201143974 六、發明說明： 【發明所屬之技術領域】 本發明涉及與以如矽晶圓或半導體基板、玻璃 要求高平坦加工精度的被加工物的基板作爲對象的 關的技術，特別是涉及可實現對該基板的表面進行 所用的硏磨墊的再使用的技術。 【先前技術】 如人們熟知的那樣，在半導體的製造時，進行 構成材料的矽晶圓或半導體基板、玻璃基板等的基 面加以平坦化的硏磨處理。硏磨處理，一般係藉由 式實施：利用雙面膠帶將由樹脂材料等形成的圓板 硏磨墊直接固定於硏磨機的旋轉定盤上，一邊供給 磨顆粒的硏磨液，一邊使硏磨墊和基板相對地進行 動來進行硏磨。 於是，作爲用於實施這樣的硏磨處理的硏磨墊 本特開2002- 1 1 63 0號公報（專利文獻1)等所記載， 發泡或未發泡的胺基甲酸乙酯等形成的樹脂墊。另 硏磨墊的硏磨表面上，在許多的場合，施加同心圓 子狀、輻射狀等的槽加工，或將發泡樹脂的氣泡開 處理。 不過，在採用硏磨墊而進行硏磨加工的情況， 象的基板在進行品種切換等時，有必須將用於硏磨 硏磨墊從旋轉定盤剝離開來，替換爲別的硏磨墊的 基板等 硏磨相 硏磨時 將成爲 板的表 下述方 形狀的 包含硏 旋轉運 ，如曰 採用由 外，在 狀或格 口等的 硏磨對 加工的 情況。 -4- 201143974 另外，例如，即使是在以再使用等爲目的’利用別的加工 裝置將伴隨硏磨加工而劣化的硏磨墊進行表面開槽等的再 加工這樣的情況等，仍必須將硏磨墊從旋轉定盤剝離開來。 但是，薄壁圓板狀的樹脂墊，由於是利用黏接膠帶而 牢固地固定於硏磨裝置的旋轉定盤，故將此硏磨墊從旋轉 定盤剝離開來時，容易對硏磨墊產生彎曲或折斷、皺褶、 破裂等的損傷。於是，由於這樣的損傷的原因，有許多雖 然還沒有到達壽命期限，卻無法再使用該硏磨墊，而不得 不將其廢棄的問題。 並且，由於一邊按照不損傷的方式進行細心的操作， 一邊將硏磨墊從旋轉定盤剝離開來的作業，要求熟練和謹 慎’故還具有對作業者造成較大的負擔的問題。此外，由 於將硏磨墊從旋轉定盤剝離開來的作業須要相當的時間， 故還有必須經過長時間地使高價、貴重的設備的硏磨裝置 停止’限制設備的稼働時間的問題。 此外’在日本特開2001-54859號公報（專利文獻2)中， 提出了下述的結構，其中，直接將平板形狀的支承體層一 體地形成於硏磨墊的內面上，並且利用磁力或負壓吸引 力’將該支承體層吸附保持於硏磨機的旋轉定盤，藉此， 可容易地從旋轉定盤取下硏磨墊。但是，不僅難以直接將 支承體層一體形成在硏磨墊，即使可將支承體層一體形成 在硏磨墊’實用化仍有問題。 201143974 但是，在專利文獻2中，雖然例示了利用磁力或負壓 吸引力將硏磨墊固定至旋轉定盤’但是要經由厚壁的旋轉 定盤對薄壁的支承體層作用充分的磁力是極困難的，另 外，負壓吸引，因無法在平板形狀的支承體層和旋轉定盤 之間形成與外部空間確實隔絕的密封區域而難以作用充分 的吸附力。再者，在上述專利文獻2中，還揭露了利用黏 接膠帶而將支承體層的內面固定於旋轉定盤的結構，但 是，具有僅覆蓋硏磨墊的內面的薄壁平板形狀的支承體層 未獲得充分的剛性，在將支承體層從旋轉定盤剝離開來 時，與單體結構的硏磨墊同樣地，有產生彎曲或折斷、皺 褶等的損傷之虞。 另外，上述的單體結構的硏磨墊、與專利文獻2所記 載的硏磨墊的任一者中，由於均具有單純的圓板形狀，所 以還有將其對旋轉定盤正確地進行對中（centering，中心對 準）而安裝的作業是困難且費事的問題。 [先前技術文獻] [專利文獻] 專利文獻1 :日本特開2002- 1 1 63 0號公報 專利文獻2 :日本特開2 0 0 1 - 5 4 8 5 9號公報 【發明內容】 [發明所欲解決的問題] 本發明是以如上所述的情事爲背景而成就者，目的在 於：提供一種新型結構的硏磨墊用輔助板，其可在充分地 -6- 201143974 確保硏磨墊對旋轉定盤的固定力的同時，容易進行硏磨墊 對旋轉定盤的裝卸，特別是可防止在從旋轉定盤上取下硏 磨墊時的硏磨墊的損傷，對於例如，實現硏磨墊的再利用 也是有利的。 此外，本發明的目的還在於：提供一種採用硏磨墊用 輔助板實現硏磨墊的再生利用的硏磨墊的再生方法，以及 提供一種基板的製造方法，其藉由採用硏磨墊用輔助板施 加硏磨加工來獲得經硏磨加工的基板。 [用以解決課題的手段] 爲了解決上述課題，涉及硏磨墊用輔助板的本發明的 第1形式爲一種硏磨墊用輔助板，其具備載置於硏磨機的 旋轉定盤的上面的輔助板主體，利用該輔助板主體的表面 的中間部分，構成重合而固定有用於半導體基板等硏磨的 硏磨墊的墊支承面，同時形成嵌合周壁部，其在該輔助板 主體的外周緣部，沿著該硏磨機的旋轉定盤的外周面而向 下方突出，嵌合於該旋轉定盤的外周，藉此，將固定於該 墊支承面的該硏磨墊，可裝卸地對該旋轉定盤安裝。 在本形式的硏磨墊用輔助板中，藉由在輔助板主體的 外周緣部形成嵌合周壁部，可發揮如以下（1)〜（6)中記載的 特別的技術效果。 (1)能將硏磨墊，在使其固定於輔助板主體的上面（表面） 的狀態下，與輔助板主體一起對旋轉定盤安裝和取下。於 是，即使是在從旋轉定盤取下而將硏磨墊進行清潔或再加 201143974 工等的情況下，仍可在使硏磨墊固定於輔助板的上面的狀 態下進行該作業。 (2) 藉由嵌合周壁部，可對輔助板主體發揮極有效的補 強效果。特別是，嵌合周壁部，係形成於離開硏磨機的旋 轉定盤的上面的外周側，因此，可避免對在旋轉定盤上所 進行的硏磨等的加工作業的不良影響，同時可以各種形狀 或尺寸形成嵌合周壁部，可獲得對輔助板主體有效的補強 效果。於是，在上述（1)時，在將硏磨墊固定於輔助板主體 的狀態下操作’藉此，不用說是在將硏磨墊對旋轉定盤裝 卸時、或者將硏磨墊清潔或再加工時等情況下，就連是在 硏磨墊的運送時或保存時等的情況下，仍可防止硏磨墊的 彎曲或損傷，保持在良好的狀態。 (3) 在將嵌合周壁部嵌入旋轉定盤時，利用旋轉定盤的 外周面來引導嵌合周壁部的內周面，藉此，能將固定有硏 磨墊的輔助板主體在保持對旋轉定盤的上面大致平行的狀 態下進行重合。於是，伴隨利用嵌合周壁部之對輔助板主 體的補強效果，防止硏磨墊或輔助板主體的撓曲或傾斜， 可有效地實現高精度地將輔助板主體和硏磨墊重合、密貼 於旋轉定盤的上面的穩定支承狀態。 (4) 可根據嵌合周壁部對旋轉定盤的外嵌結構，不僅將 嵌合周壁部，進而將固定於其上的硏磨墊容易且正確地對 旋轉定盤對中，進行安裝。 -8- 201143974 (5 )如在上述（丨）〜（2)中記載的那樣，可防止硏磨 損傷，並且如在上述（3)〜（4)中記載的那樣，可以正確 位精度’快速地使硏磨墊對旋轉定盤裝卸，其結果是 除了因進行硏磨墊的裝卸等的作業而使高價的硏磨設 稼働時間受到不必要的限制的情況，可達成硏磨設備 働效率的提高，進而達成基板的生產效率（硏磨作業$ 的提高。 (6)作爲上述（1)〜（5)的相乘效果，由於還可解決 在硏磨墊的再利用時的問題，故即使沒有特別的熟練 識，仍能以實用水準實現硏磨墊的再利用。即，例如 切換基板的種類等時，再利用暫時從旋轉定盤取下的 墊，或爲了作爲劣化對策的在另一加工裝置進行表面 等的再加工而在將從旋轉定盤暫時取下的硏磨墊再加 再利用等，也可按照實用化水準進行硏究。 此外，在本形式中，“輔助板主體”係支承硏磨 只要是滿足除了利用硏磨機的硏磨加工以外，還有在 墊表面上的修整、清掃、再開槽等的各種處理時所要 強度或剛性、形狀穩定性和精度即可，其材質或壁厚 沒有受到限定。特別是’輔助板主體並非以其單體負 磨墊的支承強度或剛性等’例如在硏磨加工時係重合 磨機的旋轉定盤上使用’藉此’利用旋轉定盤支承內 所以單體的強度或剛性未被要求到那種程度。於是’ 不銹鋼等的金屬以外’合成樹脂或纖維強化樹脂等亦 墊的 的對 ，消 備的 的稼 欠率） 例如 或知 ，在 硏磨 開槽 工後 墊， 硏磨 求的 尺寸 擔硏 於硏 面， 除了 可用 -9 - 201143974 作輔助板主體的形成材料。特別是，合成樹脂製的輔助板 主體與金屬製者相比較，重量輕、加工或處理容易，例如 聚碳酸酯等具有厚度尺寸精度的穩定性或對溫度變化的低 變形特性優良的優點。尤其是最好，輔助板主體具有大於 硏磨墊的剛性。 還有’ “輔助板主體”在旋轉定盤的上面，只要覆蓋 至少硏磨墊的放置區域即可，不必涵蓋全體地完全覆蓋旋 轉.定盤的上面。具體來說，在輔助板主體中，例如，在硏 磨墊的放置區域，離開外周側的部分以適當的尺寸形狀形 成缺口或貫通窗等。 另外’在本形式中，“嵌合周壁部”可與輔助板主體 一體形成，亦可單獨形成，之後固定於輔助板主體。嵌合 周壁部也可與輔助板主體相同，採用各種材質。特別是， 嵌合周壁部並未要求輔助板主體那種程度的尺寸精度，例 如，藉由在周方向或向下方的突出方向上多個構件所組合 的分割結構，來構成嵌合周壁部等也是可能的。 此外’由於“嵌合周壁部”只要是可發揮對輔助板主 體的既定的補強效果，與對旋轉定盤的既定的定位效果即 可，故未必要涵蓋輔助板主體的全周地連續形成。具體來 說，例如，也可在輔助板主體的外周緣部，以在周方向上 相互隔開所形成之斷開構造來形成嵌合周壁部。另外，還 可形成形狀爲部分地不同的嵌合周壁部。 -10- 201143974 不過，本形式的硏磨墊用輔助板，例如，也可利用黏 接膠帶而將輔助板主體固定於硏磨機的旋轉定盤’或將輔 助板主體以負壓吸引固定於硏磨機的旋轉定盤。特別是， 本的硏磨墊用輔助板，由於利用設置於外周緣部的嵌 合周壁部的補強作用，發揮優良的強度或形狀穩定性，故 即使利用黏接膠帶或負壓吸引來固定於旋轉定盤，仍可有 效地避免在黏接膠帶的剝離時的硏磨墊的損傷，或者因負 壓吸引孔而使部分的硏磨墊變形等的問題，可在確保硏磨 墊對旋轉定盤的固定力的同時，容易地達成硏磨墊對旋轉 定盤的裝卸。 此外，在利用黏接膠帶將輔助板主體固定於硏磨機的 旋轉定盤的情況，較佳爲具有比硏磨墊對輔助板主體之利 用黏接膠帶等所產生的固定力小的固定力（單位面積的固 定力藉此，使得硏磨墊用輔助板容易從旋轉定盤取下。 此時，即使輔助板主體對旋轉定盤的固定力小，仍可將輔 助板主體對旋轉定盤的固定面積設定得較大（與硏磨墊相 對輔助板主體的固定面積相比較），或者一倂發揮由嵌合周 壁部所產生之對旋轉定盤的定位作用或根據需要，可一併 採用用於將硏磨墊用輔助板固定於旋轉定盤的另一固定手 段等’故能以充分的固定力，將硏磨墊用輔助板安裝固定 於旋轉定盤上。 在這裏，本發明的第2形式，在上述第1形式的硏磨 墊用輔助板中設置固定手段，其將上述輔助扳主體和上述 -11- 201143974 嵌合周壁部的至少一者以可解除的方式固定於上述旋轉定 盤。 ΓΠΤ 另外，作爲輔助板主體對旋轉定盤的固定手段，例如， 除了上述的黏接膠帶以外’還可採用利用負壓空氣等的負 壓吸引，或者利用永久磁鐵或電磁鐵的磁力吸引等。另外， 作爲嵌合周壁部對旋轉定盤的固定手段，例如，可採用後 述的第3形式所記載的固定螺栓等。 此外，在本形式中’也可藉由將硏磨機對旋轉定盤的 固定手段設置於嵌合周壁部，將輔助板主體對旋轉定盤之 利用固定手段所產生的固定力設定得較小，或不設置輔助 板主體對旋轉定盤的固定手段。在這裏，嵌合周壁部，與 輔助板主體相比較，可在幾乎不受到形狀或尺寸精度等的 限制下，採用各種固定手段，可以大的設計自由度，採用 發揮大的固定強度的固定手段或固定/解除的作業性優良 的固定手段等。特別是，與輔助板主體相比較，將強度大 的嵌合周壁部固定於旋轉定盤，經由該嵌合周壁部，對輔 助板主體的外周緣作用約束力（固定力），藉此，可涵蓋輔 助板主體的全體地，對旋轉定盤有效地作用大的固定力。 此外，本發明的第3形式，在上述第2形式的硏磨墊 用輔助板中，上述固定手段係構成爲包括多根固定用螺 栓，該多根固定用螺栓係在周上的多個部位，安裝於上述 嵌合周壁部，該固定用螺栓的擰入力作爲固定力而作用於 上述旋轉定盤的外周面上。 -12- 201143974 在本形式中，可擰入各固定用螺栓，將硏磨墊用輔助 板固定於旋轉定盤，擰鬆這些固定用螺栓，藉此，可解除 硏磨墊用輔助板對旋轉定盤的固定。另外，也可利用多根 固定用螺栓，謀求硏磨墊用輔助板對旋轉定盤的對中精度 的進一步的提高。例如，也可預先規定全部的固定用螺栓 的擰入端，在將它們擰入到擰入端的狀態，以使硏磨墊用 輔助板正確地對旋轉定盤對中的方式設定。當然，也可任 意地調節多個固定用螺栓的擰入量，藉由該擰入量的調節 操作，將硏磨墊用輔助板適宜地對旋轉定盤對中。另外， 爲了有效地獲得對旋轉定盤的固定力，並且有效地獲得硏 磨墊用輔助板對旋轉定盤的對中作用，最好是，多根固定 用螺栓係在嵌合周壁部的周方向上，等間距地設置。 但是’本形式的固定用螺栓，只要是其擰入力係作爲 硏磨墊用輔助板對旋轉定盤的外周面的固定力而施加即 可。具體來說，可採用例如，從嵌合周壁部的外周面側（朝 向旋轉定盤的外周面），在軸直角方向上貫通而螺合，其前 端面與旋轉定盤的外周面抵接的多根固定用螺栓。另外， 也可採用例如，在軸方向上或軸直角方向上貫通、插穿嵌 合周壁部，其前端部分對旋轉定盤或和旋轉定盤成一體的 構件螺接的固定用螺栓等（具體來說，例如後述的實施形式 的第5圖所示）。 此外’也可這樣形成’即，固定用螺栓，例如，在旋 轉定盤的外周面上，在軸方向上將緊固按壓構件重合於嵌 -13- 201143974 合周壁部上，並且對嵌合周壁部（與旋轉定盤的旋轉軸平行 地），在軸方向上將固定螺栓插穿’而使其與緊固按壓構件 螺合，藉此，使該固定螺栓的緊固力作用在介於這些嵌合 周壁部和緊固按壓構件之間的橡膠等的彈性材，在軸方向 上使該彈性材壓縮變形，使該彈性材從嵌合周壁部朝向內 周側突出，與旋轉定盤的外周面抵接而按壓，藉此，發揮 硏磨墊用輔助板對旋轉定盤的固定力。另外，如此一來， 在將緊固螺栓的緊固力經由彈性材，用作對旋轉定盤的固 定力的情況下，也可將彈性材用作後述的本發明的第4形 式所記載的密封構件。 還有，本發明的第4形式，在上述第1〜第3任意一 個形式的硏磨墊用輔助板中，設置具有彈性的密封構件， 其以壓縮狀態介於上述嵌合周壁部和上述旋轉定盤的外周 面之間。 在本形式中，亦可藉由使密封構件壓縮而介於嵌合周 壁部和旋轉定盤的軸直角方向對向面間，例如，基於密封 構件的彈性按壓力和摩擦力，來獲得硏磨墊用輔助板對旋 轉定盤的固定力。另外’例如，亦可藉由在周上的多個部 位或涵蓋全周地，將密封構件的彈性按壓力作用在嵌合周 壁部和旋轉定盤之間，利用彈性按壓力，進行硏磨墊用輔 助板對旋轉定盤的對中。此外，例如，在將嵌合周壁部在 嵌合方向上強烈地對旋轉定盤按壓而安裝的情況下，亦只 要巧妙地利用密封構件的按壓力和摩擦力，便可使其保持 -14- 201143974 在將嵌合周壁部在嵌合方向上對旋轉定盤壓入的位置（在 該狀態下，不須要將固定螺栓加以緊固等之特別作業）。 此外，本發明的第5形式，係在上述第4形式的硏磨 墊用輔助板中，上述嵌合周壁部和上述密封構件，係涵蓋 上述旋轉定盤的全周地配置，使得該環狀周壁部和該旋轉 定盤之間被涵蓋全周地密封，並且形成使該旋轉定盤和上 述輔助板主體之間的內部區域連通至外部空間的抽氣用 孔。 在本形式中，藉由配置密封構件件，可防止異物進入 到旋轉定盤和輔助板主體的對向面間。另外，藉由該密封 構件，能實質地使旋轉定盤的外周面和嵌合周壁部的內周 面的對向面間的徑方向間隙消失，故可以更高精度地發揮 嵌合周壁部對旋轉定盤的對中作用等。 還有，在本形式中，在旋轉定盤的外周面和嵌合周壁 部的內周面的對向面間，涵蓋其全周地，使密封構件的彈 性作用在徑方向上，因此作爲彈性涵蓋全周的合力，自動 地且高精度地發揮嵌合周壁部對旋轉定盤的，進而硏磨用 輔助板的對中作用。並且，藉由密封構件的彈性，即使是 在密封構件隨著使用而疲乏的情況下，仍可長期穩定地發 揮所需的密封性能或對中性能。 此外，在本形式中，能藉由與涵蓋全周的密封構件合 倂地，採用使旋轉定盤和輔助板主體之間的內部區域連通 至外部空間的抽氣用孔，來通過上述抽氣用孔，根據需要 -15- 201143974 而適當地將被密封構件密封之內部區域的完全封閉狀態解 除。於是，例如，在將硏磨墊用輔助板安裝於旋轉定盤時’ 藉由將抽氣用孔開放著，可避免由封閉於上述內部區域的 空氣所引起的回彈（spring back)的現象’可容易使旋轉 定盤和輔助板主體密貼（不會受到由封閉於內部區域的空 氣所引起的不良影響）。另外，最好是在該抽氣用孔設置可 開閉的蓋體，藉由蓋體，在不需要抽氣用孔的狀況下將其 閉塞，藉此，可防止異物從外部侵入抽氣用孔。 此外，本發明的第6形式，係在上述第4或第5形式 的硏磨墊用輔助板中，使得上述旋轉定盤和載置於其上的 上述輔助板主體之間的內部區域，利用上述密封構件予以 氣密地密封，並且形成可從外部向該內部區域供給排放壓 力流體的壓力流體通路。 在本形式中，可將旋轉定盤和載置於其上的輔助板主 體之間的內部區域對外部空間密封。於是，利用作用於內 部區域的壓力流體（例如，正壓或者負壓的空氣或惰性氣體 等）的壓力，可容易而有效地進行輔助板主體對旋轉定盤的 固定和脫離。 例如，本發明的第7形式，係在第6形式的硏磨墊用 輔助板中’以可連接的方式設置對其內部區域施加負壓的 負壓源。藉此’也可使輔助板主體的內面積極地對旋轉定 盤的上面密貼而獲得大的固定強度，並且以具有高度平坦 度的旋轉定盤的上面使輔助板主體的表面的平滑精度提 -16- 201143974 高，謀求硏磨墊的支承面的精度提高。特別是，在將均作 成平坦面的旋轉定盤的上面和輔助板主體的內面重合時， 同時對內部區域作用負壓，藉此，還可容易而有效地防止 該兩個面間的空氣的殘留。另外，在本發明的第6和第7 形式中，也可將內部區域向大氣開放，或積極地將正壓作 用於內部區域，藉此協助將輔助板主體從旋轉定盤脫離而 使作業容易。 還有，本發明的第8形式，係上述第1〜7中的任何一 項形式的硏磨墊用輔助板，使得上述輔助板主體在其內面 側具備有緩衝層，該緩衝層重合於上述旋轉定盤上。 在本形式中，可基於經由輔助板主體而作用於硏磨墊 的緩衝層的彈性，調節硏磨墊的支承特性。即，可藉由調 節緩衝層的彈性或輔助板主體的強度和剛性，調節由旋轉 定盤所產生之硏磨墊的支承特性，藉此，可謀求例如由硏 磨墊所產生之硏磨效率的面內均勻性的提高等。 特別是，爲了將由硏磨墊所產生之硏磨效率在硏磨墊 的整面上均勻化的目的，過去以來提供將緩衝層一體形成 於硏磨墊內面的2層式的硏磨墊。在這裏，在本形式中， 即使不特地使用硏磨墊中之緩衝層’也可獲得比1層式的 硏磨墊優良的硏磨效率的面內均勻性。或者，在.使用2層 式的硏磨墊時，藉由設置於輔助板主體的內面的緩衝層， 來補充設置於硏磨墊的緩衝層’以謀求由緩衝層所產生之 效果的進一步持續，可藉以實現再利用硏磨墊時的硏磨特 性的長期穩定化。 -17- 201143974 此外，本發明的第9形式，係在上述第1〜8中的任何 一項的形式的硏磨墊用輔助板中，設置密貼層，其在重合 有上述輔助板主體的上述旋轉定盤的上面擴展，使在該旋 轉定盤和載置於其上的上述輔助板主體的重合面間的密貼 性提高。 在本形式中，作爲密貼層，採用例如黏接膠帶，藉此’ 可有效地獲得輔助板主體對旋轉定盤的固定力。特別是’ 輔助板主體的面積大於硏磨墊，故可將例如黏接膠帶大型 化，藉此，也可謀求固定力的進一步的提高，或將黏接膠 帶中之每單位面積的黏接力設定成小的而容易剝離，謀求 脫離作業性的提高。另外，由黏接膠帶所固定的輔助板主 體，在上述第8形式中具備有緩衝層的情況下，被當作構 成輔助板主體的緩衝層》 另外，作爲密貼層，例如，也可採用具有彈性的膠帶 或薄膜、板（矽板等），或採用塗敷蠟等的黏性材料或膠狀 物質。藉由採用這樣的彈性薄層或塗敷層，可使輔助板主 體和旋轉定盤的密貼性提高，防止兩者間的空氣殘留，可 進一步使輔助板主體之利用旋轉定盤的支承和補強的效果 提高。 再者，在上述第8形式中輔助板主體在內面具有緩衝 層的情況下’作爲上述密貼層，例如，也可藉由使水等的 液體含在緩衝層’將緩衝層作爲密貼層來利用。總之，在 緩衝層爲具有連續的內部氣泡的多孔質材的情況下，也可 -18- 201143974 積極地利用它，以謀求輔助板主體對旋轉定盤的密貼性的 提高。 此外’本發明的第1 〇形式，在上述第1〜9中的任何 一項的形式的硏磨墊用輔助板中，將起重手段設置於該嵌 合周壁部的周上的多個部位，該起重手段使上述嵌合周壁 部之對上述旋轉定盤的嵌合方向的位置調節力對該嵌合周 壁部作用。 在本形式中，可在利用起重手段，例如將硏磨墊用輔 助板安裝於旋轉定盤時’將嵌合周壁部朝旋轉定盤的嵌入 量’涵蓋全周地加以調節’同時一邊一點一點地維持例如 平行度一邊進行作業。另外’例如’在從旋轉定盤取下硏 磨墊用輔助板時’可將由起重手段所產生的力，作用在將 嵌合周壁部從旋轉定盤脫離的方向上，使嵌合周壁部從旋 轉定盤一點一點地’ 一邊維持例如平行度一邊脫離。如此 一來，藉由使用起重手段，可在避免特別是因硏磨墊用輔 助板對旋轉定盤之大的傾斜所造成的卡咬或飽掛的同時穩 定而容易地進行硏磨墊用輔助板對旋轉定盤的安裝和取 下。 還有’本發明的第11形式，在上述第1〇形式的硏磨 墊用輔助板’上述起重手段係在周上的多個部位 '在上述 嵌合方向上對上述嵌合周壁部螺合，各前端部係藉由抵接 至上述硏磨機側的多根起重螺栓（jack bolt )構成。 -19- £ 201143974 在本形式中，上述起重手段可藉由螺合至嵌合周壁部 的螺栓，以簡單的結構而實現。特別是，起重螺栓係藉由 其螺紋槽的引導’發揮倍力作用，因此，即使是以黏接膠 帶等將輔助板主體對旋轉定盤牢固地固定的情況，仍可以 小的作業力，容易地將輔助板主體從旋轉定盤剝離、取下。 此外，本發明的第12形式，爲上述第丨〜^中的任何 一項形式的硏磨墊用輔助板，對上述輔助板主體的上述墊 支承面重合而固定有上述硏磨墊。還有，硏磨墊的固定， 可採用例如過去以來用於將硏磨墊對旋轉定盤固定的黏接 膠帶等。在固定於輔助板主體的狀態處理硏磨墊，藉此， 不僅在將硏磨墊對旋轉定盤裝卸時，而且也在硏磨墊的移 動或保管等時，可有效地防止硏磨墊的損傷。 另外，本發明的第13形式，爲上述第12形式的硏磨 墊用輔助板，在上述硏磨墊的外周緣部中，部分地設置未 對上述輔助板主體的上述墊支承面予以固定的非固定部。 藉由設置這樣的非固定部，可提高將硏磨墊從硏磨墊用輔 助板剝離時的作業性。於是，例如，即使在經過適當的再 利用次數之後廢棄硏磨墊的情況下，仍容易將硏磨墊剝 離，再利用輔助板主體和嵌合周壁部。 再者，爲了解決如上述的課題而提出的硏磨墊的再生 方法的本發明的特徵在於，使用上述第12或13形式的硏 磨墊用輔助板，在上述硏磨墊因使用而磨損的場合，在仍 安裝於該硏磨墊用輔助板的狀態下對硏磨墊的表面施加再 生加工。 -20- 201143974 按照這樣的本發明方法，即使在對硏磨墊施加再生加 工時’仍持續地發揮由固定於內面的硏磨墊用輔助板所產 生的補強效果’因此’有效地防止硏磨墊的損傷，可實現 高精度的再生加工。 另外’最好’在上述硏磨墊的再生方法中，在上述硏 磨墊的表面設置同心圓狀的槽，在上述再生加工時，去除 進入這些槽中的附著物。 此外’在去除進入槽的附著物時，也可進行吹拂壓縮 空氣或用刷子掃出等的處理。特別是最好，例如採用下述 的方法’其中’使用具備具有與預先形成的槽相對應的間 距和尺寸的多個齒的梳狀再生加工具，將該多個齒插入各 槽，同時沿著槽使該多個齒移動，將槽內的附著物掃出， 將其去除。 還有’本發明的特徵還在於一種藉由使用根據本發明 的特定結構的硏磨墊用輔助板來硏磨的基板製造方法，其 中，將上述第12或13形式的硏磨墊用輔助板安裝於硏磨 機的旋轉定盤’將硏磨對象物的基板硏磨加工、製造。於 是’按照這樣的基板製造方法，以總體價格低（因硏磨墊的 再生使用等）’並且優良的加工效率（因硏磨機的稼働率提 高等）’進行所需的硏磨加工，可有利地製造經硏磨的基板。 [發明的效果] 如上所述’按照本發明’可在防止硏磨墊損傷的同時， 以優良的作業性將硏磨墊對旋轉定盤裝卸，其結果是，沒 -2 1- 201143974 磨進 用 硏， 實 的高 以 格提 可 價的。還 高率高’ 制效ii用 限働 g 利 地稼}再 要的率的 必備效墊 不設罾磨 而磨^硏 業硏磨對 作成(W針 的達率， 等可效是 卸，產果 裝間生結 的時的其 墊働板’。 磨稼基是現 硏的成於實 因備達 準 有設而 水 【實施方式】 [用以實施發明的形式] 下面，一邊參照圖式，一邊對本發明的實施形式進行 說明。首先，第1圖〜第3圖表示作爲本發明的一個實施 形式的硏磨墊用輔助板10。該硏磨墊用輔助板10係安裝 於眾所周知的硏磨機的旋轉定盤12使用。 具體來說，硏磨墊用輔助板10具備具有薄壁的圓形平 板狀的輔助板主體14，具有均作成平坦的表面（外面）14a 和內面（下面）1 4b。該輔助板主體1 4最好利用不銹鋼等的 金屬板或聚碳酸酯等的合成樹脂形成。另外，輔助板主體 1 4的外徑尺寸係與所安裝的旋轉定盤1 2的外徑尺寸相同 或比其稍大。於是，藉由將硏磨墊用輔助板10安裝於旋轉 定盤12，輔助板主體14係重合於旋轉定盤12的上面16 而載置。藉此使得旋轉定盤12的上面16的整體被輔助板 主體14覆蓋。 另外，在輔助板主體14的外周緣部，一體地形成在周 方向上延伸的嵌合周壁部18。該嵌合周壁部18以壁厚大 於輔助板主體1 4的塊狀剖面（在本實施形式中爲矩形剖面） -22- 201143974 在周方向上延伸’在本實施形式中，呈現涵蓋周方向的全 周地連續延伸的圓環形狀。另外，嵌合周壁部18也與輔助 板主體14相同’除了不銹鋼等的金屬材以外，可藉由合成 樹脂材等形成。特別是在本實施形式中’對輔助板主體14 的外周緣部一體形成嵌合周壁部i8。 嵌合周壁部18 ’在將硏磨墊用輔助板1〇安裝於旋轉 定盤12，將輔助板主體14重合於旋轉定盤12的上面16 時，從輔助板主體14朝向下方，沿旋轉定盤12的外周面 延伸而出。特別是，在本實施形式中，嵌合周壁部18的內 周面20呈現圓筒形狀，該內周面20，係對旋轉定盤12的 外周面22嵌合，相互接觸或以些微的間隙隔開地設置。另 外，在旋轉定盤12的外周面22和嵌合周壁部18的內周面 2 0之間，形成適合的間隙，藉此，硏磨墊用輔助板容易對 旋轉定盤12裝卸。另外，雖未圖示，但對嵌合周壁部18 的內周面20的下方的開口端緣部，施加朝向下方而逐漸張 開的錐面或倒角，藉此，可謀求提高將嵌合周壁部18對旋 轉定盤12進行嵌合、安裝的作業性。 此外，在輔助板主體14的表面14a，重合、安裝硏磨 墊24。該硏磨墊24可採用過去以來公知的各種的硏磨墊。 另外，該硏磨墊24的內面，係利用過去公知的黏接膠帶 25或適當的黏接劑等而對輔助板主體14的表面14a固定。 此外，硏磨墊24的外徑尺寸，一般是定爲規格値，但是在 許多的情況，則設定成比所安裝的旋轉定盤1 2的上面1 6 -23- 201143974 的外徑尺寸還小。在本實施形式中，例如，亦可藉由將輔 助板主體14的表面14a定爲比旋轉定盤12還大的外徑尺 寸，來採用、安裝與旋轉定盤12的外徑尺寸略同或較大的 外徑尺寸的硏磨墊24。 即，藉由將硏磨墊用輔助板10安裝於旋轉定盤12， 將輔助板主體14重合於旋轉定盤12的上面16，來使固定 於輔助板主體14的表面14a的硏磨墊24經由輔助板主體 14，而載置於旋轉定盤12的上面16，在固定狀態下安置 (set)。於是，藉由旋轉定盤12之繞著中心軸的旋轉動作， 來使以對中方式安裝於旋轉定盤12的硏磨墊24也同時地 旋轉，進行對未圖示的基板之硏磨加工。 此時’例如，如第4圖所示的那樣，可在旋轉定盤1 2 的上面16和輔助板主體14之間，設置適當的緩衝層26。 另外，作爲該緩衝層26，可適合地採用藉由例如發泡而賦 予某種程度的壓縮性的樹脂片或彈性體片、橡膠片等。緩 衝層26，爲了防止輔助板主體14中之局部變形，而形成 爲以至少涵蓋硏磨墊24的固定區域的整體的尺寸，最好是 涵蓋輔助板主體14的內面14b的整體地以一定厚度存在。 藉由設置這樣的緩衝層26，在利用硏磨墊24硏磨加 工時，可謀求對基板的硏磨效率涵蓋整面的均勻化。附帶 地’在本發明人進行的實驗中，確認了關於對300mm的基 板表面氧化膜的硏磨效率的面內均勻性，在硏磨開始初期 和8小時後的任何一者，與沒有設置緩衝層26的情況相比 -24- 201143974 較，藉由設置緩衝層26 ’可達成l〇%的提升。另外’在本 發明人進行的另一實驗確認了’在使用市售之將緩衝層— 體形成於內面的雙重結構的硏磨墊（例如’ Nitta Haas公司 生產的IC1400(商品名）），並且未在輔助板主體14的內面 14b設置緩衝層的情況下’與每分鐘硏磨量的面內變異程 度大約爲1 000埃相比較，藉由在輔助板主體14的內面14b 設置緩衝層2 6，可將每分鐘硏磨量的面內變異程度抑制到 幾百埃程度。 另外，在進行硏磨加工時’固定有硏磨墊24的硏磨墊 用輔助板10，其嵌合周壁部18被嵌合於旋轉定盤12的外 周面，因此，可在硏磨加工時，有效地防止硏磨墊用輔助 板10，進而硏磨墊24從旋轉定盤12脫落的不良情形。 此外，硏磨墊用輔助板10，也可基於在例如嵌合周壁 部18對旋轉定盤12嵌合時的摩擦力等來對旋轉定盤12固 定，但是，最好是，採用特別的固定手段。作爲該固定手 段，也可採用例如黏接膠帶或黏接劑等，但是，在第1~3 圖所示的本實施形式中，如第5圖所示的那樣，可採用固 定螺栓28。 該固定螺栓28，係在嵌合周壁部18中，在周上的多 個部位（最好是位於等分的3個部位以上），穿過分別在軸 方向上貫通所形成的螺栓插通孔30而安裝。另外，固定螺 栓28的頭部’被收納於形成在嵌合周壁部18的收納凹部 32內，藉此，可防止從安裝有硏磨墊24的輔助板主體μ 的表面1 4a突出。 -25- 201143974 然後，穿過螺栓插通孔30的固定螺栓28的前端（下端） 均對形成於旋轉定盤12的螺栓孔32螺合，藉此，嵌合周 壁部18緊固於旋轉定盤12，通過螺栓而固定。另外，在 第5圖中，爲了有利地確保輔助板主體14的整面對旋轉定 盤1 2的上面1 6的密貼性，並且有效地確保嵌合周壁部！ 8 對旋轉定盤12的利用固定螺栓28的固定力，最好在嵌合 周壁部18的軸方向下面和旋轉定盤12的軸方向對向面 間，按照即使是在固定螺栓2 8的緊固狀態下仍殘留著些許 的間隙的方式設置，根據需要，使用彈簧墊圈（s p r i n g washer )等 ° 另外’就作爲將嵌合周壁部18對旋轉定盤12加以固 定的固定手段的固定螺栓而言，除了如上述之在嵌合周壁 部18的軸方向上穿過，對旋轉定盤12、或被固定於旋轉 定盤12而一體地旋轉驅動的另一構件螺合的固定螺栓28 以外，還可採用例如第6圖所示的那樣，在軸直角方向上 對嵌合周壁部18螺合的固定螺栓34。 即，在第6圖所示的另一實施形式中，對嵌合周壁部 18，在周上的多個部位中形成有在軸直角方向上貫通的螺 紋孔3 6 ’在這些螺紋孔3 6中，分別從外周側擰入固定螺 栓34。於是，各固定螺栓34的前端部被抵接、按壓於旋 轉定盤12的外周面，藉由多個固定螺栓34協同作用，基 於軸直角方向的緊固力的固定力，作用於嵌合周壁部18和 旋轉定盤1 2之間。 -26- 201143974 如該第6圖所示的那樣，如果採用在水平方向上所擰 入的多根固定螺栓34,則在與旋轉定盤12的外徑相比較， 將嵌合周壁部18的內徑按照既定量增加，允許嵌合周壁部 18對旋轉定盤12的軸直角方向的相對位移的狀態下，可 藉由相互調節該多根固定螺栓34的擰入量，來調節硏磨墊 用輔助板對旋轉定盤12之在軸直角方向上的相對對位（對 中等）。另外，在採用這樣的多根固定螺栓34的場合，利 用刻記號等方式設定各固定螺栓34對螺紋孔36的擰入位 置，藉此，還可更加容易地進行硏磨墊用輔助板10對旋轉 定盤安裝時的對中。 此外，在第7圖所示的另一實施形式中，安裝作爲密 封構件的〇型環38，其由在嵌合周壁部18的內周面和旋 轉定盤12的外周面的徑方向對向面間、涵蓋周方向的全周 地連續延伸的彈性材所形成。另外，在本實施形式中，在 嵌合周壁部18的內周面形成安裝用的周槽39，在該周槽 39中嵌入0型環38的外周緣部，藉此進行定位安裝。藉 由採用〇型環38,可將嵌合周壁部18和旋轉定盤12的對 向面間加以密封。 特別是在本實施形式中，可將包括支承硏磨墊24的輔 助板主體14和旋轉定盤12的重合對向面間而存在的內部 區域40 ’與外部空間遮斷而密封。藉此，有效地防止在安 裝等時，異物侵入上述內部區域4〇，輔助板主體14和旋 轉定盤1 2的密接性降低等的問題。 -27- 201143974 並且，由於Ο型環3 8，係涵蓋全周地設置，故可基於 〇型環3 8的彈性，自動地進行嵌合周壁部1 8對旋轉定盤 12的對中。 還有，作爲密封構件，代替上述Ο型環3 8，如作爲另 一實施形式之第8圖所示的那樣，也可採用彈性材的環狀 彈性體42。在本實施形式中，係從下方將作用爲緊固按壓 構件（在本實施形式中，具有涵蓋周方向的全周地連續的圓 環狀）的環狀按壓構件44，對嵌合周壁部18重合。於是， 在該嵌合周壁部18和環狀按壓構件44的軸方向對向面 間，係配置成夾著將內周緣部涵蓋周方向的全周地延伸的 環狀彈性體42。 此外’在該嵌合周壁部18和環狀按壓構件44，在周 上的多個部位中，按照在軸方向上貫通的方式安裝緊固螺 栓46。該緊固螺栓46的頭部係卡扣於嵌合周壁部18的上 面’將嵌合周壁部18在軸方向上鬆動穿插，對環狀按壓構 件44螺合。藉此’利用將緊固螺栓46緊固於環狀按壓構 件44，對嵌合周壁部18和環狀按壓構件44作用重合方向 (軸方向）的按壓力。另外，緊固螺栓46的前端（下端）會從 環狀按壓構件44進一步向下方突出，對該突出前端部分上 螺接有鎖定螺母（雙鎖定螺母，double lock nut)48。該鎖定 螺母48發揮防止環狀按壓構件44從緊固螺栓46脫落的保 全（fail-safe)功能。 -28- 201143974 還有，如第9圖所示的那樣，利用由緊固螺栓4 6和緊 固螺母48的緊固力所產生之軸方向的按壓力，將嵌合周壁 部1 8和環狀按壓構件44在相互接近而予以重合的方向上 加以按壓，對介設於該兩個構件1 8、44之間的環狀彈性體 42施加軸方向的壓縮力。藉此，環狀彈性體42(特別是在 本實施形式中，加上阻止向外周側的彈性鼓出變形）因應在 軸方向上的壓縮量，朝徑方向內方突出而鼓出變形，其結 果是，環狀彈性體42的內周緣部被按壓於旋轉定盤12的 外周面，藉此，按照流體密封的方式將該部位密封。 特別是在利用這樣的環狀彈性體42的密封結構中，可 藉由調節緊固螺栓4 6的緊固量，調節環狀彈性體4 2對旋 轉定盤12的按壓力，因此，例如，可在對旋轉定盤12裝 卸硏磨墊用輔助板時，解除或減輕環狀彈性體42對旋轉定 盤1 2的抵接’而使作業性提高。總之，也可利用環狀彈性 體42之對旋轉定盤12的抵接力來作爲嵌合周壁部18之對 旋轉定盤12的固定力。 此外’在第1〜3圖所示的本實施形式中，在嵌合周壁 部18的適當位置（參照表不第1圖中的χ_χ剖面的第 圖）’形成在內外貫通而延伸的壓力流體通路（50)。於是， 在該壓力流體通路（50)，以可裝卸的方式連接有空氣壓力 管路’通過空氣壓力管路，可受到來自外部的空氣壓力源 的空氣壓力的作用。藉此’還可例如，在旋轉定盤1 2的上 面1 6和輔助板主體1 4的重合面間施加負壓力，使殘留於 -29- 201143974 這些重合面的空氣積極地吸引，謀求重合面間的密貼性的 提高。或者，在旋轉定盤12的上面16和輔助板主體14的 重合面間施加正壓力，對這些重合面作用隔離力，藉此， 還可使硏磨墊用輔助板1〇從旋轉定盤12的脫離作業性提 高，或防止異物進入重合面間。 特別是在本發明中，最好，在設置這樣的空氣壓力機 構時，採用由上述第7圖所示的〇型環38或第8〜9圖所示 的環狀彈性體4 2等形成的密封構件，劃分出經密封的內部 區域40 ’對該內部區域40作用空氣壓力。具體來說，例 如，如第1 〇圖所示的那樣，在將被如第8〜9圖所示的由環 狀彈性體42形成的密封構件所密封的內部區域4〇劃分的 狀態下，在該內部區域4 0開口的壓力流體通路5 〇係形成 爲在徑方向上貫通嵌合周壁部18。 在該壓力流體通路50中，組裝有單觸連接器（〇ne touch connector) 52，並且該單觸連接器52具備內建閥體 的連接口體56。然後，對該連接口體56連接外部管路58, 藉此，利用單觸連接器52,外部管路58可容易地對壓力 流體通路5〇裝卸（可連接/脫離）。特別是，單觸連接器52 在取下外部管路58時，藉由內建的閥體，將壓力流體通路 50遮斷’將內部區域40保持在密封狀態。 然後’使壓力流體通路5〇通過外部管路58，對負壓 泵或負壓儲壓器（accumulat〇r)等的適當負壓源（未圖示） 連接。此外，也可在外部管路58,根據需要而設置開閉閥 -30- 201143974 或切換閥，並且將外部管路5 8，經由切換閥，有選擇地 負壓源和正壓源（例如，正壓泵或正壓儲壓器等）連接。 在具備作成這樣的結構的壓力流體通路50者中， 如，在將硏磨墊用輔助板10安裝於旋轉定盤12時，將 部管路58連接於連接口體56，對內部區域40施加負壓 藉此，將旋轉定盤12的上面16和輔助板主體14在高度 接狀態下重合，並且在之後，從連接口體5 6取下外部管 58，藉此可在維持內部區域40的負壓狀態的同時，避免 外部管路58所產生之對旋轉定盤12的旋轉作動的不良 響等。 此外，在第11圖中，表示本發明的另一實施形式。即 在本實施形式中，在嵌合周壁部18的周上的多個部位， 裝有作爲起重手段的起重螺栓60。將該起重螺栓60擰 在軸方向上貫穿嵌合周壁部18所形成的貫通螺紋孔62 作成比貫通螺紋孔62還長的腳部軸尺寸。然後，從貫通 紋孔62向下方突出的起重螺栓60的前端係對抵接塊66 觸’該抵觸塊66突設於具備旋轉定盤12的硏磨機主體 的對向部分。因此，調節從嵌合周壁部18向下方突設的 重螺栓60的擰入量，調節從嵌合周壁部18向下方的起 螺栓60的突出量，藉此，可適當調節輔助板主體μ對 轉定盤12的上面丨6之在軸方向上的對向面間距離。 因此’例如，在將硏磨墊用輔助板10安裝於旋轉定 12時’藉由一點一點地擰鬆設置於周上的多個定位螺 -3 1- 對 例 外 密 路 由 影 安 入 螺 抵 64 起 重 旋 盤 栓 201143974 6〇’可容易而以良好的精度維持輔助板主體14的水平 同時對旋轉定盤12的上面16維持平行狀態而使其逐 近。藉此，可將輔助板主體14對旋轉定盤12的上面 定地重合’同時避免部分空氣封入它們的對向面間或 傾斜等的問題，而有利地獲得密貼狀態。 此外’例如，在從旋轉定盤1 2取下硏磨墊用輔 10時’藉由一點一點地擰入設置於周上的多個起重 60’可有效地使離開旋轉定盤12的方向的力對被黏接 轉定盤1 2的上面1 6的輔助板主體作用1 4。藉此，即 利用黏接膠帶等而予以固定的情況下，仍可容易且快 進行使輔助板主體14從旋轉定盤12剝離開的作業。 還有，起重螺栓60的突出前端部所抵接的抵接塊 如上述那樣，除了形成於硏磨機主體64以外，也可 1 2圖所示的那樣，形成作爲突出於旋轉定盤1 2的外 上的抵接突部68。該抵接突部68’係在與周上的各起 栓60相對應的位置，或涵蓋周方向的全周地’在旋轉 12的軸方向下部突出於外周面上而一體形成。 再者，在本發明中，如第13~15圖所示的那樣， 硏磨墊24以密貼狀態對硏磨墊用輔助板1 〇中的輔助 體14的表面14a重合而固定時，最好，在硏磨墊24 周緣部中的至少周上的—個部位’形成非固定部70。 13〜15圖所示的形式中，從嵌合周壁部18的外周面’ 輔助板主體14的表面14a而向徑方向內方延伸’到硏 度， 漸接 16穩 相對 助板 螺栓 於旋 使在 速地 66， 如第 周面 重螺 定盤 在將 板主 的外 在第 朝向 磨墊 -32- 201143974 24的固定區域的外周緣部的凹部72對準該非固定部70而 形成。 藉由形成這樣的凹部72，在剝離硏磨墊24時，作業 者按照將手指或適合的工具鉤掛於硏磨墊24的內面的方 式將其插入，容易作業。並且，在形成有該凹部72的部分， 在硏磨墊24的外周緣部的些微區域，形成沒有利用黏接膠 帶等的固定的部分（非固定部70)，藉此，可從該非固定部 70更加容易地開始硏磨墊24的脫離作業。另外，如在第 13' 14圖中記載的那樣，除了僅在嵌合周壁部18的上端 部分形成凹部72以外，例如，可如在第1 5圖記載的那樣， 按照使嵌合周壁部18的外周緣部，涵蓋軸方向的全長地形 成缺口的方式，形成任意的形狀的凹部72。尤其是，該凹 部72僅形成於嵌合周壁部18或輔助板主體14中的外面， 不在內部貫通，因此，可確保內部區域40的氣密性。另外， 這樣的凹部72也可作爲當將硏磨墊24安裝於輔助板主體 14的表面14a時的抽氣用。 此外，在本發明所採用的硏磨墊2 4沒有特別的限定， 例如，也可任意地採用過去以來公知者。例如，如第1 6圖 所示的那樣，也可採用將在周方向上同心地延伸的多數狀 的槽74形成於表面的硏磨墊。 特別是，在表面形成這樣的槽74的硏磨墊24中，在 硏磨加工時產生的硏磨屑等因進入槽74而嵌入，而變得難 以去除。經本發明人檢討後瞭解到在硏磨墊2 4中，即使槽 -33- 201143974 74的深度尺寸充分地留下，也會因硏磨屑等嵌入槽74 槽74的深度尺寸仍不足，對硏磨性能造成不良影響。 因此，作爲硏磨墊24的再生方法的一個形式，如 1 7〜1 8圖所示的那樣，採用梳狀的再生加工具7 8，其具 具有與形成於硏磨墊24的槽74相對應的間距和尺寸的 個加工用齒76，一邊將該各齒76插入各槽74，一邊使 沿著槽74相對地移動，藉此，有效地以掃出的方式去除 74內的附著物。 另外，再生加工具78中的各齒76的形狀並不限於 式所示的四角形狀，其前端，考慮硏磨墊24的槽74的 狀，可採用圓狀、梯形狀、V字狀等的任意的形狀。另勿 再生加工具78的齒76的數量也可是任意的，例如，也 一次性地獲得全部的槽74。另外，也可在硏磨機上，在 時安裝再生加工具78，將其齒76插入用於硏磨加工的 磨墊24的槽74。 此外，再生加工具78中的各齒76的尺寸也可按照 如比硏磨墊24的槽74的寬度尺寸還小的齒寬尺寸形成 藉此，容易將再生加工具78的齒76對硏磨墊24的槽 進行對位，還可防止硏磨墊24的未預期的損傷等。另夕1 除了如例示的具備鋸齒狀的齒76的再生加工具以外，還 採用將插入硏磨墊24的槽74的線材紮成束的刷狀的再 加工具，或亦可適當地採用具備更積極地從硏磨墊24的 74掃出硏磨屑等的旋轉式的齒的結構的再生加工具等。 而 第 備 多 其 槽 圖 形 可 平 硏 例 » 7 4 可 生 槽 -34- 201143974 如上所述，如果採用作爲本發明的各實施形式的硏磨 墊用輔助板10，便可防止硏磨墊24的損傷，同時將硏磨 墊24以優良的作業性對旋轉定盤12裝卸。另外，其結果 是，硏磨墊的再利用也變得容易，例如，直接在固定於硏 磨墊用輔助板1 〇的狀態下進行硏磨墊加工而可進行再利 用。另外，由於可快速地進行硏磨墊24對旋轉定盤12的 裝卸，故也可有效地確保硏磨裝置的稼働時間。於是，在 半導體基板等的製造步驟，如果可多次地再利用硏磨墊， 便可有助於半導體基板等的製造步驟的大幅度的成本削 減、用於製造硏磨墊的資源的節約、削減廢棄的硏磨墊量 的環保。 但是，在前述的實施形式中，爲了將硏磨墊用輔助板 10固定於旋轉定盤12而具備著固定螺栓28或負壓吸引機 構（5 8等）’但是，例如，也可利用密封構件的彈性，根據 需要而倂用雙面膠帶等的黏接膠帶，藉此將硏磨墊用輔助 板1〇安裝於旋轉定盤12而固定地組裝。 具體來說，例如如第1 9圖所示的那樣，對硏磨墊用輔 助板10的嵌合周壁部18，安裝與上述第7圖相同的0型 環38。另外’在本實施形式中，安裝有〇型環38的周槽 3 9 ’呈與開口寬度相比較朝向裏側寬度尺寸擴大的截面形 狀’比該周槽39的開口寬度尺寸還大的截面徑尺寸的〇 型環38’被以超過其—半的部分嵌入。藉此，〇型環38, 在使一部分從嵌合周壁部18的周槽38的開口部向內周側 -35- 201143974 突出的狀態下，可有效地阻止從周槽38抽出而穩定地嵌 入、保持著。附帶地，與開口寬度相比較在裏側擴大的周 槽3 9 ’例如，可藉由將從開口部所插入的切削工具的斜率 (從開口部插入的方向）加以變更調節，同時進行切削加工 等而形成。 此外，本實施形式的嵌合周壁部1 8，係以如下的分割 結構來形成，該分割結構係在軸方向（圖的上下方向）上將 圓環形狀的分割塊84對輔助板主體14的外周緣部82的下 面重合。另外，在嵌合周壁部18，形成有在外周面開口， 向徑方向內方延伸的抽氣用孔8 8，該抽氣用孔8 8係藉由〇 型環38封閉，藉此，與包括旋轉定盤12的上面和輔助板 主體1 4的重合面間所劃分的內部區域40連通。總之，內 部區域4 0通過抽氣用孔8 8而與外部空間連通。 在作成這樣的結構的硏磨墊用輔助板中，防止在從旋 轉定盤12的上方重合而安裝時，存在於旋轉定盤12和輔 助板主體1 4的對向面間的空氣，被封閉於由0型環3 8所 密封的內部區域40，而可通過抽氣用孔8 8快速地排放到 外部空間。藉此，可使輔助板主體14的內面14b’對旋轉 定盤12的上面16，有效地防止空氣殘留在這兩個面間， 同時快速且穩定地密貼。 接著，在以密貼狀態下重合後，根據基於〇型環3 8 的彈性的抵接力和摩擦力，硏磨墊用輔助板10的嵌合周壁 部18可對旋轉定盤12的外周面，以既定的固定力保持在 -36- 201143974 安裝狀態。另外’在本實施形式中，爲了進一步穩定地獲 得固定力’輔助板主體14和旋轉定盤12的上面係藉由雙 面膠帶（黏接膠帶）或黏接劑等的黏接層90而固定。另外， 最好’在使用硏磨墊24的硏磨加工或對硏磨墊24的再生 加工等時’針對硏磨墊用輔助板10的抽氣用孔88，安裝 覆蓋嵌合周壁部18的外周側開口部的蓋構件91(由第19 圖中的假想線表示）。藉由以該蓋構件91覆蓋抽氣用孔 88，可防止異物侵入抽氣用孔88。 以上，對本發明的實施形式進行了詳細描述，但是， 本發明並不受限於這些實施形式的具體的記載。例如，爲 了進一步使在硏磨墊用輔助板10中對輔助板主體14的補 強效果提高，也可例如，按照從嵌合周壁部1 8向外周側突 出的方式追加地設置在嵌合周壁部18的周上局部地或涵 蓋全周地延伸的補強構件。此外，這樣的補強構件也可按 照從嵌合周壁部18向軸方向下方突出的方式設置，或按照 向軸方向上方突出的方式設置。嵌合周壁部18，從作爲載 置硏磨墊24的墊支承面的表面（14a)的中間部分外移到外 周側，由此，亦可向軸方向上方突出地形成》 另外，硏磨墊用輔助板中的輔助板主體14，只要具備 至少可將硏磨墊涵蓋全面地加以支承的尺寸和形狀即可， 不必一定要涵蓋全面地覆蓋旋轉定盤12的上面16。另外， 硏磨墊用輔助板中的嵌合周壁部18，只要可發揮對旋轉定 盤12的定位作用即可，不必一定要涵蓋周方向的全周地連 續形成。 -37- 201143974 例如，也可採用下述這樣的形式，如第2 0 ~ 2 1圖所示 的那樣，在輔助板主體1 4的外周緣部（在不必支承硏磨墊 的部分中）設置以適當的尺寸加以切口之缺口部94)，而使 旋轉定盤12的上面16部分地露出。或者，也可如第20〜21 圖和第22〜23圖所示的那樣，以在周上被斷開的多個分割 結構96a〜d、98a〜f形成嵌合周壁部18。另外，具有下述 的優點，藉由如這樣將嵌合周壁部18在周上斷開，即使在 外周緣部中，仍可直接目視輔助板主體14對旋轉定盤12 的上面16的重合面，可目視確認輔助板主體14對旋轉定 盤12的安裝狀態。尤其是，缺口部94的數量或尺寸、形 狀並沒有受到限定，嵌合周壁部1 8的各分割部分的形狀或 尺寸，分割數量等均沒有受到限定。在多個缺口部94或嵌 合周壁部1 8的分割部分中，也可設定相互不同的形狀或尺 寸等。 【圖式簡單說明】 第1圖係作爲本發明的一個實施形式的硏磨墊用輔助 板的平面圖。 第2圖係第1圖所示的硏磨墊用輔助板的正面圖。 第3圖係第1圖中的111 -111剖面圖。 第4圖係表示作爲本發明的另一實施形式的硏磨墊用 輔助板，與第3圖相對應的剖面圖。 第5圖係第1圖中的V-V剖面圖。 第6圖係表示作爲本發明的另一實施形式的硏磨墊用 輔助板’與第5圖相對應的剖面圖。 -38- 201143974 第7圖係表示作爲本發明的另一實施形式的硏磨墊用 輔助板’與第3圖相對應的剖面圖。 第8圖係表示作爲本發明的另一實施形式的硏磨墊用 輔助板，與第3圖相對應的剖面圖。 第9圖係表示第8圖所示的硏磨墊用輔助板中的密封 狀態的剖面圖。 第10圖係表示第9圖所示的硏磨墊用輔助板中的負壓 吸引部的剖面圖。 第 π圖係表示作爲本發明的另一實施形式的硏磨墊 用輔助板的剖面圖。 第12圖係表示作爲本發明的另一實施形式的硏磨墊 用輔助板的剖面圖。 第13圖係表示作爲本發明的另一實施形式的硏磨墊 用輔助板的平面圖。 第1 4圖係第1 3圖中的XIV箭向視的說明圖。 第15圖係表示第14圖所示的非固定部的另一形式 例，與第1 4圖相對應的說明圖。 第16圖係表示作爲本發明的另一實施形式的硏磨墊 用輔助板的平面圖。 第17圖係說明第16圖所示的硏磨墊用輔助板中的對 硏磨墊的再生加工用之相當於第16圖中的XV II-XV II剖面 的說明圖。 第18圖係說明第17圖所示的對硏磨墊再生加工的另 一製程用之與第17圖相對應的說明圖。 -39- 201143974 第19圖係表示作爲本發明的另一實施形式的硏磨塾 用輔助板的剖面圖。 第20圖係表示作爲本發明的另一實施形式的硏磨墊 用輔助板的平面圖。 第21圖係第2〇圖所示的硏磨墊用輔助板的正面圖。 第22圖係表示作爲本發明的另一實施形式的硏磨墊 用輔助板的底面圖。 第23圖係第20圖所示的硏磨墊用輔助板的平面圖。 【主要元件符號說明】 10 硏磨墊用輔助板 12 旋轉定盤 14 輔助板主體 14a 表面 14b 內面 16 上面 1 8 嵌合周壁部 20 內周面 22 外周面 24 硏磨墊 26 緩衝層 28 固定螺栓 30 螺栓插通孔 32 螺栓孔 -40- 固定螺栓 螺紋孔 〇型環（密封構件） 內部區域 環狀彈性體（密封構件） 環狀按壓構件 緊固螺栓 鎖定螺母 壓力流體通路 單觸連接器 連接口體 外部管路 起重螺栓 貫通螺紋孔 硏磨機主體 抵接塊 抵接突部 非固定部 凹部 槽 齒 再生加工具 -4 1-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for shutting down a substrate of a workpiece requiring high flatness processing such as a germanium wafer or a semiconductor substrate or glass, and particularly relates to achievable A technique of reusing the honing pad used for the surface of the substrate. [Prior Art] As is well known, at the time of manufacture of a semiconductor, a honing process in which a base surface of a ruthenium wafer, a semiconductor substrate, a glass substrate or the like of a constituent material is planarized is performed. The honing treatment is generally carried out by using a double-sided tape to directly fix a disc honing pad formed of a resin material or the like to a rotary sizing plate of a honing machine, and supplying the honing liquid of the grinding granules while making 硏The sanding pad and the substrate are moved relative to each other to perform honing. Then, as a honing pad for carrying out such honing treatment, it is formed by foaming or unfoamed urethane, etc., as described in JP-A-2002- 1 163 (Patent Document 1). Resin mat. On the honing surface of the honing pad, in many cases, a groove process such as a concentric shape or a radial shape is applied, or a bubble of the foamed resin is opened. However, in the case of honing processing using a honing pad, when the substrate of the image is switched, etc., it is necessary to peel off the honing pad from the rotating platen and replace it with another honing pad. When the honing phase of the substrate or the like is honed, it will be a slewing type of the following shape of the sheet, for example, the honing of the outer surface, the shape, or the like. -4- 201143974 In addition, for example, in the case of re-processing such as re-processing, etc., the honing pad which is deteriorated by honing processing is reworked by surface grooving or the like, for example, for re-use or the like, The honing pad is peeled off from the rotating platen. However, since the thin-walled disk-shaped resin pad is firmly fixed to the rotary platen of the honing device by the adhesive tape, when the honing pad is peeled off from the rotary platen, it is easy to bend the honing pad or Damage such as breakage, wrinkles, rupture, etc. Therefore, due to such damage, there are many problems that, although they have not reached the end of their life, they cannot be used again, and they must be discarded. Further, since the work of peeling off the honing pad from the rotary susceptor while performing the careful operation without damaging it is required to be skilled and careful, there is a problem that a large burden is placed on the operator. Further, since the work of peeling off the honing pad from the rotary susceptor takes a considerable amount of time, there is a problem that it is necessary to stop the honing device of the expensive and expensive equipment for a long time to limit the time of the equipment. In addition, in the Japanese Patent Laid-Open Publication No. 2001-54859 (Patent Document 2), a structure in which a support layer of a flat plate shape is integrally formed on the inner surface of the honing pad is directly formed, and magnetic force or The negative pressure attraction 'adsorbs and holds the support layer on the rotary platen of the honing machine, whereby the honing pad can be easily removed from the rotary platen. However, it is not only difficult to directly form the support layer integrally with the honing pad, but it is still problematic to form the support layer integrally with the honing pad. 201143974 However, in Patent Document 2, although it is exemplified that the honing pad is fixed to the rotating platen by the magnetic force or the negative pressure attraction force, the magnetic force acting on the thin-walled support layer through the thick-walled rotating platen is extremely high. Difficult, and in addition, under vacuum suction, it is difficult to exert a sufficient adsorption force because a seal region that is surely isolated from the external space cannot be formed between the flat-plate-shaped support layer and the rotary platen. Further, in Patent Document 2, a structure in which the inner surface of the support layer is fixed to the rotary fixed plate by the adhesive tape is disclosed, but the support having a thin flat plate shape covering only the inner surface of the honing pad is disclosed. When the body layer is not sufficiently rigid, when the support layer is peeled off from the rotary disk, the same as the honing pad of the single structure, there is a possibility of damage such as bending, breakage, wrinkles, and the like. In addition, in the honing pad of the above-described single-body structure and the honing pad described in Patent Document 2, since they all have a simple disk shape, they are correctly aligned with the rotating platen. The installation of centering (center alignment) is a difficult and troublesome problem. [PRIOR ART DOCUMENT] Patent Document 1: Japanese Patent Laid-Open Publication No. JP-A No. 2002- 1 No. Problem to be Solved The present invention has been made in the context of the above-described circumstances, and aims to provide an auxiliary plate for a honing pad of a novel structure which can ensure the rotation of the honing pad in a sufficient -6-201143974 At the same time of fixing the fixing force of the disk, it is easy to carry out the loading and unloading of the rotating plate by the honing pad, in particular, the damage of the honing pad when the honing pad is removed from the rotating platen is prevented, for example, the honing pad is realized. Reuse is also beneficial. Further, another object of the present invention is to provide a method for regenerating a honing pad using an auxiliary plate for a honing pad to realize regeneration of a honing pad, and a method for manufacturing a substrate which is assisted by using a honing pad The plate is subjected to a honing process to obtain a honed substrate. [Means for Solving the Problem] In order to solve the above-described problems, the first aspect of the present invention relating to the auxiliary pad for the honing pad is an auxiliary plate for the honing pad, which is provided on the upper surface of the rotary shovel placed on the honing machine. The auxiliary plate main body is formed by a middle portion of the surface of the auxiliary plate main body, and a pad supporting surface on which a honing pad for honing a semiconductor substrate or the like is fixed, and a fitting peripheral wall portion is formed at the auxiliary plate main body. The outer peripheral edge portion protrudes downward along the outer peripheral surface of the rotary table of the honing machine, and is fitted to the outer periphery of the rotary platen, thereby detachably attaching the honing pad fixed to the pad support surface Ground the mounting plate. In the auxiliary plate for the honing pad of the present invention, the peripheral wall portion is formed on the outer peripheral edge portion of the auxiliary plate main body, and the special technical effects described in the following (1) to (6) can be exhibited. (1) The honing pad can be attached and detached to the rotary aligner together with the auxiliary plate main body while being fixed to the upper surface (surface) of the auxiliary plate main body. Therefore, even in the case where the honing pad is cleaned or the 201143974 work is removed from the rotating platen, the work can be performed while the honing pad is fixed to the upper surface of the auxiliary plate. (2) By fitting the peripheral wall portion, it is possible to exert an extremely effective reinforcing effect on the auxiliary plate main body. In particular, since the fitting peripheral wall portion is formed on the outer peripheral side of the upper surface of the rotary fixed plate that is separated from the honing machine, it is possible to avoid adverse effects on the machining operation such as honing performed on the rotary fixed plate, and at the same time, Various shapes or sizes form the fitting peripheral wall portion, and an effective reinforcing effect on the auxiliary plate main body can be obtained. Therefore, in the above (1), the operation is performed in a state where the honing pad is fixed to the auxiliary plate main body. Thus, it is needless to say that when the honing pad is attached or detached to the rotary aligning plate, or the honing pad is cleaned or refurbished. In the case of processing, etc., even when the honing pad is transported or stored, the bending or damage of the honing pad can be prevented and maintained in a good state. (3) When the fitting peripheral wall portion is fitted into the rotary fixed plate, the inner peripheral surface of the fitting peripheral wall portion is guided by the outer peripheral surface of the rotary fixed plate, whereby the auxiliary plate main body to which the honing pad is fixed can be held in the pair The upper surface of the rotating fixed plate is superposed in a substantially parallel state. Therefore, with the reinforcing effect on the auxiliary plate main body by the fitting peripheral wall portion, the deflection or inclination of the honing pad or the auxiliary plate main body can be prevented, and the auxiliary plate main body and the honing pad can be effectively overlapped and adhered with high precision. A stable support state on the top of the rotating platen. (4) According to the fitting structure of the fitting peripheral wall portion to the rotating fixed plate, not only the fitting peripheral wall portion but also the honing pad fixed thereto can be easily and accurately aligned with the rotating fixed plate. -8- 201143974 (5) As described in the above (丨) to (2), it is possible to prevent honing damage, and as described in the above (3) to (4), the positional accuracy can be 'fast. The honing pad is attached to and detached from the rotating arbor, and as a result, in addition to the operation of loading and unloading the honing pad, the time for arranging the expensive smashing is unnecessarily restricted, and the efficiency of the honing device can be achieved. In addition, the production efficiency of the substrate is increased (the honing operation is increased by $. (6) As the multiplication effect of the above (1) to (5), it is possible to solve the problem in the reuse of the honing pad, so even The honing pad can be reused at a practical level without special knowledge. For example, when the type of the substrate is switched, for example, the pad temporarily removed from the rotating platen is used, or the other is used as a countermeasure against deterioration. When the processing apparatus reworks the surface or the like and re-uses the honing pad temporarily removed from the rotary slewing plate, it can be inspected according to the practical level. Further, in this form, the "auxiliary plate main body" Supporting honing as long as it is In addition to the honing process by the honing machine, the strength, rigidity, shape stability and precision of the various processes such as dressing, cleaning, re-grooving, etc. on the surface of the pad are required, and the material or wall thickness is not affected. In particular, the 'auxiliary plate body is not supported by the strength or rigidity of the single negative grinding pad, etc.', for example, when the honing process is used on the rotating platen of the re-grinding mill, it is used to support the rotating platen. The strength or rigidity of the monomer is not required to be such a degree. Therefore, the pair of synthetic resin or fiber-reinforced resin other than the metal such as stainless steel, etc. After the slotted work mat, the size of the honing is carried out on the surface, except that -9 - 201143974 can be used as the forming material of the auxiliary plate body. In particular, the main body of the auxiliary resin made of synthetic resin is light in weight, easy to process or handle, and has advantages such as polycarbonate having stability in thickness dimensional accuracy or low deformation characteristics against temperature change. In particular, preferably, the auxiliary plate body has a rigidity greater than that of the honing pad. Also, the "auxiliary plate main body" is on the top of the rotating fixed plate, as long as it covers at least the placement area of the honing pad, and does not have to cover the entire cover completely. The top of the plate. Specifically, in the auxiliary plate main body, for example, in the placement area of the honing pad, the portion away from the outer peripheral side is formed with a notch, a through window, or the like in an appropriate size. Further, in the present embodiment, the "fitting peripheral wall portion" may be integrally formed with the auxiliary plate main body, or may be formed separately, and then fixed to the auxiliary plate main body. The fitting peripheral wall portion can also be made of the same material as the auxiliary plate main body. In particular, the fitting peripheral wall portion does not require the dimensional accuracy of the auxiliary plate main body, and for example, the fitting peripheral wall portion or the like is configured by a divided structure in which a plurality of members are combined in the circumferential direction or the downward protruding direction. It is also possible. Further, the "fitting peripheral wall portion" is a predetermined reinforcing effect for the auxiliary plate main body and a predetermined positioning effect for the rotating platen. Therefore, it is not necessary to continuously form the entire circumference of the auxiliary plate main body. Specifically, for example, the fitting peripheral wall portion may be formed on the outer peripheral edge portion of the auxiliary plate main body with a breaking structure formed by being spaced apart from each other in the circumferential direction. Further, it is also possible to form a fitting peripheral wall portion having a shape which is partially different. -10- 201143974 However, the auxiliary plate for the honing pad of this type may be used, for example, by fixing the auxiliary plate main body to the rotary sizing plate of the honing machine by using an adhesive tape or by suction-fixing the auxiliary plate main body with a vacuum. Rotary setting of the honing machine. In particular, the auxiliary pad for the honing pad exhibits excellent strength or shape stability by the reinforcing action of the fitting peripheral wall portion provided on the outer peripheral edge portion, and therefore is fixed by the adhesive tape or vacuum suction. By rotating the platen, it is still possible to effectively avoid the damage of the honing pad when the adhesive tape is peeled off, or the deformation of a part of the honing pad due to the negative pressure suction hole, and the honing pad can be ensured to be rotated. At the same time as the fixing force of the disk, the loading and unloading of the rotating plate by the honing pad is easily achieved. Further, in the case where the auxiliary plate main body is fixed to the rotary fixed plate of the honing machine by the adhesive tape, it is preferable to have a fixing force smaller than the fixing force by the honing pad to the auxiliary plate main body by the adhesive tape or the like. (The fixing force per unit area is thereby made that the auxiliary plate for the honing pad is easily removed from the rotating platen. At this time, even if the fixing force of the auxiliary plate main body to the rotating fixed plate is small, the auxiliary plate main body can be rotated to the fixed plate. The fixed area is set to be larger (compared to the fixed area of the honing pad relative to the auxiliary plate main body), or the positioning effect on the rotating fixed plate generated by the fitting peripheral wall portion can be utilized or can be used as needed The fixing means for fixing the honing pad to the rotating fixed plate, etc., so that the honing pad can be mounted and fixed to the rotating platen with a sufficient fixing force. Here, the present invention According to a second aspect, the fixing plate for the honing pad of the first aspect is provided with a fixing means for fixing the at least one of the auxiliary trigger body and the fitting peripheral wall portion of the -11-201143974 to the above-mentioned In addition, as a fixing means for rotating the fixed plate as the auxiliary plate main body, for example, in addition to the above-mentioned adhesive tape, it is also possible to employ vacuum suction using negative pressure air or the like, or use a permanent magnet or an electromagnet. In addition, as a fixing means for the rotating fixed platen of the fitting peripheral wall portion, for example, a fixing bolt described in the third aspect to be described later may be employed. Further, in the present embodiment, the honing machine may be used The fixing means for rotating the fixed plate is provided in the fitting peripheral wall portion, and the fixing force generated by the fixing plate main body to the rotating fixed plate by the fixing means is set small, or the fixing means for the auxiliary plate main body to rotate the fixed plate is not provided. Here, the fitting peripheral wall portion can be used with various fixing means, and can have a large degree of design freedom, and a fixing means that exhibits a large fixing strength, can be used without any limitation of shape or dimensional accuracy, etc., compared with the auxiliary plate main body. Or a fixing means that is excellent in workability of fixing or releasing, etc. In particular, the fitting peripheral wall portion having a large strength is fixed as compared with the auxiliary plate main body. By rotating the fixed plate, a binding force (fixing force) acts on the outer peripheral edge of the auxiliary plate main body via the fitting peripheral wall portion, whereby the entire fixing body can be covered, and a large fixing force can be effectively applied to the rotary fixed plate. According to a third aspect of the present invention, in the auxiliary plate for a honing pad of the second aspect, the fixing means is configured to include a plurality of fixing bolts, and the plurality of fixing bolts are attached to a plurality of parts on the circumference. Attached to the fitting peripheral wall portion, the screwing force of the fixing bolt acts as a fixing force on the outer peripheral surface of the rotary disk. -12- 201143974 In this embodiment, each fixing bolt can be screwed into the fixing bolt. The grinding pad is fixed to the rotary plate by the auxiliary plate, and the fixing bolts are loosened, whereby the fixing plate for the honing pad can be released from the fixing plate. Further, a plurality of fixing bolts can be used for honing. The pad uses an auxiliary plate to further improve the centering accuracy of the rotating platen. For example, the screwing-in ends of all the fixing bolts may be predetermined, and they may be screwed into the screw-in end so that the honing pad auxiliary plate is correctly aligned with the rotating platen. Of course, it is also possible to arbitrarily adjust the screwing amount of the plurality of fixing bolts, and by the adjusting operation of the screwing amount, the auxiliary pad for the honing pad is appropriately centered with the rotating platen. Further, in order to effectively obtain the fixing force to the rotary fixed plate and effectively obtain the centering action of the auxiliary plate for the honing pad on the rotary fixed plate, it is preferable that a plurality of fixing bolts are attached to the circumference of the fitting peripheral wall portion. In the direction, set at equal intervals. However, the fixing bolt of the present type may be applied as a fixing force of the auxiliary pad for the honing pad to the outer peripheral surface of the rotating platen as long as the screwing force is applied. Specifically, for example, the outer peripheral surface side of the fitting peripheral wall portion (toward the outer peripheral surface of the rotating fixed plate) can be screwed in the direction perpendicular to the axis, and the distal end surface thereof abuts against the outer peripheral surface of the rotary platen. Multiple fixing bolts. Further, for example, a fixing bolt that penetrates and inserts the fitting peripheral wall portion in the axial direction or the shaft orthogonal direction, and the front end portion is screwed to a member that rotates the fixed plate or the rotating fixed plate may be used (specifically For example, it is shown in FIG. 5 of the embodiment mentioned later. Further, 'the same can be formed', that is, a fixing bolt, for example, on the outer peripheral surface of the rotary fixed plate, the fastening pressing member is superposed on the circumferential wall portion of the inlaid-13-201143974 in the axial direction, and the fitting peripheral wall is fitted a portion (parallel to the rotation axis of the rotary platen), the fixing bolt is inserted through the shaft in the axial direction to be screwed with the fastening pressing member, whereby the fastening force of the fixing bolt acts on these The elastic material such as rubber between the fitting peripheral wall portion and the fastening pressing member compresses and deforms the elastic material in the axial direction, and the elastic material protrudes from the fitting peripheral wall portion toward the inner peripheral side, and the outer periphery of the rotating platen The surface is pressed against and pressed, whereby the fixing force of the honing pad auxiliary plate to the rotating platen is exerted. In addition, when the fastening force of the fastening bolt is used as a fixing force to the rotary fixed plate via the elastic material, the elastic material can be used as the seal described in the fourth aspect of the invention to be described later. member. According to a fourth aspect of the present invention, in the auxiliary plate for an honing pad of any one of the first to third aspects, the sealing member having elasticity is provided in the compressed state between the fitting peripheral wall portion and the rotation. Between the outer peripheral faces of the plate. In this form, it is also possible to obtain a honing between the fitting peripheral wall portion and the opposing direction of the axis of the rotating platen by compressing the sealing member, for example, based on the elastic pressing force and the frictional force of the sealing member. The pad uses the auxiliary plate to fix the fixing force of the plate. In addition, for example, the elastic pressing force of the sealing member may be applied between the fitting peripheral wall portion and the rotating fixed plate by a plurality of portions on the circumference or covering the entire circumference, and the elastic pressing force is used to perform the honing pad. Use the auxiliary plate to align the centering of the rotating plate. Further, for example, when the fitting peripheral wall portion is strongly attached to the rotating fixed plate in the fitting direction, the pressing force and the frictional force of the sealing member can be used to maintain the -14- 201143974 A position in which the fitting peripheral wall portion is pressed in the fitting direction with respect to the rotary fixing plate (in this state, special work such as fastening the fixing bolt is not required). According to a fifth aspect of the invention, in the honing pad auxiliary plate according to the fourth aspect, the fitting peripheral wall portion and the sealing member are disposed over the entire circumference of the rotary fulcrum so that the ring shape is arranged The peripheral wall portion and the rotary platen are sealed to cover the entire circumference, and an air suction hole for connecting the inner region between the rotary plate and the auxiliary plate body to the outer space is formed. In the present form, by arranging the sealing member member, foreign matter can be prevented from entering between the opposing faces of the rotary fixed plate and the auxiliary plate main body. Further, the sealing member can substantially eliminate the radial gap between the outer circumferential surface of the rotary fixed plate and the inner circumferential surface of the fitting peripheral wall portion, so that the fitting peripheral wall portion can be more accurately exhibited. The centering action of the rotating platen, etc. Further, in the present embodiment, the elastic member of the outer peripheral surface of the rotary fixed plate and the inner peripheral surface of the fitting peripheral wall portion covers the entire circumference thereof so that the elastic force of the sealing member acts in the radial direction, so that it is elastic Covering the total force of the whole circumference, the centering of the fitting peripheral wall portion to the rotating fixed plate is automatically and accurately performed, and the centering action of the auxiliary plate for honing is performed. Further, by the elasticity of the sealing member, even when the sealing member is fatigued with use, the desired sealing performance or alignment performance can be stably performed for a long period of time. Further, in the present aspect, it is possible to pass the above-described pumping by means of a suction hole that allows the inner region between the rotary dial and the auxiliary plate main body to communicate with the outer space in conjunction with the sealing member covering the entire circumference. With the hole, the completely closed state of the inner region sealed by the sealing member is appropriately released as needed in -15-201143974. Therefore, for example, when the auxiliary pad for the honing pad is attached to the rotary platen, by opening the suction hole, the spring back caused by the air enclosed in the inner region can be avoided. 'It is easy to make the rotating platen and the auxiliary plate body close to each other (without being adversely affected by air enclosed in the inner region). Further, it is preferable that the cover hole is provided with an openable and closable cover, and the cover body can be closed without requiring an air suction hole, thereby preventing foreign matter from entering the air suction hole from the outside. . According to a sixth aspect of the present invention, in the auxiliary plate for a honing pad according to the fourth or fifth aspect, the inner region between the rotary platen and the auxiliary plate main body placed thereon is used. The sealing member is hermetically sealed and forms a pressure fluid passage that can supply a discharge pressure fluid from the outside to the inner region. In this form, the inner space between the rotating platen and the auxiliary plate body placed thereon is sealed to the outer space. Thus, the fixing and detachment of the rotary plate by the auxiliary plate main body can be easily and efficiently performed by the pressure of the pressure fluid (e.g., positive pressure or negative pressure air or inert gas) acting on the inner region. For example, the seventh aspect of the present invention is a negative pressure source in which a negative pressure is applied to an inner region thereof in a connection form in the honing pad auxiliary plate of the sixth form. Thereby, the inner surface of the auxiliary plate main body can be positively attached to the upper surface of the rotating fixed plate to obtain a large fixing strength, and the smoothness of the surface of the auxiliary plate main body can be improved by the upper surface of the rotating fixed plate having a high degree of flatness. -16- 201143974 High, the accuracy of the support surface of the honing pad is improved. In particular, when the upper surface of the rotary platen, which is formed as a flat surface, coincides with the inner surface of the auxiliary plate main body, a negative pressure is applied to the inner region at the same time, whereby the air between the two faces can be easily and effectively prevented. Residue. Further, in the sixth and seventh aspects of the present invention, the internal region may be opened to the atmosphere, or positive pressure may be actively applied to the internal region, thereby facilitating the detachment of the auxiliary plate main body from the rotary fixed plate to facilitate the work. . According to an eighth aspect of the invention, the auxiliary plate for an honing pad according to any one of the first to seventh aspect, wherein the auxiliary plate main body has a buffer layer on an inner surface side thereof, wherein the buffer layer is superposed on Above the rotating plate. In this form, the support characteristics of the honing pad can be adjusted based on the elasticity of the buffer layer acting on the honing pad via the auxiliary plate main body. That is, the support characteristics of the honing pad generated by the rotary slewing plate can be adjusted by adjusting the elasticity of the cushion layer or the strength and rigidity of the auxiliary plate main body, whereby the honing efficiency by, for example, the honing pad can be achieved. The improvement of in-plane uniformity, etc. In particular, in order to homogenize the honing efficiency by the honing pad on the entire surface of the honing pad, a two-layer honing pad in which the buffer layer is integrally formed on the inner surface of the honing pad has been provided. Here, in this form, even if the buffer layer ' in the honing pad is not specifically used, the in-plane uniformity of the honing efficiency superior to that of the one-layer honing pad can be obtained. Or, at. When using a 2-layer honing pad, By a buffer layer disposed on the inner surface of the auxiliary board main body, To supplement the buffer layer disposed on the honing pad to achieve further continuation of the effect produced by the buffer layer, Long-term stabilization of the honing characteristics when reusing the honing pad can be achieved. -17- 201143974 In addition, The ninth form of the invention, In the auxiliary plate for the honing pad of the form of any one of the above items 1 to 8, Set the sticky layer, It is expanded on the upper surface of the above-mentioned rotary plate that overlaps the above-mentioned auxiliary plate main body, The adhesion between the rotating fixed plate and the overlapping surface of the auxiliary plate main body placed thereon is improved. In this form, As a close layer, Using, for example, adhesive tape, Thereby, the fixing force of the auxiliary plate main body to the rotating fixed plate can be effectively obtained. In particular, the area of the auxiliary plate body is larger than the honing pad. Therefore, for example, the adhesive tape can be enlarged. With this, It is also possible to further improve the fixing force. Or the adhesive force per unit area in the adhesive tape is set to be small and easily peeled off. Seeking to improve from workability. In addition, The main body of the auxiliary board fixed by the adhesive tape, In the case where the buffer layer is provided in the eighth form described above, It is used as a buffer layer to form the main body of the auxiliary board. As a close layer, E.g, Elastic tape or film can also be used, Board (seesaw, etc.), Or a viscous material or a gelatinous substance such as a wax. By using such an elastic thin layer or coating layer, The adhesion between the auxiliary plate main body and the rotating platen can be improved, Prevent air residue between the two, Further, the effect of supporting and reinforcing the auxiliary plate main body by the rotary fixed plate can be improved. Furthermore, In the eighth aspect, in the case where the auxiliary plate main body has a buffer layer on the inner surface, as the above-mentioned adhesion layer, E.g, Alternatively, the buffer layer may be used as a pressure-sensitive adhesive layer by allowing a liquid such as water to be contained in the buffer layer. In short, In the case where the buffer layer is a porous material having continuous internal bubbles, Also -18- 201143974 actively use it, In order to improve the adhesion of the auxiliary plate main body to the rotating platen. Further, the first form of the invention, In the auxiliary plate for the honing pad of the form of any one of the above items 1 to 9, The lifting means is disposed at a plurality of locations on the circumference of the fitting peripheral wall portion, The lifting means acts on the fitting peripheral wall portion by the position adjusting force of the fitting peripheral wall portion in the fitting direction of the rotary dial. In this form, Can use lifting means, For example, when the auxiliary pad for the honing pad is attached to the rotary fixed plate, the amount of the fitting of the fitting peripheral wall portion toward the rotating fixed plate is adjusted to cover the entire circumference, and the work is performed while maintaining, for example, parallelism little by little. Further, 'for example, when the auxiliary plate for the honing pad is removed from the rotary table, the force generated by the lifting means can be Acting in the direction of detaching the fitting peripheral wall from the rotating platen, The fitting peripheral wall portion is detached while maintaining the parallelism, for example, from the rotation plate. So, By using lifting means, It is possible to stably and easily perform the attachment and removal of the rotary plate by the auxiliary plate for the honing pad while the card bite or saturating caused by the large inclination of the rotary plate by the auxiliary pad for the honing pad is stabilized. . There is also an eleventh form of the invention, In the above-described first aspect of the honing pad auxiliary plate, the lifting means is screwed to the fitting peripheral wall portion in a plurality of portions on the circumference in the fitting direction. Each of the front end portions is constituted by a plurality of jack bolts that abut against the honing machine side. -19- £ 201143974 In this form, The lifting means can be screwed to the fitting peripheral wall portion of the bolt. Implemented with a simple structure. especially, The lifting bolts act to exert a multiplier by the guidance of their thread grooves. therefore, Even if the auxiliary plate main body is firmly fixed to the rotary fixed plate by a bonding tape or the like, Still small, Easily peel the auxiliary plate body from the rotating platen, Take it down. In addition, The twelfth form of the present invention, An auxiliary plate for the honing pad of any of the above-mentioned 丨~^, The padding surface is superposed on the pad supporting surface of the auxiliary plate main body to fix the honing pad. and also, Fixing the honing pad, For example, an adhesive tape or the like which has been conventionally used for fixing a honing pad to a rotary aligner can be employed. Processing the honing pad in a state fixed to the main body of the auxiliary plate, With this, Not only when loading and unloading the honing pad to the rotating platen, Also, when the honing pad is moved or stored, It can effectively prevent the damage of the honing pad. In addition, A thirteenth form of the invention, An auxiliary plate for the honing pad of the twelfth form described above, In the outer peripheral portion of the above-mentioned honing pad, A non-fixing portion that does not fix the pad supporting surface of the auxiliary plate main body is partially provided. By setting such a non-fixed portion, The workability when the honing pad is peeled off from the auxiliary pad for the honing pad can be improved. then, E.g, Even if the honing pad is discarded after a proper number of reuses, It is still easy to peel off the honing pad, The auxiliary plate main body and the fitting peripheral wall portion are reused. Furthermore, The present invention for solving the method of reproducing a honing pad proposed as described above is characterized in that Using the auxiliary plate for the honing pad of the above 12th or 13th form, Where the above-mentioned honing pad is worn due to use, The surface of the honing pad is subjected to regeneration processing while still being mounted on the auxiliary plate for the honing pad. -20- 201143974 According to such a method of the present invention, Even when the regenerative processing is applied to the honing pad, the reinforcing effect by the auxiliary plate for the honing pad fixed to the inner surface is continuously exhibited, so that the damage of the honing pad is effectively prevented. High-precision regenerative machining is possible. Further, 'best' in the method of regenerating the above-mentioned honing pad, Concentric grooves are formed on the surface of the above-mentioned honing pad, In the above reprocessing, Remove the deposits that enter these slots. In addition, when removing the deposits entering the tank, It is also possible to perform a process of blowing compressed air or sweeping with a brush. Especially the best, For example, the following method 'where' uses a comb-shaped regenerating tool having a plurality of teeth having a pitch and a size corresponding to the grooves formed in advance, Insert the plurality of teeth into each slot, Simultaneously moving the plurality of teeth along the slot, Sweep the attachments in the tank, Remove it. Further, the present invention is also characterized by a substrate manufacturing method for honing by using an auxiliary plate for a honing pad according to a specific structure of the present invention, among them, The honing pad auxiliary plate of the twelfth or thirteenth aspect is attached to the rotary platen of the honing machine, and the substrate of the honing object is honed, Manufacturing. Then, according to such a substrate manufacturing method, The honing process is performed at a low overall price (due to the regeneration of the honing pad, etc.) and excellent processing efficiency (due to the higher rate of honing machine). The honed substrate can advantageously be manufactured. [Effects of the Invention] As described above, according to the present invention, while preventing damage to the honing pad, The honing pad is loaded and unloaded to the rotating platen with excellent workability. the result is, No -2 1- 201143974 Grinding with 硏, The real height is priced. The high rate is high, the effect of the system is limited to 働 働 利 利 } } } } } } } } } } 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 必备 Waiting for the effect is unloading, The mat is produced when the fruit is primed. The foundation of the crop is the current one, and the water is ready for use. [Embodiment] [Forms for implementing the invention] Referring to the schema, Embodiments of the invention will be described. First of all, Figs. 1 to 3 show an auxiliary plate 10 for an honing pad as an embodiment of the present invention. The honing pad auxiliary plate 10 is attached to a rotary aligner 12 of a well-known honing machine. Specifically, The honing pad auxiliary plate 10 is provided with a thin plate-shaped auxiliary plate main body 14 having a thin wall. It has a flat surface (outer surface) 14a and an inner surface (lower surface) 14b. The auxiliary plate main body 14 is preferably formed of a metal plate such as stainless steel or a synthetic resin such as polycarbonate. In addition, The outer diameter of the auxiliary plate main body 14 is the same as or larger than the outer diameter of the mounted rotating platen 12. then, By mounting the honing pad with the auxiliary plate 10 to the rotating platen 12, The auxiliary plate main body 14 is placed on the upper surface 16 of the rotary table 12 and placed thereon. Thereby, the entirety of the upper surface 16 of the rotary platen 12 is covered by the auxiliary plate main body 14. In addition, At the outer peripheral edge portion of the auxiliary plate main body 14, The fitting peripheral wall portion 18 extending in the circumferential direction is integrally formed. The fitting peripheral wall portion 18 has a wall thickness larger than that of the auxiliary plate main body 14 (a rectangular cross section in the present embodiment) -22 - 201143974 extends in the circumferential direction. In the present embodiment, A ring shape extending continuously over the entire circumference in the circumferential direction is presented. In addition, The fitting peripheral wall portion 18 is also the same as the auxiliary plate main body 14 except for a metal material such as stainless steel. It can be formed by a synthetic resin material or the like. In particular, in the present embodiment, the fitting peripheral wall portion i8 is integrally formed with the outer peripheral edge portion of the auxiliary plate main body 14. The fitting peripheral wall portion 18' is attached to the rotary platen 12 by the auxiliary pad 1' for the honing pad. When the auxiliary plate main body 14 is superposed on the upper surface 16 of the rotary platen 12, From the auxiliary board main body 14 facing downward, Extending along the outer peripheral surface of the rotary platen 12. especially, In this embodiment form, The inner peripheral surface 20 of the fitting peripheral wall portion 18 has a cylindrical shape. The inner circumferential surface 20, The outer peripheral surface 22 of the rotary fixed plate 12 is fitted, They are placed in contact with each other or separated by a slight gap. In addition, Between the outer peripheral surface 22 of the rotary fixed plate 12 and the inner peripheral surface 20 of the fitting peripheral wall portion 18, Form a suitable gap, With this, The honing pad is easy to attach and detach to the rotary platen 12 with the auxiliary plate. In addition, Although not shown, However, the opening edge portion below the inner peripheral surface 20 of the fitting peripheral wall portion 18 is Apply a taper or chamfer that gradually opens downwards, With this, It is possible to improve the fitting of the fitting peripheral wall portion 18 to the rotary fixed plate 12, Installation workability. In addition, On the surface 14a of the auxiliary board main body 14, coincide, Install the honing pad 24. The honing pad 24 can employ various honing pads known in the past. In addition, The inner surface of the honing pad 24, The surface 14a of the auxiliary plate main body 14 is fixed by a conventionally known adhesive tape 25 or a suitable adhesive. In addition, The outer diameter of the honing pad 24, Generally set to specification 値, But in many cases, It is set to be smaller than the outer diameter of the upper surface of the mounted rotating plate 1 2 from 1 6 -23 to 201143974. In this embodiment form, E.g, It is also possible to set the surface 14a of the auxiliary plate main body 14 to a larger outer diameter than the rotary platen 12. Come adopt, An honing pad 24 of an outer diameter dimension that is slightly the same as or larger than the outer diameter of the rotary platen 12 is mounted. which is, By mounting the honing pad with the auxiliary plate 10 to the rotary platen 12, The auxiliary plate main body 14 is superposed on the upper surface 16 of the rotary platen 12, The honing pad 24 fixed to the surface 14a of the auxiliary board main body 14 is passed through the auxiliary board main body 14, And placed on the upper surface 16 of the rotating platen 12, Set in a fixed state. then, By rotating the rotation of the platen 12 about the central axis, The honing pad 24 mounted in the centering manner to the rotary platen 12 is also simultaneously rotated. Honing processing of a substrate (not shown) is performed. At this time, for example, As shown in Figure 4, Between the upper surface 16 of the rotating platen 1 2 and the auxiliary plate body 14, A suitable buffer layer 26 is provided. In addition, As the buffer layer 26, A resin sheet or an elastomer sheet which imparts a certain degree of compressibility by, for example, foaming, may be suitably used. Rubber sheets, etc. Buffer layer 26, In order to prevent local deformation in the auxiliary board main body 14, And formed to at least cover the overall size of the fixed area of the honing pad 24, It is preferable that the inner surface 14b of the auxiliary plate main body 14 is entirely present in a certain thickness. By providing such a buffer layer 26, When the honing pad 24 is used for honing, The honing efficiency of the substrate can be achieved to cover the uniformity of the entire surface. Incidentally, in the experiment conducted by the inventors, In-plane uniformity regarding the honing efficiency of the oxide film on the surface of the 300 mm substrate was confirmed, At the beginning of the honing and after 8 hours, Compared with the case where the buffer layer 26 is not provided -24-201143974 An increase of 10% can be achieved by providing the buffer layer 26'. In addition, another experiment conducted by the inventors confirmed that a commercially available honing pad having a double structure in which a buffer layer is formed on the inner surface (for example, 'IC1400 (trade name) manufactured by Nitta Haas Co., Ltd.) is used. And in the case where the buffer layer is not provided on the inner surface 14b of the auxiliary plate main body 14, the degree of in-plane variability per minute of the amount of honing is about 1 000 angstroms, The buffer layer 2 6 is provided on the inner surface 14b of the auxiliary board main body 14. The degree of in-plane variability in the amount of honing per minute can be suppressed to a few hundred angstroms. In addition, When the honing process is performed, the auxiliary pad 10 for the honing pad to which the honing pad 24 is fixed is The fitting peripheral wall portion 18 is fitted to the outer peripheral surface of the rotary fixed plate 12. therefore, Can be used in honing, Effectively preventing the auxiliary pad 10 for the honing pad, Further, the honing pad 24 is detached from the rotating platen 12. In addition, An auxiliary plate 10 for the honing pad, It is also possible to fix the rotary fixed plate 12 based on, for example, the frictional force when the rotary peripheral plate 12 is fitted to the fitting peripheral wall portion 18, and the like. but, Best is, Special fixing means are used. As the fixed means, It is also possible to use, for example, an adhesive tape or an adhesive, but, In the present embodiment shown in FIGS. 1 to 3, As shown in Figure 5, A fixing bolt 28 can be used. The fixing bolt 28, Attached in the fitting peripheral wall portion 18, In many parts of the week (preferably in more than 3 parts of the aliquot), The bolt insertion holes 30 formed by penetrating the shafts in the axial direction are attached. In addition, The head portion ' of the fixing bolt 28 is housed in the housing recess 32 formed in the fitting peripheral wall portion 18, With this, It is possible to prevent the surface 14a protruding from the auxiliary plate main body μ to which the honing pad 24 is attached from protruding. -25- 201143974 Then, The front end (lower end) of the fixing bolt 28 passing through the bolt insertion hole 30 is screwed to the bolt hole 32 formed in the rotary platen 12, With this, The fitting peripheral wall portion 18 is fastened to the rotary platen 12, Secured by bolts. In addition, In Figure 5, In order to advantageously ensure the adhesion of the upper surface 16 of the auxiliary plate main body 14 to the upper surface of the rotary plate 12, And effectively ensure the fitting of the peripheral wall! 8 for the fixed force of the rotating platen 12 by the fixing bolt 28, It is preferable that the axial direction of the fitting peripheral wall portion 18 is opposite to the axial direction of the rotary fixed plate 12, According to the setting even if a certain gap remains in the fastening state of the fixing bolt 28, base on needs, A spring washer (s p r i n g washer ) or the like is used as a fixing bolt for fixing the fitting peripheral wall portion 18 to the rotary fixed plate 12, In addition to passing in the axial direction of the fitting peripheral wall portion 18 as described above, For rotating the plate 12, Or a fixing bolt 28 that is fixed to the rotating platen 12 and is integrally driven to be screwed, It can also be used, for example, as shown in Fig. 6, A fixing bolt 34 that is screwed to the fitting peripheral wall portion 18 in the direction perpendicular to the shaft. which is, In another embodiment shown in Figure 6, For the fitting peripheral wall portion 18, In a plurality of portions on the circumference, a threaded hole 3 6 ' penetrating in a direction perpendicular to the axis is formed in the screw holes 36, The fixing bolts 34 are screwed into the outer peripheral side, respectively. then, The front end portion of each fixing bolt 34 is abutted, Pressing on the outer peripheral surface of the rotary fixed plate 12, Synchronized by a plurality of fixing bolts 34, The fixing force of the fastening force based on the direction of the shaft at right angles, It acts between the fitting peripheral wall portion 18 and the rotating platen 12. -26- 201143974 As shown in Figure 6, If a plurality of fixing bolts 34 are inserted in the horizontal direction, Then compared with the outer diameter of the rotating platen 12, The inner diameter of the fitting peripheral wall portion 18 is increased by a predetermined amount. In a state in which the fitting peripheral wall portion 18 is allowed to be relatively displaced in the direction perpendicular to the axis of the rotary platen 12, The amount of screwing of the plurality of fixing bolts 34 can be adjusted by mutual adjustment, To adjust the honing pad. Use the auxiliary plate to align the relative alignment of the rotating platen 12 in the direction perpendicular to the axis (on medium). In addition, Where such a plurality of fixing bolts 34 are employed, The screwing position of each fixing bolt 34 to the screw hole 36 is set by means of an engraving mark or the like. With this, It is also easier to perform the centering of the honing pad auxiliary plate 10 when mounting the rotary plate. In addition, In another embodiment shown in Figure 7, Mounting the 〇-ring 38 as a sealing member, It is formed between the inner circumferential surface of the fitting peripheral wall portion 18 and the outer circumferential surface of the rotary fixed plate 12 in the radial direction. It is formed by an elastic material that extends continuously throughout the circumference in the circumferential direction. In addition, In this embodiment form, A circumferential groove 39 for mounting is formed on the inner circumferential surface of the fitting peripheral wall portion 18, The outer peripheral edge portion of the 0-ring 38 is fitted into the circumferential groove 39, This allows for a positioning installation. By using a 〇-shaped ring 38, The fitting peripheral wall portion 18 and the opposing faces of the rotary platen 12 can be sealed. Especially in this embodiment, The inner region 40' existing between the auxiliary plate main body 14 including the support honing pad 24 and the rotating fixed platen 12 and the outer surface of the rotating platen 12 can be sealed and sealed. With this, Effectively prevent when installing, etc. Foreign matter invades the above internal area 4〇, There is a problem that the adhesion between the auxiliary plate main body 14 and the rotating fixed plate 12 is lowered. -27- 201143974 Also, Due to the Ο-shaped ring 3 8, The system covers the whole week, Therefore, it can be based on the elasticity of the 〇-ring 38. The centering of the pair of peripheral wall portions 18 to the rotary platen 12 is automatically performed. and also, As a sealing member, Instead of the above-mentioned Ο-shaped ring 3 8, As shown in Fig. 8 of another embodiment, An annular elastomer 42 of an elastic material can also be used. In this embodiment form, It acts as a fastening pressing member from below (in this embodiment, An annular pressing member 44 having a circular circumference that is continuous over the entire circumference in the circumferential direction, The fitting peripheral wall portions 18 are overlapped. then, In the axial direction of the fitting peripheral wall portion 18 and the annular pressing member 44, The annular elastic body 42 is formed so as to extend over the entire circumference of the inner peripheral edge portion in the circumferential direction. Further, in the fitting peripheral wall portion 18 and the annular pressing member 44, In several parts of the week, The fastening bolt 46 is attached in such a manner as to penetrate in the axial direction. The head of the fastening bolt 46 is snapped onto the upper surface of the fitting peripheral wall portion 18, and the fitting peripheral wall portion 18 is loosely inserted in the axial direction. The annular pressing member 44 is screwed. Thereby, the fastening bolt 46 is fastened to the annular pressing member 44, The pressing force in the overlapping direction (axial direction) is applied to the fitting peripheral wall portion 18 and the annular pressing member 44. In addition, The front end (lower end) of the fastening bolt 46 protrudes further downward from the annular pressing member 44. A locking nut (double locking nut) is screwed to the protruding front end portion, Double lock nut)48. The lock nut 48 functions as a fail-safe function for preventing the annular pressing member 44 from coming off the fastening bolt 46. -28- 201143974 Also, As shown in Figure 9, Using the pressing force in the axial direction generated by the fastening force of the fastening bolt 46 and the tightening nut 48, The fitting peripheral wall portion 18 and the annular pressing member 44 are pressed in a direction in which they are close to each other and overlap each other. Paired on the two members 18, The annular elastic body 42 between 44 applies a compressive force in the axial direction. With this, Annular elastomer 42 (especially in this embodiment, In addition, the elastic bulging deformation on the outer peripheral side is prevented.) According to the amount of compression in the axial direction, Prominently protruding inward in the direction of the diameter, bulging deformation, the result is, The inner peripheral edge portion of the annular elastic body 42 is pressed against the outer peripheral surface of the rotary fixed plate 12. With this, The portion is sealed in a fluid tight manner. Particularly in the sealing structure using such an annular elastic body 42, By adjusting the tightening amount of the fastening bolts 46, Adjusting the pressing force of the annular elastic body 4 2 to rotate the fixed platen 12, therefore, E.g, When the auxiliary plate for the honing pad is attached to the rotary platen 12, The workability is improved by reducing or reducing the contact of the annular elastic body 42 with the rotating platen 12. In short, It is also possible to use the abutting force of the annular elastic body 42 against the rotary fixed plate 12 as the fixing force of the pair of peripheral wall portions 18 to the rotary fixed platen 12. Further, in the present embodiment shown in Figs. 1 to 3, At a suitable position of the fitting peripheral wall portion 18 (see the first view of the χ_χ cross section in the first drawing), a pressure fluid passage (50) extending through the inside and the outside is formed. then, In the pressure fluid path (50), Removably connected to the air pressure line 'through the air pressure line, It can be subjected to air pressure from an external air pressure source. By this, for example, Applying a negative pressure between the upper surface 16 of the rotating platen 12 and the overlapping surface of the auxiliary plate body 14 The air remaining on these overlapping surfaces of -29- 201143974 is actively attracted, Seeking to improve the adhesion between the overlapping surfaces. or, Applying a positive pressure between the upper surface 16 of the rotary platen 12 and the coincident surface of the auxiliary plate body 14, Applying isolation to these coincident surfaces, With this, It is also possible to improve the detachment workability of the honing pad by the auxiliary plate 1 from the rotary platen 12, Or prevent foreign matter from entering the coincident surface. Especially in the present invention, the best, When setting up such an air pressure mechanism, A sealing member formed of the 〇-shaped ring 38 shown in Fig. 7 or the annular elastic body 4 2 shown in Figs. 8 to 9 is used. The sealed inner region 40' is divided to apply air pressure to the inner region 40. Specifically, E.g, As shown in Figure 1, In a state in which the inner region 4〇 sealed by the sealing member formed of the annular elastic body 42 as shown in Figs. 8 to 9 is divided, The pressure fluid passage 5 that is open in the inner region 40 is formed so as to penetrate the fitting peripheral wall portion 18 in the radial direction. In the pressure fluid passage 50, Assembled with a one-touch connector (〇ne touch connector) 52, Further, the one-touch connector 52 is provided with a connection port body 56 in which a valve body is built. then, Connecting the external pipe 58 to the connection port 56, With this, With the one-touch connector 52, The outer line 58 can be easily attached (detachable/detachable) to the pressure fluid passage 5 . especially, One-touch connector 52 when the external line 58 is removed, With a built-in valve body, The pressure fluid passage 50 is blocked' to maintain the inner region 40 in a sealed state. Then 'passing the pressure fluid passage 5 through the outer line 58, Connect to a suitable negative pressure source (not shown) such as a negative pressure pump or a negative pressure accumulator (accumulat〇r). In addition, Also available in the external line 58, Set the on-off valve -30- 201143974 or switch valve as needed. And the external pipeline 5 8, Via the switching valve, Selectively a source of negative and positive pressure (for example, Positive pressure pump or positive pressure accumulator, etc.). Among the persons having the pressure fluid passage 50 having such a configuration, Such as, When the honing pad auxiliary plate 10 is attached to the rotary platen 12, Connecting the conduit 58 to the connection port 56, Applying a negative pressure to the inner region 40, thereby, The upper surface 16 of the rotary platen 12 and the auxiliary plate main body 14 are superposed in a height state, And after that, Remove the outer tube from the connector body 56. Thereby, while maintaining the negative pressure state of the inner region 40, The occurrence of a malfunction of the rotation of the rotary platen 12 by the external pipe 58 or the like is avoided. In addition, In Figure 11, Another embodiment of the invention is shown. That is, in this embodiment, At a plurality of locations on the circumference of the fitting peripheral wall portion 18, A lifting bolt 60 is provided as a lifting means. The jacking bolt 60 is screwed into the through-threaded hole 62 formed in the axial direction through the fitting peripheral wall portion 18 to form a shaft axial dimension longer than the through-threaded hole 62. then, The front end of the lifting bolt 60 projecting downward from the penetrating hole 62 is in contact with the abutting block 66. The abutting block 66 protrudes from the opposing portion of the honing machine body including the rotary table 12. therefore, The screwing amount of the heavy bolt 60 projecting downward from the fitting peripheral wall portion 18 is adjusted, The amount of protrusion of the bolt 60 from the fitting peripheral wall portion 18 downward is adjusted, With this, The distance between the opposing faces of the upper plate main body μ of the index plate 12 in the axial direction can be appropriately adjusted. So, for example, When attaching the honing pad auxiliary plate 10 to the rotation set 12, 'by loosely loosening the plurality of positioning screws arranged on the circumference - 1 - 1 The turntable pin 201143974 6〇' can easily maintain the level of the auxiliary plate main body 14 with good precision while maintaining the parallel state of the upper surface 16 of the rotating fixed plate 12 to be brought closer. With this, The auxiliary plate main body 14 can be fixedly overlapped with respect to the upper surface of the rotary platen 12 while avoiding problems such as partial air entrapment between their opposing faces or inclination, etc. It is advantageous to obtain a close-knit state. In addition, for example, When the auxiliary pad 10 for the honing pad is removed from the rotary platen 12, 'the force of the direction away from the rotary platen 12 can be effectively made by screwing in a plurality of hoists 60' provided on the circumference one by one. The auxiliary plate main body of the upper surface 16 to which the transfer disk 1 is bonded is acted upon 14. With this, In the case of fixing with adhesive tape or the like, The work of peeling off the auxiliary plate main body 14 from the rotary fixed plate 12 can be performed easily and quickly. and also, The abutting block against which the protruding front end portion of the lifting bolt 60 abuts is as described above. In addition to being formed on the honing machine body 64, Also as shown in Figure 2, An abutment projection 68 that protrudes beyond the outer surface of the rotary fixed plate 12 is formed. The abutting projections 68' are at positions corresponding to the respective bolts 60 on the circumference. Or the entire circumference of the circumferential direction is formed integrally with the outer peripheral surface of the lower portion of the rotation 12 in the axial direction. Furthermore, In the present invention, As shown in Figures 13-15, When the honing pad 24 is fixed to the surface 14a of the auxiliary body 14 in the auxiliary pad 1 硏 of the honing pad in a close contact state, the honing pad 24 is fixed. the best, A non-fixed portion 70 is formed at a portion on at least a circumference of the peripheral portion of the honing pad 24. In the form shown in Figure 13~15, From the outer peripheral surface of the fitting peripheral wall portion 18, the surface 14a of the auxiliary plate main body 14 is extended inward in the radial direction to the width, Gradually 16 stable relative to the plate bolts at the speed of 66, For example, the circumferential surface of the main screw is formed by aligning the concave portion 72 of the outer peripheral portion of the fixed portion of the outer surface of the main surface of the main surface of the disc-32-201143974 24 with the non-fixed portion 70. By forming such a recess 72, When the honing pad 24 is peeled off, The operator inserts a finger or a suitable tool into the inner surface of the honing pad 24, Easy to work. and, In the portion where the recess 72 is formed, In the micro-area of the outer peripheral edge of the honing pad 24, Forming a fixed portion (non-fixed portion 70) that does not utilize an adhesive tape or the like, With this, The detachment work of the honing pad 24 can be started more easily from the non-fixed portion 70. In addition, As described in Figure 13'14, Except that the concave portion 72 is formed only at the upper end portion of the fitting peripheral wall portion 18, E.g, As described in Figure 15, According to the outer peripheral edge portion of the fitting peripheral wall portion 18, Covering the entire length of the axis in a way that is notched, A recess 72 of an arbitrary shape is formed. especially, The concave portion 72 is formed only on the outer side of the fitting peripheral wall portion 18 or the auxiliary plate main body 14, Not inside, therefore, The airtightness of the inner region 40 can be ensured. In addition, Such a recess 72 can also be used for evacuation when the honing pad 24 is attached to the surface 14a of the auxiliary plate main body 14. In addition, The honing pad 24 used in the present invention is not particularly limited, E.g, Anyone known in the past can also be arbitrarily used. E.g, As shown in Figure 16, It is also possible to use a honing pad in which a plurality of grooves 74 extending concentrically in the circumferential direction are formed on the surface. especially, In the honing pad 24 having such a groove 74 formed on the surface, The honing chips and the like generated during the honing process are embedded in the groove 74, It becomes difficult to remove. After review by the inventors, it is known that in the honing pad 24, Even if the depth of the slot -33- 201143974 74 is fully left, Also, the depth dimension of the groove 74 embedded in the groove 74 due to honing chips or the like is still insufficient. Badly affecting honing performance. therefore, As a form of the regeneration method of the honing pad 24, As shown in Figure 1 7~1 8 Comb-like regeneration tool 7 8 It has processing teeth 76 having a pitch and size corresponding to the grooves 74 formed in the honing pad 24, Inserting each of the teeth 76 into each of the slots 74, While moving relatively along the slot 74, With this, The attachments in 74 are effectively removed by sweeping. In addition, The shape of each of the teeth 76 in the regenerating tool 78 is not limited to the square shape shown by the formula. Its front end, Considering the shape of the groove 74 of the honing pad 24, Can be round, Ladder shape, Any shape such as a V shape. Also, the number of teeth 76 of the regenerating tool 78 may be arbitrary. E.g, All of the slots 74 are also obtained in one shot. In addition, Also on the honing machine, When the regenerative tool 78 is installed, The teeth 76 are inserted into the grooves 74 of the sanding pad 24 for honing. In addition, The size of each of the teeth 76 in the regenerating tool 78 can also be formed in a tooth width dimension that is smaller than the width dimension of the groove 74 of the honing pad 24, thereby It is easy to align the teeth 76 of the regenerative tool 78 with the grooves of the honing pad 24. Unexpected damage or the like of the honing pad 24 can also be prevented. In addition to the regenerative tool having the serrated teeth 76 as exemplified, Also, a brush-shaped refilling tool that bundles the wires inserted into the grooves 74 of the honing pad 24 is used. Alternatively, a regenerating tool or the like having a structure in which rotating teeth such as honing chips are more actively swept from the honing pad 24 may be used. In addition, the number of the groove patterns can be flat. Example: 7 4 can be grooved -34- 201143974 As mentioned above, If the auxiliary plate 10 for the honing pad is used as each embodiment of the present invention, The damage of the honing pad 24 can be prevented. At the same time, the honing pad 24 is attached to and detached from the rotary platter 12 with excellent workability. In addition, the result is, The reuse of the honing pad has also become easier. E.g, It can be reused by directly performing the honing pad processing in the state of being fixed to the auxiliary plate 1 of the honing pad. In addition, Since the honing pad 24 can be quickly loaded and unloaded by the rotating platen 12, Therefore, it is also effective to ensure the harvesting time of the honing device. then, In the manufacturing steps of a semiconductor substrate or the like, If you can reuse the honing pad multiple times, This contributes to a large cost reduction of the manufacturing steps of the semiconductor substrate or the like. Savings in the resources used to make the honing pad, It is environmentally friendly to reduce the amount of discarded honing mats. but, In the aforementioned embodiment, In order to fix the honing pad auxiliary plate 10 to the rotary platen 12, a fixing bolt 28 or a vacuum suction mechanism (5 8 or the like) is provided. E.g, The elasticity of the sealing member can also be utilized, Use adhesive tape such as double-sided tape as needed. Thereby, the honing pad is attached to the rotary platen 12 by the auxiliary plate 1A and fixedly assembled. Specifically, For example, as shown in Figure 19, For the fitting peripheral wall portion 18 of the auxiliary pad 10 for the honing pad, The same type 0 ring 38 as that of Fig. 7 described above is attached. In addition, in this embodiment, The circumferential groove 39' to which the 〇-shaped ring 38 is attached is a 截面-shaped ring 38' having a cross-sectional shape that is larger in width than the opening width, and has a larger cross-sectional dimension than the opening width of the circumferential groove 39. More than half of it is embedded. With this, 〇-ring 38, In a state in which a part of the peripheral groove 38 of the fitting peripheral wall portion 18 protrudes toward the inner peripheral side -35 to 201143974, It can effectively prevent the extraction from the circumferential groove 38 and be stably embedded, Keep it. Incidentally, a groove 3 9 ' that expands on the back side as compared with the width of the opening, for example, The slope of the cutting tool inserted from the opening (the direction in which the opening is inserted) can be changed and adjusted. It is formed by cutting and the like at the same time. In addition, The fitting peripheral wall portion 1 of the present embodiment It is formed by the following division structure. In the divided structure, the annular divided block 84 is superposed on the lower surface of the outer peripheral edge portion 82 of the auxiliary plate main body 14 in the axial direction (the vertical direction of the drawing). In addition, At the fitting peripheral wall portion 18, Formed to open on the outer peripheral surface, a suction hole 88 extending inward in the radial direction The suction hole 8 8 is closed by a 〇-shaped ring 38. With this, The inner region 40 partitioned between the overlapping faces including the upper surface of the rotary platen 12 and the auxiliary plate main body 14 is communicated. In short, The inner region 40 communicates with the external space through the air suction hole 8 8 . In the auxiliary plate for the honing pad which has such a structure, Preventing installation when being superposed from above the rotating fixed plate 12, The air existing between the opposite faces of the rotary platen 12 and the auxiliary plate main body 14, Enclosed in the inner region 40 sealed by the 0-ring 38, It can be quickly discharged to the external space through the suction hole 8 8 . With this, The inner surface 14b' of the auxiliary plate main body 14 can be rotated against the upper surface 16 of the platen 12, Effectively prevent air from remaining between these two faces, At the same time, it is fast and stable. then, After being overlapped in a close state, According to the abutting force and frictional force based on the elasticity of the 〇-shaped ring 38, The fitting peripheral wall portion 18 of the auxiliary pad 10 for the honing pad can be opposed to the outer peripheral surface of the rotating platen 12. The installation state is maintained at -36-201143974 with a predetermined fixing force. In addition, in this embodiment, In order to obtain the fixing force more stably, the upper surface of the auxiliary plate main body 14 and the rotary fixed plate 12 are fixed by an adhesive layer 90 such as a double-faced tape (adhesive tape) or an adhesive. In addition, Preferably, when the honing processing using the honing pad 24 or the honing processing of the honing pad 24 is performed, the suction hole 88 for the honing pad auxiliary plate 10 is A cover member 91 (shown by an imaginary line in Fig. 19) covering the outer peripheral side opening of the fitting peripheral wall portion 18 is attached. By covering the suction hole 88 with the cover member 91, Foreign matter can be prevented from intruding into the suction hole 88. the above, The embodiments of the present invention are described in detail. but, The invention is not limited by the specific description of these embodiments. E.g, In order to further improve the reinforcing effect on the auxiliary board main body 14 in the honing pad auxiliary plate 10, Also for example, A reinforcing member that partially or entirely extends over the circumference of the fitting peripheral wall portion 18 is additionally provided so as to protrude from the fitting peripheral wall portion 18 toward the outer peripheral side. In addition, Such a reinforcing member may be provided so as to protrude downward from the fitting peripheral wall portion 18 in the axial direction. Or set it in such a way as to protrude upward in the direction of the axis. The fitting peripheral wall portion 18, Moving from the intermediate portion of the surface (14a) as the pad supporting surface on which the honing pad 24 is placed to the outer peripheral side, thus, It can also be formed to protrude above the axis direction. An auxiliary plate body 14 in the auxiliary plate for the honing pad, As long as at least the size and shape of the honing pad can be fully supported, It is not necessary to cover the entire upper surface 16 of the rotating platen 12. In addition, a fitting peripheral wall portion 18 in the auxiliary plate for the honing pad, As long as the positioning of the rotating plate 12 can be exerted, It is not necessary to cover the entire week in the circumferential direction. -37- 201143974 For example, It is also possible to adopt the form described below. As shown in Figure 2 0 ~ 2 1 , In the outer peripheral edge portion of the auxiliary plate main body 14 (in a portion where it is not necessary to support the honing pad), a notch portion 94) which is notched in an appropriate size is provided, The upper surface 16 of the rotary platen 12 is partially exposed. or, It can also be as shown in Figures 20 to 21 and 22 to 23, a plurality of divided structures 96a to d, which are disconnected on the circumference, 98a to f form a fitting peripheral wall portion 18. In addition, Has the following advantages, By folding the fitting peripheral wall portion 18 on the circumference as described above, Even in the outer peripheral part, Still directly visualizing the coincident surface of the auxiliary plate body 14 to the upper surface 16 of the rotating platen 12, The mounting state of the auxiliary plate main body 14 to the rotary dial 12 can be visually confirmed. especially, The number or size of the notches 94, The shape is not limited, The shape or size of each divided portion of the fitting peripheral wall portion 18, The number of divisions and the like are not limited. In the plurality of notch portions 94 or the divided portions of the fitting peripheral wall portions 18, It is also possible to set shapes or sizes that are different from each other. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing an auxiliary plate for an honing pad as an embodiment of the present invention. Fig. 2 is a front view of the auxiliary plate for the honing pad shown in Fig. 1. Figure 3 is a cross-sectional view taken at 111-111 in Figure 1. Fig. 4 is a view showing an auxiliary plate for an honing pad as another embodiment of the present invention, A cross-sectional view corresponding to Fig. 3. Fig. 5 is a V-V sectional view in Fig. 1. Fig. 6 is a cross-sectional view corresponding to Fig. 5, showing an auxiliary plate for an honing pad as another embodiment of the present invention. -38- 201143974 Fig. 7 is a cross-sectional view corresponding to Fig. 3, showing an auxiliary plate for an honing pad as another embodiment of the present invention. Fig. 8 is a view showing an auxiliary plate for an honing pad as another embodiment of the present invention, A cross-sectional view corresponding to Fig. 3. Fig. 9 is a cross-sectional view showing a sealed state in the auxiliary plate for the honing pad shown in Fig. 8. Fig. 10 is a cross-sectional view showing a vacuum suction portion of the honing pad auxiliary plate shown in Fig. 9. Fig. π is a cross-sectional view showing an auxiliary plate for a honing pad as another embodiment of the present invention. Fig. 12 is a sectional view showing an auxiliary plate for a honing pad as another embodiment of the present invention. Fig. 13 is a plan view showing an auxiliary plate for an honing pad as another embodiment of the present invention. Fig. 14 is an explanatory view of the XIV arrow in the first drawing. Fig. 15 is a view showing another example of the non-fixed portion shown in Fig. 14, An explanatory diagram corresponding to Fig. 14. Fig. 16 is a plan view showing an auxiliary plate for an honing pad as another embodiment of the present invention. Fig. 17 is an explanatory view corresponding to the XV II-XV II cross section in Fig. 16 for reproducing the honing pad in the auxiliary pad for the honing pad shown in Fig. 16. Fig. 18 is an explanatory view corresponding to Fig. 17 for explaining another process for honing pad reproduction processing shown in Fig. 17. -39- 201143974 Figure 19 is a cross-sectional view showing an auxiliary plate for honing and boring as another embodiment of the present invention. Fig. 20 is a plan view showing an auxiliary plate for an honing pad as another embodiment of the present invention. Fig. 21 is a front view of the auxiliary plate for the honing pad shown in Fig. 2; Fig. 22 is a bottom plan view showing an auxiliary plate for a honing pad as another embodiment of the present invention. Figure 23 is a plan view of the auxiliary plate for the honing pad shown in Figure 20. [Description of main component symbols] 10 Auxiliary plate for honing pad 12 Rotating plate 14 Auxiliary plate body 14a Surface 14b Inner surface 16 Upper surface 1 8 Fitted peripheral wall portion 20 Inner peripheral surface 22 Outer peripheral surface 24 Honing pad 26 Buffer layer 28 Fixed Bolt 30 Bolt Insert Through Hole 32 Bolt Hole - 40 - Fixing Bolt Threaded Hole 〇 Ring (Sealing Member) Internal Area Annular Elastomer (Sealing Member) Annular Pressing Member Fastening Bolt Lock Nut Pressure Fluid Access One-Touch Connector External body of the interface body Lifting bolt through the threaded hole Honing machine body Abutment block Abutment protrusion Non-fixed part Concave groove tooth regeneration tool-4 1-