201114477 六、發明說明： 【發明所屬之技術領域】 本發明係關於浸潰型分離膜裝置之洗淨方法、及浸潰型 分離膜裝置之洗淨系統。 【先前技術】 .用於各種原水之過濾的過濾膜，過濾精度優良、且設置 空間小即可，運轉管理簡單。由於該等原因，過遽膜可使 用於各種過濾裝置。特別是浸潰型分離膜裝置，其省空間 性高，對高濁度之原水之過渡強。因此，浸潰型分離膜裝 置近年之採用增加。但，由於此浸潰型分離膜裝置隨著過 濾之繼續，原水中之除去對象物質會附著於膜表面，藉此 而閉塞孔。因此，浸潰型分離膜裝置具有過滤性能逐漸下 降，最終以至無法過濾之問題。因此，為維持過濾性能， 通常進行氣體洗淨或逆壓水洗淨。氣體洗淨係將空氣等之 氣體以氣泡導入過滤膜之原水側之方法。逆壓水洗淨係在 與過濾方向相反之方向，從濾液側使濾水或清激水等之逆 壓水洗淨媒體噴出，從而除去膜之過濾面之附著物的方 法。 又，已知為提南洗淨效果，在逆壓水洗淨媒體中添加具 ’ 氧化作用之次氯酸納的方法。又，已知的還有使用臭氧水 ' 進仃圯壓水洗淨之方法（例如，專利文獻1)或以臭氧化加壓 空氣進行逆壓水洗淨之方法（例如，專利文獻2)。再者，已 知的還有將臭氧化空氣以氣泡注入過濾膜之原水侧之方 法。（例如’專利文獻3)。 143415.doc 201114477 [專利文獻1]曰本特開平4_31〇22〇號公報 [專利文獻2]曰本特開昭60-58222號公報 [專利文獻3]曰本特開昭63_427〇3號公報 【發明内容】 [發明所欲解決之問題] 為除去膜表面之附著物，以維持較高膜過濾通量，將氣 體洗淨時之流4設定為多乃為有效。X，延長氣體洗淨時 間亦為有效。但’該等之方法會使氣體洗淨時之過濾膜之 振動增加。該等方法具有由於對過濾膜施加負冑故使過 滤膜之壽命縮短之問題。又，使用次氣酸鈉或臭氧水等之 氧化劑之逆壓水洗淨方法、將空氣或臭氧化空氣以氣泡導 入過濾膜之原水側之方法等，均在提高洗淨效果上為有 效。但，該等方法存在因原水之濁質等條件的不同，而不 一定可獲得充分穩定之膜過濾通量的情況。 例如，作為分離膜裝置，使用將膜放入箱體中之加壓型 分離膜裝置之情況下，可以藥液填滿箱體中。因此，不管 附著於膜表面之污染物質為無機物或有機物，分離膜裝置 皆可較簡單地獲得充分之洗淨效果，在浸潰型分離膜 裝置中’輕淨分離料置亦可考慮向職潰槽填充藥液 之方法。該方法之問題在於需要大量之藥液量、操作亦複 雜。如上所述，可將附著於浸潰型分離膜裝置之膜表面之 污染物質簡便且球實地洗淨之洗淨方法是為人所企盼的。 本發明係為解決上述問題而Μ者，其目的在於提供一 種可將附著於分離膜裝置之膜表面之污染物質簡便、且確 143415.doc 201114477 實地洗淨的浸潰型分離膜裝置之洗淨方法、及浸 膜裝置之洗淨系統。 離 [解決問題之技術手段] 此處，本發明者等發現：在分離膜裝置浸漬於填滿被過 濾液之槽内的狀態下，藉由從過濾水側注入藥液而進行洗 淨，而使除去對象物質溶解，可無需大量之藥品，而可以 簡單之操作將分離膜裝置之膜表面之除去對象物洗淨。本 發明者等發現：在除去對象物牢固附著於膜上之情況時， 將成為藥液難於浸透至膜厚方向外表面之狀態。特別在無 機物所造成之膜污染之情況時，顯然由於無機物在膜厚方 向析出至外膜面側，而發生污染。無機物一旦析出，則所 析出之無機物將牢固地固著於膜上。該種情況下，在將分 離膜裝置以設置於槽内之狀態從逆壓水洗淨側注入藥液之 方法中，即使以較低之膜間壓差注入藥液，也僅會從相對 污染程度較低之部位流出藥液至膜外表面，而無法將分離 膜裝置正體充分洗淨。又，即使快速地流動藥液，亦無法 獲传用於使除去對象物與藥液反應之充分反應時間。因 此，發明者等專心研究的結果發現，藥液注入時之膜間壓 差’根據膜之堵塞程度存在最適當之值。若以最適當之膜 間壓差注入藥液，則為除去附著於膜外表面之除去對象 物’可使藥液遍及分離膜裝置整體。即，膜相對污染較 少’且過濾被過濾液時之膜間壓差較低時，若不以較高之 膜間壓差注入藥液’則藥液無法到達至污染位置。另一方 面’藥液注入時之膜間壓差過高之情況時，藥液流動過 143415.doc 201114477 快，而無法獲得用於除去除去對象物之充分反應時間。反 之，過濾被過濾液時之膜間壓差高之情況時，即使以較低 之膜間壓差注入藥液，亦可使藥液到達至污染位置。具體 而。，本發明者等發現：將過濾洗淨前之被過濾液時之膜 間壓差5又為X(kPa)，將藥液注入時之初期膜間壓差設為 Y(kPa)之情況時，宜以-0.375X+30SYS0.5X+80之關係成 立的方式注入藥液。惟’ X滿足〇<χ<8〇。 如此，兔·根據膜表面之污染情況，施以適當之膜間壓差 而注入藥液’則藥液即使對於除去對象物牢固之部份，亦 可到達至膜厚方向外表面。又，該方法為使除去對象物與 藥液反應’可給予除去對象物與藥液接觸之適當之接觸時 間。因此’該方法可將附著於分離膜裝置整體之膜表面之 除去對象物有效地洗落》 因此，本發明之浸潰型分離膜裝置之洗淨方法，其特徵 在於：其係將浸潰型分離膜裝置設置於填滿被過濾液之槽 内而進行被過濾液之分離膜者’且將洗淨開始前之膜間壓 差設為X(kPa) ’將從分離膜裝置之過濾水側注入藥液時之 初期膜間壓差設為Y(kPa)之情況時，施以滿足下述式（1)之 初期膜間壓差，而注入藥液。 -0.375X+30SYS0.5X+80 …⑴ 惟，X滿足0<X<80。 根據上述浸潰型分離膜裝置之洗淨方法，由於將分離膜 裝置以設置於槽内的狀態，從分離膜裝置之過濾水側注入 藥液，藉此而進行洗淨’故無需大量之藥品，可以簡單之 143415.doc -6 · 201114477 操作將分離膜裝置之膜表面之除去對象物洗淨。又 滿 足-0.375X+30SYS0.5X+80之關係的方式 々八！入樂液，藉此 即使析出之除去對象物為牢固之部份，藥液亦可浸透至膜 厚方向外表面。又’可獲制於使除去對象物與藥液反應 之充分之時間。藉此’可除去分離膜裝置整體之除去對^ 物。如上所述’可將附著於分離膜裝置 、衣夏炙膜表面之巧染物 質簡便且確實地，即藥液量少且迅速地洗淨。 又，在本發明之浸潰型分離膜裝置之洗淨方法中，X宜 為1〇<Χ<50。藉由X<50,不易發生洗淨不均一。又藉= 1 〇<X，洗淨頻度變高而可抑制洗淨成本增加。 又，在本發明之浸潰型分離膜裝置之洗淨方法中，藥液 宜為1 wt%以上之濃度之酸性液體，藥液之注入量宜為每1 m2分離膜裝置之膜面積為卜3 L。藉此，附著於分離膜裝 置之膜表面之除去對象物在為無機物之情況時，可充分洗 淨。 又，在本發明之浸潰型分離膜裝置之洗淨方法中，分離 膜裝置係利用分離膜活性污泥法者之情況時，酸性液體宜 為有機酸。 本發明之浸潰型分離膜裝置之洗淨系統，其特徵在於： 其係將浸潰型分離膜裝置設置於填滿被過濾液之槽内，進 行被過濾液之分離膜者，其具備：貯存藥液之藥液槽；將 樂液槽内之樂液從過滤水側對分離膜裝置注入之逆壓水洗 淨栗’及調整注入於分離膜裝置之藥液之壓力的壓力調整 機構。 143415.doc 201114477 +根據上述之浸潰型分離膜裝置之洗淨系統，由於以將分 離膜袭置設置於槽内的狀態從分離膜裝置之㈣水侧注入 藥液，藉此進行洗淨，故無需大量之藥品，可以簡單之操 作將分離膜裝置之膜表面的除去對象物洗淨◎又，以壓力 調整機構調整藥液之壓力，藉此可以最適當之膜間壓差注 入藥液。 又，在本發明之浸潰型分離膜裝置之洗淨系統中，壓力 調整機構宜基於洗淨開始前之膜間壓差，調整藥液之壓 力。藉由基於洗淨開始前之膜間壓差，可根據膜之污染狀 態’進一步最適當地調整藥液之壓力。 又，在本發明之浸漬型分離膜裝置之洗淨系統中，壓力 調整機構宜以將洗淨開始前之膜間壓差設為x(kPa)，將逆 壓水洗淨泵注入藥液時之初期膜間壓差設為Y(kPa)之情況 時，以滿足下述式（1)之初期膜間壓差注入藥液之方式，進 行壓力之調整。 -〇.375X+30SYS〇.5X+80 ...⑴ 惟，X滿足〇<X<80。 如此，以滿足-0.375Χ+30$Υ$〇.5χ+80的關係的方式注 入藥液，藉此，即使析出之除去對象物為牢固之部份，藥 液亦可浸透至膜厚方向外表面。又，可獲得用於使除去對 象物與藥液反應之充分之時間。藉此，可除去分離膜裝置 整體之除去對象物。藉由上述，可將附著於分離膜裝置之 膜表面之污染物質簡單、且確實地，即藥液量少且迅速地 洗淨。 143415.doc 201114477 [發明效果] 根據本發明，可將附著於分離膜裝置之膜表面之污染物 質簡單且確實地洗淨。 【實施方式】 以下，就本發明之浸潰型分離膜裝置之洗淨方法及洗淨 系統之較佳實施形態’參照圖式進行說明。 圖1係顯示浸潰型分離膜系統丄00之一例之方塊圖，該浸 潰型分離膜系統1〇〇係組入有進行本發明之實施形態之浸 潰型分離膜裝置之洗淨方法的洗淨系統2〇〇。浸潰型分離 膜系統100具備有浸潰槽2、分離膜裝置3、散氣裝置4、鼓 風機5、過濾水流量計6、吸引泵7、過濾水槽8、排水閥 12、及洗淨系統200。 被過濾水1係連續性或間歇性被導入浸潰槽2内。在浸潰 槽2内，浸潰有組入分離膜之模組的分離膜裝置3。該分離 膜裝置3可過濾、處理被過攄水1 ^散氣裝置4係配置於浸潰 槽2内之分離膜裝置3之下方。散氣裝置4可將由鼓風機5供 給之氣體（空氣）氣泡狀散氣。又’排水閥丨2安裝於浸潰槽 2。吸引泵7經由過濾水流量計6連接於分離膜裝置3。吸引 泵7具有吸引過濾水之功能。吸引泵7將汲起之處理水作為 過濾水9，貯存於過濾水槽8。過濾水流量計6測量以吸引 粟7没起之過濾、水之流量。 洗淨系統200具備有逆壓水洗淨泵10、流量計丨丨、藥液 槽13、壓差計14、壓力調整閥15、及控制部16。塵差計14 連接於過濾水流量計6與分離膜裝置3之間。又，藥液槽工3 143415.doc 201114477 經由藥液注入線L而連接在壓差計14與過濾水流量計6之 間。在藥液注入線L，從藥液槽13側起依次連接有逆壓水 洗淨泵10、流量計11、及壓力調整閥15。又，控制部1 6連 接於逆壓水洗淨泵1 〇、流量計11、壓差計丨4、及壓力調整 閥1 5。控制部16亦可進一步連接於過濾水流量計6、吸引 泵7 '及鼓風機5，亦可進行逆壓水洗淨運轉用之控制及過 濾運轉用之控制。再者，亦可將逆壓水洗淨運轉用之控制 與過渡運轉用之控制部分開。洗淨系統2〇〇係具有藉由 逆壓水洗淨將分離膜裝置3之膜面之除去對象物除去的功 能。除去對象物可為無機物，亦可為有機物，但無機物更 佳0 藥液槽13係貯存用於進行逆壓水洗淨之藥液之槽。貯存 於藥液槽13之藥液在除去對象物為無機物之情況時，宜為 1 wt%以上之濃度之酸性液體。又藥液在除去對象物之 .、.、機物為鐵歧之情料，宜使用乙二酸，無機物為辦之 情况時，宜使用鹽酸或硝酸。再者，分離膜裂置為利❹ 離膜活性污泥法者之情況時，宜使用藉由微生物而可分解 之乙二酸或檸檬酸之有機酸。藥液在除去對象物為有機物 之情況時，宜為次氯酸鈉。 洗淨系10具有經由藥液注入線L，將藥液槽㈣ 之樂液向分離膜裝置3注入之功能。 逆墨水洗淨㈣所輸送之藥液之 有則里攸 15具有調整供給藥液 ％。差力調整閥 過德時之膜嶋w二:塵差計14具有測量 逆C水洗淨時之膜間壓差的功能。 143415.doc 201114477 控制部16具彳取得來自塵差計14、流量計11之測定值之 功此。控制部16具有藉由對逆壓水洗淨泵1〇輸出控制信 號使逆壓水洗淨泵1 〇運轉的功能。控制部〗6具有對壓力 調整閥15輸出控制信號，進行麼力調整之功能。又，控制 ^ 16具有基於取得之測定值，控制壓力調整閥^以使膜間 壓差成為最適當之值的功能。或者，控制部16具有基於取 得之測定值，控制逆壓水洗淨泵1〇之輸出以使膜間壓差成 為最適當之值的功能，如此，控制部16、壓力調整閥b、 及逆壓水洗淨泵10作為壓力調整機構而起作用。又，控制 部16具有在逆壓水洗淨時停止吸引泵7，在逆壓水洗淨完 成夺再-人啟動吸引系7之功能。又，控制部】6在進行逆壓 水洗淨期間宜停止鼓風機5。其原因係藥液會停留於膜外 表面附近之緣故。 ^此處’本發明者等發現在除去對象物牢固地附著於分離 膜裝置3之膜之情況時’將成為藥液難以浸透至膜厚方向 ♦面之狀·％。本發明者等發現特別在無機物所造成之膜 3染之情況時，因無機物在膜厚方向析出至外膜面側，由 此而會發生膜污染。又’發現由於析出之無機物非常牢 固’故-旦無機物析出至膜面，在該析出部份，將成為藥 液難以浸透至膜厚方向外表面之狀態。再者，在如此之情 況:’將分離膜裝置3以設置於浸潰槽2内之狀態從逆壓: 洗淨側注入藥液的方法，即使以低膜間壓差注入藥液，藥 液亦僅從相對污染程度較低之地方流出至二 法充分洗淨分離膜裝置3整體。因此’經本發明者等專： 143415.doc 201114477 研究，結果發現只要施與更高之膜間壓差注入即可，且發 現有必要給予用於使除去對象物與藥液反應之適當之接觸 時間。本發明者等發現：作為膜間壓差之最適當之值，將 過濾時之洗淨開始前之膜間壓差設為x(kPa)，將逆壓水洗 淨時之藥液注入時之初期膜間壓差設為Y(kPa)之情況時， 宜為-0.375X+30SYS0.5X + 80之關係成立之值。惟，乂滿 足 〇<X<80 〇 控制部16於逆壓水洗淨時，係控制壓力調整閥15或逆壓 水洗淨系10以使滿足-〇.375Χ+3〇$γ$〇 5χ+8〇之關係。具 體而言’控制部1 6基於從壓差計丨4所輸出之測量值，取得 逆壓水洗淨前之膜間壓差X。且，控制部16基於膜間壓差 x ’算出適當之初期膜間壓差γ ’並控制壓力調整閥丨5或 逆壓水洗淨泵1 0。该膜間壓差X係使用開始本案之洗淨前 之值。具體而言，較逆壓水洗淨開始之時點，宜為丨小時 之前1分鐘之膜間壓差值，10分鐘之前丨分鐘更佳。又，為 抑制洗淨不均一之發生，X之值宜為χ<5〇，χ<4〇更佳。 又’為抑制因洗淨頻度增高從而增加洗淨成本，X之值宜 為10<Χ，20<χ更佳。控制部16宜將利用逆壓水洗淨之分 離膜裝置3之洗淨進行1〜90分鐘。 就使用如此而構成之浸潰型分離臈系統1〇〇及本實施形 態之洗淨系統2 0 0之情況的運轉方法進行說明。例如，過 渡係以任意設定之過濾時間實施，過濾時，被過渡水1向 浸潰槽2連續性或間歇性被導入，經由分離膜裝置3以吸引 泵7吸引，藉此而獲得過濾水9。過濾水9作為處理水貯存 143415.doc 12 201114477 於過濾水槽8。 洗淨系統200係過濾時間經過預先設定之時間後，以任 意之設定時間實施逆壓水洗淨。具體而言，控制部16將吸 引泵7及鼓風機5停止。又，控制部丨6參照逆壓水洗淨開始 前之膜間壓差之值X(kPa)，算出成為目標之初期膜間壓差 之值Y(kPa)。成為目標之γ之值只要滿足·〇 375χ+3〇$ 0.5X+80，即可將任意之值設定成目標值。控制部i6控制 壓力調整閥15或逆壓水洗淨泵1〇，以使膜間壓差成為目標 值。逆壓水洗淨時，藉由逆壓水洗淨泵1〇將過濾水9朝與 過濾時之相反方向，向分離膜裝置3導入。 或，控制部16亦可預先監測過濾時之膜間壓差，在膜間 壓差到達特定之閾值時，進行逆壓水洗淨。 此處，若繼續進行洗淨，則分離膜裝置之膜之除去對象 物將被逐漸除去。因此，將壓力調整閥15之調整位置及逆 壓水洗淨泵10之輸出預先固定之情況時，隨著洗淨時間之 增長，膜間壓差逐漸下降。控制部16決定壓力調整閥15之 調整位置及逆壓水洗淨泵10之輸出，以使在藥液注入開始 時初期膜間壓差成為目標值後，洗淨中可將該狀態維持下 去。該情況，膜間壓差將逐漸下降。或者，控制部16亦可 持續控制壓力調整閥15及逆壓水洗淨泵10，以使在洗淨中 膜間壓差為固定。控制部16若滿足初期膜間壓差Y(kpa) 為-0.375X+30SYS0.5X+80之關係，則可進行任意之控制 方法。 此處’就設為Y(kPa)而定義之「初期膜間壓差」進行說 143415.doc •13· 201114477 明。控制壓力調整閥i 5及逆壓水洗淨泵丨0以使滿足控制部 16設定之初期膜間壓差時，有兩種控制方法。根據第一種 方法’控制部16以滿足設定之初期膜間壓差的方式預先算 出壓力調整閥，15之調整位置及逆壓水洗淨泵1〇之輸出，根 據算出結果’使壓力調整閥15及逆壓水洗淨泵1〇啟動而注 入藥液。該情況’藥液注入開始時之膜間壓差成為「初期 膜間壓差」。根據第二種方法，控制部16在藥液注入開始 時以任意之控制值使壓力調整閥丨5及逆壓水洗淨泵丨〇啟 動’參照藥液注入開始後之膜間壓差，而調整壓力調整閥 15及逆壓水洗淨泵1〇之控制值。控制部16在藥液注入開始 後之膜間壓差過低，無法滿足-0,375χ+3〇$γ$〇5χ+8()之 條件之情況時，調節壓力調整閥丨5及逆壓水洗淨泵丨〇之控 制值以使增大膜間壓差而滿足條件。該情況，調整完成時 點之膜間壓差成為「初期膜間壓差」。又，控制部丨6在藥 液注入開始後之膜間壓差過高，而無法滿足_0.375X+30$ YS0.5X+80之條件之情況時，調整壓力調整閥15及逆壓水 洗淨泵1 0之控制值以使降低膜間壓差而滿足條件。該情 況’調整完成時點之膜間壓差成為「初期膜間壓差」。再 者’即使預先算出壓力調整閥15及逆壓水洗淨栗1〇之控制 值之情形，在由於未滿足條件而予以調整之情況時，調整 完成時點之膜間壓差成為「初期膜間壓差」。 如上所述，根據本實施形態之浸潰型分離臈裝置之洗淨 方法及洗淨系統200，由於藉由將分離膜裝置3以設置於槽 2内之狀態從分離膜裝置3之過濾水側注入藥液而進行洗 143415.doc -14- 201114477 淨故可無而大量之藥品，以簡單之操作將分離膜裝置3 之除去對象物洗淨。又’藉由以滿；ι·ο.375Χ+ 30SYSG.5X+8G之關係的方式注人藥液即使析出之除去 料物為牢固之部份，藥液亦可浸透至膜厚方向外表面。 又’可獲得用於使除去對象物與藥液反應之充分之時間。 藉此，可除去分離膜裝置整體之除去對㈣。根據上述， 可將附著於分離膜裝置之膜表面之污染物質簡便且確實 地’即藥液量少且迅速地洗淨。 又，本實施形態之浸潰型分離膜裝置之洗淨系統2〇〇， 藉由以壓力調整閥Η或逆壓水洗淨泵1〇調整藥液之壓力， 可以最適當之膜間壓差注入藥液。 又’在本實施形態之浸潰型分離膜裝置之洗淨系統2〇〇 中’壓力調整閥15或逆壓水洗淨泵1〇等之壓力調整機構可 基於洗淨開始前之膜間壓差，調整藥液之壓力。藉由基於 洗淨開始前之膜間壓差，可根據膜之污染狀態，進一步最 適當地調整藥液之壓力。 [實施例1] 使用圖1所示之浸潰型分離膜系統1 〇〇，以從河川表流水 獲得清潔水為目的實施運轉。在分離膜裝置3之膜模組 中’使用聚偏二氟乙烯製中空絲MF(精密過濾）膜，其公稱 孔徑0.1 μηι、有效膜面積25 m2。膜模組之外形尺寸為直 徑180 mm、長度2000 mm(圓筒型）。浸潰槽2為直徑200 mm、高度2500 mm之圓筒狀物。 隨著過濾時間之經過’各分離膜裝置之膜間壓差上升成 143415.doc -15· 201114477 各種膜間壓差。對於該等之分離膜裝置，即使使用次氯酸 納洗淨’膜間壓差亦不會下降。此時，膜面若變色成褐 色’進行EDX解析，則可知附著有鐵。此時，作為藥液槽 内之藥液，調整50 L之1.5%乙二酸水溶液。使分離膜裝置 以浸潰於槽内之狀態，藉由洗淨系統從過濾水側注入藥 液。此時之藥液注入量為每1 m2膜面積為2 L。 洗淨系統根據洗淨開始前之過濾時之膜間壓差值 X(kPa) ’藉由壓力調整閥調整藥液注入時之初期膜間壓差 值Y(kPa)。膜間壓差值X係使用洗淨開始前之1分鐘之值。 具體而言，如表1所示，以實施例丨〜丨丨所示之條件進行逆 壓水洗淨，以比較例1〜8所示之條件進行逆壓水洗淨。在 圖2，顯示繪製實施例及比較例之乂與γ之值。在圖2揭示 有顯示Υ=-0.375Χ+30之線圖L1。又，在圖2，揭示有顯示 Y=0.5X+80之線圖L2。如圖2所示，實施例卜丨丨均滿足 -0.375X+30SYS0.5X+80之條件。另一方面，比較例卜8 均不滿足-0·375Χ+3〇$γ$0·5Χ+8〇之條件。實施例卜11及 比較例卜8之洗淨進行至藥液槽内無藥液為止。即，從藥 液注入開始至藥液槽内無藥液為止之時間為洗淨時間。 又，洗淨中之壓力調整閥之調整位置及逆壓水洗淨栗之輸 出從藥液注入開始為固定…壓力調整閥及逆壓水洗淨 泵之控制值以滿足成為目標之γ值的方式預先算出。因 此，藥液注人開始時之膜間壓差為「初期膜間塵差」。 以實㈣Μ及比較例丨〜8之條件分別進行洗淨後以 各分離膜裝置進行再次過濾、。測量此時之過料之膜間壓 143415.doc -16* 201114477 差z(kPa)e又，亦測量洗淨時間，即藥液注人時間。測量 結果在表1顯示。X ’基於該測量結果，算出各實施例及 ::較例：洗淨恢復率(%) Q洗淨恢復率可根據ι〇〇χ(χ_ζ)/χ 算出。算出結果在幻顯示。從表i可得知實施例w均為 6〇%以上之高洗淨恢復率。特別是以川…以上之實施例 3〜11，均為79。/。以上之高洗淨恢復率。另一方面比較例 1〜8儘管使用與實施例W1相同量之藥液，皆為較鳩更 低之低洗淨恢復率。對γ值高且以高壓注人藥液之實施例 1、3、6、10與比較例2、4、6、8進行比較。實施例卜 1 〇與比較例2、4、6、8之藥液注入時之膜間壓差之 差值不大’但比較例2、4、6、8之藥液注入時間較實施例 1、3、6、1〇大幅地減少。藉此，可理解於比較例2、*、 6 8之|f况’藥液過快速地流冑’藥液與除去對象物未充 分反應就從分離膜裝置流出。另一方面，可理解在實施例 1 3、6、10中，藥液與除去對象物充分地反應。如此， 儘管為相同藥液量’藥液與除去對象物之反應充分進行， 可理解貫施例之洗淨效率比比較例大幅提升。根據上述， 可理解藉由滿足-0.375X+3〇SYs〇.5X+8〇之條件，無需大 直之藥液’亦可獲得高洗淨恢復率。 143415.doc •17· 201114477 [表i] 洗淨前膜 間壓差 [kPa] 藥液注入時 膜間壓差 [kPa] 洗淨後 膜間壓 差 fkPal 洗淨 恢復 率 『％1 注入時 間 [min] 實施例1 10 80 3 70 2 實施例2 11 30 4 64 5 實施例3 30 86 4 87 2 實施例4 31 24 6 81 5 實施例5 34 50 7 79 4 實施例6 48 95 5 90 2 實施例7 51 15 5 90 10 實施例8 61 70 4 93 7 實施例9 63 40 7 89 7 實施例10 73 110 7 90 3 實施例11 69 8 9 87 15 4較你jl 10 23 9 10 3 比較例2 11 89 9 18 0.5 比較彳歹1j3 29 15 25 14 7 比較例4 30 100 26 13 0.5 比i交彳歹丨j 5 49 10 45 8 10 比i交彳歹j6 51 110 46 10 0.5 比i交/ί歹ιΪ7 72 2 67 7 20 比較例8 73 120 68 7 0.5 【圖式簡單說明】 圖1係顯示本發明之實施形態之利用浸潰型分離膜裝置 的洗淨系統之一例之方塊圖；及 圖2係繪製實施例及比較例之X與Y之值之圖。 【主要元件符號說明】 1 被過濾水 2 浸潰槽 3 分離膜裝置 4 散氣裝置 5 鼓風機 6 膜過慮水流量計 7 吸引泵 143415.doc •18· 201114477 8 過遽水槽 9 過遽水 10 逆壓水洗淨泵 11 逆壓水洗淨水流量計 12 排水閥 13 藥液槽 14 壓差計 15 壓力調整閥 16 控制部 100 浸潰型分離膜系統 200 洗淨糸統 L 藥液注入線 143415.doc - 19-[Technical Field] The present invention relates to a method for cleaning an impregnated separation membrane device and a cleaning system for an impregnated separation membrane device. [Prior Art] The filter membrane used for the filtration of various raw waters has excellent filtration precision, small installation space, and simple operation management. For these reasons, the ruthenium film can be used in various filtration devices. In particular, the impregnation type separation membrane device has high space saving and strong transition to high turbidity raw water. Therefore, the use of the impregnated separation membrane device has increased in recent years. However, since the impregnation type separation membrane device continues the filtration, the substance to be removed in the raw water adheres to the surface of the membrane, thereby closing the pores. Therefore, the impregnation type separation membrane device has a problem that the filtration performance is gradually lowered, and eventually it is impossible to filter. Therefore, in order to maintain the filtration performance, gas washing or back pressure water washing is usually performed. The gas cleaning is a method in which a gas such as air is introduced into the raw water side of the filtration membrane as a bubble. The back pressure water washing is performed by ejecting a counter-pressure washing medium such as filtered water or clear water from the filtrate side in a direction opposite to the filtration direction to remove the deposit on the filtration surface of the membrane. Further, it is known that the washing effect of the South is added, and a method of oxidizing sodium hypochlorite is added to the back pressure water washing medium. Further, a method of washing with ozonized water (for example, Patent Document 1) or a method of performing back pressure water washing with ozonized pressurized air (for example, Patent Document 2) is known. Further, a method of injecting ozonized air into the raw water side of the filtration membrane by a bubble is also known. (For example, 'Patent Document 3'). 143 特 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 DISCLOSURE OF THE INVENTION [Problems to be Solved by the Invention] In order to remove the deposit on the surface of the film, it is effective to maintain a high membrane filtration flux and set the flow 4 when the gas is washed. X, prolonged gas cleaning time is also effective. However, these methods increase the vibration of the filter membrane when the gas is washed. These methods have the problem of shortening the life of the filter membrane by applying a negative enthalpy to the filter membrane. Further, a method of washing with a reverse pressure water using an oxidizing agent such as sodium hypochlorite or ozone water, a method of introducing air or ozonized air into a raw water side of a filtration membrane, and the like are effective for improving the washing effect. However, these methods differ depending on conditions such as the turbidity of the raw water, and it is not always possible to obtain a sufficiently stable membrane filtration flux. For example, in the case of using a pressurized separation membrane device in which a membrane is placed in a tank as a separation membrane device, the chemical can be filled in the tank. Therefore, regardless of whether the contaminant attached to the surface of the membrane is inorganic or organic, the separation membrane device can obtain a sufficient cleaning effect in a relatively simple manner, and in the impregnated separation membrane device, the light separation material can also be considered to be in a position to collapse. The method of filling the tank with the liquid. The problem with this method is that it requires a large amount of liquid and the operation is complicated. As described above, a cleaning method in which the contaminant adhering to the surface of the membrane of the impregnation type separation membrane device is easily and ball-washed can be easily desired. The present invention has been made to solve the above problems, and an object of the present invention is to provide a dipping type separation membrane device capable of easily cleaning a surface of a film attached to a separation membrane device and cleaning it in a solid manner. Method, and washing system of the film immersing device. [Means for Solving the Problem] Here, the inventors of the present invention found that the separation membrane device is washed by injecting a chemical solution from the filtered water side while being immersed in a tank filled with the filtrate. By dissolving the substance to be removed, it is possible to wash the object to be removed on the film surface of the separation membrane device by a simple operation without requiring a large amount of the drug. The inventors have found that when the object to be removed is firmly adhered to the film, it is difficult for the chemical solution to penetrate into the outer surface of the film thickness direction. Particularly in the case of film contamination caused by an inorganic substance, it is apparent that contamination occurs due to precipitation of inorganic substances in the film thickness direction to the outer film surface side. Once the inorganic substance is precipitated, the precipitated inorganic substance will be firmly fixed to the film. In this case, in the method of injecting the chemical solution from the reverse pressure water washing side in a state where the separation membrane device is installed in the tank, even if the chemical liquid is injected at a low pressure difference between the membranes, only the relative contamination is caused. The lower portion of the solution flows out of the drug solution to the outer surface of the membrane, and the body of the separation membrane device cannot be sufficiently washed. Further, even if the chemical liquid is quickly flowed, the sufficient reaction time for reacting the object to be removed with the chemical solution cannot be transmitted. Therefore, as a result of intensive studies by the inventors, it has been found that the inter-membrane pressure difference ' during the injection of the drug solution has the most appropriate value depending on the degree of clogging of the film. When the chemical solution is injected with the most appropriate inter-membrane pressure difference, the removal of the object adhering to the outer surface of the film can remove the entire drug separation device. That is, when the film is relatively less contaminated and the pressure difference between the membranes when the filtrate is filtered is low, the chemical solution cannot reach the contaminated position unless the chemical solution is injected at a high pressure difference between the membranes. On the other hand, when the pressure difference between the membranes at the time of injection of the drug solution is too high, the drug solution flows through 143415.doc 201114477, and sufficient reaction time for removing the object to be removed cannot be obtained. On the other hand, when the pressure difference between the membranes when the filtrate is filtered is high, the chemical solution can be brought to the contaminated position even if the chemical solution is injected at a low pressure difference between the membranes. Specifically. The inventors of the present invention found that when the filtration liquid before filtration is filtered, the inter-membrane pressure difference 5 is again X (kPa), and when the initial membrane pressure difference at the time of injecting the chemical solution is Y (kPa) It is advisable to inject the liquid medicine in such a manner that the relationship of -0.375X+30SYS0.5X+80 is established. Only 'X meets 〇<χ<8〇. In this way, the rabbit can inject the drug solution according to the contamination of the surface of the film by applying an appropriate pressure difference between the membranes, and the drug solution can reach the outer surface of the film thickness direction even if it is strong to remove the object. Further, in this method, the object to be removed is reacted with the drug solution, and the appropriate contact time between the object to be removed and the drug solution can be given. Therefore, this method can effectively remove the object to be removed attached to the film surface of the entire separation membrane device. Therefore, the method for cleaning the impregnation type separation membrane device of the present invention is characterized in that it is impregnated. The separation membrane device is installed in a tank filled with the filtrate to carry out the separation membrane of the filtrate, and the pressure difference between the membranes before the start of the washing is set to X (kPa)' from the filtered water side of the separation membrane device. When the initial pressure difference between the membranes when the chemical solution is injected is set to Y (kPa), the initial pressure difference between the membranes of the following formula (1) is satisfied, and the chemical solution is injected. -0.375X+30SYS0.5X+80 (1) However, X satisfies 0 < X < 80. According to the cleaning method of the above-described impregnation type separation membrane device, since the separation membrane device is placed in the tank, the chemical liquid is injected from the filtered water side of the separation membrane device, thereby washing, so that a large amount of medicine is not required. It is simple to 143415.doc -6 · 201114477 The operation removes the object to be removed from the membrane surface of the separation membrane device. And the way to meet the relationship of -0.375X+30SYS0.5X+80 By entering the liquid, the liquid can be soaked to the outer surface of the film thickness direction even if the object to be removed is a firm portion. Further, it is possible to obtain a sufficient time for reacting the object to be removed with the drug solution. Thereby, the removal of the entire separation membrane device can be removed. As described above, it is possible to easily and reliably remove the dyed material adhering to the surface of the separation membrane device or the coating film, that is, the amount of the chemical liquid is small and is quickly washed. Further, in the cleaning method of the impregnation type separation membrane device of the present invention, X is preferably 1 Å < Χ < 50. With X < 50, washing unevenness is less likely to occur. By l = 1 〇 < X, the cleaning frequency becomes high and the washing cost can be suppressed from increasing. Further, in the cleaning method of the impregnated separation membrane device of the present invention, the chemical liquid is preferably an acidic liquid having a concentration of 1 wt% or more, and the injection amount of the chemical liquid is preferably a membrane area per 1 m 2 of the separation membrane device. 3 L. Thereby, the object to be removed adhering to the film surface of the separation membrane device can be sufficiently washed when it is an inorganic substance. Further, in the cleaning method of the impregnation type separation membrane apparatus of the present invention, when the separation membrane apparatus is a separation membrane activated sludge method, the acidic liquid is preferably an organic acid. The cleaning system of the impregnation type separation membrane device according to the present invention is characterized in that the impregnation type separation membrane device is installed in a tank filled with the filtrate to form a separation membrane of the filtrate, and the method includes: The liquid medicine tank for storing the chemical liquid; the pressure-removing mechanism for adjusting the pressure of the chemical liquid injected into the separation membrane device from the filter water side to the reverse pressure water washing of the separation membrane device. 143415.doc 201114477 + The cleaning system of the above-described impregnation type separation membrane device is washed by injecting a chemical solution from the water side of the (4) water separation membrane device in a state where the separation membrane is placed in the tank. Therefore, it is not necessary to use a large amount of medicine, and the object to be removed on the surface of the membrane of the separation membrane device can be easily washed. ◎ Further, the pressure of the chemical solution can be adjusted by the pressure adjusting mechanism, whereby the chemical liquid can be injected with the most appropriate pressure difference between the membranes. Further, in the washing system of the impregnation type separation membrane device of the present invention, it is preferable that the pressure adjusting means adjusts the pressure of the chemical liquid based on the pressure difference between the membranes before the start of washing. The pressure of the chemical solution can be further appropriately adjusted according to the contamination state of the film by the difference in the pressure between the films before the start of the washing. Further, in the washing system of the immersion type separation membrane device of the present invention, the pressure adjusting means preferably sets the pressure difference between the membranes before the start of washing to x (kPa), and when the back pressure water washing pump is injected into the liquid medicine. When the initial pressure difference between the membranes is set to Y (kPa), the pressure is adjusted so as to satisfy the initial membrane pressure difference of the following formula (1). -〇.375X+30SYS〇.5X+80 (1) However, X satisfies 〇<X<80. In this way, the chemical solution is injected so as to satisfy the relationship of -0.375 Χ + 30 Υ 〇 〇 χ χ 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 析 析 析surface. Further, a sufficient time for reacting the removed object with the chemical solution can be obtained. Thereby, the object to be removed as a whole of the separation membrane device can be removed. According to the above, the contaminant adhering to the surface of the membrane of the separation membrane device can be easily and reliably washed, i.e., the amount of the chemical solution is small and rapidly washed. 143415.doc 201114477 [Effect of the Invention] According to the present invention, the contaminant adhering to the surface of the membrane of the separation membrane device can be easily and surely washed. [Embodiment] Hereinafter, a preferred embodiment of the cleaning method and the cleaning system of the impregnation type separation membrane device of the present invention will be described with reference to the drawings. 1 is a block diagram showing an example of an impregnation type separation membrane system 丄00 in which a cleaning method of an impregnation type separation membrane device according to an embodiment of the present invention is incorporated. Wash the system 2〇〇. The impregnation type separation membrane system 100 includes an impregnation tank 2, a separation membrane device 3, a diffuser 4, a blower 5, a filtered water flow meter 6, a suction pump 7, a filtered water tank 8, a drain valve 12, and a washing system 200. . The filtered water 1 is introduced into the impregnation tank 2 continuously or intermittently. In the impregnation tank 2, the separation membrane device 3 of the module incorporated in the separation membrane is impregnated. The separation membrane device 3 can filter and treat the separated membrane unit 3 disposed in the impregnation tank 2 by the wetting water 1 ^ diffusing device 4 . The air diffusing device 4 can disperse the gas (air) supplied from the air blower 5 in a bubble shape. Further, the drain valve 丨 2 is attached to the dipping tank 2. The suction pump 7 is connected to the separation membrane device 3 via a filtered water flow meter 6. The suction pump 7 has a function of attracting filtered water. The suction pump 7 stores the treated water as the filtered water 9 and stores it in the filtered water tank 8. The filtered water flow meter 6 measures to attract the filtration and water flow of the millet. The cleaning system 200 includes a back pressure water washing pump 10, a flow meter, a chemical tank 13, a differential pressure gauge 14, a pressure regulating valve 15, and a control unit 16. The dust gauge 14 is connected between the filtered water flow meter 6 and the separation membrane device 3. Further, the chemical tanker 3 143415.doc 201114477 is connected between the differential pressure gauge 14 and the filtered water flow meter 6 via the chemical injection line L. In the chemical injection line L, a back pressure water washing pump 10, a flow meter 11, and a pressure regulating valve 15 are connected in this order from the side of the chemical solution tank 13. Further, the control unit 16 is connected to the back pressure water washing pump 1 〇, the flow meter 11, the differential pressure gauge 丨4, and the pressure regulating valve 15. The control unit 16 may be further connected to the filtered water flow meter 6, the suction pump 7' and the blower 5, and may be controlled for the back pressure water washing operation and for the filtering operation. Further, the control for the back pressure water washing operation and the control portion for the transition operation may be opened. The cleaning system 2 has a function of removing the object to be removed from the film surface of the separation membrane device 3 by back pressure water washing. The object to be removed may be an inorganic substance or an organic substance, but the inorganic substance is more preferable. The liquid medicine tank 13 is a tank for storing a chemical liquid for performing reverse pressure water washing. The chemical liquid stored in the chemical solution tank 13 is preferably an acidic liquid having a concentration of 1 wt% or more when the object to be removed is an inorganic substance. In addition, when the chemical liquid is removed from the object, and the machine is irony, it is preferable to use oxalic acid. When the inorganic substance is used, hydrochloric acid or nitric acid should be used. Further, in the case where the separation membrane is cleaved into a membrane-activated sludge method, an organic acid of oxalic acid or citric acid which is decomposable by microorganisms is preferably used. When the chemical solution is removed as an organic substance, it is preferably sodium hypochlorite. The cleaning system 10 has a function of injecting the liquid solution of the chemical solution tank (4) into the separation membrane device 3 via the chemical injection line L. In the case of the reversed ink washing (4), the liquid medicine to be transported has the adjusted liquid supply %. Differential adjustment valve Membrane 嶋 w2: The dust gauge 14 has the function of measuring the pressure difference between membranes in the reverse C water washing. 143415.doc 201114477 The control unit 16 has the function of obtaining the measured values from the dust meter 14 and the flow meter 11. The control unit 16 has a function of operating the back pressure water washing pump 1 藉 by outputting a control signal to the back pressure water washing pump 1 . The control unit 6 has a function of outputting a control signal to the pressure regulating valve 15 and performing force adjustment. Further, the control ^ 16 has a function of controlling the pressure regulating valve so that the pressure difference between the membranes becomes an optimum value based on the acquired measured value. Alternatively, the control unit 16 has a function of controlling the output of the back pressure water washing pump 1〇 based on the acquired measured value so that the pressure difference between the membranes becomes an optimum value. Thus, the control unit 16, the pressure regulating valve b, and the counter The pressurized water washing pump 10 functions as a pressure adjusting mechanism. Further, the control unit 16 has a function of stopping the suction pump 7 when the back pressure water is washed, and washing the back pressure water to complete the suction-man-starting suction system 7. Further, the control unit 6 should stop the blower 5 during the back pressure water washing. The reason is that the liquid stays near the outer surface of the membrane. In the case where the object to be removed is firmly adhered to the film of the separation membrane device 3, the inventors have found that it is difficult for the chemical solution to permeate into the film thickness direction ♦ surface. The present inventors have found that when the film 3 is caused by an inorganic substance, the inorganic substance is deposited on the outer film surface side in the film thickness direction, whereby film contamination occurs. Further, it has been found that the inorganic substance precipitated is very strong. Therefore, the inorganic substance is deposited on the film surface, and the precipitated portion is in a state in which it is difficult for the liquid to penetrate into the outer surface of the film thickness direction. In the case where the separation membrane device 3 is placed in the impregnation tank 2, the method of injecting the chemical solution from the back pressure: the cleaning side, even if the drug solution is injected with a low membrane pressure difference, the drug solution It is also only discharged from the place where the degree of contamination is relatively low to the second method to sufficiently clean the entire separation membrane device 3. Therefore, it has been found by the inventors of the present invention: 143415.doc 201114477 that it is only necessary to apply a higher inter-membrane pressure difference injection, and it is found that it is necessary to give an appropriate contact time for reacting the removed object with the drug solution. . The present inventors have found that, as an optimum value of the pressure difference between the membranes, the pressure difference between membranes before the start of washing at the time of filtration is x (kPa), and when the liquid medicine is washed in the back pressure water, When the initial film-to-membrane pressure difference is set to Y (kPa), it is preferable that the relationship of -0.375X+30SYS0.5X + 80 is established. However, when the X<X<80 〇 control unit 16 is washed in the back pressure water, the pressure regulating valve 15 or the back pressure water washing system 10 is controlled so as to satisfy -〇.375Χ+3〇$γ$〇 5χ+8〇 relationship. Specifically, the control unit 16 obtains the inter-membrane pressure difference X before the back pressure water washing based on the measured value output from the differential pressure gauge 丨4. Further, the control unit 16 calculates an appropriate initial inter-membrane pressure difference γ ' based on the inter-membrane pressure difference x ' and controls the pressure regulating valve 丨 5 or the back pressure water washing pump 10 . The inter-membrane pressure difference X is the value before the start of washing in this case. Specifically, it is preferable that the pressure difference between the start of the back pressure water washing is 1 minute before the hour, and the minute difference is better before 10 minutes. Further, in order to suppress the occurrence of washing unevenness, the value of X is preferably χ < 5 〇, χ < 4 〇 is more preferable. Further, in order to suppress the increase in the cleaning cost due to the increase in the cleaning frequency, the value of X is preferably 10 < Χ, 20 < χ better. The control unit 16 preferably washes the separation membrane device 3 washed with back pressure water for 1 to 90 minutes. An operation method in the case of using the above-described impregnation type separation enthalpy system 1〇〇 and the cleaning system 2000 of the present embodiment will be described. For example, the transition is carried out at an arbitrarily set filtration time, and the transition water 1 is introduced into the immersion tank 2 continuously or intermittently during the filtration, and is sucked by the suction pump 7 via the separation membrane device 3, thereby obtaining filtered water 9 . Filtered water 9 is used as a treated water storage 143415.doc 12 201114477 in the filtered water tank 8. The cleaning system 200 is subjected to back pressure water washing for a predetermined period of time after a predetermined period of time has elapsed. Specifically, the control unit 16 stops the suction pump 7 and the blower 5. Further, the control unit 6 refers to the value X (kPa) of the inter-membrane pressure difference before the start of the back pressure water washing, and calculates the value Y (kPa) which is the target initial film pressure difference. The value of the target γ can be set to the target value as long as it satisfies 〇 χ 375 χ + 3 〇 $ 0.5X + 80. The control unit i6 controls the pressure regulating valve 15 or the back pressure water washing pump 1 to make the pressure difference between the membranes a target value. When the counter-pressure water is washed, the filtered water 9 is supplied to the separation membrane device 3 in the opposite direction to the filtration by the back-pressure water washing pump 1 . Alternatively, the control unit 16 may monitor the pressure difference between the membranes during filtration in advance, and perform reverse pressure water washing when the pressure difference between the membranes reaches a certain threshold value. Here, if the washing is continued, the object to be removed from the membrane of the separation membrane device is gradually removed. Therefore, when the adjustment position of the pressure regulating valve 15 and the output of the reverse pressure water washing pump 10 are fixed in advance, the pressure difference between the membranes gradually decreases as the washing time increases. The control unit 16 determines the adjustment position of the pressure regulating valve 15 and the output of the back pressure water washing pump 10 so that the initial pressure difference between the membranes becomes a target value at the start of the injection of the chemical liquid, and the state can be maintained during the washing. In this case, the pressure difference between the membranes will gradually decrease. Alternatively, the control unit 16 may continuously control the pressure regulating valve 15 and the back pressure water washing pump 10 so that the pressure difference between the membranes during washing is fixed. When the control unit 16 satisfies the relationship that the initial inter-membrane pressure difference Y (kpa) is -0.375X + 30SYS0.5X + 80, any control method can be performed. Here, "the initial film-to-film pressure difference" defined as Y (kPa) is said to be 143415.doc •13· 201114477. When the pressure regulating valve i 5 and the back pressure water washing pump 丨 0 are controlled so as to satisfy the initial film-to-membrane pressure difference set by the control unit 16, there are two control methods. According to the first method, the control unit 16 preliminarily calculates the pressure adjustment valve, the adjustment position of 15 and the output of the back pressure water washing pump 1〇 so as to satisfy the set initial pressure difference between the membranes, and the pressure adjustment valve is calculated based on the calculation result. 15 and the back pressure water washing pump 1 〇 start to inject the liquid. In this case, the inter-membrane pressure difference at the start of the injection of the chemical liquid becomes "the initial inter-membrane pressure difference". According to the second method, the control unit 16 causes the pressure regulating valve 丨5 and the back pressure water washing pump 丨〇 to start the pressure difference between the membranes after the start of the reference chemical injection at an arbitrary control value at the start of the chemical injection. The control values of the pressure regulating valve 15 and the back pressure water washing pump 1 are adjusted. The control unit 16 adjusts the pressure regulating valve 丨5 and the back pressure water when the pressure difference between the membranes after the start of the chemical injection is too low to satisfy the condition of -0,375 χ + 3 〇 $ γ $ 〇 5 χ + 8 (). The control value of the pump 洗 is washed so as to increase the pressure difference between the membranes to satisfy the condition. In this case, the pressure difference between the membranes at the time of completion of the adjustment becomes "initial membrane pressure difference". Further, when the pressure difference between the membranes after the start of the chemical injection is too high, and the condition of the temperature of _0.375X+30$ YS0.5X+80 is not satisfied, the control unit 6 adjusts the pressure regulating valve 15 and the back pressure water washing. The control value of the net pump 10 is such that the pressure difference between the membranes is lowered to satisfy the condition. In this case, the inter-membrane pressure difference at the time of completion of the adjustment becomes "initial film-to-membrane pressure difference". In addition, even if the control values of the pressure regulating valve 15 and the back pressure water washing valve 1 are calculated in advance, if the condition is adjusted because the conditions are not satisfied, the pressure difference between the membranes at the time of the completion of the adjustment becomes "initial film space". Pressure difference." As described above, according to the cleaning method and the cleaning system 200 of the impregnation type separation crucible device of the present embodiment, the separation membrane device 3 is disposed from the filtration water side of the separation membrane device 3 in the state of being disposed in the tank 2. Injecting the chemical solution and washing it 143415.doc -14- 201114477 It is possible to clean the object to be removed of the separation membrane device 3 by a simple operation. Further, by injecting the relationship between the liquid, the ι·ο.375Χ+ 30SYSG.5X+8G, even if the precipitate is removed, the chemical solution can be saturated to the outer surface of the film thickness direction. Further, a sufficient time for reacting the object to be removed with the drug solution can be obtained. Thereby, the removal pair (4) of the entire separation membrane device can be removed. According to the above, the contaminant adhering to the surface of the membrane of the separation membrane device can be easily and reliably washed, i.e., the amount of the chemical liquid is small and rapidly washed. Further, in the cleaning system 2 of the impregnation type separation membrane apparatus of the present embodiment, the pressure of the chemical solution can be adjusted by the pressure adjustment valve or the back pressure water cleaning pump 1 to obtain the most appropriate pressure difference between the membranes. Inject the liquid. Further, in the cleaning system 2 of the impregnation type separation membrane device of the present embodiment, the pressure adjusting mechanism such as the pressure regulating valve 15 or the back pressure water washing pump 1 can be based on the intermembrane pressure before the start of washing. Poor, adjust the pressure of the liquid. The pressure of the chemical solution can be further appropriately adjusted according to the state of contamination of the membrane by the pressure difference between the membranes before the start of the washing. [Example 1] The operation was carried out for the purpose of obtaining clean water from river surface water using the impregnation type separation membrane system 1 图 shown in Fig. 1 . In the membrane module of the separation membrane device 3, a hollow fiber MF (precision filtration) membrane made of polyvinylidene fluoride was used, which had a nominal pore diameter of 0.1 μm and an effective membrane area of 25 m2. The outer dimensions of the membrane module are 180 mm in diameter and 2000 mm in length (cylindrical). The impregnation tank 2 is a cylinder having a diameter of 200 mm and a height of 2,500 mm. With the passage of the filtration time, the pressure difference between the membranes of each separation membrane device rises to 143415.doc -15· 201114477. With respect to these separation membrane devices, the pressure difference between the membranes was not lowered even if the sodium hypochlorite was used. At this time, if the film surface was discolored to brown color, it was found that iron was adhered by EDX analysis. At this time, as a chemical solution in the drug solution tank, 50 L of a 1.5% aqueous solution of oxalic acid was adjusted. The separation membrane device is impregnated into the tank, and the liquid is injected from the filtered water side by the washing system. At this time, the amount of the chemical solution injected was 2 L per 1 m 2 of the membrane area. The washing system adjusts the initial inter-membrane pressure difference value Y (kPa) at the time of chemical injection by the pressure adjusting valve based on the inter-membrane pressure difference X (kPa) ' at the time of filtration before the start of washing. The inter-membrane pressure difference X is a value one minute before the start of washing. Specifically, as shown in Table 1, the mixture was washed with back pressure water under the conditions shown in Examples 丨 to 丨丨, and subjected to back pressure water washing under the conditions shown in Comparative Examples 1 to 8. In Fig. 2, the values of 乂 and γ of the drawing examples and comparative examples are shown. Fig. 2 reveals a line graph L1 showing Υ = -0.375 Χ +30. Further, in Fig. 2, a line graph L2 showing Y = 0.5X + 80 is disclosed. As shown in Fig. 2, the dips of the examples all satisfy the condition of -0.375X+30SYS0.5X+80. On the other hand, the comparative example 8 does not satisfy the condition of -0.375Χ+3〇$γ$0·5Χ+8〇. The washing of Example 11 and Comparative Example 8 was carried out until there was no liquid in the drug solution tank. That is, the time from the start of the injection of the drug to the absence of the drug solution in the drug solution tank is the washing time. Further, the adjustment position of the pressure regulating valve in the washing and the output of the back pressure water washing valve are fixed from the injection of the chemical liquid... The control values of the pressure regulating valve and the back pressure water washing pump satisfy the target γ value. The method is calculated in advance. Therefore, the pressure difference between the membranes at the start of the injection of the chemical liquid is "the initial inter-membrane dust difference". The cells were washed separately under the conditions of the actual (4) Μ and the comparative examples ～8, and then filtered again by each separation membrane device. The inter-membrane pressure of the material at this time was measured. 143415.doc -16* 201114477 The difference z (kPa) e, also measured the washing time, that is, the injection time of the liquid. The measurement results are shown in Table 1. X ′ based on the measurement results, calculation of each example and :: comparison example: washing recovery rate (%) Q washing recovery rate can be calculated from ι〇〇χ(χ_ζ)/χ. The result is shown in the magic display. From Table i, it can be seen that Example w is a high wash recovery rate of 6% or more. In particular, in Examples 3 to 11 above, all of them were 79. /. The above high wash recovery rate. On the other hand, in Comparative Examples 1 to 8, the same amount of the chemical solution as in Example W1 was used, and the recovery rate was lower than that of the lower one. Examples 1, 3, 6, and 10, which have a high gamma value and are injected with a high pressure, are compared with Comparative Examples 2, 4, 6, and 8. The difference between the pressure difference between the membranes when the liquid medicines of the examples 1 and 4, 4, 6, and 8 were injected was not large, but the chemical injection time of the comparative examples 2, 4, 6, and 8 was compared with that of the first embodiment. , 3, 6, and 1〇 are greatly reduced. As a result, it can be understood that the chemical solution of the comparative example 2, *, and 6 is rapidly flowing, and the chemical solution is discharged from the separation membrane device without reacting sufficiently with the object to be removed. On the other hand, it is understood that in Examples 13, 6, and 10, the chemical solution sufficiently reacts with the object to be removed. As described above, although the reaction between the chemical solution and the object to be removed is sufficiently performed, it is understood that the cleaning efficiency of the embodiment is greatly improved as compared with the comparative example. From the above, it can be understood that a high washing recovery rate can be obtained by satisfying the condition of -0.375X + 3 〇 SYs 〇 5X + 8 〇 without the need for a straight liquid. 143415.doc •17· 201114477 [Table i] Pressure difference between membranes before washing [kPa] Pressure difference between membranes during drug injection [kPa] Pressure difference between membranes after washing fkPal Wash recovery rate "%1 injection time [ Min] Example 1 10 80 3 70 2 Example 2 11 30 4 64 5 Example 3 30 86 4 87 2 Example 4 31 24 6 81 5 Example 5 34 50 7 79 4 Example 6 48 95 5 90 2 Example 7 51 15 5 90 10 Example 8 61 70 4 93 7 Example 9 63 40 7 89 7 Example 10 73 110 7 90 3 Example 11 69 8 9 87 15 4 Compared with your jl 10 23 9 10 3 Example 2 11 89 9 18 0.5 Comparison 彳歹1j3 29 15 25 14 7 Comparative Example 4 30 100 26 13 0.5 Ratio i 彳歹丨 j 5 49 10 45 8 10 Ratio i 彳歹 j6 51 110 46 10 0.5 Ratio i交/ί歹ιΪ7 72 2 67 7 20 Comparative Example 8 73 120 68 7 0.5 [Brief Description of the Drawings] Fig. 1 is a block diagram showing an example of a washing system using an impregnation type separation membrane device according to an embodiment of the present invention. And FIG. 2 is a diagram plotting the values of X and Y of the examples and comparative examples. [Main component symbol description] 1 Filtered water 2 Immersion tank 3 Separation membrane unit 4 Air diffuser 5 Blower 6 Membrane water flow meter 7 Suction pump 143415.doc •18· 201114477 8 Over the water tank 9 Over the water 10 Reverse Pressurized water pump 11 Reverse pressure water washing water flow meter 12 Drain valve 13 Liquid tank 14 Differential pressure gauge 15 Pressure regulating valve 16 Control unit 100 Immersion type separation membrane system 200 Washing system L Liquid injection line 143415. Doc - 19-