201107756 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種探針座，尤指一種適用於半導體測 試裝置之探針座。 【先前技術】 請同時參閱圖1、及圖2,圖1係半導體測試設備立體 圖，圖2係測試頭於A位置時之示意圖。圖中顯示有一半導 體現I試sx備1 ’其具有一測試頭（tester hea(j) 11，且測試頭11 上具有一測試載板（l〇ad board)m，並於測試載板ui上組 設有一探針座（pogotower)1〇、或習知探針座9〇〇其中探 針座ίο主要藉由探針電性接觸一探針卡12，並對基座13上 的待測晶圓、半導體元件、或其他電子元件進行測試（圖中 未示）。 請同時參閱圖3、圖4、及圖5，圖3係習知探針座之剖 視圖，圖4係習知探針座之局部放大剖視圖，圖5係習知探 針之立體圖。由圖中顯示可知，習知探針9近二端處有分別 ^有探針隔環9卜而習知探針9便是透過探針隔環而固 定於習知探針座_，使習知探針Μ致落出習知探針座 卜*此外，S知探針座9〇為求其堅固及輕量化，整體包 *板92及下蓋板93皆採用铭質材料。但又因铭具導 故再藉由探針隔環91採以絕緣材料，以避免習知 探針90產生短路之情況。 201107756 ^然而，習知探針座90組裝時’亦因具探針隔環91而相 當費時費工。首先，於每―支習知探針9近二端處先套上探 針隔核9卜接著’再將每_支習知探針9小心地分別置入已 鎖附有其中—蓋板之習知探針座爛，待數百支習知探針9 全部置人後再鎖附另—蓋板。値得注意的是，探針數量少 則數百多則上千，因為探針隔環91僅係套入習知探針9上，201107756 VI. Description of the Invention: [Technical Field] The present invention relates to a probe holder, and more particularly to a probe holder suitable for use in a semiconductor test device. [Prior Art] Please refer to Fig. 1 and Fig. 2 at the same time. Fig. 1 is a perspective view of the semiconductor test equipment, and Fig. 2 is a schematic view of the test head at the A position. The figure shows a semiconductor I test sx1' which has a test head (tester hea(j) 11, and the test head 11 has a test board (l〇ad board) m, and is on the test carrier ui The probe is provided with a probe holder, or a conventional probe holder 9 , wherein the probe holder ίο is electrically contacted with a probe card 12 mainly by a probe, and the crystal to be tested on the base 13 Round, semiconductor components, or other electronic components are tested (not shown). Please refer to FIG. 3, FIG. 4, and FIG. 5 simultaneously. FIG. 3 is a cross-sectional view of a conventional probe holder, and FIG. 4 is a conventional probe holder. A partial enlarged cross-sectional view, and Fig. 5 is a perspective view of a conventional probe. As shown in the figure, the probe 9 has a probe spacer 9 at the proximal end and a conventional probe 9 is a probe. The needle spacer is fixed to the conventional probe holder _, so that the conventional probe is caused to fall out of the conventional probe holder. In addition, the known probe holder 9 is made to be strong and lightweight, and the whole package is * Both the 92 and the lower cover 93 are made of a material of the name. However, the insulating material is taken up by the probe spacer 91 due to the inscription, so as to avoid the short circuit of the conventional probe 90. 107756 ^ However, it is quite time-consuming and labor-intensive to use the probe spacer 91 when assembling the probe base 90. First, the probe spacer 9 is placed at the proximal end of each of the known probes 9 Then proceed to 'deliberately put each of the conventional probes 9 into the conventional probes that have been locked with them - the cover is rotten, and the hundreds of conventional probes 9 are all placed and then locked. Another cover. It is worth noting that the number of probes is as small as hundreds and thousands, because the probe spacer 91 is only inserted into the conventional probe 9.
需逐一小心地裝配，以防止探針隔環91落出，因此相當費 時費工。 此外，因習知探針9係固定於習知探針座9〇内，亦即習 知探針9凸露出之二彈性端亦固定，無法上下位移。此時， 當習知探❹90進行組設㈣以餘⑴時，因習知探針9 凸^出之二彈性端有預壓力量，故需施予相當之外力（約莫 數公斤重之力量认平均於探針座9G整體，並朝向測試載板 ⑴之方向逼近’以便進行鎖_定。惟，此時倘^所施予 之外力不平均’造成習知探針座9G其中-側㈣，將導致 導引柱94f曲或斷裂’嚴重者更可能破壞習知探針座90或 板1U。其中導引柱94主要用以提供探針座90與測 试載板111組裝時定位之用。 由此可知’如何達成一種構造簡單、成本低廉、 便利、省時省力’且又便於安裝或拆解之探針座 、 產業上的一種迫切需要。 貝隹疋 【發明内容】 201107756 本發明為一種探針座，包括：一座體、一絕緣上蓋、 一絕緣下蓋、及複數支探針。其中，座體包括有複數個貫 通孔，而複數個貫通孔彼此軸向平行並分別延伸貫通於座 體之上表面與下表面之間。而絕緣上蓋組設於座體之上表 面上，絕緣上蓋包括有複數個上穿孔，其複數個上穿孔分 別對應到座體之複數個貫通孔，且每一上穿孔具有一孔 徑。又’絕緣下蓋組設於座體之下表面上，其絕緣下蓋是 包括有複數個下穿孔。且複數個下穿孔分別對應到座體之 複數個貫通孔，每一下穿孔亦具有其孔徑。 再者，複數支探針中每一探針包括有一外管、及二針 頭。而外管具有一外徑其係小於上穿孔與下穿孔的孔徑， 且外皆於鄰近二端之管壁處分別徑向凸設有一肩部，其肩 部具有一徑向尺寸，其係大於上穿孔與下穿孔的孔徑。而 二針頭分別組設於該外管之二端内。 其中’複數支探針係分別容設於座體之複數個貫通孔 内，且複數支探針並分別透過其肩部，因其徑向尺寸大於 上穿孔與下穿孔之孔彳坐而卡止限位於絕緣上蓋之上穿孔盘 絕緣下蓋之下穿孔之間。又’每一探針之外管二端與二針 頭，因外管之外徑小於上穿孔與下穿孔之孔徑，故能分別 軸向穿出其所對應之上穿孔與下穿孔而凸露於絕緣上蓋與 絕緣下蓋外面。因此，本發明之構造簡單，又可儉省成本， 更方便組裝。 較佳的是，本發明之絕緣上蓋與絕緣下蓋可分別包括 有一聚趟醜亞胺板（Polyetherimide，PEI)、或其他非導電戋 201107756 電絕緣之等效材質所構成之板材皆可，據此可避免複數支 探針相互電性導通，而造成短路無法進行量測，甚至燒毁 機台内部電路之情形發生。 另外’本發明之絕緣上蓋與絕緣下蓋之轴向距離可大 於每一支探針之外管相對應二端肩部之軸向距離。據此， 每一支探針可因重力、或施予些微外力而產生上下位移， 如此更方便探針座裝配於測試載板上。詳言之，當探針座 φ 進行女裝至測試载板時，僅須於探針座上施予些微朝向測 試載板之外力，亦即稍微下壓探針座，此時所有探針已產 生遠離測試载板之方向的位移，接著保持微下壓力便可輕 鬆直接將探針座鎖附於測試載板上。 再且，本發明每一探針之肩部可包括有一整圈之肩凸 環或半圈之肩凸環、或是一、二、三個、或數個肩凸起亦 可，其主要用以擔止以防止探針穿經絕緣上蓋之上穿孔或 絕緣下蓋之下穿孔而落出探針座外。此外，本發明之每一 探針之二針頭可為可作軸向伸縮之二支彈性針頭。其中， ® 每一探針2可包括有一壓縮彈簧容設於外管内，且二針頭分 別抵住壓縮彈簣之二端，並藉由壓縮彈簧以提供針頭之軸 向伸縮及復位之功能。 此外，本發明可更包括有至少一定位柱，而座體之上 表面、及下表面可各開設有至少一第一定位孔，且絕緣上 蓋與絕緣下蓋可各分別開設有至少一第二定位孔。其中， 至少一定位柱係可穿設於至少一第一定位孔與至少一第二 定位孔内。據此，定位柱可用以提供絕緣上蓋、及絕緣下 201107756 蓋定位於座體上，並同時可進一步定位於座體上，由此可 方便組裝。 又，本發明可更包括有複數鎖附螺絲，其中絕緣上蓋 與絕緣下蓋可藉由複數鎖附螺絲鎖固於座體之上表面及 下表面上。並且’本發明可更包括有一探針座固定環是 組設於座體之一側上。其中，探針座固定環主要用以固定 座體於測試載板上。此外，本發明可更包括有一驗證卡固 定環’是組設於座體之另一側上。其中，驗證卡固定環主 要用以固定驗證卡於探針座上，以便固定驗證卡。而驗證 卡主要用以於測試前先自我進行驗證。 【實施方式】 請參閱圖6，圖6係本發明探針座1〇—較佳實施例之分 解圖。圖中顯示有一座體3,其材質以鋁質為佳。其中，座 體3開設有複數個貫通孔31，而複數個貫通孔31彼此軸向平 行並分別延伸貫通於座體3之上表面32與下表面33之間。另 外，還顯示有一絕緣上蓋41，其組設於座體3之上表面32 上。其中’絕緣上蓋41包括有複數個上穿孔410，其是分別 對應到座體3之複數個貫通孔31，每一上穿孔410具有一孔 徑d。 另外’座體3下方有一絕緣下蓋42，其組設於座體3之 下表面33上。其中，絕緣下蓋42同樣開設有複數個下穿孔 420»而複數個下穿孔420分別對應到座體3之複數個貫通孔 31。同樣地，每一下穿孔420亦具有孔徑d，其可相同於前 述上穿孔410之孔徑d、抑可設成不同孔徑皆可以。在本實 201107756 施例中’絕緣上蓋41與絕緣下蓋42分別為—聚義亞胺板 (Polyethenmide，PEI)，纟當然亦可為其_導電或電絕緣 之等效材質所構成之板材。其中，座體3上下二側分別組設 有-驗證卡@]定環72、及探針座固定環7。驗證卡固定環72 主要用以®定驗證卡（@巾未示）於探針座1()上以便進行驗 姐·。而探針座固定環7主要用以將探針座1〇固定於測試載板 111 上。 此外，圖中顯示有複數鎖附螺絲6，其中絕緣上蓋41 與絕緣下蓋42是藉由複數鎖附螺絲6鎖固於座體3之上表面 32、及下表面33上。另外’座體3之上表面32、及下表面33 各開設有複數個第一定位孔32卜而絕緣上蓋41與絕緣下蓋 42也各分別開設有複數個第二定位孔421。其中，透過定位 柱5穿設於第一定位孔321與至少一第二定位孔421内，用以 絕緣上蓋41與絕緣下蓋42定位於座體.3上，方便組裝。並 且，於探針座10裝配至測試載板ηι時，更提供探針座1〇與 測試載板111導引定位的功能。 再請一併參閱圖7,圖7係本發明一較佳實施例探針之 示意圖。圖中顯示有複數支探針2，而每一探針2包括有一 外管21、及二針頭25。其中，外管21具有一外徑D，其係小 於上穿孔410與下穿孔420的孔徑d，故外管21可活動自如地 相對於上穿孔410與下穿孔420產生位移。並且，於外管21 於鄰近二端之管壁處分別徑向凸設有一肩部22。其肩部22 具有一徑向尺寸W其係大於上穿孔410與下穿孔420的孔徑 d，故受限於肩部22大於上穿孔410與下穿孔420。據此，透 201107756 過二端肩部22之卡止限位，使探針2不致脫落出探針座1〇 外〇 再者，圖中顯示有二針頭25，其係分別組設於外管21 之二端内。而且’在本實施例中，針頭25為可作轴向伸縮 之彈性針頭26。其中，彈性針頭26主要係因每一探針2包括 有-壓縮彈簧27容設於外管21内。而二針頭25分別抵住壓 縮彈簧27之二端，以藉由壓縮彈簧π之彈簧力以提供針頭 25之軸向伸縮及復位之功能。 請參閱圖8A、圖8B、及圖8C，圖8A係本發明第二較佳 實施例探針肩部之剖視圖，圖8B係本發明第三較佳實施例 探針肩部之剖視圖，圖8C係本發明第四較佳實施例探針肩 部之剖視圖。在本實施例中，每一探針2之肩部22為一整圈 之肩凸環。其當然亦可為半圈之肩凸環，或是一二或三 個肩凸起亦可’分別如圖8A、圖8B、及圖8C所示。 清一併參閱圖9，圖9係本發明一較佳實施例探針座之 局部放大剖視圖。圖中複數支探針2分別容設於座體3之複 數個貫通孔31内。並且，複數支探針2並分別透過其肩部 22，因其徑向尺寸W大於上穿孔41〇與下穿孔42〇的孔徑d， 而卡止限位於絕緣上蓋41之上穿孔41〇與絕緣卞蓋42之下 穿孔420之間。另外，每一探針2之外管21二端與二針頭25， 因外管之外徑D小於上穿孔41〇與下穿孔420的孔徑d，故能 分別軸向穿出其所對應之上穿孔4丨〇與下穿孔42〇而凸露於 絕緣上蓋41與絕緣下蓋42外面。 201107756 然而’本實施例中’絕緣上蓋41與絕緣下蓋42之軸向 距離L係大於每一支探針2之外管21相對應二端肩部22之轴 向距離1。據此’每一支探針2可因重力、或施予些微外力 而產生上下相對於座體3之相對位移，如此更方便探針座1〇 安裝至測試載板111上。詳言之，當探針座丨〇進行安裝至測 試載板111時，僅須施予探針座10些微朝向測試載板U1之 外力，亦即輕微下壓探針座10之力量，此時所有探針2已產 生遠離測試載板111之方向的位移’接著僅需保持些微之下 麼力量’便可輕鬆直接將探針座固定環7鎖附於測試載板 111 上。 故而，本發明於裝設探針座10於測試載板lu時，探針 2可活動自如的位移於探針座10内，故無須如習知般須施予 相當之外力’並由此不會產生如習知般使定位柱5彎曲、斷 裂，抑或破壞測試載板111、或探針座1〇之虞。其中，在本 實施例中，探針座10裝設於測試載板lu時之浮動距離僅為 0.2 mm，反觀習知則為2mm，以此便可得知其中預壓力量差 異之處。 此外，本發明之探針2亦因以外管21一體凸設之肩部22 來取代習知之探針隔環。故而本發明於裝配探針2時，無須 如習知般逐一小心地置入，僅需輕鬆撒針再稍微撥入整理 即可，省時省力。上述實施例僅係為了方便說明而舉例而 已，本發明所主張之權利範圍自應以申請專利範圍所述為 準，而非僅限於上述實施例。 201107756 【圖式簡單說明】 圖1係半導體測試設備立體圖。 圖2係測g式頭於a位置時之示意圖。 圖3係習知探針座之剖視圖。 圖4係習知探針座之局部放大剖視圖。 圖5係習知探針之立體圖。 圖6係本發明一較佳實施例之分解圖。 圖7係本發明一較佳實施例探針之示意圖。 圖8 A係本發明第二較佳實施例探針肩部之剖視圖 圖8B係本發明第三較佳實施例探針肩部之剖視圖。 圖8C係本發明第四較佳實施例探針肩部之剖視圖。 圖9係本發明一較佳實施例探針座之局部放大剖視圖。 【主要元件符號說明】 1 半導體澍試設備 111測試載板 2 探針 25針頭 3 座體 321第一定位孔 410上穿孔 420下穿孔 71探針座固定環 9〇習知探針座 10探針座 12探針卡 21外管 26彈性針頭 31 .貫通孔 33下表面 421第二定位孔 5 定位桎 72 .驗證卡固定環 91探針隔環 11 測試頭 13基座 22肩部 27壓縮彈簧 32上表面 41 絕緣上蓋 42 絕緣下蓋 6 鎖附螺絲 9 習知探針 92上蓋板It is necessary to assemble them one by one to prevent the probe spacer 91 from falling out, which is quite time consuming and labor intensive. Further, since the conventional probe 9 is fixed in the conventional probe holder 9 ,, that is, the two elastic ends of the conventional probe 9 are also fixed and cannot be displaced up and down. At this time, when the conventional probe 90 is set (4) to the remainder (1), since the two elastic ends of the conventional probe 9 have a pre-stress amount, it is necessary to apply a considerable external force (about a few kilograms of weight to recognize the average As the whole of the probe holder 9G, and approaching the direction of the test carrier (1), it is approached to perform the lock-setting. However, if the force is not evenly applied at the time, the conventional probe holder 9G is in the middle side (four), The resulting guide post 94f is curved or broken. The severer is more likely to break the conventional probe holder 90 or the plate 1U. The guide post 94 is mainly used to provide positioning of the probe holder 90 when assembled with the test carrier 111. This shows that 'how to achieve a probe holder with simple structure, low cost, convenience, time and effort, and easy to install or disassemble, is an urgent need in the industry. BEIYUAN [Summary] 201107756 The present invention is a probe The needle base comprises: a body, an insulating upper cover, an insulating lower cover, and a plurality of probes. The base body includes a plurality of through holes, and the plurality of through holes are axially parallel to each other and extend through the base body respectively. Between the upper surface and the lower surface. The insulating upper cover is disposed on the upper surface of the base body, and the insulating upper cover comprises a plurality of upper perforations, wherein the plurality of upper perforations respectively correspond to the plurality of through holes of the base body, and each of the upper perforations has an aperture. The cover assembly is disposed on the lower surface of the base body, and the insulating lower cover includes a plurality of lower perforations, and the plurality of lower perforations respectively correspond to the plurality of through holes of the seat body, and each of the lower perforations also has an aperture thereof. Each of the plurality of probes includes an outer tube and two needles, and the outer tube has an outer diameter that is smaller than the upper and lower perforations, and the outer portions are respectively radially adjacent to the tube ends of the two ends. The shoulder is convexly disposed, and the shoulder has a radial dimension which is larger than the diameter of the upper perforation and the lower perforation. The two needles are respectively disposed in the two ends of the outer tube. The plurality of probes are disposed in the plurality of through holes of the base body, and the plurality of probes are respectively passed through the shoulders thereof, because the radial dimension is larger than the holes of the upper perforation and the lower perforation, and the locking limit is located on the insulating cover and the perforated disk is insulated. Between the perforations under the lower cover In addition, each probe has two ends and two needles. Since the outer diameter of the outer tube is smaller than the diameter of the upper perforation and the lower perforation, the perforation and the lower perforation can be respectively axially protruded and exposed. The upper cover of the insulating cover and the outer cover of the insulating cover. Therefore, the structure of the invention is simple, and the cost is saved, and the assembly is more convenient. Preferably, the insulating upper cover and the insulating lower cover of the present invention respectively comprise a poly-pyrene plate. Polyetherimide, PEI), or other non-conductive 戋 201107756 electrical insulation equivalent material can be used to form a plate, which can avoid multiple probes electrically connected to each other, resulting in short circuit can not be measured, or even burned machine The situation of the internal circuit occurs. In addition, the axial distance between the insulating cover and the insulating lower cover of the present invention may be greater than the axial distance of the corresponding two end shoulders of each of the outer tubes of the probe. Accordingly, each probe Up and down displacement can be caused by gravity or by applying a slight external force, which makes it easier to mount the probe holder on the test carrier. In particular, when the probe holder φ is applied to the test carrier, it is only necessary to apply a slight force on the probe holder to the test carrier, that is, to slightly press the probe holder, and all the probes have been The displacement from the direction of the test carrier is generated, and then the micro-down pressure is applied to easily attach the probe holder directly to the test carrier. Furthermore, the shoulder of each probe of the present invention may include a full-circle shoulder ring or a half-circle shoulder ring, or one, two, three, or several shoulder protrusions, which may be mainly used. To prevent the probe from penetrating through the perforation above the insulating cover or under the insulating lower cover to fall out of the probe holder. Further, the two needles of each of the probes of the present invention may be two elastic needles that can be axially stretched. Wherein, each of the probes 2 may include a compression spring housed in the outer tube, and the two needles respectively resist the two ends of the compression magazine, and the compression spring is used to provide the axial expansion and reset function of the needle. In addition, the present invention may further include at least one positioning post, and the upper surface and the lower surface of the base body may each be provided with at least one first positioning hole, and the insulating upper cover and the insulating lower cover may respectively be respectively provided with at least one second Positioning holes. The at least one positioning post can be disposed in the at least one first positioning hole and the at least one second positioning hole. Accordingly, the positioning post can be used to provide an insulating cover, and the under-insulation 201107756 cover is positioned on the base and can be further positioned on the base, thereby facilitating assembly. Moreover, the present invention may further include a plurality of locking screws, wherein the insulating upper cover and the insulating lower cover are locked to the upper surface and the lower surface of the base by a plurality of locking screws. And the invention may further comprise a probe holder retaining ring disposed on one side of the base. The probe holder retaining ring is mainly used to fix the seat body on the test carrier. Further, the present invention may further include a verification card fixing ring 'on the other side of the body. The verification card fixing ring is mainly used to fix the verification card on the probe base to fix the verification card. The verification card is mainly used for self-verification before testing. [Embodiment] Please refer to Fig. 6, which is a decomposition diagram of a probe holder of the present invention. The figure shows a body 3, which is made of aluminum. The plurality of through holes 31 are axially parallel to each other and extend through the upper surface 32 and the lower surface 33 of the base 3, respectively. In addition, an insulating upper cover 41 is shown which is assembled on the upper surface 32 of the base 3. The upper insulating cover 41 includes a plurality of upper through holes 410 which are respectively corresponding to the plurality of through holes 31 of the base 3, and each of the upper through holes 410 has a hole diameter d. Further, under the seat body 3, there is an insulating lower cover 42 which is assembled on the lower surface 33 of the base 3. The insulating lower cover 42 is also provided with a plurality of lower through holes 420» and a plurality of lower through holes 420 respectively corresponding to the plurality of through holes 31 of the base 3. Similarly, each of the lower perforations 420 also has an aperture d, which may be the same as the aperture d of the upper perforation 410, or may be set to a different aperture. In the embodiment of the present invention, the insulating cover 41 and the insulating lower cover 42 are respectively Poly-Ethylene (PEI), and of course, it may be a plate composed of an equivalent material of conductive or electrical insulation. Among them, the upper and lower sides of the base body 3 are respectively provided with a - verification card @] a fixed ring 72, and a probe holder fixing ring 7. The verification card retaining ring 72 is mainly used for the verification card (@not shown) on the probe base 1 () for the tester. The probe holder retaining ring 7 is mainly used to fix the probe holder 1 于 to the test carrier 111. Further, a plurality of locking screws 6 are shown in the figure, wherein the insulating upper cover 41 and the insulating lower cover 42 are locked to the upper surface 32 and the lower surface 33 of the base 3 by a plurality of locking screws 6. Further, the upper surface 32 of the base 3 and the lower surface 33 are respectively provided with a plurality of first positioning holes 32, and the insulating upper cover 41 and the insulating lower cover 42 are also respectively provided with a plurality of second positioning holes 421. The positioning post 5 is disposed in the first positioning hole 321 and the at least one second positioning hole 421 for positioning the insulating cover 41 and the insulating lower cover 42 on the base 3. The assembly is convenient. Moreover, when the probe base 10 is assembled to the test carrier ηι, the function of guiding and positioning the probe holder 1〇 and the test carrier 111 is further provided. Referring again to Figure 7, Figure 7 is a schematic illustration of a probe in accordance with a preferred embodiment of the present invention. The figure shows a plurality of probes 2, and each probe 2 includes an outer tube 21 and two needles 25. Wherein, the outer tube 21 has an outer diameter D which is smaller than the aperture d of the upper perforation 410 and the lower perforation 420, so that the outer tube 21 is movably displaced relative to the upper perforation 410 and the lower perforation 420. Moreover, a shoulder portion 22 is radially protruded from the outer tube 21 at a wall adjacent to the two ends. The shoulder portion 22 has a radial dimension W that is greater than the aperture d of the upper perforation 410 and the lower perforation 420, so that the shoulder 22 is limited to be larger than the upper perforation 410 and the lower perforation 420. According to this, through the 201107756 through the locking limit of the two end shoulders 22, the probe 2 will not fall off the probe base 1 〇 〇 〇 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , In the end of 21 bis. Further, in the present embodiment, the needle 25 is an elastic needle 26 which is axially stretchable. Among them, the elastic needle 26 is mainly disposed in the outer tube 21 because each of the probes 2 includes a compression spring 27. The two needles 25 respectively abut against the two ends of the compression spring 27 to provide the function of axial expansion and contraction of the needle 25 by the spring force of the compression spring π. 8A, FIG. 8B, and FIG. 8C, FIG. 8A is a cross-sectional view of a probe shoulder according to a second preferred embodiment of the present invention, and FIG. 8B is a cross-sectional view of the probe shoulder of the third preferred embodiment of the present invention, FIG. 8C A cross-sectional view of a probe shoulder of a fourth preferred embodiment of the present invention. In the present embodiment, the shoulder 22 of each probe 2 is a full circle of shoulder collars. It may of course also be a half-turn shoulder ring or one or two shoulder protrusions either ' as shown in Figures 8A, 8B, and 8C, respectively. BRIEF DESCRIPTION OF THE DRAWINGS Referring to Figure 9, Figure 9 is a partially enlarged cross-sectional view of a probe holder in accordance with a preferred embodiment of the present invention. In the figure, the plurality of probes 2 are respectively accommodated in a plurality of through holes 31 of the base 3. Moreover, the plurality of probes 2 are respectively transmitted through the shoulder portion 22 thereof, because the radial dimension W is larger than the aperture d of the upper through hole 41〇 and the lower through hole 42〇, and the locking limit is located above the insulating upper cover 41. The cover 42 is between the perforations 420. In addition, each probe 2 has two ends of the tube 21 and two needles 25. Since the outer diameter D of the outer tube is smaller than the diameter d of the upper perforation 41〇 and the lower perforation 420, it can axially pass through the corresponding upper portion. The through hole 4 丨〇 and the lower through hole 42 凸 are exposed outside the insulating upper cover 41 and the insulating lower cover 42. 201107756 However, the axial distance L between the insulating cover 41 and the insulating lower cover 42 in the present embodiment is greater than the axial distance 1 of the tube 21 corresponding to the two end shoulders 22 of each of the probes 2. Accordingly, each of the probes 2 can be displaced relative to the base 3 by gravity or by applying a slight external force, so that the probe holder 1 is more easily mounted to the test carrier 111. In detail, when the probe holder is mounted to the test carrier 111, only the probe holder 10 is slightly biased toward the test carrier U1, that is, the force of the probe holder 10 is slightly depressed. All of the probes 2 have been displaced from the direction of the test carrier 111 'and then only need to maintain a slight force below' to easily attach the probe holder retaining ring 7 to the test carrier 111. Therefore, in the present invention, when the probe holder 10 is mounted on the test carrier lu, the probe 2 can be freely displaced in the probe holder 10, so that it is not necessary to apply a relatively external force as is conventionally known. It is known that the positioning post 5 is bent, broken, or destroyed by the test carrier 111, or the probe holder 1 as is conventional. In this embodiment, the floating distance of the probe holder 10 when it is mounted on the test carrier lu is only 0.2 mm, and the conventional one is 2 mm, so that the difference in the pre-pressure amount can be known. Further, the probe 2 of the present invention is also replaced by a conventional probe spacer by a shoulder portion 22 in which the outer tube 21 is integrally provided. Therefore, in the present invention, when the probe 2 is assembled, it is not necessary to be carefully placed one by one as is conventionally required, and it is only necessary to easily sprinkle the needle and then slightly dial into the finishing, which saves time and labor. The above-mentioned embodiments are merely exemplified for the convenience of the description, and the scope of the claims is intended to be limited to the above embodiments. 201107756 [Simple description of the diagram] Figure 1 is a perspective view of a semiconductor test equipment. Figure 2 is a schematic diagram showing the g-head in position a. Figure 3 is a cross-sectional view of a conventional probe holder. Figure 4 is a partial enlarged cross-sectional view of a conventional probe holder. Figure 5 is a perspective view of a conventional probe. Figure 6 is an exploded view of a preferred embodiment of the present invention. Figure 7 is a schematic illustration of a probe in accordance with a preferred embodiment of the present invention. Figure 8A is a cross-sectional view of the probe shoulder of the second preferred embodiment of the present invention. Figure 8B is a cross-sectional view of the probe shoulder of the third preferred embodiment of the present invention. Figure 8C is a cross-sectional view of the probe shoulder of a fourth preferred embodiment of the present invention. Figure 9 is a partial enlarged cross-sectional view showing a probe holder in accordance with a preferred embodiment of the present invention. [Main component symbol description] 1 Semiconductor test equipment 111 test carrier 2 probe 25 needle 3 seat 321 first positioning hole 410 perforation 420 lower perforation 71 probe holder fixing ring 9 〇 conventional probe holder 10 probe Seat 12 probe card 21 outer tube 26 elastic needle 31. through hole 33 lower surface 421 second positioning hole 5 positioning 桎 72. verification card fixing ring 91 probe spacer 11 test head 13 base 22 shoulder 27 compression spring 32 Upper surface 41 Insulation cover 42 Insulation lower cover 6 Locking screw 9 Conventional probe 92 upper cover
12 201107756 93下蓋板 94導引柱 D 外徑 W徑向尺寸 d 孔徑 1，L軸向距離12 201107756 93 Lower cover 94 Guide column D Outer diameter W Radial dimension d Aperture 1, L axial distance
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