TW201036027A - Excimer lamp, excimer lamp unit and UV-irradiating device - Google Patents
Excimer lamp, excimer lamp unit and UV-irradiating device Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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Abstract
Description
201036027 32508pif 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種於封入有放電用氣體的放電管 内的放電空間内利用外部電極來產生放電並放射紫外線的 準分子(excimer)燈、由燈座（lamp socket)來支撐該準分 子燈並且將外部電極與電源連接的準分子燈單元、以及使 用上述準分子燈及準分子燈單元而成的紫外線照射裝置。 【先前技術】 準分子燈中，當使用氙氣（xenon gas)作為放電用氣 體時，放射出中心波長為172 nm的高能量的真空紫外線， 故而可用作對液晶顯示器的玻璃基板或半導體晶圓等的被 照射物進行光洗淨等的紫外線照射裝置的光源燈。作為該 準分子燈中的封入放電用氣體的放電管，有使用圓筒管的 類型（例如，參照專利文獻1)、或使用方形密閉容器的類 型（例如，參照專利文獻2)等。 真空紫外線吸收氧並產生臭氧，故而一旦放出至空氣 中便立刻衰減《因此，當使用利用圓筒管的放電管的準分 子燈時，須於下端配置有玻璃板的紫外線照射裝置的内^ 配置準分子燈而形成使氧等淨化（pUrge)的環境，且穿過 其下端的玻璃板來對略微空開間隔而配置於下方的平坦的 被照射物照射真空紫外線，藉此，使該真空紫外線不會無 效地於空氣中衰減。然而，當使用一利用了方形的放電管 的準分子燈時，可對略微空開間隔而配置在較寬的下平坦 面的下方的平坦的被照射物直接照射真空紫外線，故而可 201036027 使紫外線照射裝置的構造簡單化。 圖10以及圖11表示利用方形放電管的準分子燈的先 前的構成例。準分子燈1的放電管2是包含合成石英且左 右較長而上下形成有平坦面的方形的密閉容器，内部的放 電二間2a内封入有氤氣。如圖1〇所示，該放電管2中跨 及上平坦面的大致整個表面而形成有外部電極3，如圖π 所示，該放電管2中跨及下平坦面的大致整個表面而形成 〇 有，部電極4。該些外部電極3、4是由藉由對金屬進行蒸 鍍等從而成膜於放電管2表面的金屬薄膜而構成。其中， 上平坦面的外部電極3是將金屬薄膜一樣地成膜於&膜區 域内，而下平坦面的外部電極4是將金屬薄膜以網狀的圖 案而成膜於除了左侧的端部以外的成膜區域内。 _上述準分子燈1中，藉由對外部電極3 ' 4之間施加 高頻高壓，而於由介電體構成的放電管2的内部的放電空 間2a内產生介電體阻障放電（dielectric barrier discharge) 並放射真空紫外線，故而可穿過下平坦面的外部電極4的 網眼的間隙而向下方放出該真空紫外線。 此處，先前的準分子燈1中，對外部電極3、4之間 ，加高頻高壓，故而如圖12所示，將導線5、5連接於外 電極3、4。亦即，該準分子燈1中，將導線5、5的頂 ，刀別焊接於外部電極3、4的左侧的端部，並且由一對陶 瓷塊6、6而自上下夾持固定包含該些導線5、5的頂端部 在=的放電管2的一侧的端部。而且，使陶瓷塊6、6支撐 固定於未圖示的紫外線照射裝置上，並且將導線5、5的基 201036027 32508pif 部側連接於未圖示的高頻高壓電源的高壓端子與接地端 子’藉此來對準分子燈i的外部電極3、4施加高頻高壓。 /然而’各導線5為了成為高頻高Μ絕緣導線，故而必 ^由包覆材5a來包覆導線。因此，準分子燈丨中會因放電 官2,電而使溫度變高，故而導線5使用由絕緣性與耐熱 性較尚且具有柔軟性的石夕樹脂⑽·㈣也）來包覆導線 的梦電線（silicon wire )。 [專利文獻1]日本專利特開2〇〇1 24392〇號公報（第4 圖） [專利文獻2]曰本專利特開2000_260396號公報 然而，放電管2的放電空間2a内所放射的真空紫外 線，有時於該放電管2的管壁内反覆反射等而亦會自左右 的端部漏出至外部，且碎樹脂有時會因真空紫外線而劣 化。因此，各導線5使用如下的包覆材5a，該包覆材化 由=容易因真空紫外線而劣化且絕緣性與耐熱性均較高的 全氟烧氧基樹脂（PFA，Perflu〇ro(alkoxy alkane))(熱塑性 氟樹脂）來進一步包覆矽電線的矽樹脂，從而構成由該此 矽樹脂與PFA形成的2層構造。 '^二 然而，發明者們經過反覆實驗、研究，發現如下事項。 用作導線5的包覆材5a的外層的PFA若長時間曝露於言° 能量的真空紫外線中，亦會產生某種程度的劣化。而且了 當該PFA因真空紫外線而劣化時，會產生分解氣體，而誃 分解氣體會使外部電極3、4變色或使放電管2的表= 損，因此存在準分子燈1照射的真空紫外線的強度降低= 201036027 問題。又，亦存在因該分解氣體而污染被照射物的問題。 進而，包覆材5a的上層的PFA因劣化而產生龜裂等時， 下層的矽樹脂受到真空紫外線照射而產生粉化 (chalking)，故而亦存在落下因該粉化而產生的粉狀物且 污染被照射物的問題。 再者’即便照射波長比真空紫外線更長的紫外線，樹 脂也會不同程度地劣化，因此於放射真空紫外線以外的紫 〇 外線的準分子燈的情況下，亦同樣產生該些問題。又，準 为子燈的電源為極高的高壓，因此於使用導線來連接時， 必須使用樹脂製的包覆材5a來進行絕緣。 【發明内容】 本發明提供一種可解決上述問題的準分子燈以及 分子燈單元。 第1發明的準分子燈的特徵在於：於内部的放電空間 内封入有放電職體的放電管的外表面的不同部位配置一 騎部電極，並且將分別連接於該些外部電極的一對連接 器端子配置於設在該放電管端部的連接器部的外表 不同部位。 雷普的準分子燈的特徵在於:上述連接器部是放 、側或右側的端部’且是内部不存在放電空間的部 分0 第3發明的準分子燈的特徵在於：上述放電右 f長且上下形成有平坦面的方形 部電極分別配置於該放電管的上下的平坦面。且將對外 7 201036027 32508pif 第4發明的準分子燈的特徵在於：上述各外部電極是 由形成於放電管的外表面上的金屬薄膜而構成。 第5發明的準分子燈的特徵在於：上述各外部電極是 由配置於放電管的外表面上的金屬板而構成。 第6發明的準分子燈的特徵在於：上述各連接器端子 是由外部電極的、配置在放電管的連接器部外表面上的部 分而構成。 …第7發_準分子燈的特徵在於：上述各連接器端子 是經由多雜騎峰壓料㈣軸 連接器部的外表面上的部分上的塊狀的端子 &的 B第8發明的準分子燈的特徵在於：上述各連接器端子 是由金屬板而構成’該金屬板經由焊錫層錢接固著於外 部電極的、形成在放電管的連接器部的外表面上的部分。 曰第9發明的準分子燈的特徵在於：上述各連接器端子 =經由多點接晴轉·金屬片的塊狀的端子，且該金 由焊錫層而連接固著於外部電極的、形成在放電 s的連接器部的外表面上的部分。 接5^·^發明神分子燈的特徵在於：上述塊狀的各連 子受到自兩财持蚊放電管的連接器部的一對陶 寬塊的推壓。 線。第11發明的特徵在於：上述準分子燈放射真空紫外 第12發明的特徵在於：上述各連接器端子是設置於 夕Μ電極的、形成在放電管的連接器部的外表面上的部分 201036027 上的塊狀的端子。 第13發明的紫外線照射裝置的特徵在於：包括上 準分子燈。 地 第14發明的準分子燈單元的特徵在於：由上述準分 子燈以及燈座而構成，所述燈座上設置著插入且 二 分子燈的連接器部的插座部，並且於該插座部的内側二且 於與所插入的連接器部的一對連接器端子接觸的位置分 Ο 別配置著與準分子燈的電源連接的一對端子接觸件。刀 第15發明的準分子燈單元的特徵在於··上述各端子 接觸件是由多點接觸材而構成。 第16發明的準分子燈單元的特徵在於：上述各端子 接觸件是由金屬製的板彈簧（platespring)而構成。 第Π發明的紫外線照射裝置的特徵在於：包括上 準分子燈單元。 _再者，該些發明中的左右與上下方向，僅僅是用以表 〇 示互相正交的方向，未必一定於與實際的左右或上下方向 一致。 [發明的效果] 根據本發明的第1發明，於放電管的端部配置著連接 於外部電極的連接器部，因此，即便不將導線連接於該外 ，電極，亦可僅藉由使端子接觸件等接觸而連接於電源， 從而，不會出現如下現象，即，導線的樹脂包覆因紫外線 而弓丨起樹脂劣化從而產生分解氣體，或者落下因粉化而產 生的粉狀物。 9 201036027 32508pif 根據本發明的第2發明，於放電管的連接器部的内部 不存在放電空間，因此即便對該連接器部施加壓力亦無放 電官破損之虞。由此，可採用如下構造：於由連接器端子 等來推壓該連接器部，或者由燈座等來支撐準分子燈時施 加壓迫來確實地進行支撐或連接。 根據本發明的第3發明，於使用方形的放電管的準分 子燈中’亦可消除污染被照射物之虞。亦即，若於準分子 燈與被照射物之間配置玻璃板等，則無因樹脂劣化而產生 的分解氣體、或無因粉化而產生的粉狀物污染該被照射物 之虞，但當使用方形的放電管的準分子燈時，無需配置玻 璃板等，因此先前存在該分解氣體或粉化而產生的粉狀物 /亏柒被照射物之虞。然而，根據該發明，無需使用由樹脂 包覆的導線，因此可解決如此之污染問題。 根據本發明的第4發明，可使金屬薄膜的外部電極無 間隙地密著於放電管的外表面，因此可提高放電效率。 根據本發明的第5發明，僅於放電管的外表面配置金 屬板即可形成外部電極，因此該外部電極的組裝較容易。 根據本發明的第6發明，可將配置於放電管外表面的 外部電極於連接器部中直接用作連接器端子，因此無需另 外組裝連接器端子。 根據本發明的第7發明，成為連接器端子的塊狀的端 子經由多點接觸材而推壓於外部電極，因此，該塊狀的連 接器端子與外部電極之間形成接觸電阻較小的確實的連 接，並且亦可容易地裝卸。又，多點接觸材通過多數接點 201036027 325ϋ8ριί 接’因此’尤其適合於施加高頻、高壓的準分子燈的 *再者，塊狀的連接器端子的熱容量較大，故而不易 接藉由焊接^連接於外部電極。因此，經由多點接觸材 而將塊狀的連接器端子減於外部電極，藉此確實地 連接。 根據本發明的第8發明，例如即便外部電極如金屬薄 膜等般容易切削且容易剝離，接觸端子接觸件等或者施加 〇 壓力的連接器端子亦成為經由焊錫層而連接固定於該外部 電極的金屬板，因此可防止外部電極的切削或剝離等。再 者，作為連接器端子的金屬板的熱容量較小，因此可容易 地焊接於作為金屬薄膜的外部電極上。 根據本發明的第9發明，例如即便外部電極如金屬薄 膜等般容易切削且容易剝離，接觸端子接觸件等或者施加 壓力的連接器端子亦成為塊狀的端子，因此可防止外部電 極的切削或剝離等。而且，介於該塊狀的連接器端子與外 部電極之間的多點接觸材，亦接觸於經由焊錫層而連接固 〇 定於該外部電極的金屬片，因此不存在因該多點接觸材而 使外部電極切削或剝離之虞。再者，塊狀的連接器端子的 熱容量較大，故而不易直接焊接於金屬薄膜等的外部電極 上。因此，首先將熱容量較小的金屬片焊接於外部電極上， 其次經由多點接觸材而將塊狀的連接器端子推壓於該金屬 片上，藉此確實地連接。 根據本發明的第10發明，可藉由具有絕緣性且無因 紫外線而劣化之虞的一對陶瓷塊來推壓塊狀的連接器端 11 201036027 32508pif 子，因此可確實地將連接器端子與外部電極 根據本發明的第11發明，可提供尤其適合於放射古 能量的真空紫外線且容易使樹脂劣化的的^ 根據本發明的第12發明，可無需安成 製造及處理簡便的結構。 守深而$成 根據本發明的第13發明，可形成如下的紫外線昭射 裝置：於放電管的端部配置連接於外部電=射 不將導線連接於該外部電極，亦可僅藉由使端子 =線的樹腊包覆因紫外線而引起樹=:=分 解乳體、或者落下因粉化而產生的粉狀物。進而， 的連接器部的内部不存在放電空間，因 =e 部施加壓力亦無放電管破損之虞。由此，可採用如%的I ^由連接II端子等來漏該連接器部，或者由燈座等^ 支標準分子燈時施加壓力而確實地進行支標或連接。 根據本發明的第14發明，燈座由插座部支撑準分子 2的5接器七’並且使該插座部内侧的-對端子接觸件接 於’分子燈的連接器端子從而連接於電源，因此可安裝 T準分子燈並使之放電。而且，無需使用由樹脂包覆的導 j，因此不會因紫外線而引起樹脂劣化從而產生分解氣 、或者不會有因粉化所引起的粉狀物落下。再者，準分 =燈無需僅由燈座來支揮，例如亦可利用由燈座支律與由 ，、他支撐材支撐相組合而安裝。 、 根據本發明的第15發明，與準分子燈的連接器端子 201036027[Technical Field] The present invention relates to an excimer lamp that uses an external electrode to generate a discharge and emits ultraviolet rays in a discharge space in a discharge tube in which a discharge gas is sealed, An excimer lamp unit that supports the excimer lamp by a lamp socket and connects the external electrode to the power source, and an ultraviolet irradiation device using the excimer lamp and the excimer lamp unit. [Prior Art] In the excimer lamp, when xenon gas is used as the discharge gas, a high-energy vacuum ultraviolet ray having a center wavelength of 172 nm is emitted, and thus it can be used as a glass substrate or a semiconductor wafer for a liquid crystal display. The light source lamp of the ultraviolet irradiation device such as light-washing of the object to be irradiated. As the discharge tube for enclosing the discharge gas in the excimer lamp, there are a type in which a cylindrical tube is used (for example, see Patent Document 1), or a type in which a rectangular hermetic container is used (for example, see Patent Document 2). The vacuum ultraviolet ray absorbs oxygen and generates ozone, so it is immediately attenuated as soon as it is released into the air. Therefore, when an excimer lamp using a discharge tube of a cylindrical tube is used, the inside of the ultraviolet ray irradiation device having a glass plate disposed at the lower end is disposed. An environment in which oxygen or the like is purified by an excimer lamp, and a vacuum ray is irradiated to the flat object to be irradiated with a slight gap between the glass slabs passing through the lower end thereof, thereby making the vacuum ultraviolet ray Does not ineffectively decay in the air. However, when an excimer lamp using a square discharge tube is used, a flat object to be irradiated under a wide lower flat surface with a slight gap can be directly irradiated with vacuum ultraviolet rays, so that 201036027 can be made to ultraviolet rays. The structure of the irradiation device is simplified. Fig. 10 and Fig. 11 show a prior configuration example of an excimer lamp using a square discharge tube. The discharge tube 2 of the excimer lamp 1 is a hermetic container containing synthetic quartz and having a long left and right side and having a flat surface on the upper and lower sides, and her internal discharge chamber 2a is sealed with helium gas. As shown in FIG. 1A, the discharge electrode 2 is formed with an external electrode 3 across substantially the entire surface of the upper flat surface. As shown in FIG. π, the discharge tube 2 is formed over substantially the entire surface of the lower flat surface. 〇, the part electrode 4. The external electrodes 3 and 4 are formed of a metal thin film formed on the surface of the discharge tube 2 by vapor deposition of a metal or the like. Wherein, the outer electrode 3 of the upper flat surface is formed into a film in the & film area, and the outer electrode 4 of the lower flat surface is formed by forming a metal film in a mesh pattern on the left side. In the film formation area other than the part. In the excimer lamp 1, a dielectric barrier discharge (dielectric) is generated in the discharge space 2a inside the discharge tube 2 composed of a dielectric by applying a high-frequency high voltage between the external electrodes 3'4. The barrier discharge) emits a vacuum ultraviolet ray, so that the vacuum ultraviolet ray can be emitted downward through the gap of the mesh of the outer electrode 4 on the lower flat surface. Here, in the prior excimer lamp 1, a high frequency and a high voltage are applied between the external electrodes 3 and 4, so that the wires 5, 5 are connected to the outer electrodes 3, 4 as shown in Fig. 12 . In other words, in the excimer lamp 1, the tops of the wires 5 and 5 are welded to the left end portions of the external electrodes 3 and 4, and are sandwiched and fixed from the upper and lower sides by a pair of ceramic blocks 6, 6. The tip ends of the wires 5, 5 are at the end of one side of the discharge tube 2. Further, the ceramic blocks 6 and 6 are supported and fixed to an ultraviolet irradiation device (not shown), and the base 201036027 32508pif side of the wires 5 and 5 is connected to a high-voltage terminal and a ground terminal of the high-frequency high-voltage power source (not shown). This applies a high frequency and high voltage to the external electrodes 3, 4 of the molecular lamp i. However, in order to make the high-frequency high-voltage insulated wires, the wires 5 must be covered with the covering member 5a. Therefore, in the excimer lamp, the temperature is increased by the discharge officer 2, and the wire 5 is covered with a wire which is insulated and heat-resistant and has flexibility (10) (4). Silicon wire. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. 2000-260396. However, vacuum ultraviolet rays emitted from the discharge space 2a of the discharge tube 2 are disclosed. In some cases, the discharge tube 2 may be reflected or reflected in the tube wall, and may leak from the left and right end portions to the outside, and the resin may be deteriorated by vacuum ultraviolet rays. Therefore, each of the wires 5 is made of a cladding material 5a which is a perfluoroalkoxy resin (PFA, Perfluro (alkoxy) which is easily deteriorated by vacuum ultraviolet rays and has high insulation and heat resistance. Alkane)) (thermoplastic fluororesin) to further coat the bismuth resin of the ruthenium wire to constitute a two-layer structure composed of the ruthenium resin and PFA. '^二 However, the inventors discovered the following items after repeated experiments and research. The PFA used as the outer layer of the covering member 5a of the wire 5 is also deteriorated to some extent if it is exposed to vacuum ultraviolet rays of a long time. Further, when the PFA is deteriorated by the vacuum ultraviolet ray, a decomposition gas is generated, and the ruthenium decomposition gas discolors the external electrodes 3, 4 or causes the surface of the discharge tube 2 to be damaged, so that there is a vacuum ultraviolet ray irradiated by the excimer lamp 1. Reduced strength = 201036027 problem. Further, there is also a problem that the object to be irradiated is contaminated by the decomposition gas. Further, when the PFA of the upper layer of the covering material 5a is cracked due to deterioration, the lower layer of the resin is subjected to vacuum ultraviolet irradiation to cause chalking, and therefore, the powdery material which is generated by the pulverization is also dropped. The problem of contaminating the object being irradiated. Further, even if the ultraviolet ray having a longer wavelength than the vacuum ultraviolet ray is irradiated, the resin is deteriorated to a different extent. Therefore, in the case of an excimer lamp which emits an ultraviolet ray outside the vacuum ultraviolet ray, these problems are similarly caused. Further, since the power source of the sub-lamp is an extremely high voltage, it is necessary to use a resin clad material 5a for insulation when it is connected by a wire. SUMMARY OF THE INVENTION The present invention provides an excimer lamp and a molecular lamp unit that can solve the above problems. The excimer lamp according to the first aspect of the invention is characterized in that a riding portion electrode is disposed in a different portion of an outer surface of a discharge tube in which a discharge body is sealed in an internal discharge space, and a pair of connectors respectively connected to the external electrodes are provided The terminal is disposed at a different portion of the outer surface of the connector portion provided at the end of the discharge tube. The excimer lamp of the Rep is characterized in that the connector portion is the end portion of the discharge side, the right side or the right side and is a portion in which the discharge space does not exist inside. The excimer lamp of the third invention is characterized in that the discharge is right and long. Further, square electrode electrodes having a flat surface formed on the upper and lower sides are disposed on the upper and lower flat surfaces of the discharge tube. Further, in the excimer lamp according to the fourth aspect of the invention, the external electrode is formed of a metal thin film formed on the outer surface of the discharge tube. According to a fifth aspect of the invention, in the excimer lamp, each of the external electrodes is formed of a metal plate disposed on an outer surface of the discharge tube. An excimer lamp according to a sixth aspect of the invention is characterized in that each of the connector terminals is constituted by a portion of an external electrode disposed on an outer surface of a connector portion of the discharge tube. The seventh invention is characterized in that each of the connector terminals is a block-shaped terminal on the outer surface of the shaft connector portion via the multi-heterojunction (4). The excimer lamp is characterized in that each of the connector terminals is formed of a metal plate, and the metal plate is fixed to the external electrode via a solder layer and is formed on the outer surface of the connector portion of the discharge tube. According to a ninth aspect of the invention, in the excimer lamp, the connector terminals are connected to a block-shaped terminal of a metal plate by a multi-point connection, and the gold is connected to the external electrode by a solder layer. The portion of the outer surface of the connector portion that discharges s. The invention is characterized in that the above-mentioned monolithic lamps are pressed by a pair of ceramic wide blocks from the connector portion of the two-phase mosquito-discharge tube. line. According to a twelfth aspect of the invention, the excimer lamp emits a vacuum ultraviolet ray according to the twelfth invention, wherein the connector terminals are provided on a portion of the outer surface of the connector portion of the discharge tube, which is provided on the outer surface of the solar cell, 201036027. Blocky terminal. An ultraviolet irradiation apparatus according to a thirteenth aspect of the invention is characterized by comprising an upper excimer lamp. The excimer lamp unit according to the fourteenth aspect of the invention is characterized by comprising the excimer lamp and the socket, wherein the socket is provided with a socket portion into which a connector portion of the two-molecule lamp is inserted, and the socket portion is provided in the socket portion On the inner side, a pair of terminal contacts connected to the power source of the excimer lamp are disposed at a position in contact with the pair of connector terminals of the inserted connector portion. Knife The excimer lamp unit of the fifteenth aspect of the invention is characterized in that each of the above-mentioned terminal contacts is constituted by a multi-point contact material. The excimer lamp unit according to the sixteenth aspect of the invention is characterized in that each of the terminal contacts is made of a metal plate spring. The ultraviolet irradiation device of the second invention is characterized in that it comprises an upper excimer lamp unit. Further, the left and right and up and down directions in the inventions are merely used to indicate the directions orthogonal to each other, and do not necessarily coincide with the actual left and right or vertical directions. [Effects of the Invention] According to the first aspect of the present invention, since the connector portion connected to the external electrode is disposed at the end of the discharge tube, the electrode can be simply by the terminal even if the lead wire is not connected thereto. When the contact member or the like is in contact with the power source, the resin coating of the wire is deteriorated by the ultraviolet rays to cause decomposition of the resin, or the powdery material which is generated by the powdering is dropped. According to the second aspect of the present invention, since there is no discharge space in the connector portion of the discharge tube, even if pressure is applied to the connector portion, there is no possibility that the discharge member is broken. Therefore, it is possible to adopt a configuration in which the connector portion is pressed by a connector terminal or the like, or when the excimer lamp is supported by a socket or the like, the pressure is forced to be reliably supported or connected. According to the third invention of the present invention, in the quasi-molecular lamp using a square discharge tube, the contamination of the object to be irradiated can be eliminated. In other words, when a glass plate or the like is disposed between the excimer lamp and the object to be irradiated, there is no decomposition gas generated by deterioration of the resin or powder which is not caused by powdering, which contaminates the object to be irradiated, but When a quasi-molecular lamp of a square discharge tube is used, it is not necessary to dispose a glass plate or the like, and thus the powder/defective irritant generated by the decomposition gas or pulverization is previously present. However, according to the invention, it is not necessary to use a wire coated with a resin, so that such a contamination problem can be solved. According to the fourth aspect of the invention, the external electrode of the metal thin film can be adhered to the outer surface of the discharge tube without a gap, so that the discharge efficiency can be improved. According to the fifth aspect of the present invention, the external electrode can be formed only by disposing the metal plate on the outer surface of the discharge tube, so that the assembly of the external electrode is easy. According to the sixth aspect of the invention, the external electrode disposed on the outer surface of the discharge tube can be directly used as the connector terminal in the connector portion, so that it is not necessary to separately assemble the connector terminal. According to the seventh aspect of the present invention, the block-shaped terminal serving as the connector terminal is pressed against the external electrode via the multi-point contact material. Therefore, the contact resistance between the block-shaped connector terminal and the external electrode is small. The connection is also easy to handle. Moreover, the multi-point contact material is connected to a plurality of contacts 201036027 325 ϋ 8ριί, so it is particularly suitable for applying high-frequency, high-voltage excimer lamps. Furthermore, the bulk connector terminals have a large heat capacity, so they are not easily connected by soldering. ^ Connect to the external electrode. Therefore, the block-shaped connector terminals are reduced to the external electrodes via the multi-point contact material, thereby being reliably connected. According to the eighth aspect of the present invention, for example, even if the external electrode is easily cut and peeled off easily, such as a metal thin film, the contact terminal contact or the connector terminal to which the pressure is applied is a metal that is connected and fixed to the external electrode via the solder layer. The plate can thus prevent cutting or peeling of the external electrode and the like. Further, since the metal plate as the connector terminal has a small heat capacity, it can be easily soldered to the external electrode as a metal thin film. According to the ninth aspect of the invention, for example, even if the external electrode is easily cut and peeled off easily, such as a metal thin film, the contact terminal contact or the connector terminal to which the pressure is applied also becomes a block-shaped terminal, thereby preventing the cutting of the external electrode or Stripping, etc. Further, the multi-point contact material between the block-shaped connector terminal and the external electrode is also in contact with the metal piece fixed to the external electrode via the solder layer, so there is no multi-point contact material The outer electrode is cut or peeled off. Further, since the block-shaped connector terminals have a large heat capacity, they are not easily soldered directly to external electrodes such as a metal thin film. Therefore, first, a metal piece having a small heat capacity is welded to the external electrode, and then a block-shaped connector terminal is pressed against the metal piece via the multi-point contact material, thereby reliably connecting. According to the tenth aspect of the present invention, the block-shaped connector end 11 201036027 32508pif can be pressed by a pair of ceramic blocks having insulation and no deterioration due to ultraviolet rays, so that the connector terminal can be surely According to the eleventh invention of the present invention, it is possible to provide a vacuum ultraviolet ray which is particularly suitable for radiating ancient energy and which is easy to deteriorate the resin. According to the twelfth invention of the present invention, it is possible to provide a structure which is easy to manufacture and handle. According to the thirteenth invention of the present invention, it is possible to form an ultraviolet light-emitting device in which an end portion of the discharge tube is connected to an external electric source, and the wire is not connected to the external electrode, or The tree wax coating of the terminal = line causes the tree due to ultraviolet rays =: = decomposes the milk, or drops the powder due to pulverization. Further, there is no discharge space inside the connector portion, and there is no damage to the discharge tube due to the pressure applied to the =e portion. Thereby, the connector portion can be leaked by, for example, %^ by the connection II terminal or the like, or can be reliably pressed or connected by applying pressure when the standard molecular lamp is mounted on the lamp holder or the like. According to the fourteenth invention of the present invention, the socket supports the connector 5 of the excimer 2 by the socket portion, and the terminal-contacting member on the inner side of the socket portion is connected to the connector terminal of the 'molecular lamp to be connected to the power source. A T excimer lamp can be installed and discharged. Further, since it is not necessary to use the guide j coated with the resin, the resin is not deteriorated by the ultraviolet rays to generate decomposition gas, or the powder is not dropped by the powder. Furthermore, the sub-score = the lamp need not be supported only by the lamp holder, for example, it can also be installed by using the combination of the lamp holder and the support of the support material. According to the fifteenth invention of the present invention, the connector terminal with the excimer lamp 201036027
^ZJUOpiI 接觸的燈座的端子接觸件是由多點接觸材而構成，因此準 分子燈與高頻高壓的電源形成接觸電阻較小的確實的連 接’並且可容易地裝卸。又，多點接觸材通過多數的接點 而連接，因此尤其適合於施加有高頻、高壓的準分子燈的 連接。 根據本發明的第16發明，與準分子燈的連接器端子 接觸的燈座的端子接觸件是由金屬製的板彈簧而構成，因 ¢) 此準分子燈與高頻高壓的電源的連接變得確實，並且可容 易地裝卸》 根據本發明的第17發明，可形成如下的紫外線照射 裝置：燈座由插座部支撐準分子燈的連接器部，並且使該 插座部内側的一對端子接觸件接觸準分子燈的連接器端= 從而連接於電源，因此可安裝該準分子燈並使之放電。而 且，無需使用由樹脂包覆的導線，因此不會因紫外線而引 起樹脂劣化從而產生分解氣體、或者不會有因粉化而產生 的粉狀物落下。進而，與準分子燈的連接器端子接觸的燈 座的子接觸件疋由多點接觸材而構成，因此準分子燈與 高頻高壓的電源形成接觸電阻較小的確實的連接，並且亦 可容易地裝卸。又，多點接觸材通過多數的接點而連接， 因此尤其適合於施加有高頻、高壓的準分子燈的連接。又， 與準分子燈的連接器端子接觸的燈座的端子接觸件是由金 屬製的板彈簀而構成，因此準分子燈與高頻高壓的電源的 連接變得確實，並且亦可容易地裝卸。 為讓本發明之上述特徵和優點能更明顯易懂，下文特 13 201036027 32508pif 舉實施例’並配合所附圖式作詳細說明如下。 【實施方式】 以下，參照圖1至圖9來對本發明的最佳實施形態進 行說明。再者，於該些圖中，對具有與圖1〇至圖12^示 的先前例相同的功能的構成構件標註相同的編號。 不 如圖1所示，本實施形態對於使用封入有^氣的方形 的放電管2的準分子燈1、及用以將該準分子燈丨安裝於 對液晶顯示器的玻璃基板等的被照射物進行光洗外 線照射裝置的燈座7進行說明。 / 、 [準分子燈的放電管] 如圖2 (a)至圖2(c)所示，該準分子燈i的放電 管2是藉由方形的合成石英塊來堵塞包含合成石英且左右 較長的方形的筒體的左右開口端而於内部形成放電空間 2a的密閉容器，且於該放電㈣2a内封入 = 電用氣體。該放電管2中，堵塞筒體的左侧開口端的乍^ 石奂塊的左右長度比堵塞筒體的右側開口端的長度長故 而於放電管2的左側端部存在於左右方向上跨及^度的 長度而不存在放電空間以的部分、亦即僅由含有合成^英 的部分，該部分成為連接器部2b。又，該放電管$包含上 下表面大致平坦的上平坦面及下平坦面，於上平坦面形 有外部電極3 ’並且於下平坦面形成有外部電極4。 、如圖2 (a)所示，上平坦面的外部電極3是由一樣地 成膜於放電管2的上平坦面的大致整個表面的紹蒸鑛膜及 保護該表面的鎳蒸鑛膜而構成的2層金屬薄膜。而且，該 201036027 外部電極3亦連續地形成於下方無放電空間2a的連接器部 215的上平坦面。如圖2 ( C )所示，下平坦面的外部電極 4是由以網狀的圖案而成膜於放電管2的下平坦面的大致 整個表面的鋁蒸鍍膜及保護該網狀的表面的鎳蒸鍍膜而構 成的2層金屬薄膜。又，該外部電極4亦連續地形成於上 方無放電空間2a的連接器部2b的下平坦面，該部分並非 網狀而是以一樣的圖案而成膜。 〇 上述構成的準分子燈1的放電管2中，當對外部電極 3、4間施;^來自未圖示的高頻高屢冑源的高頻高壓時，於 由介電體構成的放電管2的内部的放電空間2a内產生介電 體阻障放電’因此於該放電空間2a内作為放電用氣體的氣 原子受到激發，而當該氤原子返回至基態（g_dstate) 〇 ^的下方放出的真空紫外線經由微小的間隙而照射至被 =射物，則可對該被照射物進行光洗和再者，本實施形 =的準刀子燈1的〶頻⑤壓電源的頻率為7GkHz，啟動時 電壓為14 kV，於放調始後供給5kv的高頻高壓。 [準分子燈的連接器端子]^ZJUOpiI The terminal contact of the contact base is composed of a multi-point contact material. Therefore, the quasi-molecular lamp forms a reliable connection with a high-frequency high-voltage power supply with a small contact resistance and can be easily attached and detached. Further, since the multi-point contact material is connected by a large number of contacts, it is particularly suitable for the connection of an excimer lamp to which a high frequency and a high voltage are applied. According to the sixteenth aspect of the invention, the terminal contact of the socket which is in contact with the connector terminal of the excimer lamp is constituted by a leaf spring made of metal, because the connection of the excimer lamp to the high-frequency high-voltage power source becomes According to the seventeenth invention of the present invention, it is possible to form an ultraviolet irradiation device in which the socket supports the connector portion of the excimer lamp by the socket portion and contacts a pair of terminals inside the socket portion The connector end of the contact excimer lamp is thus connected to the power source so that the excimer lamp can be mounted and discharged. Further, since it is not necessary to use a wire coated with a resin, the resin is not deteriorated by the ultraviolet rays to generate a decomposition gas, or the powder which is caused by the powdering does not fall. Further, since the sub-contact member of the socket which is in contact with the connector terminal of the excimer lamp is constituted by a multi-point contact material, the excimer lamp and the high-frequency high-voltage power source form a reliable connection with a small contact resistance, and may also Easy to load and unload. Further, since the multi-point contact material is connected by a plurality of contacts, it is particularly suitable for the connection of an excimer lamp to which a high frequency and a high voltage are applied. Further, since the terminal contact of the socket which is in contact with the connector terminal of the excimer lamp is constituted by a metal plate spring, the connection between the excimer lamp and the high-frequency high-voltage power source becomes reliable, and can be easily performed. Loading and unloading. In order to make the above features and advantages of the present invention more comprehensible, the following is a detailed description of the embodiments of the present invention. [Embodiment] Hereinafter, a best mode for carrying out the invention will be described with reference to Figs. 1 to 9 . Further, in the drawings, constituent members having the same functions as those of the previous examples shown in Figs. 1 to 12 are denoted by the same reference numerals. As shown in Fig. 1, in the present embodiment, the excimer lamp 1 using the discharge tube 2 in which the square is sealed is provided, and the object to be irradiated for attaching the excimer lamp to the glass substrate of the liquid crystal display or the like is performed. The lamp holder 7 of the external light irradiation device will be described. / [Discharge tube of excimer lamp] As shown in Fig. 2 (a) to Fig. 2 (c), the discharge tube 2 of the excimer lamp i is blocked by a square synthetic quartz block containing synthetic quartz. The left and right open ends of the long rectangular cylinder form a sealed container in which the discharge space 2a is formed, and the electric discharge gas is sealed in the discharge (4) 2a. In the discharge tube 2, the left and right lengths of the 开口^ 奂 block of the left end of the clogging cylinder are longer than the length of the right end of the clogging cylinder, so that the left end of the discharge tube 2 exists in the left-right direction and The length does not exist in the portion of the discharge space, that is, only the portion containing the composite, which becomes the connector portion 2b. Further, the discharge tube $ includes an upper flat surface and a lower flat surface which are substantially flat on the upper and lower surfaces, and an external electrode 3' is formed on the upper flat surface, and the external electrode 4 is formed on the lower flat surface. As shown in FIG. 2(a), the outer electrode 3 of the upper flat surface is a vaporized ore film which is formed on the substantially entire surface of the upper flat surface of the discharge tube 2 and a nickel vapor film which protects the surface. A two-layer metal film formed. Further, the 201036027 external electrode 3 is also continuously formed on the upper flat surface of the connector portion 215 of the lower discharge-free space 2a. As shown in FIG. 2(C), the outer electrode 4 of the lower flat surface is an aluminum vapor-deposited film formed on a substantially entire surface of the lower flat surface of the discharge tube 2 in a mesh pattern and a surface protecting the mesh. A two-layer metal film formed by depositing a nickel film. Further, the external electrode 4 is also continuously formed on the lower flat surface of the connector portion 2b having the upper discharge-free space 2a, and this portion is not formed in a mesh shape but formed in the same pattern. In the discharge tube 2 of the excimer lamp 1 having the above configuration, when a high-frequency high voltage from a high-frequency high-frequency source (not shown) is applied to the external electrodes 3 and 4, a discharge composed of a dielectric body is applied. A dielectric barrier discharge is generated in the discharge space 2a inside the tube 2. Therefore, a gas atom as a discharge gas in the discharge space 2a is excited, and when the germanium atom returns to the ground state (g_dstate) 〇^, it is discharged. The vacuum ultraviolet ray is irradiated to the object to be irradiated via a small gap, and the object to be irradiated can be light-washed. Further, the frequency of the 5-frequency 5 voltage source of the quasi-knife lamp 1 of the present embodiment is 7 GkHz, and the activation is started. The voltage is 14 kV, and the high frequency and high voltage of 5kv is supplied after the start of the release. [Connector terminal of excimer lamp]
端部的連接H部2b的上下方所安裝的一 8 Κι! ϋΡ- -tA. AL ΛιΤ βϋ» S-c ^ i $放射出中心波長為172 nm的真空紫外線（準分子發 光）。而且，該真空紫外線穿過放電管2的下平坦面的外部 $極4的網眼的間隙而向下方放出。由此，若將向該放電 8分別連接於外部電極3、4。連接器 燈座7而與準分子燈1的高 ，將放電管2的左側 一對連接器端子8、 4。連接器端子8、8是用以經由 的高頻高壓電源連接的塊狀的端 15 201036027 32508pif ίΛ * 賴後_成。而且，於安裝在連 ==方的連接11端子8上，在方形塊狀的上表面的 成有向上方呈方形突出的突出部8a，而於安 ίίί，部2b下方的連接器端子8上，在方形塊狀的下 表面的中央部進而形成有向下方呈方形突出的突出部8a。 說明上述連接11端子8、8的安裝構造進行詳細 〇 鱗錫:t cf部2b的外部電極3、4的表面，分別經由 層9、9而連接固著有鎳薄片1〇、1〇β而且，於鎳 關於各多點接觸材u，當將連接科子8向錄 =推壓時，多數金職的彈簧材上下以連接器端子 j薄片10接觸的狀態下而受到施壓 8 ，箄的矣而產料亦可使用為了降低接觸電阻而經過電 ==:二例如可使用多數的短的板彈簧2 配罝於連接器端子8與鎳薄片10之間的類型 =彈於連接器端子8與錄薄片10之間的 使1根數根的線圈彈簧的線關斜而橫向配置於 16 201036027 連接器端子8與錄薄片1G之間的類型等。 下决it電f2的連接器部2b由一對陶瓷塊6、6自上 ▲疋圖3 (a)、圖3⑻所示，上方的陶竟塊 方开3祕較長的方形的陶兗，且下表面中央部向上方呈 的孔凹並且=凹陷的中央部開設著貫通至上表面的方形 Ο ❹ 包恤較長的方形的陶曼，上表面中央= 形的孔凹凹陷的中央部開設著貫通至下表面的方 ’並上表面的前後端部突出於上方。而且，該些 陶，塊6、6是以前後跨於放電管2的連接器部2b的方^ 而自上下夾持放電管2的遠接哭&μ Λ 出端彼此重合而利用二接 刃用螺栓12、12來固著，藉此夾持固定。 此處’於上述各陶曼塊6自上下夾持固定放電管 連接器部2b時’連接器端子8嵌入至内側的凹財。此時， ί連接器端子8的突出部8禮人陶賴6内侧的凹陷的孔 蔣犬出。又’各連接器端子8中，由陶瓷塊6而 將、犬“Ma的周圍向放電管2側推I，藉此經由多點接 觸材11而推壓鎳薄片1〇。 ’ 藉由上述安裳構造，使連接器端子8、8分別經由多 點接觸材U、11、錄薄片1〇、1〇及銦焊錫層9、9而確 地連接於外部電極3、4。此處，連接器端子8的熱容量較 大’故而難以對其加熱而使銦焊錫層9熔融而直接連接於 外部電極3、4。又，當經由多點接觸材11而將連接器端 子8向外部電極3、4推屢時，存在多點接觸材u的彈簧 17 201036027 32508pif 材將^部電極3、4的較薄的金屬賴切削或麟之虞。因 此’藉由對熱容量較小的鎳薄片10加熱而使銦焊錫層9 熔融從而焊接於外部電極3、4，以絲保護外部電極3、4 的金屬薄膜°又’該料>1 1G不會藉由多點接觸材11的 彈簧材而切削或剝離，因此藉由經由該多點接觸材u而推 壓連接器端子8可進行確實的連接。再者，若可將連接器 端子8、8㈣銦焊錫層9、9等而固著於由金屬薄膜構成 的外部電極3、4，或者，可使連接器端子8、8自身熔融An 8 Κι! ϋΡ- -tA. AL ΛιΤ βϋ» S-c ^ i $ installed at the top and bottom of the connection H portion 2b emits a vacuum ultraviolet (excimer light) having a center wavelength of 172 nm. Further, the vacuum ultraviolet rays are discharged downward through the gap of the mesh of the outer surface 4 of the lower flat surface of the discharge tube 2. Thereby, the discharge 8 is connected to the external electrodes 3 and 4, respectively. The connector base 7 is higher than the excimer lamp 1, and a pair of connector terminals 8, 4 on the left side of the discharge tube 2 are provided. The connector terminals 8, 8 are block-like ends for connection via a high frequency, high voltage power supply 15 201036027 32508pif ίΛ * Further, on the terminal 11 of the connection 11 which is mounted on the connection side ==, the upper surface of the square block is formed with a protruding portion 8a which protrudes upward in a square shape, and on the connector terminal 8 below the portion 2b. Further, a protruding portion 8a that protrudes in a square shape downward is formed in a central portion of the lower surface of the square block shape. The mounting structure of the above-described connection 11 terminals 8 and 8 will be described in detail. The surface of the external electrodes 3 and 4 of the squamous tin: t cf portion 2b is connected to the nickel sheets 1 〇 and 1 〇 β via the layers 9 and 9, respectively. In the case where the nickel is pressed against the multi-point contact material u, most of the golden spring materials are pressed up and down with the connector terminal j sheet 10 in contact with each other. The material can also be used to reduce the contact resistance and pass electricity ==: 2. For example, a plurality of short leaf springs 2 can be used to match the type between the connector terminal 8 and the nickel foil 10 = the connector terminal 8 The line between the number of coil springs of the recording sheet 10 and the number of coil springs 10 is horizontally arranged to be horizontally disposed between 16 201036027 between the connector terminal 8 and the recording sheet 1G. The connector portion 2b of the lower electric power device f2 is composed of a pair of ceramic blocks 6, 6 from the top ▲ 疋 3 (a), Fig. 3 (8), and the upper pottery block opens the square square pottery with a long secret. And the central portion of the lower surface is upwardly concave and the central portion of the depression is opened with a square Ο 贯通 that penetrates the upper surface. The square of the upper surface is the center of the concave groove. The square end that penetrates to the lower surface and the front and rear ends of the upper surface protrude above. Further, the ceramics, the blocks 6, 6 are formed by the front and rear sides of the connector portion 2b of the discharge tube 2, and the distal ends of the discharge tube 2 are vertically overlapped and the ends of the discharge tube 2 are overlapped with each other. The blade is fixed by bolts 12 and 12, thereby being clamped and fixed. Here, when the above-described respective Tauman blocks 6 are fixed to the discharge tube connector portion 2b from above and below, the connector terminal 8 is fitted to the inside. At this time, the protruding portion of the connector terminal 8 of the ί connector is placed on the inside of the recessed hole of the 6th floor. Further, in each of the connector terminals 8, the ceramic piece 6 pushes the periphery of the dog "Ma" toward the discharge tube 2 side, whereby the nickel sheet 1 is pressed via the multi-point contact material 11. The skirt structure is such that the connector terminals 8, 8 are reliably connected to the external electrodes 3, 4 via the multi-point contact materials U, 11, the recording sheets 1 〇, 1 〇 and the indium solder layers 9, 9, respectively. Here, the connector The heat capacity of the terminal 8 is large. Therefore, it is difficult to heat it, and the indium solder layer 9 is melted and directly connected to the external electrodes 3 and 4. Further, when the connector terminal 8 is passed to the external electrodes 3 and 4 via the multi-point contact material 11, In the case of repeated times, there are springs 17 of the multi-point contact material u. 201036027 32508pif The thin metal of the electrodes 3, 4 is cut or smashed. Therefore, by heating the nickel sheet 10 having a small heat capacity, The indium solder layer 9 is melted and soldered to the external electrodes 3 and 4 to protect the metal thin film of the external electrodes 3 and 4 by wire. Further, the material is not cut or peeled off by the spring material of the multi-point contact material 11. Therefore, a reliable connection can be made by pressing the connector terminal 8 via the multi-point contact material u. If the connector terminals 8, 8 (four) indium solder layers 9, 9 and the like can be fixed to the external electrodes 3, 4 made of a metal thin film, or the connector terminals 8, 8 themselves can be melted.
而直接連接固著’則不需要鎳薄;i 1G、1G及多點接觸材 11、11。 [燈座] 、、ί座!疋支撐上述準分子燈1並且連接於高頻高壓電 源的文裝器具’且安裝於未圖示的紫外線照射裝置等上。 ，圖1所*該燈座7中形成著向右開口的凹狀的插座部 7a。插座部7a是可供準分子燈丨的連接器部％與陶The direct connection fixation does not require nickel thin; i 1G, 1G and multi-point contact materials 11, 11. [Lamp base], ί 疋 疋 疋 疋 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In the socket 7 of Fig. 1, a concave socket portion 7a that opens to the right is formed. The socket portion 7a is a connector portion for the excimer lamp % and the pottery
^ 6等-同插人並進行支樓的凹部，於該凹部内側的上下 表面分別配置著多點接觸材13、13 (端子接觸件）。 與上述多點接觸材U、u相同，該些多點接觸材13、 菩面破失而受到推壓，藉此，多數的金屬製的彈 f材以接觸於該些上下表面的狀 ，夕内側的上表面上所配置的多點接觸材13,== ΐ上觸:下配/在比該上表面略微凹陷的位^6, etc. - The recesses of the branch are inserted and the multi-point contact members 13, 13 (terminal contacts) are disposed on the upper and lower surfaces of the inside of the recess. Similarly to the multi-point contact materials U and u, the multi-point contact members 13 and the pavement are broken and pressed, whereby a plurality of metal elastic members f are in contact with the upper and lower surfaces. The multi-point contact material 13 disposed on the upper surface of the inner side, == ΐ upper touch: lower distribution / position slightly recessed than the upper surface
比插座部7a_的上表面略微向下方突出而配置材H 18 201036027 32^υ»ριί 為插座部7a _的下表面上所配置的多點接觸材ΐ3，是 使多數彈簧材的下端接觸於配置在比該下表面略微凹陷的 位置上的端子連接板14的上表面，藉此使該縛簧材的上 端比插座部7a内侧的下表面略微向上方突出而配置。而 ，，該些端子連接板14、14分別連接於高頻高壓電源的高 壓端子與接地端子。 當將準分子燈i的左侧端部的連接2 Ο ❹ 6、6等-隨人至以上述方式構成的燈座7的插座Aa 時’如圖4所示，該準分子燈1由燈座7支樓。再者，準 =燈1未必-定僅由該燈座7續。就本實施形態的準 y刀子燈1而言，例如當前後的寬度為70 mm左右、左右的 長度超過1000咖日夺亦屬於極長的類型，故而，例如該準 分子燈1的右側端部亦可由未圖示的其他支撐材來支樓。 於向上述插座部％插人時，自喊塊6、6的孔向上 =出的連接器端子8、8的突出部8a、8a—方面將該插 ，部7a内側的上下表面上所配置的多點接觸材i3、13的 夕數彈簧材分動上方及下相展-方面進人，當完全播 入至插座4 7a t時’上述突出部8a、8a於壓 接觸材η、〗3的多鱗簧材的位置停止。 —夕點 由此，若準分子燈1連接於燈座7，則該準分子燈！ =外部電極3經由放電管2上_銦焊_9、鎳薄片1〇、 多點接觸材U、以及連接H端子8，並且經由插座部h 内侧的上表面側的多點接觸材13以及端子連接板14而連 接於高頻高壓電源的高壓端子。又，準分子燈1的外部電 201036027 32508pif 極4經由放電管2下侧的銦焊錫層9、鎳薄片1〇、多點接 觸材11、以及連接器端子8 ’並且經由插座部7a内侧的下 表面側的多點接觸材13以及端子連接板14而連接於高頻 高壓電源的接地端子。 [本實施形態的效果] 根據上述結構，燈座7可由插座部7a來支撐準分子 燈1的連接器部2b。又，該插座部7a内侧的一對多點接 觸材13、13壓接於準分子燈1的連接器端子8、8，藉此 使準分子燈1的外部電極3、4連接於高頻高壓電源，因此 可使該準分子燈1放電。 而且，無需將由樹脂所包覆的導線連接於準分子燈1 的外部電極3、4，因此不會因真空紫外線而引起樹脂劣化 從而產生分解氣體、或者不會因粉化而產生的粉狀物落下 至被照射物上。亦即，本實施形態的準分子燈1是經由銦 焊錫層9、9而將鎳薄片10、10連接固定於外部電極3、4， 且經由多點接觸材11、11而將連接器端子8、8連接於該 些鎳薄片10、10’由陶瓷塊6、6來推壓該些連接器端子8、 8,因此即便真空紫外線照射至該些金屬製及陶瓷製的構件 亦無劣化之虞。又，本實施形態的燈座7、插座部7a内側 的多點接觸材13、13及端子連接板14、14是金屬製，故 而即便照射真空紫外線亦無劣化之虞。 尤其，本實施形態中，準分子燈1放射高能量的真空 紫外線，故而若使用樹脂則劣化會變得劇烈，因此如此僅 含有金屬製及陶瓷製的結構極為有效。 201036027 32508pif 又’本實施形態中，準分子燈i中使用方形的放電管 2’故而，於該放電管2的下方不設置玻璃板等即可將真空 务外線直接照射至被照射物，因此，不會因樹脂劣化而產 生分解氣體或不會因粉化而產生粉狀物，上述結構極為有 效。 又，本實施形態中，由陶瓷塊6、6而夾持的放電管2 的連接器部2b中於内部不存在放電空間2a，故而，即便 〇 由螺栓12、12而自上下夾持固定該些陶瓷塊6、ό，或者 經由多點接觸材11、u而自上下推壓連接器端子8、8， 放電管2亦不會因該些壓力而破損。 [其他實施形態] 再者，上述實施形態中，表示了使用氤氣作為放電用 氣體的情形，但是亦可使用能夠實現準分子發光的直他 有氣體、其由化物或其他物質。進而，上述實施形態中， 表不了放射波長為172 nm的真空紫外線的情形，但是紫 祕的波長是由用作放電贱_物#來決定，因此波長 並不限於172 nm，且並不限於真空紫外線。 又’上述實施形態中，表示了由方形的合成石英塊來 堵塞包含合成石英且左右較長的方形的筒體的左右開口 端’藉此來製作左右較長的方形的放電管2的情形，但是 該放電管2的製作方法並非限於此。此處，所謂左右較長 的方形是指，與前後寬度或上下高度相比，左右長度最長 的方形。而且，此處所謂的方形，只要前後方向及上下方 向上的切割面的縱剖面形狀大致為方形即可角部亦可倒 201036027 32508pif 角或成圓形等。進而，只要上表面與下表面大致為平坦面 即可，前後的侧面未必要為平坦面，例如亦可略微向外側 彎曲。進而，考慮到氣體的吸引/填充或準分子燈〗的安裝 等’放電管2的外形可形成有略微的凹凸。 *又，上述實施形態中，對使用左右較長的方形的放電 管2的準分子燈丨進行了說明，但該放電管2的形狀為任 意，例如於使用由圓筒管構成的放電管2的準分子燈i中 亦可同樣地實施。當放電管2 _筒管等構成時^外線 的放出面（上述實施職中的下平坦面）不會成為平坦面， 故而為了將準分子燈1的周圍的氧等淨化，亦可於該放電 管3與下方的被照射物之間配置玻璃板等。以如此=式配 置玻璃板料’當目樹㈣劣化而產生分解氣體或因粉化 而產生粉狀物時，外部電極3、4會變色或者放電管2的表 面及玻璃板會受到污損，因此本發明可解決如此的問題。 又，上述實施形態中，表示了放電管2中使 英的情形’但是只要是所放射的紫外線的透射率高:且因 該紫外線所引起的劣化較少的材質，則未必限於合成石英。 又，上述實施形態中，表示了經由銦焊錫層9、9而 將錄薄片10、H)連接固著於連接器部2b的外部電極Μ 的表面的情形，但是只要不對外部電極3、4的 鎳薄片10、1〇造成損害而可確實地連接固著即可，並不限 於使用銦的焊錫材料，亦可經由使用其鱗錫材料或焊接 材料的焊錫層而連接固著。 — 又’上述實施形態中，表示了使用料片1〇的情形， 22 201036027 但疋只要不會因多點接觸材11的彈簧材而切削或剝離而 可確實地進行連接即可，亦可使用其他金屬片，且亦可不 限於金屬片而使用金屬板等。 ,又’上述實施形態中，表示了使用陶瓷塊6、6的情 开但是只要具有充分的剛性與絕緣性且不受紫外線的影 響即可，材質並不限於陶瓷，例如亦可使用合成石英。進 而為了推壓連接器端子8、8，並不限於由如此的陶瓷塊 Ο 6、6來夾持固定放電管2的連接器部2b的構造，例如， 如圖5所示，亦可為將陶瓷製的帽&叩）狀的陶瓷塊6 嵌入至放電管2的連接器部2b中的構造。 又，上述實施形態中，表示了對銅合金實施鍍鎳後而 用作連接器端子8、8的情形，但是只要是具有充分的剛性 =金屬製’則連接H端子8、8的材質或表面處理可為任 忍，且形狀亦不限於上述實施形態中的形狀。 又，上述實施形態中，表示了連接器端子8、8經由 多點接觸材1卜1卜鎳薄片10、10以及銦焊錫層9、9而 連接於由金屬薄膜構成的外部電極3、4的情形，但是亦可 將連接器端子8、8經由銦焊錫層9、9等而直接連接固著 於外部電極3、4 〇 ® 6表示將連接器端子8、8經由焊锡 層而連接固定於外部電極3、4的結構。此時，連接器端子 8、8使用的是熱容量較小的金屬板，以使銦焊錫層9、 的焊接變得容易。 進而，當將塊狀的連接器端子8、8經由銦焊錫層9、 9等而直接連接固著於外部電極3、4時，例如，如圖7所 23 201036027 32508pif 示，亦可將該些連接器端子8、8拉出至覆蓋放電管 側端面的-部分的位置為止’而於該些連接器端子 的左侧端部設置連接用的傾斜面。此時，如圖7所示产 座7可配置成由上下的金屬製的端子連接塊15、Η、、以】 為了絕緣而配置於該些端子連接塊15、15之間的陶竞材 16而構成，並且使插座部％成為右侧開口的ν字狀的凹 陷’於該v字狀的凹陷的上下所露出的端子連接塊ΐ5、15 的傾斜端面上配置著多點接觸材13、13。而且， 如於準分子燈1的右側的端部，配置將該準分子燈！ 支撐材，藉此可由該支撐材與燈座7該 兩者來支撐料子燈i。藉此，準分子燈i的連接器端子8、 8的左側端部的傾斜面，經由多點接觸材13、13而壓接於 J座7的插座部7a的v字狀的凹陷處所露出的端子連接 塊15]5的傾斜端面，因此可確實地連接於高頻高壓電源。 又，述實施形態中，表示了外部電極3為一樣地 的^屬薄膜、外部電極4為以網狀圖案而成膜的金屬薄 =的情形，但是該些外部電極3、4的金屬薄财可以任意 、圖案而成膜。例如’兩個外部電極3、4亦可為均以網 ，案而成膜的金屬薄膜’而且，只要可向放電管2的外部 =紫外線，則兩個外部電極3、4亦可為一樣地成膜的金 =膜。進而’例如’於由一樣地成膜的金屬薄膜而構成 改^電極的-部分’可具有用以測定所放出的紫外線的 強度而局部地以網狀圖案成膜的窗部；於由以網狀圖案成 膜的金屬薄膜而構成的外部電極的一部分，亦可具有一樣 24 201036027 地成膜的部分（上述實施形態中’形成於連接器部2b 部電極4亦可由一樣地成膜的金屬薄膜而構成）。 又，上述實施形態中，表示了外部電極4的網狀的圖 案中藉由使細長的多個金屬薄膜正交而使網眼成為正方形 或長方形的情形’但是該·圖案的形狀或尺寸是任竟 =。亦可例如使細㈣金屬_不正交_眼成為菱形= Ο ❹ 平仃四邊形，亦可例如使網眼為六邊形的蜂 (h〇neycombmesh)狀。進而，亦可為 ^多 金屬薄膜平行配置的梳齒狀。 I田長的多個 -辦二’上述實施形態中，表示了外部電極3、4是由鋁 =膜以及保護該表面的鎳蒸鍍膜而構成的2層金屬薄膜 情形’但是亦可為僅1層金屬薄膜或者3層或3層以上 2屬薄膜，各層的金屬材料均並不限於鋁及鉾，：可任 崎的方法而成膜—的==利用蒸⑽^The material H 18 is slightly protruded downward from the upper surface of the socket portion 7a_, and the multi-point contact material 3 disposed on the lower surface of the socket portion 7a_ is such that the lower ends of the plurality of spring members are in contact with each other. The upper surface of the terminal connecting plate 14 is disposed at a position slightly recessed from the lower surface, whereby the upper end of the binding spring is protruded slightly upward from the lower surface of the inner side of the socket portion 7a. Further, the terminal connecting plates 14, 14 are respectively connected to the high voltage terminal and the ground terminal of the high frequency high voltage power supply. When the connection 2 Ο ❹ 6, 6, etc. of the left end of the excimer lamp i is attached to the socket Aa of the socket 7 constructed in the above manner, as shown in FIG. 4, the excimer lamp 1 is composed of a lamp 7 blocks. Furthermore, the quasi-light 1 does not necessarily have to be continued only by the lamp holder 7. In the quasi-y-knife lamp 1 of the present embodiment, for example, the current width is about 70 mm, and the length of the left and right is more than 1000, which is an extremely long type. Therefore, for example, the right end of the excimer lamp 1 is used. It is also possible to support the building by other supporting materials not shown. When the plug portion is inserted into the above-mentioned socket portion, the holes of the self-examination blocks 6, 6 are upwardly turned out, and the protruding portions 8a, 8a of the connector terminals 8, 8 are arranged to be placed on the upper and lower surfaces of the inner side of the plug portion 7a. The plurality of contact materials i3, 13 of the eclipse spring material transfer upper and lower phase exhibition - in the aspect, when fully inserted into the socket 4 7a t 'the above-mentioned protrusions 8a, 8a in the pressure contact material η, 〗 3 The position of the multi-scale spring material stops. - Evening point Thus, if the excimer lamp 1 is connected to the lamp holder 7, the excimer lamp! The external electrode 3 is connected to the multi-point contact material 13 and the terminal on the upper surface side via the inner side of the socket portion h via the discharge tube 2 via _indium soldering _9, nickel foil 1 〇, multi-point contact material U, and connection H terminal 8. The connection plate 14 is connected to a high voltage terminal of a high frequency high voltage power supply. Further, the external electric power 201036027 32508pif pole 4 of the excimer lamp 1 passes through the indium solder layer 9, the nickel foil 1 〇, the multi-point contact material 11 and the connector terminal 8' on the lower side of the discharge tube 2 and via the inside of the socket portion 7a. The multi-point contact material 13 on the front side and the terminal connection plate 14 are connected to the ground terminal of the high-frequency high-voltage power source. [Effects of the present embodiment] According to the above configuration, the socket 7 can support the connector portion 2b of the excimer lamp 1 by the socket portion 7a. Further, the pair of multi-point contact members 13, 13 inside the socket portion 7a are crimped to the connector terminals 8, 8 of the excimer lamp 1, whereby the external electrodes 3, 4 of the excimer lamp 1 are connected to the high frequency and high voltage. The power source can thus discharge the excimer lamp 1. Further, since it is not necessary to connect the wires covered with the resin to the external electrodes 3 and 4 of the excimer lamp 1, the resin is not deteriorated by the vacuum ultraviolet rays to generate decomposition gas, or powder which is not generated by powdering. Drop onto the object to be irradiated. In other words, in the excimer lamp 1 of the present embodiment, the nickel sheets 10 and 10 are connected and fixed to the external electrodes 3 and 4 via the indium solder layers 9 and 9, and the connector terminals 8 are connected via the multi-point contact members 11 and 11. And 8 are connected to the nickel sheets 10 and 10' to press the connector terminals 8 and 8 by the ceramic blocks 6, 6. Therefore, even if the vacuum ultraviolet rays are irradiated to the metal and ceramic members, there is no deterioration. . Further, since the socket 7 and the multi-point contact members 13 and 13 and the terminal connecting plates 14 and 14 on the inside of the socket portion 7a of the present embodiment are made of metal, they are not deteriorated even if they are irradiated with vacuum ultraviolet rays. In particular, in the present embodiment, the excimer lamp 1 emits high-energy vacuum ultraviolet rays. Therefore, if the resin is used, the deterioration is severe. Therefore, it is extremely effective to include only a metal or ceramic structure. 201036027 32508pif In the present embodiment, the quasi-molecular lamp i uses a square discharge tube 2'. Therefore, the vacuum line can be directly irradiated to the object to be irradiated without providing a glass plate or the like under the discharge tube 2. The above structure is extremely effective because no decomposition gas is generated due to deterioration of the resin or powder is not generated by pulverization. Further, in the present embodiment, since the discharge space 2a is not present in the connector portion 2b of the discharge tube 2 sandwiched by the ceramic blocks 6, 6, even if the boring is fixed by the bolts 12 and 12 from above and below, The ceramic blocks 6, the crucibles, or the connector terminals 8, 8 are pushed up and down via the multi-point contact members 11, u, and the discharge tube 2 is not damaged by the pressure. [Other Embodiments] In the above embodiment, the case where helium gas is used as the discharge gas is shown. However, it is also possible to use a straight gas, a chemical substance or the like which can realize excimer light emission. Further, in the above embodiment, the case where the vacuum ultraviolet ray having a wavelength of 172 nm is emitted is described, but the wavelength of the purple ray is determined by the use as the discharge 贱_object#, so the wavelength is not limited to 172 nm, and is not limited to vacuum. Ultraviolet light. Further, in the above-described embodiment, the case where the left and right open ends of the cylindrical body including the synthetic quartz and the square which are long in the left and right sides are closed by the square synthetic quartz block is described, whereby the left and right long rectangular discharge tubes 2 are produced. However, the method of manufacturing the discharge tube 2 is not limited thereto. Here, the term "long square" refers to a square having the longest left and right length as compared with the front and rear width or the vertical height. Further, as the square shape here, as long as the longitudinal cross-sectional shape of the cutting surface in the front-rear direction and the upper-lower direction is substantially square, the corner portion may be inverted. 201036027 32508pif angle or round shape. Further, the upper surface and the lower surface may be substantially flat surfaces, and the front and rear side surfaces are not necessarily flat surfaces, and may be slightly curved outward, for example. Further, in consideration of the suction/filling of the gas or the mounting of the excimer lamp, etc., the outer shape of the discharge tube 2 may be formed with a slight unevenness. In the above embodiment, the excimer lamp 使用 using the square discharge tube 2 having a long left and right direction has been described. However, the shape of the discharge tube 2 is arbitrary, for example, using the discharge tube 2 composed of a cylindrical tube. The excimer lamp i can also be implemented in the same manner. When the discharge tube 2 is a tube or the like, the discharge surface of the outer line (the lower flat surface in the above-mentioned embodiment) does not become a flat surface. Therefore, in order to purify the oxygen around the excimer lamp 1, the discharge may be performed. A glass plate or the like is disposed between the tube 3 and the object to be irradiated below. When the glass sheet is disposed in such a manner that when the decomposition of the eye tree (4) causes decomposition of the gas or the powder is generated by the powdering, the external electrodes 3 and 4 may be discolored or the surface of the discharge tube 2 and the glass sheet may be stained. The present invention therefore solves such problems. Further, in the above-described embodiment, the case where the discharge is performed in the discharge tube 2 is shown. However, the material having a high transmittance of ultraviolet rays to be emitted and having little deterioration due to the ultraviolet rays is not necessarily limited to synthetic quartz. Further, in the above-described embodiment, the case where the recording sheets 10 and H) are bonded to the surface of the external electrode 连接 of the connector portion 2b via the indium solder layers 9 and 9 is shown, but the external electrodes 3 and 4 are not provided. The nickel flakes 10 and 1 may be damaged and adhered to each other securely. The solder material is not limited to a solder material using indium, and may be connected and fixed by using a solder layer of a scale tin material or a solder material. - In the above-described embodiment, the case where the web 1〇 is used is shown, 22 201036027, but it may be used as long as it is not cut or peeled off by the spring material of the multi-point contact material 11 and can be reliably connected. The other metal piece may be a metal plate or the like without being limited to the metal piece. Further, in the above embodiment, the use of the ceramic blocks 6 and 6 is shown, but the material is not limited to ceramics as long as it has sufficient rigidity and insulation, and the material is not limited to ceramics. For example, synthetic quartz may be used. Further, in order to press the connector terminals 8 and 8, it is not limited to the structure in which the connector portion 2b of the discharge tube 2 is sandwiched by the ceramic blocks 6 and 6, for example, as shown in Fig. 5, A ceramic cap-like ceramic block 6 is fitted into the connector portion 2b of the discharge tube 2. Further, in the above-described embodiment, the copper alloy is used as the connector terminals 8 and 8 after nickel plating, but the material or surface of the H terminals 8 and 8 is connected as long as it has sufficient rigidity = metal. The treatment may be carried out, and the shape is not limited to the shape in the above embodiment. Further, in the above embodiment, the connector terminals 8 and 8 are connected to the external electrodes 3 and 4 made of a metal thin film via the multi-point contact material 1b of the nickel sheets 10 and 10 and the indium solder layers 9 and 9. In this case, the connector terminals 8 and 8 may be directly connected and fixed to the external electrodes 3 and 4 via the indium solder layers 9, 9 or the like. 6 表示® 6 indicates that the connector terminals 8 and 8 are connected and fixed to the outside via the solder layer. The structure of the electrodes 3, 4. At this time, the connector terminals 8 and 8 are made of a metal plate having a small heat capacity to facilitate the soldering of the indium solder layer 9. Further, when the block-shaped connector terminals 8 and 8 are directly connected and fixed to the external electrodes 3 and 4 via the indium solder layers 9, 9 or the like, for example, as shown in FIG. 7 and FIG. 23 201036027 32508pif, these may be used. The connector terminals 8 and 8 are pulled out to cover the position of the portion of the discharge tube side end surface, and an inclined surface for connection is provided at the left end portion of the connector terminals. At this time, as shown in FIG. 7, the base 7 can be disposed by the upper and lower metal terminal connecting blocks 15, the cymbal, and the ceramic material 16 disposed between the terminal connecting blocks 15 and 15 for insulation. Further, the multi-point contact members 13 and 13 are disposed on the inclined end faces of the terminal connection blocks 5 and 15 which are exposed on the upper and lower sides of the v-shaped recesses. Moreover, as the end of the right side of the excimer lamp 1, the excimer lamp is arranged! A support material whereby the material lamp i can be supported by both the support material and the socket 7. Thereby, the inclined surface of the left end portion of the connector terminals 8 and 8 of the excimer lamp i is crimped to the v-shaped recess of the socket portion 7a of the J-seat 7 via the multi-point contact members 13 and 13. The terminal connection block 15] 5 has an inclined end face, so that it can be reliably connected to the high frequency high voltage power supply. Further, in the embodiment, the external electrode 3 is a film of the same type, and the external electrode 4 is a thin metal film formed by a mesh pattern. However, the metal of the external electrodes 3 and 4 is thin. It can be formed into a film by any pattern. For example, 'the two external electrodes 3, 4 may be a metal film which is formed by a net, and the film is formed." The two external electrodes 3, 4 may be the same as long as they can be directed to the outside of the discharge tube 2 Film formed gold = film. Further, for example, a portion of the electrode formed by the metal film formed in the same manner may have a window portion for measuring the intensity of the emitted ultraviolet light and partially forming a film in a mesh pattern; A part of the external electrode formed by forming a metal thin film in a pattern may have a portion formed by the same film as 24 201036027 (in the above embodiment, the metal film formed in the connector portion 2b and the electrode 4 may be formed in the same manner) And constitute). Further, in the above-described embodiment, the mesh-shaped pattern of the external electrode 4 is a case where the mesh is square or rectangular by orthogonalizing a plurality of elongated metal thin films. However, the shape or size of the pattern is Actually =. For example, the fine (tetra) metal _ non-orthogonal _ eye may be a rhombus = Ο ❹ flat quadrilateral, and for example, the mesh may be a hexagonal bee. Further, it may be a comb-like shape in which the multi-metal thin films are arranged in parallel. In the above embodiment, the external electrodes 3 and 4 are in the form of a two-layer metal film composed of an aluminum film and a nickel vapor-deposited film that protects the surface, but may be only one. A metal thin film or a three-layer or three-layer or two-layer thin film, the metal materials of each layer are not limited to aluminum and tantalum, and can be formed by the method of Razaki-== by steaming (10)^
Sit!，的類型。進而，該些外部電極 、不限於藉由成臈而配置其 = = = :=而配置、或將金屬丄 該等由金屬板構成的外部電極匕3寺4 ^端子8、8可由 的連接器部2b外表面上^極3、4的、配置在放電管2 板構成的外部電極3、4^心而構成。當如此使用由金屬 子’例如為了使外部電極4成為網 201036027 32508pif 狀，可使用穿孔金屬（punching metal)或膨脹金屬（expand metal)等。然而，當使用如此的穿孔金屬或膨脹金屬等時， 較好的亦是’配置在放電管2的連接器部2b的外表面上的 部分為通常的金屬板，而將該部分作為連接器端子8。進 而亦可僅使連接器％子8為金屬板，而將由金屬網構成 的外部電極4藉由焊接等而連接於該連接器端子$。 進而，即便於外部電極3、4為金屬薄膜或金屬板等 的任意類型時，均可不配置於放電管2的連接器部2b，而 分別經由金屬製的引導材等而連接於連接器端子8、8，該 連接器端子8、8是由配置於該連接器部2b的金屬板 構成。 上迷貫施形態中 衣不f使用多點接觸材13、13 作為燈座7的端子賴件的情形，但是如圖9所示，亦可 將金屬製的板彈簧Π、17用作端子接觸件。此時，板彈菁 17、17因雜*壓接於連接器端子8、8，因此可確實地連 接進而燈座7的端子接觸件亦可使用藉由線圈彈著等 力的金屬板等。然而’該些端子接觸件構成為： :將準々子燈1的連接器部2b插人至燈座7的插座部7a 中時^者該插人而受到連接器端子8、8的推壓 口部自動打開。 推壓端子8 ' 8如上述實施形態所述為用來 ”點接觸材U、11的構成時，燈座7的端子接觸件 t端子接觸件n進-步減多點接觸材 26 201036027Sit!, the type. Further, the external electrodes are not limited to the ones which are arranged by the formation of ===:=, or the external electrodes of the metal plates, which are made of metal plates, and the like. The outer electrodes 3 and 4 on the outer surface of the portion 2b are disposed on the outer electrodes 3 and 4 of the discharge tube 2 plate. When the metal element ' is used in this way, for example, in order to make the external electrode 4 into a mesh 201036027 32508pif shape, a punching metal, an expand metal, or the like can be used. However, when such a perforated metal or expanded metal or the like is used, it is preferable that the portion disposed on the outer surface of the connector portion 2b of the discharge tube 2 is a usual metal plate, and the portion is used as a connector terminal. 8. Further, only the connector % 8 is a metal plate, and the external electrode 4 composed of a metal mesh is connected to the connector terminal $ by soldering or the like. Further, even when the external electrodes 3 and 4 are of any type such as a metal thin film or a metal plate, they may be connected to the connector terminal 8 via a metal guide member or the like without being disposed in the connector portion 2b of the discharge tube 2, respectively. 8. The connector terminals 8 and 8 are formed of a metal plate disposed on the connector portion 2b. In the above-mentioned embodiment, the multi-point contact members 13, 13 are used as the terminal members of the socket 7, but as shown in Fig. 9, the metal plate springs, 17 can also be used as the terminal contacts. Pieces. At this time, the plate elastics 17, 17 are crimped to the connector terminals 8, 8 so that they can be reliably connected, and the terminal contact of the socket 7 can also be a metal plate or the like which is elastically wound by a coil. However, the terminal contacts are configured to: when the connector portion 2b of the quasi-tweezer lamp 1 is inserted into the socket portion 7a of the socket 7, the insertion port of the connector terminals 8 and 8 is inserted. The department opens automatically. When the pressing terminal 8'8 is used for the configuration of the "point contact materials U, 11" as described in the above embodiment, the terminal contact t-terminal contact of the socket 7 advances step by step to reduce the contact material 26 201036027
11、11從而略微凹陷地進入。 本申請案基於2008年9月22日申請的日本專 案·申請編號2008-242644，其内容以參照的形式併入μ 中。 入本文 雖然本發明已以實施例揭露如上，然其並非用以阳〜 本發明，任何所屬技術領域中具有通常知識者，在二^ 本發明之精神和制内，當可作些許之更動朗飾，11,11 thus enters slightly recessed. The present application is based on Japanese Patent Application No. 2008-242644, filed on Sep. 22, 2008, the content of which is incorporated herein by reference. Although the present invention has been disclosed in the above embodiments, it is not intended to be used in the present invention, and any one of ordinary skill in the art can be made a little more versatile in the spirit and system of the present invention. Decoration,
發明之保護範圍當視後附之申請專利範圍所界 【圖式簡單說明】 圖1表示本發明的一實施形態，且是表示準分子燈 元的結構的局部放大侧剖面圖。 且 圖2 (a)、圖2 (b)、圖2 ( c )表示本發明的一實施 形心，且分別是表示準分子燈的放電管的結構的平面 侧面圖、及背面圖。 圖3 (a)、圖3 (b)表示本發明的一實施形離，且分 別是表示準分子㈣構成的局部放A平面圖及^放大側 剖面圖。 圖4表示本發明的一實施形態，且是表示將準分子燈 插入至燈座中時的結構的局部放大侧剖面圖。 圖5表示本發明的其他實施形態，且是表示準分子燈 的結構的局部放大側剖面圖。 〇〇圖6表示本發明的其他實施形態，且是表示準分子燈 單元的結構的局部放大側剖面圖。 圖7表示本發明的其他實施形態，且是表示準分子燈 27 201036027 325ϋ«ριί 單元的結構的局部放大側剖面圖。 圖8表示本發明的其他實施形態，且是表示 燈插入至燈座中時的結構的局部放大側剖面圖。刀 圖9表示本發明的其他實施形態，且是表示 單元的結構的局部放大側剖面圖。 刀瓦 圖表示先前例，且是表示準分子燈的放電瞽 構的俯視立體圖。 、、、、c 圖11表示先前例，且是表示準分子燈的玫電管的斧 構的仰視立體圖。 μ 圖12表示先前例，且是表示準分子燈的結構的局部 放大側剖面圖。 【主要元件符號說明】 1 :準分子燈 2 :放電管 2a :放電空間 2b :連接器部The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partially enlarged side cross-sectional view showing the structure of an excimer lamp according to an embodiment of the present invention. 2(a), 2(b), and 2(c) show a centroid of the embodiment of the present invention, and are a plan side view and a rear view, respectively, showing the structure of the discharge tube of the excimer lamp. Fig. 3 (a) and Fig. 3 (b) show an embodiment of the present invention, and a partial plan view and an enlarged side cross-sectional view showing the excimer (4), respectively. Fig. 4 is a partially enlarged side sectional view showing a structure in which an excimer lamp is inserted into a socket, according to an embodiment of the present invention. Fig. 5 is a partially enlarged side sectional view showing the structure of an excimer lamp according to another embodiment of the present invention. Fig. 6 is a partially enlarged side sectional view showing the structure of an excimer lamp unit, showing another embodiment of the present invention. Fig. 7 is a partially enlarged side sectional view showing the structure of an excimer lamp 27 201036027 325 ϋ «ριί unit according to another embodiment of the present invention. Fig. 8 is a partially enlarged side sectional view showing the structure of the lamp when the lamp is inserted into the socket, according to another embodiment of the present invention. Fig. 9 is a partially enlarged side sectional view showing the structure of a unit according to another embodiment of the present invention. The turret diagram shows a prior art and is a top perspective view showing the discharge structure of the excimer lamp. Fig. 11 is a bottom perspective view showing a conventional example and showing an axe of a roselight of an excimer lamp. [Fig. 12] Fig. 12 is a partial enlarged side sectional view showing the structure of the excimer lamp. [Explanation of main component symbols] 1 : Excimer lamp 2 : Discharge tube 2a : Discharge space 2b : Connector part
3 :外部電極 4 :外部電極 5 :導線 5a :包覆材 6 :陶瓷塊 ”燈座 7a :插座部 8 :連接器端子 28 201036027 8a :突出部 9:銦焊錫層 10 :鎳薄片 11 :多點接觸材 12 :螺栓 13 :多點接觸材 14 :端子連接板 15 :端子連接塊 16 :陶瓷材 17 :板彈簧3: External electrode 4: External electrode 5: Conductor 5a: Cover material 6: Ceramic block "Lamp base 7a: Socket portion 8: Connector terminal 28 201036027 8a: Projection portion 9: Indium solder layer 10: Nickel sheet 11: Multi Point contact material 12: Bolt 13: Multi-point contact material 14: Terminal connection plate 15: Terminal connection block 16: Ceramic material 17: Leaf spring
2929
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008242644 | 2008-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201036027A true TW201036027A (en) | 2010-10-01 |
| TWI453785B TWI453785B (en) | 2014-09-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098131986A TWI453785B (en) | 2008-09-22 | 2009-09-22 | Excimer lamp, excimer lamp unit and uv-irradiating device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5472112B2 (en) |
| KR (1) | KR101204729B1 (en) |
| CN (1) | CN102160142A (en) |
| TW (1) | TWI453785B (en) |
| WO (1) | WO2010032849A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5851069B2 (en) * | 2012-04-26 | 2016-02-03 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Ground connection to lamp housing |
| KR101815218B1 (en) | 2016-12-12 | 2018-01-08 | 김래훈 | Magnetic electrode structure of lighting apparatus and lighting apparatus having the same |
| JP7115036B2 (en) * | 2018-05-25 | 2022-08-09 | ウシオ電機株式会社 | excimer lamp |
| JP7338445B2 (en) * | 2019-12-17 | 2023-09-05 | ウシオ電機株式会社 | excimer lamp |
| KR20220072418A (en) * | 2020-11-25 | 2022-06-02 | (주)선재하이테크 | Ionizer using excimer lamp |
| JP7549294B2 (en) | 2021-02-03 | 2024-09-11 | ウシオ電機株式会社 | Excimer Lamp |
| KR102657557B1 (en) * | 2021-09-23 | 2024-04-15 | (주)선재하이테크 | Ionizer using excimer lamp |
| KR20240041605A (en) * | 2022-09-23 | 2024-04-01 | (주)선재하이테크 | Electrodeless eximer lamp |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1154089A (en) * | 1997-08-06 | 1999-02-26 | Harison Electric Co Ltd | External electrode fluorescent lamp |
| CN1356716A (en) * | 2000-11-10 | 2002-07-03 | 日本板硝子株式会社 | Flat ultraviolet lamp and flat lighting body for cold-storage showcase |
| JP4578051B2 (en) * | 2002-09-11 | 2010-11-10 | 株式会社Ｇｓユアサ | UV irradiation equipment |
| CN1219313C (en) * | 2003-02-27 | 2005-09-14 | 上海交通大学 | Fluorescent lamp with reansparent electric conductive protective coating and lamp holder thereof |
| JP4475001B2 (en) * | 2004-05-10 | 2010-06-09 | 株式会社ジーエス・ユアサコーポレーション | Dielectric barrier discharge lamp |
| JP2006302720A (en) * | 2005-04-22 | 2006-11-02 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | Excimer lamp |
| KR20080002851A (en) * | 2005-04-22 | 2008-01-04 | 호야 칸데오 옵트로닉스 가부시키가이샤 | Excimer lamp |
| JP2007207511A (en) * | 2006-01-31 | 2007-08-16 | Ushio Inc | Light source system for display device and rare-gas fluorescent lamp |
| US8030859B2 (en) * | 2006-05-12 | 2011-10-04 | Sharp Kabushiki Kaisha | Cold-cathode lamp, and display illumination device and display device therewith |
-
2009
- 2009-09-18 JP JP2010529824A patent/JP5472112B2/en not_active Expired - Fee Related
- 2009-09-18 CN CN2009801370963A patent/CN102160142A/en active Pending
- 2009-09-18 WO PCT/JP2009/066438 patent/WO2010032849A1/en active Application Filing
- 2009-09-18 KR KR1020117007459A patent/KR101204729B1/en not_active IP Right Cessation
- 2009-09-22 TW TW098131986A patent/TWI453785B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP5472112B2 (en) | 2014-04-16 |
| WO2010032849A1 (en) | 2010-03-25 |
| JPWO2010032849A1 (en) | 2012-02-16 |
| TWI453785B (en) | 2014-09-21 |
| CN102160142A (en) | 2011-08-17 |
| KR101204729B1 (en) | 2012-11-27 |
| KR20110061599A (en) | 2011-06-09 |
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