WO2012005234A1 - Member for processing with lathe, acicular member, and contact probe - Google Patents

Member for processing with lathe, acicular member, and contact probe Download PDF

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Publication number
WO2012005234A1
WO2012005234A1 PCT/JP2011/065329 JP2011065329W WO2012005234A1 WO 2012005234 A1 WO2012005234 A1 WO 2012005234A1 JP 2011065329 W JP2011065329 W JP 2011065329W WO 2012005234 A1 WO2012005234 A1 WO 2012005234A1
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WO
WIPO (PCT)
Prior art keywords
lathe
plunger
contact probe
covering
attached
Prior art date
Application number
PCT/JP2011/065329
Other languages
French (fr)
Japanese (ja)
Inventor
風間 俊男
重樹 石川
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日本発條株式会社
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Publication of WO2012005234A1 publication Critical patent/WO2012005234A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755Material aspects
    • G01R1/06761Material aspects related to layers

Definitions

  • the present invention relates to a lathe machining member, a needle-like member, and a contact probe that are attached to a lathe and perform lathe machining.
  • the workpiece which is a lathe machining member
  • the workpiece is attached and fixed to the chuck of the lathe, and then the desired shape is formed by cutting the workpiece using a tool or a drill.
  • Forming Specifically, for example, when an axially symmetric member such as a screw is formed by lathe processing, it is common to apply a cylindrical workpiece made of a solid solid material (see, for example, Patent Document 1). ).
  • the present invention has been made in view of the above, and it is possible to reduce the waste of such material and reduce the cost when a product made of a rare and expensive material is formed by lathe processing.
  • An object is to provide a lathe member, a needle-like member, and a contact probe.
  • a lathe machining member is a lathe machining member that performs lathe machining by being attached to a lathe and has a bar shape, copper, copper alloy or A core portion made of iron, a side surface of the core portion covered without gap, a coating portion made of noble metal or a noble metal alloy, and a side surface of the coating portion covered without gap, and an outer peripheral portion made of copper, copper alloy, or iron; , Provided.
  • the lathe machining member according to the present invention is characterized in that, in the above invention, the core part and the outer peripheral part are made of the same material.
  • the needle-shaped member according to the present invention has a needle shape formed using the lathe machining member according to the above-described invention, and each one end portion of the needle-shaped longitudinal direction is an end portion of the covering portion. And having a plurality of sharp ends protruding along the longitudinal direction, the other end portion in the longitudinal direction has a rod shape with the covering portion exposed on the side surface. .
  • the contact probe according to the present invention includes a first plunger composed of the needle-like member described in the above invention, and one end attached to the other end, and is extendable along the longitudinal direction of the first plunger. And a conductive second plunger attached to the other end of the spring member.
  • the spring member is wound at a predetermined pitch, and an open end is attached to one of the first and second plungers.
  • a tightly wound portion that extends from the end of the wound portion and is tightly wound and has an open end attached to the other of the first and second plungers, and when the contact probe receives a predetermined load, The tightly wound portion can be in contact with a plunger to which the open end of the coarsely wound portion is attached.
  • FIG. 1 is a diagram showing a configuration of a lathe machining member according to an embodiment of the present invention.
  • 2 is a cross-sectional view taken along line AA in FIG.
  • FIG. 3 is a diagram showing an outline of a lathe machining process using the lathe machining member according to the embodiment of the present invention.
  • FIG. 4 is a diagram showing a configuration of a contact probe according to an embodiment of the present invention.
  • FIG. 5 is a cross-sectional view showing the configuration of the needle-like member according to one embodiment of the present invention.
  • FIG. 6 is a diagram showing a configuration of an end face of a lathe machining member according to another embodiment of the present invention.
  • FIG. 1 is a diagram showing a configuration of a lathe machining member according to an embodiment of the present invention.
  • 2 is a cross-sectional view taken along line AA in FIG.
  • a lathe machining member 1 shown in FIGS. 1 and 2 includes a core portion 2 having a substantially columnar shape, a side surface of the core portion 2 without a gap, and a covering portion 3 having a hollow substantially cylindrical shape.
  • the outer peripheral part 4 which covers a side surface without gap and makes a hollow substantially cylindrical shape is provided.
  • the lathe member 1 is formed so that the diameters of the core portion 2, the covering portion 3, and the outer peripheral portion 4 have a predetermined ratio by wire drawing or drawing. In addition, what is necessary is just to set suitably the ratio of the diameter of the core part 2, the coating
  • the core part 2 and the outer peripheral part 4 are made of copper, a copper alloy, or iron.
  • the component ratio of the copper alloy is 97.2 to 98.6% of copper (Cu), 1 to 2% of nickel (Ni), and 0.2 to 0.4 of silicon (Si) in mass percent concentration. %, Zinc (Zn) is 0.2 to 0.4%.
  • Such a copper alloy has a tensile strength of 40 kgf / mm 2 .
  • the core portion 2 and the outer peripheral portion 4 are made of the same material, but more generally, the core portion 2 and the outer peripheral portion 4 may be made of different materials.
  • the outer peripheral part 4 does not need to form complete hollow cylindrical shape, for example, a notch, a groove
  • the covering portion 3 is made of a noble metal or a noble metal alloy.
  • the noble metal include gold (Au), silver (Ag), platinum (Pt), palladium (Pd), and rhodium (Rh).
  • the covering 3 is more preferably made of a noble metal or a noble metal alloy having a Vickers hardness (HV) of 400 or more and an electric resistivity of 5.00 ⁇ 10 ⁇ 8 ⁇ ⁇ m or less.
  • FIG. 3 is a diagram showing an outline of lathe processing using the lathe machining member 1.
  • the lathe machining member 1 is attached and fixed to the lathe chuck 5 and then the bite 6 is sent from right to left in the figure while rotating the chuck 5 at a predetermined rotational speed.
  • the lathe member 1 is cut into a desired shape.
  • the lathe member 1 may be further drawn or drawn.
  • FIG. 4 is a diagram showing a configuration of a main part of a contact probe having parts machined from the lathe machining member 1 and a probe holder for accommodating the contact probe.
  • a contact probe 11 shown in the figure is a jig for conducting electrical connection between a semiconductor integrated circuit and a signal processing circuit that transmits a test signal when conducting a continuity test of the semiconductor integrated circuit such as an IC chip.
  • the contact probe 11 connects the first plunger 12 and the second plunger 13 having tip portions protruding in directions opposite to each other, and the first plunger 12 and the second plunger 13, and is in the longitudinal direction (vertical direction in FIG. 4).
  • a spring member 14 that is telescopic.
  • the first plunger 12 is a needle-like member formed from the lathe machining member 1.
  • the first plunger 12 protrudes along the longitudinal direction and has a crown-shaped tip portion 12a provided with a plurality of sharpened ends having the same shape, and a flange portion having a diameter larger than the maximum diameter of the tip portion 12a 12b, a boss portion 12c that protrudes in the opposite direction to the tip portion 12a with respect to the flange portion 12b, has a cylindrical shape with a diameter smaller than the diameter of the flange portion 12b, and into which the end portion of the spring member 14 is press-fitted, and a boss portion It has a cylindrical shape with a diameter smaller than the diameter of 12c, has a base end portion 12d extending from the boss portion 12c to the opposite side of the flange portion 12b, and has a symmetrical shape with respect to the central axis in the longitudinal direction.
  • FIG. 5 is a longitudinal sectional view showing the configuration of the first plunger 12.
  • the sharp end 121a of the front end portion 12a is obtained by sharpening the end portion of the covering portion 3 by grooving during lathe processing. Further, the outer peripheral surface of the base end portion 12d is obtained by exposing the covering portion 3.
  • the second plunger 13 protrudes in a direction opposite to the distal end portion 13a via the flange portion 13b, a distal end portion 13a having a sharp end, a flange portion 13b having a diameter larger than the maximum diameter of the distal end portion 13a, and the flange portion 13b.
  • the second plunger 13 is formed using copper, a copper alloy, or iron.
  • a second lathe machining member having a core portion made of a noble metal or a noble metal alloy and a covering portion made of copper, copper alloy or iron and covering the side surface of the core portion without gaps is processed.
  • a plunger may be formed.
  • the sharp end portion of the tip portion of the second plunger is made of a noble metal or a noble metal alloy.
  • a needle-like member having the same configuration as that of the first plunger 12 can be applied except that the length of the base end portion is different.
  • the spring member 14 is a coil spring made of a conductive material having a uniform diameter and capable of expanding and contracting in the axial direction. More specifically, the spring member 14 has a coarsely wound portion 14a wound at a predetermined pitch that is not zero, and a tightly wound portion 14b that is tightly wound from the end of the coarsely wound portion 14a.
  • the opening end portion of the rough winding portion 14a is attached to the boss portion 12c of the first plunger 12 by press-fitting.
  • the open end of the tightly wound portion 14b is attached to the boss portion 13c of the second plunger 13 by press fitting.
  • the positions of the coarsely wound portion and the tightly wound portion of the spring member may be reversed. That is, the side attached to the first plunger may be a tightly wound portion, while the side attached to the second plunger may be a coarsely wound portion.
  • the length of the base end portion of the second plunger is made longer than the length of the base end portion of the first plunger so that the base end portion of the second plunger is in close contact when the contact probe 11 receives a load. What is necessary is just to make it contact with a winding part.
  • the contact probe 11 having the above configuration is accommodated in the probe holder 21.
  • the contact probe 11 accommodated in the probe holder 21 electrically connects the semiconductor integrated circuit 100 to be inspected and the circuit board 200 that outputs a signal for inspection, and transmits and receives signals.
  • the first plunger 12 contacts the connection electrode 101 provided on the semiconductor integrated circuit 100
  • the second plunger 13 contacts the connection electrode 201 provided on the circuit board 200.
  • the probe holder 21 accommodates a plurality of contact probes 11 in a pattern corresponding to the arrangement pattern of the connection electrodes 101 with both ends of each contact probe 11 exposed.
  • the probe holder 21 is formed by laminating a first holder member 22 and a second holder member 23 each formed in a flat plate shape using an insulating material such as a synthetic resin material having a high insulating property in the thickness direction.
  • the first holder member 22 and the second holder member 23 are fixed by screwing or bonding.
  • the first holder member 22 is provided with a plurality of insertion holes 221 that are penetrated in the plate thickness direction and through which the contact probe 11 is inserted.
  • the insertion hole 221 has a stepped hole shape including a small diameter part 221a and a large diameter part 221b.
  • the small diameter portion 221 a has an opening on the side facing the semiconductor integrated circuit 100 (the upper surface side in FIG. 4), while the large diameter portion 221 b has an opening on the side facing the second holder member 23.
  • the first plunger 12 is prevented from coming off from the first holder member 22 by the flange portion 12b coming into contact with the step surface forming the boundary between the small diameter portion 221a and the large diameter portion 221b.
  • the second holder member 23 is provided with a plurality of insertion holes 231 penetrating in the plate thickness direction and through which the contact probe 11 is inserted.
  • the insertion hole 231 communicates with any of the plurality of insertion holes 231.
  • the insertion hole 231 has a stepped hole shape including a small diameter portion 231a and a large diameter portion 231b.
  • the small diameter portion 231 a has an opening on the side facing the circuit board 200 (the lower surface side in FIG. 4), while the large diameter portion 231 b has an opening on the side facing the first holder member 22.
  • the second plunger 13 is prevented from coming off from the second holder member 23 by the flange portion 13b coming into contact with the step surface forming the boundary between the small diameter portion 231a and the large diameter portion 231b.
  • a synthetic resin material having good insulating properties can be used as the insulating material constituting the first holder member 22 and the second holder member 23 .
  • a resin material having good slidability, a machinable ceramic, Teflon (registered trademark), or the like can be used as the insulating material.
  • the insertion holes 221 and 231 were either drilled, etched or stamped into the insulating material forming the base material, or used any one of laser, electron beam, ion beam, wire discharge, etc. It is formed by processing.
  • the ratio of the plate thickness of the first holder member 22 and the plate thickness of the second holder member 23 can be appropriately set according to the shape of the contact probe 11 to be accommodated.
  • the contact probe 11 contacts the semiconductor integrated circuit 100 and receives a predetermined load.
  • the spring member 14 contracts and curves.
  • at least a part of the tightly wound portion 14 b comes into contact with the proximal end portion 12 d of the first plunger 12.
  • electrical conduction through the first plunger 12, the spring member 14, and the second plunger 13 in sequence is realized by the shortest path. In this way, by realizing electrical conduction through the shortest path, an increase in inductance of the contact probe 11 at the time of inspection can be suppressed.
  • a rod-shaped core part made of copper, a copper alloy or iron, and a side part of the core part are covered without a gap, and a covering part made of a noble metal or a noble metal alloy,
  • the outer peripheral portion made of copper, a copper alloy or iron, and a metal cheaper than a noble metal or a noble metal alloy is applied to the core portion and the outer peripheral portion. Therefore, the amount of noble metal or noble metal alloy used can be greatly reduced, and when a product made of a rare and expensive material is formed by lathe processing, the waste of such a material can be reduced and the cost can be reduced.
  • the noble metal or the noble metal alloy is applied to the base end portion that slides along the winding direction on the distal end of the needle-like member provided in the contact probe and the inner circumference of the tightly wound portion of the spring member. Therefore, oxidation and wear of the contact portion are less likely to occur, and the electric resistance is stabilized. Therefore, even if the work of scraping off the solder adhered to the tip by repeating the inspection using a sandpaper etc. is periodically performed, it can be used for a long period of time, and the needle-like member and contact probe excellent in durability Can be provided.
  • a metal or an alloy that improves adhesion may be interposed in one or both of the core portion 2 and the covering portion 3 and the covering portion 3 and the outer peripheral portion 4.
  • a metal or an alloy that improves adhesion may be interposed in one or both of the core portion 2 and the covering portion 3 and the covering portion 3 and the outer peripheral portion 4.
  • examples of such a material include nickel or a nickel alloy.
  • FIG. 6 is a diagram illustrating a configuration of an end face of a lathe member when the core portion has a quadrangular prism shape.
  • the lathe machining member 31 shown in the figure includes a core portion 32 having a quadrangular prism shape, a covering portion 33 that covers the side surface of the core portion 32 without a gap, and an outer peripheral portion 34 that covers the side surface of the covering portion 33 without a gap.
  • the core portion 32 is made of the same material as the core portion 2.
  • the covering portion 33 and the outer peripheral portion 34 are made of the same material as the covering portion 3 and the outer peripheral portion 4, respectively. More generally, the core portion may have a polygonal column shape.
  • the rigidity of a core part can be improved by making a core part into a prismatic shape.
  • the present invention can include various embodiments and the like not described herein, and various design changes and the like can be made without departing from the technical idea specified by the claims. It is possible to apply.

Abstract

Provided is a member for lathe processing which, when used for forming, by lathe processing, a product configured of materials including a rare and expensive material, can inhibit such material from being wasted and attain a reduction in cost. Also provided are an acicular member and a contact probe. The member for processing with a lathe comprises: a core part which is of a rod shape and comprises copper, a copper alloy, or iron; a coating part which covers the periphery of the core part without leaving a gap therebetween and comprises a noble metal or a noble-metal alloy; and a peripheral part which covers the periphery of the coating part without leaving a gap therebetween and comprises copper, a copper alloy, or iron.

Description

旋盤加工用部材、針状部材およびコンタクトプローブLathe processing members, needle-shaped members and contact probes
 本発明は、旋盤に取り付けて旋盤加工を行う旋盤加工用部材、針状部材およびコンタクトプローブに関する。 The present invention relates to a lathe machining member, a needle-like member, and a contact probe that are attached to a lathe and perform lathe machining.
 従来より、旋盤を用いて金属等の加工を行う際には、旋盤加工用部材であるワークを旋盤のチャックへ取り付けて固定した後、バイトやドリルを用いてワークを削ることによって所望の形状を形成している。具体的には、例えばネジのような軸対称の部材を旋盤加工によって形成する場合、中実の無垢材からなる円柱形状のワークを適用するのが一般的である(例えば、特許文献1を参照)。 Conventionally, when processing a metal or the like using a lathe, the workpiece, which is a lathe machining member, is attached and fixed to the chuck of the lathe, and then the desired shape is formed by cutting the workpiece using a tool or a drill. Forming. Specifically, for example, when an axially symmetric member such as a screw is formed by lathe processing, it is common to apply a cylindrical workpiece made of a solid solid material (see, for example, Patent Document 1). ).
特開2003-291002号公報JP 2003-291002 A
 しかしながら、旋盤加工はワークのうち多くの部分を削り落とすため、素材として貴金属合金のように稀少かつ高価な材料を適用する場合には無駄が多く、コストを削減するのが困難であった。 However, since the lathe process cuts off many parts of the workpiece, when a rare and expensive material such as a noble metal alloy is used as a material, it is wasteful and it is difficult to reduce the cost.
 本発明は、上記に鑑みてなされたものであって、稀少かつ高価な材料を素材とする製品を旋盤加工によって形成する際にそのような材料の無駄を少なくし、コストを削減することができる旋盤加工用部材、針状部材およびコンタクトプローブを提供することを目的とする。 The present invention has been made in view of the above, and it is possible to reduce the waste of such material and reduce the cost when a product made of a rare and expensive material is formed by lathe processing. An object is to provide a lathe member, a needle-like member, and a contact probe.
 上述した課題を解決し、目的を達成するために、本発明に係る旋盤加工用部材は、旋盤に取り付けることによって旋盤加工を行う旋盤加工用部材であって、棒状をなし、銅、銅合金または鉄からなる芯部と、前記芯部の側面を隙間なく被覆し、貴金属または貴金属合金からなる被覆部と、前記被覆部の側面を隙間なく被覆し、銅、銅合金または鉄からなる外周部と、を備えたことを特徴とする。 In order to solve the above-described problems and achieve the object, a lathe machining member according to the present invention is a lathe machining member that performs lathe machining by being attached to a lathe and has a bar shape, copper, copper alloy or A core portion made of iron, a side surface of the core portion covered without gap, a coating portion made of noble metal or a noble metal alloy, and a side surface of the coating portion covered without gap, and an outer peripheral portion made of copper, copper alloy, or iron; , Provided.
 また、本発明に係る旋盤加工用部材は、上記発明において、前記芯部および前記外周部は、同じ材料からなることを特徴とする。 The lathe machining member according to the present invention is characterized in that, in the above invention, the core part and the outer peripheral part are made of the same material.
 また、本発明に係る針状部材は、上記発明に記載の旋盤加工用部材を用いて形成された針状をなし、該針状の長手方向の一端部は、各々が前記被覆部の端部を先鋭化することによって形成され、前記長手方向に沿って突出する複数の先鋭端を有する一方、前記長手方向の他端部は、側面に前記被覆部が露出した棒状をなすことを特徴とする。 Further, the needle-shaped member according to the present invention has a needle shape formed using the lathe machining member according to the above-described invention, and each one end portion of the needle-shaped longitudinal direction is an end portion of the covering portion. And having a plurality of sharp ends protruding along the longitudinal direction, the other end portion in the longitudinal direction has a rod shape with the covering portion exposed on the side surface. .
 また、本発明に係るコンタクトプローブは、上記発明に記載の針状部材からなる第1プランジャと、一方の端部が前記他端部に取り付けられ、前記第1プランジャの長手方向に沿って伸縮自在な導電性のバネ部材と、前記バネ部材の他方の端部に取り付けられる導電性の第2プランジャと、を備えたことを特徴とする。 The contact probe according to the present invention includes a first plunger composed of the needle-like member described in the above invention, and one end attached to the other end, and is extendable along the longitudinal direction of the first plunger. And a conductive second plunger attached to the other end of the spring member.
 また、本発明に係るコンタクトプローブは、上記発明において、前記バネ部材は、所定のピッチで巻回され、開口端部が前記第1および第2プランジャの一方に取り付けられる粗巻き部と、前記粗巻き部の端部から延びて密着巻きされ、開口端部が前記第1および第2プランジャの他方に取り付けられる密着巻き部と、を有し、当該コンタクトプローブが所定の加重を受けた場合、前記密着巻き部は、前記粗巻き部の開口端部が取り付けられるプランジャと接触可能であることを特徴とする。 In the contact probe according to the present invention, in the above invention, the spring member is wound at a predetermined pitch, and an open end is attached to one of the first and second plungers. A tightly wound portion that extends from the end of the wound portion and is tightly wound and has an open end attached to the other of the first and second plungers, and when the contact probe receives a predetermined load, The tightly wound portion can be in contact with a plunger to which the open end of the coarsely wound portion is attached.
 本発明によれば、棒状をなし、銅、銅合金または鉄からなる芯部と、前記芯部の側面の外周を隙間なく被覆し、貴金属または貴金属合金からなる被覆部と、前記被覆部の側面の外周を隙間なく被覆し、銅、銅合金または鉄からなる外周部と、を備えており、芯部および外周部に安価な金属を適用している。したがって、稀少かつ高価な材料を素材とする製品を旋盤加工によって形成する際にそのような材料の無駄を少なくし、コストを削減することが可能となる。 According to the present invention, a rod-shaped core part made of copper, copper alloy or iron, the outer periphery of the side surface of the core part is covered without gaps, a covering part made of noble metal or a noble metal alloy, and a side surface of the covering part And an outer peripheral portion made of copper, copper alloy or iron, and an inexpensive metal is applied to the core portion and the outer peripheral portion. Therefore, when a product made of a rare and expensive material is formed by lathe processing, it is possible to reduce the waste of such a material and reduce the cost.
図1は、本発明の一実施の形態に係る旋盤加工用部材の構成を示す図である。FIG. 1 is a diagram showing a configuration of a lathe machining member according to an embodiment of the present invention. 図2は、図1のA-A線断面図である。2 is a cross-sectional view taken along line AA in FIG. 図3は、本発明の一実施の形態に係る旋盤加工用部材を用いた旋盤加工処理の概要を示す図である。FIG. 3 is a diagram showing an outline of a lathe machining process using the lathe machining member according to the embodiment of the present invention. 図4は、本発明の一実施の形態に係るコンタクトプローブの構成を示す図である。FIG. 4 is a diagram showing a configuration of a contact probe according to an embodiment of the present invention. 図5は、本発明の一実施の形態に係る針状部材の構成を示す断面図である。FIG. 5 is a cross-sectional view showing the configuration of the needle-like member according to one embodiment of the present invention. 図6は、本発明の別な実施の形態に係る旋盤加工用部材の端面の構成を示す図である。FIG. 6 is a diagram showing a configuration of an end face of a lathe machining member according to another embodiment of the present invention.
 以下、添付図面を参照して本発明を実施するための形態(以後、「実施の形態」と称する)を説明する。なお、図面は模式的なものであって、各部分の厚みと幅との関係、それぞれの部分の厚みの比率などは現実のものとは異なる場合もあることに留意すべきであり、図面の相互間においても互いの寸法の関係や比率が異なる部分が含まれる場合があることは勿論である。 Hereinafter, modes for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings. It should be noted that the drawings are schematic, and the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like may be different from the actual ones. Of course, there may be included portions having different dimensional relationships and ratios.
 図1は、本発明の一実施の形態に係る旋盤加工用部材の構成を示す図である。図2は、図1のA-A線断面図である。図1および図2に示す旋盤加工用部材1は、略円柱状をなす芯部2と、芯部2の側面を隙間なく被覆し、中空略円筒状をなす被覆部3と、被覆部3の側面を隙間なく被覆し、中空略円筒状をなす外周部4とを備える。旋盤加工用部材1は、伸線加工や引き抜き加工によって芯部2、被覆部3および外周部4の径が所定の比を有するように形成されている。なお、芯部2、被覆部3および外周部4の径の比は、加工後の製品の用途に応じて適宜設定すればよい。 FIG. 1 is a diagram showing a configuration of a lathe machining member according to an embodiment of the present invention. 2 is a cross-sectional view taken along line AA in FIG. A lathe machining member 1 shown in FIGS. 1 and 2 includes a core portion 2 having a substantially columnar shape, a side surface of the core portion 2 without a gap, and a covering portion 3 having a hollow substantially cylindrical shape. The outer peripheral part 4 which covers a side surface without gap and makes a hollow substantially cylindrical shape is provided. The lathe member 1 is formed so that the diameters of the core portion 2, the covering portion 3, and the outer peripheral portion 4 have a predetermined ratio by wire drawing or drawing. In addition, what is necessary is just to set suitably the ratio of the diameter of the core part 2, the coating | coated part 3, and the outer peripheral part 4 according to the use of the product after a process.
 芯部2および外周部4は、銅、銅合金または鉄からなる。このうち、銅合金の成分比は、質量パーセント濃度で銅(Cu)が97.2~98.6%、ニッケル(Ni)が1~2%、シリコン(Si)が0.2~0.4%、亜鉛(Zn)が0.2~0.4%である。このような銅合金は、引張強さが40kgf/mm2である。本実施の形態では、芯部2および外周部4は同じ材料であるものとするが、より一般には、芯部2と外周部4とは異なる材料であってもよい。なお、外周部4は完全な中空円筒状をなしていなくてもよく、例えば側面の一部に切り欠きや溝などが形成されていてもよい。 The core part 2 and the outer peripheral part 4 are made of copper, a copper alloy, or iron. Among these, the component ratio of the copper alloy is 97.2 to 98.6% of copper (Cu), 1 to 2% of nickel (Ni), and 0.2 to 0.4 of silicon (Si) in mass percent concentration. %, Zinc (Zn) is 0.2 to 0.4%. Such a copper alloy has a tensile strength of 40 kgf / mm 2 . In the present embodiment, the core portion 2 and the outer peripheral portion 4 are made of the same material, but more generally, the core portion 2 and the outer peripheral portion 4 may be made of different materials. In addition, the outer peripheral part 4 does not need to form complete hollow cylindrical shape, for example, a notch, a groove | channel, etc. may be formed in a part of side surface.
 被覆部3は、貴金属または貴金属合金からなる。ここでいう貴金属とは、例えば金(Au)、銀(Ag)、白金(Pt)、パラジウム(Pd)、ロジウム(Rh)などである。この被覆部3は、ビッカース硬さ(HV)が400以上であり、かつ電気抵抗率が5.00×10-8Ω・m以下の貴金属または貴金属合金から形成されていればより好ましい。 The covering portion 3 is made of a noble metal or a noble metal alloy. Examples of the noble metal include gold (Au), silver (Ag), platinum (Pt), palladium (Pd), and rhodium (Rh). The covering 3 is more preferably made of a noble metal or a noble metal alloy having a Vickers hardness (HV) of 400 or more and an electric resistivity of 5.00 × 10 −8 Ω · m or less.
 図3は、旋盤加工用部材1を用いた旋盤加工処理の概要を示す図である。旋盤加工を行う際には、旋盤加工用部材1を旋盤のチャック5へ取り付けて固定した後、チャック5を所定の回転速度で回転させながら、図の右方から左方へバイト6を送ることによって旋盤加工用部材1を所望の形状に削っていく。なお、旋盤加工用部材1を旋盤で削る前に、旋盤加工用部材1に対してさらに伸線加工や引き抜き加工を行うこともある。 FIG. 3 is a diagram showing an outline of lathe processing using the lathe machining member 1. When performing lathe machining, the lathe machining member 1 is attached and fixed to the lathe chuck 5 and then the bite 6 is sent from right to left in the figure while rotating the chuck 5 at a predetermined rotational speed. Thus, the lathe member 1 is cut into a desired shape. Before turning the lathe member 1 with a lathe, the lathe member 1 may be further drawn or drawn.
 次に、旋盤加工用部材1を用いて加工される加工品の一例を説明する。図4は、旋盤加工用部材1から加工された部品を有するコンタクトプローブおよびこのコンタクトプローブを収容するプローブホルダの要部の構成を示す図である。同図に示すコンタクトプローブ11は、ICチップ等の半導体集積回路の導通検査等を行う際に半導体集積回路と検査用信号を送信する信号処理回路との導通を図るための治具である。コンタクトプローブ11は、互いに相反する向きに突出した先端部を有する第1プランジャ12および第2プランジャ13と、第1プランジャ12と第2プランジャ13とを連結し、長手方向(図4の上下方向)へ伸縮自在なバネ部材14とを有する。このうち、第1プランジャ12は、旋盤加工用部材1から形成される針状部材である。 Next, an example of a processed product processed using the lathe member 1 will be described. FIG. 4 is a diagram showing a configuration of a main part of a contact probe having parts machined from the lathe machining member 1 and a probe holder for accommodating the contact probe. A contact probe 11 shown in the figure is a jig for conducting electrical connection between a semiconductor integrated circuit and a signal processing circuit that transmits a test signal when conducting a continuity test of the semiconductor integrated circuit such as an IC chip. The contact probe 11 connects the first plunger 12 and the second plunger 13 having tip portions protruding in directions opposite to each other, and the first plunger 12 and the second plunger 13, and is in the longitudinal direction (vertical direction in FIG. 4). And a spring member 14 that is telescopic. Among these, the first plunger 12 is a needle-like member formed from the lathe machining member 1.
 第1プランジャ12は、長手方向に沿ってそれぞれ突出し、互いに同じ形状をなす複数の先鋭端が設けられたクラウン形状をなす先端部12aと、先端部12aの最大径よりも大きい径を有するフランジ部12bと、フランジ部12bに対して先端部12aと反対方向に突出し、フランジ部12bの径よりも小さい径の円柱状をなし、バネ部材14の端部が圧入されるボス部12cと、ボス部12cの径よりも小さい径の円柱状をなし、ボス部12cからフランジ部12bと反対側に延びる基端部12dとを有し、長手方向の中心軸に対して対称な形状をなしている。 The first plunger 12 protrudes along the longitudinal direction and has a crown-shaped tip portion 12a provided with a plurality of sharpened ends having the same shape, and a flange portion having a diameter larger than the maximum diameter of the tip portion 12a 12b, a boss portion 12c that protrudes in the opposite direction to the tip portion 12a with respect to the flange portion 12b, has a cylindrical shape with a diameter smaller than the diameter of the flange portion 12b, and into which the end portion of the spring member 14 is press-fitted, and a boss portion It has a cylindrical shape with a diameter smaller than the diameter of 12c, has a base end portion 12d extending from the boss portion 12c to the opposite side of the flange portion 12b, and has a symmetrical shape with respect to the central axis in the longitudinal direction.
 図5は、第1プランジャ12の構成を示す縦断面図である。先端部12aの先鋭端121aは、被覆部3の端部を旋盤加工時の溝加工によって先鋭化したものである。また、基端部12dの外周面は、被覆部3を露出させたものである。 FIG. 5 is a longitudinal sectional view showing the configuration of the first plunger 12. The sharp end 121a of the front end portion 12a is obtained by sharpening the end portion of the covering portion 3 by grooving during lathe processing. Further, the outer peripheral surface of the base end portion 12d is obtained by exposing the covering portion 3.
 第2プランジャ13は、先鋭端を有する先端部13aと、先端部13aの最大径よりも大きい径を有するフランジ部13bと、フランジ部13bを介して先端部13aと反対方向に突出し、フランジ部13bの径よりも小さい径の円柱状をなし、バネ部材14の端部が圧入されるボス部13cと、ボス部13cの径よりも小さい径の円柱状をなし、ボス部13cからフランジ部13bと反対側に延在する基端部13dとを有し、長手方向と平行な中心軸に対して対称な形状をなしている。第2プランジャ13は、銅、銅合金または鉄を用いて形成される。 The second plunger 13 protrudes in a direction opposite to the distal end portion 13a via the flange portion 13b, a distal end portion 13a having a sharp end, a flange portion 13b having a diameter larger than the maximum diameter of the distal end portion 13a, and the flange portion 13b. A boss portion 13c into which the end of the spring member 14 is press-fitted, a cylinder shape with a diameter smaller than the diameter of the boss portion 13c, and from the boss portion 13c to the flange portion 13b. It has a base end portion 13d extending on the opposite side, and has a symmetrical shape with respect to a central axis parallel to the longitudinal direction. The second plunger 13 is formed using copper, a copper alloy, or iron.
 なお、貴金属または貴金属合金からなる芯部と、銅、銅合金または鉄からなり、芯部の側面を隙間なく被覆する被覆部とを備えた鉛筆状の旋盤加工用部材を加工することによって第2プランジャを形成してもよい。この場合には、第2プランジャの先端部の先鋭端部分が貴金属または貴金属合金から構成されることとなる。 A second lathe machining member having a core portion made of a noble metal or a noble metal alloy and a covering portion made of copper, copper alloy or iron and covering the side surface of the core portion without gaps is processed. A plunger may be formed. In this case, the sharp end portion of the tip portion of the second plunger is made of a noble metal or a noble metal alloy.
 また、第2プランジャとして、基端部の長さが異なる以外は第1プランジャ12と同様の構成を有する針状部材を適用することも可能である。 Further, as the second plunger, a needle-like member having the same configuration as that of the first plunger 12 can be applied except that the length of the base end portion is different.
 バネ部材14は均一な径を有し、軸線方向へ伸縮自在な導電性材料からなるコイルバネである。より具体的には、バネ部材14は、ゼロでない所定のピッチで巻回された粗巻き部14aと、粗巻き部14aの端部から密着巻きされた密着巻き部14bとを有する。粗巻き部14aの開口端部は、第1プランジャ12のボス部12cに圧入によって取り付けられる。一方、密着巻き部14bの開口端部は、第2プランジャ13のボス部13cに圧入によって取り付けられる。 The spring member 14 is a coil spring made of a conductive material having a uniform diameter and capable of expanding and contracting in the axial direction. More specifically, the spring member 14 has a coarsely wound portion 14a wound at a predetermined pitch that is not zero, and a tightly wound portion 14b that is tightly wound from the end of the coarsely wound portion 14a. The opening end portion of the rough winding portion 14a is attached to the boss portion 12c of the first plunger 12 by press-fitting. On the other hand, the open end of the tightly wound portion 14b is attached to the boss portion 13c of the second plunger 13 by press fitting.
 なお、バネ部材の粗巻き部と密着巻き部の位置を逆にしてもよい。すなわち、第1プランジャに取り付けられる側を密着巻き部とする一方、第2プランジャに取り付けられる側を粗巻き部としてもよい。この場合には、第1プランジャの基端部の長さよりも第2プランジャの基端部の長さを長くして、コンタクトプローブ11が加重を受けたときに第2プランジャの基端部が密着巻き部と接触するようにすればよい。 Note that the positions of the coarsely wound portion and the tightly wound portion of the spring member may be reversed. That is, the side attached to the first plunger may be a tightly wound portion, while the side attached to the second plunger may be a coarsely wound portion. In this case, the length of the base end portion of the second plunger is made longer than the length of the base end portion of the first plunger so that the base end portion of the second plunger is in close contact when the contact probe 11 receives a load. What is necessary is just to make it contact with a winding part.
 以上の構成を有するコンタクトプローブ11は、プローブホルダ21に収容されている。プローブホルダ21に収容されたコンタクトプローブ11は、検査対象である半導体集積回路100と、検査用の信号を出力する回路基板200との間を電気的に接続し、信号の送受信を行う。半導体集積回路100の検査を行う際、第1プランジャ12は半導体集積回路100に設けられる接続用電極101と接触する一方、第2プランジャ13は回路基板200に設けられる接続用電極201と接触する。 The contact probe 11 having the above configuration is accommodated in the probe holder 21. The contact probe 11 accommodated in the probe holder 21 electrically connects the semiconductor integrated circuit 100 to be inspected and the circuit board 200 that outputs a signal for inspection, and transmits and receives signals. When inspecting the semiconductor integrated circuit 100, the first plunger 12 contacts the connection electrode 101 provided on the semiconductor integrated circuit 100, while the second plunger 13 contacts the connection electrode 201 provided on the circuit board 200.
 次に、コンタクトプローブ11を収容するプローブホルダ21の構成を説明する。プローブホルダ21は、複数のコンタクトプローブ11を、各コンタクトプローブ11の両端を表出させた状態で、接続用電極101の配置パターンに対応するパターンで収容している。プローブホルダ21は、絶縁性が高い合成樹脂材などの絶縁性材料を用いて各々平板状に形成された第1ホルダ部材22および第2ホルダ部材23を板厚方向に積層してなる。第1ホルダ部材22と第2ホルダ部材23は、ネジ止めまたは接着等によって固着されている。 Next, the configuration of the probe holder 21 that accommodates the contact probe 11 will be described. The probe holder 21 accommodates a plurality of contact probes 11 in a pattern corresponding to the arrangement pattern of the connection electrodes 101 with both ends of each contact probe 11 exposed. The probe holder 21 is formed by laminating a first holder member 22 and a second holder member 23 each formed in a flat plate shape using an insulating material such as a synthetic resin material having a high insulating property in the thickness direction. The first holder member 22 and the second holder member 23 are fixed by screwing or bonding.
 第1ホルダ部材22には、板厚方向に貫通され、コンタクトプローブ11を挿通する挿通孔221が複数設けられている。挿通孔221は、小径部221aと大径部221bとからなる段付き孔形状をなしている。小径部221aは、半導体集積回路100と対向する側(図4の上面側)に開口を有する一方、大径部221bは第2ホルダ部材23と対向する側に開口を有する。第1プランジャ12は、フランジ部12bが小径部221aと大径部221bとの境界をなす段差面に当接することによって第1ホルダ部材22から抜け止めされている。 The first holder member 22 is provided with a plurality of insertion holes 221 that are penetrated in the plate thickness direction and through which the contact probe 11 is inserted. The insertion hole 221 has a stepped hole shape including a small diameter part 221a and a large diameter part 221b. The small diameter portion 221 a has an opening on the side facing the semiconductor integrated circuit 100 (the upper surface side in FIG. 4), while the large diameter portion 221 b has an opening on the side facing the second holder member 23. The first plunger 12 is prevented from coming off from the first holder member 22 by the flange portion 12b coming into contact with the step surface forming the boundary between the small diameter portion 221a and the large diameter portion 221b.
 第2ホルダ部材23には、板厚方向に貫通され、コンタクトプローブ11を挿通する挿通孔231が複数設けられている。挿通孔231は、複数の挿通孔231のいずれかと連通している。挿通孔231は、小径部231aと大径部231bとからなる段付き孔形状をなしている。小径部231aは、回路基板200と対向する側(図4の下面側)に開口を有する一方、大径部231bは第1ホルダ部材22と対向する側に開口を有する。第2プランジャ13は、フランジ部13bが小径部231aと大径部231bとの境界をなす段差面に当接することによって第2ホルダ部材23から抜け止めされている。 The second holder member 23 is provided with a plurality of insertion holes 231 penetrating in the plate thickness direction and through which the contact probe 11 is inserted. The insertion hole 231 communicates with any of the plurality of insertion holes 231. The insertion hole 231 has a stepped hole shape including a small diameter portion 231a and a large diameter portion 231b. The small diameter portion 231 a has an opening on the side facing the circuit board 200 (the lower surface side in FIG. 4), while the large diameter portion 231 b has an opening on the side facing the first holder member 22. The second plunger 13 is prevented from coming off from the second holder member 23 by the flange portion 13b coming into contact with the step surface forming the boundary between the small diameter portion 231a and the large diameter portion 231b.
 第1ホルダ部材22および第2ホルダ部材23を構成する絶縁性材料としては、良好な絶縁性を有する合成樹脂材を用いることができる。また、絶縁性材料として、摺動性のよい樹脂材料やマシナブルセラミック、テフロン(登録商標)等を使用することもできる。 As the insulating material constituting the first holder member 22 and the second holder member 23, a synthetic resin material having good insulating properties can be used. In addition, as the insulating material, a resin material having good slidability, a machinable ceramic, Teflon (registered trademark), or the like can be used.
 挿通孔221、231は、母材をなす絶縁性材料に対してドリル加工、エッチング、打抜成形のいずれかを行うか、あるいはレーザ、電子ビーム、イオンビーム、ワイヤ放電などのいずれかを用いた加工を施すことによって形成される。 The insertion holes 221 and 231 were either drilled, etched or stamped into the insulating material forming the base material, or used any one of laser, electron beam, ion beam, wire discharge, etc. It is formed by processing.
 なお、第1ホルダ部材22の板厚と第2ホルダ部材23の板厚との比は、収容するコンタクトプローブ11の形状等に応じて適宜設定することができる。 In addition, the ratio of the plate thickness of the first holder member 22 and the plate thickness of the second holder member 23 can be appropriately set according to the shape of the contact probe 11 to be accommodated.
 半導体集積回路100の検査を行う際、コンタクトプローブ11は半導体集積回路100と接触して所定の荷重を受ける。この加重を受けることにより、バネ部材14は収縮して湾曲する。その結果、密着巻き部14bの少なくとも一部が第1プランジャ12の基端部12dと接触する。これにより、第1プランジャ12、バネ部材14および第2プランジャ13を順次経由する電気的な導通が最短経路で実現される。このようにして最短経路による電気的な導通を実現することにより、検査時におけるコンタクトプローブ11のインダクタンスの増加を抑制することができる。 When the semiconductor integrated circuit 100 is inspected, the contact probe 11 contacts the semiconductor integrated circuit 100 and receives a predetermined load. By receiving this load, the spring member 14 contracts and curves. As a result, at least a part of the tightly wound portion 14 b comes into contact with the proximal end portion 12 d of the first plunger 12. As a result, electrical conduction through the first plunger 12, the spring member 14, and the second plunger 13 in sequence is realized by the shortest path. In this way, by realizing electrical conduction through the shortest path, an increase in inductance of the contact probe 11 at the time of inspection can be suppressed.
 以上説明した本発明の一実施の形態によれば、棒状をなし、銅、銅合金または鉄からなる芯部と、前記芯部の側面を隙間なく被覆し、貴金属または貴金属合金からなる被覆部と、前記被覆部の側面を隙間なく被覆し、銅、銅合金または鉄からなる外周部と、を備えており、芯部および外周部に貴金属または貴金属合金よりも安価な金属を適用している。したがって、貴金属または貴金属合金の使用量を大幅に低減し、稀少かつ高価な材料を素材とする製品を旋盤加工によって形成する際にそのような材料の無駄を少なくし、コストを削減することができる。 According to the embodiment of the present invention described above, a rod-shaped core part made of copper, a copper alloy or iron, and a side part of the core part are covered without a gap, and a covering part made of a noble metal or a noble metal alloy, And the outer peripheral portion made of copper, a copper alloy or iron, and a metal cheaper than a noble metal or a noble metal alloy is applied to the core portion and the outer peripheral portion. Therefore, the amount of noble metal or noble metal alloy used can be greatly reduced, and when a product made of a rare and expensive material is formed by lathe processing, the waste of such a material can be reduced and the cost can be reduced. .
 また、本実施の形態によれば、コンタクトプローブが備える針状部材の先端およびバネ部材の密着巻き部の内周を巻き線方向に沿って摺動する基端部に貴金属または貴金属合金を適用しているため、接触箇所の酸化および磨耗が発生しにくくなって電気抵抗が安定する。したがって、検査を繰り返すことによって先端に付着した半田を紙やすり等を用いて削り落とす作業を定期的に行ったとしても、長期にわたって使用することができ、耐久性に優れた針状部材およびコンタクトプローブを提供することができる。 Further, according to the present embodiment, the noble metal or the noble metal alloy is applied to the base end portion that slides along the winding direction on the distal end of the needle-like member provided in the contact probe and the inner circumference of the tightly wound portion of the spring member. Therefore, oxidation and wear of the contact portion are less likely to occur, and the electric resistance is stabilized. Therefore, even if the work of scraping off the solder adhered to the tip by repeating the inspection using a sandpaper etc. is periodically performed, it can be used for a long period of time, and the needle-like member and contact probe excellent in durability Can be provided.
 ここまで、本発明を実施するための最良の形態を詳述してきたが、本発明は上述した一実施の形態によってのみ限定されるべきものではない。例えば、芯部2と被覆部3、および被覆部3と外周部4の一方または両方に、密着性を向上させる金属または合金を介在させてもよい。このような材料として、例えばニッケルまたはニッケル合金を挙げることができる。 So far, the best mode for carrying out the present invention has been described in detail, but the present invention should not be limited only by the above-described embodiment. For example, a metal or an alloy that improves adhesion may be interposed in one or both of the core portion 2 and the covering portion 3 and the covering portion 3 and the outer peripheral portion 4. Examples of such a material include nickel or a nickel alloy.
 また、芯部は棒状をなしていればよく、円柱状以外の形状をなしていてもよい。図6は、芯部が四角柱状をなす場合の旋盤加工用部材の端面の構成を示す図である。同図に示す旋盤加工用部材31は、四角柱状をなす芯部32と、芯部32の側面を隙間なく被覆する被覆部33と、被覆部33の側面を隙間なく被覆する外周部34とを備える。芯部32は芯部2と同様の材料からなる。また、被覆部33および外周部34は、被覆部3および外周部4とそれぞれ同様の材料からなる。なお、より一般に、芯部は多角柱状をなしていてもよい。このように芯部を角柱形状にすることにより、芯部の剛性を向上させることができる。 Further, the core part only needs to have a rod shape, and may have a shape other than a cylindrical shape. FIG. 6 is a diagram illustrating a configuration of an end face of a lathe member when the core portion has a quadrangular prism shape. The lathe machining member 31 shown in the figure includes a core portion 32 having a quadrangular prism shape, a covering portion 33 that covers the side surface of the core portion 32 without a gap, and an outer peripheral portion 34 that covers the side surface of the covering portion 33 without a gap. Prepare. The core portion 32 is made of the same material as the core portion 2. The covering portion 33 and the outer peripheral portion 34 are made of the same material as the covering portion 3 and the outer peripheral portion 4, respectively. More generally, the core portion may have a polygonal column shape. Thus, the rigidity of a core part can be improved by making a core part into a prismatic shape.
 このように、本発明は、ここでは記載していない様々な実施の形態等を含みうるものであり、特許請求の範囲により特定される技術的思想を逸脱しない範囲内において種々の設計変更等を施すことが可能である。 Thus, the present invention can include various embodiments and the like not described herein, and various design changes and the like can be made without departing from the technical idea specified by the claims. It is possible to apply.
 1、31 旋盤加工用部材
 2、32 芯部
 3、33 被覆部
 4、34 外周部
 5 チャック
 6 バイト
 11 コンタクトプローブ
 12 第1プランジャ
 12a、13a 先端部
 12b、13b フランジ部
 12c、13c ボス部
 12d、13d 基端部
 13 第2プランジャ
 14 バネ部材
 14a 粗巻き部
 14b 密着巻き部
 21 プローブホルダ
 22 第1ホルダ部材
 23 第2ホルダ部材
 100 半導体集積回路
 101、201 接続用電極
 121a 先鋭端
 200 回路基板
 221、231 挿通孔
 221a、231a 小径部
 221b、231b 大径部
DESCRIPTION OF SYMBOLS 1, 31 Lathe processing member 2, 32 Core part 3, 33 Cover part 4, 34 Outer peripheral part 5 Chuck 6 Bit 11 Contact probe 12 1st plunger 12a, 13a Tip part 12b, 13b Flange part 12c, 13c Boss part 12d, 13d Base end portion 13 Second plunger 14 Spring member 14a Coarse winding portion 14b Adhering winding portion 21 Probe holder 22 First holder member 23 Second holder member 100 Semiconductor integrated circuit 101, 201 Connecting electrode 121a Sharp end 200 Circuit board 221, 231 Insertion hole 221a, 231a Small diameter part 221b, 231b Large diameter part

Claims (5)

  1.  旋盤に取り付けることによって旋盤加工を行う旋盤加工用部材であって、
     棒状をなし、銅、銅合金または鉄からなる芯部と、
     前記芯部の側面を隙間なく被覆し、貴金属または貴金属合金からなる被覆部と、
     前記被覆部の側面を隙間なく被覆し、銅、銅合金または鉄からなる外周部と、
     を備えたことを特徴とする旋盤加工用部材。
    A lathe machining member that performs lathe machining by attaching to a lathe,
    A rod-shaped core made of copper, copper alloy or iron;
    Covering the side surface of the core portion without gaps, and a covering portion made of a noble metal or a noble metal alloy;
    Covering the side surface of the covering portion without a gap, and an outer peripheral portion made of copper, copper alloy or iron,
    A lathe machining member characterized by comprising:
  2.  前記芯部および前記外周部は、同じ材料からなることを特徴とする請求項1記載の旋盤加工用部材。 2. The lathe member according to claim 1, wherein the core portion and the outer peripheral portion are made of the same material.
  3.  請求項1または2記載の旋盤加工用部材を用いて形成された針状をなし、
     該針状の長手方向の一端部は、各々が前記被覆部の端部を先鋭化することによって形成され、前記長手方向に沿って突出する複数の先鋭端を有する一方、
     前記長手方向の他端部は、側面に前記被覆部が露出した棒状をなすことを特徴とする針状部材。
    A needle shape formed using the lathe machining member according to claim 1 or 2,
    One end of the needle-like longitudinal direction is formed by sharpening the end of the covering portion, and has a plurality of sharpened ends protruding along the longitudinal direction,
    The needle-like member, wherein the other end portion in the longitudinal direction has a rod shape with the covering portion exposed on a side surface.
  4.  請求項3記載の針状部材からなる第1プランジャと、
     一方の端部が前記他端部に取り付けられ、前記第1プランジャの長手方向に沿って伸縮自在な導電性のバネ部材と、
     前記バネ部材の他方の端部に取り付けられる導電性の第2プランジャと、
     を備えたことを特徴とするコンタクトプローブ。
    A first plunger comprising the needle-like member according to claim 3;
    One end portion is attached to the other end portion, and a conductive spring member that can expand and contract along the longitudinal direction of the first plunger;
    A conductive second plunger attached to the other end of the spring member;
    A contact probe comprising:
  5.  前記バネ部材は、
     所定のピッチで巻回され、開口端部が前記第1および第2プランジャの一方に取り付けられる粗巻き部と、
     前記粗巻き部の端部から延びて密着巻きされ、開口端部が前記第1および第2プランジャの他方に取り付けられる密着巻き部と、
     を有し、
     当該コンタクトプローブが所定の加重を受けた場合、前記密着巻き部は、前記粗巻き部の開口端部が取り付けられるプランジャと接触可能であることを特徴とする請求項4記載のコンタクトプローブ。
    The spring member is
    A rough winding portion wound at a predetermined pitch and having an open end attached to one of the first and second plungers;
    A tightly wound portion that extends from the end of the coarsely wound portion and is tightly wound; and an open end is attached to the other of the first and second plungers;
    Have
    5. The contact probe according to claim 4, wherein when the contact probe receives a predetermined load, the tightly wound portion can come into contact with a plunger to which an open end of the coarsely wound portion is attached.
PCT/JP2011/065329 2010-07-05 2011-07-05 Member for processing with lathe, acicular member, and contact probe WO2012005234A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010016608A1 (en) * 2008-08-08 2010-02-11 日本発條株式会社 Electric contact member and contact probe
WO2010016609A1 (en) * 2008-08-08 2010-02-11 日本発條株式会社 Member for lathe machining

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010016608A1 (en) * 2008-08-08 2010-02-11 日本発條株式会社 Electric contact member and contact probe
WO2010016609A1 (en) * 2008-08-08 2010-02-11 日本発條株式会社 Member for lathe machining

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TWI442055B (en) 2014-06-21

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