CN103234496B - A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error - Google Patents
A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error Download PDFInfo
- Publication number
- CN103234496B CN103234496B CN201310106750.2A CN201310106750A CN103234496B CN 103234496 B CN103234496 B CN 103234496B CN 201310106750 A CN201310106750 A CN 201310106750A CN 103234496 B CN103234496 B CN 103234496B
- Authority
- CN
- China
- Prior art keywords
- coordinate
- measuring machine
- error
- coordinate measuring
- turbogrid plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012937 correction Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 239000011159 matrix material Substances 0.000 claims description 17
- 238000013519 translation Methods 0.000 claims description 16
- 230000036544 posture Effects 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error.Utilize accuracy requirement less than or equal to the rigidity Turbogrid plates of three coordinate measuring machine two-dimensional stage to be measured as aided measurement device, and according to the coordinate of each gauge point on coordinate measuring machine under six position and postures recorded, use the Self-Tuning Algorithm based on least square method two-dimensional stage error to be measured and the Turbogrid plates staff error that uses to be separated from raw measurement data, the high-precision correction to three coordinate measuring machine two-dimensional stage can be realized thus.The present invention can obtain three coordinate measuring machine two-dimensional stage error to be measured effectively, and its measuring accuracy can reach sub-micrometer scale; This invention simultaneously, without the need to the special high-accuracy servicing unit of costliness, has higher reliability, for three coordinate measuring machine two-dimensional stage error provides a kind of high-precision bearing calibration, and has high actual application value.
Description
Technical field
The invention belongs to field of precision measurement, particularly relate to a kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error.
Background technology
The measuring accuracy of high speed development to corresponding installation of 3d inspection of Ultraprecision Machining is had higher requirement.Three coordinate measuring machine (Coordinate Measuring Machining, CMM) as traditional general purpose type high accuracy surveying instrument, irreplaceable effect is had in the detection of workpiece Form and position error, and just towards the future development of compact in size and nano-precision.The key of ultraprecise three coordinate measuring machine research carries out form and position error measurement and uncertainty evaluation to it, and then ensure the measuring accuracy of its micro/nano level.
Three coordinate measuring machine is a complication system with more error source, and Chinese scholars conducts extensive research its error correcting method.For realizing the high-precision correction of measuring error, each individual error of measuring machine accurately must be obtained.According to the requirement of coordinate measuring machine calibrating standard JJF1064-2010, during the calibration dimensional measurement error of indication, generally use gauge block or laser interferometer (additional survey of large-scale coordinate measuring machine uses laser interferometer to carry out position error of indication measurement) as standard.Draw by the error of indication of demarcating by the difference between the measured value of gauge point on measurement standard device and standard value, and carry out matching and compensation, and then realize the correction to coordinate measuring machine to be measured.But the method uses one dimension standard cubing to carry out individual error detection, and length consuming time, instrumentation and apparatus cost are expensive, data processing is loaded down with trivial details.Especially, when precision surface plate to be measured is nanoscale or the Subnano-class ultra precise workbench of the Ultra-precision Turning field uses such as VLSI (very large scale integrated circuit) manufacture, the processing of high-density city equipment and fiber alignment, traditional coordinate measuring machine calibration technique cannot be applied because finding more high-precision standard metering instrument.
Summary of the invention
The technical problem to be solved in the present invention is the two-dimensional stage error that the Turbogrid plates utilizing accuracy class lower isolate three coordinate measuring machine effectively and the Turbogrid plates staff error used, and then realizes the high-precision correction of two-dimensional stage.
A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error is as follows:
1) select the square grid plate of n × n, n is natural number, is fixed on three-dimensional coordinates measurement machine platform by these Turbogrid plates, and aligns in the x of grid direction and coordinate measuring machine, y-axis guide rail movement direction;
2) be that benchmark sets up coordinate system with Turbogrid plates, the coordinate data M of all gauge point centers on corresponding Turbogrid plates under utilizing this three coordinate measuring machine to record original position and posture
1;
3) by Turbogrid plates relative to original pose respectively along each translation in the positive and negative direction of x-axis grid distance, utilize three coordinate measuring machine to record the coordinate data M of all gauge point centers on Turbogrid plates respectively
2and M
3;
4) step 2 is returned in Turbogrid plates translation) in original pose, and by its respectively relatively original pose be rotated counterclockwise to 90 °, 180 ° and 270 ° of positions, the coordinate data utilizing three coordinate measuring machine to record all gauge point centers on corresponding Turbogrid plates is respectively M
4, M
5, M
6;
5) by step 2) to step 4) in measured six groups of coordinate data M
1, M
2, M
3, M
4, M
5and M
6substitute into corresponding six position and attitude error and be separated system of equations, that is:
Wherein I to be principal diagonal be 1 matrix, I
1, I
2for the x-axis direction translation matrix of I, R
90, R
180, R
270for counterclockwise 90 °, 180 ° and 270 ° of rotation matrixs of I, N
x, N
yfor the nominal value of measurement point x and y coordinate on Turbogrid plates, N
xsand N
ysand N
ytand N
xtbe respectively N
x, N
ythe matrix formed due to the positive negative direction translation of x-axis; E to be all elements be 1 matrix.A
x, A
yfor two-dimensional stage x and the y error of coordinate of measurement point, G
x, G
yfor Turbogrid plates x and the y coordinate staff error of measurement point, V
i, W
ibe two ideal coordinates system initial points x and y coordinate offset (i=1,2 ..., 6, lower with), θ
ibe the angular deflection of two ideal coordinates systems, and have:
6) utilize step 2) to step 4) measured by six pose data M
1, M
2, M
3, M
4, M
5, M
6and step 5) in system of equations, obtain two-dimensional stage error A
x, A
y.
7) three coordinate measuring machine two-dimensional stage error is corrected:
Wherein [T
x, T
y]
tfor the data before correction measured by three coordinate measuring machine, T
0be then the data after correction.
Beneficial effect of the present invention: the Turbogrid plates that the present invention utilizes accuracy class lower to carry out the measurement of multiple pose point coordinate in three coordinate measuring machine two-dimensional stage to be measured, and use the Turbogrid plates staff error that Self-Tuning Algorithm is effectively isolated three coordinate measuring machine two-dimensional stage error and used.Measuring method proposed by the invention rectifies an instrument and device without the need to the special high-accuracy of costliness, there is higher reliability, and measuring method is simple, does not relate to complicated actual mechanical process, be suitable for the high-precision correction of the coordinate measuring machine two-dimensional stage error with precision surface plate.
Accompanying drawing explanation
Fig. 1 is the Turbogrid plates servicing unit figure in the error correction of three coordinate measuring machine two-dimensional stage;
Fig. 2 is ideal coordinates system relation and the systematic error schematic diagram of three coordinate measuring machine two-dimensional stage to be measured and Turbogrid plates;
Fig. 3 is the three coordinate measuring machine global error distribution utilizing Turbogrid plates to record under original position and posture in the embodiment of the present invention;
Fig. 4 is the three coordinate measuring machine two-dimensional stage error distribution utilizing six pose numbers to record in the embodiment of the present invention.
Embodiment
A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error is as follows:
1) the square grid plate of n × n is selected, n is natural number, the positional precision of these Turbogrid plates can lower than the positional precision of three coordinate measuring machine two-dimensional stage to be measured, these Turbogrid plates are fixed on three-dimensional coordinates measurement machine platform, and align in the x of grid direction and coordinate measuring machine, y-axis guide rail movement direction, as shown in Figure 1;
2) be that benchmark sets up coordinate system with Turbogrid plates, the coordinate data M of all gauge point centers on corresponding Turbogrid plates under utilizing this three coordinate measuring machine to record original position and posture
1;
3) by Turbogrid plates relative to original pose respectively along each translation in the positive and negative direction of x-axis grid distance, utilize three coordinate measuring machine to record the coordinate data M of all gauge point centers on Turbogrid plates respectively
2and M
3;
4) step 2 is returned in Turbogrid plates translation) in original pose, and by its respectively relatively original pose be rotated counterclockwise to 90 °, 180 ° and 270 ° of positions, the coordinate data utilizing three coordinate measuring machine to record all gauge point centers on corresponding Turbogrid plates is respectively M
4, M
5, M
6;
5) build two ideal coordinates systems according to error source, as shown in Figure 2, the error of each gauge point can be expressed as follows:
Wherein M
x, M
yfor the transverse and longitudinal coordinate of measured value, N
x, N
yfor the nominal value of measurement point x and y coordinate on Turbogrid plates, A
x, A
yfor two-dimensional stage x and the y error of coordinate of measurement point, G
x, G
yfor Turbogrid plates x and the y coordinate staff error of measurement point, V, W are x and the y coordinate offset of two ideal coordinates system initial points, and θ is the angular deflection of two ideal coordinates systems, and white point is actual measurement gauge point, and stain is desirable measurement markers point.Get in above formula:
According to the data that original pose records, following system of equations can be obtained:
In formula, Q
1xand Q
1yfor original pose data measured, []
tfor this transpose of a matrix.It can thus be appreciated that if measure n × n point on original pose, the number of unknown number is 4n
2+ 3, and equation number is 2n
2+ 7, now equation number is less than the number of unknown number, and therefore system of equations has infinite solution.When pose number is 3, the number of unknown number is 4n
2+ 9, and equation number is 6n
2-2n+7, now system of equations application least square method has solution.When pose number continues to increase, equation number is much larger than the number of unknown number, therefore the precision of the solution of equations using least square method to calculate is higher.Therefore, in practical application, pose number can not be less than 3, and the increase of pose number can improve computational accuracy effectively.The present invention selects pose number to be 6 carry out error correction.By step 2) to step 4) in measured six groups of coordinate data M
1, M
2, M
3, M
4, M
5and M
6substitute into corresponding six position and attitude error and be separated system of equations, that is:
Wherein I to be principal diagonal be 1 matrix, I
1, I
2for the x-axis direction translation matrix of I, R
90, R
180, R
270for counterclockwise 90 °, 180 ° and 270 ° of rotation matrixs of I, N
x, N
yfor the nominal value of measurement point x and y coordinate on Turbogrid plates, N
xsand N
ysand N
ytand N
xtbe respectively N
x, N
ythe matrix formed due to the positive negative direction translation of x-axis; E to be all elements be 1 matrix.A
x, A
yfor two-dimensional stage x and the y error of coordinate of measurement point, G
x, G
yfor Turbogrid plates x and the y coordinate staff error of measurement point, V
i, W
ibe two ideal coordinates system initial points x and y coordinate offset (i=1,2 ..., 6, lower with), θ
ibe the angular deflection of two ideal coordinates systems, and have:
6) utilize step 2) to step 4) measured by six pose data M
1, M
2, M
3, M
4, M
5, M
6with step 5) system of equations, two-dimensional stage error A can be obtained
x, A
y.
7) three coordinate measuring machine two-dimensional stage error is corrected:
Wherein [T
x, T
y]
tfor the data before correction measured by three coordinate measuring machine, T
0be then the data after correction.
Embodiment
The precise 2-D platform adopted in embodiment is the workbench of the coordinate measuring machine Global Classical of Hai Kesikang, and rigidity Turbogrid plates are the supporting Turbogrid plates of Hai Kesikang, and Turbogrid plates marking point tolerance is ± 1mm, and experimental situation temperature is 20 DEG C.The trimming process of three coordinate measuring machine two-dimensional stage error is:
1) Turbogrid plates are fixed on three-dimensional coordinates measurement machine platform, and align in the x of grid direction and coordinate measuring machine, y-axis guide rail movement direction, as shown in Figure 1.
2) with Turbogrid plates 1 for benchmark sets up coordinate system.Measure by six pose numbers the grid point of 4 × 4 in 120mm × 120mm regional extent on Turbogrid plates, every two grid spacings are L
1=40mm, obtains the global error of the direct measured value of original pose as shown in Figure 3.In order to realize two-dimensional stage error high-precision correction, the High-precision correction method adopting the present invention to propose further is needed to process.This three coordinate measuring machine is utilized to record the coordinate data M of Turbogrid plates corresponding all gauge point centers under original position and posture
1.
3) by Turbogrid plates relative to original pose respectively along each translation in the positive and negative direction of x-axis grid distance, utilize three coordinate measuring machine to record the coordinate data M of all gauge point centers on Turbogrid plates respectively
2and M
3.
4) step 2 is returned in Turbogrid plates translation) in original pose, and by its respectively relatively original pose be rotated counterclockwise to 90 °, 180 ° and 270 ° of positions, the coordinate data utilizing three coordinate measuring machine to record all gauge point centers on corresponding Turbogrid plates is respectively M
4, M
5, M
6.
5) by step 2) to step 4) in measured six groups of coordinate data M
1, M
2, M
3, M
4, M
5and M
6substitute into corresponding six position and attitude error and be separated system of equations, that is:
Wherein I to be principal diagonal be 1 matrix, I
1, I
2for the x-axis direction translation matrix of I, R
90, R
180, R
270for counterclockwise 90 °, 180 ° and 270 ° of rotation matrixs of I, N
x, N
yfor the nominal value of measurement point x and y coordinate on Turbogrid plates, N
xsand N
ysand N
ytand N
xtbe respectively N
x, N
ythe matrix formed due to the positive negative direction translation of x-axis; E to be all elements be 1 matrix.A
x, A
yfor two-dimensional stage x and the y error of coordinate of measurement point, G
x, G
yfor Turbogrid plates x and the y coordinate staff error of measurement point, V
i, W
ibe two ideal coordinates system initial points x and y coordinate offset (i=1,2 ..., 6, lower with), θ
ibe the angular deflection of two ideal coordinates systems, and have:
6) through process obtain three coordinate measuring machine two-dimensional stage error A each location point measured value as shown in Figure 4, wherein 1-16 point is x-axis error amount, and 17-32 point is y-axis error amount.By known to the analysis of each measuring point error in Fig. 4, three coordinate measuring machine two-dimensional stage error is limited to ± 0.002mm, and Turbogrid plates staff error is limited to ± 0.8mm, conforms to nominal value.
When being spaced apart L
1during=40mm, the probability distribution of measuring error is owing to being approximately normal distribution, and expanded uncertainty is U=ku.Two-dimensional stage error only considers the uncertainty that the error of indication causes, then u=σ.Get k=2, obtain two-dimensional stage x, y deflection error uncertainty is respectively 1.2892 μm and 1.4248 μm, this value and MCV-500 Doppler type laser interferometer obtain three coordinate measuring machine two-dimensional stage measured value deviation to be measured and are respectively 0.07 μm (x-axis), 0.03 μm (y-axis).
7) three coordinate measuring machine two-dimensional stage error is corrected:
Wherein
For the data before correction measured by three coordinate measuring machine, T
0be then the data after correction.
Claims (1)
1. a High-precision correction method for three coordinate measuring machine two-dimensional stage error, is characterized in that its step is as follows:
1) select the square grid plate of n × n, n is natural number, is fixed on three-dimensional coordinates measurement machine platform by these Turbogrid plates, and aligns in the x of grid direction and coordinate measuring machine, y-axis guide rail movement direction;
2) be that benchmark sets up coordinate system with Turbogrid plates, the coordinate data M of all gauge point centers on corresponding Turbogrid plates under utilizing this three coordinate measuring machine to record original position and posture
1;
3) by relatively original for Turbogrid plates pose respectively along each translation in the positive and negative direction of x-axis grid distance, utilize three coordinate measuring machine to record the coordinate data M of all gauge point centers on Turbogrid plates respectively
2and M
3;
4) step 2 is returned in Turbogrid plates translation) in original pose, and by its respectively relatively original pose be rotated counterclockwise to 90 °, 180 ° and 270 ° of positions, the coordinate data utilizing three coordinate measuring machine to record all gauge point centers on corresponding Turbogrid plates is respectively M
4, M
5, M
6;
5) by step 2) to step 4) in measured six groups of coordinate data M
1, M
2, M
3, M
4, M
5and M
6substitute into corresponding six position and attitude error and be separated system of equations, that is:
Wherein I to be principal diagonal be 1 matrix, I
1, I
2for the x-axis direction translation matrix of I, R
90, R
180, R
270for counterclockwise 90 °, 180 ° and 270 ° of rotation matrixs of I, N
x, N
yfor the nominal value of measurement point x and y coordinate on Turbogrid plates, N
xsand N
ysand N
ytand N
xtbe respectively N
x, N
ythe matrix formed due to the positive negative direction translation of x-axis; E to be all elements be 1 matrix; A
x, A
yfor two-dimensional stage x and the y error of coordinate of measurement point, G
x, G
yfor Turbogrid plates x and the y coordinate staff error of measurement point, V
i, W
ibe x and the y coordinate offset of two ideal coordinates system initial points, i=1,2 ..., 6, θ
ibe the angular deflection of two ideal coordinates systems, Q
ix, Q
iybe respectively the error in x and the y direction of measurement point on Turbogrid plates in i-th pose, and have:
6) utilize step 2) to step 4) measured by six pose data M
1, M
2, M
3, M
4, M
5, M
6and step 5) system of equations, obtain two-dimensional stage error A
x, A
y;
7) three coordinate measuring machine two-dimensional stage error is corrected:
Wherein [T
x, T
y]
tfor the data before correction measured by three coordinate measuring machine, T
0be then the data after correction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310106750.2A CN103234496B (en) | 2013-03-28 | 2013-03-28 | A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310106750.2A CN103234496B (en) | 2013-03-28 | 2013-03-28 | A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103234496A CN103234496A (en) | 2013-08-07 |
CN103234496B true CN103234496B (en) | 2015-09-30 |
Family
ID=48882548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310106750.2A Expired - Fee Related CN103234496B (en) | 2013-03-28 | 2013-03-28 | A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103234496B (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103884311B (en) * | 2014-03-03 | 2017-03-22 | 广东赛因迪科技股份有限公司 | Method for determining height differences between all detectors of plane detection machine |
CN104374353B (en) * | 2014-11-20 | 2017-01-25 | 西安电子科技大学 | Sensor mounting angle selecting method for three-point method roundness error isolation technology |
CN105043314B (en) * | 2015-04-30 | 2017-11-21 | 东莞市神州视觉科技有限公司 | A kind of terrace with edge measurement method of parameters examined for tin cream accuracy of detection and system |
JP2018031754A (en) * | 2016-08-26 | 2018-03-01 | 株式会社ミツトヨ | Three-dimensional measurement device and coordinate correction method |
CN109269426B (en) * | 2018-11-27 | 2024-05-03 | 国家电网有限公司 | Three-dimensional displacement calibration frame and three-dimensional displacement correction coefficient measuring method |
CN110057304B (en) * | 2019-03-01 | 2020-10-20 | 清华大学 | Error separation and compensation method in plane grating six-degree-of-freedom displacement measurement system |
CN111982071B (en) * | 2019-05-24 | 2022-09-27 | Tcl科技集团股份有限公司 | 3D scanning method and system based on TOF camera |
CN113701798B (en) * | 2021-08-29 | 2024-01-19 | 孙恺欣 | Calibrating device and method for two-dimensional grid standard plate |
CN115876148B (en) * | 2023-02-07 | 2023-05-19 | 昂坤视觉(北京)科技有限公司 | Method and system for compensating running error of wafer flatness measurement platform |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4006835A1 (en) * | 1990-03-05 | 1991-09-12 | Eugen Dr Ing Trapet | Calibrating two=dimensional test bodies eliminating systematic errors - measuring in two or three positions depending on test body shape elements |
CN1172246A (en) * | 1996-07-29 | 1998-02-04 | 清野慧 | Scale for sensing moving object, and apparatus for sensing moving object using same |
CN1991333A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Zero-Abbe error measuring system and its method |
CN102305608A (en) * | 2011-05-13 | 2012-01-04 | 哈尔滨工业大学 | Error measurement and compensation method for multi-target two-dimensional cross motion simulation system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3805143B2 (en) * | 1999-07-14 | 2006-08-02 | 株式会社ミツトヨ | Trend correction method |
-
2013
- 2013-03-28 CN CN201310106750.2A patent/CN103234496B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4006835A1 (en) * | 1990-03-05 | 1991-09-12 | Eugen Dr Ing Trapet | Calibrating two=dimensional test bodies eliminating systematic errors - measuring in two or three positions depending on test body shape elements |
CN1172246A (en) * | 1996-07-29 | 1998-02-04 | 清野慧 | Scale for sensing moving object, and apparatus for sensing moving object using same |
CN1991333A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Zero-Abbe error measuring system and its method |
CN102305608A (en) * | 2011-05-13 | 2012-01-04 | 哈尔滨工业大学 | Error measurement and compensation method for multi-target two-dimensional cross motion simulation system |
Non-Patent Citations (7)
Title |
---|
Calibration of geometrical systematic error in high-precision spherical surface measurement;daodang wang;《Optics Communications》;20111231;第3878-3884页 * |
Comparative experimental study on absolute measurement of spherical surface with two-sphere method;xi hou;《Optics and Lasers in Engineering》;20111231;第833-840页 * |
IC加工及检测装备超精密工作台自标定技术研究;朱煜 朱立伟;《电子工业专用设备》;20050331;第20-24页 * |
三坐标测量机的误差分析与修正;王琦 陈晓怀;《宇航计测技术》;20060430;第26卷(第2期);第1-3页 * |
三坐标测量机误差测量的新方法;王东升 李书和 张国雄;《天津大学学报》;19990731;第32卷(第4期);第515-517页 * |
新型纳米三坐标测量机误差检定方法的研究;夏瑞雪 陈晓怀;《电子测量与仪器学报》;20100331;第24卷(第3期);第251-256页 * |
超精密级二维工作台的自标定;崔继文 刘雪明 谭久彬;《光学 精密工程》;20120930;第20卷(第9期);第1960-1966页 * |
Also Published As
Publication number | Publication date |
---|---|
CN103234496A (en) | 2013-08-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103234496B (en) | A kind of High-precision correction method of three coordinate measuring machine two-dimensional stage error | |
CN103389038B (en) | Laser tracker set the goal multistation measure numerically-controlled machine geometric accuracy detection method | |
CN106141814B (en) | The detection of Digit Control Machine Tool translation shaft geometric error and discrimination method based on LaserTRACER | |
CN107042528A (en) | A kind of Kinematic Calibration system and method for industrial robot | |
CN107186548A (en) | A kind of five-axle number control machine tool gyroaxis geometric error detection method | |
CN105290968B (en) | A kind of center alignment method of horizontal precision milling and casting machine tool work spindle and tool system | |
CN105486289B (en) | A kind of laser photography measuring system and camera calibration method | |
Zhang et al. | A general strategy for geometric error identification of multi-axis machine tools based on point measurement | |
CN103499293B (en) | Virtual multi-station type measurement method of laser tracker of numerically-controlled machine tool | |
CN107101597B (en) | A kind of error calibrating method rotating angle measuring system | |
CN1667359A (en) | Self-calibrating method and apparatus for ultra precise workbench | |
CN103026310B (en) | Method for realizing the spatial transformation from machining points to reference points of installation survey | |
CN106363465A (en) | Method for identifying mutual position relationship of horizontally moving shafts and rotating shaft of multi-axis numerically-controlled machine tool | |
CN104457688B (en) | High-precision automatic measurement device for batch equipment attitude angle matrix on satellite | |
CN102200429A (en) | Precision detection method for numerical control machine based on laser-tracking combined measurement | |
CN103673976A (en) | Method and system for converting and unifying composite type precision measuring coordinate system | |
CN106989670B (en) | A kind of non-contact type high-precision large-scale workpiece tracking measurement method of robot collaboration | |
CN108801193B (en) | Error and variation rule-based error measurement method for three-coordinate measuring machine | |
CN108340210A (en) | A kind of gang tool geometric error discrimination method measured based on ball bar | |
CN103791878A (en) | Numerically-controlled machine tool geometric accuracy identification method | |
CN106643643A (en) | Non-contact target coordinate measuring method | |
Zha et al. | Four-station laser tracer-based geometric error measurement of rotary table | |
CN106225778A (en) | The vision localization research of random fluctuation in multimedium propagation | |
CN103737433A (en) | Composite type precision measurement method for large components | |
CN104977816B (en) | The mechanical parameter flexible measurement method of mask aligner mask platform micropositioner based on Compact Particle Swarm Optimization algorithms |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150930 |