TW201208960A - Attitude changing unit - Google Patents

Attitude changing unit Download PDF

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Publication number
TW201208960A
TW201208960A TW100118356A TW100118356A TW201208960A TW 201208960 A TW201208960 A TW 201208960A TW 100118356 A TW100118356 A TW 100118356A TW 100118356 A TW100118356 A TW 100118356A TW 201208960 A TW201208960 A TW 201208960A
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TW
Taiwan
Prior art keywords
workpiece
unit
posture
pressing
fixed
Prior art date
Application number
TW100118356A
Other languages
Chinese (zh)
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TWI444245B (en
Inventor
Yasutomo Okajima
Kenichiro Ikeda
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
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Publication of TW201208960A publication Critical patent/TW201208960A/en
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Publication of TWI444245B publication Critical patent/TWI444245B/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Feeding Of Workpieces (AREA)
  • Specific Conveyance Elements (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

The present invention provides an attitude changing unit capable of well handing over a standing workpiece by a transporting unit. It includes a handover part (20) which keeps a workpiece (3) in a horizontal attitude and hands over the standing workpiece (3) with the transporting unit. A swinging part (30) changes the attitude of workpiece (3), which is kept by the handover part (20), from the horizontal attitude to the standing attitude and vice versa by swinging the handover part (20), A squeeze part (35) adjusts the load applied to the workpiece (3) by the fixing mechanism of the transporting unit. As a result, the fixing mechanism of the transporting unit utilizes the load applied by the squeeze part (35) of the attitude changing unit (10) to perform the fixing and fixing-release of the workpiece (3). Namely, the transporting unit (50) does not need to perform the operation of fixing and fixing-release of the workpiece (3).

Description

201208960 六、發明說明： 【發明所屬之技術領域】 本發明係關於— 立起姿勢之間進行 【先前技術】 種將平板狀之工件之姿勢於水平姿勢及 變換之變換姿勢單元。 先前，眾所周知有如下基板分斷裝置，其將形成有劃線 之母基板以水=狀態固m藉由分別配置於母基板之 下方之刀斷單凡沿著劃線使母基板分斷（例如專利文獻 [先行技術文獻] [專利文獻] [專利文獻1]日本專利特開2〇〇6_289625號公報 【發明内容】 [發明所欲解決之問題] △如此，專利文獻！中，僅記載了將平板狀之工件以水平狀 〜口疋之技術’對於將該工件以立起姿勢固定之技術則沒 有任何記载。其結果為，專利文獻！中，對於將該工件之姿 勢於水平安勢及立起姿勢之間進行變換之技術也沒有任何 記載。 因此’本發明之目的在於提供—種可良好地對搬送單元 交接立起姿勢之工件之變換姿勢單元。 [解決問題之技術手段] 為解决上述問題，技術方案丨之發明為一種變換姿勢單 凡’其特徵在於：將平板狀之卫件之姿勢於水平姿勢及立 156415.doc 201208960 起姿勢之間變換，並且在與搬送單元之間交接呈立起姿勢 之上述工件，且包含：交接部，其保持呈水平姿勢之上述 工件，並且在與上述搬送單元之間交接呈立起姿勢之上述 工件；擺動部，其藉由使上述交接部擺動，而將由上述交 接部保持之上述工件之姿勢於水平姿勢與立起姿勢之間進 ' 行變換；及擠壓部，其藉由對設置於上述搬送單元之固定 機構擠壓上述工件之狀態進行調整，而使上述固定機構執 〇 仃將自上述交接部交接之上述卫件固定之動作、及將上述 工件之固定狀態解除之動作。 而且’技術方案2之發明如技術方案1之變換姿勢單元， 其中上述工件包含：環狀體，其於平板之中央形成有開口； 片材體，其以覆蓋上述環狀體之上述開口之方式安裝；及 脆性材料基板，其以位於上述開口上之方式貼附於上述片 材體，並且於位於貼附於上述片材體之第丨主面之相反側之 第2主面形成有劃線；上述交接部包含：複數個把持部，由 〇 其各者把持上述環狀體之上述外緣部；及複數個吸附部， 其各自與上述複數個把持部之各者對應而設置，並吸附上 述環狀體之上述外緣部。 -而且，技術方案3之發明如技術方案丨或2之變換姿勢單 元，其中上述固定機構包含施壓構件，並藉由來自上述施 壓構件之施壓力而固定上述工件；上述擠壓部藉由壓縮上 述施壓構件而將上述工件之固定狀態解除。 [發明之效果] 根據技術方案1至3之發明’搬送單元之固定機構利用自 156415.doc 201208960 變換姿勢單元之制部料之負錢行工件之㈣及工件 之解除較。# ’搬送單元不需要用以執行卫件之固定及 工件之解除固定之要素’從而無需將與該要素相關之配管 及配線設置於移動側（搬送單元）與固定側之間。因此，藉由 使用變換姿勢單元而可提高行進時之搬送單元之安全性及 維護時之作業人員之作業效率。 特別是根據技術方案2之發明，交接部之各把持部及各吸 附部把持及吸附「環狀體」。即，「脆性材料基板」並不由 各把持部及各吸附部把持或吸附。因&，交接部及擺動部 可執行工件之保持及變換姿勢，而不會對形成於脆性材料 基板上之劃線帶來影響。 【實施方式】 以下，-邊參照附圖-邊對本發日月之實施形態詳 說明。 <1.整體構成> 圖1及圖2分別係表示本發明之實施形態中之基板分斷裝 置1之構成之一例之前視圖及後視圖。圖3係表示工件3之構 成之-例之前視圖。基板分斷裝置i係將形成有劃線8之脆 性材料基板7(參照圖3)沿著劃線8分斷（切斷）之裝置。 如圖1及圖2所示，基板分斷裝置丨主要包含變換姿勢單元 1〇、主體單元40'搬送單元5〇、非接觸保持單元⑽、分: 單元85及控制單元9〇。 所 另外，圖1及以後之各圖中，為了明確該等部分之方 係，視需要適當標註以Z軸方向為鉛垂方向、以平 命為 156415.doc -6- 201208960 水平面之XYZ正交座標系。 變換姿勢單元10將平板狀之工件3之姿勢於水平姿勢及 立起姿勢之間進行變換，並且將呈立起姿勢之i件3交接給 _單以〇。此外，變換姿勢單元1G相對於主體單元的: 固定。 •'此處，如圖3所示’固定於搬送單元5〇且由分斷單元Μ 進行分斷處理之工件3主要包含切割環4、切割片5及脆性材 _ 料基板7。 O a 刀d 4(%狀體）係由不鏽鋼等金屬形成之平板。如圖1 及圖2所不，藉由切割環4之外緣部“由固定機構60夾持而 將工件3固定於固定機構6〇上。 、而且，如圖3所示，於切割環4之中央附近形成有開口朴。 進而’於切割環4之外緣部牦設置有缺口 4c。藉由檢測該缺 口 4c之位置來檢測工件3之旋轉角度。 切割片5(片材體）以覆蓋切割環4之開口仆之方式相對於 〇 切割環4而安裝。而且，脆性材料基板7以位於開口 4b上之 方式貼附於切割片5。因此，即便使工件3為立起姿勢，亦 可刀實地將脆性材料基板7固定。此處’本實施形態中，作 ' 為切割片5，亦可使用例如樹脂製之黏著片材。 - 脆性材料基板7係例如玻璃基板或陶瓷基板等那樣由脆 14材料形成之基板。如圖3所示，於脆性材料基板7上形成 有複數個劃線8及複數個電子零件9。 sj線8係形成於脆性材料基板7之表面上之切割紋（縱向 紋路）。此處，藉由例如使燒結金剛石製之劃線輪（省略圖示） 156415.doc 201208960 壓接於脆性材料基板7之表面並轉動而形成劃線8。而且， 對形成有複數個劃線8之脆性材料基板7賦予應力，並沿著 各劃線8將脆性材料基板7分斷’由此獲得複數個電子零件 9(例如複數個液晶顯示裝置）。 另外，本實施形態中，將工件3(以及切割環4、切割片5 及脆性材料基板7)之主面3a、3b中之未形成劃線8之面稱為 第1主面3a，且將形成有劃線8之面稱為第2主面3b。 如圖1及圖2所示，主體單元40被用作將變換姿勢單元 1〇、非接觸保持單元80及分斷單元85等單元、以及複數個 旋轉致動器41(4la〜41c)固定之固定部。 此處，各旋轉致動器41(41a〜41c)根據壓縮空氣之供給狀 態而使軸（旋轉轴，省略圖示）旋轉。藉此，安裝於軸上之搖 桿42(42a〜42c)擺動，並抵接於對應之夹持部61(6U〜6ic)之 抵接部63(參照圖8)。另外，對於夾持部61(61&〜61匀之硬體 構成於下文中闡述。 搬送單元50設置成能夠沿著固定於主體單元4〇上201208960 VI. OBJECTS OF THE INVENTION: 1. Field of the Invention The present invention relates to a state in which a standing posture is performed. [Prior Art] A posture changing unit that positions a flat workpiece in a horizontal posture and changes. Heretofore, it is known that a substrate cutting device is known in which a mother substrate on which a scribe line is formed is separated by water in a water state, and is separated by a scribe line to separate the mother substrate (for example, [Patent Document] [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. 6-289625. The technique of flat-shaped workpieces in a horizontal shape is not described in the technique of fixing the workpiece in a standing posture. As a result, in the patent document, the posture of the workpiece is horizontal and There is no description of the technique of changing between the standing postures. Therefore, the object of the present invention is to provide a conversion posture unit that can smoothly transfer a standing posture to a transport unit. [Technical means for solving the problem] The above problem, the invention of the technical solution is a kind of transformation posture, which is characterized in that the posture of the flat-shaped guard is in the horizontal posture and the vertical position is 156415.doc 201208960 Changing between postures, and transferring the workpiece in an upright posture to and from the transport unit, and including: an intersection portion that holds the workpiece in a horizontal posture and is placed in a standing posture with the transport unit The workpiece; the swinging portion, wherein the posture of the workpiece held by the delivery portion is changed between a horizontal posture and an upright posture by swinging the delivery portion; and the pressing portion is set by the pair The fixing mechanism of the transport unit adjusts the state of the workpiece, and the fixing mechanism performs an operation of fixing the guard that is delivered from the delivery unit and an operation of releasing the fixed state of the workpiece. The invention of claim 2, wherein the workpiece comprises: an annular body having an opening formed in a center of the flat plate; and a sheet body mounted to cover the opening of the annular body And a substrate of a brittle material attached to the sheet body so as to be attached to the sheet, and attached to the sheet The second main surface on the opposite side of the second main surface is formed with a scribe line; the intersection portion includes: a plurality of grip portions, wherein each of the outer peripheral portions of the annular body is gripped; and a plurality of adsorption portions are Each of the plurality of gripping portions is provided corresponding to each of the plurality of gripping portions, and adsorbs the outer edge portion of the annular body. Further, the invention of claim 3 is the changing posture unit of the second aspect or the second aspect, wherein the fixing mechanism The pressing member is fixed, and the workpiece is fixed by a pressing force from the pressing member. The pressing portion releases the fixing state of the workpiece by compressing the pressing member. [Effect of the Invention] According to the first aspect of the invention In the invention of 3, the fixing mechanism of the transport unit utilizes the negative of the workpiece of the posture unit from 156415.doc 201208960, and the workpiece is removed (4) and the workpiece is released. The #' transport unit does not need to be used to perform the fixing of the guard and the unfixing of the workpiece. Therefore, it is not necessary to provide the piping and wiring associated with the element between the moving side (transport unit) and the fixed side. Therefore, by using the shift posture unit, the safety of the transport unit during traveling and the work efficiency of the worker during maintenance can be improved. In particular, according to the invention of claim 2, each of the gripping portions and the respective sucking portions of the delivery portion grip and adsorb the "ring". That is, the "brittle material substrate" is not held or adsorbed by each of the grip portions and the respective adsorption portions. Since &, the interface and the swinging portion can perform the holding and changing posture of the workpiece without affecting the scribing formed on the brittle material substrate. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. <1. Overall configuration> Fig. 1 and Fig. 2 are a front view and a rear view, respectively, showing an example of the configuration of the substrate breaking device 1 in the embodiment of the present invention. Fig. 3 is a front view showing an example of the construction of the workpiece 3. The substrate cutting device i is a device that breaks (cuts) the brittle material substrate 7 (see Fig. 3) on which the scribe line 8 is formed along the scribe line 8. As shown in FIGS. 1 and 2, the substrate breaking device 丨 mainly includes a change posture unit 1A, a main unit 40' transport unit 5A, a non-contact holding unit (10), a sub-unit 85, and a control unit 9A. In addition, in the drawings of Fig. 1 and the following, in order to clarify the relationship between the parts, the XYZ orthogonal to the horizontal direction of the 156415.doc -6-201208960 horizontal plane is appropriately marked as needed. Coordinate system. The transformation posture unit 10 converts the posture of the flat workpiece 3 between the horizontal posture and the standing posture, and delivers the i-piece 3 in the standing posture to the single sheet. Further, the transformation posture unit 1G is fixed with respect to the main body unit. • Here, as shown in Fig. 3, the workpiece 3 fixed to the transport unit 5 and partitioned by the breaking unit 主要 mainly includes a dicing ring 4, a dicing sheet 5, and a brittle material substrate 7. O a knife d 4 (% body) is a flat plate formed of a metal such as stainless steel. As shown in FIG. 1 and FIG. 2, the outer edge portion of the cutting ring 4 is "fixed by the fixing mechanism 60 to fix the workpiece 3 to the fixing mechanism 6". Moreover, as shown in FIG. Further, an opening is formed in the vicinity of the center. Further, a notch 4c is provided in the outer edge portion of the cutting ring 4. The rotation angle of the workpiece 3 is detected by detecting the position of the notch 4c. The cutting piece 5 (sheet body) is covered. The opening of the cutting ring 4 is attached to the cutting ring 4. The brittle material substrate 7 is attached to the cutting piece 5 so as to be positioned on the opening 4b. Therefore, even if the workpiece 3 is in the standing posture, The brittle material substrate 7 is fixed by a knife. Here, in the present embodiment, the dicing sheet 5 may be an adhesive sheet made of, for example, a resin. The brittle material substrate 7 is, for example, a glass substrate or a ceramic substrate. A substrate formed of a brittle material 14. As shown in FIG. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7. The sj line 8 is a cut pattern formed on the surface of the brittle material substrate 7 ( Longitudinal texture). Here, by way of example Diamond-shaped scribing wheel (not shown) 156415.doc 201208960 Press-bonded to the surface of the brittle material substrate 7 and rotated to form the scribe line 8. Further, stress is applied to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed. And dividing the brittle material substrate 7 along each of the scribe lines 8 to thereby obtain a plurality of electronic components 9 (for example, a plurality of liquid crystal display devices). In addition, in the present embodiment, the workpiece 3 (and the cutting ring 4, cutting) The surface of the main surface 3a, 3b of the sheet 5 and the brittle material substrate 7) where the scribe line 8 is not formed is referred to as a first main surface 3a, and the surface on which the scribe line 8 is formed is referred to as a second main surface 3b. 1 and 2, the main body unit 40 is used as a fixing portion that fixes the posture unit 1〇, the non-contact holding unit 80, the breaking unit 85, and the like, and a plurality of rotary actuators 41 (4la to 41c). Here, each of the rotary actuators 41 (41a to 41c) rotates a shaft (rotation shaft, not shown) in accordance with the supply state of the compressed air. Thereby, the rocker 42 (42a to 42c) attached to the shaft Swinging and abutting against the abutting portion 63 (refer to FIG. 8) of the corresponding clamping portion 61 (6U to 6ic). The clamping portion 61 (61 &. ~61 uniform hardware configuration in the conveyance unit 50 set forth below is provided to be fixed to the body unit along the 4〇

進行接觸保持而實現。This is achieved by making contact hold.

保持單元」 156415.doc 201208960 但=二施形態中’搬送工件3時，搬送單元50移動， 中 '早⑽及主體單元40靜止。因此，本實施形態 μ可將變換姿勢單疋ι〇及主體軍元4〇統稱為「固定側 單 7G [。 、f 2所7F ’非接觸保持單元8G以與位於分斷位置㈣之 搬送單元50對向之方式設置 對由搬送早兀50之固定機構 接觸保持外緣部4a之工件3進行非接觸保持。 0 「如此’由對呈立起姿勢之平板狀之工件3之外緣部43進行 接觸保持」之搬送單元50(保持單元）以及對工件3之^ 主面3a進行「非接觸保持」之非接觸保持單元晴成保持 裝置。 刀斷單元85將由搬送單元5〇保持之工件3之脆性材料基 板7沿著劃線8分斷。此處，*斷單元以對脆性材料基板7 賦予應力，使垂直裂縫自形成有劃線8之脆性材料基板7之 主面成長至其相反側之主面為止，由此將脆性材料基板7 Q 分斷。 控制單元90對變換姿勢單元1〇、主體單元4〇、搬送單元 50、非接觸保持單元8〇及分斷單元85中所包含之各要素之 動作進行控制，並且實現資料運算。如圖丨及圖2所示，控 制單元90主要包含R〇M 91、RAM 92及CPU 93。 ROM(Read Only Memory，唯讀記憶體）91為所謂之非揮 發性之s己憶部，例如儲存有程式91 a。另外，作為r〇m 91， 亦可使用自由讀寫之非揮發性記憶體即快閃記憶體。 RAM(Random Access Memory ’隨機存取記憶體）92為揮發 156415.doc 201208960 性之記憶部，例如儲存有用於CPU 93之運算之資料。 CPU(Central Processing Unit，中央處理單元）93以特定之 時點執行依照ROM 91之程式91 a進行控制（例如複數個旋轉 致動器41(41a〜41c)及複數個擠壓用氣缸37(37a〜37d)之驅 動控制等）。 另外，對於變換姿勢單元10、搬送單元5 0、非接觸保持 單元80以及分斷單元85之詳細硬體構成於下文中闡述。 <2.變換姿勢單元之構成> 圖4及圖5是分別表示變換姿勢單元1〇之構成之一例之側 視圖及俯視圖。此處，變換姿勢單元1 〇如上所述，執行變 換工件3之姿勢之動作、及將工件3交接給搬送單元5〇之動 作。 如圖4及圖5所示’變換姿勢單元1〇主要包含複數個支持 部11 (11 a~ 11 d)、複數個定位把手13(13a~ 13 d)、交接部2〇、 擺動部30及擠壓部35。 複數個（本實施形態中為4個）支持部ll(ii a〜lld)支持交 接給變換姿勢單元10之工件3。如圖4及圖5所示，各支持部 ll(lla〜lid)固定於可將工件3之切割環4之外緣部粍支持之 位置、且不與交接部20之升降台21相干擾之位置。 而且，如圖4及圖5所示，各支持部11(Ua〜Ud)於其前端 具有設置成自由轉動之滾珠12(12a〜12d)。藉此，各滾珠 12(12a〜12d)可點支持工件3並旋轉。因此，由各支持部 ll(lla〜lid)支持之工件3之位置能夠容易且靈活地變換。 此處，由複數個支持部U(lla〜lld)支持之工件3亦可例如 156415.doc •10- 201208960 自未圖示之搬送機械手交接給變換姿勢單元1〇。而且，義 板分斷裝置1之作業人員（以下，簡稱為「作業人員」）亦可 將工件3載置於複數個支持部11上。 如圖4及圖5所示，複數個（本實施形態中為4個）定位把手 l3(13a〜Ud)與對應之把持爪23(23a〜23d)鄰接設置。各定位 把手13(13a〜13d)藉由設置於基部20a上之移動機構（省略圖 示）而沿著對應之支臂26(26a〜26d)之長度方向進退。藉此， 各疋位把手13(13&〜13(!)以使由各支持部11(11&〜11(1)支持 之工件3之位置為所期望之範圍之方式，將工件3(更具體而 言為切割片5)之外緣部4a向朝向升降台21之中心21a之方 向擠壓。 工件確過感測器15檢測工件3是否支持於複數個支持部 11。如圖5所示，工件確認感測器15固定於與支持部11|3鄰 接、且不與交接部20之升降台21相干擾之位置《作為工件 確認感測器15，亦可使用例如以非接觸來檢測有無工件3 之接近感測器。 父接部20保持呈水平姿勢且由複數個支持部丨丨支持之工 件3。而且，交接部20於其與搬送單元50之間交接藉由擺動 部30而呈立起姿勢之工件3。如圖4及圖5所示，交接部2〇 主要包含升降台21、複數個把持爪23 (23 a〜23 d)、複數個吸 附部25(25a〜25d)及交接用氣缸28。 如圖5所示，升降台21具有自中心21 a向外側呈放射狀延 伸之複數個（本實施形態中為4根）支臂26(26a〜26d)。升降台 21防止由把持爪23及吸附部25保持之工件3發生變形。 156415.doc •11· 201208960 複數個（本實施形態中為4個）把持爪23(23a〜23d)(複數個 把持部）把持於水平姿勢及立起姿勢之間進行變換姿勢之 工件3 (更具體而言為切割環4)之外緣部4a。如圖4及圖5所 示，各把持爪23(23a〜23d)設置於對應之支臂26(26a〜26d) 之Si端27(27&〜27<1)附近。 此處，如圖4所示，各定位把手13(13a〜13d)之上端附近（為 了方便圖示’僅表示定位把手l3b之上端附近）分叉。因此， 即便各定位把手13(l3a〜13d)為了對工件3進行定位而進 退，各定位把手13(13a〜13d)亦不會與對應之把持爪 23(23a〜23d)及吸附部25(25a〜25d)形成干擾。 而且，基利用各定位把手1 3 ( 13 a〜13 d)以使工件3之位置為 所期望之範圍之方式進行定位時，工件3由各把持爪 23(23a 〜23d)圍繞。 複數個（本實施形態中為4個）吸附部25(25a〜25d)與各把 持爪23(23a〜23d)對應而設置，且吸附工件3(更具體而言為 切割環4)之外緣部4a。 因此，於複數個定位把手13(13a〜13d)進行定位之後，由 複數個吸附部25(25a〜25d)吸附工件3,由此將由複數個支持 部11(1 la〜1 Id)支持之工件3交接給交接部2〇。 如此，各把持爪23(23a〜23句及各吸附部25(25a〜2Μ)把持 及吸附切割環4。即，脆性材料基板7並不由各把持爪 23(23a〜23d)及各吸附部25(25a〜25d)把持或吸附。因此，交 接部20及擺動部30可執行工件3之保持及變換姿勢，而不會 對形成於脆性材料基板7上之劃線8(參照圖3)帶來影響。 156415.doc -12- 201208960 交接用氣缸28將呈立起姿勢之工件3於交接部2〇及搬送 單兀50之間進行交接時，使工件3於交接部及搬送單元π 之間移動。如圖4所示，交接用氣缸28包含主體部28a及拉 桿29。 拉才干29设置成能夠相對於主體部28a進退。如圖4所示， 拉杯29之岫端固定於升降台21之底面。因此，固定於升降 σ 21上之立起姿勢之工件3對應於拉桿”之前進或後退動 0 作而於交接部2〇與搬送單元50之間移動。 擺動部30藉由使交接部2〇以擺動軸31為中心擺動，而使 由父接部20保持之工件3之姿勢於水平姿勢與立起姿勢之 間變換。如圖4及圖5所示，擺動部30主要包含擺動軸31、 擺動框32及擺動用氣缸33。 擺動軸31用作使交接部20相對於基部2〇a擺動之中心 轴。如圖5所示，擺動軸31可旋轉地由軸承3〇a、3〇b支持（軸 支持）。而且，軸承30a、30b分別固定於對應之托架3〇(：、 ❹ 30d上。 擺動框32係由多片（本實施形態中為3片）板體32&〜32£；形 成之框體。如圖5所示’於板體32a、32c之間固定有擺動軸 • 31。另一方面，於板體32b固定有交接部2〇之交接用氣缸28。 擺動用氣缸33為使交接部20擺動之驅動部。如圖4所示， 擺動用氣缸33主要包含主體部33a及拉桿34。 拉桿34設置成能夠相對於主體部33a進退。如圖4及圖5所 示’主體部33a固定於交接部20之基部20a，拉桿34之前端 34a固定於擺動框32之板體32a。 156415.doc -13- 201208960 因此，當拉桿34自主體部33a前進時，由把持爪23及吸附 部25保持之工件3之姿勢自水平變換姿勢為立起姿勢。另一 方面田拉和' 34後退至主體部33a時，由把持爪23及吸附部 25保持之工件3之姿勢自立起變換姿勢為水平姿勢。 擠壓部35調整自搬送單元5〇之固定機構6〇賦予至工件3 之負載。藉此，由固定機構6〇執行將自交接部Μ交接給搬 达單7L50之工件3固定之動作、及將工件3之固定狀態解除 之動作。 如圖4及圖5所示，擠壓部35主要包含安裝框35&、複數個 托架36(36a〜36d)及複數個擠壓用氣缸37(37a〜37d)。 安裝框35a及複數個托架36(36a〜36句用於將複數個擠壓 用氣缸37(37a〜37d)固定於變換姿勢單元1〇上。如圖2及圖4 所示，女裒框35 a形成為框體狀，並固定於基部2〇&。而且， 如圖2所示，複數個（本實施形態中為4個）托架36(36a〜36d) 為自安裝框35a之縱板起沿著搬送單元5〇之搬送方向（箭頭 AR1方向）延伸之安裝板。 複數個擠廢用氣缸3 7(3 7a〜3 7d)分別將對應之施麼構件 73(73a〜73d ’參照圖7)壓縮。如圖4及圖5所示，各擠壓用氣 缸3 7(37a〜3 7d)主要包含複數個拉桿38(38卜38(1)及複數個 輥39(39a〜39d)。 複數個（本實施形態中為4個）拉桿38(383〜38(1)分別設置 成能夠沿著箭頭AR2方向進退。而且，於各拉桿38(38a〜38d) 之前端安裝著對應之輥39(3 9a〜39d)。 因此，當各拉桿38(38a〜38d)前進時，對應之輥 156415.doc -14 - 201208960 39(39&~39(1)抵接於各施壓構件73(73&〜73(1，參照圖7)，藉 此，各施壓構件73(73a〜73d)被壓縮。 另一方面，當各拉桿38(38a〜38d)後退時，對應之輥 39(39a〜39d)自各施壓構件73(73a〜73d，參照圖7)離開。藉 此，各施壓構件73(73a~73d)之壓縮狀態被解除。 複數個（本實施形態中為4個）輥3 9(39a〜39d)分別為設置 於對應之拉桿38(38a〜38d)前端之旋轉體。如圖5所示，各輥 〇 39(39a〜39d)設置成能夠以於鉛垂方向（與z軸大致平行之方 向，與箭頭AR1方向大致垂直之方向）延伸之旋轉軸為中心 旋轉。 因此’當於各輥39(39a〜39d)抵接於對應之施壓構件 73(73a〜73d)之狀態下，搬送單元50沿搬送方向（箭頭AR1方 向）移動時，各輥39(39a〜39d)以如下方式動作。即，各輥39 一邊將對應之施壓構件73C73a〜73d)壓縮，_邊於對應之施 壓構件73(73a〜73d)上沿著搬送方向旋轉。因此，搬送單元 〇 50可維持各輥39(39a〜39d)之壓縮狀態，且沿搬送方向移 動。其結果為，即便搬送單元50相對於變換姿勢單元丨〇及 主體單元40(固定側單元）移動時，亦可維持工件3之解除固 * 定狀態。 - <3.搬送單元之構成> 圖6及圖7係表示搬送單元50之構成之一例之前視圖及後 視圖。圖8係表示可動炎持部61(61a〜61〇之構成之一例之前 視圖。圖9係自圖8之v_v線觀察之導引爪69(69&)附近之剖 面圖。圖10係自圖7之W_W線觀察之導引爪69(69d)附近之 156415.doc .15- 201208960 剖面圖。 處，搬送單元50接觸保持工件3之外緣部4a，並且於執 二之^之交接位置P1G與由分斷單元85執行脆性材 之分斷之分斷位置P2G之間搬送立起姿勢之工件3。 藉此庇*夠抑制包含搬送路徑於内之搬送單元5〇之設置 面積（P搬送單^50之移動區域尺寸）。因此，能夠減小基板 分斷裝置1之尺寸。 二如圖6及圖7所示’搬送單元別主要包含固定台η及旋轉 台52。此處，本實施形態之搬送單元5〇設置成能夠藉由例 未圖示之線性馬達而相對於變換姿勢單元1 〇、主體單元 40及非接觸保持單元8〇等移動。 旋轉台52是相對於較台51旋轉之圓盤狀之旋轉部。如 圖6及圖7所示，旋轉台52自由轉動地嵌入至形成於固定台 51之圓形狀之貫通孔513中。而且，旋轉台52具有將工件3 固定之固定機構60。另外，對於固定機構6〇之構成於下文 中闡述。 固定台51用作安裝例如用以使旋轉台52旋轉之旋轉要 素及用以使固疋台5 1及旋轉台5 2相對於主體單元4〇行進 之行進要素之安裝部。如圖6及圖7所示，固定台51主要包 含導塊55、馬達56及皮帶57。 如圖6所示’複數個（本實施形態中為6個）導塊55設置於 固定台51之正面51b。另外，於各導塊55之内部將複數個滾 珠（省略圖示）設置成能夠旋轉。而且，各導塊55安裝於對應 之導件43、44時，各導塊55内之滾珠（省略圖示）以能夠旋轉 156415.doc -16- 201208960 之狀態與對應之導件43、44接觸。 藉此，當各導塊55沿著對應之導件43、44(即沿著搬送方 向（箭頭AR1方向））移動時，各導塊乃内之滾珠（省略圖示） 於對應之導件43、44上旋轉。因此，固定台51能夠沿著導 件43、44順利地行進。 馬達56係對旋轉台52賦予旋轉力之驅動部。皮帶57將由 馬達56賦予之旋轉力傳遞至旋轉台52。如圖6所示，皮帶57 捲繞於旋轉台52、及安農於馬達56之旋轉轴56a前端之馬達 用滑輪58上。藉此’若馬達56旋轉，則时於固定機構6〇 之工件3旋轉。 張力調整用滑輪59調整賦予至皮帶57之張力。本實施形 ‘vl中張力11周整用滑輪59之位置（例如z轴方向上之位置）係 由未圖示之定位機構來調整。藉此，可容易地消除皮帶57 之4弛，並且可容易地調整皮帶57之張力。因此，能夠良 好地維持旋轉台52之旋轉狀態。 <3·1.固定機構之構成> 固定機構60將平板狀之工件3以立起姿勢固定。如圖6及 圖7所示，固定機構6〇主要包含複數個夾持部〜61c)、 62及複數個擠壓部71。 複數個夾持部61(61a〜61c)、62將配置於與擠壓部η之間 之工件3之外緣部4a夾持。如圖7所示，複數個夾持部 61(61a〜61c)、62分別沿著擠壓框”而設置。 另外，以下說明中，將標註符號61(61a〜61c)之夾持部稱 為「可動失持部」，將標註符號62之夾持部稱為「固定夾持 1564l5.doc -17· 201208960 部」。 即，複數個夾持部包含複數個可動夾持部61(61a〜61c)及 固定失持部62。再換言之，複數個夾持部中之一部分為複 數個可動夾持部61(61a〜61c) ’複數個夾持部中之其餘部分 為固定夾持部62。 複數個（本實施形態中為3個）可動夾持部61(61a〜61e)分 別於相對於擠壓框72接近或離開之方向進退。如圖7及圖8 所示，各可動夾持部61 (6 1 a〜61 c)主要包含抵接部63、轉動 板64、施壓構件66、可動導件67(67a〜67c)及導引爪 69(69a~69c)。 此處，可動夾持部61 a〜61c具有彼此相同之硬體構成。因 此，以下僅對可動夾持部61a之硬體構成進行說明。 抵接部63係由例如金屬成形之球狀體，且安裝於轉動板 64上。轉動板64是以轉動軸64a為中心轉動之板體。例如， 旋轉致動器41(413)之搖桿42(42&)(參照圖1及圖2)擺動，搖 桿42(42a)抵接於對應之夾持部61 (61 a)之抵接部63時，轉動 板64以轉動軸64a為中心向箭頭rj方向轉動。 連桿65為連接轉動板64及可動導件67(67a)之寬度較窄之 板體。連样65之一端利用轉動軸65a而與轉動板64連動連 結，且連桿65之另一端利用轉動軸65b而與可動導件67(67勾 連動連結。 施壓構件66由彈簧等彈性構件形成。如圖8所示，施壓構 件66之一端66a固定於可動側之轉動板64上，施壓構件“之 另一端66b固定於固定側之強化板64b。藉此，若轉動板64 156415.doc -18- 201208960 沿箭頭R1方向轉動’則施壓構件66對轉動板64向與箭頭旧 方向相反之方向施壓。 可動導件67(67a)為平板狀之可動構件。可動導件67向相 對於擠壓框72接近或離開之方向進退，由此來調整工件3 之固定狀態。 即，利用旋轉致動器41(41a)使搖桿42(42a)擺動，使轉動 板64沿箭頭R!方向轉動時，可動導件67(67a)向自擠壓框72 離開之方向移動。藉此，可動導件67(67a)成為夾持解除狀 態。 另一方面’當利用旋轉致動器41(41&)使搖桿42(42a)回到 擺動前之位置，由於施壓構件66之施壓力轉動板64向與箭 頭R1方向相反之方向轉動時，可動導件67(67a)向接近於擠 壓框72之方向移動。藉此，可動導件67(67a)成為其與擠壓 框72之間能夹持工件3之狀態。 如此’設置於主體單元4〇之複數個旋轉致動器 O 41(41a〜41c)用作驅動部（第1驅動部），使複數個夾持部 61 (61 a〜61 c)、62中之一部分（複數個可動夾持部6丨a〜6丨c)向 相對於擠壓框72接近或離開之方向進退。 如圖8所不，缺口 60a係形成於可動導件67之擠壓框72侧 ' 之凹口。此處，當於變換姿勢單元10之交接部20與搬送單 兀50之間父接工件3時，把持爪23(23^可配置於由缺口 6如 形成之空間（例如間隙75(75a))中（參照圖8及圖丨丨至圖13卜 因此，於父接工件3時，能夠有效防止把持爪23(23a)與可動 導件67(67a)相干擾。 156415.doc -19- 201208960 複數個（本實施形態中為兩個）導引爪69(69a)與可動導件 67(67a)及擠壓框72協作，從而夾持工件3 ^如圖8所示，導 引爪69(69a)於沿著對向之擠壓框72之輪廓線之方向上離開 而文裝於可動導件67(67a)上。而且，如圖9所示，以導引爪 69(69a)之階差面60b位於可動導件67(67a)之下端面6〇c之 更下方之方式，將導引爪69(69a)安裝於可動導件67(67a) 上。 因此，如圖9所示，藉由可動導件67(67a)之下端面6〇(：、 導引爪69(69a)之階差面60b及擠壓框72之對向面6〇d與工件 3接觸，而實現可動夾持部61(61a)及擠壓部了丨對工件3之夾 持。 如圖7所不，固定夾持部62固定於擠壓框72附近。如圖7 所示，固定央持部62主要包含固定導件08及導引爪69(69d)。 固疋導件68為平板狀之固定構件。即，固定導件68與可 動導件67(67a〜67c)不同，不於相對於擠壓框72接近或離開 之方向上進退，而是固定於旋轉台52上。 藉此，能夠以固定夾持部62之位置為基準容易地執行工 件3相對於固定機構60之定位。因此，藉由使用複數個可動 夾持部61(61a〜61c)及固定夾持部62而能夠良好地將工件3 夹持及夾持解除。 如圖7所示’缺口 68a係形成於固定導件⑽之擠壓框72側 之凹口。此處，當於變換姿勢單元1〇之交接部2〇與搬送單 凡5〇之間交接工件3時’把持爪23(23d)可配置於由缺口 Ma 7成之空間（例如間隙75(75d))中（參照圖7及圖丨丨至圖Η)。 1564l5.d〇c -20- 201208960 因此，於交接工件3時，能夠有效防止把持爪23(23 d)與固定 導件6 8相干擾。 複數個（本實施形態中為兩個）導引爪69(69d)與固定導件 68及擠麼框72協作’從而夾持工件3 ^如圖7所示，導引爪 69(69d)於沿著對向之擠壓框72之輪廓線之方向上離閧而安 ' 裝於固定導件68上。而且，如圖1 〇所示，以導引爪69(69d) 之階差面60b位於比固定導件68之側端面Mb更靠擠壓框72 ◎ 側之方式，將導引爪69(69d)安裝於固定導件68上。 因此，如圖9所示，藉由固定導件68之側端面681?、導引 爪69(69d)之階差面60b及擠壓框72之對向面60d與工件3接 觸，來實現固定夾持部62及擠壓部71對工件3之夾持。 擠壓部71藉由於與可動夾持部6i(61a〜61c)及固定夾持部 62之間夾持工件3來擠壓工件3之外緣部4a。如圖7所示，擠 壓部71主要包含擠壓框72及複數個施壓構件73 (73 a〜73 d)。 如圖6及圖7所示，擠壓框72形成為環狀（更具體而言為矩 Q 形環狀）’且安裝於旋轉台52之中央附近。如圖9及圖1〇所 示’擠壓框72自工件3之第2主面3b側對工件3之外緣部4a進 行擠壓。 • 複數個（本實施形態中為4個）施壓構件73(73a〜73d)由彈 • 簧等彈性構件形成。如圖7所示，各施壓構件73(73a〜73d) 舆擠壓框72之四個角部中之對應之角連結。 此處，若各施壓構件73(73a〜73d)自對應之擠壓用氣缸 37(37a〜37d)(參照圖4及圖5)接收自圖7之紙面之正面朝向 背面之方向（即與箭頭AR2方向相反之方向）之力，則各施壓 156415.doc -21· 201208960 構件73(73a〜73d)被壓縮。即，擠壓部35之擠壓用氣缸 37(37a〜37d)用作向對應之施壓構件73(73a〜73d)賦予壓縮 力之驅動部（第2驅動部）。 另一方面，當拉桿38(38a〜38d)後退，輥39(39a〜39d)自對 應之施壓構件73(73a〜73d)離開時，各施壓構件73(73a〜73d) 對擠壓框72施壓箭頭AR2方向（施壓方向）之施壓力。 藉此’工件3因受到來自各施壓構件73(73a〜73d)之施壓 力’而被可動夾持部6l(61a~61c)及固定夾持部62與擠壓框 72爽持。其結果為’使工件3固定於固定機構6〇。 如此’固定機構60上之工件3之固定狀態藉由變換姿勢單 元10之擠壓用氣缸37(37&〜37#(第2驅動部）及主體單元4〇 之旋轉致動器41(4 la〜41c)(第1驅動部）予以調整。 即，藉由搬送單元50之固定機構60、變換姿勢單元1〇之 擠壓用氣缸37(37a〜37d)、及主體單元4〇之旋轉致動器 4 1 (41 a〜4 lc)’執行成為搬送對象之工件3之固定。 對此，在本實施形態中，亦將變換姿勢單元1〇、主體單 元40及搬送單元50統稱為「搬送系統」。 <3.2·工件之固定方法> 圖11至圖13係用以說明由固定機構6〇對工件3之固定步 驟及解除固；t步驟之後視圖。此處，對將呈立起姿勢之工 件3固定於固定機構60之步驟進行說明。 另外，該固定步驟是藉由控制單元90控制變換姿勢單元 1〇、主體單元4〇、搬送單元50中所含之各要素之動作來實 156415.doc '22- 201208960 又，開始正式固定步驟之前，使搬送單元50移動至交接 位置P10之解除位置Pll(參照圖2)，且工件3已由各吸附部 25(25a〜25d)予以吸附保持。 在正式固定步驟中，首先，利用擺動部3〇使交接部2〇移 動（擺動）。藉此，由交接部20保持之工件3變成立起姿勢， 並使工件3移動至搬送單元50之固定機構6〇附近。 其次，使設置於主體單元40之複數個旋轉致動器 0 41(41&〜41<:)(參照圖2)動作，且使各搖桿42(423〜42〇)擺動。 藉此，使各可動夾持部61(61a〜61c)之可動導件67(67a〜67c) 向自擠壓框72離開之方向移動。 繼而，使複數個擠壓用氣缸37(37a〜37d)動作，從而使各 拉桿38(38a~38d)自氣缸主體前進。藉此，各施壓構件 73(73a 73d)被對應之輥39(39a〜39d)壓縮，使擠壓框72向與 各施壓構件73(73a〜73d)之施壓方向（箭頭AR2方向）相反之 方向移動。 Ο 、、塵而，使搬送單元50自交接位置P10之解除位置P11移動 至固疋位置P12(參照圖1及圖2)。藉此，各擠壓用氣缸 7(37a 37d)之觔端之輥39(39a〜39d)將對應之施壓構件 • 73(73a〜73d)壓縮，且於施壓構件73(73a〜73d)上方旋轉。因 此搬送單元5〇於已使擠壓框72自工件3離開之狀態下沿著 搬达方向移動。繼而，於擠壓框72已自工件3離開之狀態 下使工件3之外緣部4a抵接於固定導件68之側端面68 10)。 、 而於工件3之外緣部4a抵接於固定導件68之側端面 I56415.doc •23· 201208960 68b(圖10)之狀態下，使旋轉致動器41(4la〜41c)動作，從而 使對應之搖桿42(42a〜42c)回到擺動前之位置。 藉此，各可動夾持部61(6la〜6lc)之可動導件67(67a〜67c) 向接近於擠壓框72之方向移動。因此，使工件3之外緣部4a 抵接於各可動導件67(67a〜67c)。 繼而，於工件3之外緣部4a抵接於各可動夾持部 6 l(61a〜61c)及固定夾持部62之狀態下’使各擠壓用氣缸 37(3<7a〜37d)動作’從而使各拉桿38(38a〜38d)後退。 藉此，自各擠壓用氣缸37(37a〜37d)賦予至對應之施壓構 件73(73a〜73d)之壓縮力解除賦予，擠壓框72便向各施壓構 件73之施壓方向移動。繼而，如圖9及圖1〇所示，可動導件 67(67a〜67c)及固定導件68之階差面60b與擠壓框72之對向 面60d之距離變窄。 因此’工件3被夾於可動夾持部61 (6 1 a〜61 c)及固定夾持部 62與擠壓部71之間，立起姿勢之工件3由固定機構6〇予以固 定。即，根據正式固定步驟，可將立起姿勢之工件3良好地 固定於固定機構60上。 繼而，於工件3由固定機構60固定之狀態下，解除各吸附 部25(25a〜25d)之吸附狀態。藉此，交接部2〇對工件3之保持 狀態解除’工件3之固定步驟完成。 <3·3.工件之解除固定方法> 此處，一邊參照圖11至圖13，一邊針對藉由固定機構 而以立起姿勢被固定之工件3，說明解除該工件3之固定狀 態之步驟。 156415.doc -24- 201208960 另外，該解除步驟與工件3之固定步驟同樣地是藉由控制 單元90控制變換姿勢單元1〇、主體單元4〇、搬送單元5〇中 所包含之各要素之動作來實現。 又’開始正式解除步驟之前，使搬送單元5〇移動至交接 位置P10之固定位置p丨2(參照圖2)，且工件3已由固定機構 60固定。 在正式解除步驟中，首先，將由固定機構6〇固定之工件3 由各吸附部25(25a〜25d)予以吸附。藉此，工件3在被固定於 固定機構60之狀態下由交接部2〇予以保持。 其次’於工件3之外緣部4a抵接於複數個可動夾持部 61 (61 a〜61 c)及固定夹持部62之狀態下’使複數個擠壓用氣 缸37(37a〜37d)(第2驅動部）動作’從而各拉桿38(38a~38d) 自氣缸主體前進。 藉此，各施壓構件73(73a〜73d)被對應之輥39(；39a〜；39d) 壓縮’使擠壓框72向與各施壓構件73(73a〜73d)之施壓方向 (箭頭AR2方向）相反之方向移動。而且，如圖9及圖1〇所示， 可動導件67(67a~67c)及固定導件68之階差面60b與擠壓框 72之對向面60d之距離擴大。因此’固定機構60對立起姿勢 之工件3之固定被解除，工件3由交接部20之各吸附部 25(25a〜25d)吸附保持。 如此，擠壓部35之各擠壓用氣缸37(37a〜37d)壓縮對應之 施壓構件73(73a〜73 d)，由此可解除工件3之固定狀態。 繼而，於工件3之外緣部4a抵接於複數個可動夾持部 61(61a〜61c)及固定夾持部62之狀態下，使複數個旋轉致動 156415.doc -25- 201208960 器4l(41a〜41c)(第1驅動部）動作，從而使各搖桿42(42a〜42c) 擺動。藉此，使各可動夾持部61(61a〜61c)之可動導件 67(67a〜67c)向自擠壓框72離開之方向移動。 繼而，使搬送單元50自交接位置P10之固定位置pi2移動 至解除位置ΡΠ(參照圖1及圖2)。藉此，各擠麼用氣缸 37(37a〜37d)如端之幸昆39(39a〜39d)將對應之施壓構件 73(73a〜73d)壓縮，且於施壓構件73(73a〜73d)上旋轉。因 此’搬送單元50於已使擠壓框72自工件3離開之狀態下沿著 搬送方向移動。而且，於擠壓框72自工件3離開了之狀態 下’工件3之外緣部4a自固定導件68之侧端面68b(圖1〇)離 開。如此，根據正式解除步驟，能夠良好地解除由固定機 構60固定之工件3之固定狀態。 繼而，由擺動部30使交接部20移動（擺動），藉此由交接 部20保持之工件3自搬送單元50之固定機構60離開。而且， 工件3自固定機構6〇離開之後，使複數個擠壓用氣缸 37(37a〜37<1)之拉桿3 8(38a〜38d)後退，由此擠壓框72向施壓 方向（箭頭AR2方向）移動，工件3之解除固定步驟完成。 <4.非接觸保持單元之構成> 圖14係表示非接觸保持單元8〇之構成之一例之前視圖。 此處’非接觸保持單元8 〇將如上所述般由搬送單元5 〇接觸 保持之工件3之第1主面3a輔助性地非接觸保持。如圖14所 示’非接觸保持單元8〇主要包含安裝台8丨、複數個第1吸引 部83及複數個第2吸引部84。 此處’本實施形態中，亦將符號83之「第1吸引部」與符 156415.doc -26- 201208960 號84之「第2吸引部84」統稱為「吸引部」。即，複數個吸 引部包含複數個第1吸引部83及複數個第2吸引部84。 安裝台81以與行進至分斷位置P2〇為止之搬送單元5〇對 向之方式設置。如圖2所示，安裝台81固定於主體單元4〇 上。而且，如圖1及圖14所示，安裝台81之鉛垂面81a用作 安裝複數個第1吸引部83及複數個第2吸引部84之安裝面。 插入孔81b為於鉛垂方向（與z軸平行之方向）延伸之貫通 長孔，且形成於安裝台81之中央附近。第1分斷棒86經由插 入孔81b到達工件3之第1主面3a。 如圖1及圖14所示，複數個吸引部（複數個第1吸引部83及 複數個第2吸引部84)設置於安裝台81之錯垂面81 a上。複數 個吸引部吸引對向之立起姿勢之工件3之第1主面3a，藉 此，以非接觸狀態保持工件3。此處，本實施形態中，作為 複數個第1吸引部83及複數個第2吸引部84亦可使用伯努利 吸盤。 如圖14所示，複數個（本實施形態中為12個）第1吸引部83 於沿著形成於安裝台81上之插入孔81b之長度方向兩侧之 狀態下’設置於安裝台81之鉛垂面81a上。各第1吸引部83 由例如伯努利吸盤構成。藉此，能夠藉由各第1吸引部83 吸引對向之工件3而將工件3以非接觸狀態保持。 如圖14所示，複數個（本實施形態中為12個）第2吸引部84 於自兩側夾持複數個第1吸引部83之狀態下，設置於安裝台 81之鉛垂面81a上。各第2吸引部84與第1吸引部83同樣地由 例如伯努利吸盤構成。藉此，各第2吸引部84與第1吸引部 156415.doc -27- 201208960 83同樣地吸引對向之工件3，由此能夠將工件3以非接觸狀 態保持。 此處’如圖14所示，各第1吸引部83之直徑小於各第2吸 引部84之直徑。而且，如圖丨4所示，複數個第i吸引部83 中相鄰接之第1吸引部83彼此之間隔D1(第1間隔）小於複數 個第2吸引部84中相鄰接之第2吸引部84彼此之間隔d2(第2 間隔）。 如此’複數個第1吸引部83比複數個第2吸引部84更密集 地配置。藉此，能夠更切實地將插入孔81b附近之工件3(換 言之’第1分斷棒86附近之工件3)非接觸保持。因此，能夠 良好地執行脆性材料基板7之分斷。 <5.分斷單元之構成> 圖15係表示分斷單元85之構成之一例之俯視圖。此處， 分斷單70 85將由搬送單元5〇及非接觸保持單元8〇形成保持 狀態之脆性材料基板7沿著劃線8分斷。如圖丨5所示，分斷 單70 85主要包含第1分斷棒86及複數個第2分斷棒87。 第1分斷棒86以經由插入孔81b到達搬送單元5〇側之方式 進退。如圖14及圖15所示，第丨分斷棒86沿著安裝台81之插 入孔81b於一個方向（插入孔81b之長度方向，z軸方向）（以下 簡稱為「延伸方向」）延伸。 複數個（本實施形態中為2根）第2分斷棒87夾持由搬送單 元50保持之工件3而設置於第丨分斷棒％之相反側。各第2 刀斷棒87於與第1分斷棒86平行之方向（z軸方向）延伸。 此處，如圖15所示，搬送方向（箭頭AR1方向）上之複數個 156415.doc -28- 201208960 第2分斷棒87僅隔開所期望之距離⑴而配置。而且，如圖i5 所示，第2分斷棒87、第丨分斷棒％及第2分斷棒”沿著自交 接位置ΙΜ0朝向分斷位置P20之方向(γ軸負方向)配 置。 而且，第1分斷棒86自形成有劃線8之第2主面外之相反側 之第1主面3a側起（於此情形時，第1分斷棒86抵接於切割片 5)沿著劃線8賦予負載。Holding unit 156415.doc 201208960 However, in the case of the second embodiment, when the workpiece 3 is transported, the transport unit 50 moves, and the medium 'early (10) and the main unit 40 are stationary. Therefore, in the present embodiment, the conversion posture unit 疋 〇 〇 and the main body unit 4 are collectively referred to as "fixed side single 7G [., f 2 7F 'non-contact holding unit 8G and the transfer unit located at the breaking position (4). In the 50-way manner, the workpiece 3 which is in contact with the holding edge portion 4a by the fixing mechanism of the transfer cassette 50 is non-contact-maintained. 0 "This is the outer edge portion 43 of the workpiece 3 which is in the form of a flat plate in a standing posture. The transport unit 50 (holding unit) that performs contact holding and the non-contact holding unit clearing holding device that performs "non-contact holding" on the main surface 3a of the workpiece 3. The knife breaking unit 85 divides the brittle material substrate 7 of the workpiece 3 held by the conveying unit 5〇 along the scribe line 8. Here, the *breaking unit applies stress to the brittle material substrate 7, and causes the vertical crack to grow from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side, thereby the brittle material substrate 7 Q Break. The control unit 90 controls the operations of the transform gesture unit 1A, the main body unit 4, the transport unit 50, the non-contact holding unit 8A, and the elements included in the disconnect unit 85, and realizes data calculation. As shown in FIG. 2 and FIG. 2, the control unit 90 mainly includes an R〇M 91, a RAM 92, and a CPU 93. A ROM (Read Only Memory) 91 is a so-called non-volatile portion, for example, a program 91a is stored. Further, as r〇m 91, a non-volatile memory which is freely readable and writable, that is, a flash memory can also be used. The RAM (Random Access Memory) 92 is a memory unit that volatilizes 156415.doc 201208960, and stores, for example, information for calculation of the CPU 93. The CPU (Central Processing Unit) 93 performs control in accordance with the program 91 a of the ROM 91 at a specific time (for example, a plurality of rotary actuators 41 (41a to 41c) and a plurality of cylinders 37 for extrusion (37a~) 37d) drive control, etc.). Further, detailed hardware configurations of the transformation posture unit 10, the transport unit 50, the non-contact holding unit 80, and the breaking unit 85 are explained below. <2. Configuration of Transformation Posture Unit> Figs. 4 and 5 are a side view and a plan view showing an example of the configuration of the transformation posture unit 1A. Here, the transformation posture unit 1 performs the operation of changing the posture of the workpiece 3 and the operation of transferring the workpiece 3 to the transport unit 5 as described above. As shown in FIGS. 4 and 5, the 'transformation posture unit 1' mainly includes a plurality of support portions 11 (11 a to 11 d), a plurality of positioning handles 13 (13a to 13 d), a delivery portion 2, and a swing portion 30. The pressing portion 35. A plurality of (four in the present embodiment) support units 11 (ii a to 11d) support the workpiece 3 that is transferred to the transformation posture unit 10. As shown in FIGS. 4 and 5, each of the support portions 11 (lla to lid) is fixed to a position at which the outer edge portion of the cutting ring 4 of the workpiece 3 can be supported, and does not interfere with the lifting table 21 of the interface portion 20. position. Further, as shown in Figs. 4 and 5, each of the support portions 11 (Ua to Ud) has balls 12 (12a to 12d) which are provided to be freely rotatable at the tip end thereof. Thereby, each of the balls 12 (12a to 12d) can support the workpiece 3 and rotate. Therefore, the position of the workpiece 3 supported by each of the support portions 11 (lla to lid) can be easily and flexibly changed. Here, the workpiece 3 supported by the plurality of support units U (lla to 11d) may be transferred to the conversion posture unit 1 from a transport robot (not shown), for example, 156415.doc •10-201208960. Further, the worker of the board breaking device 1 (hereinafter simply referred to as "worker") can also mount the workpiece 3 on the plurality of support portions 11. As shown in Figs. 4 and 5, a plurality of (four in the present embodiment) positioning handles l3 (13a to Ud) are provided adjacent to the corresponding grip claws 23 (23a to 23d). Each of the positioning handles 13 (13a to 13d) advances and retreats along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown) provided on the base portion 20a. Thereby, each of the grip handles 13 (13 & 〜13 (!) is such that the position of the workpiece 3 supported by each of the support portions 11 (11 & 11 11 (1) is the desired range, the workpiece 3 (more) Specifically, the outer edge portion 4a of the dicing sheet 5) is pressed in the direction toward the center 21a of the elevating table 21. The workpiece erroneous sensor 15 detects whether the workpiece 3 is supported by the plurality of supporting portions 11. As shown in Fig. 5 The workpiece confirmation sensor 15 is fixed to a position adjacent to the support portion 11|3 and does not interfere with the elevation table 21 of the delivery unit 20. "As the workpiece confirmation sensor 15, it is also possible to detect the presence or absence of non-contact, for example. The proximity sensor of the workpiece 3. The parent portion 20 holds the workpiece 3 in a horizontal posture and supported by a plurality of support portions. Moreover, the delivery portion 20 is transferred between the delivery unit 50 and the transport unit 50 by the swing portion 30. As shown in FIG. 4 and FIG. 5, the delivery unit 2 includes a lifting platform 21, a plurality of gripping claws 23 (23 a to 23 d), a plurality of adsorption portions 25 (25a to 25d), and The transfer cylinder 28. As shown in Fig. 5, the lift table 21 has a plurality of radially extending from the center 21a to the outside (this embodiment) In the form of four, the arms 26 (26a to 26d) are provided. The lifting table 21 prevents the workpiece 3 held by the gripping claws 23 and the suction portion 25 from being deformed. 156415.doc •11· 201208960 A plurality (in the present embodiment, 4) The holding claws 23 (23a to 23d) (the plurality of gripping portions) are held by the outer edge portion 4a of the workpiece 3 (more specifically, the cutting ring 4) in a posture between the horizontal posture and the standing posture. 4 and FIG. 5, each of the grip claws 23 (23a to 23d) is provided at the Si end 27 of the corresponding arm 26 (26a to 26d) (27 & ~ 27) <1) nearby. Here, as shown in Fig. 4, near the upper end of each of the positioning handles 13 (13a to 13d) (for convenience of illustration, only the vicinity of the upper end of the positioning handle 13b) is branched. Therefore, even if the positioning handles 13 (l3a to 13d) advance and retreat for positioning the workpiece 3, the positioning handles 13 (13a to 13d) do not correspond to the corresponding grip claws 23 (23a to 23d) and the suction portion 25 (25a). ~25d) forms interference. Further, the base 3 is surrounded by the respective grip claws 23 (23a to 23d) by positioning the positioning handles 13 (13a to 13d) so that the position of the workpiece 3 is within a desired range. A plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) are provided corresponding to the respective grip claws 23 (23a to 23d), and adsorb the outer edge of the workpiece 3 (more specifically, the cutting ring 4). Part 4a. Therefore, after the plurality of positioning handles 13 (13a to 13d) are positioned, the workpiece 3 is sucked by the plurality of adsorption portions 25 (25a to 25d), thereby supporting the workpieces supported by the plurality of support portions 11 (1 la to 1 Id). 3 handed over to the handover department 2〇. In this manner, each of the grip claws 23 (23a to 23) and each of the adsorption portions 25 (25a to 2Μ) grip and suck the cutting ring 4. That is, the brittle material substrate 7 does not have the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d) is held or adsorbed. Therefore, the delivery unit 20 and the swinging portion 30 can perform the holding and changing posture of the workpiece 3 without bringing the scribe line 8 (refer to FIG. 3) formed on the brittle material substrate 7 (see FIG. 3). 156415.doc -12- 201208960 When the transfer cylinder 28 delivers the workpiece 3 in the standing position between the delivery unit 2 and the transport unit 50, the workpiece 3 is moved between the delivery unit and the transport unit π. As shown in Fig. 4, the transfer cylinder 28 includes a main body portion 28a and a tie rod 29. The puller 29 is provided to be movable forward and backward with respect to the main body portion 28a. As shown in Fig. 4, the end of the pull cup 29 is fixed to the lift table 21. Therefore, the workpiece 3 fixed in the standing posture on the elevation σ 21 moves between the delivery unit 2〇 and the transport unit 50 in response to the advance or the backward movement of the tie rod. The swing portion 30 is made by the intersection portion. 2〇 swings around the swing shaft 31, and the posture of the workpiece 3 held by the parent joint 20 is As shown in FIGS. 4 and 5, the swing portion 30 mainly includes a swing shaft 31, a swing frame 32, and a swing cylinder 33. The swing shaft 31 serves to make the joint portion 20 relative to the base portion 2 The central axis of the swing of 〇a. As shown in Fig. 5, the swing shaft 31 is rotatably supported by bearings 3〇a, 3〇b (shaft support). Moreover, the bearings 30a, 30b are respectively fixed to the corresponding brackets 3 ( : ❹ 30d. The oscillating frame 32 is composed of a plurality of (three in the present embodiment) plate bodies 32 & 〜32 £; formed frame. As shown in Fig. 5, 'fixed between the plate bodies 32a, 32c On the other hand, the transfer cylinder 2 is fixed to the plate body 32b. The swing cylinder 33 is a drive unit for swinging the delivery unit 20. As shown in Fig. 4, the swing cylinder 33 is provided. The main body portion 33a and the tie rod 34 are mainly included. The pull rod 34 is provided to be movable forward and backward with respect to the main body portion 33a. As shown in Figs. 4 and 5, the main body portion 33a is fixed to the base portion 20a of the interface portion 20, and the front end 34a of the tie rod 34 is fixed to the swing portion. The plate body 32a of the frame 32. 156415.doc -13- 201208960 Therefore, when the pull rod 34 advances from the main body portion 33a, The posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the horizontal posture to the standing posture. On the other hand, when the Tara and the 34 are retracted to the main body portion 33a, the workpiece 3 held by the grip claws 23 and the suction portion 25 is held. The posture is changed from the posture to the horizontal posture. The pressing portion 35 adjusts the load applied to the workpiece 3 from the fixing mechanism 6〇 of the conveying unit 5〇. Thereby, the fixing mechanism 6〇 performs the delivery of the self-intersection unit to the delivery sheet. The operation of fixing the workpiece 3 of the 7L50 and the action of releasing the fixed state of the workpiece 3. As shown in Figs. 4 and 5, the pressing portion 35 mainly includes a mounting frame 35&, a plurality of brackets 36 (36a to 36d), and a plurality of pressing cylinders 37 (37a to 37d). The mounting frame 35a and the plurality of brackets 36 (36a to 36) are used to fix a plurality of pressing cylinders 37 (37a to 37d) to the conversion posture unit 1A. As shown in Figs. 2 and 4, the female frame is shown. 35 a is formed in a frame shape and fixed to the base 2 〇 & and, as shown in Fig. 2, a plurality of (four in the present embodiment) brackets 36 (36a to 36d) are self-mounting frames 35a. The vertical plate serves as a mounting plate extending in the conveying direction of the conveying unit 5 (in the direction of the arrow AR1). The plurality of squeezing cylinders 3 7 (3 7a to 3 7d) respectively correspond to the applying members 73 (73a to 73d' Referring to Fig. 7), as shown in Fig. 4 and Fig. 5, each of the pressing cylinders 3 7 (37a to 3 7d) mainly includes a plurality of tie rods 38 (38, 38 (1) and a plurality of rollers 39 (39a to 39d). A plurality of (four in the present embodiment) tie rods 38 (383 to 38 (1) are respectively provided to be able to advance and retreat in the direction of the arrow AR2. Further, the front ends of the respective tie rods 38 (38a to 38d) are mounted correspondingly. Roller 39 (39a to 39d). Therefore, when each of the tie rods 38 (38a to 38d) advances, the corresponding roller 156415.doc -14 - 201208960 39 (39 & ~ 39 (1) abuts against each of the pressing members 73 (73 & ~ 73 (1, refer to the figure 7) Thereby, the pressing members 73 (73a to 73d) are compressed. On the other hand, when the respective tie rods 38 (38a to 38d) are retracted, the corresponding rollers 39 (39a to 39d) are fed from the respective pressing members 73 ( 73a to 73d are separated as shown in Fig. 7), whereby the compression state of each of the pressing members 73 (73a to 73d) is released. The plurality of (four in the present embodiment) rollers 3 9 (39a to 39d) are respectively Rotating bodies provided at the front ends of the corresponding tie rods 38 (38a to 38d). As shown in Fig. 5, each of the roller turns 39 (39a to 39d) is provided in a vertical direction (a direction substantially parallel to the z-axis, and an arrow) The rotation axis extending in the direction perpendicular to the direction of the AR1 is rotated about the center. Therefore, when the rollers 39 (39a to 39d) abut against the corresponding pressing members 73 (73a to 73d), the conveying unit 50 is transported along the center. When the direction (arrow AR1 direction) is moved, each of the rollers 39 (39a to 39d) operates as follows: that is, each of the rollers 39 compresses the corresponding pressing members 73C73a to 73d), and the corresponding pressing members 73 ( 73a to 73d) are rotated in the transport direction. Therefore, the transport unit 50 can maintain the compressed state of each of the rollers 39 (39a to 39d) and is moved in the transport direction. As a result, even if the transport unit 50 change positions with respect to the main unit and the square unit 40 Shu (fixed side unit) moves, releasing the workpiece 3 can be maintained constant while solid state. - <3. Configuration of transport unit> Figs. 6 and 7 are a front view and a rear view showing an example of the configuration of the transport unit 50. Fig. 8 is a front view showing an example of the configuration of the movable and inflamed holding portion 61 (61a to 61〇). Fig. 9 is a cross-sectional view of the vicinity of the guiding claw 69 (69 &) viewed from the v_v line of Fig. 8. Fig. 10 is a self-illustrating view. Section 156415.doc.15-201208960 in the vicinity of the guide claw 69 (69d) of the W_W line of 7 is observed. The conveying unit 50 contacts the outer edge portion 4a of the workpiece 3, and the transfer position P1G of the workpiece 2 The workpiece 3 in the standing position is transferred between the breaking position P2G and the breaking position P2G of the breaking of the brittle material by the breaking unit 85. Thereby, the installation area (P transporting order) of the conveying unit 5 including the conveying path is suppressed. Therefore, the size of the substrate breaking device 1 can be reduced. 2. As shown in Fig. 6 and Fig. 7, the transport unit mainly includes the fixed stage η and the rotary table 52. Here, the present embodiment The transport unit 5 is configured to be movable relative to the change posture unit 1 〇, the main body unit 40, the non-contact holding unit 8A, etc. by a linear motor (not shown). The rotary table 52 is rotated relative to the table 51. a disk-shaped rotating portion. As shown in FIGS. 6 and 7, the rotary table 52 is freely rotatable It is fitted into a circular through hole 513 formed in the fixed table 51. Further, the rotary table 52 has a fixing mechanism 60 for fixing the workpiece 3. Further, the configuration of the fixing mechanism 6A will be described later. Mounting portions such as a rotating element for rotating the rotary table 52 and a traveling element for moving the fixed table 51 and the rotary table 52 with respect to the main unit 4 are attached, as shown in FIGS. 6 and 7 The stage 51 mainly includes a guide block 55, a motor 56, and a belt 57. As shown in Fig. 6, a plurality of (six in the present embodiment) guide blocks 55 are provided on the front surface 51b of the fixed table 51. In addition, the guide blocks 55 are provided. In the interior, a plurality of balls (not shown) are rotatably provided. When the guide blocks 55 are attached to the corresponding guides 43 and 44, the balls (not shown) in each of the guide blocks 55 can be rotated 156,415. The state of doc -16-201208960 is in contact with the corresponding guides 43, 44. Thereby, when each guide block 55 moves along the corresponding guides 43, 44 (i.e., along the transport direction (arrow AR1 direction)), each Balls in the guide block (not shown) on the corresponding guides 43, 44 Therefore, the fixed table 51 can smoothly travel along the guides 43 and 44. The motor 56 is a drive unit that applies a rotational force to the turntable 52. The belt 57 transmits the rotational force given by the motor 56 to the rotary table 52. As shown in Fig. 6, the belt 57 is wound around the rotary table 52 and the motor pulley 58 that is augmented to the front end of the rotary shaft 56a of the motor 56. Thus, if the motor 56 rotates, the workpiece 3 of the fixed mechanism 6 is rotated. The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension 11-turning pulley 59 (for example, the position in the z-axis direction) is adjusted by a positioning mechanism (not shown). Thereby, the relaxation of the belt 57 can be easily eliminated, and the tension of the belt 57 can be easily adjusted. Therefore, the rotation state of the rotary table 52 can be maintained well. <3·1. Configuration of Fixing Mechanism> The fixing mechanism 60 fixes the flat workpiece 3 in the standing posture. As shown in Figs. 6 and 7, the fixing mechanism 6'' mainly includes a plurality of clamping portions ～61c) and 62 and a plurality of pressing portions 71. The plurality of holding portions 61 (61a to 61c) and 62 are placed between the outer edge portions 4a of the workpiece 3 disposed between the pressing portions η. As shown in Fig. 7, a plurality of gripping portions 61 (61a to 61c) and 62 are provided along the pressing frame, respectively. In the following description, the gripping portions of the reference numerals 61 (61a to 61c) are referred to as In the "movable dislocation unit", the grip portion of the symbol 62 is referred to as "fixed grip 1564l5.doc -17·201208960". That is, the plurality of holding portions include a plurality of movable holding portions 61 (61a to 61c) and a fixed missing portion 62. In other words, one of the plurality of gripping portions is a plurality of movable grip portions 61 (61a to 61c). The remaining portion of the plurality of grip portions is the fixed grip portion 62. A plurality of (three in the present embodiment) movable grip portions 61 (61a to 61e) advance and retreat in a direction approaching or departing from the pressing frame 72, respectively. As shown in FIGS. 7 and 8, each of the movable holding portions 61 (6 1 a to 61 c) mainly includes an abutting portion 63, a rotating plate 64, a pressing member 66, a movable guide 67 (67a to 67c), and a guide. The claw 69 (69a to 69c). Here, the movable holding portions 61a to 61c have the same hard body configuration. Therefore, only the hardware configuration of the movable grip portion 61a will be described below. The abutting portion 63 is formed of, for example, a metal-formed spherical body and is attached to the rotating plate 64. The rotating plate 64 is a plate body that rotates around the rotating shaft 64a. For example, the rocker 42 (42 &) of the rotary actuator 41 (413) swings (see FIGS. 1 and 2), and the rocker 42 (42a) abuts against the corresponding grip portion 61 (61 a). At the time of the portion 63, the rotating plate 64 rotates in the direction of the arrow rj around the rotating shaft 64a. The link 65 is a plate body having a narrow width connecting the rotating plate 64 and the movable guide 67 (67a). One end of the sample 65 is coupled to the rotating plate 64 by the rotating shaft 65a, and the other end of the link 65 is coupled to the movable guide 67 (67) by the rotating shaft 65b. The pressing member 66 is formed of an elastic member such as a spring. As shown in Fig. 8, one end 66a of the pressing member 66 is fixed to the rotating plate 64 on the movable side, and the other end 66b of the pressing member is fixed to the reinforcing plate 64b on the fixed side. Thus, if the rotating plate 64 156415. Doc -18-201208960 Rotating in the direction of the arrow R1', the pressing member 66 presses the rotating plate 64 in a direction opposite to the old direction of the arrow. The movable guide 67 (67a) is a flat movable member. The movable guide 67 is oriented The fixed state of the workpiece 3 is adjusted with respect to the direction in which the pressing frame 72 approaches or exits, thereby adjusting the fixed state of the workpiece 3. That is, the rocker 42 (42a) is swung by the rotary actuator 41 (41a) so that the rotating plate 64 is along the arrow R When the direction is rotated, the movable guide 67 (67a) moves in the direction away from the pressing frame 72. Thereby, the movable guide 67 (67a) becomes the clamp release state. On the other hand, when the rotary actuator 41 is used (41 &) causes the rocker 42 (42a) to return to the position before the swing due to the pressing member 66 When the pressing rotary plate 64 is rotated in the direction opposite to the direction of the arrow R1, the movable guide 67 (67a) moves in the direction close to the pressing frame 72. Thereby, the movable guide 67 (67a) becomes the pressing frame The state in which the workpiece 3 can be clamped between 72. Thus, a plurality of rotary actuators O 41 (41a to 41c) provided in the main body unit 4 are used as a driving portion (first driving portion) to make a plurality of clamping portions 61 (61 a~61 c), one of 62 (a plurality of movable clamping portions 6丨a to 6丨c) advances and retreats in a direction approaching or departing from the pressing frame 72. As shown in Fig. 8, the notch 60a The recess is formed on the side of the pressing frame 72 of the movable guide 67. Here, when the workpiece 3 is connected between the interface 20 of the changing posture unit 10 and the transport unit 50, the grip claw 23 is 23 (23^ It can be disposed in a space formed by the notch 6 (for example, the gap 75 (75a)) (refer to FIG. 8 and FIG. 13 to FIG. 13 , so that when the workpiece 3 is attached to the parent, the grip claw 23 (23a) can be effectively prevented from being The movable guide 67 (67a) interferes with each other. 156415.doc -19- 201208960 A plurality of (two in this embodiment) guide claw 69 (69a) and movable guide 67 (67a) and squeeze The frame 72 cooperates to clamp the workpiece 3. As shown in Fig. 8, the guiding claw 69 (69a) is separated from the contour line of the opposing pressing frame 72 and is attached to the movable guiding member 67 (67a). Further, as shown in Fig. 9, the guide claw 69 is guided in such a manner that the step surface 60b of the guiding claw 69 (69a) is located below the lower end surface 6〇c of the movable guide 67 (67a). 69a) is mounted on the movable guide 67 (67a). Therefore, as shown in Fig. 9, by the lower end surface 6 of the movable guide 67 (67a), the step surface 60b of the guiding claw 69 (69a) and the opposing surface 6〇d of the pressing frame 72 are The workpiece 3 is brought into contact, and the movable clamping portion 61 (61a) and the pressing portion are clamped to the workpiece 3. As shown in Fig. 7, the fixed clamping portion 62 is fixed near the pressing frame 72. The fixed holding portion 62 mainly includes a fixed guide member 08 and a guiding claw 69 (69d). The fixed guiding member 68 is a flat fixing member, that is, the fixed guiding member 68 and the movable guiding member 67 (67a to 67c). Differently, it does not advance or retreat in a direction approaching or departing from the pressing frame 72, but is fixed to the rotary table 52. Thereby, the workpiece 3 can be easily performed with respect to the fixing mechanism with reference to the position of the fixed clamping portion 62. Therefore, the workpiece 3 can be satisfactorily clamped and clamped by using a plurality of movable gripping portions 61 (61a to 61c) and a fixed grip portion 62. As shown in Fig. 7, the notch 68a is used. a notch formed on the side of the pressing frame 72 of the fixed guide member (10). Here, when the workpiece 3 is transferred between the transfer portion 2〇 of the change posture unit 1 and the transfer unit 5〇 The gripper 23 (23d) can be disposed in a space formed by the notch Ma 7 (for example, the gap 75 (75d)) (refer to Fig. 7 and Fig. 7 to Fig. 1). 1564l5.d〇c -20- 201208960 Therefore, When the workpiece 3 is transferred, the grip claws 23 (23 d) can be effectively prevented from interfering with the fixed guides 68. The plurality of (two in the present embodiment) guide claws 69 (69d) and the fixed guides 68 are squeezed. The frame 72 cooperates to clamp the workpiece 3. As shown in Fig. 7, the guiding claw 69 (69d) is mounted on the fixed guide 68 in the direction of the contour of the opposing pressing frame 72. Further, as shown in FIG. 1A, the guide claw 69 is guided so that the step surface 60b of the guide claw 69 (69d) is located closer to the side of the frame 72 ◎ than the side end surface Mb of the fixed guide 68. (69d) is attached to the fixed guide 68. Therefore, as shown in Fig. 9, by the side end surface 681 of the fixed guide 68, the step surface 60b of the guide claw 69 (69d), and the pair of the crush frame 72 The surface 60d is brought into contact with the workpiece 3 to effect the clamping of the workpiece 3 by the fixed clamping portion 62 and the pressing portion 71. The pressing portion 71 is separated from the movable clamping portion 6i (61a to 61c) and the fixed clamping portion 62. Clamping workpiece 3 between them to squeeze the outer edge of workpiece 3 4a. As shown in Fig. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of pressing members 73 (73a to 73d). As shown in Figs. 6 and 7, the pressing frame 72 is formed in a ring shape. (more specifically, a rectangular Q-shaped ring shape) 'and mounted near the center of the rotary table 52. As shown in FIGS. 9 and 1B, the pressing frame 72 faces the workpiece 3 from the second main surface 3b side of the workpiece 3. The outer edge portion 4a is pressed. • A plurality of (four in the present embodiment) pressing members 73 (73a to 73d) are formed of an elastic member such as a spring. As shown in Fig. 7, each of the pressing members 73 (73a to 73d) is joined to a corresponding one of the four corners of the pressing frame 72. Here, when the pressing members 73 (73a to 73d) are received from the corresponding pressing cylinders 37 (37a to 37d) (see FIGS. 4 and 5) from the front side of the paper surface of FIG. 7 toward the back side (ie, The force of the arrow AR2 in the opposite direction is applied to each of the pressing members 156415.doc - 21 · 201208960. The members 73 (73a to 73d) are compressed. In other words, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions (second driving portions) for applying a compressive force to the corresponding pressing members 73 (73a to 73d). On the other hand, when the tie rods 38 (38a to 38d) are retracted and the rollers 39 (39a to 39d) are separated from the corresponding pressing members 73 (73a to 73d), the pressing members 73 (73a to 73d) are pressed against each other. 72 applies pressure to the direction of the arrow AR2 (pressure direction). Thereby, the workpiece 3 is held by the movable holding portions 61 (61a to 61c) and the fixed holding portion 62 and the pressing frame 72 by the pressing force ‘ from the pressing members 73 (73a to 73d). As a result, the workpiece 3 is fixed to the fixing mechanism 6A. Thus, the fixed state of the workpiece 3 on the fixing mechanism 60 is changed by the pressing cylinder 37 (37 &〜37# (second driving portion) of the posture unit 10 and the rotary actuator 41 of the main body unit 4 (4 la) ～41c) (first driving unit) is adjusted. That is, the fixing mechanism 60 of the conveying unit 50, the pressing cylinders 37 (37a to 37d) of the changing posture unit 1A, and the rotation of the main unit 4〇 are actuated. In the present embodiment, the conversion posture unit 1A, the main unit 40, and the transport unit 50 are collectively referred to as a "transport system." "." <3.2·Fixment Method of Workpiece> Figs. 11 to 13 are views for explaining the steps of fixing the workpiece 3 by the fixing mechanism 6 and releasing the solid; Here, the procedure of fixing the workpiece 3 in the standing posture to the fixing mechanism 60 will be described. Further, in the fixing step, the control unit 90 controls the actions of the elements included in the conversion posture unit 1〇, the main unit 4〇, and the transport unit 50. 156415.doc '22- 201208960 Further, before the formal fixing step is started The transport unit 50 is moved to the release position P11 (see FIG. 2) of the delivery position P10, and the workpiece 3 is sucked and held by each of the adsorption units 25 (25a to 25d). In the formal fixing step, first, the transfer portion 2 is moved (oscillated) by the swing portion 3〇. Thereby, the workpiece 3 held by the delivery unit 20 is brought into a posture, and the workpiece 3 is moved to the vicinity of the fixing mechanism 6A of the transport unit 50. Next, a plurality of rotary actuators 0 41 (41 &~41) are provided to the main unit 40. <:) (see Fig. 2) operates, and each of the rockers 42 (423 to 42 〇) is swung. Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72. Then, the plurality of pressing cylinders 37 (37a to 37d) are operated to advance the respective rods 38 (38a to 38d) from the cylinder main body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is pressed in the pressing direction with each of the pressing members 73 (73a to 73d) (in the direction of the arrow AR2). Move in the opposite direction.搬 and dust, the transport unit 50 is moved from the release position P11 of the delivery position P10 to the fixed position P12 (see Figs. 1 and 2). Thereby, the nip end rollers 39 (39a to 39d) of the respective squeezing cylinders 7 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d) and press the members 73 (73a to 73d). Rotate above. Therefore, the transport unit 5 moves in the direction of travel in a state where the crush frame 72 has been moved away from the workpiece 3. Then, the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68 10 of the fixed guide 68 in a state where the pressing frame 72 has been separated from the workpiece 3. When the outer edge portion 4a of the workpiece 3 abuts against the side end surface I56415.doc •23·201208960 68b (Fig. 10) of the fixed guide 68, the rotary actuator 41 (4la to 41c) is operated, thereby The corresponding rocker 42 (42a to 42c) is returned to the position before the swing. Thereby, the movable guides 67 (67a to 67c) of the movable gripping portions 61 (6a to 6lc) move in the direction close to the pressing frame 72. Therefore, the outer edge portion 4a of the workpiece 3 is brought into contact with each of the movable guides 67 (67a to 67c). Then, in the state in which the outer edge portion 4a of the workpiece 3 abuts against each of the movable nip portions 61 (61a to 61c) and the fixed nip portion 62, the respective cylinders for pressing 37 are used. <7a to 37d) operates to retract each of the tie rods 38 (38a to 38d). Thereby, the compression force is released from the respective pressing members 37 (37a to 37d) to the corresponding pressing members 73 (73a to 73d), and the pressing frame 72 is moved in the pressing direction of each of the pressing members 73. Then, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is narrowed. Therefore, the workpiece 3 is sandwiched between the movable holding portion 61 (6 1 a to 61 c) and the fixed holding portion 62 and the pressing portion 71, and the workpiece 3 in the standing posture is fixed by the fixing mechanism 6''. That is, according to the formal fixing step, the workpiece 3 in the standing posture can be satisfactorily fixed to the fixing mechanism 60. Then, in a state where the workpiece 3 is fixed by the fixing mechanism 60, the adsorption state of each of the adsorption portions 25 (25a to 25d) is released. Thereby, the holding portion 2 解除 releases the holding state of the workpiece 3, and the fixing step of the workpiece 3 is completed. <3·3. Method of releasing and fixing the workpiece> Here, with reference to Fig. 11 to Fig. 13, the workpiece 3 fixed in the standing posture by the fixing mechanism will be described, and the fixed state of the workpiece 3 will be released. step. 156415.doc -24- 201208960 In addition, in the same manner as the fixing step of the workpiece 3, the releasing step controls the actions of the elements included in the conversion posture unit 1A, the main unit unit 4, and the transport unit 5 by the control unit 90. to realise. Further, before the official release step is started, the transport unit 5 is moved to the fixed position p 丨 2 of the delivery position P10 (see Fig. 2), and the workpiece 3 is fixed by the fixing mechanism 60. In the main release step, first, the workpiece 3 fixed by the fixing mechanism 6 is sucked by each of the adsorption portions 25 (25a to 25d). Thereby, the workpiece 3 is held by the delivery portion 2 while being fixed to the fixing mechanism 60. Next, in the state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61 a to 61 c) and the fixed clamping portion 62, a plurality of pressing cylinders 37 (37a to 37d) are formed. (Second driving unit) operates "the respective levers 38 (38a to 38d) advance from the cylinder main body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (; 39a to 39d) to press the pressing frame 72 toward the pressing members 73 (73a to 73d) (arrows) The AR2 direction is moved in the opposite direction. Further, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is enlarged. Therefore, the fixing of the workpiece 3 to the standing posture by the fixing mechanism 60 is released, and the workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d) of the delivery portion 20. In this manner, the respective pressing cylinders 37 (37a to 37d) of the pressing portion 35 compress the corresponding pressing members 73 (73a to 73d), whereby the fixed state of the workpiece 3 can be released. Then, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, a plurality of rotary actuations are performed 156415.doc -25 - 201208960 4l (41a to 41c) (first driving unit) operates to swing the respective rockers 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72. Then, the transport unit 50 is moved from the fixed position pi2 of the delivery position P10 to the release position ΡΠ (see Figs. 1 and 2). Thereby, each of the pressing cylinders 37 (37a to 37d), such as the end of the Yukun 39 (39a to 39d), compresses the corresponding pressing members 73 (73a to 73d), and presses the pressing members 73 (73a to 73d). Rotate up. Therefore, the conveying unit 50 moves in the conveying direction in a state where the pressing frame 72 has been separated from the workpiece 3. Further, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 is separated from the side end surface 68b (Fig. 1A) of the fixed guide 68. As described above, according to the main release step, the fixed state of the workpiece 3 fixed by the fixing mechanism 60 can be satisfactorily released. Then, the transfer portion 20 is moved (oscillated) by the swing portion 30, whereby the workpiece 3 held by the delivery portion 20 is separated from the fixing mechanism 60 of the transport unit 50. Further, after the workpiece 3 is separated from the fixing mechanism 6〇, a plurality of cylinders 37 for extrusion are provided (37a to 37). The levers 3 8 (38a to 38d) of <1) are retracted, whereby the pressing frame 72 is moved in the pressing direction (direction of the arrow AR2), and the step of releasing the workpiece 3 is completed. <4. Configuration of Non-contact Holding Unit> Fig. 14 is a front view showing an example of the configuration of the non-contact holding unit 8A. Here, the non-contact holding unit 8 辅助 is auxiliary non-contactly held by the first main surface 3a of the workpiece 3 which is held and held by the transport unit 5 如上 as described above. As shown in Fig. 14, the 'non-contact holding unit 8' mainly includes a mounting table 8A, a plurality of first suction portions 83, and a plurality of second suction portions 84. Here, in the present embodiment, the "first attraction portion" of the symbol 83 and the "second attraction portion 84" of the symbol 156415.doc -26-201208960 84 are collectively referred to as "suction portion". That is, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84. The mounting table 81 is disposed to face the transport unit 5A that has traveled to the breaking position P2. As shown in Fig. 2, the mounting table 81 is fixed to the main body unit 4''. Further, as shown in Figs. 1 and 14, the vertical surface 81a of the mounting table 81 serves as a mounting surface for mounting a plurality of first suction portions 83 and a plurality of second suction portions 84. The insertion hole 81b is a through hole extending in the vertical direction (the direction parallel to the z-axis), and is formed in the vicinity of the center of the mounting table 81. The first breaking bar 86 reaches the first main surface 3a of the workpiece 3 via the insertion hole 81b. As shown in Figs. 1 and 14, a plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the staggered surface 81a of the mounting table 81. The plurality of suction portions attract the first main surface 3a of the workpiece 3 that is in the standing posture, whereby the workpiece 3 is held in a non-contact state. Here, in the present embodiment, a Bernoulli chuck can be used as the plurality of first suction portions 83 and the plurality of second suction portions 84. As shown in FIG. 14, a plurality of (12 in the present embodiment) first suction portions 83 are provided on the mounting table 81 in a state along both sides in the longitudinal direction of the insertion hole 81b formed in the mounting table 81. On the vertical plane 81a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, the workpiece 3 can be held in a non-contact state by sucking the opposing workpiece 3 by each of the first suction portions 83. As shown in FIG. 14, a plurality of (12 in the present embodiment) second suction portions 84 are provided on the vertical surface 81a of the mounting table 81 in a state in which a plurality of first suction portions 83 are sandwiched from both sides. . Similarly to the first suction portion 83, each of the second suction portions 84 is constituted by, for example, a Bernoulli chuck. As a result, each of the second suction portions 84 attracts the workpiece 3 in the same direction as the first suction portion 156415.doc -27-201208960 83, whereby the workpiece 3 can be held in a non-contact state. Here, as shown in Fig. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 84. Further, as shown in FIG. 4, the interval D1 (first interval) between the adjacent first suction portions 83 of the plurality of i-th attraction portions 83 is smaller than the second adjacent one of the plurality of second suction portions 84. The suction portions 84 are spaced apart from each other by d2 (second interval). Thus, the plurality of first suction portions 83 are arranged more densely than the plurality of second suction portions 84. Thereby, the workpiece 3 (in other words, the workpiece 3 in the vicinity of the first breaking bar 86) in the vicinity of the insertion hole 81b can be more reliably held in contact. Therefore, the breaking of the brittle material substrate 7 can be performed satisfactorily. <5. Configuration of Breaking Unit> Fig. 15 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking sheet 70 85 divides the brittle material substrate 7 which is held in the holding state by the conveying unit 5 〇 and the non-contact holding unit 8 沿着 along the scribe line 8. As shown in Fig. 5, the breaking unit 70 85 mainly includes a first breaking bar 86 and a plurality of second breaking bars 87. The first breaking bar 86 advances and retreats so as to reach the side of the conveying unit 5 via the insertion hole 81b. As shown in Fig. 14 and Fig. 15, the second breaking bar 86 extends in one direction (the longitudinal direction of the insertion hole 81b, the z-axis direction) (hereinafter simply referred to as "extension direction") along the insertion hole 81b of the mounting table 81. A plurality of (two in the present embodiment) second split bars 87 sandwich the workpiece 3 held by the transport unit 50 and are disposed on the opposite side of the second splitter bar. Each of the second blade breaking bars 87 extends in a direction (z-axis direction) parallel to the first breaking bars 86. Here, as shown in Fig. 15, a plurality of 156415.doc -28-201208960 second breaking bars 87 in the conveying direction (arrow AR1 direction) are disposed only by the desired distance (1). Further, as shown in Fig. i5, the second breaking bar 87, the second breaking bar %, and the second breaking bar are disposed along the direction from the transfer position ΙΜ0 toward the breaking position P20 (the negative direction of the γ axis). The first branching bar 86 is along the first main surface 3a side opposite to the second main surface on which the scribe line 8 is formed (in this case, the first breaking bar 86 abuts against the cutting piece 5) The line 8 is assigned to the load.

❹ 即，負载係自形成有劃線8之第2主面3b之相反側之第^ 主面33賦予至劃線8。因此，能夠良好且切實地執行沿著劃 線8之脆性材料基板7之分斷。 第1進退驅動部㈣藉由對第I分斷棒86賦予驅動力而使 第1分斷棒86於進退方向（箭頭梅方向，參照圖15)進退。 例如’第1進退驅動部86a於第！分斷棒％之延伸方向與劃線 8大致平订之狀態下使第j分斷棒^向又轴負方向移動，由此 使第1分斷棒86接近於脆性材料基板7之第i主面％。 第2進退驅動部87a藉由對複數個第2分斷棒87賦予驅動 力而使複數個第2分斷棒87於進退方向（箭頭娜方向，參照 圖15)進退。例如，第2進退驅動部W於複數個第2分斷棒 87之延伸方向㈣線8大致平行之㈣下使複數個第2分斷 棒87向X軸正方向移動’由此使複數個第2分斷棒^接近於 脆性材料基板7之第2主面3b。 若如此利用第i及第2進退驅動部…、心使第】及第以 斷棒86、87進退’則脆性材料基板7由該等^及第2分斷棒 %、87夾持。其結果為’呈立起姿勢之脆性材料基板7沿著 1564l5.doc -29- 201208960 劃線8分斷。 即’利用基板分斷裝置1執行之分斷處理中，第1及第2 分斷棒86、87接近於脆性材料基板7之方向（進退方向（箭頭 AR6方向））均與重力方向（Z軸負方向）大致垂直。 藉此’重力對第1及第2分斷棒86、87之影響相同。因此， 無需針對第1及第2分斷棒86、87之每一個採取用以減輕重 力影響之措施便可良好地將脆性材料基板7分斷。 <6.本實施形態之基板分斷裝置之優點> 如上所述，本實施形態之基板分斷裝置丨中，由搬送單元 50(保持單疋）保持脆性材料基板7時，第i及第2分斷棒％、 87配置於以立起姿勢保持之脆性材料基板7之兩主面3&、补 側。 此處，與本實施形態不同，對如下情況進行研究：第i 及第2分斷棒配置於脆性材料基板之上下方，使第丨及第2 分斷棒分別自脆性材料基板之上側及下側接近。於此情形 時，第1及第2分斷棒接近於脆性材料基板之方向與重力方 向所成之角分別約為〇c(deg)、18〇C3(deg)。即，重力對第i 及第2分斷棒之影響不同。其結果為，於未對重力之影響進 行任何調整之情形時，會產生自第i及第2分斷棒賦予至脆 性材料基板之負載不同之問題。 其次，如本實施形態，對如下情況進行研究：使第丨及第 2分斷棒86、87分別自以立起姿勢保持之脆性材料基板7之 兩主面3 a、3 b側接近。於此情形時，第i及第2分斷棒8 6、 ⑺接近於脆性材料基板7之方向與重力方向所成之角都約 156415.doc -30- 201208960 為 90°(deg)。 藉此，重力對第1及第2分斷棒86、87之影響相同。因此， 無需針對第1及第2分斷棒86、87之每一個採取用以減輕重 力影響之措施便可良好地將脆性材料基板7分斷。 而且，根據本實施形態之基板分斷裝置丨及其固定機構 . 6〇,工件3之外緣部乜由可動夾持部61(61a〜61c)及固定夾持 部62與擠壓部71良好地夾持。因此，可良好地將立起姿勢 〇 之工件3固定。 而且，本實施形態之基板分斷裝置1及其變換姿勢單元10 中，搬送單元50之固定機構60藉由自變換姿勢單元1〇之擠 f部35賦予之負載而執行工件3之固定及工件3之解除固 定。即，搬送單元50不需要用以執行工件3之固枝工件3 之解除固定之要素，從而無需將與該要素相關之配管及配 線配置於移動側（搬送單元50)與固定側（例如變換姿勢單元 等）之間。因此，藉由使用變換姿勢單元1〇而可提高行進 ◎ 時之搬送單元50之安全性及維護時之作業人員之作業效 而且，藉由本實施形態之基板分斷裝置⑸現之搬送系‘ ^借助來自設置於主體單元40及變換姿勢單元】〇(固以 =上之複數個旋轉致動器41(41，第1驅動部)及考 固塵“紅37(37卜37(1)(第2驅動部）之驅動力， 件3之固定及工件3之解除固定。 ^ ’搬送單元50不需要用以執行工件3之固定及工件化 *固疋之驅動部(第1及第2驅動部)，從而無需將與該要素 156415.doc -31 - 201208960 相關之酉己管及配線配置於移動側（搬送單元5〇)盘目定側（變 換姿ΐ單元1G及主體單元4G)之間。因此，可提高行進時之 搬送單元50之安全性及維護時之作業人員之作業效率。 進一而，本實施形態之基板分斷裝L及藉由該基板分斷裝 置1實現之保持裝置不僅由搬送單元5〇之固定機構6〇將工 件3之外緣部4&接觸保持，亦可藉由非接觸保持單元將工 件3之主面（更具體而言為第i主面非接觸保持。因此，即 便於因工件3之特性而無法將除了工件3之外緣部乜以外 ^ 件之主面3a、3b)接觸保持之情形時，亦可藉由搬送 單元50(保持單元）及非接觸保持單元⑽而將工件3良好地保 持。 <7.變形例> 以上，乜對本發明之實施形態進行了說明，但本發明並 不限疋於上述實施形態，而可進行各種變形。 (1) 本實施形態中，說明了可動導件67(67a〜67c)及導引 = 69(69a〜69c)如圖8及圖9所示相互獨立而構成，但並不限 定於此。例如，可動導件67(67a)及導引爪69(6如）亦可形成 為一體。 (2) 另外，本實施形態中，說明了搬送單元5〇相對於變 換姿勢單元i 0及主體單元4〇而移動，但並不限定於此。例 如，亦可為變換姿勢單元10及主體單元4〇相對於搬送單元 5 0而移動。 如此，各單元10、40及50之移動方式只要使搬送單元5〇 相對於變換姿勢單元10及主體單元4〇(固定側單元）而相對 1564l5.doc 201208960 性地移動即可。 (3)另外’本實施形態中，變換姿勢單元丨0之工件確認 感測器15(參照圖4及圖5)於升降台21附近僅設置一個，但工 件確認感測器15之個數並不限定於此。亦可於升降台21附 近没置複數個（兩個以上）工件確認感測器15。 【圖式簡單說明】 圖1係表示本發明之實施形態中之基板分斷裝置之構成 之一例之前視圖； 〇 圖2係表示本發明之實施形態中之基板分斷裝置之構成 之一例之後視圖； 圖3係表示工件之構成之一例之前視圖； 圖4係表示變換姿勢單元之構成之一例之側視圖； 圖5係表示變換姿勢單元之構成之一例之俯視圖； 圖6係表示搬送單元之構成之一例之前視圖； 圖7係表示搬送單元之構成之一例之後視圖； 〇 圖8係表示可動夾持部之構成之一例之前視圖； 圖9係自圖8之V-V線觀察之導引爪附近之剖面圖； 圖1〇係自圖7之W-W線觀察之導引爪附近之剖面圖； ' 圖11係用以說明固定機構對工件之固定步驟及解除固定 . 步驟之後視圖； 圖12係用以說明固定機構對工件之固定步驟及解除固定 步驟之後視圖； 圖13係用以說明固定機構對工件之固定步驟及解除固定 步驟之後視圖； 156415.doc -33· 201208960 圖14係表示非接觸保持單元之構成之一例之前視圖 圖15係表示分斷單元之構成之一例之俯視圖。 【主要元件符號說明】 1 基板分斷裝置 3 工件 3a 第1主面 3b 第2主面 4 切割環 4a 外緣部 4b 開口 5 切割片 7 脆性材料基板 8 劃線 9 電子零件 10 變換姿勢單元 ll(lla〜lid) 支持部 12(12a~12d) 滚珠 13(13a~13d) 定位把手 15 工件確認感測器 20 交接部 20a 基部 21 升降台 21a 中心 23(23a〜23d) 把持爪 156415.doc - 34 - 201208960That is, the load is applied to the scribe line 8 from the opposite main surface 33 on the opposite side to the second main surface 3b on which the scribe line 8 is formed. Therefore, the breaking of the brittle material substrate 7 along the scribe line 8 can be performed satisfactorily and reliably. In the first advance/retract drive unit (4), the first breaking lever 86 is moved forward and backward in the advancing and retracting direction (the arrow direction, see Fig. 15) by applying a driving force to the first breaking lever 86. For example, the first advance/retract drive unit 86a is at the first! When the extending direction of the breaking bar % is substantially aligned with the scribe line 8, the j-th breaking bar is moved in the negative direction of the axis, thereby bringing the first breaking bar 86 close to the i-th main of the brittle material substrate 7. surface%. The second advance/reverse drive unit 87a applies a driving force to the plurality of second breaking bars 87, and advances and retreats the plurality of second breaking bars 87 in the advancing and retracting direction (arrow direction, see Fig. 15). For example, the second advance/retract drive unit W moves the plurality of second breaking bars 87 in the positive X-axis direction under the (four) line 8 in which the plurality of second breaking bars 87 extend substantially parallel. The 2-part broken rod is close to the second main surface 3b of the brittle material substrate 7. When the i-th and second advancing and retracting drive units are used, and the first and second broken bars 86 and 87 are advanced and retracted, the brittle material substrate 7 is sandwiched by the second and second breaking bars % and 87. As a result, the brittle material substrate 7 in the upright posture is cut along the line 10 of 1564l5.doc -29-201208960. That is, in the breaking process performed by the substrate breaking device 1, the first and second breaking bars 86, 87 are close to the direction of the brittle material substrate 7 (the advancing direction (arrow AR6 direction)) and the gravity direction (Z axis) Negative direction) is approximately vertical. Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, it is not necessary to take measures for reducing the influence of gravity for each of the first and second breaking bars 86, 87, and the brittle material substrate 7 can be satisfactorily cut. <6. Advantages of the substrate breaking device of the present embodiment> As described above, in the substrate cutting device of the present embodiment, when the brittle material substrate 7 is held by the transport unit 50 (holding unit), the i-th and The second breaking bars % and 87 are disposed on the two main faces 3 & the complementary side of the brittle material substrate 7 held in the standing posture. Here, unlike the present embodiment, it is studied that the i-th and second-break bars are disposed above and below the brittle material substrate, and the second and second break bars are respectively from the upper side and the lower side of the brittle material substrate. The side is close. In this case, the angles of the first and second breaking bars close to the brittle material substrate and the gravity direction are approximately 〇c (deg) and 18 〇 C3 (deg), respectively. That is, gravity has different effects on the i-th and second-segment bars. As a result, when the adjustment of the influence of gravity is not performed, there is a problem that the load applied to the brittle material substrate from the i-th and second breaking bars is different. Next, according to the present embodiment, the second and second breaking bars 86 and 87 are brought close to each other on the two main faces 3 a and 3 b sides of the brittle material substrate 7 held in the standing posture. In this case, the angles of the i-th and second-breaking bars 86, (7) close to the brittle material substrate 7 and the direction of gravity are about 156415.doc -30-201208960 is 90° (deg). Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, it is not necessary to take measures for reducing the influence of gravity for each of the first and second breaking bars 86, 87, and the brittle material substrate 7 can be satisfactorily cut. Further, according to the substrate cutting device 本 and the fixing mechanism thereof of the present embodiment, the outer edge portion 工件 of the workpiece 3 is good by the movable nip portion 61 (61a to 61c), the fixed nip portion 62, and the pressing portion 71. Ground clamping. Therefore, the workpiece 3 in the standing posture can be satisfactorily fixed. Further, in the substrate cutting device 1 and the conversion posture unit 10 of the present embodiment, the fixing mechanism 60 of the transport unit 50 performs the fixing of the workpiece 3 and the workpiece by the load applied from the squeezing portion 35 of the change posture unit 1 3 is unfixed. In other words, the transport unit 50 does not need to perform the function of releasing and fixing the fixed workpiece 3 of the workpiece 3, and it is not necessary to arrange the piping and the wiring related to the element on the moving side (the transport unit 50) and the fixed side (for example, changing the posture). Between units, etc.). Therefore, by using the change posture unit 1〇, the safety of the transport unit 50 at the time of traveling and the work efficiency of the worker at the time of maintenance can be improved, and the substrate cutting device (5) of the present embodiment is now a transfer system. By means of the plurality of rotary actuators 41 (41, the first drive unit) and the test dust "Red 37 (37 Bu 37 (1)) The driving force of the 2 drive unit, the fixing of the member 3, and the release of the workpiece 3. ^ 'The transport unit 50 does not need to be used to perform the fixing and workpieceization of the workpiece 3 (the first and second drive units) Therefore, it is not necessary to arrange the respective pipes and wirings related to the elements 156415.doc -31 - 201208960 between the moving side (transport unit 5A) disk fixed side (converted posture unit 1G and main body unit 4G). Therefore, the safety of the transport unit 50 during traveling and the work efficiency of the worker during maintenance can be improved. Further, the substrate breaking device L of the present embodiment and the holding device realized by the substrate breaking device 1 are not only The fixing mechanism 6 of the transport unit 5〇 is outside the workpiece 3 The edge portion 4& contact is held, and the main surface of the workpiece 3 (more specifically, the i-th main surface is non-contact-maintained by the non-contact holding unit. Therefore, even the workpiece 3 cannot be removed due to the characteristics of the workpiece 3. When the outer surfaces 3a and 3b of the outer edge portion are in contact with each other, the workpiece 3 can be favorably held by the transport unit 50 (holding unit) and the non-contact holding unit (10). [Modifications] Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made. (1) In the present embodiment, the movable guides 67 (67a) have been described. ～67c) and the guide=69 (69a to 69c) are configured independently of each other as shown in Fig. 8 and Fig. 9. However, the present invention is not limited thereto. For example, the movable guide 67 (67a) and the guide claw 69 (6) (2) In the present embodiment, the transport unit 5〇 has been described as being moved relative to the change posture unit i 0 and the main unit unit 〇. However, the present invention is not limited thereto. For example, The transformation posture unit 10 and the main body unit 4 are moved with respect to the transport unit 50. Thus, The movement mode of the units 10, 40, and 50 may be such that the transport unit 5 is moved relative to the conversion posture unit 10 and the main unit 4 (fixed side unit) with respect to the 1564l5.doc 201208960. (3) In addition, this embodiment In the embodiment, the workpiece confirmation sensor 15 (see FIGS. 4 and 5) that changes the posture unit 丨0 is provided only in the vicinity of the elevation table 21, but the number of the workpiece confirmation sensors 15 is not limited thereto. A plurality of (two or more) workpiece confirmation sensors 15 are not disposed in the vicinity of the elevating table 21. [Brief Description of the Drawings] Fig. 1 is a front view showing an example of a configuration of a substrate cutting device in an embodiment of the present invention; 2 is a front view showing an example of a configuration of a substrate cutting device in accordance with an embodiment of the present invention; FIG. 3 is a front view showing an example of a configuration of a workpiece; and FIG. 4 is a side view showing an example of a configuration of a conversion posture unit; 5 is a plan view showing an example of a configuration of a transformation posture unit; FIG. 6 is a front view showing an example of a configuration of a transport unit; and FIG. 7 is a rear view showing an example of a configuration of a transport unit; FIG. 9 is a cross-sectional view of the vicinity of the guiding claw viewed from the line VV of FIG. 8; FIG. 1 is a cross-sectional view of the vicinity of the guiding claw viewed from the WW line of FIG. Fig. 11 is a view for explaining the fixing step of the fixing mechanism to the workpiece and releasing the fixing. The rear view of the step; Fig. 12 is a view for explaining the fixing step of the fixing mechanism to the workpiece and the step of releasing the fixing step; Fig. 13 is for explaining the fixing Fig. 14 is a plan view showing an example of the configuration of the disconnecting unit. Fig. 14 is a plan view showing an example of the configuration of the disconnecting unit. Fig. 14 is a plan view showing an example of the configuration of the disconnecting unit. [Main component symbol description] 1 Substrate breaking device 3 Workpiece 3a First main face 3b Second main face 4 Cutting ring 4a Outer edge portion 4b Opening 5 Cutting piece 7 Brittle material substrate 8 Cross-line 9 Electronic part 10 Transformation posture unit ll (lla~lid) Supporting portion 12 (12a to 12d) Ball 13 (13a to 13d) Positioning handle 15 Workpiece confirmation sensor 20 Handover portion 20a Base portion 21 Lifting table 21a Center 23 (23a to 23d) Holding claw 156415.doc - 34 - 201208960

25(25a~25d) 26(26a〜26d) 27(27a~27d) 28 28a 29 30 30a、30b 30c 、 30d 31 32 32a〜32c 33 33a 34 34a 35 35a 36(36a 〜36d) 37(37a〜37d) 38(38a〜38d) 39(39a 〜39d) 40 41(41a 〜41c) 吸附部 支臂 前端 交接用氣缸 主體部 拉桿 擺動部 軸承 托架 擺動軸 擺動框 板體 擺動用氣缸 主體部 拉桿 前端 擠壓部 安裝框 托架 擠壓用氣缸 拉桿 輥 主體單元 旋轉致動器 156415.doc -35- 201208960 42(42a〜42c) 搖桿 43 > 44 導件 50 搬送單元 51 固定台 51a 貫通孔 51b 正面 52 旋轉台 60 固定機構 60a ' 68a 缺口 60b 階差面 60c 下端面 60d 對向面 61(61a〜61c) 、 62 爽持部 63 抵接部 64 轉動板 65 連桿 66 、 73(73a〜73d) 施壓構件 67(67a~67c) 可動導件 68 固定導件 69(69a~69d) 導引爪 71 擠壓部 72 擠壓框 75(75a〜75d) 間隙 80 非接觸保持單元 156415.doc -36- 20120896025(25a~25d) 26(26a~26d) 27(27a~27d) 28 28a 29 30 30a, 30b 30c, 30d 31 32 32a~32c 33 33a 34 34a 35 35a 36(36a~36d) 37(37a~37d 38 (38a to 38d) 39 (39a to 39d) 40 41 (41a to 41c) Adsorption section arm front end delivery cylinder main body tie rod swinging part bearing bracket swinging shaft swinging frame plate body swinging cylinder main body part rod front end extrusion Presser mounting frame bracket extrusion cylinder rod roller body unit rotary actuator 156415.doc -35- 201208960 42 (42a~42c) rocker 43 > 44 guide 50 transport unit 51 fixed base 51a through hole 51b front 52 Rotary table 60 Fixing mechanism 60a '68a Notch 60b Step surface 60c Lower end surface 60d Opposing surface 61 (61a to 61c), 62 Sinking portion 63 Abutting portion 64 Rotating plate 65 Connecting rods 66, 73 (73a to 73d) Pressing member 67 (67a to 67c) Movable guide 68 Fixing guide 69 (69a to 69d) Guide claw 71 Pressing portion 72 Pressing frame 75 (75a to 75d) Gap 80 Non-contact holding unit 156415.doc -36 - 201208960

81 安裝台 81a 、81b 插入孔 83 第1吸引部 84 第2吸引部 85 分斷單元 86 第1分斷棒 86a 第1進退驅動部 87 第2分斷棒 87a 第2進退驅動部 90 控制單元 91 唯讀記憶體 91a 程式 92 隨機存取記憶體 93 中央處理單元 AR1 、AR2、AR3 箭頭 D1、 D2 間隔（第1及第2間隔） P10 交接位置 Pll 解除位置 P12 固定位置 P20 分斷位置 156415.doc -37-81 mounting bases 81a and 81b insertion holes 83 first suction portions 84 second suction portions 85 breaking units 86 first breaking bars 86a first forward and backward driving portions 87 second breaking bars 87a second forward and backward driving portions 90 control unit 91 Read-only memory 91a Program 92 Random access memory 93 Central processing unit AR1, AR2, AR3 Arrows D1, D2 Interval (1st and 2nd intervals) P10 Handover position Pll Release position P12 Fixed position P20 Break position 156415.doc -37-

Claims (1)

201208960 七、申請專利範圍： 1· 一種變換姿勢單元，其特徵在於：將平板狀之工件之姿 勢於水平姿勢及立起姿勢之間變換，並且在與搬送單元 之間交接呈立起姿勢之上述工件，且包含： ⑷交接部’其保持呈水平姿勢之上述工件，並且在與 上述搬达單元之間交接呈立起姿勢之上述工件；201208960 VII. Patent application scope: 1. A transformation posture unit, which is characterized in that the posture of the flat workpiece is changed between a horizontal posture and an upright posture, and the above-mentioned standing posture is transferred between the transfer unit and the transfer unit. a workpiece, and comprising: (4) a transfer portion that holds the workpiece in a horizontal posture, and transfers the workpiece in an upright position between the transfer unit and the transfer unit; (b)擺動部，其藉由使上述交接部擺動，而將由上述交 接》p保持之上述卫件之姿勢於水平姿勢與立起姿勢之間 ⑷擠壓部，其藉由對自上述搬送單元之固定機構賦予 :上述：件之負載進行調整，而使上述固定機構執行將 上逑交接部交接之上述工件固定之動作、及將上述工 件之固定狀態解除之動作。 2.如請求項1之變換姿勢單元，其令 上述工件包含： 環狀體，其於平板之中央形成有開口； 片材體，其以覆蓋上述環狀體之上述開口之方式安 …脆性材料基板’其以位於上述開口上之方式點附於上 述片材體，並且於位於貼附於上述片材體之幻主面之相 反側之第2主面形成有劃線； 上述交接部包含： ⑹）複數個把持部’由其各者把持上述環狀體之上述 外緣部；及 156415.doc 201208960 0-2)複數個吸 D，八各自與上述複數個把持部之各 者對應而設置，且吸附卜代搭此μ 次附上述3哀狀體之上述外緣部。 3.如請求項1或2之變換姿勢單元，其中 上述固定機構包含施壓構件，藉由來自上述施壓構件 之施壓力而固定上述工件； 而將上述工件之固 上述擠壓部藉由壓縮上述施壓構件 定狀態解除。 156415.doc(b) a swinging portion that swings the transfer portion to move the posture of the guard held by the transfer "p" between the horizontal posture and the standing posture (4) by pressing the transfer unit The fixing mechanism is configured to: adjust the load of the member, and cause the fixing mechanism to perform an operation of fixing the workpiece to which the upper jaw delivery portion is transferred and an operation of releasing the fixed state of the workpiece. 2. The changing posture unit of claim 1, wherein the workpiece comprises: an annular body having an opening formed in a center of the flat plate; and a sheet body covering the opening of the annular body to form a brittle material The substrate ' is attached to the sheet body so as to be positioned on the opening, and the second main surface on the opposite side of the magic main surface attached to the sheet body is formed with a scribe line; the intersection portion includes: (6) a plurality of gripping portions 'the outer edge portions of the annular body are held by each of them; and 156415.doc 201208960 0-2) a plurality of suctions D and eight are respectively provided corresponding to each of the plurality of gripping portions And the adsorption edge is attached to the outer edge portion of the above-mentioned 3 sorrows. 3. The changing posture unit of claim 1 or 2, wherein the fixing mechanism includes a pressing member that fixes the workpiece by applying pressure from the pressing member; and compressing the pressing portion of the workpiece by compression The pressing member is released in a predetermined state. 156415.doc
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