續地一體形成有在Y方向上以固定間 隔配置之矩形形狀的主檢測部14a及將主檢測部i乜彼此連 結之窄幅部14b。 〇 於基板11之電極形成面lla上形成有複數個第一電極層 13。第一電極層13為矩形形狀，所有第一電極層13係相互 獨立地形成。第一電極層丨3之矩形之形狀以及面積與第二 電極層14之主檢測部14a相同。各個第一電極層13係位於在 • X方向上相鄰之第二電極層14、14之間’第一電極層13係配 置於由主檢測部14a包圍之區域内。 第一電極層13及第二電極層14係由ITO等透光性導電材 料形成。於PET薄膜等的基板11之一面使用整面形成有IT〇 等導電材料層的複合材料，藉由對導電材料層進行姓刻， 158350.doc 201222359 而形成第一電極層α 及弟一電極層14。即，於基板η之一 個表面上，以相间士士 @ „ 一 材質、相同膜厚形成第一電極層13及第 二電極層14。 圖所示於基板11之電極形成面11a上形成有複數個 絕緣層20。絕緣層2〇係利用透光性之有機性絕緣材料（合成 樹脂材料）而部分形成於電極形成面Ua上。 如圖3、圖4及圖5所示，絕緣層2〇係乂方向之長度尺寸比 Y方向之寬度尺寸W2大的細長形狀。絕緣層2〇係跨越相鄰 之第一電極層13之相向端部13a、13a之表面、第二電極層 14之窄幅部14b之表面、以及不存在電極層之部分之基板u 之表面而形成。 如圖5所示’堰體21、21沿Y方向空開間隔而一體形成於 絕緣層20之頂部（上部）。堰體2丨、2丨中，形成絕緣層2〇之絕 緣材料之一部分凸起地形成，且在相向之堰體21和堰體21 之間形成有槽部22。兩個堰體2 1、21及槽部22沿Y方向延伸 並形成至絕緣層20之X側之端部20a、20a。或者，兩個堰體 21、21及槽部22形成至上述端部20a、20a之附近。 於絕緣層20之槽部22形成有連接導電層15。連接導電層 15係由堰體21、21規制其Y方向之寬度尺寸W1而形成。連 接導電層1 5係沿著槽部22朝向Y方向細長地延伸，各個端部 15a、15a比絕緣層20之端部20a、20a更向Y方向延伸，連接 導電層15之端部15a、15 a與第一電極層13之表面分別接合。 藉由上述連接導電層15使在X方向上相鄰之第一電極層 13彼此導通。但是，由於在連接導電層15之下方形成有絕 158350.doc 10- 201222359 緣層20,故使得第二電極層14之窄幅部14b與連接導電層l5 絕緣。 如圖5所示，連接導電層15係以形成於絕緣層20上之堪體 21、21規制其γ方向之寬度尺寸Wi而形成，因此連接導電 " 層15形成為窄幅’且寬度尺寸Wi高精度地受到控制。由於 • 連接導電層15形成得較細，因此連接導電層15即使由銀等 非透光性材料形成，亦不易從前方看到，當設置在自發光 型顯示裝置之前方時，不易妨礙人們看到顯示内容。 〇 而且’由於能夠將連接導電層15之寬度尺寸W1微細化形 成’因此連接導電層15與第二電極層14之窄幅部l4b之相向 面積變付彳政小’兩者之間的電容極少。由此，當檢測到手 才曰接近第一電極層13及第二電極層14時之靜電電容之變化 時，窄幅部14b與連接導電層15之相向部對於解析度之影響 非常小。 連接導電層15之寬度尺寸W1為100 μιη以下30 μηι以上， Q 例如為50 °即使連接導電層15由銀等非透光性材料形 成，只要寬度尺寸為1〇〇 μιη以下，就不易被人眼識別。絕 緣層20之寬度尺寸W2為連接導電層15之寬度尺寸wi的2倍 〜3倍。絕緣層20之高度尺寸η為5 μιη以下。另外，由ΙΤΟ形 成之第一電極層13及第二電極層14之厚度尺寸τ為20 nm左 右。 於X方向排列之一行第一電極層13全部由連接導電層15 予以連結而相互導通。在X方向上連結之第一電極層13之行 係在Y方向上空開間隔配置。在γ方向上連續地延伸之各個 158350.doc 11 201222359 第二電極層14係用作Y檢測電極，由連接導電層15而在又方 向上予以連結之第一電極層13之各個行係用作χ檢測電極。 在檢測裝置1中設置之驅動檢測電路中，分別設置有複數 個由以各個X檢測電極為一方之電極之電容器及電阻器構 成之延遲電路、以及由以各個γ檢測電極為另一方之電極之 電谷器及電阻器構成之延遲電路。該延遲電路中，根據上 述電容器之靜電電容之變化，使輪出電壓之上升之延遲時 間變化。 在驅動檢測電路中，向包含乂檢測電極之複數個延遲電路 依序施加脈衝狀之電壓，且在與此不同之時序，向包含γ 檢測電極之複數個延遲電路依序施加脈衝狀之電壓。 。如圖10所示，當人的手指觸摸檢測裝置1之操作面板3之 操作面3b時’ Χ檢測電極即第—電極層似丫檢測電極即第 二電極層丨4之主檢測部14a之任一者與手指相向。此時，檢 測電極與手指之間所形成之上述電容器之靜電電容變大， 包含該檢測電極之延遲電路之輸出㈣之延料間變長。 驅動檢測電路根據向哪個χ檢測電極或者向哪個Y檢測 電極施加電壓之時序、以及上述延遲時間之測定值，而檢 測出手指接觸之座標位置。 接考，參照圖6及圖7,說明上述電極基板1〇之製造方法。 於PET薄膜等基板u之一面使用整面形成有汀〇等導電 材料層之複合材料，藉由對導電材料層進行姓刻，而形成 第电極層13之圖案及第二電極層14之圖案。 二後利用噴墨方式將液狀樹脂部分供給至基板11之電 158350.doc •12· 201222359 極形成面11 a ’以UV照射等使液狀樹脂硬化，從而形成絕 緣層20 » 在喷墨方式中’自開設於噴墨頭之喷出口，將含有UV硬 化型丙烯酸系樹脂之液狀樹脂每次少量且呈點狀地喷向基 板11之電極形成面11 a。藉由改變喷墨印刷之點狀圖案，可 以自由地設定喷塗熔融樹脂之位置及液狀樹脂之供給量。 如圖6及圖7.(A)所示，在夾著形成絕緣層2〇之區域之中心 線Ο而位於Y方向之兩侧的寬度尺寸Wa之區域中，喷出液狀 樹脂25並增高噴塗之點密度。而且，在中心線〇所在之寬度 尺寸Wb之區域中’降低點密度。在寬度尺寸wa之區域及寬 度尺寸Wb之區域中，可以使點密度分兩個階段變化，亦可 以使點密度分多階段變化’亦或者可在寬度尺寸Wa之區域 内提高點密度，而自該區域朝向中心線〇逐漸降低點密度。 點密度可藉由調整喷墨用喷頭與基板11之相對速度而自 由設定，若減緩喷墨用喷頭與基板11之相對速度，則能夠 提高供給液狀樹脂25之點密度，若加快相對速度，則點密 度降低。 圖7(A)示意性地表示剛向基板11之電極形成面Ua呈點 狀地供給液狀樹脂25之後的狀態。雖然供給至電極形成面 1 la之液狀樹脂25會因電極層之表面之濡潤性而逐漸融 合’但是由於寬度尺寸Wa之部分之點密度變高，因此如圖 7(B)所示’融合後之液狀樹脂層25a在中心線〇之兩側形成 凸起部21a，在中心線〇之部分形成凹陷部22a。如圖7(B) 所示’在液狀樹脂層25 a上殘留有凸起部2 la及凹陷部22a之 158350.doc -13- 201222359 狀態下，照射uv，使液狀樹脂層25a硬化，如圖4及圖5所 示，形成具有堰體21、21及槽部22之絕緣層20。 利用喷墨方式之印刷呈點狀所供給之液狀樹脂25融合， 而如圖7(B)所示’ & 了在表面形成凹凸部，液狀樹脂25之 表面張力較佳為20〜28 mN/m之範圍。而且，為了能夠利用 喷墨用噴頭喷出且噴出後形成如圖7(B)所示之凹凸形狀， 液狀樹脂25之黏度較佳為在45它下為8〜12 mpa,si範圍。 在喷墨方式之印刷中，藉由高精度地確保喷墨用喷頭與 基板11之相對位置’而能夠高密度、高精度地對液狀樹脂 25之點進行圖案化。因&，能夠高精度地設定所完成之絕 緣層20上之堰體21、21的間隔、即槽部22之寬度尺寸。 在形成絕緣層20之後，於槽部22形成連接導電層15。連 接導電層1 5亦利用噴墨方式形成。 噴墨方式中所使用之導電性液狀材料中包含銀之納粒子 及溶劑。利用喷墨用噴頭，料電性液狀材料以自槽部22 之上方直至兩側之第-電極層13之上方呈直線狀的圖案之 方式進行塗敷。然後’使溶劑蒸發，以15代以下之溫度進 行加熱，對銀之納粒子進行燒結，藉此形成連接導電層。。 由於以喷墨方式所供給之導電性液狀材料具有流動性，因 此供給至基板之表面等之後會擴展。但是’如圖5所示，供 給至槽部22之導電性液狀材料之擴展受到堰體2i、21之規 制’因此燒結後之連接導電層15之寬度尺寸wi受到規制而 成為窄幅。而A，由於堰體21、21之間隔尺寸被高精度地 決定’因此連接導電層15之寬度尺寸W1可以形成為5〇 _ 158350.doc -14- 201222359 左右之微小尺寸，其誤差亦變得非常小。 圖8及圖9表示本發明之第二實施形態之電極基板丨1〇。圖 8與圖4之剖視圖相當，圖9與圖5之剖視圖相當。 該電極基板110上，係於形成有與圖2相同圖案之第一電 ， 極層13及第二電極層14的基板11之電極形成面lla之整個 • 區域，以噴墨方式供給液狀樹脂25❶向第一電極層13及第 二電極層14之表面以均勻之點密度供給液狀樹脂乃，進而 0 第一電極層13及第二電極層14之整個區域被液狀樹脂覆 蓋。於形成有連接導電層15之中心線〇(參照圖6)之部分， 使液狀樹脂25之點密度下降。其結果是，於中心線之部分 形成有凹陷部，於其兩側形成凸起部。於形成有連接導電 層15之鳊部15a、15a之場所，不供給液狀樹脂25，而使第 極層13、13之相向端部13a、13a露出。 於供給液狀樹脂25之後，若使液狀樹脂進行uv硬化，則 如圖8及圖9所示，形成將第一電極層13及第二電極層丨斗覆 〇 蓋之絕緣層120，且於橫穿第二電極層14之窄幅部14b的中 心線〇之部分形成槽部122，於其兩側形成堰體121、ΐ2ι。 而且，如圖8所示，於第一電極層13、13之相向端部i3a、 13a之上方形成不樹脂層存在的孔123、ι23。 自上述槽部122至孔123、123利用喷墨法供給導電性液狀 材料’進行燒結而形成連接導電層丨5。 再者’亦可以使供給至形成有堰體121、121之部分的液 狀樹脂25之點密度比第一電極層13及第二電極層14之表面 之點數密，進而形成自絕緣層12〇突出之堰體121、l2i。 158350.doc •15· 201222359 圖8及圖9所示之絕緣基板π〇上，第一電極層13及第二電 極層14被絕緣層120覆蓋。因此，如圖1所示，藉由黏著劑 層2而與操作面板3接合從而構成檢測裝置1時，黏著劑層2 與電極層不會直接接觸。雖然黏著劑容易吸收濕氣，但是 由於被電極基板1〇之表面硬化後之樹脂的絕緣層12〇覆 蓋，因此第一電極層13及第二電極層14上難以附著水分， 容易防止其劣化。 再者，上述實施形態中，雖然連接導電層15係由銀等非 透光性材料形成，但是連接導電層15亦可由IT〇等透光性材 料形成。 [產業上之可利用性] 本發明所適用之場所並不侷限於如上述實施形態般檢測 靜電電谷之變化之檢測裝置的檢測區域，亦可於自靜電電 容之檢測區域偏離之側部的配線圖案之迴繞區域中，使用 連接導電層將相鄰之電極彼此跨及其他電極層而連接。 而且，於液晶顯示裝置等各種顯示裝置中，可在顯示區 域之電極層彼此之連接中實施本發明，進而，在自顯示區 域偏離之配線圖案之迴繞區域中亦可以實施本發明。 【圖式簡單說明】 圖1係使用本發明之實施形態之電極基板的檢測裝置之 剖視圖。 圖2係本發明之實施形態之電極基板的電極形成面之局 部俯視圖。 圖3係將圖2之局部放大表示之俯視圖。 158350.doc -16· 201222359 圖4係沿圖3之IV-IV線之剖視放大圖。 圖5係沿圖3之V-V線之剖視放大圖。 圖6係以俯視圖來說明形成圖3所示之絕緣層之工序之說 明圖。 圖7(A)、（B)係以沿圖6之VII-VII線之剖視圖來說明形成 絕緣層之工序之說明圖。 圖8係表示本發明之第二實施形態之電極基板且與圖4相 當之剖視放大圖。 圖9係表示本發明之第二實施形態之電極基板且與圖5相 當之剖視放大圖》 圖10係使用本發明之實施形態之電極基板的檢測裳置之 動作說明圖。 【主要元件符號說明】 1 檢測裝置 2 黏著劑 3 操作面板 3b 操作面 10 電極基板 11 基板 11a 電極形成面 13 第 電極層 14 第—·電極層 14a 主檢測部 14b 窄幅部 158350.doc 201222359 15 連接導電層 20 絕緣層 21 堰體 21a 凸起部 22 槽部 22a 凹陷部 25 液狀樹脂 110 電極基板 120 絕緣層 121 堰體 122 槽部 123 孔 158350.doc •18This leads to an increase in the manufacturing cost of the electrode substrate.丄汴I丄吋 has a lot of filial piety, so there are many heating processes, 158350.doc 201222359 m, the materials used are limited, and the material of the substrate is also limited to glass, etc., so that the substrate made of synthetic resin cannot be used. Wait. SUMMARY OF THE INVENTION In order to solve the above problems, it is an object of the present invention to provide an electrode substrate which can form a connecting conductive layer by regulating the width dimension of the conductive layer by a simple configuration. Another object of the present invention is to provide a method for producing an electrode substrate which is subjected to a photolithography process and an etching process, and can control the width dimension of the connection conductive layer to form a connection conductive layer. [Technical means for solving the problem] The present invention provides an electrode substrate which is provided with a plurality of first electrode layers on the surface of the substrate, a second electrode layer between the adjacent first electrode layers, and adjacent The first conductive layer is connected to the conductive layer, and is provided with an insulating layer covering the second electrode layer. The insulating layer is integrally formed with a gap and a facing body, and two opposite sides are formed. The above-mentioned connecting conductive layer is formed by regulating the width dimension between the corpses. In the electrode substrate of the present invention, a crucible body ' is formed on the insulating layer provided on the surface of the substrate, and a connection conductive layer having a width dimension regulated by the crucible body is formed. The width dimension of the connection conductive layer is regulated to be formed into a narrow width, so that the capacitance between the connection conductive layer and the electrode layer below it can be reduced, so that deterioration of electrical characteristics can be prevented. The substrate, the first electrode layer, the second electrode layer, and the insulating layer of the present invention may be configured to have translucency. In the translucent electrode substrate, the connecting conductive layer is opened in such a manner that its width dimension is made finer by 158350.doc 201222359; therefore, the presence of the connecting conductive layer during observation is inconspicuous. Therefore, when the turtle _ -^ /, 颂 is not used together, or as an electrode substrate constituting the display device, it is possible to prevent the connection of the conductive layer from becoming an obstacle. The invention is characterized in that the directions orthogonal to each other are set to the first direction and the second (four) second electrode layers are respectively extended in the first direction in the first direction, and the plurality of (four) first electrode layers are The conductive layer is connected to the first direction, and the plurality of rows are provided in the second direction by the row of the first electrodes connected to the conductive layer. In the present invention, the above insulating layer may be partially formed between adjacent first electrode reeds. Further, in the present invention, it is preferable that the upper and second electrode layers have the width of the above-mentioned body and are formed with holes for the upper side. The insulating layer is formed by covering the first electrode layer, and the connecting conductive layer and the first electrode layer are partially connected to the insulating layer, and the first electrode layer and the first layer are covered by the insulating layer. Since the protection is performed, the first electrode layer and the second electrode layer are difficult to be formed. In the case where the electrode substrate and the light transmissive property are passed through the adhesive layer, the surfaces of the first electrode layer and the second electrode layer can also be protected from direct contact with the adhesive. = γ The electrode substrate of the present invention can constitute a detecting means for detecting a change in electrostatic capacitance when a finger approaches the electrode layer. The manufacturing method of the electrode substrate of the present month is characterized in that: a substrate provided with a plurality of first electrode layers and a second electrode layer between 158350.doc 201222359 of the adjacent first electrode layers is supplied to cover the second The liquid resin of the electrode layer forms a convex portion of the liquid resin which is spaced apart from each other between the adjacent first electrode layers, and the liquid is formed before the convex portion is dissipated due to the viscosity of the liquid resin. The resin is cured, and the body forms an insulating layer covering the second electrode layer and a facing body which is spaced apart from each other, and a conductive material is supplied onto the insulating layer to form a connection between the above-mentioned body and the width dimension of the body. The conductive layer connects the two ends of the connecting conductive layer to each of the adjacent first electrode layers. In the method for producing an electrode substrate according to the present invention, when a liquid resin having a predetermined viscosity is supplied to the surface of the substrate, the amount of supply is changed according to a place, and a body can be formed, and the body can be connected by the body. The width of the conductive layer. In this manufacturing method, since the photolithography process and the sculpt process are not required or the number of times can be reduced, the man-hour can be reduced and the cost can be reduced. Moreover, due to the addition of the substrate made of monster. A salty V, therefore, it is also possible to use a synthetic tree. 月: Mooncloth 彳 mother ★ Less summer, the liquid resin is sprayed onto the surface of the substrate, and the amount of spray is different depending on the root, thereby forming the above-mentioned convex portion. In the invention, it is preferable that the substrate, the first electrode layer, the first electrode layer, and the liquid resin have a permeable core. In the present invention, a liquid resin may be supplied between the electrode layers and the insulating layer may be formed by four knives. Further, in the present invention, a liquid-like tree may be supplied to the 榭-and π-electrode layer and the second electrode layer to form an area covering the first electrode layer and the second electrode layer of 158350.doc 201222359 The insulating layer partially forms the above-mentioned body on the insulating layer, and forms a hole for connecting the conductive layer to the first electrode layer. [Effects of the Invention] As the electrode substrate of the present invention, an insulating layer covering the second electrode layer is formed on the substrate, and the width of the connecting electrode layer is regulated by the body provided on the insulating layer. Thereby, the connection electrode layer can be formed into a narrow shape, and deterioration of electrical characteristics can be prevented, and when the translucent electrode substrate is formed, it is difficult to see the connection of the conductive layer. In the method for producing an electrode substrate of the present invention, it is possible to form a conductive layer which is regulated in a width dimension by a simple process in which the supply amount of the liquid resin supplied to the surface of the substrate differs depending on the place. Moreover, the number of working hours is reduced, the cost is reduced, and the heating process is reduced, so that the selection of materials can be expanded. [Embodiment] The electrostatic capacitance type detecting device shown in Fig. 1 has an electrode substrate 10 of an embodiment of the present invention. The electrode substrate 10 has a substrate 包含 including a translucent synthetic resin film such as PET (polyethylene terephthalate), and the electrode forming surface 11a of the substrate is bonded to the back surface 3a of the operation panel 3 via the adhesive layer 2 Engage. The adhesive layer 2 is formed of a light-transmitting adhesive such as acrylic. The operation panel 3 is formed of a translucent synthetic resin plate such as polycarbonate or a translucent glass plate. In the present specification, light transmittance means that the overall light transmittance is 6% or more and preferably 80%. the above. The detecting device 1 shown in Fig. 1 is disposed in a liquid crystal display device having a backlight 158350.doc 201222359: before the self-luminous display device, the display content of the display device can be visually displayed through the detecting device i. 7. The front surface of the operation panel 3 of the device 1 is the operation surface 3b. As shown in Fig. 1A, the conductor of the substantially ground potential, that is, the human finger touches the operation surface, can detect the change in the electrostatic capacitance formed between the electrode layer provided on the electrode substrate 1 and the finger. FIG. 2 shows an electrode forming surface m of the substrate u constituting the electrode substrate 10. In the electrode substrate 10, in the X direction and the Y direction orthogonal to each other on the plane parallel to the electrode forming surface 11a, the x direction is the first direction, and the γ direction is the second direction. As shown in Fig. 2, a plurality of second electrode layers 14 are formed on the electrode forming surface 11a. Each of the second electrode layers 14 is continuously extended in the γ direction (second direction) and formed at a fixed interval in the X direction (first direction). In each of the second electrode layers 14, a main detecting portion 14a having a rectangular shape arranged at a fixed interval in the Y direction and a narrow portion 14b connecting the main detecting portions i are continuously formed integrally. A plurality of first electrode layers 13 are formed on the electrode forming surface 11a of the substrate 11. The first electrode layer 13 has a rectangular shape, and all of the first electrode layers 13 are formed independently of each other. The shape and area of the rectangle of the first electrode layer 丨3 are the same as those of the main detecting portion 14a of the second electrode layer 14. Each of the first electrode layers 13 is located between the second electrode layers 14 and 14 adjacent in the X direction. The first electrode layer 13 is disposed in a region surrounded by the main detecting portion 14a. The first electrode layer 13 and the second electrode layer 14 are formed of a light-transmitting conductive material such as ITO. A composite material having a conductive material layer such as IT〇 is formed on one surface of the substrate 11 such as a PET film, and the first electrode layer α and the first electrode layer are formed by surname the conductive material layer, 158350.doc 201222359 14. That is, the first electrode layer 13 and the second electrode layer 14 are formed on one surface of the substrate η with the same material thickness and the same film thickness. The figure shows that the electrode forming surface 11a of the substrate 11 is formed with plural numbers. The insulating layer 20 is partially formed on the electrode forming surface Ua by a translucent organic insulating material (synthetic resin material). As shown in FIGS. 3, 4 and 5, the insulating layer 2〇 An elongated shape in which the length dimension of the 乂 direction is larger than the width dimension W2 of the Y direction. The insulating layer 2 跨越 spans the surface of the opposite end portions 13a, 13a of the adjacent first electrode layer 13 and the narrow width of the second electrode layer 14. The surface of the portion 14b and the surface of the substrate u where the electrode layer is not present are formed. As shown in Fig. 5, the body 21, 21 is integrally formed at the top (upper portion) of the insulating layer 20 at intervals in the Y direction. In the body 2丨, 2丨, one of the insulating materials forming the insulating layer 2 is partially convexly formed, and a groove portion 22 is formed between the opposing body 21 and the body 21. Two bodies 2 1 21 and the groove portion 22 extend in the Y direction and are formed to the end portions 20a, 20a on the X side of the insulating layer 20. Alternatively, the two bodies 21, 21 and the groove portion 22 are formed in the vicinity of the end portions 20a, 20a. The groove portion 22 of the insulating layer 20 is formed with a connection conductive layer 15. The connection conductive layer 15 is composed of the body 21, 21 The width dimension W1 of the Y direction is regulated. The connection conductive layer 15 extends in the Y direction along the groove portion 22, and each end portion 15a, 15a extends in the Y direction from the end portions 20a, 20a of the insulating layer 20. The end portions 15a, 15a of the connection conductive layer 15 are respectively joined to the surfaces of the first electrode layer 13. The first electrode layers 13 adjacent in the X direction are electrically connected to each other by the above-mentioned connection conductive layer 15. However, A 158350.doc 10-201222359 edge layer 20 is formed under the connection conductive layer 15, so that the narrow portion 14b of the second electrode layer 14 is insulated from the connection conductive layer 15. As shown in FIG. 5, the connection conductive layer 15 is The body 21, 21 formed on the insulating layer 20 is formed by the width dimension Wi of its γ direction, so that the connection conductive layer 15 is formed into a narrow width 'and the width dimension Wi is controlled with high precision. 15 is formed finer, so that the conductive layer 15 is connected even by silver or the like The light-transmitting material is formed and is not easily seen from the front, and when it is disposed in front of the self-luminous type display device, it is difficult to prevent people from seeing the display content. 〇 And 'because the width dimension W1 of the connection conductive layer 15 can be made fine. Therefore, the capacitance between the connecting conductive layer 15 and the opposing area of the narrow portion 14b of the second electrode layer 14 is extremely small. Thus, when the hand is detected, the first electrode layer 13 and the first electrode layer are detected. When the electrostatic capacitance changes in the case of the two-electrode layer 14, the influence of the opposing portion of the narrow portion 14b and the connection conductive layer 15 on the resolution is extremely small. The width W1 of the connection conductive layer 15 is 100 μm or less and 30 μηι or more, and Q is, for example, 50 °. Even if the connection conductive layer 15 is formed of a non-translucent material such as silver, as long as the width dimension is 1 μm or less, it is difficult to be Eye recognition. The width dimension W2 of the insulating layer 20 is 2 to 3 times the width dimension wi of the connecting conductive layer 15. The height dimension η of the insulating layer 20 is 5 μm or less. Further, the thickness τ of the first electrode layer 13 and the second electrode layer 14 formed by ruthenium is about 20 nm. One row of the first electrode layers 13 arranged in the X direction is connected by the connection conductive layer 15 to be electrically connected to each other. The rows of the first electrode layers 13 connected in the X direction are arranged at intervals in the Y direction. Each of the first electrode layers 14 that are continuously extended in the γ direction is used as a Y detecting electrode, and each line of the first electrode layer 13 that is connected in the other direction by the connection of the conductive layer 15 is used as the Y electrode. χDetection electrode. In the drive detecting circuit provided in the detecting device 1, a plurality of delay circuits including capacitors and resistors each of which is an electrode of each X detecting electrode, and electrodes each having the gamma detecting electrode as the other side are provided. A delay circuit composed of an electric grid and a resistor. In the delay circuit, the delay time of the rise of the wheel-out voltage is changed in accordance with the change in the electrostatic capacitance of the capacitor. In the drive detecting circuit, a pulse-like voltage is sequentially applied to a plurality of delay circuits including the 乂 detecting electrodes, and at a different timing, a pulse-like voltage is sequentially applied to a plurality of delay circuits including the γ detecting electrodes. . As shown in FIG. 10, when the human finger touches the operation surface 3b of the operation panel 3 of the detecting device 1, the Χ detecting electrode, that is, the first electrode layer, the 丫 detecting electrode, that is, the main detecting portion 14a of the second electrode layer 丨4 One is opposite to the finger. At this time, the capacitance of the capacitor formed between the detecting electrode and the finger becomes large, and the length of the extension of the output (4) of the delay circuit including the detecting electrode becomes long. The drive detecting circuit detects the coordinate position of the finger contact based on the timing at which the voltage is applied to which of the detecting electrodes or the Y detecting electrode, and the measured value of the delay time. The method of manufacturing the electrode substrate 1A will be described with reference to FIGS. 6 and 7. A composite material having a conductive material layer such as Ting can be formed on one surface of a substrate such as a PET film, and a pattern of the electrode layer 13 and a pattern of the second electrode layer 14 are formed by patterning the conductive material layer. . Then, the liquid resin portion is supplied to the substrate 11 by the ink jet method. 158350.doc • 12· 201222359 The electrode forming surface 11 a 'cures the liquid resin by UV irradiation or the like to form the insulating layer 20 » In the ink jet method The liquid resin containing the UV curable acrylic resin is sprayed toward the electrode forming surface 11 a of the substrate 11 in a small amount and in a dot shape from the discharge port of the ink jet head. By changing the dot pattern of the ink jet printing, the position at which the molten resin is sprayed and the supply amount of the liquid resin can be freely set. As shown in FIG. 6 and FIG. 7(A), in the region of the width dimension Wa which is located on both sides in the Y direction with the center line 形成 of the region where the insulating layer 2 is formed, the liquid resin 25 is ejected and increased. The density of dots applied. Moreover, the dot density is lowered in the region of the width dimension Wb where the center line 〇 is located. In the region of the width dimension wa and the width dimension Wb, the dot density can be changed in two stages, or the dot density can be changed in multiple stages, or the dot density can be increased in the region of the width dimension Wa. This area gradually decreases the point density toward the center line. The dot density can be freely set by adjusting the relative speed of the inkjet head and the substrate 11. When the relative speed of the inkjet head and the substrate 11 is slowed down, the dot density of the liquid resin 25 can be increased, and the relative density can be increased. Speed, then the dot density decreases. Fig. 7(A) schematically shows a state immediately after the liquid resin 25 is supplied to the electrode forming surface Ua of the substrate 11 in a dot shape. Although the liquid resin 25 supplied to the electrode forming surface 1 la is gradually fused by the wettability of the surface of the electrode layer 'but the dot density of the portion of the width dimension Wa becomes high, as shown in FIG. 7(B)' The fused liquid resin layer 25a forms a convex portion 21a on both sides of the center line ,, and a depressed portion 22a is formed in a portion of the center line 〇. As shown in Fig. 7(B), in a state where 158350.doc -13 - 201222359 where the convex portion 2 la and the depressed portion 22a remain on the liquid resin layer 25 a, uv is irradiated to harden the liquid resin layer 25a. As shown in FIGS. 4 and 5, an insulating layer 20 having the body 21, 21 and the groove portion 22 is formed. The liquid resin 25 supplied in a dot shape by the ink jet printing method is fused, and as shown in Fig. 7(B), the surface tension of the liquid resin 25 is preferably 20 to 28. The range of mN/m. Further, in order to be able to be ejected by the ink jet head and formed into a concavo-convex shape as shown in Fig. 7(B), the viscosity of the liquid resin 25 is preferably in the range of 8 to 12 mPa, si in the range of 45. In the printing by the ink jet method, the point of the liquid resin 25 can be patterned with high density and high precision by ensuring the relative position of the ink jet head and the substrate 11 with high precision. The interval between the bodies 21 and 21 on the completed insulating layer 20, that is, the width dimension of the groove portion 22 can be set with high precision. After the insulating layer 20 is formed, the connection conductive layer 15 is formed in the groove portion 22. The connecting conductive layer 15 is also formed by an ink jet method. The conductive liquid material used in the ink jet method contains silver nanoparticles and a solvent. With the ink jet head, the material liquid material is applied in a pattern from the upper side of the groove portion 22 to the upper side of the first electrode layer 13 on both sides. Then, the solvent was evaporated, and heating was performed at a temperature of 15 passages or less, and the silver nanoparticles were sintered to form a connection conductive layer. . Since the conductive liquid material supplied by the ink jet method has fluidity, it is expanded after being supplied to the surface of the substrate or the like. However, as shown in Fig. 5, the expansion of the conductive liquid material supplied to the groove portion 22 is regulated by the body 2i, 21. Therefore, the width dimension wi of the connection conductive layer 15 after sintering is regulated to be narrow. On the other hand, since the spacing between the cymbals 21 and 21 is determined with high precision, the width W1 of the connecting conductive layer 15 can be formed into a small size of about 5 〇 158350.doc -14 - 201222359, and the error becomes very small. 8 and 9 show an electrode substrate 丨1〇 according to a second embodiment of the present invention. 8 is equivalent to the cross-sectional view of FIG. 4, and FIG. 9 is equivalent to the cross-sectional view of FIG. The electrode substrate 110 is provided on the entire surface of the electrode forming surface 11a of the substrate 11 on which the first electric, the electrode layer 13 and the second electrode layer 14 having the same pattern as in FIG. 2 are formed, and the liquid resin is supplied by inkjet method. 25❶ The liquid resin is supplied to the surfaces of the first electrode layer 13 and the second electrode layer 14 at a uniform dot density, and further the entire regions of the first electrode layer 13 and the second electrode layer 14 are covered with a liquid resin. The dot density of the liquid resin 25 is lowered in a portion where the center line 连接 (see Fig. 6) of the connection conductive layer 15 is formed. As a result, a depressed portion is formed in a portion of the center line, and a convex portion is formed on both sides thereof. In the place where the flange portions 15a and 15a connecting the conductive layers 15 are formed, the liquid resin 25 is not supplied, and the opposite end portions 13a and 13a of the second electrode layers 13 and 13 are exposed. After the liquid resin 25 is supplied, the liquid resin is uv-cured, and as shown in FIGS. 8 and 9 , the insulating layer 120 covering the first electrode layer 13 and the second electrode layer is covered, and A groove portion 122 is formed in a portion crossing the center line 窄 of the narrow portion 14b of the second electrode layer 14, and the body 121, ΐ2ι are formed on both sides thereof. Further, as shown in FIG. 8, holes 123 and ι23 in which no resin layer exists are formed over the opposite end portions i3a and 13a of the first electrode layers 13 and 13. The conductive liquid material ’ is supplied from the groove portion 122 to the holes 123 and 123 by an inkjet method to be sintered to form a connection conductive layer 丨5. Further, the dot density of the liquid resin 25 supplied to the portion in which the bodies 121 and 121 are formed may be made denser than the number of points on the surfaces of the first electrode layer 13 and the second electrode layer 14, and the self-insulating layer 12 may be formed. 〇 protruding 堰 121, l2i. 158350.doc •15· 201222359 On the insulating substrate π〇 shown in Figs. 8 and 9, the first electrode layer 13 and the second electrode layer 14 are covered by the insulating layer 120. Therefore, as shown in Fig. 1, when the detecting device 1 is joined to the operation panel 3 by the adhesive layer 2, the adhesive layer 2 does not directly contact the electrode layer. Although the adhesive easily absorbs moisture, the insulating layer 12 of the resin which has been hardened by the surface of the electrode substrate 1 is covered, so that it is difficult to adhere moisture to the first electrode layer 13 and the second electrode layer 14, and it is easy to prevent deterioration. Further, in the above embodiment, the connection conductive layer 15 is formed of a non-translucent material such as silver, but the connection conductive layer 15 may be formed of a light-transmitting material such as IT〇. [Industrial Applicability] The place to which the present invention is applied is not limited to the detection area of the detection device that detects the change of the electrostatic electricity valley as in the above embodiment, and may be offset from the side of the detection area of the electrostatic capacitance. In the wraparound region of the wiring pattern, adjacent conductive electrodes are connected to each other and connected to other electrode layers using a connection conductive layer. Further, in various display devices such as liquid crystal display devices, the present invention can be implemented by connecting electrode layers in a display region, and the present invention can also be implemented in a wraparound region of a wiring pattern which is deviated from a display region. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a detecting device for an electrode substrate according to an embodiment of the present invention. Fig. 2 is a partial plan view showing an electrode forming surface of an electrode substrate according to an embodiment of the present invention. Fig. 3 is a plan view showing a part of Fig. 2 in an enlarged manner. 158350.doc -16· 201222359 Figure 4 is an enlarged cross-sectional view taken along line IV-IV of Figure 3. Figure 5 is an enlarged cross-sectional view taken along line V-V of Figure 3. Fig. 6 is an explanatory view showing a process of forming the insulating layer shown in Fig. 3 in a plan view. 7(A) and 7(B) are explanatory views showing a process of forming an insulating layer in a cross-sectional view taken along line VII-VII of Fig. 6. Fig. 8 is a cross-sectional enlarged view showing the electrode substrate according to the second embodiment of the present invention and Fig. 4; Fig. 9 is a cross-sectional enlarged view of the electrode substrate according to the second embodiment of the present invention, and Fig. 5 is an explanatory view of the operation of the electrode substrate according to the embodiment of the present invention. [Main component symbol description] 1 Detection device 2 Adhesive 3 Operation panel 3b Operation surface 10 Electrode substrate 11 Substrate 11a Electrode forming surface 13 Electrode layer 14 - Electrode layer 14a Main detecting portion 14b Narrow portion 158350.doc 201222359 15 Connecting conductive layer 20 insulating layer 21 body 21a convex portion 22 groove portion 22a depressed portion 25 liquid resin 110 electrode substrate 120 insulating layer 121 body 122 groove portion 123 hole 158350.doc • 18