JP7338445B2 - excimer lamp - Google Patents

Description

The present invention relates to excimer lamps.

Conventionally, ultraviolet light has been used in the manufacture of semiconductors and liquid crystal panels and in the generation of ozone for air cleaning. is used.

JP 2005-347025 A

Therefore, the present inventor studied the configuration of the excimer lamp, and found that the following problems existed. Description will be made below with reference to the drawings.

An excimer lamp is a discharge lamp in which the dominant emission wavelength of the emitted ultraviolet light is determined by the luminous gas enclosed in the luminous space of the arc tube. Typical combinations of the emission gas of the excimer lamp and the emitted main emission wavelength include Ar ₂ (126 nm), Kr ₂ (146 nm), Xe ₂ (172 nm), KrCl (222 n), XeCl (308 nm), and the like. be.

FIG. 9 is a diagram schematically showing the configuration around the base member 104 of the conventional excimer lamp 100. As shown in FIG. As shown in FIG. 9, a conventional excimer lamp 100 includes an arc tube 101 filled with a luminous gas, a pair of electrodes 102 on the outer surface of the arc tube 101, and a pair of power supply lines connected to the electrodes 102. It emits light when power is supplied from 103 . The power supply line 103 is fixed to the arc tube 101 by a base member 104 attached to the end of the arc tube 101 in the direction of the tube axis 101x.

The excimer lamp 100 is applied with a high voltage of several hundred volts to several kV between the pair of electrodes 102 in order to generate discharge within the light emitting space 101a. In the excimer lamp 100, when a high voltage is applied between the electrodes 102 and discharge occurs, the temperature rises due to the heat generated by the discharge, and the arc tube 101 thermally expands.

When the temperature rises, the arc tube 101 expands as a whole, and in particular deforms so as to extend in the tube axis 101x direction, which is the longitudinal direction. Then, the base member 104 fixed to the arc tube 101 moves away from the electrode 102 along the direction of the tube axis 101x.

At this time, in the case of the configuration shown in FIG. If the connection strength between the electrode 102 and the feeder line 103 is weak, the electrode 102 and the feeder line 103 may be disconnected. Also, if the adhesion strength between the electrode 102 and the outer wall surface of the arc tube 101 is weak, the electrode 102 may peel off from the outer wall surface of the arc tube 101 .

In addition, even if the power supply line 103 is used several times without disconnection, peeling, or the like, if the power supply line 103 is used continuously, the above-described thermal expansion occurs many times, 102, the power supply line 103, and their connections accumulate a load due to tension. Ultimately, there is a possibility that the electrode 102 and the power supply line 103 may be disconnected or the electrode 102 may be peeled off from the arc tube 101, resulting in a problem of reliability.

SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide an excimer lamp in which damage due to thermal expansion is suppressed and reliability is ensured.

The excimer lamp of the present invention is
a long luminous tube in which a luminous gas is enclosed;
a pair of electrodes provided so as to face the outer wall surface of the arc tube through the arc tube;
a pair of conductive sheet members each connected to a different electrode;
a pair of feeder lines spaced apart from the electrode in the tube axis direction and connected to different conductive sheet members;
a base member for fixing the arc tube and the power supply line at an end portion of the arc tube in the tube axial direction,
The conductive sheet member has a folded portion that is folded back toward the electrode between the electrode and the power supply line when the power supply line is viewed from the electrode side. .

With the above configuration, when thermal expansion occurs in the arc tube and tension is generated so that the electrode and the power supply line are separated, the tension is applied so that the folded portion of the conductive sheet member expands along the tube axis direction. This relieves the load on the electrodes and feeder lines.

In excimer lamps in which the electrodes are formed by screen printing, if the electrodes are directly connected to the power supply line and tension is generated in the direction in which they separate, part of the electrodes will peel off from the outer wall surface of the arc tube. possible and prone to damage. Therefore, the configuration of the present invention, which can relax the tension generated between the electrode and the power supply line, is particularly effective for excimer lamps having electrodes formed by screen printing on the outer wall surface of the arc tube. be.

In the above excimer lamp,
The conductive sheet member may be mesh-like.

In this specification, the term "mesh-like" refers to a state in which a large number of through holes are formed in a sheet-like member so as to be aligned, or a state in which a plurality of linear members are woven into a lattice to form a large number of meshes. It means a mesh or lattice shape, such as a state where

Since the conductive sheet member is mesh-like, it is possible to visually check through the gaps in the mesh whether an adhesive such as solder is poured between the conductive sheet member and the electrode when joining the electrode. can be done.

In addition, since the conductive sheet member is mesh-like, the adhesive flows into the meshes of the conductive sheet member, entangles with the conductive sheet member, and connects with the electrode. are connected with high strength.

In the above excimer lamp,
The electrode is formed with a plurality of light extraction portions for extracting light emitted from the arc tube. It may have a solid connection region extending toward the .

In this specification, the light extraction part is an opening, gap, or the like formed so that the light emitted from the arc tube is emitted toward the outside of the arc tube. With the above configuration, the light emitted from the arc tube can be irradiated toward the object to be irradiated, and the conductive sheet member and the electrode can be brought into contact with each other and connected with higher strength. The shape and size of the light extraction part are arbitrary, and it may have a configuration like an elongated slit.

In the above excimer lamp,
The power supply line includes a plurality of core wires and a conductive binding member that binds the plurality of core wires,
The conductive sheet member may be connected to the binding member.

A conductive flat surface can be configured around the plurality of core wires by binding the power supply line composed of the plurality of core wires with the conductive binding member. Therefore, with the above configuration, the conductive sheet member and the feeder line can be brought into contact with each other and can be connected with high strength, thereby improving reliability.

In the above excimer lamp,
The arc tube may have a rectangular shape when cut along a plane orthogonal to the tube axis direction.

According to the present invention, an excimer lamp in which damage due to thermal expansion is suppressed and reliability is ensured is realized.

It is a schematic drawing when one embodiment of an excimer lamp is viewed in the X direction. 1B is a cross-sectional view of the excimer lamp of FIG. 1A as viewed in the Y direction; FIG. 1B is an enlarged view of area A1 in FIG. 1A; FIG. 1B is an enlarged cross-sectional view of area A2 of FIG. 1B when the excimer lamp is not thermally expanded; FIG. 1C is an enlarged cross-sectional view of area A2 of FIG. 1B when the excimer lamp is thermally expanding; FIG. FIG. 2 is a cross-sectional view of the excimer lamp of FIG. 1 when viewed in the Z direction; It is drawing when the feeder is seen from the front before mounting|wearing with a splice terminal. It is drawing when the feeder in the state which prepared the splice terminal to mount|wear is seen from the front. It is drawing when the state of FIG. 4B is seen from the side surface side of a feeder line. It is drawing when the feeder in the state which mounted|worn the splice tube is seen from the front. It is drawing which shows the state which prepared the electroconductive sheet member. FIG. 4 is a schematic drawing showing a state in which the conductive sheet member is folded so as to form a folded portion; FIG. It is drawing which shows typically the state which connected the electroconductive sheet member to the feeder line. FIG. 5 is a drawing schematically showing a state in the middle of attaching the base member to the arc tube; FIG. 4 is an enlarged drawing of the periphery of the base member of the embodiment of the excimer lamp. FIG. It is a schematic drawing when one embodiment of the excimer lamp is viewed in the Y direction. It is an enlarged drawing around the base member of another embodiment of the excimer lamp. FIG. 4 is a diagram schematically showing the configuration around a base member of a conventional excimer lamp;

Hereinafter, an excimer lamp of the present invention will be described with reference to the drawings. It should be noted that the following drawings are all schematic illustrations, and the dimensional ratios and numbers in the drawings do not necessarily match the actual dimensional ratios and numbers.

FIG. 1A is a schematic drawing of an embodiment of an excimer lamp 1 as viewed in the X direction, and FIG. 1B is a cross-sectional view of the excimer lamp 1 of FIG. 1A as viewed in the Y direction. 2A is an enlarged view of area A1 in FIG. 1A, FIG. 2B is an enlarged sectional view of area A2 in FIG. 2A when excimer lamp 1 is not thermally expanded, and FIG. 2B is an enlarged cross-sectional view of area A2 of FIG. 2A when is thermally expanding; FIG.

As shown in FIGS. 1A to 2C, the excimer lamp 1 of the present embodiment has an elongate arc tube 10 and a pair of electrodes 11 arranged to face each other across the arc tube 10. It comprises a pair of conductive sheet members 12 connected to electrodes 11 , a pair of feeder lines 13 each connected to a different conductive sheet member 12 , and a base member 14 .

In the following description, the axial direction of the arc tube 10 is defined as the Z direction, the direction in which the electrodes 11 face each other is defined as the X direction, and the direction orthogonal to the X and Z directions is defined as the Y direction. In addition, in this specification, when distinguishing between positive and negative directions when expressing directions, positive and negative signs are added, such as “+Z direction” and “−Z direction”. When the direction is expressed without distinguishing the direction, it is simply described as "Z direction".

As shown in FIG. 1B, the luminous tube 10 is provided with a luminous space 10b in which a luminous gas G1 is enclosed, and the light generated in the luminous space 10b is radiated outward. Also, at both ends of the light emitting tube 10 in the Z direction, a sealing portion 10c is formed which seals the light emitting space 10b by being pressed while being heated after the light emitting gas G1 is enclosed.

FIG. 3 is a cross-sectional view of the excimer lamp 1 of FIG. 1 as viewed in the Z direction. As shown in FIG. 3, the arc tube 10 of this embodiment is formed to have a rectangular cross section when cut along the XY plane. 11 is formed.

The arc tube 10 of the present embodiment has a rectangular cross-sectional shape when cut along the XY plane. For example, it may be circular, elliptical, or other polygonal shape such as hexagonal or octagonal.

As shown in FIGS. 1A and 1B, the electrode 11 is formed on the outer wall surface 10a of the arc tube 10 so as to have a plurality of light extraction portions 11h for extracting light emitted from the emission space 10b of the arc tube 10. It is When a voltage required for light emission is applied to the electrode 11, a discharge is generated in the light emitting space 10b, and the ultraviolet light L1 is emitted from the light extraction portion 11h.

Although the electrodes 11 are schematically shown in the respective drawings as plate-like members having a thickness, they are specifically metal plates, lead wires, metal films by screen printing, and the like. For the material forming the electrode 11, for example, a material containing gold (Au), silver (Ag), nickel (Ni), copper (Cu), aluminum (Al), or the like can be adopted.

As shown in FIGS. 2A and 2B, the conductive sheet member 12 is a mesh-like member that connects the electrode 11 and the feeder line 13, and is formed at the end of the electrode 11 in the Z direction. It is soldered so as to be in surface contact with the shaped connection region 11a. In addition, the conductive sheet member 12, when viewed from the electrode 11 side to the feeder line 13 side (that is, when viewed from the +Z side to the −Z side), has an electrode gap between the electrode 11 and the feeder line 13. A folded portion 12a folded toward the 11 side (-Z side) is formed. The specific shape and operation of the folded portion 12a will be described later.

The feed line 13 is connected to each different conductive sheet member 12 . 4A to 4D, the power supply line 13 is composed of a plurality of core wires 13a, and the leading end portion connected to the conductive sheet member 12 has a conductive core for binding the plurality of core wires 13a. A splice terminal 13b, which is an elastic binding member, is attached. The conductive sheet member 12 is connected to the splice terminal 13b by resistance welding or soldering, and is connected to the core wire 13a of the power supply line 13 via the splice terminal 13b (see FIGS. 4A to 4D).

The splice terminal 13b attached to the power supply line 13 is a metal component made of, for example, copper (Cu) plated with tin (Sn) or nickel (Ni). , are members used for joints. Although the feeder line 13 is composed of a plurality of core wires 13a, it may be a single wire or rod-shaped feeder line 13, and the splice terminal 13b may not be attached.

The power supply line 13 is passed through the inside of the base member 14 and is adhered with an adhesive or the like. The base member 14 is also fitted to the sealing portion 10c of the arc tube 10 and adhered with an adhesive or the like to fix the arc tube 10 and the power supply line 13 together.

Here, the operation of the excimer lamp 1 of this embodiment when thermal expansion occurs in the arc tube 10 will be described. In the arc tube 10 of the excimer lamp 1 of the present embodiment, when the application of voltage between the electrodes 11 is started and the arc tube 10 is turned on, heat is generated by energization, and the temperature gradually rises.

Thermal expansion occurs throughout the arc tube 10 when the temperature rises. As for the Z (tube axis) direction, it expands in the Z direction, and in the portion shown in FIG. , and the ends connected to the power supply line 13, tension is generated in the -Z direction, respectively.

At this time, when the ends of the conductive sheet member 12 are pulled in opposite directions in the Z direction, the folded portion 12a is expanded from the state shown in FIG. 2B to the state shown in FIG. 2C, thereby relaxing the tension. It transforms like

Next, a procedure for attaching the splice terminal 13b to the feeder line 13 will be described. FIG. 4A is a front view of the feeder line 13 before the splice terminal 13b is attached. As shown in FIG. 4A, the power supply line 13 of this embodiment is configured by bundling a plurality of core wires 13a.

FIG. 4B is a front view of the power supply line 13 in which the splice terminal 13b to be attached is prepared. 4C is a drawing when the state of FIG. 4B is viewed from the side of the feeder line 13. FIG. As shown in FIG. 4B, the splice terminal 13b before being attached to the feeder line 13 is formed by bending a metal plate into a U shape.

As shown in FIGS. 4B and 4C, the splice terminals 13b arranged so as to surround the core wire 13a of the power supply line 13 are pushed inward from both side surfaces using a special installation tool, pliers, or the like. It is bent to bind the core wire 13a.

FIG. 4D is a front view of the feeder 13 with the splice terminal 13b attached. When the splice terminal 13b is bent and attached to the feeder line 13, the core wire 13a is bound to the splice terminal 13b, and a flat surface 13p is formed on a part of the outer circumference of the splice terminal 13b, as shown in FIG. 4D. In this embodiment, the conductive sheet member 12 is connected by resistance welding or soldering so as to be in contact with the flat surface 13p.

When contact is made by soldering, the conductive sheet member 12 is preferably connected to the flat surface 13p from the viewpoint of adhesive strength, but may be connected to a surface other than the flat surface 13p. do not have. For example, the bent end portion of the splice terminal 13b shown in FIG. 4D may be connected to the curved surface on the joint portion 13q side in contact.

By connecting the conductive sheet member 12 and the power supply line 13 on the joint portion 13q side, the solder also flows into the gaps of the joint portion 13q as opposed to the case of connecting to the flat surface 13p. This can also serve as an effect of adhering the joint portion 13q so as not to open. In other words, the splice terminal 13b is less likely to come off from the feeder line 13 due to loosening of the bundle of the splice terminal 13b.

An example in which the conductive sheet member 12 and the splice terminal 13b are connected by soldering has been described above, but both members may be connected by resistance welding such as spot welding.

Further, the process of connecting the conductive sheet member 12 to the feeder line 13 will be described. FIG. 5A is a schematic drawing showing a state in which the conductive sheet member 12 is prepared, and FIG. 5B is a schematic drawing showing a state in which the conductive sheet member 12 is folded so as to form a folded portion 12a. FIG. 5C is a drawing schematically showing a state in which the conductive sheet member 12 is connected to the feeder line 13, and FIG. 5D schematically shows a state in the middle of attaching the base member 14 to the arc tube 10 It is a drawing showing.

In the first step, as shown in FIG. 5A, a conductive sheet member 12 in an unfolded state is prepared.

In the second step, as shown in FIG. 5B, the conductive sheet member 12 prepared in the first step is folded to form folded portions 12a.

In the third step, as shown in FIG. 5C, the conductive sheet member 12 having the folded portion 12a is brought into surface contact with the flat surface 13p of the splice terminal 13b attached to the power supply line 13, resistance welding, or , connect by soldering.

In the fourth step, as shown in FIG. 5D, the base member 14 is fitted with the sealing portion 10c of the arc tube 10 with the pair of power supply lines 13 mounted thereon. After that, the power supply line 13, the base member 14, and the arc tube 10 are fixed with an adhesive. Then, the ends of the pair of conductive sheet members 12 opposite to the ends connected to the feeder lines 13 are connected to the respective electrodes 11 by soldering so as to be in surface contact with each other.

In the excimer lamp 1 of the present embodiment configured as described above, even if tension occurs due to thermal expansion so that the electrode 11 and the feeder line 13 are separated from each other in the Z direction, the conductive sheet member 12 is formed. The force is relieved by unfolding the folded portion 12a.

Therefore, the load due to the tension in the Z direction is greatly reduced at the connecting portions between the electrode 11 and the conductive sheet member 12, and between the conductive sheet member 12 and the power supply line 13, so that damage such as disconnection or peeling of the electrode 11 is prevented. occurrence is suppressed. In other words, an excimer lamp 1 with ensured reliability is configured.

Further, since the conductive sheet member 12 is mesh-like, when the solid connection region 11a formed on the electrode 11 and the conductive sheet member 12 are soldered, the connection region 11a and the conductive sheet member 12 are electrically conductive from between the meshes. It is possible to make the connection with the sheet member 12 while visually confirming whether the solder is sufficiently poured.

Furthermore, the solder flows into the meshes of the conductive sheet member 12 and is connected to the electrode 11 by being entangled with the conductive sheet member 12, so that the electrode 11 and the conductive sheet member 12 are connected with high strength. be.

Furthermore, as shown in FIG. 4D , a flat surface 13p with little bending is formed by attaching a splice terminal 13b to the feeder line 13 . Therefore, the conductive sheet member 12 and the power supply line 13 are connected by surface contact, and the conductive sheet member 12 and the power supply line 13 are connected with high strength.

As shown in FIG. 1, the electrode 11 of the present embodiment is formed with a solid connection region 11a and is connected to the conductive sheet member 12 by soldering so as to be in surface contact. , the conductive sheet member 12 is partially soldered and connected to a mesh region narrower than the conductive sheet member 12 without forming a solid connection region 11a. I don't mind.

In order to prevent the conductive sheet member 12 from peeling off from the electrode 11, it is preferable that the conductive sheet member 12 and the electrode 11 have a configuration in which it is difficult for a force to be applied in the direction of separation in the X direction. They are as follows.

For example, the electrode 11, the conductive sheet member 12, and the feeder line 13 arranged on the +X side of the configuration shown in FIG. side and on the -X side of the end portion 12p, it is preferable that the arc tube 10 is folded back toward the opposite side. In addition, when the end portion 12q of the conductive sheet member 12 is arranged further on the +X side than the end portion 12p, a configuration in which the arc tube 10 and the conductive sheet member 12 are folded back toward each other is adopted. preferable.

In order to obtain the above effect, the conductive sheet member 12 of the present embodiment has a mesh shape, but as long as the folded portion 12a is formed, it may be a metal foil or the like that does not have a mesh structure. , only the portion to be connected to the electrode 11 and the power supply line 13 may be mesh-like. Further, as a material for forming the conductive sheet member 12, stainless steel (SUS), molybdenum (Mo), titanium (Ti), aluminum (Al), or the like can be used.

FIG. 6 is an enlarged drawing around the base member 14 of one embodiment of the excimer lamp 1 . As shown in FIG. 6, the folded portion 12a formed on the conductive sheet member 12 may be folded toward the side opposite to the arc tube 10 when folded in the -Z direction. The flat surface 13p of the splice terminal 13b connecting the electric wire 13 and the conductive sheet member 12 may be arranged so as to face the arc tube 10 side in the X direction.

[Another embodiment]
Another embodiment will be described below.

<1> FIG. 7 is a schematic drawing when another embodiment of the excimer lamp 1 is viewed in the Y direction. As shown in FIG. 7, the base members 14 are provided on both sides of the ends of the arc tube 10 in the Z direction. , may be connected via the conductive sheet member 12 .

By adopting the above-described configuration, the excimer lamp 1 is configured such that if any one of the paired paths of the electrode 11, the conductive sheet member 12, and the feeder line 13 has a problem, only one of the paths is switched. It is possible to change or re-solder only the member on the route side that is to be detached and repaired, thus facilitating repair and maintenance.

<2> FIG. 8 is an enlarged view of the periphery of the base member of another embodiment of the excimer lamp 1. FIG. As shown in FIG. 8, the end portion of the arc tube 10 in the Z direction may not be provided with the sealing portion 10c formed by pressing in the X direction as shown in FIG. 3A. Further, as shown in FIG. 8, the base member 14 may be configured to cover the end of the arc tube 10 in the Z direction.

<3> As for the pair of electrodes 11, either one of the electrodes 11 or only one of the electrodes 11 may have the light extraction portion 11h. For example, in the excimer lamp 1 configured to irradiate light in a direction different from the direction in which the pair of electrodes 11 face each other, none of the electrodes 11 may have the light extraction portion 11h. Further, the excimer lamp 1 configured to irradiate light only in the direction in which the object to be irradiated with the ultraviolet light L1 is arranged emits light only to the electrode 11 arranged on the side where the object to be irradiated is arranged. It suffices if the take-out portion 11h is formed.

<4> The configuration of the excimer lamp 1 described above is merely an example, and the present invention is not limited to the illustrated configurations.

Reference Signs List 1: excimer lamp 10: arc tube 10a: outer wall surface 10b: light emitting space 10c: sealing portion 11: electrode 11a: connection region 11h: light extraction portion 12: conductive sheet member 12a: folded portions 12p, 12q: end portion 13 : Power supply line 13a : Core wire 13b : Splice terminal 13p : Flat surface 13q : Joint 14 : Base member 100 : Excimer lamp 101a : Light emission space 101x : Tube axis 101 : Arc tube 102 : Electrode 103 : Power supply line 104 : Base Member G1: luminous gas L1: ultraviolet light

Claims (5)

a long luminous tube in which a luminous gas is enclosed;
a pair of electrodes provided so as to face the outer wall surface of the arc tube through the arc tube;
a pair of conductive sheet members each connected to a different electrode;
a pair of feeder lines spaced apart from the electrode in the tube axis direction and connected to different conductive sheet members;
a base member for fixing the arc tube and the power supply line at an end portion of the arc tube in the tube axial direction,
The excimer lamp, wherein the conductive sheet member has a folded portion folded back toward the electrode between the electrode and the feeder line in the axial direction of the arc tube . 2. An excimer lamp according to claim 1, wherein said conductive sheet member has a mesh shape. The electrode is formed with a plurality of light extraction portions for extracting light emitted from the arc tube. 3. An excimer lamp according to claim 1 or 2, characterized in that it has a solid connection area extending toward the edge. The power supply line includes a plurality of core wires and a conductive binding member that binds the plurality of core wires,
4. The excimer lamp according to claim 1, wherein said conductive sheet member is connected to said binding member. The excimer lamp according to any one of claims 1 to 4, wherein the arc tube has a rectangular shape when cut along a plane orthogonal to the tube axis direction.

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