CN102432168A

CN102432168A - Transporting system

Info

Publication number: CN102432168A
Application number: CN2011102219429A
Authority: CN
Inventors: 冈岛康智; 池田健一郎
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2010-08-31
Filing date: 2011-07-29
Publication date: 2012-05-02
Anticipated expiration: 2031-07-29
Also published as: JP5158156B2; CN102432168B; TW201208962A; KR101214937B1; JP2012051656A; TWI440593B; KR20120022055A

Abstract

A return system is provided to improve safety of the return unit during driving and maintenance by fixing and unlocking work. A return system comprises a fixing side unit (40) and a return unit(50). The return unit has a fixing apparatus (60) which fixes the flat patterned work in standing posture and moves the fixed work towards the fixing side unit. The fixing apparatus comprises a pressing frame which presses outer edge portion of a work press, a plurality of clamp portions which respectively inserts and catches the outer edge portion of the work, an elastic supporting member which fixes the outer edge portion of the work in between is the work press and each clamp portions. The fixing side unit comprises a first driving part (41) which moves a part of clamp sections and a second driver part which gives compressive force to the elastic supporting member.

Description

Conveyer

Technical field

The present invention relates to the conveyer that a kind of conveyance is the flat workpiece that erects posture.

Background technology

In the past, as everyone knows just like the hypocoxa disconnecting device, its mother substrate that will form line was fixed with horizontality, and utilized the switching units of the upper and lower that is configured in mother substrate respectively to make mother substrate break off (for example patent documentation 1) along line.

The background technology document

Patent documentation

Patent documentation 1: Japanese Patent Laid is opened the 2006-289625 communique

Summary of the invention

Yet, in the patent documentation 1 for flat workpiece is fixed the technology of conveyance and had no record to erect posture.

Therefore, the object of the present invention is to provide a kind of conveyance well to be the conveyer of the flat workpiece that erects posture.

In order to solve said problem, the invention of technical scheme 1 is a kind of conveyer, it is characterized in that comprising: the fixation side unit; And the conveyance unit, it has the fixed mechanism with the workpiece that erects posture fixed flat planar shape, and make by the said workpiece of said fixed mechanism fixed with respect to said fixation side unit relativity move; The unitary said fixed mechanism of said conveyance comprises: the extruding frame, and it pushes the outer edge of said workpiece; A plurality of clamping parts; To be configured in separately and said extruding frame between the said outer edge clamping of said workpiece; And applicator member, it is exerted pressure and the said outer edge of said workpiece is fixed between said extruding frame and each clamping part through said extruding frame is given; Said fixation side unit comprises: the 1st driving part, and it makes the part in said a plurality of clamping part advance and retreat to direction approaching with respect to said extruding frame or that leave; And the 2nd driving part, it gives force of compression to said applicator member.

And the invention of technical scheme 2 is according to technical scheme 1 described conveyer, and it is characterized in that: said the 2nd driving part comprises: pull bar, and it is along the direction of exerting pressure advance and retreat of said extruding frame being exerted pressure by said applicator member; And rotator, the front end that it is arranged on said pull bar pushes said applicator member and rotates along the unitary conveyance direction of said conveyance.

And the invention of technical scheme 3 is according to technical scheme 1 or 2 described conveyers, it is characterized in that: more comprise control unit, it controls said fixation side unit and the unitary action of said conveyance; Said fixation side unit more comprises the junction, and its maintenance is the said workpiece of flat-hand position, and will be the said work delivery that erects posture and give said conveyance unit; Said a plurality of clamping part comprises: movable clamping part, and it is to direction advance and retreat approaching with respect to said extruding frame or that leave; And fixed clamp portion, it is fixed near the said extruding frame.

And; The invention of technical scheme 4 is according to technical scheme 3 described conveyers; It is characterized in that: said control unit will be the said workpiece that erects posture through following step and be fixed in said fixed mechanism: (i) through said junction is moved; Erect posture, said workpiece is moved near the unitary said fixed mechanism of said conveyance and the said workpiece that is kept by said junction is; (ii) through making said the 1st driving part running that each movable clamping part is moved to the direction of leaving from said extruding frame; (iii) through making said the 2nd driving part running make said extruding frame to the direction opposite with said direction of exerting pressure; (iv) make said fixed clamp portion with respect to the said workpiece that keeps by said junction and relativity move, thereby the said outer edge of said workpiece is connected to said fixed clamp portion; (v) be connected under the state of said fixed clamp portion in the said outer edge of said workpiece; Make said the 1st driving part running; Each movable clamping part is moved to the direction that approaches said extruding frame, and the said outer edge of said workpiece is connected to each movable clamping part; (vi) be connected under the state of said a plurality of movable clamping part and said fixed clamp portion in the said outer edge of said workpiece; Make said the 2nd driving part running; Said extruding frame is moved to said direction of exerting pressure, the said workpiece that erects posture is fixed by said fixed mechanism; And (vii) by said fixed mechanism with said workpiece fixed state under, said junction is removed the maintaining condition of said workpiece.

And; The invention of technical scheme 5 is according to technical scheme 3 described conveyers, it is characterized in that: said control unit will be removed with the stationary state that erects the said workpiece of posture fixed by said fixed mechanism through following step: (i) make by the said workpiece of said fixed mechanism fixed to be kept by said junction; (ii) be connected under the state of said a plurality of movable clamping part and said fixed clamp portion in the said outer edge of said workpiece; Make said the 2nd driving part running; Make said extruding frame to moving thus, thereby the static solution of said fixed mechanism to said workpiece removed with said direction of exerting pressure is opposite thus direction; (iii) be connected under the state of said a plurality of movable clamping part and said fixed clamp portion, make said the 1st driving part running, each movable clamping part is moved to the direction of leaving from said extruding frame in the said outer edge of said workpiece; (iv) make said fixed clamp portion with respect to the said workpiece that keeps by said junction and relativity move, thereby the said outer edge that makes said workpiece is left from said fixed clamp portion; And (, and the said workpiece that is kept by said junction is left from the unitary said fixed mechanism of said conveyance v) through said junction is moved.

[effect of invention]

In technical scheme 1 to the 5 described invention, the static solution fixing and workpiece that the unitary fixed mechanism of conveyance is used to carry out from the motivating force that is arranged on fixation side the unitary the 1st and the 2nd driving part workpiece removes.That is to say, the driving part (the 1st and the 2nd driving part) that the conveyance unit need not remove in order to the static solution fixing and workpiece of carrying out workpiece, thus need not pipe arrangement relevant with this key element and distribution are arranged between mobile side (conveyance unit) and the fixation side.Therefore, can improve unitary security of conveyance when advancing and the operating personnel's when safeguarding operating efficiency.

Particularly according to technical scheme 2 described inventions, the conveyance unit is during with respect to the fixation side single element move, be arranged on the 2nd driving part the pull bar front end rotator compression applicator member and on applicator member, rotate along the conveyance direction.Thus, the conveyance unit can be kept the compressed state of rotator and on the conveyance direction, move.Therefore, even if the conveyance unit with respect to the fixation side unit and relativity when moving, also can keep the fixedly disarm state of workpiece.

Particularly according to technical scheme 3 to 5 described inventions, can carry out well and will be the workpiece that erects posture and be fixed in the action of fixed mechanism and will be fixed in the action that the static solution of the workpiece of fixed mechanism removes.

Description of drawings

Fig. 1 is the frontview of an example of the formation of the substrate disconnecting device of expression in the embodiment of the present invention.

Fig. 2 is the rear view of an example of the formation of the substrate disconnecting device of expression in the embodiment of the present invention.

Fig. 3 be the expression workpiece formation one the example frontview.

Fig. 4 is the side-view of an example of the unitary formation of expression posture changing.

Fig. 5 is the vertical view of an example of the unitary formation of expression posture changing.

Fig. 6 is the frontview of an example of the unitary formation of expression conveyance.

Fig. 7 is the rear view of an example of the unitary formation of expression conveyance.

Fig. 8 be the expression movable clamping part formation one the example frontview.

Fig. 9 is near the sectional view the guiding pawl of the V-V line observation of Fig. 8.

Figure 10 is near the sectional view the guiding pawl of the W-W line observation of Fig. 7.

Figure 11 is the rear view that the fixing step of workpiece and static solution is removed step in order to the explanation fixed mechanism.

Figure 12 is the rear view that the fixing step of workpiece and static solution is removed step in order to the explanation fixed mechanism.

Figure 13 is the rear view that the fixing step of workpiece and static solution is removed step in order to the explanation fixed mechanism.

Figure 14 is the frontview of an example of the formation of expression noncontact holding unit.

Figure 15 be the expression switching units formation one the example vertical view.

[nomenclature]

1 substrate disconnecting device

3 workpiece

4 cut ring

The 4b opening

5 cutting blades

7 brittle substrates

8 line

9 electronic components

10 posture changing unit

20 junctions

21 lifting tables

23 (23a～23d) controls pawl

25 (the adsorption sections of 25a～25d)

Cylinder is used in 27 handing-over

30 swing parts

Cylinder is used in 33 swings

35 press sections

37 (cylinder is used in the extruding of 37a～37d)

39 (the rollers of 39a～39d)

40 main unit

42 (the rocking bars of 42a～42c)

43,44 guiding elements

50 conveyance unit

51 stationary platens

The 51a communicating pores

52 universal stages

60 fixed mechanisms

60a, 68a breach

60b jump face

60d subtend face

61 clamping parts

The movable clamping part of 61a～61c

66,73 (the applicator member of 73a～73d)

67 (the movable guide of 67a～67c)

68 fixed guide

69 (the guiding of 69a～69d) pawls

71 press sections

72 extruding frames

75 (the gaps of 75a～75d)

80 noncontact holding units

81 erecting beds

The 81a patchhole

83 the 1st attraction portions

84 the 2nd attraction portions

85 switching units

86 the 1st break off rod

86a the 1st advance and retreat driving part

87 the 2nd break off rod

87a the 2nd advance and retreat driving part

90 control units

D1, D2 be (the 1st and the 2nd at interval) at interval

The P10 delivery position

P11 removes the position

The P12 fixed position

The P20 open position

Embodiment

Below, with reference to accompanying drawing on one side of the present invention embodiment in detail described on one side.

< 1. whole formation >

Fig. 1 and Fig. 2 are respectively the frontview and the rear views of an example of the formation of the substrate disconnecting device 1 of expression in the embodiment of the present invention.Fig. 3 be the expression workpiece 3 formation one the example frontview.Substrate disconnecting device 1 is to break off the device of (cut-out) with forming 8 the brittle substrate 7 (with reference to Fig. 3) of ruling along line 8.

Like Fig. 1 and shown in Figure 2, substrate disconnecting device 1 mainly comprises posture changing unit 10, main unit 40, conveyance unit 50, noncontact holding unit 80, switching units 85 and control unit 90.

In addition, during Fig. 1 and later each were schemed, for the direction relations of clear and definite these parts, optionally suitably mark was vertical with the Z-direction, is the XYZ orthogonal coordinate system of horizontal plane with the XY plane.

Posture changing unit 10 in flat-hand position and erect between the posture and change, and will be the posture of flat workpiece 3 workpiece 3 handing-over that erect posture and give conveyance unit 50.In addition, posture changing unit 10 is fixed with respect to main unit 40.

Here, as shown in Figure 3, be fixed on conveyance unit 50 and mainly comprise cut ring 4, cutting blade 5 and brittle substrate 7 by the workpiece 3 that switching units 85 breaks off processing.

Cut ring 4 (ring bodies) is the flat board that is formed by metals such as stainless steels.Like Fig. 1 and shown in Figure 2, the outer edge 4a through cut ring 4 is fixed on workpiece 3 on the fixed mechanism 60 by fixed mechanism 60 clampings.

And, as shown in Figure 3, near the central authorities of cut ring 4, forming opening 4b.And then 4a is being provided with breach 4c in the outer edge of cut ring 4.Detect the angle of rotation of workpiece 3 through the position of detecting this breach 4c.

Cutting blade 5 (bodies) is installed on the cut ring 4 with the mode of the opening 4b of covering cut ring 4.And brittle substrate 7 is attached to cutting blade 5 with the mode that is positioned on the opening 4b.Therefore, even if make workpiece 3 for erecting posture, also can be effectively that brittle substrate 7 is fixing.In this embodiment,, also can use for example resinous adhesion sheet material here, as cutting blade 5.

Brittle substrate 7 is such substrates that formed by hard brittle material such as glass substrate or ceramic substrate for example.As shown in Figure 3, on brittle substrate 7, forming a plurality of line 8 and a plurality of electronic component 9.

Line 8 is formed in the lip-deep cutting line (vertically lines) of brittle substrate 7.Here, the tracing wheel through for example making sintered diamond system (omitting diagram) is crimped on the surface of brittle substrate 7 and rotates to form and rule 8.And, give stress to the brittle substrate 7 that is forming a plurality of line 8, and brittle substrate 7 is broken off along each line 8, obtain a plurality of electronic components 9 (for example a plurality of liquid crystal indicator) thus.

In addition, in this embodiment, the face that does not form line 8 among the interarea 3a of workpiece 3 (and cut ring 4, cutting blade 5 and brittle substrate 7), the 3b is called the 1st interarea 3a, and will forming 8 the face of ruling and be called the 2nd interarea 3b.

Like Fig. 1 and shown in Figure 2, main unit 40 is as with unit such as posture changing unit 10, noncontact holding unit 80 and switching units 85 and a plurality of revolving actuator 41 (the fixed fixed part of 41a～41c).

Here, each revolving actuator 41 (41a～41c) make axle (turning axle omits diagram) rotation according to compressed-air actuated supply condition.Thus, be installed in rocking bar 42 on the axle (42a～42c) swing, and be connected to the corresponding clamping part 61 (abutting part 63 (with reference to Fig. 8) of 61a～61c).In addition, (hardware of 61a～61c) is formed in hereinafter and sets forth for clamping part 61.

Conveyance unit 50 is arranged to and can be advanced along a pair of guiding

element

43,44 that is fixed on the main unit 40.Conveyance unit 50 keeps flat workpiece 3 to erect posture, and this workpiece 3 is moved with respect to posture changing unit 10 and main unit 40.Here, the maintenance of conveyance unit 50 can contact through the outer edge 4a to workpiece 3 and keep realizing.

So, conveyance unit 50 is conveyance workpiece 3 (conveyance function) not only, can also also contact through the outer edge 4a to the workpiece 3 that comprises brittle substrate 7 to keep flat workpiece 3 is fixed (maintenance function) with the state that erects posture.That is to say that conveyance unit 50 can also be used as " holding unit ".

And in this embodiment, during conveyance workpiece 3, conveyance unit 50 moves, but posture changing unit 10 and main unit 40 are static.Therefore, in this embodiment, also can posture changing unit 10 and main unit 40 be referred to as " fixation side unit ".

As shown in Figure 2, noncontact holding unit 80 is provided with the mode with conveyance unit 50 subtends that are positioned at open position P20, keeps the workpiece 3 of outer edge 4a to carry out noncontact to fixed mechanism 60 contacts by conveyance unit 50 and keeps.

So, carry out the noncontact holding unit 80 formation holding devices of " noncontact maintenance " by the conveyance unit 50 (holding unit) that the outer edge 4a that is the flat workpiece 3 that erects posture is carried out " contact keeps " and to the 1st interarea 3a of workpiece 3.

The brittle substrate 7 of the workpiece 3 that switching units 85 will be kept by conveyance unit 50 breaks off along line 8.Here, 85 pairs of brittle substrates 7 of switching units are given stress, make vertically split grow to the interarea of its opposition side from the interarea that is forming 8 the brittle substrate 7 of ruling till, thus brittle substrate 7 is broken off.

The action of each key element that is comprised in 90 pairs of posture changing unit 10 of control unit, main unit 40, conveyance unit 50, noncontact holding unit 80 and the switching units 85 is controlled, and realizes data operation.Like Fig. 1 and shown in Figure 2, control unit 90 mainly comprises ROM91, RAM92 and CPU93.

ROM (Read Only Memory, ROS) the 91st, so-called non-volatile storage part is for example storing program 91a.In addition, as ROM91, also can use the nonvolatile memory of freely reading and writing is flash memory.RAM (Random Access Memory, RAS) the 92nd, the storage part of volatibility is for example storing the data of the computing that is used for CPU93.

CPU (Central Processing Unit, cpu) 93 carried out program 91a according to ROM91 with specific time point and controlled that ((41a～41c) and a plurality of extruding are with cylinder 37 (drive controlling of 37a～37d) etc.) for for example a plurality of revolving actuators 41.

In addition, the detailed hardware for posture changing unit 10, conveyance unit 50, noncontact holding unit 80 and switching units 85 is formed in hereinafter elaboration.

< the 2. unitary formation of posture changing >

Fig. 4 and Fig. 5 be represent respectively posture changing unit 10 formation one the example side-view and vertical view.Here, action, and the action of giving conveyance unit 50 with workpiece 3 handing-over of the posture of change workpiece 3 are carried out as stated in posture changing unit 10.

Like Fig. 4 and shown in Figure 5, posture changing unit 10 mainly comprises a plurality of support portions 11 (11a～11d), a plurality of position fixing knob 13 (13a～13d), junction 20, swing part 30 and press section 35.

(11a～11d) workpiece 3 of posture changing unit 10 is given in the support handing-over in a plurality of (in this embodiment being 4) support portion 11.Like Fig. 4 and shown in Figure 5, each support portion 11 (11a～11d) be fixed on the position that can the outer edge 4a of the cut ring 4 of workpiece 3 be supported and not with the position of lifting table 21 confused of junction 20.

And like Fig. 4 and shown in Figure 5, (11a～11d) has the ball 12 being arranged to freely rotate (12a～12d) at its front end in each support portion 11.Thus, each ball 12 (12a～12d) can put supporting workpiece 3 and rotation.Therefore, (11a～11d) position of the workpiece 3 of support can be changed easily and neatly by each support portion 11.

Here, (11a～11d) workpiece 3 of support also can join to posture changing unit 10 by for example never illustrated carrying manipulator by a plurality of support portions 11.And, the operating personnel of substrate disconnecting device 1 (below, abbreviate " operating personnel " as) also can workpiece be put on a plurality of support portions 11 in 3 years.

Like Fig. 4 and shown in Figure 5, (13a～13d) (23a～23d) adjacency is provided with a plurality of (in this embodiment being 4) position fixing knob 13 with the corresponding pawl 23 of controlling.Each position fixing knob 13 (13a～13d) through be arranged on the base portion 20a travel mechanism's (omitting diagram) and along the support arm 26 of correspondence (the length direction advance and retreat of 26a～26d).Thus; (13a～13d) is so that (position of the workpiece 3 of 11a～11d) support is in the mode of desired scope to each position fixing knob 13, with the outer edge 4a of workpiece 3 (being cutting blade 5 more specifically) the direction extruding to the 21a towards the center of lifting table 21 by each support portion 11.

Workpiece confirms that transmitter 15 detects workpiece 3 and whether is supported on a plurality of support portions 11.As shown in Figure 5, workpiece confirm transmitter 15 be fixed on support portion 11b in abutting connection with and not with the position of lifting table 21 confused of junction 20.Confirm transmitter 15 as workpiece, also for example can use and detect the proximity transducer that has or not workpiece 3 with noncontact.

The workpiece 3 that junction 20 maintenances are flat-hand position and are supported by a plurality of support portions 11.And junction 20 handing-over between itself and conveyance unit 50 is the workpiece 3 that erects posture by swing part 30.Like Fig. 4 and shown in Figure 5, junction 20 mainly comprises lifting table 21, a plurality ofly controls pawl 23 ((25a～25d) and handing-over are with cylinder 28 for 23a～23d), a plurality of adsorption section 25.

As shown in Figure 5, lifting table 21 has a plurality of (this embodiment being 4) support arm 26 (26a～26d) that from center 21a is radial extension laterally.Lifting table 21 prevents to be deformed by the workpiece 3 of controlling pawl 23 and adsorption section 25 maintenances.

A plurality of (in this embodiment being 4) are controlled pawl 23, and (23a～23d) (a plurality of handle part) is being held in flat-hand position and erecting the outer edge 4a of the workpiece 3 (more particularly being cut ring 4) that carries out posture changing between the posture.Like Fig. 4 and shown in Figure 5, (23a～23d) is arranged on corresponding support arm 26, and (front end 27 of 26a～26d) is (near the 27a～27d) respectively to control pawl 23.

Here, as shown in Figure 4, near near each position fixing knob 13 ((diagram is only represented the upper end of position fixing knob 13b for ease) bifurcated upper end of 13a～13d).Therefore, even if (13a～13d) is in order to position workpiece 3 and to advance and retreat, and (13a～13d) yet can not control pawl 23 ((25a～25d) forms and disturbs for 23a～23d) and adsorption section 25 each position fixing knob 13 with corresponding for each position fixing knob 13.

And (13a～13d) is so that the position of workpiece 3 is the mode of desired scope when positioning, and workpiece 3 is by respectively controlling pawl 23 (23a～23d) center on when utilizing each position fixing knob 13.

A plurality of (in this embodiment being 4) adsorption section 25 (25a～25d) with respectively control pawl 23 (23a～23d) the corresponding setting, and the outer edge 4a of absorption workpiece 3 (more particularly being cut ring 4).

Therefore, (after 13a～13d) positioned, (the absorption workpiece 3 of 25a～25d) thus will (junction 20 be given in workpiece 3 handing-over of 11a～11d) support by a plurality of support portions 11 by a plurality of adsorption sections 25 at a plurality of position fixing knobs 13.

((25a～25d) controls and adsorbs cut ring 4 for 23a～23d) and each adsorption section 25 so, respectively to control pawl 23.That is to say that brittle substrate 7 also can't help respectively to control pawl 23 (23a～23d) and each adsorption section 25 (25a～25d) control or adsorb.Therefore, junction 20 and swing part 30 can be carried out the maintenance and the posture changing of workpiece 3, and can not bring influence to the line 8 (with reference to Fig. 3) that is formed on the brittle substrate 7.

When handing-over will be the workpiece 3 that erects posture and between junction 20 and conveyance unit 50, join with cylinder 28, make workpiece 3 mobile between junction 20 and conveyance unit 50.As shown in Figure 4, handing-over comprises main part 28a and pull bar 29 with cylinder 28.

Pull bar 29 is arranged to and can be advanced and retreat with respect to main part 28a.As shown in Figure 4, the front end of pull bar 29 is fixed on the bottom surface of lifting table 21.Therefore, be fixed on the workpiece that erects posture 3 advancing or backward movement and between junction 20 and conveyance unit 50, moving on the lifting table 21 corresponding to pull bar 29.

Swing part 30 is center swing through making junction 20 with swing axle 31, and the posture that makes the workpiece 3 that is kept by junction 20 is in flat-hand position and erect between the posture and change.Like Fig. 4 and shown in Figure 5, swing part 30 mainly comprises swing axle 31, swing frame 32 and swing with cylinder 33.

Swing axle 31 is as the hub that makes junction 20 with respect to base portion 20a swing.As shown in Figure 5, swing axle 31 rotatably supports (axle supports) by bearing 30a, 30b.And it is last that bearing 30a, 30b are separately fixed at corresponding

carriage

30c, 30d.

Swing frame 32 is the frameworks that formed by multi-disc (being 3) plate body 32a～32c in this embodiment.As shown in Figure 5, between

plate body

32a, 32c, fixing swing axle 31.On the other hand, the handing-over of fixing junction 20 at plate body 32b is with cylinder 28.

Swing is the driving parts that make junction 20 swings with cylinder 33.As shown in Figure 4, swing mainly comprises main part 33a and pull bar 34 with cylinder 33.

Pull bar 34 is arranged to and can be advanced and retreat with respect to main part 33a.Like Fig. 4 and shown in Figure 5, main part 33a is fixed on the base portion 20a of junction 20, and the front end 34a of pull bar 34 is fixed on the plate body 32a of swing frame 32.

Therefore, when pull bar 34 when main part 33a advances, change to from flat-hand position by the posture of controlling the workpiece 3 that pawl 23 and adsorption section 25 keep and to erect posture.On the other hand, when pull bar 34 is retreated to main part 33a, be flat-hand position from erecting posture changing by the posture of controlling the workpiece 3 that pawl 23 and adsorption section 25 keep.

Press section 35 adjustment are imparted to the load of workpiece 3 from the fixed mechanism 60 of conveyance unit 50.Thus, carry out and 20 handing-over to move, to reach the action that the stationary state of workpiece 3 is removed for workpiece 3 fixed of conveyance unit 50 from the junction by fixed mechanism 60.

Like Fig. 4 and shown in Figure 5, press section 35 mainly comprises installing frame 35a, a plurality of carriage 36, and (36a～36d) and a plurality of extruding are with cylinder 37 (37a～37d).

(36a～36d) is used for that (37a～37d) is fixed on posture changing unit 10 with cylinder 37 with a plurality of extruding for installing frame 35a and a plurality of carriage 36.Like Fig. 2 and shown in Figure 4, installing frame 35a forms frame shaped, and is fixed on base portion 20a.And as shown in Figure 2, (36a～36d) is the mounting plate that the stringer board from installing frame 35a extends along the conveyance direction (arrow A R1 direction) of conveyance unit 50 to a plurality of (in this embodiment being 4) carriage 36.

A plurality of extruding are with cylinder 37 (37a～37d) respectively the applicator member 73 (73a～73d is with reference to Fig. 7) of correspondence is compressed.Like Fig. 4 and shown in Figure 5, (37a～37d) mainly comprises a plurality of pull bars 38 (38a～38d) and a plurality of roller 39 (39a～39d) with cylinder 37 in each extruding.

A plurality of (in this embodiment being 4) pull bar 38 (38a～38d) be arranged to respectively and can advance and retreat along arrow A R2 direction.And (front end of 38a～38d) is installed with corresponding roller 39 (39a～39d) at each pull bar 38.

Therefore, when each pull bar 38 (38a～when 38d) advancing, corresponding roller 39 (39a～39d) be connected to each applicator member 73 (73a～73d is with reference to Fig. 7), thus, each applicator member 73 (73a～73d) be compressed.

On the other hand, as each pull bar 38 (38a～when 38d) retreating, corresponding roller 39 (39a～39d) leave from each applicator member 73 (73a～73d is with reference to Fig. 7).Thus, (compressed state of 73a～73d) is disengaged each applicator member 73.

(39a～39d) is arranged on the corresponding pull bar 38 (rotator of front end of 38a～38d) respectively to a plurality of (in this embodiment being 4) roller 39.As shown in Figure 5, (it can be the center rotation with the turning axle that extends in vertical (with the direction of Z axle almost parallel, with the direction of arrow A R1 direction approximate vertical) that 39a～39d) is arranged to each roller 39.

Therefore, when each roller 39 (39a～39d) be connected to corresponding applicator member 73 (under the state of 73a～73d), when conveyance unit 50 moves along conveyance direction (arrow A R1 direction), each roller 39 (39a～39d) action as follows.That is to say, each roller 39 on one side with the applicator member 73 of correspondence (73a～73d) compression, on one side (73a～73d) goes up and rotates along the conveyance direction in the applicator member 73 of correspondence.Therefore, each roller 39 (compressed state of 39a～39d), and move along the conveyance direction can be kept in conveyance unit 50.Its result does, even if when conveyance unit 50 moves with respect to posture changing unit 10 and main unit 40 (fixation side unit), also can keep the fixedly disarm state of workpiece 3.

< the 3. unitary formation of conveyance >

Fig. 6 and Fig. 7 are the frontview and the rear views of an example of the formation of expression conveyance unit 50.Fig. 8 is the movable clamping part 61 of the expression (frontview of an example of the formation of 61a～61c).Fig. 9 is near the sectional view of observing from the V-V line of Fig. 8 of guiding pawl 69 (69a).Figure 10 is near the sectional view of observing from the W-W line of Fig. 7 of guiding pawl 69 (69d).

Here, conveyance unit 50 contact keeps the outer edge 4a of workpiece 3, and the delivery position P10 that gives and accepts that carries out workpiece 3 with by the open position P20 of the disconnection of switching units 85 execution brittle substrates 7 between conveyance erect the workpiece 3 of posture.

Thus, can suppress to comprise the conveyance path and area (the moving area size of conveyance unit 50 just) is set in interior conveyance unit 50.Therefore, can reduce the size of substrate disconnecting device 1.

Like Fig. 6 and shown in Figure 7, conveyance unit 50 mainly comprises stationary platen 51 and universal stage 52.Here, the conveyance unit 50 of this embodiment is arranged to and can be moved with respect to posture changing unit 10, main unit 40 and noncontact holding unit 80 etc. through for example not shown linear motor.

Universal stage 52 is the discoid rotating parts with respect to stationary platen 51 rotations.Like Fig. 6 and shown in Figure 7, universal stage 52 is embedded among the communicating pores 51a of the toroidal that is formed on stationary platen 51 freely to rotate.And universal stage 52 has workpiece 3 fixed fixed mechanisms 60.In addition, set forth for being formed in hereinafter of fixed mechanism 60.

Stationary platen 51 as for example install with so that the rotation key element of universal stage 52 rotations, and with so that the installation portion of the key element of advancing that stationary platen 51 and universal stage 52 are advanced with respect to main unit 40.Like Fig. 6 and shown in Figure 7, stationary platen 51 mainly comprises guide block 55, motor 56 and belt 57.

As shown in Figure 6, a plurality of (in this embodiment being 6) guide block 55 is arranged on the positive 51b of stationary platen 51.In addition, in the inside of each guide block 55 a plurality of balls (omitting diagram) are arranged to and can be rotated.And each guide block 55 is installed in corresponding guiding

element

43,44 o'clock, the state and corresponding guiding

element

43,44 contacts of the ball in each guide block 55 (omitting diagram) rotating.

Thus, when each guide block 55 is mobile along the guiding element 43,44 (just along conveyance direction (arrow A R1 direction)) of correspondence, balls in each guide block 55 (omitting diagram) rotation on the guiding

element

43,44 of correspondence.Therefore, stationary platen 51 can successfully be advanced along guiding

element

43,44.

Motor 56 is driving parts of universal stage 52 being given revolving force.Belt 57 will be passed to universal stage 52 by the revolving force that motor 56 is given.As shown in Figure 6, the motor of turning axle 56a front end that belt 57 is wound on universal stage 52 and is installed in motor 56 is with on the pulley 58.Thus, if motor 56 rotations, the workpiece 3 that then is fixed on fixed mechanism 60 rotates.

Tension adjustment is imparted to the tension force of belt 57 with pulley 59 adjustment.In this embodiment, tension adjustment is to be adjusted by not shown orientation mechanism with the position (the for example position on the Z-direction) of pulley 59.Thus, the lax of belt 57 can be easily eliminated, and the tension force of belt 57 can be easily adjusted.Therefore, can keep the slew rope of universal stage 52 well.

< formation of 3.1. fixed mechanism >

Fixed mechanism 60 is fixed flat workpiece 3 to erect posture.Like Fig. 6 and shown in Figure 7, fixed mechanism 60 mainly comprises a plurality of clamping parts 61 (61a～61c), 62 and a plurality of press section 71.

A plurality of clamping parts 61 (61a～61c), 62 will be configured in and press section 71 between the outer edge 4a clamping of workpiece 3.As shown in Figure 7, (61a～61c), 62 is provided with along extruding frame 72 respectively a plurality of clamping parts 61.

In addition, below in the explanation, (clamping part of 61a～61c) is called " movable clamping part ", the clamping part of label symbol 62 is called " fixed clamp portion " with label symbol 61.

That is to say that a plurality of clamping parts comprise a plurality of movable clamping parts 61 (61a～61c) and fixed clamp portion 62.Again in other words, the part in a plurality of clamping parts is that (61a～61c), the remainder in a plurality of clamping parts is a fixed clamp portion 62 to a plurality of movable clamping parts 61.

A plurality of (in this embodiment being 3) movable clamping part 61 (61a～61c) advancing and retreat with respect to extruding frame 72 directions approaching or that leave respectively.Like Fig. 7 and shown in Figure 8, (61a～61c) mainly comprises abutting part 63, rotor plate 64, applicator member 66, movable guide 67 (67a～67c) and guiding pawl 69 (69a～69c) to each movable clamping part 61.

Here, movable clamping part 61a～61c has mutually the same hardware formation.Therefore, only the hardware of movable clamping part 61a is constituted below and describe.

Abutting part 63 is the spherules by for example metal forming, and is installed on the rotor plate 64.Rotor plate 64 is to be the plate body of center rotation with rotation axis 64a.For example, the swing of the rocking bar 42 (42a) (with reference to Fig. 1 and Fig. 2) of revolving actuator 41 (41a), when rocking bar 42 (42a) was connected to the abutting part 63 of corresponding clamping part 61 (61a), rotor plate 64 was that middle mind-set arrow R1 direction is rotated with rotation axis 64a.

Connecting rod 65 is the narrower plate bodys of width that connect rotor plate 64 and movable guide 67 (67a).One end of connecting rod 65 utilizes rotation axis 65a and links with rotor plate 64 interlocks, and the other end of connecting rod 65 utilizes rotation axis 65b and links with movable guide 67 (67a) interlock.

Applicator member 66 is formed by elastic components such as springs.As shown in Figure 8, an end 66a of applicator member 66 is fixed on the rotor plate 64 of movable side, and the other end 66b of applicator member 66 is fixed on the reinforcement plate 64b of fixation side.Thus, if rotor plate 64 rotates along arrow R1 direction, then 66 pairs of rotor plates 64 of applicator member are to the pressuring direction in the opposite direction with arrow R1.

Movable guide 67 (67a) is flat movable link.Movable guide 67 is adjusted the stationary state of workpiece 3 thus to advancing and retreat with respect to extruding frame 72 directions approaching or that leave.

That is to say, utilize revolving actuator 41 (41a) to make rocking bar 42 (42a) swing, make rotor plate 64 when arrow R1 direction is rotated, movable guide 67 (67a) is to moving from pushing the direction that frame 72 leaves.Thus, movable guide 67 (67a) becomes the clamping disarm state.

On the other hand; When utilizing revolving actuator 41 (41a) to make the position before rocking bar 42 (42a) is got back to swing; Since applicator member 66 exert pressure rotor plate 64 when rotating with arrow R1 direction in the opposite direction, movable guide 67 (67a) moves to the direction that approaches to push frame 72.Thus, movable guide 67 (67a) become can clamping between itself and the extruding frame 72 state of workpiece 3.

So; Be arranged on main unit 40 a plurality of revolving actuators 41 (41a～41c) is as driving part (the 1st driving part), make a plurality of clamping parts 61 (part among the 61a～61c), 62 (and a plurality of movable clamping part 61a～61c) to respect to extruding frame 72 near or the directions advance and retreat left.

As shown in Figure 8, breach 60a is formed in the recess of extruding frame 72 sides of movable guide 67.Here, when handing-over workpiece 3 between the junction 20 of posture changing unit 10 and conveyance unit 50, it is configurable in the space that is formed by breach 60a (for example gap 75 (75a)) (with reference to Fig. 8 and Figure 11 to Figure 13) to control pawl 23 (23a).Therefore, when handing-over workpiece 3, can effectively prevent to control pawl 23 (23a) and movable guide 67 (67a) confused.

A plurality of (in this embodiment being two) guiding pawl 69 (69a) and movable guide 67 (67a) and 72 cooperations of extruding frame, thereby clamping workpiece 3.As shown in Figure 8, guiding pawl 69 (69a) is installed on the movable guide 67 (67a) on the direction of the skeletal lines of the extruding frame 72 of subtend, leaving.And, as shown in Figure 9, with the more mode of below that the jump face 60b of guiding pawl 69 (69a) is positioned at the lower surface 60c of movable guide 67 (67a), will guide pawl 69 (69a) and be installed on the movable guide 67 (67a).

Therefore, as shown in Figure 9, the subtend face 60d of the jump face 60b of the lower surface 60c through movable guide 67 (67a), guiding pawl 69 (69a) and extruding frame 72 contacts with workpiece 3, and realizes the clamping of movable clamping part 61 (61a) and 71 pairs of workpiece 3 of press section.

As shown in Figure 7, fixed clamp portion 62 is fixed near the extruding frame 72.As shown in Figure 7, fixed clamp portion 62 mainly comprises fixed guide 68 and guiding pawl 69 (69d).

Fixed guide 68 is flat stationary members.That is to say, fixed guide 68 and movable guide 67 (67a～67c) different, not with respect to extruding frame 72 near or the direction left on advance and retreat, but be fixed on the universal stage 52.

Thus, can be that benchmark is easily carried out the location of workpiece 3 with respect to fixed mechanism 60 with the position of fixed clamp portion 62.Therefore, through using a plurality of movable clamping parts 61 (61a～61c) and fixed clamp portion 62 and can well workpiece 3 clampings and clamping be removed.

As shown in Figure 7, breach 68a is formed in the recess of extruding frame 72 sides of fixed guide 68.Here, when handing-over workpiece 3 between the junction 20 of posture changing unit 10 and conveyance unit 50, control pawl 23 (23d) and can be configured in the space (for example gap 75 (75d)) that forms by breach 68a (with reference to Fig. 7 and Figure 11 to Figure 13).Therefore, when handing-over workpiece 3, can effectively prevent to control pawl 23 (23d) and fixed guide 68 confused.

A plurality of (in this embodiment being two) guiding pawl 69 (69d) and fixed

guide

68 and 72 cooperations of extruding frame, thereby clamping workpiece 3.As shown in Figure 7, guiding pawl 69 (69d) is installed on the fixed guide 68 on the direction of the skeletal lines of the extruding frame 72 of subtend, leaving.And, shown in figure 10, be positioned at than the side end face 68b of fixed guide 68 with the jump face 60b of guiding pawl 69 (69d) and more lean on the mode of pushing frame 72 sides, will guide pawl 69 (69d) and be installed on the fixed guide 68.

Therefore, as shown in Figure 9, contact with workpiece 3 through the side end face 68b of fixed guide 68, the jump face 60b of guiding pawl 69 (69d) and the subtend face 60d of extruding frame 72, realize the clamping of fixed

clamp portion

62 and 71 pairs of workpiece 3 of press section.

Press section 71 through and movable clamping part 61 (61a～61c) and between the fixed clamp portion 62 clamping workpiece 3 push the outer edge 4a of workpiece 3.As shown in Figure 7, press section 71 mainly comprises extruding frame 72 and a plurality of applicator member 73 (73a～73d).

Like Fig. 6 and shown in Figure 7, extruding frame 72 forms ring-type (more particularly being rectangular ring), and is installed near the central authorities of universal stage 52.Like Fig. 9 and shown in Figure 10, extruding frame 72 pushes from the 2nd interarea 3b side of the workpiece 3 outer edge 4a to workpiece 3.

A plurality of (in this embodiment being 4) applicator member 73 (73a～73d) form by elastic components such as springs.As shown in Figure 7, (the corresponding angle in four bights of 73a～73d) and extruding frame 72 links each applicator member 73.

Here; If each applicator member 73 (73a～73d) from the extruding of correspondence with cylinder 37 ((with reference to Fig. 4 and Fig. 5) reception of 37a～37d) from the front of the paper of Fig. 7 towards the power of the direction (direction just in the opposite direction) at the back side, then each applicator member 73 (73a～73d) be compressed with arrow A R2.That is to say that (37a～37d) is as (73a～73d) gives the driving part (the 2nd driving part) of force of compression to the applicator member 73 of correspondence with cylinder 37 in the extruding of press section 35.

On the other hand, (38a～38d) retreat, ((73a～when 73d) leaving, (73a～73d) is to extruding frame 72 the exerting pressure of arrow A R2 direction (direction of exerting pressure) of exerting pressure for each applicator member 73 from the applicator member 73 of correspondence for 39a～39d) for roller 39 when pull bar 38.

Thus, (73a's workpiece 3～73d) exerts pressure by movable clamping part 61 (61a～61c) and fixed

clamp portion

62 and 72 clampings of extruding frame from each applicator member 73 because of receiving.Its result is that workpiece 3 is fixed on the fixed mechanism 60.

So, ((41a～41c) (the 1st driving part) adjusts the revolving actuator 41 of 37a～37d) (the 2nd driving part) and main unit 40 stationary state of the workpiece 3 on the fixed mechanism 60 with cylinder 37 by the extruding of posture changing unit 10.

That is to say that ((41a～41c) carries out fixing to the workpiece 3 that becomes the conveyance object for the 37a～37d) and the revolving actuator 41 of main unit 40 with cylinder 37 for the fixed mechanism 60 through conveyance unit 50, the extruding of posture changing unit 10.

Therefore, in this embodiment, also posture changing unit 10, main unit 40 and conveyance unit 50 are referred to as " conveyer ".

< fixing means of 3.2. workpiece >

Figure 11 to Figure 13 is the rear view that is removed step in order to explanation by the fixing step of 60 pairs of workpiece 3 of fixed mechanism and static solution.Here, describe being the step that the workpiece 3 that erects posture is fixed on the fixed mechanism 60.

In addition, this fixing step is to realize through the action that control unit 90 is controlled each key element that is comprised in posture changing unit 10, main unit 40, the conveyance unit 50.

And, begin before the formal fixing step, make conveyance unit 50 move to the releasing position P11 (with reference to Fig. 2) of delivery position P10, (25a～25d) absorption keeps workpiece 3 by each adsorption section 25.

In the formal fixing step, at first utilize swing part 30 to make junction 20 move (swing).Thus, the workpiece 3 that is kept by junction 20 makes workpiece 3 move near the fixed mechanism 60 of conveyance unit 50 for erecting posture simultaneously.

Secondly, make a plurality of revolving actuators 41 of being arranged on main unit 40 (41a～41c) (with reference to Fig. 2) action, and make each rocking bar 42 (42a～42c) swing.Thus, make each the movable clamping part 61 (movable guide 67 of 61a～61c) (67a～67c) move to the direction of leaving from extruding frame 72.

Then, make a plurality of extruding with cylinder 37 (37a～37d) running, thereby each pull bar 38 (38a～38d) advance from cylinder main body.Thus, ((39a～39d) compression, extruding frame 72 is to (the opposite direction of direction of exerting pressure (arrow A R2 direction) of 73a～73d) moves with each applicator member 73 by corresponding roller 39 for 73a～73d) for each applicator member 73.

Then, make conveyance unit 50 move to fixed position P12 (with reference to Fig. 1 and Fig. 2) from the releasing position P11 of delivery position P10.Thus, ((((73a～73d) goes up and rotates 73a～73d) compression, and applicator member 73 roller 39 of front end of 37a～37d) with the applicator member 73 of correspondence for 39a～39d) with cylinder 37 in each extruding.Therefore, conveyance unit 50 moves along the conveyance direction under the state that extruding frame 72 is left from workpiece 3.Then, under the state that extruding frame 72 has left from workpiece 3, the outer edge 4a of workpiece 3 is connected to the side end face 68b (Figure 10) of fixed guide 68.

Then, be connected at the outer edge of workpiece 3 4a under the state of side end face 68b (Figure 10) of fixed guide 68, make revolving actuator 41 (41a～41c) running, thus (42a～42c) gets back to the position before the swing to corresponding rocking bar 42.

Thus, ((67a～67c) moves to the direction that approaches to push frame 72 movable guide 67 of 61a～61c) each movable clamping part 61.Therefore, the outer edge 4a of workpiece 3 is connected to each movable guide 67 (67a～67c).

Then, in the outer edge of workpiece 3 4a be connected to each movable clamping part 61 (61a～61c) and under the state of fixed clamp portion 62, make each extruding with cylinder 37 (37a～37d) turn round, thus make each pull bar 38 (38a～38d) retreat.

Thus, do not receive that (37a～37d) is imparted to corresponding applicator member 73, and (force of compression of 73a～73d) is pushed frame 72 and moved to the direction of exerting pressure of each applicator member 73 with cylinder 37 by each extruding.Then, like Fig. 9 and shown in Figure 10, (67a～67c) and jump face 60b's movable guide 67 of fixed guide 68 narrow down with the distance of the subtend face 60d of extruding frame 72.

Therefore, workpiece 3 is clipped in movable clamping part 61 (61a～61c) and between fixed clamp portion 62 and the press section 71, the workpiece 3 that erects posture is fixing by fixed mechanism 60.That is to say,, can the workpiece that erect posture 3 be fixed on the fixed mechanism 60 well according to formal fixing step.

Then, workpiece 3 by fixed mechanism 60 fixed states under, remove each adsorption section 25 (adsorbed state of 25a～25d).Thus, the maintaining condition of the 20 pairs of workpiece 3 in junction is able to remove, and the fixing step of workpiece 3 is accomplished.

< the static solution eliminating method of 3.3. workpiece >

Here, on one side with reference to Figure 11 to Figure 13, explanation on one side is to removing the step of the stationary state of this workpiece 3 through fixed mechanism 60 to erect posture fixed workpiece 3.

In addition, the fixing step of this releasing step and workpiece 3 likewise is to realize through the action that control unit 90 is controlled each key element that is comprised in posture changing unit 10, main unit 40, the conveyance unit 50.

And beginning is formal to be removed before the step, and conveyance unit 50 moves to the fixed position P12 (with reference to Fig. 2) of delivery position P10, and workpiece 3 is fixing by fixed mechanism 60.

The formal releasing in the step at first will be by fixed mechanism 60 fixed workpiece 3 by each adsorption section 25 (25a～25d) absorption.Thus, workpiece 3 is kept by junction 20 under the state that is fixed on fixed mechanism 60.

Secondly, in the outer edge of workpiece 3 4a be connected to a plurality of movable clamping parts 61 (61a～61c) and under the state of fixed clamp portion 62, make a plurality of extruding with cylinder 37 (37a～37d) (the 2nd driving part) turns round, thus each pull bar 38 (38a～38d) advance from cylinder main body.

Thus, ((39a～39d) compression makes extruding frame 72 to (the opposite direction of direction of exerting pressure (arrow A R2 direction) of 73a～73d) moves with each applicator member 73 to each applicator member 73 by corresponding roller 39 for 73a～73d).And like Fig. 9 and shown in Figure 10, (67a～67c) and the jump face 60b of fixed guide 68 enlarge with the distance of the subtend face 60d of extruding frame 72 movable guide 67.Therefore, 60 pairs of fixed mechanisms erect fixedly being disengaged of workpiece 3 of posture, and (25a～25d) absorption keeps workpiece 3 by each adsorption section 25 of junction 20.

So, each extruding of press section 35 is with the cylinder 37 (applicator member 73 (73a～73d), can remove the stationary state of workpiece 3 thus of 37a～37d) compression correspondence.

Then, in the outer edge of workpiece 3 4a be connected to a plurality of movable clamping parts 61 (61a～61c) and under the state of fixed clamp portion 62, make a plurality of revolving actuators 41 (41a～41c) (the 1st driving part) running, thus make each rocking bar 42 (42a～42c) swing.Thus, make each the movable clamping part 61 (movable guide 67 of 61a～61c) (67a～67c) move to the direction of leaving from extruding frame 72.

Then, make conveyance unit 50 move to releasing position P11 (with reference to Fig. 1 and Fig. 2) from the fixed position P12 of delivery position P10.Thus, each extruding with cylinder 37 (roller 39 of front end of 37a～37d) (and 39a～39d) with the applicator member 73 of correspondence (73a～73d) compression, and in applicator member 73 (73a～73d) goes up and rotates.Therefore, conveyance unit 50 moves along the conveyance direction under the state that extruding frame 72 is left from workpiece 3.And under the state that extruding frame 72 has left from workpiece 3, the outer edge 4a of workpiece 3 leaves from the side end face 68b (Figure 10) of fixed guide 68.So, according to formal releasing step, can remove stationary state well by fixed mechanism 60 fixed workpiece 3.

Then, through making junction 20 move (swing) by swing part 30, the workpiece 3 that is kept by junction 20 leaves from the fixed mechanism 60 of conveyance unit 50.And workpiece 3 is after fixed mechanism 60 leaves, and ((38a～38d) retreat pushes frame 72 and moves to direction of exerting pressure (arrow A R2 direction) pull bar 38 of 37a～37d) thus, and the static solution of workpiece 3 removes step and accomplishes with cylinder 37 to make a plurality of extruding.

< the 4. formation of noncontact holding unit >

Figure 14 is the frontview of an example of the formation of expression noncontact holding unit 80.The 1st complementary ground of interarea 3a noncontact of the workpiece 3 that is kept by 50 contacts of conveyance unit as here, noncontact holding unit 80 is incited somebody to action as stated keeps.Shown in figure 14, noncontact holding unit 80 mainly comprises erecting bed 81, a plurality of the 1st attraction portion 83 and a plurality of the 2nd attraction portion 84.

In this embodiment, also " the 1st attraction portion " of symbol 83 and " the 2nd attraction portion 84 " of symbol 84 are referred to as " attraction portion " here.That is to say that a plurality of attraction portion comprises a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portion 84.

Erecting bed 81 is to be provided with the mode that marches to conveyance unit 50 subtends till the open position P20.As shown in Figure 2, erecting bed 81 is fixed on the main unit 40.And like Fig. 1 and shown in Figure 14, the vertical guide 81a of erecting bed 81 is as the mounting face that a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portions 84 are installed.

Patchhole 81b is the perforation slotted hole that extends in vertical (direction parallel with the Z axle), and is formed near the central authorities of erecting bed 81.The 1st breaks off rod 86 arrives workpiece 3 via patchhole 81b the 1st interarea 3a.

Like Fig. 1 and shown in Figure 14, a plurality of attraction portions (a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portion 84) are arranged on the vertical guide 81a of erecting bed 81.A plurality of attraction portion attracts the 1st interarea 3a of the workpiece that erects posture 3 of subtend, thus, keeps workpiece 3 with contactless state.In this embodiment, also can use Bernoulli chuck here, as a plurality of the 1st attraction portions 83 and a plurality of the 2nd attraction portion 84.

Shown in figure 14, a plurality of (in this embodiment being 12) the 1st attraction portion 83 is arranged on the vertical guide 81a of erecting bed 81 under the state of the length direction both sides that are formed on the patchhole 81b on the erecting bed 81.Each the 1st attraction portion 83 is made up of for example Bernoulli chuck.Thus, can attract the workpiece 3 of subtends and workpiece 3 is kept with contactless state through each the 1st attraction portion 83.

Shown in figure 14, a plurality of (in this embodiment being 12) the 2nd attraction portion 84 is arranged on the vertical guide 81a of erecting bed 81 under the state of a plurality of the 1st attraction portions 83 from sandwich.Each the 2nd attraction portion 84 and the 1st attraction portion 83 likewise are made up of for example Bernoulli chuck.Thus, each the 2nd attraction portion 84 and the 1st attraction portion 83 likewise attract the workpiece 3 of subtend, can workpiece 3 be kept with contactless state thus.

Here, shown in figure 14, the diameter of each the 1st attraction portion 83 is less than the diameter of each the 2nd attraction portion 84.And shown in figure 14, the 1st attraction portion 83 interval D 1 (the 1st at interval) each other adjacent in a plurality of the 1st attraction portions 83 is less than the 2nd adjacent in a plurality of the 2nd attraction portions 84 attraction portion 84 interval D 2 (the 2nd at interval) each other.

So, a plurality of the 1st attraction portion 83 disposes than a plurality of the 2nd attraction portions 84 more thick and fast.Thus, can more effectively near the workpiece the patchhole 81b 3 (near in other words, the workpiece 3 the 1st disconnection rod 86) noncontact be kept.Therefore, can carry out the disconnection of brittle substrate 7 well.

< the 5. formation of switching units >

Figure 15 be the expression switching units 85 formation one the example vertical view.Here, switching units 85 will be broken off along line 8 by the brittle substrate 7 that conveyance unit 50 and noncontact holding unit 80 form maintaining condition.Shown in figure 15, switching units 85 mainly comprises the 1st and breaks off rod 86 and a plurality of the 2nd disconnection rod 87.

The 1st breaks off rod 86 advances and retreat with the mode that arrives conveyance unit 50 sides via patchhole 81b.Like Figure 14 and shown in Figure 15, the 1st breaks off the rod 86 patchhole 81b along erecting bed 81 extends in a direction (length direction of patchhole 81b, Z-direction) (being designated hereinafter simply as " bearing of trend ").

A plurality of (in this embodiment being 2) the 2nd broken off excellent 87 clampings are arranged on the 1st disconnection rod 86 by the workpiece 3 of conveyance unit 50 maintenances opposition side.Each the 2nd disconnection rod 87 is extending with the 1st disconnection rod 86 parallel directions (Z-direction).

Here, shown in figure 15, a plurality of the 2nd disconnection rods 87 on the conveyance direction (arrow A R1 direction) only separate desired distance B 3 and dispose.And, shown in figure 15, the 2nd break off rod the 87, the 1st break off rod the 86 and the 2nd break off rod 87 along from delivery position P10 towards the direction (Y axle negative direction) of open position P20 and configuration in regular turn.

And the 1st breaks off rod 86 8 gives load from the 1st interarea 3a side of the opposition side that forming 8 the 2nd interarea 3b of rule (in the case, the 1st break off rod 86 be connected to cutting blade 5) along ruling.

That is to say that load is that the 1st interarea 3a from the opposition side that is forming 8 the 2nd interarea 3b of ruling is imparted to line 8.Therefore, can be well and carry out effectively along the disconnection of line 8 brittle substrate 7.

The 1st advance and retreat driving part 86a gives motivating force and makes the 1st to break off rod 86 in advance and retreat directions (arrow A R6 direction is with reference to Figure 15) advance and retreat through breaking off rod 86 to the 1st.For example, the 1st advance and retreat driving part 86a the 1st break off rod 86 the state of bearing of trend and line 8 almost parallels under make the 1st to break off rod 86 and move to X axle negative direction, make the 1st to break off the 1st interarea 3a that rod 86 approaches brittle substrate 7 thus.

The 2nd advance and retreat driving part 87a gives motivating force and makes a plurality of the 2nd to break off rod 87 in advance and retreat directions (arrow A R6 direction is with reference to Figure 15) advance and retreat through breaking off rod 87 to a plurality of the 2nd.For example, the 2nd advance and retreat driving part 87a a plurality of the 2nd break off rod 87 the state of bearing of trend and line 8 almost parallels under make a plurality of the 2nd to break off rod 87 and move to X axle positive dirction, make a plurality of the 2nd to break off the 2nd interarea 3b that rod 87 approaches brittle substrate 7 thus.

As if so utilizing the 1st and the 2nd advance and retreat driving part 86a, 87a to make the 1st and the 2nd to break off rod 86,87 advance and retreat, then brittle substrate 7 is by these the 1st and the 2nd disconnection rod 86,87 clampings.Its result is to be the brittle substrate 7 that erects posture and to break off along line 8.

That is to say, during the disconnection that utilizes substrate disconnecting device 1 to carry out is handled, the 1st and the 2nd break off direction (advance and retreat direction (arrow A R6 direction)) that rod 86,87 approaches brittle substrate 7 all with gravity direction (Z axle negative direction) approximate vertical.

Thus, gravity is identical to the influence of the 1st and the 2nd disconnection rod 86,87.Therefore, each that need not to the 1st and the 2nd disconnection rod 86,87 is taked just can well brittle substrate 7 be broken off in order to the measure that alleviates influence of gravity.

< the 6. advantage of the substrate disconnecting device of this embodiment >

As stated, in the substrate disconnecting device 1 of this embodiment, when keeping brittle substrate 7 by conveyance unit 50 (holding unit), the 1st and the 2nd breaks off rod 86,87 is configured in two interarea 3a, 3b side with the brittle substrate 7 that erects the posture maintenance.

Here, different with this embodiment, following situation is studied: the 1st and the 2nd breaks off the upper and lower that rod is configured in brittle substrate, makes the 1st and the 2nd disconnection rod approaching from the upside and the downside of brittle substrate respectively.In the case, the 1st and the 2nd breaks off rod and approaches the angle that the direction of brittle substrate become with gravity direction and be about 0 ° (deg), 180 ° (deg) respectively.That is to say that gravity breaks off excellent influence difference to the 1st and the 2nd.Its result does, the influence of gravity do not carried out under the situation of any adjustment, can produce from the 1st and the 2nd to break off the load different problems that rod is imparted to brittle substrate.

Secondly, like this embodiment, following situation is studied: make the 1st and the 2nd to break off rod 86,87 respectively near with the two interarea 3a, the 3b side joint that erect the brittle substrate 7 that posture keeps.In the case, the 1st and the 2nd breaks off the angle that direction that rod 86,87 approaches brittle substrate 7 become with gravity direction and all is about 90 ° (deg).

Thus, gravity is identical to the influence of the 1st and the 2nd disconnection rod 86,87.Therefore, need not to the 1st and the 2nd break off rod 86,87 each take the measure just can be well with brittle substrate 7 disconnected liters in order to alleviate influence of gravity.

And according to the substrate disconnecting device 1 and the fixed mechanism 60 thereof of this embodiment, the outer edge 4a of workpiece 3 is by movable clamping part 61 (61a～61c) and fixed clamp portion 62 and press section 71 clamping well.Therefore, can be well that the workpiece that erects posture 3 is fixing.

And in the substrate disconnecting device 1 and posture changing unit 10 thereof of this embodiment, the static solution fixing and workpiece 3 that the fixed mechanism 60 of conveyance unit 50 is carried out workpiece 3 through the load of giving from the press section 35 of posture changing unit 10 removes.That is to say; The key element that conveyance unit 50 need not remove in order to the static solution fixing and workpiece 3 of carrying out workpiece 3, thus need not the pipe arrangement relevant with this key element and distribution are configured between mobile side (conveyance unit 50) and the fixation side (for example posture changing unit 10 etc.).Therefore, can improve the security of the conveyance unit 50 when advancing and the operating personnel's when safeguarding operating efficiency through using posture changing unit 10.

And; In the conveyer that substrate disconnecting device 1 through this embodiment is realized; By ((motivating force of (the 2nd driving part) of 37a～37d), the static solution fixing and workpiece 3 of carrying out workpiece 3 removes with cylinder 37 for 41a～41c) (the 1st driving part) and a plurality of extruding from being arranged on a plurality of revolving actuators 41 on main unit 40 and the posture changing unit 10 (fixation side unit).

That is to say; The driving part (the 1st and the 2nd driving part) that conveyance unit 50 need not remove in order to the static solution fixing and workpiece 3 of carrying out workpiece 3, thus need not pipe arrangement relevant with this key element and distribution are configured between mobile side (conveyance unit 50) and the fixation side (posture changing unit 10 and main unit 40).Therefore, can improve the security of the conveyance unit 50 when advancing and the operating personnel's when safeguarding operating efficiency.

And then; Substrate disconnecting device 1 of this embodiment and the holding device realized through this substrate disconnecting device 1 are not only kept by the outer edge 4a contact with workpiece 3 of the fixed mechanism 60 of conveyance unit 50, can also be through interarea (more particularly be 1st interarea 3a) the noncontact maintenance of noncontact holding unit 80 with workpiece 3.Therefore; Even if under can't be with the situation that (for example interarea 3a, the 3b of workpiece) contact keeps except the outer edge 4a of workpiece 3, also can workpiece 3 be kept well through conveyance unit 50 (holding unit) and noncontact holding unit 80 because of the characteristic of workpiece 3.

7. variation

More than, embodiment of the present invention is illustrated, but the present invention is not limited to said embodiment, and can carries out various distortion.

(1) in this embodiment, movable guide 67 has been described, and ((69a～69c) is like Fig. 8 and shown in Figure 9 separate and constitute, but is not limited thereto for 67a～67c) and guiding pawl 69.For example, movable guide 67 (67a) and guiding pawl 69 (69a) also can form as one.

(2) in addition, in this embodiment, conveyance unit 50 has been described with respect to posture changing unit 10 and main unit 40 and move, but has been not limited thereto.For example, also can move with respect to conveyance unit 50 for posture changing unit 10 and main unit 40.

So, if the move mode of each

unit

10,40 and 50 make conveyance unit 50 with respect to posture changing unit 10 and main unit 40 (fixation side unit) and relativity move.

(3) in addition, in this embodiment, the workpiece of posture changing unit 10 confirms that transmitter 15 (with reference to Fig. 4 and Fig. 5) only is provided with one near lifting table 21, but the number of workpiece affirmation transmitter 15 is not limited thereto.Also can a plurality of (more than two) workpiece affirmation transmitter 15 be set near the lifting table 21.

Claims

1. conveyer is characterized in that comprising:

(a) fixation side unit; And

(b) conveyance unit, it has the fixed mechanism with the workpiece that erects posture fixed flat planar shape, and make by the said workpiece of said fixed mechanism fixed with respect to said fixation side unit relativity move;

The unitary said fixed mechanism of said conveyance comprises:

The extruding frame, it pushes the outer edge of said workpiece;

A plurality of clamping parts, will be configured in separately and said extruding frame between the said outer edge clamping of said workpiece; And

Applicator member, it is exerted pressure and the said outer edge of said workpiece is fixed between said extruding frame and each clamping part through said extruding frame is given;

Said fixation side unit comprises:

(a-1) the 1st driving part, it makes the part in said a plurality of clamping part advance and retreat to direction approaching with respect to said extruding frame or that leave; And

(a-2) the 2nd driving part, it gives force of compression to said applicator member.

2. conveyer according to claim 1 is characterized in that:

Said the 2nd driving part comprises:

Pull bar, it is along the direction of exerting pressure advance and retreat of said extruding frame being exerted pressure by said applicator member; And

Rotator, the front end that it is arranged on said pull bar pushes said applicator member and rotates along the unitary conveyance direction of said conveyance.

3. conveyer according to claim 1 is characterized in that:

More comprise:

(c) control unit, it controls said fixation side unit and the unitary action of said conveyance;

Said fixation side unit more comprises:

(a-3) junction, its maintenance are the said workpiece of flat-hand position, and will be the said work delivery that erects posture and give said conveyance unit;

Said a plurality of clamping part comprises:

Movable clamping part, it is to direction advance and retreat approaching with respect to said extruding frame or that leave; And

Fixed clamp portion, it is fixed near the said extruding frame.

4. conveyer according to claim 3 is characterized in that:

Said control unit will be the said workpiece that erects posture through following step and be fixed in said fixed mechanism:

(i) through said junction is moved, erect posture and the said workpiece that is kept by said junction is, and said workpiece is moved near the unitary said fixed mechanism of said conveyance;

(ii) through making said the 1st driving part running that each movable clamping part is moved to the direction of leaving from said extruding frame;

(iii) through making said the 2nd driving part running that said extruding frame is moved to the direction opposite with said direction of exerting pressure;

(iv) make said fixed clamp portion with respect to the said workpiece that keeps by said junction and relativity move, thereby the said outer edge of said workpiece is connected to said fixed clamp portion;

(v) be connected under the state of said fixed clamp portion in the said outer edge of said workpiece; Make said the 1st driving part running; Each movable clamping part is moved to the direction that approaches said extruding frame, and the said outer edge of said workpiece is connected to each movable clamping part;

(vi) be connected under the state of said a plurality of movable clamping part and said fixed clamp portion in the said outer edge of said workpiece; Make said the 2nd driving part running; Said extruding frame is moved to said direction of exerting pressure, the said workpiece that erects posture is fixed by said fixed mechanism; And

(vii) by said fixed mechanism with said workpiece fixed state under, said junction is removed the maintaining condition of said workpiece.

5. conveyer according to claim 3 is characterized in that:

Said control unit will be removed with the stationary state that erects the said workpiece of posture fixed by said fixed mechanism through following step:

(i) make by the said workpiece of said fixed mechanism fixed and keep by said junction;

(ii) be connected under the state of said a plurality of movable clamping part and said fixed clamp portion in the said outer edge of said workpiece; Make said the 2nd driving part running; Said extruding frame is moved to the direction opposite with said direction of exerting pressure, thereby the static solution of said fixed mechanism to said workpiece removed;

(iii) be connected under the state of said a plurality of movable clamping part and said fixed clamp portion, make said the 1st driving part running, each movable clamping part is moved to the direction of leaving from said extruding frame in the said outer edge of said workpiece;

(iv) make said fixed clamp portion with respect to the said workpiece that keeps by said junction and relativity move, thereby the said outer edge that makes said workpiece is left from said fixed clamp portion; And

(, and the said workpiece that is kept by said junction is left from the unitary said fixed mechanism of said conveyance v) through said junction is moved.