TW201205649A - Beam current transmission system and method - Google Patents
Beam current transmission system and method Download PDFInfo
- Publication number
- TW201205649A TW201205649A TW99124894A TW99124894A TW201205649A TW 201205649 A TW201205649 A TW 201205649A TW 99124894 A TW99124894 A TW 99124894A TW 99124894 A TW99124894 A TW 99124894A TW 201205649 A TW201205649 A TW 201205649A
- Authority
- TW
- Taiwan
- Prior art keywords
- rod
- beam current
- pair
- workpiece
- transmission system
- Prior art date
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000009826 distribution Methods 0.000 claims abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 239000000571 coke Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000002347 injection Methods 0.000 abstract description 18
- 239000007924 injection Substances 0.000 abstract description 18
- 230000000694 effects Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000010893 Bischofia javanica Nutrition 0.000 description 1
- 240000005220 Bischofia javanica Species 0.000 description 1
- 206010011469 Crying Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Radiation-Therapy Devices (AREA)
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99124894A TW201205649A (en) | 2010-07-28 | 2010-07-28 | Beam current transmission system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99124894A TW201205649A (en) | 2010-07-28 | 2010-07-28 | Beam current transmission system and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201205649A true TW201205649A (en) | 2012-02-01 |
| TWI424478B TWI424478B (cg-RX-API-DMAC7.html) | 2014-01-21 |
Family
ID=46761737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW99124894A TW201205649A (en) | 2010-07-28 | 2010-07-28 | Beam current transmission system and method |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201205649A (cg-RX-API-DMAC7.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110101883A (zh) * | 2018-11-02 | 2019-08-09 | 深圳铭杰医疗科技有限公司 | 一种基于磁场的束流针消毒装置 |
| CN113409981A (zh) * | 2021-06-18 | 2021-09-17 | 中国科学院近代物理研究所 | 一种用于电子束辐照加工的多面辐照方法及系统 |
| CN115380350A (zh) * | 2020-04-13 | 2022-11-22 | 浜松光子学株式会社 | X射线产生装置及x射线产生方法 |
| CN116347740A (zh) * | 2023-03-08 | 2023-06-27 | 中子高新技术产业发展(重庆)有限公司 | 一种中子治疗束流传输系统 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4191887A (en) * | 1978-03-29 | 1980-03-04 | Varian Associates, Inc. | Magnetic beam deflection system free of chromatic and geometric aberrations of second order |
| US5418348A (en) * | 1992-10-29 | 1995-05-23 | Mdc Vacuum Products, Inc. | Electron beam source assembly |
| US6403967B1 (en) * | 1999-10-15 | 2002-06-11 | Advanced Ion Beam Technology, Inc. | Magnet system for an ion beam implantation system using high perveance beams |
| US6414329B1 (en) * | 2000-07-25 | 2002-07-02 | Axcelis Technologies, Inc. | Method and system for microwave excitation of plasma in an ion beam guide |
| DE102007046508B4 (de) * | 2007-09-28 | 2010-01-21 | Siemens Ag | Bestrahlungsanlage mit einem Strahlführungsmagneten |
-
2010
- 2010-07-28 TW TW99124894A patent/TW201205649A/zh unknown
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110101883A (zh) * | 2018-11-02 | 2019-08-09 | 深圳铭杰医疗科技有限公司 | 一种基于磁场的束流针消毒装置 |
| CN115380350A (zh) * | 2020-04-13 | 2022-11-22 | 浜松光子学株式会社 | X射线产生装置及x射线产生方法 |
| CN113409981A (zh) * | 2021-06-18 | 2021-09-17 | 中国科学院近代物理研究所 | 一种用于电子束辐照加工的多面辐照方法及系统 |
| CN116347740A (zh) * | 2023-03-08 | 2023-06-27 | 中子高新技术产业发展(重庆)有限公司 | 一种中子治疗束流传输系统 |
| CN116347740B (zh) * | 2023-03-08 | 2023-10-20 | 中子高新技术产业发展(重庆)有限公司 | 一种中子治疗束流传输系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI424478B (cg-RX-API-DMAC7.html) | 2014-01-21 |
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