TWI805721B - conductive paste - Google Patents

conductive paste Download PDF

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TWI805721B
TWI805721B TW108109656A TW108109656A TWI805721B TW I805721 B TWI805721 B TW I805721B TW 108109656 A TW108109656 A TW 108109656A TW 108109656 A TW108109656 A TW 108109656A TW I805721 B TWI805721 B TW I805721B
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conductive
powder
conductive paste
transmittance
particles
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TW201942263A (en
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福嶋泰基
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日商則武股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern

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  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

本發明提供一種導電性糊,其由於分散穩定性良好,因此鍛燒時的異常晶粒成長等問題得到抑制。根據本發明,可提供一種導電性糊,其用於導體膜的形成,且包含:導電性粉末、介電質粉末及有機成分。關於對所述導電性糊實施離心沈降處理時的導電性粉末及介電質粉末的離心沈降行為,於藉由如下透過率變化速度進行評價時,以透過率變化速度成為0.003以下的方式製備,所述透過率變化速度定義為基於沿離心沈降方向的透過率分佈而計算出的積分透過率的每單位時間的變化量。The present invention provides an electroconductive paste in which problems such as abnormal crystal grain growth during firing are suppressed due to excellent dispersion stability. According to the present invention, a conductive paste can be provided, which is used for forming a conductive film and includes: conductive powder, dielectric powder and organic components. Regarding the centrifugal sedimentation behavior of the conductive powder and the dielectric powder when the conductive paste is subjected to the centrifugal sedimentation treatment, when the following transmittance change rate is evaluated, it is prepared so that the transmittance change rate becomes 0.003 or less, The transmittance change rate is defined as the amount of change per unit time of the integrated transmittance calculated based on the transmittance distribution along the centrifugal sedimentation direction.

Description

導電性糊conductive paste

本發明是有關於一種導電性糊。更詳細而言,本發明是有關於一種對於積層陶瓷電子零件的內部電極層的形成而言較佳的導電性糊。 The present invention relates to a conductive paste. More specifically, the present invention relates to a conductive paste suitable for forming internal electrode layers of laminated ceramic electronic components.

本申請案主張基於2018年3月30日所申請的日本專利申請2018-068733號的優先權,並將該申請的全部內容作為參照而編入至本說明書中。 This application claims priority based on Japanese Patent Application No. 2018-068733 for which it applied on March 30, 2018, and the entire content of this application is incorporated in this specification as a reference.

積層陶瓷電容器(Multi-Layer Ceramic Capacitor,MLCC)具有將包含陶瓷的介電質層與內部電極層多個積層而成的結構。所述MLCC通常藉由如下方式製作:於包含介電質粉末與黏合劑等的介電質生片(green sheet)上印刷含有導電性粉末的內部電極用的導電性糊,形成內部電極層,將印刷了該內部電極層的介電質生片多個積層並壓接,進行鍛燒。此處,例如專利文獻1中揭示了一種導電性糊,其含有導電性粒子、以及包含介電質粒子的共存材料,共存材料具備非導電性被覆部。根據所述構成,記載了於導電性粒子燒結而形成內部電極層時,不會使介隔存在於導電性粒子間的共存材料彼此反應,而可較佳地抑制導電性粒子的異常晶粒成長。 A multilayer ceramic capacitor (Multi-Layer Ceramic Capacitor, MLCC) has a structure in which a plurality of dielectric layers including ceramics and internal electrode layers are laminated. The MLCC is generally produced by printing a conductive paste for internal electrodes containing conductive powder on a dielectric green sheet containing dielectric powder and a binder to form an internal electrode layer, A plurality of dielectric green sheets on which the internal electrode layers were printed were laminated and bonded by pressure, followed by firing. Here, for example, Patent Document 1 discloses a conductive paste containing conductive particles and a coexisting material containing dielectric particles, and the coexisting material is provided with a non-conductive coating portion. According to the above structure, it is described that when the conductive particles are sintered to form the internal electrode layer, the abnormal grain growth of the conductive particles can be preferably suppressed without causing the coexisting materials existing between the conductive particles to react with each other. .

[現有技術文獻] [Prior art literature]

[專利文獻] [Patent Document]

[專利文獻1]日本專利申請公開第2007-123198號公報 [Patent Document 1] Japanese Patent Application Publication No. 2007-123198

且說,伴隨著電子機器的小型、輕量化,關於構成電子機器的各電子零件亦要求小型薄層化。MLCC中,要求藉由使介電質層進一步變薄且進一步增加積層數來擴大電極面積,使MLCC的體積小型化且增大靜電電容。根據所述介電質層及內部電極層的薄層化,例如用於形成內部電極層的粉末的平均粒徑被微細化至共存材料中為10nm水準、導電性粒子中為數100nm水準。因此,準備專利文獻1中揭示的具備非導電性被覆部的共存材料變得極其困難。 In addition, along with the miniaturization and weight reduction of electronic equipment, each electronic component constituting the electronic equipment is also required to be smaller and thinner. In MLCC, it is required to enlarge the electrode area by further thinning the dielectric layer and further increasing the number of laminated layers, so as to reduce the size of the MLCC and increase the capacitance. By reducing the thickness of the dielectric layer and the internal electrode layer, for example, the average particle size of the powder used to form the internal electrode layer is reduced to the level of 10 nm in the coexistence material and to the level of several 100 nm in the conductive particle. Therefore, it becomes extremely difficult to prepare a coexisting material having a non-conductive coating portion disclosed in Patent Document 1.

另一方面,伴隨著介電質層及內部電極層的薄層化,迄今為止並未成為問題的水準下的導電性粒子的晶粒成長成為問題。例如,藉由導電性粒子於鍛燒時過剩地晶粒成長,內部電極層膨脹而介電質層受到壓迫,存在引起介電質層的耐電壓的下降、或可靠性的下降等問題。另外,若導電性粒子進一步粗大地晶粒成長,則會刺破經薄層化的介電質層,存在導致製品不良且引起良率的下降等問題。認為所述導電性粒子的晶粒成長是由於如下情況而產生:於鍛燒前的導電性糊塗膜中導電性粒子與介電質粒子不均勻地存在,導電性粒子彼此的接點較多的部位(即, 不存在介電質粒子的部分)存在多個,無法發揮介電質粒子帶來的燒結抑制效果。另外,關於所述導電性粒子與介電質粒子的不均勻性,若該些粉末變得微細且表面活性提高,則可變得更顯著。 On the other hand, with the thinning of the dielectric layer and the internal electrode layer, grain growth of conductive particles at a level that has not been a problem until now has become a problem. For example, due to excessive grain growth of the conductive particles during firing, the internal electrode layer expands and the dielectric layer is compressed, causing a decrease in withstand voltage of the dielectric layer or a decrease in reliability. In addition, if the conductive particles grow coarser, they will pierce the thinned dielectric layer, resulting in defective products and a decrease in yield. The grain growth of the conductive particles is considered to be caused by the fact that the conductive particles and the dielectric particles are unevenly present in the conductive paste film before firing, and there are many contact points between the conductive particles. parts (i.e., There are many portions where there are no dielectric particles), and the effect of suppressing sintering by the dielectric particles cannot be exhibited. In addition, the unevenness of the conductive particles and the dielectric particles may become more remarkable when the powders are finer and the surface activity is improved.

本發明是鑒於所述方面而成,其目的在於提供一種導電性糊,其由於導電性粉末與介電質粉末的分散穩定性良好,因此鍛燒時的異常晶粒成長等問題得到抑制。 The present invention is made in view of the foregoing, and an object of the present invention is to provide a conductive paste in which problems such as abnormal crystal grain growth during firing are suppressed because the dispersion stability of conductive powder and dielectric powder is good.

根據本發明者等人的研究,即使導電性糊使用的原料相同,亦可藉由調整糊製備條件而使糊中的導電性粉末及介電質粉末的分散狀態變化。而且,發現藉由以如下述般規定的「透過率變化速度」實現0.003以下的方式,對糊製備條件進行各種控制,可獲得具備前所未有的高水準的分散穩定性的導電性糊。本技術是基於所述見解而完成。 According to the study of the present inventors, even if the raw materials used for the conductive paste are the same, the dispersion state of the conductive powder and the dielectric powder in the paste can be changed by adjusting the preparation conditions of the paste. Furthermore, it was discovered that by variously controlling the paste preparation conditions so that the "transmittance rate of change" specified as follows is 0.003 or less, a conductive paste having an unprecedentedly high level of dispersion stability can be obtained. This technology is completed based on the knowledge mentioned above.

即,藉由本文揭示的技術,可提供一種導電性糊,其用於導體膜的形成,且包含:導電性粉末、介電質粉末及有機成分。此處,關於對所述導電性糊實施離心沈降處理時的所述導電性粉末及所述介電質粉末的離心沈降行為,於藉由如下透過率變化速度進行評價時,以所述透過率變化速度成為0.003以下的方式製備,所述透過率變化速度定義為基於沿所述離心沈降方向的透過率分佈而計算出的積分透過率的每單位時間的變化量。 That is, by using the technology disclosed herein, a conductive paste can be provided, which is used for forming a conductive film and includes: conductive powder, dielectric powder and organic components. Here, regarding the centrifugal sedimentation behavior of the conductive powder and the dielectric powder when the conductive paste is subjected to centrifugal sedimentation treatment, the transmittance It was prepared so that the rate of change of the transmittance defined as the amount of change per unit time of the integrated transmittance calculated based on the transmittance distribution along the centrifugal sedimentation direction was 0.003 or less.

根據所述構成,實現了一種導電性糊:導電性粉末與介電質粉末於有機成分中極其穩定地分散,且可長期維持其分散狀 態。根據所述導電性糊,導電性粉末與介電質粉末以良好的分散狀態存在於有機成分中,因此於形成塗膜時亦可較佳地抑制導電性粉末彼此凝聚或接觸,可大幅度地抑制對所述塗膜進行鍛燒時的晶粒成長。藉此,可將鍛燒後的導體膜中的導電性粒子及介電質粒子的尺寸維持地小,且抑制例如導電性粒子的異常成長所引起的介電質層的刺破。結果可製成品質與可靠性優異的電子零件。 According to the above constitution, a conductive paste is realized in which the conductive powder and the dielectric powder are dispersed extremely stably in the organic component, and the dispersed state can be maintained for a long time state. According to the above-mentioned conductive paste, the conductive powder and the dielectric powder are present in the organic component in a well-dispersed state. Therefore, when the coating film is formed, the aggregation or contact of the conductive powder can be preferably suppressed, and the Grain growth during firing of the coating film is suppressed. Thereby, the sizes of the conductive particles and the dielectric particles in the fired conductor film can be kept small, and the puncture of the dielectric layer caused by abnormal growth of the conductive particles, for example, can be suppressed. As a result, electronic parts excellent in quality and reliability can be manufactured.

再者,本說明書中,所謂「透過率變化速度」是指藉由經時地獲取有關導電性糊的光透過率分佈曲線而獲得的積分光透過率(T)的每單位時間的變化量(△T/△t)。光透過率分佈曲線可藉由如下方式獲得:關於對導電性糊進行離心沈降處理時的糊中所含的粒子的沈降狀態,利用光透過法或光反射法等光學檢測方法,於糊的整個區域中沿離心沈降方向實時地且直接地測定光透過率或光反射率。本文揭示的發明中,採用所述透過率變化速度作為評價導電性糊的分散穩定性的指標。所述粒子的離心沈降狀態可藉由後述的實施例中具體示出的方法正確且定量地測量。 In addition, in this specification, the so-called "transmittance rate of change" refers to the amount of change per unit time of the integrated light transmittance (T) obtained by acquiring the light transmittance distribution curve of the conductive paste over time ( ΔT/Δt). The light transmittance distribution curve can be obtained as follows: Regarding the sedimentation state of the particles contained in the paste when the conductive paste is subjected to centrifugal sedimentation treatment, using an optical detection method such as the light transmission method or the light reflection method, etc., on the entire paste Real-time and direct measurement of light transmittance or light reflectance along the centrifugal sedimentation direction in the area. In the invention disclosed herein, the rate of change in transmittance is used as an index for evaluating the dispersion stability of the conductive paste. The centrifugal sedimentation state of the particles can be accurately and quantitatively measured by the method specifically shown in Examples described later.

於本文揭示的導電性糊的較佳的一態樣中,於將所述導電性粉末的基於布厄特(Brunauer Emmett Tellern,BET)法的平均粒徑設為D1,將所述介電質粉末的基於BET法的平均粒徑設為D2時,滿足0.03×D1≦D2≦0.4×D1。藉此,即便於形成薄導電膜的情況下,介電質粒子亦可較佳地配置於導電性粒子的空隙,藉由介電質粉末較佳地抑制鍛燒時的導電性粒子的異常晶粒成長。 In a preferred aspect of the conductive paste disclosed herein, when the average particle size of the conductive powder based on the Buert (Brunauer Emmett Tellern, BET) method is set as D 1 , the dielectric When the average particle diameter of the solid powder by the BET method is D 2 , it satisfies 0.03×D 1 ≦D 2 ≦0.4×D 1 . Thereby, even in the case of forming a thin conductive film, the dielectric particles can be preferably arranged in the gaps of the conductive particles, and the abnormal crystals of the conductive particles during firing can be preferably suppressed by the dielectric powder. Grains grow.

於本文揭示的導電性糊的較佳的一態樣中,所述導電性 粉末的基於BET法的所述平均粒徑D1為0.5μm以下。藉此,例如可高精度地形成厚度約3μm以下左右的導體膜。 In a preferred aspect of the conductive paste disclosed herein, the average particle diameter D 1 of the conductive powder based on the BET method is 0.5 μm or less. Thereby, for example, a conductor film having a thickness of about 3 μm or less can be formed with high precision.

於本文揭示的導電性糊的較佳的一態樣中,所述導電性粉末為鎳、鉑、鈀、銀及銅中的至少一種。藉此,可較佳地實現電傳導性優異的導體膜。 In a preferred aspect of the conductive paste disclosed herein, the conductive powder is at least one of nickel, platinum, palladium, silver and copper. Thereby, a conductor film excellent in electrical conductivity can be preferably realized.

於本文揭示的導電性糊的較佳的一態樣中,所述介電質粉末為選自由鈦酸鋇、鈦酸鍶及鋯酸鈣所組成的群組中的至少一種。藉此,可較佳地實現與高介電常數的介電質層的接合性優異的導體膜。 In a preferred aspect of the conductive paste disclosed herein, the dielectric powder is at least one selected from the group consisting of barium titanate, strontium titanate and calcium zirconate. Thereby, a conductive film having excellent adhesion to a high-permittivity dielectric layer can be preferably realized.

於本文揭示的導電性糊的較佳的一態樣中,可用於形成積層陶瓷電子零件的內部電極層。例如關於晶片型MLCC,要求介電質層的進一步的薄層化與高積層化。所述薄(例如1μm以下)介電質層之間配置的內部電極層藉由使用本文揭示的導電性糊,可作為表面平坦性高、電連接且均質者而較佳地形成。結果,可較佳地實現介電質層的短路、裂紋等的發生得到抑制的、小型、大容量且高品質的MLCC。 In a preferred aspect of the conductive paste disclosed herein, it can be used to form an internal electrode layer of a laminated ceramic electronic component. For example, wafer-type MLCCs require further thinning and high-layering of the dielectric layer. The internal electrode layers disposed between the thin (for example, 1 μm or less) dielectric layers can be preferably formed with high surface flatness, electrical connection, and homogeneity by using the conductive paste disclosed herein. As a result, a compact, high-capacity, and high-quality MLCC in which short circuits, cracks, and the like in the dielectric layer are preferably suppressed can be realized.

1:積層陶瓷電容器(MLCC) 1: Multilayer ceramic capacitor (MLCC)

10:積層晶片 10:Laminated wafer

10':未鍛燒的積層體 10': unfired laminate

20:介電質層 20: Dielectric layer

20':陶瓷生片 20': ceramic green sheet

30:內部電極層 30: Internal electrode layer

30':導電性糊塗佈層 30': Conductive paste coating layer

40:外部電極 40: External electrode

t0、t1、t2:時間 t 0 , t 1 , t 2 : time

S0、S1、S2:積分透過率 S 0 , S 1 , S 2 : integral transmittance

圖1A為概略性地說明MLCC的構成的剖面示意圖。 FIG. 1A is a schematic cross-sectional view schematically illustrating the structure of an MLCC.

圖1B為概略性地說明未鍛燒的MLCC本體的構成的剖面示意圖。 FIG. 1B is a schematic cross-sectional view schematically illustrating the structure of an uncalcined MLCC body.

圖2的(a)~圖2的(c)是說明對導電性糊實施離心沈降 處理時的透過率分佈與其時間變化的情況的圖。 Fig. 2(a) to Fig. 2(c) illustrate the centrifugal sedimentation of the conductive paste A plot of the transmittance distribution during processing and how it changes over time.

圖3的(a)是說明導電性糊的透過率分佈的時間變化的圖,圖3的(b)是說明積分透過率的時間變化的圖,圖3的(c)是說明透過率變化速度的圖。 Fig. 3(a) is a diagram illustrating the temporal change of the transmittance distribution of the conductive paste, Fig. 3(b) is a diagram illustrating the temporal change of the integrated transmittance, and Fig. 3(c) is a diagram illustrating the transmittance change rate diagram.

圖4是於對各例的導電性糊進行鍛燒的導電膜中,基於掃描式電子顯微鏡(Scanning Electron Microscope,SEM)觀察而測量的(a)鎳粒子與(b)鈦酸鋇粒子的粒度分佈。 Fig. 4 is the particle size of (a) nickel particles and (b) barium titanate particles measured based on scanning electron microscope (Scanning Electron Microscope, SEM) observation in the conductive film fired from the conductive paste of each example distributed.

圖5A與圖5B分別是例1及例4的導電膜的表面的SEM觀察圖像。 5A and 5B are SEM observation images of the surfaces of the conductive films of Example 1 and Example 4, respectively.

圖6A與圖6B分別是說明例4的導電膜中鎳(Ni)粒子與鈦酸鋇(BT)粒子的粒徑測定的情況的圖。 6A and 6B are diagrams illustrating the measurement of the particle diameters of nickel (Ni) particles and barium titanate (BT) particles in the conductive film of Example 4, respectively.

以下,一面適宜參照圖式一面對本發明的較佳實施形態加以說明。再者,於本說明書中特別提及的事項(例如,導電性糊的構成或其性狀)以外的事情且為本發明的實施中所需的事情(例如,關於所述糊的原料的製備及對基材的應用的具體的方法、電子零件的構成等)可基於由本說明書所教示的技術內容及該領域中的從業人員的一般的技術常識來實施。再者,於本說明書中表示數值範圍的「A~B」這一表述是指A以上且B以下。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings as appropriate. Furthermore, matters other than those specifically mentioned in this specification (for example, the composition of the conductive paste or its properties) are matters required for the implementation of the present invention (for example, about the preparation of the raw materials of the paste and Specific methods of application to substrates, configurations of electronic components, etc.) can be implemented based on the technical content taught in this specification and the general technical knowledge of practitioners in this field. In addition, the expression "A~B" which shows a numerical range in this specification means A or more and B or less.

[導電性糊] [conductive paste]

本文揭示的導電性糊包含(A)導電性粉末、(B)介電質粉末及有機成分作為主要的構成成分。所謂有機成分,典型而言是 被稱為包含(C)黏合劑及(D)分散介質的媒液(vehicle)的介質。而且,所述導電性糊藉由進行鍛燒,有機成分會消失,(A)導電性粉末及(B)介電質粉末經燒結而形成導電性的燒結體(典型而言為導體膜)。作為構成導體膜的主體的(A)導電性粉末與(B)介電質粉末通常藉由分散於作為有機成分的媒液中而形成糊,被賦予適度的黏性與流動性。 The conductive paste disclosed herein contains (A) conductive powder, (B) dielectric powder, and an organic component as main components. The so-called organic ingredients are typically A medium called a vehicle (vehicle) containing (C) a binder and (D) a dispersion medium. In addition, when the conductive paste is calcined, the organic components disappear, and the (A) conductive powder and (B) dielectric powder are sintered to form a conductive sintered body (typically, a conductive film). The (A) conductive powder and (B) dielectric powder which are the main components of the conductor film are usually dispersed in a vehicle as an organic component to form a paste, and are given appropriate viscosity and fluidity.

進而,本文揭示的導電性糊以透過率變化速度成為0.003以下的方式製備。藉此,於媒液中(A)導電性粉末與(B)介電質粉末高度地分散,可長期維持高分散性。例如,即便於後述的4000rpm的離心沈降處理被施加100分鐘的情況下,(A)導電性粉末與(B)介電質粉末的沈降得到抑制,不會引起(A)導電性粉末及(B)介電質粉末、與有機成分的完全分離。認為所述前所未有的高分散穩定性與其說是導電性糊的構成材料的單獨的性狀,倒不如說是藉由導電性糊中的各構成材料的存在狀態而實現。以下,按照各要素對本文揭示的導電性糊進行說明。 Furthermore, the conductive paste disclosed herein is prepared so that the rate of change in transmittance becomes 0.003 or less. Thereby, the (A) conductive powder and (B) dielectric powder are highly dispersed in the medium, and high dispersibility can be maintained for a long period of time. For example, even if the centrifugal sedimentation treatment at 4000rpm described later is applied for 100 minutes, the sedimentation of (A) conductive powder and (B) dielectric powder is suppressed, and the (A) conductive powder and (B) ) Complete separation of dielectric powder and organic components. It is considered that the unprecedentedly high dispersion stability is achieved not so much by the individual properties of the constituent materials of the conductive paste, but by the state of existence of each constituent material in the conductive paste. Hereinafter, the conductive paste disclosed herein will be described for each element.

(A)導電性粉末 (A) Conductive powder

導電性粉末是用以主要形成電子元件等中的電極、導線或導電膜等電傳導性(以下,簡稱為「導電性」)高的導體物(可為導體膜)的材料。因此,導電性粉末可無特別限制地使用具備所需的導電性的各種材料的粉末。作為所述導電性材料,例如具體而言例示了鎳(Ni)、鈀(Pd)、鉑(Pt)、金(Au)、銀(Ag)、銅(Cu)、釕(Ru)、銠(Rh)、鋨(Os)、銥(Ir)、鋁(Al)、鎢(W)等金 屬的單體、以及含有該些金屬的合金等。導電性粉末可單獨使用任一種,亦可組合使用兩種以上。 Conductive powder is a material used to mainly form conductors (conductor films) with high electrical conductivity (hereinafter, simply referred to as "conductivity") such as electrodes, wires, or conductive films in electronic components and the like. Therefore, as the conductive powder, powders of various materials having desired conductivity can be used without particular limitation. As the conductive material, for example, nickel (Ni), palladium (Pd), platinum (Pt), gold (Au), silver (Ag), copper (Cu), ruthenium (Ru), rhodium ( Rh), osmium (Os), iridium (Ir), aluminum (Al), tungsten (W) and other gold Metallic monomers, alloys containing these metals, etc. Any one type of conductive powder may be used alone, or two or more types may be used in combination.

再者,雖無特別限定,但例如關於在形成MLCC內部電極層的用途中使用的導電性糊,較佳為導電性粉末的熔點低於介電質層的燒結溫度(例如約1300℃)的金屬種的使用。作為所述金屬種的一例,可列舉銠、鉑、鈀、銅、金等貴金屬以及鎳等卑金屬。其中,就熔點及導電性的觀點而言,較佳為鉑、鈀等貴金屬的使用,但若進一步考慮到穩定且價格低的方面,則較佳為使用鎳。 Furthermore, although it is not particularly limited, for example, regarding the conductive paste used for forming the MLCC internal electrode layer, it is preferable that the melting point of the conductive powder is lower than the sintering temperature of the dielectric layer (for example, about 1300°C). The use of metal species. Examples of the metal species include noble metals such as rhodium, platinum, palladium, copper, and gold, and base metals such as nickel. Among them, the use of noble metals such as platinum and palladium is preferable from the viewpoint of melting point and conductivity, but in consideration of stability and low price, it is more preferable to use nickel.

導電性粉末的製法、構成導電性粉末的粒子的尺寸或形狀等性狀並無特別限制。例如,考慮到鍛燒收縮率,可為包括於作為目標的電極的最小尺寸(典型而言電極層的厚度及/或寬度)的範圍內。例如,導電性粉末的平均粒徑可為數nm~數十μm左右、例如10nm~10μm左右。 The method for producing the conductive powder, and properties such as the size and shape of the particles constituting the conductive powder are not particularly limited. For example, it may be included in the minimum dimension (typically, the thickness and/or width of the electrode layer) of the target electrode in consideration of the firing shrinkage. For example, the average particle diameter of the conductive powder may be about several nm to several tens of μm, for example, about 10 nm to 10 μm.

再者,本說明書中,所謂關於導電性粉末及介電質粉末的「平均粒徑(DB)」,只要無特別說明,則是指根據基於BET法所測定的比表面積S與所述粉末的比重ρ並藉由以下式:DB=6/(S×ρ)計算出的值。關於比表面積將後述。 In addition, in this specification, the "average particle diameter ( DB )" of the conductive powder and the dielectric powder refers to the specific surface area S measured based on the BET method and the specific surface area S of the powder, unless otherwise specified. The specific gravity ρ and the value calculated by the following formula: D B =6/(S×ρ). The specific surface area will be described later.

另外,例如於形成小型、大容量MLCC的內部電極層的用途中,重要的是導電性粉末的平均粒徑小於內部電極層的厚度(積層方向的尺寸)。換言之,較佳為實際上不含有超過內部電極層的厚度的粗大粒子。就所述觀點而言,關於導電性粉末,作為 一例,較佳為累積90%粒徑(D90)不超過3μm,更佳為不超過1μm、例如較佳為不超過0.5μm。另外,關於平均粒徑(D50),可以大致1μm以下為標準,可為典型而言0.5μm以下、較佳為0.3μm以下、更佳為0.25μm以下、例如0.2μm以下。若平均粒徑為規定值以下,則可穩定地形成導體膜。另外,可較佳地抑制所形成的導體膜的表面粗糙度。例如,可將算數平均粗糙度Ra抑制為5nm以下的水準。 In addition, for example, in the application of forming the internal electrode layer of a small-sized, high-capacity MLCC, it is important that the average particle diameter of the conductive powder is smaller than the thickness of the internal electrode layer (dimension in the stacking direction). In other words, it is preferable that substantially no coarse particles exceeding the thickness of the internal electrode layer are included. From this point of view, as an example, the conductive powder preferably has a cumulative 90% particle size (D 90 ) of not more than 3 μm, more preferably not more than 1 μm, for example, preferably not more than 0.5 μm. In addition, the average particle diameter (D 50 ) may be approximately 1 μm or less, typically 0.5 μm or less, preferably 0.3 μm or less, more preferably 0.25 μm or less, for example 0.2 μm or less. When the average particle size is equal to or less than a predetermined value, a conductive film can be stably formed. In addition, the surface roughness of the formed conductor film can be preferably suppressed. For example, the arithmetic mean roughness Ra can be suppressed to a level of 5 nm or less.

導電性粉末的平均粒徑的下限亦無特別限制,例如可為0.005μm以上,可為大致0.01μm以上、典型而言為0.05μm以上、較佳為0.1μm以上、例如0.12μm以上。藉由平均粒徑不會過小,可抑制構成導電性粉末的粒子的表面能量(活性),可抑制導電性糊中的粒子的凝聚。另外,可提高糊塗佈層的密度,較佳地形成電傳導性、緻密性高的導體膜。 The lower limit of the average particle size of the conductive powder is also not particularly limited, for example, it may be 0.005 μm or more, approximately 0.01 μm or more, typically 0.05 μm or more, preferably 0.1 μm or more, for example 0.12 μm or more. Since the average particle diameter is not too small, the surface energy (activity) of the particles constituting the conductive powder can be suppressed, and the aggregation of the particles in the conductive paste can be suppressed. In addition, the density of the paste coating layer can be increased, and it is preferable to form a conductive film with high electrical conductivity and high density.

導電性粉末的比表面積並無特別限定,可為大致10m2/g以下、較佳為1m2/g~8m2/g、例如2m2/g~6m2/g。藉此,可較佳地抑制糊中的凝聚,可更良好地提高糊的均質性、分散性、保存穩定性。另外,可更穩定地實現電傳導性優異的導體膜。再者,比表面積是指基於藉由例如使用氮氣(N2)氣體作為吸附質的氣體吸附法(定容量吸附法)所測定的氣體吸附量,並藉由BET法(例如BET一點法)計算出的值。 The specific surface area of the conductive powder is not particularly limited, and may be approximately 10 m 2 /g or less, preferably 1 m 2 /g to 8 m 2 /g, for example, 2 m 2 /g to 6 m 2 /g. Thereby, aggregation in the paste can be preferably suppressed, and the homogeneity, dispersibility, and storage stability of the paste can be improved more favorably. In addition, a conductor film having excellent electrical conductivity can be realized more stably. Furthermore, the specific surface area refers to the gas adsorption amount measured by, for example, a gas adsorption method (constant volume adsorption method) using nitrogen (N 2 ) gas as an adsorbate, and is calculated by a BET method (such as a BET one-point method) out the value.

導電性粉末的形狀並無特別限定。例如MLCC內部電極等的一部分的電極形成用途的導電性糊中的導電性粉末的形狀可 為正球狀或大致球狀。導電性粉末的平均縱橫比可為典型而言1~2、較佳為1~1.5。藉此,可將糊的黏度維持地低,提高糊的操作性或用於導體膜形成的成膜時的作業性。另外,亦可提高糊的均質性。 The shape of the conductive powder is not particularly limited. For example, the shape of the conductive powder in the conductive paste for the formation of some electrodes such as MLCC internal electrodes can be changed. It is spherical or roughly spherical. The average aspect ratio of the conductive powder may be typically 1 to 2, preferably 1 to 1.5. Thereby, the viscosity of the paste can be kept low, and the handleability of the paste and the workability at the time of film formation for forming a conductor film can be improved. In addition, the homogeneity of the paste can also be improved.

再者,本說明書中的「縱橫比」基於電子顯微鏡觀察而計算出,是指於描繪與構成粉末的粒子外接的矩形時的長邊的長度(b)相對於短邊的長度(a)的比(b/a)。平均縱橫比是關於100個粒子而獲得的縱橫比的算數平均值。 The "aspect ratio" in this specification is calculated based on electron microscope observation, and refers to the length (b) of the long side to the length (a) of the short side when drawing a rectangle circumscribing the particles constituting the powder. Ratio (b/a). The average aspect ratio is an arithmetic average of aspect ratios obtained with respect to 100 particles.

導電性粉末的含有比例並無特別限定,於將導電性糊整體設為100質量%時,可為大致30質量%以上、典型而言為40質量%~95質量%、例如45質量%~60質量%。藉由滿足所述範圍,可較佳地實現電傳導性、緻密性高的導體層。另外,亦可提高糊的操作性、成膜時的作業性。 The content ratio of the conductive powder is not particularly limited, and when the entire conductive paste is 100% by mass, it may be approximately 30% by mass or more, typically 40% by mass to 95% by mass, for example, 45% by mass to 60% by mass. quality%. By satisfying the above-mentioned range, it is possible to preferably realize a conductive layer with high electrical conductivity and high density. In addition, the handleability of the paste and the workability at the time of film formation can also be improved.

(B)介電質粉末 (B) Dielectric powder

本文揭示的導電性糊除了所述(A)導電性粉末以外,可包含(B)介電質粉末作為主要構成鍛燒後的導體膜的成分。介電質粉末為如下成分:藉由配置於構成導電性粉末的粒子間,例如於導電性糊的鍛燒時抑制導電性粉末的來自低溫的燒結,或者可調整熱收縮率及鍛燒收縮歷程或鍛燒後的導電性膜的熱膨脹係數。介電質粉末的作用可為多種,特別是MLCC的內部電極層用的導電性糊中包含的介電質粉末為與介電質層共通或者類似的組成, 藉此作為提高介電質層與內部電極層的燒結接合性的共存材料而較佳地發揮功能,因此較佳。 The conductive paste disclosed herein may contain (B) dielectric powder as a component mainly constituting the conductive film after firing, in addition to the (A) conductive powder. The dielectric powder is a component that can suppress sintering of the conductive powder due to low temperature during firing of the conductive paste, or can adjust the thermal shrinkage rate and firing shrinkage history by being arranged between the particles constituting the conductive powder. Or the thermal expansion coefficient of the conductive film after firing. The role of the dielectric powder can be various. In particular, the dielectric powder contained in the conductive paste for the internal electrode layer of MLCC has the same or similar composition as the dielectric layer, This is preferable since it can function preferably as a coexistence material that improves the sintering bondability of the dielectric layer and the internal electrode layer.

關於介電質粉末的介電常數並無特別限制,可根據目標用途適宜選擇。作為一例,關於高介電常數系的MLCC的內部電極層形成用的導電性糊中使用的介電質粉末,相對介電常數典型而言為100以上,較佳為1000以上、例如1000~20000左右。關於所述介電質粉末的組成並無特別限定,可自各種無機材料中根據用途等適宜使用一種或兩種以上。作為介電質粉末,具體而言可列舉鈦酸鋇、鈦酸鍶、鈦酸鈣、鈦酸鎂、鈦酸鉍、鈦酸鋯、鈦酸鋅、鈮酸鎂酸鋇、鋯酸鈣等具有ABO3所表示的鈣鈦礦結構的金屬氧化物、二氧化鈦(金紅石)、五氧化鈦、氧化鉿、氧化鋯、氧化鋁、鎂橄欖石(forsterite)、氧化鈮、鈦酸釹酸鋇、稀土類元素氧化物等其他金屬氧化物作為典型例。於所述內部電極層用途的糊中,介電質粉末例如可由鈦酸鋇(BaTiO3)、鈦酸鍶及鋯酸鈣(CaZrO3)等較佳地構成。另一方面,當然亦可使用相對介電常數未滿100的介電質材料(進而絕緣性材料)。 The dielectric constant of the dielectric powder is not particularly limited, and can be appropriately selected according to the intended use. As an example, the relative dielectric constant of the dielectric powder used in the conductive paste for forming the internal electrode layer of the high dielectric constant MLCC is typically 100 or more, preferably 1000 or more, for example, 1000 to 20000 about. The composition of the dielectric powder is not particularly limited, and one kind or two or more kinds of various inorganic materials can be used as appropriate depending on the application or the like. Specific examples of the dielectric powder include barium titanate, strontium titanate, calcium titanate, magnesium titanate, bismuth titanate, zirconium titanate, zinc titanate, barium magnesium niobate, calcium zirconate, etc. Metal oxide of perovskite structure represented by ABO 3 , titanium dioxide (rutile), titanium pentoxide, hafnium oxide, zirconium oxide, aluminum oxide, forsterite, niobium oxide, barium neodymium titanate, rare earth Other metal oxides such as elemental oxides are typical examples. In the paste for the internal electrode layer, the dielectric powder can preferably be composed of, for example, barium titanate (BaTiO 3 ), strontium titanate, and calcium zirconate (CaZrO 3 ). On the other hand, of course, a dielectric material (further, an insulating material) having a relative permittivity of less than 100 can also be used.

構成介電質粉末的粒子的性狀、例如粒子的尺寸或形狀等只要包括於電極層的剖面中的最小尺寸(典型而言,電極層的厚度及/或寬度)內,則並無特別限定。介電質粉末的平均粒徑例如可根據糊的用途或電極層的尺寸(微細度)等適宜選擇。關於目標導電層,就容易確保規定的導電性的觀點而言,介電質粉末的平均粒徑較佳為小於所述導電性粉末的平均粒徑。於將介電質 粉末的平均粒徑設為D2、導電性粉末的平均粒徑設為D1時,D1及D2通常較佳為D1>D2,更佳為D2≦0.5×D1,進而佳為D2≦0.4×D1,例如亦可為D2≦0.3×D1。另外,若介電質粉末的平均粒徑D2過小,則亦容易產生介電質粉末的凝聚,因此欠佳。於所述方面上,作為大致的標準,較佳為0.03×D1≦D2,更佳為0.05×D1≦D2,例如亦可為0.1×D1≦D2。例如,具體而言介電質粉末的平均粒徑適當地為大致數nm以上,較佳為5nm以上,亦可為10nm以上。另外,介電質粉末的平均粒徑亦可為大致數μm以下左右、例如1μm以下、較佳為0.3μm以下。作為一例,於為了形成MLCC的內部電極層的導電性糊中,介電質粉末的平均粒徑亦可為大致數nm~數百nm左右、例如5nm~100nm。 The properties of the particles constituting the dielectric powder, such as the size and shape of the particles, are not particularly limited as long as they are included in the minimum dimension in the cross section of the electrode layer (typically, the thickness and/or width of the electrode layer). The average particle size of the dielectric powder can be appropriately selected according to the use of the paste, the size (fineness) of the electrode layer, and the like, for example. Regarding the target conductive layer, the average particle diameter of the dielectric powder is preferably smaller than the average particle diameter of the conductive powder from the viewpoint of easily ensuring predetermined conductivity. When D 2 is the average particle size of the dielectric powder and D 1 is the average particle size of the conductive powder, D 1 and D 2 are usually preferably D 1 >D 2 , more preferably D 2 ≦0.5 ×D 1 , more preferably D 2 ≦0.4×D 1 , for example, D 2 ≦0.3×D 1 . In addition, when the average particle diameter D 2 of the dielectric powder is too small, aggregation of the dielectric powder is likely to occur, which is not preferable. In this aspect, as a general standard, it is preferably 0.03×D 1 ≦D 2 , more preferably 0.05×D 1 ≦D 2 , for example, 0.1×D 1 ≦D 2 . For example, specifically, the average particle diameter of the dielectric powder is suitably not less than several nm, preferably not less than 5 nm, and may be not less than 10 nm. In addition, the average particle size of the dielectric powder may be approximately several μm or less, for example, 1 μm or less, preferably 0.3 μm or less. As an example, in the conductive paste for forming the internal electrode layer of MLCC, the average particle size of the dielectric powder may be approximately several nm to several hundreds of nm, for example, 5 nm to 100 nm.

介電質粉末的含有比例並無特別限定。例如於形成MLCC的內部電極層的用途等中,於將導電性糊整體設為100質量%時,可為大致1質量%~20質量%、例如3質量%~15質量%。另外,作為介電質粉末相對於導電性粉末100質量份的比例,例如可為大致3質量份~35質量份、較佳為5質量份~30質量份、例如10質量份~25質量份。藉此,可適當地抑制導電性粉末的來自低溫的鍛燒,且提高鍛燒後的導體膜的電傳導性、緻密性等。 The content ratio of the dielectric powder is not particularly limited. For example, in applications such as forming an internal electrode layer of MLCC, when the entire conductive paste is 100% by mass, it may be approximately 1% by mass to 20% by mass, for example, 3% by mass to 15% by mass. In addition, the ratio of the dielectric powder to 100 parts by mass of the conductive powder may be, for example, approximately 3 parts by mass to 35 parts by mass, preferably 5 parts by mass to 30 parts by mass, for example, 10 parts by mass to 25 parts by mass. Thereby, the firing of the conductive powder due to low temperature can be appropriately suppressed, and the electrical conductivity, denseness, and the like of the conductive film after firing can be improved.

(C)黏合劑 (C) Adhesive

黏合劑是於本文揭示的導電性糊中的有機成分中作為黏結劑發揮功能的材料。所述黏合劑典型而言有助於導電性糊中所含的粉末與基材的接合、以及構成所述粉末的粒子彼此的結合。另外, 黏合劑溶解於後述的分散介質中作為媒液(可為液相介質)發揮功能。藉此,提高導電性糊的黏性且使粉末成分均勻且穩定地懸浮於媒液中,對粉末賦予流動性,並且有助於操作性的提高。所述黏合劑是以藉由鍛燒而消失作為前提的成分。因此,黏合劑較佳為於導體膜的鍛燒時燃燒掉的化合物。典型而言,較佳為無論環境如何分解溫度為500℃以下。關於黏合劑的組成等,並無特別限定,可適宜使用此種用途中使用的公知的各種有機化合物。 The binder is a material that functions as a binder among the organic components in the conductive paste disclosed herein. The binder typically contributes to the bonding of the powder contained in the conductive paste to the substrate and the bonding of particles constituting the powder. in addition, The binder is dissolved in a dispersion medium described later and functions as a vehicle (may be a liquid medium). Thereby, the viscosity of the conductive paste is increased, the powder components are uniformly and stably suspended in the medium, fluidity is imparted to the powder, and it contributes to the improvement of workability. The binder is a component that presupposes disappearing by firing. Therefore, the binder is preferably a compound that burns out during firing of the conductor film. Typically, it is preferable that the decomposition temperature is 500° C. or lower regardless of the environment. The composition and the like of the adhesive are not particularly limited, and various known organic compounds used in such applications can be suitably used.

作為所述黏合劑,例如可列舉:松香系樹脂、纖維素系樹脂、聚乙烯醇系樹脂、聚乙烯縮醛系樹脂、丙烯酸系樹脂、胺基甲酸酯系樹脂、環氧系樹脂、酚系樹脂、聚酯系樹脂、乙烯系樹脂等有機高分子化合物。亦取決於與所使用的溶劑的組合,因此不能一概而論,例如作為包含無機氧化物粉末且鍛燒溫度為較高溫的導電性糊的黏合劑,較佳為纖維素系樹脂、聚乙烯醇系樹脂、聚乙烯縮醛系樹脂、丙烯酸系樹脂等。 Examples of the binder include rosin-based resins, cellulose-based resins, polyvinyl alcohol-based resins, polyvinyl acetal-based resins, acrylic resins, urethane-based resins, epoxy-based resins, phenolic resins, Organic polymer compounds such as resins, polyester resins, and vinyl resins. It also depends on the combination with the solvent used, so it cannot be generalized. For example, as a binder for a conductive paste containing inorganic oxide powder and the firing temperature is relatively high, cellulose-based resins and polyvinyl alcohol-based resins are preferable. , polyvinyl acetal resin, acrylic resin, etc.

纖維素系樹脂有助於無機氧化物粉末的分散性的提高,另外於將導電性糊供於印刷等的情況下,印刷體(配線膜)的形狀特性或對印刷作業的適應性優異等,因此較佳。纖維素系樹脂是指至少含有β-葡萄糖作為重覆單元的聚合物及其衍生物的全部。典型而言,可為將作為重覆單元的β-葡萄糖結構中的羥基的一部分或全部取代為烷氧基而得的化合物及其衍生物。烷氧基(RO-)中的烷基或芳基(R)的一部分或全部亦可被取代為羧基等酯基、硝基、鹵素、其他有機基。作為纖維素系樹脂,具體而 言例如可列舉:甲基纖維素、乙基纖維素、丙氧基纖維素、羥基甲基纖維素、羥基乙基纖維素、羥基丙基纖維素、羥基丙基甲基纖維素、羥基丙基乙基纖維素、羧基甲基纖維素、羧基乙基纖維素、羧基丙基纖維素、羧基乙基甲基纖維素、乙酸鄰苯二甲酸纖維素、硝基纖維素等。 The cellulose-based resin contributes to the improvement of the dispersibility of the inorganic oxide powder, and when the conductive paste is used for printing, etc., the shape characteristics of the printed body (wiring film) or the adaptability to the printing operation are excellent, etc., Therefore better. The cellulose-based resin refers to all polymers containing at least β-glucose as a repeating unit and derivatives thereof. Typically, it may be a compound obtained by substituting a part or all of the hydroxyl groups in the β-glucose structure as the repeating unit with alkoxy groups, and derivatives thereof. A part or all of the alkyl group or aryl group (R) in the alkoxy group (RO ) may be substituted with an ester group such as carboxyl group, nitro group, halogen, or other organic groups. Specific examples of cellulose-based resins include methyl cellulose, ethyl cellulose, propoxy cellulose, hydroxymethyl cellulose, hydroxyethyl cellulose, hydroxypropyl cellulose, hydroxypropyl cellulose, and hydroxypropyl cellulose. Methylcellulose, hydroxypropylethylcellulose, carboxymethylcellulose, carboxyethylcellulose, carboxypropylcellulose, carboxyethylmethylcellulose, cellulose acetate phthalate, nitrocellulose Su and so on.

聚乙烯醇系樹脂使無機氧化物粉末的分散性良好且柔軟,因此於將導電性糊供於印刷等的情況下,印刷體(配線膜)的密接性、印刷性等優異等,因此較佳。聚乙烯醇系樹脂是指至少含有乙烯醇結構作為重覆單元的聚合物及其衍生物的全部。典型而言,亦可為包含由乙烯醇聚合而成的結構的聚乙烯醇(polyvinylalcohol,PVA)或利用醇對所述PVA進行縮醛化而得的聚乙烯縮醛樹脂、以及該些的衍生物等。其中,具有利用丁醇對PVA進行縮醛化的結構的聚乙烯丁醛系樹脂(polyvinyl butyral,PVB)提高印刷體的形狀特性,因此更佳。另外,該些聚乙烯縮醛樹脂亦可為如下共聚物(包含接枝共聚物)等:以聚乙烯縮醛為主單體,含有與所述主單體具有共聚性的副單體。作為副單體,例如可列舉乙烯、酯、(甲基)丙烯酸酯、乙酸乙烯酯等。聚乙烯縮醛樹脂中的縮醛化的比例並無特別限制,例如較佳為50%以上。 The polyvinyl alcohol-based resin makes the dispersibility of the inorganic oxide powder good and soft, so when the conductive paste is used for printing, etc., it is excellent in the adhesiveness and printability of the printed body (wiring film), etc., so it is preferable. . The polyvinyl alcohol-based resin refers to all polymers and derivatives thereof containing at least a vinyl alcohol structure as a repeating unit. Typically, polyvinylalcohol (PVA) having a structure polymerized from vinyl alcohol, polyvinyl acetal resin obtained by acetalizing the PVA with alcohol, and derivatives thereof may also be used. things etc. Among them, polyvinyl butyral (PVB) having a structure in which PVA is acetalized with butanol is more preferable because it improves the shape characteristics of printed matter. In addition, these polyvinyl acetal resins may also be copolymers (including graft copolymers) that contain polyvinyl acetal as a main monomer and contain a sub-monomer that is copolymerizable with the main monomer. As a submonomer, ethylene, ester, (meth)acrylate, vinyl acetate etc. are mentioned, for example. The ratio of acetalization in the polyvinyl acetal resin is not particularly limited, but is preferably 50% or more, for example.

丙烯酸系樹脂於富有黏著性及柔軟性,不論鍛燒環境如何鍛燒殘渣更少的方面較佳。作為丙烯酸系樹脂,是指例如至少含有(甲基)丙烯酸烷基酯作為構成單體成分的聚合物及其衍生 物的全部。典型而言,亦可為包含100質量%(甲基)丙烯酸烷基酯作為構成單體成分的均聚物、或如下共聚物(包含接枝共聚物)等,所述共聚物(包含接枝共聚物)以(甲基)丙烯酸烷基酯為主單體,含有與所述主單體具有共聚性的副單體。作為副單體,可列舉(甲基)丙烯酸-2-羥基乙酯、(甲基)丙烯酸二甲基胺基乙酯、乙烯醇系單體、導入了二烷基胺基、羧基、烷氧基羰基等的共聚性單體。作為丙烯酸系樹脂,具體而言例如可列舉聚(甲基)丙烯酸、氯乙烯/丙烯酸接枝共聚樹脂、乙烯縮醛/丙烯酸接枝共聚樹脂等。再者,本說明書中,「(甲基)丙烯酸酯」等的表述作為表示包括丙烯酸酯及/或甲基丙烯酸酯的用語而使用。 The acrylic resin is preferable in that it is rich in adhesiveness and flexibility, and has less firing residue regardless of the firing environment. The acrylic resin refers to, for example, a polymer containing at least an alkyl (meth)acrylate as a monomer component and derivatives thereof. all things. Typically, it may be a homopolymer containing 100% by mass of alkyl (meth)acrylate as a constituent monomer component, or a copolymer (including graft copolymer), etc., which Copolymer) contains an alkyl (meth)acrylate as a main monomer and contains a sub-monomer that is copolymerizable with the main monomer. Examples of sub-monomers include 2-hydroxyethyl (meth)acrylate, dimethylaminoethyl (meth)acrylate, vinyl alcohol-based monomers, dialkylamine groups, carboxyl groups, alkoxy Copolymerizable monomers such as carbonyl groups. Specific examples of the acrylic resin include poly(meth)acrylic acid, vinyl chloride/acrylic acid graft copolymer resin, vinyl acetal/acrylic acid graft copolymer resin, and the like. In addition, in this specification, expressions, such as "(meth)acrylate", are used as terms showing that acrylate and/or methacrylate are included.

所述黏合劑可使用任一種,亦可組合使用兩種以上。另外雖未明確記載,但亦可使用將所述任意兩種以上的樹脂的單體成分共聚而成的共聚物、嵌段共聚物等。另外,黏合劑的含量並無特別限制。為了良好地調整導電性糊的性狀或糊印刷體(包括乾燥膜)的性狀,例如相對於導電性粉末100質量份,黏合劑的含量亦可為0.5質量份以上、較佳為1質量份以上、更佳為1.5質量份以上、例如2質量份以上的比例。另一方面,黏合劑樹脂有鍛燒殘渣增大的可能性,因此過剩的含有的情況欠佳。就所述觀點而言,相對於導電性粉末100質量份,黏合劑的含量可設為10質量份以下、較佳為7質量份以下、更佳為5質量份以下、例如4質量份以下。 Any one of these binders may be used, or two or more of them may be used in combination. In addition, although not specifically described, a copolymer, a block copolymer, or the like obtained by copolymerizing monomer components of any two or more resins described above can also be used. In addition, the content of the binder is not particularly limited. In order to finely adjust the properties of the conductive paste or the properties of the paste printed body (including the dry film), for example, the content of the binder may be 0.5 parts by mass or more, preferably 1 part by mass or more with respect to 100 parts by mass of the conductive powder. , more preferably at least 1.5 parts by mass, for example, at least 2 parts by mass. On the other hand, since the binder resin may increase the sintering residue, it is not preferable to contain it excessively. From this point of view, the content of the binder may be 10 parts by mass or less, preferably 7 parts by mass or less, more preferably 5 parts by mass or less, for example, 4 parts by mass or less, based on 100 parts by mass of the conductive powder.

(D)分散介質 (D) Dispersion medium

分散介質是在本文揭示的導電性糊中的有機成分中用於將粉末製成分散狀態的液狀介質,例如是用於在保持所述分散性的狀態下賦予優異的流動性的要素。另外,分散介質溶解所述黏合劑,作為媒液發揮功能。所述分散介質亦為以藉由乾燥、鍛燒而消失作為前提的成分。關於分散介質,並無特別限制,可適宜使用此種導電性糊中使用的有機溶劑。雖亦取決於例如與黏合劑的組合,但就成膜穩定性等觀點而言,可將沸點約180℃以上且300℃以下左右、例如200℃以上且250℃以下左右的高沸點有機溶劑作為主成分(佔50體積%以上的成分)。 The dispersion medium is a liquid medium for dispersing the powder among the organic components in the conductive paste disclosed herein, and is, for example, an element for imparting excellent fluidity while maintaining the dispersibility. In addition, the dispersion medium dissolves the binder and functions as a vehicle. The dispersion medium is also a component presupposed to disappear by drying and firing. There are no particular limitations on the dispersion medium, and organic solvents used in such conductive pastes can be suitably used. It also depends on, for example, the combination with a binder, but from the viewpoint of film formation stability, a high-boiling organic solvent with a boiling point of about 180°C to 300°C, for example, 200°C to 250°C can be used as Main components (components accounting for more than 50% by volume).

作為分散介質,例如具體而言可列舉:香紫蘇醇、香茅醇、植醇、香葉基芳樟醇、酯醇(texanol)、苄醇、苯氧基乙醇、1-苯氧基-2-丙醇、萜品醇、二氫萜品醇、異冰片、丁基卡必醇、二乙二醇等醇系溶劑;萜品醇乙酸酯、二氫萜品醇乙酸酯、異冰片乙酸酯、卡必醇乙酸酯、二乙二醇單丁醚乙酸酯等酯系溶劑;礦油精(mineral spirit)等。其中,可較佳地使用醇系溶劑或酯系溶劑。 Specific examples of the dispersion medium include: sclareol, citronellol, phytol, geranyllinalool, texanol, benzyl alcohol, phenoxyethanol, 1-phenoxy-2-propane Alcohol solvents such as alcohol, terpineol, dihydroterpineol, isoborneol, butyl carbitol, diethylene glycol; terpineol acetate, dihydroterpineol acetate, isoborneol acetate Esters, carbitol acetate, diethylene glycol monobutyl ether acetate and other ester solvents; mineral spirits, etc. Among them, alcohol-based solvents or ester-based solvents can be preferably used.

導電性糊中的(C)分散介質的比例並無特別限定,於將糊整體設為100質量%時,可為大致70質量%以下、典型而言5質量%~60質量%、例如30質量%~50質量%。藉由滿足所述範圍,可對糊賦予適度的流動性,可提高成膜時的作業性。另外,可提高糊的自調平性(self-levelling),實現更平滑的表面的導體膜。 The ratio of the (C) dispersion medium in the conductive paste is not particularly limited, and may be approximately 70% by mass or less, typically 5% by mass to 60% by mass, for example, 30% by mass when the entire paste is 100% by mass. %~50% by mass. By satisfying this range, moderate fluidity can be imparted to the paste, and workability at the time of film formation can be improved. In addition, self-levelling of the paste can be improved, and a conductor film with a smoother surface can be realized.

(E)其他添加劑 (E) Other additives

再者,本文揭示的導電性糊可於不顯著損及本文揭示的技術的效果的範圍內,包含已知一般的導電性糊中可使用的各種有機添加劑。所謂所述有機添加劑,例如為分散劑、增黏劑、塑化劑、pH調整劑、穩定劑、調平劑、消泡劑、抗氧化劑、防腐劑、著色劑(顏料、染料等)等。例如,於使用作為構成導體膜的主體的導電性粉末及介電質粉末等粉末的情況下,若平均粒徑未滿1μm左右,則所述粉末只要不實施特別的表面處理等,則有時於糊製備過程中及糊剛製備後會發生凝聚。關於所述傾向,於使用表面活性可顯著提高的超微粉或奈米粒子(例如,平均粒徑為0.5μm以下的粉末)作為導電性粉末等的情況下等變得更顯著。因此,本文揭示的導電性糊可較佳地包含分散劑作為其他添加劑。 Furthermore, the conductive paste disclosed herein may contain various organic additives known to be usable in general conductive pastes within a range that does not significantly impair the effects of the technology disclosed herein. The organic additives include, for example, dispersants, thickeners, plasticizers, pH adjusters, stabilizers, leveling agents, defoamers, antioxidants, preservatives, colorants (pigments, dyes, etc.) and the like. For example, in the case of using powders such as conductive powder and dielectric powder as the main body constituting the conductor film, if the average particle diameter is less than about 1 μm, the powder may be Agglomeration occurs during paste preparation and immediately after paste preparation. This tendency becomes more remarkable when using ultrafine powder or nanoparticle (for example, powder having an average particle diameter of 0.5 μm or less) that can significantly improve surface activity as the conductive powder. Therefore, the conductive paste disclosed herein may preferably contain a dispersant as other additives.

分散劑為如下成分:於使粉末分散於分散介質中時抑制構成粉末的粒子彼此的凝聚,使粒子均勻地分散於分散介質中。分散劑具備直接吸附於粒子的固體表面而使粒子與分散介質之間的固液界面穩定化的功能。分散劑較佳為於導電性糊的鍛燒時燃燒掉。換言之,分散劑較佳為分解溫度相較於導電性糊的鍛燒溫度而言充分低(典型而言為600℃以下)。 The dispersant is a component that suppresses aggregation of particles constituting the powder when the powder is dispersed in the dispersion medium, and disperses the particles uniformly in the dispersion medium. The dispersant has the function of directly adsorbing on the solid surface of the particles to stabilize the solid-liquid interface between the particles and the dispersion medium. The dispersant is preferably burned during firing of the conductive paste. In other words, the dispersant preferably has a decomposition temperature sufficiently lower than the firing temperature of the conductive paste (typically, 600° C. or lower).

關於分散劑的種類等,並無特別限定,可自公知的各種分散劑中視需要使用一種或兩種以上。典型而言,可適宜選擇使用對後述的媒液(黏合劑及分散介質的混合物)具有充分的相容性者。分散劑的分類的方法可為多種,作為分散劑,亦可為所謂 的界面活性劑型分散劑(亦稱為低分子型分散劑)、高分子型分散劑、無機型分散劑等中的任一種。另外,該些分散劑可為陰離子性、陽離子性、兩性或非離子性中的任一種。換言之,分散劑是於分子結構中具有陰離子性基、陽離子性基、兩性基及非離子性基中的至少一種官能基的化合物,典型而言可為所述官能基可直接吸附於粒子的固體表面的化合物。再者,所謂界面活性劑,是指如下兩親媒性物質:於分子結構內具備親水性部位與親油性部位,具有該些以共價鍵鍵結而成的化學結構。 There are no particular limitations on the type and the like of the dispersant, and one or two or more of various known dispersants can be used as necessary. Typically, those having sufficient compatibility with the vehicle (a mixture of a binder and a dispersion medium) described later can be appropriately selected and used. There are many ways to classify dispersants. As dispersants, they can also be so-called Any of the surfactant-type dispersants (also known as low-molecular-weight dispersants), polymer-type dispersants, inorganic-type dispersants, etc. In addition, these dispersants may be any of anionic, cationic, amphoteric or nonionic. In other words, the dispersant is a compound having at least one functional group among anionic groups, cationic groups, amphoteric groups, and nonionic groups in the molecular structure, and typically can be a solid that can directly adsorb the functional groups to particles. surface compound. Furthermore, the so-called surfactant refers to the following amphiphilic substance: it has a hydrophilic part and an lipophilic part in its molecular structure, and has a chemical structure formed by these covalent bonds.

關於分散劑,作為界面活性劑型分散劑,例如具體而言可列舉:以烷基磺酸鹽為主體的分散劑、以四級銨鹽為主體的分散劑、以高級醇的環氧烷化合物為主體的分散劑、以多元醇酯化合物為主體的分散劑、以烷基多胺系化合物為主體的分散劑等。作為高分子型分散劑,例如可列舉:以羧酸或聚羧酸等脂肪酸鹽為主體的分散劑、以及以其一部分的羧酸基中的氫原子經烷基取代而成的聚羧酸部分烷基酯化合物為主體的分散劑、以聚羧酸烷基胺鹽為主體的分散劑、以聚羧酸的一部分具有烷基酯鍵的聚羧酸部分烷基酯化合物為主體的分散劑、以聚苯乙烯磺酸鹽、聚異戊二烯磺酸鹽、聚亞烷基多胺化合物為主體的分散劑、以萘磺酸鹽、萘磺酸福馬林縮合物鹽等磺酸系化合物為主體的分散劑、以聚乙二醇等親水性聚合物為主體的分散劑、以聚醚化合物為主體的分散劑、以聚(甲基)丙烯酸鹽、聚(甲基)丙烯醯胺等聚(甲基)丙烯酸系化合物為主體的分散劑等。作為無機型分散劑,例 如可列舉以正磷酸鹽、偏磷酸鹽、聚磷酸鹽、焦磷酸鹽、三聚磷酸鹽、六偏磷酸鹽及有機磷酸鹽等磷酸鹽、硫酸鐵、硫酸亞鐵、氯化鐵及氯化亞鐵等鐵鹽、硫酸鋁、聚氯化鋁及鋁酸鈉等鋁鹽、硫酸鈣、氫氧化鈣及磷酸氫鈣等鈣鹽為主體的分散劑。 Regarding the dispersant, as a surfactant type dispersant, for example, specifically, a dispersant mainly composed of an alkyl sulfonate, a dispersant mainly composed of a quaternary ammonium salt, a dispersant mainly composed of a higher alcohol alkylene oxide compound, etc. Mainly dispersant, polyol ester compound-based dispersant, alkylpolyamine compound-based dispersant, etc. Examples of polymeric dispersants include: dispersants based on fatty acid salts such as carboxylic acid or polycarboxylic acid, and polycarboxylic acid moieties in which hydrogen atoms in a part of the carboxylic acid groups are substituted with alkyl groups. Dispersants based on alkyl ester compounds, dispersants based on polycarboxylate alkylamine salts, dispersants based on polycarboxylic acid partial alkyl ester compounds having a part of polycarboxylic acid having an alkyl ester bond, Dispersants based on polystyrene sulfonate, polyisoprene sulfonate, polyalkylene polyamine compounds, sulfonic acid compounds such as naphthalene sulfonate, naphthalene sulfonate formalin condensate salt Dispersants based on hydrophilic polymers such as polyethylene glycol, dispersants based on polyether compounds, poly(meth)acrylates, poly(meth)acrylamides, etc. A (meth)acrylic compound-based dispersant and the like. As an inorganic dispersant, for example For example, phosphates such as orthophosphate, metaphosphate, polyphosphate, pyrophosphate, tripolyphosphate, hexametaphosphate and organic phosphate, ferric sulfate, ferrous sulfate, ferric chloride and chlorinated Dispersants based on iron salts such as ferrous iron, aluminum salts such as aluminum sulfate, polyaluminum chloride, and sodium aluminate, and calcium salts such as calcium sulfate, calcium hydroxide, and calcium hydrogen phosphate.

再者,所述分散劑可單獨包含任一種,亦可組合包含兩種以上。另外,分散劑的種類並無特別限定,就以少量的分散劑的添加而使更微細的導電性粉末及介電質粉末長期有效地分散的目的而言,若使用可顯現出立體阻礙所引起的排斥效果的高分子型分散劑,則較佳。該情況下的分散劑的重量平均分子量並無特別限制,作為較佳的一例,較佳為設為300~50000左右、例如500~20000。 In addition, the said dispersing agent may contain any one type individually, and may contain 2 or more types together. In addition, the type of dispersant is not particularly limited. For the purpose of effectively dispersing finer conductive powder and dielectric powder for a long period of time with the addition of a small amount of dispersant, if it is used, it may appear caused by steric hindrance. A high-molecular dispersant with good repelling effect is better. The weight-average molecular weight of the dispersant in this case is not particularly limited, but as a preferred example, it is preferably about 300 to 50,000, for example, 500 to 20,000.

再者,所述有機添加劑可單獨包含任一種,亦可組合包含兩種以上。另外,所述有機添加劑的含量可於不顯著阻礙本文揭示的導電性糊的性狀的範圍內適宜調整。例如,可根據所述有機添加劑的性狀及其目的以適當的比例含有。大致而言,例如分散劑通常以相對於粉末成分的總質量而言約5質量%以下、例如3質量%以下、典型而言1質量%以下且約0.01質量%以上的比例含有。再者,含有阻礙導電性粉末或無機粉末的燒結性等的成分、或阻礙該些的量的添加劑欠佳。就所述觀點而言,於包含有機添加劑的情況下,該些成分的總含量較佳為導電性糊整體的約10質量%以下,更佳為5質量%以下,尤佳為3質量%以下。 In addition, the said organic additive may contain any one type individually, and may contain 2 or more types together. In addition, the content of the organic additive can be appropriately adjusted within the range that does not significantly hinder the properties of the conductive paste disclosed herein. For example, it can be contained in an appropriate ratio according to the properties and purpose of the organic additive. Generally speaking, for example, the dispersant is usually contained in a ratio of about 5 mass % or less, for example, 3 mass % or less, typically 1 mass % or less and about 0.01 mass % or more, based on the total mass of the powder component. Furthermore, it is not preferable to contain a component that inhibits the sinterability of the conductive powder or the inorganic powder, or an additive that inhibits them. From this point of view, when organic additives are included, the total content of these components is preferably about 10% by mass or less of the entire conductive paste, more preferably 5% by mass or less, and most preferably 3% by mass or less .

導電性糊通常可藉由如下方式製備:於將作為有機成分 的(C)黏合劑與(D)分散介質預先混合而製備媒液後,於所述媒液中將(A)導電性粉末與(B)介電質粉末混合並揉混。於本文揭示的導電性糊中,為了將透過率變化速度抑制為0.003以下且實現糊中的(A)導電性粉末及(B)介電質粉末的高分散穩定性,最重要的是摻合所述構成材料。所述導電性糊的製備方法於可實現所述透過率變化速度的範圍內並無特別限制。作為導電性糊的製備方法的一例,於後述的實施例中進行詳細說明,可將(A)導電性粉末與(B)介電質粉末預先分散於不同的(D)分散介質中並製備成漿料狀,其後以漿料的形態混合導電性粉末與介電質粉末,藉此可分散性良好地將兩者摻合。 Conductive paste can usually be prepared in the following way: in the organic component (C) binder and (D) dispersion medium are mixed in advance to prepare a vehicle, and (A) conductive powder and (B) dielectric powder are mixed and kneaded in the vehicle. In the conductive paste disclosed herein, it is most important to blend The constituent materials. The preparation method of the conductive paste is not particularly limited as long as the change speed of the transmittance can be realized. As an example of the preparation method of the conductive paste, which will be described in detail in the examples described later, (A) conductive powder and (B) dielectric powder can be pre-dispersed in different (D) dispersion media and prepared as In the form of a slurry, the conductive powder and the dielectric powder are then mixed in the form of a slurry, whereby the two can be blended with good dispersibility.

再者,有機成分中的(C)黏合劑若最初添加於包含(A)導電性粉末的漿料(以下,稱為導電性粉末漿料)或包含(B)介電質粉末的漿料(以下,稱為介電質粉末漿料)中,則妨礙使該些粉末高分散。因此,關於(C)黏合劑,較佳為藉由與(D)分散介質的一部分混合而預先製備媒液,對於導電性粉末漿料與介電質粉末漿料的混合漿料以媒液的狀態混合。以所述方式製備的導電性糊的透過率變化速度較佳為未滿0.003,更佳為0.0025以下,尤佳為0.002以下。所述導電性糊(混合漿料)可長期強烈地維持其高分散狀態,因此較佳。 Furthermore, if the (C) binder in the organic component is initially added to the slurry containing (A) conductive powder (hereinafter referred to as conductive powder slurry) or the slurry containing (B) dielectric powder ( Hereinafter, it is referred to as a dielectric powder slurry), which prevents these powders from being highly dispersed. Therefore, with regard to (C) binder, it is preferable to prepare a vehicle liquid in advance by mixing with a part of (D) dispersion medium, and to use the vehicle liquid for the mixed slurry of conductive powder slurry and dielectric powder slurry The state is mixed. The rate of change in transmittance of the conductive paste prepared in this manner is preferably less than 0.003, more preferably less than 0.0025, and most preferably less than 0.002. The above-mentioned conductive paste (mixed slurry) is preferable because it can strongly maintain its highly dispersed state for a long period of time.

此處,預先製備的導電性粉末漿料與介電質粉末漿料較佳為於各自的漿料中以前所未有的較佳的狀態使導電性粉末或介電質粉末預先高度地分散。所謂所述分散條件亦取決於作為對象 的導電性粉末及介電質粉末的材質(組成等)或平均粒徑、糊濃度、所使用的攪拌裝置或分散裝置等的構成,因此不能一概而論。例如,作為一例,若將先前進行的擴散處理中的擴散強度設為1,則本文揭示的技術中製備導電性粉末漿料及介電質粉末漿料時的攪拌強度例如可設為0.1(倍)以上,亦可為0.5以上,例如較佳為1以上,更佳為1.5以上,進而佳為1.8以上,尤佳為2以上。攪拌強度的上限可設為裝置構成的上限,例如若將先前進行的擴散處理中的擴散強度設為1,則可以5左右作為標準。而且,於透過率變化速度的調整時,可例如預先製作所需的調配的導電性糊並確認透過率變化速度,以所述透過率變化速度成為0.003以下的方式一點一點地調整所述導電性糊的攪拌條件。更具體而言,例如於利用現有方法將攪拌強度設定為30m/s左右而製備糊的情況下,例示了於30m/s~60m/s左右的範圍、例如45m/s~60m/s左右的範圍內提高攪拌強度。另外,另一方面,於利用現有方法將攪拌強度設定為7m/s左右而製備糊的情況下,例示了於7m/s~20m/s左右的範圍、例如10m/s~20m/s左右的範圍內提高攪拌強度。 Here, the pre-prepared conductive powder slurry and dielectric powder slurry are preferably highly dispersed conductive powder or dielectric powder in the respective slurries in an unprecedentedly preferable state. The so-called dispersion condition also depends on the object The material (composition, etc.) of the conductive powder and dielectric powder, the average particle size, the paste concentration, the structure of the stirring device or dispersing device used, etc., cannot be generalized. For example, as an example, if the diffusion intensity in the previous diffusion treatment is set to 1, the stirring intensity when preparing the conductive powder slurry and the dielectric powder slurry in the technology disclosed herein can be set to 0.1 (times. ) or more, may also be 0.5 or more, for example, preferably 1 or more, more preferably 1.5 or more, further preferably 1.8 or more, especially preferably 2 or more. The upper limit of the stirring intensity can be set as the upper limit of the apparatus configuration. For example, if the diffusion intensity in the previous diffusion treatment is set to 1, about 5 can be used as a standard. Moreover, when adjusting the rate of change in transmittance, for example, a desired prepared conductive paste may be prepared in advance and the rate of change in transmittance may be confirmed, and the rate of change in transmittance may be adjusted little by little so that the rate of change in transmittance becomes 0.003 or less. Stirring conditions of the conductive paste. More specifically, for example, in the case of preparing a paste by setting the stirring intensity at about 30 m/s by a conventional method, the range of about 30 m/s to 60 m/s, for example, about 45 m/s to 60 m/s is exemplified. Increase the stirring intensity within the range. In addition, on the other hand, in the case of preparing the paste by setting the stirring intensity at about 7 m/s by the conventional method, the range of about 7 m/s to 20 m/s, for example, about 10 m/s to 20 m/s is exemplified. Increase the stirring intensity within the range.

另外,此時可使用無介質的攪拌裝置或分散裝置對至少導電性粉末漿料進行攪拌、分散處理。再者,所謂無介質的攪拌裝置或分散裝置是指如下攪拌或分散裝置:不具備用以對作為攪拌或分散對象的流體帶來衝擊等攪拌、分散作用的硬質介質(例如亦稱為粉碎構件、可動構件、介質(media)等)。所述無介質 的攪拌或分散裝置的驅動力例如為壓縮空氣、蒸汽、加熱氣流等高速流體、超音波、氣穴泡沫(Cavitation bubble)等,藉由利用所述驅動力的衝擊或撞擊、粒子的相互碰撞、相互摩擦等可顯現出攪拌或分散作用。例如,例示了氣流粉碎式磨機、噴射磨機、超音波噴射磨機、十字噴射磨機(Cross Jet Mill)等。若利用所述無介質的攪拌、分散裝置,則硬質介質與作為攪拌、分散對象的流體中所含的固體一次粒子直接接觸等並發生作用,不會導致一次粒子的變形、例如箔化等。 In addition, at this time, at least the conductive powder slurry can be stirred and dispersed using a non-medium stirring device or a dispersing device. Furthermore, the so-called mediumless stirring device or dispersing device refers to the following stirring or dispersing device: it does not have a hard medium (for example, also called a crushing member) for stirring and dispersing such as impact on the fluid as the stirring or dispersing object. , movable member, medium (media), etc.). The media-free The driving force of the stirring or dispersing device is, for example, high-speed fluid such as compressed air, steam, heated air, ultrasonic waves, cavitation bubbles, etc., by utilizing the impact or collision of the driving force, the collision of particles, Mutual friction, etc. may show stirring or dispersing effect. For example, jet mill, jet mill, ultrasonic jet mill, cross jet mill (Cross Jet Mill) etc. are illustrated. If the above medium-less stirring and dispersing device is used, the hard medium directly contacts and acts on the solid primary particles contained in the fluid to be stirred and dispersed, and does not cause deformation, such as foiling, of the primary particles.

關於另一者的介電質漿料,對於攪拌裝置或分散裝置無任何限制。例如,可使用所述無介質的攪拌裝置或分散裝置,亦可使用介質式的攪拌裝置或分散裝置。無需再次例示,作為介質式的攪拌、分散裝置,例如可列舉:球磨機、珠磨機、膠體磨機、錘磨機、研缽、圓盤粉碎機、輥磨機等。 Regarding the other dielectric slurry, there is no limitation on the stirring device or the dispersing device. For example, the aforementioned non-medium stirring device or dispersing device may be used, or a media type stirring device or dispersing device may be used. Without further illustration, examples of media-type stirring and dispersing devices include ball mills, bead mills, colloid mills, hammer mills, mortars, disk mills, and roll mills.

以所述方式預先將導電性粉末與介電質粉末分開而製備高分散的漿料,藉此可於將兩者混合時較佳地抑制任一種粒子的凝聚,可實現高分散狀態。結果,即便於例如對導電性糊實施離心沈降處理並加速地促進沈降的情況下,關於本文揭示的導電性糊,亦可高度地抑制導電性粉末及介電質粉末的沈降。再者,於包含分散劑的態樣中,關於導電性粉末漿料、介電質粉末漿料及導電性糊的任一者,可包含分散劑,亦可不含。關於包含分散劑的漿料,可於同一時機或不同時機將粉體材料與分散劑於分散介質中進行攪拌、分散。 By separating the conductive powder and the dielectric powder in advance to prepare a highly dispersed slurry in the above manner, the agglomeration of either particle can be preferably suppressed when the two are mixed, and a highly dispersed state can be achieved. As a result, even when, for example, centrifugal sedimentation treatment is performed on the conductive paste to accelerate the sedimentation, the conductive paste disclosed herein can highly suppress the sedimentation of the conductive powder and the dielectric powder. In addition, in the form containing a dispersant, a dispersant may or may not be contained regarding any one of the conductive powder slurry, the dielectric powder slurry, and the conductive paste. Regarding the slurry containing the dispersant, the powder material and the dispersant may be stirred and dispersed in the dispersion medium at the same timing or at different timings.

關於本文揭示的導電性糊,如上所述導電性粉末及介電質粉末的分散穩定性極高。因此,導電性糊向基材的供給可無特別限制地採用公知的各種供給方法。作為所述供給方法,例如可列舉:網版印刷、凹版印刷、平板印刷及噴墨印刷等印刷法、噴塗法、浸漬塗佈法等。特別是於形成MLCC的內部電極層的情況下,可較佳地採用可高速印刷的凹版印刷法、網版印刷法等。 Regarding the conductive paste disclosed herein, the dispersion stability of the conductive powder and the dielectric powder is extremely high as described above. Therefore, various well-known supply methods can be employ|adopted for supplying an electroconductive paste to a base material in particular, without limitation. As said supply method, printing methods, such as screen printing, gravure printing, offset printing, and inkjet printing, a spraying method, a dip coating method, etc. are mentioned, for example. Especially when forming the internal electrode layer of MLCC, the gravure printing method which can print at high speed, the screen printing method, etc. can be suitably used.

[用途] [use]

本文揭示的導電性糊如上所述即便於例如連續施加100分鐘的4000rpm下的離心沈降處理的情況下,導電性糊中所含的粒子亦不會完全沈降而與分散介質分離,其沈降得到抑制。所述離心沈降處理的條件是相當於例如藉由靜置導電性糊而進行的沈降處理製程的數月~數年左右的加速試驗。因此,所述導電性糊於糊製備後的長期保管性優異,例如亦可於量產步驟中一次性地製備大量的糊並長時間使用(供於印刷)。所述特徵亦使得使用所述導電性糊而形成的印刷塗膜的印刷性穩定,例如亦有助於印刷塗膜的厚度、密度等的均質性的提高。另外,於印刷塗膜中亦可維持導電性粉末與介電質粉末高度地分散的狀態。結果即便對所述印刷塗膜進行鍛燒,亦可較佳地抑制導電性粒子的燒結及異常晶粒成長。於所述方面,所述導電性糊亦可於特別要求鍛燒後的導體膜的均質性或表面平滑性等的用途中較佳地使用。作為代表性的用途,可列舉積層陶瓷電子零件中的電極層的形成。本文揭示的導電性糊例如可較佳地用於各邊為5mm以下、例如1mm以下的 小型的MLCC的內部電極層的形成。尤其,可較佳地用於介電質層的厚度為1μm以下水準的小型、大容量型的MLCC的內部電極的製作。 In the conductive paste disclosed herein, even when the centrifugal sedimentation treatment at 4000 rpm is continuously applied for 100 minutes, for example, the particles contained in the conductive paste are not completely settled and separated from the dispersion medium, and the sedimentation is suppressed. . The conditions of the centrifugal sedimentation treatment are, for example, an accelerated test of several months to several years equivalent to the sedimentation treatment process performed by standing the conductive paste. Therefore, the conductive paste has excellent long-term storage properties after paste preparation, and for example, a large amount of paste can be prepared at once in a mass production process and used for a long time (for printing). These features also stabilize the printability of a printed coating film formed using the conductive paste, and contribute to, for example, improvement of the uniformity of the printed coating film in thickness, density, and the like. In addition, the highly dispersed state of the conductive powder and the dielectric powder can also be maintained in the printed coating film. As a result, even if the said printed coating film is calcined, the sintering of electroconductive particle and abnormal crystal grain growth can be preferably suppressed. In this aspect, the conductive paste can be preferably used also in applications where the homogeneity, surface smoothness, and the like of the conductive film after firing are particularly required. Typical applications include formation of electrode layers in laminated ceramic electronic components. The conductive paste disclosed herein, for example, can be preferably used for those whose sides are less than 5 mm, such as less than 1 mm. Formation of internal electrode layers of small MLCCs. In particular, it can be suitably used for production of internal electrodes of small-sized and large-capacity MLCCs in which the thickness of the dielectric layer is on the order of 1 μm or less.

再者,本說明書中,所謂「陶瓷電子零件」是表示具有結晶的陶瓷基材或非晶的陶瓷(玻璃陶瓷)基材的電子零件常見的用語。例如,包含陶瓷製的基材的晶片電感器、高頻濾波器、陶瓷電容器、高溫鍛燒積層陶瓷(High Temperature Co-fired Ceramics,HTCC)基材、低溫鍛燒積層陶瓷(Low Temperature Co-fired Ceramics,LTCC)基材等是此處所述的「陶瓷電子零件」中包含的典型例。 In addition, in this specification, a "ceramic electronic component" is a common term which means the electronic component which has a crystalline ceramic base material or an amorphous ceramic (glass-ceramic) base material. For example, chip inductors, high-frequency filters, ceramic capacitors, high-temperature fired laminated ceramics (High Temperature Co-fired Ceramics, HTCC) substrates, low-temperature fired laminated ceramics (Low Temperature Co-fired Ceramics, LTCC) substrates, etc. are typical examples included in the "ceramic electronic parts" described here.

作為構成陶瓷基材的陶瓷材料,例如可列舉:鈦酸鋇(BaTiO3)、氧化鋯(ZrO2)、氧化鎂(MgO)、氧化鋁(Al2O3)、二氧化矽(SiO2)、氧化鋅(ZnO)、氧化鈦(TiO2)、氧化鈰(CeO2)、氧化釔(Y2O3)等氧化物系材料;堇青石(2MgO.2Al2O3.5SiO2)、莫來石(3Al2O3.2SiO2)、鎂橄欖石(2MgO.SiO2)、塊滑石(MgO.SiO2)、賽隆(Si3N4-AlN-Al2O3)、鋯石(ZrO2.SiO2)、鐵氧體(M2O.Fe2O3)等複合氧化物系材料;氮化矽(Si3N4)、氮化鋁(AlN)、氮化硼(BN)等氮化物系材料;碳化矽(SiC)、碳化硼(B4C)等碳化物系材料;羥基磷灰石等氫氧化物系材料等。該些可單獨含有一種,亦可以混合有兩種以上的混合物、或者以將兩種以上複合化的複合體的形式含有。 Examples of ceramic materials constituting the ceramic substrate include barium titanate (BaTiO 3 ), zirconia (ZrO 2 ), magnesium oxide (MgO), alumina (Al 2 O 3 ), and silicon dioxide (SiO 2 ). , zinc oxide (ZnO), titanium oxide (TiO 2 ), cerium oxide (CeO 2 ), yttrium oxide (Y 2 O 3 ) and other oxide materials; cordierite (2MgO.2Al 2 O 3 .5SiO 2 ), Mo Alite (3Al 2 O 3 .2SiO 2 ), forsterite (2MgO.SiO 2 ), steatite (MgO.SiO 2 ), sialon (Si 3 N 4 -AlN-Al 2 O 3 ), zircon ( ZrO 2 .SiO 2 ), ferrite (M 2 O.Fe 2 O 3 ) and other composite oxide materials; silicon nitride (Si 3 N 4 ), aluminum nitride (AlN), boron nitride (BN) Nitride-based materials such as silicon carbide (SiC) and boron carbide (B 4 C) and other carbide-based materials; hydroxide-based materials such as hydroxyapatite, etc. These may be contained individually by 1 type, and may be contained as a mixture of 2 or more types, or as a complex which combined 2 or more types.

[積層陶瓷電容器] [Laminated Ceramic Capacitors]

圖1A是示意性地表示積層陶瓷電容器(MLCC)1的剖面圖。MLCC1是將多個介電質層20與內部電極層30交替且一體地積層而構成的晶片型的電容器。於包含介電質層20與內部電極層30的積層晶片10的側面設置有一對外部電極40。作為一例,內部電極層30以積層順序交替地連接於不同的外部電極40上。藉此,構築小型大容量的MLCC1,其是包含介電質層20與夾著該介電質層20的一對內部電極層30的電容器結構並聯連接而成。MLCC1的介電質層20由陶瓷構成。內部電極層30是由本文揭示的導電性糊的鍛燒體構成。所述MLCC1例如藉由以下順序而較佳地製造。 FIG. 1A is a cross-sectional view schematically showing a multilayer ceramic capacitor (MLCC) 1 . The MLCC 1 is a wafer-type capacitor configured by laminating a plurality of dielectric layers 20 and internal electrode layers 30 alternately and integrally. A pair of external electrodes 40 are provided on the side of the laminated wafer 10 including the dielectric layer 20 and the internal electrode layer 30 . As an example, the internal electrode layers 30 are alternately connected to different external electrodes 40 in the order of lamination. Thereby, a small-sized and large-capacity MLCC 1 is constructed in which a capacitor structure including a dielectric layer 20 and a pair of internal electrode layers 30 sandwiching the dielectric layer 20 is connected in parallel. Dielectric layer 20 of MLCC1 is made of ceramics. The internal electrode layer 30 is composed of a calcined body of the conductive paste disclosed herein. The MLCC1 is preferably produced, for example, by the following procedure.

圖1B是示意性地表示未鍛燒的積層晶片10(未鍛燒的積層體10')的剖面圖。於製造MLCC1時,首先準備作為基材的陶瓷生片(介電質生片)。此處,例如將作為介電質材料的陶瓷粉末、黏合劑與有機溶劑等混合,製備介電質層形成用糊。其次,藉由利用刮刀法等將所製備的糊以薄層狀供給至載片(carrier sheet)上,而準備多片未鍛燒的陶瓷生片20'。 FIG. 1B is a cross-sectional view schematically showing an unfired laminated wafer 10 (green laminated body 10'). When manufacturing MLCC1, first, a ceramic green sheet (dielectric green sheet) is prepared as a base material. Here, for example, ceramic powder as a dielectric material, a binder, an organic solvent, and the like are mixed to prepare a paste for forming a dielectric layer. Next, a plurality of unfired ceramic green sheets 20' are prepared by supplying the prepared paste onto a carrier sheet in a thin layer using a doctor blade method or the like.

其次,準備本文揭示的導電性糊。具體而言,至少準備導電性粉末(A)、介電質粉末(B)、黏合劑(C)及分散介質(D),將該些以規定的比例調配,以透過率變化速度成為0.003以下的方式進行攪拌並混合,藉此製備導電性糊。而且,將所製備的糊以成為規定的圖案且所需厚度(例如1μm以下)的方式供給至所準備的陶瓷生片20'上,形成導電性糊塗佈層30'。本文揭示的導電 性糊的分散穩定性得到顯著提高。因此,於MLCC的量產時,即便導電性糊塗佈層30'於陶瓷生片20'上的形成(印刷)連續且經過長時間,導電性糊的性狀亦穩定,因此亦可使印刷品質良好地穩定。 Next, prepare the conductive paste disclosed herein. Specifically, at least conductive powder (A), dielectric powder (B), binder (C), and dispersion medium (D) are prepared, and these are prepared in a predetermined ratio so that the transmittance change rate becomes 0.003 or less Stir and mix in a manner to prepare a conductive paste. Then, the prepared paste is supplied onto the prepared ceramic green sheet 20' so as to form a predetermined pattern and have a desired thickness (for example, 1 μm or less), to form a conductive paste coating layer 30'. Conductive The dispersion stability of the paste is significantly improved. Therefore, in the mass production of MLCC, even if the formation (printing) of the conductive paste coating layer 30' on the ceramic green sheet 20' is continued for a long time, the properties of the conductive paste are stable, so the printing quality can also be improved. stable.

將所準備的帶導電性糊塗佈層30'的陶瓷生片20'積層多片(例如,數百片~數千片)並壓接。所述積層壓接體視需要切斷成晶片形狀。藉此,可獲得未鍛燒的積層體10'。繼而,將製作的未鍛燒的積層體10'於適當的加熱條件(例如,含氮環境中約1000℃~1300℃左右的溫度)下鍛燒。藉此,將陶瓷生片20'與導電性糊塗佈層30'同時鍛燒。陶瓷生片20'被鍛燒而成為介電質層20。導電性糊塗佈層30'被鍛燒而成為內部電極層30。介電質層20與內部電極層30被一體地燒結,可獲得燒結體(積層晶片10)。 再者,於所述鍛燒前,為了使黏合劑及分散介質等有機成分消失,亦可實施脫黏合劑處理(例如含氧環境中,於比鍛燒溫度低的溫度:例如約250℃~700℃的加熱處理)。其後,藉由於積層晶片10的側面塗佈外部電極材料並進行燒接,而形成外部電極40。藉此,可製造MLCC1。 A plurality of prepared ceramic green sheets 20 ′ with conductive paste coating layers 30 ′ (for example, hundreds to thousands of sheets) are laminated and bonded by pressure. The laminated pressure-bonded body is cut into wafer shapes as necessary. Thereby, an unfired laminate 10' can be obtained. Next, the prepared unfired laminate 10' is calcined under appropriate heating conditions (for example, a temperature of about 1000° C. to 1300° C. in a nitrogen-containing atmosphere). Thereby, the ceramic green sheet 20' and the conductive paste coating layer 30' are calcined simultaneously. The ceramic green sheet 20 ′ is fired to form the dielectric layer 20 . The conductive paste coating layer 30 ′ is fired to form the internal electrode layer 30 . The dielectric layer 20 and the internal electrode layer 30 are integrally sintered to obtain a sintered body (laminated wafer 10). Furthermore, before the calcination, in order to make the organic components such as binder and dispersion medium disappear, it is also possible to implement binder removal treatment (for example, in an oxygen-containing environment, at a temperature lower than the calcination temperature: for example, about 250 ° C ~ heat treatment at 700°C). Thereafter, external electrodes 40 are formed by applying an external electrode material to the side surface of laminated wafer 10 and firing. Thereby, MLCC1 can be manufactured.

以下,對與本發明有關的若干實施例進行說明,但並未意圖將本發明限定為所述實施例所示者。 Hereinafter, some examples related to the present invention will be described, but the present invention is not intended to be limited to those shown in the examples.

[導電性糊的製備] [Preparation of conductive paste]

(例1) (example 1)

按照以下順序製備下述表1所示的調配A的例1的導電性糊。 The conductive paste of Example 1 of Formulation A shown in Table 1 below was prepared in the following procedure.

即,首先(1)調配鎳粉末、有機溶劑及分散劑,使用無介質式高速分散裝置進行分散處理,藉此準備鎳漿料。 That is, first (1) nickel powder, an organic solvent, and a dispersant are prepared, and a nickel slurry is prepared by performing a dispersion process using a medialess high-speed disperser.

繼而,(2)調配鈦酸鋇粉末、有機溶劑及分散劑,利用介質式磨機進行分散處理,藉此準備鈦酸鋇漿料。 Next, (2) Barium titanate powder, an organic solvent, and a dispersant are prepared, and dispersion treatment is performed using a media mill to prepare a barium titanate slurry.

而且,(3)使用無介質式高速分散裝置使所準備的鎳漿料、鈦酸鋇漿料及分散劑分散、混合,藉此製成鎳.鈦酸鋇混合漿料。 Moreover, (3) Use a medium-less high-speed dispersion device to disperse and mix the prepared nickel slurry, barium titanate slurry and dispersant, thereby making nickel. Barium titanate mixed slurry.

其後,(4)於所述鎳.鈦酸鋇混合漿料中加入另外製備的媒液與有機溶劑,利用無介質式高速分散裝置混合,藉此獲得導電性糊。 Subsequently, (4) in the nickel. The additionally prepared vehicle liquid and organic solvent are added to the barium titanate mixed slurry, and mixed with a medium-free high-speed dispersing device to obtain a conductive paste.

再者,於糊的製備時,於調配A中,鎳粉末(Ni)使用平均粒徑為180nm者,鈦酸鋇粉末(BT)使用平均粒徑為10nm者,使鈦酸鋇粉末相對於鎳粉末的比例成為10質量%。再者,對於該些的鎳粉末及鈦酸鋇粉末未實施特別的表面處理等分散處理。另外,作為有機溶劑,使用二氫萜品醇,作為分散劑,使用羧酸系分散劑。關於媒液,使用依據常法將作為黏合劑的乙基纖維素與有機溶劑預先進行加熱混合而成者。 Furthermore, when preparing the paste, in formulation A, nickel powder (Ni) was used with an average particle diameter of 180nm, and barium titanate powder (BT) was used with an average particle diameter of 10nm. The ratio of the powder was 10% by mass. In addition, these nickel powders and barium titanate powders were not subjected to dispersion treatment such as special surface treatment. In addition, dihydroterpineol was used as an organic solvent, and a carboxylic acid-based dispersant was used as a dispersant. As for the vehicle, what was obtained by heating and mixing ethyl cellulose as a binder and an organic solvent in advance according to a conventional method was used.

(例2~例4) (Example 2~Example 4)

繼而,於例1的導電性糊的製備時,使(1)鎳漿料與(2)鈦酸鋇漿料的製備時的分散處理的強度(周速或轉速)變化,變更分散劑的比例,藉此使糊中的鎳粉末或鈦酸鋇粉末的分散態樣 變化。而且,其他條件設為與例1相同,藉此獲得例2~例4的導電性糊。 Next, in the preparation of the conductive paste of Example 1, the intensity (peripheral speed or rotation speed) of the dispersion treatment during the preparation of (1) nickel slurry and (2) barium titanate slurry was changed, and the ratio of the dispersant was changed. , so that the dispersion state of nickel powder or barium titanate powder in the paste Variety. And other conditions were made the same as Example 1, and the electroconductive paste of Example 2-Example 4 was obtained by this.

其中,關於例1~例4的導電性糊,作為分散處理條件,使攪拌速度於約8m/s~60m/s的範圍內變化。 However, regarding the conductive pastes of Examples 1 to 4, as the dispersion treatment conditions, the stirring speed was changed within the range of about 8 m/s to 60 m/s.

(例5) (Example 5)

於例1的導電性糊的製備時,採用表1所示的調配B來代替調配A,分散處理條件及其他條件與例1相同,獲得例5的導電性糊。再者,調配B中,鎳粉末使用平均粒徑為300nm者,鈦酸鋇粉末使用平均粒徑為50nm者。為了增大所使用的粉體的粒徑,使鈦酸鋇粉末相對於鎳粉末的比例增加為15質量%,使分散劑量減少。 In the preparation of the conductive paste of Example 1, the formulation B shown in Table 1 was used instead of the formulation A, and the dispersion treatment conditions and other conditions were the same as those of Example 1 to obtain the conductive paste of Example 5. In addition, in preparation B, nickel powder with an average particle diameter of 300 nm was used, and barium titanate powder with an average particle diameter of 50 nm was used. In order to increase the particle size of the powder used, the ratio of the barium titanate powder to the nickel powder was increased to 15% by mass, and the amount of dispersant was decreased.

(例6) (Example 6)

於例4的導電性糊的製備時,採用表1所示的調配B來代替調配A,分散處理條件及其他條件與例4相同,獲得例6的導電性糊。 In the preparation of the conductive paste of Example 4, the formulation B shown in Table 1 was used instead of the formulation A, and the dispersion treatment conditions and other conditions were the same as those of Example 4 to obtain the conductive paste of Example 6.

例5與例6的導電性糊的調配大致相同,但分散處理的條件分別對應於例1與例4而不同。 The preparation of the conductive pastes of Example 5 and Example 6 was substantially the same, but the conditions of the dispersion treatment were different for Example 1 and Example 4, respectively.

Figure 108109656-A0305-02-0031-1
Figure 108109656-A0305-02-0031-1

[透過率變化速度的測定] [Measurement of Transmittance Change Speed]

關於所準備的例1~例6的導電性糊,按照以下順序測定透過率變化速度。 Regarding the prepared conductive pastes of Examples 1 to 6, the rate of change in transmittance was measured in the following procedure.

首先,將各例的導電性糊稀釋為適於評價此種導電性糊的分散穩定性的濃度、即固體成分濃度10質量%。稀釋使用作為有機溶劑的二氫萜品醇。再者,於稀釋時,為了不產生所謂的溶劑衝擊(solvent shock),一面攪拌導電性糊一面利用滴定管滴加有機溶劑並混合。具體而言,於100mL的燒杯中量取10g導電性糊,使用小型攪拌機(使用6枚葉片,轉速約200rpm),一面攪拌燒杯中的導電性糊,一面以約2mL為單位、以約5秒為間隔添加有機溶劑。有機溶劑的添加量例如對於例1的導電性糊10g而言為45g。 First, the conductive paste of each example was diluted to a concentration suitable for evaluating the dispersion stability of such a conductive paste, that is, a solid content concentration of 10% by mass. Dihydroterpineol was used as an organic solvent for dilution. Furthermore, at the time of dilution, in order not to cause a so-called solvent shock (solvent shock), an organic solvent was added dropwise and mixed with a burette while stirring the conductive paste. Specifically, measure 10 g of the conductive paste in a 100 mL beaker, use a small mixer (using 6 blades, and rotate at about 200 rpm), and stir the conductive paste in the beaker while stirring the conductive paste in the beaker. Add organic solvent for the interval. The amount of the organic solvent added is, for example, 45 g with respect to 10 g of the conductive paste of Example 1.

關於所準備的稀釋糊,使用分散穩定性分析裝置(LUM GmbH公司製造的路密非(LUMiFuge)),測定透過率特性。測定使用分析裝置用的聚醯胺製的角管狀的一次性樣本槽(sample cell)(槽代碼(cell code)3、LUM 2mmPA、測定容量0.4mL~0.5mL、測定光路長度2mm)。所述樣本槽構成為收容0.4mL的試樣並供於測定,0.4mL的試樣的上表面位於距總長82mm的樣本槽的底部23mm的地點。稀釋糊使用注射器並秤量0.4mL,自槽的底部緩緩地填充於槽中後,加蓋並用於測定。 The transmittance characteristics of the prepared diluted paste were measured using a dispersion stability analyzer (LUMiFuge manufactured by LUM GmbH). A polyamide angular tubular disposable sample cell (cell code (cell code) 3, LUM 2mmPA, measurement volume 0.4mL-0.5mL, measurement optical path length 2mm) for analysis equipment was used for the measurement. The sample tank is configured to hold a 0.4 mL sample for measurement, and the upper surface of the 0.4 mL sample is located at a position 23 mm from the bottom of the sample tank with a total length of 82 mm. The diluted paste weighed 0.4 mL using a syringe, and after filling the tank slowly from the bottom of the tank, it was capped and used for measurement.

樣本槽水平地(以使槽的長度方向與離心方向一致)設置於分散穩定性分析裝置的轉子上並開始測定。 The sample tank was set horizontally (so that the longitudinal direction of the tank coincided with the centrifugal direction) on the rotor of the dispersion stability analyzer, and the measurement was started.

所述分散穩定性分析裝置藉由使轉子旋轉而對收容在樣本槽中的漿料實施離心沈降處理,同時對漿料的液面及漿料中粒子的沈降狀態進行光學檢測,藉此可當場直接測定。再者,粒子沈降狀態的光學檢測是藉由如下方式實施:利用振盪近紅外雷射的線光源,以相對於樣本槽沿長邊方向平行的方式照射雷射光,利用電荷耦合元件(Charge-Coupled Device,CCD)線感測器檢測其透過光的強度。本實施形態中,於以離心狀態存在於距樣本槽的底部23mm的範圍內的試樣中,以包含距漿料的液面19mm的區域的方式進行透過光強度的測定。另外,本實施形態中,藉由於規定的測定期間、實時地獲取樣本槽的位置資訊與所述位置的透過率的曲線,可獲得透過率的時間曲線。測定條件如下所述。 The dispersion stability analysis device performs centrifugal sedimentation treatment on the slurry contained in the sample tank by rotating the rotor, and at the same time optically detects the liquid level of the slurry and the sedimentation state of the particles in the slurry, thereby enabling on-the-spot Measured directly. Moreover, the optical detection of the particle sedimentation state is implemented by the following method: using a line source of oscillating near-infrared laser to irradiate the laser light in a manner parallel to the longitudinal direction of the sample chamber, and using a charge-coupled device (Charge-Coupled Device, CCD) line sensor detects the intensity of the transmitted light. In the present embodiment, the transmitted light intensity was measured so as to include a region 19 mm from the liquid surface of the slurry in a sample present in a centrifugal state within a range of 23 mm from the bottom of the sample tank. In addition, in this embodiment, the time curve of the transmittance can be obtained by acquiring the position information of the sample tank and the transmittance curve at the position in real time during a predetermined measurement period. The measurement conditions are as follows.

測定溫度:25.0℃ Measuring temperature: 25.0°C

透過率測定波長:865nm Transmittance measurement wavelength: 865nm

光源強度:1(標準) Light source intensity: 1 (standard)

轉速:4000rpm Speed: 4000rpm

測定間隔:10秒 Measurement interval: 10 seconds

測定時間:6200秒(其中,分析對象為6000秒為止) Measurement time: 6200 seconds (among them, the analysis object is up to 6000 seconds)

例如,如圖2(a)所示,收容於樣本槽中的漿料最初以均勻的濃度分散有粒子,透過率亦固定。然而,如(b)、(c)所示,伴隨著進行離心沈降,漿料中的粒子朝槽底面(旋轉半徑方向的外側)移動(沈降)。藉此,自旋轉半徑方向的內側起樣本槽的規定位置的漿料濃度緩緩降低,所述位置的漿料的透過率緩緩變高。所述測定中,可獲得橫貫樣本槽的總測定長度的透過率分佈的時間變化曲線。 For example, as shown in FIG. 2( a ), the slurry contained in the sample tank initially has particles dispersed at a uniform concentration, and the transmittance is also constant. However, as shown in (b) and (c), the particles in the slurry move (sediment) toward the bottom surface of the tank (outside in the direction of the radius of rotation) as centrifugal sedimentation proceeds. Thereby, the slurry concentration at a predetermined position of the sample tank gradually decreases from the inner side in the direction of the rotation radius, and the transmittance of the slurry at the position gradually increases. In the measurement, a time variation curve of the transmittance distribution across the total measurement length of the sample tank can be obtained.

因此,如圖3(a)所示,針對樣片槽的規定的測定區域對透過率(光透過率)進行積分,例如如(b)所示,將繪製其積分透過率與測定時間的關係時的傾斜度定義為「透過率變化速度」,其中t0、t1、t2表示時間;S0、S1、S2分別表示在時間t0、t1、t2時沿離心沈降方向的透過率的積分(積分透過率)。粒子的沈降於離心沈降處理的最開始穩定地進行,但於粒子到達槽底面時不再進行而成為飽和狀態。本文揭示的技術中,如(c)所示,關於此種糊,將可認為粒子的沈降大致穩定地進行的0秒~6000秒為止的測定期間中的積分透過率(T)的每單位時間的變化量(△T/△t)作為「透過率變化速度」而採用。關於透過率變化速度,值越大 表示沈降越快、分散穩定性越差,值越小表示沈降越慢、分散穩定性越良好。另外,本實施形態中,關於樣本槽的距試樣上表面(液面)19mm的區域,計算出透過率變化速度。據此,將關於各導電性糊計算出透過率變化速度的結果示於下述表2中。再者,透過率的測定中使用的光(此處為雷射光)的波長並不限制為所述例。 Therefore, as shown in FIG. 3(a), the transmittance (light transmittance) is integrated for a predetermined measurement area of the sample tank, and when the relationship between the integrated transmittance and the measurement time is plotted, for example, as shown in (b). The inclination of is defined as "transmittance change speed", where t 0 , t 1 , t 2 represent time; S 0 , S 1 , S 2 represent the time along the direction of centrifugal sedimentation at time t 0 , t 1 , t 2 Integral of transmittance (integrated transmittance). The sedimentation of the particles proceeded stably at the beginning of the centrifugal sedimentation treatment, but stopped when the particles reached the bottom of the tank and became saturated. In the technology disclosed herein, as shown in (c), for this paste, the integral transmittance (T) per unit time in the measurement period from 0 seconds to 6000 seconds, which can be considered to be substantially stable in the sedimentation of the particles The amount of change (ΔT/Δt) is adopted as the "transmittance change rate". With regard to the rate of change in transmittance, a larger value indicates faster sedimentation and poorer dispersion stability, and a smaller value indicates slower sedimentation and better dispersion stability. In addition, in the present embodiment, the rate of change in transmittance was calculated for the region of the sample tank 19 mm from the upper surface (liquid surface) of the sample. Based on this, the results of calculating the rate of change in transmittance for each conductive paste are shown in Table 2 below. In addition, the wavelength of the light (laser light here) used for the measurement of transmittance is not limited to the said example.

[燒結性的評價] [Evaluation of sinterability]

繼而,為了確認所準備的例1~例6的導電性糊中的粒子的分散狀態對燒結性造成的影響,製作各導電性糊導電性膜,進行燒結性的評價。 Next, in order to confirm the influence of the dispersion state of the particles in the prepared conductive pastes of Examples 1 to 6 on the sinterability, conductive films of each conductive paste were produced, and the sinterability was evaluated.

首先,藉由膜敷料器以膜厚250μm將各例的導電性糊約3g塗佈於聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)製膜上。其後,利用溫風乾燥機,將設定溫度設為100℃、乾燥時間設為15分鐘而進行處理,藉此獲得乾燥塗膜。繼而,將乾燥塗膜自PET製膜剝離,於N2環境中以升溫速度200℃/h加熱,於到達溫度600℃下保持20分鐘,藉此進行脫黏合劑處理。而且,接著於(N2+1%H2)環境中,以升溫速度200℃/h加熱,於到達溫度1200℃下保持10分鐘,藉此進行正式鍛燒,而獲得導電性膜。 First, about 3 g of the conductive paste of each example was coated on a film made of polyethylene terephthalate (PET) with a film thickness of 250 μm by a film applicator. Thereafter, a dry coating film was obtained by processing the set temperature at 100° C. and drying time for 15 minutes using a warm air dryer. Next, the dried coating film was peeled off from the PET film, heated at a heating rate of 200°C/h in an N 2 atmosphere, and held at a temperature of 600°C for 20 minutes to perform binder removal treatment. Then, in a (N 2 +1%H 2 ) atmosphere, heating was performed at a heating rate of 200° C./h, and the temperature was kept at 1200° C. for 10 minutes to perform main firing to obtain a conductive film.

使用掃描式電子顯微鏡(Scanning Electron Microscope:SEM)觀察鍛燒後的導電性膜的表面(與PET製膜未接觸之側的表面),測定鍛燒後的鎳粒子與鈦酸鋇粒子的燒結後平均粒徑。 Using a scanning electron microscope (Scanning Electron Microscope: SEM) to observe the surface of the conductive film after firing (the surface on the side that is not in contact with the PET film), and measure the sintering of the nickel particles and barium titanate particles after firing. The average particle size.

具體而言,首先對鍛燒後的導電性膜的表面進行約30秒Au蒸鍍,藉此準備SEM觀察用試樣。而且,基於將觀察倍率設定為10000倍而獲得的SEM圖像,求出鎳粒子及鈦酸鋇粒子的面積圓相當徑(Heywood徑)。關於圓相當徑,藉由分別選出可自約4視野~6視野的SEM圖像中識別粒界的約70個鎳粒子及鈦酸鋇粒子,並使用圖像處理軟體設定各粒子的輪廓而計算出圓相當徑(參照圖6A與圖6B)。而且,將針對約70個各粒子而獲得的面積圓相當徑的個數基準的粒度分佈中的累積50%粒徑(D50)設為所述導電性膜中的鎳粒子或鈦酸鋇粒子的平均粒徑。另外,關於個數基準的粒度分佈中的累積90%粒徑(D90),亦同樣地計算出,將該些結果示於以下的表3與表4中。 Specifically, first, Au vapor deposition was performed on the surface of the conductive film after firing for about 30 seconds, thereby preparing a sample for SEM observation. Then, based on the SEM image obtained by setting the observation magnification to 10,000 times, the area-equivalent circle diameters (Heywood diameters) of the nickel particles and the barium titanate particles were determined. The circle equivalent diameter is calculated by selecting about 70 nickel particles and barium titanate particles whose grain boundaries can be identified from SEM images of about 4 to 6 fields of view, and setting the contour of each particle using image processing software Out of the circle is equivalent to the diameter (refer to FIG. 6A and FIG. 6B ). In addition, the cumulative 50% particle diameter (D 50 ) in the particle size distribution based on the number of area-circle-equivalent diameters obtained for each of about 70 particles is defined as the nickel particles or barium titanate particles in the conductive film. the average particle size. In addition, the cumulative 90% particle size (D 90 ) in the number-based particle size distribution was calculated in the same manner, and the results are shown in Table 3 and Table 4 below.

另外,為了參考,於圖5A與圖5B中分別示出使用例1及例4的導電性糊而製作的導電性膜的SEM觀察圖像(20000倍)。除此以外,分別於圖6A與圖6B中,關於例4的導電性膜的SEM觀察圖像(10000倍),為了測定鎳粒子(Ni)及鈦酸鋇粒子(BT)的平均粒徑,一併示出描繪粒子的輪廓的情況。 In addition, for reference, SEM observation images (20,000 magnifications) of conductive films produced using the conductive pastes of Examples 1 and 4 are shown in FIGS. 5A and 5B , respectively. In addition, in FIG. 6A and FIG. 6B , regarding the SEM observation image (10000 times) of the conductive film of Example 4, in order to measure the average particle diameter of nickel particles (Ni) and barium titanate particles (BT), The case where the outline of the particles is drawn is also shown.

Figure 108109656-A0305-02-0035-2
Figure 108109656-A0305-02-0035-2

Figure 108109656-A0305-02-0036-3
Figure 108109656-A0305-02-0036-3

如表2所示,可知即便所使用的原料相同,亦可藉由使其製備方法發生變化而使所獲得的導電性糊的透過率變化速度明顯不同。本實施形態中,使例1~例4的鎳漿料及鈦酸鋇漿料的攪拌強度於8m/s~60m/s的範圍內分別發生變化。同樣地,亦使例5~例6的鎳漿料及鈦酸鋇漿料的攪拌強度於8m/s~60m/s的範圍內分別發生變化。結果可知,例如關於例1及例5的導電性糊,透過率變化速度變小且分散穩定性提高,關於例4及例6的導電性糊,透過率變化速度變大且分散穩定性變低。如此,認為於所獲得的導電性糊中的Ni粒子與BT粒子的分散狀態及分散穩定性變化時,該些粒子的分散穩定性可藉由使用透過率變化速度作為指標而較佳地顯現(數值化)。 As shown in Table 2, it can be seen that even if the raw materials used are the same, the change speed of the transmittance of the obtained conductive paste can be significantly different by changing the preparation method. In this embodiment, the stirring intensity of the nickel slurry and the barium titanate slurry of Examples 1 to 4 were changed within the range of 8 m/s to 60 m/s, respectively. Similarly, the stirring intensity of the nickel slurry and the barium titanate slurry in Examples 5 to 6 were also changed within the range of 8 m/s to 60 m/s, respectively. As a result, for the conductive pastes of Examples 1 and 5, for example, the rate of change in transmittance was reduced and the dispersion stability was improved, and the rate of change in transmittance was increased and the dispersion stability was reduced in the conductive pastes of Examples 4 and 6. . In this way, it is considered that when the dispersion state and dispersion stability of Ni particles and BT particles in the obtained conductive paste are changed, the dispersion stability of these particles can be preferably expressed by using the rate of change in transmittance as an index ( digitized).

另一方面,如表2、表3所示可知,越為透過率變化速度小的糊,鍛燒後所獲得的導體膜中的Ni粒子及BT粒子的D50及D90越小,例如如圖5A的例1所示,鍛燒所引起的各粒子的晶 粒成長得到抑制。另外可知,越為透過率變化速度大的糊,鍛燒後所獲得的導體膜中的Ni粒子及BT粒子的D50及D90越大,例如如圖5B的例4所示,鍛燒所引起的晶粒成長無法得到抑制。據此可知,關於本文揭示的導電性糊的透過率變化速度亦可作為預先掌握所述導電性糊的鍛燒時的晶粒成長行為的指標而較佳地使用。 On the other hand, as shown in Table 2 and Table 3, it can be seen that the lower the transmittance change rate of the paste, the smaller the D50 and D90 of the Ni particles and BT particles in the conductor film obtained after firing, for example, as shown in As shown in Example 1 of FIG. 5A , the grain growth of each particle caused by calcination was suppressed. In addition, it can be seen that the higher the transmittance change rate of the paste, the larger the D 50 and D 90 of the Ni particles and BT particles in the conductor film obtained after firing. For example, as shown in Example 4 of FIG. The induced grain growth cannot be suppressed. From this, it can be seen that the rate of change in the transmittance of the conductive paste disclosed herein can also be preferably used as an index for grasping the grain growth behavior during firing of the conductive paste in advance.

更具體而言,如圖4(a)所示,例1、例5的導體膜中的Ni粒子的粒度分佈的最大頻率高且極其尖銳。關於例1及例5,可知儘管作為原料使用的Ni粉末的平均粒徑為180nm與300nm而不同,但燒結後的Ni粒子的粒度分佈大致為相同形狀,若透過率變化速度小,則Ni粒子的成長均以高水準得到抑制。關於例2的導體膜的Ni粒子的粒度分佈,最大頻率稍低的峰值寬度維持與例1同樣的寬度。相對於此,例如關於例3及例4的導電膜中的Ni粒子的粒度分佈,可知粗大粒子的存在增加而變寬,至於例4,粗大粒子的數量大幅增加,在粒度分佈中形成左肩(第二峰值)。可知相較於例4的Ni粒子而言,例6的導電膜中的Ni粒子藉由燒結顯著地進行晶粒成長。另外,如圖4(b)所示可知,由於BT粒子比Ni粒子更微細,因此雖然鍛燒所引起的晶粒成長變得顯著,但如表3所示,顯示出與Ni粒子大致相同的行為。 More specifically, as shown in FIG. 4( a ), the maximum frequency of the particle size distribution of Ni particles in the conductor films of Examples 1 and 5 was high and extremely sharp. Regarding Examples 1 and 5, it can be seen that although the average particle diameter of the Ni powder used as a raw material is 180 nm and 300 nm, the particle size distribution of the Ni particles after sintering is approximately the same shape. If the rate of change in transmittance is small, the Ni particles growth was suppressed at a high level. Regarding the particle size distribution of Ni particles in the conductor film of Example 2, the width of the peak with a slightly lower maximum frequency was maintained at the same width as in Example 1. On the other hand, for example, regarding the particle size distribution of Ni particles in the conductive films of Examples 3 and 4, it can be seen that the presence of coarse particles increases and broadens, and in Example 4, the number of coarse particles increases significantly, forming a left shoulder in the particle size distribution ( second peak). It can be seen that the Ni particles in the conductive film of Example 6 significantly progressed in grain growth by sintering compared to the Ni particles of Example 4. In addition, as shown in FIG. 4( b ), since the BT particles are finer than the Ni particles, although the grain growth caused by sintering becomes remarkable, as shown in Table 3, it shows approximately the same behavior as that of the Ni particles. Behavior.

據此可知,關於使用透過率變化速度小的例1的導電性糊而形成的導體膜,原料粒子的鍛燒時的晶粒成長得到抑制,厚度更薄,表面平坦,可形成均勻的導體膜。詳情雖不明確,例如 關於例1、例5的導電性糊,認為例如Ni粒子及微細的BT粒子不凝聚,即便於糊狀態下,在塗膜形成時亦可於Ni粒子彼此間較佳地配置BT粒子。而且,認為藉此可較佳地抑制鍛燒時的Ni粒子的燒結及晶粒生長。相對於此,關於透過率變化速度大的例4、例6的導電性糊,認為例如微細的BT粒子凝聚等,無法較佳地抑制Ni粒子彼此的接觸。認為藉此於鍛燒時Ni粒子及BT粒子分別顯著地進行晶粒成長。例如,若導電性糊的透過率變化速度為0.003以下,則可以說糊中的粒子的分散穩定性高,可獲得由更微細的燒結粒子構成的導體膜。另外,認為若導電性糊的透過率變化速度高於0.003,則糊中的粒子的分散穩定性低,於形成塗膜時同種粒子彼此以更高的頻率接觸,藉由鍛燒而容易地進行晶粒成長。 From this, it can be seen that the conductive film formed by using the conductive paste of Example 1 with a small transmittance change rate suppresses the grain growth of the raw material particles during sintering, and can form a uniform conductive film with a thinner surface and a flat surface. . Details are vague, such as Regarding the conductive pastes of Examples 1 and 5, it is considered that, for example, Ni particles and fine BT particles do not aggregate, and even in a paste state, BT particles can be preferably arranged between Ni particles when forming a coating film. In addition, it is considered that sintering and grain growth of Ni particles during sintering can be favorably suppressed by this. On the other hand, regarding the conductive pastes of Examples 4 and 6, which have a large rate of change in transmittance, it is considered that, for example, aggregation of fine BT particles cannot suppress the contact of Ni particles well. It is considered that the Ni particles and the BT particles each remarkably progress in grain growth at the time of sintering. For example, if the rate of change in transmittance of the conductive paste is 0.003 or less, it can be said that the dispersion stability of the particles in the paste is high, and a conductive film composed of finer sintered particles can be obtained. In addition, it is considered that if the rate of change of the transmittance of the conductive paste is higher than 0.003, the dispersion stability of the particles in the paste is low, and the particles of the same type are in contact with each other at a higher frequency when forming a coating film, which is easily carried out by firing. Grain growth.

藉由使用本文揭示的導電性糊,可抑制導電性粒子的異常晶粒成長而形成導體膜。藉此,例如於MLCC的製造中可抑制內部電極層的膨脹或導電性粒子所引起的經薄層化的介電質層的刺破而製造耐電壓及可靠性高的MLCC。 By using the conductive paste disclosed herein, abnormal grain growth of conductive particles can be suppressed to form a conductive film. Thereby, for example, in the manufacture of MLCCs, expansion of internal electrode layers and penetration of thinned dielectric layers by conductive particles can be suppressed, and MLCCs with high withstand voltage and reliability can be manufactured.

以上,詳細地說明了本發明,但該些僅為例示,本發明可於不脫離其主旨的範圍內施加各種變更。 As mentioned above, although this invention was demonstrated in detail, these are only an illustration, and various changes can be added to this invention in the range which does not deviate from the summary.

1‧‧‧積層陶瓷電容器(MLCC) 1‧‧‧Multilayer Ceramic Capacitors (MLCC)

10‧‧‧積層晶片 10‧‧‧layer chip

10'‧‧‧未鍛燒的積層體 10'‧‧‧Uncalcined laminate

20‧‧‧介電質層 20‧‧‧dielectric layer

20'‧‧‧陶瓷生片 20'‧‧‧ceramic green sheet

30‧‧‧內部電極層 30‧‧‧internal electrode layer

30'‧‧‧導電性糊塗佈層 30'‧‧‧Conductive paste coating layer

40‧‧‧外部電極 40‧‧‧External electrodes

Claims (6)

一種導電性糊,其用於導體膜的形成,且包含:導電性粉末、介電質粉末及有機成分,關於對所述導電性糊稀釋為固體成分濃度10質量%實施以4000rpm轉速進行6200秒的離心沈降處理時的所述導電性粉末及所述介電質粉末的離心沈降行為,於藉由如下透過率變化速度進行評價時,以所述透過率變化速度成為0.003以下的方式製備,所述透過率變化速度定義為基於沿離心沈降方向從0秒~6000秒的測定期間的透過率分佈而計算出的積分透過率的每單位時間的變化量。 A conductive paste, which is used to form a conductive film, and includes: conductive powder, dielectric powder, and organic components, and the dilution of the conductive paste to a solid content concentration of 10% by mass is carried out at a rotation speed of 4000rpm for 6200 seconds The centrifugal sedimentation behavior of the conductive powder and the dielectric powder during the centrifugal sedimentation treatment was prepared so that the transmittance change rate was 0.003 or less when evaluating the following transmittance change rate. The transmittance rate of change is defined as the amount of change per unit time of the integrated transmittance calculated based on the transmittance distribution in the measurement period from 0 seconds to 6000 seconds along the centrifugal sedimentation direction. 如申請專利範圍第1項所述的導電性糊,其中於將所述導電性粉末的基於布厄特(BET)法的平均粒徑設為D1,將所述介電質粉末的基於布厄特法的平均粒徑設為D2時,滿足0.03×D1≦D2≦0.4×D1The conductive paste as described in claim 1, wherein the average particle diameter of the conductive powder based on the Buert (BET) method is set to D 1 , and the average particle size of the dielectric powder based on the cloth When the average particle diameter of the Erter's method is D 2 , it satisfies 0.03×D 1 ≦D 2 ≦0.4×D 1 . 如申請專利範圍第1項或第2項所述的導電性糊,其中所述導電性粉末的基於布厄特法的所述平均粒徑D1為0.5μm以下。 The conductive paste according to claim 1 or 2, wherein the average particle diameter D 1 of the conductive powder based on the Buert method is 0.5 μm or less. 如申請專利範圍第1項或第2項所述的導電性糊,其中所述導電性粉末為選自由鎳、鉑、鈀、銀及銅所組成的群組中的至少一種。 The conductive paste as described in claim 1 or claim 2, wherein the conductive powder is at least one selected from the group consisting of nickel, platinum, palladium, silver and copper. 如申請專利範圍第1項或第2項所述的導電性糊,其中所述介電質粉末為選自由鈦酸鋇、鈦酸鍶及鋯酸鈣所組成的群組 中的至少一種。 The conductive paste as described in item 1 or item 2 of the patent application, wherein the dielectric powder is selected from the group consisting of barium titanate, strontium titanate and calcium zirconate at least one of the 如申請專利範圍第1項或第2項所述的導電性糊,其用於形成積層陶瓷電子零件的內部電極層。 The conductive paste as described in claim 1 or claim 2, which is used to form an internal electrode layer of a laminated ceramic electronic component.
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