TW201100567A - Vacuum coating machine - Google Patents

Vacuum coating machine Download PDF

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Publication number
TW201100567A
TW201100567A TW98121930A TW98121930A TW201100567A TW 201100567 A TW201100567 A TW 201100567A TW 98121930 A TW98121930 A TW 98121930A TW 98121930 A TW98121930 A TW 98121930A TW 201100567 A TW201100567 A TW 201100567A
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TW
Taiwan
Prior art keywords
chamber
sensor
unloading
loading
carrier
Prior art date
Application number
TW98121930A
Other languages
Chinese (zh)
Inventor
Tai-Sheng Tsai
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW98121930A priority Critical patent/TW201100567A/en
Publication of TW201100567A publication Critical patent/TW201100567A/en

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Abstract

The present invention relates to a vacuum coating machine. The vacuum coating machine includes a coating chamber, a loading chamber, and an unloading chamber. A feed port and a discharge port are set at two ends of the coating chamber respectively. The loading chamber connects to the feed port. The loading chamber includes a holder, a first driving device, and a transmission device. The holder holds a number of holding plates. The holding plates are parallel to each other and are horizontal. The first driving device is fixed in the loading chamber. The first driving device connects to the holder. The first driving device drives the holder to move down, and makes the holding plate aiming at the feed port. The transmission device transmits the holding plate aiming at the feed port into the feed port. The unloading chamber connects to the discharge port. The unloading chamber includes an unloading holder and a second driving device. The holding plates is loaded on the unloading holder in level by level order. The second driving device is fixed in the unloading chamber. The second driving device connects with the unloading holder. The second driving device drives the unloading holder to move up.

Description

201100567六、發明說明: 【發明所屬之技術領域】 [0001] 本發明涉及一種真空鍍膜機 [0002] Ο [0003] [0004] 〇 098121930 【先前技術】 現有的真空鍍膜機使用時,在裝入及卸下裝載有待鍍工 件的載盤時’每一個載盤都需要人工將其取出,放置一 侧’再將下一個載盤裝入真空鍍膜機。此種鍍膜機在使 用時由於每次都需要人工將載盤取出、置入、拿上拿下 ,所以大大的增加了人力的消耗及影響了加工的連續性 ,從而導致生產效率低,人工耗費大。【發明内容】有鑒於此,有必要提供一種可提高生產姝率的真空鍍骐 機。 —種真空鍍膜機,其包括鍍犋腔室,所述鍍膜腔室兩端 具有入料α及出料口。所述真空锻膜機還包括裝栽腔室及卸载腔室。所述裝載腔室與所述入料口連接。所述裝 ^腔至内①有裝戴架、第—驅動機構及傳輸裝置。所 裝载架承载複數個水平 述第一驅動玫置的相互平行排列的载盤。所 機構與所述裝縣相 1餘㈣,舰第—驅動 動,且能夠將各載盤=,並驅動所述裝載架做下降運 於將對準所述入料口的栽所述入料口。所述傳輸裝置用腔室與所述出料口連接料〜所述人料口。所述卸載 第二驅動機構。所述卸=述卸載腔室内設有卸載架及 複數個載盤按層水平排/用於將從所述出料口出來的 表單編號咖 ^ °所述第二驅動機構固定於所 第5頁/共19頁 0982037276-0 201100567 述卸載腔室内。所诚楚 ,^ 砍第—驅動機構與所述卸載架相連接 [0005] [0006] [0007] 边驅動所述卸載架做上升運動。 ^發明提供的真空鍍膜機在裝载時按批裝載 ,卸載時將 個载餘序放置,可”—減品完全生產完後再 下’從而可有效減少人力及提高生產效率。 【實施方式】 下面將結合附圖,對本發明作進一步的詳細說明。201100567 VI. Description of the Invention: [Technical Field] [0001] The present invention relates to a vacuum coating machine [0002] 0003 [0003] [0004] 〇 098121930 [Prior Art] When a conventional vacuum coating machine is used, it is loaded And when removing the carrier loaded with the workpiece to be plated, 'each carrier needs to be manually removed, and the side is placed' and the next carrier is loaded into the vacuum coating machine. When the coating machine is used, it needs to manually take out, place, and take the carrier, which greatly increases the labor consumption and affects the continuity of the processing, resulting in low production efficiency and labor cost. Big. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide a vacuum rhodium plating machine which can increase the production efficiency. A vacuum coating machine comprising a rhodium-plating chamber having a feed a and a discharge port at both ends. The vacuum forging machine further includes a loading chamber and an unloading chamber. The loading chamber is coupled to the feed port. The cavity to the inner 1 has a mounting frame, a first driving mechanism and a transmission device. The loading rack carries a plurality of horizontally aligned carriers that are horizontally coupled to the first drive. The institution and the installed county are more than one (four), the ship is driven to drive, and each carrier can be driven, and the loading frame is driven to descend to the feeding material to be aligned with the inlet. mouth. The conveying device uses a chamber to connect the material to the discharge port to the human material port. The unloading the second drive mechanism. The unloading chamber is provided with an unloading rack and a plurality of trays are horizontally arranged in layers/for the form number from the outlet, and the second driving mechanism is fixed on the fifth page. / Total 19 pages 0982037276-0 201100567 Description Unloading chamber. It is true that the cutting mechanism is connected to the unloading frame. [0005] [0007] The unloading frame is driven to perform an ascending motion. The vacuum coating machine provided by the invention is loaded in batches during loading, and the loading sequence is placed during unloading, which can be “--after the finished product is completely produced and then lowered”, thereby effectively reducing manpower and improving production efficiency. The invention will be further described in detail below with reference to the accompanying drawings.

明參見圖1及圖2,本發明實施方式提供的一種真空鍍膜 機1 〇 0,所述真空鍍膜機i 0 0自一端向另一端依次設有裝 栽腔室10、鍍膜腔室20及卸緣腔室30。所述鍍膜腔室20 兩端設有入料口21及出料口22 *所述裝載腔室1〇與所述 入料口 21連接。所述卸載腔室30與所述出料口 22連接。 所述鍍膜腔室20内安裝有第一感測器23、第二感測器24 及傳輸帶25,所述第一感測器23用於感測承載待鍍工件Referring to FIG. 1 and FIG. 2, a vacuum coating machine 1 〇0 is provided in an embodiment of the present invention. The vacuum coating machine i 0 0 is provided with a loading chamber 10, a coating chamber 20 and a discharge from one end to the other end. Edge chamber 30. The coating chamber 20 is provided at both ends with a feed port 21 and a discharge port 22. The loading chamber 1 is connected to the inlet port 21. The unloading chamber 30 is connected to the discharge port 22. A first sensor 23, a second sensor 24 and a conveyor belt 25 are mounted in the coating chamber 20, and the first sensor 23 is used for sensing a workpiece to be plated.

的載盤200是否完全進入鍍膜腔室20。所述第一感測器23 可以採用位置感測器或位務感測器。本實施方式中,所 述第一感測器23採用位置感測器。當所述第一感測器23 感測到載盤200完全進入所述鍍膜腔室20内時,所述第一 感測器23發出第一訊號關閉所述入料口 21。所述第二感 測器24用於感測所述載盤2〇〇是否完全離開所述鍍膜腔室 20。所述第二感測器24可以採用位置感測器或位移感測 器。本實施方式中,所述第二感測器24採用位置感測器 。當所述第二感測器2 4感測到所述載盤2 〇 〇完全離開所述 鍍膜腔室20時,所述第二感測器24發出第二訊號關閉所 述出料口 22,並打開所述入料口 21。當然,所述鍍膜腔 098121930 表單編號A0101 第6頁/共19頁 0982037276-0 201100567 [0008] ΟWhether the carrier 200 completely enters the coating chamber 20. The first sensor 23 can employ a position sensor or a position sensor. In the embodiment, the first sensor 23 uses a position sensor. When the first sensor 23 senses that the carrier 200 has completely entered the coating chamber 20, the first sensor 23 sends a first signal to close the inlet port 21. The second sensor 24 is for sensing whether the carrier 2 is completely away from the coating chamber 20. The second sensor 24 can employ a position sensor or a displacement sensor. In this embodiment, the second sensor 24 uses a position sensor. When the second sensor 24 senses that the carrier 2 〇〇 completely leaves the coating chamber 20, the second sensor 24 sends a second signal to close the discharge port 22, And the inlet port 21 is opened. Of course, the coating chamber 098121930 Form No. A0101 Page 6 of 19 0982037276-0 201100567 [0008] Ο

[0009]G 098121930 至20也可以不包含所述第一感測器以及第二感測器μ, 接採用人工控制所述入料口 U及所述出料口 Μ的開閉 。本實施方式中,為了實現自動化連續生產,所以採用 第感測H23及第二感測H24。所述傳輪帶25用於帶動 承載工件的載盤2〇〇在所述鍍膜腔室2〇内部運動。 所述裝載腔㈣具有輯腔壁u,所述g餘壁u採用 =明麵,便於觀察所述|載腔室1G内部的工作狀態。 當然所述職腔室丨〇的輯腔㈣也可以採用不透明材 料製成’通過安裝觀察窗實現騎轉載腔室1G内部的 :作狀態的監控。本實施方式中’所述裝載腔壁u開設 有一裝載連接口 110,所述裝載連接則1〇與所述入料口 以尺寸相同,並與所述人料σ21連通1料載腔壁^ 内设有裝載架12、第-親動機構13、第三感測器η、傳 輸裝置15、清潔裝置16。 所述裝齡12祕戟賴财钱置㈣互 的載侧。所述裝載架12可關用平板承 利用支杆支撐所述載盤2〇〇。本實施 謂00或 12從上到下㈣距排__互⑽ 所述載盤200放置於所述承載板120上。所、+、板20。 括四根支朴12a。所·個iut杆12a载架12包 述承載板120包括固定部121及承栽部⑵。_列。所 121固定在所《載架12的四根支料l2a上所相定部 部122為矩形板狀結構,用於承載所述裁所述承載 止所述承載板120運_與所述傳料置i5 Q。為了防 載部122可以設計成能夠穿過所述傳輪裝置^隙:: ▲政祕灿 ΛΠ1 Λ1 7*7^' 表單編號A0101 第7頁/共19頁 0982037276-0 201100567 ,例如採用較窄的板或四個水平的杆結構。所述承載部 122也可以設計成具有可以讓傳輸裝置15穿過的形狀,例 如將所述承載部122設計成兩塊板或在其中間開設孔。本 實施方式中,將所述承載部122設計成較窄的板狀結構, 且承載部122的寬度、小於所述載盤2〇0的寬度L ,使所 述載盤2_;空的部分可以與所述傳輪裝㈣相接觸。為 了便於所述載㈣G在所述承载板12〇上滑動,所述承載 板120上還安裝複數個水平排列的滾輪M3。 [0010] 098121930 ⑽㈣屬13祕驅_述裝輪12做下降運動 ==嫌❶。依次對準所述入料…。本實施方 «載=—Γ_3能夠將各載盤2。°依次對準所 =載=u。。所述第一驅動 ❿螺杆或齒輪等傳動方式進行傳動。本實施方φ 所述第-驅動機構13採用氣墨 # " 驅動機構13可以手動控制,也可:傳動。所述第— 承載板120對準所述入料口幻 裝載架12的每個 承栽板12〇需要的時間及^^時間、載盤咖脫離 ( 設置所述第一驅動機構13動作的時門日、間’利用編程 測器感測所述裝載架12相對所述’還可以通過感 制所述第-驅動機構13。本實施^科口 21的位置,來控 機構13與所述第-感測器23及笫中’所述第-驅動 述第一驅動機構13利用所述第—❼㈣器14電連接。所 第三感測器14感測所述裝载架⑵:23的第—訊號及 的位置進行動作。當所述第裝裁連接口 11〇 -感測器23的第—訊號時,所述:機構13獲取到所述第 驅動機構13驅動所 表單編號·】 第8頁/共頁 0982037276-0 201100567 述裝栽架12做下降運動。 [0011] ο 器14與所述第一驅動機構13、傳輸裝置15 :裝置16電連接,用於感測所述載盤2GG相對所述入 料口 21的位置。本實施方式中,所述第三感測器14用於 述裝載連接口11()的位置。所述 第-感测器14可以採用位置感測器或位移感測器。本實 施方式中’所述第三感測器"採用光電位置感測器。所 述第感測器14固定在所述裝載腔壁η上。當所述裝載 架12的各承載板120承載的載盤200到達所述裝載連接口 110的位置時’第二感測器i 4向所述第—驅動機構U、傳 輸裝置15、清潔裝置16發出第三訊號,當所述第—驅動 機構13獲得第三訊號後停止運動。 [0012] ❹ 098121930 所述傳輸裝置15用於將對準所述入料口 21的載盤2〇〇運入 所述入料口 21。本實施方式中,所述傳輸裝置15用於將 對準所述裝載連接口 110的載盤200運入所述入料口 21。 所述傳輸裝置15可#設置於承载板12〇上,也可以單獨固 定到裝載腔室1 〇内。本實施方式中,所述傳輸裝置15單 獨安裝於所述裝載腔室10内。所述傳输策置15可以採用 輥子或傳動帶的方式傳輸。本實施方式中,所述傳輸裝 置15是兩對水平排布的輥子ι5〇並由兩個馬達151驅動。 每對輥子150内採用皮帶153傳動,以保持同步並節省馬 達151的數量。所述兩對輥子15〇之間的間隙大於所述承 載部122的寬度,且小於所述載盤2〇0的寬度、。從而防 止所述承載板120運動時與各對觀子丨5〇之間的干涉,且 可以傳輸所述載盤200。所述馬達151囡定於所述裝裁腔 第9頁/共頁 表單編號A0101 0982037276-0 201100567 室10的底部。所述傳輸裝置15可以採用與所述第一驅動 機構13相同的控制方式。本實施方式中,所述傳輸裝置 15與所述第-感測器23、第二感測器24及第三感測器14 電連接。當所述傳輸裝置15接收到所述第三感測器14發 出的第三訊號時,所述馬達151驅動所述輥子150轉動, 將所述載盤200運入所述入料口21。當獲取到所述第一感 測器23的第一訊號時停止傳輸動作。當所述載盤200完全 離開所述鑛膜腔室2G時,所述傳輸裝置15將接收到所述 第一感/則器24發出的第二訊號,並再次進行傳輸作業。 [0013] 所述清潔裝置1 6用於將對準所述入料口 21的載盤2 〇 0進行 清潔。本實施方式中,所述清潔裝置1佐用於將對準所述 裝載連接口110的載盤2〇〇進行清潔。本實施方式中,所 述清潔裝置16是安裝於所述裝載連接口 11〇頂部的去除靜 電的去離子風搶。當然,所述清潔裝置16還可以附加其 他清洗機構。所述清潔裝置16可以採用與所述第一驅動 機構13相同的控制方式。本實施方式中,所述清潔裝置 16與所述第一感測器23、第二感測器24及第三感測器14 電連接。當所述傳輸裝置15接收到所述第三感測器14發 出的第三訊號時,所述清潔裝置16進行清潔作業。當獲 取到所述第一感測器23的第一訊號時停止清潔作業。當 所述載盤200完全離開所述鍍膜腔室2〇時,所述清潔裝置 16將接收到所述第二感測器2 4發出的第二訊號,並再次 進行清潔作業。 所述卸載腔室30具有卸載腔壁31,所述卸載腔壁31採用 透明玻璃’便於觀察所述卸載腔室3〇内部的工作狀態。 098121930 表單編號A0101 第10頁/共19頁 0982037276-0 [0014] 201100567 Ο 當然所述卸載腔室30的卸載腔壁31也可以採用不透明材 料製成’通過安裝觀察窗實現對所述卸載腔室30内部的 工作狀恶的監控。本實施方式中,所述卸載腔室的卸 載腔壁31開設有一卸載連接口 310,所述卸載連接口31〇 與所述出料口 22尺寸相同,並與所述出料口 22連通。所 述卸載腔室30的卸載腔壁31内設有卸載架32、第二驅動 機構33及第四感測器34。所述卸載架32用於將從所述出 料口 22出來的複數個載盤200按層裝載於所述卸栽架32。 本實施方式中’所述卸載架32採用與所述裝載架12相同 的結構,在此不再贅述。所述卸載架32包括複數個從上 到下等間距水平排列的卸載板320。所述承載板32〇上還 安裝有複數個滾輪321,便於所述載盤200在所述卸載板 320表面滑動,提高裝載效率。 [0015] Ο 所述第二驅動機構33用於驅動所述卸載架32做上升運動 ,且能夠將所述卸載板320依次對準所述出料口 22。所述 第二驅動機構33可以採用液壓、氣壓、螺杆或齒輪等傳 動方式進行傳動。本實施方-式中,所述第二驅動機構33 採用氣壓缸進行傳動。所述第二驅動機構33能夠將各卸 載板320依次對準所述卸載連接口 310。所述第二驅動機 構33可以採用與所述第一驅動機構13相同的方式驅動。 本實施方式中,所述第二驅動機構33與所述第二感測器 24、第四感測器34電連接。所述第二驅動機構33通過所 述第二感測器24的第二訊號及第四感測器34感測所述卸 載架32相對所述卸載連接口 310的位置進行動作。當所述 第二驅動機構33獲取到所述第二感測器24的第二訊號時 098121930 表單編號Α0101 第11頁/共19頁 0982037276-0 201100567 [0016] [0017] [0018] 所述第-驅動機構13驅動所述裝載架12做上升運動。 所述第四感測器34用於感測所述卸載板32 心的位中,所述㈣物 測所述卸載板32°相對所述卸載連接口 310的位置 第四感測器34可以採用位置感測器或位移感測琴:斤述 施方式中,所述第四___ 本實 述第四感職固定在所述卸載腔壁31上。::Η 板320到達對應所•栽連接口 3ι〇的位置時=載 感測器34向所述第二驅動機獅發出第四訊號 第-驅動機構33獲㈣四喊後停止運動。 " 明參閱圖1及圖3,當所述真空嫂膜機丨⑽開始工作 .述第-驅動機構13㈣所述裝驗12做下降運動, 述第三感聰4感_所述裝載板糊達 田 口 110的位置時m〜 Ι3、_π 器14向所述第1動機構 飞裝置15、清潔裝置16發出第三訊號, 驅動機構13獲得第三訊觀停止運動。所裝' 15W151㈣料_職料行傳^ 同時所述相裝置ie開始進行清料業。 、 當所述第—感測器23感測到載盤·完全進人所述鍍膜腔 至20内f所述第_感測器23發出第一訊號關閉所述入 料口 .同時所述傳輸裝置15停止傳輸作# 裝置:6停止清潔作業’所述第一驅動機構13接收二 第Λ號後驅動所述裝栽架12做下降運動,將下_個穿 載板120下降到到達所述裝載連接口 110的位置,Α下1 鍍膜作準備。 為下人[0009] G 098121930 to 20 may not include the first sensor and the second sensor μ, and manually control the opening and closing of the inlet port U and the discharge port 。. In the present embodiment, in order to realize automatic continuous production, the first sensing H23 and the second sensing H24 are employed. The transfer belt 25 is used to drive the carrier 2 carrying the workpiece to move inside the coating chamber 2 . The loading chamber (4) has a chamber wall u, and the g residual wall u adopts a bright surface to facilitate observation of the working state inside the carrier chamber 1G. Of course, the chamber (4) of the chamber chamber can also be made of opaque material. By installing the observation window, it is possible to monitor the state inside the riding carrier chamber 1G. In the present embodiment, the loading chamber wall u defines a loading connection port 110, and the loading connection is 1 〇 and the inlet port are the same size, and communicate with the human material σ21 1 in the material carrier wall A loading frame 12, a first-inactive mechanism 13, a third sensor η, a transport device 15, and a cleaning device 16 are provided. The age of 12 is the secret of the money. The loading frame 12 can be used to support the carrier 2 by means of a flat plate. In the present embodiment, 00 or 12 is placed on the carrier board 120 from top to bottom (four) from the row __ mutual (10). , +, board 20. Includes four branches 12a. The carrier 12 of the iut bar 12a includes a fixing portion 121 and a receiving portion (2). _ column. The fixed portion 122 fixed to the four supports l2a of the carrier 12 is a rectangular plate-like structure for carrying the cutting load to the carrier plate 120. Set i5 Q. In order to prevent the load-bearing portion 122 from being able to pass through the transmission device, it is possible to: pass through the transmission device: ▲ 政秘灿ΛΠ1 Λ1 7*7^' Form No. A0101 Page 7/19 pages 0992037276-0 201100567 Plate or four horizontal rod structure. The carrier portion 122 can also be designed to have a shape that allows the transport device 15 to pass through, such as by designing the carrier portion 122 as two plates or opening a hole therebetween. In this embodiment, the bearing portion 122 is designed as a narrow plate-like structure, and the width of the bearing portion 122 is smaller than the width L of the carrier 2〇0, so that the carrier 2_; It is in contact with the transfer wheel (4). In order to facilitate the sliding of the carrier (4) G on the carrier board 12, a plurality of horizontally arranged rollers M3 are mounted on the carrier board 120. [0010] 098121930 (10) (four) is a 13 secret drive _ describes the wheel 12 to do the downward movement == dislike. Align the feeds in sequence. The present embodiment «Load = -Γ_3 can carry each carrier 2 . ° Align the = load = u in turn. . The first drive ❿ screw or gear is driven by a transmission mode. In the embodiment φ, the first drive mechanism 13 adopts an air ink # " the drive mechanism 13 can be manually controlled or driven. The time required for the first carrier plate 120 to align with each of the receiving plates 12 of the inlet port 12, and the time for the carrier to be detached (when the first driving mechanism 13 is set to operate) Sensing the loading frame 12 relative to the 'with a programmed tester can also sense the position of the first driving mechanism 13. The position of the control port 13 is controlled by the control mechanism 13 and the first - the sensor 23 and the first drive mechanism 13 of the first drive are electrically connected by the first means 14. The third sensor 14 senses the load carrier (2): 23 - the position of the signal and the action. When the first signal is connected to the first signal of the sensor port 23, the mechanism 13 acquires the drive number of the drive mechanism 13 to drive the form number. Page / Total Page 0982037276-0 201100567 The loading rack 12 is described as being descending. [0011] The device 14 is electrically connected to the first driving mechanism 13, the transmission device 15: the device 16 for sensing the carrier 2GG. The position of the inlet port 21 is opposite to the position of the inlet port 21. In the present embodiment, the third sensor 14 is used to describe the position at which the connection port 11 is mounted. The position sensor 14 or the displacement sensor can be used for the first sensor. In the present embodiment, the third sensor uses a photoelectric position sensor. The first sensor 14 is fixed at the camera. Loading the chamber wall η. When the carrier 200 carried by each carrier 120 of the loading frame 12 reaches the position of the loading port 110, the second sensor i 4 is directed to the first driving mechanism U, The transmission device 15 and the cleaning device 16 emit a third signal, and stop the movement when the first drive mechanism 13 obtains the third signal. [0012] 098 098121930 The transmission device 15 is used to align the inlet 21 The carrier 2 is transported into the inlet port 21. In the present embodiment, the transport device 15 is configured to transport the carrier 200 aligned with the loading port 110 into the inlet port 21. The transport device 15 may be disposed on the carrier 12 or may be separately fixed into the loading chamber 1 . In the present embodiment, the transport device 15 is separately mounted in the loading chamber 10. The transmission The system 15 can be transported by means of a roller or a belt. In the present embodiment, the transmission The device 15 is two pairs of horizontally arranged rollers ι5 〇 and is driven by two motors 151. Each pair of rollers 150 is driven by a belt 153 to maintain synchronization and save the number of motors 151. Between the two pairs of rollers 15 The gap is larger than the width of the carrying portion 122 and smaller than the width of the carrier 2〇0, thereby preventing interference between the pair of viewers 5 when the carrier 120 is moved, and the The carrier 200 is disposed at the bottom of the chamber 10 of the loading chamber page 9 / total page form number A0101 0982037276-0 201100567. The transmission device 15 can adopt the same control method as the first drive mechanism 13. In the embodiment, the transmission device 15 is electrically connected to the first sensor 23, the second sensor 24, and the third sensor 14. When the transmitting device 15 receives the third signal from the third sensor 14, the motor 151 drives the roller 150 to rotate, and the carrier 200 is transported into the inlet port 21. The transmission action is stopped when the first signal of the first sensor 23 is acquired. When the carrier 200 is completely separated from the film chamber 2G, the transport device 15 will receive the second signal from the first sensor 24 and perform the transfer operation again. [0013] The cleaning device 16 is for cleaning the carrier 2 〇 0 aligned with the inlet 21 . In the present embodiment, the cleaning device 1 is used to clean the carrier 2 that is aligned with the loading port 110. In the present embodiment, the cleaning device 16 is a deionized wind blast that is mounted on the top of the load port 11 去除 to remove static electricity. Of course, the cleaning device 16 can also be attached to other cleaning mechanisms. The cleaning device 16 can take the same control as the first drive mechanism 13. In the embodiment, the cleaning device 16 is electrically connected to the first sensor 23, the second sensor 24, and the third sensor 14. When the transmitting device 15 receives the third signal from the third sensor 14, the cleaning device 16 performs a cleaning operation. The cleaning operation is stopped when the first signal of the first sensor 23 is obtained. When the carrier 200 is completely away from the coating chamber 2, the cleaning device 16 will receive the second signal from the second sensor 24 and perform the cleaning operation again. The unloading chamber 30 has an unloading chamber wall 31 which is made of transparent glass to facilitate observation of the working state of the interior of the unloading chamber 3. 098121930 Form No. A0101 Page 10/Total 19 Page 0982037276-0 [0014] 201100567 Ο Of course, the unloading chamber wall 31 of the unloading chamber 30 can also be made of opaque material 'to achieve the unloading chamber by mounting the viewing window 30 internal work-like monitoring. In this embodiment, the unloading chamber wall 31 of the unloading chamber defines an unloading connection port 310, and the unloading port 31 is identical in size to the discharge port 22 and communicates with the discharge port 22. An unloading frame 32, a second driving mechanism 33, and a fourth sensor 34 are disposed in the unloading chamber wall 31 of the unloading chamber 30. The unloading frame 32 is for loading a plurality of loading trays 200 coming out of the discharge port 22 into the unloading rack 32 in layers. In the present embodiment, the unloading frame 32 has the same structure as the loading frame 12, and details are not described herein. The unloading frame 32 includes a plurality of unloading plates 320 horizontally arranged from top to bottom. The carrier plate 32 is further provided with a plurality of rollers 321 for sliding the surface of the loading plate 200 on the surface of the unloading plate 320 to improve loading efficiency. [0015] The second drive mechanism 33 is configured to drive the unloading frame 32 for ascending motion, and the unloading plate 320 can be sequentially aligned with the discharge port 22. The second drive mechanism 33 can be driven by a hydraulic, pneumatic, screw or gear transmission. In the embodiment, the second drive mechanism 33 is driven by a pneumatic cylinder. The second drive mechanism 33 is capable of sequentially aligning each of the unloading plates 320 with the unloading connection port 310. The second drive mechanism 33 can be driven in the same manner as the first drive mechanism 13. In the embodiment, the second driving mechanism 33 is electrically connected to the second sensor 24 and the fourth sensor 34. The second driving mechanism 33 senses the position of the unloading bracket 32 relative to the unloading connection port 310 by the second signal of the second sensor 24 and the fourth sensor 34. When the second driving mechanism 33 acquires the second signal of the second sensor 24, 098121930, the form number Α 0101, the 11th page, the 19th page, the 0982037276-0, the 201100567 [0016] [0018] The drive mechanism 13 drives the loading frame 12 for an upward movement. The fourth sensor 34 is used to sense the position of the unloading plate 32, and the fourth sensor 34 can measure the position of the unloading plate 32 relative to the unloading port 310. Position Sensor or Displacement Sensing Piano: The fourth ___ present fourth fourth sensor is fixed on the unloading chamber wall 31. :: When the board 320 reaches the position corresponding to the connection port 3 〇 = the sensor 34 sends a fourth signal to the second driver lion. The first drive mechanism 33 is (four) four shouted and then stops moving. " Referring to Figure 1 and Figure 3, when the vacuum laminating machine 丨 (10) starts working, the first driving mechanism 13 (4) described the inspection 12 to perform a descending motion, and the third sensation 4 sense _ the loading plate paste When the position of the Datian port 110 is m~Ι3, the _π unit 14 sends a third signal to the first moving mechanism flying device 15 and the cleaning device 16, and the driving mechanism 13 obtains the third subjective stop motion. The installed '15W151 (four) material _ job materials pass ^ at the same time the phase device ie began to clear the industry. When the first sensor 23 senses the carrier plate and completely enters the coating chamber to 20, the first sensor 23 sends a first signal to close the inlet port. At the same time, the transmission The device 15 stops transmitting #装置: 6 stops the cleaning operation. The first driving mechanism 13 receives the second nickname, drives the loading frame 12 to perform a descending motion, and lowers the lower carrier plate 120 to reach the The position of the connection port 110 is loaded, and the coating of the lower layer 1 is prepared. For the next person

098121930 表單編號Α0101 第12頁/共19頁 0982037276-0 201100567 [0019]098121930 Form number Α0101 Page 12 of 19 0982037276-0 201100567 [0019]

[0020] D[0020] D

[0021] ❹ [0022] [0023] [0024] [0025] 098121930 0982037276-0 當所述第二驅動機構33獲取所述第一感測器23的第一訊 號時,所述第二驅動機構33驅動所述卸載架32做上升運 動’當所述第四感測器34感測到所述卸載板320到達所述 卸载連接口 310的位置時,所述第四感測器34向所述第二 驅動機構33發出第四訊號’所述第二驅動機構33獲得控 制訊號後停止運動。 當所述鍍膜腔室20對所述載盤2〇〇上的工件進行完鍍膜作 業後’所述載盤200從所述鍍膜腔室2〇傳出。當所述第二 感測器24感測到所述載盤200完全從所述鍍膜腔室20離開 時,發出第一訊號::關閉所雖.忠:料口 2 2。當所述第二驅動 機構33獲取到所述第二感測器24發出的第二訊號時,驅 動所述卸載架32做上升運動,同時所述傳輸裝置15將裝 載腔室10内準備好的戴盤200進行傳輸,所述清潔裝置16 進行清潔,開始新的裴栽、卸載作業。 該發明提供的真空鍍骐機在装載時按批裝載,卸載時將 複數個載盤依序放置,可以等一批產品完全生產完後再 取下,從而可有效減少人力及提高生產效率。 另外,本領域技術人員可在本發明精神内做其他變化, 但疋,凡依據本發明精神實質所做的變化,都應包含在 本發明所要求保護的範圍之内。 圖式簡單說明】 圖1為本發明提供的真空鍍膜機的示意圖; 圖2為圖1的真空鍍膜機的内部示意圖; 圖3為圖1的真空鍍膜機工作狀態示意圖。 表單編號Α0101 第丨3頁/共19頁 201100567 【主要元件符號說明】 真空鍍膜機 100 載腔室 10 裝載腔壁 11 裝載連接口 110 裝載架 12 支撐杆 12a 承載板 120 固定部 121 承載部 122 滾輪 123 第一驅動機構 13 第三感測器 14 傳輸裝置 15 輥子 150 馬達 151 皮帶 153 清潔裝置 16 鍍膜腔室 20 入料口 21 出料口 22 第一感測器 23 第二感測器 24 傳輸帶 25 卸載腔室 30 卸載腔壁 31 卸載連接口 310 卸載架 32 卸載板 320 滾輪 321 第二驅動機構 33 第四感測器 34 載盤 200 098121930 表單編號A0101 第14頁/共19頁 0982037276-0[0022] [0023] [0024] [0025] 098121930 0982037276-0 When the second drive mechanism 33 acquires the first signal of the first sensor 23, the second drive mechanism 33 Driving the unloading frame 32 to perform an ascending motion. When the fourth sensor 34 senses the position where the unloading plate 320 reaches the unloading connection port 310, the fourth sensor 34 points to the The second driving mechanism 33 sends a fourth signal 'The second driving mechanism 33 stops the motion after obtaining the control signal. After the coating chamber 20 has finished coating the workpiece on the carrier 2, the carrier 200 is ejected from the coating chamber 2 . When the second sensor 24 senses that the carrier 200 is completely separated from the coating chamber 20, it sends out a first signal:: Close the loyalty: the port 2 2 . When the second driving mechanism 33 acquires the second signal from the second sensor 24, the unloading frame 32 is driven to perform an ascending motion, and the conveying device 15 prepares the loading chamber 10. The disc 200 is transported, and the cleaning device 16 performs cleaning to start a new picking and unloading operation. The vacuum rhodium plating machine provided by the invention is loaded in batches during loading, and a plurality of loading trays are sequentially placed during unloading, and can be removed after a batch of products are completely produced, thereby effectively reducing manpower and improving production efficiency. In addition, those skilled in the art can make other changes in the spirit of the invention, and all changes which are made according to the spirit of the invention should be included in the scope of the invention. Brief Description of the Drawings Fig. 1 is a schematic view of a vacuum coating machine provided by the present invention; Fig. 2 is a schematic view showing the inside of the vacuum coating machine of Fig. 1; Fig. 3 is a schematic view showing the working state of the vacuum coating machine of Fig. 1. Form No. Α0101 Page 3 of 19 201100567 [Description of main components] Vacuum coating machine 100 Carrier chamber 10 Loading chamber wall 11 Loading connection port 110 Loading frame 12 Support rod 12a Carrier plate 120 Fixing portion 121 Bearing portion 122 Roller 123 First drive mechanism 13 Third sensor 14 Transfer device 15 Roller 150 Motor 151 Belt 153 Cleaning device 16 Coating chamber 20 Inlet 21 Outlet 22 First sensor 23 Second sensor 24 Conveyor belt 25 Unloading chamber 30 Unloading chamber wall 31 Unloading connection port 310 Unloading frame 32 Unloading plate 320 Roller 321 Second drive mechanism 33 Fourth sensor 34 Carrier plate 098121930 Form No. A0101 Page 14 of 19 0982037276-0

Claims (1)

201100567 七、申請專利範圍: .種真空鍍膜機,其包括鍍骐腔室,所述鍍膜腔室兩端具 有入料口及出料口,其改進在於,所述真空鍍膜機還包括 裝栽腔室及卸載腔室’所述裝載腔室與所述入料口連接, 所述裝載腔室内設有裝載架、第一驅動機構及傳輸裝置, 所述裝載架承載複數個水平放置的相互平行排列的載盤, 所述第一驅動機構固定於所述裝載腔室内,所述第一驅動 機構與所述裝載架相連接,並驅動所述裝載架做下降運動 Ο 且能夠將各載盤對準所述入料口,所述傳輸裝置用於將 子準所述入料口的載盤運入所述入料口,所述卸載腔室與 所述出料口連接’所述卸載腔室内設有卸載架及第二驅動 ’所述卸載架用於將從所述击料口出來的複數個載盤 按層水平排列,所述第二驅動機構固定於所述卸載腔室内 所述第二驅動機構與所述卸載架相連接,並驅動所述卸 栽架做上升運動。 如申凊專利範圍第1項所述之真空鍍膜機,其中,所述裝 Ο 载腔至還包括清潔裝置,所述清潔裝置設置於所述入料口 周圍所述凊潔裝置用於將對準所述入料口的載盤進行清 潔。 如申明專利範圍第丨項所述之真空鍍膜機,其中,所述真 二鑛膜機還包括第_感測器及第二感測器,所述第一感測 器没置於所述鍍膜腔室内,所述第一感測器用於感測所述 載盤是否完全進入所述鍍膜腔室,所述第一感測器與所述 第一驅動機構、第二驅動機構及傳輸裝置電連接,所述第 —感測器設置於所述鍍膜腔室内,所述第二感測器用於感 098121930 表單編號ΑΟίοι 第15頁/共19頁 0982037276-0 201100567 測所述戴盤是否完全難開所述錢模腔室,所述第二减鄉器 與所述第-駆動機構、第二驅動機構及傳輸遵接。 4 .如辛請專利範菌第】項所述之真空朗機,㈣ 載腔室還包括第三感測器,其用於感、 逨裝 述入料口的位置’所述第三感挪器與〜述裝載架相對所 傳輸裝置電連接’所述裝載腔室還包括二第11動機構及 於感測所述卸載架相對所述出料口的饭弟四感測器’其用 器與所述第二驅動機構電連接。 |’所述第四感測 如申請專利範圍第3項所述之真空鍍犋機 -感測器及第二感挪器採用位移感夠 其+所述第 7 8 9 10 如申請專利範圍第4項所述之真空鑛鱗機#置感測器。 三感測器及第四感測器採用位移感硎器或其中’所述第 如申請專職韻述之真錢以位置感測器。 載架包括沿所述裝载_動方向按層心其中,所述裝 ,所述載減置於所述承餘上。W她個承載板 如申請專利範圍第1項所述之真空鍍祺機,: 載架還包括趣個滾輪,爾載盤放h其中,所述裝 如申請專利_们項所歧·_機所述滾輪上。 輸裝置採⑽子或傳動帶的方式傳輪。其中’所述傳 如申請專利範圍第!項所述之真空料 載腔室及卸栽腔室的腔壁採用透明材料製成、中,所述裝 098121930 表單編號A0101 第16頁/共19頁 0982037276-0201100567 VII. Patent application scope: A vacuum coating machine comprising a rhodium plating chamber, the coating chamber has an inlet port and a discharge port at both ends, the improvement is that the vacuum coating machine further comprises a loading chamber The loading chamber is connected to the inlet port, and the loading chamber is provided with a loading frame, a first driving mechanism and a conveying device, and the loading frame carries a plurality of horizontally placed parallel rows a loading plate, the first driving mechanism is fixed in the loading chamber, the first driving mechanism is connected to the loading frame, and drives the loading frame to perform a descending motion and can align the loading plates The feeding device is configured to transport the carrier of the inlet port into the inlet port, and the unloading chamber is connected with the outlet port. Having an unloading frame and a second drive' for unloading the plurality of carriers from the hitting port horizontally, the second driving mechanism being fixed to the second driving in the unloading chamber Mechanism and the unloading rack Connection, and drives the carrier do unmounted and upward movement. The vacuum coating machine of claim 1, wherein the loading chamber further comprises a cleaning device, the cleaning device is disposed around the inlet port, and the cleaning device is used for The carrier of the inlet is ready for cleaning. The vacuum coating machine of claim 2, wherein the true two-mine film machine further comprises a first sensor and a second sensor, wherein the first sensor is not placed on the coating Inside the chamber, the first sensor is configured to sense whether the carrier plate completely enters the coating chamber, and the first sensor is electrically connected to the first driving mechanism, the second driving mechanism and the transmission device The first sensor is disposed in the coating chamber, and the second sensor is used to sense 098121930. Form number ΑΟίοι Page 15 / 19 pages 0982037276-0 201100567 It is determined whether the wearing plate is completely difficult to open. The money die chamber is described, and the second reducer is in compliance with the first tilting mechanism, the second driving mechanism, and the transmission. 4. The vacuum chamber described in the patent application, (4) the carrier chamber further includes a third sensor for sensing the position of the inlet port. The load chamber is electrically connected to the transfer device. The loading chamber further includes two 11th moving mechanism and a sensor for sensing the unloading frame relative to the discharge port. It is electrically connected to the second drive mechanism. The fourth sensing is as described in claim 3, wherein the vacuum rhodium-sensor and the second sensor have a displacement sense sufficient for the +78 9 10 as claimed. The vacuum scale machine described in 4 items is placed on the sensor. The three sensors and the fourth sensor employ a displacement sensor or a position sensor in which the above-mentioned full-time rhyme is applied. The carrier includes a layered core along the loading direction, and the load is placed on the bearing. W her carrier plate as in the vacuum plating machine described in the first paragraph of the patent application, the carrier also includes a fun wheel, which is placed on the disk, and the device is as patented. On the roller. The transmission device adopts the mode of the (10) sub-transmission belt or the transmission belt. Among them, the said patent is the scope of patent application! The vacuum loading chamber and the chamber wall of the unloading chamber are made of a transparent material, and the medium is 098121930. Form No. A0101 Page 16 of 19 0982037276-0
TW98121930A 2009-06-30 2009-06-30 Vacuum coating machine TW201100567A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113684463A (en) * 2021-08-19 2021-11-23 北京北方华创真空技术有限公司 Flat plate continuous PVD equipment and support plate bias voltage leading-in device thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113684463A (en) * 2021-08-19 2021-11-23 北京北方华创真空技术有限公司 Flat plate continuous PVD equipment and support plate bias voltage leading-in device thereof

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