TW201207083A - Method of making conductive paste - Google Patents

Method of making conductive paste Download PDF

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Publication number
TW201207083A
TW201207083A TW100113117A TW100113117A TW201207083A TW 201207083 A TW201207083 A TW 201207083A TW 100113117 A TW100113117 A TW 100113117A TW 100113117 A TW100113117 A TW 100113117A TW 201207083 A TW201207083 A TW 201207083A
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Taiwan
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conductive paste
conductive
dispersion
orifice
paste
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TW100113117A
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Chinese (zh)
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TWI449768B (en
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Nobuhisa Suzuki
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Sumitomo Metal Mining Co
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/005Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Conductive Materials (AREA)

Abstract

This invention provides a method of making conductive paste. The conductive paste can maintain high dispersion capability and stable adhesiveness when used as a paste for internal electrodes of a laminated ceramic capacitor. The method of making the conductive paste is characterized by containing step 1 to step 3. Step 1: after heating while mixing a conductive paste comprising at least conductive metal powder, dispersion agent, organic bonder and organic solvent, the conductive paste is passed through a nozzle with an orifice to carry out a pre-dispersion step of the dispersion treatment. Step 2: carrying out a dispersion step of a dispersion treatment on a pre-dispersed and heated conductive paste from step 1 by using a high pressure homogenizer. Step 3: filtering the dispersed conductive paste from step 2 by using a filter.

Description

201207083 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種在疊層陶瓷電容器内部電極用膠糊 中,維持有高分散性、同時黏度穩定性優異的導電性膠糊之 製造方法。 【先前技術】 伴Ik著手機和數位設備等電子設備的輕薄小巧化,對於作 為晶片零件的疊層喊電容H(以下稱作MLCC)也在期望其 小型化、同谷量化及高性能化。用於實現這些的最有效方法 是減少内部電極層和電介f層之厚度來謀求多層化。 MMLCC 一般按如下操作進行製造。為了形成電介質層, 首先在以鈦酸鋇(BaTl〇3)為主成分之包含鈦酸锅和聚乙稀 醇縮丁料有齡合_ f介f生⑽贿_)上,將以 f電泰末為主成分、使其分散在包含樹脂黏合劑及溶劑的 載體中而成之作為内部電極的導電性軸,按規定的圖案進 灯印刷’並使其乾燥來除去溶劑,而形成乾賴。錢,將 形成有乾軸的電介質生片在多層層疊的狀態下加熱壓接 進二-體化後’料切斷,在氧化性環境或惰性環境中,在 c 乂下進仃脫黏合劑,其後,以不使内部電極氧化的方 式,在還原環境中,在晴C左右進行加熱锻燒。接著,將 锻燒晶片塗佈、般燒後’在外部電極上實施鑛鎳等,製作 MLCC。 100113117 3 201207083 但是,在該锻燒步驟中,電介質陶究粉末開始燒結的溫度 為謂c左右,由於與鎳料金屬粉末的燒結、收縮開 始溫度產生相當大的不-致,因此容易產生脫層(層間剝離) 或裂紋等結構缺陷。特別是伴隨著小型、高容量化,層· 明顯 越多或陶Μ介質層的厚度越薄,結構缺陷的產生就變得越 例如,在通常的内部電極用錄膠糊中,至少直至 開始燒結、收縮的溫度附近’為 曰 有以類似於電介質層之組成的鈦酸鋇系、^酸=添加 物為主要成分•崎。其=::: :二、、°仃為,抑制内部電極層和電介質層的燒結收縮行 =致。另外’添加嶋末會緩解當電介質層的主成 素和電極膠糊中所包含的電介質粉末的構成元 素==時介電損失增大等給電特性帶來影響的麻煩。 近年來,隨著MLCC更加小型、大容量化的要求 粉末的内部電極層及使用鈦酸鋇等的陶聽 、’| i層的進-步薄層化正在迅速進展。因此,便 用於導電性膠糊_等導電性金屬粉末及㈣粉末的微粒 化、咼分散化。 然而’由於伴隨著導電性金屬粉末及陶竟粉末的微粒化進 的機械性剪:易二=因此,僅用習知的利用3挺機 不月b製U所需的分散狀態的導電性膠糊,難 100113117 201207083 以獲得平滑的乾燥塗膜或高乾燥膜密度。於是’如專利文獻 1、2般,為了對微粒粉末進行處理直至獲得所需的分散性, 必須增加製造工時來製造導電性膠糊’結果製造時間變長。 另外,通常的利用3輥機的導電性膠糊之製造方法是將原 料混煉,接著使其分散’如需要則進行黏度調節,但在該製 _ 造方法中,即使考慮製造工時’對使微粒的導電性金屬粉末 或陶瓷粉末分散而言仍有限度。 另一方面,作為用於使乾燥凝集的導電性金屬粉末或陶竞 粉末等無機粉末分散到載體及溶劑中的3輥機以外的方法, 專利文獻3、4中公開有用球磨機或珠磨機等使其機械性分 散、粉碎的方法。 但是,在利用珠磨機的分散方法中,存在由介質造成的導 電性金屬粉末變形的問題,在利用球磨機的分散方法中,在 導電性金屬粉末為牢固凝集的情況下,對使其充分地分散而 言有限度。 近來’作為上述3輥機、珠磨機、球磨機以外的分散方法’ , 提出了使用高壓均化器的導電性金屬漿及使用其的導電性 膠糊之製造方法(例如,參照專利文獻5、6)。 在該專利文獻5中,將金屬顆粒及陶竟顆粒的表面潤濕 後,使用高壓均化器,透過使從設置於相對方向的喷嘴所喷 射的嘴射流互相碰撞,製造導電性膠糊,但在該方法中’利 用南壓均化器從喷嘴所喷射的喷射流受製作出的漿黏度限 100113117 201207083 制,進而在常溫下用高壓均化器處理添加有有機載體的言_ 度漿的情況下出現的問題是,由於賦予導電性金屬粉或=瓷 粉的碰揸力受有機载體阻礙,因此由高壓均化器產生的碰撞 力無法有效地對導電性金屬粉或陶瓷粉發揮作用, 地分散。 把充分 另外,專利文獻6報告了將預混合無機粉體和有機溶齊 成的粗裝_高麗均化器進行分散處理以製造導二!而 用該導電性漿製料電性卵。 7 ’使 β但是1知料電性膠婦造步财的混煉方法的共s 疋使用高速剪切撥拌機或2軸以上的行星搜拌機等^點 金屬粉或喊粉等無機粉末和有機物(有機溶劑、 y 、、有機載體等)進行混合。然而,在這些混煉方法中, 為有機載體混合*充分、導電性金屬粉末或陶末 、,面成為未充分潤濕等的狀態’在經過這些混煉方法進行 丨的利用尚壓均化器的分散處理的情況下,容易產生以 下的問蹲。 第—, ,,因添加有機載體,導電性粗膠糊的黏度升高,其結 果為机動’_得不足,而難以進行利用高壓均化器的分散處 理。 導電性粗膠糊中存在沒有完全混合的有機載體,當 : 入到尚壓均化器中時,包含有有機載體的固體成分附 著在’變得難以正常運作。 100113117[Technical Field] The present invention relates to a method for producing a conductive paste which maintains high dispersibility and excellent viscosity stability in a paste for internal electrode of a laminated ceramic capacitor. [Prior Art] With the thinness and lightness of electronic devices such as mobile phones and digital devices, the laminated capacitor H (hereinafter referred to as MLCC) as a wafer component is also expected to be miniaturized, homogenized, and high-performance. The most effective way to achieve this is to reduce the thickness of the internal electrode layer and the dielectric f layer to achieve multilayering. MMLCC is generally manufactured as follows. In order to form the dielectric layer, firstly, the titanate and the polyethylene terephthalate containing the barium titanate (BaTl〇3) as the main component will be charged with f A conductive shaft which is a main component and is dispersed in a carrier containing a resin binder and a solvent, and is printed as a conductive electrode in a predetermined pattern, and dried to remove a solvent, thereby forming a dry film. . Money, the dielectric green sheet formed with the dry shaft is heated and crimped into a two-body state in a multi-layer laminated state, and the material is cut off. In an oxidizing environment or an inert environment, the binder is removed under c ,, Thereafter, heating and calcination are performed in a reducing atmosphere in a reducing atmosphere so as not to oxidize the internal electrode. Next, the calcined wafer was coated and fired, and then nickel or the like was applied to the external electrode to produce MLCC. 100113117 3 201207083 However, in the calcination step, the temperature at which the dielectric ceramic powder starts to be sintered is about c, and delamination is liable to occur because the sintering start temperature and the shrinkage start temperature of the nickel metal powder are relatively large. (interlayer peeling) or structural defects such as cracks. In particular, with the small size and high capacity, the layer is significantly more or the thickness of the ceramic layer is thinner, and the occurrence of structural defects becomes, for example, in the usual internal electrode recording paste, at least until the start of sintering. The vicinity of the temperature at which the shrinkage is made is a barium titanate system similar to the composition of the dielectric layer, and the acid = additive is the main component. Its =::: :2, °仃 is, suppressing the sintering shrinkage of the internal electrode layer and the dielectric layer. Further, the addition of the ruthenium can alleviate the trouble of the influence on the electric power characteristics such as the increase in the dielectric loss when the main element of the dielectric layer and the constituent element of the dielectric powder contained in the electrode paste ==. In recent years, with the demand for smaller size and larger capacity of MLCC, the internal electrode layer of powder and the ceramic layer using barium titanate and the like, and the progressive thinning of the '|i layer are progressing rapidly. Therefore, it is used for the conductive paste of conductive paste, such as conductive paste, and (iv) powder atomization and enthalpy dispersion. However, due to the mechanical shear accompanying the micronization of the conductive metal powder and the ceramic powder: Yi 2 = Therefore, only the conductive adhesive of the dispersed state required by the conventional machine is used. Paste, difficult 100113117 201207083 to obtain a smooth dry film or high dry film density. Then, as in Patent Documents 1 and 2, in order to process the fine particle powder until the desired dispersibility is obtained, it is necessary to increase the manufacturing man-hour to manufacture the conductive paste. As a result, the manufacturing time becomes long. Further, in the usual method of producing a conductive paste using a three-roller, the raw material is kneaded and then dispersed, and the viscosity is adjusted as needed. However, in the production method, even if the manufacturing man-hour is considered There is still a limit to dispersing the conductive metal powder or ceramic powder of the fine particles. On the other hand, as a method other than a three-roller for dispersing a conductive metal powder such as a conductive metal powder or a ceramic powder such as a ceramic powder in a carrier or a solvent, Patent Documents 3 and 4 disclose a ball mill or a bead mill. A method of mechanically dispersing and pulverizing. However, in the dispersion method using a bead mill, there is a problem that the conductive metal powder is deformed by the medium, and in the dispersion method using the ball mill, when the conductive metal powder is firmly aggregated, it is sufficiently There is a limit to dispersion. Recently, a method of producing a conductive metal paste using a high-pressure homogenizer and a conductive paste using the same has been proposed as a method of dispersing a three-roller, a bead mill, or a ball mill (for example, refer to Patent Document 5). 6). In Patent Document 5, after the surface of the metal particles and the ceramic particles are wetted, a conductive paste is produced by colliding with nozzle jets ejected from nozzles provided in opposite directions by using a high-pressure homogenizer, but In this method, the jet flow jetted from the nozzle by the south pressure homogenizer is produced by the paste viscosity limit of 100113117 201207083, and the high-pressure homogenizer is used to treat the slurry with the organic carrier at normal temperature. The problem that occurs is that the collision force generated by the high-pressure homogenizer cannot effectively act on the conductive metal powder or the ceramic powder because the impact force imparted to the conductive metal powder or the ceramic powder is hindered by the organic carrier. Disperse. In addition, Patent Document 6 reports that a pre-mixed inorganic powder and an organically-dissolved coarse-packed_Korean homogenizer are subjected to dispersion treatment to produce a second conductive material; and the electrically conductive paste is used to prepare an electric egg. 7 'To make β, but to know the compounding method of the electric rubber compounding method, use a high-speed shearing machine or a planetary mixer such as two or more axes to control the inorganic powder such as metal powder or shout powder. It is mixed with organic matter (organic solvent, y, organic carrier, etc.). However, in these kneading methods, the organic carrier is mixed with a sufficient amount, a conductive metal powder or a pottery, and the surface is in a state of insufficient wetting, etc. The use of the kneading method by the kneading method is performed. In the case of the dispersion processing, the following problems are likely to occur. In the first place, the viscosity of the conductive coarse paste is increased by the addition of the organic vehicle, and the result is insufficient in maneuverability, and it is difficult to carry out the dispersion treatment using the high pressure homogenizer. In the conductive paste, there is an organic carrier which is not completely mixed, and when it is introduced into the still-pressure homogenizer, the solid component containing the organic carrier is attached to it to become difficult to operate normally. 100113117

S 201207083 第二,受有機載體阻礙,由离 紐,_»_丄 巧徵岣化器產生的對導電性金 屬粉末或陶瓷粉的碰撞力戎酋 ^ —剪刀力不能最大限度地發揮(有 機載體成為緩衝體’機械剪切力 士七咖1 _u ,、、、法有效地對導電性金屬粉 末或陶瓷粉末發揮作用,不能媒〜 墙 i 、洽 设许充分的分散性)。 第四,由於導電性金屬粉末或 、诗π L^ 4呵瓷粉末的表面未充分地潤 濕,因此導電性膠糊幾乎沒有 净’另外,由於存在比喷嘴 直控大的凝集物,因此喷嘴路 王楮塞的頻率變高。 此外’雖與本發明的用途不 與以J ’值作為提高焊料膠糊的分 月文性的方法,專利文獻7報告了 _ . + , 使其通過節流孔的方法,但 中,微粒狀的導電性金屬粉末或喊粉末不能分散。 還有,在用3輥機進行處理的情 兄下,由於剛開始後導電 .性孟屬粉形成薄片狀,或由於機只针 士 u 於機械剪切力弱,因此在原料粉 ==的龍不絲的情況τ,轉得所需的分散性而言 „通常’導電性金屬粉末及陶μ末的分散過程包括以下過 程· 劑及分散 (1)導電性金·末及陶聽末的「潤濕」、即存在於2次 顆粒表面及2次顆粒内部的空隙中的空氣被有機溶 劑置換的過程; (2) 2次顆粒被分散機分散、粉碎的過程; ’進行顆粒的 (3) 分散劑吸附在經分散、粉碎的顆粒表面 「防止再凝集」的過程。 100113117 201207083 在該分散過程中,利用攪拌機等的混煉攪拌的前處理步驟 係影響導電性金屬粉末及陶瓷粉末的潤濕性或在下一步的 分散步驟進行處理的時間,利用3親機等分散機的分散步驟 係影響導電性金屬粉末及喊粉末的分散性,在分散步驟 後’顆粒的分散性差的情況下,由於存在分散劑未被顆粒表 面吸附的部分,故因難以防止再凝集而使分散穩定性下降。 另一方面’導電性金屬粉末或陶究粉末的微粒化正為主 流,但除了使微粒狀的無機粉末分散以外,在使用微粒狀的 無機粉末的導電性膠糊中,存在因經時引起的黏度變化問 題。疋因為當膠糊黏度變化時,由於產生印刷性的變化, 會使得印刷時不能獲得適當的膜厚或形狀,導致不能製造品 質穩定的電極等。 相對於此,作為抑制點度變化的方法,專利文獻8提出了 使用將Ni/Ni(0H)藏〇比控制在特有的組成比率範圍内的 鎳粉末而得到的導電性膠糊。 但是,伴隨著錄粉末的微粒化,為了控制因經時弓i起的導 電性膠糊的黏度變化,分散劑的選擇或分散劑向鎳表面的吸 附變付重要。特別是對使用〇 2μ喊下的微减錄粉的導電 性膠糊而言’僅藉由習知的利用3辕機的機械剪切使其分散 方面’係存在限度’由於分散劑向鎳表面的吸附變得不充 分,結果便難以控制因經時弓丨起的黏度變化。 [先行技術文獻] 100113117 8 201207083 [專利文獻] [專利文獻1]曰本專利特開2006-351348號公報 [專利文獻2]日本專利特開2003-86449號公報 [專利文獻3]曰本專利特開2〇〇6-丨56204號公報 [專利文獻4]W〇2〇〇5-〇43568號公報 [專利文獻5]日本專利特開2〇〇4_288528號公報 [專利文獻6]日本專利特開2〇〇5_1〇4〇7〇號公報 [專利文獻7]曰本專利特開2〇〇2_〇〇丨528號公報 [專利文獻8]日本專利特開2〇〇4_33〇247號公報 【發明内容】 (發明所欲解決之問題彡 鑒於上述問題點’對於包含有有機載體的高黏度的 膠糊,本發明係能夠利用高壓均化器製造習知難以製造的高 黏度的導電性膠糊的方法, & 了獲付^散性,且可以獲得黏 的膠糊特性。其可透過在有 善前處理步驟中「淵、、 ^ 〜」和黏度」,另外改善用高壓均化 益進仃分散處理時的「點度」來製造。 即’在習知的前處理 金屬粉末或喊粉末以在有機龍存在Τ,導電性 在有機載體存在下,㉞㈣濕’但在本發明十,即使 性,在通轉有節心 ㈣絲絲衫具有流動 /±、#泰 IL L傻的噴嘴時,可以不被有機載體緩衝 而#金屬粉末或陶錄末的顆粒表面容易潤濕。進 100113117 9 201207083 篇步驟巾’導電性金屬粉末或^粉末的表面潤 存在的狀態下,只要是加熱岐其具有 流動性的導電性膠糊, 另 中,作用於導電㈣的高壓均化11 有機載體^ 聽末的強大剪切力也不被 有機載體㈣而有效地發揮作用,分散效率提升。 散過改善f知的前處理方法和利用高壓均化器的分S 201207083 Secondly, the collision force of conductive metal powder or ceramic powder produced by the organic carrier is obstructed by the _»_丄巧岣化化器. The buffer body 'mechanical shearing force seven coffee 1 _u , , , and the method effectively acts on the conductive metal powder or the ceramic powder, and the medium to the wall i can be set to have sufficient dispersibility). Fourth, since the surface of the conductive metal powder or the π π ^ 4 porcelain powder is not sufficiently wetted, the conductive paste is hardly clean. In addition, since there is a large amount of agglomerate than the nozzle, the nozzle is The frequency of Lu Wang’s congestion is getting higher. Further, although the use of the present invention does not differ from the J' value as a method of improving the monthly nature of the solder paste, Patent Document 7 reports _. + , a method of passing it through the orifice, but in the form of fine particles The conductive metal powder or shouting powder cannot be dispersed. In addition, in the case of the treatment with a 3-roller, since the conductive Meng powder is formed into a flake shape immediately after the start, or because the machine is only weak in mechanical shearing force, the raw material powder == In the case of the dragon's non-filament, the dispersion of the usual "conducting metal powder and ceramics" includes the following processes, agents and dispersions. (1) Conductive gold and botany "wetting", that is, a process in which air in a void on the surface of the secondary particle and the secondary particle is replaced by an organic solvent; (2) a process in which the secondary particle is dispersed and pulverized by a disperser; The process by which the dispersant adsorbs on the surface of the dispersed, pulverized particles to "pre-aggregate". 100113117 201207083 In the dispersion process, the pretreatment step of the kneading and stirring using a stirrer or the like affects the wettability of the conductive metal powder and the ceramic powder or the time of the treatment in the next dispersion step, and uses a disperser such as a 3-pair machine. The dispersing step affects the dispersibility of the conductive metal powder and the shim powder, and in the case where the dispersibility of the particles is poor after the dispersing step, since the dispersing agent is not adsorbed on the surface of the particle, it is difficult to prevent re-aggregation and disperse The stability is degraded. On the other hand, the atomization of the conductive metal powder or the ceramic powder is in the mainstream, but in addition to dispersing the particulate inorganic powder, the conductive paste using the particulate inorganic powder may be caused by the passage of time. Viscosity change problem.疋Because when the viscosity of the paste changes, due to the change in printability, an appropriate film thickness or shape cannot be obtained at the time of printing, and it is impossible to manufacture an electrode or the like having stable quality. On the other hand, Patent Document 8 proposes a conductive paste obtained by using a nickel powder in which Ni/Ni (0H) is stored at a specific composition ratio within a specific composition ratio. However, with the micronization of the recorded powder, in order to control the viscosity change of the conductive paste due to the warp, the selection of the dispersant or the adsorption of the dispersant to the nickel surface is important. In particular, for the conductive paste using the micro-reduced recording powder of 〇2μ, 'there is a limit in the dispersion by mechanical shearing using a conventional 3 辕 machine' due to the dispersion agent to the nickel surface. The adsorption becomes insufficient, and as a result, it is difficult to control the viscosity change due to the warp. [Patent Document 1] Patent Document 1 [Patent Document 1] Japanese Patent Laid-Open Publication No. JP-A-2006-351348 (Patent Document 2) Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 7] Japanese Patent Laid-Open Publication No. Hei 2 〇 _ 〇〇丨 〇〇丨 〇〇丨 〇〇丨 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 日本 专利 日本 日本 日本 日本 日本 日本 日本 日本 日本 日本 日本SUMMARY OF THE INVENTION (Problems to be Solved by the Invention In view of the above problems, the present invention is capable of producing a highly viscous conductive paste which is conventionally difficult to manufacture using a high-pressure homogenizer for a high-viscosity paste containing an organic vehicle. The method, & the paid dispersibility, and the sticky adhesive properties can be obtained. It can be improved by using the high pressure homogenization benefit in the pre-treatment steps of "pse, ^, ~" and viscosity.制造 「 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃Is a powder or shout powder to exist in the presence of organic dragons, conductivity in the presence of organic carriers, 34 (four) wet 'but in the invention ten, even if the sex, in the pass to the heart (four) silk sweater has flow / ±, #泰IL When the nozzle is a silly nozzle, it may not be buffered by the organic carrier, and the surface of the metal powder or the end of the particle may be easily wetted. In the state of the surface of the conductive metal powder or the powder, As long as it is heated and has a fluidity of conductive paste, in addition, the high-pressure homogenization of the conductive (four) 11 organic carrier is not effectively affected by the organic carrier (4), and the dispersion efficiency is improved. Pre-treatment method for improving the knowledge and using the high-pressure homogenizer

If 使在有機載體存在下,利用高壓均化器也可 =導電性膠糊’與利用3輥機的導電性膠糊或使用利用 间所製造的導電性金屬㈣導電性膠糊進行比 較,獲得分散性高且黏度狀性優異的導電性膠糊。另外, 就黏度穩定性而言,難表_「潤濕」得到改善,且在利 用南壓均化ϋ的分散_巾獲得高分散性。此時,由於分散 劑吸附在顆粒表面,可以防止顆粒的「再凝集」,因此,即 使長期保存也可以維持導電性膠糊的分散穩定性。 由上述可知’本發明之目的係在於提供一種高分散性且黏 度穩定性優異的疊層陶究電子零件用的導電性膠糊,其對於 為了疊層喊電子零件的小型化、薄型化而微細化的導電性 金屬粉或㈣粉來說,即妓存在有機細的高黏度的導電 性膠糊,也可用高壓均化器製造。 (解決問題之手段) 本發明的第工項發明為導電性膠糊之製造方法,其特徵在 於’具有下述的第1步驟至第3步驟。 100113117 1〇If, in the presence of an organic vehicle, a high-pressure homogenizer can be used = conductive paste can be compared with a conductive paste using a 3-roller or a conductive metal (4) conductive paste produced by using Conductive paste with high dispersibility and excellent viscosity. Further, in terms of viscosity stability, the difficulty of "wetting" was improved, and the dispersion was obtained by using a dispersion of the south pressure homogenization. At this time, since the dispersant is adsorbed on the surface of the particles, the "reaggregation" of the particles can be prevented, so that the dispersion stability of the conductive paste can be maintained even after long-term storage. As described above, the object of the present invention is to provide a conductive paste for laminated electronic components having excellent dispersibility and excellent viscosity stability, which is fine for miniaturization and thinning of laminated electronic components. For the conductive metal powder or (4) powder, there is an organic fine high-viscosity conductive paste, which can also be produced by a high-pressure homogenizer. (Means for Solving the Problem) The invention of the present invention is a method for producing a conductive paste, which is characterized in that it has the following first steps to third steps. 100113117 1〇

S 201207083 [第1步驟]將至少含有導電性金屬粉末、分散劑、有機黏 合劑及有機溶劑的導電性粗膠糊一邊加熱一邊混合攪拌 後,使其通過具備節流孔的喷嘴,由此進行分散處理的前處 理分散步驟。 [第2步驟]將透過第1步驟所前處理分散的經加熱的導電 性膠糊利用高壓均化器進行分散處理的分散步驟。 [第3步驟]將透過第2步驟所分散處理的導電性膠糊利用 過濾、器的過遽步驟。 本發明的第2項發明的特徵在於,第1項發明中的第1步驟 的具備節流孔的喷嘴串聯地排列2個以上來將導電性粗膠糊 分散。 本發明的第3項發明的特徵在於,第1項發明中的第1步驟 的節流孔的節流孔徑為0.2〜0.5mm。 本發明的第4項發明的特徵在於,第1項發明中的導電性粗 膠糊的黏度為10Pa · s以下。 本發明的第5項發明的特徵在於,第1項發明中的高壓均化 器以50〜250MPa的壓力進行分散處理。 本發明的第6項發明的特徵在於,第1項發明中的第2步驟 的導電性膠糊進行流動的高壓均化器中具備的節流孔的節 流孔徑為0.05〜0.2mm。 本發明的第7項發明的特徵在於,第1項發明中的高壓均化 器在節流孔的出口部側具備冷卻器。 100113117 11 201207083 本發明的第8項發明的特徵在於,第1項發明中的第2步驟 的經加熱的導電性膠糊的黏度為10Pa · s以下。 本發明的第9項發明為利用第1項發明所形成的導電性膠 糊,其特徵在於,導電性金屬粉末的含量相對於導電性膠糊 總量為30〜70重量%。 本發明的第10項發明的特徵在於,在第9項發明的導電性 膠糊中,導電性膠糊包含陶瓷粉末作為燒結抑制劑。 (發明效果) 根據本發明,在疊層陶瓷電子零件中的導電性膠糊之製造 方法中,透過利用機械剪切作用賦予導電性膠糊以高分散性 來完成將優異的膠糊特性具體化的導電性膠糊的形成,進而 作為疊層陶瓷電容器内部電極用膠糊,實現了維持高分散 性、同時黏度穩定性優異的導電性膠糊。 【實施方式】 本發明中的疊層陶瓷電容器的内部電極形成用的導電性 膠糊是一種使導電性金屬粉末及陶瓷粉末分散在將黏合劑 溶解於有機溶劑中而成的有機載體中而得的膠糊。 此類導電性膠糊是經以下的3步驟形成的。 1.第1步驟〔前處理分散步驟〕 將至少含有導電性金屬粉末、分散劑、有機黏合劑及有機 溶劑的導電性粗膠糊一邊加熱一邊混合攪拌後,使其通過具 備節流孔的喷嘴來進行分散處理。 100113117 12 201207083 2.第2步驟〔分散步驟〕 均㈣進行了前處理分散料電‘轉糊使用高應 句化裔使其進一步分散的分散處理。 3.第3步驟 將透過第2步驟進行了分散處理的導電性膠糊使用過滤器 進行過濾。 下面,詳細地說明這些步驟。 [第1步驟] 第1步驟是將至少含有導電性金屬粉末、分散劑、黏合劑 及有機溶劑的導電性粗__邊加熱—邊混合後,使其 通過安裝在驅動式泵上的具備節流孔的喷嘴,由此賦予機械 剪切來進行祕理分散的步驟。另外,一邊加熱—邊進行擾 拌的理由是為了藉由降低前處理分散時的導電性粗膠糊的 黏度,而賦予流動性。 在該步驟所進行的混合攪拌係可以使用螺旋槳式攪拌裝 置等通常的混合攪拌裝置。特别以分散機等之高速攪拌混合 裝置為佳。 在第1步驟的前處理分散過程♦,將導電性粗膠糊送入具 有既定直徑的卽流孔的喷嘴,在通過節流孔時,賦予該導電 性粗膠糊剪切力’由此進行分散處理。 作為用於將該導電性粗膠糊送入喷嘴使其通過節流孔的 輸送方法,可以從加料泵、單螺桿泵、隔膜泵、齒輪泵等各 100113117 13 201207083 種泵中適當選擇使用。由這些泵施加給導電性粗膠糊的壓力 沒有特別限疋,但以在不給生產性等帶來影響的範圍内使用 為佳,以5kg/cm2以上為宜。 圖2表示用於前處理分散的喷嘴5和節流孔6的一例。 對使導電性粗膠糊受到剪切作用的節流孔的内徑(以下稱 作節流孔徑,圖2中用符號「d」表示)而言,較佳為使用具 有0.2〜〇.5mm的節流孔徑的喷嘴。 在該節流孔徑小於0.2mm的情況下,有可能在前處理分散 步驟中發生喷嘴堵塞,在大於〇.5mm的情況下,在有機載體 存在下,導電性金屬粉末或陶瓷粉末的表面的潤濕變得不充 分。另外,只要節流孔徑是内徑0.2〜0.5mm的喷嘴,就可以 進行組合。 具有節流孔的喷嘴既可以是一個噴嘴中具備一個節流孔 的喷嘴,也可以是如圖2所示一個喷嘴中具有多個節流孔的 喷嘴。其節流孔的數目較佳為串聯連接有2個以上。當如此 設定時,僅節流孔的數目就可以賦予導電性粗膠糊機械剪 切。另外,節流孔的數目沒有特別規定,但選擇具備給予前 處理分散步驟中必要的機械剪切的數目的節流孔的喷嘴個 數。此外,節流孔間的距離L也可以考慮導電性膠糊的黏度 等膠糊特性而適當設定。 如圖2所示,通過將多個間隙狹窄的節流孔串聯連接,使 導電性粗膠糊通過,產生導電性粗膠糊和節流孔的流路内壁S 201207083 [First step] The conductive coarse paste containing at least the conductive metal powder, the dispersant, the organic binder, and the organic solvent is mixed and heated while being heated, and then passed through a nozzle having an orifice. The pretreatment dispersion step of the dispersion treatment. [Second Step] A dispersion step of dispersing the heated conductive paste dispersed by the pretreatment in the first step by a high pressure homogenizer. [Third Step] The conductive paste which has been subjected to the dispersion in the second step is subjected to a filtration step of the filter. According to a second aspect of the invention, in the first aspect of the invention, the orifice having the orifice is arranged in series in two or more to disperse the conductive paste. According to a third aspect of the present invention, in the first aspect of the invention, the orifice has an orifice diameter of 0.2 to 0.5 mm. According to a fourth aspect of the invention, the conductive paste of the first aspect of the invention has a viscosity of 10 Pa·s or less. According to a fifth aspect of the invention, the high-pressure homogenizer according to the first aspect of the invention is subjected to a dispersion treatment at a pressure of 50 to 250 MPa. According to a sixth aspect of the present invention, in the high-pressure homogenizer in which the conductive paste flowing in the second step of the first aspect of the invention has an orifice having an orifice diameter of 0.05 to 0.2 mm. According to a seventh aspect of the invention, the high-pressure homogenizer according to the first aspect of the invention includes a cooler at an outlet portion side of the orifice. 100113117 11 201207083 The eighth invention of the present invention is characterized in that the viscosity of the heated conductive paste in the second step in the first invention is 10 Pa·s or less. According to a ninth aspect of the invention, the conductive paste formed by the first aspect of the invention is characterized in that the content of the conductive metal powder is from 30 to 70% by weight based on the total amount of the conductive paste. According to a tenth aspect of the present invention, in the conductive paste of the ninth aspect of the invention, the conductive paste contains ceramic powder as a sintering inhibitor. (Effect of the Invention) According to the present invention, in the method for producing a conductive paste in a laminated ceramic electronic component, the conductive paste is imparted with high dispersibility by mechanical shearing to realize excellent adhesive properties. The formation of the conductive paste is further used as a paste for the internal electrode of the multilayer ceramic capacitor, and a conductive paste having excellent dispersibility and excellent viscosity stability is realized. [Embodiment] The conductive paste for forming an internal electrode of the multilayer ceramic capacitor of the present invention is obtained by dispersing a conductive metal powder and a ceramic powder in an organic vehicle obtained by dissolving a binder in an organic solvent. Glue. Such a conductive paste is formed by the following three steps. 1. The first step [pre-treatment dispersion step] The conductive coarse paste containing at least the conductive metal powder, the dispersant, the organic binder, and the organic solvent is mixed and heated while being heated, and then passed through a nozzle having an orifice. To carry out the dispersion process. 100113117 12 201207083 2. The second step [dispersion step] (4) The pre-treatment of the disperse material is carried out, and the dispersing treatment is carried out by using a high-intensity sentence to further disperse it. 3. Third step The conductive paste which was subjected to the dispersion treatment in the second step was filtered using a filter. These steps are explained in detail below. [First Step] In the first step, the conductive coarse metal containing at least the conductive metal powder, the dispersant, the binder, and the organic solvent is heated and mixed, and then passed through a section mounted on the drive pump. The nozzle of the orifice, thereby imparting mechanical shear to perform the process of secret dispersion. Further, the reason for the disturbance while heating is to impart fluidity by reducing the viscosity of the conductive paste at the time of pretreatment dispersion. As the kneading system to be carried out in this step, a usual mixing and agitating device such as a propeller type agitation device can be used. In particular, a high-speed stirring and mixing device such as a dispersing machine is preferred. In the pre-treatment dispersion process of the first step ♦, the conductive coarse paste is fed into a nozzle having a boring hole having a predetermined diameter, and when the orifice is passed, the conductive coarse paste is given a shearing force' Disperse processing. As a conveying method for feeding the conductive coarse paste into the nozzle and passing it through the orifice, it is possible to appropriately select and use each of the pumps 100113117 13 201207083, such as a feed pump, a single screw pump, a diaphragm pump, and a gear pump. The pressure applied to the conductive paste by the pump is not particularly limited, but it is preferably used in a range that does not affect productivity or the like, and is preferably 5 kg/cm2 or more. Fig. 2 shows an example of the nozzle 5 and the orifice 6 for pretreatment dispersion. For the inner diameter of the orifice for shearing the conductive coarse paste (hereinafter referred to as the orifice diameter, indicated by the symbol "d" in Fig. 2), it is preferable to use 0.2 to 〇.5 mm. Nozzle for throttling aperture. In the case where the orifice diameter is less than 0.2 mm, it is possible that nozzle clogging occurs in the pretreatment dispersion step, and the surface of the conductive metal powder or ceramic powder is wet in the presence of an organic carrier in the case of more than 〇5 mm. The wetness is not enough. Further, as long as the orifice diameter is a nozzle having an inner diameter of 0.2 to 0.5 mm, it can be combined. The nozzle having the orifice may be either a nozzle having one orifice in one nozzle or a nozzle having a plurality of orifices in one nozzle as shown in Fig. 2. The number of orifices is preferably two or more in series. When so set, only the number of orifices can impart mechanical shear to the conductive paste. Further, the number of orifices is not particularly specified, but the number of nozzles having the number of orifices given the mechanical shear necessary for the pretreatment dispersion step is selected. Further, the distance L between the orifices can be appropriately set in consideration of the adhesive properties such as the viscosity of the conductive paste. As shown in Fig. 2, by connecting a plurality of orifices having narrow gaps in series, the conductive coarse paste is passed, and the inner wall of the flow path of the conductive coarse paste and the orifice is produced.

100113117 S 201207083 面的機械剪切力,使導電性金屬粉末或陶瓷粉末的表面容易 潤濕。另外,在本實施例中,前處理分散步驟使用的具備節 流孔的喷嘴的尺寸是直徑(外徑)為4.7咖(示於圓2物,: 度為10mm (示於圖2的L)。 該喷嘴的形狀較佳為圓筒狀、沒有彎曲部或屈曲部的不易 磨損的直線狀,進而作為形成節流孔的材料,例如可舉出: 燒結鑽石和單晶鑽石等鑽石;氧魅、氧化錯、碳化石夕等陶 瓷材料;不銹鋼、鐵、鈦等金屬。 對於第1步驟的前處理分散,作為習知的前處理方法,當 僅用高,剪切攪拌機或2軸以上的行星攪拌機等攪拌裝置: 行麟混煉時,由於在有機載财導電性金屬粉或陶究粉的 表=未充刀地潤濕,存在未完全混合的有機載體、導電性金 屬私末及陶究粉末的大凝集物’因此第2步驟中的利用高壓 均化器的讀效率下降。而且,在導電性粗膠财殘存未& 王此合的有_體,使乾燥膜的光澤度下降。 本發明中的導電性膠糊的前處理分散步驟的—例示於圖 3如圖3所不’ 一邊用加熱器2加熱一邊用授拌紫葉3授掉的 槽1内的導電性粗勝糊介由栗*通過具有串聯連接的多個 隙狹窄的節流孔的噴嘴5。 曰 [第2步驟] 在5亥第2步驟中’將由第1步驟所前處理分散而成的導雷批 膠糊用高_化器進-步進行分散。 ( 100113117 201207083 本發明的面麗均化器的壓力較佳為50〜250MPa,更佳為以 100〜200MPa進行處理。當該壓力未滿麵pa時 ,由於從節 々IL孔喷出的噴射流的速度不充分因此,作用於處理物的能 里弱’故而造成分散不良。另外,壓力為25GMPa以下的理 由疋從抑制分散機的構件磨損,使其可耐受長時間的使用的 觀點考慮而選擇的。 在第2步驟中承擔分散處理的高壓均化器是為了產生高速 喷射流而利賴細的節流孔的設備,其節流隸從生產性或 裝置的效率性考慮’較佳設定為〇·05〜G.2mm左右,另外, 其形狀較佳為沒有‘f曲部或屈曲部的不易磨損的直線狀。進 而,形成節流孔的材料可舉出燒結鑽石或單晶鑽石等鑽石; 氧化紹、氧化結、碳切等喊材料;不錄鋼、鐵、欽等金 屬,其中較佳為不易磨損的高硬度材質的材料。 通常’膠糊在節流孔内的通過速度越快則剪切力也變得越 大’可以使顆粒的粒徑更微細。然而,當顆粒的粒徑變得過 小時’由於變得容易引起凝集,因此為了將顆粒維持在適當 的粒徑的狀態下,需要調節該節流孔通過速度,以使節流孔 内及節流孔通過後作用於膠糊的應力為最佳。 該通過速度的調節根據節流孔徑、處理壓力等條件進行, 透過將膠糊的節流孔通過速度調節在丨〇〇〜丨〇〇〇m/sec的範 圍’可以使顆粒處於適當的微細粒徑狀態而防止凝集。 又,為了防止招致膠糊通過節流孔後對空間部内壁的衝撞 100113117 16 201207083 洋,切力的不均勻化而產生泡’也可一邊施加反壓力一邊製 造膠糊。另外’由於當膠糊溫度變高時顆粒的穩定性下降, 產生再凝集等問題’故而不佳,因此為了防止膠糊溫度上 升,較佳為配備冷卻裳置。 同[均化器中的分散通過次數可以根據所要求的粒徑、粒 度刀佈等適當選擇。另外’分散通過次數較佳為按使膠糊循 環的裝置的構造進行。 第2步驟的投人到高壓均化器中進行分散處理的導電性膠 糊期望為均勻且低黏度,但實施高壓均化器時的導電性膠糊 的黏度較佳為10Pa. 8以下’更較佳為仍 • s以下。 例如’如圖4的導電性膠糊的溫度和黏度的關係所示,膠 糊/皿度在25 C的黏度為3GPa · s的導電性膠糊當被加熱時, 在導電性膠糊的溫度上升的同時黏度下降。 在該黏度高於10Pa. s的情況下,導電性膠糊沒有流動 性,因此,當投入到高壓均化器中時,處理壓力得不到提高, 無法實施分散處理。另外,在導電性膠糊的溫度高於7〇〇c的 情況下,導電性膠糊的黏度成為l〇Pa· s以下,但使用的有 機溶劑的揮發性、易燃性等安全方面和導電性膠糊的組成平 衡容易變化,因此不佳。 所使用的局壓均化器係有微射流均質機 (MiCr〇fluidizer)(miCr〇fhiidiCS公司製)、nan〇mizer(吉田機械 興業(股)製)、Nan〇3000(美粒(股)製)、應職灯⑽細。(股) 100113117 17 201207083 製)等。 [第3步驟] 第3步驟是將經過利用第2步驟的高壓均化器進行分散處 理的導電性膠糊用規定規格的過滤器進行過渡的步驟。 作為過濾器過濾,以99%濾除過濾精度,用網孔為5μηια 下的過;慮器進行過濾'。在使用網孔超過5从111的過滤器的情況 下’不能除去無機物的未分散物、粗大顆粒等’當混入有大 於電介質層厚度的物質時,由於膠糊塗膜表面產生突起,平 滑性下降。因此’不能獲得平滑性優異的導電性膠糊。 另外,所謂以99%遽除過濾、精度用網孔為5μιη以下的過遽 器進行過濾,是指以99%濾除精度補充99%以上超過5μιη的 顆粒。例如’可舉出基於7種JIS ζ 8901規定試驗用粉體 (5mg/L分散液、i〇L/min)的單程測試。另外,作為過濾用材 料’有金屬、PTFE(聚四氟乙烯)、聚丙烯等,但並不限定於 這些材料。此外,作為在此所使用的過遽器的結構,可以例 示膜式、褶撊式(pleat-type)、帝式(deps-type)等,但並不 限定於該等。 [導電性膠糊構成物] 為了獲得可以提高乾燥塗膜的平滑性及乾燥膜密度的導 電性膠糊,鎳粉末較佳為使用粒徑0.03〜〇.5/>1111的微粉末。鎳 粉末有時因凝集而產生粗大顆粒’當鎳粉末的粒徑超過 0·5μιη時,將膠糊的塗佈膜薄層化時的成膜性變差,不僅不 100113117 201207083 能獲得既定的靜電容量,而^ 而且粗大顆粒的混入概率增大,容 易出現破壞電壓(BDV)降你ώ ^ )降低的不良現象。另外,當要形成對 應薄層化的此類電極_,乾制的平滑私充分,且鎳粉 末顆粒的填充變得不充分,不能確保所需的乾燥膜密度。 另方面’作為將鎳粉末的粒徑設定為0.5/mi以下的原 因’疋因為&是為了在疊層電容器的薄層化中形成連續性優 異的電極膜所必翻。進而,當粒徑低純叫m時,顆粒的 比表面積變得過大,金屬顆粒的表面活性變得過高,不僅對 乾舞、脫黏合劑转J士澉七 告 将丨生帶來不良影響,而且有可能不能獲得適 田的黏度特性’或在導電__長期保存中變質。 在本發明中’鎳粉末的粒徑只要沒有特別說明,即是基於 對比表面積進行計算而得出的粒徑。其計算式示於數 學式1。 [數學式1] 鎳粉末的粒徑== SA, Ρι=8·9(鎳的真密度) SAl ·鎳粉的比表面積(BET法) 本^明的導電性膠糊中的導電性金屬顆粒的比例較佳為 30〜70重景。/ a 备導電性金屬顆粒低於30重量%時,煅燒後 :電極厚度明顯變薄、電阻值上升,或電極膜的形成不充分 而失去導電性’有時不能獲得作為目標的靜電容量。當超過 100113117 19 201207083 70重量%時,電極膜變得難以薄層化。導電性金屬粉末更佳 為相對於膠糊整體設定為4〇〜60重量%。 在將陶瓷粉末作為燒結抑制劑添加在導電性膠糊中的情 況下,可以從通常為鈣鈦礦型氧化物的BaTi〇3等或其中添加 有各種添加物者中選擇。另外,較佳為與MLCC用的作為電 ”質層生片的主成分所使用的陶瓷粉末相同組成或類似的 組成。 該陶瓷粉末可以使用利用固相法、水熱合成法、烷氧化物 法、溶膠凝膠法等各種製法所製造的陶瓷粉末。又,根據需 要,對陶瓷粉末而言,可以將利用珠磨機或高壓均化器等裝 置實施了分散、粉碎處理的陶瓷漿添加在導電性膠糊中作為 燒結抑制劑。 陶瓷粉末的粒徑較佳為在仏⑴至仏一以的範圍。當陶瓷粉 末的粒徑超過〇.2μιη時,乾燥膜密度下降。在乾燥膜中,在 近球狀的鎳粉末顆粒堆積所形成的間隙中填充陶瓷粉末。當 陶瓷粉末的粒徑超過〇.2/1111時,變得難以進入近球狀的鎳粉 末顆粒的接觸點間,因此,難以獲得所需的乾燥膜密度,進 而將導電性膠糊的燒結開始溫度延遲至陶瓷層的燒結開始 溫度的效果變弱。 另方面’當陶瓷粉末的粒徑低於ο.οίμιη時,導電性膠糊 的燒結延遲效果難以顯現,產生脫層或裂紋等結構缺陷。此 外,出現上述的乾燥膜密度下降或以陶瓷粉末的凝集粉末為 100113117100113117 S 201207083 The mechanical shearing force of the surface makes the surface of the conductive metal powder or ceramic powder easy to wet. Further, in the present embodiment, the size of the nozzle having the orifice used in the pre-treatment dispersion step is 4.7 coffee in diameter (outer diameter, shown in the circle 2, and the degree is 10 mm (shown in L of Fig. 2). The shape of the nozzle is preferably a cylindrical shape, a straight line having no bending portion or a bent portion, and a material which is not easy to wear, and further, as a material for forming the orifice, for example, diamonds such as sintered diamond and single crystal diamond; Ceramic materials such as oxidation, carbonization, etc.; metals such as stainless steel, iron, titanium, etc. For the pretreatment dispersion of the first step, as a conventional pretreatment method, when only a high, shear mixer or a planet of 2 or more axes is used Stirring device such as mixer: When mixing in the Linlin, the organic carrier, the conductive metal and the ceramics are incompletely mixed due to the wetness of the organic-loaded conductive metal powder or ceramic powder. The large agglomerate of the powder is therefore reduced in the reading efficiency by the high-pressure homogenizer in the second step. Moreover, the conductive gelatin residue is not combined with the body, and the gloss of the dried film is lowered. The front of the conductive paste in the present invention The dispersion step is exemplified in Fig. 3, as shown in Fig. 3, while the heater 2 is heated, and the conductive coarseness in the tank 1 which is given by the mixing purple leaf 3 is passed through the chestnut* through the series connection. Nozzle 5 with a narrow orifice orifice. 第 [Step 2] In the 2nd step of 5H, the pilot batch paste obtained by dispersing the pretreatment in the first step is advanced by a high-chemicalizer. Dispersion. (100113117 201207083 The pressure of the dough homogenizer of the present invention is preferably 50 to 250 MPa, more preferably 100 to 200 MPa. When the pressure is not full, the jet is ejected from the orifice of the thorium IL. Therefore, the speed of the treatment is weak, so that the dispersion is poor. Therefore, the reason why the pressure is 25 GMPa or less is considered to prevent the wear of the components of the disperser and to withstand long-term use. The high-pressure homogenizer that is subjected to the dispersion treatment in the second step is a device that relies on the fine orifice for generating the high-speed jet flow, and the throttling is considered from the viewpoint of productivity or efficiency of the device. It is about 05·05~G.2mm, and, The shape is preferably a straight line which is not easy to wear without the 'f curved portion or the bent portion. Further, the material for forming the orifice may be a diamond such as sintered diamond or single crystal diamond; a material such as oxidation, oxidation, carbon cutting or the like Metals such as steel, iron, and chin are not recorded, and materials of high hardness which are not easy to wear are preferred. Generally, the faster the passage speed of the glue in the orifice, the larger the shear force becomes. The particle size is finer. However, when the particle size of the particles becomes too small 'Because it becomes easy to cause aggregation, in order to maintain the particles in a proper particle size, it is necessary to adjust the orifice passage speed to make the knot The stress acting on the paste after passing through the orifice and the orifice is optimal. The adjustment of the passage speed is performed according to conditions such as the orifice diameter and the treatment pressure, and the orifice is adjusted in speed by the speed of the orifice. The range of ~ 丨〇〇〇m/sec can keep the particles in an appropriate fine particle size state and prevent aggregation. Further, in order to prevent the collision of the adhesive paste against the inner wall of the space portion after passing through the orifice 100113117 16 201207083, the unevenness of the shear force may cause bubbles, and the adhesive may be applied while applying a back pressure. Further, since the stability of the particles is lowered when the temperature of the paste becomes high, and problems such as re-aggregation occur, it is not preferable. Therefore, in order to prevent the temperature of the paste from rising, it is preferable to provide a cooling skirt. The number of dispersion passes in the homogenizer can be appropriately selected according to the required particle size, grain size, and the like. Further, the number of dispersion passages is preferably carried out in accordance with the configuration of the apparatus for circulating the paste. The conductivity of the conductive paste which is subjected to the dispersion treatment in the high-pressure homogenizer in the second step is desirably uniform and low in viscosity, but the viscosity of the conductive paste when the high-pressure homogenizer is applied is preferably 10 Pa. 8 or less. It is better to still be below s. For example, as shown in the relationship between the temperature and the viscosity of the conductive paste as shown in Fig. 4, the adhesive/dishness of the conductive paste at a viscosity of 25 C is 3 GPa · s when heated, at the temperature of the conductive paste. As the rise, the viscosity decreases. In the case where the viscosity is higher than 10 Pa.s, the conductive paste has no fluidity. Therefore, when it is put into the high-pressure homogenizer, the treatment pressure is not improved, and the dispersion treatment cannot be performed. In addition, when the temperature of the conductive paste is higher than 7 〇〇c, the viscosity of the conductive paste is not more than 10 Pa·s, but the safety and flammability of the organic solvent used are safe and conductive. The compositional balance of the adhesive paste is easy to change and is therefore not good. The local pressure homogenizer used is a MiCr〇fluidizer (manufactured by miCr〇fhiidiCS), a nan〇mizer (manufactured by Yoshida Masaki Co., Ltd.), and a Nan〇3000 (manufactured by the US) ), the job light (10) is fine. (shares) 100113117 17 201207083 system) and so on. [Third Step] The third step is a step of transitioning the conductive paste subjected to the dispersion treatment by the high-pressure homogenizer of the second step with a filter of a predetermined specification. As a filter, the filtration precision was filtered out at 99%, and the filter was filtered using a mesh of 5 μm. In the case of using a filter having a mesh opening of more than 5 from 111, "undispersed matter, coarse particles, and the like which cannot be removed from the inorganic material" when a substance larger than the thickness of the dielectric layer is mixed, the flatness is lowered due to the occurrence of protrusions on the surface of the adhesive coating film. Therefore, a conductive paste excellent in smoothness cannot be obtained. In addition, filtration by a filter having a meshing degree of 99% and a precision of 5 μm or less in the mesh means that 99% or more of the particles are added in excess of 5 μm by 99% filtration accuracy. For example, a one-way test based on seven kinds of JIS ζ 8901 test powder (5 mg/L dispersion, i〇L/min) can be cited. Further, the material for filtration 'is metal, PTFE (polytetrafluoroethylene), polypropylene, etc., but is not limited to these materials. Further, the structure of the filter used herein may be, for example, a film type, a pleat-type, a dep-type, or the like, but is not limited thereto. [Conductive Paste Structure] In order to obtain a conductive paste which can improve the smoothness of the dried coating film and the density of the dried film, the nickel powder is preferably a fine powder having a particle diameter of 0.03 to 5.5/>1111. When the nickel powder is aggregated to produce coarse particles, when the particle size of the nickel powder exceeds 0.5 μm, the film formation property when the coating film of the paste is thinned is deteriorated, and not only 100113117 201207083 can be obtained. Capacity, and ^ and the probability of mixing coarse particles increases, and it is prone to the undesirable phenomenon that the breakdown voltage (BDV) decreases. Further, when such an electrode _ which is required to be thinned is formed, the dryness of the dryness is sufficiently sufficient, and the filling of the nickel powder particles becomes insufficient, and the desired dry film density cannot be ensured. On the other hand, the reason why the particle diameter of the nickel powder is set to 0.5/mi or less is that the electrode film is formed to have an excellent continuity in the thinning of the multilayer capacitor. Further, when the particle size is low and the purity is called m, the specific surface area of the particles becomes too large, and the surface activity of the metal particles becomes too high, which not only adversely affects the dry dance and the debonding agent. And it is possible that the viscosity characteristics of the field may not be obtained or deteriorated during the long-term storage of the conductive__. In the present invention, the particle diameter of the nickel powder is a particle diameter calculated based on the comparative surface area unless otherwise specified. Its calculation formula is shown in Mathematical Formula 1. [Math 1] Particle size of nickel powder == SA, Ρι=8·9 (true density of nickel) SAl · Specific surface area of nickel powder (BET method) Conductive metal particles in conductive paste of the present invention The ratio is preferably 30 to 70. When the amount of the conductive metal particles is less than 30% by weight, after the calcination, the thickness of the electrode is remarkably thin, the electric resistance value is increased, or the formation of the electrode film is insufficient to lose the conductivity. The electrostatic capacitance may not be obtained. When it exceeds 100113117 19 201207083 by 70% by weight, the electrode film becomes difficult to be thinned. The conductive metal powder is more preferably set to 4 to 60% by weight based on the entire adhesive. In the case where ceramic powder is added as a sintering inhibitor to the conductive paste, it can be selected from BaTi〇3 or the like which is usually a perovskite-type oxide or a variety of additives. Further, it is preferably the same composition or a similar composition as the ceramic powder used as the main component of the electric layer of the MLCC. The ceramic powder can be used by a solid phase method, a hydrothermal synthesis method, or an alkoxide method. A ceramic powder produced by various methods such as a sol-gel method, and a ceramic powder which is dispersed and pulverized by a device such as a bead mill or a high-pressure homogenizer, may be added to the ceramic powder as needed. The particle size of the ceramic powder is preferably in the range of 仏(1) to 仏. When the particle size of the ceramic powder exceeds 〇.2μηη, the density of the dried film decreases. In the dried film, The gap formed by the accumulation of the nearly spherical nickel powder particles is filled with the ceramic powder. When the particle diameter of the ceramic powder exceeds 〇.2/1111, it becomes difficult to enter between the contact points of the nearly spherical nickel powder particles, and therefore, it is difficult The desired dry film density is obtained, and the effect of delaying the sintering start temperature of the conductive paste to the sintering start temperature of the ceramic layer is weakened. On the other hand, when the particle diameter of the ceramic powder is lower than ο. When οίμιη, the sintering retardation effect of the conductive paste is hard to be manifested, and structural defects such as delamination or cracking occur. Further, the above-mentioned dry film density is lowered or the agglomerated powder of the ceramic powder is 100113117.

20 S 201207083 起因的電介質層的薄層化變難等電容器的可靠性(絕緣電阻 下降或短路率上升等)變差的問題。 在本發明中’陶瓷粉末的粒徑只要沒有特別說明,即是基 於BET法對比表面積進行計算而得出的粒徑。以鈦酸鋇為例 的計算式如下。 ' [數學式2] 鈦酸鋇粉末的粒徑= — SA2 X p2 /02=6.1(鈦酸鋇的真密度) SA2 :鈦酸鋇粉的比表面積(BET法) 另外,陶瓷粉末的含有率較佳為相對於導電性金屬粉末 100重量份為3〜25重量份。更佳為相對於導電性金屬粉末1〇〇 重量份為5〜15重量份。在陶瓷粉末的含有率未滿3重量份的 情況下,例如不能控制鎳粉末的燒結,内部電極層和電介質 層的燒結收縮行為的不—致變得顯著。另—方面,當陶:是粉 末的έ有率超過25重里份時,例如因與電介質層巾的陶曼顆 粒的:^、·,。t "質層的厚度自内部電極層膨服,組成發生偏 .移,因此給電容率下料電特性帶來不良影響。又,當陶:是 私末的3里/於3重量份時’由於内部電極的燒結從低溫就 開始,内部電極層和電介質層的燒結溫度之差變大,因此產 生煅燒裂紋。 在本心月的導電性膠糊中,點合劑樹脂以與有機溶劑預先 100113117 201207083 =合的有機載體的形式使用。黏合_絲使用溶解 ;谷劑的物質,但因為A 有機 為其均勻地溶解而需要充分地_ 結果是第1步驟的混合搜拌過程花費過多的時間,從^ 產性下降或混料足的觀財慮,存在㈣品 險,在將其排除的意義上,較佳為使用有機載體。差的風 該黏合劑樹脂中可列舉曱基纖維素、乙基纖維素、乙 二乙基纖維素、槪纖料、丙賴系、聚乙騎縮 =腊,從其中選擇1種以上。對其分子量而言,為溶: 脂。另外,導電⑽tr〜2嶋的分子量的樹 為2.0〜伽t%。在未的樹脂讀佳為U〜5域、特佳 印刷的黏度,㈣的情況下,難以獲得適於網版 增力。叫购糊碳量 乙酸異、丙酸二二)、二=醇、二氫乙酸㈣ 、伯S日、丁酸異福g旨、異丁酿龙 二醇單丁醚乙酸酯、一Α 兵丁駄異栺酯、乙 〜丙二醇曱基醚乙酸酯等。 θ作為導電性膠糊中包含的分散劑’並沒有特別限定,口要 疋陽離子系分散劑、陰離子系分散劑、非離劑、 系分散_夠使導電性金二 中的分散劑即可分散在黏合劑及有機容劑 100113117 M使用公知的分散劑。特别是在這些分 22 201207083 月欠知]中較佳為陰離子系分散劑,例如可舉出:缓酸系分散 劑破®^系刀政劑、磷酸鹽系分散劑等。這些分散劑可以使 用1種或組合2種以上使用。陰離子系分散劑係因對於無機表 面的吸附力大’透過該表面改質作用而有助於提高無機成分 的分散性’目此财改善㈣的平滑性、乾㈣密度的作用。 "亥刀政劑的平均分子量較佳為2⑻〜2〇〇的。更佳為 300 10〇〇〇。當平均分子量小於2〇〇時’顆粒不能獲得充分的 靜電斥力,有時顆粒的分散性或保存穩定性下降。通常,分 政劑吸附在顆粒表面,形成分散劑的吸附層,透過賦予顆粒 以靜電斥力或立體的斥力,獲得分散性優異的膠糊。但是, ;'、為(1¾著時間的經過,由於顆粒之間的衝撞,超過吸附 層的斥力,粒子之間會凝集,因此平均分子量在200以上為 且。另外’當分子量大於2GGGG時’有時與有機載體及有機 /谷劑的相溶性下降’或招致顆粒之間的凝集,引起分散性、 保存穩定性的下降時。另外,還產生膠糊黏度變高的問題。 對分散劑的添加量而言,作為相對於導電性金屬粉末的添 加莖’相對於無機物含量1〇〇質量份,較佳為〇.〇1〜2.00質量 伤、更佳為〇.2〇〜10〇質量份。若分散劑未滿〇 〇1質量份,有 難以獲仔充分的分散性的傾向。另一方面,當超過2.〇〇質量 伤時’產生乾燥性變差、或乾燥膜密度下降等問題。 為了賦予導電性膠糊的黏度調節或適度的黏度特性等,本 發明中的導電性膠糊中也可以根據目的添加有機溶劑或有 100113117 23 201207083 機黏合劑。作為财機溶劑合劑,基本上較佳為構 成導電性膠糊的物質。進而,還可以根據需要加人消泡劑、 可塑劑、增黏劑等導電性膠糊中公知的添加物。 [實施例] 下面,根據更具體的實施例,詳細地說明本發明。另外, 本發明的範圍並不受實施例任何限定。 [導電性膠糊的特性] (1) 導電性膠糊的黏度 本發明的導電性膠糊的黏度使用Br〇〇kfield公司製造的B 型黏度計在i〇rpm(滑動速度=4se(rl)的條件下測m卜, 實施例中所示的黏度表示膠糊製造後經過8小時時的黏度。 (2) 導電性膠糊的經時黏度變化率 對導電性料㈣經時黏度變化帛❿言,以導冑性膠糊製造 後經過8小時時的黏度為初始黏度,在常溫(25。〇下靜置30 天後’將初始黏度與再次測定的黏度的黏度變化量除以初始 黏度,用百分率(〇/〇)表示。另外,導電性膠糊的經時黏度變 化率較佳為越小越好。 (3) 表面粗糙度(Ra) 用塗佈器(間隙厚5Mm)在玻璃基板上塗佈犯膠糊後,在 12〇°C下使其在空氣中乾燥5分鐘,製作臈厚約私瓜的乾燥 膜。 對該乾燥膜透過利用相位偏移干涉方式的光學方法測定 100113117 24 201207083 表面的突起。具體而言,自限定於特定波長區域的光源將光 照射在試樣及參照鏡上,利用照射在試樣及參照鏡上的光的 干涉條紋觀察表面狀態’進一步的說,則是使試樣每隔1/4 波長沿光所照射的方向移動從光的干涉條紋觀察表面狀 態。該乾燥膜的表面粗糙度使用光干涉式表面形狀測定穿置 (WYCO製造NT-1100)進行測定。 (4)光澤度及乾燥膜密度(DFD) 乾燥膜密度的測定方法通過以下的方法進行測定。 將導電性膠糊以5xl〇cm的面積印刷在pET祺上,使成為 3〇卿膜厚後,在12(TC下使其在空氣中乾燥鄉鐘’,使用光 澤度計(堀場製作所製造如㈣咖:IG,測定瘦賴 的膠糊乾燥膜的光澤度(6〇t>進一步, ’、 斷為ixlcm,測定其厚度 /_膜切 冲异出乾燥獏密度。 乾燥獏密度的測定是將導電 行―,争m糊印刷在p e τ膜上進 上,輪师附電介質層生片 二:謂乾燥膜密度是使導電峨乾燥後的密度。 纖使用的有機她而言,_質〜 纖、,隹素作為黏合劑樹脂成 1化基 溶劑,力口熱到60t進行製作。087質心°“醇作為有機 同樣地,對有機载體 __ 。,配合18質量%乙基羥基乙基 25 201207083 纖維素作為黏合劑樹脂成分,配合82質量%丙酸異稻酯作為 有機溶劑,加熱到60°C進行製作。 [實施例1 j 在導電性金屬粉末中配合47質量%粒徑0.4μηι的鎳粉末 (Nl)'21.69質量%有機載體A,進而配合0.2質量%的分散劑、 31.11質:g:%的萜品醇,一邊加熱一邊混合擾拌後,在安裝於 驅動式泵的出口部之使6個節流孔徑為〇.5mm的節流孔串聯 連接的噴嘴中,使6〇t的導電性粗膠糊通過來賦予機械剪 切,製作實施過前處理分散的導電性膠糊,測定該膠糊乾燥 膜的光澤度。將其結果示於表丨〜表3。 [實施例2] 在導電性金屬粉末中配合47質量%粒徑〇 4/xm&鎳粉末 (Ni),在陶瓷粉末中配合1175質量%粒徑〇1^^的鈦酸鋇 (BT)、19.88質量%有機載體A,進而配合〇 3質量%的分散 诏21.〇7質量%的箱品醇,一邊加熱一邊混合授拌後,在 安裝於驅動式录的出口部之將6個節流孔徑為〇5職的節流 孔串聯連接的噴嘴中’使6 〇 t的導電性粗膠糊通過來賦予機 械剪切,實施前處理分散。 以後’將6 G C的經前處理分散的導電性膠糊利用按照節流 孔徑Bmm、處理麗力⑽略、絲通過次數^次的: 件所設定的高塵均化器實施分散處理來製作導電性膠糊 後’以99%滤除過滤精度、利用網孔為細以下的過遽器進 10011311720 S 201207083 The problem of deterioration in reliability (lower insulation resistance, increase in short-circuit rate, etc.) of the capacitor due to thinning of the dielectric layer is difficult. In the present invention, the particle diameter of the ceramic powder is a particle diameter calculated based on the comparative surface area of the BET method unless otherwise specified. The calculation formula using barium titanate as an example is as follows. [Math 2] Particle size of barium titanate powder = — SA2 X p2 /02=6.1 (true density of barium titanate) SA2: specific surface area of barium titanate powder (BET method) In addition, the content of ceramic powder It is preferably 3 to 25 parts by weight based on 100 parts by weight of the conductive metal powder. More preferably, it is 5 to 15 parts by weight based on 1 part by weight of the conductive metal powder. In the case where the content of the ceramic powder is less than 3 parts by weight, for example, the sintering of the nickel powder cannot be controlled, and the sintering shrinkage behavior of the internal electrode layer and the dielectric layer becomes remarkable. On the other hand, when Tao: is the powder of more than 25 parts by weight, for example, because of the Taoman particles of the dielectric layer: ^, ·. t " The thickness of the layer is swollen from the internal electrode layer, and the composition is shifted, which adversely affects the electrical properties of the permittivity. Further, when the pottery: is 3 liters/3 parts by weight of the private end, since the sintering of the internal electrode starts from a low temperature, the difference in the sintering temperature between the internal electrode layer and the dielectric layer becomes large, so that a calcination crack is generated. In the conductive paste of the present month, the dot resin is used in the form of an organic vehicle which is combined with an organic solvent in advance 100113117 201207083. Adhesive_filament uses a substance that dissolves; the granules, but because A organically dissolves it uniformly, it needs to be sufficient _ The result is that the mixing process of the first step takes too much time, from the decrease in productivity or the mixing of the foot In view of financial considerations, there is (4) quality insurance, and in the sense of excluding it, it is better to use organic carriers. Poor wind The binder resin may, for example, be mercapto cellulose, ethyl cellulose, ethylene cellulose, fluorene fiber, propylene ray, polyethyl cycline = wax, and one or more of them may be selected. For its molecular weight, it is a solvent: fat. Further, the tree of the molecular weight of the conductive (10)tr~2嶋 is 2.0 to gamma t%. In the case where the resin is not read in the U to 5 domain, and the viscosity of the printing is particularly good, (4), it is difficult to obtain a suitable force for the screen. Called the paste carbon amount of acetic acid iso-propionic acid di- or di-propionic acid, di-alcohol, dihydroacetic acid (four), Bo S day, butyric acid iso-fusic acid, isobutyl butyl glycol monobutyl ether acetate, a 兵 soldier Anthracene oxime ester, ethyl propylene glycol decyl ether acetate, and the like. θ is not particularly limited as the dispersing agent contained in the conductive paste, and the cation-based dispersing agent, the anionic dispersing agent, the non-separating agent, and the dispersion are sufficient to disperse the dispersing agent in the conductive gold two. A known dispersant is used for the binder and the organic solvent 100113117 M. In particular, the anionic dispersing agent is preferably used in the case of the above-mentioned sub-group 22 201207083, and examples thereof include a slow acid dispersing agent, a sizing agent, and a phosphate dispersing agent. These dispersing agents may be used alone or in combination of two or more. The anionic dispersant has a large adsorption power to the inorganic surface, and contributes to the improvement of the dispersibility of the inorganic component by the surface reforming effect. This improves the smoothness and the dry (four) density of (4). The average molecular weight of the "Haidaozheng agent is preferably 2 (8) ~ 2 〇〇. More preferably 300 10 baht. When the average molecular weight is less than 2 Å, the particles do not obtain sufficient electrostatic repulsion, and sometimes the dispersibility or storage stability of the particles is lowered. Usually, the agent is adsorbed on the surface of the particles to form an adsorption layer of the dispersant, and the paste is given an electrostatic repulsion or a three-dimensional repulsive force to obtain a paste having excellent dispersibility. However, '', for the passage of time, due to the collision between the particles, the particles will agglomerate beyond the repulsive force of the adsorption layer, so the average molecular weight is above 200. In addition, when the molecular weight is greater than 2GGGG, there is When the compatibility with the organic vehicle and the organic/troreal agent is lowered, or aggregation between the particles is caused, and the dispersibility and the storage stability are lowered, the viscosity of the paste is also increased. The amount of the added stem with respect to the conductive metal powder is preferably 〇1〇 to 2.00% by mass, more preferably 〇2〇 to 10〇 by mass, based on 1 part by mass of the inorganic substance. When the dispersing agent is less than 1 part by mass, it is difficult to obtain sufficient dispersibility. On the other hand, when it exceeds 2. 〇〇 mass damage, there is a problem that drying property is deteriorated or the dry film density is lowered. In order to impart viscosity adjustment or moderate viscosity characteristics of the conductive paste, the conductive paste in the present invention may be added with an organic solvent according to the purpose or may have a binder of 100113117 23 201207083. The agent is basically preferably a material constituting the conductive paste. Further, a known additive such as an antifoaming agent, a plasticizer or a tackifier may be added as needed. [Examples] The present invention will be described in detail based on more specific examples. Further, the scope of the present invention is not limited to the examples. [Characteristics of Conductive Paste] (1) Viscosity of Conductive Paste The conductive adhesive of the present invention The viscosity of the paste was measured using a Brookfield B-type viscometer at i rpm (sliding speed = 4se (rl), and the viscosity shown in the example indicates that 8 hours after the adhesive was produced. (2) The change rate of the time-dependent viscosity of the conductive paste to the conductive material (4) The viscosity change over time, the viscosity after the 8 hours after the manufacture of the conductive adhesive is the initial viscosity, at room temperature ( 25. After 30 days of standing under the armpit, 'the initial viscosity and the viscosity of the re-measured viscosity are divided by the initial viscosity, expressed as a percentage (〇/〇). In addition, the change rate of the time-dependent viscosity of the conductive paste is better. The smaller the better. (3) Surface roughness (Ra) The cloth (gap thickness: 5 Mm) was coated on the glass substrate, and then dried in air at 12 ° C for 5 minutes to prepare a dried film having a thickness of about 100 Å. The optical method of the offset interference method measures the protrusion of the surface of 100113117 24 201207083. Specifically, the light source limited to a specific wavelength region irradiates light onto the sample and the reference mirror, and uses light irradiated on the sample and the reference mirror. The interference fringe observes the surface state. Further, the sample is observed from the interference fringe of the light in the direction in which the light is irradiated every 1/4 wavelength. The surface roughness of the dried film uses the optical interference surface shape. The measurement was performed by measuring the penetration (manufactured by WYCO NT-1100). (4) Glossiness and Dry Film Density (DFD) The method for measuring the density of the dried film was measured by the following method. The conductive paste was printed on pET祺 in an area of 5×10 〇cm, and then it was made into a film thickness of 3 〇, and then dried in the air at 12 (TC), and a gloss meter (manufactured by Horiba, Ltd.) was used. (4) Coffee: IG, measure the gloss of the dried film of the laminating paste (6〇t> Further, ', cut to ixlcm, measure the thickness / _ film cut and dry out the density of dry 。. The determination of the density of dry 貘 is Conductive line -, paste m paste printing on the pe τ film, the wheel division with the dielectric layer green sheet 2: the dry film density is the density of the conductive enamel after drying. Fiber used organic, she _ quality ~ fiber The alizarin is used as a binder resin to form a solvent, and is heated to 60t. 087 centroid "Alcohol as organic, the same as the organic carrier __., with 18% by mass of ethyl hydroxyethyl 25 201207083 Cellulose is used as a binder resin component, and is prepared by mixing 82% by mass of propionate as an organic solvent and heating to 60 ° C. [Example 1 j 47 mass % of particle diameter 0.4 μηι in a conductive metal powder Nickel powder (Nl) '21.69 mass% organic carrier A, and further 0.2% by mass of a dispersant, 31.11 mass: g:% terpineol, and mixed with the mixture after heating, and then throttled at the outlet portion of the drive pump so that the six orifice diameters are 〇.5 mm In the nozzles in which the holes were connected in series, 6 〇t of the conductive coarse paste was passed to impart mechanical shear, and a conductive paste which was subjected to pretreatment dispersion was prepared, and the gloss of the dried film of the paste was measured. Table 丨 to Table 3. [Example 2] 47% by mass of 〇4/xm& nickel powder (Ni) was blended in the conductive metal powder, and 1175 mass% of particle diameter 〇1^^ was blended in the ceramic powder. Barium titanate (BT), 19.88% by mass of organic carrier A, and further blended with 〇3 mass% of 诏21.诏7 mass% of box alcohol, mixed and heated while being heated, and then attached to the drive record outlet In the nozzles in which the six orifice orifices are connected in series with the orifices of the 〇5 position, '6 〇t of conductive coarse paste is passed to impart mechanical shear, and pre-treatment dispersion is performed. Pre-treated and dispersed conductive paste is used according to the throttle aperture Bmm, and the treatment of Lili (10) is slightly Over the number of times ^: the set member of dust and dispersion treatment is homogenized to prepare a conductive adhesive transfer 'to filter out filtration accuracy of 99%, using a fine mesh or less suddenly through the carry 100,113,117

S 26 201207083 行過濾處理,製作所需的道‘ 的導電性膠糊,測定膠糊特性(黏度、 表面粗糙度、DFD)及點疮^ f占度變化率。將其結果示於表1〜表3。 [實施例3] 除了將利用高壓均化哭 #的分散通過次數設定為3次以外, 按”貝施例2相同條件製作所需的導電性雜,測定膠糊特 性及黏度變化率。將其結果示於表丨〜表3。 [實施例4] 除了將利用高壓均化哭沾γ ^器的分散通過次數設定為5次以外, 按與貝施例2相同條件製作所需的導電性膠糊,測定膠糊特 性及黏度變化率。將其結果示於表丨〜表3。 [實施例5] 在導電性金屬粉末中配合48·丨2 f量%粒徑g 2㈣的錄粉 末⑽,在陶粉末中配合4 81質量%粒徑〇.叫爪的鈦酸鋇 (ΒΤ)' 16'〇6ϊ^%:ί^^^Β,^t^^〇.43f > 21.93質量%的丙酸異如旨、8 65f4%的乙二醇單頂乙酸 酉旨進行配合’-邊加熱—邊混合勝後,在安裝於驅動 的出口部之使u個節流孔徑狀2mm的節流孔串聯, 前處理分散。 喷嘴中,使6G°C的導電性粗_通過來料機械 〜 、’& 一一、._· 貫方包 然後,將6(TC的經前處理分散的導電性膠糊利用按职% 孔徑〇.13mm、處理壓力2〇〇MPa、錢通過次數為5二即机 件設定的高壓均化器㈣分散處理來製作導電_糊^ 100113117 27 201207083 行以99%濾除過濾精度、利用網孔為1μιη以下的過濾器的過 濾處理,製作所需的導電性膠糊,測定其膠糊特性及黏度變 化率。將其結果示於表1〜表3。 [實施例6] 在導電性金屬粉末中配合4 8.12質量%粒徑〇. 〇 8 μ m的鎳粉 末(Ni) ’在陶瓷粉末中配合4.81質量%粒徑0 03叫的鈦酸鋇 (BT)、16.06質量%有機載體B,進而配合〇 43質量%的分散 劑、21.93質量%的丙酸異稍酯、8.65質量%的乙二醇單丁醚 乙酸酯,一邊加熱一邊混合攪拌後,在安裝於驅動式泵的出 口部之使11個郎流孔徑為〇.2mm的節流孔串聯連接的噴嘴 中,使60°C的導電性粗膠糊通過來賦予機械剪切,實施前處 理分散。 然後’將6 0。〇的經前處理分散的導電性膠糊利用按照節流 孔徑0.09mm、處理壓力250MPa、分散通過次數為忉次的條 件設定的高壓岣化器實施分散處理來製作導電性膠糊後,進 行以99%濾除過濾精度、利用網孔為i,以下的過濾器的過 遽處理,製作所需的導電性軸,敎其膠糊特性及黏度變 化率。將其結果示於表1〜表3。 [比較例1] 在導電性金屬粉末中配合47f量%粒徑錄粉末 (Ni)、21.69f量%有機載體A’進而配合G.2質量%的分散劑、 31.11質量°/〇的β品醇’―邊加熱—邊混合雜後,在安裝於 100113117S 26 201207083 Line filtration treatment, making the required conductive paste of the road, measuring the adhesive properties (viscosity, surface roughness, DFD) and the rate of change of the point sore. The results are shown in Tables 1 to 3. [Example 3] A desired conductivity impurity was produced under the same conditions as in "Bei Shi Example 2" except that the number of dispersion passes by high pressure homogenization crying was set to three times, and the adhesive property and viscosity change rate were measured. The results are shown in Table 丨 to Table 3. [Example 4] The desired conductive paste was produced under the same conditions as in the case of Example 2, except that the number of dispersion passes by the high-pressure homogenization dehumidification γ was set to 5 times. The paste was measured for the adhesive properties and the viscosity change rate. The results are shown in Tables to Table 3. [Example 5] The conductive metal powder was mixed with a powder (10) of 48·丨2 f% by particle diameter g 2 (four), In the ceramic powder, 4 81% by mass of 〇. 爪 的 钛 ' ' ' 16 16 16 16 16 16 16 16 ' ' ' 16 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. 21. Acidic difference, 8 65f4% ethylene glycol monotoplyacetate is designed to be combined with '-edge heating-side mixing, and then installed in the outlet of the drive to make u throttle orifices 2mm orifices in series , pre-treatment dispersion. In the nozzle, make the conductivity of 6G °C coarse _ through the incoming machinery ~, '& one, ._· square package then, 6 (TC before the TC The conductive paste of the dispersion is made of a high-pressure homogenizer (4) which is set by a machine having a pore diameter of 13.13 mm, a treatment pressure of 2 〇〇 MPa, and a number of times of passage of 5, that is, a machine member, and a dispersion treatment to produce a conductive _ paste ^ 100113117 27 201207083 The filtration precision of 99% filtration was used, and the filter of the filter of 1 μm or less was used, and the required conductive paste was prepared, and the adhesive property and viscosity change rate were measured. The result is shown in Table 1 - Table. 3. [Example 6] In the conductive metal powder, 4 8.12% by mass of 〇. 〇 8 μm of nickel powder (Ni) 'mixed with 4.81% by mass of the particle size 0 03 barium titanate (BT), 16.06% by mass of the organic carrier B, further blending 43% by mass of a dispersant, 21.93% by mass of isopropionate propionate, and 8.65 mass% of ethylene glycol monobutyl ether acetate, and mixing while heating Then, in a nozzle which is connected in series at an outlet portion of the drive pump and has 11 orifices having a diameter of 〇2 mm, a conductive coarse paste of 60° C. is passed to impart mechanical shearing. Pre-treatment dispersion. Then 'will be 60. The conductive paste is prepared by dispersing a high-pressure vaporizer set at a throttle aperture of 0.09 mm, a treatment pressure of 250 MPa, and a number of times of dispersion, to prepare a conductive paste, and then filtering the filter with 99% filtration. The mesh of the following filters was used to prepare the desired conductive axis, and the adhesive properties and viscosity change rate were obtained. The results are shown in Tables 1 to 3. [Comparative Example 1] In the conductive metal powder, 47f% by volume of powder (Ni), 21.69f% of organic carrier A', and further, G.2% by mass of dispersant, and 31.11 mass%/〇 of β-alcohol'- - After mixing the impurities, after installation at 100113117

S 28 201207083 驅動式系的出σ 之使節流孔徑為!⑽m的節流孔各6個 聯連接的喷背中’使6Gc的導電性粗膠糊通過來職予機械剪 切’製作實施過前處理分散的導電性膠糊,敎該谬糊乾燥 膜的光澤度。將其結果示於表1〜表3。 [比較例2] 在導電性金屬粉末中配合47質量%粒徑〇如的錄粉末 (Nl) 21.69質里%有機載體A,進而配合0.2質量%的分散劑、 3L11質里%的萜品醇,使用行星攪拌機(PRIMIX(股)製造 T.K.hlvls-dlsper_mix 3D_125型)混合攪拌來製作導電性膠 糊’測^該膠糊乾賴的光澤度。將其結果示於表1〜表3。 另外,行星攪拌機的攪拌時間設定為30分鐘。 [比較例3] 在導電性金屬粉末中配合47質量%粒徑〇·4μηι的錄粉末 (1^)、21.69質量%有機載體Α’進而配合0.2質量%的分散劑、 31.11質量%的萜品醇,使用行星攪拌機(PRIMIX(股)製造 T.K.hivis-disper-mix 3D-125塑)混合攪拌來製作導電性膠 糊,測定該膠糊乾燥膜的光澤度。將其結果示於表1〜表3。 另外,行星攪拌機的攪拌時間設定為120分鐘。 [比較例4] 在導電性金屬粉末中配合47質量°/〇粒徑0.4μιη的鎳粉末 (Ni),在陶瓷粉末中配合11.75質量%粒徑0.1从111的鈦酸鋇 (BT)、19.88質量%有機戴體A,進而配合0.3質量%的分散 100113117 29 201207083 劑、21.07質量%的萜品醇,使用行星攪拌機(?111]^1乂公司製 造T.K.hivis-disper-mix3D-125型)混合擾拌後,利用3軺i機實 施分散處理來製作導電性膠糊,測定膠糊特性(黏度、表面 粗糙度、DFD)及黏度變化率。將其結果示於表1〜表3。 [比較例5] 在導電性金屬粉末中配合47質量%粒徑〇.4μιη的錄粉末 \ (Ni),在陶瓷粉末中配合11.75質量%粒徑ο.ίμηι的鈦酸鋇 (BT)、19.88質量%有機載體A,進而配合〇.3質量%的分散 劑、21.07質量%的萜品醇,一邊加熱一邊混合擾拌後,在 安裝於驅動式泵的出口部之將6個節流孔徑為〇.5mm的節流 孔串聯連接的喷嘴中,使60。(:的導電性粗膠糊通過來賦予機 械剪切,實施前處理分散。然後,利用3輥機實施分散處理 來製作導電性膠糊,測定膠糊特性(黏度、表面粗糙度、DFD) 及黏度變化率.。將其結果示於表丨〜表3。 [比較例6] 在導電性金屬粉末中配合48.12質量%粒徑〇.2μιη的鎳粉 末(Νι),在陶瓷粉末中配合4.81質量%粒徑〇 〇4/^111的鈦酸鋇 (BT)、16.06質量%有機載體b,進而配合〇43質量%的分散 劑、21.93質董%的丙酸異稍!旨、8.65質量%的乙二醇單丁醚 乙酸醋’使用行星攪拌機(pRIMIX公司製造 T.K.hiVis-diSper-mix3D-125型)混合攪拌後,利用3輥機實施 分散處理來製作導電性膠糊,測定其膠糊特性及黏度變化 100113117 201207083 率。將其結果示於表1〜表3。 [比較例7] 在導電性金屬粉末中配合48.12質量%粒徑0.08/^111的鎳粉 末(Ni),在陶瓷粉末中配合4.81質量%粒徑0.03/mi的鈦酸鋇 (BT)、16.00質量%有機載體B,進而配合0.43質量%的分散 劑、21.93質量%的丙酸異稻酯、8.65質量%的乙二醇單丁醚 乙酸酯,使用行星攪拌機(PRIMIX公司製造 T.K.hivis-disper-mix 3D-125型)混合授拌後,將經加熱的導 電性膠糊利用按照節流孔徑0.09mm、處理壓力250MPa、分 散通過次數為10次的處理條件設定的高壓均化器實施分散 處理來製作導電性膠糊,測定其膠糊特性及黏度變化率。將 其結果示於表1〜表3。 100113117 31 201207083 [表i] 導電性膠糊 導電性金屬粉末 陶瓷粉 有機載體 分散劑 有機溶劑 種類 粒徑 M 含量 [質量%] 種類 粒徑 含量 [質量%] 種類 含量 [質量%] 含量 [質量%] 種類 含量 [質量%] 實施例1 Ni 0.4 47 - - - A 21.69 0.2 萜品醇 31.11 實施例2 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 萜品醇 21.07 實施例3 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 萜品醇 21.07 實施例4 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 萜品醇 21.07 實施例5 Ni 0.2 48.12 BT 0.04 4.81 B 16.06 0.43 丙酸異稻酯, 乙二醇單丁醚 乙酸酯 21.93 > 8.65 實施例6 Ni 0.08 48.12 BT 0.03 4.81 B 16.06 0.43 丙酸異稍S旨, 乙二醇單丁醚 乙酸酯 21.93 > 8.65 比較例1 Ni 0.4 47 - - - A 21.69 0.2 '萜品醇 31.11 比較例2 Ni 0.4 47 - - - A 21.69 0.2 萜品醇 31.11 比較例3 Ni 0.4 47 - - - A 21.69 0.2 萜品醇 31.11 比較例4 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 萜品醇 21.07 比較例5 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 萜品醇 21.07 比較例6 Ni 0.2 48.12 BT 0.04 4.81 B 16.06 0.43 丙酸異捐醋, 乙二醇單丁醚 乙酸酯 21.93,8.65 比較例7 Ni 0.08 48.12 BT 0.03 4.81 B 16.06 0.43 丙酸異稍醋, 乙二醇單丁醚 乙酸酯 21.93 > 8.65 100113117 32S 28 201207083 Drive the system's σ to make the throttle aperture! (10) m orifices in each of the six connected spray backs 'make 6Gc of conductive coarse paste through the job to mechanical shearing' to produce a pre-processed dispersion of conductive paste, the gloss of the dry film degree. The results are shown in Tables 1 to 3. [Comparative Example 2] 47% by mass of a recording powder (Nl), 21.69% by mass of the organic carrier A, and 0.2% by mass of a dispersant, and 3 L of a 11% by weight of terpineol were added to the conductive metal powder. The conductive paste was prepared by mixing and stirring using a planetary mixer (manufactured by PRIMIX Co., Ltd.) to measure the gloss of the paste. The results are shown in Tables 1 to 3. In addition, the stirring time of the planetary mixer was set to 30 minutes. [Comparative Example 3] The conductive metal powder was mixed with 47% by mass of 〇·4μηι recorded powder (1^), 21.69% by mass of organic carrier Α', and further mixed with 0.2% by mass of a dispersant and 31.11% by mass of a product. The alcohol was mixed and stirred using a planetary mixer (manufactured by PRIMIX Co., Ltd.) to prepare a conductive paste, and the gloss of the dried film of the paste was measured. The results are shown in Tables 1 to 3. In addition, the stirring time of the planetary mixer was set to 120 minutes. [Comparative Example 4] A nickel powder (Ni) having a mass ratio of 47 mass% to 0.4 0.4 μm was blended in the conductive metal powder, and 11.75 mass% of a particle diameter of 0.1 from 111 barium strontium titanate (BT), 19.88 was blended in the ceramic powder. % by mass of organic body A, and further blended with 0.3% by mass of 100113117 29 201207083 and 21.07% by mass of terpineol, using a planetary mixer (?111)^1乂, manufactured by TKhivis-disper-mix 3D-125) After the scramble, the conductive paste was prepared by a dispersion treatment using a 3 轺i machine, and the adhesive properties (viscosity, surface roughness, DFD) and viscosity change rate were measured. The results are shown in Tables 1 to 3. [Comparative Example 5] A conductive powder of 47% by mass of 〇.4μηη was mixed with (Ni), and 11.75% by mass of yttrium titanate (BT), 19.88 was added to the ceramic powder. 5% by mass of organic carrier A, further blended with 3% by mass of dispersant and 21.07% by mass of terpineol, and mixed with scramble after heating, and six orifices are attached to the outlet of the drive pump. 〇. 5mm orifices are connected in series with nozzles, making 60. (The conductive coarse paste was mechanically sheared and subjected to pre-treatment dispersion. Then, a conductive paste was prepared by performing a dispersion treatment using a 3-roller, and the adhesive properties (viscosity, surface roughness, DFD) and the adhesive properties were measured. The change rate of viscosity was shown in Table 丨 to Table 3. [Comparative Example 6] A nickel powder (Νι) of 48.12 mass% of 〇.2μηη was blended in the conductive metal powder, and 4.81 mass was blended in the ceramic powder. Barium titanate (BT) having a particle diameter of 〇〇4/^111, 16.06% by mass of an organic carrier b, further blending 43% by mass of a dispersant, 21.93% of a propionic acid, and 8.65 mass% Ethylene glycol monobutyl ether acetate vinegar was mixed and stirred using a planetary mixer (TKhiVis-diSper-mix 3D-125 type manufactured by PRIMIX Co., Ltd.), and then a conductive paste was prepared by a 3-roller to measure the adhesive properties. The viscosity was changed to 100113117 201207083. The results are shown in Tables 1 to 3. [Comparative Example 7] 48.12% by mass of nickel powder (Ni) having a particle diameter of 0.08/^111 was blended in the conductive metal powder to be blended in the ceramic powder. 4.81% by mass of barium titanate (BT) having a particle size of 0.03/mi 16.00% by mass of the organic vehicle B, further blended with 0.43 mass% of a dispersant, 21.93 mass% of propionate propionate, and 8.65 mass% of ethylene glycol monobutyl ether acetate, using a planetary mixer (TKhivis-made by PRIMIX) Disper-mix 3D-125 type) After mixing and mixing, the heated conductive paste is dispersed by a high-pressure homogenizer set according to a treatment condition of a orifice diameter of 0.09 mm, a treatment pressure of 250 MPa, and a number of dispersion passages of 10 times. The conductive paste was prepared to measure the adhesive properties and the viscosity change rate. The results are shown in Tables 1 to 3. 100113117 31 201207083 [Table i] Conductive Paste Conductive Metal Powder Ceramic Powder Organic Carrier Dispersant Organic solvent type particle size M content [% by mass] Species particle size content [% by mass] Species content [% by mass] Content [% by mass] Species content [% by mass] Example 1 Ni 0.4 47 - - - A 21.69 0.2 Alcohol 31.11 Example 2 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 Terpineol 21.07 Example 3 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 Terpineol 21.07 Example 4 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 Terpineol 21.07 Example 5 Ni 0.2 48.12 BT 0.04 4.81 B 16.06 0.43 Isoamyl propionate, ethylene glycol monobutyl ether acetate 21.93 > 8.65 Example 6 Ni 0.08 48.12 BT 0.03 4.81 B 16.06 0.43 Propionic acid Isoform S, ethylene glycol monobutyl ether acetate 21.93 > 8.65 Comparative Example 1 Ni 0.4 47 - - - A 21.69 0.2 'terpineol 31.11 Comparative Example 2 Ni 0.4 47 - - - A 21.69 0.2 Terpineol 31.11 Comparative Example 3 Ni 0.4 47 - - - A 21.69 0.2 Terpineol 31.11 Comparative Example 4 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 Terpineol 21.07 Comparative Example 5 Ni 0.4 47 BT 0.1 11.75 A 19.88 0.3 Terpineol 21.07 Compare Example 6 Ni 0.2 48.12 BT 0.04 4.81 B 16.06 0.43 Propionic acid iso- vinegar, ethylene glycol monobutyl ether acetate 21.93, 8.65 Comparative Example 7 Ni 0.08 48.12 BT 0.03 4.81 B 16.06 0.43 Propionic acid vinegar, ethylene glycol Monobutyl ether acetate 21.93 > 8.65 100113117 32

201207083 [表2] 第1步驟··前處理分散 第2步驟:分散處理 第3步驟:過 渡器過渡 方法 節流孔 導電性粗 膠糊溫度 [°C] 方法 節流 孔徑 [mm] 處理 壓力[MPa] 通過 次數 [次] 導電性膠 糊溫度 [°C] 過濾器條件 直徑 [mm] 個數[個] 過瀘' 精度 過渡器 實施例1 節流孔 剪切 0.5 6 60 實施例2 節流孔 剪切 0.5 6 60 高壓均 化器 0.19 100 1 60 99%濾除 網孑L3/xm 以下 實施例3 節流孔 剪切 0.5 6 60 高壓均 化器 0.19 100 3 60 99%濾除 網孔3μιη 以下 實施例4 節流孔 剪切 0.5 6 60 高壓均 化器 0.19 100 5 60 99%濾除 網孔3/xm 以下 實施例5 節流孔 剪切 0.2 11 60 高壓均 化器 0.13 200 5 60 99%濾除 網孔ljum 以下 實施例6 節流孔 剪切 0.2 11 60 高壓均 化器 0.09 250 10 60 99%濾除 網孔 以下 比較例1 節流孔 剪切 1.0 6 60 - - 墨 - - - - 比較例2 行星搜拌 器30分鐘 - - 25 - - - - - - - 比較例3 行星攪拌 器120分鐘 - - 25 比幸交例4 行星攪拌 器 - - - 3機 - - - - - - 比較例5 節流孔 剪切 0.5 6 60 3韻 - - - - - 比較例6 行星攪拌 器 - - - 3_ - - - - - - 比較例7 行星攪拌 器 - - - 高壓均 化器 0.09 250 10 60 - - 33 100113117 201207083 [表3] 乾燥塗膜光澤度 膠糊特性 黏度變化率[%] 黏度 [Pa · s] 表面粗ί造度R a [/mi] DFD [g/cm3] 初始 1天 10天 30天 實施例1 34 - - - - - - - 實施例2 - 27 0.26 5.8 0 5 7 9 實施例3 - 24 0.24 6.0 0 3 6 7 實施例4 - 24 0.24 6.0 0 3 6 6 實施例5 - 20 0.18 5.8 0 5 7 7 實施例6 - 25 0.12 5.7 0 4 7 8 比較例1 3 - - - - - - - 比較例2 4 ** - - - - - - 比較例3 5 - - - - - - - 比較例4 - 32 0.28 5.6 0 13 27 30 比較例5 - 30 0.27 5.6 0 11 23 25 比較例6 - 28 0.22 5.5 0 15 26 35 比較例7 - 28 0.14 5.6 0 12 19 24 [第1步驟的前處理分散步驟的效果] 關於前處理分散步驟的效果,用在表4所示實施例1及比較 例1〜3中所製作之於第1步驟的前處理分散狀態下的導電性 膠糊的乾燥塗膜的光澤度進行說明。 [表4] 第1步驟:前處理分散步驟 乾燥塗膜 光澤度 方法 節流孔 道常Μ相现 直徑 [mm] 個數 [個] 守电1王芽且吵 糊溫度[°c] 實施例1 節流孔剪切 0.5 6 60 34 比較例1 節流孔剪切 1.0 6 60 3 比較例2 行星攪拌器30分鐘 - - - 4 比較例3 行星攪拌器120分鐘 - - - 5 由表4可知,在用具備節流孔徑為1.0mm的粗的節流孔的 喷嘴進行前處理分散的比較例1的情況下,塗膜的光澤度為 3,係與用行星攪拌機進行混合攪拌的比較例2、3時相同的 34 100113117 201207083 混煉狀態。又,可知將用行星攪拌機混合攪拌的時間設定為 30分鐘及12G分鐘的情況下,塗朗光澤度沒有大的變化。 另-方面’可知在用具備節流孔徑躲5軸的節流孔的喷嘴 進灯則處理分散的實施例丨的情況下,塗朗光澤度升高為 32’相較於習知利用授拌機的混煉進行處理,混煉效果高。 這樣,用節流孔徑為〇.5_的喷錢行前處理分散時的機 械剪切力係大於使用節流孔徑丨〇mm的噴嘴或習知的使用 擾拌機進行前處理分散時,由光澤度之差可知乾燥膜表面的 潤濕性明顯改善。 [第2步驟對膠糊特性的影響] 將不於表5的將高愿均化器用於第2步驟的分散處理的實 =比r、習知的利用3觀機法實施的比較例4、5的膠糊特性 明使用高壓均化器進行第2步驟的分散處理的 清况下對膠㈣性的f彡響。201207083 [Table 2] Step 1 · Pre-Processing Dispersion Step 2: Dispersing Process Step 3: Transitioner Transition Method Throttle Conductive Coarse Paste Temperature [°C] Method Throttle Aperture [mm] Processing Pressure [ MPa] Pass times [times] Conductive paste temperature [°C] Filter condition diameter [mm] number [number] Overpass ' Precision transition device Example 1 Throttle cut 0.5 6 60 Example 2 Throttling Hole shearing 0.5 6 60 High pressure homogenizer 0.19 100 1 60 99% filtered mesh L3/xm Example 3 below orifice cutting 0.5 6 60 High pressure homogenizer 0.19 100 3 60 99% filter mesh 3μιη The following example 4 orifice cutting 0.5 6 60 high pressure homogenizer 0.19 100 5 60 99% filtration mesh 3 / xm The following example 5 orifice cutting 0.2 11 60 high pressure homogenizer 0.13 200 5 60 99 %Filtering mesh ljum The following example 6 orifice cutting 0.2 11 60 high pressure homogenizer 0.09 250 10 60 99% filtering mesh below comparison example 1 orifice cutting 1.0 6 60 - - ink - - - - Comparative Example 2 Planetary Mixer for 30 minutes - - 25 - - - - - - - Comparative Example 3 Planetary Mixer for 120 minutes - - 25 比幸交例4 Planetary agitator - - - 3 machine - - - - - - Comparative example 5 orifice cutting 0.5 6 60 3 rhyme - - - - - Comparative example 6 Planetary mixer - - - 3_ - - - - - - Comparative Example 7 Planetary Stirrer - - - High Pressure Homogenizer 0.09 250 10 60 - - 33 100113117 201207083 [Table 3] Dry Coating Gloss Glue Characteristic Viscosity Change Rate [%] Viscosity [Pa · s] Surface roughness R a [/mi] DFD [g/cm3] Initial 1 day 10 days 30 days Example 1 34 - - - - - - - Example 2 - 27 0.26 5.8 0 5 7 9 Example 3 - 24 0.24 6.0 0 3 6 7 Example 4 - 24 0.24 6.0 0 3 6 6 Example 5 - 20 0.18 5.8 0 5 7 7 Example 6 - 25 0.12 5.7 0 4 7 8 Comparative Example 1 3 - - - - - - - Comparative Example 2 4 ** - - - - - - Comparative Example 3 5 - - - - - - - Comparative Example 4 - 32 0.28 5.6 0 13 27 30 Comparative Example 5 - 30 0.27 5.6 0 11 23 25 Comparative Example 6 - 28 0.22 5.5 0 15 26 35 Comparative Example 7 - 28 0.14 5.6 0 12 19 24 [Effect of pre-treatment dispersion step of the first step] The effects of the pre-treatment dispersion step were as shown in Table 1 and Comparative Example shown in Table 4. 1 to 3 before the first step The gloss of the dried coating film of the conductive paste in the dispersed state will be described. [Table 4] Step 1: Pre-treatment Dispersion step Dry coating film gloss method Throttling hole constant Μ phase diameter [mm] number [one] Shou electric 1 king bud and ambiguous temperature [°c] Example 1 Throttle shear 0.5 6 60 34 Comparative Example 1 Throttle shear 1.0 6 60 3 Comparative Example 2 Planetary agitator for 30 minutes - - - 4 Comparative Example 3 Planetary agitator 120 minutes - - - 5 As can be seen from Table 4, In the case of Comparative Example 1 in which pretreatment dispersion was carried out using a nozzle having a thick orifice having a orifice diameter of 1.0 mm, the gloss of the coating film was 3, which was compared with Comparative Example 2 in which the mixture was stirred by a planetary mixer. 3 o'clock the same 34 100113117 201207083 mixed state. Further, it was found that when the time of mixing and stirring with the planetary mixer was set to 30 minutes and 12 G minutes, there was no large change in the coating gloss. On the other hand, it can be seen that in the case of using a nozzle having a throttling aperture to avoid a five-axis orifice, when the lamp is processed to disperse, the coating gloss is increased to 32', which is better than the conventional use of the mixing. The mixing of the machine is processed, and the mixing effect is high. Thus, when the mechanical shearing force at the time of dispersing the pre-treatment with a throttle orifice of 〇.5_ is greater than that of a nozzle using a throttle orifice 丨〇mm or a conventional use of a scrambler for pre-treatment dispersion, The difference in gloss indicates that the wettability of the surface of the dried film is remarkably improved. [Effect of the second step on the adhesive properties] The actual ratio r which is not used in the dispersion processing of the second step in Table 5, and the comparative example 4 which is implemented by the conventional method using the 3 machine method The adhesive property of 5 is clear to the adhesiveness of the rubber under the condition of the dispersion treatment of the second step using a high-pressure homogenizer.

100113117 35 201207083 [表5] 第1步驟: 前分散處理 第2步驟:分散處理 膠糊特性 方法 方法 節流 孔徑 [mm] 處理 壓力 [MPa] 通過 次數 [次] 導電性膠 糊溫度 [°C] 黏度 [Pa · s] 表面粗 糙度Ra [/mi] DFD [g/cm3] 實施例2 節流孔 剪切 高壓 均化器 0.19 100 1 60 27 0.26 5.8 實施例3 節流孔 剪切 高壓 均化器 0.19 100 3 60 24 0.24 6.0 實施例4 節流孔 剪切 高壓 均化器 0.19 100 5 60 24 0.24 6.0 比較例4 行星攪 拌器 3輥機 - - - - 32 0.28 5.6 比較例5 節流孔 剪切 3輥機 - - - - 30 0.27 5.6 如表5所示,當對在第2步驟中使用高壓均化器及3輥機進 行分散處理的導電性膠糊的黏度進行比較時,可知若利用高 壓均化器的通過次數(分散處理的次數)為1次,則為 27Pa · s(以下參照實施例2),但當將處理次數增加為3次(以 下參照實施例3)或5次(以下參照實施例4)時,黏度下降至 24Pa · s。這是因為高壓均化器的強剪切力提高了鎳粉或陶 瓷粉的分散性。另外,表面粗糙度及DFD若是處理1次則為 0.26/xm和5.8g/cm3,但當將處理次數增加為3次或5次時,則 成為0.24/mi和6.0g/cm3,由此也可知鎳粉或陶瓷粉的分散性 提高了。 但是,用3輥機製造的導電性膠糊的黏度明顯高於利用高 壓均化器製造的導電性膠糊的黏度,表面的潤濕差,原因是 由於3輥機的剪切弱,因此鎳粉或陶瓷粉不能充分地分散,100113117 35 201207083 [Table 5] Step 1: Pre-dispersion treatment Step 2: Dispersion treatment of paste characteristics Method Method Throttle aperture [mm] Treatment pressure [MPa] Passing times [times] Conductive paste temperature [°C] Viscosity [Pa · s] Surface roughness Ra [/mi] DFD [g/cm3] Example 2 Throttle shear high pressure homogenizer 0.19 100 1 60 27 0.26 5.8 Example 3 Throttling shear high pressure homogenization 0.19 100 3 60 24 0.24 6.0 Example 4 Throttle shear high pressure homogenizer 0.19 100 5 60 24 0.24 6.0 Comparative example 4 Planetary mixer 3 roller machine - - - - 32 0.28 5.6 Comparative example 5 Throttle cutter Cutting 3 Roller - - - - 30 0.27 5.6 As shown in Table 5, when comparing the viscosity of the conductive paste which was subjected to the dispersion treatment using the high-pressure homogenizer and the 3-roller in the second step, it is known that the viscosity is used. When the number of passes of the high-pressure homogenizer (the number of times of dispersion processing) is one time, it is 27 Pa·s (see Example 2 below), but the number of times of treatment is increased to three times (hereinafter referred to as Example 3) or five times ( When referring to Example 4) below, the viscosity was lowered to 24 Pa·s. This is because the high shear force of the high pressure homogenizer increases the dispersibility of the nickel powder or ceramic powder. In addition, the surface roughness and the DFD are 0.26/xm and 5.8 g/cm3 if it is treated once, but when the number of times of treatment is increased to 3 or 5 times, it becomes 0.24/mi and 6.0 g/cm3, thereby also It is known that the dispersibility of the nickel powder or the ceramic powder is improved. However, the viscosity of the conductive paste produced by the 3-roller is significantly higher than that of the conductive paste produced by the high-pressure homogenizer, and the surface wetting is poor because the shear of the 3-roller is weak, so nickel Powder or ceramic powder cannot be fully dispersed,

100113117 36 S 201207083 成為表面粗糙度或DFD不佳的結果。 此外,即使在使用節流孔徑為〇5mm的喷嘴在與實施例 2〜4相同的條件下進行利用節流孔剪切的前處理分散後,利 用3輥機進行分散處理的情況下(參照比較例5),也呈現鎳粉 分散不良、表面粗糙度或DFD不佳的結果。 將不於表6的將高壓均化器用於第2步驟的分散處理的實 施例2〜4與習知的利用3輥機法實施的比較例4、5的黏度變化 率進行比較。 [表6] 第1步驟:前分散處理 炎2步驟:分散處理 黏唐轡化率 [%1 方法 方法 初始 1長 10夭 30夭 實施例2 節流孔剪切 節流孔剪切 均化器 高壓均化器 0 0 5 3 7 9 實施例3 6 7 貫施例4 知流孔剪切 向壓均化器 0 λ 6 6 比較例4 行星攪拌器 . 3輥撫 〇 13 27 30 比較例5 、!_ — 節流孔剪切 3輥機 0 11 23 25 ——__3 輥機 ^ 〇 |n| 23丁75- 因為實施例的使用高壓均化H的導電性職改善了顆板 表面的,閏濕」,且獲得面分散性,由此分散劑吸附在顆教 表面’防止顆㈣「再凝集」,即使保存3〇天時間也可維持 導電性膠_分散穩定性’所以其黏度變化率小。但是,在 第2步驟的分散處理中❹3_的比較例4、5的導電性膠糊 由於顆粒表_「龍」差,且分散性也低,㈣分散劑未 被有效地⑽在顆粒表面,因此,^能轉分散穩定性,黏 度變化率大。 [第1步驟及第2步驟中的分散處理的影響] 100113117 37 201207083 將第1步驟及第2步驟的分散處理的組合對膠糊特性的影 響示於表7、對黏度變化率的影響示於表8。 [表7] $1¾驟: Ϊ歹散處理 第2步驟:分散處理 膠糊特性 方法 方法 節流 孔徑 [mm] 處理 壓力 [MPa] 通過 次數 [次] 導電性 膠糊溫度 rc] 黏度 [Pa · s] 表面粗 链度Ra Γ i/ml DFD [g/cm3] 實施例5 節流孔剪切 高壓均 化器 0.13 250 5 60 20 0.18 5.8 實施例6 節流孔剪切 高壓均 化器 0.09 250 10 60 25 0.12 5.7 比較例6 什星攪拌器 J輥機 - - - - 卜28 0.22 5 5 比較例7 行星攪拌器 高壓均 化器 0.09 250 10 60 28 0.14 5.6 [表8] 第1步驟: 前分散處理 第2步驟: 分散處理 —---—_ 黏度變化率[%] 方法 方法 初始 1天 10天 飞0妥 實施例5 節流孔剪切 高壓均化器 0 5 7 7 實施例6 節流孔剪切 高壓均化器 0 4 7 Q 比較例6 行星攪拌器 3輥機 0 15 26 0 比較例7 行星攪拌器 高壓均化器 r 〇 12 19 24 由表7可知’實施習知的利用擾拌機的前處理分散、以利 用3輥機的分散處理製造的導電性膠糊(參照比較例6)係由 於其表面的潤濕較實施例5、6所示的利用高壓均化器製造的 導電性膠糊為差,且3輥機的剪切弱,因此成為鎳粉或陶瓷 粉不能充分地分散,表面粗糙度或DFD差,進而黏度變化率 也大的結果。 另一方面,由表8可知,實施習知的利用攪拌機的前處理 分散、以利用高壓均化器的分散處理製造的導電性膠糊(參 100113117100113117 36 S 201207083 is the result of poor surface roughness or DFD. Further, even in the case where the nozzle having the orifice diameter of 〇5 mm was used for the pretreatment dispersion by the orifice shearing under the same conditions as in Examples 2 to 4, the dispersion treatment was carried out by the 3-roller (refer to the comparison). Example 5) also showed the result of poor dispersion of nickel powder, surface roughness or poor DFD. The viscosity change rates of Comparative Examples 4 and 4 which were not subjected to the dispersion treatment of the second step using the high pressure homogenizer in Table 6 were compared with those of Comparative Examples 4 and 5 which were carried out by the conventional 3 roll method. [Table 6] Step 1: Pre-dispersion treatment inflammation 2 steps: Dispersion treatment of viscous rate [%1 method method initial 1 length 10 夭 30 夭 Example 2 orifice cutting shear orifice shear homogenizer high pressure Chemer 0 0 5 3 7 9 Example 3 6 7 Example 4 Known orifice shear to pressure homogenizer 0 λ 6 6 Comparative Example 4 Planetary mixer. 3 Roller 〇 13 27 30 Comparative Example 5,! _ — orifice cutting 3 roller machine 0 11 23 25 ——__3 roller machine ^ 〇|n| 23 butyl 75- Because the use of high-pressure homogenization H of the embodiment improves the surface of the board, dampness Moreover, the surface dispersibility is obtained, whereby the dispersing agent is adsorbed on the surface of the teaching surface to prevent the particles from re-aggregating, and the conductive adhesive_dispersion stability can be maintained even after storage for 3 days, so the viscosity change rate is small. However, in the dispersion treatment of the second step, the conductive pastes of Comparative Examples 4 and 5 of ❹3_ were poor in particle size_"dragon", and the dispersibility was also low, and (4) the dispersing agent was not effectively (10) on the surface of the particles. Therefore, ^ can be transferred to dispersion stability, and the viscosity change rate is large. [Influence of Dispersion Treatment in First Step and Second Step] 100113117 37 201207083 The effect of the combination of the dispersion treatment in the first step and the second step on the adhesive properties is shown in Table 7, and the influence on the viscosity change rate is shown in Table 8. [Table 7] $13⁄4: Diffusion treatment Step 2: Dispersion treatment of paste characteristics Method Method Throttle aperture [mm] Treatment pressure [MPa] Pass times [times] Conductive paste temperature rc] Viscosity [Pa · s] Surface Thickness Ra Γ i/ml DFD [g/cm3] Example 5 Throttle Shear High Pressure Homogenizer 0.13 250 5 60 20 0.18 5.8 Example 6 Throttle Shear High Pressure Homogenizer 0.09 250 10 60 25 0.12 5.7 Comparative Example 6 Shixing Stirrer J Roller - - - - Bu 28 0.22 5 5 Comparative Example 7 Planetary Stirrer High Pressure Homogenizer 0.09 250 10 60 28 0.14 5.6 [Table 8] Step 1: Before Dispersion treatment Step 2: Dispersion treatment ------_ Viscosity change rate [%] Method method Initial 1 day 10 days fly 0 Proper Example 5 Throttle shear high pressure homogenizer 0 5 7 7 Example 6 Flow hole shear high pressure homogenizer 0 4 7 Q Comparative example 6 Planetary agitator 3 roller machine 0 15 26 0 Comparative example 7 Planetary agitator High pressure homogenizer r 〇12 19 24 It can be seen from Table 7 'Implementation of the use of the prior art The conductive paste produced by the pretreatment dispersion of the scrambler and the dispersion treatment by the 3-roller (refer to Comparative Example 6) is The surface wetting is inferior to the conductive paste produced by the high-pressure homogenizer shown in Examples 5 and 6, and the shear of the 3-roller is weak, so that the nickel powder or the ceramic powder cannot be sufficiently dispersed, and the surface is not sufficiently dispersed. The roughness or DFD is poor, and the viscosity change rate is also large. On the other hand, as is clear from Table 8, a conductive paste prepared by a pretreatment dispersion using a stirrer and dispersed by a high pressure homogenizer is implemented (refer to 100113117).

S 38 201207083 照比較例7)係與在相同條件下進行高>1均化的實施例6中製 仏的導電!·生軸進彳τ比較,由於顆粒表面關濕性差,且分 放/·生也差’分⑽不能充分地吸附到顆粒表面,不能防止顆 粒的再凝集」,因此導電性膠糊的分散穩定性差,所以, 黏度變化率變大。 【圖式簡單說明】 圖1是根據本發明的導電性膠糊的製造流程圖。 圖2是第i步驟的前處理分散步驟中使用的具備節流孔的 喷嘴的剖面示意圖。 圖3是用於第1步驟的前處理分散步驟的分散裝置的說明 圖。 圖4是表示黏度和膠糊溫度的關係的圖。 【主要元件符號說明】 1 槽 2 加熱器 3 攪拌槳葉 4 泵 5 噴嘴 6 節流孔 D 喷嘴的直徑(外徑) L 節流孔間的距離 D 節流孔徑(節流孔的内徑) 100113117 39S 38 201207083 According to Comparative Example 7), compared with the conductivity of the crucible in Example 6 which was subjected to high > 1 homogenization under the same conditions, the surface of the particle was poorly wetted, and the separation was performed/ The difference in the amount of the raw material is not sufficiently adsorbed on the surface of the particles, and the re-aggregation of the particles cannot be prevented. Therefore, the dispersion stability of the conductive paste is poor, so that the rate of change in viscosity becomes large. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the manufacture of a conductive paste in accordance with the present invention. Fig. 2 is a schematic cross-sectional view showing a nozzle having an orifice used in the pretreatment dispersion step of the i-th step. Fig. 3 is an explanatory view of a dispersing device used in the pretreatment dispersion step of the first step. Fig. 4 is a graph showing the relationship between viscosity and paste temperature. [Main component symbol description] 1 Slot 2 Heater 3 Stirring paddle 4 Pump 5 Nozzle 6 Throttle hole D Nozzle diameter (outer diameter) L Distance between orifices D Throttling hole (inner diameter of orifice) 100113117 39

Claims (1)

201207083 七、申請專利範圍: 1. 一種導電性膠糊之製造方法,其特徵在於,具有下述的 第1步驟至第3步驟: [第1步驟] 將至少含有導電性金屬粉末、分散劑、有機黏合劑及有機 溶劑之導電性粗膠糊一邊加熱一邊混合攪拌後,使其通過具 有節流孔之喷嘴,藉以進行分散處理之前處理分散步驟; [第2步驟] 將於第1步驟中進行了前處理分散之經加熱的導電性膠 糊利用高壓均化器進行分散處理之分散步驟; [第3步驟] 將於第2步驟中進行了分散處理之導電性膠糊利用過濾 器進行過濾、之步驟。 2. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述第1步驟的具備節流孔之喷嘴係串聯地排列2個以 上,以將導電性粗膠糊分散。 3. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述第1步驟之節流孔之節流孔徑為0.2〜0.5mm。 4. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述導電性粗膠糊之黏度為10Pa · s以下。 5. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述高壓均化器以50〜250MPa之壓力進行分散處理。 100113117 40 201207083 6. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述第2步驟之導電性膠糊進行流動之上述高壓均化器 中所具備的節流孔之節流孔徑為〇.〇5〜〇.2mm。 7. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述高壓均化器在上述節流孔之出口部側具備冷卻器。 8. 如申請專利範圍第1項之導電性膠糊之製造方法,其 中,上述第2步驟中之經加熱之導電性膠糊之黏度為 10Pa · s 以下。 9. 一種導電性膠糊,係申請專利範圍第1項之導電性膠糊 之製造方法所形成,其特徵在於,導電性金屬粉末之含量相 對於導電性膠糊總量為30〜70重量%。 10. 如申請專利範圍第9項之導電性膠糊,其中,上述導 電性膠糊包含陶瓷粉末作為燒結抑制劑。 100113117 41201207083 VII. Patent Application Range: 1. A method for producing a conductive paste, comprising the following first steps to third steps: [First step] comprising at least a conductive metal powder, a dispersant, The conductive binder of the organic binder and the organic solvent is mixed and heated while being heated, and then passed through a nozzle having an orifice to perform a dispersion treatment before the dispersion treatment; [2nd step] will be carried out in the first step a step of dispersing the pre-processed and dispersed heated conductive paste by a high-pressure homogenizer; [Step 3] The conductive paste which has been subjected to the dispersion treatment in the second step is filtered by a filter, The steps. 2. The method of producing a conductive paste according to the first aspect of the invention, wherein the nozzles having the orifices in the first step are arranged in series or more in series to disperse the conductive paste. 3. The method for producing a conductive paste according to the first aspect of the invention, wherein the orifice of the orifice of the first step has a orifice diameter of 0.2 to 0.5 mm. 4. The method for producing a conductive paste according to the first aspect of the invention, wherein the conductive paste has a viscosity of 10 Pa·s or less. 5. The method for producing a conductive paste according to claim 1, wherein the high pressure homogenizer is subjected to a dispersion treatment at a pressure of 50 to 250 MPa. 6. The method for producing a conductive paste according to the first aspect of the invention, wherein the orifice of the second high-pressure homogenizer in which the conductive paste of the second step flows is throttled The aperture is 〇.〇5~〇.2mm. 7. The method of producing a conductive paste according to the first aspect of the invention, wherein the high-pressure homogenizer comprises a cooler at an outlet portion side of the orifice. 8. The method for producing a conductive paste according to claim 1, wherein the heated conductive paste in the second step has a viscosity of 10 Pa·s or less. A conductive paste formed by the method for producing a conductive paste according to the first aspect of the invention, characterized in that the content of the conductive metal powder is 30 to 70% by weight based on the total amount of the conductive paste. . 10. The conductive paste of claim 9, wherein the conductive paste comprises ceramic powder as a sintering inhibitor. 100113117 41
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