TW201135351A - Frame for large pellicle and large pellicle - Google Patents

Frame for large pellicle and large pellicle Download PDF

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Publication number
TW201135351A
TW201135351A TW100108220A TW100108220A TW201135351A TW 201135351 A TW201135351 A TW 201135351A TW 100108220 A TW100108220 A TW 100108220A TW 100108220 A TW100108220 A TW 100108220A TW 201135351 A TW201135351 A TW 201135351A
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TW
Taiwan
Prior art keywords
frame
protective film
joint
film
sized
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TW100108220A
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Chinese (zh)
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TWI456341B (en
Inventor
Shintaro Kitajima
Noriko Tani
Hiroji Matsue
Yukiya Yamanaka
Seiji Iwakura
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Asahi Kasei E Materials Corp
Muramoto Industry Co Ltd
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Priority claimed from JP2010053520A external-priority patent/JP5619436B2/en
Priority claimed from JP2010196230A external-priority patent/JP5653691B2/en
Priority claimed from JP2010196223A external-priority patent/JP5653690B2/en
Priority claimed from JP2010196228A external-priority patent/JP5731147B2/en
Application filed by Asahi Kasei E Materials Corp, Muramoto Industry Co Ltd filed Critical Asahi Kasei E Materials Corp
Publication of TW201135351A publication Critical patent/TW201135351A/en
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Publication of TWI456341B publication Critical patent/TWI456341B/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor

Abstract

Disclosed is a frame for a large pellicle wherein handleability is satisfactory and occurrence of an air path is suppressed when used. In the frame for a large pellicle stretching and supporting a large pellicle film so as to cover the opening section, a frame section forming the rim of the opening section comprises junctions of at least three places along the axial direction of the frame section.

Description

201135351 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種大型護膜用框體，其係用以防止異物 附著於製造例如IC(Integrated Circuit :積if電路）、lsi (Large Scale Integration :大型積體電路）、TFT 型 lcd - (Thin Film Transistor-Liquid Crystal Display :薄膜電晶體 液晶顯示器）等半導體裝置時之微影步驟中所使用之光罩 或標線片上者。 【先前技術】 先前’於半導體電路圖案等之製造中，在光罩或標線片 之兩面側配置稱為護膜之防塵機構，從而防止異物附著於 光罩或標線片上。 作為護膜之一般之構造，可列舉於金屬、陶瓷或聚合物 製之框體之一側貼附聚合物或玻璃等之透明之薄膜，於其 相反側設置有用以貼附在光罩上之黏著劑層（黏著材料）的 構造。例如，護膜係於具有與光罩或標線片之形狀相吻合 之形狀的厚度為數毫米左右之框體之一緣面，展開並接著 • 厚度為10 Pm以下之包含硝化纖維素或纖維素衍生物等之 ； 透明之高分子膜的表膜，且於護膜用框體之另一緣面經由 • 黏著材料而黏著在光罩或標線片之表面上。 當異物附著於光罩或標線片之表面時，該異物於半導體 曰曰圓上所形成之光阻劑上成像而成為電路圖案缺陷之原 因，但於將護膜西己置在光罩或標線片之至少圖案面之情形 時，附著於護膜之表面之異物因聚焦位置偏移，故不會於 154681.doc 201135351 半導體a曰圓上所形成之光阻劑上成像，從而不會使電路圖 案產生缺陷。 又，近年來，因各種多媒體之普及，故期望一種可應用 於冋畫質、可進行高精細顯示之大型之彩色TFT [CD之光 微影步驟中所使用的大型之光罩之大型護膜。 例如’於專利文獻1中，提出有一種可應用於大型之光 罩之大型護膜。 又’於專利文獻2中’亦提出有一種為了應對大型護膜 用框體之彎曲或變形，而利用了框體與彈性係數較框體更 大之增強材料之框體。 又’於專利文獻3中，亦提出有利用將彈性模數不同之 兩種以上之材料於框體之厚度方向上接合而成之框體，作 為用於需要高解像度之曝光中所使用之2〇〇 nm以下之紫外 光曝光、且不影響光罩之平坦性之精度的護膜用框體。 再者’於專利文獻4中揭示有一種液晶顯示器之遮罩用 框架作為其他領域之接合框體。 先前技術文獻 專利文獻 專利文獻1:曰本專利特開2001-109135號公報 專利文獻2:日本專利特開2006-284927號公報 專利文獻3 :日本專利特開2009-063740號公報 專利文獻4 :曰本專利特開2005-141170號公報 【發明内容】 發明所欲解決之問題 154681.doc 201135351 然而，護膜用框體係藉由對—塊片材狀母材進行沖裁而 製作，且無接合部之一體型之護膜用框體較多。此係基於 確保護膜之平坦性之觀點等。但是，根據母材之平坦ς 亦存在無法用於護膜用框體之製作之母材。又，雖然存在 具有平坦性之母材，但護膜用框體越大型化，越不容|顯 現出護膜用框體之平坦性之精度。因此，製造步驟亦花費 時間，故而成為生產性下降之原因，亦成為護膜用框體之 高成本之原因。 又，伴隨大型化，因護膜用框體本身之自重、表膜之張 力、由溫度變化所引起之應力等各種主要原因，而有可能 於護膜用框體上產生-曲或變形。因此，一般使用藉由^ 剛性較高之-塊片材狀母材進行沖裁而製作之護膜用框 體。 此種護膜用框體之f曲或變形就護膜用框體或護膜之操 作性之觀點而言不佳。Λ，若於護膜用框體上產生彎曲或 變形’則亦可能於護膜用框體與光罩等之間產生空氣路 徑。又’此種護膜用框體之f曲或變形係藉由將表膜貼附 於護膜用框體上後，表膜之張力朝向_而產生者，但因 光罩製造者之欲確保曝光面積之要求，故必需儘可能地減 小此種護膜用框體之響曲或變形。另一方面，存在增大護 膜用框體之剖面面藉而描！）盆 ®檟而钕昇濩膜用框體之剛性的方法，但 若考慮有效曝光面積等，則該方法不佳。 鐾於上述理由，就志 就成本方面而§，利用經分割之框體 (以下’稱為「分割框體」）作為大型護膜用框體較有利， 154681.doc 201135351 但經分割之框體有 滿足僅經得起實用 用化。 可能於框體上產生彎曲或變形，又，不 之剛性特性，因此目前未作為商品而實 關於該點，於p ;七、宙 ^片 、这專利文獻2中，為了確保剛性，利用 ，者劑等或摩㈣拌谭接等特殊之方法，將剛性較護膜用 框體更高之構件接合於分割框體之接合部。但是，將不同 ^素材之構件牢固地接著並不容易，X，於如接著劑積存 :之接合部需要特殊之加工，又，擔心自曝光中之接著劑 生逸氣，又，需要如摩擦授拌焊接等之特殊之焊接技 術。 本發明係ϋ於上述情況而完成之發明，其目的在於提供 一種操作性良好，而且使用時可抑制空氣路徑之產生之大 型護膜用框體及大型護膜。 解決問題之技術手段 本發明者等人為了達成上述目的而反覆努力研究之結 ^ ’發現具有特定之構造之大型護膜隸體可解決上述課 題，從而完成本發明。 即本發明之大型護膜用框體係具備俯視下為矩形狀之 開口部者，且形成上述開口部之周緣之框部沿著該框部之 轴方向具有3個部位以上之接合部。 藉由護膜框體具有3個部位以上之接合部，所分割之框 體部分之各個發揮增強材料之作用，從而可協同地減少框 體之彎曲。即，護膜框體之整體之剛性反而提高，可抑制 彎曲，因此例如於將大型護膜固定在操作夾具上進行檢品 154681.doc 201135351 t坦1P便使位置朝各種方向變化，護膜亦難以自操作夹具 7進而’藉由剛性進—步提高，貼㈣光罩等上時 徑附精度較佳，且該精度得以維持，因此難以產生空氣路 進而’利用複數個構件形成框體，藉此可進行母材之平 坦性較佳之部位之切出’接合後之框體之平坦性亦得到提 昇。亦可自較小之母材製作較大之框體，亦具有 低 之優點。 - 、再者’先前，基於確保護膜之平坦性之觀點等，藉由沖 裁而2-塊片材狀母材切出護膜框體之情形較多。本案發 月係違反此種技術常識而S成之發明，並且具有如上所述 之優異之效果。 較佳為於大型護膜用框體之角部具有上述接合部。 較佳為上述框部包含選自由紹及紐♦金所组成之群中之 至少-種金屬構件’且於大型護膜用框體之軸方向剖面之 XRD(X_ray Diffraction，χ射線繞射）測定結果中，（⑴）面 之峰值強度/(200)面之峰值強度之比率為1〇以下。 又，較佳為於大型護膜用框體之軸方向剖面之xrd測定 結果中，（111)面之峰值強度/(2〇〇)面之峰值強度之比率為 0 · 8以下。 又’較佳為於在接合部所接合之一個構件之端部設置有 向所接合之另-個構件突出之至少_個凸部，於另一個構 件之端部設置有使凸部嵌合之凹部，且藉由將凸部嵌合於 凹部中而使一個構件之端部接合於另一個構件之端部。再 154681.doc 201135351 者本發明中之「嵌合」係指如下之狀態：凸部形成得較 凹部略大、或者凹部形成得較凸部略小、或者凸部與凹部 以相同之大小形成，於將凸部插入至凹部之内部而加以接 。時’凸部因凹部之内周面而朝内部壓縮變形，或者即便 無壓縮變形，凸部亦無間隙地卡合於凹部。 右採用上述構成，則可不使用剛性較框體更高之增強材 料或接著劑、特殊之焊接技術等，而使弯曲剛性或剪切剛 性成為於實用上不存在問題之位準。又，藉由將膜貼附於 此種框體後之由膜張力所引起之朝内側的彎曲等，接合部 上之應力集中得到緩#，因㈣以於接合部上產生間隙或 裂痕等，尺寸、形狀穩定，且由裂痕等所引起之發塵之產 生較少，故較佳。因此，即便於將大型護膜固定在操作夹 具上進行檢品時使位置朝各種方向變化之情形時，護膜亦 難以自操作夾具上掉落。 進而，較佳為開口部之面積為1000 cm2以上、35〇〇〇 cm2 以下。 而且，較佳為接合部之接合強度為10 kgf以上。於該大 型護臈框體中，將接合部之接合強度設定為10 kgf以上， 因此即便係分割框體，亦可抑制彎曲或變形，並且可確保 剛性β Μ 進而，較佳為接合部係所接合之構件之端部彼此藉由化 學反應型之接著劑接合而形成。藉由如上述般利用化學反 應型之接著劑使接合部接著’可使大型護膜用框體之剛性 與尺寸穩定性提昇。藉由使用化學反應型之接著劑，可於 154681.doc 201135351 調整接合角度或間隙等目卢夕ρ ^ μ 目心之尺寸後，藉由外部刺激而使 反應開始，且易於維持固定 口叱厚无之位置，因此可提昇尺寸 穩定性。 於此情形時’較佳為化學反應型之接著劑包含選自由丙 烯酸系接著劑及環氧系接著劑所組成之群中之至少一種接 著劑。 本發明之大型護膜包括.μ .+， 匕括.上述任一個大型護膜用框體、 以及以覆羞開口部之方或猛pq ；t w i 万式展開支撐於該大型護膜用框體上 之大型表膜》 發明之效果 根據本發明，可提供—種操作性良好，而且使用時可抑 制空氣路徑之產生之大型護膜用框體、護膜及大型護膜用 框體之製造方法。 【實施方式】 以下，對用於貫施本發明之最佳之形態（以下簡稱為 「本實施形態」）進行詳細說明。再者，本發明並不限定 於下述本實施形態，可於其主旨之範圍内進行各種變形後 實施。 首先’對本發明之實施形態之護膜進行說明。圖H系表 示本發明之一實施形態之大型護膜的立體圖。大型護膜1 包括.大型δ蔓膜用框體2、以及接著並展開支樓於大型護 膜用框體2之上緣面2e上之大型表膜3。再者，雖然未圖 示，但大型護膜1更包括塗佈於大型護膜用框體2之下緣面 之黏著劑層，以及黏著於黏著劑層上，並保護該黏著劑層 154681.doc 201135351 之保護膜。 大型護膜用框體2包含例如鋁、鋁合金（5〇〇〇系、6〇〇〇 系' 7000系等）、鐵及鐵系合金、陶瓷（sic、A1N、Al2〇3 等）、陶瓷與金屬之複合材料（A1_si(：、A1_Am、a1_A12〇3 等）、碳鋼、工具鋼 '不鏽鋼系列、鎂合金、或者聚碳酸 S曰樹脂、丙烯酸樹脂等樹脂等，且於俯視下呈大致矩形 狀。大型護膜1係經由黏著劑層而貼附於光罩上，因此較 佳為剛性較高且重量比較小者，較佳為鋁、鋁合金、鎂合 金、樹脂等素材。再者，大型護膜用框體2如後述般係藉 由接合複數個構件而構成，但較佳為至少所接合之一對構 件係由具有相同之彈性係數之素材形成。 作為大型護膜用框體2之表面處理，可採用氧化鋁膜處 理、塗裝、塗料塗佈 '鍍敷處理、低熔點玻璃粉處理、 CVD(ChemiCal Vapor Deposition，化學氣相沈積）處理、利 用濺鍍法等之PVD(Physical Vapor Deposition，物理氣相 沈積）處理等。 該大型護膜用框體2係由對向之一對長邊2a、2b，以及 較5玄長邊2a、2b更短之對向之一對短邊2c、2d構成，並具 有矩形狀之開口部4。於該大型護膜用框體2中，長邊〜與 長邊2b之長度係相等地形成，短邊2C與短邊2d之長度係相 等地形成。開口部4之開口面積較佳為1〇〇〇 cm2以上，更 佳為3000 cm以上’更佳為5000 cm2以上，進而更佳為 10000 cm2以上’特佳為18000 cm2以上，最佳為23_ 以上，上限較佳為35000 cm2以下。 154681.doc -10· 201135351 某種大型護膜用框體2之一對長邊2a、几包含例如16 5 mm寬之柱構件，其長度例如為175〇爪爪。又，一對短邊 2c、2d包含例如18.5 mm寬之柱構件，其長度例如為155〇 mm。即，於俯視（俯瞰）下，短邊2c、2d之寬度較長邊2a、 2b之寬度更寬廣。該大型護膜用框體2之角部（亦稱為頂 部）5之曲率變成R=20 。再者，以下，將假設角部5不 存在曲率時之頂點僅記載為r頂點」。於該大型護膜用框 體2之側面6上，沿著長度方向（邊方向）而設置有槽部7。 其他大型護膜用框體2之一對長邊2a、沘包含例如9〇 mm寬之柱狀構件，其長度例如為8〇〇瓜爪。又，一對短邊 2c、2d包含例如7.〇 mm寬之柱狀構件，其長度例如為48〇 即，於俯視（俯瞰）下，短邊2c、2d之寬度較長邊2&、 2b之寬度更狹窄。該大型護膜用框體2之角部5之曲率例如 變成R=20 又，於該大型護膜用框體2之短邊2c、2d 之側面6上，沿著長度方向（邊方向）而設置有槽部7。 大型表膜3包含例如頌化纖維素或纖維素衍生物、說系 聚合物、或者環烯烴系聚合物等之透明之高分子膜，其厚 度較佳為例如〇. 1 μηι以上、10 μηι以下。 該大型表膜3係以覆蓋大型護膜用框體2之開口部4之方 式展開於上緣面2e上，並黏著支撑於大型護膜用框體2 上。 作為將大型表膜3接著於大型護膜用框體2之上緣面心之 接著劑’例如可使用：丙烯酸樹脂接著劑、環氧樹脂接著 劑、聚矽氧樹脂接著劑、或者含氟聚矽氧接著劑等氣系聚 154681.doc 201135351 合物。 又，作為進行黏著支撐之黏著材料，可使用：苯乙烯_ 乙烯-丁烯-苯乙烯、苯乙烯·乙烯_丙烯_苯乙烯、或烯烴系 等之熱熔黏著材料、聚矽氧系黏著材料、丙烯酸系黏著材 料、或者以發泡體為基材之黏著膠帶。黏著材料層之厚度 較佳為於大型護膜用框體2之厚度與黏著材料厚度之合計 不超過所規定之大型表膜3與光罩之距離的範圍内設定， 例如較佳為0.01 mm以上、10 mm以下。 又，若將大型表膜3貼附於光罩時於黏著劑層之内側存 在空間，則異物有可能滯留於該空間内。因此，當將黏著 劑塗佈於大型護膜用框體2之下緣面時，考慮到黏著劑層 因將大型護膜1貼附於光罩時之加壓而被壓碎並擴大之情 况後’較佳為以加壓時黏著劑不突出至開口部4之程度靠 近大型護膜用框體2之開口部4内側進行塗佈。具體而言， 較佳為以使黏著劑層内側之空間成為黏著劑層之塗佈寬度 之0.3 5倍以内的方式進行塗佈。較佳為黏著劑層之塗佈寬 度相對於大型護膜用框體2之各邊2卜2(1之寬度為〇 3〜〇 6 倍’且較佳為沿著大型護膜用框體2之各邊2a〜2d進行塗 佈。 作為保s蒦黏著材料之保護膜’可使用包含聚對苯二甲酸 乙二酯樹脂或聚乙烯樹脂之膜。又’亦可對應於黏著材料 之黏著力’將脫模劑，例如聚石夕氧系脫模劑或氟系脫模劑 塗佈於保護膜之表面。保護膜之厚度較佳為例如〇〇1 mm 以上、1 mm以下。 154681.doc 12 201135351 繼而，一面參照圖2—面對大型護膜用框體2進行說明。 圖2(8分割構造）係自上方觀察圖丨所示之大型護膜丨中所使 用之大型護膜用框體2的圖（俯視圖）。再者，於圖丨中省略 了接合部之記載。 於大型護膜用框體2中，構成開口部4之周緣部之框部包 括：分割框體2la、2lb，該等分別構成一對長邊2a、2b; 分割框體2le、21h、21f、21g，該等經由接合部而連設於 分割框體21a、21b之軸方向兩端部，並分別形成大型護膜 用框體2所具有之4個部位之角部5 ;以及分割框體仏、 21d，該等經由接合部而將分割框體2ie、 之開放端彼此橋接。即，大型護膜用框體2沿著構成開口 部4之周緣部之框部之軸方向具有8個部位之接合部。於如 上述般在角部附近設置接合部之情形時，亦可將接合部相 對於軸方向設置於垂直方向或傾斜方向上。 又於圖2中，大型護膜用框體2係以分割框體2}&為基 點’於將開口部4之開口軸作為基準之順時針方向上，按 分割框體2le、分割框體21d、分割框體2if、分割框體 21b、分割框體21§、分割框體21c、分割框體抑、分割框 體2U之順序進行連接而形成。此處，於圖2中，表示了接 合部位為8個部位之大型護膜用框體2，但接合部位之數量 只要為3個部位以上即可，較佳為3〜30個部位，更佳為 3〜25個部位，進而更佳為3〜2〇個部位。 如上所述，於大型護膜用框體2t，長邊h與長邊^之 長度係㈣地形成’短邊2e與短邊2d之長度係相等地形 154681.doc -13· 201135351 成。 又，分割框體21a與分割框體2lb之形狀實質上相同，分 割框體21c與分割框體21d之形狀實質上相同，進而，分別 形成角部5之分割框體2le、21h、21f、21g之形狀亦實質 上相同。具體而言，於圖2中，分割框體21a、21b之長度 例如為700 mm，分割框體21c、21d之長度例如為38〇 mm ° 上述接合部之至少一個與處於最靠近該接合部之距離之 角部之間的距離較佳為設置有該接合部之邊部之長度之 45%以下’更佳為35%以下，進而更佳為25%以下，下限 較佳為0。/。以上，更佳為5%以上。此處，更佳為上述接合 部之兩個係經由共同之角部而設置，並且該角部與接合部 之距離均成為上述範圍。 再者，長邊之長度Le係定義為對向之短邊中之長邊軸方 向的最大距離，短邊之長度Ls係定義為對向之長邊中之短 邊軸方向的最大距離。 又，接合部與處於最靠近該接合部之距離之角部的距離 LP係定義為於形成角部之分割框體之端面’最遠離開口部 4之中心之點與頂點的距離。 具體而言，於圖2中，分割框體21a、21b之長度例如為 mm刀割框體21 c、21 d之長度例如為775 mm。因 此，Lp係Le之長度之例如25%，又，Lp成為Ls之長度之例 如 25〇/〇 〇 再者，所§胃分割框體之長度，係定義為分割框體之兩端 154681.doc 201135351 面間之沿著框體周方向（框部軸方向）的最大長度。 圖3係表示圖2所示之大型護膜用框體2之角部附近的放 大立體圖。大型護膜用框體2中之角部5係由例如構成長邊 2b之一部分之分割框體21b、構成短邊2(1之一部分之分割 框體21d、以及將該等分割框體實質性地連設於直角方向 上之分割框體21f形成。 此處，於分割框體21b之端面及分割框體21d之端面分別 形成有凸部，於分割框體21f之兩端面分別形成有與上述 凸部形狀相對應之凹部，且使上述凸部密接於上述凹部而 連設各構件。再者，於密接面適當地塗佈接著劑等，藉此 可將該等分割框體接合。 就確保曝光面積之觀點而言，大型護膜用框體2之各邊 2a〜2d之寬度越細越好，但若過細，則有可能產生如下之 問題，即於大型表膜3之展開時大型護膜用框體2因大型表 膜3之張力而彎曲。因此，為了相對於各邊之長度形成考 慮了剛性之寬度之粗細’可將各邊2a〜2d之寬度設定為3 mm〜25 mm左右。 又，大型護膜用框體2之厚度越薄，越成為較輕且容易 處理之大型護膜1，但若過薄，則有可能產生如下之問 題，即於大型表膜3之展開時大型護膜用框體2因大型表膜 3之張力而彎曲。因此，就對應於各邊2a〜2d之長度之兩者 之平衡而言，可將大型護膜用框體2之厚度較佳為設定成 3·5 mm〜12 mm左右。 本發明並不限定於上述實施形態。例如，於上述實施形 I54681.doc 201135351 態中’使各分割框體之形狀在某種程度上—致，但各分割 c體之形狀亦可互不相同。於上述實施形態令，接合部係 設置有8個部位’但亦可設定為4個部位。於此情形時，例 如可將分割框體21c、21h、21g形成為一個分割框體，將 分割框體21e、21d、21f形成為一個分割框體。 又，接合部之接合方法亦無特別限制，除利用接著劑之 接著以外，亦可使用接著劑，亦可為螺絲固定。 又，較佳為大型護膜用框體係具備俯視下為矩形狀之開 口部之大型護膜用框體，且具有藉由使端部彼此接合而形 成開口部之周緣之構件，於所接合之一個構件之端部設置 有向所接合之另一個構件突出之至少一個凸部，於另一個 構件之端部設置有使凸部嵌合之凹部，藉由將凸部嵌合於 凹部甲而使一個構件之端部接合於另一個構件之端部。 再者，本發明中之「嵌合」係指如下之狀態：凸部形成 得較凹部略大、或者凹部形成得較凸部略小、或者凸部與 凹部以相同之大小形成，於將凸部插入至凹部之内部而加 以接合時，凸部因凹部之内周面而朝内部壓縮變形，或者 即便無壓縮變形，凸部亦無間隙地卡合於凹部。 :¾•採用上述構成，則可不使用剛性較大型護膜用框體更 高之增強材料或接著劑、特殊之焊接技術等，而使彎曲剛 性或剪切剛性成為於實用上不存在問題之位準。又，藉由 將大型表膜貼附於此種大型護膜用框體後之由膜張力所引 起之朝内側的彎曲等’接合部上之應力集中得到緩和，因 此難以於接合部上產生間隙或裂痕等’尺寸、形狀穩定， 154681.doc -16· 201135351 且由裂痕尊所引起之發塵之產生較少，故較佳β因此，即 便於將大型護膜固定在操作夾具上進行檢品時使位置朝各 種方向變化之情形時’大型護膜亦難以自操作爽具上掉 落。 又，與自一塊母材之切出相比，藉由使用構件（具有接 合部之框體）’切削加工工時減少’且加工時施加於框體 之殘留應力變小。又，若考慮素材之異向性，則分割框體 更可使用相同方向性之構件’因此框體整體之異向性變 小。由於殘留應力或異向性如上述般變小，因此大型護膜 製造步驟内之加熱步驟中之由應力應變等所引起的釋放變 小，大型護膜之尺寸（熱尺寸）穩定，故較佳。因此，無需 為了釋放殘留應力而事先進行加熱處理等，亦產生步驟數 減少這一製造上之優點。又，由於應力應變隨時間經過而 朝向釋放方向，因此殘留應力較小之分割框體即便長時間 保管，尺寸亦穩定，故較佳。 尤其，當框體包含金屬構件時，較佳為於護膜用框體之 軸方向剖面之XRD測定結果中，（11!)面之峰值強度/(2〇〇) 面之峰值強度之比率為1.0以下。（2〇〇)面之峰值強度佔支 配地位即意味著金屬構件之結晶更整齊地配置在垂直於護 膜用框體之軸方向的面方向上（等向性變大，異向性變 小）。因此，成形之時間點之内部應力進一步減少，故而 容易形成尺寸穩定性優異之框體。又，當對框體進行加熱 時，由於内部應力本來就少，而且結晶整齊地配置在垂直 於軸方向之面方向上，因此應力容易均勻地釋放，且難以 154681.doc 201135351 產生變形。 (ill)面之峰值強度/(200)面之峰值強度之比率更佳為〇 8 以下’進而更佳為0.4以下。 此處’所謂（111)面之峰值’係指於利用了 Cu_Ka線之X 射線繞射測定中，繞射角度（20)處於37〇〜39 5度之範圍内 之繞射峰值，所謂（200)面之峰值，係指於利用了 Cu_Ka線 之X射線繞射測定中，繞射角度（2Θ)處於43 0〜45 5度之範 圍内之繞射峰值。 進而，利用複數個構件形成框體，藉此可進行母材之平 坦性較佳之部位之切出，接合後之框體之平坦性亦得到提 昇。亦可自較小之母材製作較大之框體，亦具有成本降低 之優點。 於上述大型護膜用框體中，將凸部之根部側之最大橫尺 寸⑴形成Α車交前端冑之最大橫尺寸⑺更短就尺寸穩定性 面而„較佳。進而’較佳為將凸部之根部側之最大橫尺 寸⑴設定成相對於設置有凸部之構件之寬度為5%〜8〇%的 長度’將凸部之前端側之最大橫尺寸（v)設定成相對於設置 有凸部之構件之寬度為㈣〜㈣的長度。此處，亦設相數 值根據構件之寬度方向之定位而變化的情形，但寬度方向 之測疋位置並無特別限制’只要藉由寬度方向之任一測定 位置滿足上述條件即可。再者，寬度之尺寸只要於大型表 之寬度及光罩黏著劑側之寬度之任-者中進入上述 數值範圍内即可。 又’於上述大型護膜用框體中，較佳為將凸部之根部側 154681.doc 201135351 之最大橫尺寸⑴設定成相對於設置有凸部之構件之厚度為 5%〜80。/。的長度，將凸部之前端側之最大橫尺寸（v)設=成 相對於設置有凸部之構件之厚度為1〇%〜9〇%的長度。此 處，亦設想數值根據構件之厚纟方向《定位巾變化的情 形’但厚度方向之载位置並無特別限制，只要藉由厚度 方向之任一測定位置滿足上述條件即可。 再者’所謂凸部之根部側之最大橫尺寸⑴，係指於構件 之接合端面連接有凸部之根部部分之最大尺寸(例如，如 俯視下圖7⑷所示之2點間之距離t)，#謂凸部之前端側之 最大橫尺寸⑺，係指相對於構件之長度方向大致為直角之 方向上的凸部之前端側部分»根部部分以外之部分）之最 大尺寸。 ，精由將接口部設定為3個部位以上，平坦性之調整 變得容易，故較佳。藉由如上述般設定成3個部位以上， 可提高構成大型護膜用框體之各個部分之加工精度，藉此 與自一塊母材之切出相比，可容易地顯現出平坦性之精 度’尺寸精度提高。 又’於上述大型護膜用框體中，_設定為具有在與 Ρ之嵌β時因凹部之内周面而朝内部壓縮變形的剩餘外 周部分、或者將凹部 疋為具有在與凸部之嵌合時因凸部 二而朝内部屋縮變形的剩餘外周部分。若採用上述 周部分被屋碎而朝外方向:屮自上下方向歲合，藉此剩餘外 士 ' 6 D /出，由此使各接合部分無間隙 ’、捃地且牢固地接合’故而即便不使用剛性較框體更 15468丨.doc •19- 201135351 问之增強材料等，彎曲剛性或剪切剛性等亦變高。又，藉 由存在剩餘外周部分，不再需要接著劑，亦不擔心曝光中 之逸氣。較佳為剩餘外周部分之尺寸至少為〇 〇〇1 mm以上 (例如0.G05 mm以上、〇」職以下）。再者於剩餘外周部 分大致為〇 mm之情形時，亦可使用接著劑等。 圖4係表示使用與圖2不同之分割框體所構成之大型護膜 用框體之一例（其他實施形態）的圖。圖4係4分割框體之 例於大型濩膜用框體2中，構成開口部4之周緣部之框部 係由作為分別構成一對長邊4a、4b之構件的分割框體 a 41 b以及作為分別構成一對短邊4c、4d之構件的分 割框體41c、41d形成。即，大型護膜用框體2沿著構成開 口部4之周緣部之框部的轴方向具有4個部位之接合部。於 大至護膜用框體2中，長邊4a與長邊4b之長度係相等地形 成，短邊4c與短邊4d之長度係相等地形成。 又，圖5係表示圆4所示之大型護膜用框體之角部附近之 一例的放大立體圖。藉由設定成如圖5之接合部，可不使 用剛性較框體更高之構件或接著劑等，而維持大型護膜用 框體之於實用上無問題之剛性及尺寸穩定性，又，可提β 良率。 幵 圖6亦係表示使用與圖2不同之分割框體所構成之大型^ 膜用框體之-例（其他實施形態）的圖。圖6所示之大型護; 用框體2為8分割構造，係使8個分割樞體接合而構成。义 該大型護膜用框體2中，構成開口部4之周緣部之框部係: 作為分別構成一對長邊5a、5b之構件的分割框體$ 15468l.doc -20- 201135351 51a’、5ib、51b· ’以及作為分別構成一對短邊心、w之構 件的分割框體51c、51c’、51d、51d，形成。即，大型護膜 用框體2沿著構成開口部4之周邊部之框部的軸方向具有8 個部位之接合部。於大型護膜用框體2中，長邊5a與長邊 5b之長度係相等地形成，短邊5c與短邊5(}之長度係相等地 形成。 於圖2〜圖5所示之實施形態之大型護膜用框體中，以將 接合部設置於角部附近之形狀為例進行了圖示，但如圖6 所示，亦可將接合部設置於各邊之各個所需部位。於將接 合部設置於各邊之各個所需部位之情形時，可藉由接合部 而緩和由大型護膜製作步驟内之加熱等所引起之熱膨張， 故較佳’但更佳為將接合部設置於角部附近。 於圖2所示之實施形態之大型護膜用框體中，亦可採用 構成對向之一對長邊之2根長邊用構件、構成對向之一對 紐邊之2根短邊用構件、以及構成4個角部之角部用構件， 使長邊用構件及短邊用構件之端部分別接合於角部用構 件，並經由角部用構件而連結長邊用構件及短邊用構件， 藉此製成俯視下為長方形之框體。 又，於圖4或圖5所示之實施形態之大型護膜用框體中， 亦可採用構成對向之一對長邊之2根長邊用構件、構成對 向之一對短邊之2根短邊用構件，使長邊用構件及短邊用 構件之端部彼此接合而製成俯視下為長方形之框體。如 此，於各個角部具有接合部，藉此可將接合部配置於俯視 下為長方形之框體之角部附近。而且，於將接合部設置於 154681.doc •21 - 201135351 近之情形時，由於切出一條邊，因此生產性提高， 丑藉由在剛性較高之角部㈣接合而可保持與來自一塊 可刀出物相同之剛性，進而，角部保持直角性，因此 11 、曝光中之有效曝光面積（尺寸穩定），故較佳。 圖7係圖4及圖5所千夕杳^ & 固所不之霄施形態之大型護膜用框體之接 口。p的放大圖。又，圖8⑷係圖6所示之實施形態之大型護 ，用框體之接合部的放大圖’圖8(b)係其變形例。圖9係各 實施形l之大型遵膜用框體之接合部之變形例的放大圖。 ;圖_中可取（a)、⑻、⑷任—者之形狀。又該等始終 係例示，並不限制接合部之形狀。 、 如圖7⑷所示’於本發明之各實施形態之大型護膜用框 中於所接口之一個構件（分割框體）之端部設置有向所 接合之另一個構件（分割框體）突出之至少一個凸部p，於 另一個構件（分割框體）之端部設置有使該凸部P嵌合之凹 部C。而且，藉由使凸部p嵌合於凹部c中，而將一個構件 (分割框體）之端部接合於另_個構件（分割框體）之端部。 藉由如上述般設定成將接合部作為嵌合部之形狀，接合 部之f曲剛性或剪切剛性成為於實用上不存在問題之位 準，於貼附有大型表膜時框體朝内側彎曲，但即便於此情 形時，應力集中亦得到緩和，因此難以於接合部上產生間 隙或裂痕等，且即便利用分割框體，尺寸亦穩定，故較 佳。 於本貫施形態之大型護膜用框體中，如圖7所示，較佳 為將设置於一個構件之端部（接合部端面S)之凸部p之根部 154681.doc -22- 201135351 伽】部分的最大橫尺寸t設定成較該凸部p之前端側部分(嵌入 至另一個構件之接合部内部U所形成之凹部C中的部分）之 最大橫尺寸V更短。可於構件（分割框體）之寬度方向上具有 此種構造，亦可於厚度方向上具有此種構造。當於寬度方 向上具有此種構造時，防止使膜展開後之框體之朝内側之 f曲故更佳，s於厚度方向上具有此種構造時，即便内 壁或外壁上存在隆起，塗佈光罩黏著材料或膜接著劑之寬 度方向亦變得平坦，故較佳。 較佳為將凸部P之根部側之最大橫尺寸〖設定成相對於設 置有凸部P之構件之寬度為5%〜8〇%的長度。又，較佳為將 凸部P之前端側之最大橫尺寸V設定成相對於設置有凸部p 之構件之寬度為10%〜90%的長度。進而，更佳為將凸部p 之根部側之最大橫尺寸t設定成相對於構件之寬度為 7%〜60%的長度’進而更佳為設定成嶋〜娜的長度。 又，更佳為將凸部P之前端側之最大橫尺設定成相對於 構件之寬度為15。/。〜75%的長度，進而更佳為設定成 20。/。韻的長度。再者’上述各個最大橫尺寸於相對於接 合部之寬度具有複數個之情料，表示各自之最大接合距 離之總和。 於凸部Ρ之根部側之最大橫尺寸“目對於構件之寬度小於 5%的情形時，存在接合部（嵌合部）處之卡合較弱，左右之 拉伸強度降低之可能性，或者存在如下之可能性，$於貼 附有大型表膜時框體朝内側f曲時，接合端面接合部受到 較大之集中應力，而於接合端面部產生間隙或裂痕，故不 15468 丨.doc -23· 201135351 佳°又’於凸部p之根部側之最大橫尺寸t相對於構件之寬 度大於80°/。的情形時，於自上下進行嵌合時，凸部p被壓 碎而朝外方向膨出’因此存在框體之内外側面隆起之可能 性而不佳。進而，於凸部p之前端側之最大橫尺寸v相對於 構件之寬度小於1 〇%的情形時，存在接合部（嵌合部）處之 卡合較弱，左右之拉伸強度降低之可能性，或者存在如下 之可能性，即於貼附有大型表膜時框體朝内側彎曲時，接 合端面接合部受到較大之集中應力，而於接合端面部產生 間隙或裂痕，故不佳。又，於凸部p之前端侧之最大橫尺 寸V相對於構件之寬度大於9〇%的情形時，於自上下進行 嵌合時，凸部P被壓碎而朝外方向膨出，因此存在框體之 内外側面隆起之可能性而不佳。 又，較佳為將凸部P之根部側之最大橫尺+ t設定成相對 於設置有凸部P之構件（分割框體）之厚度為5%〜8〇%的長 度。又，較佳為將凸部P之前端側之最大橫尺Ivs定成相 對於設置有凸部P之構件（分割框體）之厚度為10%〜9〇%的 長度。進而，更佳為將凸部P之根部側之最大橫尺+ t設定 成相對於構件之厚度為7%〜60%的長度，進而更佳為設定 成10%〜40。/。的長度。更佳為將凸部p之前端側之最大橫尺 寸v設定成相對於構件之厚度為15%〜75%的長度，進而更 佳為設定成鳩〜游。的長度。再者’上述“最大橫尺寸 於相對於接合部之厚度具有複數個之情形時，表示各自之 最大接合距離之總和。 於凸部P之根部側之最大橫尺寸t相對於構件之厚度小於 15468l.doc •24· 201135351 5/ό的情形時，存在大型農膜田描祖a 穴生表膜因膜張力而朝内側彎曲時， 接5部容易鬆動之可能性，故 .._ 入於凸部P之根部 側之最大橫尺寸t相對於構件之厚度大於8〇%的情形時，於 自左右進行嵌合時，凸部續屋碎而朝外方向膨出，因此 存在^體之上下側面隆起之可能性而不佳。進而，於凸部 P之前端側之最大橫尺^相對於構件之厚度小於⑽的情 形時，存在大型表膜因膜張力而朝内側f曲時，接合部容 易鬆動之可能性，始X杜e v .. ““生故不佳。又，於凸㈣之前端側之最大 橫尺寸V相對於構件之厚度大於90%的情形時於自左右 進行嵌合時’凸部Ρ被屋碎而朝外方向膨出，因此存在框 體之上下側面隆起之可能性而不佳。於上下側面隆起之情 形時，亦存在框體之平坦性變差、貼㈣度變差 性，故不佳。 ％ 作為凸部Ρ之形狀，可採用：圓形之穿孔形狀、横形 狀角开/狀、二角形狀、其他各種形狀（如拼圖玩具中所 h用之形狀等）。凸部ρ之個數可相對於構件（分割框體）之 寬度或厚度而存在i個至複數個。於為之㈣時，相對 於框體之朝内側之„，應力集Μ施加於自接合部端面 起之起始端部’因此亦存在接合部端面產生裂痕或間隙之 可能性。因此，亦可利用其他接合方法並藉由鉚接或接著 d等辅助&地使接合部端面接合。由於大型護膜用框體之 寬度或厚度並不那麼大’因此更佳為⑽—個，進而更佳 為1個〜2個。 再者’於如用b圖9(c)所示之特殊之形狀之凸部p的情 15468l.doc •25· 201135351 形時，亦可將凸部P之根部側部分之最大橫尺寸定成與 凸。卩p之則端側部分之最大橫尺寸v相同程度的長度。 又，於本實施形態之大型護膜用框體中，設置於所接合 之一個構件之端部之凸部p如圖7(b)所示，具有當與設置 於所接合之另一個構件之端部之凹部C的嵌合時因凹部C 之内周面而朝内部壓縮變形之剩餘外周部分（以下，稱為 「接合間隙」）G »接合間隙G之尺寸較佳為〇」mm以下。 ‘進行接s時，自上下或左右進行嵌合，該接合間隙G於 嵌合時被壓碎而朝外方向膨出，因此可緊密地接合。若接 合間隙G之尺寸大於o.i mm，則壓碎部分變大於框體之 上下左右方向產生隆起，故不佳。藉由具備該接合間隙 G，不需要接著劑等，僅進行嵌合便可牢固地接合。接合 間隙G之尺寸較佳為設定成〇.〇〇5 mm〜〇〇6 mm，更佳為設 定成 0·01 mm 〜0.04 mm。 又，為了即便於將大型護膜用框體設定成分割框體之情 形時，亦可不於接合部使用剛性較高之構件等而維持剛性 及尺寸穩定性，並且提昇良率，較佳為將接合部之接合強 度設定成10 kgf以上。藉由設定成10 kgf以上，即便係分 割框體，亦可抑制彎曲或變形，並且可確保剛性。又，利 用經分割之框構件來構成大型護膜用框體，藉此可容易地 調整尺寸，可確保尺寸精度，並且可使製造步驟簡單化。 因此，可容易地獲得與不具有接合部之框體相同之尺寸精 度。因此，即便於設定成分割框體之情形時，亦可不於接 合部使用剛性較高之構件等而維持剛性及尺寸穩定性，並 154681.doc •26· 201135351 且可提昇良率。 又，藉由設定成分割框體，與自一塊片材狀母材之切出 相比，切削加工工時減少，且加工時施加於框構件之殘留 應力變小。又，若考慮素材之異向性，則可使用相同方向 性之框構件，因此大型護膜用框體整體之異向性變小。由 於殘留應力或異向性如上述般變小，因此大型護膜製造步 驟内之加熱步驟中之由應力應變等所？丨起的釋放變小，大 里4膜之尺寸穩^；。因&，無需為了釋放殘留應力而事先 進行加熱處理等，亦產生步驟數減少這一製造上之優點。 又’由於應力應變隨時間經過而朝向釋放方向，因此殘留 應力較小之分㈣體即便長時間保管，亦可確保尺寸之穩 進而矛|J用複數個框構件形成大型護膜用框體，藉此可 才之平坦性較佳之部位之切出，接合後之大型護膜 :體之平坦性亦得到提昇。又，亦可自較小之母材製作 大型護膜用框體’亦具有成本降低之優點。 與部係由形成於框構件之-端部之凸部、以及 ^、轉件之―端部之W接合#日冑構A。藉由設 =種構成’可良好地將接合部之接合強 較佳為接合部係藉由嵌合、 合。藉由使用該等接合方法， 強度。 接著劑及鉚接之任一者而接 可充分地確保接合部之接合 較佳為框構件係 以使對向之一對長邊與對向 之一對短邊 154681.doc -27· 201135351 形成角部的方式構成，且接合部之至少—個與處於最靠近 接合部之距離之角部之間的距離為設置有接合部之邊之長 度的45。/。以下。根據此種構成，框體為矩形狀，角部附近 之剛性較高，因此藉由將接合部配置於角部之附近，可維 持剛性，從而可抑制大型護膜用框體之彎曲等。又，藉由 將接合部設置於角部附近，吉电，祕介纖乂土 7 ^ 1角性亦變佳，成為保持矩形 之形狀之方向’因此可使大型護膜用框體之彎曲量變成公 差之範圍内（0%〜3%)。 又，對大型護膜用框體貼附大型表膜係對大型護膜用框 體施加負荷來進行，但該負荷根據裝置而不同，為ι〇 kgf〜70 kgf。因此，需要不會因根據裝置而各不相同之負 荷導致接合部變形之對策。χ，於大型護膜用框體之形狀 偏離特定之尺寸的情形時，&了進行尺寸修正，對接合部 局部地加重，接合部有可能變形。為了解決該等課題，接 合部之接合強度較佳為10 kgf以上，更佳為15 kgf以上， 進而更佳為25 kgf以上。 作為達成如上所述之接合部之接合強度，且於外觀上亦 可用作大型護膜之接合方法，較佳為使分割框體嵌合、或 者使用接著劑等。於進行嵌合之情形時，較佳為於接合之 端部設置有凸部，於另一端部設置有使凸部嵌合之凹部的 形狀。進而，凸部之根部尺寸（基端側尺寸）小於前端側之 最大橫尺寸之形狀亦可抵抗朝向長度方向之拉伸，故更 佳0 如以上所說明般，於大型護膜之大型護膜用框體中，將 15468l.doc •28- 201135351 分割框體之接合部之接合強度設定為1〇 kgf以上，因此即 便係分割框體，亦可抑制彎曲或變形，並且可確保剛性。 又’利用分割框體來構成大型護膜用框體，藉此可容易地 調整尺寸，可確保尺寸精度，並且可使製造步驟簡單化。 因此，可容易地顯現出與不具有接合部之框體相同之尺寸 精度。因此，當使用分割框體時，亦可不於接合部 22a〜22h使用剛性較高之構件等而維持剛性及尺寸穩定 性，並且可提昇良率。尤其’於大型護膜】為大型之情形 時’本實施形態之構成更有效。 本發明之大型護獏用框體之框部亦可藉由化學反應型之 接著劑*龍部之端部彼此接合。作為接㈣，例如可使 用：丙烯酸樹脂接著劑、環氧樹脂接著劑、聚梦氧樹脂接 著劑、或者含氟聚矽氧接著劑等氟系聚合物。又，作為進 灯黏著支撐之黏著材料，可使用：苯乙烯-乙烯·丁烯-苯乙 烯、苯乙烯-乙稀·丙稀.苯乙稀、或烯烴系等之熱熔黏著材 料、料氧系料材料、㈣酸系㈣㈣、或者以發泡 體為基材之黏著膠帶或發泡熱熔黏著材料等。 黏著材料層之厚度較佳為於大型護膜用框.之厚度與 黏著材料厚度之合計不超過所規定之大型表膜3與光罩^ 距離的範圍内設定’例如較佳為較成Gqi _以上、^ mm以下。 又， 在空間 劑塗佈 若將大型表膜3貼附於光罩時於點著劑層之内側存 ’則異物有可能滯留於該空間内。因此，當將點著 於大型護膜用框體2之下緣面時，考慮到點著劑層 154681.doc •29· 201135351 因將大型護膜1貼附於光罩時之加壓而被壓碎並擴大之情 況後’較佳為以加壓時黏著劑不突出至開口部4之程度靠 近大型護膜用框體2之開口部4内側進行塗佈。具體而言， 較佳為以使黏著劑層内側之空間之寬度成為黏著劑層之塗 佈寬度之0·35倍以内的方式進行塗佈。較佳為黏著劑層之 塗佈寬度相對於大型護膜用框體2之各邊23〜2(1之寬度為 〇.3〜〇_6倍，且較佳為沿著大型護膜用框體2之各邊2a〜2d進 行塗佈。作為保護黏著材料之保護膜，可使用包含聚對苯 一甲酸乙一酯樹脂或聚乙烯樹脂之膜。又，亦可對應於黏 著材料之黏著力，將脫模劑，例如聚矽氧系脫模劑或氟系 脫模劑塗佈於保護膜之表面。保護膜之厚度較佳為例如 0.01 mm以上、1 mm以下。 具有3個部位以上之接合部之框體至少可將構成框體的 構件分成2個以上，因此於製造步驟上，容易提昇構成大 型護膜用框體之各部分之加工精度或尺寸精度，作為結 果，與接合部為一個部位之情形相比，可提昇框體之尺寸 精度。因此，使控制框體之尺寸精度本身變得容易，藉此 控制將大型表膜貼附於框體時之框體之彎曲量本身變得容 易，可使大型護膜用框體之尺寸穩定性提昇。此處，就加 工上之偏差之觀點而言，較佳為各構件儘可能較小，即， 越利用多個構件製作框體越佳。 又，利用化學反應型之接著劑使接合部接著，藉此可使 框體之剛性與尺寸穩^性提昇。藉由使用化學反應型之接 著劑’可於調整接合角度或間隙等目標之尺寸後，藉由外 154681.doc -30· 201135351 邛刺激而使反應開始，且易於維持固定原先之位置，因此 可提昇尺寸穩定性。 其中’接著劑較佳為液狀，若使用液狀之接著劑，則接 著劑滲入至接合部，液體遍佈整個接合部，因此就製造上 及剛性之觀點而言較佳。進而，於液狀之中，較佳為丙烯 酸系或環氧系之接著劑。所謂丙烯酸系接著劑，係指反應 前之單體具有下述化學式（1)之接著劑，其中，更佳為藉由 紫外線而硬化之uv硬化型接著劑、藉由熱而硬化之熱硬 化型接著劑、藉由阻斷空氣而硬化之厭氧性硬化型接著 劑、將微量之水分作為起始劑而開始反應之氰基丙烯酸酯 (R=CN)型瞬間接著劑等（R為Η或C)。 [化1] CH2 = CR(C=〇)〇. 又，作為環氧系之接著劑，有一液型與二液型，可使用 任者，但於護膜製造製程上，一液型之環氧系熱硬化型 之接著劑較二液型之環氧系熱硬化型接著劑更有效，故較 佳。實際使用之接著劑之總量為微量，一液型之接著劑亦 無需一面考慮計量、混合或使用期限一面使用，因此較二 液型之接著劑更佳。於使用二液型之情形時，亦存在為了 提南計量精度而使用超過所需之接著劑，從而對環境造成 負擔之情形，若過於在意環境負擔而設定為少量混合，則 存在計量精度下降之傾向，若自計量至反應開始為止之時 間不固疋，則反應性產生偏差。因此，存在硬化度產生差 異、物性產生差異之可能性。該硬化度之差異有可能使接 154681.doc -31 · 201135351 者劑之厚度ϋ接合部位而變得不均勾、或者有可能成為變 形之原因、或者有可能成為尺寸之偏差之原因，因此於使 用二液型之情形時必需注意。但是’作為即便係二液型亦 有效之接著劑，於丙烯酸系中可使用改性丙烯酸系之接著 劑、或者於環氧系中可使用熱硬化型之接著劑。改性丙烯 s文系之接著劑雖然為二液型，但無需混合，僅藉由於所接 合之一面分別塗佈一液並進行壓接，便可使其硬化。 進而就耐光性方面而言，較佳為丙稀酸系之接著劑， 具體而 5，較佳為 Three Bond 2247、2242、2249G(均為[Technical Field] The present invention relates to a frame for a large protective film for preventing foreign matter from adhering to a manufacturing such as IC (Integrated Circuit), lsi (Large Scale Integration) : a large-sized integrated circuit) or a photomask or a reticle used in a lithography step in a semiconductor device such as a TFT-type LCD (Lith Film Transistor-Liquid Crystal Display). [Prior Art] In the manufacture of a semiconductor circuit pattern or the like, a dustproof mechanism called a protective film is disposed on both sides of a photomask or a reticle to prevent foreign matter from adhering to the reticle or the reticle. As a general structure of the protective film, a transparent film such as a polymer or glass may be attached to one side of a metal, ceramic or polymer frame, and the opposite side may be provided to be attached to the photomask. The structure of the adhesive layer (adhesive material). For example, the protective film is attached to one of the frames having a thickness of about several millimeters in shape matching the shape of the reticle or the reticle, and is unrolled and then included to contain nitrocellulose or cellulose having a thickness of 10 Pm or less. A film of a transparent polymer film or the like, and adhered to the surface of the reticle or the reticle via the adhesive material on the other edge of the frame for the film. When a foreign matter adheres to the surface of the reticle or the reticle, the foreign matter is imaged on the photoresist formed on the semiconductor circle to cause a circuit pattern defect, but the film is placed on the reticle or In the case of at least the patterned surface of the reticle, the foreign matter attached to the surface of the protective film is offset by the focus position, so it is not at 154681. Doc 201135351 The semiconductor is formed on the photoresist formed on the circle, so that the circuit pattern does not cause defects. In addition, in recent years, due to the spread of various multimedia, it is desired to use a large-sized color TFT that can be applied to a large-sized color TFT that can be used for high-definition display. . For example, Patent Document 1 proposes a large protective film that can be applied to a large reticle. Further, in Patent Document 2, there has been proposed a frame body using a reinforcing material having a frame body and a larger elastic modulus than the frame body in order to cope with bending or deformation of the frame for a large protective film. Further, in Patent Document 3, a frame in which two or more materials having different elastic modulus are joined in the thickness direction of the casing is proposed, and is used as an exposure for exposure requiring high resolution. A cover for a film that is exposed to ultraviolet light of 〇〇 nm or less and does not affect the flatness of the reticle. Further, Patent Document 4 discloses a mask frame for a liquid crystal display as a joint frame of another field. CITATION LIST Patent Literature Patent Literature 1: Patent Publication No. 2001-109135 Patent Document 2: Japanese Patent Laid-Open No. Hei. No. 2006-284927. Patent Document 3: Japanese Patent Laid-Open Publication No. 2009-063740 Japanese Patent Laid-Open Publication No. 2005-141170 [Abstract] The problem to be solved by the invention is 154681. Doc 201135351 However, the frame system for a film is produced by punching a sheet-shaped base material, and there is a large number of frames for a film having no joint portion. This is based on the viewpoint of ensuring the flatness of the film. However, depending on the flatness of the base material, there is also a base material which cannot be used for the production of the frame for the film. Further, although there is a base material having flatness, the larger the size of the casing for the protective film, the less the accuracy of the flatness of the casing for the protective film is exhibited. Therefore, the manufacturing process takes time, which is a cause of deterioration in productivity, and also causes a high cost of the casing for the film. Further, with the increase in size, various factors such as the weight of the casing itself, the tension of the film, and the stress caused by the temperature change may cause a curvature or deformation in the casing for the film. Therefore, a cover for a film produced by punching a block-shaped base material having a high rigidity is generally used. The f-curvature or deformation of the casing for such a film is not preferable from the viewpoint of the workability of the casing or the film for the film. In other words, if a bending or deformation occurs in the casing for the film, an air path may be generated between the casing for the film and the mask. In addition, the f-curve or the deformation of the frame for such a film is produced by attaching the film to the frame for the film, and the tension of the film is directed toward _, but it is ensured by the manufacturer of the mask. Since the exposure area is required, it is necessary to reduce the ringing or deformation of the frame for such a film as much as possible. On the other hand, there is a cross section of the frame for increasing the film to be described! The pot is used to increase the rigidity of the frame for the enamel film, but this method is not preferable if the effective exposure area or the like is considered. For the above reasons, it is advantageous to use the divided frame (hereinafter referred to as "divided frame") as the frame for the large film, 154681. Doc 201135351 However, the partitioned frame is satisfactory and can only be used practically. There is a possibility that the frame is bent or deformed, and it is not a rigid property. Therefore, this point is not currently available as a product. In the case of p, seven, and the patent document 2, in order to secure rigidity, use A special method such as a agent or a rubber (four) mixing tandem joint is used to join a member having a higher rigidity than the shield body to the joint portion of the divided frame body. However, it is not easy to firmly hold the components of different materials, X, such as the accumulation of adhesive: the joint needs special processing, and it is worried that the adhesive in the exposure will generate a gas, and it needs to be taught as friction. Special welding techniques such as welding. The present invention has been made in view of the above circumstances, and an object of the invention is to provide a large-sized protective film frame and a large protective film which are excellent in operability and can suppress the generation of an air path during use. MEANS FOR SOLVING THE PROBLEMS The inventors of the present invention have made it possible to solve the above problems by finding a large-sized protective film member having a specific structure in order to achieve the above object, thereby completing the present invention. In other words, the frame system for a large-sized protective film of the present invention has an opening having a rectangular shape in plan view, and the frame portion forming the periphery of the opening has three or more joint portions along the axial direction of the frame portion. Since the protective film frame has three or more joint portions, each of the divided frame portions functions as a reinforcing material, and the bending of the frame can be cooperatively reduced. That is, the overall rigidity of the protective film frame is increased, and the bending can be suppressed. Therefore, for example, the large protective film is fixed on the operation jig for inspection. Doc 201135351 ttan 1P changes the position in various directions, and it is difficult for the film to be self-operated by the jig 7 and then by the rigid advancement step, the attachment time of the (4) reticle is better, and the precision is maintained. Therefore, it is difficult to generate an air path, and the frame body can be formed by a plurality of members, whereby the portion where the flatness of the base material is better can be cut out. The flatness of the frame after joining is also improved. It is also possible to make a larger frame from a smaller base material, which also has the advantage of being low. - In addition, in the past, it is often the case that the 2-piece sheet-shaped base material is cut out of the protective film frame by punching out from the viewpoint of ensuring the flatness of the protective film. The present invention is an invention that violates this technical common sense and has an excellent effect as described above. Preferably, the joint portion is provided at a corner portion of the casing for the large protective film. Preferably, the frame portion includes at least one type of metal member selected from the group consisting of 绍 and New Zealand gold, and XRD (X-ray Diffraction) measurement in the axial direction cross section of the large-sized film casing As a result, the ratio of the peak intensity of the ((1)) plane/the peak intensity of the (200) plane was 1 〇 or less. In addition, it is preferable that the ratio of the peak intensity of the (111) plane/the peak intensity of the (2〇〇) plane is 0·8 or less in the xrd measurement result of the axial direction cross section of the large-sized protective film frame. Further, it is preferable that at least one convex portion that protrudes toward the other member to be joined is provided at an end portion of one member joined to the joint portion, and the convex portion is fitted to the end portion of the other member. The recess is joined to the end of the other member by fitting the projection into the recess. Again 154681. Doc 201135351 The term "fitting" in the present invention refers to a state in which a convex portion is formed slightly larger than a concave portion, or a concave portion is formed to be slightly smaller than a convex portion, or a convex portion and a concave portion are formed in the same size, and a convex portion is formed. The portion is inserted into the inside of the recess and connected. The convex portion is compressed and deformed toward the inside due to the inner peripheral surface of the concave portion, or the convex portion is engaged with the concave portion without a gap even without compression deformation. According to the above configuration, the bending rigidity or the shear rigidity can be made to have no problem in practical use without using a reinforcing material or an adhesive having a higher rigidity than the frame, a special welding technique, or the like. Further, the stress concentration on the joint portion is delayed by the film tension or the like caused by the film tension after the film is attached to the frame body, and (4) a gap or a crack is formed in the joint portion. The size and shape are stable, and the generation of dust generated by cracks or the like is less, which is preferable. Therefore, even when the large protective film is fixed to the operation jig and the position is changed in various directions when the sample is inspected, it is difficult for the film to fall off from the operation jig. Further, it is preferable that the area of the opening is 1000 cm 2 or more and 35 〇〇〇 cm 2 or less. Further, it is preferable that the joint strength of the joint portion is 10 kgf or more. In the large shin guard frame, the joint strength of the joint portion is set to 10 kgf or more. Therefore, even if the frame body is divided, bending or deformation can be suppressed, and rigidity β Μ can be secured. Further, the joint portion is preferably The ends of the joined members are formed by bonding with a chemical reaction type adhesive. By using the chemical reaction type adhesive as described above, the joint portion can be made to improve the rigidity and dimensional stability of the large-sized film casing. By using a chemical reaction type adhesive, it can be used at 154681. Doc 201135351 Adjusting the size of the joint angle or gap, the size of the eye, the reaction is started by external stimuli, and the position of the fixed mouth is easy to maintain, so the dimensional stability can be improved. In this case, the chemical reaction type adhesive preferably comprises at least one binder selected from the group consisting of an acrylic adhesive and an epoxy adhesive. The large protective film of the invention comprises. μ . +, including. Any of the above-mentioned large-sized protective film casings and a large-sized film which is supported by the large-sized protective film frame by the side of the shingling opening or the twi-type opening, and the effect of the invention is according to the present invention. A method for producing a large-sized protective film frame, a protective film, and a large-sized protective film frame which can suppress the generation of an air path during use. [Embodiment] Hereinafter, the best mode for carrying out the present invention (hereinafter simply referred to as "this embodiment") will be described in detail. Further, the present invention is not limited to the embodiment described below, and various modifications can be made without departing from the spirit and scope of the invention. First, the protective film of the embodiment of the present invention will be described. Figure H is a perspective view showing a large protective film according to an embodiment of the present invention. Large protective film 1 includes. The large-sized δ-manufacturing frame 2 and the large-sized film 3 on the upper edge surface 2e of the casing 2 for the large-size film are then unfolded. Further, although not shown, the large protective film 1 further includes an adhesive layer applied to the lower edge surface of the frame 2 for the large protective film, and adhered to the adhesive layer, and protects the adhesive layer 154681. Doc 201135351 protective film. The large-sized protective film frame 2 includes, for example, aluminum, aluminum alloy (5-inch system, 6-inch system, 7000 series, etc.), iron and iron-based alloys, ceramics (sic, A1N, Al2〇3, etc.), ceramics. Composite material with metal (A1_si (:, A1_Am, a1_A12〇3, etc.), carbon steel, tool steel 'stainless steel series, magnesium alloy, or resin such as polycarbonate S曰 resin, acrylic resin, etc., and is roughly rectangular in plan view Since the large protective film 1 is attached to the reticle via the adhesive layer, it is preferably high in rigidity and relatively small in weight, and is preferably made of aluminum, aluminum alloy, magnesium alloy, or resin. The large-sized protective film frame 2 is formed by joining a plurality of members as described later, but it is preferable that at least one of the joined members is formed of a material having the same elastic modulus. The surface treatment can be performed by alumite treatment, coating, coating coating, plating treatment, low-melting glass powder treatment, CVD (ChemiCal Vapor Deposition), PVD (Physical) using sputtering, etc. Vapor Deposition, physical gas phase The large-sized film casing 2 is composed of one pair of long sides 2a, 2b and a pair of short sides 2c, 2d which are shorter than the pair of long sides 2a, 2b. Further, in the large-sized protective film frame 2, the long side to the long side 2b are formed to have the same length, and the short side 2C and the short side 2d are formed to have the same length. The opening area of 4 is preferably 1 〇〇〇 cm 2 or more, more preferably 3,000 cm or more, more preferably 5,000 cm 2 or more, and even more preferably 10000 cm 2 or more, particularly preferably 18,000 cm 2 or more, and most preferably 23 _ or more. It is preferably 35,000 cm2 or less. 154681. Doc -10· 201135351 A pair of large-sized film casing 2 has a long side 2a and a column member of a width of, for example, 16 5 mm, and the length thereof is, for example, 175 〇 claws. Further, the pair of short sides 2c, 2d contain, for example, 18. A 5 mm wide column member with a length of, for example, 155 mm. That is, in the plan view (overview), the widths 2a and 2b of the short sides 2c and 2d have a wider width. The curvature of the corner portion (also referred to as the top portion) 5 of the large-sized film casing 2 becomes R = 20. In the following, it is assumed that the vertex when the corner portion 5 has no curvature is only described as the r vertex. A groove portion 7 is provided on the side surface 6 of the large-sized film casing 2 along the longitudinal direction (lateral direction). The other long-side cover 2a of the large-sized film cover 2 includes a columnar member having a width of, for example, 9 mm, and the length is, for example, 8 cm. Further, the pair of short sides 2c, 2d contain, for example, 7. The columnar member having a width of 〇 mm has a length of, for example, 48 〇, that is, in a plan view (overlooking view), the widths of the short sides 2c and 2d are longer and the widths of the sides 2 & 2b are narrower. The curvature of the corner portion 5 of the large-sized protective film frame 2 is, for example, R=20, and is along the longitudinal direction (lateral direction) on the side faces 6 of the short sides 2c and 2d of the large-sized protective film frame 2 A groove portion 7 is provided. The large-sized film 3 contains a transparent polymer film such as deuterated cellulose or a cellulose derivative, a polymer, or a cycloolefin polymer, and its thickness is preferably, for example, ruthenium.  1 μηι or more, 10 μηι or less. The large-sized film 3 is formed on the upper edge surface 2e so as to cover the opening 4 of the large-sized protective film frame 2, and is adhered and supported by the large-sized protective film frame 2. As the adhesive agent for attaching the large-sized film 3 to the upper edge of the frame 2 of the large-size film, for example, an acrylic resin adhesive, an epoxy resin adhesive, a polyoxy-resin adhesive, or a fluorine-containing polymerization can be used. Gasification such as helium oxygen bonding agent 154681. Doc 201135351 compound. Further, as the adhesive material for adhesive support, a hot-melt adhesive material such as styrene_ethylene-butylene-styrene, styrene-ethylene-propylene/styrene, or an olefin-based adhesive, or a polyoxygen-based adhesive material can be used. , an acrylic adhesive material, or an adhesive tape based on a foam. The thickness of the adhesive material layer is preferably set within a range of the thickness of the large-sized protective film frame 2 and the thickness of the adhesive material not exceeding the distance between the large-sized film 3 and the reticle, and is preferably, for example, 0. 01 mm or more and 10 mm or less. Further, when the large-sized film 3 is attached to the reticle and there is a space inside the adhesive layer, foreign matter may remain in the space. Therefore, when the adhesive is applied to the lower edge surface of the casing 2 for large-sized film, it is considered that the adhesive layer is crushed and enlarged by the pressure when the large film 1 is attached to the mask. It is preferable that the coating is applied to the inside of the opening 4 of the large-sized protective film frame 2 so that the adhesive does not protrude to the opening 4 at the time of pressurization. Specifically, it is preferable that the space inside the adhesive layer becomes the coating width of the adhesive layer. Apply within 3 5 times. Preferably, the coating width of the adhesive layer is 2 to 2 (the width of 1 is 〇3 to 〇6 times) with respect to the side of the large-sized protective film frame 2, and preferably along the frame 2 for the large protective film. The coating is applied to each of the sides 2a to 2d. As the protective film for the adhesive material, a film containing polyethylene terephthalate resin or polyethylene resin can be used, and it can also correspond to the adhesion of the adhesive material. 'A release agent such as a polyoxin type release agent or a fluorine type release agent is applied to the surface of the protective film. The thickness of the protective film is preferably, for example, 〇〇1 mm or more and 1 mm or less. 154681. Doc 12 201135351 Next, a description will be given with reference to Fig. 2 - a casing 2 for facing a large protective film. Fig. 2 (8-division structure) is a view (top view) of the large-sized protective film frame 2 used in the large-sized protective film cartridge shown in Fig. 2 from above. Further, the description of the joint portion is omitted in the figure. In the large-sized protective film frame 2, the frame portion constituting the peripheral edge portion of the opening portion 4 includes divided frame bodies 21a and 2b, which respectively constitute a pair of long sides 2a and 2b, and divided frames 2le, 21h, and 21f, 21g, these are connected to both end portions of the divided frames 21a and 21b in the axial direction via the joint portion, and form the corner portions 5 of the four portions of the large-sized protective film frame 2; and the divided frame 仏And 21d, the open ends of the divided frames 2ie are bridged to each other via the joint portion. In other words, the large-sized protective film frame 2 has a joint portion of eight locations along the axial direction of the frame portion constituting the peripheral edge portion of the opening portion 4. In the case where the joint portion is provided in the vicinity of the corner as described above, the joint portion may be provided in the vertical direction or the oblique direction with respect to the axial direction. Further, in FIG. 2, the large-sized protective film frame 2 is divided into a frame 2' and a divided frame in a clockwise direction with the opening axis of the opening 4 as a reference. 21d, the divided frame 2if, the divided frame 21b, the divided frame 21, the divided frame 21c, the divided frame, and the divided frame 2U are connected in this order. Here, in FIG. 2, the large-sized protective film frame 2 having eight joint portions is shown, but the number of the joint portions may be three or more, preferably 3 to 30, more preferably It is 3 to 25 parts, and more preferably 3 to 2 parts. As described above, in the casing 2t for large-size film, the lengths of the long side h and the long side are formed in the same manner as the length of the short side 2e and the short side 2d. Doc -13· 201135351 成. Further, the divided frame body 21a and the divided frame body 21b have substantially the same shape, and the divided frame body 21c and the divided frame body 21d have substantially the same shape, and further, the divided frames 2le, 21h, 21f, and 21g of the corner portions 5 are formed. The shapes are also substantially the same. Specifically, in FIG. 2, the length of the divided frames 21a, 21b is, for example, 700 mm, and the length of the divided frames 21c, 21d is, for example, 38 mm. The at least one of the joint portions is at the closest to the joint portion. The distance between the corner portions of the distance is preferably 45% or less of the length of the side portion where the joint portion is provided, more preferably 35% or less, still more preferably 25% or less, and the lower limit is preferably 0. /. More preferably, it is 5% or more. Here, it is more preferable that two of the joint portions are provided via a common corner portion, and the distance between the corner portion and the joint portion is in the above range. Further, the length Le of the long side is defined as the maximum distance in the direction of the long side axis of the opposite short side, and the length Ls of the short side is defined as the maximum distance in the direction of the short side axis of the opposite long side. Further, the distance LP between the joint portion and the corner portion closest to the joint portion is defined as the distance from the point at which the end surface of the divided frame forming the corner portion is farthest from the center of the opening portion 4 and the apex. Specifically, in Fig. 2, the length of the divided frames 21a, 21b is, for example, the length of the mm cutting frames 21c, 21d is, for example, 775 mm. Therefore, for example, the length of the Lp system Le is, for example, 25%, and the length of the Lp is Ls, for example, 25 〇 / 〇 〇 Furthermore, the length of the stomach-splitting frame is defined as the two ends of the divided frame 154681. Doc 201135351 The maximum length of the surface along the circumferential direction of the frame (the direction of the frame axis). Fig. 3 is an enlarged perspective view showing the vicinity of a corner portion of the casing 2 for a large protective film shown in Fig. 2 . The corner portion 5 of the large-sized film casing 2 is composed of, for example, a divided frame 21b constituting one of the long sides 2b, a short side 2 (a divided frame 21d which is a part of 1), and the divided frames are substantially The divided frame body 21f is formed in the right-angle direction. Here, the end surface of the divided frame body 21b and the end surface of the divided frame body 21d are respectively formed with convex portions, and the end faces of the divided frame body 21f are respectively formed with the above-mentioned The concave portion is formed to correspond to the concave portion, and the convex portion is in close contact with the concave portion to connect the members. Further, an adhesive or the like is applied to the adhesive surface, whereby the divided frame can be joined. From the viewpoint of the exposure area, the width of each side 2a to 2d of the large-sized film casing 2 is as fine as possible. However, if it is too fine, there is a possibility that the large film is formed when the large film 3 is unfolded. The frame 2 is bent by the tension of the large film 3. Therefore, the width of each of the sides 2a to 2d can be set to about 3 mm to 25 mm in order to form a thickness which takes into consideration the width of the rigidity with respect to the length of each side. Moreover, the thinner the thickness of the frame 2 for the large film, the more In the case of the large-sized film 1 which is light and easy to handle, if it is too thin, there is a possibility that the large-sized film frame 2 is bent by the tension of the large film 3 when the large-sized film 3 is unfolded. Therefore, the thickness of the large-sized protective film frame 2 can be set to about 3·5 mm to 12 mm in terms of the balance between the lengths of the respective sides 2a to 2d. It is limited to the above embodiment. For example, in the above-described embodiment, I54681. In the doc 201135351 state, the shape of each divided frame is made to some extent, but the shape of each divided c body may be different from each other. In the above embodiment, the joint portion is provided with eight portions', but may be set to four portions. In this case, for example, the divided frames 21c, 21h, and 21g may be formed as one divided frame, and the divided frames 21e, 21d, and 21f may be formed as one divided frame. Further, the joining method of the joint portion is not particularly limited, and an adhesive may be used in addition to the adhesive, or may be screwed. In addition, it is preferable that the frame system for a large-sized protective film has a large-sized protective film frame having an opening portion having a rectangular shape in plan view, and a member having a peripheral edge formed by joining the end portions to each other to form a peripheral portion of the opening portion. One end of one member is provided with at least one convex portion that protrudes toward the other member to be joined, and at the end portion of the other member, a concave portion that fits the convex portion is provided, and the convex portion is fitted to the concave portion The end of one member is joined to the end of the other member. In addition, the term "fitting" in the present invention means a state in which the convex portion is formed slightly larger than the concave portion, or the concave portion is formed to be slightly smaller than the convex portion, or the convex portion and the concave portion are formed in the same size, and the convex portion is formed. When the portion is inserted into the inside of the concave portion and joined, the convex portion is compressed and deformed toward the inside by the inner circumferential surface of the concave portion, or the convex portion is engaged with the concave portion without a gap even without compression deformation. :3⁄4•With the above configuration, it is possible to make the bending rigidity or the shear rigidity a practical problem without using a reinforcing material or a bonding agent having a relatively high rigidity type film casing, a special welding technique, or the like. quasi. In addition, since the stress concentration on the joint portion due to the film tension caused by the film tension after the large-sized film is attached to the frame for the large-sized film is alleviated, it is difficult to form a gap in the joint portion. Or cracks, etc. 'size, shape stability, 154,681. Doc -16· 201135351 And the generation of dust caused by the cracks is less, so it is better to use β. Therefore, even when the large protective film is fixed on the operation jig and the position is changed in various directions when the sample is inspected' Large protective film is also difficult to drop from the operating device. Further, the use of the member (the frame having the joint portion) is reduced by the use of the member (the frame having the joint portion), and the residual stress applied to the frame during the processing is reduced. Further, when the anisotropy of the material is considered, the member having the same directivity can be used for the divided frame. Therefore, the anisotropy of the entire frame is reduced. Since the residual stress or the anisotropy becomes small as described above, the release due to stress strain or the like in the heating step in the manufacturing process of the large protective film becomes small, and the size (heat size) of the large protective film is stable, so that it is preferable. . Therefore, it is not necessary to perform heat treatment or the like in advance in order to release residual stress, and there is also a manufacturing advantage in which the number of steps is reduced. Further, since the stress strain is directed toward the release direction as time passes, the divided frame having a small residual stress is preferable because it is stored for a long period of time and has a stable size. In particular, when the frame body includes a metal member, the ratio of the peak intensity of the (11!) surface to the peak intensity of the (2〇〇) surface is preferably the XRD measurement result of the axial cross section of the casing for the protective film. 1. 0 or less. The dominant value of the peak intensity of the (2〇〇) surface means that the crystal of the metal member is arranged more neatly in the plane direction perpendicular to the axial direction of the casing for the protective film (the isotropic property becomes larger, and the anisotropy becomes smaller) ). Therefore, the internal stress at the time of molding is further reduced, so that it is easy to form a frame excellent in dimensional stability. Further, when the frame body is heated, since the internal stress is originally small and the crystals are arranged neatly in the direction perpendicular to the axial direction, the stress is easily released uniformly and is difficult to be 154681. Doc 201135351 Deformation. The ratio of the peak intensity of the (ill) face to the peak intensity of the (200) face is preferably 〇 8 or less and further preferably 0. 4 or less. Here, the 'peak of the (111) plane' refers to the diffraction peak of the diffraction angle (20) in the range of 37 〇 to 39 5 degrees in the X-ray diffraction measurement using the Cu_Ka line, so-called (200) The peak value of the surface refers to the diffraction peak in the range of 43 0 to 45 5 degrees in the diffraction angle (2 Θ) in the X-ray diffraction measurement using the Cu_Ka line. Further, by forming the frame body by a plurality of members, the flat portion of the base material can be cut out, and the flatness of the frame after the joining is also improved. It is also possible to make a larger frame from a smaller base material, which also has the advantage of cost reduction. In the above-mentioned large-sized protective film frame, the maximum lateral dimension (1) of the root portion side of the convex portion is formed so that the maximum lateral dimension (7) of the front end of the brake conveyance is shorter, and the dimensional stability surface is preferable. Further, it is preferable The maximum lateral dimension (1) of the root portion side of the convex portion is set to be a length 5% to 8 〇% with respect to the width of the member provided with the convex portion. The maximum lateral dimension (v) of the front end side of the convex portion is set to be relative to the setting. The width of the member having the convex portion is the length of (4) to (4). Here, the phase value is also changed depending on the positioning of the width direction of the member, but the measurement position in the width direction is not particularly limited 'as long as the width direction Any of the measurement positions may satisfy the above conditions. Further, the width may be within the above numerical range as long as the width of the large watch and the width of the reticle adhesive side are within the above numerical range. In the frame for the film, it is preferred that the root portion of the convex portion is 154681. The maximum lateral dimension (1) of doc 201135351 is set to be 5% to 80 with respect to the thickness of the member provided with the convex portion. /. The length is set such that the maximum lateral dimension (v) of the front end side of the convex portion is set to be a length of 1% to 9〇% with respect to the thickness of the member provided with the convex portion. Here, it is also assumed that the numerical value is based on the thickness direction of the member "the condition in which the positioning towel changes", but the position in the thickness direction is not particularly limited, and any of the measurement positions satisfying the above conditions can be satisfied. Further, the maximum lateral dimension (1) of the root portion of the so-called convex portion refers to the maximum dimension of the root portion where the convex portion is connected to the joint end surface of the member (for example, the distance t between two points as shown in Fig. 7 (4) in plan view) The maximum lateral dimension (7) of the front end side of the convex portion refers to the maximum dimension of the portion other than the front end portion portion » the root portion of the convex portion in the direction substantially perpendicular to the longitudinal direction of the member. It is preferable to set the interface unit to three or more positions, and it is easy to adjust the flatness. By setting it as three or more parts as mentioned above, the processing precision of each part which comprises the frame|size of the large film is improved, and the precision of the flatness can be easily demonstrated compared with the cutting out of a base material. 'The dimensional accuracy is improved. Further, in the above-mentioned large-sized protective film frame, _ is set to have a remaining outer peripheral portion which is compressed and deformed internally by the inner peripheral surface of the concave portion when the yttrium is embedded with β, or has the concave portion 具有 as having the convex portion The remaining outer peripheral portion that is deformed toward the inside by the convex portion 2 at the time of fitting. If the above-mentioned part of the circumference is broken in the outward direction: the 岁 岁 岁 岁 , , , , , , 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 Not using rigidity more than the frame is 15468 丨. Doc •19- 201135351 When the reinforcing material is applied, the bending rigidity or shear rigidity is also high. Moreover, by the presence of the remaining peripheral portion, the adhesive is no longer needed, and there is no fear of an escape during exposure. Preferably, the remaining peripheral portion has a size of at least 〇 1 mm or more (for example, 0. G05 mm or more, 〇" below the job level). Further, when the remaining outer peripheral portion is approximately 〇 mm, an adhesive or the like may be used. Fig. 4 is a view showing an example (other embodiment) of a casing for a large-sized protective film which is formed by using a divided frame body different from that of Fig. 2; 4 is an example of a four-divided frame. In the large-sized frame 2, the frame portion constituting the peripheral portion of the opening 4 is a divided frame a 41b which is a member constituting a pair of long sides 4a and 4b, respectively. And the divided frames 41c and 41d which are members which respectively comprise the pair of short sides 4c and 4d are formed. In other words, the large-sized protective film frame 2 has four joint portions along the axial direction of the frame portion constituting the peripheral edge portion of the opening portion 4. In the casing 2 for the film casing, the lengths of the long sides 4a and the long sides 4b are formed to be equal, and the lengths of the short sides 4c and the short sides 4d are formed to be equal. In addition, Fig. 5 is an enlarged perspective view showing an example of the vicinity of a corner portion of the casing for a large protective film shown by the circle 4. By setting the joint portion as shown in FIG. 5, it is possible to maintain the rigidity and dimensional stability of the large-sized protective film frame without practical use, without using a member or a bonding agent having a higher rigidity than the frame. Improve the beta yield.幵 FIG. 6 is a view showing an example (other embodiment) of a large-sized film frame formed by dividing the frame body different from that of FIG. 2 . The large-sized guard shown in Fig. 6; the frame body 2 has an eight-part structure, and eight divided pivot bodies are joined to each other. In the large-sized protective film frame 2, the frame portion constituting the peripheral edge portion of the opening portion 4 is a divided frame body which is a member constituting a pair of long sides 5a and 5b, respectively. Doc -20- 201135351 51a', 5ib, 51b·' and divided frames 51c, 51c', 51d, 51d which are members constituting a pair of short sides and w, respectively. In other words, the large-sized protective film frame 2 has a joint portion of eight places along the axial direction of the frame portion constituting the peripheral portion of the opening portion 4. In the large-sized protective film frame 2, the lengths of the long side 5a and the long side 5b are formed to be equal, and the short side 5c and the short side 5 (} are formed to have the same length. The embodiment shown in FIGS. 2 to 5 is implemented. In the case of the large-sized protective film casing, the shape in which the joint portion is provided in the vicinity of the corner portion is illustrated as an example. However, as shown in Fig. 6, the joint portion may be provided at each desired portion of each side. In the case where the joint portion is provided at each desired portion of each side, the heat expansion caused by the heating in the large protective film forming step or the like can be alleviated by the joint portion, so it is preferable that the joint is better. The part is provided in the vicinity of the corner portion. In the frame for the large protective film of the embodiment shown in Fig. 2, two long-side members constituting one of the opposite sides may be used to form a pair of opposite sides. The two short-side members and the corner members constituting the four corners are joined to the corner members by the end members of the long-side members and the short-side members, and are connected via the corner members. The long-side member and the short-side member are formed into a rectangular frame in plan view. In the frame for a large-size film according to the embodiment shown in FIG. 5, two long-side members constituting one of the pair of long sides and two short-side members constituting one of the opposite sides may be used. The end portions of the long-side member and the short-side member are joined to each other to form a rectangular frame in plan view. Thus, the joint portion is provided at each corner portion, whereby the joint portion can be arranged in a rectangular frame in plan view. Near the corner of the body. Moreover, the joint is set at 154681. Doc •21 - 201135351 In the recent situation, the productivity is improved by cutting out an edge, and the ugly can maintain the same rigidity as a knife-cutting object by joining at a higher rigidity corner (4). Since the portion maintains a right angle, it is preferable that the effective exposure area (stable size) in the exposure is 11. Fig. 7 is the interface of the frame for the large protective film of the structure of Fig. 4 and Fig. 5 in the form of a solid solution. Magnified view of p. Further, Fig. 8 (4) is an enlarged view of the joint portion of the large-sized shield body of the embodiment shown in Fig. 6 and Fig. 8 (b) is a modification thereof. Fig. 9 is an enlarged view showing a modification of the joint portion of the large-sized frame for each of the first embodiment. ; Figure _ can take the shape of (a), (8), (4). Again, these are always examples and do not limit the shape of the joint. As shown in Fig. 7 (4), in the frame for the large protective film according to each embodiment of the present invention, the other member (divided frame) is protruded from the end portion of the member (the divided frame) to be joined. At least one of the convex portions p is provided at a distal end portion of the other member (divided frame) with a concave portion C for fitting the convex portion P. Further, by fitting the convex portion p into the concave portion c, the end portion of one member (divided frame body) is joined to the end portion of the other member (divided frame body). By setting the joint portion as the shape of the fitting portion as described above, the bending rigidity or the shear rigidity of the joint portion is practically not problematic, and the frame body faces inward when the large surface film is attached. Bending, but in this case, the stress concentration is alleviated, so that it is difficult to form a gap or a crack in the joint portion, and the size is stabilized even by the divided frame body, which is preferable. In the frame for a large protective film of the present embodiment, as shown in Fig. 7, it is preferable to provide a root portion 154681 of the convex portion p provided at the end portion (the end surface S of the joint portion) of one member. Doc -22- 201135351 The maximum lateral dimension t of the gamma portion is set to be larger than the maximum transverse dimension V of the end side portion of the convex portion p (the portion embedded in the concave portion C formed by the inner portion U of the other member) short. It is possible to have such a configuration in the width direction of the member (divided frame), and it is also possible to have such a configuration in the thickness direction. When such a structure is provided in the width direction, it is preferable to prevent the inner side of the frame after the film unfolding from being better, and when such a structure is formed in the thickness direction, even if there is a bulge on the inner wall or the outer wall, coating is performed. The width direction of the mask adhesive or the film adhesive is also flat, which is preferable. It is preferable that the maximum lateral dimension of the root portion side of the convex portion P is set to be 5% to 8% by weight with respect to the width of the member in which the convex portion P is provided. Further, it is preferable that the maximum lateral dimension V of the front end side of the convex portion P is set to be 10% to 90% of the width of the member provided with the convex portion p. Further, it is more preferable to set the maximum lateral dimension t of the root portion side of the convex portion p to a length 7% to 60% with respect to the width of the member, and more preferably to a length of 嶋 to Na. Further, it is more preferable to set the maximum width of the front end side of the convex portion P to be 15 with respect to the width of the member. /. 〜75% of the length, and more preferably set to 20. /. The length of the rhyme. Further, each of the above-mentioned maximum lateral dimensions has a plurality of cases with respect to the width of the joint portion, indicating the sum of the maximum joint distances of the respective joints. When the maximum lateral dimension of the root portion side of the convex portion is less than 5% for the width of the member, there is a possibility that the engagement at the joint portion (fitting portion) is weak, and the tensile strength at the left and right sides is lowered, or There is a possibility that when the frame is bent toward the inner side when the large film is attached, the joint end portion is subjected to a large concentrated stress, and a gap or crack is generated at the joint end surface, so that it is not 15468 丨. Doc -23· 201135351 The maximum transverse dimension t of the root side of the convex portion p is greater than 80°/ with respect to the width of the member. In the case of fitting from the top to the bottom, the convex portion p is crushed and bulged outwardly. Therefore, there is a possibility that the inner and outer side surfaces of the frame are bulged. Further, when the maximum lateral dimension v at the end side of the convex portion p is less than 1% by weight with respect to the width of the member, the engagement at the joint portion (fitting portion) is weak, and the tensile strength at the left and right may be lowered. Or, there is a possibility that when the frame is bent inward when the large film is attached, the joint end portion is subjected to a large concentrated stress, and a gap or crack is generated at the joint end surface, which is not preferable. Further, when the maximum lateral dimension V of the front end side of the convex portion p is larger than 9〇% with respect to the width of the member, the convex portion P is crushed and bulged outward when the fitting is performed from the upper and lower sides, so that there is The possibility of bulging the inside and outside of the frame is not good. Further, it is preferable that the maximum width + t of the root portion side of the convex portion P is set to be a length of 5% to 8 % by weight with respect to the member (divided frame) in which the convex portion P is provided. Further, it is preferable that the maximum width Ivs at the front end side of the convex portion P is set to be 10% to 9〇% of the thickness of the member (divided frame) provided with the convex portion P. Further, it is more preferable to set the maximum width + t of the root portion side of the convex portion P to a length of 7% to 60% with respect to the thickness of the member, and more preferably set to 10% to 40%. /. length. More preferably, the maximum horizontal dimension v of the front end side of the convex portion p is set to be 15% to 75% of the thickness of the member, and more preferably set to 鸠~ swim. length. Further, when the above-mentioned "maximum lateral dimension" has a plurality of thicknesses with respect to the thickness of the joint portion, the sum of the maximum joint distances is indicated. The maximum transverse dimension t of the root portion side of the convex portion P is less than 15468l with respect to the thickness of the member. . Doc •24· 201135351 5/ό In the case of a large-scale agricultural film field, the acupoints of the acupoints are bent toward the inside due to the membrane tension, and the five parts are likely to loosen. . _ When the maximum lateral dimension t of the root portion side of the convex portion P is greater than 8〇% with respect to the thickness of the member, when the fitting is performed from the right and left, the convex portion is swelled and bulged outward, so that there is ^ The possibility of bulging on the lower side of the body is not good. Further, when the maximum width of the front side of the convex portion P is smaller than (10) with respect to the thickness of the member, there is a possibility that the large surface film is bent toward the inner side due to the film tension, and the joint portion is liable to loosen. Ev . .  ""Life is not good. Further, when the maximum lateral dimension V at the front end side of the convex portion (four) is greater than 90% with respect to the thickness of the member, the convex portion is swelled and protruded outward when the fitting is performed from the right and left sides, so that the frame body is present. The possibility of bulging the upper and lower sides is not good. When the upper and lower sides are swelled, the flatness of the frame is deteriorated, and the sticker is deteriorated. Therefore, it is not preferable. % As the shape of the convex portion, it can be used: a circular perforated shape, a horizontal angular opening/shape, a double-angle shape, and various other shapes (such as a shape used in a jigsaw puzzle). The number of the convex portions ρ may be one to plural in relation to the width or thickness of the member (divided frame). In the case of (4), the stress collector is applied to the inner end of the end surface of the joint with respect to the inner side of the frame. Therefore, there is also a possibility that cracks or gaps may occur in the end surface of the joint portion. Other joining methods are to join the end faces of the joint by riveting or subsequently d. etc. Since the width or thickness of the frame for the large film is not so large, it is more preferably (10), and even more preferably 1 ~2. In addition, as in the case of the convex shape p of the special shape shown in Figure 9 (c), 15468l. Doc •25· 201135351 In shape, the maximum lateral dimension of the root side portion of the convex portion P can also be defined as convex. The maximum lateral dimension v of the end portion of 卩p is the same length. Further, in the casing for a large protective film of the present embodiment, the convex portion p provided at the end portion of the joined member has the other member disposed on the joined member as shown in Fig. 7(b). In the fitting of the concave portion C at the end portion, the remaining outer peripheral portion (hereinafter referred to as "joining gap") which is compressed and deformed internally by the inner peripheral surface of the concave portion C is preferably 〇" mm or less in size. When the s is connected, the fitting is performed from the top to the bottom or the left and right. The joint gap G is crushed at the time of fitting and bulged outward, so that the joint can be tightly joined. If the size of the joint gap G is greater than o. With i mm, the crushed portion becomes larger than the upper, lower, left and right directions of the frame, and it is not good. By providing the joint gap G, it is possible to firmly bond only by fitting without using an adhesive or the like. The size of the joint gap G is preferably set to 〇. 〇〇5 mm~〇〇6 mm, more preferably set to 0·01 mm~0. 04 mm. In addition, in order to maintain rigidity and dimensional stability without using a member having a high rigidity or the like, and to improve the yield, it is preferable to use a frame having a large protective film as a divided frame. The joint strength of the joint portion is set to 10 kgf or more. By setting it to 10 kgf or more, even if the frame is divided, bending or deformation can be suppressed, and rigidity can be ensured. Further, by arranging the frame for the large protective film by the divided frame member, the size can be easily adjusted, the dimensional accuracy can be ensured, and the manufacturing steps can be simplified. Therefore, the same dimensional accuracy as that of the frame having no joint can be easily obtained. Therefore, even when the frame is divided into a frame, the rigidity and dimensional stability can be maintained without using a member having a high rigidity in the joint portion, and 154681. Doc •26· 201135351 and can increase yield. Further, by setting the divided frame body, the number of cutting work steps is reduced as compared with the cutting out of one sheet-shaped base material, and the residual stress applied to the frame member during processing becomes small. Further, when the anisotropy of the material is considered, the frame member having the same directivity can be used, so that the overall anisotropy of the large-sized casing is small. Since the residual stress or the anisotropy becomes small as described above, the stress and strain in the heating step in the large-film manufacturing step are caused by stress strain and the like. The release of the pick up becomes smaller, and the size of the 4 film is stable. Since &, it is not necessary to perform heat treatment or the like in advance in order to release residual stress, and there is also a manufacturing advantage in which the number of steps is reduced. In addition, since the stress strain is directed toward the release direction with time, the sub-fourth body having a small residual stress can ensure the dimensional stability even if it is stored for a long time, and the frame body of the large protective film is formed by a plurality of frame members. By cutting out the portion where the flatness is better, the large protective film after the bonding: the flatness of the body is also improved. Further, it is also possible to produce a large-sized film casing from a small base material, which also has the advantage of cost reduction. The part and the part are joined by a convex portion formed at the end portion of the frame member, and a portion of the end portion of the transfer member. It is preferable that the joint of the joint portion is excellent by the arrangement of the type of material, and the joint portion is preferably fitted and joined. Strength is achieved by using these joining methods. The bonding of the adhesive and the riveting can sufficiently ensure that the joint of the joint is preferably such that the frame member is such that one of the opposite sides and the opposite side are opposite to the short side 154681. Doc -27·201135351 The corner portion is formed in such a manner that the distance between at least one of the joint portions and the corner portion at the distance closest to the joint portion is 45 which is the length of the side where the joint portion is provided. /. the following. According to this configuration, the frame body has a rectangular shape, and the rigidity in the vicinity of the corner portion is high. Therefore, by providing the joint portion in the vicinity of the corner portion, the rigidity can be maintained, and the bending of the large-sized film casing can be suppressed. Moreover, by providing the joint portion in the vicinity of the corner portion, the Jiyang, the secret fiber bauxite 7 ^ 1 angling property is also improved, and the direction of the shape of the rectangle is maintained, so that the amount of bending of the frame for the large protective film can be made. It becomes within the tolerance range (0%~3%). In addition, a large-sized surface film is attached to the large-sized protective film frame to apply a load to the large-sized protective film frame. However, the load varies depending on the device, and is ι 〇 kgf to 70 kgf. Therefore, there is a need for a countermeasure that does not cause deformation of the joint portion due to a load different depending on the device. χWhen the shape of the frame for the large film is deviated from the specific size, the size is corrected, and the joint is partially aggravated, and the joint may be deformed. In order to solve such problems, the joint strength of the joint portion is preferably 10 kgf or more, more preferably 15 kgf or more, and still more preferably 25 kgf or more. As a joining method for achieving the bonding strength of the joining portion as described above and also being used as a large protective film in appearance, it is preferable to fit the divided frame or use an adhesive or the like. In the case of fitting, it is preferable that a convex portion is provided at the end portion of the joint, and a concave portion for fitting the convex portion is provided at the other end portion. Further, the shape of the root portion of the convex portion (the size of the proximal end side) is smaller than the shape of the largest transverse dimension of the distal end side, and the stretching toward the longitudinal direction is also prevented. Therefore, as described above, the large protective film for the large protective film is as described above. In the frame, 15468l. Doc •28- 201135351 The joint strength of the joint of the split frame is set to 1 〇 kgf or more, so that even if the frame is divided, bending or deformation can be suppressed, and rigidity can be ensured. Further, by arranging the frame for the large protective film by the divided frame, the size can be easily adjusted, the dimensional accuracy can be ensured, and the manufacturing steps can be simplified. Therefore, the same dimensional accuracy as that of the frame having no joint portion can be easily exhibited. Therefore, when the divided frame body is used, rigidity and dimensional stability can be maintained without using the members having high rigidity or the like in the joint portions 22a to 22h, and the yield can be improved. In particular, when the large protective film is large, the configuration of the present embodiment is more effective. The frame portion of the frame for a large-sized ankle protector of the present invention may be joined to each other by the end portion of the chemical reaction type adhesive agent*. As the connection (4), for example, a fluorine-based polymer such as an acrylic resin adhesive, an epoxy resin adhesive, a polyoxymethylene resin binder, or a fluorine-containing polyfluorinated adhesive can be used. Further, as an adhesive material for the adhesion of the lamp, styrene-ethylene·butylene-styrene, styrene-ethylene and propylene can be used. A hot-melt adhesive material such as styrene or an olefin, an oxygen-based material, (4) an acid (4) (4), or an adhesive tape or a foamed hot-melt adhesive material based on a foam. The thickness of the adhesive material layer is preferably used for the large protective film frame. The total thickness of the adhesive material and the thickness of the adhesive material are not more than the predetermined range of the distance between the large-sized film 3 and the mask ^, for example, preferably Gqi _ or more and ^ mm or less. Further, when the large-sized film 3 is attached to the inside of the dot layer when the large-sized film 3 is attached to the mask, foreign matter may remain in the space. Therefore, when the point is placed on the lower edge of the casing 2 for the large film, the dot layer 154681 is considered. Doc •29· 201135351 After the large protective film 1 is crushed and enlarged by the pressure applied to the reticle, it is preferable that the adhesive does not protrude to the opening 4 at the time of pressurization. The inside of the opening 4 of the film casing 2 is coated. Specifically, it is preferable to apply so that the width of the space inside the adhesive layer is within 0.35 times the width of the adhesive layer. Preferably, the coating width of the adhesive layer is opposite to the sides 23 to 2 of the frame 2 for the large protective film (the width of 1 is 〇. 3 to 〇6 times, and it is preferable to apply it along each side 2a to 2d of the casing 2 for large-size film. As the protective film for protecting the adhesive material, a film comprising a polyethylene terephthalate resin or a polyethylene resin can be used. Further, a release agent such as a polyoxymethylene-based release agent or a fluorine-based release agent may be applied to the surface of the protective film in accordance with the adhesive force of the adhesive. The thickness of the protective film is preferably, for example, 0. 01 mm or more and 1 mm or less. Since at least two or more members constituting the frame body can be divided into two or more frames, the frame forming the frame body can easily improve the processing accuracy or dimensional accuracy of each part constituting the frame for the large film. As a result, the dimensional accuracy of the frame can be improved as compared with the case where the joint portion is one portion. Therefore, it is easy to control the dimensional accuracy of the control casing itself, thereby controlling the amount of bending of the casing when the large-sized film is attached to the casing, and the dimensional stability of the casing for the large casing can be made easy. Upgrade. Here, in terms of the deviation in processing, it is preferable that each member is as small as possible, that is, the more the frame is made by using a plurality of members, the better. Further, the joint portion is joined by the chemical reaction type adhesive, whereby the rigidity and dimensional stability of the frame can be improved. By using a chemically reactive binder", the size of the target such as the joint angle or gap can be adjusted by the outer 154681. Doc -30· 201135351 The stimulating action starts the reaction and is easy to maintain the original position, thus improving dimensional stability. Among them, the adhesive is preferably liquid. When a liquid adhesive is used, the adhesive penetrates into the joint portion, and the liquid spreads over the entire joint portion. Therefore, it is preferable from the viewpoint of production and rigidity. Further, among the liquid materials, an acrylic or epoxy based adhesive is preferred. The acrylic adhesive refers to an adhesive having the following chemical formula (1), and more preferably an uv hard adhesive which is cured by ultraviolet rays and a heat hardened type which is hardened by heat. a cyanoacrylate (R=CN) type instant adhesive which initiates a reaction by using an anaerobic hardening type adhesive which is hardened by blocking air, and a trace amount of water as a starting agent (R is Η or C). [Chemical 1] CH2 = CR(C=〇)〇.  Further, as the epoxy-based adhesive, there are one liquid type and two liquid type, and any one can be used. However, in the film manufacturing process, the one-liquid type epoxy-based thermosetting type adhesive is more suitable than the two-part type. The oxygen-based thermosetting type adhesive is more effective, and therefore is preferable. The total amount of the adhesive to be used is a small amount, and the one-liquid type adhesive is not required to be used while considering the metering, mixing or use period, and therefore is preferable to the two-part type of adhesive. In the case of using the two-liquid type, there is also a case where the use of the adhesive which exceeds the required amount for the accuracy of the metering is used, which imposes a burden on the environment. If the environmental burden is excessively placed and a small amount of mixing is set, the measurement accuracy is lowered. There is a tendency that if the time from the measurement to the start of the reaction is not fixed, the reactivity is deviated. Therefore, there is a possibility that the degree of hardening is different and the physical properties are different. The difference in the degree of hardening is likely to make the connection 154681. Doc -31 · 201135351 The thickness of the agent may become uneven due to the joint, or may cause deformation, or may cause variation in size. Therefore, care must be taken when using the two-component type. However, as an adhesive which is effective even in the two-liquid type, a modified acrylic adhesive can be used for the acrylic or a thermosetting adhesive can be used for the epoxy. Although the modified propylene-based adhesive is a two-component type, it does not need to be mixed, and it can be hardened only by applying one liquid to each of the bonded surfaces and performing pressure bonding. Further, in terms of light resistance, an acrylic acid-based adhesive is preferable, and specifically, 5, preferably 3, 2, 2, 2, 2, 2, 2, 2, G, 2,

Three Bond 公司製造）’ Three Bond 2083、2081D ' 2082C、2087L(均為 Three Bond 公司製造），Three B〇nd 3923 、 3928 、 3920 、 3925B 、 3921 、 3926 、 3055 、 3097(均 為Three Bond公司製造），Aron Alpha系列（東亞合成公司 製造），Three Bond 1735、1721、1797、17X-050、1796、 1735(均為 Three Bond 公司製造），Loctite 638、Loctite 601(均為 Henkel Japan製造）’ Three Bond 1401 系列（ThreeThree Bond 2083, 2081D '2082C, 2087L (all manufactured by Three Bond), Three B〇nd 3923, 3928, 3920, 3925B, 3921, 3926, 3055, 3097 (all manufactured by Three Bond) ), Aron Alpha series (manufactured by Toagosei Co., Ltd.), Three Bond 1735, 1721, 1797, 17X-050, 1796, 1735 (all manufactured by Three Bond), Loctite 638, Loctite 601 (all manufactured by Henkel Japan) 'Three Bond 1401 Series (Three

Bond製造）等。 丙烯酸系黏著劑之中’更佳為藉由阻斷空氣而促進反應 之厭氧性硬化型接著劑。作為具體之厭氧性硬化型接著 劑，可列舉Loctite 638、Loctite 601(均為 Henkel Japan 製 造）。若為厭氧性硬化型接著劑，則於自接合部突出之部 位難以產生反應，且由於容易拭去，因此可將逸氣與發塵 抑制成最小限度，進而接合亦牢固，故較佳。尤其，藉由 使用厭氧性硬化型接著劑，極難產生反應，並可將逸氣與 154681.doc •32- 201135351 發塵抑制成最小限度這一點應該大書特書。其原因在於： 迄今為止不存在如本領域般如此要求接著劑抑制逸氣之領 域，藉由本發明者等人而發現了具有防止由逸氣所引起之 渾濁之效果的厭氧性硬化型接著劑。 作為本發明中所使用之接著劑以外之接合方法，亦可於 增強接著劑時利用鉚接。利用接著劑可實現各種接合形 狀，接合強度亦可保持實用上可使用之位準之剛性，故較 佳。另一方面，於不使用接著劑而藉由雷射焊接進行接合 之情形時，接合強度較高，但於接合部產生凹凸，因此僅 接合部之平坦性變得極差，又，外觀亦不佳。又，於不使 用接著劑而藉由收縮配合（shdnkage fit)進行接合之情形 時，嵌合時不需要壓製等多餘之壓力，因此於外觀上較 佳，但於導熱率較高之鋁合金之情形時，無法期待收縮配 合之效果，接合強度有可能降低，故不佳。膨脹配合 (expansion fit)亦成為與收縮配合相同之效果而不佳。 若進行接合之接著劑之厚度為丨.0 mm以下，則接合部之 形狀可為任何形狀。關於接合部之平面形狀（自上方或側 方觀察接合部時之形狀），複雜形狀較簡單形狀更佳。此 處，所謂簡單形狀，如圖16所示，係指接合部了之平面形 狀成為在相對於構件之長度方向大致為直角之方向上延伸 的直線。λ ’所謂複雜形狀’係指與簡單形狀相比接著面 積相對地變大之形狀(例如，組合複數個直線或曲線而成 之形狀）。作為複雜形狀，例如可採用如圖17之形狀，更 佳為如圖18般極力抑制接著劑使用部於大型護膜用框體之 154681.doc -33- 201135351 接合面之側面露出的形狀。又，可採用如圖i9般自框體之 厚度方向觀察時呈階梯形狀者、如圖2〇之傾斜形狀、如圖 21之構成接合部J之一個構件的端部被設定成凸形狀者、 如圖22之中間變細形狀、如圖23般框體之端部甲央成為四 角柱狀之凸形狀者等各種形狀。於為中間變細形狀之情形 時，可採用：圓形之穿孔形狀、楔形狀、角形狀三角形 狀、其他各種形狀(例如，如拼圖玩具中所採用之形狀 等）。 又，雖然亦取決於接著劑之塗佈量，但為了減少進行接 合時接著劑之朝框體表面之突出量，亦可於接合部之内部 設計接著劑積存處等，並製作可於其中吸收多餘之接著劑 之形狀。 於大型護膜製造步驟内，具有於框體上展開有大型表膜 之後切割不需要之膜之步驟，但此時存在框體因臈之張力 而朝内側彎曲之傾向。因此，接著面積變大之複雜形狀較 簡單形狀更可緩和朝内側彎曲時之應力，並成為不於接合 部上產生裂痕或間隙等之形狀，故較佳。 其次，對圖2所示之大型護膜用框體2之製造方法進行說 明0 首先，藉由選自由鋁及鋁合金所組成之群中之至少一種 金屬構件之擠出加工，而形成分割框體21a〜21h。所形成 之分割框體21a〜21h於在接合部所接合之一端部，設置有 向接合於該一端部之另一個構件突出之至少一個凸部，且 於另一端部設置有與凸部嵌合之凹部。又，分割框體 154681.doc •34- 201135351 2 la〜2 Id係由大型護膜用框體2之4個角部5接合之直線狀的 構件，分割框體2 le〜21h係構成大型護膜用框體2之4個角 部5之構件。 然後，將所形成之分割框體21a〜21h之凸部嵌合於凹部 中，藉此將一個分割框體之端部接合於另一個分割框體之 端部。藉此，製造圖2所示之大型護膜用框體2 ^ 其次，對圖4所示之大型護膜用框體2之製造方法進行說 明。 首先，藉由選自由铭及銘合金所組成之群中之至少一種 金屬構件之擠出加工，而形成分割框體41a〜41d。所形成 之分割框體41a〜41d於在接合部所接合之一端部，設置有 向接合於該一端部之另一個構件突出之至少一個凸部，且 於另一端部設置有與凸部嵌合之凹部。又，分割框體 41a〜41d係由大型護膜用框體2之4個角部5接合之直線狀的 構件。 然後，將所形成之分割框體41a〜41d之凸部嵌合於凹部 中，藉此將一個分割框體之端部接合於另一個分割框體之 立而部。藉此，製造圖4所示之大型護膜用框體2。 本發明並不限定於上述實施形態。例如，於上述實施形 態中，使各分割框體之形狀在某種程度上一致，但各分割 框體之形狀亦可互不相同。 實施例 其次，列舉實施例及比較例來更具體地說明本實施形 態，但本實施形態只要不超越其主旨，則並不限定於下述 154681.doc -35· 201135351 之實施例。 [實施例1] 大型護膜用框體之材質（所有分割框體之材質）為鋁合 金，厚度為6.5 mm ’將長邊之寬度設定為16 5 mm，將長 度設定為1750 mm。又，短邊之寬度為18 5 mrn，長度為 15 50 mm，且遍及短邊側全長設置有槽，槽之深度為5 mm，槽之高度為2 mm »又，角部之曲率為2〇 mm。除此 以外’如圖2(角部如圖3)般形成大型護膜用框體。分割框 體21a、21b之長度為875 mm，分割框體2lc、21d之長度為 775 mm。因此，Lp為Le之長度之25%，又，Lp*Ls之長度 之ho/。。接合部之接著劑係使用L〇ctite 638(Henkel製造）。 以使短邊成為上下方向，長邊成為與地面水平之方向之 方式將該大型護膜用框體垂直地豎立於地面後，自上下方 向安裝操作夾具。操作夾具係由被作業者握持之把手部、 以及連結於把手部並保持大型護膜之保持部構成，且保持 部呈^字狀β該保持部係由插入至形成於大型護膜用框體 之短邊之槽部而進行係合的一對係合部、以及連結把手部 並支撐長邊之支撐部構成。係合部係具有與形成於短邊之 槽部之寬度相同之厚度的長條狀之構件，將構件係合部之 長度設定為700 mm，將係合部之寬度設定為33^而 且，一對係合部間之間隔達到1742 mm。又，支撐部係具 有與大型護膜用框體之長邊相同之厚度的長條狀之構件，、 支撐部之長度達到1752 mm。 繼而’以於安裝有操作夾具之狀態下使大型護膜用框體 154681.doc -36 - 201135351 成為水平之方式使位置變化，又，將位置恢復至垂直方 向。將此種操作進行10次。其結果，可獲得本實施形態之 大型護膜用框體不會自操作夾具上脫落之結果。 繼而，針對該大型護臈用框體，使用苯乙烯-乙烯_丁烯_ 苯乙烯系之熱熔黏著劑作為黏著劑，以厚度為18 mm、塗 佈寬度為6 mm且自開口部起具有2 mm之間隔之方式沿著 大型護膜用框體之各邊進行塗佈。 然後，於無塵.室中，將大型護膜用框體代替光罩而貼附 於青板玻璃上。大型護膜用框體之貼附係使用附裝置，沿 者連接各邊之角部之角部彼此的直線僅對大型護膜用框體 之寬度部分加虔。結果，可按壓黏著劑層之整個面，而可 均勻地按壓黏著劑層。進而，於該狀態下貼附大型護膜用 框體後於垂直狀態下放置了丨個月，亦未產生空氣路徑等。 [實施例2] 將長邊之寬度設定為9 mm，將長邊之長度設定為78〇 麵’將短邊之寬度設定為7麵，將短邊之長度設定為㈣ 随，將接合部之形狀設定為自框體之内周頂點朝向外周 頂點之平面形狀’除此以外，以與實施例以同之方式形 成大型護膜用框體。再者，圖1〇係表示實施例2中之接合 部之形狀的概略立體圖。於此情形時，邙為^之長度二 〇%，又，Lp為Ls之長度之0%。以與實施例⑷同之方=評 4貝有無產生空氣路徑之結果，未產生空氣路徑等。 [比較例1] 除不具有接合部以外，以與實施例丨相同之方式形成大 I5468I.doc •37- 201135351 型護膜用框體。 以與實施例1相同之方式對該大型護膜用框體進行操作 性之確認的結果，可獲得該大型護膜用框體自操作夾具上 脫落2次之結果。 又，以與實施例1相同之方式確認有無空氣路徑之結 果’藉由目視而確認到於長邊中央部分之幾個部位產生了 空氣路徑。 [比較例2] 除將接合部設置於一對長邊之邊方向中心位置（即，於2 個部位設置接合部）以外，以與比較例1相同之方式形成大 型護膜用框體。 以與實施例1相同之方式對該大型護膜用框體確認有無 空氣路徑之結果，藉由目視而確認到於長邊中央部分之幾 個部位產生了空氣路徑。 [實施例3] ^ < 何買）設定為 紹合金，將厚度設定為4.0 mm，將長邊之寬度設定為“ mm，將長度設定為43〇顏。又，短邊之寬度為“· 長度為300 mm，且遍及短邊側全長今晉古祕 ΰ , ?日，槽之深度為 2 mm，槽之高度為1>5 mm。又，角部之曲率為爪爪 除此以外，如圖2般形成大型護膜用框體。分割框體^丨^ 21b之長度為370 mm，分割框體2ic、 ,. . 4之長度為240 咖。將接合部設定成如圖7般於—個構件之端部 個圓形之凸部的形狀。將凸部之根部側之最大橫尺寸設定 154681.doc -38- 201135351 成1.6 mm之長度，將凸部之前端側之最大橫尺寸設定成 3.0 mm，將接合間隙之尺寸設定成〇〇3 mm，且不使用接 著劑而自上下方向進行嵌合。進行目視檢查之結果，外觀 上無問題。 (尺寸穩定測定） 進行上述框體之外形尺寸測定，於加熱板上以14〇。〇進 行10分鐘之加熱處理後，進行長邊中央部之外形尺寸測 定，並測定其變形量。外形尺寸測定係利用三豐 (MitUt〇y〇)FAL-1600系列進行測定。將其結果記載於表i。 (接合強度測試） 繼而，進行接合強度測試。製作包含與上述相同之接合 形狀部之100 mm之棒狀構件的樣品。將接合部設置於1〇〇 mm之棒狀構件之一半之5〇 mm的位置。使寬度方向朝向上 面，自接合部起空開10 mm進行夾持（夹持係自接合部起1〇 mm〜30 mm之範圍），對自接合部起1〇爪爪之部位施加力來 測定所夾持之相反側。測定裝置係使用Imada之數字型推 拉力計。將結果記載於表1。 繼而，針對該大型護膜用框體，使用苯乙烯_乙烯_丁烯_ 苯乙烯系之熱熔黏著劑作為黏著劑，以14 mm之厚度沿著 大型護膜用框體之各邊進行塗佈。 另外’藉由旋塗法而使纖維素酯之大型表膜於基板上成 膜，使該膜接著於臨時框體上，其後自基板上剝離。該臨 時框體係使用鋁製之框體。其後，於塗佈有上述熱熔黏著 材料之大型護膜用框體上，在未塗佈有熱熔黏著劑之相反 154681.doc •39· 201135351 側之面塗佈丙烯酸系之膜接著劑，使臨時框體之大型表膜 接著並硬化，切斷剩餘膜而製作大型護膜，且藉由目視檢 查外觀，確認無問題。切斷後，框體朝内側彎曲，因此於 形狀穩定後，藉由目視確認接合部之接合面。其結果如表 1所示® [實施例4] 將長邊之寬度設定成9.0 mm ’將長度設定成8〇〇 mm， 將短邊之寬度設定成7.0 mm，將長度設定成480 mm，將 角部之曲率設定成R==〇 mm。使除此以外之槽之長度、深 度’框體之厚度與實施例1相同。此次係設定成如圖4之分 割框體’且將41c、41d設定為480 mm，將41a、41b設定為 790 mm。將接合部設定成如圖8(a)般於—個構件之端部設 置有2個圓形之凸部的形狀。將凸部之根部側之最大橫尺 寸設定成1.5 mm之長度，將凸部之前端側之最大橫尺寸設 定成2.0 mm，將接合間隙之尺寸設定成〇 〇2爪爪，且不使 用接著劑而自上下方向進行嵌合。進行目視檢查之結果， 外觀上無問題。其後，除將熱熔黏著材料之厚度設定為 2.0 mm以外，以與實施例3相同之方式製作大型=膜，並 以相同之方式進行評價。將其結果記載於表丄。 [實施例5] 將長邊之寬度設定成21.0 _，將長度設定成2_ mm ’將短邊之寬度設定成19 5龍’將長度設定成删 咖，將角部之曲率設定成㈣匪，將框體之厚度設定成 6.〇mm。使除此以外之槽之長度、深度與實施织相同。 154681.doc 201135351 此次係設定成如圖6之分割框體’且將51c、51c,、51d、 5 1 d’分別設定為900 mm、將5丨a、51 a，、5 1 b、5 1 b'分別設 定為982 mm。將接合部設定成如圖9(幻般設置有3個梯形 形狀之凸部的形狀。將凸部之根部側之最大橫尺寸設定成 2.1 mm之長度’將凸部之前端側之最大橫尺寸設定成4.2 mm’將接合間隙之尺寸設定成〇〇15 mm，且不使用接著 劑而自上下方向進行歲合。進行目視檢查之結果’外觀上 無問題。其後，除將熱熔黏著材料之厚度設定為2 〇 外’以與實施例3相同之方式製作大型護膜，並以相同之 方式進行評價。將其結果記載於表1。 [比較例3] 準備無接合部之來自一塊母材之切出框體。將長邊之寬 度設定成9.0 mm，將長度設定成800 mm，將短邊之寬度 e又疋成7.0 mm，將長度設定成480 mm。使用材質為紹合 金，厚度為4.0 mm之大型護膜用框體。遍及短邊側全長設 置有槽’槽之深度為2 mm，槽之高度為1.5 mm。又，角 部之曲率為R=2 mm。除此以外，以與實施例3相同之方式 製作大型護膜，並同樣地進行評價。將其結果記載於表 1 °但是’由於無接合部，因此未進行接合強度測試。 [比較例4] 將接合部之形狀設定成如圖丨丨之形狀，並使用二液性之 常溫硬化型胺基曱酸酯接著劑進行接合，除此以外，以與 實施例3相同之方式製作大型護膜用框體，然後以與實施 例3相同之方式製作大型護膜，並同樣地進行評價。將其 154681.doc -41 - 201135351 結果記載於表1。製作大型護膜用框體後進行目視檢查之 結果，產生接著劑之鬆動，於外觀上亦看到由接著劑之鬆 動所產生之污垢等。 [參考例1] 將接合部设疋成如圖12般於一個構件之端部設置有2個 - 正三角形狀之凸部的形狀。將凸部之根部側之最大橫尺寸 設定成2.0 mm之長度，將接合間隙之尺寸設定成〇 mm， 並利用雷射焊接進行接合而製作型護膜用框體後，以與實 施例3相同之方式製作大型護膜，並同樣地進行評價。將 其結果記載於表1。製作大型護膜用框體後進行目視檢查 之結果，於接合部產生焊接後之凹凸，外觀亦不佳。又， 製作大型濩膜後之外觀亦成為如下者，即凹凸部分閃閃發 光而看上去像異物，檢查性亦不佳。 [參考例2] 將接合部設定成如圖13般於一個構件之端部設置有3個 梯形形狀之凸部的形狀。將凸部之根部側之最大橫尺寸設 定成4.2 mm之長度，將凸部之前端側之最大橫尺寸設定成 2.1 mm之長度，將接合間隙之尺寸設定成〇爪爪，且使用 收縮配合進行接合而製作大型護膜用框體。其後，以與實 施例5相同之方式製作大型護膜，並同樣地進行評價。將 其結果記載於表1。製作大型護膜用框體後進行目視檢查 之結果，外觀良好，但接合強度較弱，因此於製作大型護 膜後之目視檢查中’看到間隙或裂痕，且異物夾於其中。 又，形狀不再係矩形狀。 154681.doc •42- 201135351 【I ί 膜膨脹後之 外觀 〇 〇 〇 〇 疟外蝴！。 喊:Μ荽 难S -琏$蟛 看上去像異 物。 E總被 韻5 朴2 ° * w 蝴I逑^ 目視結果 (外觀） 〇 〇 〇 〇 礙#蜂 V "〇 -Μ - ^ ^ ^ S·^ Ss。 〇Ul 球幻 〇 接合強度測試 35 kgf 40 kgf 50 kgf I 9 kgf 25 kgf 5 kgf 加熱測試後之 變化量 0.19 mm a a (N 〇 圓 (N Ο 0.47 mm % §蠛t^ !二。 w 5s ^ 0.35 mm =踩項'瑤 接合間隙 0.03 mm 0.02 mm 0.015 mm 1 接合部形狀 XT UTJ 1 W λΑτ 接著劑 碟 1 g 驾劄π 無 (雷射焊接） 無 (收縮配合） 分割位置 I 1 1 1 1 一二1 1— GO Ί Γ~ 寸 ! -〇〇 一 1 j -塊母材 1 1 〇0 1 Γ 寸 1 ·〇〇 *" | 1 1 Π~Γ / 實施例3 實施例4 實施例5 比較例3 寸 jj 參考例1 參考例2 154681.doc -43- 201135351 [實施例6] 大型護膜用框體之材質（所有分割框體之材質）為銘合 金，將厚度設定為4.0 mm ’將長邊之寬度設定為6.〇 mm， 將長度設定為430 mm。又，將短邊之寬度設定為6 〇 mm，將長度設定為300 mm ’且遍及短邊之側面全長設置 槽’將槽之冰度设定為2 mm ’將槽之高度設定為1 5 mm。又，將角部之曲率設定為R=2 mm。其他構成係利用 圖2所示之構成來製作大型護膜用框體。構成長邊之分割 框體之長度為370 mm，將構成短邊之分割框體之長度設定 為240 mm。將接合部設定成如圖14所示般使分割框體8〇a 之具有階差之端面81a與分割框體80b之具有階差之端面 8 1 b抵接的階梯形狀。於圖丨4中，將具體之尺寸設定成自 下表面起於垂直方向為1.3 mm，於長度方向為1〇爪爪， 又，將具體之尺寸設定成於垂直方向為丨3 mm，於長度方 向為10 mm，進而於垂直方向為丨.4 mm ’並使用接著二。 接著劑係使用Loctite 638(Henke丨製造進行目視檢查之 結果，外觀上無問題。 (尺寸穩定測定之測定方法） 測定裝置係使用雷射位移計（基恩斯（Keyenee)製造之u ⑽0)。與框體之外部尺寸相吻合地製作冰根正四角形之 標準樣品。不同於此，以實施例及比較例之條件分別於每 一例中製作5個樣品’並與正四角形之標準樣品進行比 較。即便於5個樣品中之1個樣品中，若差異最大之部分為 以上’則亦設定為X，若狀5軸以上、未達1〇 154681.doc • 44· 201135351 mm ’則设疋為△’若未達0.5 mm，則設定為〇。 (接合強度測試） 繼而，進行接合強度測試。製作包含與上述相同之形狀 之接合部的100 mm之棒狀之框體的樣品。將接合部設置於 100 mm之棒狀一半之5〇 mm的位置。使寬度方向朝向上 面，自接合部起空開1〇 „!„!進行夾持（夾持係自接合部起1〇 mm〜30 mm之範圍），對自接合部起10 mm之部位施加力來 測定所夾持之相反側。測定裝置係使用Imada之數字型推 拉力計。將結果記載於表2及表3。 繼而，針對該大型護膜用框體，使用苯乙烯-乙烯_ 丁稀_ 苯乙烯系之熱熔黏著劑作為黏著劑，以丨4 mm之厚度沿著 大型護膜用框體之各邊進行塗佈。 另外’藉由旋塗法而使纖維素酯之大型表膜於基板上成 膜’使該大型表膜接著於臨時框體上，其後自基板上剝 離°該臨時框體係使用鋁製之框體。其後，於塗佈有上述 熱溶黏著材料之大型護膜用框體上，在未塗佈有熱熔接著 劑之相反側之面塗佈丙烯酸系之膜接著劑，使臨時框體之 大型表膜接著並硬化。然後，切斷剩餘膜而製作大型護 膜’且藉由目視檢查外觀，確認無問題。切斷後，大型護 模用框體朝内側彎曲，因此於形狀穩定後，藉由目視確認 接合部之接合面。將其結果示於表2及表3。 15468l.doc -45- 201135351 [表2]Bond manufacturing) and so on. Among the acrylic adhesives, anaerobic hardening type adhesive which promotes the reaction by blocking air is more preferable. Specific examples of the anaerobic curing type adhesive include Loctite 638 and Loctite 601 (all manufactured by Henkel Japan). In the case of an anaerobic hardening type adhesive, it is difficult to cause a reaction at a portion protruding from the joint portion, and since it is easy to wipe off, it is preferable to suppress the outgassing and dust generation to a minimum, and the joint is also strong. In particular, it is extremely difficult to generate a reaction by using an anaerobic hardening type adhesive, and it is necessary to suppress the outgassing to a minimum of 154681.doc •32-201135351. The reason for this is that there has been no anaerobic hardening type adhesive which has an effect of preventing turbidity caused by outgas by the inventors of the present invention. . As the bonding method other than the adhesive used in the present invention, it is also possible to use caulking when reinforcing the adhesive. A variety of bonding shapes can be realized by the use of an adhesive, and the bonding strength can also maintain the rigidity of a practically usable level, which is preferable. On the other hand, when bonding is performed by laser welding without using an adhesive, the bonding strength is high, but unevenness is generated in the joint portion, so that only the flatness of the joint portion is extremely poor, and the appearance is not good. Further, when bonding is performed by a shrinkage fit without using an adhesive, unnecessary pressure such as pressing is not required at the time of fitting, so that it is preferable in appearance, but in an aluminum alloy having a high thermal conductivity. In the case, the effect of the shrinkage fit cannot be expected, and the joint strength may be lowered, which is not preferable. The expansion fit also becomes less effective than the shrink fit. If the thickness of the bonding agent to be bonded is 丨.0 mm or less, the shape of the joint portion may be any shape. Regarding the planar shape of the joint portion (the shape when the joint portion is viewed from above or from the side), the complicated shape is better than the simple shape. Here, the simple shape, as shown in Fig. 16, means that the planar shape of the joint portion is a straight line extending in a direction substantially at right angles to the longitudinal direction of the member. The λ 'complex shape' refers to a shape in which the area is relatively large as compared with a simple shape (for example, a shape in which a plurality of straight lines or curved lines are combined). As the complicated shape, for example, a shape as shown in Fig. 17 can be employed, and it is more preferable to suppress the shape in which the adhesive-use portion is exposed on the side surface of the 154681.doc-33-201135351 joint surface of the large-sized protective film frame as shown in Fig. 18. Further, as shown in FIG. 9 , when the stepped shape is observed from the thickness direction of the casing, the inclined shape as shown in FIG. 2A and the end portion of one of the members constituting the joint portion J in FIG. 21 are set to be convex, As shown in Fig. 22, the shape of the end portion of the frame is a convex shape of a square column shape as shown in Fig. 23. In the case of a tapered shape in the middle, a circular perforation shape, a wedge shape, an angular shape triangle shape, and other various shapes (for example, a shape used in a jigsaw puzzle, etc.) may be employed. Further, although it depends on the amount of application of the adhesive, in order to reduce the amount of protrusion of the adhesive to the surface of the frame at the time of bonding, it is also possible to design an adhesive deposit or the like inside the joint, and to make it absorbable therein. The shape of the excess adhesive. In the large-size film manufacturing step, there is a step of cutting a film which is not required after the large-sized film is formed on the frame, but at this time, the frame tends to be bent inward due to the tension of the ridge. Therefore, the complicated shape in which the area becomes larger is more preferable because the stress in the case of bending toward the inner side is more relaxed than the simple shape, and the shape is not formed in the joint portion due to cracks or gaps. Next, a method of manufacturing the large-sized protective film frame 2 shown in Fig. 2 will be described. First, a split frame is formed by extrusion processing of at least one metal member selected from the group consisting of aluminum and aluminum alloy. Body 21a~21h. The divided frame bodies 21a to 21h are formed at one end portion joined to the joint portion, and at least one convex portion that protrudes toward the other member joined to the one end portion is provided, and the other end portion is provided with the convex portion. The recess. In addition, the divided frame body 154681.doc •34- 201135351 2 la~2 Id is a linear member joined by the four corner portions 5 of the large protective film frame 2, and the divided frames 2 le to 21h constitute a large guard. A member of the four corner portions 5 of the frame 2 for a film. Then, the convex portions of the formed divided frames 21a to 21h are fitted into the concave portions, whereby the end portions of one divided frame are joined to the ends of the other divided frames. Thereby, the large-sized protective film frame 2 shown in Fig. 2 is produced. Next, the manufacturing method of the large-sized protective film frame 2 shown in Fig. 4 will be described. First, the divided frames 41a to 41d are formed by extrusion processing of at least one metal member selected from the group consisting of Ming and Ming alloys. The divided frame bodies 41a to 41d are formed at one end portion joined to the joint portion, and at least one convex portion that protrudes toward the other member joined to the one end portion is provided, and the other end portion is provided with the convex portion. The recess. Further, the divided frames 41a to 41d are linear members joined by the four corner portions 5 of the large-sized protective film frame 2. Then, the convex portions of the formed divided frames 41a to 41d are fitted into the concave portions, whereby the end portions of one divided frame are joined to the other divided frame. Thereby, the large-sized film casing 2 shown in FIG. 4 is manufactured. The present invention is not limited to the above embodiment. For example, in the above embodiment, the shapes of the divided frames are made to some extent, but the shapes of the divided frames may be different from each other. EXAMPLES Hereinafter, the present embodiment will be described more specifically by way of examples and comparative examples. However, the present embodiment is not limited to the following examples of 154681.doc-35·201135351 unless otherwise exceeded. [Example 1] The material of the frame for the large film (the material of all the divided frames) was aluminum alloy, and the thickness was 6.5 mm. The width of the long side was set to 16 5 mm, and the length was set to 1750 mm. Further, the short side has a width of 18 5 mrn and a length of 15 50 mm, and a groove is provided over the entire length of the short side, the depth of the groove is 5 mm, the height of the groove is 2 mm » and the curvature of the corner is 2〇 Mm. In addition to this, a large-sized casing for a protective film is formed as shown in Fig. 2 (the corner portion is as shown in Fig. 3). The length of the divided frames 21a, 21b is 875 mm, and the length of the divided frames 2lc, 21d is 775 mm. Therefore, Lp is 25% of the length of Le, and ho/ of the length of Lp*Ls. . The adhesive of the joint was L〇ctite 638 (manufactured by Henkel). The large-sized protective film frame is vertically erected on the ground so that the short side is in the up-and-down direction, and the long side is horizontally oriented, and the operation jig is attached from the top to the bottom. The operation jig is composed of a handle portion that is held by the operator and a holding portion that is coupled to the handle portion and holds the large protective film, and the holding portion has a shape of β. The holding portion is inserted into the frame for forming a large protective film. The pair of engaging portions that are engaged with the groove portion of the short side of the body and the supporting portion that connects the handle portion and supports the long side. The tying portion has an elongated member having the same thickness as the width of the groove portion formed on the short side, and the length of the member merging portion is set to 700 mm, and the width of the merging portion is set to 33 Ω. The spacing between the ties is 1742 mm. Further, the support portion has an elongated member having the same thickness as the long side of the large-sized protective film frame, and the length of the support portion is 1752 mm. Then, the position of the large-sized protective film frame 154681.doc -36 - 201135351 is changed horizontally in the state in which the operation jig is attached, and the position is restored to the vertical direction. This operation was carried out 10 times. As a result, the large-sized protective film frame of the present embodiment can be obtained without being detached from the operation jig. Then, for the large-sized enamel frame, a styrene-ethylene-butene-styrene-based hot-melt adhesive was used as the adhesive, and the thickness was 18 mm, the coating width was 6 mm, and it was opened from the opening. The method of spacing between 2 mm is applied along each side of the frame for the large film. Then, in a dust-free room, a large protective film is attached to the green glass by replacing the mask with a frame. The attaching means for the large-sized protective film frame is attached, and the straight line connecting the corner portions of the corner portions of the respective edges is only applied to the width portion of the large-sized protective film frame. As a result, the entire surface of the adhesive layer can be pressed, and the adhesive layer can be uniformly pressed. Further, in the state in which the large-sized protective film frame was attached, it was left in a vertical state for a period of two months, and no air path or the like was generated. [Embodiment 2] The width of the long side is set to 9 mm, and the length of the long side is set to 78". The width of the short side is set to 7, and the length of the short side is set to (4). A large-sized protective film frame was formed in the same manner as in the embodiment except that the shape was set to a planar shape from the inner peripheral apex of the casing toward the outer peripheral apex. Fig. 1 is a schematic perspective view showing the shape of the joint portion in the second embodiment. In this case, 邙 is the length of ^%, and Lp is 0% of the length of Ls. As a result of whether or not the air path is generated in the same manner as in the embodiment (4), no air path or the like is generated. [Comparative Example 1] A large I5468I.doc •37-201135351 type film casing was formed in the same manner as in Example 除 except that the joint portion was not provided. As a result of confirming the operability of the large-sized protective film frame in the same manner as in the first embodiment, the large-sized protective film frame was peeled off twice from the operation jig. Further, in the same manner as in the first embodiment, the presence or absence of the result of the air path was confirmed. It was confirmed by visual observation that air paths were formed in several portions of the central portion of the long side. [Comparative Example 2] A large-sized protective film frame was formed in the same manner as in Comparative Example 1, except that the joint portion was provided at the center position of the pair of long sides (i.e., the joint portion was provided at two locations). As a result of confirming the presence or absence of the air path for the large-sized film casing in the same manner as in the first embodiment, it was confirmed by visual observation that air paths were formed in several portions of the central portion of the long side. [Example 3] ^ < He bought) The alloy was set to a thickness of 4.0 mm, the width of the long side was set to "mm, and the length was set to 43 〇. Further, the width of the short side was "· The length is 300 mm, and the entire length of the short side is the secret of the present day. The depth of the groove is 2 mm, and the height of the groove is 1> 5 mm. Further, the curvature of the corner portion is a claw, and a large-sized casing for a protective film is formed as shown in Fig. 2 . The length of the divided frame ^丨^ 21b is 370 mm, and the length of the divided frame 2ic, . . . 4 is 240 coffee. The joint portion is set to have a shape of a convex portion at the end of each member as shown in Fig. 7. Set the maximum lateral dimension of the root side of the convex portion to 154681.doc -38- 201135351 to a length of 1.6 mm, set the maximum lateral dimension of the front end side of the convex portion to 3.0 mm, and set the size of the joint gap to 〇〇3 mm. And the fitting is performed from the up-down direction without using an adhesive. As a result of the visual inspection, there was no problem in appearance. (Measurement of dimensional stability) The dimensions of the above-mentioned frame were measured and measured on a hot plate at 14 Torr. After the heat treatment for 10 minutes, the shape measurement of the center of the long side was performed, and the amount of deformation was measured. The dimensional measurement was measured using the Mituto (Fat-Min) FAL-1600 series. The results are shown in Table i. (Joint strength test) Then, the joint strength test was performed. A sample of a rod member of 100 mm including the joint shape portion as described above was produced. The joint was placed at a position of 5 mm of one half of a rod member of 1 mm. The width direction is directed to the upper surface, and the clamping is performed 10 mm from the joint portion (the clamping range is 1 mm to 30 mm from the joint portion), and the force is measured by applying a force to the portion of the claw from the joint portion. The opposite side of the clamp. The measuring device was a digital type of force gauge using Imada. The results are shown in Table 1. Then, the frame for the large-sized film was coated with a styrene-ethylene-butene-styrene-based hot-melt adhesive as an adhesive, and coated along the sides of the large-size film casing at a thickness of 14 mm. cloth. Further, a large-sized film of a cellulose ester was formed on a substrate by a spin coating method, and the film was attached to a temporary frame, and then peeled off from the substrate. The temporary frame system uses an aluminum frame. Thereafter, an acrylic film adhesive is applied to the surface of the large protective film coated with the hot-melt adhesive material on the side opposite to the side of the 154681.doc •39·201135351 which is not coated with the hot-melt adhesive. The large surface film of the temporary frame was then hardened, and the remaining film was cut to prepare a large film, and the appearance was visually inspected to confirm that there was no problem. After the cutting, the frame was bent inward, and therefore, after the shape was stabilized, the joint surface of the joint portion was visually confirmed. The results are shown in Table 1. [Example 4] The width of the long side was set to 9.0 mm. The length was set to 8 mm, the width of the short side was set to 7.0 mm, and the length was set to 480 mm. The curvature of the corner is set to R == 〇 mm. The length and depth of the groove other than the above were the same as in the first embodiment. This time, the frame is set as shown in Fig. 4, and 41c and 41d are set to 480 mm, and 41a and 41b are set to 790 mm. The joint portion is set to have a shape in which two circular convex portions are provided at the end portions of the members as shown in Fig. 8(a). The maximum lateral dimension of the root portion side of the convex portion is set to a length of 1.5 mm, the maximum lateral dimension of the front end side of the convex portion is set to 2.0 mm, the size of the joint gap is set to 〇〇2 claw, and no adhesive is used. The fitting is performed from the up and down direction. As a result of the visual inspection, there was no problem in appearance. Thereafter, a large-sized film was produced in the same manner as in Example 3 except that the thickness of the hot-melt adhesive material was set to 2.0 mm, and evaluation was performed in the same manner. The results are described in the table. [Embodiment 5] The width of the long side is set to 21.0 _, and the length is set to 2 mm. 'The width of the short side is set to 19 5 dragon'. The length is set to delete the coffee, and the curvature of the corner is set to (4) 匪, The thickness of the frame was set to 6. 〇 mm. The length and depth of the grooves other than this are the same as those of the weaving. 154681.doc 201135351 This time, set the frame as shown in Figure 6 and set 51c, 51c, 51d, 5 1 d' to 900 mm, 5丨a, 51 a, 5 1 b, 5 1 b' is set to 982 mm. The joint portion is set to have the shape of a convex portion having three trapezoidal shapes as shown in Fig. 9 (the maximum lateral dimension of the root portion side of the convex portion is set to a length of 2.1 mm), and the maximum lateral dimension of the front end side of the convex portion is set. Set to 4.2 mm', set the size of the joint gap to 〇〇15 mm, and carry out the ageing from the top and bottom without using an adhesive. The result of the visual inspection is 'no problem in appearance. Then, except for the hot-melt adhesive material. The thickness was set to 2 Å. A large protective film was produced in the same manner as in Example 3, and evaluated in the same manner. The results are shown in Table 1. [Comparative Example 3] Preparation of a mother without a joint portion Cut out the frame. Set the width of the long side to 9.0 mm, set the length to 800 mm, and the width e of the short side to 7.0 mm, and set the length to 480 mm. The material is made of alloy, thickness. It is a frame for a large protective film of 4.0 mm. The groove has a groove depth of 2 mm over the entire length of the short side, and the height of the groove is 1.5 mm. Further, the curvature of the corner is R = 2 mm. A large protective film was produced in the same manner as in Example 3, and The results were evaluated in Table 1. The results are shown in Table 1 ° but 'the joint strength test was not performed because there was no joint. [Comparative Example 4] The shape of the joint portion was set to the shape of a crucible, and two liquids were used. A large protective film frame was produced in the same manner as in Example 3 except that the room temperature hardening type amino phthalate adhesive was bonded, and then a large protective film was produced in the same manner as in Example 3, and The evaluation was carried out in the same manner. The results of 154681.doc -41 - 201135351 are shown in Table 1. As a result of visual inspection after the casing for a large protective film was produced, the adhesive was loosened, and the appearance was also observed by the adhesive. The dirt generated by the looseness, etc. [Reference Example 1] The joint portion is formed into a shape in which two convex portions of a positive triangle shape are provided at the end portion of one member as shown in Fig. 12. The root portion side of the convex portion is maximized. When the horizontal dimension is set to a length of 2.0 mm, the size of the joint gap is set to 〇mm, and the frame for the film is formed by laser welding, and a large protective film is produced in the same manner as in the third embodiment. Similarly The results are shown in Table 1. The results of the visual inspection of the frame for a large protective film were carried out, and the unevenness after welding was generated in the joint portion, and the appearance was also poor. The concave-convex portion is glittering and looks like a foreign matter, and the inspection property is also poor. [Reference Example 2] The joint portion is set such that three trapezoidal-shaped convex portions are provided at the end portion of one member as shown in FIG. Shape: The maximum lateral dimension of the root side of the convex portion is set to a length of 4.2 mm, the maximum lateral dimension of the front end side of the convex portion is set to a length of 2.1 mm, the size of the joint gap is set to the pawl, and the contraction is used. A large-sized film casing is produced by joining together. Thereafter, a large protective film was produced in the same manner as in Example 5, and evaluation was performed in the same manner. The results are shown in Table 1. As a result of visual inspection of the large-sized protective film frame, the appearance was good, but the joint strength was weak. Therefore, in the visual inspection after the production of the large protective film, a gap or crack was observed, and foreign matter was caught therein. Also, the shape is no longer rectangular. 154681.doc •42- 201135351 [I ί Appearance after film expansion 〇 〇 〇 疟 Malaria! . Shouting: Μ荽 Difficult S-琏$蟛 Looks like a foreign object. E is always rhyme 5 Park 2 ° * w Butterfly I逑^ Visual results (appearance) 〇 〇 〇 〇 # #蜂 V "〇 -Μ - ^ ^ ^ S·^ Ss. 〇Ul ball illusion joint strength test 35 kgf 40 kgf 50 kgf I 9 kgf 25 kgf 5 kgf Change after heating test 0.19 mm aa (N 〇 round (N Ο 0.47 mm % §蠛t^ !2. w 5s ^ 0.35 mm = stepping on 'Yao joint clearance 0.03 mm 0.02 mm 0.015 mm 1 Joint shape XT UTJ 1 W λΑτ Follower disc 1 g Driving π No (laser welding) None (shrink fit) Split position I 1 1 1 1一二1 1—GO Ί Γ~ inch! -〇〇一1 j -Block base material 1 1 〇0 1 Γ inch 1 ·〇〇*" | 1 1 Π~Γ / Example 3 Example 4 Example 5 Comparative Example 3 Inch jj Reference Example 1 Reference Example 2 154681.doc -43- 201135351 [Example 6] The material of the frame for the large film (the material of all the divided frames) is the alloy, and the thickness is set to 4.0 mm. 'Set the width of the long side to 6. 〇mm and the length to 430 mm. Also, set the width of the short side to 6 〇mm, set the length to 300 mm 'and set the groove over the full length of the side of the short side' Set the ice of the groove to 2 mm 'Set the height of the groove to 15 mm. Also, set the curvature of the corner to R= 2 mm. The other structure is a frame for a large protective film by the configuration shown in Fig. 2. The length of the divided frame constituting the long side is 370 mm, and the length of the divided frame constituting the short side is 240 mm. The joint portion is set to have a stepped shape in which the stepped end surface 81a of the divided frame body 8a and the stepped end surface 8 1 b of the divided frame body 80b are brought into contact with each other as shown in Fig. 14. The specific size is set to 1.3 mm in the vertical direction from the lower surface, 1 claw in the longitudinal direction, and the specific size is set to 丨3 mm in the vertical direction and 10 mm in the longitudinal direction. Further, the vertical direction was 丨.4 mm' and the following two were used. The subsequent agent was subjected to visual inspection using a Loctite 638 (manufactured by Henke®, and there was no problem in appearance. (Measurement method for dimensional stability measurement) Displacement meter (u (10) 0 manufactured by Keyenee). A standard sample of ice root regular square was prepared in accordance with the outer dimensions of the frame. Unlike this, the conditions of the examples and comparative examples were respectively made in each case. Samples The standard samples of the quadrilateral are compared. Even in one of the five samples, if the difference is the most above, then it is set to X, and if the shape is more than 5 axes, it is less than 1〇154681.doc • 44· 201135351 Mm ' sets 疋 to △' if it is less than 0.5 mm, it is set to 〇. (Joint strength test) Then, the joint strength test was performed. A sample of a 100 mm rod-shaped frame including a joint portion of the same shape as described above was produced. Place the joint at 5 mm in the half of the rod of 100 mm. The width direction is directed upwards, and the gap is opened from the joint by 1 〇 „! „! (the clamping is in the range of 1 mm to 30 mm from the joint), and a force is applied to the portion 10 mm from the joint. To determine the opposite side of the grip. The measuring device was a digital type of force gauge using Imada. The results are shown in Tables 2 and 3. Then, a styrene-ethylene-butylene-styrene-based hot-melt adhesive was used as the adhesive for the frame for the large-sized film, and the thickness of the 护4 mm was along the sides of the frame for the large film. Coating. In addition, a large-sized film of a cellulose ester is formed on a substrate by a spin coating method to cause the large-sized film to be attached to a temporary frame, and then peeled off from the substrate. The temporary frame system uses an aluminum frame. body. Thereafter, an acrylic film adhesive is applied to the surface of the large protective film coated with the hot-melt adhesive material on the side opposite to the side on which the hot-melt adhesive is not applied, so that the temporary frame body is large. The film is then hardened. Then, the remaining film was cut to prepare a large protective film ’, and the appearance was visually inspected to confirm that there was no problem. After the cutting, the large-sized mold casing was bent inward, and therefore, after the shape was stabilized, the joint surface of the joint portion was visually confirmed. The results are shown in Table 2 and Table 3. 15468l.doc -45- 201135351 [Table 2]

分割數 接合方法 接合部形狀 尺寸穩定性 實施例6 8 接著劑 階梯 〇 實施例7 4 嵌合 中間變細 〇 實施例8 8 嵌合 中間變細 〇 比較例5 無 - - Δ 比較例6 8 雷射焊接 簡單結合 X 參考例3 4 收縮配合 倒Δ X 參考例4 8 膨脹配合 倒梯形 X 比較例7 8 接著劑 簡單結合 XDividing number joining method Joint shape size stability Example 6 8 Substituent step 〇 Example 7 4 Chimeric intermediate 〇 Example 8 8 Chimeric intermediate 〇 Comparative Example 5 None - Δ Comparative Example 6 8 Ray Shot welding simply combined with X Reference Example 3 4 Shrinkage fit ΔX Reference Example 4 8 Expansion fit inverted trapezoid X Comparative Example 7 8 Simple combination of the follower X

[表3] 剛性接合測試 目視結果(外觀） 膜展開後之外觀 實施例6 30 kgf 〇 〇 實施例7 40 kgf 〇 〇 實施例8 50 kgf 〇 〇 比較例5 - 〇 〇 比較例6 8 kgf x (異物確認） X(產生裂痕且有異物） 參考例3 5 kgf χ(凹凸確認） X (若確認異物， 則為公差範圍外） 參考例4 5 kgf 〇 χ(若產生異物， 則為公差範圍外） 比較例7 9 kgf X(接著劑鬆動） χ(膜搖晃。產生裂痕） [實施例7] 將大型護膜用框體之長邊之寬度設定為9.0 mm，將長度 設定為800 mm，將短邊之寬度設定為7.0 mm，將長度設 定為480 mm，將角部之曲率設定為R=0 mm。使除此以外 之槽之長度、深度，大型護膜用框體之厚度與實施例6相 同。將大型護膜用框體設定成如圖4所示之4分割，將構成 長邊之分割框體之長度設定為790 mm，將構成短邊之分割 框體之長度設定為480 mm。將接合部設定成圖8(a)所示之 形狀。將各個接合端面之最大接合距離設定成相對於上述 寬度為1.5 mm，將各個接合部内表面之最大接合距離設定 154681.doc •46· 201135351 成2.0 mm，且設置有進行相對於上述接合部内表面之大小 為0.02 mm之嵌合時被壓碎的部分（剩餘部分广而且，不 使用接著劑而自上下方向進行嵌合。進行目視檢查之結 果，外觀上無問題。其後，除將熱熔黏著材料之厚度設定 為2.0 mm以外，以與實施例6相同之方式製作大型護膜， 並以相同之方式進行評價。將其結果示於表2及表3。 [實施例8] 將大型護膜用框體之長邊之寬度設定為21〇 mm，將長 度設定為2000 mm，將短邊之寬度設定為^乃出爪，將長 度設定為1800 mm，將角部之曲率設定為汉吲爪爪，將框體 之厚度設定為6.0 mm〇使除此以外之槽之長度、深度與實 施例6相同。將大型護膜用框體設定成如圖6所示之8分 割，將構成長邊之分割框體之長度分別言免定為9〇〇麵，將 構成短邊之分割框體之長度分別設定為982 _。將接合部 設定成圖9⑻所示之形狀。將各個接合端面之最大接合距 離設定成相對於上述寬度為2] mm，將各個接合部内表面 之最大接合距離設定成4.2 mm，將間隙設定成。Ο"麵， 且不使用接著劑而自上下方向進行嵌合。進行目視檢查之 結果’外觀上無問題。其後’除將錄黏著材料之厚度設 定為2.0 mm以外，以與實施例6相同之方式製作大型護 膜’並以相同之方式進行評價。將其結果示於表：及表3。 [比較例5] 大型護膜用框體係準備無接合部之來 心木目~塊母材之切出 框體。將長邊之寬度設定成9·〇 m 脾 ’將長度設定成800 154681.doc • 47- 201135351 mm，將&邊之寬度設定成7 〇 _，將長度設定成彻 mm。將材質設定為鋁合金，將厚度設定為4〇爪爪。於短 邊之側面，遍及全長設置有槽，將槽之深度設定為2匪， 將槽之高度設定為1.5 mm。又，將角部之曲率設定為r=2 馳。除此以外，以與實施例6相同之方式製作大型護膜， 並同樣地進行評價。將其結果示於表2及表3。但是，由於 無接合部，因此未進行接合強度測試。 [比較例6] 將接合部之形狀設定成如圆u之簡單形狀（垂直地切斷 框體而成之形狀），並進行雷射焊接，除此以外，設定成 與實施例6相同之構成。將其結果示於表2及表3。於展開 大型表膜後，外觀上有裂痕，且產生了異物。 [比較例7] 將接合部之形狀設定成如011之簡單形狀，並使用二液 性之常溫硬化型胺基甲酸s旨接著劑進行接合，除此以外， 以與實施例6相同之方式製作大型護膜用框體，然後以與 實施例6相同之方式製作護膜，i同樣地進行評價。將其 結果示於表2及表3。製作大型護膜用框體後進行目視檢查 之結果’產生接著劑之鬆動，於外觀上亦看到由接著劑之 鬆動所產生之污垢等。 [參考例3] 如圖12所不’將大型護膜用框體之接合部之形狀形成為 正一角形，且形成有2個接合部分。將各個接合部之邊設 定為2.0 mm，且藉由收縮配合之方法進行接合。除此以 154681.doc • 48 - 201135351 外，製作與實施例7相同之大型護膜用框體，然後以與實 施例6相同之方式進行評價。將其結果示於表2及表3 ^製 作大型護膜用框體後進行目視檢查之結果，於接合部產生 焊接後之凹&，外觀亦不佳。又，製作大型護膜後之外觀 亦成為如下者，即凹凸部分閃閃發光而看上去像異物，檢 查性亦不佳。 [參考例4] 如圖15所示，將大型護膜用框體之接合部之形狀設定成 如下的形狀：將分割框體7〇a、7〇b之端面7U、7ib設定成 形成有梯形狀之臍與槽的形狀，且形成有3個接合部分。 將各個接合端面之最大接合距離設定成相對於上述寬度為 4.2mm，將各個接合部内表面之最大接合距離設定成2.工 mm，並使用收縮配合進行接合而製作大型護膜用框體。 其後，以與實施例6相同之方式製作大型護膜，並同樣地 進行评仏。將其結果示於表2及表3。製作大型護膜用框體 後進行目視檢查之結果’外觀良好，但接合強度較弱，因 此於製作大型護膜後之目視檢查中，看到間隙或裂痕，且 異物夾於其中。又，形狀不再係矩形狀。 繼而，列舉實施例9〜丨丨及比較例8更具體地說明本實施 形態，但本實施形態只要不超越其主旨，則並不限定於下 述之實施例。 (尺寸穩定性之測定方法） 測定裝置係使用雷射位移計（基恩斯製造之LJ G〇3〇)。 與框體之外部尺寸相吻合地製作丨根根正四角形之標準樣 15468 丨.doc -49- 201135351 品。不同於此，以下述實施例及比較例之條件分別於每一 例中製作5個樣品，並與正四角形之標準樣品比較外部尺 寸彼此之大小的差異。即便於5個樣品中之1個樣品中，若 外部尺寸彼此之差異最大之部位為1 ·〇 mm以上，則亦設定 為x ’若為0.5 mm以上、未達i_〇 mm，則設定為△，若未 達〇. 5 mm，則設定為〇。 (接合強度測試之測定方法） 測定裝置係使用Imada之數字型推拉力計。製作包含接 合部之1 00 mm之棒狀之框體的一部分，將接合部設置於自 端部起50 mm之處。使框體之一部分之寬度方向朝向上 面’自接合部起於框體之長度方向上空開1〇 mm並自寬度 方向進行夾持（固定），然後針對在接合部之相反方向上自 夹持部位起10 mm之部位，藉由測定裝置自平面方向與側 面方向施加壓力。 [實施例9] 將大型護膜用框體之材質（所有分割框體之材質）設定為 鋁合金，將厚度設定為4.0 mm，將長邊之寬度設定為6 〇 mm，將長度設定為430 mme又，短邊之寬度為6 〇爪爪， 長度為300 mm，且遍及短邊側全長設置有槽，槽之深度為 2随，槽之高度為h5職。又，角部之曲率為r=2職: 除此以外，如圖2般形成大型護膜用框體。分割框體2ia、 21b之長度為370 mm，分割框體21c、2id之長度為2仂 mm。將接合部J全部設定成如圖16之冑單形狀。接著劑係 使用厭氧性硬化型之丙埽酸系接著劑（商品名如⑼ 154681.doc .50- 201135351[Table 3] Rigid Joint Test Visual Results (Appearance) Appearance after Film Unfolding Example 6 30 kgf 〇〇 Example 7 40 kgf 〇〇 Example 8 50 kgf 〇〇 Comparative Example 5 - 〇〇 Comparative Example 6 8 kgf x (For foreign matter confirmation) X (cracks and foreign matter) Reference Example 3 5 kgf χ (concavity confirmation) X (outside the tolerance range if foreign matter is confirmed) Reference Example 4 5 kgf 〇χ (If foreign matter is generated, the tolerance range is Comparative Example 7 9 kgf X (adhesion of the adhesive) χ (film swaying and cracking occurred) [Example 7] The width of the long side of the frame for the large protective film was set to 9.0 mm, and the length was set to 800 mm. Set the width of the short side to 7.0 mm, the length to 480 mm, and the curvature of the corner to R=0 mm. The length and depth of the grooves other than the above were the same as those of the sixth embodiment. The large-sized protective film frame was set to four divisions as shown in Fig. 4, the length of the divided frame constituting the long side was set to 790 mm, and the length of the divided frame constituting the short side was set to 480 mm. The joint portion is set to the shape shown in Fig. 8(a). The maximum joint distance of each joint end surface is set to be 1.5 mm with respect to the above width, and the maximum joint distance of the inner surfaces of each joint portion is set to 154681.doc • 46·201135351 to 2.0 mm, and is provided to be performed with respect to the inner surface of the joint portion. The portion to be crushed at a fitting size of 0.02 mm (the remaining portion is wide and the fitting is performed from the upper and lower directions without using an adhesive. As a result of visual inspection, there is no problem in appearance. Thereafter, in addition to heat fusion A large protective film was produced in the same manner as in Example 6 except that the thickness of the material was set to 2.0 mm, and the results were evaluated in the same manner. The results are shown in Tables 2 and 3. [Example 8] Large protective film Set the width of the long side of the frame to 21〇mm, set the length to 2000mm, set the width of the short side to the claw, set the length to 1800 mm, and set the curvature of the corner to the 吲 吲For the claws, the thickness of the frame is set to 6.0 mm, and the length and depth of the other grooves are the same as in the sixth embodiment. The frame for the large protective film is set to 8 divisions as shown in Fig. 6, which will constitute the long side. Segmentation The length of the frame body is set to be 9 〇〇 face, and the length of the divided frame constituting the short side is set to 982 _. The joint portion is set to the shape shown in Fig. 9 (8). The maximum joint distance of each joint end face is set. It is set to 2 mm in the width, the maximum joint distance of the inner surface of each joint is set to 4.2 mm, and the gap is set to Ο" surface, and the fitting is performed from the up-and-down direction without using an adhesive. Visual inspection is performed. As a result, there was no problem in appearance. Thereafter, a large protective film was produced in the same manner as in Example 6 except that the thickness of the recording adhesive material was set to 2.0 mm, and the results were evaluated in the same manner. Table: and Table 3. [Comparative Example 5] The frame system for the large-size film was prepared, and the frame was cut out from the heartwood to the base material. The width of the long side was set to 9·〇m. Set to 800 154681.doc • 47- 201135351 mm, set the width of the & side to 7 〇 _, and set the length to mm. Set the material to aluminum and set the thickness to 4 〇 claws. On the short side Side, all over the entire length The groove was set, the depth of the groove was set to 2 匪, and the height of the groove was set to 1.5 mm. Further, the curvature of the corner portion was set to r = 2, and a large scale was produced in the same manner as in Example 6. The film was evaluated in the same manner. The results are shown in Tables 2 and 3. However, since the joint portion was not provided, the joint strength test was not performed. [Comparative Example 6] The shape of the joint portion was set to be round. The same configuration as in Example 6 was carried out except that the shape of the frame was cut in a simple shape (the shape of the frame was cut vertically), and the results are shown in Tables 2 and 3. After the film, there was a crack in appearance and foreign matter was generated. [Comparative Example 7] The same manner as in Example 6 was carried out except that the shape of the joint portion was set to a simple shape of 011, and bonding was carried out using a two-component room temperature curing type urethane s. A large-sized film casing was used, and then a protective film was produced in the same manner as in Example 6, and i was evaluated in the same manner. The results are shown in Tables 2 and 3. The result of visual inspection after the production of the large-sized film casing was carried out, and the adhesive was loosened, and the appearance of the dirt caused by the loosening of the adhesive was also observed. [Reference Example 3] The shape of the joint portion of the large-sized protective film frame is formed into a regular square shape as shown in Fig. 12, and two joint portions are formed. The sides of the respective joints were set to 2.0 mm, and joined by a shrink fit. In the same manner as in Example 7, except that 154681.doc • 48 - 201135351, a large-sized casing for a film was produced, and then evaluated in the same manner as in Example 6. The results are shown in Tables 2 and 3, and the result of visual inspection was carried out after the frame for a large film was produced, and the concave portion after welding was produced at the joint portion, and the appearance was also poor. Further, the appearance of the large-sized protective film is also such that the uneven portion is glittering and looks like a foreign matter, and the inspection property is also poor. [Reference Example 4] As shown in Fig. 15, the shape of the joint portion of the large-sized protective film frame is set to a shape in which the end faces 7U and 7ib of the divided frames 7A and 7B are formed to have a ladder. The shape of the navel and the groove are formed, and three joint portions are formed. The maximum joint distance of each joint end surface was set to 4.2 mm with respect to the above-mentioned width, and the maximum joint distance of the inner surfaces of the joint portions was set to 2. mm, and the joint for shrinkage was used to form a large-sized film casing. Thereafter, a large protective film was produced in the same manner as in Example 6 and evaluated in the same manner. The results are shown in Table 2 and Table 3. The result of visual inspection after the production of the large-sized film casing was carried out. The appearance was good, but the joint strength was weak. Therefore, in the visual inspection after the production of the large-sized film, gaps or cracks were observed, and foreign matter was caught therein. Also, the shape is no longer rectangular. Hereinafter, the present embodiment will be described more specifically by way of Examples 9 to 丨丨 and Comparative Example 8. However, the present embodiment is not limited to the embodiments described below as long as it does not exceed the gist thereof. (Measurement Method of Dimensional Stability) The measurement apparatus was a laser displacement meter (LJ G〇3〇 manufactured by Keynes). A standard sample of the root of the square root is prepared in accordance with the external dimensions of the frame 15468 丨.doc -49- 201135351. In contrast to this, five samples were prepared in each of the examples under the conditions of the following examples and comparative examples, and the difference in size of the outer dimensions from each other was compared with the standard sample of the regular square. That is, in one of the five samples, if the difference between the external dimensions is 1 · 〇mm or more, the x ' is set to be 0.5 mm or more, and if it is less than i_〇mm, it is set to △, if it is less than 5 mm, set to 〇. (Measurement Method of Bonding Strength Test) The measuring device was a digital type of force gauge using Imada. A part of a frame of a rod shape including a joint portion of 100 mm was produced, and the joint portion was placed at a position of 50 mm from the end portion. The width direction of one of the frames is directed toward the upper surface. The self-joining portion is opened by 1 mm in the longitudinal direction of the frame and clamped (fixed) from the width direction, and then the self-clamping portion is opposed to the opposite direction of the joint portion. From the position of 10 mm, the pressure is applied from the plane direction and the side direction by the measuring device. [Example 9] The material of the large-sized protective film frame (the material of all the divided frames) was set to an aluminum alloy, the thickness was set to 4.0 mm, the width of the long side was set to 6 mm, and the length was set to 430. Mme, the width of the short side is 6 〇 claws, the length is 300 mm, and the groove is provided over the entire length of the short side, the depth of the groove is 2, and the height of the groove is h5. Further, the curvature of the corner portion is r=2: In addition to this, a large-sized protective film frame is formed as shown in Fig. 2 . The length of the divided frames 2ia and 21b is 370 mm, and the length of the divided frames 21c and 2id is 2 mm. The joint portions J are all set to have a single shape as shown in FIG. The following agent is an anaerobic hardening type propionate-based adhesive (trade name such as (9) 154681.doc.50-201135351

Loctite 638(Henkel公司製造）），製作使該接著劑接著之框 體。進行目視檢查之結果，外觀上無問題。 又’另外製作2根接合強度測試用之形成有接合部之1 〇〇 mm之棒狀的樣品。將接合強度測試之結果示於表4。 繼而，針對大型護膜用框體，使用苯乙烯-乙烯·丁烯_苯 乙稀系之熱炼黏著劑作為黏著劑，以1.4 mm之厚度沿著大 型護膜用框體之各邊進行塗佈。另外，藉由旋塗法而使纖 維素醋之大型表膜於基板上成膜，使該膜接著於臨時框體 上，其後自基板上剝離《該臨時框體係使用鋁製之框體。 其後’於塗佈有上述熱熔黏著材料之大型護膜用框體上， 在未塗佈有熱熔黏著劑之相反侧之面塗佈丙烯酸系之膜接 著劑’使臨時框體之大型表膜接著並硬化，然後切斷剩餘 膜°將尺寸穩定性之結果記載於表4中。 [實施例10] 將長邊之寬度設定為9.0 mm，將長度設定為8〇〇 mm， 將短邊之寬度設定為7.0 mm，將長度設定為48〇 mm，將 角部之曲率設定為R=〇 mm。使除此以外之槽之長度、深 度’框體之厚度與實施例9相同而製作2根。於實施例丨〇中 設定成如圖4之分割框體，將81c、81d設定為48〇 mm，將 81a、81b §史疋為790 mm。接合部J之平面形狀採用如圖17 之一邊為4 mm之正三角形之形狀，相對於接合端面設置有 1個此種正二角形之凸部（凹部），除此以外，以與實施例9 相同之方式製作。進行目視檢查之結果，外觀上無問題。 以與實施例9相同之方式進行接合強度測試。將其結果示 154681.doc -51- 201135351 於表4其後’使框體上之熱溶黏著材料之厚度變成η 麵除此以外，以與實施例9相同之方式製作大型護膜， 並以相同之方式進行評價。將其結果記载於表4中。、 [實施例11] 將長邊之寬度設定為21.0職，將長度設定為膽 職，將短邊之寬度設定為19.5職，將長度設定為· 随，將角部之曲率設定為㈣職，將框體之厚度設 6·〇 mm。使除此以外之槽 ^ 馬 ·<價之長度、深度與實施例9相同。 於實施仙中設定成如圖6之分割框體，將仏、^，、 51d、51d分別設定為9G0 mm、將5U、5U·、加、川分 別設定為982賴。將接合部】之形狀設定成如圖22之中二 變細形狀’且相對於接合端面設置有3個此種中間變細形 狀之凸部。將凸部之根部側之最大橫尺寸設定為Μ _， 將凸部之前端側之最大橫尺寸設定為（5麵，除此以外， 以與實施例9相同之方式製作。進行目視檢查之結果外 ，上無問喊。以與貫施例9相同之方式進行接合強度測 ‘將其結果示於表4 °其後’使框體上之熱熔黏著材料 之厚度變成2.0随，除此以外，以與實施例$相同之方式 製作大型護膜，並以相同之方式進行評價。將 於表4中。 n [參考例5] 16之簡單形狀，不使用接 ，除此以外，以與實施例 體’並同樣地製作大型護 將接合部J之形狀設定成如圖 著劑而進行雷射焊接來加以接合 9相同之方式製作大型護膜用框 154681.doc -52- 201135351 膜。評價方法亦以與實施例9相同之方式進行。將其結果 記載於表4 _。外觀為接合部J上產生凹凸，且夾有異物， 因此作為大型護膜而言係不合格水平。 [參考例6 ] 將接合部J之形狀設定成與實施例1〇相同，不使用接著 劑而進行雷射焊接來加以接合，除此以外，以與實施例ι〇 相同之方式製作大型護膜。評價方法係以與實施例9相同 之方式進行，將其結果示於表4。外觀為接合部〗上產生凹 凸’且夹有異物’因此作為大型護膜而言係不合格水平。 [參考例7 ] 將接合部j之形狀設定成與實施例i〖相同，不使用接著 劑而進行雷射焊接來加以接合，除此以外，以與實施例u 相同之方式製作大型護膜。評價方法係以與實施例9相同 之方式進行，將其結果示於表4。 [參考例8]Loctite 638 (manufactured by Henkel Co., Ltd.), which was used to fabricate the adhesive. As a result of the visual inspection, there was no problem in appearance. Further, two samples of a rod shape having a joint portion of 1 mm were used for the joint strength test. The results of the joint strength test are shown in Table 4. Then, for the frame for large-size film, a styrene-ethylene-butene-styrene-based hot-melt adhesive was used as an adhesive, and it was coated along the sides of the large-size film casing at a thickness of 1.4 mm. cloth. Further, a large-sized film of cellulose vinegar was formed on the substrate by a spin coating method, and the film was attached to the temporary frame, and then peeled off from the substrate. "The temporary frame system was made of an aluminum frame. Then, on the frame for the large protective film coated with the above-mentioned hot-melt adhesive material, an acrylic film-forming agent is applied to the surface opposite to the side on which the hot-melt adhesive is not applied, so that the temporary frame body is large. The film was then hardened and then the remaining film was cut. The results of dimensional stability are shown in Table 4. [Embodiment 10] The width of the long side was set to 9.0 mm, the length was set to 8 mm, the width of the short side was set to 7.0 mm, the length was set to 48 mm, and the curvature of the corner was set to R. =〇mm. The length and depth of the grooves other than the above were made in the same manner as in Example 9 to produce two. In the embodiment, the frame is set as shown in Fig. 4, and 81c and 81d are set to 48 mm, and 81a and 81b are set to 790 mm. The planar shape of the joint portion J is a shape of an equilateral triangle having a side of 4 mm as shown in Fig. 17, and one convex portion (concave portion) having such a regular dihedral shape is provided with respect to the joint end surface, and otherwise, the same as in the ninth embodiment. The way to make. As a result of the visual inspection, there was no problem in appearance. The joint strength test was conducted in the same manner as in Example 9. The results are shown in 154681.doc -51-201135351. In Table 4, a large protective film was produced in the same manner as in Example 9 except that the thickness of the hot-melt adhesive material on the frame was changed to the n-plane. Evaluation is done in the same way. The results are shown in Table 4. [Embodiment 11] Set the width of the long side to 21.0, set the length to be bold, set the width of the short side to 19.5, set the length to ·, and set the curvature of the corner to (4). The thickness of the frame is set to 6 mm. The length and depth of the groove other than the above are the same as in the ninth embodiment. In the implementation, the divided frame is set as shown in Fig. 6, and 仏, ^, 51d, 51d are set to 9G0 mm, and 5U, 5U·, plus, and Sichuan are respectively set to 982 Å. The shape of the joint portion is set to a two-thickness shape as shown in Fig. 22, and three such convex portions having an intermediate tapered shape are provided with respect to the joint end surface. The result of visual inspection was carried out in the same manner as in Example 9 except that the maximum lateral dimension of the root portion side of the convex portion was set to Μ _ and the maximum lateral dimension of the front end side of the convex portion was set to (5 faces). Except for the above, the joint strength was measured in the same manner as in Example 9. The result is shown in Table 4 and then the thickness of the hot-melt adhesive material on the frame was changed to 2.0. A large protective film was produced in the same manner as in Example #, and evaluated in the same manner. It will be shown in Table 4. n [Reference Example 5] The simple shape of 16 is not used, and other than In the same manner, the shape of the large-sized guard joint portion J is similarly set to be laser-welded and bonded as shown in the figure. The large-sized protective film frame 154681.doc -52-201135351 film is produced in the same manner. The results are also shown in the same manner as in Example 9. The results are shown in Table 4. The appearance is such that irregularities are formed in the joint portion J, and foreign matter is interposed. Therefore, the large-sized film is unacceptable. [Reference Example 6 ] Set the shape of the joint J to A large protective film was produced in the same manner as in Example 1 except that the bonding was carried out by laser welding without using an adhesive. The evaluation method was carried out in the same manner as in Example 9. The results are shown in Table 4. The appearance is such that the joint portion has irregularities and foreign matter is trapped. Therefore, it is a level of failure as a large protective film. [Reference Example 7] The shape of the joint portion j is set to be the same as the example. In the same manner as in Example u, a large protective film was produced in the same manner as in Example u except that the bonding was carried out by laser welding. The evaluation method was carried out in the same manner as in Example 9, and the results were obtained. Shown in Table 4. [Reference Example 8]

將接合部J之形狀設定成與實施例11相同，不使用接著 劑而進行收縮配合來加以烊接，除此以外，以與實施例U 相同之方式製作大型護膜。評價方法係以與實施例9相同 之方式進行，將其結果示於表4。 [參考例9] 將接合部；之形狀設定成與實施即相同，*使用接著 劑而進行膨脹配合來加以焊接，除此以外，以與實施例u 相同之方式製作大型護膜。評價方法係以與實施例9相同 之方式進行，將其結果示於表4。 154681.doc •53- 201135351 [比較例8] 製作無接合部之一塊框體。將長邊之寬度設定為9·0 mm，將長度設定為800 mm，將短邊之寬度設定為7·〇 mm，將長度設定為480 mm，將角部之曲率設定為R=2.〇 mm。使除此以外之槽之長度、深度，框體之厚度與實施 例9相同而製作2根。評價方法係以與實施例9相同之方式 進行，將其結果示於表4。 [表4] 接合形狀 接合方法 接著劑商品名 尺寸 穩定性 自平面 按壓 實施例9 簡單 厭氧性 接著劑A large protective film was produced in the same manner as in Example U except that the shape of the joint portion J was set to be the same as in Example 11, except that the shrinkage fit was performed without using an adhesive. The evaluation method was carried out in the same manner as in Example 9, and the results are shown in Table 4. [Reference Example 9] A large-sized protective film was produced in the same manner as in Example u except that the shape of the joint portion was set to be the same as that of the embodiment, and the joint was swollen and welded using an adhesive. The evaluation method was carried out in the same manner as in Example 9, and the results are shown in Table 4. 154681.doc •53- 201135351 [Comparative Example 8] A block frame having no joint portion was produced. Set the width of the long side to 9·0 mm, the length to 800 mm, the width of the short side to 7·〇mm, the length to 480 mm, and the curvature of the corner to R=2.〇 Mm. Two or more of the lengths and depths of the grooves other than the above were produced in the same manner as in the ninth embodiment. The evaluation method was carried out in the same manner as in Example 9, and the results are shown in Table 4. [Table 4] Bonding shape Joining method Next product trade name Size Stability Self-planar pressing Example 9 Simple Anaerobicity Next agent

Henkel Loctite 638 30kgf 實施例10 三角形 中間變細) 厭氧性 接著劑Henkel Loctite 638 30kgf Example 10 Triangle Intermediate thinning) Anaerobic Next

Henkel Loctite 638 40 kgf 實施例11 中間變細 厭氧性 接著劑Henkel Loctite 638 40 kgf Example 11 Intermediate thinning Anaerobic Next

Henkel Loctite 638 40 kgf 參考例5 簡單 雷射焊接 8 kgf 參考例6 參考例7 參考例8 參考例9 比較例8 角形 間變細） 間變細Henkel Loctite 638 40 kgf Reference Example 5 Simple Laser Welding 8 kgf Reference Example 6 Reference Example 7 Reference Example 8 Reference Example 9 Comparative Example 8 Angle between thinning) Thinning

間變細 中間變細 雷射焊接 雷射焊接 收縮配合 膨脹配合 6 kgfThinning, intermediate thinning, laser welding, laser welding, shrink fit, expansion fit, 6 kgf

XX

XX

X 5 kgf 2 kgf 6 kgf 接合強度測試 自側面 按壓 45 kgf 60 kgf 150 kgf 20 kgf 20 kgf 5 kgf 2 kgf 5 kgfX 5 kgf 2 kgf 6 kgf joint strength test from the side press 45 kgf 60 kgf 150 kgf 20 kgf 20 kgf 5 kgf 2 kgf 5 kgf

繼而，列舉實施例12〜17及比較例l〇~ll來更具體地說 明 本實施形態，但本實施形態只要不超越其主旨，則並不限 定於下述之實施例。 (XRD之測定方法） 相對於護膜用框體之轴方向，自垂直面起以±1度之精度 切出剖面，作為機械研磨，利用研磨劑進行鏡面研磨，然 後以下述條件進行射線繞射測定，並根據（111)繞射面及 154681.doc • 54· 201135351 (200)繞射面之峰頂處之檢測強度算出峰值強度比。 測定裝置：Rigaku Ultima-IV X射線源：Cu真空管（40 kV.l〇 mA)， 檢測器：D/tex Ultra(—維檢測器） 光學系統：集中光學系統（無分光結晶，Ni-fih，無射束阻 擋器） 縱向限制狹縫：10 mm 光學狹縫（SS-DS-RS): ldeg-開放-開放 太陽能狹縫（入射側、出射側）：s〇l〇r V5，s〇i-5 deg 測定模式：2θ/ω掃描 掃描速度：0.1 deg/min 試樣旋轉速度： 75 rpm 掃描範圍：2Θ=35〜85 deg(0.02 deg/step) (熱尺寸穩定測定之測定方法） 測定裝置係使用雷射位移計（基恩斯製造之u_G〇3〇)。 分別測定加熱前之長邊中央與短邊中央之外部尺寸。其後 於設定成180度之烘箱中加熱30分後，進行自然冷卻（約3 小時，室溫），再次分別測定長邊中央與短邊中央之外部 尺寸’確認加熱後之位移量。Hereinafter, the present embodiment will be described more specifically by way of Examples 12 to 17 and Comparative Examples 1 to 11, but the present embodiment is not limited to the following examples as long as the gist of the present invention is not exceeded. (Measurement method of XRD) The cross section is cut out with a precision of ±1 degree from the vertical surface with respect to the axial direction of the casing for the film, and is subjected to mirror polishing by abrasive polishing as a mechanical polishing, and then subjected to radiation diffraction under the following conditions. The peak intensity ratio was determined based on the detected intensity at the peak of the (111) diffraction surface and the 154681.doc • 54· 201135351 (200) diffraction surface. Measuring device: Rigaku Ultima-IV X-ray source: Cu vacuum tube (40 kV.l mA), Detector: D/tex Ultra (-dimensional detector) Optical system: concentrated optical system (no spectroscopic crystallization, Ni-fih, No beam blocker) Longitudinal restriction slit: 10 mm Optical slit (SS-DS-RS): ldeg-open-open solar slit (incident side, exit side): s〇l〇r V5,s〇i -5 deg Measurement mode: 2θ/ω Scanning speed: 0.1 deg/min Sample rotation speed: 75 rpm Scanning range: 2Θ=35 to 85 deg (0.02 deg/step) (Measurement method for thermal dimensional stability measurement) Measuring device A laser displacement meter (u_G〇3〇 manufactured by Keynes) was used. The outer dimensions of the center of the long side and the center of the short side before heating were measured, respectively. Thereafter, after heating for 30 minutes in an oven set to 180 degrees, natural cooling (about 3 hours, room temperature) was carried out, and the outer dimensions of the center of the long side and the center of the short side were measured again to confirm the amount of displacement after heating.

[實施例12J 體之材質）係利用鋁 mm，將長邊之寬度 大型護膜用框體之材質（所有分割框 合金製之擠出材料，將厚度設定為4() 設定為9.0 mm，將長度設定為8〇〇 mm 逻乙見度1 為7.0 mm，將長度設定為48〇 mm，將角部之曲率設 15468I.doc •55· 201135351 R=〇 mm »遍及短邊側全長設置有槽，槽之深度為2⑺爪， 槽之尚度為1·5 mm。除此以外，設定成如圖4之分割框 體，將41c、41d設定為480 mm，將41a、41b設定為790 mm。將接合部設定成如圖8(a)般於一個構件之端部設置有 2個圓形之凸部的形狀。將凸部之根部側之最大橫尺寸設 定成1.5 mm之長度，將凸部之前端側之最大橫尺寸設定成 2·0 mm，將接合間隙之尺寸設定成〇 〇2 mm，且不使用接 著劑而自上下方向進行嵌合。 測定上述框體之熱尺寸穩定，將其結果記載於表5中。 又，藉由相同之框體之XRD測定而確認配向，將其結果記 载於圖24中。 [實施例13 ] 大型護膜用框體之材質（所有分割框體之材質）係利用鋁 合金製之報軋材料’且與輥方向平行地切出長邊及短邊之 分割框體’除此以外，以與實施例12相同之方式製作框 體，並進行XRD測定以外之評價。將其結果示於表5。 [實施例14] 利用與實施例13相同之材質，與輥軋之輥方向平行地切 出長邊’且與親軋之親方向垂直地切出短邊，除此以外， 以與實施例12相同之方式製作框體，並進行xrd測定以外 之評價。將其結果示於表5。 [比較例10] 將框體之材質設定成較軋材料，且設定成不設置接合物 之一塊框體’除此以外，進行與實施例丨2相同之評價。將 15468l.doc -56- 201135351 其結果示於表5及圖25。 [表5] 長邊位移量 短邊位移量 實施例12 +0.04 mm -0.02 mm 實施例13 -0.06 mm -0.02 mm 實施例14 -0.06 mm +0.11 mm 比較例10 -0.30 mm +0.14 mm [實施例15] 將大型護膜用框體之材質（所有分割框體之材質）設定為 鋁合金，將厚度設定為4.0 mm，將長邊之寬度設定為6.0 mm，將長度設定為430 mm。又，短邊之寬度為6.0 mm， 長度為300 mm，且遍及短邊側全長設置有槽，槽之深度為 2 mm，槽之高度為1.5 mm。又，角部之曲率為R=2 mm。 除此以外，如圖2般形成大型護膜用框體。分割框體21a、 21b之長度為370 mm，分割框體21c、21d之長度為240 mm。將接合部J全部設定成如圖16之簡單形狀。接著劑係 使用厭氧性硬化型之丙烯酸系接著劑（商品名Henkel Loctite 648(Henkel公司製造）），製作使該接著劑接著之框 體。進行目視檢查之結果，外觀上無問題。 又，另外製作2根與實施例9相同之接合強度測試用之形 成有接合部的100 mm之棒狀之樣品。將接合強度測試之結 果示於表6。 繼而，針對大型護膜用框體，使用苯乙烯-乙烯-丁烯-苯 乙浠系之熱溶黏著劑作為黏著劑，以1.4 mm之厚度沿著大 型護膜用框體之各邊進行塗佈。另外，藉由旋塗法而使纖 維素酯之大型表膜於基板上成膜，使該膜接著於臨時框體 154681.doc -57- 201135351 上，其後自基板上剝離。該臨時框體係使用鋁製之框體。 其後’於塗佈有上述熱熔黏著材料之大型護膜用框體上， 在未塗佈有熱熔黏著劑之相反側之面塗佈丙烯酸系之膜接 著劑，使臨時框體之大型表膜接著並硬化，然後切斷剩餘 膜。將與實施例9相同之尺寸穩定性之結果記載於表6中 [實施例16；] 將長邊之寬度設定為9.0 mm，將長度設定為8〇〇 mm， 將紐邊之寬度設定為7.0 mm，將長度設定為48〇 mm ,將 角部之曲率設定為R=〇 mm。使除此以外之槽之長度、深 度，框體之厚度與實施例15相同而製作2根。於實施例i 6 中設定成如圖4之分割框體，將81c、81d設定為48〇 ， 將81a、81b設定為790 mm。接合部j之平面形狀採用如圖 17之一邊為4mm之正三角形之形狀’且相對於接合端面設 置有1個此種正三角形之凸部（凹部）。接著劑係使用改性丙 稀酸接著劑（商品名Three Bond 3923/3928(Three Bond公司 製造）），除此以外，以與實施例15相同之方式製作。進行 目視檢查之結果，外觀上無問題。以與實施例15相同之方 式進行接合強度測試。將其結果示於表6。其後，使框體 上之熱熔黏著材料之厚度變成2·〇 mm，除此以外，以與實 施例15相同之方式製作大型護膜，並以相同之方式進^評 價。將其結果記載於表6中。 [實施例17] 將長邊之宽度設定為21·〇 mm ’將長度設定為 mm，將短邊之寬度設定為19.5 mm，將長度設定為18〇〇 154681.doc -58- 201135351 mm，將角部之曲率設定為R=〇爪爪，將框體之厚度設定為 6.0 mm。將除此以外之槽之長度、深度設定成與實施例卫$ 相同。於實施例17中設定成如圖6之分割框體，將5U、 51^、51(1、51(1，分別設定為9〇()111111、將513、5131、5113、 51b分別設定為982 mm。將接合部】之形狀設定成如圖u 之中間變細形狀，且相對於接合端面設置有3個此種中間 變細形狀之凸部。將凸部之根部側之最大橫尺寸設定為 2.1 mm，將凸部之前端側之最大橫尺寸設定為4.5 mm，且 將環氧系接著劑（商品名L〇ctite 〇151(Henkel製造））用於接 著劑，除此以外，以與實施例15相同之方式製作。進行目 視檢查之結果，外觀上無問題。以與實施例15相同之方式 進行接合強度測言式。將其結果示於表6。錢，使框體上 之熱熔黏著材料之厚度變成2 〇 mm，除此以外，以與實施 例15相同之方式製作大型護膜，並以相同之方式進行評 價。將其結果記載於表6中。 [比較例11 ] 除將氯丁二烯橡膠系接著劑（Konishi G17(Konishi製造)） 用於接著劑以外，以與實施例15相同之方式製作大型護 膜，並以相同之方式進行評價1其結果記載於表6中。 154681 .doc -59- 201135351 I--|9<】 综合判斷 〇 ◎ ◎ X 外觀 〇 〇 〇 X 接合強度測試 自側面按壓 1 105 kgf 107 kgf 140 kgf 3 kgf 自平面按壓 65 kgf 83 kgf 122 kgf 2 kgf 尺寸穩定性 〇 〇 〇 〇 發塵 〇 〇 〇 〇 接著劑商品名 Henkel Loctite 648 Three Bond 3923/3928 Henkel Loctite 0151 Konishi G17 接合方法 厭氧性接著劑 改性丙烯酸接著劑 環氧系接著劑 氯丁二烯橡膠系 接著劑 接合形狀 °斗 湿 △形狀 (未t間變細） 中間變細 UOU 實施例15 實施例16 實施例17 比較例11 ·60· 154681.doc 201135351 產業上的可利用性 本發明可較佳地用於尤其操作性成為問題之大型護旗之 領域。 【圖式簡單說明】 圖1係表示實施形態之大型護膜之立體圖。 圖2係本發明之實施形態之大型護膜用框體之俯視圖。 圖3係表示圖2所示之大型護膜用框體之角部附近的放大 立體圖。 圖4係本發明之其他實施形態之大型護膜用框體之俯視 圖。 圖5係表示圖4所示之大型護膜用框體之角部附近之一例 的局部放大立體圖。 圖6係本發明之其他實施形態之大型護膜用框體之俯視 圖。 圖7(a)、（b)係用於說明圖4及圖5所示之大型護膜用框體 之接合部之構成的說明圖。 圖8(a)係圖6所示之大型護膜用框體之接合部之放大圖， (b)係表示其變形例之放大圖。 圖9(a)、（b)、（c)均係本發明之各實施形態之護膜用框體 之接合部之變形例的放大圖。 圖1 〇係表示實施例2中之接合部之形狀之概略立體圖。 圖11係比較例中之接合部之放大圖。 圖12係參考例中之接合部之放大圖。 圖13係參考例中之接合部之放大圖。 15468l.doc -61 - 201135351 圖14係實施例中之接合部之放大圖。 圖15係參考例中之接合部之放大圖。 圖16係本發明之實施形態之大型護膜用框體之接合部 (簡單形狀）的放大立體圖。 圖17係本發明之實施形態之大型護膜用框體之接合部 (複雜形狀）的放大俯視圖。 圖18係本發明之實施形態之穴型護膜用框體之接合部 (複雜形狀）的放大俯視圖。 圖19係本發明之實施形態之大型護膜用框體之接合部 (複雜形狀）的放大側視圖》 圖20係本發明之實施形態之大型護膜用框體之接合部 (複雜形狀）的放大側視圖。 圖21係本發明之實施形態之大型護膜用框體之接合部 (複雜形狀）的放大俯視圖。 圖22(a)、（b)、（c)均係本發明之實施形態之大型護膜用 框體之接合部（複雜形狀）的放大俯視圖。 圖23係本發明之實施形態之大型護膜用框體之接合部 (複雜形狀）的放大立體圖。 圖24係表示本發明之實施形態之XRD之圖表的圖。 圖25係本發明之比較形態之XRD之圖表的圖。 【主要元件符號說明】 1 大型護膜 2 大型護膜用框體 2a、2b、4a、4b、長邊 154681.doc -62- 201135351 5a、5b 2c 、 2d 、 4c 、 4d 、 5c ' 5d 2e 3 4 5 6 7 21a 、 21b 、 41a 、 41b、51a、51a'、 51b、51b' 21b'、21d， 21c 、 21d 、 41c 、 41d、51c、51c'、 51d、51d’ 21e 、 21f 、 21g 、 21h[Example 12: Material of the J body] The material of the frame for the large-size film for the width of the long side is used, and the thickness of the extruded material made of the divided frame alloy is set to 9.0 mm. The length is set to 8〇〇mm. The visibility 1 is 7.0 mm, the length is set to 48〇mm, and the curvature of the corner is set to 15468I.doc •55· 201135351 R=〇mm »The slot is provided over the entire length of the short side The depth of the groove is 2 (7) claws, and the groove width is 1·5 mm. In addition to this, the divided frame is set as shown in Fig. 4, 41c and 41d are set to 480 mm, and 41a and 41b are set to 790 mm. The joint portion is set to have two circular convex portions at the end portion of one member as shown in Fig. 8(a). The maximum lateral dimension of the root portion side of the convex portion is set to a length of 1.5 mm, and the convex portion is formed. The maximum lateral dimension of the front end side was set to 2·0 mm, the size of the joint gap was set to 〇〇2 mm, and the fitting was performed from the up-and-down direction without using an adhesive. The thermal size of the above-mentioned frame was measured to be stable. The results are shown in Table 5. Further, the alignment was confirmed by XRD measurement of the same frame, and the results were recorded. [Embodiment 13] The material of the frame for the large-size film (the material of all the divided frames) is made of aluminum alloy, and the long side and the short side are cut in parallel with the roll direction. The frame was produced in the same manner as in Example 12 except that the frame was divided, and evaluations other than XRD measurement were performed. The results are shown in Table 5. [Example 14] The same material as that of Example 13 was used. A frame was produced in the same manner as in Example 12 except that the long side was cut in parallel with the roll direction of the roll, and the short side was cut perpendicularly to the direction of the roll, and evaluation other than xrd measurement was performed. The results are shown in Table 5. [Comparative Example 10] The same evaluation as in Example 2 was carried out except that the material of the frame was set to a material to be rolled and the block frame was not provided. The results are shown in Table 5 and Figure 25. [Table 5] Long Edge Displacement Short Edge Displacement Example 12 + 0.04 mm - 0.02 mm Example 13 - 0.06 mm - 0.02 mm Example 14 -0.06 mm +0.11 mm Comparative Example 10 -0.30 mm +0.14 mm [Example 15] Will be large The material of the frame for the film (the material of all the divided frames) is set to aluminum alloy, the thickness is set to 4.0 mm, the width of the long side is set to 6.0 mm, and the length is set to 430 mm. Also, the width of the short side It is 6.0 mm long and has a length of 300 mm and is provided with a groove over the entire length of the short side. The depth of the groove is 2 mm and the height of the groove is 1.5 mm. Also, the curvature of the corner is R = 2 mm. In addition to this, a large-sized casing for a protective film is formed as shown in Fig. 2 . The length of the divided frames 21a, 21b is 370 mm, and the length of the divided frames 21c, 21d is 240 mm. The joint portions J are all set to a simple shape as shown in FIG. In the following, an anaerobic curing type acrylic adhesive (trade name: Henkel Loctite 648 (manufactured by Henkel Co., Ltd.)) was used to prepare a frame in which the adhesive was applied. As a result of the visual inspection, there was no problem in appearance. Further, two samples of a rod shape of 100 mm having a joint portion formed in the same joint strength test as in Example 9 were prepared. The results of the joint strength test are shown in Table 6. Then, a styrene-ethylene-butylene-phenethyl hydrazine-based hot-melt adhesive is used as an adhesive for the large-sized film frame, and is coated along the sides of the large-size film casing at a thickness of 1.4 mm. cloth. Further, a large-sized film of cellulose ester was formed on the substrate by spin coating, and the film was then applied to a temporary frame 154681.doc -57-201135351, and thereafter peeled off from the substrate. The temporary frame system uses an aluminum frame. Thereafter, an acrylic film adhesive is applied to the surface of the large protective film coated with the hot-melt adhesive material on the side opposite to the side on which the hot-melt adhesive is not applied, so that the temporary frame body is large. The film is then hardened and then the remaining film is cut. The results of dimensional stability similar to those in Example 9 are shown in Table 6 [Example 16;] The width of the long side was set to 9.0 mm, the length was set to 8 mm, and the width of the border was set to 7.0. Mm, set the length to 48 〇 mm and set the curvature of the corner to R = 〇 mm. The length and depth of the grooves other than this were the same as in Example 15 except that the thickness of the frame was two. In the embodiment i6, the divided frame body is set as shown in Fig. 4, 81c and 81d are set to 48, and 81a and 81b are set to 790 mm. The planar shape of the joint portion j is a shape of an equilateral triangle of 4 mm as shown in Fig. 17, and a convex portion (concave portion) of such an equilateral triangle is provided with respect to the joint end surface. The following procedure was carried out in the same manner as in Example 15 except that a modified acrylic acid adhesive (trade name: Three Bond 3923/3928 (manufactured by Three Bond)) was used. As a result of the visual inspection, there was no problem in appearance. The joint strength test was conducted in the same manner as in Example 15. The results are shown in Table 6. Then, a large protective film was produced in the same manner as in Example 15 except that the thickness of the hot-melt adhesive material on the frame was changed to 2 mm mm, and evaluated in the same manner. The results are shown in Table 6. [Example 17] The width of the long side was set to 21·〇mm 'The length was set to mm, the width of the short side was set to 19.5 mm, and the length was set to 18〇〇154681.doc -58-201135351 mm, The curvature of the corner is set to R = 〇 claw, and the thickness of the frame is set to 6.0 mm. The length and depth of the other grooves are set to be the same as those of the embodiment. In the seventeenth embodiment, the divided frame body is set as shown in Fig. 6, and 5U, 51^, 51 (1, 51 (1, respectively set to 9 〇 () 111111, and 513, 5131, 5113, 51b are set to 982, respectively. The shape of the joint portion is set to a tapered shape as shown in Fig. u, and three convex portions having such a tapered shape are provided with respect to the joint end surface. The maximum lateral dimension of the root portion side of the convex portion is set to 2.1 mm, the maximum lateral dimension of the front end side of the convex portion was set to 4.5 mm, and an epoxy-based adhesive (trade name: L〇ctite® 151 (manufactured by Henkel)) was used for the adhesive, and The film was produced in the same manner as in Example 15. As a result of visual inspection, there was no problem in appearance. The joint strength test formula was carried out in the same manner as in Example 15. The results are shown in Table 6. The heat was melted on the frame. A large protective film was produced in the same manner as in Example 15 except that the thickness of the adhesive material was changed to 2 mm, and the results were evaluated in the same manner. The results are shown in Table 6. [Comparative Example 11] A chloroprene rubber-based adhesive (Konishi G17 (manufactured by Konishi)) A large protective film was produced in the same manner as in Example 15 and evaluated in the same manner. The results are shown in Table 6. 154681 .doc -59- 201135351 I--|9<] Comprehensive judgment 〇 ◎ ◎ X Appearance 〇〇〇X Joint strength test from the side press 1 105 kgf 107 kgf 140 kgf 3 kgf Self-pressing 65 kgf 83 kgf 122 kgf 2 kgf Dimensional stability 〇〇〇〇 Dust squeegee trade name Henkel Loctite 648 Three Bond 3923/3928 Henkel Loctite 0151 Konishi G17 Bonding method Anaerobic adhesive modified acrylic adhesive epoxy-based adhesive chloroprene rubber-based adhesive joint shape ° bucket wet △ shape (not changed between t Fine) Intermediate Thinning UOU Embodiment 15 Embodiment 16 Embodiment 17 Comparative Example 11 · 60· 154681.doc 201135351 Industrial Applicability The present invention can be preferably applied to the field of large flag which is particularly problematic in terms of operability BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a large protective film of an embodiment. Fig. 2 is a plan view of a large protective film frame according to an embodiment of the present invention. Figure 3 represents the system shown in FIG. 2 of large pellicle enlarged perspective view of the vicinity of the corner portion of the frame. FIG. 4 a top line of another embodiment of a large guard of the present invention, film frame of FIG. Fig. 5 is a partially enlarged perspective view showing an example of the vicinity of a corner portion of the casing for a large protective film shown in Fig. 4; Fig. 6 is a plan view showing a casing for a large protective film according to another embodiment of the present invention. Fig. 7 (a) and (b) are explanatory views for explaining the configuration of the joint portion of the casing for the large protective film shown in Fig. 4 and Fig. 5 . Fig. 8(a) is an enlarged view showing a joint portion of the casing for a large protective film shown in Fig. 6, and Fig. 8(b) is an enlarged view showing a modified example thereof. (a), (b), and (c) are enlarged views of a modification of the joint portion of the casing for a protective film according to each embodiment of the present invention. Fig. 1 is a schematic perspective view showing the shape of a joint portion in the second embodiment. Fig. 11 is an enlarged view of a joint portion in a comparative example. Fig. 12 is an enlarged view of a joint portion in a reference example. Fig. 13 is an enlarged view of a joint portion in a reference example. 15468l.doc -61 - 201135351 Figure 14 is an enlarged view of the joint portion in the embodiment. Fig. 15 is an enlarged view of a joint portion in a reference example. Fig. 16 is an enlarged perspective view showing a joint portion (simple shape) of a casing for a large protective film according to an embodiment of the present invention. Fig. 17 is an enlarged plan view showing a joint portion (complex shape) of a casing for a large-size protective film according to an embodiment of the present invention. Fig. 18 is an enlarged plan view showing a joint portion (complex shape) of the casing for a cavity type film according to the embodiment of the present invention. Fig. 19 is an enlarged side view of a joint portion (complex shape) of a casing for a large protective film according to an embodiment of the present invention. Fig. 20 is a joint portion (complex shape) of a casing for a large protective film according to an embodiment of the present invention. Zoom in on the side view. Fig. 21 is an enlarged plan view showing a joint portion (complex shape) of a casing for a large-size protective film according to an embodiment of the present invention. Fig. 22 (a), (b), and (c) are enlarged plan views of the joint portion (complex shape) of the casing for a large protective film according to the embodiment of the present invention. Fig. 23 is an enlarged perspective view showing a joint portion (complex shape) of the casing for a large protective film according to the embodiment of the present invention. Fig. 24 is a view showing a graph of XRD according to an embodiment of the present invention. Figure 25 is a diagram showing a graph of XRD of a comparative form of the present invention. [Explanation of main component symbols] 1 Large protective film 2 Large protective film frame 2a, 2b, 4a, 4b, long side 154681.doc -62- 201135351 5a, 5b 2c, 2d, 4c, 4d, 5c ' 5d 2e 3 4 5 6 7 21a , 21b , 41a , 41b , 51a , 51a ' , 51b , 51b ' 21b ' , 21d , 21c , 21d , 41c , 41d , 51c , 51c ' , 51d , 51d ' 21e , 21f , 21g , 21h

70a、70b 71a、71b 80a、80a 81a、81b C G 154681.doc 短邊 上緣面 大型表膜 開口部 角部 側面 槽部 分割框體（長邊用構件） 分割框體 分割框體（短邊用構件） 分割框體（角部用構件） 分割框體 端面 分割框體 端面 凹部 接合間隙（剩餘外周部分） -63- 201135351 J 接合部 Le 長邊之長度 Ls 短邊之長度 Lp 接合部與處於最靠近該接合部之 距離之角部的距離 P 凸部 s 接合部端面 t 根部側之最大橫尺寸 u 接合部内部 V 前端側之最大橫尺寸 154681.doc -64-70a, 70b, 71a, 71b, 80a, 80a, 81a, 81b, CG, 154, 681, 681. Short-edge upper edge, large surface, opening, corner, side groove, divided frame (long-side member), divided frame, divided frame (for short sides) Member) Divided frame (corner member) Divided frame end face divided frame end face concave joint joint gap (remaining outer peripheral portion) -63- 201135351 J Joint portion Le Long side length Ls Short side length Lp Joint part and most Distance P from the corner of the distance of the joint portion convex portion s joint end portion t maximum lateral dimension of the root portion side u maximum lateral dimension of the front end side of the joint portion V 154681.doc -64-

Claims (1)

201135351 七、申請專利範園： !•-種大型護顧_，其特徵在於：其係具備俯 矩形狀之開口部者，且 形成上述開口部之周緣之框部沿著該框部之軸方向 有3個部位以上之接合部。 ° 、 2·如請求項!之大型護膜用框體，其中於上述大型護膜用 框體之角部具有上述接合部。 、 3. 如請求項1或2之大型護臈用框體，其中上述框部包含選 自由銘及紹合金所組成之群中之至少—種金屬構件:且 於上述大型護膜用框體之軸方向刮面之XRD測定結果 中’（111)面之峰值強度/(200)面之岭值強度之比率為五〇 以下。 . 4. 如請求項1至3中任一項之大型護膜用框體，其中於上述 大型濩膜用框體之軸方向剖面之XRD測定結果中，（11 j) 面之峰值強度/(200)面之峰值強度之比率為〇8以下。 5. 如請求項1至4中任一項之大型護膜用框體，其中於在上 述接合部所接合之一個構件之端部設置有向所接合之另 一個構件突出之至少一個凸部，於上述另一個構件之端 部設置有使上述凸部嵌合之凹部，且 藉由將上述凸部嵌合於上述凹部中而使上述一個構件 之端部接合於上述另一個構件之端部。 6. 如請求項丨至5中任一項之大型護膜用框體，其中上述開 口部之面積為1000 cm2以上、35〇〇〇 cm2以下。 7. 如請求項丨至6中任一項之大型護膜用框體，其中上述接 154681.doc 201135351 8. 9. 10. 合部之接合強度為10 kgf以上。 如請求項1至任一項之大型護膜用框體，其中上述接 合部係所接合之上述構件之端部彼此藉由化學反應型之 接著劑接合而形成。 如請求項8之大型護膜用框體，其中上述化學反應型之 接著劑包含選自由丙烯酸系接著劑及環氧系接著劑所組 成之群中之至少一種接著劑。 一種大型護膜，其包括：如請求項1至9中任一項之大型 護膜用框體' 以及以覆蓋上述開口部之方式展開支撐於 該大型護膜用框體上之大型表膜。 154681 ：doc201135351 VII. Application for a patent garden: a large-sized nursing _, which is characterized in that it has a rectangular-shaped opening, and the frame portion forming the periphery of the opening is along the axial direction of the frame There are joints of more than three parts. In the case of the large-sized protective film casing, the above-mentioned joint portion is provided at a corner portion of the large-sized protective film frame. 3. The large-sized visor frame according to claim 1 or 2, wherein the frame portion comprises at least one metal member selected from the group consisting of M. and Schneider: and the frame for the large protective film In the XRD measurement result of the axial direction scraping surface, the ratio of the peak intensity of the '(111) plane/the intensity of the (200) plane is less than five 。. 4. The casing for a large protective film according to any one of claims 1 to 3, wherein the peak intensity of the (11 j) plane is in the XRD measurement result of the axial cross section of the frame for the large ruthenium film. 200) The ratio of the peak intensity of the surface is 〇8 or less. 5. The large-size film casing according to any one of claims 1 to 4, wherein at least one convex portion that protrudes toward the other member to be joined is provided at an end portion of one of the members joined to the joint portion, A concave portion for fitting the convex portion is provided at an end portion of the other member, and an end portion of the one member is joined to an end portion of the other member by fitting the convex portion into the concave portion. 6. The casing for a large protective film according to any one of the items 5 to 5, wherein the opening portion has an area of 1000 cm 2 or more and 35 cm 2 or less. 7. The frame for a large protective film according to any one of the items 6 to 6, wherein the joint is 154681.doc 201135351 8. 9. 10. The joint strength of the joint is 10 kgf or more. The large-sized film casing according to any one of claims 1 to 4, wherein the end portions of the members joined by the joint portion are formed by a chemical reaction type bonding agent. The large protective film frame according to claim 8, wherein the chemical conversion type subsequent agent comprises at least one adhesive selected from the group consisting of an acrylic adhesive and an epoxy adhesive. A large-sized protective film comprising: a large-sized protective film frame body according to any one of claims 1 to 9; and a large-sized surface film which is supported by the large-sized protective film frame so as to cover the opening. 154681 :doc
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JP2010196230A JP5653691B2 (en) 2010-09-01 2010-09-01 Pellicle frame and pellicle
JP2010196223A JP5653690B2 (en) 2010-09-01 2010-09-01 Pellicle frame and pellicle
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