TW201133703A - Carrying apparatus and exposure machine having the same - Google Patents

Abstract

Disclosed is a carrying apparatus suitable for holding a work-piece to be exposed. The carrying apparatus comprises a base and a replaceable carrying tray. The base includes a top and a plurality of first positioning components disposed on the top. The replaceable carrying tray includes: a carrying surface which is capable of carrying the work-piece to be exposed and has same size as the work-piece; a bottom which can lean against the top; and a plurality of second positioning components which are disposed on the bottom and can connect with the first positioning components in a detachable way. Accordingly, if the size of another work-piece to be exposed is different, another replaceable carrying tray with the carrying surface corresponding to the size of the work-piece to be exposed can substitute.

Description

201133703 VI. Description of the Invention: [Technical Field] The present invention relates to a carrying device and an exposure machine having the same, in particular to a carrier plate that is replaceably assembled on or detached from the base Carrying device and an exposure machine having the same. [Previous Art] As shown in FIG. 1 and FIG. 2, the general exposure machine 1 includes a machine table 11, a carrier device 12 disposed on the machine bed, and a device fixed on the machine table and located above the carrier device 12. The carrier 13 and an exposure head 14 disposed on the table u and located above the carrier 13 are used to carry a mask 15 . The carrying device 12 includes a motor 121, a screw member 122 connected to the top end of the motor 121, a screw 123 screwed to the screw member 122, and a bearing coupled to the top end of the screw 123 for carrying a workpiece 16 to be exposed. When the disk is 124 ° into the 仃 exposure operation, the workpiece 16 to be exposed will pass through the transfer device (Fig.

The carrier (not shown) is placed on the carrier tray 124, and the carrier device 12 will push the carrier tray 124 up so that the workpiece 16 to be exposed on the carrier tray 124 is flattened with the mask 15 on the carrier U. The light generated by the exposure head 14 is exposed to the exposure member 16 through the reticle 15, so that the predetermined pattern on the reticle 15 can be transferred to the film slab. In order to stably carry the member 16, the size of the carrier m is designed to be equivalent to the size of the workpiece 16 to be exposed. If (4) other different sizes (4) exposure 4 light operation, the original carrier must be exposed to 12 original devices. The carrier 裴201133703 having the size of the carrier disk 124 corresponding to the size of the other 丨6 on the workpiece 31 to be exposed (4) can be exposed to different sizes of the workpiece 16 to be exposed. However, there is an error between the mounted carrier device 12 and the mask 15 and the exposure head 14, and the alignment correction operation needs to be performed again, which is inconvenient in the exposure operation and consumes a lot of man-hours. Therefore, how It is conceivable that a design of the carrier tray 124 that is easy to assemble and disassemble and can be replaced with different sizes is the subject of further improvement of the present invention. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a carrying device in which a carrier tray can be easily and quickly assembled on or detached from a susceptor, thereby being replaceable when the size of the workpiece to be exposed is changed. A carrier disk having a size corresponding to the workpiece to be exposed. Another object of the present invention is to provide an exposure machine having a carrying device that can be easily and quickly assembled on or detached from the base. Thereby, when the size of the workpiece to be exposed changes, The carrier tray having the size corresponding to the workpiece to be exposed can be replaced. SUMMARY OF THE INVENTION The object of the present invention and the prior art problem is achieved by the following technical means. The carrier device according to the present invention is adapted to carry a workpiece to be exposed. The carrier device comprises a base and a replaceable carrier disk. The base comprises a top surface, and a plurality of first positioning members disposed on the top surface; the replaceable carrier tray comprises: a bearing surface capable of carrying the workpiece to be exposed and corresponding in size, and a bottom surface capable of abutting the top surface, And a plurality of second positioning members disposed on the bottom surface and detachably engaged with the first positioning member, whereby when the size of the workpiece to be exposed is changed, the bearing surface having the size corresponding to the workpiece to be exposed can be replaced Replacement of the carrier tray. 201133703 The object of the present invention and the solution to the prior art are further achieved.疋 以 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 - - - - - - - - - - - - - - - - - - - - The first cymbal base further includes a first-iS $^~ recessed groove that is recessed by the top-down recessed groove. The device further includes a mounting-to-through hole for the carrier disk to be adsorbed to the pedestal. Top surface. The other first nozzle, the first aperture convulsion nozzle can pump the first through hole and the groove,

The base further includes a second through hole formed at one end of the top surface, and the receiving tray further includes a gas flow passage extending through the bottom surface of the bearing surface and communicating with the first through hole, and the loading device further comprises a The second nozzle nozzle installed at the other end of the second through hole can pump the first through hole and the gas flow path, so that the workpiece to be exposed is adsorbed on the bearing surface of the carrier. The carrier tray further includes a carrier formed on the carrier. a first groove on the surface, and a plurality of second grooves formed on the bearing surface and communicating with the first groove, the first groove is in a cross shape and the center is connected to the gas flow channel, the first The two grooves are arranged concentrically and have different diameters respectively. The base further includes an accommodating space below the top surface, and a plurality of first holes formed on the top surface and communicating with the accommodating space. The perforating tray further includes a plurality of first perforations extending through the bearing surface and the bottom surface and communicating with the first perforation, the crucible carrying device further comprising a pushing member extending through the receiving space, the top The pushing member includes a plurality of roots respectively disposed on the first and second perforations for abutting The ejector pin of the light workpiece, the pushing member is reciprocable between a first height position at which the ejector pins pass the bearing surface, and a thimble is located between the first degree of the same position below the bearing surface 201133703. The carrying device further comprises a setting a cylinder on the base and capable of driving the pushing member to reciprocate between the first height position and the second height position. The exposure machine with the carrying device disclosed in the present invention comprises a machine table, a carrier, an exposure a carrier is disposed on the machine platform for carrying a light cover; an exposure head is disposed on the machine table and located above the carrier; the carrier device is adapted to carry a workpiece to be exposed, and the carrier device comprises a base, a driving mechanism, and a replaceable carrier tray. The base is disposed under the carrier and includes a top surface, and a plurality of first positioning members disposed on the top surface; the driving mechanism is mounted on the bottom end of the base and can drive the base The seat is reciprocated up and down; the replaceable carrier includes a bearing surface capable of carrying the workpiece to be exposed and corresponding in size, a bottom surface abuttable to the top surface, and a plurality of bottom surfaces disposed on the bottom surface And a first positioning member detachably engaged with the first positioning member, whereby when the size of the workpiece to be exposed is changed, the replaceable carrier having the bearing surface corresponding to the size of the workpiece to be exposed can be replaced. The above-mentioned technical means, the advantage and the effect of the carrying device of the present invention is that the replaceable carrier plate design enables the operator to conveniently and quickly assemble or remove the carrier plate from the base. The replaceable carrier disk having the bearing surface corresponding to the size of the workpiece to be exposed can be replaced. [Embodiment] The foregoing and other technical contents, features and effects of the present invention are described below with reference to a preferred embodiment of the reference drawings. In the detailed description, it can be clearly presented in 201133703. Through the description of the specific embodiments, the technical means and effects of the present invention for achieving the intended purpose can be more deeply and specifically understood, however, the drawings are only for reference. The description is not intended to limit the invention. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.

As shown in FIG. 3, it is a preferred embodiment of the exposure machine with a carrying device of the present invention. The exposure machine 2 includes a machine table 21, a carrier 22 disposed on the machine table 21, and a device 21 disposed on the machine table 21. An exposure head 23 ′ above the carrier 22 and a carrier 400 disposed on the machine 21 and below the carrier 22 . The carrier 22 is used to carry a reticle 31, and the top end of the carrying device 4 is used to carry a workpiece 32 to be exposed. The carrying device 4 推移 can push the workpiece 32 to be exposed upward and flatten the bottom surface of the reticle 31. Thereby, the light generated by the exposure head 23 can be exposed through the reticle Η the exposed workpiece 32, so that the predetermined pattern on the reticle 31 can be transferred onto the workpiece 32 to be exposed, wherein the workpiece 32 to be exposed can be a substrate. Or a wafer, in this embodiment, a wafer is taken as an example for illustration. As shown in Figs. 3 and 4, the carrying unit 4 includes a carrier 5 on which the base is removably disposed on the base 4, and a drive mechanism 6. The mechanism 6 is mounted on the machine table. 'It includes a drive motor 61, and a movable frame 62 that drives the motor 61 to reciprocate up and down. The base 4 is wrapped; a first seat body 4 and a first seat body 41 disposed on the first seat body 41 and provided for the second (four) 42' base 4 of the carrier plate 5 are fixed to the movable body by a screw lock The top end of the frame 62 is such that the base 4 and the carrier tray $ can be reciprocated up and down by the driving of the 201133703 motion frame 62. As shown in FIG. 4, FIG. 5 and FIG. 6, the second seat body 42 has a cylindrical shape, and the bottom surface thereof is convexly provided with an arc-shaped engaging portion 42G. The arc-shaped engaging portion 420 of the second seat body 42 is rotatably accommodated. The arcuate recess 41 is formed at the top end of the first body 41. Thereby, the carrier 5 can be rotated relative to the first base 41 through the second base 42 to perform an angle fine adjustment. The second body 42 includes a top surface 421 and a recess 422 recessed downwardly from the top surface 421. The second base defines a recess 422. The slot wall 423 is convexly provided with a plurality of first and second members 424. The carrier disk 5 has a disk shape and includes a bearing surface 51 capable of carrying the workpiece 32 to be exposed and corresponding in size, a bottom surface 52 on the opposite side of the bearing surface 51 and abutting against the top surface 421, and a plurality of The second positioning member 53' of the bottom surface 52 has the same number of second positioning members 53 as the first positioning member 424 and the position corresponds to each of the second positioning members 53 being detachably engaged with the respective first positioning members 424. This allows the carrier 5 to be replaceably assembled on the base 2 of the base 4 . In this embodiment, each of the first positioning members 424 is a positioning post and each of the first positioning members 53 is a positioning hole through which the positioning rod can be inserted. Of course, in the design, as shown in FIG. 7 , each of the first positioning members may also be a positioning hole, and each of the second positioning members 53 may also be a positioning post that is disposed in the positioning hole. The second base 42 of the base 4 further includes a first through hole 425. The first end of the first through hole 425 is formed on the groove wall 423 and communicates with the groove 422, and the other end of the first through hole 425 is used. The first air nozzle 71 is connected to a pneumatic device (not shown), and the air pressure device is actuated to enable the first air nozzle 71 to be opposite to the first through hole 425 and Concave 201133703

The slot 422 is pumped. When the carrier 5 is positioned on the top surface 421 of the second body 42 , the first through hole 425 and the groove 422 are evacuated through the first air nozzle 71 , so that the carrier 5 is attracted to the second body by the downward suction. The top surface 421 of the second positioning member 53 and the first positioning member 424 can be stably positioned on the top surface 421 of the second base body 42 without being lifted up by mistake. Separation. Preferably, in the embodiment, the groove 422 has a first groove portion 426 which is curved, and a second groove portion 427 which is located around the first groove portion 426 and communicates with the cross portion. The first and second groove portions 426 and 427 of the groove 422 are designed, and the bottom surface 52 of the carrier plate 5 can be stably adsorbed near the periphery and the intermediate portion, so that the bottom surface 52 of the carrier plate 5 can be evenly and evenly abutted. The top surface 421 of the second base body 42 can avoid the phenomenon that the carrier disk 5 is skewed due to uneven suction. As shown in FIG. 4, FIG. 6 and FIG. 8, the carrier tray 5 further includes a gas flow passage 54 extending through the bearing surface 51 and the bottom surface 52. The second base 42 of the base 4 further includes a second through hole 428. One end of the second through hole 428 is formed on the top surface 421 and communicates with the gas flow passage 54 , and the other end of the second through hole 428 is used for mounting a second air nozzle 72 of the carrying device 400 , the second air nozzle 72 Also connected to the pneumatic device 'actuation through the pneumatic device, so that the second nozzle 抽 can pump the second through hole 428 and the gas flow passage 54. When the workpiece to be exposed is placed on the carrying surface 51 of the carrier 5, the second through hole 428 and the gas flow path 54 are evacuated through the second air nozzle 72, so that the workpiece 32 to be exposed is attracted to the carrier by the downward suction. The bearing surface 51 of 5, whereby the workpiece μ to be exposed can be positioned on the bearing surface 51 of the carrier disk 5. Preferably, the carrier tray 5 further includes a first groove 55 formed on the bearing surface 51, and a plurality of second grooves 56 formed on the bearing 201133703 T 51. The first groove 55 has a cross shape and a center. Corresponding to 1 "channel 54", wherein the second grooves % are arranged concentrically and have different diameters, respectively, and the second grooves % are respectively connected to the first groove, thereby The two nozzles 72 can pump the first and second grooves 55 and % through the second through holes 428 and the hole body passages 54, so that the workpiece 32 to be exposed can be stably adsorbed, and can be evenly and evenly abutted. On the bearing surface 51. As shown in the circle 4, FIG. 8 and FIG. 9 , the second base 42 of the base 4 further includes an accommodation space 429 below the top surface 421, and a plurality of forms formed on the top surface and connected to the accommodation space. The first through hole 43〇, and the carrier plate 5 further includes a plurality of second through holes π extending through the bearing surface 51 and the bottom surface 52. The number of the second through holes 57 is the same as the number of the first perforations, and the positions correspond to each other. The second through hole 57 is in communication with each of the first through holes. The carrying device 400 further includes a pushing member 8 and a cylinder 9' pushing the pushing member 8 which is disposed on the first seat body 51 and drives the pushing member 8 to extend through the side opening 431 to the valley space 429. The ejector member 8 includes a plurality of ejector pins 8 for abutting against the workpiece 32 to be exposed. Each of the ejector pins 81 is disposed through each of the first perforations and each of the perforations 57 and can push the workpiece 32 to be exposed by the cylinder. The drive of 9 enables the pusher 8 to pass through the second through hole 57 and the first twist position of the bearing surface 51 (shown in FIG. 9) and the second needle 81 is located below the load bearing surface 51. The height position (as shown in Figure 1) reciprocates. As shown in FIG. 6 and FIG. 8 , when the carrier 5 is to be assembled on the second base 42 of the base 4, the carrier 5 is placed on the top surface 421 of the second base 42 and the first The positioning member 424 is disposed in each of the second positioning members 53, so that 10 201133703 I: the disk is 5/bit through: the seat body 42 and does not draw air relative to the second seat body 42, the η-air nozzle 71 pairs of through-holes 425 and grooves ' can be adsorbed on the carrier 5 and the bottom surface 52 is evenly and smoothly abutted against the second assembly 42 and assembled. The top surface is similar, at this time 'that is, the carrier tray 5 is completed as shown in FIG. 4 and FIG. 10, and the exposure machine 2 is in the exposure operation. 'The pushing member 8 is in the position of the flute one by one. Position, the transfer device (not shown) will be the workpiece to be exposed 32

It is conveyed directly above the ejector pin 81, and then, the Γ 8 Γ = Γ exposure workpiece 32 is lowered, and when the workpiece 32 to be exposed is erected by the ejector pin 81, the exposure to be exposed 4 does not continue to move downward. Thereafter, the driving pusher 8 is moved downward in the direction of the arrow I by the first steaming position by the steam red 9 when the pushing member 8 is moved down to the first-degree position as shown in FIG. The workpiece 32 to be exposed is placed on the bearing surface 5i i due to the blocking of the bearing surface 51, and the second air nozzle 72 is aligned with the second through hole, the gas flow path, and the first and second grooves 55 by operating the air pressure device. , 56 pumping, so that the workpiece 32 to be exposed can be firmly adsorbed on the bearing surface 51"

As shown in FIG. 11 and FIG. 12, then, by actuating the drive motor 61 of the drive mechanism 6, the movable frame 62 of the drive motor 61 drives the base 4, the carrier plate 5, and the member to be exposed: the initial position (eg, (2) moving upward in the direction of the arrow π. When the workpiece 32 to be exposed on the bearing surface 51 is pressed against the bottom surface of the reticle 31, the arc-shaped engaging portion 42 of the second base 42 is rotatably accommodated. The arcuate groove 41 of the body 41 is designed such that the carrier plate 5 can be angularly adjusted through the second body 42 so that the workpiece 32 to be exposed can be flatly attached to the bottom surface of the reticle 31. Through the sensing element (not shown) of 11 201133703 - sensing that the pressure of the workpiece 32 to be exposed against the reticle η reaches a preset value, the sensing element drives the driving motor 61 to stop, so that the king to be exposed The piece 32* will continue to move upwards. At this time, the workpiece 32 to be exposed can be exposed by the exposure head 23 (Fig. 3) and the reticle 31. After the operation to be exposed is completed, the drive motor 61 drives the movable frame 62 to drive the base. The seat*, the carrier plate 5 and the guard to be exposed 32 are moved downward in the direction of the arrow 1 to The initial position shown in Fig. 2 separates the workpiece 32 to be exposed from the reticle 31. The second through hole 428, the gas flow path 54, and the first and second grooves 55, 56 are stopped by the second gas nozzle 72. The state in which the workpiece 32 to be exposed is adsorbed on the bearing surface 51 can be released. Thereafter, the pushing member 8 is driven by the cylinder 9 to move from the second height position shown in FIG. 10 to the arrow „ direction to the position shown in FIG. In the first height position, the ejector pin 81 of the pushing member 8 can lift the workpiece to be exposed from the bearing surface 51, so that the transfer mechanism can move the exposed workpiece to be exposed away from the ejector pin 8 so that the thimble 81 can continue to receive the __ As shown in Fig. 3, Fig. 4, Fig. 6 and Fig. 13, the carrying device is designed through the replaceable carrying tray 5, so that the operator wants to perform different sizes of the workpiece 32' to be exposed (Fig. 13). During the exposure, the first nozzle 425 and the groove 422 are stopped by the first nozzle 71, and then the carrier 5 is lifted up to separate the second positioning member 53 from the first positioning member 424. After that, the carrier tray 5 can be easily and quickly detached from the second base 42 of the base 4, and at this time, the replacement can be replaced. The replaceable carrier 5 corresponding to the workpiece 32 to be exposed, the size of the bearing surface 51. Since the carrier 400 is assembled to the machine table 21 by the base 4 and the drive mechanism 6, the photomask 31 and the exposure head 23 have been The alignment correction operation is completed. Therefore, after the carrier disk 12 201133703 5 is quickly assembled in the second body 42 of the susceptor 4 through the aforementioned assembly step, the exposure operation can be performed without alignment. The correcting action can effectively reduce the man-hour of operation. In summary, the exposure machine 2 of the present embodiment is designed by the replaceable carrier 5 so that the operator can easily and quickly assemble the carrier 5 to the base 4. The second seat body 42 is detached from the second seat body 42, whereby the replaceable carrier plate 5 having the bearing surface 51' corresponding to the size of the workpiece 32' to be exposed is replaced by the month b, and the book can be achieved. The purpose of the invention. 9 The above is only the preferred embodiment of the present invention, and when the infertility b is limited to the scope of the present invention, that is, the simple equivalent of the patent scope and the description of the invention according to the present invention. Variations and modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a general exposure machine; FIG. 2 is a schematic view similar to the drawing, illustrating that the telescopic device pushes up the workpiece to be exposed to flatten the reticle; FIG. 3 is a carrying device of the present invention. 4 is a perspective view of a preferred embodiment of the exposure machine with a carrying device of the present invention; FIG. 5 is an exploded view of the exposure machine of the present invention having a carrying device; FIG. 6 is a partial enlarged view of a preferred embodiment of an exposure machine having a carrying device according to the present invention, illustrating a carrier plate assembled to a second base of the base, and 13 201133703 The first positioning member is a positioning post, and the second positioning member is a positioning hole; 局部 a partial enlarged view of another embodiment of the exposure machine of the present invention having a carrying device, illustrating that the first positioning member is a positioning hole 'The second positioning member is a positioning post; FIG. 8 is a cross-sectional view of a preferred embodiment of the exposure machine with a carrying device of the present invention; FIG. 8 is a cross-sectional view of a preferred embodiment of the exposure machine having a carrying device FIG. 10 is a cross-sectional view of the exposure machine with the carrying device of the present invention, illustrating the pushing member at the second height position; FIG. 11 is a view of the present invention FIG. 12 is a schematic view of a preferred embodiment of an exposure machine having a carrying device, illustrating a susceptor, a carrier, and a position to be exposed; FIG. 12 is a schematic view of a preferred embodiment of the exposure machine having a carrying device of the present invention. The workpiece to be exposed is pressed against the bottom surface of the reticle; and a preferred embodiment of the exposure machine having a carrying device of the present invention, the operation is not intended to describe that the carrying device can replace the carrying plate having a bearing surface corresponding to the size of the workpiece to be exposed. 14 201133703

[Explanation of main component symbols] 2 ......... • Exposure machine 429... • Accommodation space 21........ • Machine table 430... • First perforation 22.... .... • Carrier 431... • Lateral opening 23........ • Exposure head 5, 5,... • Carrier tray 31........ • Photomask 51 ' 5Γ • Bearing surface 32 > 325 • workpiece to be exposed 52 ..... • bottom surface 400... • carrying device 53........ • first - positioning member A ........ • 肖ηϊτ c A........ Η Lane shape” "IL retreat 41........ • First seat 55........ • First ditch Slot 410... 56........ • Second groove 42........ • Second seat 57........ • Second perforation 420... • Arc Shape joint 6 ......... • Drive mechanism 421... • Top surface 61........ • Drive motor 422... • Groove 62........ • Moving frame 423... • Groove wall 71........ • First air nozzle 424... • First positioning member 72........ • Second air nozzle 425... • First Through hole 8 ......... • Pusher 426... • First groove portion 81........ • Thimble 427... • Second groove portion 9... ... Cylinder 428 ...... • second through-hole I, II ... • 15 arrow

Claims (1)

201133703 VII. Patent application scope: 1. A carrying device adapted to carry a workpiece to be exposed, the carrying device comprising: a base comprising a top surface, and a plurality of first positioning members disposed on the top surface; A replaceable carrier disk includes a bearing surface capable of carrying the workpiece to be exposed and corresponding in size, a bottom surface abuttable to the top surface, and a plurality of the bottom surface disposed on the bottom surface and detachably coupled to the first The second positioning member is engaged with the positioning member, whereby when the size of the workpiece to be exposed is changed, the replaceable carrier tray having the bearing surface corresponding to the size of the workpiece to be exposed can be replaced. The carrier device according to the above-mentioned claim, wherein each of the first positioning members is a positioning post or a positioning hole, wherein each of the second positioning members is one of a positioning post or a positioning hole. The carrier device according to the item π, wherein the base further includes a recess recessed downwardly from the top surface, and a first through hole communicating with the recess: The carrying device further includes - mounted to the first "air nozzle", the first air nozzle can pump the first through hole and the recess to make the carrier disk adsorbed to the top surface of the base. The carrier device of claim 1, wherein the base-shaped end is formed in the second through hole of the top surface, the carrier plate further π penetrates the bearing surface and the bottom surface and the second through The gas communicating device of the hole further comprises: a gas nozzle installed at the other end of the second through hole. The first gas nozzle of the second through hole can pump the second through hole and the gas flow channel 16 201133703 to make the waiting The exposed workpiece is adsorbed to the bearing surface of the carrier. 5) The receiving device according to claim 4, wherein the carrier further comprises a first groove formed on the bearing surface, and a plurality of the first groove formed on the bearing surface and the first a second trench in which the trenches are in communication, the first trench is in a cross shape and communicates with the gas flow channel at a center, and the second trenches are arranged concentrically and have different diameters respectively. 6. The carrier device of claim 3, wherein the base further comprises a second through hole formed at one end of the top surface, the carrier disk comprising: a through-bearing surface and the bottom surface The gas flow passage communicating with the second through hole includes a second nozzle mounted to the other end of the second through hole, the second nozzle being the second through hole and the gas flow passage The air is sucked so that the workpiece to be exposed is adsorbed to the bearing surface of the carrier. 7. The carrier device of claim 6, wherein the carrier tray further comprises a first groove formed on the bearing surface, and a plurality of the plurality of grooves formed on the bearing surface and the first groove The second groove communicating with the groove has a ten-shaped shape and communicates with the gas flow path at the center, and the second grooves are arranged concentrically and have different diameters respectively. 8. The carrier device of claim 6, wherein the base further comprises an accommodating space located below the top surface, and a plurality of locating spaces formed on the top surface and communicating with the accommodating space a plurality of perforations, the carrier tray further includes a plurality of second through holes extending through the bearing surface and the bottom surface and communicating with the first through hole, the carrying device further comprising a pushing member extending through the receiving space The pushing member includes a plurality of thimbles disposed on the first and second mx against the guard to be exposed, and the pushing member 17 201133703 is at a first height position of each of the thimbles passing through the bearing surface And each of the 9 thimbles reciprocates between a second height position below the bearing surface. The carrying device of claim 8 further comprising a cylinder disposed on the base and drivable to reciprocate between the first height position and the second height position. An exposure machine having a carrying device, comprising: a machine table; a carrier member disposed on the machine table for carrying a light cover; an exposure head disposed on the machine table and located above the carrier member; a carrying device is adapted to carry a workpiece to be exposed, the carrying device comprises: a base disposed under the carrying member and including a top surface, and a plurality of first positioning members disposed on the top surface; a driving mechanism Mounting on the bottom end of the base and driving the base to reciprocate up and down; and - the replaceable carrier tray includes a bearing surface capable of carrying the workpiece to be exposed and corresponding in size, and abutable to the top surface a bottom surface, and a plurality of second positioning members disposed on the bottom surface and detachably engaging the first positioning member, thereby replacing the workpiece corresponding to the workpiece to be exposed when the size of the workpiece to be exposed is changed The replaceable carrier tray of the sized bearing surface. 18