201211546 六、發明說明： 【發明所屬之技術領域】 ί 本發明係關於一種安裝於車床而進行車床加工之車床 加工用構件、針狀構件及接觸探針（contact probe)。 【先前技術】 以往’在使用車床進行金屬等之加工時，係於將作為 車床加工用構件之工件（work)安裝於車床之夾盤（Chuck) 並予以固定後，使用車刀（bite)或鑽頭（drill)來切削工 件’藉以形成所希望的形狀。具體而言，於藉由車床加工 形成如螺絲之軸對稱的構件時，一般係應用由實心之天然 木所構成之圓柱形狀的工件（參照例如專利文獻1)。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開2003-291002號公報 【發明内容】 [發明所欲解決之課題] 在庳二二要削去卫件中大多的部分，因此 :二如貝金屬合金稀少且高價的材料作為素材 多浪費，而難以削減成本。 較 本發明係有鑑於上述情形而研創者， =由車床加工形成以稀少且高價之材料::::::: 針減成本之車床加二; [解決課題之手段] 323279 3 201211546 為了解決上述問題而達成目的，本發明之車床加工用 構件，係藉由安裝於車床來進行車床加工者；其特徵為呈 ::芯部，呈二狀，且由鋼、銅合金或鐵所構成;被覆部、， 無間隙地被覆刖4芯部之側面’且由責金屬或責 所構成；及外周部’無間隙地被覆前述被覆部之側面，且 由銅、銅合金或鐵所構成。 —此發明之車床加工用構件在上述發明中，前述 心部及前述外周部係由相同材料所構成。 車：卜=明之針狀構件，係呈使用上述發明所述之 車床加工用構件而形成之針狀；該針狀之長度方向之一端 部係具有分別藉由將前述被覆部之端部尖銳化而形成，且 沿者前述長度方向而突出之複數個尖銳端；另一方面，前 $長度方向之另-端部係呈前述被覆部露出於侧面之棒 狀0 此外，本發明之接觸探針，其特徵為具備：第i柱塞 匕了小由上述發明所述之針狀構件所構成 =長;=!裝於前述另-端部，且沿著前述第1 :塞之長度方向而伸縮自如 别述彈簣構件之另—方之端部。第2柱塞，文裝於 構件传接觸探針’在上述發明t，前述彈簧 再什係具有.稀疏繞線部 口端部被㈣於前述第預=距(pi㈣捲繞，且開 線部，從前述稀疏繞錄/、柱塞中之一方，及緊密繞 端部被安裝於前述第；：之端部延伸而緊密繞線，且開口 與第2柱塞中之另一方；該接觸探 323279 4 201211546 二疋負何時’前述緊密繞線部係可與安裝有前述稀 疏如線敎開口端部之柱塞接觸。 [發明之功效] 斗依據本發明’係具備：芯部，呈棒狀，且由銅、銅合 3所構成；被覆部，無間隙地被覆前述芯部之側面， 严·^或貝金屬合金所構成；及外周部，無間隙地被 ί:=Γ之侧面’且由銅、銅合金或鐵所構成，且於 ::=應用廉價的金屬。因此，藉由車床加工形成 費，且^Α之材料為素材之製品時可減少該種材料之浪 費’且削減成本。 【實施方式】 照所附圖式來說明用以實施本發明之形態(以 下=ΐ施形態」）。另外’圖式係為示意性者，各部分 之旱度與見度之關係，各個部分之厚 與實際情形有所不同，在圖切手寺應/主思也 之尺間當然也有包括有彼此 之尺寸關係或比率不同的部分的情形。 件之=二圖係ί顯示本發明之一實施形態之車床加工用構 圖係為第1圖之W線剖面圖。第1圖 二Γ二 用構件1係具備:呈大致圓柱狀 的心札破覆部3，無間隙地被覆芯部2之側面，且 =大致圓筒狀；及外周部4，無間隙地被覆被覆部3之側 或拉製加工而使芯部2、被覆部 之直徑具有預定比。另外，芯部2、被覆部3 323279 5 201211546 之直徑的比，係可依加工後之製品的用途來適當設定。 芯部2及外周部4係由銅、銅合金或鐵所構成。其中， 銅合金的成分比，依質量百分比濃度計算，銅（Cu)為97.2 至 98. 6%、鎳（Ni)為 1 至 2%、矽（Si)為 〇· 2 至 0· 4%、鋅（Zn) 為0.2至〇·4%。此種銅合金之拉伸強度係為4〇kgf/mm2。 在本實施形態中，雖係設為芯部2及外周部4為相同材料， 惟更一般而& ’芯部2與外周部4亦可為不同的材料。另 外，外周部4係可不呈完全的中空圓筒狀，亦可例如於側 面之一部分形成有切口或溝等。 被覆部3係由責金屬或貴金屬合金所構成。在此所稱 之貴金屬，係指例如金（Au)、銀（Ag)、白金（pt)、鈀（Pd)、 铑（Rh)等。此被覆部3之維克氏（Vickers)硬度（HV)係為 4〇〇以上，而且為由電阻率為5. 〇〇χ1〇-8Ω · m以下之貴金 屬或貴金屬合金所形成為尤佳。 第3圖係為顯示使用車床加工用構件1之車床加工處201211546 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a lathe processing member, a needle member, and a contact probe that are mounted on a lathe to perform lathe machining. [Prior Art] When a metal or the like is processed using a lathe, a work piece as a member for lathe machining is attached to a chuck (Chuck) of a lathe and fixed, and then a bite or A drill is used to cut the workpiece 'to form the desired shape. Specifically, when a member such as a screw axisymmetric member is formed by lathe machining, a cylindrical shape workpiece made of solid natural wood is generally applied (see, for example, Patent Document 1). [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] JP-A-2003-291002 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] In the second part, most of the parts of the guard are to be removed, and therefore: Second, if the shell metal alloy is rare and the expensive material is used as a material, it is difficult to cut costs. Compared with the present invention, the researcher has developed a rare and expensive material by lathe processing::::::: A lathe with a cost reduction of two; [Means for solving the problem] 323279 3 201211546 In order to solve the above In order to achieve the object, the lathe processing member of the present invention is a lathe processor which is mounted on a lathe; and is characterized in that: a core portion is formed in two shapes and is made of steel, copper alloy or iron; The part is covered with the side surface of the four core portions without a gap and is composed of a metal or a responsible member; and the outer peripheral portion is covered with the side surface of the covered portion without a gap, and is made of copper, a copper alloy or iron. - The lathe processing member according to the invention, wherein the core portion and the outer peripheral portion are made of the same material. The needle-shaped member of the present invention is a needle-like shape formed by using the member for lathe processing according to the above aspect of the invention; one end portion of the needle-shaped longitudinal direction has a sharpening of the end portion of the covering portion, respectively. And forming a plurality of sharp ends protruding in the longitudinal direction; on the other hand, the other end portion in the front length direction is a rod shape in which the covering portion is exposed on the side surface. Further, the contact probe of the present invention And characterized in that: the i-th plunger is small and consists of the needle-shaped member according to the above invention; the length is fixed to the other end portion, and is stretched along the longitudinal direction of the first plug; Freely describe the end of the other part of the magazine. The second plunger is attached to the member-transmitting contact probe. In the above invention t, the spring further has a sparse winding portion end portion which is (four) wound at the first pre-distance (pi (four)), and the opening portion Providing one of the aforementioned sparsely wound/rear, one of the plungers, and the tightly wound end portion, which is attached to the end portion of the first portion, and is tightly wound, and the other of the opening and the second plunger; 323279 4 201211546 When does the second compaction of the above-mentioned tightly wound part can be in contact with the plunger which is provided with the aforementioned sparsely open end of the wire 。. [Effect of the invention] The hopper according to the invention has a core and a rod shape And the copper and the copper are combined; the covering portion is covered with the side surface of the core portion without a gap, and is formed of a metal alloy of a ruthenium or a shell; and the outer peripheral portion is flanked by the side of the ί:=Γ It consists of copper, copper alloy or iron, and uses::== cheap metal is used. Therefore, it is costly to be formed by lathe processing, and the material of the material can reduce the waste of the material when the material of the material is used, and the cost is reduced. [Embodiment] The form for carrying out the invention will be described with reference to the accompanying drawings. State (the following = the form of the implementation). In addition, the 'pattern is the schematic, the relationship between the degree of drought and the visibility of each part, the thickness of each part is different from the actual situation, in the figure of the hand temple should be / thinking It is a matter of course that there is a case where the dimensional relationship or the ratio of the parts differs from each other. The second embodiment of the present invention is a cross-sectional view taken along the line W of Fig. 1 . In the first embodiment, the member 1 is provided with a substantially cylindrical heart-shaped breaking portion 3, and the side surface of the core portion 2 is covered without a gap, and is substantially cylindrical; and the outer peripheral portion 4 is covered without a gap. The diameter of the core portion 2 and the covering portion has a predetermined ratio on the side of the covering portion 3 or the drawing process. The ratio of the diameter of the core portion 2 and the covering portion 3 323279 5 201211546 can be determined according to the use of the processed product. The core portion 2 and the outer peripheral portion 4 are made of copper, copper alloy or iron. The composition ratio of the copper alloy is calculated by the concentration percentage of the copper, and the copper (Cu) is 97.2 to 98.6%, nickel (Ni). ) is 1 to 2%, 矽(Si) is 〇· 2 to 0.4%, and zinc (Zn) is 0.2 to 〇· 4%. The tensile strength of the copper alloy is 4 〇kgf/mm2. In the present embodiment, the core portion 2 and the outer peripheral portion 4 are made of the same material, but more generally & 'core 2 The outer peripheral portion 4 may be a different material from the outer peripheral portion 4. The outer peripheral portion 4 may not have a completely hollow cylindrical shape, and for example, a slit or a groove may be formed in one of the side surfaces. The covered portion 3 is made of a metal or a precious metal alloy. The term "precious metal" as used herein means, for example, gold (Au), silver (Ag), platinum (pt), palladium (Pd), rhenium (Rh), etc. Vickers of the covering portion 3 The hardness (HV) is 4 Å or more, and is preferably formed of a noble metal or a noble metal alloy having a specific resistance of 5. 〇〇χ1 〇 -8 Ω · m or less. Fig. 3 is a view showing a lathe processing section using the lathe processing member 1.
以將車床加工用構件1 切削成所希望的形狀Cutting the lathe machining member 1 into a desired shape
之探針固持具（probe 323279 6 201211546 :ho·)之主要部分之構成圖。第4圖所示之接觸探針u， . 係為進行ic晶片等之半導體積體電路之導通檢查等時用 α謀求半導體積㈣路與傳送檢查靠號之信號處理電路 之導通的治具。接觸探針u係具備：具有朝彼此相反之方 向突出之前端部之第1柱塞12及第2柱塞13;及用以連 結第1柱塞12與第2柱塞丨3，且可朝長度方向（第4圖之 上下方向）伸縮自如的彈簧構件14。其中，第1柱塞a係 為由車床加工用構件1所形成之針狀構件。 第1柱塞12係具有：前端部12a，沿著長度方向分別 突出，且呈彼此相同形狀之設有複數個尖銳端之呈王冠 (crown)形狀；凸緣（flange)部12b，具有較前端部12a之 最大徑還大的直徑；套筒（boss)部12c，相對於凸緣部12b 朝與前端部12a相反方向突出，且呈直徑較凸緣部ub之 直徑還小的圓柱狀，且可供彈簧構件14之端部壓入；及基 端部12d，呈直徑較套筒部12c之直徑還小的圓柱狀，且 從套筒部12c朝與凸緣部12b相反侧延伸；且第1柱塞 係相對於長度方向之中心軸呈對稱的形狀。 第5圖係為顯示第1柱塞12之構成之縱剖面圖。前端 部12a之尖銳端121a係藉由車床加工時之溝加工將被覆部 3之端部予以尖銳化者。此外，基端部12d之外周面，係 使被覆部3露出者。 第2柱塞13係具有：具有尖銳端之前端部13a ;凸緣 部13b，具有較前端部13a之最大徑還大的直徑；套筒部 13c，透過凸緣部13b朝與前端部i3a相反方向突出，且呈 323279 7 201211546 直徑較凸緣部13b之直徑還小的圓她，且可供彈寄構件 14之端部壓人；及基端部13d，呈直徑較套筒部…之直 徑還小的圓柱狀’且從套筒部13c朝與凸緣部咖相反側 延伸；且第2絲㈣㈣於與長度方向平行之中心轴呈 對稱的形狀。第2柱塞13係使用鋼、銅合金或鐵而形成。 另外，亦可藉由加工錯筆狀之車床加工用構件來形成 第2柱塞’該車床加工用構件係具備：芯部，由貴金屬或 貴金屬合金所構成；及被覆部，由銅、銅合金或鐵所構成， 且無間隙地被覆芯部之側面。此時，帛2柱塞之前端部之 尖銳端部分係由貴金屬或貴金屬合金所構成。 此外，以第2柱塞而言’除基端部之長度不同以外， 亦可應用具有與第丨柱塞12相_成之針狀構件。 彈簧構件14係具有均一的直徑，且為由朝轴線方向伸 縮自如之導電性材料所構成之線圈(c〇⑴彈簧。更具體而 言，彈簧構件14係具有：稀疏繞線部14a，以非為零之預 定間距捲繞；及緊密繞線部14b，從稀疏繞線部A之端 部緊密捲繞。稀疏繞線部l4a之開口端部係藉由壓入而安 裝於第1柱塞12之套筒部12(：。另—方面m線部i4b 之開口端部，係藉由壓入而安裝於第2柱塞13之套筒部 13c。 另外，亦可將彈簧構件之稀疏繞線部與緊密繞線部的 位置設為相反β亦即，可將安裝於第丨柱塞之侧設為緊密 繞線部，另-方面將安裝於第2柱塞之侧設為稀疏繞線 部。此時，可將第2柱塞之基端部之長度設為較第丨柱塞 323279 8 201211546 之基端部的長度還長，且於接觸 柱塞之基蠕部與緊密繞線部2針U㈣負荷時使第2 21 上㈣之接觸騎11，係收毅探針固持具 象針固持具21之接觸探針11，係將作為檢查 體電路_、與輪出檢查用信號之電路基 行半導iPa1電性連m進行信號的傳送及接收。在進 電路胸檢查時，第1柱塞12係與設於半 之連接用電極101接觸，另-方面第2 柱塞13則與設於電路基板之連接用電極加接觸。 探斜2說明收容接觸探針11之探針固持具21的構成。 ，，十固持具21係在使各制探針u之兩端伸出之狀態 數個技^連接用電極1Q1之配置圖案對應之圖案來收容複 ^探針U。探針固持具21係使賴緣性高之合成 星性材料來將分別形成為平板狀之第1固持 主及第2固持具構件23朝板厚方向疊層而成。第 等方件22與第2固持具構件23係藉由螺固或黏接 帛1固持具構件22中，係設有複數個朝板厚方向貫 用以供接觸探針11減之插通孔22卜插通孔m係 句立小徑部221a與大徑部221b所構成之階梯孔形狀。小 m21a係在與半導體積體料100相對向之侧（第4圖 ^上面侧）具有開ΰ ’另一方面大徑部221b係在與第2固 緣St:3相對向之侧具有開口。第1柱塞12係藉由凸 '' 〇構成小徑部22以及大徑部221b之邊界的段差 323279 9 201211546 面抵接而防止從第1固持具構件22脫落。 在第2固持具構件23中，係設有複數個朝板厚方向貫 通’用以插通接觸探針11之插通孔231。插通孔231係與 複數個插通孔231任一者連通。插通孔231係呈由小徑部 231a與大徑部231b所構成之階梯孔形狀。小徑部231a係 在與電路基板200相對向之侧（第4圖之下面侧）具有開 口’另一方面大徑部231b係在與第1固持具構件22相對 向之侧具有開口。第2柱塞13係藉由凸緣部13b與構成小 徑部231a及大徑部231b之邊界的段差面抵接而防止從第 2固持具構件2 3脫落。 或可加工陶竟（Machinable Ceramics)、 (註冊商標）等 以構成第1固持具構件22及第2固持具構件23之絕 緣性材料而言，係可使用具有良好絕緣性之合成樹脂材。 此外，以絕緣性材料而言，亦可使用滑動性佳之樹脂材料 鐵氟龍（telfon) 插通孔221、231係藉由對構成母材之絕緣性材料進行 鑽孔加工、蝕刻、衝切成型之任一者、或是施行使用雷射仃 電子束、離子束、線放電等之任一者的加工來形成^ 而 另外’第1固持具構件22之板厚與第2固持具構件 23之板厚的比，係可依據收容之接觸探針u的形= 適當設定。 在進行半導體積體電路100之檢查時，接觸探針u 與半導體積體電路100接觸而承受預定負荷。藉 私' 負荷，使彈簧構件14收縮而彎曲。結果，緊密鱗線部1匕 323279 10 201211546 之至少-部分即與第！柱塞12之基端部版接觸。藉此， 可以最短路徑實現依序經由第！柱塞12、彈簧構^ 第2柱塞13之電性導通。如此—來即實現最短路徑之電性 導通，藉此可抑制檢查時之接觸探針Π之電感 (inductance)的增加。 依據以上所說明之本發明之一實施形態，係具備… 二呈棒狀，且由銅、銅合金或鐵所構成；被覆部，“ 部⑽面’且由責金屬或貴金屬合金。 成’及外周和無間隙地被覆前述被覆部之侧面，且 鐵所構成；且在芯部及相部應驗貴金屬或貴 金屬&金還廉價的金屬。因此， 屬合金之使用量，且於藉由車床低貝金屬或貴金 Π為素材之製品時可減少心二稀:= =之内周的基端部應用貴金屬或貴金屬合金 生接觸部位之氧化及磨耗而可使電阻安定1此，== ^性進行使用砂紙等將因為重複檢查而附著於前端之銲锡 以削除之作業’亦可長期間地使用，而可提供—種 優異耐久性之針狀構件及接冑探針。 〃 (至此為止，雖已詳述了用以實施本發明之最佳形態， 2發明並非僅限^於上述之一實施形態。例如，亦可在 〜2與被覆部3、及被覆部3與外周部4之一方或雙方， 323279 11 201211546 :=性之金屬或合金。—―丨如 狀。 林之她％+ ㈤&乍成四角柱狀時之車床加工用構 32 %。炉邱。 饭復破覆0卩33之側面的外周部 呷33及外’、一芯部2相同的材料所構成。此外，被覆 材料所播周部34係分別由與被覆部3及外周部4相同的 藉由以此=另外’更—般而言，芯部係可呈多角柱狀。 方式將怒部形成角柱形狀，可提升芯部的剛性。 等，σ、 本發明係可包括在此所未記載之各種實施形態 二要在不脫離申請專利範圍所特定之技術思想範圍 内，均可進行各種設計變更等。 【圖式簡單說明】 第1圖係為顯示本發明之一實施形態之車床加工用構 件之構成圖。 第2圖係為第1圖之Α-Α線剖面圖。 圖係為顯示使用本發明之一實施形態之車床加工 用構件之車床加1處理之概要圖。 第4圖係為顯示本發明之一實施形態之接觸探針之構 成圖。 第 q 図/ 圖係為顯示本發明之一實施形態之針狀構件之構 成之剖面圖。 12 323279 201211546 • 第6圖係為顯示本發明之另一實施形態之車床加工用 .構件之端面之構成圖。 【主要元件符號說明】 1、31 車床加工用構件 2 ' 32 芯部 3 ' 33 被覆部 4、34 外周部 5 夾盤 6 車刀 11 接觸探針 12 第1柱塞 12a 、 13a 前端部 12b 、 13b 凸緣部 12c 、 13c 套筒部 12d、13d 基端部 13 第2柱塞 14 彈簧構件 14a 稀疏繞線部 14b 緊密繞線部 21 探針固持具 22 第1固持具構件 23 第2固持具構件 100 半導體積體電路 1(U、201 連接用電極 13 323279 201211546 121a 尖銳端 200 電路基板 221 > 231 插通孔 221a 、 231a 小徑部 221b 、 231b 大徑部The composition of the main part of the probe holder (probe 323279 6 201211546 :ho·). The contact probes u, which are shown in Fig. 4, are used to detect the conduction of the semiconductor product (four) circuit and the signal processing circuit for transmitting the inspection signal when the semiconductor integrated circuit of the ic chip or the like is turned on. The contact probe u includes a first plunger 12 and a second plunger 13 that protrude toward the opposite ends in opposite directions, and a first plunger 12 and a second plunger 3 that are coupled to each other. The spring member 14 that is expandable and contractible in the longitudinal direction (the downward direction in FIG. 4). Among them, the first plunger a is a needle-shaped member formed by the lathe machining member 1. The first plunger 12 has a front end portion 12a that protrudes in the longitudinal direction and has a crown shape in which a plurality of sharp ends are formed in the same shape, and a flange portion 12b has a front end. The maximum diameter of the portion 12a is still large; the boss portion 12c protrudes in a direction opposite to the front end portion 12a with respect to the flange portion 12b, and has a cylindrical shape having a diameter smaller than that of the flange portion ub, and The end portion of the spring member 14 is press-fitted; and the base end portion 12d has a cylindrical shape having a diameter smaller than that of the sleeve portion 12c, and extends from the sleeve portion 12c toward the opposite side of the flange portion 12b; 1 The plunger is symmetrical with respect to the central axis of the longitudinal direction. Fig. 5 is a longitudinal sectional view showing the configuration of the first plunger 12. The sharp end 121a of the distal end portion 12a sharpens the end portion of the covered portion 3 by the groove processing during lathe processing. Further, the outer peripheral surface of the proximal end portion 12d is such that the covering portion 3 is exposed. The second plunger 13 has a sharp end front end portion 13a, and the flange portion 13b has a larger diameter than the maximum diameter of the front end portion 13a. The sleeve portion 13c passes through the flange portion 13b toward the front end portion i3a. The direction is prominent, and the diameter of 323279 7 201211546 is smaller than the diameter of the flange portion 13b, and the end portion of the bombarding member 14 is pressed; and the base end portion 13d has a diameter larger than that of the sleeve portion. It is also small in a cylindrical shape and extends from the sleeve portion 13c toward the side opposite to the flange portion; and the second wire (four) (four) has a shape symmetrical with respect to a central axis parallel to the longitudinal direction. The second plunger 13 is formed using steel, a copper alloy, or iron. Further, the second plunger may be formed by processing a writhing lathe machining member. The lathe machining member includes a core portion made of a noble metal or a precious metal alloy, and a coating portion made of copper or copper alloy. Or iron, and the side of the core is covered without a gap. At this time, the sharp end portion of the front end of the 帛2 plunger is composed of a noble metal or a precious metal alloy. Further, in addition to the length of the base end portion of the second plunger, a needle-like member having a phase with the second plunger 12 may be applied. The spring member 14 has a uniform diameter and is a coil composed of a conductive material that is expandable and contractible in the axial direction (c〇(1) spring. More specifically, the spring member 14 has a sparse winding portion 14a to The non-zero predetermined pitch winding; and the tight winding portion 14b are tightly wound from the end of the sparse winding portion A. The open end of the sparse winding portion 14a is attached to the first plunger by press-fitting The sleeve end portion 12 of the sleeve portion 12 (the other end portion of the m-wire portion i4b is attached to the sleeve portion 13c of the second plunger 13 by press fitting. Further, the spring member may be sparsely wound. The position of the line portion and the tightly wound portion is set to be opposite β, that is, the side attached to the second plunger can be a tightly wound portion, and the side attached to the second plunger can be set as a sparse winding. In this case, the length of the base end portion of the second plunger can be set longer than the length of the base end portion of the second plunger 323279 8 201211546, and the base portion and the tight winding portion of the contact plunger are contacted. When the 2-pin U (four) load is applied, the contact riding on the 2nd (4th) of the 2nd 21 is used to hold the contact probe 11 of the needle holding fixture 21 The signal is transmitted and received as the test body circuit _ and the circuit-based semi-conducting iPa1 electrically connected to the signal for the round-trip inspection. When the circuit is inspected, the first plunger 12 is connected to the half. The electrode 101 is in contact with each other, and the second plunger 13 is in contact with the connection electrode provided on the circuit board. The probe 2 describes the configuration of the probe holder 21 for accommodating the contact probe 11. The probe U is accommodated in a pattern corresponding to the arrangement pattern of the plurality of connection electrodes 1Q1 in a state in which both ends of the probes u are extended. The probe holder 21 is a synthetic star having a high affinity. The first holding main body and the second holding member 23 each formed into a flat shape are laminated in the thickness direction, and the second member 22 and the second holding member 23 are screwed or bonded. The 固1 holder member 22 is provided with a plurality of insertion holes 22 for inserting the through holes 22, and the small diameter portion 221a and the large diameter portion 221b. The shape of the stepped hole. The small m21a has an opening on the side opposite to the semiconductor body material 100 (the upper side of Fig. 4) On the other hand, the large diameter portion 221b has an opening on the side opposite to the second solid edge St: 3. The first plunger 12 is formed by a convex ridge ' which forms a step 323279 between the small diameter portion 22 and the large diameter portion 221b. 9 201211546 The surface contact is prevented from falling off from the first holder member 22. The second holder member 23 is provided with a plurality of insertion holes 231 through which the contact probe 11 is inserted. The insertion hole 231 is in communication with any one of the plurality of insertion holes 231. The insertion hole 231 has a stepped hole shape formed by the small diameter portion 231a and the large diameter portion 231b. The small diameter portion 231a is coupled to the circuit board 200. The opposite side (the lower side of FIG. 4) has an opening. On the other hand, the large diameter portion 231b has an opening on the side opposite to the first holder member 22. The second plunger 13 is prevented from falling off from the second holder member 23 by the flange portion 13b abutting on the step surface forming the boundary between the small diameter portion 231a and the large diameter portion 231b. Or Machinable Ceramics, (registered trademark), etc. In order to constitute the insulating material of the first holder member 22 and the second holder member 23, a synthetic resin material having good insulating properties can be used. Further, in the case of an insulating material, it is also possible to use a slidable resin material, telfon insertion holes 221 and 231, by drilling, etching, and punching an insulating material constituting the base material. Any of the types or the processing using either of a laser beam, an ion beam, a line discharge, or the like, and the thickness of the 'first holder member 22' and the second holder member 23 are formed. The ratio of the thickness of the plate can be appropriately set according to the shape of the contact probe u to be accommodated. When the semiconductor integrated circuit 100 is inspected, the contact probe u comes into contact with the semiconductor integrated circuit 100 to withstand a predetermined load. By the private 'load, the spring member 14 is contracted and bent. As a result, at least the part of the tight scale line 1 匕 323279 10 201211546 is the same as the first! The base end plate of the plunger 12 is in contact. In this way, the shortest path can be achieved in sequence! The plunger 12 and the spring mechanism are electrically connected to the second plunger 13. In this way, the electrical conduction of the shortest path is achieved, whereby the increase in the inductance of the contact probe 检查 during inspection can be suppressed. According to an embodiment of the present invention described above, it is provided with two rods and made of copper, a copper alloy or iron; and a covering portion, "part (10) surface" and a metal or a precious metal alloy. The outer circumference and the side surface of the covering portion are covered with no gap, and the iron is composed; and the precious metal or the precious metal & gold is also inexpensive in the core portion and the phase portion. Therefore, the amount of the alloy is used, and is low by the lathe. When the shell metal or precious gold is used as the material of the material, the diuretic can be reduced: = = the inner end of the inner circumference is oxidized and abraded by the contact portion of the precious metal or the precious metal alloy, so that the resistance can be stabilized by one, == ^ The use of sandpaper or the like to remove the solder adhered to the tip end by repeated inspections can be used for a long period of time, and a needle-like member and an attachment probe excellent in durability can be provided. 〃 (so far, Although the best mode for carrying out the invention has been described in detail, the invention is not limited to the above-described embodiment. For example, it may be one of the 〜2 and the covering portion 3, and the covering portion 3 and the outer peripheral portion 4 Or both, 323279 11 2012 11546 : = metal or alloy of sex. - 丨 状 。 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林 林The portion 33 is made of the same material as the outer core portion 2, and the peripheral portion 34 of the covering material is the same as the covering portion 3 and the outer peripheral portion 4, respectively. In other words, the core portion can be in the form of a polygonal column. The method can form the corner portion of the horn to increase the rigidity of the core. The σ, the present invention can include various embodiments not described herein. Various design changes and the like can be made within the scope of the technical scope of the patents. [Brief Description of the Drawings] Fig. 1 is a view showing a configuration of a member for lathe machining according to an embodiment of the present invention. 1 is a schematic cross-sectional view showing a lathe plus one treatment using a lathe machining member according to an embodiment of the present invention. Fig. 4 is a view showing an embodiment of the present invention. The composition of the probe. The q 図 / diagram is the display A cross-sectional view of a configuration of a needle-shaped member according to an embodiment of the present invention. 12 323279 201211546 Fig. 6 is a configuration diagram showing an end surface of a member for lathe machining according to another embodiment of the present invention. 1, 31 lathe machining member 2 ' 32 core 3 ' 33 covered portion 4, 34 outer peripheral portion 5 chuck 6 turning tool 11 contact probe 12 first plunger 12a, 13a front end portion 12b, 13b flange portion 12c, 13c sleeve portion 12d, 13d base end portion 13 second plunger 14 spring member 14a sparse winding portion 14b tight winding portion 21 probe holder 22 first holder member 23 second holder member 100 semiconductor integrated circuit 1 (U, 201 connection electrode 13 323279 201211546 121a sharp end 200 circuit board 221 > 231 insertion hole 221a, 231a small diameter portion 221b, 231b large diameter portion