201043916 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種幾何誤差檢測裝置，特別是指— 曰種採 用光學非接觸式檢測，以達成得到機具誤差與機具架設a 精確度的誤差檢測裝置。 η 【先前技術】 機具幾何誤差檢測大多採用雷射干涉儀為主要之檢測儀 〇 器，也因此雷射干涉儀被公認為最精密的檢測儀器之一；此 外，雷射干涉儀兼具大檢測範圍與奈米等級解析度等特點， 因而被廣泛的應用在各種精密機具的檢測，包括電腦數值工 具機（CNC)、三次元量床（CMM)、高精度磨床、半導體設備等 高精度機具。 但是，雷射干涉儀仍無法大量的被應用於一般的加工 3廠，主要是其價格過高，一套雷射干涉儀基本模組（即僅有 位置誤差檢測功能）之售價皆在新台幣六十萬，一般加工廠 無法負擔，此外，尚有角度誤差檢測模組、直度誤差檢測模 組、垂直度誤差檢測模組、誤差檢測模組等，一套檢測儀器 成本超過新台幣一百五十萬元；此外，每個模組僅能檢測單 一誤差，且其架設方式皆不同，也直接影響業者的使用意願。 雷射干涉儀由於一次安裝，只能測量一種誤差要素，並且 在母項測量前的安裝和雷射道路調整是費時的。因此，一些 3 201043916 開發方法與測量系統已經能在工作同時測量多個幾何學誤 差以加快量測速率。此外利用大反射鏡的觀念已被提出，使 得位移路徑不受單一直線所限制，但是在架設時，大反射鏡 必須與雷射光線垂直，此外，架構本身有其他的限制尚未克 服。 因此，本發明為開發一套簡易式機具幾何誤差檢測系 統，應用光電感測器與準直光源的結合，建構一套可檢測直 〇度、垂直度、角度等誤差之系統，以大幅降低成本。 本發明並依使用者之需求，分別建構直度誤差檢測模 組、垂直度誤差檢測模經、角度誤差檢測模組等，以簡化檢 測程序與步驟，方便使用者進行機具檢測。 【發明内容】 本發明之目的即在於提供—種幾何誤差檢測裝置，以達 成南精確度要求之簡易式機具檢測系统之裝置。 Ο 本發明之么-目的係在於提供一種光學式儀器具有高解 析度ffij且並不會受到磁場的干擾造成量測的誤差的檢測機 具誤差之裝置。 本發明之另一目的係在於提供一種可以利用於各種工作 場合上’並具有低成本、高精確度、體積小、攜帶方便、架 設簡易及檢測迅速等特性的檢測機具誤差之裝置。 可達成上述發明目的之幾何誤差檢測裝置，包括有： 檢測模組，係由發射裝置產生至少一光束輸出； 4 201043916 至少一光電感測器，用以接收光束； 其中，該光束輸出方向與檢測方向相互平行，若檢測後 無誤差產生，則檢測光點位置與起始光點位置相同；反之， 若檢測後有誤差產生，則檢測光點位置會隨著誤差的變化改 變。 該檢測模組用於直度檢測，係由單個光電感測器所構 成，用於接收檢測模組發射之準直光束，以檢測單一軸向之 〇 兩個直度誤差； 該檢測模組用於角度檢測，係由一光電式感測器與一個 透鏡所構成，用於接收檢測模組發射之準直光束，以檢測單 一轴向之兩個角度誤差； 該檢測模組用於平行度及橫轉角度檢測，係由二光電感 測器所構成，用於接收檢測模組發射之準直光束，以檢測單 一轴向橫轉角度與平行度。 〇 【實施方式】 請參閱圖一’本發明所提供之幾何誤差檢測裝置，主要 包括有：一檢測模組1，係由發射裝置產生至少一光束輸出； 至少一光電感測器2，用以接收光束； 其中，該光束輸出方向與檢測方向相互平行，若檢測後 無誤差產生’則檢測光點位置與起始光點位置相同；反之， 若檢測後有誤差產生，則檢測光點位置會隨著誤差的變化改 變。 5 201043916 則述發射裝置為一雷射光源、或一準直光源、或一光源 11經介質透鏡分解成二或三光束；其中，該介質透鏡為分光 鏡12、聚焦透鏡、準直透鏡。 如圖一所示，當機台進行單一轴向（X轴）運動時，分別 對另外兩個軸向（Y軸與2軸）產生平移現象，此稱為直度誤 差，本發明為利用二維光電感測器2，配合檢測模組i内的 準直光源U ’建構一直度誤差檢測模組1，以簡化直度檢測 〇之程序；本發明的發射裝置為將一準直光源u輸出一光束， 如圖二所示，該光束入射於移動端上的光電感測器2，且該 光束輸出方向與光電感測器2的檢測方向相互平行，經由起 始光點位置與檢測光點位置是否相同，以檢測移動端的直度 誤差。利用二維光電感測器2之特性，在單一次檢測程序中， 即可獲得二個軸向（γ軸與2轴）的直度誤差，大幅減少檢測 時間。該移動端為移動主轴或是移動床台 〇 該直度誤差檢測之架設方式有二，分別為： 該檢測模組i架設於待測機台之固定端，該二維光電感 測器2架設於待測機台之移動端；準直光源u之方向與機 台移動方向平行； 、該檢測模組1架設於待測機台之移動端，該二維光電感 測器2架設於待測機台之固定端。 在檢測時’準直光源11之方向與機台移動方向相互平 行。在檢測時’若無直度誤差產生，則檢測光點位置與起始 6 201043916 光點位置點相同；反之，則檢測光點位置會隨著誤差的變 4匕’改變，如尉一一 圖二·所示。最後再經由公式之計算，即可獲得 待測機台之兩個軸向直度誤差。 機具在組裴時，由於各個因素的影響，導致三個線性軸 ( 與z轴）無法完全垂直地被組裝。如圖四與圖五所示， 本發明為利用二維光電感測器2，配合檢測模組1内的準直 光源11與分光鏡12，建構一垂直度誤差檢測模組丨，其中 〇該發射裝置為將準直光源11入射一分光鏡12，使之產生互 為垂直之穿透光與反射光，利用此兩道光束入射於移動端上 互為垂直的二光電感測器2，經由起始光點位置與檢測光點 位置是否相同’以檢測移動端的垂直度誤差。 如圖六所示，該發射裝置能為二垂直設置的雷射光源u 或準直光源11’二雷射光源11或二準直光源u亦能產生互 為垂直的二光束。 Ο 如圖七所示’亦可利用準直光源11入射一分光鏡12的 光路設計，將準直光源11分為二道互為垂直之光束。 如圖八所示’亦可利用準直光源11入射二分光鏡i 2的 光路設計’將準直光源11分為三道互為垂直之光束，即可 檢測機具三軸之垂直度。 如圖九所示，該發射裝置能為三垂直設置的準直光源 11 ’三準直光源11亦能產生互為垂直的三光束，以檢測機 具三軸之垂直度。 7 201043916 該移動端為移動主軸或是移動床台，其垂直度檢測程序 為如下： 1.將檢測模組1架設於機具之主軸上； 2·架設光電感測器2於對應光束之機台上； 3. 光束入射光電感測器2 ; 4. 將光電感測器2測得之數據導入計算後，即可獲得對 應轴的垂直度誤差β 〇 機具之角度誤差包括俯仰角度（Pitch)、搖擺角度（Yaw) 與橫轉角度（Roll)等。本發明依檢測角度不同，可分為二個 部分，第一部分為俯仰角度與搖擺角度的檢測，而第二部分 為橫轉角度的檢測。201043916 VI. Description of the Invention: [Technical Field] The present invention relates to a geometric error detecting device, in particular to - an optical non-contact type detecting, to achieve error detection of machine tool error and machine tool setting a precision Device. η [Prior Art] Most of the geometric error detection of the machine uses the laser interferometer as the main detector, so the laser interferometer is recognized as one of the most sophisticated instruments; in addition, the laser interferometer has a large detection The range and nanometer resolution are widely used in the detection of various precision machines, including computer numerical tools (CNC), three-dimensional measuring bed (CMM), high-precision grinding machines, semiconductor equipment and other high-precision machines. However, the laser interferometer is still not widely used in general processing 3 factories, mainly because its price is too high, and the price of a basic module of a laser interferometer (that is, only the position error detection function) is new. NT$600,000, the general processing factory can not afford, in addition, there are angle error detection module, straightness error detection module, verticality error detection module, error detection module, etc., a set of testing equipment costs more than NT$ One hundred and five hundred thousand yuan; in addition, each module can only detect a single error, and its erection method is different, which also directly affects the willingness of the operators. The laser interferometer can only measure one error factor in one installation and the installation and laser road adjustment before the parent measurement is time consuming. Therefore, some 3 201043916 development methods and measurement systems have been able to measure multiple geometric errors simultaneously while working to speed up the measurement rate. In addition, the concept of using large mirrors has been proposed so that the displacement path is not limited by a single line, but when erected, the large mirror must be perpendicular to the laser beam, and the architecture itself has other limitations that have not yet been overcome. Therefore, the present invention develops a simple geometrical error detection system for a machine tool, and combines a photo-inductance detector with a collimated light source to construct a system for detecting errors such as straightness, verticality, and angle, thereby greatly reducing the cost. . According to the invention, the straightness error detection module, the verticality error detection mode, and the angle error detection module are respectively constructed to simplify the detection procedure and the steps, and the user is convenient to perform the tool detection. SUMMARY OF THE INVENTION It is an object of the present invention to provide a device for detecting a geometrical error detecting device to achieve a simple machine tool detection system with accuracy requirements. Ο The present invention is directed to an apparatus for detecting an instrument error in which an optical instrument has a high resolution ffij and is not subject to measurement errors due to disturbance of a magnetic field. Another object of the present invention is to provide a device which can be utilized in various workplaces and which has the advantages of low cost, high precision, small size, convenient carrying, easy installation, and rapid detection. A geometric error detecting device capable of achieving the above object, comprising: a detecting module, wherein at least one beam output is generated by the transmitting device; 4 201043916 at least one photo-inductor for receiving a beam; wherein the beam output direction and detection The directions are parallel to each other. If no error occurs after the detection, the position of the detection spot is the same as the position of the starting spot; conversely, if an error occurs after the detection, the position of the detected spot changes with the change of the error. The detection module is used for straightness detection, and is composed of a single optical inductance detector for receiving a collimated beam emitted by the detection module to detect two straightness errors in a single axial direction; The angle detection is composed of a photoelectric sensor and a lens for receiving the collimated beam emitted by the detection module to detect two angle errors of a single axis; the detection module is used for parallelism and The transverse angle detection is composed of a two-photon sensor, which is used for receiving the collimated beam emitted by the detection module to detect a single axial transverse angle and parallelism.实施 [Embodiment] Please refer to FIG. 1 'The geometric error detecting device provided by the present invention mainly includes: a detecting module 1 which generates at least one beam output by the transmitting device; and at least one photo-inductor 2 for Receiving beam; wherein, the beam output direction and the detecting direction are parallel to each other, and if no error occurs after the detection, the position of the detecting spot is the same as the position of the starting spot; otherwise, if an error occurs after the detecting, the position of the detecting spot is detected As the error changes, it changes. 5 201043916 The transmitting device is a laser light source, or a collimated light source, or a light source 11 is split into two or three light beams by a dielectric lens; wherein the dielectric lens is a beam splitter 12, a focusing lens, and a collimating lens. As shown in Fig. 1, when the machine performs a single axial (X-axis) motion, a translation phenomenon occurs for the other two axial directions (Y-axis and 2-axis), which is called a straightness error, and the present invention utilizes two The photo-electrical sensor 2 cooperates with the collimated light source U' in the detection module i to construct the continuous error detecting module 1 to simplify the procedure of the straightness detecting ;; the transmitting device of the present invention outputs a collimated light source u a light beam, as shown in FIG. 2, the light beam is incident on the photodetector 2 on the moving end, and the beam output direction is parallel to the detecting direction of the photodetector 2, via the starting spot position and the detecting spot Whether the positions are the same to detect the straightness error of the moving end. By utilizing the characteristics of the two-dimensional photo-electrical sensor 2, the straightness error of the two axial directions (γ-axis and 2-axis) can be obtained in a single detection procedure, which greatly reduces the detection time. The moving end is a moving spindle or a moving bed. The straightness error detection is set up in two ways: the detecting module i is mounted on the fixed end of the machine to be tested, and the two-dimensional optical sensor 2 is erected. On the moving end of the machine to be tested; the direction of the collimated light source u is parallel to the moving direction of the machine; the detecting module 1 is erected on the moving end of the machine to be tested, and the two-dimensional optical sensor 2 is set to be tested The fixed end of the machine. At the time of detection, the direction of the collimated light source 11 and the moving direction of the machine are parallel to each other. In the detection, if there is no straightness error, the position of the detection spot is the same as the position of the starting point of 201043916; otherwise, the position of the detection spot will change with the error, such as a map. Second, shown. Finally, through the calculation of the formula, the two axial straightness errors of the machine under test can be obtained. When the implement is in the stack, the three linear axes (and the z-axis) cannot be assembled completely vertically due to various factors. As shown in FIG. 4 and FIG. 5, the present invention constructs a verticality error detecting module 利用 by using the two-dimensional photo-electrical sensor 2, the collimating light source 11 and the beam splitting mirror 12 in the detecting module 1. The transmitting device is configured to inject the collimating light source 11 into a beam splitting mirror 12 to generate mutually perpendicular penetrating light and reflected light, and the two light beams are incident on the moving end with the two vertical photodetectors 2, respectively. Whether the starting spot position is the same as the detecting spot position 'to detect the perpendicularity error of the moving end. As shown in Fig. 6, the transmitting device can generate two mutually perpendicular laser beams or two collimated light sources 11 or two collimated light sources. Ο As shown in Fig. 7, the collimated light source 11 can also be divided into two mutually perpendicular beams by using the collimated light source 11 to enter the optical path of the dichroic mirror 12. As shown in Fig. 8, the optical path design of the dichroic mirror i 2 can also be used to divide the collimated light source 11 into three mutually perpendicular beams, thereby detecting the perpendicularity of the three axes of the implement. As shown in Fig. 9, the launching device can be a three-vertical collimated light source 11'. The three collimated light sources 11 can also generate three beams perpendicular to each other to detect the perpendicularity of the three axes of the machine. 7 201043916 The mobile terminal is a moving spindle or a moving bed. The verticality detection procedure is as follows: 1. Mount the detection module 1 on the spindle of the machine; 2. Set up the optical sensor 2 on the machine corresponding to the beam. 3. Beam incident light inductor 2; 4. After the data measured by photodetector 2 is imported into the calculation, the verticality error of the corresponding axis can be obtained. 〇 The angular error of the machine includes the pitch angle (Pitch), Yaw angle and roll angle (Roll). The invention can be divided into two parts according to different detection angles, the first part is the detection of the pitch angle and the swing angle, and the second part is the detection of the transverse angle.
如圖十所示，該檢測模組丨内的發射裝置為準直光源U 所輸出一光束，且其中該光電感測器2進而於輸入端前增設 一聚焦透鏡21，使該光束入射於移動端上的聚焦透鏡21與 〇光電感測器2後’該光束輸出方向與光電感測器2的檢測方 向相互平行，並應用視準儀原理消除發射裝置與光電感測器 2距離變化之影響，經由起始光點位置與檢測光點位置是否 相同，以檢測移動端的俯仰角度與搖擺角度誤差。其架設與 檢測程序為： 1·將檢測模組1架設於機具固定端，並調整光束方向為 待測機具之檢測軸方向（即移動軸之方向）； 2.將光電感測器2固定於相對檢測模组i之光束之機具 8 201043916 移動端； 3 ·移動機具進行檢測。 如圖十一與圖十二所示，該檢測模組1内的發射裝置為 將準直光源11入射複數分光鏡12,以產生兩道光束入射於 移動端上互為平行的二光電感測器2,當橫轉角度誤差產生 時，檢測模組1會沿著光電感測器2移動方向旋轉，藉由起 始光點位置與檢測光點位置是否相同以檢測移動端的橫轉 〇 角 度誤差。圖十四為準直光源11入射複數分光鏡12，以產 生兩道相互垂直光束之示意圖’以提供同時量測二個線性軸 (X軸與γ軸、γ軸與Ζ軸、ζ轴與X轴）。 如圖十一與圖十三所示’該檢測模組1内的發射裝置為 將二準直光源11產生兩道光束入射於移動端上互為平行的 二光電感測器2 ’當橫轉角度誤差產生時，檢測模組1會沿 著光電感測器2移動方向旋轉，藉由起始光點位置與檢測光 Ο 點位置是否相同以檢測移動端的橫轉角度誤差。 當橫轉角度誤差產生時，機具會沿著移動軸旋轉，因此， 藉由二組光電感測器2，即可檢測出橫轉角度誤差。其架設 與檢測程序為： 1. 將檢測模組1架設於機具固定端，並調整光束方向為 待測機具之檢測軸方向（即移動軸之方向）； 2. 將二光電感測器2固定於相對檢測模組i之光束之機 具移動端； 9 201043916 3.移動機具進行檢測。 在檢測時，準直光源11之方向與機台移動方向相互平 行。在檢測時，若無角度誤差產生，則檢測光點位置與起* 先點位置點相同；反之，則檢測光點位置會隨著誤差的變 化’改變’如圖三所示。最後再經由公式之計算，即可獲得 待測機台之角度誤差。 综上所述’本案不但在空間型態上確屬創新，並能較習 〇用物品增進上述多項功效’應已充分符合新穎性及進步性之 法定發明專利要件’爰依法提Μ請，㈣貴局核准本件 發明專利申請案，以勵發明，至感德便。 【圖式簡單說明】 圖一為發射裝置以一光束入射光電感測器檢測直度誤差 的立體示意圖； 圖二為發射裝置以雷射光源或準直光源射出一光束之視 〇 圖； 圖三為該光電感測器上檢測光點位置會隨著誤差變化的 不意圖； 圖四與圖五為發射裝置產生互為垂直的光束於二光電感 測器檢測垂直度誤差的立體示意圖； 圖六為發射裝置以二垂直設置的雷射光源或準直光源射 出二光束之示意圖； 圖七為發射裝置以雷射光源或準直光源入射一介質透 201043916 鏡，並分為二道互為垂直光束之示意圖； 圖八為該發射裝置以雷射光源或準直光源入射複數介質 透鏡，並分為三道互為垂直光束之示意圖； 圖九為發射裝置以三垂直設置的雷射光源或準直光源， 產生互為垂直的三道光束之示意圖； 圖十為發射裝置輸出一光束並入射聚焦透鏡與光電感測 器以檢測俯仰角度與搖擺角度誤差的立體示意圖； 〇 圖十一為發射裝置輸出二光束並入射二光電感測器以檢 測橫轉角度誤差的立體示意圖； 圖十二為該發射裝置以雷射光源或準直光源入射複數介 質透鏡，以提供二道互為平行光束之示意圖； 圖十二為發射裝置以二平行設置的雷射光源或準直光源 射出二光束之示意圖； 〇 圖十四為該發射裝置以雷射光源或準直光源入射複數介 質透鏡，以提供相互垂直二道光束之示意圖。 【主要元件符號說明】 1 檢測模組 11 光源 12分光鏡 2光電感測器 21聚焦透鏡As shown in FIG. 10, the transmitting device in the detecting module 为 outputs a light beam for the collimated light source U, and wherein the photo-electrical sensor 2 further adds a focusing lens 21 in front of the input end to make the light beam incident on the moving After the focusing lens 21 on the end and the calendering sensor 2, the beam output direction is parallel to the detecting direction of the photodetector 2, and the influence of the distance between the transmitting device and the photodetector 2 is eliminated by applying the collimator principle. Whether the pitch angle and the swing angle error of the moving end are detected via the position of the starting spot and the position of the detecting spot. The erection and detection procedures are as follows: 1. Mount the detection module 1 on the fixed end of the implement, and adjust the beam direction to the detection axis direction of the tool to be tested (ie, the direction of the moving axis); 2. Fix the photo-electrical sensor 2 to The tool for detecting the beam of the module i is 8 201043916 moving end; 3 · moving the machine for detection. As shown in FIG. 11 and FIG. 12, the detecting device in the detecting module 1 is configured to inject the collimated light source 11 into the plurality of beam splitters 12 to generate two light beams which are incident on the moving end and are parallel to each other. 2, when the traverse angle error is generated, the detecting module 1 rotates along the moving direction of the photodetector 2, and the traverse angle error of the moving end is detected by whether the starting spot position and the detecting spot position are the same . Figure 14 is a schematic diagram of the collimated light source 11 incident on the complex beam splitter 12 to produce two mutually perpendicular beams to provide simultaneous measurement of two linear axes (X-axis and γ-axis, γ-axis and Ζ-axis, ζ-axis and X axis). As shown in FIG. 11 and FIG. 13 , the transmitting device in the detecting module 1 is a two-photon sensor 2 that generates two beams of light incident on the moving end and is parallel to each other. When the angle error is generated, the detecting module 1 rotates along the moving direction of the photodetector 2, and the running angle position is detected to be the same as the position of the detecting pupil point to detect the lateral angle error of the moving end. When the traverse angle error is generated, the implement rotates along the moving axis. Therefore, the traverse angle error can be detected by the two sets of photodetectors 2. The erection and testing procedures are as follows: 1. Mount the detection module 1 on the fixed end of the implement, and adjust the beam direction to the detection axis direction of the tool to be tested (ie, the direction of the moving axis); 2. Fix the two-optical sensor 2 The moving end of the tool relative to the beam of the detecting module i; 9 201043916 3. The moving tool is tested. At the time of detection, the direction of the collimated light source 11 and the moving direction of the machine are parallel to each other. In the detection, if there is no angle error, the position of the detection spot is the same as the point of the first point; otherwise, the position of the detected spot will change as the error changes, as shown in Figure 3. Finally, through the calculation of the formula, the angular error of the machine to be tested can be obtained. In summary, 'this case is not only innovative in terms of space type, but also can improve the above-mentioned multiple functions compared with the use of goods.' It should have fully complied with the novelty and progressiveness of the statutory invention patent requirements', according to the law, (4) You have approved this invention patent application, in order to invent invention, to the sense of virtue. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic perspective view of a launching device detecting a straightness error by a light incident optical detector; FIG. 2 is a view of a launching device emitting a light beam by a laser light source or a collimated light source; The intention of detecting the position of the light spot on the photo-inductance detector varies with the error; FIG. 4 and FIG. 5 are stereoscopic diagrams showing the perpendicularity of the light beam generated by the transmitting device to detect the verticality error of the two-photon sensor; FIG. A schematic diagram of a two-beam laser beam or a collimated light source for a two-beam arrangement of a launching device; Figure 7 is a launching device that uses a laser source or a collimated source to inject a medium through a 201043916 mirror and divides it into two vertical beams. Figure 8 is a schematic diagram of the transmitting device with a laser light source or a collimated light source incident on a plurality of dielectric lenses, and divided into three vertical beams; Figure 9 is a three-vertical laser source or collimation of the transmitting device. The light source generates a schematic diagram of three beams that are perpendicular to each other; FIG. 10 shows that the transmitting device outputs a beam and enters the focusing lens and the photoinductor to detect the pitch angle. Stereoscopic diagram of the swing angle error; Figure 11 is a perspective view of the transmitter outputting two beams and incident on the two-optical detector to detect the transverse angle error; Figure 12 is the launch device with a laser source or a collimated source a plurality of dielectric lenses to provide a schematic diagram of two parallel beams; FIG. 12 is a schematic diagram of a two-beam laser source or a collimated source that emits two beams; FIG. A source or collimated source is incident on a plurality of dielectric lenses to provide a schematic representation of two mutually perpendicular beams. [Main component symbol description] 1 Detection module 11 Light source 12 beamsplitter 2 Optical sensor 21 Focus lens