TW201208962A - Transporting system - Google Patents

Transporting system Download PDF

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Publication number
TW201208962A
TW201208962A TW100119280A TW100119280A TW201208962A TW 201208962 A TW201208962 A TW 201208962A TW 100119280 A TW100119280 A TW 100119280A TW 100119280 A TW100119280 A TW 100119280A TW 201208962 A TW201208962 A TW 201208962A
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TW
Taiwan
Prior art keywords
workpiece
unit
fixed
pressing
outer edge
Prior art date
Application number
TW100119280A
Other languages
Chinese (zh)
Other versions
TWI440593B (en
Inventor
Yasutomo Okajima
Kenichiro Ikeda
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
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Publication of TW201208962A publication Critical patent/TW201208962A/en
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Publication of TWI440593B publication Critical patent/TWI440593B/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Reciprocating Conveyors (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

The present invention provides a transporting system capable of well transporting a standing flat-shaped workpiece. The substrate dividing device (1) (transporting system) mainly comprises an attitude changing unit (10), a main body unit (40) (fixed side unit), and a transporting unit (50). Moreover, the attitude changing unit (10) has a plurality of cylinders (37) (the second drive part) forextrusion use, and the main body unit (40) has a plurality of rotary actuators (41) (the first drive part). The transporting unit (50) utilizes the driving forces from a plurality of extrusion cylinder s and a plurality of rotary actuators to perform the fixing and fixing-release of the workpiece.

Description

201208962 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種搬送呈立起姿勢之平板狀之工件之 搬送系統。 【先前技術】 先前，眾所周知有如下基板分斷裝置，其將形成有劃線 之母基板以水平狀態固定，並且藉由分別配置於母基板之 上下方之分斷單元沿著劃線使母基板分斷（例如專利文獻 1)。 [先前技術文獻] [專利文獻] [專利文獻1]曰本專利特開2006-289625號公報 【發明内容】 [發明所欲解決之問題] 然而，專利文獻1中對於將平板狀之工件以立起姿勢固 定而搬送之技術則沒有任何記載。 因此，本發明之目的在於提供一種能夠良好地搬送呈立 起姿勢之平板狀之工件之搬送系統。 [解決問題之技術手段] 為了解決上述問題，技術方案丨之發明為一種搬送系 統’其特徵在於包含：固定側單元；及搬送單元，其包含 以立起姿勢固定平板狀之工件之固定機構，並且使由上述 固定機構固定之上述工件相對於上述固定側單元相對性地 移動；上述搬送單元之上述固定機構包含：擠壓框，其擠 ]56492.doc 201208962 壓上述工件之外緣部；複數個夾持部，其各自夾持配置於 與上述擠壓框之間之上述工件之上述外緣部；及施壓構 件，其藉由對上述擠壓框賦予施壓力，而將上述工件之上 述外緣部固定於上述擠壓框與各夾持部之間；上述固定側 單元包含：第1驅動部，其使上述複數個夾持部中之一部 分向相對於上述擠壓框接近或離開之方向進退；及第2驅 動部，其對上述施壓構件賦予壓縮力。 而且，技術方案2之發明如技術方案丨之搬送系統，其中 上述第2驅動部包含.拉桿，其沿著由上述施壓構件對上 述擠壓框施壓之施壓方向進退；及旋轉體，其設置於上述 拉桿之前端，擠壓上述施壓構件並沿著上述搬送單元之搬 送方向轉動。 而且，技術方案3之發明如技術方案丨或2之搬送系統， 其更包含控制單元，該控制單元控制上述固定側單元及上 述搬送單元之動作；上述固定側單元更包含交接部，其保 持呈水平姿勢之上述工件’並且將呈立起姿勢之上述工件 交接給上述搬送單元；±述複數個夾持部包♦:可動夹持 部，其向相對於上述擠壓框接近或離開之方向進退；及固 足夾持部，其固定於上述擠壓框附近。 而且，技術方案4之發明如技術方案3之搬送系統，其中 亡述控制單元藉由下述步驟而將呈立起姿勢之上述工；固 疋於上述固定機構：⑴藉由使上述交接部移動，而使由上 述交接部保持之上述1件呈立起㈣，同時使±述工件移 動至上述搬送單元之上述固^機構附近；⑼藉由使上述 156492.doc 201208962 第1驅動部動作，而使各可動夾持部向自上述擠壓框離開 之方向移動；（m)藉由使上述第2驅動部動作，而使上述擠 壓框向與上述施磨方向相反之方向移動；㈣使上述固定 夹持部相對於被保持於上述交接部之上述工件而相對性地 f動，從❿將上述工件之上述外緣部抵接於上述固定灸持 部；（V)於上述工件之上述外緣部抵接於上述固定夾持部之 狀I下，使上述第1驅動部動作，由此使各可動夾持部向 接近於上述擠壓框之方向移動，並且將上述工件之上述外 緣部抵接於各可動失持部；（vi)於上述工件之上述外緣部 抵接於上述複數個可動夾持部及上述固定夾持部之狀態 下，使上述第2驅動部動作，由此使上述擠壓框向上述施 壓方向移動，使立起姿勢之上述工件由上述固定機構固 定；及（vii)於由上述固定機構將上述工件固定之狀態下， 使上述乂接部對上述工件之保持狀態解除。 而且，技術方案5之發明如技術方案3之搬送系統，其中 上述控制單元藉由下述步驟而解除由上述固定機構以立起 姿勢固定之上述工件之固定狀態：⑴使由上述固定機構固 疋之上述工件被保持於上述交接部；（丨丨）於上述工件之上 述外緣部抵接於上述複數個可動夾持部及上述固定夾持部 之狀態下，使上述第2驅動部動作，藉此使上述擠壓框向 與由此上述施壓方向相反之方向移動，從而將上述固定機 構對上述工件之固定解除；（iii)於上述工件之上述外緣部 抵接於上述複數個可動夾持部及上述固定夾持部之狀態 下，使上述第1驅動部動作，由此使各可動夹持部向自上 156492.doc 201208962 述擠壓框離開之方向移動；㈣使上述固定夾持部相對於 被保持於上述交接部之上述工件而相對性地移動，從而使 上述工件之上述外緣部自上述固定夾持部離開；及⑺藉由 使上述交接部移動，而使漏持於上述交接部之上述工件 自上述搬送單元之上述固定機構離開。 [發明之效果] 」支術方案1至5之發明中’搬送單元之固定機構藉由來自 设置於固定側單元之第1及第2驅動部之驅動力執行工件之 固定及=件之解除固定。即’搬送單元不需要用以執行工 件之固定及工件之解除固定之驅動部(第i及第2驅動部）， 從而無需將與該要素相關之配管及配線設置於移動側（搬 送單元）與固；t側之間。因&，可提高行進時之搬送單元 之安全性及維護時之作業人員之作業效率。 。。特別是根據技術方案2之#明，搬送單元相肖於固定側 單元移動時’叹置於第2驅動部之拉桿前端之旋轉體壓縮 施愿構件且於構件上沿著搬送方向旋轉^此，搬送 單元可維持旋轉體之壓縮狀態且於搬送方向上移動。因 此’即便搬送單元相對於固定側單元而相對性地移動時， 亦能夠維持工件之解除固定狀態。 特別是根據技術方案3至5之發明，能夠良好地執行將呈 起姿勢之工件固疋於固定機構之動作、及將固定於固定 機構之工件之固定解除之動作。 【實施方式】 以下，一邊參照附圖一邊對本發明之實施形態詳細進行 156492.doc 201208962 說明。 <ι.整體構成> 圖1及圖2分別係表示本發明之實施形態中之基板分斷裝 置1之構成之一例之前視圖及後視圖。圖3係表示工件3之 構成之-例之前視圖。基板分斷裝置⑽將形成有劃線8之 脆性材料基板7(參照圖3)沿著劃線8分斷（切斷）之裝置。 如圖1及圖2所*，基板分斷裝£1主要包含變換姿勢單 元1〇、主體單元40、搬送單元50、非接觸保持單元肋、分 斷單元85及控制單元9〇。 另外，圖1及以後之各圖中，為了明確該等部分之方向 關係’視需要適當標註以z軸方向為錯垂方向ιχγ平面 為水平面之ΧΥΖ正交座標系。 變換姿勢單元Η)將平板狀之卫件3之姿勢於水平姿勢及 立起姿勢之間進行變換，並且將呈立起姿勢之工件3交接 給搬送單元50。此外，變換姿勢單元_對於主體單元4〇 而固定。 、此處，如圖3所示，固定於搬送單元5〇且由分斷單元85 進仃分斷處理之工件3主要包含切割環4、切割片5及脆性 材料基板7。 切割環4(環狀體）係由不鐵鋼等金屬形成之平板。如圖i 及圖2所示，藉由切割環4之外緣料由固定機構6〇爽持而 將工件3固定於固定機構6〇上。 而且，如圖3所示’於切割環4之中央附近形成有開口 外。進而’於切割環4之外緣部設置有缺口 ^。藉由檢 156492.doc 201208962 測該缺口 4c之位置來檢測工件3之旋轉角度。 切割片5(片材體）以覆蓋切割環4之開口仆之方式相對於 切割環4而安裝。而且，脆性材料基板7以位於開口仆上之 方式貼附於切割片5。因此，即便使工件3為立起姿勢，亦 可切實地將脆性材料基板7固定。此處，本實施形態中， 作為切割片5，亦可使用例如樹脂製之黏著片材。 脆性材料基板7係例如玻璃基板或陶瓷基板等那樣由脆 性材料形成之基板。如圖3所示，於脆性材料基板7上形成 有複數個劃線8及複數個電子零件9。 劃線8係形成於脆性材料基板7之表面上之切割紋（縱向 紋路）。此處’藉由例如使燒結金剛石製之劃線輪（省略圖 示）壓接於脆性材料基板7之表面並轉動而形成劃線8。而 且’對形成有複數個劃線8之脆性材料基板7賦予應力，並 沿著各劃線8將脆性材料基板7分斷，由此獲得複數個電子 零件9(例如複數個液晶顯示裝置）。 另外，本實施形態中，將工件3(以及切割環4、切割片5 及脆性材料基板7)之主面3a、3b中之未形成劃線8之面稱 為第1主面3a，且將形成有劃線8之面稱為第2主面3b。 如圖1及圖2所示，主體單元40被用作將變換姿勢單元 10、非接觸保持單元80及分斷單元85等單元、以及複數個 旋轉致動器41(41a〜41c)固定之固定部。 此處，各旋轉致動器41 (41 a~41 c)根據壓縮空氣之供給狀 態而使軸（旋轉軸，省略圖示）旋轉。藉此，安裝於軸上之 搖桿42(42a〜42c)擺動，並抵接於對應之夹持部61(61a〜 156492.doc 201208962 61c)之抵接部63(參照圖8)。另外，對於夾持部6U61a〜61e) 之硬體構成於下文中闡述。 搬送單元50設置成能夠沿著固定於主體單元扣上之一對 導件43、44行進。搬送單元50將平板狀之工件3以立起姿 勢保持’並且使該工件3相對於變換姿勢單元财主體單 元40移動:此處，搬送單元5〇之保持可藉由對工件3之外 緣部4 a進行接觸保持而實現。 如此’搬送單元50不僅搬送工件3(搬送功能)，亦可藉 :對包含脆性材料基板7之卫件3之外緣料也進行接觸保 :而：平：狀之工件3以立起姿勢之狀態予以固定(保持功 此）。即，搬送單元50亦可用作「保持單元」。 而且’本實施形態中，搬 動，但變換姿勢單元,。及主:=3:止搬送一 形態中，亦可將變換姿勢單此，本實施 定側單元」。 单⑽及主體單元4G統稱為「固 如圖2所示，非接觸保持單元8〇以與 搬送單元-對向之方式設置，對由搬送單元:== 6〇接觸保持外緣料之M3進行非接觸保持。之固疋機構 如此，由對呈 行「接觸保持」之搬逆單5平板狀之工件3之外緣部㈣ 1主面3a進行「非旅/ (保持單元）以及對工件3之第 持裝置。 觸保持」之非制保持單元80構成保 刀斷單元85將由搬送單 板7沿著料8分1^ 持之工件3之脆性材料基 斷此處，分斷單元85對驗材料基板7 156492.doc 201208962 賦予應力，使垂直裂縫自形成有劃線8之脆性材料基板7之 主面成長至其相反側之主面為止，由此將脆性材料基板7 分斷。 控制單元90對變換姿勢單元1〇、主體單元4〇、搬送單元 50、非接觸保持單元8〇及分斷單元85中所包含之各要素之 動作進行控制，並且實現資料運算。如圖丨及圖2所示，控 制單元90主要包含r〇M9 1、RAM92及CPU93。 ROM(Read Only Memory，唯讀記憶體）91為所謂之非揮 發性之§己憶部’例如儲存有程式91 a。另外，作為 ROM91，亦可使用自由讀寫之非揮發性記憶體即快閃記憶 體。RAM(Random Access Memory，隨機存取記憶體）92為 揮發性之記憶部，例如儲存有用於CPU93之運算之資料。 CPU(Central Processing Unit，中央處理單元）93以特定 之時點執行依照ROM91之程式91a進行控制（例如複數個旋 轉致動器41(41a〜41c)及複數個擠壓用缸體37(37a〜37d)之 驅動控制等）。 另外，對於變換姿勢單元10、搬送單元5〇、非接觸保持 單元80以及分斷單元85之詳細硬體構成於下文中闡述。 <2.變換姿勢單元之構成> 圖4及圖5分別表示變換姿勢單元丨〇之構成之一例之側視 圖及俯視圖《此處，變換姿勢單元1〇如上所述，執行變換 工件3之姿勢之動作、及將工件3交接給搬送單元5〇之動 作。 如圖4及圖5所示，變換姿勢單元1〇主要包含複數個支持 156492.doc •11 · 201208962 部11(1 la〜lid)、複數個定位把手13(13a〜13d)、交接部 20、擺動部30及擠壓部35。 複數個（本實施形態中為4個）支持部11(1 ia〜η d)支持交 接給變換姿勢單元10之工件3。如圖4及圖5所示，各支持 部11 (11 a〜lid)固定於可將工件3之切割環4之外緣部4a支持 之位置、且不與交接部20之升降台21相干擾之位置。 而且，如圖4及圖5所示，各支持部ll(i ia〜ud)於其前端 具有設置成自由轉動之滾珠12(12a〜12d)。藉此，各滾珠^ (12a~ 12d)可點支持工件3並旋轉》因此，由各支持部11 (11a〜lid)支持之工件3之位置能夠容易且靈活地變換。 此處’由複數個支持部ll(lla〜lld)支持之工件3亦可例 如自未圖示之搬送機械手交接給變換姿勢單元1〇。而且， 基板分斷裝置1之作業人員（以下，簡稱為「作業人員」）亦 可將工件3載置於複數個支持部11上。 如圖4及圖5所示，複數個（本實施形態中為4個）定位把 手13(13a〜13d)與對應之把持爪23(23&〜23旬鄰接設置。各 定位把手13(13a〜13d)藉由設置於基部20a上之移動機構（省 略圖示）而沿著對應之支臂26(26a〜26d)之長度方向進退。 藉此’各定位把手13(13a〜13d)以使由各支持部u (11a〜lid)支持之工件3之位置為所期望之範圍之方式，將 工件3(更具體而言為切割片5)之外緣部枱向朝向升降台21 之中心21 a之方向擠壓。 工件確認感測器15檢測工件3是否支持於複數個支持部 11。如圖5所示，工件確認感測器15固定於與支持部1113鄰 156492.doc 12 201208962 接、且不與交接部20之升降台21相干擾之位置。作為工件 確認感測器15，亦可使用例如以非接觸來檢測有無工件3 之接近感測器。 交接部20保持呈水平姿勢且由複數個支持部丨丨支持之工 件3。而且，交接部20於其與搬送單元50之間交接藉由擺 動部30而呈立起姿勢之工件3。如圖4及圖5所示，交接部 20主要包含升降台21、複數個把持爪23(23a〜23d)、複數個 吸附部25(25a〜25d)及交接用缸體28 » 如圖5所示，升降台21具有自中心21a向外側呈放射狀延 伸之複數個（本實施形態中為4根）支臂26(26a〜26d)。升降 台21防止由把持爪23及吸附部25保持之工件3發生變形。 複數個（本實施形態中為4個）把持爪23(23a〜23d)(複數個 把持部）把持於水平姿勢及立起姿勢之間進行變換姿勢之 工件3(更具體而言為切割環4)之外緣部4a。如圖4及圖5所 示，各把持爪23(23a〜23d)設置於對應之支臂26(26a〜26d) 之前端27(27a~27d)附近。 此處’如圖4所示’各定位把手I3(13a~ 13d)之上端附近 (為了方便圖示，僅表示定位把手13b之上端附近）分叉。因 此，即便各定位把手13(13a〜13d)為了對工件3進行定位而 進退’各定位把手13(13a〜13d)亦不會與對應之把持爪 23(23a〜23d)及吸附部25(25a~25d)形成干擾。 而且，當利用各定位把手13(13a〜13d)以使工件3之位置 為所期望之範圍之方式進行定位時，工件3由各把持爪 23(23a 〜23d)圍繞。 I56492.doc •13· 201208962 複數個（本實施形態中為4個）吸附部25(25a〜25d)與各把 持爪23(23a〜23d)對應而設置，且吸附工件3(更具體而言為 切割環4)之外緣部4a。 因此，由複數個定位把手13(13a~13d)定位之後，由複數 個吸附部25(25a〜25d)吸附工件3，藉此將被保持於複數個 支持部11 (11 a〜11 d)之工件3交接給交接部20。 如此，各把持爪23(23a〜23d)及各吸附部25(25a〜25d)把 持及吸附切割環4。即’脆性材料基板7並未由各把持爪 23(23a〜23d)及各吸附部25(25a〜25d)把持或吸附。因此， 交接部20及擺動部3〇可執行工件3之保持及變換姿勢，而 不會對形成於脆性材料基板7上之劃線8(參照圖3)帶來影 響。 在交接用缸體28將呈立起姿勢之工件3於交接部2〇及搬 送單元50之間進行交接之情形時，使工件3於交接部20及 搬送單元50之間移動。如圖4所示，交接用缸體28包含主 體部28a及拉桿29。 拉桿29能夠相對於主體部28a進退。如圖4所示，拉桿29 之前端固定於升降台21之底面。因此，被固定於升降台Η 上之立起姿勢之工件3對應於拉桿29之前進或後退動作而 於交接部20與搬送單元5〇之間移動。 擺動部30藉由使交接部20以擺動轴31為中心擺動，而使 由交接部20保持之工件3之姿勢於水平姿勢與立起姿勢之 間變換。如圖4及圖5所示，擺動部30主要包含擺動軸31、 擺動框32及擺動用缸體33。 156492.doc 201208962 擺動軸3 1用作為使交接部20相對於基部20a擺動之中心 軸如圖5所示，擺動軸31可旋轉地由軸承3〇a、3〇b支持 (軸支持）而且，軸承30a、30b分別固定於對應之托架 30c 、 30d上。 擺動框32係由多片（本實施形態中為3片）板體32a〜324 成之框體。如圖5所示，於板體32a、32〇之間固定有擺動 軸31另方面，於板體32b固定有交接部2〇之交接用缸 體28。 擺動用缸體33為使交接部2〇擺動之驅動部。如圖4所 示，擺動用缸體33主要包含主體部33a及拉桿34。 拉桿34能夠相對於主體部33a進退。如圖4及圖5所示， 主體部33a固定於交接部2〇之基部2如，拉桿34之前端— 固定於擺動框32之板體32a。 因此，當拉桿34自主體部33a前進時，由把持爪23及吸 附部25保持之工件3之姿勢自水平變換㈣為立起姿勢。 另一方面，當拉桿34後退至主體部33&時，由把持爪以及 吸附部25保持之工件3之姿勢自立起變換姿勢為水平姿 勢。 擠壓部35調整自搬送單元5〇之固定機構6〇賦予至工件3 之負載。藉此，由固定機構60執行將自交接部2〇交接給搬 送單元50之工件3固定之動作、及將工件3之固定狀態解除 之動作。 如圖4及圖5所示，擠壓部35主要包含安裝框35a、複數 個托架36(36a〜36d)及複數個擠壓用缸體37(37a〜37d)。 156492.doc 201208962 安裝框35a及複數個托架36(36a〜36d)用於將複數個擠壓 用缸體37(37a〜37d)固定於變換姿勢單元10上。如圖2及圖4 所示，安裝框35a形成為框體狀，並固定於基部2〇a。而 且，如圖2所示，複數個（本實施形態中為4個）托架36(36a〜 36d)為自安裝框35a之縱板起沿著搬送單元50之搬送方向 (箭頭AR1方向）延伸之安裝板。 複數個擠壓用缸體37(37a〜37d)分別將對應之施壓構件 73(*73a〜73d，參照圖7)壓縮。如圖4及圖5所示，各擠壓用 缸體37(37a~37d)主要包含複數個拉桿38(38a〜38d)及複數 個輥 39(39a~39d)。 複數個（本實施形態中為4個）拉桿38(38a〜38d)分別設置 成能夠沿著箭頭AR2方向進退。而且，於各拉桿 3 8(3 8&~3 8(1)之前端安裝著對應之輥39(393〜39(1)。 因此’當各拉桿38(38a~38d)前進時，對應之輥39(39a〜 39d)抵接於各施壓構件73(73a~73d，參照圖7)，藉此，各 施壓構件73(73a〜73d)被壓縮。 另一方面’當各拉桿38(38a〜38d)後退時，對應之輥39 (39a〜39d)自各施壓構件73(73a〜73d，參照圖7)離開。藉 此，各施壓構件73(73a〜73d)之壓縮狀態被解除。 複數個（本實施形態中為4個）輥39(39a〜39d)分別為設置 於對應之拉桿38(38a~38d)前端之旋轉體。如圖5所示，各 輥39(39&〜39(1)設置成能夠以於鉛垂方向（與2軸大致平行之 方向，與箭頭AR1方向大致垂直之方向）延伸之旋轉軸為中 心旋轉。 156492.doc 16 201208962 因此，當於各輥39(39a〜39d)抵接於對應之施壓構件 73(73a〜73(1)之狀態下，搬送單元5〇沿搬送方向（箭頭ari 方向）移動時，各輥39(39a〜39d)以如下方式動作。即，各 輥39-邊將對應之施壓構件73(73a〜73d)壓縮，一邊於對應 之施壓構件73(73a〜73d)上沿著搬送方向旋轉。因此，搬送 單元50可維持各輥39(39a〜39d)之壓縮狀態，且沿搬送方向 移動。其結果為，即便搬送單元5〇相對於變換姿勢單元1〇 及主體單元40(固定側單元）移動時，亦可維持工件3之解除 固定狀態。 μ <3.搬送單元之構成> 、圖6及圖7係表示搬送單元5〇之構成之一例之前視圖及後 視圖。圖8係表示可動夾持部61(61a〜6ie)之構成之一例之 前視圖。圖9係自圖kV_v線觀察之導引爪69(69&)附近之 剖面圖。圖10係自圖7之W-W線觀察之導引爪69(_)附近 之剖面圖。 此處，搬送單元50接觸保持工件3之外緣部牦，並且於 執行工件3之授受之交接位置p職由分斷單元_行脆性 材料基板7之分斷之分斷位置p2()之間搬送立起姿勢之工件 3 ° 藉此，能夠抑制包含搬送路徑於内之搬送單元5〇之設置 面積(即搬送單元50之移動區域尺寸因此， ： 板分斷裝置I之尺寸。 么如圖6及圖7所示，搬送單元5G主要包含固定心及旋轉 口 52此處’本實施形態之搬送單元5崎置成能夠藉由例 I56492.doc •17· 201208962 如未圖不之線性馬達而相對於變換姿勢單元1〇、主體單元 40及非接觸保持單元8〇等移動。 旋轉台52是相對於固定台51旋轉之圓盤狀之旋轉部。如 圖6及圖7所示，旋轉台52自由轉動地嵌入至形成於固定台 51之圓形狀之貫通孔5 la中。而且，旋轉台52具有將工件3 固定之固定機構60。另外，對於固定機構6〇之構成於下文 中闡述。 固定台5 1用作安裝例如用以使旋轉台52旋轉之旋轉要 素、及用以使固定台51及旋轉台52相對於主體單元40行進 之行進要素之安裝部。如圖6及圖7所示，固定台51主要包 含導塊55、馬達56及皮帶57。 如圖6所示，複數個（本實施形態中為6個）導塊55設置於 固定台51之正面51b。另外，於各導塊乃之内部將複數個 滾珠（省略圖示）設置成能夠旋轉。而且，各導塊乃安裝於 對應之導件43、44時，各導塊55内之滾珠（省略圖示）以能 夠旋轉之狀態與對應之導件43、44接觸。 藉此，當各導塊55沿著對應之導件43、44(即沿著搬送 方向（箭頭AR1方向））移動時，各導塊55内之滾珠（省略圖 示）於對應之導件43、44上旋轉。因此，固定台5丨能夠沿 著導件43、44順利地行進。 馬達56係對旋轉台52賦予旋轉力之驅動部。皮帶將由 馬達56賦予之旋轉力傳遞至旋轉台52。如圖6所示，皮帶 57捲繞於旋轉台52、及安裝於馬達批旋轉軸5以前端之 馬達用滑輪58上。藉此’若馬達56旋轉，則固定於固定機 156492.doc 201208962 構60之工件3旋轉。 張力調整用滑輪59調整賦予至皮帶57之張力。本實施形 態中’張力調整用滑輪59之位置（例如z軸方向上之位置） 係由未圖示之定位機構來調整。藉此，可容易地消除皮帶 57之鬆弛，並且可容易地調整皮帶57之張力。因此，能夠 良好地维持旋轉台52之旋轉狀態。 <3.1.固定機構之構成> 固疋機構60將平板狀之工件3以立起姿勢固定。如圖6及 圖7所示，固定機構6〇主要包含複數個夾持部61 (61 〜 61c)、62及複數個擠壓部71。 複數個夾持部6l(61a〜61c)、62將配置於與擠壓部71之間 之工件3之外緣部4a夾持。如圖7所示，複數個夾持部6 j (61 a〜61C)、62分別沿著擠壓框72而設置。 另卜以下說明中’將標s主符號61(61 a〜61 c)之夾持部稱 為「可動夾持部」，將標註符號62之夾持部稱為「固定夾 持部」。 即，複數個夾持部包含複數個可動夾持部61(61a〜61c)及 固定夾持部62。再換言之，複數個夾持部中之一部分為複 數個可動夹持部61(61a〜61c) ’複數個夾持部中之剩餘部分 為固定夾持部62。 複數個（本實施形態中為3個）可動夾持部61(61a〜61c)分 別於相對於擠壓框72接近或離開之方向進退。如圖7及圖8 所不’各可動夾持部61(61a〜61c)主要包含抵接部63、轉動 板64、施壓構件66、可動導件67(67&〜67幻及導引爪 156492.doc -19- 201208962 (69a〜69c)β 此處，可動夾持部61 a〜6 lc具有彼此相同之硬體構成β 因此，以下僅對可動夾持部61a之硬體構成進行說明。 抵接部63係由例如金屬成形之球狀體，且安裝於轉動板 64上。轉動板64是以轉動軸64a為中心轉動之板體。例 如’旋轉致動器41(41a)之搖桿42(42a)(參照圖1及圖2)擺 動’搖桿42(42a)抵接於對應之夾持部61(61a)之抵接部63 時’轉動板64以轉動軸64a為中心向箭頭R1方向轉動。 連桿65為連接轉動板64及可動導件67(67a)之寬度較窄之 板體。連桿65之一端利用轉動轴65a而與轉動板64連動連 結，且連桿65之另一端利用轉動軸65b而與可動導件67 (67a)連動連結。 施壓構件66由彈簧等彈性構件形成。如圖8所示，施壓 構件66之一端66a固定於可動側之轉動板64上，施壓構件 66之另一端66b固定於固定側之強化板64b。藉此，若轉動 板64沿箭頭R1方向轉動，則施壓構件66對轉動板64向與箭 頭R1方向相反之方向施壓。 可動導件67(67a)為平板狀之可動構件。可動導件67向相 對於擠壓框72接近或離開之方向進退，由此來調整工件3 之固定狀態。 即，利用旋轉致動器41(41a)使搖桿42(42a)擺動，使轉 動板64沿箭頭R1方向轉動時，可動導件67(67a)向自擠壓 框72離開之方向移動。藉此，可動導件67(67a)成為夾持解 除狀態。 156492.doc •20- 201208962 另方面，當利用旋轉致動器41(41a)使搖桿42(42&)回 ^擺動則之位置’由於施壓構件66之施壓力轉動板64向與 箭頭R1方向相反之方向轉動時’可動導件67(67a)向接近 ;擠[框72之方向移動。藉此，可動導件67(67&)成為其與 擠壓框72之間能夾持工件3之狀態。 如此°又置於主體單元40之複數個旋轉致動器41(41a〜 )用作驅動。卩（第1驅動部），使複數個夾持部61 (61 a〜 61C)、62中之-部分（複數個可動夾持部61a〜61c)向相對於 擠壓框72接近或離開之方向進退。 如圖8所不，缺口60a係形成於可動導件67之擠壓框72側 之凹口》此處，當於變換姿勢單元1〇之交接部2〇與搬送單 元5〇之間交接工件3時，把持爪23(23a)可配置於由缺口 6〇a 形成之空間（例如間隙75(75a))中（參照圖8及圖11至圖13)。 因此於交接工件3時，能夠有效防止把持爪23(23a)與可 動導件67(67a)相干擾。 複數個（本實施形態中為兩個）導引爪69(69a)與可動導件 67(67a)及擠壓框72協作，從而夾持工件3。如圖8所示，導 引爪69(69a)於沿著對向之擠壓框72之輪廓線之方向上離開 而安裝於可動導件67(67a)上。而且，如圖9所示，以導引 爪_9a)之階差面_位料動導件67(67a)之下端面心 之更下方之方式，將導引爪69(69a)安裝於可動導件 67(67a)上。 因此，如®9所示，藉由可動導件67(67a)之下端面術、 導引爪69(69a)之階差面60b及擠壓框72之對向面6〇d與工件 I56492.doc 201208962 3接觸，而實現可動夾持部61(61a)及擠壓部71對工件3之夾 持。 如圖7所示，固定夾持部62固定於擠壓框72附近。如圖7 所示，固定夾持部62主要包含固定導件68及導引爪69 (69d) ° 固定導件68為平板狀之固定構件。即，固定導件68與可 動導件67(67a〜67c)不同，不於相對於擠壓框72接近或離開 之方向上進退，而是固定於旋轉台52上》 藉此，能夠以固定夾持部62之位置為基準容易地執行工 件3相對於固定機構60之定位。因此，藉由使用複數個可 動夾持部61 (61a〜61c)及固定夾持部62而能夠良好地將工件 3夾持及夾持解除。 如圖7所示，缺口 68a係形成於固定導件68之擠壓框72側 之凹口。此處，當於變換姿勢單元1〇之交接部2〇與搬送單 元50之間交接工件3時，把持爪23(23d)可配置於由缺口 68a 形成之空間（例如間隙75(75d))中（參照圖7及圖丨丨至圖〗3)。 因此，於交接工件3時，能夠有效防止把持爪23(23d)與固 定導件68相干擾》 複數個（本實施形態中為兩個）導引爪69(69d)與固定導件 68及擠壓框72協作，從而夾持工件3。如圖7所示，導引爪 69(69d)於沿著對向之擠虔框72之輪摩線之方向上離開而安 裝於固定導件68上。而且，如圖1G所示，以導引爪69(69d) 之階差面60b位於比固定導件68之側端面⑽更靠擠壓框72 側之方式，將導引爪69(69d)安裝於固定導件68上。 156492.doc -22· 201208962 因此’如圖9所示，藉由固定導件68之側端面68b、導引 爪69(69d)之階差面6〇b及擠壓框72之對向面60d與工件3接 觸，來實現固定夾持部62及擠壓部71對工件3之夾持。 擠壓部71藉由於與可動夾持部6i(61a~61c)及固定夾持部 62之間夾持工件3來擠壓工件3之外緣部4a。如圖7所示， 擠壓部71主要包含擠壓框72及複數個施壓構件73(73a〜 73d) » 如圖6及圖7所示，擠壓框72形成為環狀（更具體而言為 矩形環狀），且安裝於旋轉台52之中央附近。如圖9及圖1〇 所示’擠壓框72自工件3之第2主面3b側對工件3之外緣部 4a進行擠壓》 複數個（本實施形態中為4個）施壓構件73(73a〜73d)由彈 簧等彈性構件形成。如圖7所示，各施壓構件73(73a〜73d) 與擠壓框72之四個角部中之對應之角連結。 此處，若各施壓構件73(73a〜73d)自對應之擠壓用缸體 37(37a〜37d)(參照圖4及圖5)接收自圖7之紙面之正面朝向 背面之方向（即與箭頭AR2方向相反之方向）之力，則各施 壓構件73(73a〜73d)被壓縮。即，擠壓部35之擠壓用缸體 37(37a〜37d)用作向對應之施壓構件73(73a〜73d)賦予壓縮 力之驅動部（第2驅動部）。 另一方面，當拉桿38(38a〜38d)後退，輥39(39a〜39d)自 對應之施壓構件73(73a〜73d)離開時，各施壓構件73(73a〜 73d)對擠壓框72施壓箭頭AR2方向（施壓方向）之施壓力。 藉此，工件3因受到來自各施壓構件73(73a〜73d)之施壓 156492.doc •23· 201208962 力而被可動夾持部61(6la〜61c)及固定夾持部62與擠壓框72 夾持。其結果為，工件3固定於固定機構60上》 如此，固定機構60上之工件3之固定狀態由變換姿勢單 元10之擠壓用缸體37(37a〜37d)(第2驅動部）及主體單元4〇 之旋轉致動器41(4 la〜41c)(第1驅動部）來進行調整。 即，藉由搬送單元50之固定機構60、變換姿勢單元1〇之 擠壓用缸體37(37 a~3 7 d)及主體單元40之旋轉致動器41 (41 a~4 lc)’執行對成為搬送對象之工件3之固定。 因此，本實施形態中，亦將變換姿勢單元1〇、主體單元 40及搬送單元50統稱為「搬送系統」。 <3·2·工件之固定方法> 圖11至圖13係用以說明由固定機構6〇對工件3之固定步 驟及解除固定步驟之後視圖。此處，對將呈立起姿勢之工 件3固定於固定機構60上之步驟進行說明。 另外，a亥固疋步驟是藉由控制單元9〇控制變換姿勢單元 1〇、主體單元40、搬送單元5〇中所包含之各要素之動作來 實現。 又，開始正式固定步驟之前，使搬送單元5〇移動至交接 位置ΡΗ)之解除位置P11(參照圖2)，工件3由各吸附部 25(25a〜25d)予以吸附保持。 在正式固疋步驟中’首先利用擺動部3。使交接部移動 (擺動）。藉此，使由交接部2〇保持之工件3呈立起姿勢並移 動至搬送單元50之固定機構6〇附近。 其次，使設置於主體單元4〇之複數個旋轉致動器41 156492.doc 24· 201208962 (41a〜41c)(參照圖2)動作，且使各搖桿42(42a〜42c)擺動。 藉此’使各可動夾持部61(61a〜61c)之可動導件67(67a〜 67c)向自擠壓框72離開之方向移動。 繼而，使複數個擠壓用缸體37(37a〜37d)動作，從而各拉 桿38(38a〜38d)自缸體主體前進。藉此，各施壓構件 73(73a〜73d)被對應之輥39(39a〜39d)壓縮，擠壓框72向與 各施壓構件73(73a〜73d)之施壓方向（箭頭AR2方向）相反之 方向移動。 繼而’使搬送單元50自交接位置P10之解除位置P11移動 至固疋位置P12(參照圖1及圖2)。藉此，各擠壓用缸體37 (37a〜37d)之前端之輥39(39a〜39d)會將對應之施壓構件73 (73a〜73d)壓縮，且在施壓構件73(73a〜73d)上旋轉。因 此，搬送單元50於已使擠壓框72自工件3離開之狀態下沿 著搬送方向移動。繼而，於擠壓框72已自工件3離開之狀 態下’工件3之外緣部4a抵接於固定導件68之側端面68b (圖 10) 〇 繼而，於工件3之外緣部4a抵接於固定導件68之側端面 68b(圖10)之狀態下，使旋轉致動器41 (4la〜41c)動作，從 而對應之搖桿42(42a〜42c)回到擺動前之位置。 藉此’各可動夾持部61 (61a〜61c)之可動導件67(67a〜 67c)向接近於擠壓框72之方向移動。因此，使工件3之外 緣部4a抵接於各可動導件67(67a〜67c)。 繼而，於工件3之外緣部4a抵接於各可動夾持部61(61a〜 61c)及固定夹持部62之狀態下，使各擠壓用缸體37(37a〜 156492.doc -25- 201208962 37d)動作，從而使各拉桿38(38a〜38d)後退。 藉此’由各擠壓用缸體37(3 7a〜37d)賦予至對應之施壓構 件73(73a〜73d)之壓縮力解除賦予，擠壓框72便向各施壓構 件73之施壓方向移動。繼而，如圖9及圖1〇所示，可動導 件67(67a〜67c)及固定導件68之階差面60b與擠壓框72之對 向面60d之距離變窄。 因此，工件3被失於可動夾持部61(61a〜61c)及固定夾持 部62與擠壓部71之間，立起姿勢之工件3由固定機構6〇固 疋。即，根據正式固定步驟，可將立起姿勢之工件3良好 地固定於固定機構60上。 繼而，於工件3由固定機構6〇固定之狀態下，解除各吸 附部25(2Sa〜25d)之吸附狀態。藉此，交接部2〇對工件3之 保持狀態得以解除，工件3之固定步驟完成。 <3.3.工件之解除固定方法> 此處，一邊參照圖U至圖13，_邊說明對藉由固定機構 60而以立起姿勢固定之工件3解除該工件^之固定狀態之步 驟。 另外，β亥解除步驟與工件3之固定步驟同樣地是藉由控 制單元9’制變換姿勢單元10、主體單㈣、搬送單元50 中所包含之各要素之動作來實現。 而且肖始正式解除步驟之前，搬送單元5G移動至交接 之固定位置P12(參照圖2)，工件3由固定機構6〇固 定。 正式解除步驟中，廿 甲 首先將由固定機構60固定之工件3被 I56492.doc -26- 201208962 各吸附部25(25a〜25d)吸附。藉此，工件3於固定於固定機 構60之狀態下由交接部20保持。 其次’於工件3之外緣部4a抵接於複數個可動夹持部61 (61a~61c)及固定夾持部62之狀態下，使複數個擠壓用缸體 37(37a〜37d)(第2驅動部）動作，從而各拉桿38(38a〜38d)自 ' 缸體主體前進。 措此’各施壓構件7；3(73a〜73d)被對應之輥39(39a〜39d) 壓縮’使擠壓框72向與各施壓構件73(73a〜73d)之施壓方向 (箭頭AR2方向）相反之方向移動。而且，如圖9及圖1〇所 示，可動導件67(67a~67c)及固定導件Μ之階差面60b與擠 壓框72之對向面60d之距離擴大。因此，固定機構6〇對立 起姿勢之工件3之固定被解除’工件3由交接部20之各吸附 部25(25a〜25d)吸附保持。 如此’擠壓部35之各擠壓用缸體37(37a〜37d)壓縮對應之 施壓構件73(73a〜73d)，由此可解除工件3之固定狀態。 繼而，於工件3之外緣部4a抵接於複數個可動夾持部 61 (61 a~61 c)及固定夾持部62之狀態下，使複數個旋轉致動 器41(41a~41c)(第1驅動部）動作，從而使各搖桿42(42a〜 ' 42c)擺動。藉此，使各可動夾持部61(61a〜61c)之可動導件 - 67(67a〜67c)向自擠壓框72離開之方向移動。 繼而’使搬送單元50自交接位置Pi〇之固定位置P12移動 至解除位置Pll(參照圖1及圖2)。藉此，各擠壓用缸體37 (37a〜37d)前端之輥39(39a〜39d)將對應之施壓構件73(73a〜 73d)壓縮’且於施壓構件73(73a〜73d)上旋轉。因此，搬送 156492.doc •27· 201208962 單元50於已使擠壓框72自工件3離開之狀態下沿著搬送方 向移動。而且’於擠壓框72自工件3離開了之狀態下，工 件3之外緣部4a自固定導件68之側端面68b(圖10)離開。如 此’根據正式解除步驟，能夠良好地解除由固定機構6〇固 定之工件3之固定狀態。 繼而，由擺動部30使交接部20移動（擺動），藉此由交接 部20保持之工件3自搬送單元50之固定機構6〇離開。而 且’工件3自固定機構60離開之後，使複數個擠壓用缸體 37(37a〜37d)之拉桿38(38a〜38d)後退，由此擠壓框72向施 壓方向（箭頭AR2方向）移動，工件3之解除固定步驟完成。 <4·非接觸保持單元之構成> 圖14係表示非接觸保持單元80之構成之一例之前視圖。 此處，非接觸保持單元80將如上所述般由搬送單元50接觸 保持之工件3之第1主面3a輔助性地非接觸保持。如圖14所 示，非接觸保持單元80主要包含安裝台81、複數個第1吸 引部83及複數個第2吸引部84。 此處，本實施形態中，亦將符號83之「第1吸引部」與 符號84之「第2吸引部84」統稱為「吸引部」。即，複數個 吸引部包含複數個第1吸引部83及複數個第2吸引部84。 安裝台81以與行進至分斷位置P20為止之搬送單元50對 向之方式設置。如圖2所示，安裝台81固定於主體單元40 上。而且’如圖1及圖14所示，安裝台81之鉛垂面81 a用作 安裝複數個第1吸引部83及複數個第2吸引部84之安裝面。 插入孔8 lb為於鉛垂方向（與z軸平行之方向）延伸之貫通 156492.doc -28· 201208962 長孔，且形成於安裝台81之中央附近。第1分斷棒86經由 插入孔81 b到達工件3之第1主面3a。 如圖1及圖14所示，複數個吸引部（複數個第1吸引部83 及複數個第2吸引部84)設置於安裝台81之鉛垂面81a上。 複數個吸引部吸引對向之立起姿勢之工件3之第1主面3a， 藉此’以非接觸狀態保持工件3。此處，本實施形態中， 作為複數個第1吸引部83及複數個第2吸引部84亦可使用伯 努利吸盤。 如圖14所示，複數個（本實施形態中為12個）第1吸引部 83於沿著形成於安裝台81上之插入孔81b之長度方向兩側 之狀態下，設置於安裝台81之鉛垂面81 a上。各第1吸引部 83由例如伯努利吸盤構成。藉此，能夠藉由各第1吸引部 83吸引對向之工件3而將工件3以非接觸狀態保持》 如圖14所示，複數個（本實施形態中為12個）第2吸引部 84於自兩側夾持複數個第1吸引部83之狀態下，設置於安 裝台81之鉛垂面81a上。各第2吸引部84與第1吸引部83同 樣地由例如伯努利吸盤構成。藉此，各第2吸引部84與第1 吸引部83同樣地吸引對向之工件3，由此能夠將工件3以非 接觸狀態保持。 此處，如圖14所示，各第1吸引部83之直徑小於各第2吸 引部84之直徑。而且，如圖14所示，複數個第1吸引部83 中相鄰接之第1吸引部83彼此之間隔D1(第1間隔）小於複數 個第2吸引部84中相鄰接之第2吸引部84彼此之間隔D2(第2 間隔）。 156492.doc -29· 201208962 如此，複數個第1吸引部83比複數個第2吸引部84更密集 地配置。藉此，能夠更切實地將插入孔81 b附近之工件 3(換言之，第！分斷棒86附近之工件3)非接觸保持。因此， 能夠良好地執行脆性材料基板7之分斷。 <5.分斷單元之構成> 圖15係表示分斷單元85之構成之一例之俯視圖。此處， 分斷單元85將由搬送單元50及非接觸保持單元8〇形成保持 狀態之脆性材料基板7沿著劃線8分斷。如圖15所示，分斷 單元85主要包含第1分斷棒86及複數個第2分斷棒87。 第1分斷棒86以經由插入孔8 lb到達搬送單元50側之方式 進退》如圖14及圖15所示，第1分斷棒86沿著安裝台81之 插入孔81b於一個方向（插入孔81b之長度方向，z軸方 向）（以下簡稱為「延伸方向」）延伸。 複數個（本實施形態中為2根）第2分斷棒87夾持由搬送單 元50保持之工件3而設置於第1分斷棒86之相反側。各第2 分斷棒87於與第1分斷棒86平行之方向（Z軸方向）延伸。 此處，如圖15所示，搬送方向（箭頭AR1方向）上之複數 個第2分斷棒87僅隔開所期望之距離D3而配置。而且，如 圖15所示，第2分斷棒87、第1分斷棒86及第2分斷棒87沿 著自交接位置P10朝向分斷位置P20之方向（Y軸負方向）而 依序配置。 而且，第1分斷棒86自形成有劃線8之第2主面3b之相反 側之第1主面3a側起（於此情形時，第1分斷棒86抵接於切 割片5)沿著劃線8賦予負載。 156492.doc -30· 201208962 即，負載係自形成有劃線8之第2主面3b之相反側之第丄 主面3a賦予至劃線8。因此，能夠良好且切實地執行沿著 劃線8之脆性材料基板7之分斷。 第】進退驅動部86a藉由對^分斷棒_予驅動力而使 第1分斷棒86於進退方向（箭頭AR6方向，參照圖15)進退。 例如，第1進退驅動部86a於第丨分斷棒86之延伸方向與劃 線8大致平行之狀態下使^分斷棒“向⑽負方向移動， 由此使第1分斷棒86接近於脆性材料基板7之第i主面3a。 第2進退驅動部87a藉由對複數個第2分斷棒㈣予驅動 力而使複數個第2分斷棒87於進退方向（箭頭娜方向，參 照圖15)進退。例如，第2進退驅動部…於複數個第2分斷 棒87之延伸方向與劃線8大致平行之狀態下使複數個第以 斷棒87向X軸正方向移動’由此使複數個第2分斷棒87接近 於脆性材料基板7之第2主面3b。 右如此利用第1及第2進退驅動部86a、87a使第丄及第2分 斷棒86 87進退，則脆性材料基板7由該等第丨及第2分斷 棒86、87夾持。其結果為，呈立起姿勢之脆性材料基板7 沿者劃線8分斷。 即利用基板分斷裝置丨執行之分斷處理中，第1及第2 刀斷棒86、87接近於脆性材料基板7之方向（進退方向（箭頭 AR6方向）)均與重力方向（2軸負方向）大致垂直。 藉此，重力對第！及第2分斷棒86、87之影響相同。因 此無品針對第1及第2分斷棒86、87之每一個採取用以減 輕重力影響之措施便可良好地將脆性材料基板7分斷。 I56492.doc •31 · 201208962 <6.本貫施形態之基板分斷裝置之優點> 如上所述，本實施形態之基板分斷裝置丨中，由搬送單 元50(保持單元）保持脆性材料基板7時，第i及第2分斷棒 86、87配置於以立起姿勢保持之脆性材料基板7之兩主面 3a ' 3b側。 此處，與本實施形態不同，對如下情況進行研究：第j 及第2分斷棒配置於脆性材料基板之上下方，使第丨及第2 分斷棒分別自脆性材料基板之上側及下側接近。於此情形 時，第1及第2分斷棒接近於脆性材料基板之方向與重力方 向所成之角分別約為〇°(deg)、180o(deg)。即，重力對第1 及第2分斷棒之影響不同。其結果為，於未對重力之影響 進行任何調整之情形時，會產生自第1及第2分斷棒賦予至 脆性材料基板之負載不同之問題。 其次，如本實施形態，對如下情況進行研究：使第i及 第2分斷棒86、87分別自以立起姿勢保持之脆性材料基板7 之兩主面3a、3b側接近。於此情形時，第！及第2分斷棒 86、87接近於脆性材料基板7之方向與重力方向所成之角 都約為 。 藉此，重力對第1及第2分斷棒86、87之影響相同。因 此’無需針對第1及第2分斷棒86、87之每一個採取用以減 輕重力影響之措施便可良好地將脆性材料基板7分斷。 而且，根據本實施形態之基板分斷裝置1及其固定機構 60 ’工件3之外緣部4a由可動失持部61 (6la〜61c)及固定夾 持部62與擠壓部71良好地夾持。因此，可良好地將立起姿 156492.doc -32- 201208962 勢之工件3固定。 而且，本實施形態之基板分斷裝置丨及其變換姿勢單元 10中，搬送單元50之固定機構60藉由自變換姿勢單元之 擠壓部35賦予之負載而執行工件3之固定及工件3之解除固 定。即，搬送單元50不需要用以執行工件3之固定及工=牛3 之解除固定之要素，從而無需將與該要素相關之配管及配 線配置於移動側（搬送單元50)與固定側（例如變換姿勢單元 1〇等）之間。因此，藉由使用變換姿勢單元1〇而可提高行 進時之搬送單元敗安全性及維料之作以貞之作=效 率。 而且，藉由本實施形態之基板分斷裝置丨實現之搬送系 統中，借助來自設置於主體單元40及變換姿勢單元⑺（固 定側單元）上之複數個旋轉致動器41(41a〜41c)Ui驅動部） 及複數個擠壓用缸體37(37a〜37d)(第2驅動部）之驅動力， 執行工件3之固定及工件3之解除固定。 即，搬送單元50不需要用以執行工件3之固定及工件^之 解除固定之驅動部（第i及第2驅動部），從而無需將與該要 素相關之配管及配線配置於移動側（搬送單元5〇)與固定側 (變換姿勢單元1〇及主體單元4〇)之間。因此，可提高行進 時之搬送單元5 0之安全性及維護時之作業人員之作業效 率 〇 進而，本實施形態之基板分斷裝置丨及藉由該基板分斷 裝置1實現之保持裝置不僅由搬送單元50之固定機構6〇將 工件3之外緣部4a接觸保持，亦可藉由非接觸保持單元 I56492.doc -33- 201208962 將工件3之主面（更具體而言為第1主面3 a)非接觸保持。因 此，即便於因工件3之特性而無法將除了工件3之外緣部4& 以外（例如工件之主面3a、3b)接觸保持之情形時，亦可藉 由搬送單元50(保持單元）及非接觸保持單元8〇而將工件3良 好地保持。 <7.變形例> 以上’已對本發明之實施形態進行了說明，但本發明並 不限定於上述實施形態，而可進行各種變形。 (1) 本實施形態中，說明了可動導件67(67a〜67c)及導引 爪69(69a〜69c)如圖8及圖9所示相互獨立而構成，但並不限 定於此。例如，可動導件67(67a)及導引爪69(69a)亦可形 成為一體。 (2) 另外’本實施形態中’說明了搬送單元5〇相對於變 換姿勢單元10及主體單元40而移動’但並不限定於此。例 如，亦可為變換姿勢單元10及主體單元4〇相對於搬送單元 5 0而移動。 如此，各單元10、40及50之移動方式只要使搬送單元5〇 相對於變換姿勢單元10及主體單元4 0 (固定側單元）而相對 性地移動即可。 (3)另外，本實施形態中，變換姿勢單元1〇之工件確認 感測器1 5 (參照圖4及圖5 )於升降台21附近僅設置一個，伸 工件確認感測器15之個數並不限定於此。亦可於升降台21 附近設置複數個（兩個以上）工件確認感測器丨5。 【圖式簡單說明】 156492.doc •34· 201208962 圖1係表示本發明之實施形態中之基板分斷裝置之構成 之一例之前視圖； 圖2係表示本發明之實施形態中之基板分斷裝置之構成 之—例之後視圖； 圖3係表示工件之構成之一例之前視圖； 圖4係表示變換姿勢單元之構成之一例之側視圖； 圖5係表示變換姿勢單元之構成之一例之俯視圖； 圖ό係表示搬送單元之構成之一例之前視圖； 圖7係表示搬送單元之構成之一例之後視圖； 圖8係表示可動夾持部之構成之一例之前視圖； 圖9係自圖8之V-V線觀察之導引爪附近之剖面圖； 圖1 〇係自圖7之W-W線觀察之導引爪附近之剖面圖； 圖U係用以說明固定機構對工件之固定步驟及解除固定 步驟之後視圖； 圖12係用以1¾明固定機構對工件之固定步驟及解除固定 步驟之後視圖； 圖13係用以說明固定嫱播 疋機構對工件之固定步驟及解除固定 步驟之後視圖； 圖14係表示非接觸保持單 于早70之構成之一例之前視圖；及 圖15係表示分斷單元之構成 Γ^ Λ 铒欣之—例之俯視圖。 【主要元件符號說明】 3 3a 基板分斷裝置 工件 第1主面 156492.doc 35· 201208962 3b 第2主面 4 切割環 4a 外緣部 4b 開口 5 切割片 7 脆性材料基板 8 劃線 9 電子零件 10 變換姿勢單元 ll(lla〜lid) 支持部 12(12a~12d) 滾珠 13(13a~13d) 定位把手 15 工件確認感測器 20 交接部 20a 基部 21 升降台 21a 中心 23(23a~23d) 把持爪 25(25a~25d) 吸附部 26(26a~26d) 支臂 27(27a〜27d) 前端 28 交接用缸體 28a 主體部 29 拉桿 -36. 156492.doc 201208962 30 擺動部 30a、30b 軸承 30c、30d 托架 31 擺動軸 32 擺動框 32a~32c 板體 33 擺動用缸體 33a 主體部 34 拉桿 34a 前端 35 擠壓部 35a 安裝框 36(36a〜36d) 托架 37(37a 〜37d) 擠壓用缸體 38(38a~38d) 拉桿 39(39a~39d) 輥 40 主體單元 41(41a 〜41c) 旋轉致動器 42(42a~42c) 搖桿 43 > 44 件 50 搬送單元 51 固定台 51a 貫通孔 51b 正面 156492.doc -37- 201208962 52 旋轉台 60 固定機構 60a ' 68a 缺口 60b 階差面 60c 下端面 60d 對向面 61(61a〜61c) 、 62 爽持部 63 抵接部 64 轉動板 65 連桿 66 、 73(73a~73d) 施壓構件 67(67a~67c) 可動導件 68 固定導件 69(69a〜69d) 導引爪 71 擠壓部 72 擠壓框 75(75a~75d) 間隙 80 非接觸保持單元 81 安裝台 81a、81b 插入孔 83 第1吸引部 84 第2吸引部 85 分斷單元 86 第1分斷棒 156492.doc · 38 - 201208962 86a 87 87a 90 91 91a 92 93 AR1、AR2、AR3 D1、D2 P10201208962 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a transport system for transporting a flat workpiece in a standing posture. [Prior Art] As described above, there is known a substrate breaking device which fixes a mother substrate on which a scribe line is formed in a horizontal state, and a mother substrate along a scribe line by a breaking unit respectively disposed above and below the mother substrate Breaking (for example, Patent Document 1). [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] JP-A-2006-289625 SUMMARY OF INVENTION [Problems to be Solved by the Invention] However, Patent Document 1 is directed to a flat workpiece. The technique of fixing the posture and carrying it is not recorded. Accordingly, it is an object of the present invention to provide a transport system capable of transporting a flat workpiece in a standing posture. [Means for Solving the Problems] In order to solve the above problems, the invention is a transport system characterized by comprising: a fixed side unit; and a transport unit including a fixing mechanism for fixing a flat workpiece in a standing posture, And the workpiece fixed by the fixing mechanism is relatively moved relative to the fixed side unit; the fixing mechanism of the conveying unit includes: a pressing frame, which is pressed to 56492.doc 201208962 to press the outer edge portion of the workpiece; a clamping portion each sandwiching the outer edge portion of the workpiece disposed between the pressing frame; and a pressing member for applying the pressing force to the pressing frame The outer edge portion is fixed between the pressing frame and each of the clamping portions; the fixed side unit includes: a first driving portion that causes one of the plurality of clamping portions to approach or separate from the pressing frame And advancing and retreating; and a second driving unit that applies a compressive force to the pressing member. According to a second aspect of the invention, the second driving unit includes: a pull rod that advances and retreats along a pressing direction in which the pressing member presses the pressing frame; and a rotating body; It is provided at the front end of the pull rod, and presses the pressing member to rotate in the conveying direction of the conveying unit. Further, the invention of claim 3, wherein the transport system of the second aspect or the second aspect further includes a control unit that controls the operations of the fixed side unit and the transport unit; the fixed side unit further includes an interface, which remains And the workpiece in the horizontal posture is delivered to the transport unit; and the plurality of gripping portions ♦ a movable gripping portion that advances and retreats in a direction approaching or departing from the extrusion frame And a fixed grip portion that is fixed near the extrusion frame. Further, the invention of claim 4 is the transport system of the third aspect, wherein the dead control unit moves the above-mentioned work in an upright posture by the following steps; fixing the fixed mechanism: (1) moving the transfer portion And the one piece held by the delivery portion is raised (four), and the workpiece is moved to the vicinity of the fixing mechanism of the transfer unit; (9) the first driving unit is operated by the 156492.doc 201208962 Moving the movable clamping portions in a direction away from the pressing frame; (m) moving the pressing frame in a direction opposite to the grinding direction by operating the second driving portion; (4) making the above The fixed nip portion is relatively f-moved with respect to the workpiece held by the delivery portion, and the outer edge portion of the workpiece is abutted against the fixed moxibustion portion; (V) the above-mentioned workpiece The edge portion is in contact with the fixed nip portion I, and the first driving portion is operated to move the movable nip portion in a direction close to the pressing frame, and the outer edge of the workpiece is Reaching (vi) the second driving unit is operated in a state in which the outer edge portion of the workpiece abuts against the plurality of movable clamping portions and the fixed clamping portion, thereby causing the extrusion The pressing frame is moved in the pressing direction to fix the workpiece in the standing posture by the fixing mechanism; and (vii) maintaining the workpiece in a state in which the workpiece is fixed by the fixing mechanism Lifted. Further, the invention of claim 5 is the transport system of the third aspect, wherein the control unit releases the fixed state of the workpiece fixed by the fixing mechanism in an upright position by the following steps: (1) fixing the fixing mechanism by the fixing mechanism The workpiece is held by the delivery portion; and the second driving unit is operated in a state in which the outer edge portion of the workpiece abuts against the plurality of movable clamping portions and the fixed clamping portion; Thereby, the pressing frame is moved in a direction opposite to the pressing direction, thereby releasing the fixing mechanism to the workpiece; (iii) abutting the plurality of movable portions on the outer edge portion of the workpiece In the state of the nip portion and the fixed nip portion, the first driving portion is operated to move the movable nip portion away from the extrusion frame from the above 156492.doc 201208962; (4) the fixing clip is made The holding portion is relatively moved with respect to the workpiece held by the delivery portion, so that the outer edge portion of the workpiece is separated from the fixed clamping portion; and (7) So that the transfer unit is moved to the drain of the workpiece holding portion of said interface from said fixing means to the transport means of the leave. [Effects of the Invention] In the inventions of the first to fifth aspects, the fixing mechanism of the transport unit performs the fixing of the workpiece and the release of the member by the driving force from the first and second driving portions provided on the fixed side unit. . In other words, the "transport unit does not require a drive unit (i-th and second drive unit) for fixing the workpiece and releasing the workpiece, and it is not necessary to provide the piping and wiring related to the element on the moving side (transport unit) and Solid; t between sides. The & can improve the safety of the transport unit during travel and the work efficiency of the operator during maintenance. . . In particular, according to the second aspect of the invention, the transport unit is configured such that when the fixed side unit moves, the rotating body that is placed at the tip end of the rod of the second drive unit compresses the wishing member and rotates on the member in the transport direction. The transport unit can maintain the compressed state of the rotating body and move in the transport direction. Therefore, even when the transport unit relatively moves with respect to the fixed side unit, the workpiece can be maintained in a released state. In particular, according to the inventions of claims 3 to 5, the operation of fixing the workpiece in the posture to the fixing mechanism and the fixing of the fixing of the workpiece fixed to the fixing mechanism can be satisfactorily performed. [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings, 156492.doc 201208962. <Im. Overall Configuration> Fig. 1 and Fig. 2 are a front view and a rear view, respectively, showing an example of the configuration of the substrate breaking device 1 in the embodiment of the present invention. Fig. 3 is a front view showing an example of the construction of the workpiece 3. The substrate cutting device (10) cuts off (cuts) the brittle material substrate 7 (see Fig. 3) on which the scribe line 8 is formed along the scribe line 8. As shown in Fig. 1 and Fig. 2, the substrate breaking package £1 mainly includes a change posture unit 1A, a main body unit 40, a transport unit 50, a non-contact holding unit rib, a breaking unit 85, and a control unit 9A. Further, in each of Figs. 1 and hereinafter, in order to clarify the direction relationship of the portions, the ΧΥΖ orthogonal coordinate system in which the z-axis direction is the slanting direction ι γ plane is a horizontal plane is appropriately set as needed. The change posture unit Η) converts the posture of the flat guard 3 between the horizontal posture and the standing posture, and delivers the workpiece 3 in the standing posture to the transport unit 50. Further, the transformation posture unit_ is fixed for the main body unit 4〇. Here, as shown in Fig. 3, the workpiece 3 fixed to the conveying unit 5 and separated by the breaking unit 85 mainly includes a cutting ring 4, a dicing sheet 5, and a brittle material substrate 7. The cutting ring 4 (annular body) is a flat plate formed of a metal such as iron-free steel. As shown in Fig. i and Fig. 2, the workpiece 3 is fixed to the fixing mechanism 6 by the fixing member 6 by the outer edge of the cutting ring 4. Further, as shown in Fig. 3, an opening is formed in the vicinity of the center of the cutting ring 4. Further, a notch ^ is provided at the outer edge portion of the dicing ring 4. The rotation angle of the workpiece 3 is detected by detecting the position of the notch 4c by 156492.doc 201208962. The dicing sheet 5 (sheet body) is mounted relative to the cutting ring 4 in such a manner as to cover the opening of the cutting ring 4. Further, the brittle material substrate 7 is attached to the dicing sheet 5 so as to be located on the opening. Therefore, even if the workpiece 3 is in the standing posture, the brittle material substrate 7 can be reliably fixed. Here, in the present embodiment, as the dicing sheet 5, for example, an adhesive sheet made of resin may be used. The brittle material substrate 7 is a substrate made of a brittle material such as a glass substrate or a ceramic substrate. As shown in Fig. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7. The scribe line 8 is a cut line (longitudinal grain) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed by, for example, pressing a scribing wheel made of sintered diamond (not shown) against the surface of the brittle material substrate 7 and rotating it. Further, stress is applied to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed, and the brittle material substrate 7 is divided along the scribe lines 8, thereby obtaining a plurality of electronic components 9 (for example, a plurality of liquid crystal display devices). Further, in the present embodiment, the surface of the main surfaces 3a and 3b of the workpiece 3 (and the dicing ring 4, the dicing sheet 5, and the brittle material substrate 7) where the scribe line 8 is not formed is referred to as a first main surface 3a, and The surface on which the scribe line 8 is formed is referred to as a second main surface 3b. As shown in FIGS. 1 and 2, the main body unit 40 is used as a fixing unit for the conversion posture unit 10, the non-contact holding unit 80, the breaking unit 85, and the like, and the plurality of rotary actuators 41 (41a to 41c). unit. Here, each of the rotary actuators 41 (41 a to 41 c) rotates the shaft (rotation shaft, not shown) in accordance with the supply state of the compressed air. Thereby, the rocker 42 (42a to 42c) attached to the shaft swings and abuts against the abutting portion 63 (refer to Fig. 8) of the corresponding holding portion 61 (61a to 156492.doc 201208962 61c). Further, the hard body configuration of the grip portions 6U61a to 61e) is explained below. The transport unit 50 is provided to be able to travel along one of the guide members 43, 44 fixed to the main body unit buckle. The transport unit 50 holds the flat workpiece 3 in a standing posture and moves the workpiece 3 relative to the shift posture unit main body unit 40: here, the transport unit 5 is held by the outer edge portion of the workpiece 3 4 a is achieved by contact retention. Thus, the "transport unit 50 not only transports the workpiece 3 (transport function), but also: the outer edge of the guard 3 including the brittle material substrate 7 is also contact-protected: and the flat-shaped workpiece 3 is in a standing posture. The status is fixed (maintaining this). That is, the transport unit 50 can also be used as a "holding unit". Further, in the present embodiment, the vehicle is moved, but the posture unit is changed. And the main: =3: In the case of the transfer one, the change posture can also be singular, and the present embodiment is a side unit. The single (10) and the main unit 4G are collectively referred to as "solid as shown in FIG. 2, and the non-contact holding unit 8" is disposed opposite to the transport unit, and is carried out by the transport unit: == 6 〇 contacting and holding the outer edge material M3. The non-contact holding mechanism is such that the non-travel/(holding unit) and the workpiece 3 are performed on the outer edge portion (four) 1 main surface 3a of the workpiece 3 which is in the form of a "contact holding" The non-preserving unit 80 of the touch holding device constitutes a knife-stop unit 85, and the brittle material of the workpiece 3 held by the conveying veneer 7 along the material 8 is broken, and the breaking unit 85 checks Material substrate 7 156492.doc 201208962 Stress is applied to cause the vertical crack to grow from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side, thereby breaking the brittle material substrate 7. The control unit 90 controls the operations of the transform gesture unit 1A, the main body unit 4, the transport unit 50, the non-contact holding unit 8A, and the elements included in the disconnect unit 85, and realizes data calculation. As shown in FIG. 2 and FIG. 2, the control unit 90 mainly includes r〇M9 1, RAM 92, and CPU 93. The ROM (Read Only Memory) 91 is a so-called non-volatile memory unit, for example, a program 91 a is stored. Further, as the ROM 91, a non-volatile memory which is freely readable and writable, that is, a flash memory can be used. A RAM (Random Access Memory) 92 is a volatile memory unit, and stores, for example, data for calculation of the CPU 93. The CPU (Central Processing Unit) 93 performs control in accordance with the program 91a of the ROM 91 at a specific time (for example, a plurality of rotary actuators 41 (41a to 41c) and a plurality of squeeze cylinders 37 (37a to 37d). ) drive control, etc.). Further, the detailed hardware configuration of the transformation posture unit 10, the conveyance unit 5A, the non-contact holding unit 80, and the breaking unit 85 will be described later. <2. Configuration of Transformation Posture Unit> FIG. 4 and FIG. 5 respectively show a side view and a plan view of an example of the configuration of the transformation posture unit 《. Here, the transformation posture unit 1 执行 performs the transformation of the workpiece 3 as described above. The action of the posture and the operation of transferring the workpiece 3 to the transport unit 5〇. As shown in FIG. 4 and FIG. 5, the transformation posture unit 1 〇 mainly includes a plurality of supports 156492.doc •11 · 201208962 part 11 (1 la~lid), a plurality of positioning handles 13 (13a to 13d), a handover unit 20, The swinging portion 30 and the pressing portion 35. A plurality of (four in the present embodiment) support portions 11 (1 ia to η d) support the workpiece 3 that is transferred to the transformation posture unit 10. As shown in FIGS. 4 and 5, each of the support portions 11 (11 a to lid) is fixed to a position where the outer edge portion 4a of the cutting ring 4 of the workpiece 3 can be supported, and does not interfere with the lifting table 21 of the interface portion 20. The location. Further, as shown in Figs. 4 and 5, each of the support portions 11 (i ia to ud) has balls 12 (12a to 12d) which are provided to be freely rotatable at the tip end thereof. Thereby, each of the balls ^ (12a to 12d) can support the workpiece 3 and rotate. Therefore, the position of the workpiece 3 supported by each of the support portions 11 (11a to 11d) can be easily and flexibly changed. Here, the workpiece 3 supported by the plurality of support units 11 (lla to 11d) may be transferred to the conversion posture unit 1 by, for example, a transport robot (not shown). Further, the worker of the substrate cutting device 1 (hereinafter simply referred to as "worker") can mount the workpiece 3 on the plurality of support portions 11. As shown in FIGS. 4 and 5, a plurality of (four in the present embodiment) positioning handles 13 (13a to 13d) are provided adjacent to the corresponding grip claws 23 (23 & 〜23). Each positioning handle 13 (13a~) 13d) is moved forward and backward along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown) provided on the base portion 20a. Thereby, each of the positioning handles 13 (13a to 13d) is used to The position of the workpiece 3 supported by each of the support portions u (11a to lid) is in a desired range, and the outer edge portion of the workpiece 3 (more specifically, the cutting piece 5) is oriented toward the center 21a of the lifting table 21. The workpiece confirmation sensor 15 detects whether the workpiece 3 is supported by the plurality of support portions 11. As shown in Fig. 5, the workpiece confirmation sensor 15 is fixed to the support portion 1113 adjacent to 156492.doc 12 201208962, and A position that does not interfere with the lifting platform 21 of the delivery unit 20. As the workpiece confirmation sensor 15, for example, a proximity sensor that detects the presence or absence of the workpiece 3 by non-contact may be used. The interface 20 is maintained in a horizontal posture and is plural The workpiece 3 supported by the support unit. Moreover, the interface 20 is between the transfer unit 50 and the transport unit 50. As shown in FIGS. 4 and 5, the delivery unit 20 mainly includes a lifting platform 21, a plurality of gripping claws 23 (23a to 23d), and a plurality of adsorption portions 25 (shown in FIGS. 4 and 5). 25a to 25d) and the transfer cylinder 28 » As shown in Fig. 5, the lift table 21 has a plurality of (four in the present embodiment) arms 26 (26a to 26d) extending radially outward from the center 21a. The lifting table 21 prevents deformation of the workpiece 3 held by the grip claws 23 and the suction portion 25. A plurality of (four in the present embodiment) gripping claws 23 (23a to 23d) (a plurality of gripping portions) are held in a horizontal posture and The outer edge portion 4a of the workpiece 3 (more specifically, the cutting ring 4) is changed between the standing postures. As shown in FIGS. 4 and 5, each of the grip claws 23 (23a to 23d) is provided in the corresponding branch. The arms 26 (26a to 26d) are adjacent to the front end 27 (27a to 27d). Here, as shown in Fig. 4, the vicinity of the upper ends of the respective positioning handles I3 (13a to 13d) (for convenience of illustration, only the positioning handle 13b is shown. Therefore, even if the positioning handles 13 (13a to 13d) are positioned to retract the workpiece 3, the positioning handles 13 (13a to 13d) are also advanced. It interferes with the corresponding grip claws 23 (23a to 23d) and the suction portions 25 (25a to 25d). Further, when the positioning handles 13 (13a to 13d) are used to set the position of the workpiece 3 to a desired range, When the positioning is performed, the workpiece 3 is surrounded by the respective grip claws 23 (23a to 23d). I56492.doc • 13· 201208962 A plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) and the respective grip claws 23 ( 23a to 23d) are provided correspondingly, and the outer edge portion 4a of the workpiece 3 (more specifically, the cutting ring 4) is adsorbed. Therefore, after the plurality of positioning handles 13 (13a to 13d) are positioned, the workpiece 3 is sucked by the plurality of adsorption portions 25 (25a to 25d), thereby being held by the plurality of support portions 11 (11a to 11d). The workpiece 3 is handed over to the interface 20. In this manner, each of the grip claws 23 (23a to 23d) and each of the adsorption portions 25 (25a to 25d) hold and adsorb the cutting ring 4. That is, the brittle material substrate 7 is not held or adsorbed by the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d). Therefore, the delivery portion 20 and the swing portion 3 can perform the holding and changing posture of the workpiece 3 without affecting the scribe line 8 (see Fig. 3) formed on the brittle material substrate 7. When the workpiece 3 in the standing position is transferred between the delivery unit 2 and the transport unit 50 in the delivery cylinder 28, the workpiece 3 is moved between the delivery unit 20 and the transport unit 50. As shown in Fig. 4, the delivery cylinder 28 includes a main body portion 28a and a tie rod 29. The tie rod 29 is movable forward and backward with respect to the main body portion 28a. As shown in FIG. 4, the front end of the tie rod 29 is fixed to the bottom surface of the lift table 21. Therefore, the workpiece 3 fixed in the upright position on the elevating table 移动 moves between the delivery unit 20 and the transport unit 5〇 in response to the advance or retreat operation of the tie rod 29. The swinging portion 30 swings the transfer portion 20 around the swing axis 31, thereby changing the posture of the workpiece 3 held by the delivery portion 20 between the horizontal posture and the standing posture. As shown in FIGS. 4 and 5, the swing portion 30 mainly includes a swing shaft 31, a swing frame 32, and a swing cylinder 33. 156492.doc 201208962 The swing shaft 31 is used as a central shaft for swinging the joint portion 20 with respect to the base portion 20a. As shown in FIG. 5, the swing shaft 31 is rotatably supported by the bearings 3A, 3B (axial support), and The bearings 30a, 30b are respectively fixed to the corresponding brackets 30c, 30d. The swing frame 32 is formed of a plurality of (three in the present embodiment) plate bodies 32a to 324. As shown in Fig. 5, a swing shaft 31 is fixed between the plates 32a and 32A. On the other hand, the transfer cylinder 28 of the delivery portion 2 is fixed to the plate 32b. The swing cylinder 33 is a drive unit that swings the delivery unit 2〇. As shown in Fig. 4, the swing cylinder 33 mainly includes a main body portion 33a and a tie rod 34. The tie rod 34 is movable forward and backward with respect to the main body portion 33a. As shown in FIGS. 4 and 5, the main body portion 33a is fixed to the base portion 2 of the delivery portion 2, for example, the front end of the tie rod 34 is fixed to the plate body 32a of the swing frame 32. Therefore, when the tie rod 34 advances from the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the horizontal direction (four) to the standing posture. On the other hand, when the tie rod 34 retreats to the main body portion 33 & the posture of the workpiece 3 held by the grip claw and the suction portion 25 is changed from the upright position to the horizontal posture. The pressing portion 35 adjusts the load applied to the workpiece 3 from the fixing mechanism 6 of the conveying unit 5A. Thereby, the fixing mechanism 60 performs an operation of fixing the workpiece 3 that has been transferred from the delivery unit 2 to the transport unit 50, and an operation of releasing the fixed state of the workpiece 3. As shown in Figs. 4 and 5, the pressing portion 35 mainly includes a mounting frame 35a, a plurality of brackets 36 (36a to 36d), and a plurality of pressing cylinders 37 (37a to 37d). 156492.doc 201208962 The mounting frame 35a and the plurality of brackets 36 (36a to 36d) are for fixing the plurality of pressing cylinders 37 (37a to 37d) to the change posture unit 10. As shown in FIGS. 2 and 4, the mounting frame 35a is formed in a frame shape and fixed to the base portion 2a. Further, as shown in FIG. 2, a plurality of (four in the present embodiment) brackets 36 (36a to 36d) extend from the vertical plate of the mounting frame 35a along the transport direction of the transport unit 50 (arrow AR1 direction). The mounting plate. The plurality of pressing cylinders 37 (37a to 37d) respectively compress the corresponding pressing members 73 (*73a to 73d, see Fig. 7). As shown in Figs. 4 and 5, each of the pressing cylinders 37 (37a to 37d) mainly includes a plurality of tie rods 38 (38a to 38d) and a plurality of rollers 39 (39a to 39d). A plurality of (four in the present embodiment) tie rods 38 (38a to 38d) are respectively provided to be able to advance and retreat in the direction of the arrow AR2. Further, corresponding rollers 39 (393 to 39 (1) are attached to the front ends of the respective rods 38 (3 8 & ~ 3 8 (1). Therefore, when the respective rods 38 (38a to 38d) are advanced, the corresponding rollers 39 (39a to 39d) abuts against each of the pressing members 73 (73a to 73d, see Fig. 7), whereby the pressing members 73 (73a to 73d) are compressed. On the other hand, 'when each of the rods 38 (38a) When the hinges 39 to 39d are retracted, the corresponding rollers 39 (39a to 39d) are separated from the respective pressing members 73 (73a to 73d, see Fig. 7), whereby the compressed state of the pressing members 73 (73a to 73d) is released. A plurality of (four in the present embodiment) rolls 39 (39a to 39d) are rotating bodies provided at the tips of the corresponding tie rods 38 (38a to 38d). As shown in Fig. 5, each of the rolls 39 (39 & 39) (1) It is provided so as to be rotatable about a rotation axis extending in the vertical direction (a direction substantially parallel to the two axes and substantially perpendicular to the direction of the arrow AR1). 156492.doc 16 201208962 Therefore, at each roller 39 ( When 39a to 39d) are in contact with the corresponding pressing member 73 (73a to 73(1), when the conveying unit 5 moves in the conveying direction (arrow ari direction), each of the rollers 39 (39a to 39d) is as follows Action Each of the rollers 39-- compresses the corresponding pressing members 73 (73a to 73d) and rotates in the conveying direction on the corresponding pressing members 73 (73a to 73d). Therefore, the conveying unit 50 can maintain the respective rollers 39 ( 39a to 39d) are compressed and moved in the transport direction. As a result, even when the transport unit 5 is moved relative to the change posture unit 1A and the main unit 40 (fixed side unit), the workpiece 3 can be maintained and fixed. State. μ <3. Configuration of transport unit> Figs. 6 and 7 are a front view and a rear view showing an example of the configuration of the transport unit 5A. Fig. 8 is a front view showing an example of the configuration of the movable holding portions 61 (61a to 6ie). Fig. 9 is a cross-sectional view showing the vicinity of the guide claw 69 (69 &) viewed from the line kV_v. Fig. 10 is a cross-sectional view showing the vicinity of the guide claw 69 (_) viewed from the W-W line of Fig. 7. Here, the transport unit 50 is in contact with the outer edge portion 保持 of the holding workpiece 3, and between the breaking position p2() of the breaking unit_breaking of the brittle material substrate 7 at the delivery position p where the workpiece 3 is accepted and accepted. By transporting the workpiece 3° in the standing position, it is possible to suppress the installation area of the transport unit 5 including the transport path (that is, the size of the transport area of the transport unit 50. Therefore, the size of the board breaking device I is as shown in Fig. 6 As shown in Fig. 7, the transport unit 5G mainly includes a fixed center and a rotary port 52. Here, the transport unit 5 of the present embodiment is so as to be able to be opposed by a linear motor as shown in the example I56492.doc • 17·201208962 The shift posture unit 1A, the main body unit 40, the non-contact holding unit 8A, etc. are moved. The turntable 52 is a disk-shaped rotating portion that rotates relative to the fixed table 51. As shown in Figs. 6 and 7, the rotary table 52 The rotation base 52 has a fixing mechanism 60 for fixing the workpiece 3, and the rotation mechanism 52 has a fixing mechanism 60 for fixing the workpiece 3. Further, the configuration of the fixing mechanism 6A will be described later. Station 5 1 used as security For example, a rotating element for rotating the rotary table 52 and a mounting portion for advancing the fixed table 51 and the rotary table 52 with respect to the main unit 40. As shown in FIGS. 6 and 7, the fixed table 51 mainly includes The guide block 55, the motor 56, and the belt 57. As shown in Fig. 6, a plurality of (six in the present embodiment) guide blocks 55 are provided on the front surface 51b of the fixed table 51. The balls (not shown) are provided to be rotatable. When the guide blocks are attached to the corresponding guides 43 and 44, the balls (not shown) in the respective guide blocks 55 are rotatable and correspondingly guided. The members 43 and 44 are in contact with each other. Thereby, when the respective guide blocks 55 are moved along the corresponding guides 43 and 44 (that is, in the transport direction (arrow AR1 direction)), the balls in the respective guide blocks 55 (not shown) The rotation of the corresponding guides 43 and 44 is performed. Therefore, the fixed table 5丨 can smoothly travel along the guides 43 and 44. The motor 56 is a drive unit that imparts a rotational force to the rotary table 52. The belt is rotated by the motor 56. The force is transmitted to the rotary table 52. As shown in Fig. 6, the belt 57 is wound around the rotary table. 52. And the motor pulley 58 attached to the motor batch rotating shaft 5 at the front end. When the motor 56 rotates, the workpiece 3 fixed to the fixing machine 156492.doc 201208962 is rotated. The tension adjusting pulley 59 is adjusted and given. In the present embodiment, the position of the tension adjusting pulley 59 (for example, the position in the z-axis direction) is adjusted by a positioning mechanism (not shown), whereby the slack of the belt 57 can be easily eliminated. Further, the tension of the belt 57 can be easily adjusted. Therefore, the rotation state of the rotary table 52 can be favorably maintained. <3.1. Configuration of Fixing Mechanism> The fixing mechanism 60 fixes the flat workpiece 3 in the standing posture. As shown in Figs. 6 and 7, the fixing mechanism 6'' mainly includes a plurality of holding portions 61 (61 to 61c), 62, and a plurality of pressing portions 71. The plurality of holding portions 61 (61a to 61c) and 62 are disposed between the outer edge portions 4a of the workpiece 3 disposed between the pressing portions 71. As shown in FIG. 7, a plurality of holding portions 6j (61a to 61C) and 62 are provided along the pressing frame 72, respectively. In the following description, the nip portion of the s main symbol 61 (61 a to 61 c) is referred to as a "movable nip portion", and the nip portion indicated by reference numeral 62 is referred to as a "fixed grip portion". That is, the plurality of gripping portions include a plurality of movable grip portions 61 (61a to 61c) and a fixed grip portion 62. In other words, one of the plurality of gripping portions is a plurality of movable grip portions 61 (61a to 61c). The remaining portion of the plurality of grip portions is the fixed grip portion 62. A plurality of (three in the present embodiment) movable gripping portions 61 (61a to 61c) advance and retreat in a direction approaching or departing from the pressing frame 72, respectively. 7 and 8, the movable gripping portions 61 (61a to 61c) mainly include an abutting portion 63, a rotating plate 64, a pressing member 66, and a movable guiding member 67 (67 & 156492.doc -19-201208962 (69a to 69c) β Here, the movable holding portions 61 a to 6 lc have the same hard body configuration β. Therefore, only the hardware configuration of the movable holding portion 61a will be described below. The abutting portion 63 is formed of, for example, a metal-shaped spherical body and is attached to the rotating plate 64. The rotating plate 64 is a plate body that rotates around the rotating shaft 64a. For example, the rocker of the rotary actuator 41 (41a) 42 (42a) (refer to FIG. 1 and FIG. 2) When the swinging rocker 42 (42a) abuts against the abutting portion 63 of the corresponding clamping portion 61 (61a), the rotating plate 64 is centered on the rotating shaft 64a. The connecting rod 65 is a plate body having a narrow width connecting the rotating plate 64 and the movable guiding member 67 (67a). One end of the connecting rod 65 is coupled with the rotating plate 64 by the rotating shaft 65a, and the connecting rod 65 The other end is coupled to the movable guide 67 (67a) by a rotating shaft 65b. The pressing member 66 is formed of an elastic member such as a spring. As shown in Fig. 8, one end 66a of the pressing member 66 is shown. The other end 66b of the pressing member 66 is fixed to the reinforcing plate 64b on the fixed side. Thereby, if the rotating plate 64 is rotated in the direction of the arrow R1, the pressing member 66 is directed to the rotating plate 64. The movable guide 67 (67a) is a flat movable member. The movable guide 67 advances and retreats in a direction approaching or away from the pressing frame 72, thereby adjusting the fixing of the workpiece 3. That is, when the rocker 42 (42a) is swung by the rotary actuator 41 (41a) to rotate the rotating plate 64 in the direction of the arrow R1, the movable guide 67 (67a) moves away from the pressing frame 72. Thereby, the movable guide 67 (67a) is in the clamp release state. 156492.doc • 20-201208962 On the other hand, when the rotary lever 42 (42 &) is rotated by the rotary actuator 41 (41a), When the position of the pressure member 64 is rotated in the direction opposite to the direction of the arrow R1, the movable guide 67 (67a) is approached; the movement is moved in the direction of the frame 72. Thereby, the movable guide 67 ( 67&) becomes a state in which it can hold the workpiece 3 with the pressing frame 72. Thus, the ° is placed in the main body unit 40. The plurality of rotary actuators 41 (41a to ) are used for driving. 卩 (first driving unit), a plurality of clamping portions 61 (61 a to 61C), and a portion of 62 (a plurality of movable clamping portions) 61a to 61c) advance and retreat in a direction approaching or departing from the pressing frame 72. As shown in Fig. 8, the notch 60a is formed in a notch on the side of the pressing frame 72 of the movable guide 67. When the workpiece 3 is transferred between the transfer unit 2A of the unit 1 and the transfer unit 5A, the grip claws 23 (23a) can be disposed in a space (for example, the gap 75 (75a)) formed by the notch 6〇a (refer to FIG. 8). And Figure 11 to Figure 13). Therefore, when the workpiece 3 is delivered, the grip claws 23 (23a) can be effectively prevented from interfering with the movable guides 67 (67a). A plurality of (two in the present embodiment) guide claws 69 (69a) cooperate with the movable guide 67 (67a) and the pressing frame 72 to sandwich the workpiece 3. As shown in Fig. 8, the guide claw 69 (69a) is attached to the movable guide 67 (67a) in a direction away from the outline of the opposing pressing frame 72. Further, as shown in Fig. 9, the guide claw 69 (69a) is attached to the movable body so as to guide the pawl _9a) to the lower end of the lower end surface of the guide member 67 (67a). On the guide 67 (67a). Therefore, as shown in Figure 9, by the lower end of the movable guide 67 (67a), the step surface 60b of the guiding claw 69 (69a) and the opposing surface 6〇d of the pressing frame 72 and the workpiece I56492. Doc 201208962 3 contacts, and the clamping of the workpiece 3 by the movable clamping portion 61 (61a) and the pressing portion 71 is realized. As shown in FIG. 7, the fixed clamping portion 62 is fixed near the pressing frame 72. As shown in Fig. 7, the fixed holding portion 62 mainly includes a fixing guide 68 and a guiding claw 69 (69d). The fixing guide 68 is a flat fixing member. That is, the fixed guide 68 is different from the movable guide 67 (67a to 67c) in that it does not advance or retreat in a direction approaching or departing from the pressing frame 72, but is fixed to the rotary table 52. The positioning of the workpiece 3 relative to the fixing mechanism 60 is easily performed on the basis of the position of the holding portion 62. Therefore, the workpiece 3 can be satisfactorily gripped and clamped by using the plurality of movable grip portions 61 (61a to 61c) and the fixed grip portion 62. As shown in Fig. 7, the notch 68a is formed in a recess on the side of the pressing frame 72 of the fixed guide 68. Here, when the workpiece 3 is transferred between the transfer portion 2A of the change posture unit 1A and the transfer unit 50, the grip claws 23 (23d) can be disposed in a space (for example, the gap 75 (75d)) formed by the notches 68a. (Refer to Figure 7 and Figure 丨丨 to Figure 3). Therefore, when the workpiece 3 is transferred, it is possible to effectively prevent the grip claws 23 (23d) from interfering with the fixed guides 68. The plurality of (two in the present embodiment) guide claws 69 (69d) and the fixed guides 68 and the squeeze The press frames 72 cooperate to grip the workpiece 3. As shown in Fig. 7, the guide claws 69 (69d) are mounted on the fixed guide 68 in the direction of the direction of the wheel of the opposing squeezing frame 72. Further, as shown in Fig. 1G, the guide claw 69 (69d) is mounted in such a manner that the step surface 60b of the guide claw 69 (69d) is located closer to the side of the pressing frame 72 than the side end surface (10) of the fixed guide 68. On the fixed guide 68. 156492.doc -22· 201208962 Therefore, as shown in FIG. 9, the side surface 68b of the fixed guide 68, the step surface 6〇b of the guiding claw 69 (69d), and the opposite surface 60d of the pressing frame 72 are provided. The workpiece 3 is brought into contact with the workpiece 3 to effect the clamping of the workpiece 3 by the fixed clamping portion 62 and the pressing portion 71. The pressing portion 71 presses the workpiece 3 between the movable holding portion 6i (61a to 61c) and the fixed holding portion 62 to press the outer edge portion 4a of the workpiece 3. As shown in FIG. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of pressing members 73 (73a to 73d). As shown in FIGS. 6 and 7, the pressing frame 72 is formed in a ring shape (more specifically. It is a rectangular ring shape and is mounted near the center of the rotary table 52. As shown in FIG. 9 and FIG. 1A, the pressing frame 72 presses the outer edge portion 4a of the workpiece 3 from the second main surface 3b side of the workpiece 3. A plurality of (four in the present embodiment) pressing members 73 (73a to 73d) is formed of an elastic member such as a spring. As shown in FIG. 7, each of the pressing members 73 (73a to 73d) is coupled to a corresponding one of the four corners of the pressing frame 72. Here, each of the pressing members 73 (73a to 73d) receives the direction from the front side of the paper surface of FIG. 7 toward the back side from the corresponding pressing cylinders 37 (37a to 37d) (see FIGS. 4 and 5) (ie, The pressing members 73 (73a to 73d) are compressed by the force in the direction opposite to the direction of the arrow AR2. In other words, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions (second driving portions) for applying a compressive force to the corresponding pressing members 73 (73a to 73d). On the other hand, when the tie rods 38 (38a to 38d) are retracted and the rollers 39 (39a to 39d) are separated from the corresponding pressing members 73 (73a to 73d), the pressing members 73 (73a to 73d) are pressed against each other. 72 applies pressure to the direction of the arrow AR2 (pressure direction). Thereby, the workpiece 3 is pressed by the movable clamping portion 61 (6la to 61c) and the fixed clamping portion 62 by the pressing force 156492.doc • 23·201208962 from the pressing members 73 (73a to 73d). Block 72 is clamped. As a result, the workpiece 3 is fixed to the fixing mechanism 60. Thus, the fixed state of the workpiece 3 on the fixing mechanism 60 is changed by the pressing cylinders 37 (37a to 37d) (second driving portion) and the main body of the changing posture unit 10. The rotation actuators 41 (4 la to 41 c) (the first drive unit) of the unit 4 are adjusted. That is, the fixing mechanism 60 of the conveying unit 50, the pressing cylinder 37 (37 a to 37 d) of the posture changing unit 1 , and the rotary actuator 41 (41 a to 4 lc ) of the main unit 40 The fixing of the workpiece 3 to be transported is performed. Therefore, in the present embodiment, the conversion posture unit 1A, the main body unit 40, and the transport unit 50 are also collectively referred to as a "transport system". <3·2·Fixing Method of Workpiece> Figs. 11 to 13 are views for explaining a step of fixing the workpiece 3 by the fixing mechanism 6 and a step of releasing the fixing step. Here, the procedure of fixing the workpiece 3 in the standing posture to the fixing mechanism 60 will be described. Further, the step of a setting is realized by the control unit 9 controlling the operations of the elements included in the transformation posture unit 1 , the main unit 40, and the transport unit 5 . Further, before the start of the main fixing step, the transport unit 5 is moved to the release position P11 (see Fig. 2) of the transfer position ,), and the workpiece 3 is sucked and held by each of the adsorption units 25 (25a to 25d). In the formal fixing step, the swinging portion 3 is first used. Move the joint (swing). Thereby, the workpiece 3 held by the delivery unit 2A is placed in an upright position and moved to the vicinity of the fixing mechanism 6A of the transport unit 50. Next, a plurality of rotary actuators 41 156492.doc 24·201208962 (41a to 41c) (see FIG. 2) provided in the main unit 4A are operated, and the respective rockers 42 (42a to 42c) are swung. Thereby, the movable guides 67 (67a to 67c) of the movable gripping portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72. Then, the plurality of pressing cylinders 37 (37a to 37d) are operated, and the respective levers 38 (38a to 38d) are advanced from the cylinder main body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is directed to the pressing members 73 (73a to 73d) (direction of the arrow AR2). Move in the opposite direction. Then, the transport unit 50 is moved from the release position P11 of the delivery position P10 to the fixed position P12 (see Figs. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the front ends of the respective pressing cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d), and at the pressing members 73 (73a to 73d) ) Rotate on. Therefore, the transport unit 50 moves in the transport direction in a state where the press frame 72 has been separated from the workpiece 3. Then, in a state where the pressing frame 72 has been separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b of the fixed guide 68 (Fig. 10), and then the outer edge portion 4a of the workpiece 3 is abutted. In the state in which the side end surface 68b (Fig. 10) of the fixed guide 68 is attached, the rotary actuators 41 (4la to 41c) are operated, and the corresponding rockers 42 (42a to 42c) are returned to the position before the swing. Thereby, the movable guides 67 (67a to 67c) of the respective movable holding portions 61 (61a to 61c) move in the direction close to the pressing frame 72. Therefore, the outer edge portion 4a of the workpiece 3 is brought into contact with each of the movable guides 67 (67a to 67c). Then, in the state in which the outer edge portion 4a of the workpiece 3 abuts against each of the movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, the respective pressing cylinders 37 (37a to 156492.doc -25) are provided. - 201208962 37d) Act so that each of the tie rods 38 (38a to 38d) is retracted. Thereby, the compression force is applied to the corresponding pressing members 73 (73a to 73d) by the respective pressing cylinders 37 (37a to 37d), and the pressing frame 72 presses the pressing members 73. Move in direction. Then, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is narrowed. Therefore, the workpiece 3 is lost between the movable holding portions 61 (61a to 61c) and the fixed holding portion 62 and the pressing portion 71, and the workpiece 3 in the standing posture is fixed by the fixing mechanism 6. That is, according to the formal fixing step, the workpiece 3 in the standing posture can be satisfactorily fixed to the fixing mechanism 60. Then, in a state where the workpiece 3 is fixed by the fixing mechanism 6 ,, the adsorption state of each of the absorbing portions 25 (2Sa to 25d) is released. Thereby, the holding state of the workpiece 3 by the delivery portion 2 is released, and the fixing step of the workpiece 3 is completed. <3.3. Method of releasing the workpiece> Here, the step of releasing the workpiece 3 in the upright position by the fixing mechanism 60 will be described with reference to Figs. 9 to 13 . Further, the β-Hui release step is realized in the same manner as the fixing step of the workpiece 3 by the operation of the control unit 9' to convert the posture unit 10, the main body unit (four), and the elements included in the transport unit 50. Further, before the start of the formal release step, the transport unit 5G is moved to the fixed position P12 for transfer (see Fig. 2), and the workpiece 3 is fixed by the fixing mechanism 6?. In the main release step, the workpiece 3 fixed by the fixing mechanism 60 is first adsorbed by the respective adsorption portions 25 (25a to 25d) of I56492.doc -26-201208962. Thereby, the workpiece 3 is held by the delivery portion 20 in a state of being fixed to the fixed mechanism 60. Next, in a state where the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable holding portions 61 (61a to 61c) and the fixed nip portion 62, a plurality of pressing cylinders 37 (37a to 37d) are formed ( The second drive unit operates to advance the respective rods 38 (38a to 38d) from the cylinder body. Thus, the respective pressing members 7; 3 (73a to 73d) are compressed by the corresponding rollers 39 (39a to 39d) to press the pressing frame 72 toward the pressing members 73 (73a to 73d) (arrows) The AR2 direction is moved in the opposite direction. Further, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide Μ and the opposing surface 60d of the pressing frame 72 is enlarged. Therefore, the fixing mechanism 6 固定 the fixing of the workpiece 3 to the standing posture is released. The workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d) of the delivery portion 20. Thus, the respective pressing cylinders 37 (37a to 37d) of the pressing portion 35 compress the corresponding pressing members 73 (73a to 73d), whereby the fixed state of the workpiece 3 can be released. Then, in a state where the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61 a to 61 c) and the fixed clamping portion 62, a plurality of rotary actuators 41 (41a to 41c) are caused. The (first driving unit) operates to swing the respective rockers 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72. Then, the transport unit 50 is moved from the fixed position P12 of the transfer position Pi〇 to the release position P11 (see Figs. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective pressing cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d) and on the pressing members 73 (73a to 73d). Rotate. Therefore, the transport unit 156492.doc • 27·201208962 unit 50 moves in the transport direction with the press frame 72 removed from the workpiece 3. Further, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 is separated from the side end surface 68b (Fig. 10) of the fixed guide 68. Thus, according to the official release step, the fixed state of the workpiece 3 fixed by the fixing mechanism 6A can be satisfactorily released. Then, the transfer portion 20 is moved (oscillated) by the swing portion 30, whereby the workpiece 3 held by the delivery portion 20 is separated from the fixing mechanism 6 of the transport unit 50. Further, after the workpiece 3 is separated from the fixing mechanism 60, the levers 38 (38a to 38d) of the plurality of pressing cylinders 37 (37a to 37d) are retracted, whereby the pressing frame 72 is pressed (direction of the arrow AR2). Moving, the unfixing step of the workpiece 3 is completed. <4. Configuration of Non-contact Holding Unit> Fig. 14 is a front view showing an example of the configuration of the non-contact holding unit 80. Here, the non-contact holding unit 80 assists the non-contact holding of the first main surface 3a of the workpiece 3 which is held and held by the transport unit 50 as described above. As shown in Fig. 14, the non-contact holding unit 80 mainly includes a mounting base 81, a plurality of first suction portions 83, and a plurality of second suction portions 84. Here, in the present embodiment, the "first suction portion" of the symbol 83 and the "second suction portion 84" of the symbol 84 are collectively referred to as "suction portion". That is, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84. The mounting table 81 is disposed to face the transport unit 50 that has traveled to the breaking position P20. As shown in FIG. 2, the mounting table 81 is fixed to the main body unit 40. Further, as shown in Figs. 1 and 14, the vertical surface 81a of the mounting table 81 serves as a mounting surface for mounting a plurality of first suction portions 83 and a plurality of second suction portions 84. The insertion hole 8 lb is a through hole extending in the vertical direction (parallel to the z-axis) 156492.doc -28·201208962, and is formed near the center of the mounting table 81. The first breaking bar 86 reaches the first main surface 3a of the workpiece 3 via the insertion hole 81 b. As shown in FIGS. 1 and 14, a plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the vertical surface 81a of the mounting table 81. The plurality of suction portions attract the first main surface 3a of the workpiece 3 that is in the upright position, thereby holding the workpiece 3 in a non-contact state. Here, in the present embodiment, a Bernoulli chuck can be used as the plurality of first suction portions 83 and the plurality of second suction portions 84. As shown in FIG. 14, a plurality of (12 in the present embodiment) first suction portions 83 are provided on the mounting table 81 in a state along both sides in the longitudinal direction of the insertion hole 81b formed in the mounting table 81. The vertical surface 81 a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, the workpiece 3 can be held in a non-contact state by sucking the opposing workpieces 3 by the respective first suction portions 83. As shown in FIG. 14, a plurality of (12 in the present embodiment) second attracting portions 84 are provided. In a state in which a plurality of first suction portions 83 are sandwiched from both sides, they are provided on the vertical surface 81a of the mounting table 81. Each of the second suction portions 84 is composed of, for example, a Bernoulli suction cup, similarly to the first suction portion 83. As a result, each of the second suction portions 84 attracts the workpiece 3 in the same direction as the first suction portion 83, whereby the workpiece 3 can be held in a non-contact state. Here, as shown in Fig. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 84. Further, as shown in FIG. 14, the interval D1 (first interval) between the adjacent first suction portions 83 of the plurality of first suction portions 83 is smaller than the second attraction adjacent to the plurality of second suction portions 84. The portions 84 are spaced apart from each other by D2 (second interval). 156492.doc -29·201208962 In this manner, the plurality of first attracting portions 83 are arranged more densely than the plurality of second attracting portions 84. Thereby, the workpiece 3 (in other words, the workpiece 3 in the vicinity of the first breaking bar 86) in the vicinity of the insertion hole 81b can be more reliably held in contact. Therefore, the breaking of the brittle material substrate 7 can be performed satisfactorily. <5. Configuration of Breaking Unit> Fig. 15 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking unit 85 divides the brittle material substrate 7 which is held in the holding state by the conveying unit 50 and the non-contact holding unit 8〇 along the scribe line 8. As shown in Fig. 15, the breaking unit 85 mainly includes a first breaking bar 86 and a plurality of second breaking bars 87. The first breaking bar 86 advances and retreats so as to reach the side of the conveying unit 50 via the insertion hole 8 lb. As shown in FIGS. 14 and 15 , the first breaking bar 86 is inserted in one direction along the insertion hole 81 b of the mounting table 81 (inserted The longitudinal direction of the hole 81b and the z-axis direction (hereinafter simply referred to as "extension direction") extend. A plurality of (two in the present embodiment) second split bars 87 sandwich the workpiece 3 held by the transport unit 50 and are disposed on the opposite side of the first splitter bar 86. Each of the second breaking bars 87 extends in a direction (Z-axis direction) parallel to the first breaking bars 86. Here, as shown in Fig. 15, the plurality of second breaking bars 87 in the conveying direction (the direction of the arrow AR1) are disposed only by the desired distance D3. Further, as shown in FIG. 15, the second breaking bar 87, the first breaking bar 86, and the second breaking bar 87 are sequentially oriented in the direction from the delivery position P10 toward the breaking position P20 (the negative direction of the Y axis). Configuration. Further, the first breaking bar 86 is from the side of the first main surface 3a on the opposite side to the second main surface 3b on which the scribe line 8 is formed (in this case, the first breaking bar 86 abuts against the dicing sheet 5) The load is given along the scribe line 8. 156492.doc -30·201208962 That is, the load is applied to the scribe line 8 from the second principal surface 3a opposite to the second main surface 3b on which the scribe line 8 is formed. Therefore, the breaking of the brittle material substrate 7 along the scribe line 8 can be performed satisfactorily and reliably. The first forward/reverse drive unit 86a advances and retreats the first breaking lever 86 in the advancing and retracting direction (in the direction of the arrow AR6, see Fig. 15) by the driving force of the breaking lever. For example, the first advance/retract drive unit 86a moves the branch bar "in the negative direction of (10) in a state in which the extension direction of the third breaking lever 86 is substantially parallel to the scribe line 8, thereby bringing the first breaking bar 86 close to The i-th main surface 3a of the brittle material substrate 7. The second advancing and driving unit 87a pushes the plurality of second breaking bars 87 in the advancing and retracting direction by the driving force of the plurality of second breaking bars (four). For example, the second forward/backward drive unit moves the plurality of first broken bars 87 in the positive X direction while the extending direction of the plurality of second breaking bars 87 is substantially parallel to the scribe line 8 In this way, the plurality of second breaking bars 87 are brought close to the second main surface 3b of the brittle material substrate 7. The second and second breaking bars 86 87 are advanced and retracted by the first and second advancing and retracting driving portions 86a and 87a. Then, the brittle material substrate 7 is sandwiched by the second and second breaking bars 86 and 87. As a result, the brittle material substrate 7 in the standing posture is divided along the scribe line 8. That is, the substrate breaking device is used. In the breaking process of execution, the first and second blade breaking bars 86 and 87 are close to the direction of the brittle material substrate 7 (the direction of the advance and retreat (arrow AR6) The))) is substantially perpendicular to the direction of gravity (the negative direction of the two axes). Therefore, the influence of gravity on the ! and the second breaking bars 86, 87 is the same. Therefore, there is no product for the first and second breaking bars 86, Each of the 87 measures can be used to reduce the influence of gravity to break the brittle material substrate 7. I56492.doc •31 · 201208962 <6. Advantages of the substrate breaking device of the present embodiment> As described above, in the substrate cutting device of the present embodiment, when the brittle material substrate 7 is held by the transport unit 50 (holding unit), the i-th and The second breaking bars 86 and 87 are disposed on the two main faces 3a' to 3b side of the brittle material substrate 7 held in the standing posture. Here, unlike the present embodiment, the j-th and the second-breaking bars are disposed above and below the brittle material substrate, and the second and second breaking bars are respectively from the upper side and the lower side of the brittle material substrate. The side is close. In this case, the angle between the first and second breaking bars in the direction close to the brittle material substrate and the gravity direction are about 〇 (deg) and 180 (deg), respectively. That is, gravity has different effects on the first and second split bars. As a result, when any adjustment is not made to the influence of gravity, there is a problem in that the load applied to the substrate of the brittle material from the first and second breaking bars is different. Next, according to the present embodiment, the i-th and second breaking bars 86 and 87 are brought close to each other on the two main faces 3a and 3b of the brittle material substrate 7 held in the standing posture. In this case, the first! And the angle between the direction of the second breaking bar 86, 87 close to the brittle material substrate 7 and the direction of gravity is about . Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, the brittle material substrate 7 can be satisfactorily cut without taking measures for reducing the influence of gravity for each of the first and second breaking bars 86, 87. Further, according to the substrate cutting device 1 of the present embodiment and the fixing mechanism 60', the outer edge portion 4a of the workpiece 3 is well sandwiched by the movable misalignment portion 61 (6la to 61c) and the fixed clamping portion 62 and the pressing portion 71. hold. Therefore, the workpiece 3 of the standing position 156492.doc -32-201208962 can be well fixed. Further, in the substrate cutting device 本 and the conversion posture unit 10 of the present embodiment, the fixing mechanism 60 of the transport unit 50 performs the fixing of the workpiece 3 and the workpiece 3 by the load applied from the pressing portion 35 of the change posture unit. Unfixed. In other words, the transport unit 50 does not need to perform the fixation of the workpiece 3 and the release of the work 3, and it is not necessary to arrange the piping and the wiring related to the element on the moving side (the transport unit 50) and the fixed side (for example, Change between posture units 1〇, etc.). Therefore, by using the change posture unit 1〇, it is possible to improve the safety of the transport unit at the time of traveling and the efficiency of the work. Further, in the transport system realized by the substrate cutting device of the present embodiment, a plurality of rotary actuators 41 (41a to 41c) Ui are provided from the main body unit 40 and the change posture unit (7) (fixed side unit). The driving force of the driving unit) and the plurality of pressing cylinders 37 (37a to 37d) (second driving unit) perform fixing of the workpiece 3 and release and fixing of the workpiece 3. In other words, the transport unit 50 does not need to be configured to perform the fixing of the workpiece 3 and the driving of the workpiece (the i-th and the second driving unit), and it is not necessary to arrange the piping and the wiring related to the element on the moving side (transport) The unit 5〇) is interposed between the fixed side (the transformation posture unit 1〇 and the main body unit 4〇). Therefore, the safety of the transport unit 50 during traveling and the work efficiency of the worker during maintenance can be improved. Further, the substrate cutting device 本 of the present embodiment and the holding device realized by the substrate breaking device 1 are not only The fixing mechanism 6 of the conveying unit 50 contacts and holds the outer edge portion 4a of the workpiece 3, and the main surface of the workpiece 3 (more specifically, the first main surface) can also be held by the non-contact holding unit I56492.doc -33-201208962 3 a) Non-contact retention. Therefore, even if the outer edge portion 4 & other than the workpiece 3 (for example, the main faces 3a, 3b of the workpiece) cannot be contacted and held by the characteristics of the workpiece 3, the conveying unit 50 (holding unit) and The workpiece 3 is well held by the non-contact holding unit 8〇. <7. Modifications> The embodiments of the present invention have been described above. However, the present invention is not limited to the above embodiments, and various modifications can be made. (1) In the present embodiment, the movable guides 67 (67a to 67c) and the guide claws 69 (69a to 69c) are configured to be independent of each other as shown in Figs. 8 and 9, but are not limited thereto. For example, the movable guide 67 (67a) and the guide claw 69 (69a) may be integrally formed. (2) In the present embodiment, the transport unit 5 is described as being moved relative to the change posture unit 10 and the main unit 40, but the present invention is not limited thereto. For example, the transformation posture unit 10 and the main body unit 4A may be moved relative to the transport unit 50. As described above, the movement mode of each of the units 10, 40, and 50 may be such that the transport unit 5 is relatively moved with respect to the change posture unit 10 and the main unit unit 40 (fixed side unit). (3) In the present embodiment, the workpiece confirmation sensor 15 (see Figs. 4 and 5) of the conversion posture unit 1 is provided only in the vicinity of the elevation table 21, and the number of the workpiece confirmation sensors 15 is extended. It is not limited to this. A plurality of (two or more) workpiece confirmation sensors 丨5 may be provided in the vicinity of the elevation table 21. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view showing an example of a configuration of a substrate cutting device according to an embodiment of the present invention; and FIG. 2 is a view showing a substrate breaking device according to an embodiment of the present invention; 3 is a front view showing an example of a configuration of a workpiece; FIG. 4 is a side view showing an example of a configuration of a transformation posture unit; and FIG. 5 is a plan view showing an example of a configuration of a transformation posture unit; ό is a front view showing an example of a configuration of a transport unit; Fig. 7 is a rear view showing an example of a configuration of a transport unit; Fig. 8 is a front view showing an example of a configuration of a movable nip; Fig. 9 is a view from line VV of Fig. 8. Fig. 1 is a cross-sectional view of the vicinity of the guiding claw viewed from the WW line of Fig. 7; Fig. U is a view for explaining the fixing step of the fixing mechanism to the workpiece and the step of releasing the fixing step; The 12 series is used for the fixing step of the fixing mechanism to the workpiece and the view after the fixing step is removed; FIG. 13 is a diagram for explaining the fixing steps and solutions of the fixed tweezer mechanism to the workpiece. After the fixation view; FIG. 14 showing the non-contact system to maintain a single view of the prior example of the configuration of the early 70; and FIG. 15 shows the configuration of the breaking unit Department of erbium Hin Γ ^ Λ - A plan of the embodiment of FIG. [Main component symbol description] 3 3a Substrate breaking device workpiece first main surface 156492.doc 35· 201208962 3b second main surface 4 cutting ring 4a outer edge portion 4b opening 5 cutting piece 7 brittle material substrate 8 scribe line 9 electronic parts 10 Change posture unit ll (lla~lid) Support part 12 (12a~12d) Ball 13 (13a~13d) Positioning handle 15 Workpiece confirmation sensor 20 Handover part 20a Base part 21 Lifting table 21a Center 23 (23a~23d) Control Claw 25 (25a to 25d) Adsorption unit 26 (26a to 26d) Arm 27 (27a to 27d) Front end 28 Duty cylinder 28a Main body portion 29 Lever-36. 156492.doc 201208962 30 Swing portion 30a, 30b Bearing 30c, 30d bracket 31 swinging shaft 32 swinging frame 32a to 32c plate 33 swinging cylinder 33a main body portion 34 tie rod 34a front end 35 pressing portion 35a mounting frame 36 (36a to 36d) bracket 37 (37a to 37d) for extrusion Cylinder block 38 (38a to 38d) Pull rod 39 (39a to 39d) Roller 40 Main body unit 41 (41a to 41c) Rotary actuator 42 (42a to 42c) Rocker 43 > 44 piece 50 Transfer unit 51 Fixing table 51a Hole 51b front 156492.doc -37- 201208962 52 rotary table 6 0 fixing mechanism 60a' 68a notch 60b step surface 60c lower end surface 60d opposite surface 61 (61a to 61c), 62 holding portion 63 abutting portion 64 rotating plate 65 connecting rod 66, 73 (73a to 73d) pressing member 67 (67a to 67c) movable guide 68 fixed guide 69 (69a to 69d) guide claw 71 pressing portion 72 pressing frame 75 (75a to 75d) gap 80 non-contact holding unit 81 mounting table 81a, 81b insertion hole 83 1st attraction part 84 2nd attraction part 85 breaking unit 86 1st breaking bar 156492.doc · 38 - 201208962 86a 87 87a 90 91 91a 92 93 AR1, AR2, AR3 D1, D2 P10

Pll P12 P20 第1進退驅動部 第2分斷棒 第2進退驅動部 控制單元 唯讀記憶體 程式 隨機存取記憶體 中央處理單元 箭頭 隔（第1及第2間隔） 交接位置 解除位置 固定位置 分斷位置 156492.doc -39-Pll P12 P20 1st advance and retreat drive unit 2nd break bar 2nd advance and retreat drive unit control unit read-only memory program random access memory central processing unit arrow partition (first and second interval) transfer position release position fixed position Broken position 156492.doc -39-

Claims (1)

201208962 七、申請專利範圍： 1. 一種搬送系統，其特徵在於包含： (a) 固定側單元；及 (b) 搬送單兀，其包含以立起姿勢固定平板狀之工件之 固疋機構，並且使由上述固定機構固定之上述工件相對 於上述固定側單元相對性地移動； 上述搬送單元之上述固定機構包含： 擠壓框，其擠壓上述工件之外緣部； 複數個夾持部，其各自夾持配置於與上述擠壓框之 間之上述工件之上述外緣部；及 細·壓構件，其藉由對上述擠壓框賦予施壓力，而將 上述工件之上述外緣部固定於上述擠壓框與各夾持部之 間； 上述固定側單元包含： (a-Ι)第1驅動部，其使上述複數個夾持部中之一部分 向相對於上述擠壓框接近或離開之方向進退；及 (a-2)第2驅動部，其對上述施壓構件賦予壓縮力β 2.如請求項1之搬送系統，其中 上述第2驅動部包含： 拉幹，其石著由上述施壓構件對上述擠壓框施壓之 施壓方向進退；及 旋轉體，其設置於上述拉桿之前端，擠壓上述施壓 構件並沿著上述搬送單元之搬送方向轉動。 3.如請求項1之搬送系統，其更包含： I56492.doc 201208962 (C)控制單元， 之動作； 其控制上述固定側單元及上述搬送單元 上述固定側單元更包含： (a-3)交接部，其 呈立把达埶 行至水千妾勢之上述工件，並且將 起妾勢之上述卫件交接給上述搬送單元； 上述複數個夾持部包含： 方Γ夾持。卩’其向相對於上述擠屋框接近或離開之 万向進退；及 4. 固定夾持部’其固定於上述擠壓框附近。 如請求項3之搬送系統，其中 之上述工 上述控制單元藉由下述步驟而將呈立起姿勢 件固定於上述固定機構： ⑴藉由使上述交接部移動’而使由上述交接部保持之 亡返工件呈立起姿勢’並且使上述工件移動至上述搬送 單兀之上述固定機構附近； (⑴藉由使上述第丨驅動部動作，而使各可動夾持部向 自上述擠壓框離開之方向移動； (Hi)藉由使上述第2驅動部動作，而使上述擠壓框向與 上述施壓方向相反之方向移動； (1V)使上述固定夾持部相對於被保持於上述交接部之 上述工件而相對性地移動，從而將上述工件之上述外緣 部抵接於上述固定夾持部； (v)於上述工件之上述外緣部抵接於上述固定夾持部之 狀態下，使上述第1驅動部動作，由此使各可動夾持部 156492.doc 201208962 向接近於上述擠壓框之方向移動，並且將上述工件之上 述外緣部抵接於各可動夾持部； (VI) 於上述工件之上述外緣部抵接於上述複數個可動 爽持部及上述固定失持部之狀態下，使上述第2驅動部 動作’由此使上述擠壓框向上述施壓方向移動，使立起 姿勢之上述工件由上述固定機構固定；及 (VII) 於由上述固定機構將上述工件固定之狀態下，使 上述交接部對上述工件之保持狀態解除。 5·如請求項3之搬送系統，其中 上述控制單元藉由下述步驟而解除由上述固定機構以 立起姿勢固定之上述工件之固定狀態： (；)使由上述g]疋機構固^之上述卫件被保持於上述交 接部； (11)於上述工件之上述外緣部抵接於上述複數個可動夹 持部及上述固定夾持部之狀態下，使上述第2驅動部動 作’藉此使上述擠壓框向與上述施壓方向相反之方向移 動從而將上述固定機構對上述工件之固定解除； ();上述工件之上述外緣部抵接於上述複數個可動 夾持4及上述固定夾持部之狀態下，使上述第工驅動部 動作纟此使各可動夾持部向自上述擠餘離開之 移動； ()使上述固疋夾持部相對於被保持於上述交接部之 上述工件而相對性地移動，從而使上述工件之上述外緣 部自上述固定夾持部離開；及 156492.doc 201208962 (V)藉由使上述交接部移動，而使被保持於上述交接部 之上述工件自上述搬送單元之上述固定機構離開。 156492.doc201208962 VII. Patent application scope: 1. A transport system, comprising: (a) a fixed side unit; and (b) a transport unit including a fixing mechanism for fixing a flat workpiece in an upright posture, and The workpiece fixed by the fixing mechanism is relatively moved relative to the fixed side unit; the fixing mechanism of the conveying unit includes: a pressing frame that presses an outer edge portion of the workpiece; and a plurality of clamping portions And clamping the outer edge portion of the workpiece disposed between the pressing frame and the pressing member, and applying a pressure to the pressing frame to fix the outer edge portion of the workpiece to The fixed side unit includes: (a-Ι) a first driving unit that causes one of the plurality of clamping portions to approach or separate from the pressing frame And (a-2) a second driving unit that applies a compressive force to the pressing member. 2. The transport system according to claim 1, wherein the second driving unit includes: a pull-drying Shi Forward and backward direction of the pressing member for pressing the pressing frame; and a rotating member which is provided on the front end of the lever for pressing the pressing member and means of conveyance along the conveyance direction of rotation. 3. The transport system of claim 1, further comprising: I56492.doc 201208962 (C) control unit, the operation; controlling the fixed side unit and the transport unit, the fixed side unit further comprises: (a-3) handover a portion that presents the above-mentioned workpiece that reaches the water to the water, and delivers the above-mentioned guards to the transport unit; the plurality of grips include: a square clamp.卩' which advances and retreats toward or away from the squeezing frame; and 4. the fixed nip ' is fixed to the vicinity of the squeezing frame. The transport system of claim 3, wherein the control unit fixes the standing posture member to the fixing mechanism by the following steps: (1) maintaining the transfer portion by moving the transfer portion Returning the workpiece to the upright position and moving the workpiece to the vicinity of the fixing mechanism of the transport unit; (1) moving the movable gripping portion away from the pressing frame by operating the third driving unit Moving in the direction; (Hi) moving the pressing frame in a direction opposite to the pressing direction by operating the second driving unit; (1V) holding the fixed clamping portion with respect to being held at the transfer The workpiece is relatively moved to abut the outer edge portion of the workpiece to the fixed nip portion; (v) the outer edge portion of the workpiece abuts against the fixed nip portion The first driving unit is operated to move the movable clamping portions 156492.doc 201208962 in a direction close to the pressing frame, and the outer edge portion of the workpiece is brought into contact with each other. (VI) operating the second driving unit in a state in which the outer edge portion of the workpiece abuts against the plurality of movable holding portions and the fixed missing portion, thereby causing the pressing The frame is moved in the pressing direction, and the workpiece in the standing posture is fixed by the fixing mechanism; and (VII) the holding state of the workpiece is released in a state where the workpiece is fixed by the fixing mechanism. 5. The transport system of claim 3, wherein the control unit releases the fixed state of the workpiece fixed by the fixing mechanism in an upright position by the following steps: (;) fixing the g] mechanism by the above And (11) operating the second driving unit in a state in which the outer edge portion of the workpiece abuts against the plurality of movable clamping portions and the fixed clamping portion Disposing the pressing frame in a direction opposite to the pressing direction to release the fixing of the workpiece by the fixing mechanism; (); the outer edge portion of the workpiece abuts against the plurality of In the state of the movable clamp 4 and the fixed nip portion, the first driving unit is operated to move the movable nip portion away from the squeezing portion; () the solid nip portion is opposed to the quilt The workpiece held by the delivery portion is relatively moved to move the outer edge portion of the workpiece away from the fixed clamping portion; and 156492.doc 201208962 (V) by moving the delivery portion The workpiece held at the delivery portion is separated from the fixing mechanism of the transfer unit. 156492.doc
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JPH0723557B2 (en) * 1988-04-25 1995-03-15 富士通株式会社 Substrate automatic loading device
JP3088327B2 (en) 1997-03-24 2000-09-18 鹿児島日本電気株式会社 Glass substrate cutting method
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