CN112894490B - Method for realizing perpendicularity error detection of numerical control machine tool based on rotating L-shaped array - Google Patents
Method for realizing perpendicularity error detection of numerical control machine tool based on rotating L-shaped array Download PDFInfo
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Abstract
The invention discloses a method for realizing perpendicularity error detection of a numerical control machine tool based on a rotary L-shaped array, which comprises the following steps of firstly, placing an L-shaped reference part array on a three-coordinate measuring machine, driving an optical angle sensor to move the L-shaped reference part array along the direction driven by a main shaft of the three-coordinate measuring machine, and calibrating the mutual positions of reference parts in the L-shaped reference part array; and then, driving the optical angle sensor to move along the L-shaped reference part array through a machine tool spindle, obtaining coordinate position information of a measuring point by utilizing the postures of the L-shaped reference part array before and after rotation, and obtaining the perpendicularity error between the X axis and the Y axis of the machine tool by combining an angle relation after fitting a straight line. Even if an L-shaped reference piece array placing deflection angle error or a rotation angle error exists, the perpendicularity error of the machine tool can be effectively obtained, and the machining precision of the machine tool is improved.
Description
Technical Field
The invention relates to a method for identifying the verticality error of a numerical control machine tool, which is mainly used for realizing the detection of the verticality error based on rotating an L-shaped reference part array.
Background
The perpendicularity error of the numerical control machine belongs to a geometric error project. On one hand, the machine tool has installation errors, and on the other hand, the machine tool generates certain abrasion and structural deformation under the working condition of years, so that the motion axes of the numerical control machine are not orthogonal and vertical, and a certain deviation angle is formed between the axes. Since the perpendicularity error affects the machining accuracy of the machine tool, it is necessary to detect the perpendicularity error of the machine tool in order to improve the machining accuracy of the machine tool.
In the field of detecting perpendicularity errors of machine tools, there are several commonly used detection methods. The squareness error of the machine tool can be detected by using a square box or a square ruler as a measuring reference, but measuring equipment is excessively heavy, the operation is inconvenient, and the measuring precision is not high; the optical square can also realize the detection of the verticality error by matching with the laser interferometer, but the optical square also has the defects of easy influence by environmental factors, high requirement on the operation level of measuring personnel and expensive equipment cost; when the step gauge is used for detecting the verticality error, the general measuring range is small, the measurement in multiple directions is needed, and the measuring efficiency is not high.
Disclosure of Invention
Aiming at the problems of the detection method for the perpendicularity error of the machine tool in the prior art, the invention provides a novel detection method for the perpendicularity error of the machine tool based on a rotary L-shaped reference part array.
In order to solve the technical problem, the invention provides a method for realizing perpendicularity error detection of a numerical control machine tool based on rotation of an L-shaped array, which comprises the steps of firstly, placing the L-shaped reference part array on a three-coordinate measuring machine, driving an optical angle sensor to move along the L-shaped reference part array by a main shaft of the three-coordinate measuring machine, and calibrating the mutual positions of reference parts in the L-shaped reference part array; and then, driving the optical angle sensor to move along the L-shaped reference part array through the machine tool spindle, obtaining coordinate position information of the measuring point by utilizing the postures of the L-shaped reference part array before and after rotation, and combining an angle relation after fitting a straight line to obtain the perpendicularity error between the X axis and the Y axis of the machine tool.
Further, the invention relates to a method for detecting perpendicularity error of a numerical control machine, which comprises the following steps:
the L-shaped reference part array is formed by arranging a plurality of reference parts according to the L-shaped array, the intervals of the reference parts in the L-shaped reference part array are equal, and one reference part is positioned at the intersection of the two directions of the L-shaped array; the top surface of the reference piece comprises a plane P1 and a paraboloid P2, a point F is arranged on the paraboloid P2 of the reference piece, and a tangent plane of the paraboloid P2 passing through the point F is parallel to the plane P1, and the point F is marked as a characteristic point; 4 points are designated as a measurement point a on the plane P1, and 9 points are designated as a measurement point M on the paraboloid P2.
The mutual position calibration process of the reference parts in the L-shaped reference part array is as follows: placing the L-shaped reference member array on a three-coordinate measuring machine, driving the optical angle sensor to move along the X direction and the Y direction of the L-shaped reference member array by the main shaft of the three-coordinate measuring machine, respectively collecting a measuring point A and a measuring point M on the reference member, further obtaining the coordinate of a reference member characteristic point F through the coordinate vector relation between the measuring point A and the measuring point M, and establishing a calibration coordinate system X in the X direction 1 -Y 1 And a calibration coordinate system X in the Y direction 2 -Y 2 The included angle between the calibration coordinate system in the X direction and the calibration coordinate system in the Y direction is
The method for obtaining the coordinate position information of the measuring point by utilizing the postures of the L-shaped reference member array before and after rotation comprises the following steps:
1-1) placing an L-shaped reference part array on a machine tool, wherein the X direction of the L-shaped reference part array is consistent with the X-axis direction of the machine tool;
1-2) driving an optical angle sensor to move along the X direction and the Y direction of an L-shaped reference part array by a main shaft of the machine tool, collecting a measuring point M on the reference part, imaging the measuring point M on a light spot coordinate in the optical angle sensor, converting the coordinate value of the measuring point M under the X-Y coordinate system of the machine tool by combining the coordinate of a characteristic point F under the image coordinate system, and obtaining the coordinate position information of the measuring point of the posture of the L-shaped reference part array before rotation;
1-3) rotating the L-shaped reference member array by 90 degrees in a counterclockwise way by taking the intersection point of the array in the X direction and the Y direction as a rotation center, wherein the X direction of the L-shaped reference member array is consistent with the Y axis direction of a machine tool;
1-4) repeating the step 1-2) to obtain the coordinate position information of the measuring point of the posture of the rotated L-shaped reference part array.
Respectively performing linear fitting on the coordinate position information of the measuring points of the postures of the L-shaped reference member array before and after rotation, and obtaining the perpendicularity error between the X axis and the Y axis of the machine tool by combining the angle relation; the method comprises the following steps:
2-1) obtaining 2 fitting straight lines from the measuring point M before the rotation of the L-shaped reference part array based on a least square method;
the perpendicularity error alpha between the X axis and the Y axis of the machine tool xy Less than 0 °, by right angle relationship, there is:
perpendicularity error between the X axis and the Y axis of the machine tool:
in formulae (1) and (2): theta 1 Is a fitting straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 1 And X 1 -Y 1 The included angle of the axes of the coordinate system X1; theta 2 Is a fitting straight line l obtained by straight line fitting of a measuring point M on the Y direction of the machine tool 2 And X 2 -Y 2 The included angle of the axes of the coordinate system Y2;is X 1 -Y 1 Coordinate system and X 2 -Y 2 The included angle between the coordinate systems;
2-2) obtaining 2 fitting straight lines from the measurement points M after the L-shaped reference part array rotates based on a least square method;
from a right angle relationship, there are:
in the formulae (3) and (4), θ 4 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 3 And X 1 -Y 1 The angle of the axes of coordinate system X1; theta 3 Is a fitting straight line l obtained by straight line fitting of a measuring point M on the Y direction of the machine tool 4 And X 1 -Y 1 The included angle of the axes of the coordinate system Y2;
2-3) from formulas (2) and (4), we derive:
compared with the prior art, the invention has the beneficial effects that:
based on the L-shaped reference part array, the optical angle sensor is driven by the main shaft of the machine tool to move along the L-shaped reference part array, the coordinate position information of the measuring point is obtained by utilizing the postures before and after the L-shaped reference part array rotates, and the perpendicularity error between the shafts of the machine tool is obtained by combining the angle relationship after a straight line is fitted. The method for detecting the perpendicularity error of the numerical control machine tool based on the rotating L-shaped reference piece array can effectively obtain the perpendicularity error of the machine tool and improve the machining precision of the machine tool.
Drawings
FIG. 1 is a schematic view of a reference member according to the present invention;
FIG. 2 is a schematic view of the collection of the measurement points of the reference piece
FIG. 3 is a schematic view of an L-shaped reference member array calibration;
FIG. 4 is a schematic view of the relative positions of the measurement points of the reference member;
FIG. 5 is a schematic diagram showing the relative positions of the L-shaped fiducial part array before and after rotation;
FIG. 6 is a schematic view of the measurement principle before the L-shaped reference member array rotates;
FIG. 7 is a schematic view of the measurement principle after the L-shaped reference member array rotates;
FIG. 8 is a schematic view illustrating a principle of measuring a placing declination of an L-shaped reference member array;
FIG. 9 is a schematic view of the principle of measuring the rotation angle error of the L-shaped reference member array.
In the figure:
p1 is a plane, P2 is a paraboloid, F is a characteristic point, M is a paraboloid measuring point, and A is a plane measuring point;
1 is an L-shaped reference part array, 2 is a main shaft of a three-coordinate measuring machine, and 3 is an optical angle sensor;
l 1 fitting straight lines of measuring points in the X direction of the machine tool before rotation;
l 2 fitting straight lines of measuring points in the Y direction of the machine tool before rotation;
l 3 fitting straight lines of measuring points in the X direction of the machine tool after rotation;
l 4 fitting straight lines of measuring points in the Y direction of the machine tool after rotation;
X 1 -Y 1 for calibrating a calibration coordinate system formed in the X direction of the L-shaped reference member array;
X 2 -Y 2 A calibration coordinate system formed when the Y direction of the L-shaped reference part array is calibrated;
l x an actual movement track of the machine tool in the X direction is obtained;
l y is the actual motion track of the machine tool in the Y direction;
l 5 fitting straight lines of measuring points in the X direction of the machine tool when the L-shaped reference piece array has a placing deviation angle;
l 6 fitting straight lines of measuring points in the Y direction of the machine tool when the L-shaped reference piece array has a placement deviation angle;
l 7 fitting straight lines of measuring points in the Y direction of the machine tool when the L-shaped reference part has a rotation error angle;
l 8 the fitting straight line is the fitting straight line of the X-direction measuring point of the machine tool when the L-shaped reference part has a rotation error angle.
Detailed Description
The design idea of the method for realizing the detection of the verticality error of the numerical control machine tool based on the rotating L-shaped array is as follows: the perpendicularity error detection is mainly realized by rotating an L-shaped reference part array, an optical angle sensor is driven by a machine tool spindle to move along the L-shaped reference part array, coordinate position information of a measuring point is obtained by utilizing the postures of the L-shaped reference part array before and after rotation, and the perpendicularity error between machine tool shafts is obtained by combining angle relations after a straight line is fitted. By analyzing the actual measurement working condition, even if an L-shaped reference piece array placement deflection error or a rotation angle error exists, the perpendicularity error of the machine tool can be effectively obtained by using the method, and the machining precision of the machine tool is improved.
The invention will be further described with reference to the following figures and specific examples, which are not intended to limit the invention in any way.
Example (b):
the present invention uses an array of L-shaped reference elements arranged with reference elements that incorporate a plane P1 and a paraboloid P2, each element spaced 50mm apart, with 9 reference elements mounted in each row (i.e., in the X and Y directions, respectively). At the same time, the concept of the characteristic point F is introduced, and the tangent plane of the point on the paraboloid P2 is parallel to the plane, so that the relative position between the reference members can be easily evaluated. The method comprises the following steps of utilizing postures of an L-shaped reference part array before and after rotation, and obtaining perpendicularity error between a machine tool shaft and a shaft after analysis and processing, wherein the main contents are as follows: firstly, placing an L-shaped reference part array on a three-coordinate measuring machine, and driving an optical angle sensor to move the L-shaped reference part array along the axis of the three-coordinate measuring machine to calibrate the mutual positions of reference parts in the L-shaped reference part array; and then, driving the optical angle sensor to move along the L-shaped reference part array through the machine tool spindle, obtaining coordinate position information of the measuring point by utilizing the postures of the L-shaped reference part array before and after rotation, and combining an angle relation after fitting a straight line to obtain the perpendicularity error between the X axis and the Y axis of the machine tool.
In the invention, the L-shaped reference part array is formed by arranging a plurality of reference parts according to the L-shaped array, the intervals of the reference parts in the L-shaped reference part array are equal, and one reference part is positioned at the intersection of two directions of the L-shaped array; as shown in fig. 1, the top surface of the reference member includes a plane P1 and a paraboloid P2, the paraboloid P2 of the reference member has a point F, and a tangential plane of the paraboloid P2 passing through the point F is parallel to the plane P1, and the point F is regarded as a feature point; as shown in fig. 2, 4 points are designated as measurement points a on the plane P1, and 9 points are designated as measurement points M on the paraboloid P2.
Step 1, as shown in fig. 3, after the datum parts are installed, the mutual positions of the datum parts in the L-shaped datum part array 1 are calibrated. The L-shaped reference piece array 1 is placed on a three-coordinate measuring machine, the position coordinates of the reference pieces at the intersection of the two directions of the L-shaped reference piece array 1 are recorded as (0, 0), and the relative position relation between the reference pieces is obtained by taking the coordinates as a reference. Before calibration, the X direction of the L-shaped reference part array 1 is adjusted to be parallel to the X axis of the three-coordinate measuring machine, and the measuring beam of the laser interferometer is adjusted to be consistent with the X axis movement direction of the three-coordinate measuring machine. An optical angle sensor 3 is arranged on a main shaft 2, the main shaft 2 of the three-coordinate measuring machine drives the optical angle sensor 3 to move along the X direction of an L-shaped reference part array 1, a measuring point A and a measuring point M on a reference part are respectively collected, and the measuring point A and the measuring point M pass throughObtaining the coordinate of the characteristic point F of the reference piece by the coordinate vector relation between M, and establishing a calibration coordinate system X in the X direction 1 -Y 1 ;
And 3, establishing respective calibration coordinate systems by combining the step 1 and the step 2. Because of the self minimal error of the three-coordinate measuring machine, the calibration coordinate systems in the X, Y two directions do not strictly coincide, and the included angle between the calibration coordinate system in the X direction and the calibration coordinate system in the Y direction is recorded as
Step 4, placing the L-shaped reference part array on a machine tool, enabling the X direction of the L-shaped reference part array to be consistent with the X axis direction of the machine tool as much as possible, enabling a main shaft of the machine tool to drive the angle sensor to move along the X direction of the reference part array, and collecting a measuring point M on a paraboloid P2 of the reference part; keeping the position of the reference member array still, the machine tool spindle drives the angle sensor to move along the Y direction of the reference member array, and the acquisition of a measuring point M is carried out on a paraboloid P2 of the reference member. The measuring point M is imaged on a light spot coordinate in the optical angle sensor, and the coordinate value of the measuring point M under the machine tool coordinate system X-Y is obtained through conversion by combining the coordinate of the characteristic point F under the image coordinate system, so that the coordinate position information of the measuring point M of the posture of the L-shaped reference part array before rotation is obtained; the process is as follows:
as shown in fig. 4, a measurement point M is taken on the calibrated reference member, and the relative position coordinate in the X direction of the reference member measurement point M in the machine tool coordinate system is obtained from the vector relationship of the vectors:
wherein, M 1 、M i Respectively, measuring points on the first and ith reference members, F 1 、F i Respectively, the characteristic points on the first reference part and the ith reference part.
The vector form is changed to the form of the coordinate difference,
X Mi -X M1 =X F1 -X M1 +X Fi -X F1 +X Mi -X Fi
and (3) at points on the same reference piece, a quantitative relation exists between coordinate differences under a machine tool coordinate system and an image coordinate system, and the quantitative relation is obtained by substitution:
X Mi -X M1 =m(x M1 -x F1 )+Δ i +m(x Mi -x Fi )
thereby obtaining the relative positional relationship between the measurement points M on the reference member.
Wherein, X M1 、X Mi The coordinates, x, of the measuring points M of the first and ith reference parts, respectively, in the machine tool coordinate system M1 、x Mi The coordinates, x, of the measuring points M of the first and ith reference elements, respectively, in the image coordinate system F1 、x Fi The coordinates of the characteristic points F of the first reference part and the ith reference part in an image coordinate system respectively, m is a displacement measurement coefficient of the optical angle sensor, namely, one pixel corresponds to the actual displacement in a machine tool coordinate system, delta i And the distance of the characteristic point of the reference part in the coordinate system of the machine tool.
Similarly, the Y coordinate of the measuring point M in the machine tool coordinate system is obtained through calculation, and the relative position information between the measuring points M of the reference part is obtained through the X coordinate and the Y coordinate.
And 5, rotating the L-shaped reference part array by 90 degrees in a counterclockwise way by taking the intersection point of the array in the X direction and the Y direction as a rotation center, wherein the X direction of the L-shaped reference part array is consistent with the Y-axis direction of the machine tool as shown in fig. 5, namely acquiring the measuring point M when the Y-axis of the machine tool moves in the X direction of the original L-shaped reference part array, and acquiring the measuring point M when the X-axis of the machine tool moves in the Y direction of the original L-shaped reference part array. And driving the optical angle sensor to respectively acquire data along the X direction and the Y direction by the machine tool spindle, and repeating the step 4 to obtain the coordinate position information of the measuring point of the posture of the L-shaped reference part array after rotation.
Step 6, as shown in fig. 6, respectively performing linear fitting on the measurement point coordinate position information of the posture of the L-shaped reference member array before and after rotation by using the measurement point coordinates obtained in the X direction and the Y direction of the L-shaped reference member array, and obtaining the perpendicularity error between the X axis and the Y axis of the machine tool by combining the angle relationship; the method comprises the following steps:
6-1) the optical angle sensor is driven by the main shaft of the machine tool to move along the original X direction of the L-shaped reference part array, namely, measuring points during Y-axis movement of the machine tool are collected in the original X direction of the L-shaped reference part array, and the actual track of the Y-axis movement of the machine tool is fitted by the measuring points.
Obtaining 2 fitting straight lines from the measuring point M before the rotation of the L-shaped reference part array based on a least square method;
by the perpendicularity error alpha between the X axis and the Y axis of the machine tool xy Less than 0 ° for example, by right angle relationship, there are:
perpendicularity error between the X axis and the Y axis of the machine tool:
in formulae (1) and (2): theta.theta. 1 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 1 And X 1 -Y 1 The angle of the axes of coordinate system X1; theta.theta. 2 Is a fitting straight line l obtained by straight line fitting of a measuring point M on the Y direction of the machine tool 2 And X 2 -Y 2 The included angle of the axes of the coordinate system Y2;is X 1 -Y 1 Coordinate system and X 2 -Y 2 The included angle between the coordinate systems;
6-2) as shown in FIG. 7, similarly, the original Y direction of the L-shaped reference part array is used for collecting the measuring points of the machine tool during X-axis movement, and the actual track of the machine tool during X-axis movement is fitted by the measuring points.
Obtaining 2 fitting straight lines from the measurement points M after the L-shaped reference part array rotates based on a least square method;
from a right angle relationship, there are:
in the formulae (3) and (4), θ 4 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 3 And X 1 -Y 1 The included angle of the axes of the coordinate system X1; theta 3 Is a fitting straight line l obtained by straight line fitting of a measuring point M on the Y direction of the machine tool 4 And X 1 -Y 1 The included angle of the Y2 axes of the coordinate system;
2-3) combining the condition that the L-shaped reference part array does not rotate in the step, calculating the perpendicularity error alpha between the X axis and the Y axis of the machine tool according to the formulas (2) and (4) xy Comprises the following steps:
as shown in fig. 8, in an actual condition, after the L-shaped reference member array is placed on the machine tool, the X direction of the L-shaped reference member array may not be strictly consistent with the X axis direction of the machine tool, and a placement error exists. Because the reference member array is L-shaped, the two sides of the L-shaped reference member arrayDeviation angle beta from actual movement locus of machine tool 1 And are equal.
By the relationship of the angle, the angle of the angle,
in the formulae (6) and (7), θ 5 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 5 Actual movement track l along X direction of machine tool x The included angle of (c); theta.theta. 6 Is a fitting straight line l obtained by straight line fitting of a measuring point M in the Y direction of the machine tool 6 Actual movement track l along Y direction of machine tool y The included angle of (a).
As shown in fig. 9, also in actual conditions, when the L-shaped reference member array is rotated counterclockwise, it is difficult to accurately ensure that the rotation angle is 90 °, so that a straight line obtained by fitting coordinates of the measurement points deviates from the actual motion trajectory of the machine tool. However, the deviation angle beta between two sides of the L-shaped reference part array and the actual motion track of the machine tool 2 Are equal.
The angular relationship is as follows:
in the formulae (8) and (9), θ 7 Is a fitting straight line l obtained by straight line fitting of a measuring point M on the Y direction of the machine tool 7 Actual movement track l along Y direction of machine tool y The included angle of (A); theta.theta. 8 Is a fitting straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 8 And the actual movement track l of the machine tool in the X direction x The included angle of (c);
combining the formulas (7) and (9), the perpendicularity error between the X axis and the Y axis of the machine tool can be obtained as follows:
through the analysis, even if the L-shaped reference part array possibly has placement errors in actual conditions or the rotating angle is not accurate 90 degrees, the perpendicularity error between the motion axes of the machine tool can be effectively obtained by utilizing the information of the measuring points before and after rotation.
While the present invention has been described with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, which are illustrative only and not restrictive, and various modifications which do not depart from the spirit of the present invention and which are intended to be covered by the claims of the present invention may be made by those skilled in the art.
Claims (4)
1. A method for realizing perpendicularity error detection of a numerical control machine tool based on rotation of an L-shaped array is characterized in that firstly, the L-shaped reference part array is placed on a three-coordinate measuring machine, a spindle of the three-coordinate measuring machine drives an optical angle sensor to move along the L-shaped reference part array, and mutual position calibration of reference parts in the L-shaped reference part array is carried out; then, driving the optical angle sensor to move along the L-shaped reference part array through a machine tool main shaft, obtaining coordinate position information of a measuring point by utilizing postures before and after the L-shaped reference part array rotates, and combining an angle relation after fitting a straight line to obtain a perpendicularity error between an X axis and a Y axis of the machine tool;
the method for obtaining the coordinate position information of the measuring point M by using the postures of the L-shaped reference member array before and after rotation comprises the following steps:
1-1) placing an L-shaped reference part array on a machine tool, wherein the X direction of the L-shaped reference part array is consistent with the X-axis direction of the machine tool;
1-2) driving an optical angle sensor to move along the X direction and the Y direction of an L-shaped reference part array by a main shaft of the machine tool, acquiring a measuring point M on the reference part, imaging the measuring point M on a light spot coordinate in the optical angle sensor, converting the coordinate value of the measuring point M under the X-Y coordinate system of the machine tool coordinate system by combining the coordinate of a characteristic point F under an image coordinate system, and obtaining the coordinate position information of the measuring point of the posture of the L-shaped reference part array before rotation;
1-3) rotating the L-shaped reference member array by 90 degrees in a counterclockwise way by taking the intersection point of the array in the X direction and the Y direction as a rotation center, wherein the X direction of the L-shaped reference member array is consistent with the Y-axis direction of a machine tool;
1-4) repeating the step 1-2) to obtain the coordinate position information of the measuring point of the posture of the rotated L-shaped reference member array;
respectively performing linear fitting on the coordinate position information of the measuring points of the postures of the L-shaped reference member array before and after rotation, and obtaining the perpendicularity error between the X axis and the Y axis of the machine tool by combining the angle relation; the method comprises the following steps:
2-1) obtaining 2 fitting straight lines from the measuring point M before the rotation of the L-shaped reference part array based on a least square method;
the perpendicularity error alpha between the X axis and the Y axis of the machine tool xy Less than 0 °, by right angle relationship, there is:
perpendicularity error between the X axis and the Y axis of the machine tool:
in formulae (1) and (2): theta 1 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 1 And X 1 -Y 1 The angle of the axes of coordinate system X1; theta.theta. 2 Is a fitting straight line l obtained by straight line fitting of a measuring point M in the Y direction of the machine tool 2 And X 2 -Y 2 The included angle of the Y2 axes of the coordinate system;is X 1 -Y 1 Coordinate system and X 2 -Y 2 The included angle between the coordinate systems;
2-2) obtaining 2 fitting straight lines from the measurement points M after the L-shaped reference part array rotates based on a least square method;
from a right angle relationship, there are:
in the formulae (3) and (4), θ 4 Is a fitting straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 3 And X 1 -Y 1 The included angle of the axes of the coordinate system X1; theta.theta. 3 Is a fitting straight line l obtained by straight line fitting of a measuring point M on the Y direction of the machine tool 4 And X 1 -Y 1 The included angle of the axes of the coordinate system Y2;
2-3) from formulas (2) and (4), the following results are obtained:
2. the method for realizing perpendicularity error detection of the numerical control machine tool based on the rotation L-shaped array according to claim 1, wherein the L-shaped reference part array is formed by arranging a plurality of reference parts according to the L-shaped array, the intervals of the reference parts in the L-shaped reference part array are equal, and one of the reference parts is located at the intersection of two directions of the L-shaped array; the top surface of the reference piece comprises a plane P1 and a paraboloid P2, a point F is arranged on the paraboloid P2 of the reference piece, and a tangent plane of the paraboloid P2 passing through the point F is parallel to the plane P1, and the point F is marked as a characteristic point; 4 points are designated as a measurement point a on the plane P1, and 9 points are designated as a measurement point M on the paraboloid P2.
3. The method for realizing the perpendicularity error detection of the numerical control machine tool based on the rotation L-shaped array according to claim 2, wherein the process of calibrating the mutual positions of the reference parts in the L-shaped reference part array is as follows: placing an L-shaped reference member array on a three-coordinate measuring machine, driving an optical angle sensor to move along the X direction and the Y direction of the L-shaped reference member array by a main shaft of the three-coordinate measuring machine, respectively acquiring a measuring point A and a measuring point M on a reference member, obtaining the coordinate of a reference member characteristic point F through the coordinate vector relation between the measuring point A and the measuring point M, and establishing a calibration coordinate system X in the X direction 1 -Y 1 And a calibration coordinate system X in the Y direction 2 -Y 2 The included angle between the calibration coordinate system in the X direction and the calibration coordinate system in the Y direction is
4. The method for realizing perpendicularity error detection of a numerical control machine tool based on rotation of an L-shaped array according to claim 1, wherein if deviation angles of two right-angle sides of the L-shaped reference part array and an actual motion track of the machine tool are both beta 1 ,
The angular relationship is as follows,
in the formulae (6) and (7), θ 5 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 5 Actual movement track l along X direction of machine tool x The included angle of (c); theta.theta. 6 The measuring point M in the Y direction of the machine tool is obtained by straight line fittingDrawn fitted straight line l 6 Actual movement track l along Y direction of machine tool y The included angle of (A);
if the L-shaped reference part array rotates 90 degrees anticlockwise, the deviation angles of the two right-angle sides of the L-shaped reference part array and the actual movement track of the machine tool are beta 2 ,
The angular relationship is as follows:
in the formulae (8) and (9), θ 7 Is a fitting straight line l obtained by straight line fitting of a measuring point M in the Y direction of the machine tool 7 Actual movement track l along Y direction of machine tool y The included angle of (c); theta.theta. 8 Is a fitted straight line l obtained by straight line fitting of a measuring point M in the X direction of the machine tool 8 And the actual movement track l of the machine tool in the X direction x The included angle of (A);
combining formulas (7) and (9), and obtaining the perpendicularity error between the X axis and the Y axis of the machine tool as follows:
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