201034764 六、發明說明： 【發明所屬之技術領域】 本發明’是有關於將被安裝在工作機械的主軸的工具 及工具支架洗淨的工具洗淨裝置。工具洗淨裝置，是將工 具及工具支架表面的附著物（切粉等）沖洗。 【先前技術】 工作機械’是將銑·削加工、開孔加工、開螺孔加工等 ^ 的多種類的加工’藉由將工具自動交換而實行。工作機械 ，是具備工具收納部及工具交換裝置。工具收納部，是在 被保持於工具支架的狀態下收納複數種類的工具。工具收 納部’是將需要的工具朝交換位置送出。工具交換裝置， 是在交換位置收取工具。工具交換裝置，是將收取到的工 具搬運並安裝於工作機械的主軸。同時工具交換裝置，是 將結束使用的工具從主軸取下。工具交換裝置，是將取下 的工具朝交換位置搬運並返回至工具收納部》 〇 工具支架，是具備主軸裝設部及工具保持部。主軸裝 設部，是具有略圓錐形狀。工具保持部是將鑽頭、螺絲攻 等的工具保持。主軸’是具備工具安裝孔。工具安裝孔， 是對應主軸裝設部的圓錐形的孔。主軸，是在工具安裝孔 的底部具備拉引棒（Draw-bar)。 工具交換裝置，是將工具支架的主軸裝設部嵌入工具 安裝孔。拉引棒，是將主軸裝設部的端部挾住拉起，將工 具支架固定在主軸。主軸裝設部的外周面，是藉由密合在 -5 - 201034764 工具安裝孔而將主軸及工具定位在同心上。 主軸，是位於加工室的內部。在加工室的內部，存在 由加工所產生的切粉。切粉會附著在安裝於主軸前的工具 支架。一部分的切粉，會進入主軸裝設部的外周面及工具 安裝孔之間。 工具，是由附著在主軸裝設部的切粉的影響而無法對 於主軸正確定位。因此，工具，是在偏心的狀態下旋轉的 話，會有加工精度下降的問題。附著的切粉量很多的情況 時，工具無法安裝在主軸。作業者就有需要停止加工，將 附著在工具支架及主軸的切粉去除。 日本公開專利公報2002-273 640號所揭示的工作機械 ，是具備工具洗淨裝置。工具洗淨裝置，是洗淨安裝在主 軸之前的工具。工具洗淨裝置，是具備朝主軸的先端部噴 出洗淨液的洗淨液噴嘴。洗淨液噴嘴，是與洗淨液供給源 及空氣源（Compressor)連接。 洗淨液，是兼用在加工中將工具及加工物冷卻的冷卻 液（Coolant)。洗淨液供給源，是具備：將洗淨液（冷卻 液）收納的槽筒、及將洗淨液（冷卻液）送出泵。泵，是 將槽筒內的洗淨液送出直到洗淨液噴嘴的噴出口爲止。泵 的主目的是作爲冷卻液的供給。泵的吐出壓，是0.0 3 MPa 程度。泵的吐出壓若作爲從洗淨液噴嘴將冷卻液噴出的壓 力並不充分。 空氣源，是將補助洗淨液的噴出的空氣供給至洗淨液 噴嘴。洗淨液，是由該空氣的作用從洗淨液噴嘴由高速度 -6- 201034764 噴出。洗淨液，是與工具及工具支架接觸，將 具及工具支架的切粉沖洗。 在習知的工具洗淨裝置中，洗淨液噴嘴， 及空氣的混合物噴出。該洗淨液及空氣的混合 淨液噴嘴勢力佳地噴出，但是洗淨液會因爲空 因此，習知的工具洗淨裝置，爲了將切粉良好 的；需要較長的洗淨時間。具備習知的工具洗 作機械，是包含工具洗淨的工具交換的所需時 Ο ^ 具有加工時間長的問題。 在習知的工具洗淨裝置中，洗淨液供給部 )，是配置於遠離洗淨液噴嘴的位置。洗淨液 的洗淨液通路到達洗淨液噴嘴。洗淨液噴嘴所 ，是因通路阻力、泵的脈動等的影響所變動而 。習知的工具洗淨裝置，是會有無法獲得所期 的情況。 ❹ 【發明內容】 本發明的目的是提供一種工具洗淨裝置， 的洗淨液穩定地噴出，可以在短時間將工具良彳 申請專利範圍第1項的工具洗淨裝置，具 液貯留的槽筒、及可將洗淨液噴出的洗淨液噴 洗淨液噴嘴及前述槽筒連接並將前述槽筒內的 至前述洗淨液噴嘴的洗淨液通路，且將裝設到 主軸之前的工具，由經過前述洗淨液通路從前 附著在該工 是將洗淨液 物，是從洗 氣而分散。 地除去的目 淨裝置的工 間較長，而 (槽筒及泵 ，是經過長 噴出的液量 成爲不穩定 的洗淨效果 可以將大多 子洗淨。 備：將洗淨 嘴、及將該 洗淨液供給 工作機械的 述洗淨液噴 -7 - 201034764 嘴噴出的洗淨液進行洗淨’其特徵爲：在前述洗淨液通路 上具備貯留部’可將流動於該洗淨液通路內的目lj述洗淨液 暫時貯留。 洗淨液噴嘴，是朝貯留部內將貯留的洗淨液噴出。貯 留部，是位於洗淨液噴嘴的附近。貯留部內的洗淨液’是 經過短的通路到達洗淨液噴嘴。洗淨液噴嘴’是不受通路 阻力、泵的脈動等的影響可將洗淨液穩定噴出° 申請專利範圍第2項的工具洗淨裝置’是在前述貯留 部及前述洗淨液噴嘴之間的前述洗淨液通路上’具備將該 洗淨液通路開閉的給液閥。 洗淨液噴嘴’是藉由將給液閥成爲開的方式將洗淨液 噴出。貯留部，是在將給液閥成爲閉的期間將洗淨液貯留 。工具洗淨裝置，只要將給液閥開閉就可以實施洗淨動作 〇 申請專利範圍第3項的工具洗淨裝置’具備：與前述 貯留部連接的加壓通路及排壓通路、及將前述加壓通路開 閉的加壓閥、及將前述排壓通路開閉的排壓閥。 加壓通路，是藉由將加壓閥成爲開的方式將貯留部內 加壓。貯留部內的洗淨液，是在加壓狀態下從洗淨液噴嘴 噴出。洗淨液，是勢力佳地噴出，將工具及工具支架確實 地洗淨。排壓通路，是藉由將排壓閥成爲開的方式將貯留 部內排壓。貯留部，可以無阻力地將洗淨液貯留。 申請專利範圍第4項的工具洗淨裝置，具備將前述給 液閥、加壓閥及排壓閥開閉控制的控制裝置，該控制裝置 -8- 201034764 ，是實行：將前述給液閥及加壓閥成爲開，且將前述 閥成爲閉的方式朝前述洗淨液噴嘴供給洗淨液的洗淨 :及將前述給液閥及加壓閥成爲閉，且將前述排壓閥 開的方式在前述貯留部將洗淨液貯留的貯留動作；及 述給液閥、加壓閥及排壓閥成爲閉的方式待機的待機 0 控制裝置，當洗淨時，是將給液閥及加壓閥成爲 且將排壓閥成爲閉。貯留部內的洗淨液，是在加壓狀 ® 從洗淨液噴嘴勢力佳地噴出。控制裝置，是在洗淨終 ，將給液閥及加壓閥成爲閉，且將排壓閥成爲開。貯 ，是無阻力地將洗淨液貯留。控制裝置，是在貯留完 ，將給液閥、加壓閥及排壓閥成爲閉。貯留部，是維 洗淨液貯留的狀態。洗淨液噴嘴，是直到下次的噴出 待機。控制裝置，可以藉由控制給液閥、加壓閥及排 的開閉，實行洗淨液的噴出及貯留。 申請專利範圍第5項的工具洗淨裝置，具備將前 〇 w 液閥、加壓閥及排壓閥開閉控制的控制裝置，該控制 ，是實行：將前述給液閥及加壓閥成爲開，且將前述 閥成爲閉的方式朝前述洗淨液噴嘴供給洗淨液的洗淨 :及將前述給液閥及加壓閥成爲閉，且將前述排壓閥 開的方式在前述貯留部將洗淨液貯留的貯留動作；及 述給液閥及排壓閥成爲閉，且將前述加壓閥成爲開的 待機的待機動作。 控制裝置，當洗淨時，是將給液閥及加壓閥成爲 排壓 動作 成爲 將前 動作 開， 態下 了後 留部 成後 持將 爲止 壓閥 述給 裝置 排壓 動作 成爲 將前 方式 開， -9- 201034764 且將排壓閥成爲閉。貯留部內的洗淨液，是在加壓狀態下 從洗淨液噴嘴勢力佳地噴出。控制裝置，是在洗淨終了後 ，將給液閥及加壓閥成爲閉，且將排壓閥成爲開。貯留部 ’是無阻力地將洗淨液貯留。控制裝置，是在貯留完成後 ’將給液閥及排壓閥成爲閉，且將加壓閥成爲開的方式待 機。貯留部，是在將貯留的洗淨液加壓的狀態下待機。洗 淨液噴嘴，是在下次的噴出時將加壓狀態中的洗淨液噴出 。洗淨液，是從噴出開始隨後勢力佳地噴出，將工具及工 具支架確實地洗淨。 申請專利範圍第6項的工具洗淨裝置，是進一步具備 供檢出前述貯留部內的液量用的液量感測器，前述控制裝 置，直到前述液量感測器的檢出液量到達預定量爲止實行 前述貯留動作。 貯留部，是可以將預定量的洗淨液貯留。洗淨液噴嘴 ，是將貯留部的貯留液噴出。洗淨液噴嘴’是將預定量的 洗淨液無不足地噴出，可以工具及工具支架確實地洗淨。 申請專利範圍第7項的工具洗淨裝置，是進一步具備 止回閥，被配置於前述槽筒及前述貯留部之間的前述洗'淨 液通路上，停止從前述貯留部朝向前述槽筒的洗淨液的流 動。 止回閥，是防止貯留在貯留部內的洗淨液逆流。洗淨 液噴嘴，是可以貯留部內的洗淨液的全量噴出。 申請專利範圍第8項的工具洗淨裝置，是進一步具備 開閉閥，被配置於前述槽筒及前述貯留部之間的前述洗淨 -10- 201034764 液通路上，將該洗淨液通路開閉。 開閉閥，是在洗淨中藉由成爲閉，防止貯留在貯留部 內的洗淨液逆流。洗淨液噴嘴’是可以貯留部內的洗淨液 的全量噴出。 申請專利範圍第9項的工具洗淨裝置’是前述開閉閥 ，具有將洗淨液排出的切換位置，具備配置於該開閉閥及 前述貯留部之間的前述洗淨液通路上的過濾器’在前述待 機動作中前述控制裝置’是實行過濾器洗淨動作’其是將 〇 前述開閉閥位於前述切換位置，將前述貯留部內的洗淨液 反向流動至前述過濾器，將該過濾器洗淨。 控制裝置，是可將洗淨動作後的開閉閥切換至排出的 切換位置。使貯留部內的洗淨液在過濾器內反向流動，將 該過濾器所去除的異物沖洗。洗淨後的過濾器，是可以保 持清淨的狀態。申請專利範圍第9項的工具洗淨裝置，是 可以防止過濾器的堵塞，橫跨長期實行良好的洗淨動作。 申請專利範圍第1 0項的工具洗淨裝置，前述貯留部 Ο ，具備並列配置的第1貯留部及第2貯留部，在朝前述洗 淨液噴嘴供給洗淨液中，在前述第1貯留部或是第2貯留 部內的洗淨液量爲預定量以下時，可將朝前述洗淨液噴嘴 的流路朝洗淨液供給待機中的前述第2貯留部或是第丨貯 留部切換。 洗淨液噴嘴’是將第1貯留部及第2貯留部的任一將 貯留的洗淨液噴出。果1貯留部，是在通常時使用。第2 貯留部，是在第1貯留部內的洗淨液量不足的情況時切換 -11 - 201034764 使用。洗淨液噴嘴，是將第2貯留部的貯留液噴出。第1 貯留部，是在第2貯留部的使用中將洗淨液貯留。第2貯 留部，是在第1貯留部的使用中將洗淨液貯留。第1貯留 部及第2貯留部，因爲任一方的貯留部是貯留狀態中所以 洗淨液噴嘴，是隨時可以噴出充分的量的洗淨液。申請專 利範圍第1 0項的工具洗淨裝置，是可以對應在短時間反 覆洗淨的用途。 申請專利範圍第11項的工具洗淨裝置，前述洗淨液 噴嘴，配置於將前述主軸支撐的主軸頭的先端部。 洗淨液噴嘴是由主軸頭的先端部將洗淨液噴出。洗淨 液是與安裝主軸之前的工具及工具支架接觸。工具及工具 支架可確實地洗淨。工具及工具支架的安裝不良，可良好 地防止。 【實施方式】 以下，參照較佳實施例所示的圖面詳細說明本發明。 y 〔實施例1〕 如第1、2圖所示，工作機械1，是由鑄鐵製的基台2 支撐在地面上。工作機械1，是具備控制箱3及機身4。 機身4’是與基台2中央部垂直地立起的支柱。工作機械 1 ’是在被設在機身4的前側（第1、2圖的左側）的加工 室的內部實施加工。 控制箱3 ’是安裝於機身4的後側（第1、2圖的右側 -12- 201034764 )。控制箱3，是在其內部將控制部9 (第8圖參照）收 容。機身4，是在其前部將主軸頭5(第3圖參照）支撐 。主軸頭5’是可以沿著機身4在加工室的內部上昇及下 降。 如第3圖所示’主軸頭5，是在其下部具備主軸6。 主軸頭5,是在其上部具備驅動機構7。主軸頭5,是由驅 動機構7的驅動上昇及下降。主軸6，是以上下方向的軸 爲中心旋轉。 工作機械1’是進一步，具備ATC (自動工具交換裝 置）8'及工具洗淨裝置。如第3、4圖所示，AT C8，是 具備工具收納部1 7及工具交換機構1 8。工具收納部1 7， 是配置於主軸頭5的右側。工具交換機構1 8，是配置在主 軸頭5及工具收納部17之間。 如第4圖所示’工具收納部17，是具備安裝於鏈條 16的複數工具容器丨5。工具容器15,是保持將工具2〇安 裝的工具支架21 (第6圖參照）。工具容器15,是藉由 鏈條16的循環而移動，將工具2〇及工具支架21朝交換 位置（第4圖的下位置）搬運。工具容器ι5是在交換位 置，將工具20及工具支架朝工具收納部I?外送出。 如第5圖所示，工具交換機構18,是具備交換臂18a 。父換臂18a，是以與主軸6平行的軸爲中心繞轉，且上 昇及下降。交換臂18a，是在其兩端部具有挾持部i8b。 挾持部1 8b，是藉由交換臂i 8 a繞轉，朝工具收納部1 7的 父換位置及主軸6的下位置移動。一方的挾持部18b，是 201034764 在交換位置將工具支架21抓住。另一方的挾持部18b，是 在主軸6的下位置將工具支架2 1抓住。 交換臂18a，是在將工具支架21抓持狀態下進行下降 。工具20及工具支架21，是從工具容器15及主軸6脫落 。交換臂18a，是下降後繞轉180°。工具20及工具支架 21，是從交換位置朝主軸6的下位置，或是從主軸6的下 位置朝交換位置移動。交換臂18a，是在繞轉後上昇，將 工具20及工具支架21朝主軸6或是工具容器15嵌入。 如第6圖所示，工具支架21，是具備主軸裝設部21a 及工具保持部21b。工具保持部21b，是由直徑不同的2 個圓柱部所構成。下方的圓柱部，是將工具20把持。上 方的圓柱部的直徑，是比下方的圓柱部的直徑更大。主軸 裝設部21a，是與圓柱部的上面連續的略圚錐狀部分。 主軸6，是具備在其下面開口的工具安裝孔19。工具 安裝孔1 9，是具有與主軸裝設部2 1 a對應的圓錐形狀。工 具支架21，是藉由將主軸裝設部21a嵌入工具安裝孔19 而安裝在主軸6。工具支架21及工具20，是藉由將主軸 裝設部2 1 a與工具安裝孔1 9密合，且將工具保持部2 1 b 上方的圓柱部上端面21c與主軸6下面密合而定位。 主軸頭5，是將主軸6可旋轉自如地支撐。主軸頭5 ，是在其下端具備環狀的主軸帽22。主軸帽22，是由複 數螺栓23固定在主軸頭5下面。主軸6下面，是從主軸 帽22的中心孔露出。主軸6下面及主軸帽22之間，是由 環狀的端面蓋24塞住。端面蓋24，是固定在主軸6下面 -14- 201034764 ，與主軸帽22的下面抵接。 安裝於主軸6的工具20，是與該主軸6 —起旋轉。工 具20，是藉由主軸頭5上昇及下降而朝上下方向移動。工 具20，是在加工室內將加工物加工。加工物，是與加工室 內的加工載置台一起朝水平方向移動。 工作機械1，是具備工具洗淨裝置。工具洗淨裝置， 是將工具20及工具支架21安裝在主軸6之前進行洗淨。 主軸帽22，是在其下面具有液溝25。液溝25,是設在主 Ο 軸帽22下面的環狀溝。液溝25 ’是形成於比端面蓋24的 外周更外側。液溝25，是由安裝於主軸帽23下面的環狀 的洗淨液噴嘴形成構件26塞住。洗淨液噴嘴形成構件26 ，是具有朝其下面開口的環狀的洗淨液噴嘴孔29。洗淨液 噴嘴形成構件26，是具有與主軸6下端面略相同高度的下 面。洗淨液噴嘴孔2 9 ’是朝向主軸頭5及主軸6的中心傾 斜地形成。 液溝2 5，是與設在主軸帽2 2的液供給孔2 7連結。液 〇 ^ 供給孔2 7，是朝主軸帽2 2外周開口。液供給孔2 7 ’是與 洗淨液管2 8連接。洗淨液管2 8 ’是供給洗淨液。洗淨液 ，是經過液供給孔2 7進入液溝2 5內’從洗淨液噴嘴孔2 9 噴出。如第6圖所示’洗淨液A ’是朝洗淨液噴嘴孔2 9 的方向噴出，將位於主軸6下的工具支架21及工具20洗 淨。洗淨液噴嘴形成構件26及洗淨液噴嘴孔29 ’是構成 洗淨液噴嘴3 0。液溝2 5、液供給孔2 7及洗淨液管2 8 ’是 構成洗淨液供給路的一部分。 -15 - 201034764 如第1圖所示’工作機械1 ’是具備冷卻液組件10 ° 冷卻液組件1 〇 ’是具備貯留槽11、回收槽12、第1栗13 及第2泵1 4。貯留槽1 1 ’是將供給至加工室內的冷卻液 (洗淨液）貯留。如第1圖所示，貯留槽11，是箱形的谷 器。回收槽12、第1泵13及第2泵14 ’是设在盱留槽11 上面。 如第1圖、第2圖所示，冷卻液組件1 〇，是可裝卸地 設在基台2的後側。回收槽1 2，是可與基台2的排出部 2a連接。回收槽12,是在加工室內將集中在排出部。的 使用過的冷卻液（洗淨液）回收。回收槽1 2 ’疋朝貝T留槽 U連續。回收槽12內的冷卻液（洗淨液），是通過過濾 裝置（圖示省略）返回至貯留槽11內。 第1泵13及第2泵14 ’是將貯留槽11內的冷卻液（ 洗淨液）吸起朝加工室 第1泵1 3，是兼用冷卻液 及洗淨液用的泉。如第7圖所示’第1栗13的吐出側， ^ 、宙谤。第 1冷卻液管3 1，是朝加工 是與第1冷卻液管31連揆弟斥创攸巨 室內部延伸。冷卻液，是從5受在帛1冷卻液冑31的先朗 的冷卻液洗淨液噴冑（圖示省略）朝加工室內噴巾冷卻 液，是將加工中的工具及加工物冷卻。 第2泵！4,是冷卻液專用的泵。第2泵14的吐出側 ，是與第2冷卻液管（圖示省略）連接。帛2冷卻液管’ 是朝加工室內部延伸。冷卻液’是從_ 2冷_先 端的冷卻液洗淨液噴嘴（_示省略）朝加工室內噴出。第1 栗的吐出壓力，是〇》〇30〜0.045MPa。帛2栗14的吐 -16- 201034764 送 加 液 動 25 液 12 管 27 其 33 器 洗 流 圖 氣 嘴 出壓力，是比第1泵13的吐出壓力更大。第2栗14所 出的冷卻液，是將加工中的工具及加工物冷卻’且將在 工部所產生的切粉沖洗。 第1冷卻液管31，是在其途中分岐出洗淨液管32 洗淨液管32，是透過洗淨液管28與洗淨液噴嘴30連接 洗淨液，是第1泵13所送出的冷卻液的一部分。洗淨 ，是流動於洗淨液管32及洗淨液管28內。如前述，流 於洗淨液管28的洗淨液，是經過液供給孔27及液溝 Ο 從洗淨液噴嘴孔29噴出。從洗淨液噴嘴30噴出的洗淨 ，是將工具支架21及工具20洗淨。結束洗淨的洗淨液 是如前述，落下至基台2上的排出部2a，經過回收槽 返回至貯留槽1 1內。 工具洗淨裝置的洗淨液供給路，是由：第1冷卻液 3 1的一部分、洗淨液管32及洗淨液管28、及液供給孔 及液溝2 5所構成。如第7圖所示，洗淨液管3 2，是在 途中，具備過濾器33、止回閥34及給液閥35。過濾器 〇 ’是將洗淨液中的異物去除。止回閥34，是配置於過濾 33的下流側。止回閥34，是在洗淨液管32內許可朝向 淨液噴嘴3 0的流通’且禁止朝向第1冷卻液管3 1的逆 〇 給液閥3 5 ’是配置於止回閥3 4的下流側。如第7 所示’給液閥3 5 ’是在通常時位於閉位置。給液閥3 5 是透過空氣路40與氣壓源39連接。給液閥35，是由空 路4〇所供給的空氣壓的作用朝開位置切換。洗淨液噴 -17 . 201034764 3 0，是在給液閥3 5成爲開的期間將洗淨液噴出。 空氣路40，是在其途中具備第1電磁閥43。如第7 圖所示，第1電磁閥43，是在通常時位於閉位置。在空氣 路40內殘留空氣，是由消音部43a消音後放出。第1電 磁閥43，是隨著控制部9 (相當於控制裝置的）所給與的 開指令朝開位置切換。氣壓源39 ’是藉由第1電磁閥43 成爲開，經過空氣路40朝給液閥3 5供給空氣壓。洗淨液 噴嘴30，是藉由將第1電磁閥43成爲開而將洗淨液噴出 。氣壓源39，是可以利用設有工作機械1的工場內的裝備 品。無法確保氣壓源3 9的情況時，給液閥3 5，是可使用 由控制部9的動作指令開閉的電磁閥。 洗淨液管32，是在其途中，進一步具備貯留部50。 貯留部50，是可在其內部貯留預定量洗淨液的容器。貯留 部5 0，是配置在止回閥3 4及給液閥3 5之間。洗淨液管 32內的洗淨液，是在給液閥35成爲閉的期間流入貯留部 50。貯留部50 ’是將從洗淨液管32流入的洗淨液暫時貯 留。如第1、2圖所示貯留部5 0 ’是在機身4的後面’與 控制箱3並列安裝。 如第7圖所示，貯留部5 0的上部，是透過空氣路42 與氣壓源39連接。空氣路42’是在其途中’具備節流閥 48、加壓閥45及止回閥49。加壓閥45，是在通常時位於 閉位置。加壓閥45，是由空氣路46所供給的空氣壓的作 用朝開位置切換。空氣路42內的空氣’是加壓閥45在成 爲開的期間流入貯留部50內。貯留部50內的壓力’是由 -18- 201034764 經過空氣路42流入的空氣壓的作用而上昇。空氣路46， 是在空氣路40的途中分岐。加壓閥45，是與給液閥35同 時朝開位置切換。貯留部50內的空氣壓，是將貯留在該 貯留部50內的洗淨液朝洗淨液管32內推出。洗淨液，是 經過給液閥3 5從洗淨液噴嘴3 0勢力佳地噴出。 節流閥48，是可變節流閥。節流閥48，是選擇從氣 壓源3 9給氣的許可或是給氣的禁止。節流閥48，通常是 選擇給氣的許可。止回閥49，是禁止空氣從貯留部50逆 流。 如第7圖所示，貯留部5 0，是具備與其上部連接的排 壓通路37。排壓通路37，是在其途中具備排壓閥38。排 壓閥38，是在通常時位於開位置。排壓閥38是位於開位 置的情況，排壓通路3 7，是將貯留部5 0內的空氣壓經過 排壓閥3 8朝加工室排出。 排壓閥3 8，是由空氣路4 1所供給的空氣壓的作用朝 閉位置切換。空氣路41，是在其途中具備第2電磁閥44 。第2電磁閥44，是在通常時位於閉位置。第2電磁閥 44，是在空氣路41內將殘留空氣由消音部44a消音後放 出。第2電磁閥44，是隨著控制部9所給與的開指令朝開 位置切換。氣壓源39，是藉由第2電磁閥44成爲開，經 過空氣路41朝排壓閥3 8供給空氣壓。排壓閥3 8，是將排 壓通路3 7關閉將貯留部5 0密閉。貯留部5 0內的空氣壓 ，是藉由使第1、第2電磁閥43、44成爲開（導通（〇N ))而上昇。貯留部50內的空氣壓，是藉由使第1、第2 -19- 201034764 電磁閥43、44成爲閉（斷開（OFF ))而下降。 貯留部5 0，是具備液面感測器3 6。液面感測器3 6 是安裝在從貯留部50的底距離預定的高度位置。液面 測器3 6，是貯留部50內的洗淨液的液面到達液面感測 36的安裝高度時成爲導通（〇N)。液面感測器36的安 位置，是依據在貯留部50內的貯留液量成爲可供1回 洗淨洗淨液噴嘴3 0的噴出的洗淨液的量來決定。洗淨 噴嘴3 0，是1回噴出例如5秒的洗淨液。 如第 8圖所示，控制部 9，是將 CPU9a、ROM9b RAM9c、輸入介面9d及輸出介面9e，由通路9f連接的 腦。控制部9，是利用被容納在R〇M9b的控制程式藉 CPU9a的動作，將工作機械i的加工動作全般控制。控 部9的控制範圍，是包含：工具20的旋轉、上昇及下 控制、加工載置台的移動控制、ATC8的動作控制、工 洗淨裝置的控制。第8圖，是只有顯示關連於工具洗淨 置的控制的部分。 輸入介面9d’是與操作部90、液面感測器36及壓 感測器9 1連接。操作部90，是使用於供作業者輸入加 所需要的資訊的目的。如前述，液面感測器3 6，是檢出 留部50內的貯留液量。壓力感測器91，是檢出空氣路 、41、42內的壓力。輸入介面9d，是將：操作部90的 入資訊 '及液面感測器3 6及壓力感測器9 1的檢出結果 朝C P U 9 a給與。 輸出介面9e，是與第1泵13的驅動電路82、第1 感 器 裝 的 液 電 由 制 降 具 裝 力 工 貯 40 輸 > 電 -20- 201034764 磁閥43的驅動電路83及第2電磁閥44的驅動電路84連 接。CPU9a，是透過輸出介面9e朝驅動電路82給與動作 指令，將第1栗13驅動。CPU9a，是透過輸出介面9e朝 驅動電路83給與開指令，將第1電磁閥43成爲開（導通 (ON) ) 。CPU9a，是透過輸出介面9e朝驅動電路84給 與開指令，將第2電磁閥44成爲開（導通（ON ))。 第1電磁閥43爲導通（ON )的情況時，給液閥3 5， 是藉由來自氣壓源3 9的給氣成爲開。如前述，洗淨液噴 嘴30，是藉由給液閥35成爲開而將洗淨液噴出。 第1電磁閥43爲導通（ON )的情況時，加壓閥45， 是藉由來自氣壓源39的給氣成爲開。第2電磁閥44爲導 通（ON)的情況時，排壓閥38，是藉由來自氣壓源39的 給氣成爲閉。貯留部50內的壓力，是由經過空氣路42流 入的空氣壓的作用而上昇，將貯留部5 0內的貯留液朝洗 淨液管32內推出。洗淨液，是從洗淨液噴嘴3〇高速度地 噴出，將工具20及工具支架21洗淨。 〇 給液閥35及加壓閥45’是藉由第i電磁閥43斷開（ OFF )而成爲閉。排壓閥3 8 ’是藉由第2電磁閥44斷開 (OFF )而成爲開。給液閥3 5，是遮斷朝洗淨液噴嘴3 〇 的洗淨液的送給。貯留部50內的壓力，是藉由加壓解除 及排壓而下降。洗淨液管32內的洗淨液，是流入貯留部 5〇’滯留於該貯留部50內。 控制裝置9的C P U 9 a是由以下的程序（第9圖參照） 實行洗淨動作。CPU9a ’是由預定的周期實行該程序。 201034764 CPU9a，是將各種訊號讀入（S1)。各種訊號’是液面 測器3 6的檢出訊號、壓力感測器91的檢出訊號等 CPU9a，是判別空氣路40、41、42內的空氣壓是否爲正 (S 2 ) 。S 2的判別，是依據壓力感測器9 1的檢出訊號 施。空氣壓是不正常的情況（S2 : N〇 ) ，CPU9a，是將 1電磁閥43及第2電磁閥44斷開（〇FF ) ( S15 ) ’不 行洗淨動作。 空氣壓是正常的情況（S2 : Yes ) ，CPU9a ’是判 第1泵13的驅動狀態（S3 )。第1泵13是在非驅動狀 下的情況（S 3 : N 〇 ) ，C P U 9 a ’是不實行洗淨動作。 第1泵13是在驅動狀態下的情況（S3 : Yes ) CPU9a，是調查液面感測器36的檢出訊號（S4 ) °液 感測器36是斷開（OFF )的情況（S4 : No ) ’ CPU9a ’ 判別貯留部50內的洗淨液量爲不足（S14) ’將第1電 閥43及第2電磁閥44斷開（OFF) (S9) °液面感測 36是導通（ON )的情況（S4 : Yes ) ，CPU9a ’是判別 具交換指令的有無（S 5 )。無工具交換指令的情況（S 5 No ) ，CPU9a，是不實行洗淨動作。CPU9a，是在後述 加工程式處理控制中，隨著加工程式將各機構控制時’ 實行工具交換指令之前將工具交換指令記憶在RAM9c CPU9a，對於是否有工具交換指令是參照RAM9c判別 CPU9a，是將加工程式處理控制由預定的周期實行 CPU9a，是在每1方塊將加工程式的動作方塊解釋、實 感 〇 常 實 第 實 別 態 面 是 磁 器 工 的 在 行 -22- 201034764 CPU9a，當空氣路40、41、42內的空氣壓爲正 S2:Yes)，第1泵31爲驅動狀態（S3:Yes)且， 部50內的貯留液量爲充分的情況時，以具有工具交 令（S5 : Yes)爲條件實行洗淨動作。 CPU9a，是將第1電磁閥43及第2電磁閥44導 ON) ( S6)。給液閥35是成爲開。貯留部50，是由 壓的作用將貯留液推出。洗淨液噴嘴30,是將洗淨液 佳地噴出。 CPU9a，是許可ATC8的動作（S7) 。ATC8，是 CPU9a許可動作，在無圖示的工具交換處理中開始工 換。且，工具交換處理，是容納在ROM 9b的程式。 工具交換的開始的話，CPU9a，是由與前述的分配處 同的分配處理實行工具交換處理。 C P U 9 a，是調查液面感測器3 6的檢出訊號（S 8 液面感測器 36爲斷開（OFF )的情況（S8 : Yes CPU9a，是將第1電磁閥43及第2電磁閥44斷開（ )(S 9 )。洗淨液噴嘴3 0 ’是終了洗淨液的噴出。 液面感測器36是在未斷開（〇FF )的情況（S8 )，CPU9a，是判別工具交換是否完成（S13 )。工 換中的情況（S13: No) ，CPU9a，是反覆S8及S13 別。工具交換是完成的情況（S13 : Yes) ，CPU9a 將第1電磁閥43及第2電磁閥44斷開（OFF )( 〇 工具交換是否完成’是由主軸頭5的Z軸方向的 常（ 貯留 換指 通（ 空氣 勢力 藉由 具交 許可 理不 OFF ：No 具交 的判 ，是 S9 ) 位置 201034764 是否到達工具交換完成位置來判別。主軸頭5的Z軸方向 的位置，是由編碼器（圖示省略）檢出。 洗淨液噴嘴30，是藉由使給液閥35成爲閉而終了洗 淨液的噴出。貯留部50的內壓’是藉由使加壓閥45成爲 閉’且排壓閥38成爲開而下降。流動於洗淨液^ 32內的 洗淨液，是流入貯留部5〇，滯留於該貯留部50內。 洗淨液噴嘴30，是直到貯留部50內的貯留液減少爲 止，或是工具交換終了爲止將洗淨液噴出。貯留部50，是 在其內部將貯留的洗淨液推出。因此，洗淨液噴嘴3〇，可 以勢力佳地將洗淨液噴出，將工具20及工具支架21良好 地洗淨。 貯留部5 0，是位於洗淨液噴嘴3 0的附近。洗淨液’ 是短距離流動後從洗淨液噴嘴30噴出。與貯留部50及洗 淨液噴嘴3 0之間的通路阻力減小。洗淨液可以由較高的 應答性穩定地噴出。 給液閥35、排壓閥38及加壓閥45’是由空氣壓的作 用成爲開。因此，排壓閥38及加壓閥45，與由電力作用 的電磁閥相比較安全。給液閥3 5及加壓閥45 ’是藉由將 第1電磁閥43導通（ON )而成爲同時開。因此’貯留部 5〇內的加壓及洗淨液噴嘴30的噴出是同步’洗淨液噴嘴 3〇可以將洗淨液確實地噴出。 將第1電磁閥43及第2電磁閥44斷開（OFF )之後 ’ CPU9a，是開始內藏正時器T2的計時（S10) 。CPU9a ’是判別內藏正時器T2的計時是否到達預定時間（例如 -24- 201034764 5秒）（S 1 1 )。內藏正時器T2的計時是到達預定時間的 情況（SI 1 : Yes ) ，CPU9a，是將第2電磁閥44導通（ ON )終了洗淨動作。排壓閥3 8，是成爲閉將貯留部50密 閉。洗淨液，是不會流入貯留部5 0。貯留部5 0，是直到 下次的洗淨動作爲止維持洗淨液的貯留狀態。CPU9a，是 依據液面感測器36的檢出結果將第2電磁閥44導通（ ON)也可以。貯留部50可以將預定量的洗淨液確實地貯 留。 C) 〔實施例2〕 參照第10圖、第11圖說明實施例2的工具洗淨裝置 。在實施例2的工具洗淨裝置，貯留部50，是裝設於洗淨 液管3 2途中。洗淨液管3 2，是具備配置於過濾器3 3及貯 留部50之間的開閉閥52。開閉閥52，是在通常時位於閉 位置。閉位置中的開閉閥5 2，是停止在洗淨液管3 2內朝 向第1冷卻液管31的洗淨液的逆流。 ❹ 開閉閥52，是由空氣路4 1所供給的空氣壓的作用朝 開位置切換。成爲開位置的開閉閥52，是容許朝向貯留部 50的洗淨液的流動。空氣路41，是在其途中具備第4電 磁閥57。第4電磁閥57，是在通常時位於閉位置。第4 電磁閥57，是在空氣路41內將殘留空氣由消音部57a消 音後放出。第4電磁閥57，是隨著控制部9所給與的開指 令朝開位置切換。 貯留部50，是具備與上部連接的排壓通路37。排壓 -25- 201034764 通路37，是兼具加壓通路。排壓通路37，是具有其途中 的第3電磁閥55。第3電磁閥55，是在通常時位於排壓 位置。排壓通路3 7，是將貯留部5 0內部的壓力朝加工室 排出。第3電磁閥5 5，是由控制部9所給與的動作指令朝 加壓位置切換。排壓通路37，是成爲透過空氣路42與氣 壓源3 9連結的加壓通路。從氣壓源3 9供給的空氣，是將 貯留部5 0內加壓。 貯留部5 0，是具備浮標式液面感測器5 3及壓力開關 54。浮標式液面感測器53，是具有感測器本體及2個 接近開關（第1接近開關53b及第2接近開關53c)。感 測器本體53a，是隨著貯留部50內的液面的上昇及下降朝 上下方向移動。接近開關53b、53c ’是當感測器本體53a 接近時成爲導通（ON)。接近開關53b、53c’是在上下 方向遠離地配置。控制部9，是藉由接近開關53b導通（ ON )而認識貯留部5 0內的液面位於高位置中。控制部9 ，是藉由接近開關5 3 c導通（ON )認識貯留部5 〇內的液 面位於低位置。 壓力開關54，是當貯留部50內的壓力爲預定壓以上 時將導通（〇 N )訊號朝控制部9輸出。控制部9 ’是藉由 壓力開關54導通（ON )而認識貯留部5 0內是位於加壓 狀態中。 實施例2的工具洗淨裝置，是由以下的程序（第11 圖參照）實行工具20及工具支架21的洗淨。第11圖的 S21〜S23，是與實施例1的S1〜S3相同。空氣壓是不正 -26- 201034764 常的情況（S22: No) ’ CPU9a’是將第1電磁閥43'第 3電磁閥55及第4電磁閥57斷開（OFF ) ( S37 ) ’不實 行洗淨動作。 空氣壓是正常的情況（S22 : Yes ) ，CPU9a，是判別 第1泵13的驅動狀態（S 2 3 )。第1泵13是在非驅動狀 態下的情況（S 2 3 : N 〇 ) ’ C P U 9 a ’是不實行洗淨動作° 第1泵13是在驅動狀態下的情況（S23 : Yes)， CPU9a，是判別工具交換指令的有無（S24 ) °無工具交 換指令的情況（S24: No) ，CPU9a’是不實行洗淨動作 。有工具交換指令的情況（S24 : Yes ) ’ CPU9a ’是將第 1電磁閥43及第3電磁閥55導通（ON) ’許可工具交換 動作（S25)。第3電磁閥55，是成爲加壓位置’將貯留 部50內加壓。給液閥35’是成爲同時開。貯留部5〇內的 貯留液，是經過給液閥3 5從洗淨液噴嘴3 〇噴出。 貯留部50內的加壓’是將該貯留部50內的貯留液推 出。洗淨液，是從洗淨液噴嘴30勢力佳地噴出。洗淨液 噴嘴30，是直到貯留部50內的貯留液減少爲止，或是工 具交換完成爲止將洗淨液噴出。工具20及工具支架21 ’ 是可以由從洗淨液噴嘴30勢力佳地噴出的充分的量的洗 淨液良好地洗淨。 CPU9a ,是判別壓力開關54的導通（ON )、斷開（ OFF) (S26)。壓力開關54是導通（ON)的情況（S26 :Yes) ’ CPU9a，是判別第2接近開關53c的導通（ON )、斷開（OFF) (S27)。第2接近開關53c是斷開（ 201034764 OFF)的情況（S27: No) ，CPU9a，是判別工具交換是否 完成（S31 )。工具交換中的情況（S31 : No ) ，CPU9a ’ 是將處理朝S 2 6移行。 第2接近開關53c成爲導通（ON)的情況（S27: Yes)，或是工具交換完成的情況（S31:Yes) ’CPU9a ，是將第1電磁閥43及第3電磁閥55斷開（OFF)且’ 將第4電磁閥57導通（ON ) ( S28 )。給液閥35 ’是成 爲閉。洗淨液噴嘴30，是停止洗淨液的噴出。工具20及 工具支架21的洗淨，是以貯留部50內的貯留液量不足’ 或是工具交換完成爲條件終了。第3電磁閥55’是成爲排 壓位置，且開閉閥52，是成爲開。貯留部50 ’是將洗淨 液管32內的洗淨液貯留。使貯留部50內的貯留液的液面 上昇。 CPU9a，是判別第1接近開關53b的導通（ON )、斷 開（OFF) (S29) °CPU9a，是將：第1電磁閥43及第3 電磁閥55的斷開（OFF)、及第4電磁閥57的導通（ON )，直到第1接近開關成爲導通（ON) ( S29 : Yes)爲 止繼續。貯留部50，是直到該貯留部50內的液面成爲高 位置爲止將洗淨液貯留。貯留部50內的液面是成爲高位 置的情況，CPU9a，是將第3電磁閥55導通（0N) ’且 將第4電磁閥57斷開（0FF) (S30)。第3電磁閥55, 是成爲加壓位置。給液閥35及開閉閥52’是成爲閉。空 氣路42內的空氣，是經過第3電磁閥55進入貯留部50 內，將該貯留部5 0內的貯留液加壓。 -28- 201034764 CPU9a，是直到下次的洗淨動作時J 的貯留液在加壓的狀態下待機。在S25 是位於加壓狀態中。洗淨液噴嘴30，是 地將洗淨液噴出。工具2〇及工具支架 應答性確實地洗淨。 壓力開關54是斷開（OFF )的情 CPU9a，是將第1電磁閥43及第4電Ϊ )(S32)，不實行洗淨動作。CPU9a ^ 移行。第3電磁閥55，是繼續加壓位機 壓。貯留部5 0的內壓到達預定壓的情 S27將處理移行。 〔實施例3〕 參照第1 2圖〜第1 4圖說明實施例 。如第12圖所示實施例3的工具洗淨; 貯留部（第1貯留部50a及第2貯留部 〇 32，是分岐成2個分岐管（第1分岐管 32b)。第1貯留部50a’是與第1分岐 貯留部5 0b，是與第2分岐管3 2b連接。201034764 VI. Description of the Invention: [Technical Field] The present invention relates to a tool cleaning device for cleaning a tool and a tool holder to be mounted on a spindle of a machine tool. The tool cleaning device flushes the attachments (cut powder, etc.) on the surface of the tool and tool holder. [Prior Art] The working machine 'is a variety of types of machining, such as milling, cutting, hole drilling, and screw hole machining,' is performed by automatically exchanging tools. The working machine is provided with a tool storage unit and a tool exchange device. The tool storage unit accommodates a plurality of types of tools while being held by the tool holder. The tool receiving section 'delivers the required tools to the exchange location. The tool exchange device is a collection tool at the exchange location. The tool changer is a spindle that transports and collects the collected tool to the work machine. At the same time, the tool exchange device removes the tool that is used from the spindle. The tool exchange device transports the removed tool to the exchange position and returns to the tool storage unit 〇 tool holder, and includes a spindle mounting portion and a tool holding portion. The spindle mounting portion has a slightly conical shape. The tool holding portion holds a tool such as a drill bit or a screw tap. The spindle ' has a tool mounting hole. The tool mounting hole is a conical hole corresponding to the spindle mounting portion. The spindle has a draw-bar at the bottom of the tool mounting hole. The tool exchange device inserts the spindle mounting portion of the tool holder into the tool mounting hole. Pulling the rod is to pull up the end of the spindle mounting portion and fix the tool bracket to the spindle. The outer peripheral surface of the spindle mounting portion is positioned concentrically by the close-fitting of the -5 - 201034764 tool mounting hole. The main shaft is located inside the processing chamber. Inside the processing chamber, there is a cut powder produced by the processing. The cut powder adheres to the tool holder that is mounted on the front of the spindle. A part of the cut powder enters between the outer peripheral surface of the spindle mounting portion and the tool mounting hole. The tool is not properly positioned for the spindle due to the influence of the cutting powder attached to the spindle mounting portion. Therefore, if the tool is rotated in an eccentric state, there is a problem that the machining accuracy is lowered. When the amount of cut powder is large, the tool cannot be mounted on the spindle. The operator needs to stop the machining and remove the cutting powder attached to the tool holder and the spindle. The working machine disclosed in Japanese Laid-Open Patent Publication No. 2002-273 640 is provided with a tool washing device. The tool cleaning device is a tool that is cleaned before the main shaft. The tool cleaning device is a cleaning liquid nozzle that discharges the cleaning liquid toward the tip end portion of the main shaft. The cleaning liquid nozzle is connected to the cleaning liquid supply source and the air source (Compressor). The cleaning solution is a coolant that cools the tool and the workpiece during processing. The cleaning liquid supply source includes a tank that stores the washing liquid (cooling liquid) and a washing liquid (cooling liquid) that is sent out of the pump. In the pump, the cleaning liquid in the tank is sent out until the discharge port of the washing liquid nozzle. The main purpose of the pump is as a supply of coolant. The pump discharge pressure is 0. 0 3 MPa degree. The pressure at which the pump is discharged is not sufficient as the pressure for ejecting the coolant from the nozzle of the cleaning liquid. The air source supplies the air blown from the auxiliary cleaning liquid to the washing liquid nozzle. The cleaning liquid is ejected from the washing liquid nozzle by the high speed -6- 201034764 by the action of the air. The cleaning solution is in contact with the tool and the tool holder to rinse the cutting powder of the tool holder and the tool holder. In a conventional tool cleaning device, a mixture of a cleaning liquid nozzle and air is ejected. The mixture of the cleaning liquid and the air is sprayed with good momentum, but the cleaning liquid is empty. Therefore, the conventional tool cleaning device is good for cutting the powder; it requires a long washing time. A well-known tool washing machine is required for tool exchange including tool cleaning Ο ^ It has a problem of long processing time. In the conventional tool cleaning device, the cleaning liquid supply unit is disposed at a position away from the cleaning liquid nozzle. The cleaning solution passage of the cleaning liquid reaches the cleaning liquid nozzle. The nozzle of the cleaning liquid is changed by the influence of the passage resistance and the pulsation of the pump. The conventional tool cleaning device may not be able to obtain the desired condition. ❹ [Explanation] An object of the present invention is to provide a tool cleaning device in which a cleaning liquid is stably ejected, and a tool cleaning device capable of applying the patent range No. 1 in a short time can be used. a cylinder and a cleaning liquid spray nozzle capable of discharging the cleaning liquid and the tank are connected, and the cleaning liquid passage to the cleaning liquid nozzle in the tank is installed before the spindle is installed The tool is attached to the work by the aforementioned cleaning liquid passage, and the washing liquid is dispersed from the scrubbing. The work space of the net-cleaning device is long, and (the tank and the pump are washed out by the long-discharged liquid amount, and most of the washing can be washed. The washing liquid is supplied to the working machine, and the washing liquid is sprayed -7 - 201034764. The washing liquid sprayed from the mouth is washed. The feature is that a storage portion is provided in the washing liquid passage to flow in the washing liquid passage. The cleaning liquid is temporarily stored in the cleaning liquid nozzle. The cleaning liquid is discharged into the storage portion. The storage portion is located in the vicinity of the cleaning liquid nozzle. The cleaning liquid in the storage portion is short. The passage reaches the washing liquid nozzle. The cleaning liquid nozzle is capable of stably ejecting the washing liquid without being affected by the passage resistance, the pulsation of the pump, etc. The tool cleaning device of the second application of the patent scope is in the aforementioned storage portion. And a liquid supply valve that opens and closes the cleaning liquid passage in the cleaning liquid passage between the cleaning liquid nozzles. The cleaning liquid nozzle ejects the cleaning liquid by opening the liquid supply valve The storage department is in the process of supplying the liquid supply valve The cleaning solution is stored during the closing period. The tool cleaning device can perform the cleaning operation by opening and closing the liquid supply valve. The tool cleaning device of claim 3 includes: a pressurized passage connected to the storage portion And a pressure discharge passage, a pressure valve that opens and closes the pressure passage, and a pressure relief valve that opens and closes the pressure discharge passage. The pressure passage is configured to pressurize the storage portion by opening the pressure valve. The cleaning liquid in the storage portion is ejected from the cleaning liquid nozzle under pressure. The cleaning liquid is ejected with great force, and the tool and the tool holder are reliably washed. The pressure discharge passage is to be discharged. The valve is opened to discharge the inside of the storage portion. The storage portion can store the cleaning liquid without any resistance. The tool cleaning device of the fourth application of the patent scope includes the liquid supply valve, the pressure valve, and the pressure relief valve. The control device for opening and closing control, the control device -8-201034764, is a method of cleaning the supply of the cleaning liquid to the cleaning liquid nozzle by opening the liquid supply valve and the pressure valve and closing the valve : and will give the aforementioned The valve and the pressure valve are closed, and the storage valve is stored in the storage portion, and the storage valve is stored in the storage portion; and the liquid supply valve, the pressure valve, and the pressure relief valve are closed. 0 When the control device is cleaned, the liquid supply valve and the pressure valve are closed and the pressure relief valve is closed. The cleaning liquid in the storage unit is sprayed from the cleaning liquid nozzle in a pressurized manner. In the control device, the liquid supply valve and the pressure valve are closed, and the pressure relief valve is opened. The storage is stored without any resistance. The control device is stored and will be given. The liquid valve, the pressure valve, and the pressure relief valve are closed. The storage portion is in a state in which the cleaning liquid is stored. The cleaning liquid nozzle is until the next discharge standby. The control device can be controlled by the supply valve. The opening and closing of the pressure valve and the row is performed to discharge and store the cleaning liquid. The tool cleaning device of the fifth application of the patent scope includes a control device for controlling the opening and closing of the front 〇w liquid valve, the pressure valve, and the pressure discharge valve. Control, is carried out: the aforementioned liquid supply valve and pressure valve are opened, and will The valve is cleaned by supplying the cleaning liquid to the cleaning liquid nozzle: and the liquid supply valve and the pressure valve are closed, and the discharge valve is opened to clean the cleaning liquid in the storage unit. The storage operation of the storage; and the standby operation of the liquid supply valve and the pressure relief valve being closed and the pressure valve being opened. When the control device is cleaned, the liquid supply valve and the pressure valve are operated to perform the pressure-removing operation, and the front portion is opened, and the remaining portion is held rearward. Open, -9- 201034764 and the pressure relief valve is closed. The cleaning liquid in the storage portion is ejected from the cleaning liquid nozzle in a pressurized state. In the control device, after the washing is completed, the liquid supply valve and the pressure valve are closed, and the pressure discharge valve is opened. The storage portion ‘ is to store the cleaning liquid without resistance. The control device waits for the liquid supply valve and the pressure relief valve to be closed after the storage is completed, and the pressure valve is opened. The storage unit stands by in a state where the stored cleaning liquid is pressurized. The cleaning liquid nozzle ejects the cleaning liquid in a pressurized state at the time of the next discharge. The cleaning liquid is sprayed out from the beginning of the discharge, and the tool and the tool holder are reliably washed. The tool cleaning device of the sixth aspect of the invention is further provided with a liquid amount sensor for detecting the amount of liquid in the storage portion, wherein the control device until the amount of the detected liquid of the liquid amount sensor reaches a predetermined amount The aforementioned storage operation is carried out. In the storage portion, a predetermined amount of the cleaning liquid can be stored. The cleaning liquid nozzle ejects the retentate of the storage portion. The cleaning liquid nozzle ‘ is a predetermined amount of the cleaning liquid which is discharged without any shortage, and can be reliably washed by the tool and the tool holder. The tool cleaning device according to claim 7 further includes a check valve disposed on the washing liquid passage between the groove and the storage portion, and stopping the storage portion from the storage portion toward the groove. The flow of the cleaning solution. The check valve prevents the washing liquid stored in the storage portion from flowing backward. The washing liquid nozzle is capable of ejecting the entire amount of the washing liquid in the storage portion. The tool cleaning device of claim 8 further includes an opening and closing valve that is disposed in the cleaning -10-201034764 liquid passage between the tank and the storage portion, and opens and closes the cleaning liquid passage. The opening and closing valve is closed by the cleaning to prevent the washing liquid stored in the storage portion from flowing back. The cleaning liquid nozzle ' is a full amount of the cleaning liquid in the storage portion. The tool cleaning device of the ninth aspect of the invention is the above-mentioned opening and closing valve, and has a switching position for discharging the cleaning liquid, and includes a filter disposed on the cleaning liquid passage between the opening and closing valve and the storage portion. In the standby operation, the control device 'performs a filter cleaning operation' in which the opening and closing valve is located at the switching position, and the cleaning liquid in the storage portion is reversely flowed to the filter, and the filter is washed. net. The control device is a switching position that can switch the opening and closing valve after the cleaning operation to the discharge. The washing liquid in the storage portion is caused to flow in the opposite direction in the filter, and the foreign matter removed by the filter is washed. The cleaned filter can be kept clean. The tool cleaning device of the ninth application patent is capable of preventing clogging of the filter and performing a good cleaning operation over a long period of time. In the tool cleaning device of the tenth aspect of the patent application, the storage unit 具备 includes a first storage unit and a second storage unit that are arranged in parallel, and the first storage is supplied to the cleaning liquid nozzle. When the amount of the cleaning liquid in the second storage portion or the second storage portion is equal to or less than the predetermined amount, the flow path to the cleaning liquid nozzle can be switched to the second storage portion or the second storage portion that is in standby with the supply of the cleaning liquid. The cleaning liquid nozzle ' is a cleaning liquid that stores any of the first storage portion and the second storage portion. Fruit 1 storage part is used in normal times. When the amount of the cleaning liquid in the first storage unit is insufficient, the second storage unit is switched to use -11 - 201034764. The cleaning liquid nozzle ejects the retentate of the second storage unit. The first storage unit stores the cleaning liquid during use of the second storage unit. In the second storage portion, the cleaning liquid is stored in the use of the first storage portion. In the first storage portion and the second storage portion, since any one of the storage portions is in a storage state, the cleaning liquid nozzle can eject a sufficient amount of the cleaning liquid at any time. The tool cleaning device that applies for item 10 of the patent range is suitable for use in a short period of time. The tool cleaning device according to claim 11, wherein the cleaning liquid nozzle is disposed at a tip end portion of a spindle head that supports the spindle. The cleaning liquid nozzle ejects the cleaning liquid from the tip end portion of the spindle head. The cleaning fluid is in contact with the tool and tool holder before the spindle is installed. Tools and tools The stand can be cleaned reliably. Poorly installed tools and tool holders are well protected. [Embodiment] Hereinafter, the present invention will be described in detail with reference to the drawings shown in the preferred embodiments. y [Embodiment 1] As shown in Figs. 1 and 2, the work machine 1 is supported on the ground by a base 2 made of cast iron. The work machine 1 is provided with a control box 3 and a body 4. The body 4' is a pillar that rises perpendicularly to the central portion of the base 2. The work machine 1' is processed inside the processing chamber provided on the front side (the left side of the first and second figures) of the body 4. The control box 3' is attached to the rear side of the body 4 (the right side of the first and second figures -12 - 201034764). The control box 3 is housed inside the control unit 9 (refer to Fig. 8). The body 4 is supported by the spindle head 5 (refer to FIG. 3) at the front portion thereof. The spindle head 5' is capable of ascending and descending along the fuselage 4 inside the processing chamber. As shown in Fig. 3, the spindle head 5 has a spindle 6 at its lower portion. The spindle head 5 is provided with a drive mechanism 7 at its upper portion. The spindle head 5 is driven up and down by the drive mechanism 7. The main shaft 6 is rotated about the axis in the up and down direction. The work machine 1' is further provided with an ATC (Automatic Tool Exchange Device) 8' and a tool washing device. As shown in Figs. 3 and 4, the AT C8 includes a tool storage unit 17 and a tool exchange unit 18. The tool storage unit 17 is disposed on the right side of the spindle head 5. The tool changer 18 is disposed between the spindle head 5 and the tool housing portion 17. As shown in Fig. 4, the tool accommodating portion 17 is provided with a plurality of tool containers 安装5 attached to the chain 16. The tool container 15 is a tool holder 21 that holds the tool 2A (refer to Fig. 6). The tool container 15 is moved by the circulation of the chain 16, and the tool 2 and the tool holder 21 are conveyed toward the exchange position (the lower position in Fig. 4). The tool container ι5 is in the exchange position, and the tool 20 and the tool holder are sent out to the tool accommodating portion I. As shown in Fig. 5, the tool change mechanism 18 is provided with a exchange arm 18a. The parent arm 18a is rotated around the axis parallel to the main shaft 6, and is raised and lowered. The exchange arm 18a has a grip portion i8b at both end portions thereof. The grip portion 18b is rotated by the exchange arm i 8 a to move toward the parent shift position of the tool housing portion 17 and the lower position of the spindle 6. One of the grip portions 18b is 201034764 and the tool holder 21 is grasped at the exchange position. The other grip portion 18b grips the tool holder 21 at the lower position of the main shaft 6. The exchange arm 18a is lowered while the tool holder 21 is gripped. The tool 20 and the tool holder 21 are detached from the tool container 15 and the spindle 6. The exchange arm 18a is rotated 180° after being lowered. The tool 20 and the tool holder 21 are moved from the exchange position to the lower position of the main shaft 6, or from the lower position of the main shaft 6 toward the exchange position. The exchange arm 18a is raised after being wound, and the tool 20 and the tool holder 21 are inserted into the spindle 6 or the tool container 15. As shown in Fig. 6, the tool holder 21 is provided with a spindle mounting portion 21a and a tool holding portion 21b. The tool holding portion 21b is composed of two cylindrical portions having different diameters. The lower cylindrical portion is held by the tool 20. The diameter of the upper cylindrical portion is larger than the diameter of the lower cylindrical portion. The spindle mounting portion 21a is a slightly tapered portion continuous with the upper surface of the cylindrical portion. The main shaft 6 is provided with a tool mounting hole 19 that is open at its lower surface. The tool mounting hole 197 has a conical shape corresponding to the spindle mounting portion 21a. The tool holder 21 is attached to the main shaft 6 by fitting the spindle mounting portion 21a into the tool mounting hole 19. The tool holder 21 and the tool 20 are positioned by closely fitting the spindle mounting portion 21a with the tool mounting hole 19, and positioning the upper end surface 21c of the cylindrical portion above the tool holding portion 2 1b with the lower surface of the spindle 6. . The spindle head 5 is rotatably supported by the spindle 6. The spindle head 5 has a ring-shaped spindle cap 22 at its lower end. The spindle cap 22 is fixed to the underside of the spindle head 5 by a plurality of bolts 23. Below the spindle 6, it is exposed from the center hole of the spindle cap 22. The lower surface of the main shaft 6 and the main shaft cap 22 are closed by the annular end surface cover 24. The end cover 24 is fixed to the lower surface of the main shaft 6 -14-201034764 and abuts against the lower surface of the main shaft cap 22. The tool 20 mounted on the spindle 6 rotates together with the spindle 6. The tool 20 is moved in the vertical direction by the spindle head 5 ascending and descending. The tool 20 processes the workpiece in the processing chamber. The workpiece moves horizontally together with the processing stage in the processing chamber. The work machine 1 is equipped with a tool washing device. The tool cleaning device cleans the tool 20 and the tool holder 21 before being mounted on the spindle 6. The spindle cap 22 has a liquid groove 25 underneath. The liquid groove 25 is an annular groove provided under the main shaft cap 22. The liquid groove 25' is formed on the outer side of the outer periphery of the end surface cover 24. The liquid groove 25 is closed by an annular cleaning liquid nozzle forming member 26 attached to the lower surface of the main shaft cap 23. The cleaning liquid nozzle forming member 26 has an annular cleaning liquid nozzle hole 29 that opens toward the lower surface thereof. The cleaning liquid nozzle forming member 26 has a lower height than the lower end surface of the main shaft 6. The cleaning nozzle hole 2 9 ' is formed obliquely toward the center of the spindle head 5 and the spindle 6. The liquid groove 25 is connected to the liquid supply hole 27 provided in the spindle cap 22. The liquid 〇 ^ supply hole 27 is open to the outer circumference of the main shaft cap 2 2 . The liquid supply port 2 7 ' is connected to the cleaning liquid pipe 28. The cleaning liquid tube 2 8 ' is a supply of cleaning liquid. The cleaning liquid is ejected from the cleaning liquid nozzle hole 2 through the liquid supply hole 27 into the liquid groove 2 5 . As shown in Fig. 6, the "cleaning liquid A" is ejected in the direction of the cleaning liquid nozzle hole 29, and the tool holder 21 and the tool 20 located under the main shaft 6 are washed. The cleaning liquid nozzle forming member 26 and the cleaning liquid nozzle hole 29' constitute a cleaning liquid nozzle 30. The liquid groove 25, the liquid supply hole 27, and the cleaning liquid pipe 28' are part of the cleaning liquid supply path. -15 - 201034764 As shown in Fig. 1, the "working machine 1" is equipped with a coolant assembly 10 °. The coolant unit 1 〇 ' is provided with a storage tank 11, a recovery tank 12, a first pump 13 and a second pump 14. The storage tank 1 1 'stores the coolant (cleaning liquid) supplied into the processing chamber. As shown in Fig. 1, the storage tank 11 is a box-shaped granulator. The recovery tank 12, the first pump 13, and the second pump 14' are provided on the upper surface of the retention tank 11. As shown in Fig. 1 and Fig. 2, the coolant assembly 1 is detachably provided on the rear side of the base 2. The recovery tank 12 is connectable to the discharge portion 2a of the base 2. The recovery tank 12 is concentrated in the discharge chamber in the processing chamber. The used coolant (washing liquid) is recovered. The recovery tank 1 2 ’ 疋 贝 贝 T T U U U U continuous. The coolant (washing liquid) in the recovery tank 12 is returned to the storage tank 11 by a filtering device (not shown). In the first pump 13 and the second pump 14', the coolant (washing liquid) in the storage tank 11 is sucked up toward the processing chamber first pump 13 and is used as a spring for the coolant and the washing liquid. As shown in Fig. 7, the discharge side of the first chestnut 13, ^, and the 谤. The first coolant pipe 3 1 is processed toward the inside of the first coolant pipe 31 and is extended to the inside of the room. The coolant is sprayed from the first cleaning liquid of the 帛1 coolant 胄31 (not shown) to the spray chamber coolant in the processing chamber to cool the tools and workpieces during processing. The second pump! 4, is a pump dedicated to coolant. The discharge side of the second pump 14 is connected to the second coolant pipe (not shown). The 帛2 coolant tube ' extends toward the inside of the processing chamber. The coolant ' is ejected from the _ 2 cold _ first end coolant cleaning liquid nozzle (not shown) toward the processing chamber. The pressure of the first chestnut is 〇"〇30~0. 045 MPa.帛2 pumping of chestnut 14 -16- 201034764 Sending liquid 25 liquid 12 tube 27 33 rinsing diagram The nozzle pressure is greater than the discharge pressure of the first pump 13. The coolant from the second pump 14 is used to cool the tools and workpieces being processed and to rinse the chips produced in the work. In the first coolant pipe 31, the cleaning liquid pipe 32 is separated from the cleaning liquid pipe 32, and the cleaning liquid is connected to the cleaning liquid nozzle 30 through the cleaning liquid pipe 28, and is sent by the first pump 13. Part of the coolant. The washing is carried out in the washing liquid pipe 32 and the washing liquid pipe 28. As described above, the cleaning liquid flowing through the cleaning liquid pipe 28 is discharged from the cleaning liquid nozzle hole 29 through the liquid supply hole 27 and the liquid groove 。. Washing from the cleaning liquid nozzle 30 washes the tool holder 21 and the tool 20. The washing liquid that has been washed is returned to the discharge portion 2a of the base 2 as described above, and is returned to the storage tank 1 1 through the recovery tank. The cleaning liquid supply path of the tool cleaning device is composed of a part of the first coolant 3 1 , the cleaning liquid pipe 32 and the cleaning liquid pipe 28 , and a liquid supply hole and a liquid groove 25 . As shown in Fig. 7, the cleaning liquid pipe 3 2 is provided with a filter 33, a check valve 34, and a liquid supply valve 35 in the middle. The filter 〇 ' is to remove foreign matter from the washing liquid. The check valve 34 is disposed on the downstream side of the filter 33. The check valve 34 is configured to allow the flow toward the cleaning liquid nozzle 30 in the cleaning liquid pipe 32 and to prohibit the reverse liquid supply valve 3 5 ' toward the first cooling liquid pipe 3 1 from being disposed in the check valve 34 The downstream side. As shown in Fig. 7, the 'feed valve 3 5 ' is normally closed. The liquid supply valve 35 is connected to the air pressure source 39 through the air passage 40. The liquid supply valve 35 is switched to the open position by the action of the air pressure supplied from the air passage 4〇. Washing liquid spray -17 . 201034764 3 0, the cleaning liquid is ejected while the liquid supply valve 35 is open. The air passage 40 is provided with a first electromagnetic valve 43 in the middle thereof. As shown in Fig. 7, the first electromagnetic valve 43 is normally closed. Air remains in the air passage 40, and is silenced by the muffler portion 43a and released. The first electromagnetic valve 43 is switched to the open position in accordance with an open command given by the control unit 9 (corresponding to the control device). The air pressure source 39' is opened by the first electromagnetic valve 43, and the air pressure is supplied to the liquid supply valve 35 through the air passage 40. In the cleaning liquid nozzle 30, the cleaning liquid is discharged by opening the first electromagnetic valve 43. The air pressure source 39 is an equipment that can be used in a factory equipped with the work machine 1. When the air pressure source 31 cannot be secured, the liquid supply valve 35 can be an electromagnetic valve that can be opened and closed by the operation command of the control unit 9. The cleaning liquid pipe 32 further includes a storage portion 50 in the middle thereof. The storage portion 50 is a container in which a predetermined amount of the cleaning liquid can be stored therein. The reservoir portion 50 is disposed between the check valve 34 and the liquid supply valve 35. The cleaning liquid in the cleaning liquid pipe 32 flows into the storage portion 50 while the liquid supply valve 35 is closed. The storage portion 50' temporarily stores the cleaning liquid flowing from the cleaning liquid pipe 32. As shown in Figs. 1 and 2, the storage portion 50' is mounted in parallel with the control box 3 at the rear of the body 4. As shown in Fig. 7, the upper portion of the storage portion 50 is connected to the air pressure source 39 through the air passage 42. The air passage 42' is provided with a throttle valve 48, a pressure valve 45, and a check valve 49. The pressurizing valve 45 is normally closed. The pressurizing valve 45 is switched to the open position by the action of the air pressure supplied from the air passage 46. The air 'in the air passage 42' flows into the storage portion 50 while the pressure valve 45 is opened. The pressure ' in the reservoir portion 50 rises due to the air pressure flowing through the air passage 42 from -18 to 201034764. The air passage 46 is branched on the way of the air passage 40. The pressurizing valve 45 is switched to the open position simultaneously with the liquid supply valve 35. The air pressure in the storage portion 50 is such that the cleaning liquid stored in the storage portion 50 is pushed out into the cleaning liquid pipe 32. The cleaning liquid is ejected from the cleaning liquid nozzle 30 by the liquid supply valve 35. The throttle valve 48 is a variable throttle valve. The throttle valve 48 is a permission to supply air from the air pressure source 39 or a prohibition of the air supply. The throttle valve 48 is typically a permit to select a feed gas. The check valve 49 prohibits the air from flowing back from the reservoir 50. As shown in Fig. 7, the storage portion 50 is provided with a pressure discharge passage 37 connected to the upper portion thereof. The pressure discharge passage 37 is provided with a pressure discharge valve 38 in the middle thereof. The pressure relief valve 38 is normally in the open position. The pressure discharge valve 38 is in the open position, and the pressure discharge passage 37 discharges the air pressure in the storage portion 50 through the pressure discharge valve 38 toward the processing chamber. The pressure relief valve 38 is switched by the action of the air pressure supplied from the air passage 41 to the closed position. The air passage 41 is provided with a second electromagnetic valve 44 in the middle thereof. The second electromagnetic valve 44 is normally closed. In the second electromagnetic valve 44, the residual air is silenced by the muffler 44a in the air path 41, and then released. The second electromagnetic valve 44 is switched to the open position in accordance with the opening command given by the control unit 9. The air pressure source 39 is opened by the second electromagnetic valve 44, and the air pressure is supplied to the pressure discharge valve 38 via the air passage 41. The pressure discharge valve 380 closes the discharge passage 37 to seal the storage portion 50. The air pressure in the storage portion 50 is raised by turning on the first and second electromagnetic valves 43 and 44 (on (〇N)). The air pressure in the storage unit 50 is lowered by closing (opening) the first and second -19-201034764 solenoid valves 43 and 44. The reservoir portion 50 is provided with a liquid level sensor 36. The liquid level sensor 3 6 is mounted at a predetermined height position from the bottom of the storage portion 50. The liquid level measuring unit 3 6 is turned on when the liquid level of the washing liquid in the storage portion 50 reaches the mounting height of the liquid level sensing 36 (〇N). The position of the liquid level sensor 36 is determined based on the amount of the liquid remaining in the storage portion 50 to be the amount of the cleaning liquid that can be ejected from the cleaning liquid nozzle 30. The cleaning nozzle 30 is a cleaning liquid which is ejected once, for example, for 5 seconds. As shown in Fig. 8, the control unit 9 is a brain in which the CPU 9a, the ROM 9b, the RAM 9c, the input interface 9d, and the output interface 9e are connected by the path 9f. The control unit 9 controls the machining operation of the machine tool i by the operation of the CPU 9a by the control program housed in the R〇M9b. The control range of the control unit 9 includes rotation of the tool 20, rise and fall control, movement control of the processing stage, operation control of the ATC 8, and control of the cleaning device. Figure 8 is a section showing only the controls associated with the tool wash. The input interface 9d' is connected to the operation unit 90, the liquid level sensor 36, and the pressure sensor 91. The operation unit 90 is for the purpose of inputting information necessary for the operator to add. As described above, the liquid level sensor 36 is the amount of the retentate in the detecting portion 50. The pressure sensor 91 detects the pressure in the air passages 41, 42. The input interface 9d is given to the input information ' of the operation unit 90 and the detection results of the liquid level sensor 36 and the pressure sensor 9 1 toward C P U 9 a . The output interface 9e is the driving circuit 82 of the first pump 13, the liquid electric power of the first sensor, and the driving circuit 83 of the magnetic valve 43 and the second. The drive circuit 84 of the solenoid valve 44 is connected. The CPU 9a applies an operation command to the drive circuit 82 through the output interface 9e, and drives the first pump 13. The CPU 9a applies an opening command to the drive circuit 83 through the output interface 9e, and turns on the first electromagnetic valve 43 (ON). The CPU 9a applies an opening command to the drive circuit 84 through the output interface 9e, and turns on the second electromagnetic valve 44 (ON). When the first electromagnetic valve 43 is turned "ON", the liquid supply valve 35 is opened by the air supply from the air pressure source 39. As described above, the cleaning liquid nozzle 30 ejects the cleaning liquid by opening the liquid supply valve 35. When the first electromagnetic valve 43 is turned "ON", the pressurizing valve 45 is opened by the air supply from the air pressure source 39. When the second electromagnetic valve 44 is turned "ON", the pressure discharge valve 38 is closed by the air supply from the air pressure source 39. The pressure in the reservoir portion 50 rises due to the air pressure flowing through the air passage 42, and the retentate in the reservoir portion 50 is pushed out into the cleaning liquid pipe 32. The cleaning liquid is ejected at a high speed from the cleaning liquid nozzle 3, and the tool 20 and the tool holder 21 are washed. 〇 The liquid supply valve 35 and the pressure valve 45' are closed by the opening (OFF) of the i-th solenoid valve 43. The pressure relief valve 3 8 ' is opened by the second electromagnetic valve 44 being OFF (OFF). The liquid supply valve 35 is a feed for shutting off the cleaning liquid toward the cleaning liquid nozzle 3 。. The pressure in the reservoir portion 50 is lowered by the pressure release and the pressure discharge. The cleaning liquid in the cleaning liquid pipe 32 is retained in the storage portion 50 by the inflow storage portion 5'. The C P U 9 a of the control device 9 is subjected to a cleaning operation by the following procedure (refer to FIG. 9). The CPU 9a' executes the program by a predetermined cycle. 201034764 CPU9a reads various signals (S1). The CPU 9a, such as the detection signal of the liquid level detector 36 and the detection signal of the pressure sensor 91, determines whether or not the air pressure in the air passages 40, 41, 42 is positive (S 2 ). The discrimination of S 2 is based on the detection signal of the pressure sensor 9 1 . When the air pressure is abnormal (S2: N〇), the CPU 9a disconnects the solenoid valve 43 and the second solenoid valve 44 (〇FF) (S15)' from the cleaning operation. When the air pressure is normal (S2: Yes), the CPU 9a' is determined to drive the first pump 13 (S3). When the first pump 13 is in the non-driving state (S 3 : N 〇 ), C P U 9 a ' does not perform the washing operation. When the first pump 13 is in the driving state (S3: Yes), the CPU 9a checks the detection signal of the liquid level sensor 36 (S4). The liquid sensor 36 is turned off (OFF) (S4: No ) ' CPU 9a ' determines that the amount of the cleaning liquid in the storage unit 50 is insufficient (S14) 'The first electric valve 43 and the second electromagnetic valve 44 are turned off (OFF) (S9) ° The liquid level sensing 36 is turned on ( In the case of ON (S4: Yes), the CPU 9a' is a discriminator for the presence or absence of the exchange instruction (S 5 ). In the case of no tool exchange command (S 5 No ), the CPU 9a does not perform the cleaning operation. In the processing program processing control to be described later, when the processing program controls each mechanism, the tool exchange command is stored in the RAM 9c CPU 9a before the tool exchange command is executed, and whether or not the tool exchange command is referred to the RAM 9c is determined by the CPU 9a. The program processing control is executed by the CPU9a in a predetermined cycle, and the operation block of the processing program is explained every one block, and the real sense is the actual state of the magnetizer. In the line-22-201034764 CPU9a, when the air path 40, 41 The air pressure in the 42 is positive S2: Yes), and the first pump 31 is in the driving state (S3: Yes), and when the amount of the liquid in the portion 50 is sufficient, the tool is ordered (S5: Yes). The cleaning action is carried out for the conditions. The CPU 9a turns on the first electromagnetic valve 43 and the second electromagnetic valve 44 (S6). The liquid supply valve 35 is opened. The reservoir 50 pushes the retentate by the action of the pressure. In the cleaning liquid nozzle 30, the cleaning liquid is preferably ejected. The CPU 9a is an operation to permit the ATC 8 (S7). ATC8 is a CPU9a license operation and starts to be replaced in the tool exchange processing (not shown). Further, the tool exchange processing is a program housed in the ROM 9b. At the start of the tool exchange, the CPU 9a performs tool exchange processing by the same distribution processing as the above-described distribution. The CPU 9a is a detection signal of the liquid level sensor 36 (S8 liquid level sensor 36 is turned off (OFF) (S8: Yes CPU 9a, the first electromagnetic valve 43 and the second The solenoid valve 44 is turned off ( ) (S 9 ). The cleaning liquid nozzle 3 0 ' is the final discharge of the cleaning liquid. The liquid level sensor 36 is not disconnected (〇 FF ) (S8), the CPU 9a, It is determined whether or not the tool exchange is completed (S13). In the case of the work change (S13: No), the CPU 9a repeats S8 and S13. When the tool exchange is completed (S13: Yes), the CPU 9a sets the first solenoid valve 43 and The second solenoid valve 44 is OFF (OFF) (Whether the tool exchange is completed is "usually in the Z-axis direction of the spindle head 5 (reservation is exchanged and the finger is turned on (the air force is not fixed by the permission of the hand: No , is S9) Position 201034764 Whether to reach the tool exchange completion position to determine. The position of the spindle head 5 in the Z-axis direction is detected by an encoder (not shown). The cleaning liquid nozzle 30 is made by the liquid supply valve 35, the discharge of the cleaning liquid is completed, and the internal pressure ' of the storage unit 50 is closed by the pressure valve 45 and the pressure discharge valve 38 is opened. The cleaning liquid flowing in the cleaning liquid 32 flows into the storage portion 5 and stays in the storage portion 50. The cleaning liquid nozzle 30 is until the storage liquid in the storage portion 50 is reduced, or The cleaning liquid is ejected until the tool exchange is completed. The storage unit 50 pushes out the stored cleaning liquid inside the storage unit 50. Therefore, the cleaning liquid nozzle 3 can efficiently discharge the cleaning liquid, and the tool 20 and the tool 20 can be The tool holder 21 is well cleaned. The storage unit 50 is located in the vicinity of the cleaning liquid nozzle 30. The cleaning liquid is discharged from the cleaning liquid nozzle 30 after flowing for a short distance, and the storage unit 50 and the cleaning liquid nozzle The passage resistance between 30 is reduced. The washing liquid can be stably ejected with high responsiveness. The liquid supply valve 35, the pressure discharge valve 38, and the pressurizing valve 45' are opened by the action of the air pressure. The pressure discharge valve 38 and the pressure valve 45 are safer than the solenoid valve that is operated by electric power. The liquid supply valve 35 and the pressure valve 45' are simultaneously opened by turning on the first electromagnetic valve 43. Therefore, the pressurization in the storage portion 5 and the discharge of the cleaning liquid nozzle 30 are synchronized 'the cleaning liquid nozzle 3 After the first electromagnetic valve 43 and the second electromagnetic valve 44 are turned off (OFF), the CPU 9a starts counting the built-in timer T2 (S10). The CPU 9a 'is discriminating the built-in timing. Whether the timing of the timer T2 reaches a predetermined time (for example, -24 - 201034764 5 seconds) (S 1 1 ). The timing of the built-in timer T2 is when the predetermined time is reached (SI 1 : Yes ), and the CPU 9a is The second electromagnetic valve 44 is turned on (ON) to end the cleaning operation. The pressure discharge valve 38 is closed to close the storage portion 50. The cleaning liquid does not flow into the storage portion 50. The storage unit 50 maintains the storage state of the cleaning liquid until the next washing operation. The CPU 9a may be configured to turn on (ON) the second electromagnetic valve 44 based on the detection result of the liquid level sensor 36. The reservoir 50 can reliably store a predetermined amount of the cleaning solution. C) [Embodiment 2] A tool cleaning device of Embodiment 2 will be described with reference to Figs. 10 and 11 . In the tool cleaning device of the second embodiment, the storage portion 50 is installed in the middle of the cleaning liquid pipe 3 2 . The cleaning liquid pipe 3 2 is provided with an opening and closing valve 52 disposed between the filter 3 3 and the storage portion 50. The on-off valve 52 is normally closed. The on-off valve 52 in the closed position is a reverse flow that stops the cleaning liquid toward the first coolant pipe 31 in the cleaning liquid pipe 3 2 . ❹ The opening and closing valve 52 is switched to the open position by the action of the air pressure supplied from the air passage 41. The on-off valve 52 that is in the open position allows the flow of the cleaning liquid toward the storage unit 50. The air passage 41 is provided with a fourth electromagnetic valve 57 in the middle thereof. The fourth electromagnetic valve 57 is normally closed. In the fourth electromagnetic valve 57, the residual air is silenced by the muffler 57a in the air path 41, and then released. The fourth electromagnetic valve 57 is switched to the open position in accordance with the opening command given by the control unit 9. The storage portion 50 is provided with a pressure discharge passage 37 connected to the upper portion. The pressure is -25- 201034764. The passage 37 is a pressurized passage. The pressure discharge passage 37 is a third electromagnetic valve 55 having its middle. The third electromagnetic valve 55 is located at the pressure discharge position in the normal state. The pressure discharge passage 37 is to discharge the pressure inside the storage portion 50 toward the processing chamber. The third solenoid valve 55 is switched by the operation command given by the control unit 9 to the pressurizing position. The pressure discharge passage 37 is a pressure passage that is connected to the pressure source 39 by the air passage 42. The air supplied from the air pressure source 39 is pressurized in the storage portion 50. The reservoir portion 50 is provided with a buoy type liquid level sensor 53 and a pressure switch 54. The buoy type liquid level sensor 53 has a sensor body and two proximity switches (a first proximity switch 53b and a second proximity switch 53c). The sensor body 53a moves in the vertical direction as the liquid level in the reservoir 50 rises and falls. The proximity switches 53b, 53c' are turned "ON" when the sensor body 53a approaches. The proximity switches 53b and 53c' are disposed apart from each other in the vertical direction. The control unit 9 recognizes that the liquid level in the storage unit 50 is located at a high position by the conduction switch (ON) being turned on (ON). The control unit 9 is turned on (ON) by the proximity switch 53c to recognize that the liquid level in the reservoir portion 5 is at a low position. The pressure switch 54 outputs an ON (〇 N) signal to the control unit 9 when the pressure in the reservoir 50 is equal to or higher than a predetermined pressure. The control unit 9' is electrically connected to the storage unit 50 by the pressure switch 54 being turned ON (ON). In the tool cleaning device of the second embodiment, the tool 20 and the tool holder 21 are cleaned by the following procedure (refer to FIG. 11). S21 to S23 in Fig. 11 are the same as S1 to S3 in the first embodiment. Air pressure is not correct -26- 201034764 Normal (S22: No) 'CPU9a' is to open (OFF) the first solenoid valve 43' third solenoid valve 55 and the fourth solenoid valve 57 (S37) 'Do not wash Net action. When the air pressure is normal (S22: Yes), the CPU 9a determines the driving state of the first pump 13 (S 2 3 ). When the first pump 13 is in the non-driving state (S 2 3 : N 〇) 'CPU 9 a ' is not performing the cleaning operation. When the first pump 13 is in the driving state (S23: Yes), the CPU 9a The discriminating whether or not the tool exchange command is present (S24) ° When there is no tool exchange command (S24: No), the CPU 9a' does not perform the washing operation. When there is a tool exchange command (S24: Yes), the CPU 9a' turns on the first solenoid valve 43 and the third solenoid valve 55 to "ON" the license tool exchange operation (S25). The third electromagnetic valve 55 pressurizes the inside of the storage portion 50 at the pressurized position. The liquid supply valve 35' is opened at the same time. The retentate in the storage unit 5 is ejected from the cleaning liquid nozzle 3 through the liquid supply valve 35. The pressurization ' in the storage portion 50 is to push out the retentate in the storage portion 50. The cleaning liquid is ejected from the cleaning liquid nozzle 30. The cleaning liquid nozzle 30 ejects the cleaning liquid until the storage liquid in the storage unit 50 is reduced or the tool exchange is completed. The tool 20 and the tool holder 21' are well cleaned by a sufficient amount of the cleaning liquid which is preferably ejected from the cleaning liquid nozzle 30. The CPU 9a determines whether the pressure switch 54 is turned "ON" or "OFF" (S26). When the pressure switch 54 is turned "ON" (S26: Yes), the CPU 9a determines whether the second proximity switch 53c is turned "ON" or "OFF" (S27). When the second proximity switch 53c is off (201034764 OFF) (S27: No), the CPU 9a determines whether or not the tool exchange is completed (S31). In the case of tool exchange (S31: No), the CPU 9a ' moves the process toward S 2 6 . When the second proximity switch 53c is turned "ON" (S27: Yes) or the tool exchange is completed (S31: Yes), the CPU 9a disconnects the first electromagnetic valve 43 and the third electromagnetic valve 55 (OFF) And 'the fourth electromagnetic valve 57 is turned ON (S28). The feed valve 35' is closed. The cleaning liquid nozzle 30 stops the ejection of the cleaning liquid. The cleaning of the tool 20 and the tool holder 21 is terminated by the shortage of the amount of the stored liquid in the storage unit 50 or the completion of the tool exchange. The third solenoid valve 55' is in the pressure-receiving position, and the opening and closing valve 52 is opened. The storage portion 50' stores the cleaning liquid in the cleaning liquid pipe 32. The liquid level of the retentate in the storage portion 50 is raised. The CPU 9a determines whether the first proximity switch 53b is turned "ON" or "OFF" (S29). The CPU 9a is turned off (OFF) of the first electromagnetic valve 43 and the third electromagnetic valve 55, and the fourth The solenoid valve 57 is turned ON (ON) until the first proximity switch is turned ON (S29: Yes). In the storage unit 50, the cleaning liquid is stored until the liquid level in the storage unit 50 is at a high position. The liquid level in the storage unit 50 is at a high position, and the CPU 9a turns on the third electromagnetic valve 55 (ON) and turns off the fourth electromagnetic valve 57 (OFF) (S30). The third electromagnetic valve 55 is in a pressurized position. The liquid supply valve 35 and the opening and closing valve 52' are closed. The air in the air passage 42 enters the storage portion 50 through the third electromagnetic valve 55, and pressurizes the retentate in the storage portion 50. -28- 201034764 CPU9a is the standby state of the storage liquid of J until the next cleaning operation. At S25, it is in a pressurized state. The cleaning liquid nozzle 30 sprays the cleaning liquid. Tool 2〇 and tool holder The responsiveness is cleaned. When the pressure switch 54 is OFF (OFF), the CPU 9a is the first solenoid valve 43 and the fourth motor (S32), and the cleaning operation is not performed. CPU9a ^ Moves. The third solenoid valve 55 is continuously pressurized. When the internal pressure of the reservoir portion 50 reaches the predetermined pressure, the process proceeds to the process. [Embodiment 3] An embodiment will be described with reference to Figs. 2 to 1B. The tool of the third embodiment shown in Fig. 12 is cleaned; the storage portion (the first storage portion 50a and the second storage portion 32) are branched into two branch pipes (the first branch pipe 32b). The first storage portion 50a It is connected to the first branching port 50b and to the second branching pipe 3 2b.
第1分岐管32a，是在第1貯留部 第1開閉閥52。第2分岐管3 2b ’是在 上流側具備第2開閉閥62。第1開閉K 62，是在通常時位於閉位置。閉位置中 及第2開閉閥62，是禁止朝向第1冷谷I 舍止將貯留部50內 中，貯留部5 0內 從開始隨後勢力佳 21，可以由較高的 況（S26 : No )， 法閥57斷開（OFF ，是將處理朝S26 :將貯留部5 0內加 況，C P U 9 a，是朝 3的工具洗淨裝置 裝置，是具備2個 5 0b )。洗淨液管 32a及第2分岐管 管32a連接。第2 5 0 a的上流側具備 第2貯留部50b的 丨52及第2開閉閥 的第1開閉閥5 2 ]液管31的洗淨液 201034764 的逆流。 第1開閉閥52及第2開閉閥62，是隨著控制部9所 給與的開指令朝開位置切換。成爲開位置的第1開閉閥5 2 ，是容許朝向第1貯留部5 0a的洗淨液的流動。成爲開位 置的第2開閉閥62，是容許朝向第2貯留部50b的洗淨液 的流動。 第1貯留部5 0a，是具備與上部連接的第1排壓通路 3 7a。第2貯留部50b，是具備與上部連接的第2排壓通路 3 7b。第1排壓通路37a及第2排壓通路37b，是兼具加壓 通路。 第1排壓通路3 7a，是在其途中具有第3電磁閥55。 第2排壓通路3 7b，是在其途中具有第5電磁閥66。第3 電磁閥55及第5電磁閥66，是在通常時位於排壓位置。 第3電磁閥55是位於排壓位置時，第1排壓通路37a，是 將第1貯留部50a內部的壓力朝加工室排出。第5電磁閥 66是位於排壓位置時，第2排壓通路37b，是將第2貯留 部5 Ob內部的壓力朝加工室排出。 第3電磁閥5 5及第5電磁閥66 ’是隨著控制部9所 給與的切換指令朝加壓位置切換。此時，第1排壓通路 37a及第2排壓通路3 7b，是成爲透過空氣路60與氣壓源 39連結的加壓通路。氣壓源39的空氣壓，是將貯留部50 內加壓。 第1貯留部50a，是具備第1液面感測器59及第1壓 力開關54a。第2貯留部50b，是具備第2液面感測器65 -30- 201034764 及第2壓力開關54b。第1液面感測器59及第2液面 器65 ’是與實施例2的浮標式液面感測器53相同。 液面感測器59，是檢出第1貯留部50a內的液面是高 或是低位置。第2液面感測器65，是檢出第2貯留裔 內的液面是高位置或是低位置。第1壓力開關54a， 出第1貯留部50a是否爲加壓狀態中。第2壓力開關 ，是檢出第2貯留部50b是否爲加壓狀態中。 在第1貯留部50a及給液閥35之間，配置有第 〇 換閥58。在第2貯留部50b及給液閥35之間，是配 第2切換閥64。第1切換閥58及第2切換閥64，是 常時位於閉位置。閉位置中的第1切換閥5 8，是停止 1貯留部5 0 a的洗淨液的流出。閉位置中的第2切換 ，是停止從第2貯留部50b的洗淨液的流出。 第1切換閥5 8及第2切換閥64，是隨著控制部 開指令朝開位置切換。成爲開位置的第丨切換閥58， 第1貯留部50a內的洗淨液朝給液閥3 5送出。成爲 ^ 置的第2切換閥64，是將第2貯留部50b內的洗淨液 液閥35送出。洗淨液，是藉由給液閥35成爲開而從 液噴嘴3 0噴出。給液閥3 5，是隨著控制部9的開指 爲開。 實施例3的工具洗淨裝置，是由以下的程序（f 圖、第14圖所示）實行工具20及工具支架21的洗 第13圖，是將電源投入工作機械1時的處理。控制裝 的CPU9a，是將各種訊號讀入（S41 ) 。CPU9a，是 感測 第1 位置 5 50b 是檢 I 54b 1切 置有 在通 從第 閥58 9的 是將 開位 朝給 洗淨 令成 I 1 3 淨。 E置9 直到 201034764 工作機械1起動爲止待機（S42)。工作機械1是起動的 情況（S42 : Yes) ’ CPU9a，是將第1開閉閥52及第2 開閉閥62導通（ON ) ( S43 )。使第1開閉閥52及第2 開閉閥62成爲開位置。 CPU9a，是將第1泵13驅動（S44)。洗淨液，是流 入第1貯留部50a及第2貯留部50b。CPU9a，是判別第1 貯留部50a及第2貯留部50b內的液面是否爲高位置中（ S45 ) 。CPU9a，是直到液面成爲高位置（S45 : Yes )爲 止，將第1開閉閥52及第2開閉閥62成爲開。洗淨液， 是經過第1開閉閥52及第2開閉閥62流入第1貯留部 5〇a及第2貯留部50b。第1貯留部50a及第2貯留部50b ，是將洗淨液貯留。 第1貯留部5 0a及第2貯留部5 0b內的液面是成爲高 位置的情況（S45 : Yes ) ，CPU9a，是將第1開閉閥52 及第2開閉閥62斷開（OFF )且，將第3電磁閥55及第 5電磁閥66導通（ON ) ( S46 )。第1開閉閥52及第2 開閉閥62，是成爲閉位置。第3電磁閥55及第5電磁閥 66，是成爲加壓位置。氣壓源3 9的空氣壓，是將貯留部 5〇內的貯留液加壓。CPU9a，是判別第1壓力開關54a及 第2壓力開關54b的導通（ON)、斷開（OFF) (S47) 。CPU9a，是藉由第1壓力開關54a及第2壓力開關54b 成爲導通（ON )而完成洗淨準備。第1貯留部50a及第2 貯留部50b，是直到成爲高位置爲止將洗淨液貯留。第1 貯留部50a及第2貯留部50b，是將貯留液由預定壓加壓 -32- 201034764 。工作機械1 ’是電源投入後’第1貯留部50a及第2貯 留部50b內的洗淨液是成爲高位置，且成爲由預定壓加壓 的狀態（初期狀態）。 接著，參照第14圖’說明初期狀態後的程序。CPU9a ，是將各種訊號讀入（S51 ) 。CPU9a，是判別空氣路60 內的空氣壓是否爲正常（S52) 。CPU9a，是判別第1泵 13的驅動狀態（S53 )。空氣壓是不正常的情況（S52 : No ) ，CPU9a，是不實行洗淨動作。第1泵13是在非驅 〇 動狀態下的情況（SS3 : No ) ’ CPU9a ’是不實行洗淨動 作。 空氣壓是正常（S52 : Yes )且’第1栗13是在驅動 狀態下的情況（S53 : Yes ) ’ CPU9a ’是判別工具交換指 令的有無（S54 )。有工具交換指令的情況（S54 : Yes ) ，CPU9a，是開始洗淨動作。 CPU9a，是判SII是否檢出到第1液面感測器59爲低位 置（S55 )。第1液面感測器59未檢出低位置的情況（ 〇 S55:N0) ，CPU9a’是使用第1貯留部50a內的洗淨液 實行洗淨。 CPU9a，是將第1切換閥58導通（ON)且，將第2 切換閥64斷開（OFF) ’許可工具交換動作（S56)。第 1切換閥58，是成爲開位置。第2切換閥64，是成爲閉位 置。CPU9a，是判別是否有最初的噴出（S57 ) °有最初 的噴出的情況（S57 : Yes ) ’ CPU9a，是將噴出標記導通 (ON ) ( S66 ) 。CPU9a，是朝S60將處理移行，將給液 -33- 201034764 閥35導通（ON)。給液閥35’是成爲開位置。洗淨液噴 嘴30，是將第1貯留部50a內的洗淨液噴出。第1貯留部 5〇a，是位於加壓狀態中。洗淨液洗淨液噴嘴30 ’是勢力 佳地將洗淨液噴出。 CPU9a，是依據噴出標記的導通(ON )、斷開（OFF )狀態進行S 5 7的判別。無最初的噴出的情況（S 5 7 : N 〇 )，CPU9a，是將第3電磁閥55導通（ON )且’將第5 電磁閥66斷開（OFF) (S58)。第3電磁閥55’是成爲 加壓位置。第1貯留部5 0 a ’是將其內部由預定壓加壓。 第5電磁閥6 6，是成爲排壓位置。第2貯留部5 0b ’是將 其內部排壓。 CPU9a，是將第1開閉閥52斷開（OFF )且’將第2 開閉閥62導通（ON) (S59)。第1開閉閥52’是成爲 閉位置。第2開閉閥62，是成爲開位置。CPU9a’是將給 液閥35導通（ON) (S60)。給液閥35’是成爲開位置 。洗淨液噴嘴30，是將第1貯留部50a內的洗淨液噴出。 第1貯留部5 0 a，是位於加壓狀態中。洗淨液噴嘴3 0 ’是 勢力佳地將洗淨液噴出。洗淨液，是將工具20及工具支 架2 1洗淨。洗淨液管3 2內的洗淨液’是經過第2分岐管 3 2b流入第2貯留部50b。第2貯留部50b ’是位於排壓狀 態中。第2貯留部5 0b，是將流入的洗淨液貯留。 CPU9a，是判別工具交換完成（s61)。工具交換中 的情況（S61: No) ，CPU9a’是繼續工具20及工具支架 21的洗淨。工具交換完成的情況（S61: Yes) ’ CPU9a， -34- 201034764 是將給液閥35斷開（OFF )。給液閥35是成爲閉位置。 洗淨液噴嘴3 0，是停止洗淨液的噴出。 CPU9a，是判別是否檢出第2液面感測器65爲高位置 (S63) 。CPU9a’是直到檢出第2液面感測器65爲高位 置爲止待機。檢出第2液面感測器6 5爲高位置的情況（ S63: Yes) ，CPU9a，是將第5電磁閥66導通（ON)且 ，將第2開閉閥62斷開（OFF) (S64)。第5電磁閥66 ’是成爲加壓位置。第2開閉閥62，是成爲閉位置。 CPU9a’是判別第2壓力開關54b的導通（ON)、斷 開（OFF) ( S65) 。CPU9a，是藉由第2壓力開關54b成 爲導通（ON ) ( S65 : Yes )而終了洗淨動作。第2貯留 部5 0b，是直到成爲高位置爲止將洗淨液貯留，且成爲將 該洗淨液加壓直到預定壓爲止的狀態。 檢出第1液面感測器5 9爲低位置的情況（S 5 5 : Y es )’ CPU9a ’是使用第2貯留部50b內的洗淨液實行洗淨 〇 CPU9a，是將第1切換閥58斷開（OFF )且，將第2 切換閥64導通（ON)，許可工具交換動作（S67)。第1 切換閥58，是成爲閉位置。CPU9a，是將第3電磁閥55 斷開（OFF)且，將第5電磁閥66導通（ON) (S68)。 第3電磁閥55，是成爲排壓位置。第1貯留部50a，是將 其內部排壓。第5電磁閥66，是成爲加壓位置。第2貯留 部50b，是將其內部加壓。 CPU9a，是將第1開閉閥52導通（ON)且’將第2 201034764 開閉閥62斷開（OFF ) ( S69 )。第1開閉閥52 ’是成爲 開位置。第2開閉閥62，是成爲閉位置。CPU9a ’是將給 液閥35導通（ON) (S70)。給液閥35 ’是成爲開位置 。洗淨液噴嘴30，是將第2貯留部5〇b內的洗淨液噴出。 第2貯留部50b，是位於加壓狀態中。洗淨液噴嘴30 ’是 勢力佳地將洗淨液噴出。洗淨液’是將工具20及工具支 架21洗淨。洗淨液管3 2內的洗淨液’是經過第1分岐管 32a流入第1貯留部50a。第1貯留部50a ’是位於排壓狀 態中。第1貯留部5 0a，是將流入的洗淨液貯留。 CPU9a，是判別工具交換完成（S71)。工具交換中 的情況（S71: No) ，CPU9a，是繼續工具20及工具支架 21的洗淨。工具交換完成的情況（S71 : Yes) ，CPU9a， 是將給液閥3 5斷開（OFF )。給液閥3 5，是成爲閉位置 。洗淨液噴嘴30，是停止洗淨液的噴出。 CPU9a，是判別是否檢出第1液面感測器59爲高位置 (S73 ) 。CPU9a，是直到檢出第1液面感測器59爲高位 置爲止待機。檢出第1液面感測器59爲高位置的情況（ S73 ： Yes) ，CPU9a，是將第3電磁閥55導通（ON)且 ，將第1開閉閥52斷開（OFF ) ( S74 )。第3電磁閥55 ，是成爲加壓位置。第1開閉閥52，是成爲閉位置。 CPU9a，是判別第1壓力開關54a的導通（0N)、斷 開（OFF) (S75) °CPU9a’是藉由第1壓力開關54a成 爲導通（ON) (S75: Yes)而終了洗淨動作。第ι貯留 部50a’是直到成爲局位置爲止將洗淨液貯留，且成爲將 • 36 - 201034764 該洗淨液加壓直到預定壓爲止的狀態。 實施例3的工具洗淨裝置，是具備第1貯留部50a及 第2貯留部50b。洗淨液噴嘴30，是在通常時中，將第1 貯留部5 0a內的洗淨液噴出。第1貯留部50a內的洗淨液 爲不足的情況，洗淨液噴嘴30，是將洗淨液供給待機中的 第2貯留部50b內的洗淨液噴出。第1貯留部50a及第2 貯留部50b，是在使用時成爲加壓狀態。洗淨液噴嘴30， 是將洗淨液勢力佳地噴出。工具20及工具支架21，是可 η ^ 以由較高的應答性確實地洗淨。 第2貯留部50b，是在第1貯留部50a的使用中將洗 淨液貯留。第1貯留部50a，是成爲在第2貯留部50b的 使用中將洗淨液貯留的洗淨液供給待機狀態。實施例3的 工具洗淨裝置，是將工具20及工具支架21的洗淨在短時 間頻繁進行的情況時也對應可以。 〔實施例4〕 參照第15圖、第16圖說明實施例4的工具洗淨裝置 。實施例4的工具洗淨裝置，是與實施例1的工具洗淨裝 置類似。以下的說明，是省略與實施例1相同部分。 如第15圖所示，實施例4的工具洗淨裝置，是具備 第6電磁閥69。加壓閥45，是由第6電磁閥69所供給的 空氣壓的作用朝加壓位置切換。第6電磁閥69，是配置於 空氣路42的途中。第6電磁閥69，是在通常時位於閉位 置。第6電磁閥69，是隨著控制部9所給與的開指令朝開 -^7 . 201034764 位置切換。氣壓源39，是藉由第6電磁閥69成爲開 過空氣路42朝加壓閥45供給空氣壓。 閉位置中的第6電磁閥69 ’是將殘留在上流側（ 閥45 )的空氣路42內的空氣由消音部69a消音後放 第1電磁閥43 ,是只有將給液閥3 5開閉。 實施例4的工具洗淨裝置，是在洗淨液管3 2的 具備第3切換閥67。止回閥34，是配置於過濾器33 流側。第3切換閥67，是配置在止回閥3 4及過濾器 間。 第3切換閥67，是在通常時位於第1位置。第1 中的第3切換閥67，是不會遮斷洗淨液管32內的流 洗淨液管32內的洗淨液，是通過第3切換閥67流入 部50內。第3切換閥67，是與後述的空氣路71連接 3切換閥67，是由空氣路7 1所供給的空氣壓的作用享j 位置切換。第2位置中的第3切換閥67，是將洗淨 3 2內的流通遮斷。洗淨液管3 2的上流側（貯留部5 〇 ’是透過第3切換閥67與回收槽12連續。 空氣路71 ’是在空氣路42的途中分岐。空氣路 是與第7電磁閥72連接。第7電磁閥72，是在通常 於閉位置。第7電磁閥72，是將殘留在空氣路71內 氣由消音部72a消音後放出。第7電磁閥72，是隨著 部9所給與的開指令成爲開位置。第7電磁閥72，是 成爲開位置’供給空氣至空氣路7丨。因此，第3切 67，是朝第2位置切換。藉由第3切換閥67朝第2 ，經 加壓 出。 途中 的上 33之 位置 通。 貯留 。第 目第2 液管 側） 71， 時位 的空 :控制 :藉由 '換閥 位置 -38- 201034764 切換，貯留部50內的洗淨液，是在洗淨液管32內逆流。 逆流的洗淨液’是通過過濾器3 3，經過第3切換閥6 7返 回至回收槽1 2 ° 在實施例4的工具洗淨裝置中，控制裝置9的CPU9a ，是由以下的程序（第16圖參照）實行洗淨動作。第16 圖的S81〜S83，是與實施例1的S1〜S3相同。第16圖 的S84，是與實施例1的S5相同。 CPU9a，是以空氣壓爲正常（S82: Yes)、第1泵13 Ο 爲驅動狀態（S83 : Yes )且有工具交換指令（S84 : Yes ) 爲條件實行洗淨動作。 CPU9a，是將第1電磁閥43、第2電磁閥44及第6 電磁閥69導通（ON)且，將第7電磁閥72斷開（OFF) ，許可工具交換動作（S 8 5 )。給液閥3 5，是成爲開。排 壓閥3 8，是成爲閉，且加壓閥4 5，是成爲開。貯留部5 0 內，是由空氣壓的供給成爲加壓狀態。貯留部5 0，是由空 氣壓的作用將貯留液推出。洗淨液，是經過給液閥3 5從 〇 洗淨液噴嘴3 0將洗淨液噴出。洗淨液噴嘴3 0，是將洗淨 液勢力佳地噴出。可以工具20及工具支架21良好地洗淨 〇 CPU9a，是判別X具交換完成（S86 ) 。CPU9a，是工 具交換中的期間（S86 : No )待機。工具交換完成的情況 (S86 : Yes) ，CPU9a，是將第1電磁閥43斷開（〇FF) 且將第7電磁閥72導通（ON) (S87)。給液閥35，是 成爲閉。第3切換閥67’是朝第2位置切換。貯留部5〇 201034764 內的洗淨液’是在洗淨液管3 2內逆流，經過第 6 7返回至回收槽12。逆流的洗淨液，是通過過 洗淨液，是將過濾器3 3所去除的異物沖洗並朝 回收。貯留部5 0內’是位於加壓狀態中。洗养 力佳地通過過濾器3 3將異物確實地沖洗。 CPU9a，是開始內藏正時器T3的計時 C P U 9 a，是判別內藏正時器T 3的計時是否到| (例如1秒）（s 8 9 )。到達預定時間的情況（ )，CPU9a，是將導通（ON)狀態中的電磁閥（ 閥69、第2電磁閥44及第7電磁閥72)斷開 S90)。貯留部50內，是成爲排壓狀態。第3 ，是返回至第1位置。洗淨液，是經過洗淨液1 貯留部50。貯留部50，是將洗淨液貯留。 CPU9a，是開始內藏正時器 T4的計時 CPU9a，是判別內藏正時器T4的計時是否到趸 (例如5秒）（S92) 〇CPU9a，是將第2電磁 (ON )終了洗淨動作（S93 )。第2電磁閥44 ’ 位置將貯留部50密閉。貯留部50，是將流入i 液貯留之後，維持貯留狀態。 〔實施例5〕 參照第1 7圖說明實施例5的工具洗淨裝置 的工具洗淨裝置，是與實施例4的工具洗淨裝 下的說明，是省略與實施例4相同的部分。 3切換閥 濾器33。 回收槽12 〖液，是勢 (S88 ) 〇 ^預定時間 S89 ： Yes 第6電磁 (OFF)( 切換閥6 7 f 3 2流入 (S91 ) ° t預定時間 閥44導通 ，是成爲閉 ;秒的洗淨 。實施例5 ί類似。以 -40 - 201034764 貯留部50，是具備壓力開關54。壓力開關54，是 留部5 0內是預定壓力以上時朝控制部9將導通（ON ) 號輸出。控制部9，是藉由壓力開關54導通（ON )認 貯留部5 0內是位於加壓狀態中。 加壓閥45，是與實施例1同樣，由空氣路46所供 的空氣壓的作用朝開位置切換。空氣路42內的空氣， 在加壓閥45成爲開的期間流入貯留部50內。貯留部 內的壓力，是由經過空氣路42流入的空氣壓的作用而 Ο 昇。空氣路46，是由空氣路40的途中分岐。加壓閥45 是與給液閥35同時朝開位置切換。 實施例5的工具洗淨裝置，是將貯留部5 0內的壓 由壓力開關54監視。實施例5的工具洗淨裝置，是將 洗淨液的逆流所産生的過濾器3 3的洗淨，依據貯留部 內的壓力實施。 說明將以上說明的實施例部分地變更的變更形態。 ^ 〔變更形態1〕 如第18圖所示，貯留部50，是在其內部具備活塞 。活塞7 5，是在貯留部5 0內上浮於貯留液的液面’與 液面一起上昇。活塞75 ’是在其外周具備密封部75a。 封部75a，是將活塞75的上側及下側保持在液密的狀態 第3電磁閥55’是藉由成爲加壓位置將空氣壓導入 留部50內。空氣壓’是將活塞75壓下將貯留液加壓。 留部50內的洗淨液’是不會與空氣接觸。變更形態1 貯 訊 識 給 是 50 上 力 由 50 7 5 該 密 〇 貯 貯 的 -41 - 201034764 工具洗淨裝置’是防止空氣混入洗淨液。活塞75，是由機 械力壓下也可以。 〔變更形態2〕 如第19圖所示，貯留部50,是在其內部具備空氣袋 76。空氣袋76，是可彈性變形。空氣袋76，是與排壓通 路37連接。排壓通路37，是藉由第3電磁閥55成爲加壓 位置而空氣供給至空氣袋76內。該空氣袋76，是在貯留 部50內膨脹，將貯留液加壓。排壓通路37，是藉由第3 電磁閥55成爲排壓位置將空氣袋76內排壓。該空氣袋76 ’是在貯留部5〇內縮小。貯留部50可以貯留洗淨液。 空氣壓，是供給至空氣袋76內。貯留部50內的洗淨 液，是不會與空氣接觸。變更形態2的工具洗淨裝置，是 防止空氣混入洗淨液。朝空氣袋7 6內，供給空氣以外的 氣體也可以。朝空氣袋76內，供給液體也可以。 〔變更形態3〕 如第2 0圖所示’貯留部5 0，是在其內部具備隔膜7 8 。隔膜7 8 ’是將貯留部5 0朝上下方向分割。隔膜7 8，是 可彈性變形。貯留部5 0的上部’是與排壓通路3 7連接。 排壓通路37’是藉由第3電磁閥55成爲加壓位置而將空 氣壓導入貯留部5 0內。空氣壓，是作用於隔膜7 8上。如 第20圖實線所示’隔膜78，是由空氣壓的作用朝下方膨 出，將貯留部5 0內的貯留液加壓。排壓通路3 7，是藉由 -42- 201034764 第3電磁閥55成爲排壓位置而將貯留部50內排壓。如第 20圖2點鎖線所示，隔膜78，是在貯留部50內朝上方膨 脹。貯留部5 0可以貯留洗淨液。 隔膜78,是將貯留部50內分割成上下。空氣壓，是 作用於隔膜7 8上。貯留部5 0內的洗淨液’是不會與空氣 接觸。變更形態3的工具洗淨裝置，是防止空氣混入洗淨 液。朝貯留部50的上部，供給空氣以外的氣體也可以。 朝貯留部50的上部，供給液體也可以。 Ο 在以上詳細說明中明顯可知本發明的工具洗淨裝置， 是在將洗淨液槽筒及洗淨液噴嘴連繫的洗淨液通路的途中 具備貯留部。貯留部，是將洗淨液通路內的洗淨液暫時貯 留。洗淨液噴嘴，是將貯留部的貯留液噴出。貯留部，是 洗淨液噴嘴的噴出停歇期間將洗淨液貯留。洗淨液噴嘴， 是將貯留在貯留部內的大多的洗淨液穩定噴出。本發明的 工具洗淨裝置，是將工具及工具支架在短時間確實地洗淨 。具備本發明的工具洗淨裝置的工作機械，不會產生工具 ^ 的安裝不良。 【圖式簡單說明】 第1圖’是具備實施例1的工具洗淨裝置的工作機械 的立體圖。 第2圖’是第1圖的工作機械的側面圖。 第3圖’是主軸及主軸頭部分的前視圖。 第4圖’是主軸及主軸頭部分的側面圖。 -43^ 201034764 第5圖，是從主軸及主軸頭部分的下方所見的平面圖° 第6圖，是主軸及主軸頭的要部剖面圖。 第7圖，是實施例1的工具洗淨裝置的液壓電路圖° 第8圖，是實施例1的工具洗淨裝置的控制系統的方 塊圖。 第9圖，是顯示實施例1的洗淨控制的流程圖。 第10圖，是實施例2的工具洗淨裝置的液壓電路圖。 第1 1圖，是顯示實施例2的洗淨控制的流程圖。 第12圖，是實施例3的工具洗淨裝置的液壓電路圖 〇 第1 3圖，是顯示實施例3的起動時控制的流程圖。 第1 4圖，是顯示實施例3的洗淨控制的流程圖。 第15圖’是實施例4的工具洗淨裝置的液壓電路圖 〇 第1 6圖’是顯示實施例4的逆洗控制的流程圖。 第17圖’是實施例5的洗淨裝置的液壓電路圖。 第1 8圖，是顯示變更形態〗的加壓裝置的圖。 第19圖’是顯示變更形態2的加壓裝置的圖。 第20圖’是顯示變更形態3的加壓裝置的圖。 【主要元件符號說明】 1 :工作機械 2 :基台 2 a :排出部 44 - 201034764 3 :控制箱 4 :機身 5 :主軸頭 6 :主軸 7 :驅動機構 9 :控制裝置 9d :輸入介面 9e :輸出介面 〇 9 f :通路 1 〇 :冷卻液組件 1 1 :貯留槽 1 2 :回收槽 13 :第1泵 14 :第2泵 15 :工具容器 1 6 :鏈條 ◎ 1 7 :工具收納部 18 :工具交換機構 1 8a :交換臂 18b :挾持部 1 9 :工具安裝孔 20 :工具保持部 21 :工具支架 2 1 a :主軸裝設部 -45 201034764 2 1 b :工具保持部 2 1 c :圓柱部上端面 22 :主軸帽 23 :螺栓 24 :端面蓋 2 5 :液溝 26 :洗淨液噴嘴形成構件 27 :液供給孔 2 8 :洗淨液管 29 :洗淨液噴嘴孔 3 0 :洗淨液噴嘴 3 1 :第1冷卻液管 3 2 :洗淨液管 32a :第1分岐管 32b :第2分岐管 3 3 :過濾器 3 4 :止回閥 3 5 :給液閥 3 6 :液面感測器 3 7 :排壓通路 37a :第1排壓通路 3 7b :第2排壓通路 3 8 :排壓閥 3 9 :氣壓源 -46- 201034764 4 0 :空氣路 41 :空氣路 4 2 :空氣路 43 :第1電磁閥 43a :消音部 44 :第2電磁閥 44a :消音部 4 5 :加壓閥 〇 4 6 :空氣路 48 :節流閥 49 :止回閥 5 〇 :貯留部 5 0a :第1貯留部 5 0b :第2貯留部 52 :第1開閉閥 53 :第2接近開關 ^ 53a :感測器本體 53b :第1接近開關 53c :第2接近開關 54 :壓力開關 54a:第1壓力開關 54b:第2壓力開關 5 5 :第3電磁閥 5 7 :第4電磁閥 -47 - 201034764 57a :消音部 5 8 :第1切換閥 59 :第1液面感測器 6 0 :空氣路 62 :第2開閉閥 64 :第2切換閥 65 :第2液面感測器 66 :第5電磁閥 67 :第3切換閥 6 9 :第6電磁閥 69a :消音部 71 :空氣路 7 2 :第7電磁閥 72a :消音部 7 5 :活塞 7 5 a :密封部 76 :空氣袋 78 :隔膜 8 2 :驅動電路 8 3 :驅動電路 84 :驅動電路 90 :操作部 91 '·壓力感測器 -48-The first branch pipe 32a is the first opening/closing valve 52 in the first storage portion. The second branch pipe 3 2b ' is provided with a second opening and closing valve 62 on the upstream side. The first opening and closing K 62 is normally closed. In the closed position and the second on-off valve 62, the inside of the storage unit 50 is prohibited from being slid toward the first cold valley I, and the subsequent force is preferably 21 from the beginning of the storage unit 50, which may be higher (S26: No). The valve 57 is opened (OFF, the process is directed to S26: the storage unit 50 is added, and the CPU 9a is a tool cleaning device facing 3, which has two 50bs). The cleaning liquid pipe 32a and the second branch pipe 32a are connected. The upstream side of the second 205a includes the enthalpy 52 of the second storage portion 50b and the first opening and closing valve 5 2 of the second opening and closing valve, and the reverse flow of the cleaning liquid 201034764 of the liquid pipe 31. The first opening/closing valve 52 and the second opening/closing valve 62 are switched to the open position in accordance with the opening command given by the control unit 9. The first opening and closing valve 5 2 that is in the open position is a flow that allows the washing liquid toward the first storage portion 50a. The second on-off valve 62 that is in the open position allows the flow of the cleaning liquid toward the second storage portion 50b. The first storage portion 50a has a first pressure discharge passage 377a connected to the upper portion. The second storage portion 50b is provided with a second discharge passage 37b connected to the upper portion. The first pressure discharge passage 37a and the second pressure discharge passage 37b have a pressure passage. The first discharge passage 3 7a has a third electromagnetic valve 55 in the middle thereof. The second discharge passage 3 7b has a fifth electromagnetic valve 66 in the middle thereof. The third electromagnetic valve 55 and the fifth electromagnetic valve 66 are located at the pressure discharge position at normal times. When the third electromagnetic valve 55 is at the pressure discharge position, the first pressure discharge passage 37a discharges the pressure inside the first storage portion 50a toward the processing chamber. When the fifth electromagnetic valve 66 is at the pressure discharge position, the second pressure discharge passage 37b discharges the pressure inside the second storage portion 5 Ob toward the processing chamber. The third electromagnetic valve 555 and the fifth electromagnetic valve 66' are switched to the pressurizing position in accordance with the switching command given by the control unit 9. At this time, the first pressure discharge passage 37a and the second pressure discharge passage 37b are pressure passages that are connected to the air pressure source 39 through the air passage 60. The air pressure of the air pressure source 39 is to pressurize the inside of the storage unit 50. The first storage unit 50a includes a first liquid level sensor 59 and a first pressure switch 54a. The second storage unit 50b includes a second liquid level sensor 65-30-201034764 and a second pressure switch 54b. The first liquid level sensor 59 and the second liquid level sensor 65' are the same as the buoy type liquid level sensor 53 of the second embodiment. The liquid level sensor 59 detects whether the liquid level in the first storage portion 50a is high or low. The second liquid level sensor 65 detects whether the liquid level in the second storage area is a high position or a low position. The first pressure switch 54a determines whether or not the first storage portion 50a is in a pressurized state. The second pressure switch detects whether or not the second storage portion 50b is in a pressurized state. A first switching valve 58 is disposed between the first storage portion 50a and the liquid supply valve 35. The second switching valve 64 is provided between the second storage portion 50b and the liquid supply valve 35. The first switching valve 58 and the second switching valve 64 are always in the closed position. The first switching valve 58 in the closed position is an outflow of the washing liquid that stops the storage portion 5 0 a . The second switching in the closed position is to stop the flow of the cleaning liquid from the second storage portion 50b. The first switching valve 58 and the second switching valve 64 are switched to the open position as the control unit opens. The first switching valve 58 is in the open position, and the cleaning liquid in the first storage portion 50a is sent to the liquid supply valve 35. The second switching valve 64 that has been placed is sent out of the cleaning liquid valve 35 in the second storage portion 50b. The cleaning liquid is ejected from the liquid nozzle 30 by the liquid supply valve 35 being opened. The liquid supply valve 35 is opened with the opening of the control unit 9. In the tool cleaning apparatus of the third embodiment, the cleaning of the tool 20 and the tool holder 21 is carried out by the following procedure (f, Fig. 14), and the processing is performed when the power is supplied to the working machine 1. The CPU 9a of the control pack reads various signals (S41). The CPU 9a is sensing the first position. 5 50b is the check I 54b 1 is cut in the slave valve 58 9 is the open position toward the cleaning command I 1 3 net. E is set to 9 until 201034764 when the machine 1 is started (S42). When the work machine 1 is started (S42: Yes), the CPU 9a turns on the first on-off valve 52 and the second on-off valve 62 (S43). The first opening and closing valve 52 and the second opening and closing valve 62 are brought into an open position. The CPU 9a drives the first pump 13 (S44). The cleaning liquid flows into the first storage portion 50a and the second storage portion 50b. The CPU 9a determines whether or not the liquid level in the first storage portion 50a and the second storage portion 50b is at a high position (S45). In the CPU 9a, the first opening and closing valve 52 and the second opening and closing valve 62 are opened until the liquid level is at the high position (S45: Yes). The cleaning liquid flows into the first storage portion 5a and the second storage portion 50b via the first opening and closing valve 52 and the second opening and closing valve 62. The first storage portion 50a and the second storage portion 50b store the cleaning liquid. When the liquid level in the first storage unit 50a and the second storage unit 50b is at a high position (S45: Yes), the CPU 9a disconnects (OFF) the first opening/closing valve 52 and the second opening/closing valve 62. The third electromagnetic valve 55 and the fifth electromagnetic valve 66 are turned ON (S46). The first opening/closing valve 52 and the second opening/closing valve 62 are in a closed position. The third electromagnetic valve 55 and the fifth electromagnetic valve 66 are in a pressurized position. The air pressure of the air pressure source 39 is to pressurize the retentate in the storage unit 5〇. The CPU 9a determines whether the first pressure switch 54a and the second pressure switch 54b are turned "ON" or "OFF" (S47). The CPU 9a is turned on (ON) by the first pressure switch 54a and the second pressure switch 54b to complete the cleaning preparation. The first storage portion 50a and the second storage portion 50b store the cleaning liquid until the high position is reached. The first storage portion 50a and the second storage portion 50b pressurize the retentate from a predetermined pressure -32 to 201034764. The working machine 1' is a state in which the cleaning liquid in the first storage portion 50a and the second storage portion 50b is at a high position and is pressurized by a predetermined pressure (initial state). Next, the procedure after the initial state will be described with reference to Fig. 14'. The CPU 9a reads various signals (S51). The CPU 9a determines whether or not the air pressure in the air passage 60 is normal (S52). The CPU 9a determines the driving state of the first pump 13 (S53). When the air pressure is abnormal (S52: No), the CPU 9a does not perform the washing operation. When the first pump 13 is in the non-driven state (SS3: No), the CPU 9a' does not perform the cleaning operation. When the air pressure is normal (S52: Yes) and the first pump 13 is in the driving state (S53: Yes), the CPU 9a' determines whether or not the tool exchange command is present (S54). In the case of a tool exchange command (S54: Yes), the CPU 9a starts the cleaning operation. The CPU 9a determines whether or not the SII is detected to be lower than the first level sensor 59 (S55). When the first liquid level sensor 59 does not detect the low position (〇 S55: N0), the CPU 9a' performs cleaning using the cleaning liquid in the first storage portion 50a. The CPU 9a turns on the first switching valve 58 and turns off the second switching valve 64 (OFF) to permit the tool exchange operation (S56). The first switching valve 58 is in an open position. The second switching valve 64 is in a closed position. The CPU 9a determines whether or not there is a first discharge (S57) ° when the first discharge is performed (S57: Yes). The CPU 9a turns on the discharge flag (ON) (S66). The CPU 9a shifts the process toward S60, and turns on the liquid supply -33 - 201034764 valve 35 (ON). The liquid supply valve 35' is in an open position. The cleaning liquid nozzle 30 discharges the cleaning liquid in the first storage portion 50a. The first storage portion 5〇a is in a pressurized state. The cleaning solution nozzle 30' is a good force to eject the cleaning liquid. The CPU 9a determines the S 5 7 in accordance with the ON (ON) and OFF (OFF) states of the ejection mark. In the case where there is no initial discharge (S 5 7 : N 〇 ), the CPU 9a turns on the third electromagnetic valve 55 (ON) and turns off the fifth electromagnetic valve 66 (S58). The third electromagnetic valve 55' is in a pressurized position. The first storage portion 50 a ' is a pressure applied to the inside thereof by a predetermined pressure. The fifth electromagnetic valve 66 is a discharge position. The second storage portion 50b' is configured to discharge the inside thereof. The CPU 9a turns off (OFF) the first on-off valve 52 and turns "on" the second on-off valve 62 (S59). The first opening and closing valve 52' is in the closed position. The second on-off valve 62 is in an open position. The CPU 9a' turns on the liquid supply valve 35 (S60). The liquid supply valve 35' is in an open position. The cleaning liquid nozzle 30 discharges the cleaning liquid in the first storage portion 50a. The first storage portion 50 a is in a pressurized state. The cleaning liquid nozzle 3 0 ' is a good force to eject the cleaning liquid. The cleaning solution is to clean the tool 20 and the tool holder 2 1 . The cleaning liquid in the cleaning liquid pipe 3 2 flows into the second storage portion 50b through the second branch pipe 3 2b. The second storage portion 50b' is located in the pressure discharge state. The second storage portion 50b stores the inflowing cleaning liquid. The CPU 9a determines that the tool exchange is completed (s61). In the case of tool exchange (S61: No), the CPU 9a' is the cleaning of the continuation tool 20 and the tool holder 21. When the tool exchange is completed (S61: Yes) ’ CPU9a, -34- 201034764 is to turn off the liquid supply valve 35 (OFF). The liquid supply valve 35 is in a closed position. The cleaning liquid nozzle 30 stops the discharge of the cleaning liquid. The CPU 9a determines whether or not the second liquid level sensor 65 is detected to be in the high position (S63). The CPU 9a' waits until the second liquid level sensor 65 is detected to be at a high position. When the second liquid level sensor 65 is detected to be in the high position (S63: Yes), the CPU 9a turns on the fifth electromagnetic valve 66 (ON) and turns off the second opening/closing valve 62 (S64) (S64) ). The fifth solenoid valve 66' is a pressurized position. The second on-off valve 62 is in a closed position. The CPU 9a' determines whether the second pressure switch 54b is turned "ON" or "OFF" (S65). The CPU 9a is turned on (S65: Yes) by the second pressure switch 54b, and the cleaning operation is terminated. The second storage portion 50b stores the cleaning liquid until it reaches the high position, and pressurizes the cleaning liquid until the predetermined pressure. When the first liquid level sensor 59 is detected to be at a low position (S 5 5 : Y es ), the CPU 9a 'cleans the CPU 9a by using the cleaning liquid in the second storage unit 50b, and the first switching is performed. When the valve 58 is OFF (OFF), the second switching valve 64 is turned ON, and the tool exchange operation is permitted (S67). The first switching valve 58 is in a closed position. The CPU 9a turns off the third electromagnetic valve 55 (OFF) and turns on the fifth electromagnetic valve 66 (S68). The third electromagnetic valve 55 is a pressure discharge position. The first storage portion 50a is internally pressed. The fifth electromagnetic valve 66 is in a pressurized position. The second storage portion 50b pressurizes the inside thereof. The CPU 9a turns "ON" the first opening and closing valve 52 and "OFFs" the second 201034764 opening and closing valve 62 (S69). The first opening and closing valve 52' is in an open position. The second on-off valve 62 is in a closed position. The CPU 9a' turns on the liquid supply valve 35 (S70). The liquid supply valve 35' is in an open position. The cleaning liquid nozzle 30 discharges the cleaning liquid in the second storage portion 5b. The second storage portion 50b is in a pressurized state. The cleaning liquid nozzle 30' is a powerful force to eject the cleaning liquid. The cleaning solution 'washes the tool 20 and the tool holder 21. The cleaning liquid in the cleaning liquid pipe 3 2 flows into the first storage portion 50a through the first branch pipe 32a. The first storage portion 50a' is located in the pressure discharge state. The first storage portion 50a stores the inflowing cleaning liquid. The CPU 9a determines that the tool exchange is completed (S71). In the case of tool exchange (S71: No), the CPU 9a is to continue the cleaning of the tool 20 and the tool holder 21. When the tool exchange is completed (S71: Yes), the CPU 9a is to open (OFF) the liquid supply valve 35. The liquid supply valve 3 5 is in the closed position. The cleaning liquid nozzle 30 stops the ejection of the cleaning liquid. The CPU 9a determines whether or not the first liquid level sensor 59 is detected to be in the high position (S73). The CPU 9a waits until the first liquid level sensor 59 is detected to be at a high position. When the first liquid level sensor 59 is detected to be in the high position (S73: Yes), the CPU 9a turns on the third electromagnetic valve 55 (ON) and turns off the first opening/closing valve 52 (OFF) (S74). . The third electromagnetic valve 55 is in a pressurized position. The first opening and closing valve 52 is in a closed position. The CPU 9a determines that the first pressure switch 54a is turned on (ON) and turned off (OFF) (S75). The CPU 9a' is turned on by the first pressure switch 54a (S75: Yes), and the cleaning operation is terminated. The first storage portion 50a' is a state in which the cleaning liquid is stored until the local position is reached, and the cleaning liquid is pressurized until the predetermined pressure is applied from 36 to 201034764. The tool cleaning device of the third embodiment includes the first storage portion 50a and the second storage portion 50b. In the cleaning liquid nozzle 30, the cleaning liquid in the first storage portion 50a is ejected in a normal state. When the cleaning liquid in the first storage portion 50a is insufficient, the cleaning liquid nozzle 30 discharges the cleaning liquid in the second storage portion 50b during standby supply. The first storage portion 50a and the second storage portion 50b are in a pressurized state at the time of use. The cleaning liquid nozzle 30 is configured to eject the cleaning liquid force. The tool 20 and the tool holder 21 are η^ reliably cleaned with high responsiveness. The second storage portion 50b stores the cleaning liquid during use of the first storage portion 50a. The first storage portion 50a is a standby state in which the cleaning liquid stored in the cleaning liquid is stored in the use of the second storage portion 50b. In the tool cleaning device of the third embodiment, the cleaning of the tool 20 and the tool holder 21 may be performed in a short period of time. [Embodiment 4] A tool cleaning device of Embodiment 4 will be described with reference to Figs. 15 and 16. The tool cleaning device of Example 4 was similar to the tool cleaning device of Example 1. In the following description, the same portions as those in the first embodiment are omitted. As shown in Fig. 15, the tool cleaning device of the fourth embodiment includes a sixth electromagnetic valve 69. The pressurizing valve 45 is switched to the pressurizing position by the action of the air pressure supplied from the sixth electromagnetic valve 69. The sixth solenoid valve 69 is disposed in the middle of the air passage 42. The sixth solenoid valve 69 is normally closed. The sixth solenoid valve 69 is switched to the position of the opening -^7. 201034764 in accordance with the opening command given by the control unit 9. In the air pressure source 39, the air pressure is supplied to the pressure valve 45 by the sixth electromagnetic valve 69. In the sixth electromagnetic valve 69' in the closed position, the air remaining in the air passage 42 of the upstream side (valve 45) is silenced by the muffler 69a, and the first electromagnetic valve 43 is placed, and only the liquid supply valve 35 is opened and closed. In the tool cleaning device of the fourth embodiment, the third switching valve 67 is provided in the cleaning liquid pipe 3 2 . The check valve 34 is disposed on the flow side of the filter 33. The third switching valve 67 is disposed between the check valve 34 and the filter. The third switching valve 67 is located at the first position in the normal state. The third switching valve 67 in the first embodiment does not block the cleaning liquid in the cleaning liquid pipe 32 in the cleaning liquid pipe 32, and flows into the inflow portion 50 through the third switching valve 67. The third switching valve 67 is connected to an air passage 71 to be described later. The switching valve 67 is switched by the action of the air pressure supplied from the air passage 71. The third switching valve 67 in the second position blocks the flow in the cleaning unit 3 2 . The upstream side of the cleaning liquid pipe 3 2 (the storage portion 5 〇 ' is continuous with the recovery tank 12 through the third switching valve 67. The air passage 71' is branched in the middle of the air passage 42. The air passage is the seventh electromagnetic valve 72. The seventh electromagnetic valve 72 is normally closed. The seventh electromagnetic valve 72 releases the air remaining in the air passage 71 by the sound absorbing portion 72a, and is released. The seventh electromagnetic valve 72 is a part 9 The opening command to be applied is the open position. The seventh solenoid valve 72 is in the open position 'supply air to the air passage 7'. Therefore, the third cut 67 is switched to the second position. The third switching valve 67 is moved toward the second position. 2nd, pressurized. The position of the upper 33 on the way is passed. Storage. The second liquid pipe side of the first item 71, the space of the time position: Control: Switching by the 'valve change position-38-201034764, the storage part 50 The cleaning liquid inside is reversed in the cleaning liquid pipe 32. The countercurrent cleaning liquid 'passes through the filter 3 3 and returns to the recovery tank through the third switching valve 6 7 . In the tool cleaning device of the fourth embodiment, the CPU 9a of the control device 9 is composed of the following program ( Figure 16 refers to the implementation of the cleaning action. S81 to S83 in Fig. 16 are the same as S1 to S3 in the first embodiment. S84 of Fig. 16 is the same as S5 of the first embodiment. The CPU 9a performs the cleaning operation on condition that the air pressure is normal (S82: Yes), the first pump 13 Ο is in the drive state (S83: Yes), and the tool exchange command (S84: Yes) is present. The CPU 9a turns on the first electromagnetic valve 43, the second electromagnetic valve 44, and the sixth electromagnetic valve 69, and turns off the seventh electromagnetic valve 72, thereby permitting the tool exchange operation (S 8 5 ). The liquid supply valve 3 5 is opened. The pressure relief valve 38 is closed and the pressure valve 45 is opened. In the storage portion 50, the supply of the air pressure is in a pressurized state. The reservoir portion 50 pushes the retentate by the action of the air pressure. The cleaning liquid is ejected from the rinsing liquid nozzle 30 through the liquid supply valve 35. The cleaning liquid nozzle 30 is a good discharge of the cleaning liquid. The tool 20 and the tool holder 21 can be cleaned by the CPU 9a, and the X-switch exchange is completed (S86). The CPU 9a is in the standby (S86: No) during the tool exchange. When the tool exchange is completed (S86: Yes), the CPU 9a turns off the first electromagnetic valve 43 (〇FF) and turns on the seventh electromagnetic valve 72 (S87). The liquid supply valve 35 is closed. The third switching valve 67' is switched to the second position. The cleaning liquid in the storage unit 5 〇 201034764 is reversely flowed in the cleaning liquid pipe 3 2 and returned to the recovery tank 12 through the sixth step. The countercurrent cleaning liquid is passed through the cleaning liquid, and the foreign matter removed by the filter 33 is washed and recovered. The inside of the reservoir portion 50 is in a pressurized state. The washing is performed by the filter 3 3 and the foreign matter is surely washed. The CPU 9a is the timing C P U 9 a at which the built-in timer T3 is started, and determines whether or not the count of the built-in timer T 3 has reached | (for example, 1 second) (s 8 9 ). When the predetermined time has elapsed, the CPU 9a turns off the solenoid valves (the valve 69, the second solenoid valve 44, and the seventh solenoid valve 72) in the ON state (S90). The inside of the storage unit 50 is in a state of being discharged. The third is to return to the first position. The washing liquid passes through the washing liquid 1 storage portion 50. The storage unit 50 stores the cleaning liquid. The CPU 9a is the chronograph CPU 9a that starts the built-in timer T4, and determines whether or not the timer of the built-in timer T4 has reached 趸 (for example, 5 seconds) (S92) 〇 CPU 9a, and the second electromagnetic (ON) is washed. (S93). The storage portion 50 is sealed at the position of the second electromagnetic valve 44'. The storage unit 50 maintains the storage state after the inflow i liquid is stored. [Embodiment 5] The tool cleaning device of the tool cleaning device of the fifth embodiment will be described with reference to Fig. 7, and the tool cleaning device of the fourth embodiment will be described. The same portions as those of the fourth embodiment are omitted. 3 Switch the valve filter 33. Recovery tank 12 〖Liquid, is potential (S88) 〇^ predetermined time S89: Yes 6th electromagnetic (OFF) (switching valve 6 7 f 3 2 inflow (S91) ° t predetermined time valve 44 is turned on, is closed; second Example 5 is similar to the case. The storage unit 50 is provided with a pressure switch 54. The pressure switch 54 outputs an ON (ON) signal to the control unit 9 when the remaining portion 50 is at a predetermined pressure or higher. The control unit 9 is electrically connected to the storage portion 50 by the pressure switch 54. The pressure valve 45 is the air pressure supplied from the air passage 46 as in the first embodiment. The action is switched to the open position. The air in the air passage 42 flows into the storage portion 50 while the pressure valve 45 is open. The pressure in the storage portion is increased by the air pressure flowing through the air passage 42. The road 46 is branched from the middle of the air passage 40. The pressurizing valve 45 is switched to the open position simultaneously with the liquid supply valve 35. The tool cleaning device of the fifth embodiment is to press the pressure in the storage portion 50 by the pressure switch 54. Monitoring. The tool cleaning device of Embodiment 5 is a filter generated by countercurrent flow of the cleaning liquid. The washing of 3 3 is carried out in accordance with the pressure in the storage portion. A modified form in which the above-described embodiment is partially changed will be described. ^ [Modification 1] As shown in Fig. 18, the storage portion 50 has a piston therein. The piston 7 5 is raised with the liquid surface in the liquid surface 'over the storage liquid in the storage portion 50. The piston 75' is provided with a sealing portion 75a on the outer circumference thereof. The sealing portion 75a is the upper side and the lower side of the piston 75. The third electromagnetic valve 55' is in a liquid-tight state, and the air pressure is introduced into the remaining portion 50 by the pressurizing position. The air pressure 'pressures the piston 75 to pressurize the retentate. The clean liquid 'is not in contact with the air. Change form 1 The storage information is 50. The force is 50 7 5 The tight storage -41 - 201034764 Tool cleaning device is to prevent air from mixing into the cleaning solution. Piston 75 [Modified form 2] As shown in Fig. 19, the storage portion 50 is provided with an air bladder 76 therein. The air bladder 76 is elastically deformable. The air bladder 76 is The pressure discharge passage 37 is connected. The pressure discharge passage 37 is by the third electromagnetic valve The air is supplied to the air bag 76. The air bag 76 is inflated in the storage portion 50 to pressurize the storage liquid. The pressure discharge passage 37 is a pressure discharge position by the third electromagnetic valve 55. The air bag 76 is pressed in the air bag 76. The air bag 76' is shrunk in the storage portion 5. The storage portion 50 can store the cleaning liquid. The air pressure is supplied into the air bag 76. The cleaning liquid in the storage portion 50 It is not in contact with air. The tool cleaning device of the second modification is to prevent air from being mixed into the cleaning liquid. It is also possible to supply a gas other than air into the air bladder 76. It is also possible to supply a liquid into the air bladder 76. [Modification 3] As shown in Fig. 20, the storage portion 50 has a diaphragm 7 8 therein. The diaphragm 7 8 ' divides the storage portion 50 in the vertical direction. The diaphragm 787 is elastically deformable. The upper portion ' of the reservoir portion 50 is connected to the pressure discharge passage 37. The pressure discharge passage 37' is introduced into the storage portion 50 by the third electromagnetic valve 55 being brought into a pressurized position. The air pressure acts on the diaphragm 78. As shown by the solid line in Fig. 20, the diaphragm 78 is swelled downward by the action of the air pressure, and the retentate in the storage portion 50 is pressurized. The pressure discharge passage 37 is configured to discharge the inside of the storage portion 50 by the -42 - 201034764 third electromagnetic valve 55 being a pressure discharge position. As shown by the dot lock line in Fig. 20, the diaphragm 78 is expanded upward in the reservoir portion 50. The storage portion 50 can store the washing liquid. The diaphragm 78 divides the inside of the storage portion 50 into upper and lower portions. The air pressure acts on the diaphragm 78. The cleaning liquid ' in the storage portion 50 is not in contact with air. The tool cleaning device according to the third modification is to prevent air from being mixed into the cleaning liquid. A gas other than air may be supplied to the upper portion of the storage portion 50. The liquid may be supplied to the upper portion of the storage portion 50. In the above detailed description, it is apparent that the tool cleaning device of the present invention includes a storage portion in the middle of the cleaning liquid passage connecting the cleaning liquid tank and the cleaning liquid nozzle. The storage unit temporarily stores the cleaning liquid in the cleaning liquid passage. The cleaning liquid nozzle ejects the retentate of the storage portion. In the storage portion, the cleaning liquid is stored during the discharge stop of the cleaning liquid nozzle. In the cleaning liquid nozzle, a large amount of the cleaning liquid stored in the storage portion is stably ejected. The tool cleaning device of the present invention cleans the tool and tool holder in a short period of time. The working machine provided with the tool cleaning device of the present invention does not cause installation failure of the tool ^. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a working machine including the tool cleaning device of the first embodiment. Fig. 2 is a side view of the machine tool of Fig. 1. Fig. 3' is a front view of the main shaft and the spindle head portion. Fig. 4' is a side view of the spindle and the spindle head portion. -43^ 201034764 Figure 5 is a plan view seen from below the spindle and spindle head section. Figure 6 is a cross-sectional view of the main part of the spindle and spindle head. Fig. 7 is a hydraulic circuit diagram of the tool cleaning device of the first embodiment. Fig. 8 is a block diagram showing a control system of the tool cleaning device of the first embodiment. Fig. 9 is a flow chart showing the washing control of the first embodiment. Fig. 10 is a hydraulic circuit diagram of the tool cleaning device of the second embodiment. Fig. 1 is a flow chart showing the washing control of the second embodiment. Fig. 12 is a hydraulic circuit diagram of the tool cleaning device of the third embodiment. Fig. 13 is a flow chart showing the control at the time of starting in the third embodiment. Fig. 14 is a flow chart showing the washing control of the third embodiment. Fig. 15 is a hydraulic circuit diagram of the tool cleaning device of the fourth embodiment. Fig. 16 is a flow chart showing the backwash control of the fourth embodiment. Fig. 17 is a hydraulic circuit diagram of the cleaning device of the fifth embodiment. Fig. 18 is a view showing a pressurizing device showing a modified form. Fig. 19 is a view showing a pressurizing device of the second modification. Fig. 20 is a view showing a pressurizing device of the third modification. [Description of main component symbols] 1 : Working machine 2 : Abutment 2 a : Discharge part 44 - 201034764 3 : Control box 4 : Body 5 : Spindle head 6 : Spindle 7 : Drive mechanism 9 : Control device 9d : Input interface 9e : output interface 〇 9 f : path 1 〇 : coolant assembly 1 1 : storage tank 1 2 : recovery tank 13 : first pump 14 : second pump 15 : tool container 1 6 : chain ◎ 1 7 : tool storage portion 18 : Tool exchange mechanism 1 8a : Exchange arm 18b : Holding portion 1 9 : Tool mounting hole 20 : Tool holding portion 21 : Tool holder 2 1 a : Spindle mounting portion - 45 201034764 2 1 b : Tool holding portion 2 1 c : Upper end surface 22 of the cylindrical portion: Main shaft cap 23: Bolt 24: End surface cover 2 5: Liquid groove 26: Cleaning liquid nozzle forming member 27: Liquid supply hole 2 8 : Cleaning liquid tube 29: Cleaning liquid nozzle hole 3 0 : The cleaning liquid nozzle 3 1 : the first cooling liquid pipe 3 2 : the cleaning liquid pipe 32 a : the first branch pipe 32 b : the second branch pipe 3 3 : the filter 3 4 : the check valve 3 5 : the liquid supply valve 3 6 : liquid level sensor 3 7 : pressure discharge passage 37 a : first pressure discharge passage 3 7b : second pressure discharge passage 3 8 : pressure relief valve 3 9 : air pressure source - 46 - 201034764 4 0 : air passage 41 : air Road 4 2: Air 43 : First electromagnetic valve 43 a : Silencer 44 : Second electromagnetic valve 44 a : Silencer 4 5 : Pressurization valve 〇 4 6 : Air passage 48 : Throttle valve 49 : Check valve 5 〇 : Storage portion 5 0a : First storage unit 5 0b : second storage unit 52 : first opening and closing valve 53 : second proximity switch 53 53a : sensor main body 53 b : first proximity switch 53 c : second proximity switch 54 : pressure switch 54 a : first Pressure switch 54b: 2nd pressure switch 5 5 : 3rd solenoid valve 5 7 : 4th solenoid valve - 47 - 201034764 57a : Silencing section 5 8 : 1st switching valve 59 : 1st level sensor 6 0 : Air Road 62: second on-off valve 64: second switching valve 65: second liquid level sensor 66: fifth electromagnetic valve 67: third switching valve 6 9 : sixth electromagnetic valve 69a: muffler 71: air path 7 2: 7th solenoid valve 72a: muffler 7 5 : piston 7 5 a : sealing portion 76 : air bag 78 : diaphragm 8 2 : drive circuit 8 3 : drive circuit 84 : drive circuit 90 : operation portion 91 '·pressure feeling Detector-48-