TW201132803A - Method for treating a foundation surface of copper material and a copper material having a treated foundation surface coating - Google Patents

Method for treating a foundation surface of copper material and a copper material having a treated foundation surface coating Download PDF

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Publication number
TW201132803A
TW201132803A TW99139297A TW99139297A TW201132803A TW 201132803 A TW201132803 A TW 201132803A TW 99139297 A TW99139297 A TW 99139297A TW 99139297 A TW99139297 A TW 99139297A TW 201132803 A TW201132803 A TW 201132803A
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Taiwan
Prior art keywords
copper
film
underlayer
underlying
treatment
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TW99139297A
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Chinese (zh)
Inventor
Masaya Miyazaki
Kazuhiko Mori
Hitoshi Ishii
Takaomi Nakayama
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Nihon Parkerizing
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Publication of TW201132803A publication Critical patent/TW201132803A/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/383Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by microetching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C23C22/06Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
    • C23C22/34Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing fluorides or complex fluorides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/385Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by conversion of the surface of the metal, e.g. by oxidation, whether or not followed by reaction or removal of the converted layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0796Oxidant in aqueous solution, e.g. permanganate

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Laminated Bodies (AREA)

Abstract

This invention provides a method for treating a foundation surface of a copper material with a film forming by self-precipitation, the method being capable of forming a resin film only on a copper member (e.g. a copper wiring), the resin film being adapted for providing a high adhesive strength to a resin material (e.g. a thermosetting resin material) to be bonded therewith. The method comprises an application process of contacting a copper material with an aqueous foundation surface treating agent constituted of an aqueous liquid having a pH of 3 or less, the aqueous liquid containing an organic resin (A), an anion surfactant agent (B), an acid (C) and an iron (IIL) ion as an oxidizing agent; a washing process of washing the foundation surface coating formed on the copper material by the above said application process, and a drying process of drying the foundation surface coating after the above washing process.

Description

201132803 六、發明說明: 【發明所屬之技術領域】 本發明是有關為了在銅材料之表面形成底層處理被 材料的底層處理方法、附有底層處理被膜之銅材料 及積層構材。 【先前技術】 在工業製品中,报多是存在有樹脂材料與金屬材料之 接合處所的情形,為了提高此等之接著力而一 之對策。 合榷 般 ,提高金屬材料與樹脂材料之接著性,自古以來 -直使用形肋(anehQ〇的方法。為了形賴,在 料或樹脂材料表面之任—方使其表面祕化,各別使用以 激烈的抨擊(blast)等的機械性加卫、姓刻、電鍍、化風 理等化學性加工方法。 千 然而,最近出現不形成錨而要求接著力的現象。 ,如近年’在印刷配線板方面,正潮向要求印刷配線 板的高密度化、信號的高速化,銅配線的薄型化,寬幅狹 將提高銅導體電路與絕緣樹脂層的接著當作目的,、 往一直,雖是對銅材料與絕緣樹脂材料使用化學的粗糙 處理,但在形成精緻圖案(fine pattern)方面受到限制 又’在Giga(十億)Hz以上之高頻率帶所使用之裝置因為表 皮效果變大,銅材料表面粗糙化時由於傳送損失會變大, 故殷切期望開發不要表面粗糙化而改善只以化學性親和眭 322497 4 201132803 與樹脂之縣的表面處理。 …而目則已知之作為表面粗糙化之無化學性表面處 理者在銅材料處理時,雖然已知有使用石夕炫偶合劑之塗 布^'處理’但目前仍處在得不到實用程度的接著強度。 又在國際公開專利W02009/066658所揭示之以彈 性體^主成分的塗布型處理,對於沒有表面粗縫化之熱硬 化樹脂可得、實用程度之接著強度。然而,在印刷配線板製 造時’將銅配線形成後之絕緣樹脂層積層接著時,在此塗 布型之處理’由於銅配線部與配線不存在部分是形成凸凹 狀態’不僅要進行均勻膜處理很困難,並且不僅在銅配線 上’也在絕緣樹脂表面會形成塗布被膜,從對絕緣信賴性 或電特性影響之觀點而言,在業界中有不喜愛之傾向。在 如此之If況下就要求僅在銅配線部分不將表面粗縫化之實 施接著底層處理方式的反應型處理。 作為對金屬反應型表面處理者,已知有藉由與含有鐵 系或^系金屬表面之有機樹脂的酸性被覆組成物接觸,可 以在前述金屬表面形成有機樹脂被膜的技術(以後,稱為 「樹脂自己析出處理」)’已在專利文獻1至4等中揭示。 以往習知之被覆組成物的特徵,係藉由在被覆組成物中浸 潰清淨之金屬表面’可以形成浸潰時間同時厚度或重量增 大之有機樹脂皮膜。進-步’此皮膜形成是因為藉由金屬 表面上之被覆組成物的化學作用(藉由蝕刻自金屬表面溶 出之金屬離子是在樹脂粒子上作用並在金屬表面上析出) 而達成,不使用電極沉積(elctr〇de p〇siti〇n)之如來自外忘 322497 5 201132803 部的電,可β在金屬表面上有效地形成樹脂皮膜者。 [先前技術文獻] (專利文獻) 專利文獻1:日本特公昭47-17630號公報 專利文獻2:日本特公昭52-21006號公報 專利文獻3:日本特公昭54-13435號公報 專利文獻4:日本特公昭61-168673號公報 【發明内容】 [發明欲解決之課題] 然而’如前述以往之自己析出皮膜用組成物,在適用 對象金屬為鐵系金屬之情形’雖然形成可以期待之被膜, 但在適用對象金屬為銅之情形,則有不形成被膜,或是只 形成與樹脂之接著性低之被膜的問題。即,儘管作為銅材 料之將有銅配線部的印刷配線基板用材料為首之各種材料 在業界中存在很多,但在目前仍有不能適用此自己析出被 膜技術之情形。 在此,本發明之目的是提供藉由上述之樹脂自己析出 處理,將可期待之對被接著樹脂材料(例如,熱硬化性樹脂 材料)有高接著力的樹脂被膜只能在銅構材(例如銅配線部) 上形成之手段。進一步,本發明是提供,不使用成為對環 境/亏染原因的6價鉻等物質,而使用環境負荷少的鋼材料 用底層處理劑,在環境面也有利之銅材料的底層處理方 法,藉由該底層處理方法而得到附有底層處理被膜之鋼材 料及積層構材為目的。 322497 6 201132803 [解決課題之手段^[Technical Field] The present invention relates to an underlayer treatment method for forming an underlayer treatment material on a surface of a copper material, a copper material with a primer film, and a laminate member. [Prior Art] In industrial products, there are many cases in which a joint between a resin material and a metal material exists, and countermeasures for improving the adhesion force are considered. In the same way, the adhesion between metal materials and resin materials has been improved. Since ancient times, straight ribs have been used (the method of anehQ〇. For the sake of the shape, the surface of the material or the resin material is used to make the surface secret, and each is used separately. Chemical processing methods such as mechanical reinforcement, surname engraving, electroplating, and chemical processing such as blasting. However, there has recently been a phenomenon in which no anchor is formed and an adhesive force is required. In the case of the board, the high density of the printed wiring board, the speed of the signal, the thinning of the copper wiring, and the wideness of the width increase the thickness of the copper conductor circuit and the insulating resin layer. Chemical rough treatment of copper materials and insulating resin materials, but limited in the formation of fine patterns and devices used in high frequency bands above Giga (billion) Hz, because the skin effect is large, copper When the surface of the material is roughened, the transmission loss will become large, so it is eager to develop the surface to be roughened and improve only with chemical affinity 眭322497 4 201132803 and the county of Resin Surface treatment. ... and the non-chemical surface treatment known as surface roughening is known to be used in the treatment of copper materials. Although it is known to use the coating of 'Xi Xing coupling agent', it is still not available. The adhesive strength of the practical degree is further improved by the coating type treatment of the main component of the elastomer disclosed in the international publication WO2009/066658, and the practical strength is obtained for the thermosetting resin having no rough surface. When the printed wiring board is manufactured, the insulating resin laminated layer after the formation of the copper wiring is followed, the processing of the coating type is formed in the convex-concave state due to the portion where the copper wiring portion and the wiring are not present, and it is difficult to perform uniform film processing, and Not only on the copper wiring, but also on the surface of the insulating resin, a coating film is formed. From the viewpoint of the influence on the reliability of the insulation or the electrical characteristics, there is a tendency in the industry that it is not preferred. In such a case, it is required only in copper. The wiring portion does not roughen the surface and is subjected to the reactive treatment of the underlying treatment method. As a metal reactive surface treatment, it is known that A technique in which an acidic coating composition containing an organic resin of an iron-based or metal-based metal surface is contacted, and an organic resin coating film can be formed on the surface of the metal (hereinafter referred to as "resin self-precipitation treatment")" has been disclosed in Patent Documents 1 to 4, etc. The conventionally disclosed coating composition is characterized in that an organic resin film having an impregnation time and an increased thickness or weight can be formed by impregnating the cleaned metal surface in the coating composition. The film formation is further advanced. This is because the chemical action of the coating composition on the metal surface (by etching the metal ions eluted from the metal surface acts on the resin particles and precipitates on the metal surface) without electrode deposition (elctr〇de p 〇siti〇n) is the electricity from the outside forgetting 322497 5 201132803, which can effectively form a resin film on the metal surface. [PRIOR ART DOCUMENT] Patent Document 1: Japanese Patent Publication No. Sho 47-17630 (Patent Document 2) Japanese Patent Publication No. Sho 52-21006 (Patent Document 3) Japanese Patent Publication No. Sho 54-13435 (Patent Document 4) [Problems to be Solved by the Invention] However, in the case where the coating material for the film is applied as an iron-based metal, the film is expected to be formed, but the film is expected to be formed. When the metal to be coated is copper, there is a problem that a film is not formed or a film having a low adhesion to a resin is formed. In other words, although various materials including a material for a printed wiring board having a copper wiring portion as a copper material are widely used in the industry, it is still impossible to apply this self-precipitating film technology. Here, an object of the present invention is to provide a resin film which can be expected to have a high adhesion to a resin material to be bonded (for example, a thermosetting resin material) by the above-described resin self-precipitation treatment, only in a copper member material ( For example, a means of forming on a copper wiring portion. Further, the present invention provides a method for treating a copper material which is advantageous in environmental aspects, without using a material such as hexavalent chromium which is a cause of environmental/loss, and a primer for treating a steel material having a small environmental load. The steel material and the laminated member with the underlying treated film are obtained by the underlayer processing method. 322497 6 201132803 [Means for solving the problem ^

本發明人等A 發現❹ί 經1討之結果, 之氧化劑的所設定=子界面活性劑、酸以及所定 €.1^ a 液性水性底層處理劑處理銅材料,所得 硬化性樹脂的崎料,具_刪料(例如熱 ⑽之發明。優異之接著性。遂而完成以下之⑴至 本發明(1)是— 包含下述步驟: 種銅材料之底層處理方法,其特徵為 應用步驟.將銅材料與含有有機樹脂⑴、陰離子界 面活㈣(β)、酸(C)以及作為氧化劑(D)之鐵(ΙΠ)離子且 、下之水性液所成的水性底層處理劑接觸之步驟; 欠洗ν驟·將經由前述應用步驟而开》成於銅材料上的底層 處理被膜進行水洗之步驟;與乾燥步驟:將經前述水洗步 驟後的底層處理被膜進行乾燥的步驟。 本發明(2)是前述發明(1)之底層處理方法,其中,有 機樹脂(Α)為彈性體。在此,「彈性體」是指有橡膠狀之彈 力性的工業材料之總稱。 本發明(3)是前述發明(1)或(2)之底層處理方法,其 中,陰離子界面活性劑(Β)是選自烷基笨磺酸鹽、烷基萘磺 酸鹽、烷基二苯基醚二磺酸鹽、烷磺酸鹽中丨種以上,合 計之含量為500至3000 ppm。在此,界面活性劑之「烷基」 部分或「烷」部分之碳數範圍以1至15為合適。 本發明(4)是前述發明(1)至(3)中任一項之底層處理s 7 322497 201132803 方法’其復含有在25°c ’與離子強度〇. 5M之鐵⑴D離子 之第一錯體安定度係數為5以上的陰離子供給源 (E)。 本發明(5)是前述發明⑴至⑷項中任一項之底層處 理方法中’水性底層處理劑復含有1至1_ ppm之銅 離子(F)。 本發明(6)是前迷發明⑴至⑸項中任一項之底層處 理方法’其中’銅材料為印刷配線基板之材料。 本發明(7)疋一種附著底層處理被膜之銅材料,係經 由刖述發明(1)至(6)項中任_項之底層處理方法而得者。 本發明(8)疋别述發明(7)之附著底層處理被膜之銅 材料,其中,底層處理被膜中銅元素之比率為1至 原子%,底層處理被膜中鐵元素含量為〇. 〇〇3g/m2以下。 本發明(9)是前述發明(7)或(8)之附著底層處理被膜 之銅材料,其中,相對於底層處理前之銅材料表面粗糙度 (Ra〇)的底層處理後之銅材料表面粗糖度(Rai)的變化 △Ra為在〇. 5/ζιη以下。 本發明(10)是一種積層構材,含有發明(7)至(9)項中 任一項之附著底層處理被膜之銅材料,與設置在底層處理 被膜上之樹脂層。 本發明(11)是一種印刷配線基板,其具有1至1〇〇層 的下述結構,其中,所述結構係在銅配線電路之絕緣樹脂 層中,只在銅電路表面形成前述發明(7)至(9)項中任一項 之底層處理被膜,在上述底層處理被膜表面及未形成銅配 8 322497 201132803 線電路之上述絕緣樹脂層表面’形成絕緣樹脂層的結構。 本發明(12)是一種銅材料用水性底層處理劑,其特徵 係:含有有機樹脂(A)、陰離子界面活性劑(B)、酸(c)以及 作為氧化劑(D)之鐵(III)離子,且PH在3以下的水性液。 本發明(13)是發明(12)之銅材料用水性底層處理劑, 其中,有機樹脂(A)是彈性體。 本發明(14)是發明(12)或(13)之銅材料用水性底層 處理劑’其中’陰離子系界面活性劑⑻是選自烧基笨^酸 鹽、烷基萘磺酸鹽、烷基二苯基醚二磺酸鹽、烷磺酸鹽中 1種以上’合計之含量為500至3000 ppm。 现 本發明(15)是發明(12)至(14)項中任一項之銅材料 用水性底層處理劑,其復含有在25Ϊ,與離子強度〇 5m 之鐵(III)離子之第一錯體安定度係數沒卜^“⑴為5以上 的陰離子供給源(E)。 本發明(16)是發明(12)至(15)項中任一項之鋼材料 用水性底層處理劑’其復含有1至1〇〇〇 ppm之鋼離子 本發明(17)是發明(12)至(16)項中任一項之飼材料 用水性底層處理劑,其係在印刷配線基板之材料中使用 [發明效果] ° 0進 而發 依照本發明(1)及(12),適用對象金屬為銅之情形 可以形成對被接著樹脂材料(例如熱硬化性樹脂材料)有t 接著力的自己析出被膜,同時,因為不使用成為詞 染原因的6價鉻等物質,故發揮對環境負荷少的致果巧 一步,加上可以形成實質上不含鐵之自己析出被膜, 201132803 揮抑制銅材料之表面粗Μ度變化之效果。 依照本㈣⑵及⑽,在雜_ :力=發揮形成對於環氧系熱硬化性樹脂有二 者力之自己析出被膜的效果。 依照本發明⑶及(⑷,可以發揮使所形成 出被膜降低膜厚化之效果。 依照本發明(4)及(15),可以發揮不會對鋼(π)離 與有機樹脂等之卿成反應有影響,並且,因為可防 化劑之鐵離子的正電荷化而可以提高液安定性之效果。 依照本發明(5)及(16),關於本發明之自己析出被膜 用組成物,即使含有銅離子也不會影響所形成之自己析出 被膜的性能,因此,在使用之際,自適用對象金屬之銅在 對自己析出被膜用組成物溶出銅離子也沒有殘存之問題, 故可以發揮即使沒有頻繁地交換,也可以多次使用同一自 己析出被膜用組成物的效果。 依照本發明(6)及(17),在印刷配線基板的材料適用 之情形,可以發揮在印刷配線基板的材料中,只有在銅材 料部分選擇性的形成自己析出被膜的效果。 依照本發明(7),可以發揮對被接著樹脂材料(例如, 熱硬化性樹脂材料)提供有高接著力的自己析出被膜的銅 材料的效果。 依照本發明(8) ’因為自己析出被膜實質上不含鐵, 故可以發揮提供有更高接著力的銅材料的效果。 依照本發明(9 ),因為銅材料的表面粗糖度變化少, 322497 10 201132803 故適用於印刷配線板之銅電路上時,可以發揮與銅材料表 面被粗糙化之情形相比傳送損失少的效果。 依照本發明(10),在銅材料與底層處琿被膜之間並且 底層處理被膜與樹脂層之間,可以發揮提供有更強固接著 之積層構材的效果。 依照本發明,銅材料與底層處理被膜之間以及底 層處理被膜與樹脂層之間為更強固地接著,可以提供發揮 有在銅部分形成底層處理被犋之電路的印刷配線基板的 效果。 【實施方式】 [實施發明之最佳形態] 以下,詳細說明本發明之相關的使用銅材料用水性底 層處理劑的銅材料用之底層處理方法,藉由此底層處理方 法所得之附有底層處理被膜之鋼材料,及積層構材。 (銅材料用水性底層處理劑) 本發明之崎料用水性底層處理劑,係^含有 脂(Α)與陰料界㈣性_)驗(_及作魏 樹 之鐵(III)離子,且ρΗ為3以下之水性液所I在此 處理劑’例如,在含㈣麟脂⑴與_子 的水性液中’必需添加酸⑹以及氧化劑⑻而得 &lt;表面處理對象&gt; 夜。 藉由本發明之底層處理液之表面處理對象,係 料。銅材髮沒有_限定,作為其㈣例者, 銅、銅合金。又’本發明使用之鋼材料之形狀、結構二也 322497 11 201132803 無特別限定’例如可以是板狀、箔狀、棒狀、粒狀等之形 狀。進一步’本發明使用之銅材料,也可以在別的金屬材 料、陶竟材料、有機材料之基材上,例如,藉由鍍覆、蒸 鐘等之手段被覆者。銅合金是以含有銅5〇質量%以上者為 佳’例如’列舉頁鋼等。銅合金中,作為銅以外之合金成 分者’可列舉如’ Zn、P、Al、Fe、Ni等。 &lt;必需添加成分1 :有機樹脂(A)&gt; 首先’說明本發明相關之水性底層處理劑的第一必需 添加成分之有機樹脂(A)。在此,本發明之水性底層處理劑 中,有機樹脂(A)係藉由處理銅材料而得之成為底層處理被 膜的主成分。 在此,有機樹脂(A)可以是(1)使用後述之陰性界面活 性劑(B)而被強制乳化者,也可以是(2)附加磺基、羧基、 膦基、酚性羥基、羥基、烷氧乙烷等親水基之自己乳化者, 也可以是(3)併用(1)與(2)者。如此,在(1)之情形,有機 樹脂(A)與陰性界面活性劑(B)係成為個別之化合物而存 在,在(2)之情形,有機樹脂(A)與陰性界面活性劑(B)係成 為同一化合物而存在。 有機樹脂(A)可為任何一種,可能使用例如,以往習 知之水分散性或水溶性之有機樹脂。具體而言,可列舉將 彈性體、丙烯酸樹脂、環氧樹脂、聚胺酯(urethane)樹脂、 聚酯樹脂、聚醯胺樹脂、氣乙烯樹脂、偏氣乙稀樹脂、含 氟樹脂、矽樹脂、聚烯烴樹脂、酚樹脂、尿素樹脂、三聚 氰胺樹脂、聚醯亞胺樹脂、聚胺樹脂、尼龍樹脂、聚苯硫 322497 12 201132803 醚樹脂等溶解或分散到溶劑中之狀態者。 其中’以彈性體為佳。上述彈i體並沒有特別限制, 可以使用以水溶解或分散以往習知&lt;彈性體。上述彈 具體上可列舉將:天然橡膠、異戊二稀橡膠、丁二烯橡膠、 苯乙烯丁二烯橡膠、氯丁二烯橡膠、丙稀腈_丁二婦橡膠、 丙烯腈-丁二烯-苯乙烯橡膠、甲基内烯酸甲醋丁二烯橡膠 等二烯系橡膠,丁基橡膠、乙烯Μ橡膠、聚胺醋橡膠、 矽氧橡膠(silicone rubber,矽_橡膠)、氯磺化橡膠、氣 化聚乙烯、丙烯酸橡膠、表氯醇橡膠(epichl〇r〇hydrin rubber)、含氟橡膠、等溶解或分散到水中狀態者,此等可 以使用單獨1種,亦可併用2種以上。又,此等之彈性體, 也可以用胺基、羥基、羥曱基等之羥烷基、羧基、磺酸基、 膦基(phosphine group)、環氧基、異氰酸酯基、碳化二亞 胺基、專官能基改質者。上述彈性體之中,以使用彈性體 之玻璃移轉溫度(Tg)[用示差掃描熱量計(例如6200 : 精工儀器公司製)測定之玻璃移轉溫度;|以在_1〇〇至35(rc 為佳,在-65至ll(Tc更佳。又,上述彈性體中,彈性體之 比重以在0.8至2.0為佳。此等彈性體中,因為有丁二烯 橡膠、丙烯腈-丁二烯_苯乙烯橡膠、丙烯腈―丁二烯橡膠、 苯乙烯—丁二烯橡膠、曱基丙烯酸曱酯丁二烯橡膠、丙烯酸 橡膠’與成為接著對象的熱硬化性樹脂的親和性高之理由 而為較佳者。 &lt;必需添加成分2 :陰離子系界面活性劑(B)&gt; 其次’說明本發明相關的水性低層處理劑的第二必需s 13 322497 201132803 添加成分的陰離子系界面活性劑(B)。陰離子系界面活性劑 (B )並無特別限定,可以使用以往習知之陰離子系界面活性 、- 劑。本發明的水性低層處理劑中,陰離子系界面活性劑(B) ·- 係藉由含於底層處理劑中,於低層處理劑中吸著於水分散 性或水溶性之有機樹脂(A ),而使水分散性或水溶性之有機 樹脂(A)產生用以使銅離子與靜電凝集之負電荷,所以是必 要之成分。 作為陰離子系界面活性劑者,具體而言,可列舉如: 院基苯磺酸鹽、烷基萘磺酸鹽、烷基二苯醚二確酸鹽、院 磺酸鹽、烷基硫酸酯鹽、聚環氧乙烷烷基醚硫酸酯鹽、叛 酸鹽系界面活性劑、璘酸鹽系界面活性劑、萘續酸甲越縮 合物、聚羧酸型界面活性劑等。 雖然目前,上述陰離子系界面活性劑(β)中的選自烧 基笨績酸鹽、烧基萘確酸鹽、烧基二笨_二確酸鹽、院續 酸鹽之1種以上者的作用機制尚未明確,但,藉由含在水 性底層處理劑中而能在銅材料表面析出底層處理被膜之膜 厚,有變薄的效果。尤其考慮將本發明之水性底層處理劑 應用在作為提高印刷配線基板之銅電路、層間絕緣樹脂材 料間之接著性處理時,考慮對底層處理被膜之印刷配線基 板的電特性之影響時,有儘量作成薄膜較好之情形,藉由 添加上述陰離子系界面活性劑,可以安定地形成被認為是 衫響少的以下之膜厚的底層處理被膜。 在此作為有機樹脂(A)者雖是以彈性體為適合,但作 為含有彈性體與陰離子系界面活性劑之水性液的市售品 14 322497 201132803 '_ 者,關於丁二烯橡膠,可列舉如:DIC(股)公司製的The inventors of the present invention found that the oxidizing agent was set as the result of the oxidizing agent = the sub-interface active agent, the acid, and the predetermined liquid aqueous treatment agent for treating the copper material, and the obtained curable resin was coated. With the invention of the invention (for example, the invention of the heat (10). Excellent adhesion. The following (1) to the present invention (1) are as follows - the following steps are included: a method for treating the underlying copper material, which is characterized by an application step. a step of contacting a copper material with an aqueous underlayer treatment agent comprising an organic resin (1), an anionic interface (4) (β), an acid (C), and an iron (ΙΠ) ion as an oxidizing agent (D); Washing step: a step of performing water washing on the underlying treatment film formed on the copper material through the aforementioned application step; and a drying step: a step of drying the underlayer treatment film after the water washing step. (2) The method of treating the underlayer of the invention (1), wherein the organic resin is an elastomer. Here, the "elastomer" is a general term for a rubbery elastic industrial material. The invention (3) is the aforementioned The underlayer treatment method of (1) or (2), wherein the anionic surfactant (Β) is selected from the group consisting of an alkyl sulfonate, an alkylnaphthalene sulfonate, an alkyl diphenyl ether disulfonate, The alkane sulfonate has a total content of 500 to 3000 ppm, and the carbon number of the "alkyl" portion or the "alkane" portion of the surfactant is preferably 1 to 15. The present invention (4) Is the underlying treatment of any one of the aforementioned inventions (1) to (3) s 7 322497 201132803 The method of 'comprising the first wrong body stability coefficient of the iron (1) D ion at 25 ° C ' and the ionic strength 〇 5 M The anion supply source (E) of 5 or more. In the underlayer treatment method according to any one of the above aspects (1) to (4), the aqueous base treatment agent further contains 1 to 1 ppm of copper ions (F). The invention (6) is the underlayer treatment method of any one of the inventions (1) to (5), wherein the copper material is a material of a printed wiring substrate. The invention (7) is a copper material to which an underlying treatment film is attached, via The invention is directed to the underlying processing method of any of the items (1) to (6). The present invention (8) In the copper material to which the undercoat film is applied, the ratio of the copper element in the underlayer treatment film is 1 to atom%, and the iron element content in the undercoat film is 〇3 g/m2 or less. 9) The copper material of the above-mentioned invention (7) or (8), which adheres to the underlying film, wherein the surface roughness (Ra〇) of the copper material before the underlayer treatment is the surface roughness of the copper material (Rai) The change ΔRa is 〇. 5/ζιη. The present invention (10) is a laminated member comprising the copper material of the underlying treated film of any one of the inventions (7) to (9), and the setting The resin layer on the film is treated in the underlayer. The invention (11) is a printed wiring substrate having a structure of 1 to 1 〇〇 layer, wherein the structure is in the insulating resin layer of the copper wiring circuit, Forming an underlayer treatment film according to any one of the above aspects (7) to (9) on the surface of the copper circuit, forming an insulating resin on the surface of the above-mentioned underlying treatment film and the surface of the above-mentioned insulating resin layer which is not formed with a copper circuit 8 322497 201132803 line circuit Layer knot . The invention (12) is an aqueous base treatment agent for copper materials, which comprises an organic resin (A), an anionic surfactant (B), an acid (c), and an iron (III) ion as an oxidant (D). And an aqueous liquid having a pH of 3 or less. The invention (13) is the aqueous base treatment agent for copper materials of the invention (12), wherein the organic resin (A) is an elastomer. The invention (14) is the aqueous base treatment agent for copper materials of the invention (12) or (13), wherein the anionic surfactant (8) is selected from the group consisting of a pyridyl acid salt, an alkylnaphthalene sulfonate, an alkyl group. One or more of the diphenyl ether disulfonate and the alkanesulfonate are combined in an amount of from 500 to 3,000 ppm. The present invention (15) is the aqueous underlayer treatment for a copper material according to any one of the items (12) to (14), which comprises a first error of 25 Å and an iron (III) ion having an ionic strength of 5 m. (1) The anion supply source (E) of the steel material according to any one of the inventions (12) to (15) The present invention (17) is the aqueous base treatment agent for a feed material according to any one of the items (12) to (16), which is used in a material of a printed wiring substrate. According to the inventions (1) and (12), when the metal to be coated is copper, it is possible to form a self-precipitating film having a t-resistance to the resin material to be bonded (for example, a thermosetting resin material). Because it does not use a substance such as hexavalent chromium which is a cause of word dyeing, it is a step-by-step process that causes less environmental load, and it can form a self-precipitating film that is substantially free of iron. 201132803 The surface of the copper material is suppressed to be rough. The effect of degree change. In accordance with (4) (2) and (10), in the _: The effect of forming a coating film on the epoxy-based thermosetting resin is exhibited by the force of the film. According to the inventions (3) and ((4), the effect of reducing the film thickness of the formed film can be exhibited. According to the present invention (4) And (15), it is possible to exert an effect that the steel (π) is not affected by the reaction with the organic resin, and the effect of the liquid stability can be improved by the positive charge of the iron ion of the chemical inhibitor. According to the inventions (5) and (16), the composition for the self-precipitating film of the present invention does not affect the performance of the formed self-precipitating film even if it contains copper ions. Therefore, when it is used, the self-applying metal is used. The copper does not have any problem of eluting the copper ions by depositing the composition for the coating film on the film, so that it is possible to use the same self-precipitating composition for the film even if it is not frequently exchanged. According to the invention (6) and (17) In the case where the material of the printed wiring board is applied, it is possible to selectively form a self-precipitating film in the material of the printed wiring substrate. According to the invention (7), it is possible to exert a copper material which is provided with a self-precipitating film having a high adhesion force by a resin material (for example, a thermosetting resin material). According to the invention (8) 'Because of self-precipitation Since the film is substantially free of iron, it can exhibit the effect of providing a copper material having a higher adhesion. According to the invention (9), since the surface roughness of the copper material changes little, 322497 10 201132803 is suitable for the copper of the printed wiring board. In the case of a circuit, it is possible to exert an effect of less transmission loss than the case where the surface of the copper material is roughened. According to the invention (10), between the copper material and the underlying layer between the coating film and between the underlying film and the resin layer, It can exert the effect of providing a laminate with a stronger reinforcement. According to the present invention, the copper material and the underlying treatment film and the underlayer treatment film and the resin layer are more strongly adhered to each other, and an effect of providing a printed wiring board having a circuit for forming a primer layer on the copper portion can be provided. [Embodiment] [Best Mode for Carrying Out the Invention] Hereinafter, an underlayer treatment method for a copper material using an aqueous underlayer treatment agent for a copper material according to the present invention will be described in detail, and an underlayer treatment is obtained by the underlayer treatment method. The steel material of the film and the laminated material. (Aqueous base treatment agent for copper material) The aqueous base treatment agent for the raw material of the present invention contains a fat (Α) and a negative material (4) _) (for the iron (III) ion of Weishu, and ρΗ is In the aqueous solution containing 3 or less, the treating agent 'for example, in the aqueous liquid containing (iv) linoleum (1) and _ sub-, it is necessary to add acid (6) and oxidizing agent (8) to obtain &lt;surface treatment target&gt; The surface treatment object of the underlying treatment liquid is a material. The copper material is not limited, as the case of (4), copper and copper alloy. The shape and structure of the steel material used in the present invention are also 322497 11 201132803 without special limitation. For example, it may be in the shape of a plate, a foil, a rod, a pellet, etc. Further, the copper material used in the present invention may be on a substrate of another metal material, ceramic material or organic material, for example, by In the case of a copper alloy, it is preferable that the copper alloy is 5% by mass or more of copper. For example, a sheet steel is used. For example, in a copper alloy, an alloy component other than copper is exemplified as 'Zn. , P, Al, Fe, Ni, etc. &lt; Addition of component 1: organic resin (A)&gt; First, the organic resin (A) which is the first essential additive component of the aqueous base treatment agent according to the present invention will be described. Here, among the aqueous primer treatment agents of the present invention, an organic resin ( A) is a main component of the underlying treatment film by treating the copper material. Here, the organic resin (A) may be (1) forcedly emulsified using a negative surfactant (B) described later, or may be used. (2) A self-emulsifier of a hydrophilic group such as a sulfo group, a carboxyl group, a phosphino group, a phenolic hydroxyl group, a hydroxyl group or an alkoxyethane, or (3) may be used in combination with (1) and (2). In the case of (1), the organic resin (A) and the negative surfactant (B) are present as individual compounds, and in the case of (2), the organic resin (A) and the negative surfactant (B) are the same. The organic resin (A) may be any one, and it is possible to use, for example, a conventional water-dispersible or water-soluble organic resin. Specific examples thereof include an elastomer, an acrylic resin, an epoxy resin, and a polyurethane ( Urethane) resin, polyester Resin, polyamide resin, gas vinyl resin, ethylene oxide resin, fluorine resin, enamel resin, polyolefin resin, phenol resin, urea resin, melamine resin, polyimine resin, polyamine resin, nylon resin, Polyphenylene sulfide 322497 12 201132803 A state in which an ether resin or the like is dissolved or dispersed in a solvent. Among them, 'elastomer is preferred. The above-mentioned bomb is not particularly limited, and it is possible to use water to dissolve or disperse conventionally. Specifically, the above-mentioned bullets may be: natural rubber, isoprene rubber, butadiene rubber, styrene butadiene rubber, chloroprene rubber, acrylonitrile, butadiene rubber, acrylonitrile-butyl Diene rubber such as olefin-styrene rubber, methyl methacrylate, butadiene rubber, butyl rubber, vinyl ruthenium rubber, polyurethane rubber, silicone rubber, chlorosulfonate Chemical rubber, vaporized polyethylene, acrylic rubber, epichl〇r〇hydrin rubber, fluorine-containing rubber, etc., which are dissolved or dispersed in water. These may be used alone or in combination. the aboveFurther, as the elastomer, an hydroxyalkyl group such as an amine group, a hydroxyl group or a hydroxymethyl group, a carboxyl group, a sulfonic acid group, a phosphine group, an epoxy group, an isocyanate group or a carbodiimide group may be used. Specialized functional reformers. Among the above elastomers, the glass transition temperature (Tg) of the elastomer is used [the glass transition temperature measured by a differential scanning calorimeter (for example, 6200: manufactured by Seiko Instruments Inc.); | at _1 〇〇 to 35 ( Rc is preferably from -65 to ll (Tc is better. Further, in the above elastomer, the specific gravity of the elastomer is preferably from 0.8 to 2.0. Among these elastomers, because of butadiene rubber, acrylonitrile-butyl The diene-styrene rubber, the acrylonitrile-butadiene rubber, the styrene-butadiene rubber, the decyl acrylate-based butadiene rubber, and the acrylic rubber have high affinity with the thermosetting resin to be the target. The reason is preferable. <Required addition component 2: anionic surfactant (B)> Next, the second essential s of the aqueous low-layer treatment agent according to the present invention will be described. 13 322497 201132803 Anionic interfacial activity of the added component (A) The anionic surfactant (B) is not particularly limited, and a conventional anionic interfacial activity agent can be used. Among the aqueous low-layer treatment agents of the present invention, an anionic surfactant (B) ·- By being contained in the bottom layer In the physicochemical agent, the water-dispersible or water-soluble organic resin (A) is adsorbed in the lower layer treating agent, and the water-dispersible or water-soluble organic resin (A) is generated to cause the copper ions and the static electricity to be agglomerated. The charge is a necessary component. As the anionic surfactant, specific examples include: a hospital-based besylate, an alkylnaphthalenesulfonate, an alkyldiphenyloxide di-acid salt, and a sulfonate. Acid salt, alkyl sulfate salt, polyethylene oxide alkyl ether sulfate salt, tartrate surfactant, citrate surfactant, naphthoate condensate, polycarboxylic acid type interface An active agent, etc. Although currently, the above anionic surfactant (β) is selected from the group consisting of a pyridyl acid salt, a pyromy a naphthyl acid salt, a pyridyl group, a dibasic acid salt, and a pharmaceutically acceptable acid salt. The mechanism of action of the above is not clear, but the film thickness of the underlying treatment film can be precipitated on the surface of the copper material by being contained in the aqueous underlayer treatment agent, and the effect of thinning is obtained. In particular, the aqueous underlayer treatment agent of the present invention is considered. Applied in copper circuits and layers as a printed wiring board In the case of the adhesion between the resin materials, in consideration of the influence on the electrical characteristics of the printed wiring board of the underlying film, it is preferable to form the film as much as possible, and by adding the above anionic surfactant, it can be stably formed. In the case of an organic resin (A), an elastomer is suitable as an organic liquid (A), but it is a commercially available product containing an aqueous solution of an elastomer and an anionic surfactant. 322497 201132803 '_, about butadiene rubber, for example, DIC (share) company

Pateracole E-301、關於丙浠腈丁二烯苯乙稀橡膠,可例 示如:Emerald Performance Materials 公司製的 Nycheml570X75、Nychem 1562X160、Nycheml577、1578X1, 關於丙嫦腈丁二稀橡膠,可例示如:Emerald Performance Materials 公司製的 Nycheml561X87、Nycheml561、 Nycheml571 、 Nychem 1581 、 Nycheml552 、 Nycheml562 、 Nychem 1562X103、Nycheml562X 117、Nycheml572X64、 Nychem 1572、Nycheml570X79、Nychem N4000、DIC(股) 公司製 Lacstar DN-703、Lacstar-1570 B、 Lacstar-6541G、日本 A&amp;L (股)公司製的 NA-11、NA-13、 NA-20、日本 Zeon (股)公司製的 Nipol 156 卜 Nipol 1562、 Nipol 1571H、Nipoll571C、Nipoll571CL、Nipoll577、 NipolLX5U 、 NipolLX513 、 NipolLX517A 、 NipolLX53卜 NipolLX531B、NipolLX550、Nipol550L、Nipol55卜 Nipol552、NipolSX1503、關於苯乙烯丁二烯橡膠,可例示 如:Emerald Performance Materials 公司製的 Nychem 2570X59、Nychem 1800X73、DIC(股)公司製的 Lacstar-7300A、Lacstar-DS-602、Lacstar-7310-K、 Lacstar-2800A、Lacstar-3009A、Lacstar-DS-410、 Lacstar-CB-2 、 Lacstar-DS-407H 、 Lacstar-3307BE 、 Lacstar-DS-205、Lacstar-7440N、JSR(股)公司製的 SB0695、SB0696、SB0561、SB0589、SB0602、SB2108、SB0533、 SB0545、SB0548、SB0568、SB0569、SB0573、SB0597C、日 15 322497 201132803 本 A&amp;L(股)公司製的 SR-100、SR-102、SR-103、SR-104、 SR-107、SR-110、SR-112、SR-113、SR-115、SR-116、SR-117、 SR-118、SR-130、SR-140、SR-142、SR-143、日本 Zeon(股) 公司製的 Nipol LX407AS 系列、Nipol LX407F 系列、Nipol LX407G 系列、Nipol LX407H 系列、Nipol LX407K 系列、 Nipol LX407S 系列、Nipol LX407BP 系列、Nipol V1004、 Nipol MH5055 、 NipolC4850A 、 NipolLXllO 、 NipolLX112 、 Nipol LX119 、 Nipol LX206 、 Nipol2507H 、 NipolLX303A 、 Nipol2518FS、Nipol2518GL、NipolLX603、Nip〇lLX415A、 NipolLX416 、 NipolLX426 、 NipolLX430 、 NipolLX432A 、 NipolLX433C、NipolLX435、NipolLX438C、NipolLX473B、 NipolLX476 、 Nipol2570X5 、 NipolSX1105 、 Lubrizol 公 司製的 StycarTMSB-1168、StycarTMSB-1177、 StycarTMSB-0738、StycarTMSB-1170、StycarTMSB-0706、 StycarTMSB-1459、StycarTM1780、StycarTM1795、關於甲基 丙烯酸甲酯丁二烯橡膠,可例示如:DIC(股)公司製的 Lacstar-DM-886 、 Lacstar-DM-801 、 Lacstar-DM-808 、日 本 ML(股)公司製的 MR-170、MR-17卜 MR-172、MR-173、 MR-174、日本 Zeon(股)公司製的 Nipol LX811B、Nipol LX814、Nipol LX816、Nipol LX820A、Nipol LX82卜 Nipol LX844B、Nipol LX851C、Nipol LX851E、Nipol LX851F、 Nipol LX852 、 Nipol LX 854E 、 Nipol LX855EX卜 Nipol LX85H2、Nipol LX874、Nipol SX1706、Lubrizol 公司製 的 Hycar26843 、 HycarT-122 、 HycarT-9202 、 16 322497 201132803 ' Hycar26-1042、Hycar26477、Hycar 26717、Hycar26479、 • ΛPateracole E-301, acrylonitrile butadiene styrene rubber, for example, Nycheml 570X75, Nychem 1562X160, Nycheml 577, 1578X1 manufactured by Emerald Performance Materials, and acrylonitrile butyl rubber, exemplified by Emerald Nycheml 561X87, Nycheml 561, Nycheml 571, Nychem 1581, Nycheml 552, Nycheml 562, Nychem 1562X103, Nycheml 562X 117, Nycheml 572X64, Nychem 1572, Nycheml 570X79, Nychem N4000, DAC Co., Ltd., Lacstar DN-703, Lacstar-1570 B, manufactured by Performance Materials. Lacstar-6541G, NA-11, NA-13, NA-20 made by Japan A&amp;L Co., Ltd., Nipol 156, Nipol 1571H, Nipoll571C, Nipoll571CL, Nipoll577, NipolLX5U, manufactured by Zeon Co., Ltd., Japan , NipolLX513, NipolLX517A, NipolLX53, NipolLX531B, NipolLX550, Nipol550L, Nipol55, Nipol552, NipolSX1503, and styrene butadiene rubber, for example, Nychem 2570X59, Nychem 1800X73, and DIC (manufactured by Emerald Performance Materials) Lacstar-7300A Lacstar-DS-602, Lacstar-7310-K, Lacstar-2800A, Lacstar-3009A, Lacstar-DS-410, Lacstar-CB-2, Lacstar-DS-407H, Lacstar-3307BE, Lacstar-DS-205, Lacstar- 7440N, SB0695, SB0696, SB0561, SB0589, SB0602, SB2108, SB0533, SB0545, SB0548, SB0568, SB0569, SB0573, SB0597C, day 15 322497 201132803 made by JSR Co., Ltd. -100, SR-102, SR-103, SR-104, SR-107, SR-110, SR-112, SR-113, SR-115, SR-116, SR-117, SR-118, SR-130 , SR-140, SR-142, SR-143, Nipol LX407AS series manufactured by Zeon Co., Ltd., Nipol LX407F series, Nipol LX407G series, Nipol LX407H series, Nipol LX407K series, Nipol LX407S series, Nipol LX407BP series, Nipol V1004, Nipol MH5055, NipolC4850A, NipolLXllO, NipolLX112, Nipol LX119, Nipol LX206, Nipol2507H, NipolLX303A, Nipol2518FS, Nipol2518GL, NipolLX603, Nip〇lLX415A, NipolLX416, NipolLX426, NipolLX430, NipolLX432A, NipolLX433C, NipolLX435, NipolL X438C, NipolLX473B, NipolLX476, Nipol2570X5, NipolSX1105, Lubrizol's StycarTM SB-1168, StycarTM SB-1177, StycarTM SB-0738, StycarTM SB-1170, StycarTM SB-0706, StycarTM SB-1459, StycarTM 1780, StycarTM 1795, About Methyl Methacrylate The olefin rubber can be exemplified by Lacstar-DM-886, Lacstar-DM-801, Lacstar-DM-808, manufactured by DIC Co., Ltd., MR-170, MR-17, MR-made by Japan ML Co., Ltd. 172, MR-173, MR-174, Nipol LX811B, Nipol LX814, Nipol LX816, Nipol LX820A, Nipol LX82, Nipol LX844B, Nipol LX851C, Nipol LX851E, Nipol LX851F, Nipol LX852, Nipol LX, manufactured by Zeon Co., Ltd., Japan 854E, Nipol LX855EX, Nipol LX85H2, Nipol LX874, Nipol SX1706, Hycar26843, HycarT-122, HycarT-9202, 16 322497 201132803 by Hybrizol ' Hycar26-1042, Hycar26477, Hycar 26717, Hycar26479, • Λ

Hycar26-1199、Hycar23083、Hycar 26322、Hycar26552、 Hycar26-0202 、 Hycar26092 、 Hycar 2671 、 Hycar26120 、 HycarT-9207 、 Hycar26319 、 Hycar 26871 、 Hycar26345 、 Hycar26-0912 、 Hycar2679 、 Hycar26796 、 Hycar26084 、 Hycar26349 、 Hycar26091 、 Hycar26288 、 Hycar26-1265 、 Hycar26138 、 Hycar26523 、 Hycar26-1084 、 Hycar26106 、 Hycar26348 、 Hycar26450 、 Hycar26688 、 Hycar26172 、 Hycar26391 、 Hycar26256 、 Hycar26-1475 、 Hycar26315 、 Hycar26459 、 Hycar594 、 Hycar595 、 Hycar2003 、 HystretchV-60 、 HystretchV-43 、 HystretchV-43FDA 、 HystretchV-43FF、HystretchV-29、關於丙稀酸橡膠,可 例示如:DIC(股)公司製的 Bonkote AB-901、Bonkote AN-155-E 、 Bonkote AN-200 、 Bonkote ED-85E 、 Bonkote R-3380-E、Bonkote AN-782-E、Bonkote AB-886、Bonkote AN-l190 、 Bonkote H-5 、 BonkoteS-5 、 Bonkote AC-501 、 Bonkote HV-E、Bonkote TA-96、Bonkote SFA-33、Bonkote AK-261E 、 Bonkote AK-3090 、 Bonkote AK-2100 、 Bonkote SEP-119、JSR(股)公司製的 AE610H、AE200A、AE337、 AE945H 、 AE981A 、 AE120A 、 AE982 、 AE986B 、 SX8900C 、 SX8900D、AE116、AE150B。 &lt;必需添加成分3 :酸(C)&gt; 其次,說明本發明相關的水性低層處理劑的第三必需 添加成分的酸(C)。本發明的水性低層處理劑中,酸(〇是s 17 322497 201132803 二:ί在銅材料上即使水洗時也不會脫落之耐水洗性高 日確,但推想為酸的—個作用係在底層處在目 =!、以降低處理劑之邱,藉由此,可以_ 〜出之銅離子’或存在於處理劑中之鋼離 料等之配位,而源自娜子的正電荷會使庫余靜 電力(Coui_ Force)變大。因而認定藉由此,使具有負電 荷的水分散性或水溶性之有機樹脂⑷在吸著陰離子系界 丨劑之表Φ有更強之靜電凝集,而形成g卩使水洗時也 不會脫落的底層處理被膜。 酸(C)可以使用’例如,選自錯氣化氣酸、欽氣化氫 文、石夕氟化氫酸、靖氟化氫酸、氟化氮酸、鱗酸、硝酸等 中至少1種,而以使用選自硝酸、氣酸中1種以上為更佳。 &lt;必需添加成分4 :氧化劑(£)) &gt; 其次,說明本發明相關的水性低層處理劑的第四必需 添加成分的氧化劑⑼。本發明的水性低層處理劑中 劑⑼係藉由氧化溶解銅材料而如上述般,係為了使水八散 性或水溶性之㈣龍⑷在崎料表面靜電凝集 必要的銅離子發生源。 在此,式(1)的反應中標準氫電極電位Ρ(25ΐ)是 0.34 V’式⑵的反應中標準氫電極電㈣也。㈡是 而與鐵、鋅、料不同,氫離子通常不會成為鋼之氧化劍, 因此特別需要用以氧化溶解鋼之氧化劑。Hycar26-1199, Hycar23083, Hycar 26322, Hycar26552, Hycar26-0202, Hycar26092, Hycar 2671, Hycar26120, HycarT-9207, Hycar26319, Hycar 26871, Hycar26345, Hycar26-0912, Hycar2679, Hycar26796, Hycar26084, Hycar26349, Hycar26091, Hycar26288, Hycar26 -1265, Hycar26138, Hycar26523, Hycar26-1084, Hycar26106, Hycar26348, Hycar26450, Hycar26688, Hycar26172, Hycar26391, Hycar26256, Hycar26-1475, Hycar26315, Hycar26459, Hycar594, Hycar595, Hycar2003, HystretchV-60, HystretchV-43, HystretchV-43FDA , Hystretch V-43FF, Hystretch V-29, and acrylic rubber, such as Bonkote AB-901, Bonkote AN-155-E, Bonkote AN-200, Bonkote ED-85E, Bonkote R, manufactured by DIC Corporation -3380-E, Bonkote AN-782-E, Bonkote AB-886, Bonkote AN-l190, Bonkote H-5, BonkoteS-5, Bonkote AC-501, Bonkote HV-E, Bonkote TA-96, Bonkote SFA-33 , Bonkote AK-261E, Bonkote AK-3090, Bonkote AK-2100 , Bonkote SEP-119, AE610H, AE200A, AE337, AE945H, AE981A, AE120A, AE982, AE986B, SX8900C, SX8900D, AE116, AE150B manufactured by JSR. &lt;Required Addition of Component 3: Acid (C)&gt; Next, the acid (C) of the third essential component of the aqueous low-layer treatment agent according to the present invention will be described. In the aqueous low-layer treatment agent of the present invention, the acid (〇 is s 17 322497 201132803 2: ί is not detached from the copper material even when washed, and the water-washing resistance is high, but it is thought to be acid-based. In the eye =!, to reduce the treatment agent, whereby the copper ion can be _ ~ or the coordination of the steel in the treatment agent, etc., and the positive charge from the Nazi will make The coui_force of the reservoir becomes larger, and it is therefore assumed that the water-dispersible or water-soluble organic resin (4) having a negative charge has a stronger electrostatic aggregation on the surface Φ of the anion-based anionic agent. The underlying treatment film is formed so that it does not fall off when washed. The acid (C) can be used, for example, selected from the group consisting of a gasified gas, a hydrogenated gas, a sulphuric acid, a hydrogen fluoride, and a fluorinated acid. At least one of nitrogen acid, scaly acid, nitric acid, and the like is used, and it is more preferable to use one or more selected from the group consisting of nitric acid and gas acid. &lt;Must add component 4: oxidizing agent (£)) &gt; Next, the present invention will be described. The fourth essential component of the aqueous low-layer treatment agent is the added oxidizing agent (9). The aqueous low-layer treating agent (9) of the present invention is a copper ion generating source which is required to electrostatically agglomerate the surface of the bake material by oxidizing and dissolving the copper material as described above in order to make the water octagonal or water-soluble (4) dragon (4). Here, in the reaction of the formula (1), the standard hydrogen electrode potential ΐ (25 ΐ) is 0.34 V' (2) in the reaction of the formula (2). (b) Yes Unlike iron, zinc and materials, hydrogen ions usually do not become the oxidation sword of steel. Therefore, oxidants for oxidizing dissolved steel are especially needed.

Cu - Cuz+ + 2e- 式⑴ 322497 18 201132803 2H+ + 2e~ ^H2 式(2) .根據如此之理論,作為銅之氧化劑而可使用者有很 夕’(例如,硝酸系化合物,例如:亞石肖酸(nitr〇us acid)、 過氧确酸、過氧亞硝酸、次確酸(nitr〇xylic acid ; H2NO2)、三氧二硝酸(H2N2O3)、四氧二硝酸、此等之鹽;硫 酸系化合物,例如,亞&gt;6肖酸、過氧亞確酸、次靖酸、三氧 一硝S文、四氧一硝酸、此專之鹽;齒酸系化合物,例如, 咼氯酸、氯酸、亞氣酸、次亞氣酸、高溴酸、溴酸、亞溴 酸、次亞溴酸、高破酸、硬酸、亞破酸、次亞換酸、此等 之鹽;有機過氧化物’例如’過氧化氫、酮過氧化物、過 氧縮酮、氫過氧化物、二烷基過氧化物、二醯基過氧化物、 過氧酯、過氧二碳酸酯、…)。然而,本發明人等發現,在 有本發明之水性底層處理劑之液組成並且適用對象為銅材 料時’要能發揮各種性能者’係數種氧化劑之内,鐵(ΙΠ) 離子較能發揮顯著的性能。 在此’作為供給液中鐵(ΠΙ)離子之鐵(III)離子供給 源者’具體上,可列舉如:氟化鐵(III)、氯化鐵(III)、 溴化鐵(III)、碘化鐵(III)、硫酸鐵(ΙΠ)、硝酸鐵(ΙΠ)、 醋酸鐵(III)、乙醯丙酮鐵(III)、檸檬酸鐵(ΙΠ)、甘胺醯 鐵(III)、草酸鐵(III)、皮考啉酸鐵(III)、L-苯基丙胺酸 鐵(III)、丙二酸鐵(III)等,可以使用其中之單獨1種, 也可以併用2種以上。 其次’說明本發明相關的水性低層處理劑的任意含有 成分。本發明相關的水性低層處理劑,也可以含有以往習 19 322497 201132803 知之各種成分或添加劑。以下特別說明,其中之内的陰離 子供給源⑻、銅離子⑺及過氧化氫⑹,但並未排除含有 此之外的任意成分。 &lt;必需添加成分1 :陰離子供給源(Ε)&gt; 其次’說明本發明相關的水性底層處理劑的任意含有 成分的陰離子供給源⑻。將在肌、與離子強度〇別之 鐵(III)離子的第-錯體安定度係數pi pe⑴1}為5以上的陰 離子供給源(E),添加到處理劑中,源自陰離子供給源⑻ 的陰離子在鐵(in)離子配位,可減弱由鐵(ΙΠ)離子所持 有之正電荷所形成之靜電力,藉由此可以提高液安定性。 具體而言,可例示:氧酸(紅咖)=5· 2〇)、草酸(紅卩侧= 7.53)、乙醯丙酮、檸檬酸、甘胺醯、皮考啉酸、l_苯基丙 胺酸、丙二酸或此等之鹽(鈉鹽、鉀鹽、銨鹽等)^ 在此,將作為氧化劑(D)的鐵⑴υ離子供給液中之鐵 (III)離子供給源與上述之陰離子供給源⑻也可以是源自 同一化合物。例如,作為鐵(111)離子供給源之例子的氣化 鐵(ΠΙ)、草酸鐵(ΠΙ)或檸檬酸鐵(Ιπ)即是。 &lt;任意含有成分2:銅離子(f)〉 說明本發明相關的水性底層處理劑的任意含有成分 的銅離子⑺。作為銅離子(F)者,可列舉銅⑴離子、銅離 子(II)可以使用此等之單⑴種,也可以併用2種以上。 此等之金屬離子’係將選自鋼⑽化合物、銅⑴化合物、 、及金屬銅巾之1種以上添加或浸潰到水性底層處理劑中 而可以存在本發_水性底層處_卜在此,作為銅⑴ 322497 20 201132803 化合物者,可列舉氯化銅(υ等,此等可以使用單獨丨種, 也可以併用2種以上。作為銅gi)化合物者,具體上可列 舉如.蟻酸銅(II)、醋酸銅(II)、丙酸銅(II)、戊酸銅(U)、 葡糖酸銅(Π)、酒石酸銅(11)等有紐之㈣;氣化銅 (Π)、溴化銅(Π)、氫氧化銅(11)、醋酸銅(11)、硝酸銅 (11)、硫酸銅(11)、碳酸銅(11)、氧化銅(11)、硫化銅(11) 等’此等可以使用單獨i種,也可以併用2種以上。作為 金屬銅者’可以使用上述銅材料。 又,作為氧化劑以更含有過氧化氫(G)為適合。這是 因為鐵(III)離子作為氧化劑作用之際,雖本身是成為鐵 (II)離子,但當含有過氧化氫時因有將該鐵(11)離子氧化 回成鐵(III)離子之效果的緣故。 本發明相關的水性底層處理劑,係配合(或含有)上述 之各成分而成水系液體媒體(水性液)。在此,「水系液體媒 體」是指以水為主體之液體媒體/主體」是指將液體媒體 之全質量當作基準而至少要有5〇容量%以上為水之意思。 再且,也可以含有水以外之液體媒體,例如,己烷二^烷 等之烷系,苯、曱苯等之芳香族系;乙醇、卜丁醇、乙基 溶纖素等醇系;四氫咬喃、二魏等越系;醋酸乙醋、醋 酸丁氧基乙醋等醋系;二曱至曱酿胺、卜曱基。比略烧嗣等 之醯胺系,二曱基亞砜等颯系溶劑;六曱基磷酸三醯胺等 磷·酸醯胺;等都可以適合使用。 其次,說明水性底層處理劑中,上述之各成分之添加 量(或含有量)。 S' 322497 21 201132803 &lt;必須添加成分(A) &gt; 本發明的水性底層處理劑中,相對於低層處理劑全 量,有機樹脂00是以0.5至80質量%為佳,而 質機更佳。上述有機樹脂⑷之含量在此範圍時,使用 底層處理劑處理在本發明所使用之崎料後,水洗時之防 止底層處理被膜脫落性變良好。 '、 又,有機樹脂為彈性體之情形,將彈性體溶解或分散 之彈性體分散溶液(也稱為乳膠)中之彈性體濃度,並無特 別之限定,但從處理劑的處理容易度之觀點^^、至 80質量為佳,以1〇至60質量%為更佳。又,作為上述分 散溶液之黏度者雖無制之限定,但_理__^ 度之觀點而言’以5至3000 cP為佳。又,作為上述分散 溶液中之彈性體的粒徑’雖是無特別之限定,但以〇.〇〇1 至10/zm為佳,以〇. 〇1至2/ζιη為更佳。 &lt;必須添加成分(B) &gt; 本發明的水性底詹處理劑中,相對於底層處理劑全 量’陰離子界面活性劑(B)的含量是以1〇〇至loooo ρριη 為佳,以500至3000 ppm為更佳。尤其,在設定選擇自前 述之烷基笨磺酸鹽、烷基萘磺酸鹽、烷基二苯醚二磺酸鹽、 烷磺酸鹽中之1種以上之上述濃度的情形,可能安定地形 成1 /zm以下之膜厚的底層處理被膜。 &lt;必須添加成分(〇&gt; 本發明的水性底層處理劑中,相對於底層處理劑全 量,酸(C)的以〇. 5至20質量為佳,以1至10質量%為更 22 322497 201132803Cu - Cuz+ + 2e- Formula (1) 322497 18 201132803 2H+ + 2e~ ^H2 Formula (2) According to such a theory, as an oxidizing agent for copper, the user may have a good time (for example, a nitric acid compound such as a shale Acid (nitr〇us acid), peroxyacid, peroxynitrite, nitric acid (H2NO2), trioxanediamine (H2N2O3), tetraoxydinitrogen, salts of these; sulfuric acid a compound, for example, a sub->6 octanoic acid, a peroxy phthalic acid, a hypotrimic acid, a trioxane sulphate, a tetraoxymononitrate, a specific salt thereof; a tart acid compound, for example, chlorous acid, Chloric acid, sulphuric acid, sub-sulphuric acid, high bromic acid, bromic acid, bromic acid, hypobromous acid, high acid breaking, hard acid, cleavage acid, sub-acid exchange, and the like; organic Peroxides such as 'hydrogen peroxide, ketone peroxides, peroxyketals, hydroperoxides, dialkyl peroxides, dinonyl peroxides, peroxyesters, peroxydicarbonates, ... ). However, the present inventors have found that iron (ΙΠ) ions can be significantly exhibited in the case where the liquid composition of the aqueous underlayer treatment agent of the present invention is applied and the object is a copper material, which is capable of exerting various performances. Performance. Here, 'the source of iron (III) ion as the iron (ΠΙ) ion in the supply liquid' may specifically be, for example, iron (III) fluoride, iron (III) chloride, iron (III) bromide, Iron(III) iodide, iron (strontium) sulfate, iron nitrate (iron), iron (III) acetate, iron (III) acetate, iron (citrate), iron (III), iron oxalate (III), iron (III) picoline, iron (III) L-phenylalanine, iron (III) malonate, and the like may be used alone or in combination of two or more. Next, the optional components of the aqueous low-layer treatment agent according to the present invention will be described. The aqueous low-layer treatment agent according to the present invention may contain various components or additives known from the prior art. The anion source (8), copper ion (7) and hydrogen peroxide (6) therein are specifically described below, but any components other than the above are not excluded. &lt;Required addition component 1: Anion supply source (Ε)> Next, an anion supply source (8) containing any component of the aqueous underlayer treatment agent according to the present invention will be described. An anion supply source (E) having a first-substrate stability coefficient pi pe(1)1} of iron (III) ions and an ion intensity difference of 5 or more is added to the treatment agent, and is derived from the anion supply source (8). The anion is coordinated to the iron (in) ion to attenuate the electrostatic force formed by the positive charge held by the iron ion, thereby improving the liquid stability. Specifically, it can be exemplified by: oxyacid (red coffee) = 5.2 〇), oxalic acid (red 卩 side = 7.53), acetamidine acetone, citric acid, glycosaminoglycan, picolinic acid, l-phenylpropylamine Acid, malonic acid or the like (sodium salt, potassium salt, ammonium salt, etc.) ^ Here, the iron (III) ion supply source in the iron (1) cesium ion supply liquid as the oxidant (D) and the anion described above The supply source (8) may also be derived from the same compound. For example, gasified iron (ruthenium), iron oxalate (iron) or iron citrate (Ιπ) which is an example of a source of iron (111) ions is used. &lt;Optional component 2: Copper ion (f)> Copper ion (7) which is an optional component of the aqueous underlayer treatment agent according to the present invention. As the copper ion (F), the copper (1) ion and the copper ion (II) may be used alone or in combination of two or more. The metal ions of the present invention are added or impregnated into the aqueous underlayer treatment agent from one or more of the steel (10) compound, the copper (1) compound, and the metal copper towel, and may be present in the present invention. Examples of the copper (1) 322497 20 201132803 compound include copper chloride (such as ruthenium or the like, and these may be used alone or in combination of two or more kinds thereof as copper gi), and specific examples thereof include copper antacid ( II), copper (II) acetate, copper (II) propionate, copper (U) pentoxide, copper gluconate (yttrium), copper tartrate (11), etc. (4); gasified copper (Π), bromine Copper (Π), copper hydroxide (11), copper acetate (11), copper nitrate (11), copper sulfate (11), copper carbonate (11), copper oxide (11), copper sulfide (11), etc. These may be used alone or in combination of two or more. As the metal copper, the above copper material can be used. Further, it is suitable as the oxidizing agent to further contain hydrogen peroxide (G). This is because iron (III) ions act as oxidants, although they themselves become iron (II) ions, but when hydrogen peroxide is contained, the effect of oxidizing the iron (11) ions back into iron (III) ions The reason. The aqueous underlayer treatment agent according to the present invention is an aqueous liquid medium (aqueous liquid) obtained by blending (or containing) each of the above components. Here, the "aqueous liquid medium" means a liquid medium/main body mainly composed of water, and means that at least 5 % by volume or more of water is used as a reference based on the total mass of the liquid medium. Further, a liquid medium other than water may be contained, for example, an alkane system such as hexane dioxane, an aromatic system such as benzene or anthracene; an alcohol such as ethanol, butanol or ethyl cellosolve; Hydrogen gnat, two Wei and other vinegar; acetic acid ethyl vinegar, acetic acid butoxy vinegar and other vinegar; second 曱 to 曱 amine, 曱 曱. An anthraquinone-based solvent such as anthraquinone or a hydrazine-based solvent such as dimercaptosulfoxide; a phosphonium amide such as hexamethylenephosphoric acid triamide; and the like can be suitably used. Next, the amount (or content) of each component described above in the aqueous underlayer treatment agent will be described. S' 322497 21 201132803 &lt;Must add component (A) &gt; In the aqueous underlayer treatment agent of the present invention, the organic resin 00 is preferably from 0.5 to 80% by mass based on the total amount of the lower layer treatment agent, and the mass machine is more preferable. When the content of the above-mentioned organic resin (4) is within this range, the undercoating agent used in the present invention is treated with a primer to prevent the undercoating film from being detached during washing. Further, in the case where the organic resin is an elastomer, the concentration of the elastomer in the elastomer dispersion solution (also referred to as latex) in which the elastomer is dissolved or dispersed is not particularly limited, but is easy to handle from the treatment agent. The viewpoint ^^, to 80 mass is preferable, and preferably 1 to 60% by mass. Further, although the viscosity of the above-mentioned dispersion solution is not limited, it is preferably from 5 to 3,000 cP from the viewpoint of the degree of __^. Further, the particle diameter ' of the elastomer in the dispersion solution is not particularly limited, but is preferably 〇1 to 10/zm, more preferably 〇1 to 2/ζιη. &lt;Must add component (B) &gt; In the aqueous base treatment agent of the present invention, the total amount of the anionic surfactant (B) relative to the underlying treatment agent is preferably from 1 〇〇 to loooo ρριη, from 500 to 3000 ppm is better. In particular, in the case where the above-mentioned concentration selected from the above-mentioned alkyl sulfonate, alkylnaphthalenesulfonate, alkyldiphenyloxide disulfonate or alkanesulfonate is selected, it is possible to stably An underlayer treatment film having a film thickness of 1 / zm or less is formed. &lt;Must be added (〇> In the aqueous underlayer treatment agent of the present invention, the total amount of the underlying treatment agent is preferably from 5 to 20, and from 1 to 10% by mass to 22 322497. 201132803

佳。酸(c)之含量在此範圍時,使用底層處理劑處理在本發 明所使用夂銅材料後,水洗時之防止底層處理被膜 變良好。 、性 &lt;必須添加成分(D)&gt; 本發明的水性底層處理劑中,相對於底層處理劑全 量,氧化劑(D)的以〇.01至10質量為佳,以〇 〇5至5 量%為更佳。氧化劑⑼之含量在此範圍時,使用底層處理 劑處理在本發明所使用之金屬材料後,水洗時之防 析出被膜脫落性變良好。 己 &lt;任意添加成分(E)&gt; 本發_水性底層處理射,相對於水性底層處 全:,陰離子(E)的以〇 〇1至1〇質量為佳,以 質量❶/。為更佳。氧化劑⑻之含量在此範圍時持】 理劑之反應性且液安定性變良好。 f底層處 &lt;任意添加成分(F)&gt; 本發_纽底層4理射,㈣財 全置,鋼離子⑺的以〇.0謝至(M質量為佳if理劑 至〇.05質量%為更佳。銅離子⑻之含量在此範圍^ ·001 底底層處理賴理在树⑽使狀金 使用 處理負財理之情形,也可得到已安定之底^際析加_上 又,添加作為氧化劑之過氧化氫(G)之情形, 里。 劑之/辰度,必需要轉在液巾存在之 ^化 ⑽離子的充分量。在此,該氧化劑之濃:離:氧化成鐵 電極以用於作用極之市售的-電極 322497 201132803 位來管理H由本發明之自已析出 之亞鐵離子氧化成鐵離子的狀態下,在處理=、將全部 剩餘之過氧化氫存在的狀態為佳。藉二有若干 之氧化劑所得之值保持在最小值以 ▲匕還原電位 態。在此,較佳之氧化還原電位,至少有=維持前述狀 以350心以上為佳。低於_ mV時,與氟化2上,而 安定性低之亞鐵離子可存在於處理 2子之錯 之安定性下降之原因。 …果成為處理液 《鋼f&quot;之底層處理枝(水性底層處理劑之使用方 本發明之相關鋼材料的底層處理方=方法)》 為「本發明之底層處理方法」。),勹人 下,簡單稱 性底層處理劑與銅材料接觸之接液=將之本發明水 後,藉由水洗除去酸(c) 述接液步驟之 後,乾燥之乾燥步驟的鋼步驟、與水洗步驟 〈接液步驟〉 崎㈣底層處理方法。 液步驟係將上述之本發明水性底層〜 法中,上述接液步步驟。本發明之底層處理方 由浸潰法、嘴霧法或此==特別限定’例如,藉 發明之底層處理方法中,等方法可以使用。又,本 理劑之使用條件並無’上述接液步驟之本發明的底層處 際的處理劑及本發^用限定’例如’塗布底層處理劑之 為宜,30至Λ 材料的溫度,以在10至90 抑制能量之浪費,故派溫度在5〇°C以下時,因為可以 、 、左、之觀點而言為適合之溫度。又, 322497 24 201132803good. When the content of the acid (c) is within this range, the underlying treatment agent is treated with the underlayer treating agent to prevent the undercoating film from becoming good after washing with water. , &lt;Must add component (D)&gt; In the aqueous underlayer treatment agent of the present invention, the oxidizing agent (D) is preferably 〇.01 to 10 by mass, and 〇〇5 to 5 by mass relative to the total amount of the underlying treatment agent. % is better. When the content of the oxidizing agent (9) is within this range, the metal material used in the present invention is treated with the underlying treatment agent, and the release property of the film during water washing is improved. Å &lt;optional addition component (E)&gt; The present invention _ aqueous bottom treatment shot, relative to the aqueous bottom layer:: Anion (E) is preferably 〇 1 to 1 〇 mass, with mass ❶ /. For better. When the content of the oxidizing agent (8) is within this range, the reactivity of the pharmaceutically acceptable agent is maintained and the liquid stability is improved. f bottom layer &lt;optional addition component (F)&gt; The hair _ _ _ bottom layer 4 physics, (four) Cai Quan, steel ion (7) to 〇.0 thank you (M quality is good to the agent to 〇.05 quality % is better. The content of copper ion (8) is in this range ^ · 001 The bottom layer is processed in the case of the tree (10), and the case of the gold is used to deal with the negative financial situation, and the stable bottom can be obtained. In the case of adding hydrogen peroxide (G) as an oxidizing agent, it is necessary to transfer a sufficient amount of the (10) ion present in the liquid towel. Here, the concentration of the oxidizing agent: from: oxidation to iron The electrode is managed in the state of the electrode 322497 201132803 for the working electrode. In the state in which the self-precipitated ferrous ion of the present invention is oxidized to iron ions, the state in which the remaining hydrogen peroxide is present is Preferably, the value obtained by using a plurality of oxidants is kept at a minimum value of ▲ 匕 to reduce the potential state. Here, the preferred oxidation-reduction potential, at least = maintaining the foregoing shape is preferably 350 or more. Below _ mV, With fluorination 2, ferrous ions with low stability can exist in the treatment of 2 The reason for the decrease in the stability is... the result is the treatment layer "the underlying treatment of steel f&quot; (the use of the aqueous underlayer treatment agent, the underlying treatment method of the relevant steel material of the present invention = method)" is "the underlying treatment method of the present invention" )), under the squat, simply contact the copper substrate with the contact agent = after the water of the invention, remove the acid by washing with water (c) after the liquid-contacting step, the drying step of the steel step , and the washing step <liquid-contacting step> Saki (four) the bottom layer processing method. The liquid step is the above-mentioned liquid-feeding step of the above-mentioned aqueous underlayer of the present invention. The underlayer treatment of the present invention can be used by a dipping method, a mouth mist method or this == specifically defined by, for example, the underlying treatment method of the invention. Further, the conditions of use of the agent are not the same as the treatment agent of the bottom layer of the present invention in the above-mentioned liquid-contacting step, and the temperature limit of the coating agent is preferably limited to the temperature of 30 to Λ. In 10 to 90, the energy is wasted, so when the temperature is below 5 °C, it is suitable temperature because it can be, left, and from the viewpoint. Again, 322497 24 201132803

使底層處理劑接液的時間,可以適當地設定。 &lt;水洗步驟&gt; 、本發月之底層處理方法中,上述水洗步驟的水洗方法 並無特別限疋’例如,藉由浸漬法、嘴霧法或此等之組合 等方法可以水洗。X,水洗時間,可以適當設定。藉由此 水洗步驟,可以除去在本發明的底層處理劑中含有之酸 (C)、氧化劑⑼的鐵離子,藉由此可以提高接著性。 &lt;乾燥步驟&gt; 上述乾燥步嶋水洗步驟後賴,㈣成底層被膜之 步驟。本發明之底層處理方法中,乾燥溫度是依所使用之 溶劑不_異,故無特職定,例如,以水作為溶劑使用 時,以在50至200°C之範圍為佳。 《附有底層被膜之銅材料》 本發明的附有底層被膜之銅材料,係使用上述之本發 明的底層處得表面處理之崎料。在此,詳述所形 成的底層被膜。 &lt;膜厚&gt; 而以 所得底層被膜之膜厚是以0.01至2〇#m為佳 0· 05至5//m為更佳。 &lt;含有成分&gt;The time for the underlying treatment agent to be connected to the liquid can be appropriately set. &lt;Washing Step&gt; In the bottom layer treatment method of the present month, the water washing method in the water washing step is not particularly limited. For example, the method may be washed by a dipping method, a mouth mist method, or a combination thereof. X, washing time, can be set appropriately. By the water washing step, the iron ions of the acid (C) and the oxidizing agent (9) contained in the undertreatment agent of the present invention can be removed, whereby the adhesion can be improved. &lt;Drying step&gt; The step of drying the step after the water washing step and (4) forming the underlayer film. In the underlying treatment method of the present invention, the drying temperature is not determined depending on the solvent to be used, and for example, when water is used as the solvent, it is preferably in the range of 50 to 200 °C. <<Copper Material Attached to Underlayer Film>> The copper material to which the underlayer film of the present invention is attached is obtained by using the surface layer of the above-described present invention. Here, the underlying film formed is detailed. &lt;Thickness&gt; The film thickness of the obtained underlayer film is preferably 0.01 to 2 Å #m, more preferably 0·05 to 5 // m. &lt;containing ingredients&gt;

S 以本發明的底層處理方法所得之金屬材料上的底層 被膜,除了水分散性或水溶性之有機樹脂(A)之外,_人 銅元素。由於有如此之被膜結構,密著性能更為提:、 行XPS分析(裝置名·· ESCA-850M(島津製作所(股)製= 322497 25 201132803 =2裝置中所搭载之解析軟體,由理論計算被膜中 時,底層被财之銅元素U子比率至 =子“產生氧峨D)之取素含有糊子比率)同 樣计异日r將訊號雜訊比(SignaI t〇 _如〇)以2 補在=為檢出界限時’結果為檢出界限以下。為了更詳細 =p 70素之含有的有無,乃進行螢光X線分析(裝置: nmus(理學製)),藉由檢量線法,實施被膜中鐵含量 =之結果,也在檢出界限(〇 〇〇3g/m2)以下。目前乃推 、&lt;、、、以本發明的底層處理方法所得之金屬材料上之底層 被膜中不含鐵元素之事實,成為接著性能高的原因^ 後文繼續敘述。 、 接著說明此底層被膜所形成侧之銅材料的物性變 化使用本發明相關之金屬材料用底層處理劑處理,能一 面抑制金屬表面粗链度之變化一面可以提高與樹脂之=著 =二體地說’可將處理後之金屬表面粗縫度D相對於 处理前之金屬表面粗糙度(Ra。)的變化ARa控制在〇.5^m 二或更好在〇.3_以下。尤其應用在印刷配線板二 、’與銅材料表面粗糙化之情形相比較,可以發揮 果° 來—直使用之銅材料_的崎 、鋼材料表面被粗糙化,使用表面被粗糙度Ra為 0.2 μ m曰以下之銅箔時,通常其表面平均粗糙度如會超過1 _’得不到如本發明的效果。前述ARa的測定法,係將 本發明匕的附有底層被膜之金屬材料及處理前之金屬材料埋 入樹脂内’進行倍率i萬倍之截面SEM觀察,由金屬表面 322497 26 201132803 粗k度貝料分別計算Rai、Ra。’分別算出△糾如—㈤。 平句表面粗糖度Ra(算術平均表面粗糖度⑻是由了⑽ 0601以Ra之簡略符號所示之值’表示由表面粗縫度之值 之平均線偏移之絕對值偏差的平均值。 《積層構材》 本發明的積層構材,係有上述之本發明的附有底層被 膜的銅材料,與在底層被膜之上設置的熱硬化樹脂材料的 積層構材。本發明的積層構材之結構等並無特別限定,例 如板狀、箔狀、棒狀等,或是複雜之形狀亦可。第丨圖是 本發明的積層構材之一個例子,顯示本發明的板狀積層構 材之模式截面圖。在第丨圖中所示之積層構材丨係有銅材 料2、在其上面使用本發明的底層處理劑而形成的底層被 膜3、與設在底層被膜3上面的熱硬化樹脂材料層4。藉由 本發明相關銅材料的底層處理劑處理之銅材料,與以往技 術不同,能抑制金屬材料之表面的粗糙化,其原因在目前 尚未明瞭。 (熱硬化樹脂) 熱硬化樹脂層之材料,可以使用具有由加熱產生交聯 之官能基的以往習知樹脂。具體地說,例如有:丙烯酸樹 脂、環氧樹脂、酚樹脂、尿素樹脂、三聚氰胺樹脂、聚胺 酯樹脂、熱硬化性聚醯亞胺、不飽和聚酯、雙馬來酸酐縮 亞胺三吖嗪樹脂等。作為可由加熱產生交聯之官能基者, 例示如:胺基、羥基、羥曱基等羥烷基、酚基、羧酸、環 氧基、異氰酸酯基、碳化二亞胺基等。此等可以使用單獨ζ 27 322497 201132803 1種,也可以併用2種以上。此等樹脂也可以藉由官能基 而已改質。又,樹脂層從提高強化、熱傳導性、提高電傳 導性等觀點而言,也可以含有玻璃纖維、碳酸鈣、芳香醯 胺纖維、石墨、碳黑、氧化鋁、氮化鋁、氮化硼、銀、銅 等金屬粉末等填充劑。樹脂層之材料的適合態樣之一者, 可列舉預浸物(prepreg)。預浸物是指將熱硬化性樹脂含浸 在薄片狀之纖維基材成為半硬化狀態者。作為薄片狀之纖 維基材的材質例者,可列舉如:E玻璃、D玻璃、s玻璃、 及Q玻璃等無機物之纖維、芳香醯胺(aramide)、聚醯亞 胺、聚酯及聚四氟乙稀等有機物之纖維,以及此等之混合 物等。此等之纖維基材例如有織布、不織布、粗紗、短玻 璃絲墊、及表面熔接墊等形狀,材質及形狀是隨作為目的 之成形物的用途及性能而選擇,依必要,可以單獨或組合 2種類以上之材質及形狀。 (積層構材之製造方法) 本發明的積層構材,係在上述本發明的附有底層被膜 的金屬材料上,隔著底層被膜接合熱硬化樹脂層而可以得 到。接合之方法並無特別限定,具體上,熱硬化樹脂層是 環氧樹脂之情形’例如,(1)在附有底層被膜的金屬材料之 底層被膜’㈣未魏魏體狀環氧_旨後,乾燥硬化而 形成樹脂層之塗布法,⑵在附有底層被膜的金屬材料之 底層被膜,積層環氧樹脂薄膜,而使底層被膜與環氧樹脂 薄膜接觸後,經加熱壓著的積層法、⑶將附有底層被膜的 金屬材料&amp;置在模具中,而將炫融環氧樹脂射出於模具 28 322497 201132803 内,俾使_縣_與底層被麟觸之形成環氧樹脂層 之射出成形接著法等。 3 (積層構材之特性) 本發明的積層構材中,銅材料與隔著底層被膜所接著 的熱硬化樹脂層的接著強度優異。因所形成的底層被膜也 具有優異的耐酸性,可抑制例如在下述合適之適用例所詳 述的在印刷配線基板的製作時產生粉紅圈(pink Ring)等 之不合適的現象。再進—步,底層被膜在高溫,及高濕度 環境下,也顯示有優異之接著強度。 (使用於印刷配線基板之適用例) 本發明的底層處理劑,也可以適合作為提高印刷配線 基板之銅電路一層間絕緣樹脂材料間的接著性之處理之 用。本發明的底層處理劑可應用的印刷配線基板之種類是 對以往習知者可適用,具體上例示如:單面印刷配線基板、 雙面印刷配線基板、多層印刷配線基板、組合印刷配線基 板(build up printed circuit board)、駢體積層型印刷 配線基板、可撓剛性印刷配線基板、零件内藏型印刷配線 基板、金屬基材印刷配線基板。 本發明的底層處理劑,對於印刷配線基板中之層數、 銅配線圖案、銅配線寬度、銅配線高度、及間隙寬、絕緣 樹脂層厚度等並無特別限定,對以往習知者都可以適用。S The underlying film on the metal material obtained by the underlayer treatment method of the present invention, except for the water-dispersible or water-soluble organic resin (A), is a human copper element. Due to such a film structure, the adhesion performance is further improved: XPS analysis (device name · ESCA-850M (Shimadzu Corporation (share) system = 322497 25 201132803 = 2 analysis software carried in the device, theoretical calculation In the film, the ratio of the bottom layer of the copper element U to the sub-"the production of oxygen 峨D) contains the ratio of the syrup. The same is true for the signal noise ratio (SignaI t〇_如〇) to 2 When the = is the detection limit, the result is below the detection limit. In order to more detail the presence or absence of the inclusion of the 70, the X-ray analysis (device: nmus (science system)) is performed by the calibration curve. In the method, the result of the iron content in the film is also below the detection limit (〇〇〇3g/m2). Currently, the underlying film on the metal material obtained by the underlayer treatment method of the present invention is pushed, &lt;,. The fact that the iron element is not contained is a cause of high performance. The following description will be continued. Next, the physical property change of the copper material on the side where the underlying film is formed can be described by using the underlying treatment agent for the metal material of the present invention. Suppress changes in the thickness of the metal surface The surface can be improved with the resin ===two-body' can change the rough surface degree D of the treated metal surface relative to the surface roughness (Ra.) of the metal surface before treatment. The ARa is controlled at 〇.5^m or It is better to be below 3.3_. Especially in the printed wiring board 2, 'compared with the case where the surface of the copper material is roughened, the surface of the steel material that can be used as the copper material is roughened. When a copper foil having a surface roughness Ra of 0.2 μm曰 or less is used, the surface roughness of the surface is generally more than 1 Å, and the effect of the present invention is not obtained. The aforementioned method for measuring ARa is based on the present invention. The metal material with the underlying film and the metal material before the treatment are embedded in the resin. The SEM observation of the cross-section i thousand times is performed, and the Rai and Ra are calculated from the metal surface 322497 26 201132803 coarse k-degree shell material respectively. Correction—(5). The surface roughness Ra of the flat sentence (arithmetic mean surface roughness (8) is the absolute value deviation of the mean line offset from the value of the rough surface of the surface by the value of (10) 0601 with the abbreviated sign of Ra'. The average value of the building. The laminated member of the present invention is a laminated material of the above-described copper material with a primer film of the present invention and a thermosetting resin material provided on the underlying film. The structure of the laminated member of the present invention is not It is particularly limited, for example, a plate shape, a foil shape, a rod shape, or the like, or a complicated shape. The second drawing is an example of the laminated member of the present invention, and shows a schematic cross-sectional view of the plate-shaped laminated member of the present invention. The laminated structure shown in the figure is a copper material 2, a primer film 3 formed thereon using the underlayer treatment agent of the present invention, and a thermosetting resin material layer 4 provided on the underlayer film 3. The copper material treated by the underlayer treatment agent of the copper material according to the present invention can suppress the roughening of the surface of the metal material unlike the prior art, and the reason for this is not known at present. (Thermosetting resin) As the material of the thermosetting resin layer, a conventionally known resin having a functional group which is crosslinked by heating can be used. Specifically, for example, an acrylic resin, an epoxy resin, a phenol resin, a urea resin, a melamine resin, a polyurethane resin, a thermosetting polyimide, an unsaturated polyester, a bismaleuric acid imide triazine resin Wait. The functional group which can be crosslinked by heating is exemplified by a hydroxyalkyl group such as an amine group, a hydroxyl group or a hydroxymethyl group, a phenol group, a carboxylic acid, an epoxy group, an isocyanate group or a carbodiimide group. These can be used as separate ζ 27 322497 201132803, or two or more types can be used in combination. These resins can also be modified by functional groups. Further, the resin layer may contain glass fibers, calcium carbonate, aromatic amide fibers, graphite, carbon black, aluminum oxide, aluminum nitride, boron nitride, or the like from the viewpoint of enhancing reinforcement, thermal conductivity, and improving electrical conductivity. A filler such as silver or copper metal powder. One of the suitable aspects of the material of the resin layer may be a prepreg. The prepreg is a one in which a thermosetting resin is impregnated into a sheet-like fibrous base material to be semi-hardened. Examples of the material of the sheet-like fibrous base material include fibers of an inorganic material such as E glass, D glass, s glass, and Q glass, aromatic aramide, polyimine, polyester, and polytetrazole. A fiber of an organic substance such as fluoroethylene, and a mixture thereof. Such fibrous base materials include, for example, woven fabrics, non-woven fabrics, rovings, short glass mats, and surface weld mats, and the materials and shapes are selected depending on the purpose and performance of the intended molded product, and may be used alone or in combination as necessary. 2 or more types of materials and shapes. (Manufacturing method of laminated member) The laminated member of the present invention can be obtained by bonding a thermosetting resin layer to a metal material with a primer film of the present invention and a base film. The bonding method is not particularly limited. Specifically, the thermosetting resin layer is an epoxy resin. For example, (1) drying is performed on the underlying film of the metal material to which the underlying film is attached, (4) unweiwei-like epoxy. (2) coating method of forming a resin layer by hardening, (2) laminating film of a metal material to which an underlayer film is attached, laminating an epoxy resin film, and bringing the underlying film into contact with the epoxy resin film, and then laminating by heating, (3) The metal material &amp; with the underlying film is placed in the mold, and the molten epoxy is shot out of the mold 28 322497 201132803, so that the _ county _ and the bottom layer are formed by the formation of the epoxy layer. Wait. (Characteristics of the laminated member) In the laminated member of the present invention, the copper material and the thermosetting resin layer which is adhered to the underlying film are excellent in adhesion strength. Since the underlying film formed also has excellent acid resistance, it is possible to suppress an unsuitable phenomenon such as a pink ring during the production of a printed wiring board, as described in the following suitable application examples. In the further step, the underlying film also exhibits excellent adhesion strength under high temperature and high humidity conditions. (Application example of the printed wiring board) The underlayer treatment agent of the present invention can also be suitably used as a treatment for improving the adhesion between the insulating resin materials between the layers of the copper circuit of the printed wiring board. The type of printed wiring board to which the underlying treatment agent of the present invention can be applied is applicable to conventional ones, and specifically, for example, a single-sided printed wiring board, a double-sided printed wiring board, a multilayer printed wiring board, and a combined printed wiring board ( Build up printed circuit board, 骈 volume layer type printed wiring board, flexible rigid printed wiring board, part built-in type printed wiring board, and metal base printed wiring board. The underlayer treatment agent of the present invention is not particularly limited to the number of layers in the printed wiring board, the copper wiring pattern, the copper wiring width, the copper wiring height, the gap width, and the thickness of the insulating resin layer, and can be applied to conventionally used ones. .

S 又,本發明的底層處理劑,在印刷配線基板中之銅電 路形成手法並無特別限定,可以適用以往習知之手法。具 體上可例示如:減去法(subtractive)、添加法 322497 29 201132803 (additive)、添加一減去法等 又’本發明的底層處理劑,在層間絕緣樹脂層中並無 特別限定,對以往習知之熱硬化性樹脂可以適用。 第2圖是使用本發明的底層處理劑製造之印刷配線板 的一個例子’ 4層印刷配線板之模式的截面圖。關於銅配 線電路所形成的絕緣樹脂層,係藉由使用本發明的底層處 理劑而實施表面處理’只在銅電路表面形成底層處理被 膜。因為在沒有形成銅配線電路之上述絕緣樹脂層表面沒 有开&gt; 成被膜’故從對絕緣可靠性或電特性之影響觀點而言 為較佳。 又,底層處理被膜之膜厚並無特別限定,而以〇. 01 至20 v m為佳,以0. 05至5 /z m為更佳。 又,尤其在印刷配線板中,於將高頻率波形作為信號 之用途的情形,如日本特開平7-314603號公報,從表皮效 果之點而言銅材轉表面之表面粗糙度Ra為〇. 以下, 而以0· 2&quot;m以下為佳。 實施例 以下一面參照實施例一面具體說明本發明。但本發明 並不侷限於這些實施例。 I附有底層被膜之銅材料的製作 如後述實施例及比較例所示,使用各種之底層處理劑 並將以下處理步驟實施於被處理材上,而獲得附有底層被 犋之銅材料。 [被處理材] 30 322497 201132803 被處理材的簡略符號與定義如下。 • 銅箔:電解銅箔(純度99.8質量%以上)、厚度18#m、In addition, the method of forming the copper circuit in the printed wiring board of the underlying treatment agent of the present invention is not particularly limited, and a conventional method can be applied. Specifically, for example, a subtractive method, an additive method 322497 29 201132803 (additive), an addition subtraction method, and the like, the underlayer treatment agent of the present invention is not particularly limited in the interlayer insulating resin layer. A conventional thermosetting resin can be applied. Fig. 2 is a cross-sectional view showing a mode of a four-layer printed wiring board as an example of a printed wiring board produced by using the underlayer treating agent of the present invention. The insulating resin layer formed by the copper wiring circuit is subjected to surface treatment by using the underlayer treating agent of the present invention. The underlying film is formed only on the surface of the copper circuit. Since the surface of the above-mentioned insulating resin layer on which the copper wiring circuit is not formed is not opened, it is preferable from the viewpoint of the influence on the insulation reliability or electrical characteristics. Further, the film thickness of the underlayer treatment film is not particularly limited, and is preferably from 0.01 to 20 v m, more preferably from 0.05 to 5 /z m. Further, in the case of a printed wiring board, in the case of using a high-frequency waveform as a signal, as in the case of the Japanese Patent Application Laid-Open No. Hei 7-314603, the surface roughness Ra of the copper turning surface is 〇 from the point of the skin effect. Below, and 0. 2 &quot; m or less is preferred. EXAMPLES Hereinafter, the present invention will be specifically described with reference to examples. However, the invention is not limited to these embodiments. I. Preparation of Copper Material Containing Underlayer Film As shown in the examples and comparative examples described later, various underlayer treatment agents were used and the following treatment steps were carried out on the material to be treated to obtain a copper material with a primer layer attached thereto. [Materials to be treated] 30 322497 201132803 The symbols and definitions of the materials to be treated are as follows. • Copper foil: electrolytic copper foil (purity of 99.8 mass% or more), thickness 18#m,

Ra 0. 3 ^ m • 鎳箔:(純度99質量%以上)、厚度20/zm • 單面銅電路形成環氧樹脂板、LSI2. 5# m、環氧樹脂層 厚度0. 1mm [處理步驟] 作為處理步驟者係依以下步驟(1)至(7)之順序進行。 (1) 脫脂(60°C、10分鐘、浸潰法、使用日本Parkerizing 公司製的Fine Cleaner 4360所調製的5質量%水溶液。) (2) 水洗(常溫、30秒鐘、浸潰法) (3) 酸洗(常溫、30秒鐘、浸潰法、使用市售之硫酸所調製 的10%水溶液) (4) 水洗(常温、30秒鐘、浸潰法) (5) 表面處理(如後述) (6 )水洗(常溫、3 0秒鐘、浸潰法) (7)加熱乾燥(100°C、5分鐘、熱風烘箱) [表面處理] 實施例1 將作為水溶性、水分散性之有機樹脂(A)之具有羧基 及羥甲基之丙烯腈丁二烯苯乙烯橡膠之水分散體(固形分 濃度:47%、pH : 8、黏度:45cP、Tg : 18°C、比重:1. 01)5 重量份、作為陰離子性界面活性劑(B)的烷基二苯基醚二磺 酸鈉(花王(股)製、PELEXSS-H、固形分濃度:50%)之固形 31 322497 201132803 分0. 15重量份、與脫離子水89. 5重量份混合製作含有水 分散性之有機樹脂(A)、陰離子性界面活性劑(B)的水性 液,在其中添加:作為酸(C)的硝酸(有效成分60«5重量 份、作為氧化劑(D)及陰離子(幻的氟化鐵0.35重量份,經 溶解而得底層處理劑(a)e測定底層處理劑(3)之pH而獲得 pH=l· 5(25°C)。接著實施在上述處理劑中(溫度:25°C), 將被處理材之銅箔浸漬3分鐘實施之表面處理。 實施例2 在本實施例製得: 除了添加作為陰離子性界面活性劑(B)的萘磺酸 甲醛縮合物之鈉鹽(花王(股)製、DEMOLNL、固形分濃度: 41%)之固形分0. 25重量份、與脫離子水88. 5重量份以外, 與底層處理劑(a)同組成之底層處理劑(b)。測定底層處理 劑(bj之pH,獲得ρΗ=1. 5(25ΐ^接著實施在上述處理劑 (凰度25 C ),將被處理材之銅箔浸潰3分鐘之表面處 理。 實施例3 將作為水溶性、水分散性之有機樹脂(A)之具有羧基 之丙烯基橡膠之水分散體(固形分濃度 $ πρ、粒子徑:。.24&quot;^貴、:重'1〇4 表面張力:42dyne/an)1G重量份、與作 =⑻㈣基十二絲苯姐峨王子腦麗 trr彡分濃度:16%)之固形分Q.G2重量份、與脫離_ 水84. 63重量份混合’製作含有水溶性之有機樹脂⑷、^ 322497 32 201132803 • 離子性界面活性劑(B)的水性液,在其中調製含有與作為酸 (C)的硝酸(有效成分60%)5重量份、作為氧化劑(d)及陰離 子(E)的氟化鐵0· 35重量份之水溶液,而得底層處理劑 (c)。測定底層處理劑(c)之pH ’獲得pH=2. 〇(25〇C )。接著 實施在上述處理劑中(溫度:25°C),將被處理材之銅箱浸 潰10分鐘之表面處理。 實施例4 使用底層處理劑(a),實施在上述處理劑中(溫度:25 °C),將被處理材之單面銅電路形成環氧樹脂板浸潰1〇分 鐘之表面處理。 實施例5 在本實施例製得: 除了添加作為氧化劑(D)及陰離子(E)的草酸鐵(111) 銨3水和物10.9重量份以外,與底層處理劑(“同組成之 底層處理劑(d)。測定底層處理劑(d)之pH獲得pH=0. 4(25 c)。接著實施在上述處理劑中(溫度:25ΐ),將被處理材 之銅箔浸潰3分鐘之表面處理。 比較例1 在本比較例製得: 除了不添加氧化劑(D)及陰離子(Ε),而添加作為氧化 ^過氧化氫(有效成分3〇%)1〇重量份、脫離子水Μ. 7 重^份以外’與底層處理劑(a)同組成之底層處理劑(e)。 測疋底層處理劑(e)之PH,獲得ρΗ=0·33(25ΐ)。接著實施 在上述處理劑中(溫度:25。〇,將被處理材之銅箱浸潰3 322497 33 201132803 分鐘之表面處理。 比較例2 在本比較例製得: 之 二水性液 「_4D」、固形分二礼膠(第一工業製樂(股)製’製品名 雛工p % ♦度2沾' ρΗ=8·5)10重量份,添加脫 離子水79. 7重量份^丄 〇 3 旦、 刀添加作為酸(C)的硝酸(有效成分60%) •重量份、不添加陰離子性界面活性劑⑻以外,與底層 處理劑(a)同組成之底層處理劑(〇。測定底層處理劑(Ο 之PH,獲得pH=2.9(25°C)。接著實施在上述處理劑中(溫 度· 25 C ),將被處理材之銅箔浸潰3分鐘之表面處理。 比較例3 使用底層處理劑(a),實施在上述處理劑中(溫度:25 °c),將被處理材之Ni箔浸潰10分鐘之表面處理。 比較例4 在本比較例製得: 除了不添加酸(C)以外’與底層處理劑(a)同組成之底 層處理劑(g)。測定底層處理劑(g)之pH,獲得pH=3. 4(25 t)0接著實施在上述處理劑中(溫度:25。0) ’將被處理材 之銅荡浸潰3分鐘之表面處理。 比較例5 使用底層處理劑(a),實施在處理劑中將金屬銅猪浸 潰3分鐘後,不進行上述處理步驟(6)水洗而(?)加熱乾燥 (l〇〇t、5分鐘、熱風烘烤)之表面處理。 322497 34 201132803 比較例6 實施上述處理步驟之中到(4)水洗後,在黑化處理浴 (含亞氣酸鈉30 g/L、磷酸3鈉12水和物10 g/L、氫氧 化納15 g/L之水溶液)中,將銅箔在處理溫度90〇c浸潰3 分鐘。之後,水洗後在熱風烘箱中,1〇0。€加熱乾燥5分鐘 製作黑化處理樣品。 2.附有底層被膜鋼材料之評估 就在實施例1至5及比較例1所得附有底層被膜銅材 料’進行如下各種之評估。 (1) 銅材料表面之算術平均表面粗糙度評估及底層被膜 之膜厚度測定 製作將實施例1至5所製得之附有底層被膜銅材料埋 入%氧樹脂内之樣品’使用掃描型電子顯微鏡(倍率:1〇〇〇〇 倍)觀察該樣品之戴面,估計附有底層被膜金屬材料之金屬 材料表面的算術平均表面粗糙度Ra,結果得知每個樣品之 Ra都在〇· 50//m以下,並確認處理前後之金屬材料表面粗 糙度變化ARa在〇. 20am以下。 第3圖是表示單面銅電路形成環氧樹脂板之銅電路部 ,面照片’第4圖是表示實施例4所得之附有底層被膜的 單面銅電路形成環氧樹脂板之銅電路部截面照片。結果確 認在,電路部形成均勻的厚度1,以下之底層被膜,而銅 電路。[UX外之部位並未形成底層被膜。又,由截面觀察測 定底層被膜厚。結果表示於表i。 (2) 底層被膜之被膜結構分析 35 322497 201132803 就在實施例1及比較例5所製得之附有底層被膜銅材 料’在以下之條件藉由XPS實施被膜之深度方向分析,使 用XPS分析裝置中所搭載之解析軟體,由理論計算以下所 示元素之含有率。第5圖表示在實施例1所得之結果,第 6圖表示在比較例5所得之結果。 &lt;XPS深度方向分析〉 使用裝置:島津製作所(股)製ESCA850 激起X線:Mg-K α 測定面積;約50 mm2 測疋領域· Cls、〇ls、Nls、Cu2p、FIs、Fc2p 濺鍍時間:6分鐘(Si〇2換算 濺鐘速度60 nm/min) 關於鐵元素,用以下條件進行螢光X線分析,藉由檢 量線法測定被獏中鐵元素含有量(g/m2)。使用所得之值, 由以上XPS分析所得鐵元素以外之元素含率(原子及膜 厚測定結果,估算鐵元素含有率(原子%)。 &lt;螢光X線分析&gt; 裝置:ZSX〜primus (理學製) 激起:Rh、Ka、30kV-100mA 測疋面積,10 mm § 由第5圖確認,在實施例1所製得之底層被膜為’在 測定深度中,氟元素及源自氧化劑(D)之鐵元素是在檢出界 限以下(訊號對雜訊比在2以下),姐且,因為使用螢光X 線分析測定被祺中鐵含量也在檢出限界(0· 003g/m2)以下, 故破認為源自水溶性之有機樹脂(A)之丙嫌腈丁一稀本乙 322497 36 201132803 烯橡膠的碳元素、 素所構成。鋼开参人疋素、與源自被處理金屬&amp;材的銅元 子%,表面以·3有率在濺錢時間1秒之最表面有6原 卜疋1至2原子%。 冉者,由笫β国 為,在測定深度中,’在比較例5所製得之底層被膜 有機樹脂(A)之$ &amp; 一實施例1相同,檢出源自水溶性之 素、與源自被處理^丁 —烯本乙烯橡膠的碳元素、氮元 ⑻的鐵原子屬基材的銅元素。加上,源、自氧化劑 是^原子^時間1秒之最表面被檢出,其含有率 中鐵含量是〇 η9 9由使㈣光X線分析手法所得之被膜 有0·5原子g/lfl2。估計鐵元素含有率之結果,得知 14原子%疋素含有率在濺錢時間1秒之最表面有 (3)接著性表^下是3至4原子% 在實施例;| s Q r 層被膜鋼材心 比較1齡6所製得之附有底 枓中,積層厚度約1〇〇/Zm之玻璃布基材環氧樹 化成工業(股)製、商品名;GEA-679N),進一 '#在破3|布基材環氧樹脂薄片之裡面使銅箔之粗輪面 相向而積層者加熱溫度180Ϊ、壓力45kgf/cm2、加熱時間 1小時之條件下加壓接著,得金屬材料—環氧樹脂之積層 構材。 &lt;1次接著性試驗&gt; 將上述之積層構材切斷成1cm寬,固定玻璃布基材環 氧樹脂薄片狀態下,將一部分沒接著的附有底層被膜之金 屬材料之部分進行向垂直方向拉伸9〇度之剝離試驗,測定 37 322497 201132803 剝離強度。 &lt;耐熱2次接著性試驗&gt; 將上述之積層構材切斷成lcm寬,在爐中275°C加熱 1分鐘,之後,在室溫中放置30分鐘後,進行與1次接著 性同樣之剝離試驗,測定剝離強度。 &lt;耐濕2次接著性試驗&gt; 將上述之積層構材切斷成lcm寬,在爐中121°C、2 氣壓、100%相對濕度條件下,加熱1小時,之後,溫度下 降到室溫為止,除去水氣後,進行與1次接著性相同之90 度剝離試驗,測定剝離強度。 &lt;耐酸2次接著性試驗&gt; 將上述之積層構材切斷成lcm寬,在25°C之1M鹽酸 水溶液中浸潰15分鐘,之後,在常溫中水洗30秒鐘,除 去水氣後,進行與1次接著性相同之90度剝離試驗,測定 剝離強度。 &lt;财驗2次接者性試驗&gt; 將上述之積層構材切斷成lcm寬,在25°C之1M氫氧 化納水溶液中浸潰15分鐘,之後,在常溫中水洗30秒鐘, 除去水氣後,進行與1次接著性相同之90度剝離試驗,測 定剝離強度。 [評估基準] 剝離強度在0. 4 kgf/cm以下者,評估為接著性差。 所得結果表示於下表1中。 38 322497 201132803 [表1] 積層構 材 金屬材 料 底層處 理劑 被膜厚 (^m) 接著強度(kgf/cm)Ra 0. 3 ^ m • Nickel foil: (purity of 99% by mass or more), thickness 20/zm • Single-sided copper circuit to form epoxy resin sheet, LSI 2. 5# m, epoxy layer thickness 0. 1mm [Processing procedure The process steps are performed in the order of the following steps (1) to (7). (1) Degreasing (60 ° C, 10 minutes, dipping method, using a 5 mass % aqueous solution prepared by Fine Cleaner 4360 manufactured by Parkerizing Co., Ltd.) (2) Washing (normal temperature, 30 seconds, dipping method) ( 3) Pickling (normal temperature, 30 seconds, dipping method, using 10% aqueous solution prepared by commercially available sulfuric acid) (4) Washing (normal temperature, 30 seconds, dipping method) (5) Surface treatment (as described later) (6) Washing (normal temperature, 30 seconds, dipping method) (7) Heating and drying (100 ° C, 5 minutes, hot air oven) [Surface treatment] Example 1 As a water-soluble, water-dispersible organic An aqueous dispersion of acrylonitrile butadiene styrene rubber having a carboxyl group and a methylol group of resin (A) (solid content concentration: 47%, pH: 8, viscosity: 45 cP, Tg: 18 ° C, specific gravity: 1. 01) 5 parts by weight of solid alkyl diphenyl ether disulfonate (made by Kao, PELEXSS-H, solid concentration: 50%) as an anionic surfactant (B) 31 322497 201132803 0. 15 parts by weight, mixed with deionized water 89. 5 parts by weight to prepare a water-dispersible organic resin (A), an anionic surfactant ( An aqueous liquid of B) to which is added: nitric acid as an acid (C) (active ingredient 60 «5 parts by weight, as an oxidizing agent (D) and an anion (magic iron fluoride 0.35 parts by weight, dissolved to obtain an underlying treatment agent) (a) e. The pH of the underlying treatment agent (3) was measured to obtain pH = 1.5 (25 ° C.) Then, in the above treatment agent (temperature: 25 ° C), the copper foil of the material to be treated was impregnated 3 The surface treatment was carried out in a minute. Example 2 In the present example, a sodium salt of a naphthalenesulfonic acid formaldehyde condensate (addition of Kao (manufactured by Co., Ltd.), DEMOLNL, and solid concentration was prepared in addition to the anionic surfactant (B). The bottom layer treatment agent (b) having the solid content of 0.25% by weight and the deionized water of 88.5 parts by weight, which is the same as the bottom treatment agent (a). The pH of the underlying treatment agent (bj is obtained. Η Η . . . Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η Η 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在(A) An aqueous dispersion of a propylene-based rubber having a carboxyl group (solid concentration concentration: πρ, particle diameter: .24&quo t; ^ expensive,: heavy '1〇4 surface tension: 42dyne/an) 1G parts by weight, with = (8) (tetra) 12-dozen benzene sister prince ceremonial trr 彡 concentration: 16%) solid fraction Q.G2 By weight, and mixed with detachment_water 84.63 parts by weight', an aqueous solution containing water-soluble organic resin (4), ^ 322497 32 201132803 • ionic surfactant (B), prepared and contained as an acid (C) 5 parts by weight of nitric acid (60% of active ingredient), and an aqueous solution of 0.53 parts by weight of iron fluoride as the oxidizing agent (d) and the anion (E), to obtain an underlying treatment agent (c). The pH of the underlying treatment agent (c) was determined to obtain pH = 2. 〇 (25 〇 C). Next, in the above treatment agent (temperature: 25 ° C), the surface of the copper box of the material to be treated was immersed for 10 minutes. (Example 4) Using the underlayer treatment agent (a), the surface treatment was carried out by subjecting the single-sided copper circuit of the material to be treated to an epoxy resin sheet for 1 〇 minutes in the above treatment agent (temperature: 25 °C). Example 5 In the present example, an underlayer treatment agent ("the same composition of the underlying treatment agent" was prepared in addition to the addition of 10.9 parts by weight of iron (111) ammonium oxalate 3 as an oxidizing agent (D) and an anion (E). (d) The pH of the underlying treatment agent (d) was measured to obtain pH = 0.4 (25 c), and then the copper foil of the material to be treated was impregnated for 3 minutes on the surface of the treatment agent (temperature: 25 Å). Comparative Example 1 In this comparative example, it was prepared by adding oxidizing agent (D) and anion (Ε), and adding 1 part by weight of oxidized hydrogen peroxide (active ingredient 3〇%) to deionized water. 7 parts other than the portion of the underlying treatment agent (e) which is composed of the underlying treatment agent (a). The pH of the bottom treatment agent (e) is measured to obtain ρ Η = 0.33 (25 ΐ). Medium (temperature: 25. 〇, the copper box of the treated material is impregnated with 3 322497 33 201132803 minutes of surface treatment. Comparative Example 2 In this comparative example: bis aqueous liquid "_4D", solid-shaped two-pointed rubber ( The first industrial music (stock) system 'product name young workers p % ♦ degree 2 dip ' ρ Η = 8 · 5) 10 parts by weight, adding deionized water 79. 7 The amount of the mixture is 3 旦, the knives are added as the acid (C) nitric acid (the active ingredient is 60%) • the parts by weight, and the anionic surfactant (8) is not added, and the underlying treatment agent (a) is composed of the underlying treatment agent. (〇. The bottom treatment agent was measured (pH of Ο, pH=2.9 (25 ° C) was obtained. Then, in the above treatment agent (temperature · 25 C), the surface of the copper foil of the material to be treated was dipped for 3 minutes. Comparative Example 3 Using the underlayer treatment agent (a), the surface treatment of the Ni foil of the material to be treated was immersed for 10 minutes in the treatment agent (temperature: 25 ° C). Comparative Example 4 In this comparative example, : The bottom treatment agent (g) which is composed of the same as the treatment agent (a), except for the addition of the acid (C). The pH of the undertreatment agent (g) is measured to obtain a pH of 3. 4 (25 t) 0 followed by In the above treatment agent (temperature: 25.0), the surface of the material to be treated was dipped for 3 minutes. Comparative Example 5 Using the underlying treatment agent (a), metal copper pigs were immersed in the treatment agent. After 3 minutes, the above treatment step (6) is not washed and (?) heated and dried (l〇〇t, 5 minutes, hot air baking) Surface treatment. 322497 34 201132803 Comparative Example 6 After performing the above treatment steps to (4) water washing, in a blackening treatment bath (containing sodium sulfite 30 g / L, sodium phosphate 12 water and 10 g / L, the aqueous solution of sodium hydroxide 15 g / L), the copper foil was immersed for 3 minutes at a treatment temperature of 90 ° C. After that, it was washed with water in a hot air oven, 1 〇 0. € heat drying for 5 minutes to make a blackening treatment Sample 2. Evaluation of the underlying coated steel material The evaluation of the underlying coated copper material obtained in Examples 1 to 5 and Comparative Example 1 was carried out as follows. (1) Evaluation of arithmetic mean surface roughness of the surface of the copper material and film thickness measurement of the underlying film. Samples in which the underlying film copper material obtained in Examples 1 to 5 was embedded in the % oxygen resin were used. Microscope (magnification: 1 〇〇〇〇) observed the wearing surface of the sample, and estimated the arithmetic mean surface roughness Ra of the surface of the metal material with the underlying film metal material, and it was found that Ra of each sample was 〇·50 //m or less, and confirm that the surface roughness change ARa of the metal material before and after the treatment is less than 20am. Fig. 3 is a view showing a copper circuit portion in which a single-sided copper circuit is formed into an epoxy resin sheet, and Fig. 4 is a view showing a copper circuit portion in which a single-sided copper circuit having an underlying film obtained in Example 4 is formed into an epoxy resin sheet. Cross-section photo. As a result, it was confirmed that the circuit portion formed a uniform thickness of 1, the underlying film, and the copper circuit. [The outer layer of the UX does not form the underlying film. Further, the thickness of the underlayer film was measured from the cross section. The results are shown in Table i. (2) Analysis of the film structure of the underlying film 35 322497 201132803 The underlying film-coated copper material prepared in the first embodiment and the comparative example 5 was subjected to the depth direction analysis of the film by XPS under the following conditions, and the XPS analyzer was used. The analysis software installed in the medium calculates the content ratio of the elements shown below by theory. Fig. 5 shows the results obtained in Example 1, and Fig. 6 shows the results obtained in Comparative Example 5. &lt;XPS depth direction analysis> Device: ESCA850 manufactured by Shimadzu Corporation (issued): X-ray: Mg-K α measured area; approx. 50 mm2 field of measurement · Cls, 〇ls, Nls, Cu2p, FIs, Fc2p sputtering Time: 6 minutes (Si 〇 2 conversion oscillating speed 60 nm / min) For the iron element, the X-ray analysis was carried out under the following conditions, and the iron content in the sputum was measured by the calibration line method (g/m 2 ) . Using the obtained value, the element content other than the iron element obtained by the above XPS analysis (the atomic and film thickness measurement results, the iron element content (atomic %) is estimated. &lt;fluorescence X-ray analysis> Apparatus: ZSX~primus ( Science system): Rh, Ka, 30kV-100mA measured area, 10 mm § It is confirmed from Fig. 5 that the underlying film obtained in Example 1 is 'in the measured depth, fluorine element and derived from oxidant ( D) The iron element is below the detection limit (signal-to-noise ratio is below 2), and sister, because the use of fluorescent X-ray analysis to determine the iron content in the sputum is also the detection limit (0·003g/m2) In the following, it is considered to be composed of the carbon element and the element of the olefinic rubber of the organic resin (A) which is derived from the water-soluble organic resin (A). The steel is made of ginseng and is derived from the metal to be treated. The % of the copper element of the material, the surface has a rate of 3, and the surface of the first time of the splash time has 6 original dips of 1 to 2 atomic %. The latter, by the 笫β country, in the depth of measurement, ' In the same manner as in Example 1 of the underlying film organic resin (A) obtained in Comparative Example 5, the detection originated from The water-soluble element, the copper element derived from the carbon element derived from the treated ethylene-olefin rubber, and the iron atom of the nitrogen element (8). The source and the self-oxidizing agent are the atomic ^ time of 1 second. The surface was detected, and the iron content in the content rate was 〇η9 9 by the (4) optical X-ray analysis method, and the film obtained was 0·5 atom g/lfl2. The result of estimating the iron element content was found to be 14 atom%. The content of the content is 1 second on the surface of the splash time. (3) The adhesion table is 3 to 4 atom%. In the example; | s Q r The layer of the film steel is compared with the age of 6 and the bottom is made. In the case of a glass cloth substrate having a thickness of about 1 〇〇/Zm, the epoxy resin is made into an industrial (stock) system, trade name; GEA-679N), and the inside of the #3 is broken inside the epoxy resin sheet. The coarse tread of the copper foil faces and the laminate is heated at a temperature of 180 Ϊ, a pressure of 45 kgf/cm 2 , and a heating time of 1 hour, followed by a laminate of a metal material—epoxy resin. &lt;One-time adhesion test&gt; The above-mentioned laminated structure material was cut into a width of 1 cm, and a portion of the metal material with the underlying film which was not subsequently adhered was vertically oriented while the glass cloth substrate epoxy resin sheet was fixed. The peeling test was carried out in a direction of 9 degrees, and the peel strength of 37 322497 201132803 was measured. &lt;Heat-resistant secondary adhesion test&gt; The above-mentioned laminated member was cut into a width of 1 cm, heated in a furnace at 275 ° C for 1 minute, and then left at room temperature for 30 minutes, and then subjected to the same adhesion as once. Peel test, peel strength was measured. &lt;Moisture-resistant secondary adhesion test&gt; The above-mentioned laminated structure was cut into a width of 1 cm, and heated in a furnace at 121 ° C, 2 atm, and 100% relative humidity for 1 hour, after which the temperature was lowered to the chamber. After the temperature was removed, the water vapor was removed, and the 90-degree peeling test was performed in the same manner as the primary adhesion, and the peel strength was measured. &lt;Acid resistance secondary adhesion test&gt; The above-mentioned laminated structure was cut into a width of 1 cm, and immersed in a 1 M hydrochloric acid aqueous solution at 25 ° C for 15 minutes, and then washed at room temperature for 30 seconds to remove water vapor. The 90-degree peeling test was performed in the same manner as the primary adhesion, and the peel strength was measured. &lt;Secondary test of the second test&gt; The above-mentioned laminated structure was cut into a width of 1 cm, and immersed in a 1 M sodium hydroxide aqueous solution at 25 ° C for 15 minutes, and then washed at room temperature for 30 seconds. After the moisture was removed, a 90-degree peeling test was performed in the same manner as the primary adhesion, and the peel strength was measured. [Evaluation Criteria] If the peel strength is below 0.4 kgf/cm, it is evaluated as poor adhesion. The results obtained are shown in Table 1 below. 38 322497 201132803 [Table 1] Laminated structure Metal material Bottom treatment agent Film thickness (^m) Then strength (kgf/cm)

由表1可知並確認,使用本發明之底層處理劑依本發 明之底層處理方法製得之本發明附有底層被膜之鋼材料 (實施例1至3、5) ’與環氧樹脂積層而作成本發明之積層 構材時,顯示銅材料與環氧樹脂之間有優異之接著性,尤 其在南溫下有優異之接著性。 相對於此’將作為氧化劑之鐵(丨1丨)離子以過氧化氫 來取代之比較例1,雖然1次接著性、耐濕2次接著性、 耐酸2次接著性、耐鹼2次接著性良好,但確認耐熱2次 接著性却差。 不含陰離子系界面活性劑(B)之比較例2,被處理材是 使用Ni箱之比較例3,不添加酸(c)之比較例*均確認沒 有析出被膜’任何之接著強度皆差。 不進行水洗之被膜中確認含有鐵元素之比較例5,任 何之接著強度均差。 印刷配線基板之接著底層處理而廣泛使用黑化處理 s 39 322497 201132803 之比較例6,雖然1次接著性、耐鹼2次接著性為良好者, 但確認耐熱2次接著性、耐濕2次接著性、耐酸2次接著 性却差。 [產業上之可能利用] 本發明的底層處理劑’不只是適用於背景技術中記载 的印刷配線板等之中銅材料與樹脂的接著,在各種銅材料 上藉由塗布法、積層接著法、射出成形接著法等之手法形 成熱硬化性樹脂之情形,也是有用的底層處理劑。 【圖式簡單說明】 第1圖表示本發明之積層構材模式的截面圖。 第2圖表示本發明之印刷配線基板的結構模式的截面 圖。 第3圖是在單面銅電路形成環氧樹脂板之銅電路部截 面照片。 ,第4圖是實施例4所得之附有底層被膜的單面銅電路 形成環氧樹脂板之銅電路部截面照片。 第5圖是有關實施例5自己析出被膜的xps深度方向 分析結果。 第6圖是有關比較例5自己析出被膜的xps深度方向 分析結果。 【主要元件符號說明】 1 積層構材 2 銅材料 3 底層被膜 4 熱硬化樹脂材料層 40 322497It can be seen from Table 1 that the steel material (Examples 1 to 3, 5) of the present invention obtained by the underlayer treatment method of the present invention, which is obtained by the underlayer treatment method of the present invention, is laminated with an epoxy resin. When the laminated member of the present invention is used, it exhibits excellent adhesion between the copper material and the epoxy resin, and particularly excellent adhesion at south temperature. In Comparative Example 1 in which iron as an oxidizing agent was replaced with hydrogen peroxide, the primary adhesion, the wet resistance secondary adhesion, the acid resistance secondary adhesion, and the alkali resistance were repeated twice. The sex was good, but it was confirmed that the heat resistance was poor. In Comparative Example 2, in which the anionic surfactant (B) was not contained, the material to be treated was Comparative Example 3 using a Ni box, and Comparative Example * in which no acid (c) was added was confirmed to have no precipitation of the film. Comparative Example 5 containing iron was confirmed in the film which was not washed with water, and any of the subsequent strengths were inferior. In Comparative Example 6 in which the blackening treatment s 39 322497 201132803 was used in the subsequent processing of the printed wiring board, the primary adhesion and the alkali resistance were good. However, the heat resistance was confirmed to be 2 times and the humidity was 2 times. Subsequent and acid-resistant secondary adhesions are poor. [Industrial Applicability] The underlayer treatment agent of the present invention is applied not only to the copper material and the resin in the printed wiring board or the like described in the background art, but also to various copper materials by a coating method or a laminate method. A method of forming a thermosetting resin by a method such as injection molding followed by a method, and is also a useful underlayer treatment agent. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a laminated material pattern of the present invention. Fig. 2 is a cross-sectional view showing a structural mode of a printed wiring board of the present invention. Fig. 3 is a photograph of a cross section of a copper circuit portion in which a single-sided copper circuit is formed into an epoxy resin sheet. Fig. 4 is a photograph showing a cross section of a copper circuit portion in which an epoxy resin sheet is formed by a single-sided copper circuit having a primer film obtained in Example 4. Fig. 5 is a graph showing the results of the xps depth direction analysis of the film deposited by itself in Example 5. Fig. 6 is a graph showing the results of the xps depth direction analysis of the film of Comparative Example 5 itself. [Explanation of main component symbols] 1 Laminated material 2 Copper material 3 Underlayer film 4 Thermosetting resin material layer 40 322497

Claims (1)

201132803 七、申請專利範圍: 1. 一種銅材料之底層處理方法,其特徵為具有下述步驟: 應用步驟:將銅材料與由含有有機樹脂(A)、陰離 子界面活性劑(B)、酸(C)以及作為氧化劑(D)之鐵(111) 離子且pH在3以下之水性液所成的水性底層處理劑接 觸之步驟; 水洗步驟:將經由前述應用步驟而於銅材料上形成 的底層處理被膜進行水洗之步驟;與 乾燥步驟:經前述水洗步驟後之底層處理被膜進行 乾燥的步驟。 2. 如申請專利範圍第1項所述之底層處理方法,其中,有 機樹脂(A)是彈性體。 3. 如申請專利範圍第1或2項所述之底層處理方法,其 中,陰離子系界面活性劑(B)是選自烷基苯磺酸鹽、烷 基萘磺酸鹽、烷基二苯基醚二磺酸鹽、烷磺酸鹽中1 種以上,合計之含量為500至3000 ppm。 4. 如申請專利範圍第1至3項中任一項所述之底層處理方 法,其復含有在25°C,與離子強度0. 5M之鐵(III)離 子的第一錯體安定度係數/3 ! -Fe(III) 為5以上的陰離子 供給源(E)。 5. 如申請專利範圍第1至4項中任一項所述之底層處理方 法,其中,水性底層處理劑為復含有1至1000 ppm之 銅離子(F)。 6. 如申請專利範圍第1至5項中任一項所述之底層處理方 s 322497 201132803 法,其中,銅材料為印刺配線基板用材料。 7· —種附著底層處理被膜之銅材料’係經由申請專利範圍 第1至6項中任一項所述之底層處理方法而得者。 8.如申請專利範圍第7項所述之附著底層處理被膜之銅 材料,其中,底層處理被膜中銅元素之比率為0.1至 10原子%,底層處理被膜中鐵元素含量為0. 003 g/m2 以下。 9·如申請專利範圍第7或8項所述之附著底層處理被膜之 銅材料,其中,相對於底層處理前之銅材料表面粗糙度 (Ra。)的底層處理後之銅材料表面粗糙度(Rai)的變化 △ Ra在0. 5从m以下。 10. —種積層構材,含有申請專利範圍第7至9項中任一項 所述之附著底層處理被膜之銅材料,與設置在底層處理 被膜上之樹脂層。 11. 一種印刷配線基板’其具有j至1〇〇層的下述結構,其 中’所述結構係在銅配線電路之絕緣樹脂層中,只在銅 電路表面形成申請專利_第7至9項中任-項所述之 底層處理被膜’在上述底層處理被膜表面及未形成銅配 線電路之上述絕緣樹月旨層表面,形成絕緣樹脂層的結 構。 12. 種銅材料用水性底層處理劑,其特徵係:含有有機樹 脂(A)、陰離子界面活性劑(B)、酸(C)以及作為氧化劑 (D)之鐵ΠΠ)離子’且PH在3以下的水性液。 13·如Uij範圍第丨2項所述之銅材料用水性底層處理 2 322497 201132803 ' 劑,其中,有機樹脂(Α)是彈性體。 14. 如申請專利範圍第12或13項所述之銅材料用水性底層 處理劑,其中,陰離子系界面活性劑(B)是選自烷基苯 磺酸鹽、烷基萘磺酸鹽、烷基二苯基醚二磺酸鹽、烷磺 酸鹽中1種以上,合計之含量為500至3000 ppm。 15. 如申請專利範圍第12至14項中任一項所述之銅材料用 水性底層處理劑,其復含有在25°C,與離子強度0. 5M 之鐵(III)離子之第一錯體安定度係數⑴為5以 上的陰離子供給源(E)。 16. 如申請專利範圍第12至15項中任一項所述之銅材料用 水性底層處理劑,其復含有1至1000 ppm之銅離子(F)。 17. 如申請專利範圍第12至16項中任一項所述之銅材料用 水性底層處理劑,其係在印刷配線基板之材料中使用。 s 3 322497201132803 VII. Patent application scope: 1. A method for treating the underlying material of copper material, which has the following steps: Application steps: using copper material with organic resin (A), anionic surfactant (B), acid ( C) a step of contacting the aqueous underlayer treatment agent formed by the aqueous solution of the iron (111) ion of the oxidant (D) and having a pH of 3 or less; a water washing step: treating the underlayer formed on the copper material via the aforementioned application step a step of performing water washing on the film; and a drying step: a step of drying the film by the underlayer treatment after the water washing step. 2. The underlayer treatment method according to claim 1, wherein the organic resin (A) is an elastomer. 3. The underlayer treatment method according to claim 1 or 2, wherein the anionic surfactant (B) is selected from the group consisting of alkylbenzenesulfonates, alkylnaphthalenesulfonates, alkyldiphenyls One or more of the ether disulfonate and the alkanesulfonate are contained in a total amount of from 500 to 3,000 ppm. 4. The underlayer treatment method according to any one of claims 1 to 3, which further comprises a first wrong body stability coefficient of iron (III) ions at 25 ° C and an ion intensity of 0.5 M. /3 ! -Fe(III) is an anion supply source (E) of 5 or more. 5. The underlayer treatment method according to any one of claims 1 to 4, wherein the aqueous underlayer treatment agent is a composite of 1 to 1000 ppm of copper ions (F). 6. The method of the underlying treatment method of s 322497 to 201132803, wherein the copper material is a material for a printed wiring board. A copper material to which an underlying treatment film is attached is obtained by the underlayer treatment method according to any one of claims 1 to 6. 8. 003 g/ The content of the copper element in the underlying treated film is 0.1 to 10 atom%, and the content of the iron element in the underlying film is 0. 003 g/, as described in claim 7, wherein the ratio of the copper element in the underlying film is 0.1 to 10 atom%. Below m2. 9. The copper material to which the underlying treated film is attached as described in claim 7 or 8, wherein the surface roughness of the copper material after the underlying treatment with respect to the surface roughness (Ra.) of the copper material before the underlayer treatment ( 5的以下以下。 The variation of Ra Ra) Δ Ra at 0.5 or less from m. A laminated material comprising the copper material to which the underlying film is attached as described in any one of claims 7 to 9 and the resin layer provided on the underlying film. A printed wiring board having the following structure of a j to 1 , layer, wherein the structure is in an insulating resin layer of a copper wiring circuit, and only a patent application is formed on the surface of the copper circuit _ 7 to 9 The underlayer processing film described in the above-mentioned item is characterized in that the surface of the film is processed on the surface of the underlayer and the surface of the insulating layer of the copper wiring circuit is not formed to form an insulating resin layer. 12. An aqueous base treatment agent for a copper material, characterized by comprising an organic resin (A), an anionic surfactant (B), an acid (C), and an iron oxide as an oxidant (D) ion and having a pH of 3 The following aqueous solution. 13. The aqueous base treatment of copper material as described in item 2 of Uij, 2 322497 201132803 ', wherein the organic resin (Α) is an elastomer. 14. The aqueous base treatment agent for copper materials according to claim 12, wherein the anionic surfactant (B) is selected from the group consisting of alkylbenzenesulfonates, alkylnaphthalenesulfonates, and alkane. One or more of the diphenyl ether disulfonate and the alkanesulfonate are contained in a total amount of from 500 to 3,000 ppm. The first error of the iron (III) ion with an ionic strength of 0. 5M, at 25 ° C, with an aqueous base treatment agent for copper material according to any one of claims 12 to 14 The body stability coefficient (1) is an anion supply source (E) of 5 or more. The aqueous base treatment agent for copper materials according to any one of claims 12 to 15, which contains 1 to 1000 ppm of copper ions (F). The aqueous base treatment agent for copper materials according to any one of claims 12 to 16, which is used in a material of a printed wiring board. s 3 322497
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