TW201113246A - Method for preparing sulfonium salt and sulfonium salt prepared by the same - Google Patents

Method for preparing sulfonium salt and sulfonium salt prepared by the same Download PDF

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TW201113246A
TW201113246A TW099127597A TW99127597A TW201113246A TW 201113246 A TW201113246 A TW 201113246A TW 099127597 A TW099127597 A TW 099127597A TW 99127597 A TW99127597 A TW 99127597A TW 201113246 A TW201113246 A TW 201113246A
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group
reaction
formula
compound
salt
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TWI423951B (en
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Joon-Hee Han
Hyun-Sang Joo
Jin-Bong Shin
Jin-Ho Kim
Sung-Bo Ko
Sung-Jun Yoon
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Korea Kumho Petrochem Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C303/00Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
    • C07C303/32Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of salts of sulfonic acids
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/01Sulfonic acids
    • C07C309/02Sulfonic acids having sulfo groups bound to acyclic carbon atoms
    • C07C309/03Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
    • C07C309/07Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton
    • C07C309/12Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing esterified hydroxy groups bound to the carbon skeleton
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00Compounds containing elements of Groups 1 or 11 of the Periodic Table
    • C07F1/02Lithium compounds

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  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
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Abstract

There are provided a method for preparing a sulfonium salt and a sulfonium salt prepared by the method. The method for preparing a sulfonium salt includes a first step of adding a compound represented by formula (2) to a compound represented by formula (1) and subjecting the compounds to a trans-esterification reaction to produce a reaction intermediate; and a second step of adding an inorganic salt to the reaction intermediate and subjecting the compounds to a substitution reaction to produce a compound represented by the following formula (3).

Description

201113246 JSMlplf 六、發明說明: 【發明所屬之技術領域】 本發明關於銃鹽之製造方法及以該方法製造之毓 鹽。更具體言之,本發明關於銃鹽之製造方法’利用該方 法,可以經由簡化的製造製程,以高產率大量合成主要用 於製造產酸劑(acid generator)或其類似物的中間物的鎳 鹽;及以該方法製造之銃鹽。 【先前技術】 隨著時代的變遷,在使用光微影技術對半導體或其類 似物進行精加工之領域中,越來越需要解析度更高的光 阻。應此需求而開發出來的化學放大型光阻組成物 (chemically amplified type photoresist composition)含有產 酸劑。為了製造具有較高解析度及所需特性之抗蝕劑 (resist) ’到目前為止,已經發明了多種類型之產酸劑。 舉例而言,韓國專利申請案第10-2006-0104564號(下 文中稱為「專利文獻1」)揭露一種以下式(A)表示之產 知劑,作為用於化學放大型抗飯劑組成物中的產酸劑: [式A] A+ ''〇3S-CC〇2(CH2)n— 美,Χ為具有3至3G個碳料之單環或雙環烴 土 JX未經取代,或在所述環之—或多個位置經具有 個碳原子之絲、具有2至6個碳原子之稀基、具 6 201113246 JDDIipif 有2至6個碳原子之烷氧基或具有1至4個碳原子之全氟 燒基取代;Q1及Q2各獨立地表示氟原子或具有1至6個 石反原子之全I烧基,A表示有機相對離子(counteri〇n); 且η為1至12的整數。 專利文獻1亦揭露例如一種以下式(Β)表示之有機 化合物,作為製造產酸劑之中間物。具體言之,所述專利 文獻揭露一種藉由使下式(C)所示之醇化合物與下式(1)) 所示之羧酸化合物反應來製造式(Β)之酯化合物的方法·· [式Β] Q1 ~〇3S-CC〇2(CH2)n Q2201113246 JSMlplf VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method for producing a cerium salt and a cerium salt produced by the method. More specifically, the present invention relates to a method for producing a cerium salt. With this method, a large amount of nickel which is mainly used for the production of an intermediate of an acid generator or the like can be synthesized in a high yield through a simplified manufacturing process. a salt; and a cerium salt produced by the method. [Prior Art] With the change of the times, in the field of finishing semiconductors or the like using photolithography, there is an increasing demand for higher resolution photoresists. A chemically amplified type photoresist composition developed in response to this demand contains an acid generator. In order to produce a resist having a higher resolution and a desired property, various types of acid generators have been invented so far. For example, Korean Patent Application No. 10-2006-0104564 (hereinafter referred to as "Patent Document 1") discloses a known agent represented by the following formula (A) as a chemically amplified anti-rice composition The acid generator in the formula: [Formula A] A+ ''〇3S-CC〇2(CH2)n—beautiful, Χ is a monocyclic or bicyclic hydrocarbon soil JX having 3 to 3G carbon materials unsubstituted, or Said ring or a plurality of positions through a filament having one carbon atom, a dilute group having 2 to 6 carbon atoms, having an alkoxy group having 2 to 6 carbon atoms or having 1 to 4 carbon atoms in 201113246 JDDIipif The perfluoroalkyl group is substituted; Q1 and Q2 each independently represent a fluorine atom or an all-I group having 1 to 6 stone anti-atoms, A represents an organic counter ion; and η is an integer of 1 to 12. . Patent Document 1 also discloses, for example, an organic compound represented by the following formula (Β) as an intermediate for producing an acid generator. Specifically, the patent document discloses a method for producing an ester compound of the formula (?) by reacting an alcohol compound represented by the following formula (C) with a carboxylic acid compound represented by the following formula (1)). [ΒΒ] Q1 ~〇3S-CC〇2(CH2)n Q2

[式C] H〇-<CH2)n— [式D][Formula C] H〇-<CH2)n— [Formula D]

''O3S-CCO2H 〇2 ^^中’在式^至^中’又^^及^有與 上文關於式(A)所定義相同的含義;且M表示鋰(L 、、 鈉(Na)、鉀(κ)或銀(Ag)。''O3S-CCO2H 〇2 ^^' in '^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ , potassium (κ) or silver (Ag).

此處’式(D)是藉由用諸如NaOH之強鹼水解下式 (1)之化合物而獲得的羧酸形式之產物: X 201113246 [式l]Here, the formula (D) is a product of a carboxylic acid form obtained by hydrolyzing a compound of the formula (1) with a strong base such as NaOH: X 201113246 [Formula l]

其中Ri及R2各獨立地表示選自由以下構成之族群的 任一者:齒素原子、羥基、羧基、腈基、醛基、環氧基、 烷基、環烷基、雜環烷基、芳基及雜芳基;Wherein Ri and R2 each independently represent any one selected from the group consisting of a dentate atom, a hydroxyl group, a carboxyl group, a nitrile group, an aldehyde group, an epoxy group, an alkyl group, a cycloalkyl group, a heterocycloalkyl group, and an aromatic group. Base and heteroaryl;

Qi及Q2各獨立地表示選自由以下構成之族群的任一 者:氫原子、鹵素原子及全氟烷基;且 η為1至1〇的整數β 然而,式(D)的化合物是經由兩步驟反應獲得,且 f反應步驟之產物須經由各別純化過程分離出來。此外, 當自水溶液相中分離出在第一步驟反應後進行純化過程期 間產生的反應中間物時,反應中間物會附著於反應容器, 由此產生了產率明顯降低的問題,而這個問題在工業上是 不希望存在的。 、 ^韓國未經審查的專利申請案第10-2008-0099784號揭 ,關於有機化合物結晶及絲造方法祕明,且所述文獻 &出種使用多孔膜獲得結晶以增加第一步驟反應之產率 的方去。然而,在工業規模上使用此方法存在侷限性而 ^由於羧酸之溶解度不良,使得作為第二步驟反應之酯化 應的產率亦較低《亦存在產物粒子過小以致在純化過程 期間難以縣出所述粒子的問題。 【發明内容】 8 201113246 3DMlpif 本發明疋針對此專情況提出,而且本發明之目的在於 提供種製造疏鹽之方法,不同於習知的兩步驟反應方 法,所述方法使用較少的反應步驟數來增加用作產酸劑中 間物的銕鹽之產率,並且能夠進行大規模合成,無需在各 反應步驟藉由純化產物來進行分離。 本發明另一目的在於提供一種以上述錡鹽製造方法 製造的銃鹽。 【實施方式】 下文中,將詳細描述本發明,因此(一般熟習本發明所 屬領域技術者可以容易地實施本發明。然而,熟習此項技 術者應瞭解,本發明明確地包含各種修改,且本發明不欲 受本文所說明之例示性實施例的限制。 除非另作指示,否則本文使用的所有化合物或取代基 均可能未經取代或經取代。此處,術語「經取代 (substituted)」意謂所述化合物或取代基之氫原子經選自由 以下構成之族群的任一者取代:齒素原子、羥基、羧基、 腈基、氰基、醛基、環氧基、烷基、全氟烷基、羥烷基、 環烧基、雜環烧基、烧氧基、烯丙基、笨甲基、芳基、雜 芳基、其衍生物及其組合。 除非另作指示,否則本文使用的「鹵素原子(hal〇gen atom)」意謂選自由氟、氯、溴及蛾構成之族群的任一原子。 除非另作指示,否則本文使用的「全氟烧基 (perfhioroalkyl group )」意謂一部分或所有氫原子經氟二二 之「烧基(alkyl group)」。 201113246 3551 lpif 除非另作指示,否則本文使用的「雜環烷基 (heterocycloalkyl group)」或「雜芳基(heter〇aryi gr〇Up)」 意謂在-個環内含有i至3個選自由氮(N)、氧⑼、硫 (S)及磷(P)構成之族群的雜原子且環中·其他原子均為 碳原子之「環烷基(cycl〇alkyl gr〇up)」或「芳基(aryl group)」° 除非另作指示’否則本文使用的「烷基」意謂具有1 至30個碳原子之直鏈或分支鏈烷基;本文使用的「烯丙基 (allyl group)」意謂具有2至30個碳原子之直鏈或分支鏈 烯丙基;本文使用的「全氟烷基」意謂具有1至3〇個碳原 子之直鏈或分支鏈全氟烷基;本文使用的「環烷基」意謂 具有3至30個碳原子之環烷基;本文使用的「雜環烷基」 意謂具有2至30個碳原子之雜環烷基;且「芳基」意謂具 有6至30個碳原子之芳基。本文使用的r伸烷基(alkylene group)」意謂具有1至30個碳原子之直鏈或分支鏈伸烷 基,本文使用的「全氟伸统基(perfluoroalkylenegroup)」 意謂具有1至30個碳原子之直鏈或分支鏈全氟伸烧基;本 文使用的「伸環院基(cycloalkylene group)」意謂具有3 至30個碳原子之伸環烷基;本文使用的「伸雜環烷基 (heterocycloalkylene group)」意謂具有2至30個碳原子之 伸雜環烷基;且本文使用的「伸芳基(arylene group)」意 謂具有6至30個碳原子之伸芳基。 除非另作指示,否則本文使用的「降冰片基(norbomyl group)」意謂具有7至30個碳原子之單環或多環降冰片 201113246 基’且本文使用的金剛烧基(adamantylgr〇Up)」衰神 有10至30個碳原子之金剛烷基。 。月具 根據本發明之一實施例,提供一種製造銃鹽之方法 其中可以經由減少的反應步驟及簡化的製造製程以古丨y 製造出銃鹽。下文中,將說明所述製造銃鹽之方法了i率 與每一步驟都需要純化過程之習知方法不同,本 之疏鹽製造方法實際上是以-步反應進行,無需任何純化 過程。然而,為讀者方便起見,將分為第一步驟及第二 驟說明所述方法。 一’ 所述錡鹽製造方法包含以下步驟:第一步驟,將下式 (2)所示之化合物添加至下式(1)所示之化合物中並^ 所述化合物發生轉酯反應,以產生反應中間物 丨第一步 驟’將無機鹽添加至所述反應中間物中,並使所述化合物 發生取代反應,以產生下式(3)所示之化合物。 [式1]Qi and Q2 each independently represent any one selected from the group consisting of a hydrogen atom, a halogen atom, and a perfluoroalkyl group; and η is an integer β of 1 to 1 然而. However, the compound of the formula (D) is via two The step reaction is obtained and the product of the f reaction step is separated by a separate purification process. Further, when the reaction intermediate generated during the purification process after the first step reaction is separated from the aqueous phase, the reaction intermediate adheres to the reaction vessel, thereby causing a problem that the yield is remarkably lowered, and this problem Industry does not want to exist. The Korean Unexamined Patent Application No. 10-2008-0099784 discloses a method for crystallizing and silk-forming an organic compound, and the document & is used to obtain a crystal using a porous film to increase the reaction in the first step. The yield is gone. However, there are limitations to using this method on an industrial scale, and because of the poor solubility of the carboxylic acid, the yield of the esterification reaction as the second step reaction is also low. "There are also too small a product particle so that the county is difficult during the purification process. The problem with the particles. SUMMARY OF THE INVENTION 8 201113246 3DMlpif The present invention is directed to this specific case, and the object of the present invention is to provide a method for producing salt-salting, which is different from the conventional two-step reaction method, which uses fewer reaction steps. The yield of the onium salt used as an intermediate of the acid generator is increased, and large-scale synthesis can be carried out without separating the product by purification in each reaction step. Another object of the present invention is to provide a phosphonium salt produced by the above-described method for producing a cerium salt. The present invention will be described in detail below, and thus the present invention can be easily implemented by those skilled in the art to which the present invention pertains. However, those skilled in the art should understand that the present invention clearly includes various modifications and The invention is not intended to be limited by the illustrative examples described herein. Unless otherwise indicated, all compounds or substituents used herein may be unsubstituted or substituted. Here, the term "substituted" means The hydrogen atom of the compound or substituent is substituted with any one selected from the group consisting of a dentate atom, a hydroxyl group, a carboxyl group, a nitrile group, a cyano group, an aldehyde group, an epoxy group, an alkyl group, a perfluoroalkane. Alkyl, hydroxyalkyl, cycloalkyl, heterocycloalkyl, alkoxy, allyl, methyl, aryl, heteroaryl, derivatives thereof, and combinations thereof. Unless otherwise indicated, "Halogen atom" means any atom selected from the group consisting of fluorine, chlorine, bromine and moth. Unless otherwise indicated, "perfhioroalkyl group" is used herein. The "alkyl group" of some or all of the hydrogen atoms via fluorodicarbon. 201113246 3551 lpif "heterocycloalkyl group" or "heteroaryl" (heter 〇) as used herein, unless otherwise indicated. "aryi gr〇Up)" means that there are i to three heteroatoms selected from the group consisting of nitrogen (N), oxygen (9), sulfur (S) and phosphorus (P) in the ring and all other atoms in the ring Is a "cyclium alkyl gr〇up" or "aryl group" of a carbon atom. Unless otherwise indicated, the "alkyl group" as used herein means having 1 to 30 carbon atoms. Linear or branched alkyl; as used herein, "allyl group" means a straight or branched allylic group having from 2 to 30 carbon atoms; "perfluoroalkyl" as used herein means A straight or branched chain perfluoroalkyl group having 1 to 3 carbon atoms; "cycloalkyl" as used herein means a cycloalkyl group having 3 to 30 carbon atoms; "heterocycloalkyl" as used herein. Means a heterocycloalkyl group having 2 to 30 carbon atoms; and "aryl" means an aryl group having 6 to 30 carbon atoms. "alkylene group" means a straight or branched alkyl group having 1 to 30 carbon atoms, and "perfluoroalkylene group" as used herein means 1 to 30 carbons. A straight-chain or branched-chain perfluoroalkylene group of atoms; as used herein, "cycloalkylene group" means a cycloalkylene group having from 3 to 30 carbon atoms; (Heterocycloalkylene group) means a heterocycloalkyl group having 2 to 30 carbon atoms; and "arylene group" as used herein means an exoaryl group having 6 to 30 carbon atoms. As used herein, unless otherwise indicated, "norbomyl group" as used herein means a monocyclic or polycyclic norbornene having a 7 to 30 carbon atom 201113246 base' and adamantylgr〇Up used herein. "Aging has an adamantyl group of 10 to 30 carbon atoms. . According to an embodiment of the present invention, there is provided a method of producing a cerium salt in which a cerium salt can be produced by a reduced reaction step and a simplified manufacturing process. Hereinafter, the method for producing the onium salt will be explained. The i ratio is different from the conventional method in which the purification process is required for each step. The salt production method is actually carried out in a step-by-step reaction without any purification process. However, for the convenience of the reader, the method will be divided into the first step and the second step. The method for producing the cerium salt comprises the steps of: adding a compound represented by the following formula (2) to a compound represented by the following formula (1) and subjecting the compound to a transesterification reaction to produce The reaction intermediate 丨 first step 'adds an inorganic salt to the reaction intermediate, and subjectes the compound to a substitution reaction to produce a compound represented by the following formula (3). [Formula 1]

[式2][Formula 2]

HO-(R3)m-X 11 201113246 i55ilpif [式3]HO-(R3)m-X 11 201113246 i55ilpif [Formula 3]

—Ο—[-Ral^X 其中在式(1)至(3)中,—Ο—[-Ral^X where in equations (1) to (3),

Ri及R2各獨立地表示選自由以下構成之族群的任一 者:函素原子、羥基、羧基、腈基、搭基、環氧基、燒基、 環烷基、雜環烷基、芳基及雜芳基; & R·3表示選自由以下構成之族群的任一者:伸燒基、全 氟伸院基、伸環烧基、伸雜環燒基、伸芳基及伸雜芳其.Ri and R2 each independently represent any one selected from the group consisting of a functional group atom, a hydroxyl group, a carboxyl group, a nitrile group, a chelating group, an epoxy group, a alkyl group, a cycloalkyl group, a heterocycloalkyl group, and an aryl group. And a heteroaryl group; & R·3 represents any one selected from the group consisting of an exothermic group, a perfluoro-extension base, a stretching ring, a heterocycloalkylene group, an exoaryl group, and a hetero-aromatic group. its.

Qi及Q2各獨立地表示選自由以下構成之族群的任一 者:氫原子、齒素原子及全敗院基; X表示選自由以下構成之族群的任一者:氫原子、尸 基、全氣烧基、烧氧基、環烧基、稀丙基、芳基及雜芳基. Μ表示選自由以下構成之族群的任一者:鋰、納、钟 及銀; η為1至10的整數;且 m為0至10的整數。 就Qi及Q2而言’鹵素原子可以是氟原子。 就X而言,可以使用任一烷基‘> 只要其為具有1至 30個碳原子之烷基即可’而且所述烷基可以是環烷基,或 經芳基(更具體言之,苯甲基)取代之烷基。對於X,環 烷基可以是單環或多環環烷基。 就X而言,烷基、烷氧基或全氟烷基的至少一個或多 12 201113246 個氫原子可以經選自由以下構成之族群的任一者取代:醚 基、酯基、幾基、縮酸基、環氧基、腈基、搭基及氰基。 具體言之’ X可以是具有3至30個碳原子之單環或 多環烴基’其可選自由以下構成之族群:金剛烷基、降冰 片基、環烷基、雜環烷基、芳基及雜芳基。 更具體言之,X可以是下式(Ι-a)至(1_h)之形式··Qi and Q2 each independently represent any one selected from the group consisting of a hydrogen atom, a dentate atom, and a total defeated base; X represents any one selected from the group consisting of hydrogen atom, cadaveric, and full gas. An alkyl group, an alkoxy group, a cycloalkyl group, a propyl group, an aryl group, and a heteroaryl group. Μ represents any one selected from the group consisting of lithium, sodium, bell, and silver; and η is an integer of 1 to 10. ; and m is an integer from 0 to 10. In the case of Qi and Q2, the halogen atom may be a fluorine atom. As the X, any alkyl '> can be used as long as it is an alkyl group having 1 to 30 carbon atoms' and the alkyl group may be a cycloalkyl group or an aryl group (more specifically, , benzyl) substituted alkyl. For X, the cycloalkyl group may be a monocyclic or polycyclic cycloalkyl group. In the case of X, at least one or more of the alkyl, alkoxy or perfluoroalkyl groups may be substituted by any one selected from the group consisting of: an ether group, an ester group, a few groups, a condensation group. Acid group, epoxy group, nitrile group, chelating group and cyano group. Specifically, 'X may be a monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms' which may be selected from the group consisting of adamantyl, norbornyl, cycloalkyl, heterocycloalkyl, aryl And heteroaryl. More specifically, X can be in the form of the following formula (Ι-a) to (1_h)··

式(Ι-a)至(Ι-h)所表示的X的形式是任一位置之 任一氫原子均鍵接至相鄰基團,且構成所述環之氫原子中 的至少一個氫原子(除鍵接至相鄰基團之氫原子外)可以 經選自由烧基、院氧基及經院基構成之族群的任一取代基 取代。 具體言之,在第一步驟反應中,將式(1)所示之化 合物及式(2)所示之化合物溶解於溶劑中,且將溶液加熱 至回流並擾拌’由此產生反應中間物。 所述溶劑可以是選自由以τ構成之族群的任一者: 醋、酿、内S旨、、醇及其組合,且較佳可使用選 自由以下構成之族群的任一者:笨、曱笨、二甲笨、齒代 苯、M H夫献其組合,但本㈣錢舰於此等 13 201113246 3551 ipif 溶劑。 回流及攪拌可以在50°C至200°C溫度下進行2至8小 時,且較佳在80°C至150°C溫度下進行3至6小時。當回 流及攪拌的時間及溫度在上述範圍内時,所述條件可較佳 用於進行轉酯反應。 在回流及攪拌的同時,或在回流及攪拌後,可以將反 應副產物醇自含有式(1)所示化合物與式(2)所示化人 物之混合物的反應混合液中移除。移除副產物醇可以防止 發生逆反應’並且可以幫助反應朝預期方向進行,由此辦 加反應產率。 可以藉由自混合液中移除醇的任何習知方法移除 醇,且一般而言’可以利用醇的低沸點且較佳使用迪安'_ 斯塔克裝置(Dean-Stark apparatus)來移除醇。然而,本 發明不欲侷限於此。 可以在50°C至200°C溫度下,再次將已經移除副產物 醇之反應混合液加熱至回流,保持8至18小時,且較佳在 80°C至150°C溫度下,將其加熱至回流,保持1〇至13小 時。回流較佳是在上述溫度及時間範圍内進行,以使反應 完全完成。 ^ 專(1)所示化合物及式(2)所示化合物之含量可根 據反應條件適當調整。當式(2)所示化合物相對於式 所示作合物以1:10的莫耳比使用時,產率可以得到提古。 藉由回流來完成反應後,移除溶劑,並添加無機鹽。 使混合物發生取代反應,由此產生式(3)所示之化合物。 201113246 jroupif 於第一步驟中產生之反應中間物容易與無機鹽之親核基團 反應’由此形成式(3)所示之化合物。 無機鹽可以是任何化合物,只要其能夠對反應中間物 提供親核基團即可,而且所述無機鹽可以是週期表 (Periodic Table)第1族、第2族及第6族至第14族元素 之齒化物、硝酸鹽、亞硝酸鹽、硫酸鹽、亞硫酸鹽、硫代 硫酸鹽、磷酸鹽、硼酸鹽、草酸鹽、碳酸鹽、碳酸氫鹽及 乙酸鹽中的任一者。可用於本發明中之所述無機鹽的具體 實例包含碳酸鋰、碳酸鈉、碳酸鉀、碳酸銀、碳酸铷、碳 酸铯、碳酸鈣、碳酸勰、碳酸鋇、碳酸鉻、碳酸釕、碳酸 鈷、碳酸铑、碳酸鎳、碳酸鎘、碳酸鋁、碳酸鎵、碳酸錫、 碳酸氫鐘、碳酸氫鈉、碳酸氫鉀、乙酸酮、乙酸鉛、檸檬 酸鈉及其類似鹽。 特定言之’較佳使用選自由鋰、鈉、鉀及銀構成之族 群的金屬之碳酸鹽或碳酸氫鹽作為無機鹽。使用選自由 鋰、鈉、鉀及銀構成之族群的金屬之碳酸鹽或碳酸氫鹽代 替相關技術方法巾使用的氫氧絲(Na〇H)或氫氧化_ (K^)H)。當使紐等無顧時’可以防止毅域氧化納 或氫氧,㈣料的任何*合需要的水解反應,而且由於 吏用虱氧化納或氫氧化卸,因而無需在水溶液相中進行 反應。因此,可以避免反應後反應產物附著於反應容器表 面的現象,由此可以增加產率。 可根據反應條件適當調整無機鹽之含量。當無機鹽相 •於式(1)所示化合物以1:5的莫耳比使用時,較佳可以 15 201113246 3551 lpif 將所述化合物取代入無機鹽形式中。 將^鹽添加至第—階段反應所產生之反應中間物 中,以製備妓應混合液,隨後麟混合物,喊反應進 行。所述攪拌可以在HTC至刚。c溫度下進行2至9小時, 較佳在贼至8叱下進行4至6小時。當在上述溫度及時 間範圍内進行攪拌時,從增加產率的觀點來看此舉較佳。 隨後用洗務液洗務反應混合液,濃縮液體層,接著 將過量的溶齡加至液體層巾。隨後加熱及麟混合物, 自其中移除任何不溶的無機冑,並濃縮液體,且使其結晶。 由此’可以分離出反應中所產生的式⑶所示的化合物。 可以用於本發明中之洗滌液可以是選自由以下構成 之族群的任-者:醋m _、酿胺、醇及其組合, 且具體$之,可使用選自由以下構成之族群的任一者作為 洗滌液:己烷、庚烷、苯、甲苯、二甲苯、鹵代苯、醚、 乙醚、四氫呋喃及其組合。特定言之,可以使用選自由以 下構成之族群的任一者:己烷、乙醚、庚烷、乙腈、丙酮、 一氣甲烷及其組合,但本發明不欲侷限於此。 /農縮反應混合液之液體層後,用作過量添加的溶劑可 以疋選自由以下構成之族群的任一者:酯、醚、内酯、_、 酿胺、醇及其組合,且具體言之,可使用選自由以下構成 之族群的任一者作為溶劑:苯、曱苯、二曱苯、鹵代苯、 乙醚、四氫呋喃及其組合。特定言之,可以使用選自由以 下構成之族群的任一者:乙酸乙酯、乙醚及其組合,但本 發明不欲侷限於此。 201113246 JDllpif 加熱及攪拌可以在抓至80<t溫 時,較佳在贼至60t溫度下進行^下進仃3至12小 溫度及時間範_進行加熱拌^^當在上述 之觀點來看此舉較佳。 .了攸增加產物溶解度 與習知方法不同,可以在生產 :ί=發明之卿造方法。此外 反應過程中間不需要純化過程,由此,本發 發生的問題,諸如反應中間物附著於 =獲以降低。因此’所述生產過一 法實施例,提供—種以上繼製造方 田使用轉本發财法製造的紐時,與習知技術相 I _歹1如’可以更為簡單地製造出以上文所示的式(Α) 曰化合物且產率更高。也就是說,當使式⑺所示 麗,下式(4)所示之化合物反應時,可以製造出下式 5所不之化合物’其為化學放大型抗蝕劑組成物中使用 的產酸劑。 [式4] A+r A為有機相對離子;且Z為選自*以下構成之 、 者·氟離子(F)、氯離子(C1)、溴離子(Br)、 17 201113246 碟離子(I)、四氟棚酸根(BF4)、六氟神酸根(asf6)、六 氟磷酸根(PF6)及過氣酸根(Cl〇4)。 [式5]The form of X represented by the formula (Ι-a) to (Ι-h) is that any one of hydrogen atoms at any position is bonded to an adjacent group, and at least one hydrogen atom constituting the hydrogen atom of the ring is formed. (Except for a hydrogen atom bonded to an adjacent group) may be substituted with any substituent selected from the group consisting of an alkyl group, an alkoxy group, and a trans-group. Specifically, in the first step reaction, the compound represented by the formula (1) and the compound represented by the formula (2) are dissolved in a solvent, and the solution is heated to reflux and scrambled to thereby generate a reaction intermediate. . The solvent may be any one selected from the group consisting of τ: vinegar, brewing, internal, alcohol, and combinations thereof, and preferably any one selected from the group consisting of: stupid, cockroach Stupid, dimethyl stupid, tooth benzene, MH husband offer its combination, but this (four) money ship here 13 201113246 3551 ipif solvent. The reflux and stirring can be carried out at a temperature of from 50 ° C to 200 ° C for 2 to 8 hours, and preferably at a temperature of from 80 ° C to 150 ° C for 3 to 6 hours. When the time and temperature of reflux and stirring are within the above ranges, the conditions are preferably used for the transesterification reaction. The reaction by-product alcohol can be removed from the reaction mixture containing the mixture of the compound of the formula (1) and the compound of the formula (2) while refluxing and stirring, or after refluxing and stirring. Removal of the by-product alcohol prevents the occurrence of a reverse reaction' and can help the reaction proceed in the desired direction, thereby increasing the reaction yield. The alcohol can be removed by any conventional method of removing the alcohol from the mixture, and generally can be moved using the low boiling point of the alcohol and preferably using the Dean-Stark apparatus. In addition to alcohol. However, the invention is not intended to be limited thereto. The reaction mixture from which the by-product alcohol has been removed may be heated again to reflux at a temperature of from 50 ° C to 200 ° C for 8 to 18 hours, and preferably at a temperature of from 80 ° C to 150 ° C. Heat to reflux for 1 to 13 hours. The reflux is preferably carried out at the above temperature and time to complete the reaction. ^ The content of the compound represented by the formula (1) and the compound represented by the formula (2) can be appropriately adjusted depending on the reaction conditions. When the compound of the formula (2) is used in a molar ratio of 1:10 with respect to the compound of the formula, the yield can be improved. After completion of the reaction by reflux, the solvent was removed and an inorganic salt was added. The mixture is subjected to a substitution reaction, thereby producing a compound represented by the formula (3). 201113246 jroupif The reaction intermediate produced in the first step is easily reacted with a nucleophilic group of an inorganic salt to thereby form a compound represented by the formula (3). The inorganic salt may be any compound as long as it can provide a nucleophilic group to the reaction intermediate, and the inorganic salt may be Group 1, Group 2, and Group 6 to Group 14 of the Periodic Table. Any of the elements of a tooth, a nitrate, a nitrite, a sulfate, a sulfite, a thiosulfate, a phosphate, a borate, an oxalate, a carbonate, a hydrogencarbonate, and an acetate. Specific examples of the inorganic salt which can be used in the present invention include lithium carbonate, sodium carbonate, potassium carbonate, silver carbonate, cesium carbonate, cesium carbonate, calcium carbonate, cesium carbonate, cesium carbonate, chromium carbonate, cesium carbonate, cobalt carbonate, Barium carbonate, nickel carbonate, cadmium carbonate, aluminum carbonate, gallium carbonate, tin carbonate, hydrogen carbonate clock, sodium hydrogencarbonate, potassium hydrogencarbonate, acetate acetate, lead acetate, sodium citrate and the like. Specifically, it is preferred to use a metal carbonate or hydrogencarbonate selected from the group consisting of lithium, sodium, potassium and silver as the inorganic salt. A hydroxide or bicarbonate of a metal selected from the group consisting of lithium, sodium, potassium, and silver is used in place of the hydroxide wire (Na〇H) or hydroxide_(K^)H) used in the related art method. When the ruthenium or the like is not taken care of, it is possible to prevent any desired hydrolysis reaction of the ruthenium oxide or hydrogen oxyhydroxide, and (4), and since the ruthenium is ruined by sodium ruthenium or hydroxide, it is not necessary to carry out the reaction in the aqueous phase. Therefore, the phenomenon that the reaction product adheres to the surface of the reaction vessel after the reaction can be avoided, whereby the yield can be increased. The content of the inorganic salt can be appropriately adjusted depending on the reaction conditions. When the inorganic salt phase is used in the molar ratio of 1:5 in the compound of the formula (1), it is preferred to substitute the compound into the inorganic salt form by 15 201113246 3551 lpif . The salt is added to the reaction intermediate produced in the first-stage reaction to prepare a ruthenium mixture, followed by a lining mixture, and the reaction is called. The agitation can be from HTC to just. It is carried out at a temperature of 2 to 9 hours, preferably 4 to 6 hours at a thief to 8 Torr. When stirring is carried out in the above temperature and time range, this is preferable from the viewpoint of increasing the yield. The reaction mixture is then washed with a washing liquid, and the liquid layer is concentrated, and then the excess solution age is added to the liquid layer. The mixture is then heated and the mixture is removed, any insoluble inorganic hydrazine is removed therefrom, and the liquid is concentrated and allowed to crystallize. Thus, the compound represented by the formula (3) produced in the reaction can be isolated. The washing liquid which can be used in the present invention may be any one selected from the group consisting of vinegar m _, tyrosine, alcohol, and combinations thereof, and specifically, any one selected from the group consisting of the following may be used. As a washing liquid: hexane, heptane, benzene, toluene, xylene, halogenated benzene, ether, diethyl ether, tetrahydrofuran, and combinations thereof. Specifically, any one selected from the group consisting of hexane, diethyl ether, heptane, acetonitrile, acetone, monomethane, and combinations thereof may be used, but the present invention is not intended to be limited thereto. After the liquid layer of the agricultural reaction mixture is used, the solvent used for excessive addition may be selected from any one of the following groups: esters, ethers, lactones, _, amines, alcohols, and combinations thereof, and specifically Any one selected from the group consisting of benzene, toluene, dinonylbenzene, halogenated benzene, diethyl ether, tetrahydrofuran, and combinations thereof may be used. Specifically, any one selected from the group consisting of ethyl acetate, diethyl ether, and combinations thereof may be used, but the present invention is not intended to be limited thereto. 201113246 JDllpif heating and stirring can be carried out when catching 80<t temperature, preferably at thief to 60t temperature, lowering 仃3 to 12 small temperature and time range _ heating mixing ^^ from the above point of view Better. The increase in product solubility is different from the conventional method and can be produced in the following ways: Further, no purification process is required in the middle of the reaction process, whereby problems occurring in the present invention, such as reaction intermediate attachment to = are reduced. Therefore, the production method of the above-mentioned one method provides the above-mentioned ones that are manufactured by using the transfer method of the method of making money, and it is easier to manufacture the above-mentioned article with the conventional technology. The compound of the formula (Α) is shown and the yield is higher. In other words, when the compound represented by the following formula (4) is reacted by the formula (7), a compound of the following formula 5 can be produced, which is an acid-producing agent used in the chemically amplified resist composition. Agent. [Formula 4] A+r A is an organic counter ion; and Z is selected from the group consisting of *, fluoride ion (F), chloride ion (C1), bromide ion (Br), 17 201113246 dish ion (I) , tetrafluoro sulphate (BF4), hexafluoroantimonate (asf6), hexafluorophosphate (PF6) and peroxylate (Cl〇4). [Formula 5]

Α+Ό Qt 其中R3表示選自由以下構成之族群的任一者:伸燒 基、全氟伸烷基、伸環烷基、伸雜環烷基、伸芳基及伸雜 芳基;Α+Ό Qt wherein R3 represents any one selected from the group consisting of: an extended alkyl group, a perfluoroalkylene group, a cycloalkylene group, a heterocycloalkyl group, an extended aryl group, and an extended aryl group;

Qi及Q2各獨立地表示選自由以下構成之族群的任一 者:氫原子、函素原子及全氟烷基; X表示選自由以下構成之族群的任一者:氫原子、院 基、全氟烷基、烷氧基、環烷基、烯丙基、芳基及雜芳基; A+表示有機相對離子; η為1至10的整數;且 m為〇至1〇的整數。 本發明方法可藉由使用簡化的反應步驟,並解決在習 知方法之生產過程中發生的問題(諸如在純化過程期間反 應中間物附著於反應容器,引起產率降低),以高產率製造 锍鹽》 一般熟習此項技術者易於對本發明進行簡單的變更 及修改,且此等變更及修改皆被認為包含在本發明之範疇 内。 18 201113246 ^Doapif 下文中’將詳細描述本發明之實例,由此熟習此項技 術者易於實施本發明。然而,本發明可以不侷限於本文所 述實例之變更及修改而實現。 實例 [實例1] 將600公克(3.12莫耳)2,2-二氟-2-(氟磺醯基)乙 酸甲醋(methyl 2,2-difluoro-2-(fluorosulfonyl)acetate)及 534.6公克(4.68莫耳)環己基曱醇溶解於6公升甲笨中, 並在授拌下,將混合物加熱至回流。擾拌4小時後,將反 應燒瓶連接至迪安-斯塔克裝置,並移除反應混合液中的甲 醇。隨後,移開迪安-斯塔克裝置,並將反應液加熱至回流, 保持12小時。 當反應完成時’移除溶劑,並將1.5公升(4.25莫耳) 30%碳酸鈉(Na2C03)水溶液添加至反應濃縮物中。將混 合物攪拌5小時。 用乙醚洗滌反應混合液,濃縮水層,隨後將過量的乙 酸乙酯(ethylacetate,E A )引入濃縮物中。將内溫(intemal temperature)升至約50°C ’隨後攪拌混合物6小時。過濾 移除任何不溶的無機鹽,並藉由濃縮乙酸乙酯來誘導結 晶。在真空中乾燥結晶形式的所得固體,並藉由ih_NMr 確定固體結構。 將固體乾燥及過濾,由此獲得744公克(產率81%) 2-(環己基曱氧基)-1,1-二氟側氧基乙烷磺酸鹽 (2-(cyclohexylmethoxy)-1,1 -difluoro-2-oxoethanesulfonate) 0 19 201113246 3551 lpif W-NMR (二甲亞硬-々,内標··四曱基碎院):(ppm) 4.01(d, 2H), 1.66(m, 6H), 0.81-1.27(m, 5H) [•反應流程1]Each of Qi and Q2 independently represents any one selected from the group consisting of a hydrogen atom, a functional atom, and a perfluoroalkyl group; and X represents any one selected from the group consisting of: a hydrogen atom, a hospital base, and a whole Fluoroalkyl, alkoxy, cycloalkyl, allyl, aryl and heteroaryl; A+ represents an organic relative ion; η is an integer from 1 to 10; and m is an integer from 〇 to 1〇. The process of the present invention can be produced in high yield by using a simplified reaction step and solving problems occurring in the production process of conventional methods, such as attachment of a reaction intermediate to a reaction vessel during a purification process, resulting in a decrease in yield. Salts are generally susceptible to variations and modifications of the present invention, and such changes and modifications are considered to be within the scope of the present invention. 18 201113246 ^Doapif In the following, an example of the invention will be described in detail, whereby the skilled artisan will readily practice the invention. However, the invention can be implemented without being limited to the variations and modifications of the examples described herein. EXAMPLES [Example 1] 600 g (3.12 mol) of 2,2-difluoro-2-(fluorosulfonyl)acetate (methyl 2,2-difluoro-2-(fluorosulfonyl)acetate) and 534.6 g ( 4.68 moles of cyclohexyl decyl alcohol was dissolved in 6 liters of stupid, and the mixture was heated to reflux with stirring. After 4 hours of scramble, the reaction flask was attached to the Dean-Stark apparatus and the methanol in the reaction mixture was removed. Subsequently, the Dean-Stark unit was removed and the reaction was heated to reflux for 12 hours. The solvent was removed when the reaction was completed, and 1.5 liter (4.25 mole) of a 30% aqueous solution of sodium carbonate (Na2CO3) was added to the reaction concentrate. The mixture was stirred for 5 hours. The reaction mixture was washed with diethyl ether, and the aqueous layer was concentrated, and then ethyl acetate (E A) was introduced to the concentrate. The intemal temperature was raised to about 50 ° C' and the mixture was then stirred for 6 hours. Filtration removes any insoluble inorganic salts and induces crystallization by concentrating ethyl acetate. The resulting solid in crystalline form was dried in vacuo and the solid structure was determined by ih_NMr. The solid was dried and filtered, whereby 744 g (yield: 81%) of 2-(cyclohexyl decyloxy)-1,1-difluoroethoxy ethanesulfonate (2-(cyclohexylmethoxy)-1, 1 -difluoro-2-oxoethanesulfonate) 0 19 201113246 3551 lpif W-NMR (dimethyl benzo-anthracene, internal standard · 曱四基基院): (ppm) 4.01(d, 2H), 1.66(m, 6H ), 0.81-1.27(m, 5H) [• Reaction Scheme 1]

[實例2] 將600公克(3.12莫耳)2,2-二梟u-2-(氟續酿基)乙 酸曱酯及591公克(4.6莫耳)雙環[2.2.1]庚-2-基曱醇 (bicyclo[2.2,l]heptan-2-ylmethanol)溶解於 ό 公升甲苯中, 並在攪拌下,將溶液加熱至回流。攪拌4小時後,將反應 燒瓶連接至迪安-斯塔克裝置,並移除反應混合液中的甲 醇隨後’移開迪女-斯塔克裝置’並將反應液加熱至回流, 保持丨2小時。 當反應完成時’移除溶劑’並將L5公升(4.25莫耳) 30%碳酸納(NafO3)水溶液添加至反應濃縮物中。將混 合物授拌5小時。 用乙醚洗滌反應混合液,濃縮水層,隨後將過量的乙 酸乙醋(EA)引入濃縮物中。將内溫升至約贼,隨後 攪拌混合物6小時。過濾移除任何不溶的無機鹽,並藉由 濃縮乙酸乙醋來誘導結晶^在真空中乾燥結晶形式的所得 固體,並藉由1H-NMR確定固體結構。 將固體乾燥及過濾’由此獲得784.8公克(產率82.8%) 2·(雙環P.2.1]庚·2·基曱氧基)-^二氟·2-側氧基乙院續酸納 20 201113246 (2-(bicyclo[2.2.1 ]heptan-2-ylmethoxy)-1,1 -difluoro-2-oxoeth anesulfonate)。 ^-NMRCCDsCN): (ppm) 3.82-4.91(m, 2H), 0.65-2.31(m, 11H) [反應流程2][Example 2] 600 g (3.12 mol) of 2,2-dioxa-2-(fluorene) decyl acetate and 591 g (4.6 mol) of bicyclo [2.2.1] hept-2-yl The sterol (bicyclo[2.2,l]heptan-2-ylmethanol) was dissolved in hydrazine toluene and the solution was heated to reflux with stirring. After stirring for 4 hours, the reaction flask was attached to a Dean-Stark apparatus, and the methanol in the reaction mixture was removed and then the 'Di-Stark apparatus was removed' and the reaction was heated to reflux to maintain 丨2 hour. When the reaction was completed, the solvent was removed and an L5 liter (4.25 mole) 30% sodium carbonate (NafO3) aqueous solution was added to the reaction concentrate. The mixture was mixed for 5 hours. The reaction mixture was washed with diethyl ether, and then the aqueous layer was concentrated, and then ethyl acetate (EA) in excess of ethyl acetate. The internal temperature was raised to about thief, and then the mixture was stirred for 6 hours. Any insoluble inorganic salt was removed by filtration, and the resulting solid was crystallized in vacuo to be crystallized by concentrated ethyl acetate. The solid structure was determined by 1H-NMR. The solid was dried and filtered' thus obtained 784.8 g (yield 82.8%) 2·(bicycloP.2.1]heptan-2-yloxy)-^difluoro-2-sideoxy oxene sodium sulphate 20 201113246 (2-(bicyclo[2.2.1]heptan-2-ylmethoxy)-1,1 -difluoro-2-oxoeth anesulfonate). ^-NMRCCDsCN): (ppm) 3.82-4.91 (m, 2H), 0.65-2.31 (m, 11H) [Reaction Scheme 2]

Na+ ΌNa+ Ό

1) -MeOH 2) Na2G03~ [實例3] 將600公克(3.12莫耳)2,2-二氟-2-(氟磺醯基)乙 酸甲酯及504公克(4.66莫耳)苯甲醇溶解於10毫升甲 苯中,並在攪拌下,將溶液加熱至回流。攪拌4小時後, 將反應燒瓶連接至迪安-斯塔克裝置,並移除反應混合液中 的曱醇。隨後’移開迪安-斯塔克裝置,並將反應液加熱至 回流’保持12小時。 當反應完成時,移除溶劑,並將1.5公升(4.25莫耳) 30%碳酸鈉(NazCO1 2)水溶液添加至反應濃縮物中。將混 合物授拌5小時。 用乙醚洗滌反應混合液,濃縮水層,隨後將過量的乙 酸乙酯(EA)引入濃縮物中。將内溫升至約5〇它, 擾拌混合物M、時。過祕除任何不溶的無鐘, 濃縮乙酸乙8旨來誘導結晶。在真空中乾燥結晶形式的戶ί得 固體,並藉由1H-NMR確定固體結構。 21 1 (^85^ 2 虱基)-1,1-一氟-2_侧氧基乙烷磺酸鈉 201113246 O^JIipif (2-(benzoyloxy)-1,1 -(^£111〇1*〇-2-〇\〇6出&11£8111【〇11&【6)。 W-NMR (二曱亞砜-A,内標:四曱基矽烷):(ppm) 7.41(m, 5H), 4.82(s, 2H) [反應流程3]1) -MeOH 2) Na2G03~ [Example 3] 600 g (3.12 mol) of 2,2-difluoro-2-(fluorosulfonyl)acetic acid methyl ester and 504 g (4.66 mol) of benzyl alcohol were dissolved in In 10 ml of toluene, the solution was heated to reflux with stirring. After stirring for 4 hours, the reaction flask was attached to a Dean-Stark apparatus and the sterol in the reaction mixture was removed. Subsequently, the Dean-Stark apparatus was removed and the reaction liquid was heated to reflux for 12 hours. When the reaction was complete, the solvent was removed and 1.5 liter (4.25 mole) of a 30% aqueous solution of sodium carbonate (NazCO1 2) was added to the reaction concentrate. The mixture was mixed for 5 hours. The reaction mixture was washed with diethyl ether and the aqueous layer was concentrated, then ethyl acetate (EA) Raise the internal temperature to about 5 〇, and disturb the mixture M. In addition to any insoluble no bell, concentrated acetic acid 8 is used to induce crystallization. The crystalline form of the solid was dried in vacuo and the solid structure was determined by 1H-NMR. 21 1 (^85^ 2 fluorenyl)-1,1-monofluoro-2_sodium oxyethane sulfonate 201113246 O^JIipif (2-(benzoyloxy)-1,1 -(^£111〇1* 〇-2-〇\〇6出&11£8111 [〇11&[6]. W-NMR (disulfoxide-A, internal standard: tetradecyldecane): (ppm) 7.41 (m, 5H) ), 4.82(s, 2H) [Reaction Scheme 3]

[比較實例] (1) 將750公克水引入3〇〇公克2,2_二氟_2·(氟磺醯 基)乙酸曱酯中,並在攪拌混合物之同時,將3〇0/〇氫氧化 鈉水溶液緩慢逐滴添加至混合物中。隨後在擾拌下,將混 合物加熱至回流,保持3小時。冷卻反應混合物後,使用 濃鹽酸中和反應混合液,並濃縮反應混合液,以獲得416 公克綾基二氟甲燒確酸納(含有無機鹽,產率:,純 度:60%)。 (2) 將100么克叛基一氟曱烧續酸納(純度:6〇%) 及76公克雙環[2.2.1]庚-2-基曱醇溶解於〇 $公升二氣乙烧 (dichloroethane,DCE)中,並將37公克對曱苯磺酸 (p-toluenesulfoiiic add ’ p-Ts0H)添加至溶液中。隨後將 反應瀑合物加熱到回流,保持5小時。 濃縮混合物以移除二氣乙烧,隨後向其中添加〇5公 升乙腈。攪拌所得混合物。過濾經過攪拌的混合物並濃縮, 由此獲得26公克(產率27%) 2_ (雙環[2 2巧庚^—基曱氧 基)-1,1-二氟-2-侧氧基乙烷磺酸鈉。 22 201113246 jmiplf [反應流程4][Comparative Example] (1) Introducing 750 g of water into 3 gram of 2,2-difluoro-2-(fluorosulfonyl) acetate, and stirring the mixture, 3 〇 0 / 〇 hydrogen An aqueous solution of sodium oxide was slowly added dropwise to the mixture. The mixture was then heated to reflux with stirring for 3 hours. After cooling the reaction mixture, the reaction mixture was neutralized with concentrated hydrochloric acid, and the reaction mixture was concentrated to obtain 416 g of decyldifluoromethanesulfonate (containing inorganic salt, yield: purity: 60%). (2) Dissolve 100 grams of thiophene monofluorocarbonate (purity: 6〇%) and 76 grams of bicyclo [2.2.1] hept-2-yl sterol in 〇$ liters of diethylene , DCE), and 37 grams of p-toluenesulfoiiic add 'p-Ts0H) was added to the solution. The reaction cocktail was then heated to reflux for 5 hours. The mixture was concentrated to remove diethylene bromide, and then 5 liters of acetonitrile was added thereto. The resulting mixture was stirred. The stirred mixture was filtered and concentrated, whereby 26 g (yield: 27%) of 2-(bicyclo[2 2 </ RTI> </ RTI> </ RTI> yloxy)-1,1-difluoro-2-oxooxy ethane sulfonate was obtained. Sodium. 22 201113246 jmiplf [Reaction Process 4]

一 Na^l l 2)濃鹽酸 办 實例1至3及比較實例中製得之錄鹽的產率呈現於下 表1中。 [表1] 實例1 實例2 實例3 比較實俗| 純化過程數 0 0 0 1 _ 反應步驟數 1 1 1 2 總產率(%) 81 82.8 — 85 20.3 — 每一步的產率(%) - - (1) 75 (2) 27 在比較實例的情況下,可以看出,以(2)指示之第 一步驟的反應產率明顯降低,因此比較實例的總產率降至 20.3%。相反地,在不使用任何純化過程之本發明實例丄 中,由於反應步驟數減少成一個步驟,使得反應過程 传至〗簡化。因此,可以看出,由於產物不經過純化過程, 使得反應更為簡單’而且產率亦有所增加。 具體言之,實例1中的總反應產率高達81%,實例2 中總產率高達82.8%,且實例3中總產率高達85%,而比 較實例中的總反應產率僅為20.3%。 已經詳細提供了本發明較佳例示性實施例之前述描 述’但本發明權利之範疇不欲侷限於此。熟習此項技術者 可根據如以下申請專利範圍所界定之本發明之基本概念, 23 201113246 進行許多變更及修改,而所述變更及修改亦屬於 本發明權利之範疇。 【圖式簡單說明j 11 =根據本發明之責例】製造之*㈣_磁共振光譜。 圖2是根據本發明之實例2製造之錄鹽 圖3是根據本發明之實例3製造之物核磁共 1主要元件符號說明】 無 24A Na?l? 2) Concentrated Hydrochloric Acid The yields of the salts prepared in Examples 1 to 3 and Comparative Examples are shown in Table 1 below. [Table 1] Example 1 Example 2 Example 3 Comparatively practical | Number of purification processes 0 0 0 1 _ Number of reaction steps 1 1 1 2 Total yield (%) 81 82.8 — 85 20.3 — Yield per step (%) - - (1) 75 (2) 27 In the case of the comparative example, it can be seen that the reaction yield of the first step indicated by (2) is remarkably lowered, so that the total yield of the comparative example is lowered to 20.3%. Conversely, in the inventive example in which no purification process is used, since the number of reaction steps is reduced to one step, the reaction process is passed to the simplification. Therefore, it can be seen that since the product is not subjected to a purification process, the reaction is made simpler and the yield is also increased. Specifically, the total reaction yield in Example 1 was as high as 81%, the total yield in Example 2 was as high as 82.8%, and the total yield in Example 3 was as high as 85%, while the total reaction yield in the comparative example was only 20.3%. . The foregoing description of the preferred embodiments of the present invention has been described in detail, but the scope of the invention is not limited thereto. A person skilled in the art can make many changes and modifications in accordance with the basic concept of the invention as defined in the following claims, and the changes and modifications are also within the scope of the invention. [The figure briefly illustrates j 11 = the (4) _ magnetic resonance spectrum produced according to the law of the present invention. 2 is a recorded salt produced according to Example 2 of the present invention. FIG. 3 is a schematic illustration of the main components of a nuclear magnetic composite manufactured according to Example 3 of the present invention.

Claims (1)

201113246 J03Iipif 七、申請專利範圍: 1· 一種製造銃鹽之方法,其包括: 將下式(2)所示之化合物添加至下式(1)所示之化 合物中’並使所述化合物進行轉酯反應,以產生反應中間 物;及 將無機鹽添加至所述反應中間物中,並使所述化合物 進行取代反應,以製造下式(3)所示之化合物: [式1]201113246 J03Iipif VII. Patent Application Range: 1. A method for producing a cerium salt, which comprises: adding a compound represented by the following formula (2) to a compound represented by the following formula (1) and transferring the compound The ester is reacted to produce a reaction intermediate; and an inorganic salt is added to the reaction intermediate, and the compound is subjected to a substitution reaction to produce a compound represented by the following formula (3): [Formula 1] [式2] H〇-(R3)m-X [式3][Formula 2] H〇-(R3)m-X [Formula 3] 其中在式(1)至(3)中,· Ri及&amp;各獨立地表示選自由以下構成之族群的任一 者:齒素原子、羥基、羧基、腈基、醛基、環氧基、烷基、 環烷基、雜環烷基、芳基及雜芳基; &amp;表示選自由以下構成之族群的任一者··伸烷基、全 25 201113246 氟伸燒基、伸環絲、伸雜環絲、伸絲及伸雜芳基; 及⑶各獨立地表示選自由以下構成之族群的任一 者·虱原子、鹵素原子及全氟烷基; X表示選自由以下構成之族群的任一者:氯原子、燒 土、全氟烷基、烷氧基、環烷基、烯丙基、芳基及 μ表示選自由以下構成之族群的任一者:鐘(^、’ 鋼(Na)、鉀⑻及銀(Ag); n為1至10的整數;及 m為〇至10的整數。 2.如申請專利範圍第1項所述之製造銃鹽之方法,其 移除所述第-反應步驟中作為所述轉敝應之副產物產 3.如申請專利範圍第1項所述之製造銃鹽之方法, 中所述無機鹽為選自由鐘、納、鉀及銀構成之族 、 的碳酸鹽或碳酸氫鹽。 4β如申請專利範圍第1項所述之製造疏鹽之方法,其 中X疋選自由以下構成之族群的任一者:金剛烷基、降冰 片基、環烷基、雜環烷基、芳基及雜芳基。 / 5. —種锍鹽,藉由如申請專利範圍第i項至第4項 任一項所述之製造銃鹽之方法製造。 26In the formulae (1) to (3), Ri and &amp; each independently represent any one selected from the group consisting of a dentate atom, a hydroxyl group, a carboxyl group, a nitrile group, an aldehyde group, and an epoxy group. An alkyl group, a cycloalkyl group, a heterocycloalkyl group, an aryl group, and a heteroaryl group; &amp; represents any one selected from the group consisting of: an alkyl group, a full 25 201113246 fluoro extended group, a stretched wire, And the (3) each independently represents any one selected from the group consisting of a ruthenium atom, a halogen atom, and a perfluoroalkyl group; and X represents a group selected from the group consisting of Either: chlorine atom, burnt earth, perfluoroalkyl group, alkoxy group, cycloalkyl group, allyl group, aryl group and μ represent any one selected from the group consisting of: bell (^, ' steel ( And a compound of the formula In the first-reaction step, the by-product of the conversion is produced. 3. The method for producing a cerium salt according to claim 1, wherein The inorganic salt is a carbonate or hydrogencarbonate selected from the group consisting of a bell, a nano, a potassium, and a silver. The method of producing a salt as described in claim 1, wherein X is selected from the group consisting of the following: Any of: adamantyl, norbornyl, cycloalkyl, heterocycloalkyl, aryl, and heteroaryl. / 5. - a phosphonium salt, as claimed in claims i to 4 The method for producing a cerium salt according to any one of the preceding claims.
TW099127597A 2009-10-01 2010-08-18 Method for preparing sulfonium salt and sulfonium salt prepared by the same TWI423951B (en)

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