201032247 六、發明說明： 【發明所屬之技術領域】 本發明係關於線圈零件及其製造方法，更詳細而書， 係關於具有内部導體被層間連接而成之螺旋狀的線圈配設 在磁f生體陶瓷主體内部的構造之積層線圈零件及其製造方 法。 【先前技術】 近年來，對電子零件小型化的要求越來越高，關於線 圈零件’其主流也朝藉由將線圈形成用之内部導體與磁性 體層進行積層而形成之積層型轉移。 又’作為此種積層線圈零件之一，提案有一種積層電 感’為抑制隨著頻率的提高而流過線圈部分的電流集中在 其表面之所謂集膚效應原因所導致特性下降（參照專利文獻 1)。 該積層電感滿足以下等要件： (1) 將内部導體的每單位長度之實際表面長規定在既定 範圍，即1^(實際表面長/單位長度）$丨3 ; (2) 積層電感之内部導體每單位截面積的有效截面積為 〇·9$(有效截面積/單位截面積）$1〇的範圍； (3) 内部導體形成用之導電性糊料所包含之金屬粉末的 粒徑為0.1〜1.0”，且敲緊（tap)密度為*〜i〇g/cm3的 圍； (4) 用於形成磁性體層之陶瓷漿料所包含之陶瓷粉末 201032247 ‘ '· * (鐵氧體粉末）的粒徑為01〜2 5em的範圍。 即，該習知之積層電感，係規定内部電極所包含之金 屬粉末（Ag #末）的粒徑或敲緊密度、陶竟衆料中的鐵氧體 粉末的粒徑等，以獲得平滑的内部電極。 然而’實際上就算使用微粒的Ag粉末或微粒的鐵氧體 粉末，亦有燒成後之内部導體的凹凸變大之問題點。 又，若在内部導體形成較大的ϋ凸，平坦性、平滑性 〇 降低，則會有耐突波性降低之問題點。 尤其，若積層電感為〇.6mmx〇 3mmx〇 3mm、或〇 4mm x〇.2mmx0.2mm般小型’則内部導體凹凸的影響顯著。 專利文獻1 :日本專利特開2004- 39957號公報 【發明内容】 本毛明，為解決上述問題，其目的在於提供一種在内 部導體沒有較大的凹凸、平坦性、平滑性良好、耐突波性 ❹、好之積層線圈零件，以及能效率佳地製造該積層線圈零 件之積層線圈零件之製造方法。 發明人等，為解決上述問題，針對在内部導體產生凹 凸的原因進行探討，從而獲得以下見解。 、⑷若内部導體為線寬度30“m左右以下的細線，則難 以平滑印刷，另外由於i M , 卜甶於其厚度也變薄，習知無問題程度之 印刷時之凹凸的影響會變大。 ,(b)即使將内部導體用之導電性糊料盡可能平滑地印刷 形成但右燒成積層體之步驟，内部導體之燒成收縮率相 201032247 對於磁ι±體層（鐵氧體層）之燒成收縮率過大，則有時内部導 體的凹凸也會變大，或者會在内部導體的一部分形成貫穿 孔。 (C)另一方面’在内部導體之燒成收縮率相對於磁性體 層（鐵氧體層）之燒成收縮率過小時’構成磁性體層（鐵氧體 層）之陶瓷粒子（鐵氧體粒子）會壓迫内部導體，結果，有時 會導致内部導體的凹凸變大，會形成貫穿孔。 (d)在燒結後之陶瓷粒子（鐵氧體粒子）的粒徑較大時，内 部導體與磁性體層（鐵氧體層）的燒結收縮率之差對内部導 體的平滑性會產生顯著的影響。 又，發明人等，基於這些見解’進一步進行實驗、探 討’從而完成本發明。 即’本發明之積層線圈零件，在磁性體陶曼主體内部 具有螺旋狀的線圈，該磁性體陶瓷主體具備積層之複數個 磁性體陶瓷層、及透過該磁性體陶瓷層積層並以Ag為主成 分的複數個内部導體，該螺旋狀的線圈係藉由將該内部導 體進行層間連接來形成；其特徵在於： 構成該磁性體陶瓷主體之磁性體陶瓷粒子的粒徑為〇. i 〜2_0；zm，該内部導體的表面粗糙度Ra為ο」〜2.〇#m。 又，本發明之積層線圈零件’在磁性體陶瓷主體内部 具有螺旋狀的線圈，該磁性體陶瓷主體具備積層之複數個 磁性體陶瓷層、及透過該磁性體陶瓷層積層並以Ag為主成 分的複數個内部導體’該螺旋狀的線圈係藉由將該内部導 體進行層間連接來形成；其特徵在於： 201032247 將該内部導體從—主面側貫穿至另一主面側之貫穿孔 的存在比例，係俯視時該内部導體面積每3(^m平方為！ 個以下。 _又本發明之積層線圈零件，較佳係構成該磁性體陶 瓷主體之磁性體陶瓷粒子的粒徑為〇1〜Up。 又，較佳係具備與該貫穿孔的比例相關的要件、及磁 性體陶竟粒子的粒徑的要件，且該内料體的表面粗糙度 Ra 為 〇-1 〜2,〇"m。 又，本發明之積層線圈零件之製造方法，該積層線圈 零件，在磁性體陶t主體内部具有螺旋狀的線圈，該螺旋 狀的線圈係藉由將透過磁性體陶究層積層並以Ag為主成分 之内部導體進行層間連接來形成；其特徵在於，具備： 形成陶究積層體之步驟’該陶充積層體具有積層之複 =個磁性體陶究生片、以及線圈形成用之複數個内部導體 圖案’該複數個内部導體圖垒 丨导體圖案係以Ag為主成分且燒成收縮 ❹ 车的值為該磁性體陶竟生片之燒成收縮率的值4 iq〜 的範圍；以及 性該K積層體 '形成内部具備螺旋狀的線圈之磁 比體陶瓷主體之步驟。 部導之積層線圈零件之製造方法，較佳係作為該内 陶曼主#、、’係使用燒成收縮率的值相對於構成該磁性體 圍者。t磁性體陶瓷之燒成收縮率的值為40〜90%的範 進而，較佳係構成該磁性體陶£主體之燒成後之磁性 201032247 體陶瓷粒子的粒徑為0.1〜2.0鋒。 、 較佳係燒成後之該内部導體的表面粗链度Ra為 0·1 〜2.0/zm。 ’、 又，較佳係燒成後之該内部導體從一主面側貫穿至另 主面側之貫穿孔之、該内部導體每單位面積的存在比 例係俯視時該内部導體面積每3〇 “爪平方為^個以下。 [發明效果] 積層線圈零件，在磁性體陶竟主體内部具有螺旋狀的 線圈，該磁性體陶瓷主體具備複數個磁性體陶瓷層、及透 過磁!生體陶竟層積層並以Ag為主成分的複數個内部導體， 螺旋狀的線圈係藉由將内部導體進行層間連接來形成，藉 由使構成磁性體陶竟主體之磁性體冑竟粒+的粒徑為〇1〜 2.0/zm’内部導體的表面粗糖度Ra為〇卜2抑爪，能抑 制内。I5導體與磁性體層的燒結收縮率之差對内部導體的平 滑性產生影響，能提供内部導體沒有較大的凹凸、平坦性、 平滑性良好、耐突波性良好之積層線圈零件。 又，積層線圈零件，在磁性體陶瓷主體内部具有螺旋 狀的線圈，該磁性體陶瓷主體具備複數個磁性體陶瓷層、 及透過磁性體陶瓷層積層並以Ag為主成分的複數個内部導 體，螺旋狀的線圏係藉由將内部導體進行層間連接來形 成，在將内部導體從一主面側貫穿至另一主面側之貫穿孔 之、内部導體的每單位面積的存在比例，係俯視時内部導 體面積每30 " m平方為1個以下時，能抑制内部導體與磁 性體層的燒結收縮率之差對内部導體的平滑性產生影響， 201032247 能獲得内部導體沒有較大的凹凸、平坦性、平滑性良好、 耐突波性良好之積層線圈零件。 即例如適當調整構成磁性體陶瓷層之陶瓷材料（粗原 料）的組成、粒徑、用於形成陶瓷生片而進行漿料化時的粉 碎條件、用於形成磁性體陶瓷主體而壓接陶瓷生片時的壓 接條件、燒結辅助劑的選擇、以及其添加比例等，在能獲 得’又有較大的凹凸、平坦性、平滑性良好之内部導體的條 ^下來形成磁性體陶瓷主體時，能滿足貫穿孔在内部導體 母3〇vm平方為1個以下的要件。 又，在内部導體每30 " m平方存在之貫穿孔的比例為t '下時，此挺供内部導體沒有較大的凹凸、平坦性、平 滑性良好、耐突波性良好之積層線圈零件。 二進而，較佳係在滿足構成磁性體陶瓷主體之磁性體陶 ^粒子的粒徑為〇.1〜2.〇"111的要件時’能更確實滿足在内 4導體每3G // m平方存在之貫穿孔的比例為i個 件。 又，若磁性體陶瓷粒子的粒徑縮小至未達時， 作為積層電感的強度或電感量有較大的下降，因此不理想。 又，若磁性體陶瓷粒子的粒徑超過2〇从m時，内部導 體表面的凹凸有變大的傾向，因此不理想。 二又，在具備與該貫穿孔之比例相關的要件、及磁性體 〇陶竞〜粒子的粒徑的要件時，當内部導體的表面粗糙度以為 .〜2·0/ζ m時，能提供更確實在内部導體沒有較大的凹 凸、平坦性、平滑性良好、耐突波性良好之積層線圈零件。 201032247 又’本發明之積層線圈零件之製造方法，由於作為以 Ag為主成分之内部導體圖案’係使用燒成收縮率的值為磁 性體陶瓷生片之燒成收縮率的值之10〜90%的範圍者，因 此，在燒成包含磁性體陶瓷生片及内部導體圖案的陶瓷積 層體、形成内部具備螺旋狀的線圈之磁性體陶瓷主體之步 驟’成避免在内部導體表面形成較大的凹凸，能效率佳地 製造耐突波性良好之積層線圈零件。 即，於上述範圍，藉由使内部電極Ag之燒成收縮率， 小於構成磁性體陶瓷主體的陶瓷（例如鐵氧體）之燒成收縮⑬ 率’能避免在内部導體表面形成較大的凹凸。 又，關於内部導體之燒成收縮率，能藉由適當選擇内 部導體形成用之導電性糊料中的導電成分（Ag粉末）的含有 率、導電性糊料所包含之清漆及溶劑的種類，或者藉由調 整將内部導體圖案及磁性體陶瓷用之陶瓷生片之積層體壓 接成形時的壓力等，來進行控制。 又，作為内部導體用之導電性糊料，較佳係Ag的含量 高為80〜90重量百分比的糊料，更佳為以〜料重量百=◎ ^又，關於内部導體圖案（内部導體）之燒成收縮行為，能 藉由調整導電性糊料的Ag含量、有機展色劑量、清漆種類、 壓接成形時的壓力、脫脂及燒成分布圖（ρΓ〇ί>ίΐ^等來 控制。 订 在使該導電性糊料之燒成收縮率的值相對於構成磁性 體陶瓷主體之磁性體陶瓷之燒成收縮率的值為4〇〜9〇%的 10 201032247 範圍時，在燒成陶竞積層體之步驟，能更確實避免在内部 導體表面形成較大的凹凸，而能使本發明更有效果。 又，在使構成該磁性體陶究主體之燒成後之磁性體陶 瓷粒子的粒徑為0.1〜2.0#m時，能更確實避免在内部導體 表面形成較大的凹凸。 進而，在使燒成後之該内部導體的表面粗糙度以為 〜2.0#m時，能抑制内部導體與磁性體層的燒结收縮率之 差對内部導體的平滑性產生影響，能更確實製造在内部導 體沒有較大的凹凸、平坦性、平滑性良好、耐突波性良好 之積層線圈零件。 尤佳係在使燒成後之該内部導體的每3〇 V m平方存在 之貫穿孔的比例為1個以下時，能更破實避免在内部導體 表面形成較大的凹凸。 【實施方式】 以下，說明本發明之實施形態，對本發明之特徵更詳 細說明。 [實施例1] 圖1係表示本發明之一實施例（實施例1)之積層線圈零 件（此實施例1為積層電感）的構成之截面圖，圖2係示意表 示其主要部分構成之分解立體圖。 如囷1、圖2所示，此實施例丨之積層電感具備具有螺 旋狀的線圈4之磁性體陶瓷主體（鐵氧體主體）5，螺旋狀的 線圈4係透過各磁性體陶瓷層（鐵氧體層）丨積層而成之内部 11 201032247 導體2藉由通孔3(圖2)連接而成。又，在磁性體陶究主體（鐵 氧體主體）5的端面5a、5b，配設外部電極6a、6b，以與線 圈4的兩端部的抽出電極4a、4b導通。 以下’說明其製造方法。 ⑴首先’將以 48.0mol% 的 Fe203、29.5mol% 的 Zn0、 14.5mol%的NiO、8.0mol%的CuO的比率稱量之磁性體原 料’使用球磨機（ball mill)進行濕法混合48小時，獲得原料 漿料。 然後’利用噴霧乾燥器（spray dryer)乾燥該原料漿料，◎ 以700。(：預燒2小時，獲得預燒物。 其次’利用球磨機對該預燒物進行濕法粉碎16小時 後，添加、混合既定量的黏合劑，從而獲得陶竟漿料。 然後，將該漿料成形為片狀，獲得厚度為15//m的陶 瓷生片（green sheet)。 (2) 其次，在陶瓷生片的既定位置形成通孔後，在陶瓷 生片表面印刷以Ag為主成分之内部導體形成用之導電性糊 料，使其厚度為14"m，形成既定之内部導體圖案。作為此❹ 時内部導體形成用之導電性糊料，使用由雜質元素為〇1重 量百分比以下的Ag粉末、清漆、溶劑製成的Ag粉末相對 於導電性糊料整體的比例為85重量百分比的導電性糊料。 (3) 然後，積層複數片形成有該内部導體圖案的陶瓷生 片並且在其上下兩面側積層沒有形成内部導體圖案的陶 瓷生片後，以1000kgf/cm2進行壓接，獲得壓接塊。藉此， 形成各内部導體圖案以通孔連接之螺旋狀的線圈4。此時線 12 201032247 圈的匝數為7.5匝。 人 t上述陶兗生片之積層順序、穑爲#能 數等沒有特別限制。 '層頃序積層形態、積層片 、⑷然後㈣接塊切割為既定尺寸，進行脫黏合劑後， 以860 C進行2小時之燒成，獲得燒結體。 此時之磁性體陶竟層（鐵氧體層）之燒成收縮率為Μ % ’内部導體（内部導體形成用之導電性糊料）之燒成收縮率 ❹ 為7% ’内部導體之燒成收縮率的值係磁性體陶究層（鐵氧 體層）之燒成收縮率的值之39%。 磁性體陶瓷層（鐵氧體層）之燒成收縮率的測定如下述 進行：即，堆疊陶ΜΜ，以與實際製造積層電感時相同 的壓力條件下進行壓接，㈣為既定尺寸後，α同-條件 進行燒成，使用熱機械分析裝置（ΤΜΑ)測定沿積層方向之燒 成收縮率。 & 又，内部導體的燒結收縮率的測定如下述進行：即， ❹將•體形成用之導電性糊料在玻璃板上薄延展並乾燦 後，取出乾燥物並用研妹粉碎成粉末狀，將其放入模具， 在與製造積層線圈零件時的條件相同的壓力條件下進行單 轴衝壓成形，切割為既定尺寸後燒成，以ΤΜΑ測定沿著衝 壓方向的燒結收縮率。 (5) 然後，在内部具備螺旋狀的線圈之磁性體陶瓷主體 (鐵氧體主體）的兩端部塗布外部電極形成用之導電性糊料 並乾燥後，以750°C進行燒接，從而形成外部電極。 (6) 然後，對形成的外部電極進行鍍鎳（Ni)、鍍锡（sn)， 13 201032247 形成下層具有鍛錄膜層、上層具有錢錫膜層的雙層構造之 鍍膜。 藉此，如圖1所示，能獲得具有如下構造之積層電感： 即’在磁性體陶瓷主體（鐵氧體主體）5的兩端部5a、5b配設 有外部電極6a、6b，使得與透過磁性體陶瓷層（鐵氡體層^ 積層之内部導體2以通孔3(圖2)連接而成之螺旋狀的線圈 4的兩端部4a、4b導通。該積層電感的尺寸為長度〇 6mmx 寬度0.3mm、高度0.3mm。 又’如上述製成之積層電感係表1中之試樣號碼1之 β 積層電感，其為本發明之實施例之積層電感。 在此積層型電感’構成磁性體陶瓷層（鐵氧體層）之磁性 體陶瓷粒子（鐵氧體粒子）的粒徑（平均粒徑）為1〇"m，内部 導體的表面粗糙度Ra為Ι.Οβηι。又，内部導體之燒成收縮 率的值如上述，係磁性體陶瓷層（鐵氧體層）之燒成收縮率的 值之39%。 又，在此實施例1中，除試樣號碼丨之積層型電感之 外，將内部導體之燒成收縮率的值相對於磁性體陶瓷層（鐵❹ 氡體層）之燒成收縮率的值在1 1〜的範圍進行變更， 製作試樣號碼2〜7之積層電感。進而，關於試樣號碼4、5、 7’使燒成後之鐵氧體粒子的粒徑在〇6〜3.〇"m的範圍變 更。 X ’在變更内#導體之燒成收縮率相對於磁性體陶瓷 層（鐵氧體層）之燒成收縮率時，係以在75〜9〇%的範圍變 更内部導體形成用之導電性糊料的Ag含量、且變更燒成溫 14 201032247 度來進行。除此之外的條件為與上述試樣號碼1的情況同 樣的條件。 又’表1的試樣號碼2〜5之積層電感，係滿足本發明 之基本要件之本發明之實施例之積層型電感。 另 方面，表1的試樣號碼6、7之積層電感係比較例 (比較例1、2)之積層電感，該比較例之積層電感未滿足内 部導體的表面粗糙度Ra、或内部導體之燒成收縮率相對於 磁性體陶瓷層（鐵氧體層）之燒成收縮率等本發明之要件。 ® 對表1所示之試樣號碼1〜7的各積層電感，檢查鐵氧 體粒徑、内部導體的表面粗糙度、内部導體之貫穿孔的數 量，並且進行突波試驗。 其結果如表1所示。 又，將導電性糊料（内部導體）之燒成收縮率的值相對於 磁性體陶瓷生片（磁性體陶瓷層（鐵氧體層））之燒成收縮率的 值之比例，在表1中作為“内部導體相對於鐵氧體的相對 收縮率”。 ❿ 15 201032247 [表l] 試樣號碼 導體糊料 Ag含量 (重量百 分比） 燒成 溫度 rc) 鐵氧 體收 縮率 (%) 内部 導體 收縮 率 (%) 内部導體 相對於鐵 氧體的相 對收縮率 (%) 鐵氧 體粒 徑 〇xm) 内部導 體表面 粗梭度 Ra (μιη) 内部導體 之貫穿孔 數量每 30 μπι 平 方(個） 突波試驗的 斷線數 1(實施例1) 85 860 18 7 39 1.0 1.0 0 0/100 2(實施例2) 80 860 18 16 89 1.0 2.0 0 0/100 3(實施例3) 89 860 18 2 11 1.0 0.8 0 0/100 > 4(實施例4) 84 880 20 8 40 2.0 1.9 0 0/100 5(實施例5) 85 840 14 7 50 0.6 0.9 0 0/100 6(比較例1) 75 860 18 18 100 1.0 3.0 3 4/100 7(比較例2) 85 900 22 7 32 3.0 5.5 7 12/100 又，鐵氧體粒子的粒徑測定係如述進行：即，用鉗子 剪斷積層電感，對截面進行SEM觀察，以測定SEM粒徑， 將其平均值當作平均粒徑。 又，關於内部導體的表面粗糙度Ra，係利用微聚焦 (micro focus)X射線電視透視裝置SMX— 160LT(島津製作 所製造）及3維影像測定用之VCT，來測定錐形CT影像（3 16 201032247 維影像），對根據該影像製成之内部導體截面的2維截面影 像，使用影像處理軟體winr〇〇f測定。 進而’幻皮30kV的施加試驗係如述進行：即，利用由 IEC610GG.4.2規定的試驗方法，放電電容為15啊，放電電 阻為330Ω，進行接觸放電，以〇1秒的間隔施加3〇次， 檢查有無斷線。 又’關於實施例1的試樣、與比較例i的試樣，利用 微聚焦X射線的錐形CT影像（3維影像）來觀察内部導體， 檢查内部導體表面的凹凸狀態、及有無貫穿孔。圖3⑷、㈨ 表示實施例i之積層電感的錐形„影像，圖4⑷、㈨表示 比較例1之積層電感的錐形CT影像。又，用同樣的方法檢 查表1的各試樣之貫穿孔的數量。 如表1所示，試樣號碼6之比較例丨的試樣，即，構 成磁I·生體陶瓷層（鐵氧體層）的鐵氧體粒子的粒徑為ίο以 m雖然滿足本發明之基本要件，但内部導體的表面粗糙度 0 Ra超過本發明規定的的範圍，比較粗糙為3 〇 V m，又，内部導體之燒成收縮率的值相對於磁性體陶瓷層 (鐵氧體層）之燒成收縮率的值超過本發明之要件即1〇〜90 /的範圍，較大為1〇〇%，在此積層電感，確認出内部導體 相對於鐵氡體層的收縮較大，内部導體表面的凹凸也變大 (參，’.、圖4(a)) ’在突波試驗會産生斷線。又，在内部導體之 燒成收縮率的值相對於磁性體陶瓷層（鐵氧體層）之燒成收 縮率的值超過90%之該比較例i之積層電感的情況下，如 圖4(b)、表1所示，確認出在内部導體會産生貫穿孔。 17 201032247 又，在試樣號碼7之比較例2的試樣、即内部導體的 表面粗糖度Ra超過本發明之範圍為比較粗Μ的5.5/zm之 積層電感的情況下，如4丨所示，_認出在突波試驗產生 較高比例的斷線。進而’比較例2的試樣之鐵氧體粒子的 粒徑比較大為3.0"m，雖然未特別圖示，但與比較例ι的 試樣之情況相同，確認出在内部導體會産生貫穿孔（參照表 1)。此認為係由於下述原因：即，#鐵氧體粒子的粒徑超過 本發明之範圍（M〜2#m，比較大為3.一，則該粒徑較 Ο 大的鐵氧體粒子會壓追内部電極，内部導體表面的 變大等。 相對於此，在構成磁性體陶竟層(鐵氧體層)的鐵氧體粒 子的粒徑(平均粒徑)為〇.6〜2〇心的範圍、内部導體的表 面粗糙度Ra A 0.1〜2_〇的範圍之實施例卜5之積層電感 的情況下’在突波試驗中未看到產生斷線（試樣數n=i〇〇)。 又，在表1雖然未示出，但確認出在内部導體之燒成 ^缩率相對於磁性體陶究層（鐵氧體層）之燒成 ❹ 擊〜啊，更料4G〜嶋）時，即使構成磁性 體陶兗層（鐵氧體層）之鐵氧體粒子的粒徑（平均粒徑）超過 2m，有時也能獲得在突波試驗中不會産生斷線之積層 電感。 产另π面’雖較佳為構成磁性體陶究層（鐵氧體層）之鐵 乳體粒子的粒徑（平均粒徑）越小，内部導體的凹凸越小，作 達°，1〜則會導致作為積層電感的機械強度 下降、電感下降等，因此不理想。 18 201032247 又，確涊出在内部導體的表面粗链度Ra==10"m、鐵 氧體粒子的粒徑=1//111之實施例i的試樣之情況下，在内 部導體表面沒有形成較大的凹凸，比較平坦（參照圖 3(a)) ’以及也沒有看到産生貫穿孔（參照圖3(^))(參照表丄）。 又’對於試樣號碼2〜5的滿足本發明之要件的實施例 2 5的試樣，也確認出内部導體表面比較平坦，且沒有看 到産生貫穿孔（參照表1)。 又，在本發明，確認出在鐵氧體粒子的粒徑為〇丨〜2.〇 Am的範圍時，即使内部導體之燒成收縮率相對於磁性體陶 瓷層（鐵氧體層）之燒成收縮率未達40%(1〇%以上）時，也能 獲得具備平坦且沒有貫穿孔之内部導體之積層電感（試樣號 碼1)進而，即使内部導體之燒成收縮率相對於磁性體陶 瓷層（鐵氧體層）之燒成收縮率（相對燒成收縮率）為11 % 時，也能獲得具備平坦且沒有貫穿孔之内部導體之特性良 好之積層電感（參照試樣號碼3)。 又在表1雖然沒有特別表示，但若内部導體之燒成 收縮率相對於磁性體陶究層（鐵氧體層）之燒成收縮率（相對 燒成收縮率）未達10%，則能在磁性體陶瓷層（鐵氧體層）看 到産生裂#紋。&係認為由於内部導體&收縮量與磁性體陶 瓷層（鐵氧體層）的收縮量之差變得過大所導致。 燒結後之鐵氧體粒子的粒徑越小，内部導體的凹凸越 小’因此較佳，但若減小至未達〇 bm，則如上述會産生 裂紋或者作為積層電感的強度或電感有較大的下降，因 此不理想。 19 201032247 在上述實施例，以不包含非磁性體層之積層電感為例 進行說明，但本發明也能適用於一部分包含弗磁性體層之 開磁路構造之積層電感等。 又，在上述實施例，雖以積層線圈零件為積層電感時 為例進行說明，但本發明也能適用於積層阻抗元件或積層 變壓器等各種積層線圈零件。 本發明之其他方面不限於上述實施例，關於内部導體 的厚度或磁性體陶瓷層的厚度、製品的尺寸、積層體（磁性 體陶瓷主體）之燒成條件等，能在發明之範圍内作各種應❹ 用、變形。 如上述，根據本發明，能獲得内部導體沒有較大的凹 凸、平坦性、平滑性良好、耐突波性良好之積層線圈零件。 因此，本發明能廣泛適用於以具有在磁性體陶瓷中具 備線圈的構成之積層電感或積層阻抗元件等為代表的各種 積層線圈零件。 【圖式簡單說明】 ❹ 圖1係表示本發明之實施例之積層線圈零件的構成之 前視截面圖。 圖2係說明本發明之實施例之積層線圈零件的主要部 分構成之分解立體圖。 圖3係表示試樣號碼丨（實施例丨）之積層電感的錐形 影像圖，（a)是從斜上方觀察時的CT影像，是從上方觀 察時的CT影像。 20 201032247 圖4係表示試樣號碼6(比較例1)之積層電感的錐形CT 影像圖，（a)是從斜上方觀察時的CT影 察時的CT影像。 疋從上方觀 【主要元件符號說明】 1 磁性體陶瓷層（鐵氧體層） 2 内部導體201032247 VI. Description of the Invention: [Technical Field] The present invention relates to a coil component and a method of manufacturing the same, and more particularly to a coil having a spiral shape in which internal conductors are connected by layers A laminated coil component having a structure inside a bulk ceramic body and a method of manufacturing the same. [Prior Art] In recent years, there has been an increasing demand for miniaturization of electronic components, and the mainstream of the coil components has been transferred to a laminated type formed by laminating an inner conductor for forming a coil and a magnetic layer. In addition, as one of the laminated coil components, a laminated inductor has been proposed to reduce the characteristic of the so-called skin effect caused by the current flowing through the coil portion as the frequency increases, and the effect of the skin effect is reduced (refer to Patent Document 1). ). The laminated inductor satisfies the following requirements: (1) The actual surface length per unit length of the inner conductor is specified within a predetermined range, that is, 1^ (actual surface length/unit length) $丨3; (2) inner conductor of the laminated inductor The effective cross-sectional area per unit cross-sectional area is 〇·9$ (effective cross-sectional area/unit cross-sectional area) of $1〇; (3) The particle size of the metal powder contained in the conductive paste for internal conductor formation is 0.1~ 1.0", and the tap density is *~i〇g/cm3; (4) The ceramic powder 201032247 ''·* (ferrite powder) contained in the ceramic slurry for forming the magnetic layer The particle size is in the range of 01 to 2 5em. That is, the conventional laminated inductor specifies the particle size or knocking degree of the metal powder (Ag #末) contained in the internal electrode, and the ferrite powder in the ceramic material. The particle size, etc., to obtain a smooth internal electrode. However, even if a fine particle of Ag powder or fine ferrite powder is used, there is a problem that the unevenness of the internal conductor after firing becomes large. The inner conductor forms a large convexity, and the flatness and smoothness are reduced. In particular, if the laminated inductance is 〇.6mmx〇3mmx〇3mm, or 〇4mm x〇.2mmx0.2mm as small as small, the influence of the internal conductor unevenness is remarkable. Patent Document 1 JP-A-2004-39957 SUMMARY OF THE INVENTION In order to solve the above problems, the present invention aims to provide a structure in which the internal conductor does not have large unevenness, flatness, smoothness, and surge resistance. In order to solve the above problems, the inventors of the present invention have been able to produce the laminated coil component of the laminated coil component. (4) If the inner conductor is a thin wire having a line width of about 30 m or less, it is difficult to smoothly print, and since i M , the thickness of the dice is also reduced, and the influence of unevenness at the time of printing which is conventionally problem-free is increased. (b) Even if the conductive paste for the internal conductor is printed as smoothly as possible, but the step of firing the laminated body to the right, the firing shrinkage rate of the inner conductor is 201032247. For the magnetic layer of the magnetic layer (ferrite layer) If the shrinkage ratio is too large, the unevenness of the inner conductor may become large, or a through hole may be formed in a part of the inner conductor. (C) On the other hand, the ceramic particles (ferrite particles) constituting the magnetic layer (ferrite layer) will be formed when the firing shrinkage ratio of the inner conductor is too small with respect to the firing rate of the magnetic layer (ferrite layer). When the inner conductor is pressed, as a result, the unevenness of the inner conductor may become large, and a through hole may be formed. (d) When the particle diameter of the ceramic particles (ferrite particles) after sintering is large, the difference in the sintering shrinkage ratio between the inner conductor and the magnetic layer (ferrite layer) has a significant influence on the smoothness of the inner conductor. Further, the inventors have completed the present invention by further conducting experiments and experiments based on these findings. That is, the laminated coil component of the present invention has a spiral coil inside the magnetic body of the Tauman, and the magnetic ceramic body includes a plurality of laminated magnetic ceramic layers, and the magnetic ceramic layer is laminated and mainly composed of Ag. a plurality of inner conductors of the component, wherein the spiral coil is formed by laminating the inner conductors; wherein the magnetic ceramic particles constituting the magnetic ceramic body have a particle diameter of 〇. i 〜 2_0; Zm, the surface roughness Ra of the inner conductor is ο"~2.〇#m. Further, the laminated coil component of the present invention has a spiral coil inside the magnetic ceramic body, and the magnetic ceramic body includes a plurality of laminated magnetic ceramic layers, and the magnetic ceramic layer is laminated and contains Ag as a main component. The plurality of inner conductors 'the spiral coils are formed by interlayer connection of the inner conductors; characterized in that: 201032247 the presence of the inner conductors from the main surface side to the other main surface side through holes The ratio of the inner conductor area is preferably less than or equal to 3 in the plan view. The laminated coil component of the present invention preferably has a particle diameter of 磁性1 of the magnetic ceramic body constituting the magnetic ceramic body. Further, it is preferable to have a requirement relating to the ratio of the through hole and a particle size of the magnetic ceramic particles, and the surface roughness Ra of the inner material body is 〇-1 〜2, 〇" Further, in the method of manufacturing a laminated coil component according to the present invention, the laminated coil component has a spiral coil inside the magnetic ceramic body, and the spiral coil is made of a magnetic material. The layered layer is formed by interlayer connection of an inner conductor mainly composed of Ag; and is characterized in that: the step of forming a ceramic layered body has a layered layer of a magnetic body ceramic sheet, And a plurality of internal conductor patterns for forming the coils. The plurality of internal conductor patterns and the conductor pattern are mainly composed of Ag and the value of the firing shrinkage is the value of the firing shrinkage of the magnetic ceramics. a range of iq~; and a step of forming the magnetic composite ceramic body having a spiral coil inside the K-layered body. The method of manufacturing the laminated coil component of the partial guide is preferably as the inner Tauman main #, 'The value of the firing shrinkage ratio is set to 40% to 90% of the value of the firing shrinkage ratio of the t-magnetic ceramics, and it is preferable to constitute the magnetic body. The magnetic particle diameter of the succeeding 201032247 ceramic particles is 0.1 to 2.0. Preferably, the surface roughness Ra of the inner conductor after firing is 0·1 to 2.0/zm. The inner conductor after firing from a main surface The ratio of the existence of the inner conductor per unit area to the through-hole of the other main surface side is such that the inner conductor area is less than or equal to 3 square feet per square view. [Effect of the invention] The laminated coil component is in the magnetic body The inside of the main body of the ceramic body has a spiral coil, and the magnetic ceramic body has a plurality of magnetic ceramic layers, and a plurality of internal conductors which are magnetically laminated and have Ag as a main component, and a spiral coil system By forming the inner conductors by interlayer connection, the particle size of the inner conductor of the magnetic body constituting the magnetic body is 〇1 to 2.0/zm', and the surface roughness of the inner conductor is Ra. The claw can suppress the inside. The difference in the sintering shrinkage ratio between the I5 conductor and the magnetic layer affects the smoothness of the internal conductor, and it can provide a laminate in which the internal conductor does not have large unevenness, flatness, smoothness, and good surge resistance. Coil parts. Further, the laminated coil component has a spiral coil inside the magnetic ceramic body, and the magnetic ceramic body includes a plurality of magnetic ceramic layers and a plurality of internal conductors that are transparent to the magnetic ceramic layer and have Ag as a main component. The spiral wire is formed by laminating the inner conductors, and the ratio of the area per unit area of the inner conductor penetrating the inner conductor from one main surface side to the other main surface side is a plan view. When the internal conductor area is one or less per 30 " m square, the difference in the sintering shrinkage ratio between the inner conductor and the magnetic layer can be suppressed to affect the smoothness of the inner conductor, and 201032247 can obtain the inner conductor without large unevenness and flatness. Multilayer coil parts with good properties, smoothness and good surge resistance. That is, for example, the composition of the ceramic material (crude raw material) constituting the magnetic ceramic layer, the particle diameter, the pulverization conditions for forming the ceramic green sheet to be slurried, and the formation of the magnetic ceramic body and the crimping of the ceramic raw material are appropriately adjusted. When the sheet is subjected to a pressure-bonding condition, a selection of a sintering aid, a ratio of addition thereof, and the like, when a magnetic ceramic body is formed by a strip having an internal conductor having a large unevenness, flatness, and smoothness, It can satisfy the requirement that the through hole has a square of 3 〇vm inside the inner conductor. In addition, when the ratio of the through-holes existing in the inner conductor of 30 " m square is t ', the laminated conductor parts which have no large unevenness, flatness, smoothness, and good surge resistance are provided for the inner conductor. . Further, it is preferable that when the particle size of the magnetic ceramic particles constituting the main body of the magnetic ceramic body is 〇.1 to 2. 〇"111, it can be more surely satisfied for the inner 4 conductors per 3G // m The ratio of squared through holes is i pieces. Further, when the particle diameter of the magnetic ceramic particles is reduced to a small extent, the strength or the inductance of the laminated inductor is largely lowered, which is not preferable. In addition, when the particle diameter of the magnetic ceramic particles exceeds 2 〇 from m, the unevenness on the surface of the inner conductor tends to increase, which is not preferable. Secondly, when the requirements relating to the ratio of the through-holes and the requirements of the particle size of the magnetic body 〇陶竞~particles are obtained, when the surface roughness of the inner conductor is .~2·0/ζ m It is more reliable that the inner conductor does not have large unevenness, flatness, smoothness, and good resistance to surge. In the manufacturing method of the laminated coil component of the present invention, the value of the firing shrinkage ratio is the value of the firing shrinkage ratio of the magnetic ceramic green sheet as the internal conductor pattern containing Ag as the main component. In the range of %, the step of firing the ceramic laminate including the magnetic ceramic green sheet and the inner conductor pattern, and the magnetic ceramic body having the spiral coil inside is formed to avoid large formation on the inner conductor surface. Concave-convex, it is possible to efficiently manufacture laminated coil parts with good surge resistance. In other words, in the above range, the firing shrinkage ratio of the internal electrode Ag is smaller than the firing shrinkage rate 13 of the ceramic (for example, ferrite) constituting the magnetic ceramic body to avoid formation of large unevenness on the inner conductor surface. . In addition, the content of the conductive component (Ag powder) in the conductive paste for forming the internal conductor, and the type of the varnish and the solvent contained in the conductive paste can be appropriately selected by the firing shrinkage ratio of the internal conductor. Alternatively, it is controlled by adjusting the pressure at the time of pressure-bonding the laminated body of the inner conductor pattern and the ceramic green sheet for magnetic ceramics. Further, as the conductive paste for the internal conductor, a paste having a content of Ag of 80 to 90% by weight is preferable, and more preferably a weight of 100 parts by weight = ◎ ^ Further, regarding the internal conductor pattern (internal conductor) The firing shrinkage behavior can be controlled by adjusting the Ag content of the conductive paste, the amount of organic color developing, the type of varnish, the pressure at the time of pressure bonding, the degreasing and firing profile (ρΓ〇ί> When the value of the firing shrinkage ratio of the conductive paste is set to 10 201032247 in the range of 4 〇 to 9 〇 % of the value of the firing shrinkage ratio of the magnetic ceramic constituting the magnetic ceramic body, the ceramic is baked. The step of competing the layer body can more reliably avoid the formation of large irregularities on the surface of the inner conductor, and the invention can be more effective. Moreover, the magnetic ceramic particles after the firing of the main body constituting the magnetic body are made. When the particle diameter is 0.1 to 2.0 #m, it is possible to more reliably prevent the formation of large unevenness on the surface of the inner conductor. Further, when the surface roughness of the inner conductor after firing is 〜2.0 m, the inner conductor can be suppressed. Sintering shrinkage with magnetic layer The difference affects the smoothness of the internal conductor, and it is possible to more reliably manufacture a laminated coil component in which the internal conductor does not have large unevenness, flatness, smoothness, and good surge resistance. When the ratio of the through-holes per square 〇V m of the inner conductor is one or less, it is possible to prevent the formation of large unevenness on the surface of the inner conductor. [Embodiment] Hereinafter, embodiments of the present invention will be described. The present invention will be described in more detail. [Embodiment 1] Fig. 1 is a cross-sectional view showing a configuration of a laminated coil component (this embodiment 1 is a laminated inductor) according to an embodiment (Embodiment 1) of the present invention, and Fig. 2 An exploded perspective view showing the main part of the structure. As shown in FIG. 1 and FIG. 2, the laminated inductor of this embodiment has a magnetic ceramic body (ferrite body) 5 having a spiral coil 4, and a spiral coil. 4 is an internal layer formed by arranging layers of each magnetic ceramic layer (ferrite layer). 201032247 Conductor 2 is connected by a through hole 3 (Fig. 2). Further, in a magnetic body (ferrite body) 5 The end faces 5a and 5b are provided with external electrodes 6a and 6b so as to be electrically connected to the extraction electrodes 4a and 4b at both ends of the coil 4. The following describes the manufacturing method thereof. (1) First, '48.0 mol% of Fe203 and 29.5 mol are used. % of Zn0, 14.5 mol% of NiO, 8.0 mol% of CuO, the amount of the magnetic material used was wet-mixed using a ball mill for 48 hours to obtain a raw material slurry. Then 'using a spray dryer (spray) Drying the raw material slurry, ◎ at 700. (: pre-sintering for 2 hours to obtain a calcined product. Next, the calcined product was wet-pulverized by a ball mill for 16 hours, and then a predetermined amount of binder was added and mixed. Thereby obtaining the ceramic slurry. Then, the slurry was formed into a sheet shape to obtain a ceramic green sheet having a thickness of 15 / m. (2) Next, after a through hole is formed at a predetermined position of the ceramic green sheet, a conductive paste for forming an internal conductor containing Ag as a main component is printed on the surface of the ceramic green sheet to have a thickness of 14 "m, forming a predetermined Inner conductor pattern. As the conductive paste for forming the inner conductor, the ratio of the Ag powder made of Ag powder, varnish or solvent having an impurity element of not more than 1% by weight to the conductive paste as a whole is 85 weight%. Conductive paste. (3) Then, a ceramic green sheet having the inner conductor pattern formed thereon was laminated, and a ceramic green sheet having no internal conductor pattern formed thereon was laminated on the upper and lower surfaces thereof, and then pressure-bonded at 1000 kgf/cm 2 to obtain a crimp block. Thereby, a spiral coil 4 in which the inner conductor patterns are connected by through holes is formed. At this time, the number of turns of the line 12 201032247 is 7.5 inches. There is no particular limitation on the order of the above-mentioned ceramics tablets, the number of energy, and the number of energy. The layer was formed into a layered form, a laminated sheet, and (4) and then (4) cut into a predetermined size, and after debonding, the mixture was fired at 860 C for 2 hours to obtain a sintered body. At this time, the firing shrinkage ratio of the magnetic ceramic layer (ferrite layer) is Μ % 'The firing shrinkage ratio ❹ of the inner conductor (conductive paste for forming the inner conductor) is 7% 'The firing of the inner conductor The value of the shrinkage ratio is 39% of the value of the firing shrinkage ratio of the magnetic ceramic layer (ferrite layer). The measurement of the firing shrinkage ratio of the magnetic ceramic layer (ferrite layer) is carried out by stacking the ceramic pots under the same pressure conditions as in the actual manufacture of the laminated inductor, and (4) after the predetermined size, α is the same - The conditions were calcined, and the rate of firing shrinkage in the lamination direction was measured using a thermomechanical analyzer (ΤΜΑ). & Further, the measurement of the sintering shrinkage ratio of the inner conductor is carried out as follows: that is, the conductive paste for forming the body is thinly stretched on the glass plate and dried, and then the dried product is taken out and pulverized into powder by the girl. This was placed in a mold, and subjected to uniaxial press forming under the same pressure conditions as those for manufacturing the laminated coil component, and was cut into a predetermined size and then fired to measure the sintering shrinkage rate along the pressing direction. (5) Then, a conductive paste for forming an external electrode is applied to both end portions of a magnetic ceramic body (ferrite body) having a spiral coil inside, and dried, and then fired at 750 ° C. An external electrode is formed. (6) Then, the formed external electrode is subjected to nickel plating (Ni) or tin plating (sn), and 13 201032247 forms a coating film having a lower layer structure having a forged film layer and an upper layer having a money tin film layer. Thereby, as shown in FIG. 1, a laminated inductor having a structure in which external electrodes 6a and 6b are disposed at both end portions 5a and 5b of the magnetic ceramic body (ferrite body) 5 can be obtained. The two ends 4a and 4b of the spiral coil 4 connected by the via hole 3 (Fig. 2) are electrically connected to each other through the magnetic ceramic layer (the inner conductor 2 of the ferrite layer). The size of the laminated inductor is 〇6 mmx. The width of the laminated inductor is the beta laminated inductor of the sample number 1 in Table 1, which is the laminated inductor of the embodiment of the present invention. The particle diameter (average particle diameter) of the magnetic ceramic particles (ferrite particles) of the bulk ceramic layer (ferrite layer) is 1 〇 " m, and the surface roughness Ra of the inner conductor is Ι.Οβηι. Further, the inner conductor The value of the firing shrinkage ratio is 39% of the value of the firing shrinkage ratio of the magnetic ceramic layer (ferrite layer) as described above. Further, in the first embodiment, the laminated inductor of the sample number 丨 is used. In addition, the value of the firing shrinkage of the inner conductor is relative to the magnetic ceramic The value of the firing shrinkage ratio of the (iron sputum layer) was changed in the range of 1 to 1 to produce a laminated inductor of sample numbers 2 to 7. Further, after the firing of the sample numbers 4, 5, and 7' The particle size of the ferrite particles is changed in the range of 〇6 to 3. 〇"m. X 'In the change #The firing shrinkage ratio of the conductor is relative to the firing shrinkage ratio of the magnetic ceramic layer (ferrite layer) In the range of 75 to 9 %, the Ag content of the conductive paste for forming the internal conductor is changed, and the firing temperature is changed to 14 201032247 degrees. The other conditions are the same as the sample number 1 described above. In the same condition, the laminated inductor of the sample numbers 2 to 5 of Table 1 is a laminated inductor of the embodiment of the present invention which satisfies the essential requirements of the present invention. In addition, the sample numbers 6 and 7 of Table 1 are shown. The laminated inductors are the multilayer inductors of the comparative examples (Comparative Examples 1 and 2), and the multilayer inductor of the comparative example does not satisfy the surface roughness Ra of the internal conductor or the firing shrinkage ratio of the internal conductor with respect to the magnetic ceramic layer (ferrite) The shrinkage rate of the bulk layer, etc., is the requirements of the present invention. The laminated inductors of the sample numbers 1 to 7 were examined for the ferrite grain size, the surface roughness of the internal conductor, and the number of through holes of the internal conductor, and the surge test was performed. The results are shown in Table 1. The ratio of the value of the baking shrinkage ratio of the conductive paste (internal conductor) to the value of the firing shrinkage ratio of the magnetic ceramic green sheet (magnetic ceramic layer (ferrite layer)) is shown in Table 1 as " Relative shrinkage of inner conductor with respect to ferrite". ❿ 15 201032247 [Table l] Sample number Conductor paste Ag content (% by weight) Firing temperature rc) Ferrite shrinkage (%) Internal conductor shrinkage ( %) Relative shrinkage of internal conductor with respect to ferrite (%) Ferrite particle size 〇xm) Roughness of internal conductor surface Ra (μιη) Number of through-holes of internal conductor every 30 μπι square (one) Surge test Number of broken lines 1 (Embodiment 1) 85 860 18 7 39 1.0 1.0 0 0/100 2 (Example 2) 80 860 18 16 89 1.0 2.0 0 0/100 3 (Example 3) 89 860 18 2 11 1.0 0.8 0 0/100 > 4 (Embodiment 4) 84 880 20 8 40 2.0 1.9 0 0/100 5 ( Example 5) 85 840 14 7 50 0.6 0.9 0 0/100 6 (Comparative Example 1) 75 860 18 18 100 1.0 3.0 3 4/100 7 (Comparative Example 2) 85 900 22 7 32 3.0 5.5 7 12/100 The particle size measurement of the ferrite particles was carried out as follows: the laminated inductor was cut with a forceps, and the cross section was subjected to SEM observation to measure the SEM particle diameter, and the average value thereof was taken as the average particle diameter. In addition, the surface roughness Ra of the internal conductor is measured by a microfocus X-ray television apparatus SMX-160LT (manufactured by Shimadzu Corporation) and a VCT for three-dimensional image measurement (3 16). 201032247 Dimensional image), the 2D cross-sectional image of the internal conductor cross section made from the image was measured using the image processing software winr〇〇f. Furthermore, the application test of the magic skin 30kV is carried out as follows: that is, using the test method specified in IEC610GG.4.2, the discharge capacity is 15 ah, the discharge resistance is 330 Ω, and the contact discharge is performed, and the application is performed 3 times at intervals of 1 second. , check for broken wires. Further, regarding the sample of the first embodiment and the sample of the comparative example i, the inner conductor was observed by a conical CT image (three-dimensional image) of the microfocus X-ray, and the uneven state of the inner conductor surface and the presence or absence of the through hole were examined. . 3(4) and (9) show the conical image of the multilayer inductor of the embodiment i, and FIGS. 4(4) and 9 show the conical CT image of the multilayer inductor of the comparative example 1. Further, the through holes of the respective samples of Table 1 were examined in the same manner. As shown in Table 1, the sample of the comparative example of sample No. 6, that is, the particle size of the ferrite particles constituting the magnetic I·green ceramic layer (ferrite layer) is ίο although m satisfies The basic requirements of the present invention, but the surface roughness 0 Ra of the inner conductor exceeds the range specified by the present invention, which is relatively rough to 3 〇V m, and the value of the firing shrinkage of the inner conductor is relative to the magnetic ceramic layer (iron The value of the firing shrinkage ratio of the oxygen layer exceeds the range of 1 〇 to 90 / of the present invention, and is larger than 1 〇〇%. Here, the laminated inductor is confirmed to have a large shrinkage of the inner conductor with respect to the samarium layer. The unevenness of the surface of the inner conductor also becomes large (see, '., Fig. 4(a)) 'The breakage occurs in the surge test. Moreover, the value of the firing shrinkage rate of the inner conductor is relative to the magnetic ceramic layer ( Ferrite layer) has a value of firing shrinkage of more than 90% of the laminate of Comparative Example i In the case of the feeling, as shown in Fig. 4 (b) and Table 1, it was confirmed that a through hole was formed in the inner conductor. 17 201032247 Further, in the sample of Comparative Example 2 of sample No. 7, the surface of the inner conductor was a raw sugar. When the degree Ra exceeds the range of the present invention to a coarser 5.5/zm laminated inductor, as shown by 4丨, _ recognizes that a high proportion of broken lines are generated in the surge test. Further, the test of Comparative Example 2 The particle size of the ferrite particles was as large as 3.0 and "m". Although not shown in the drawings, it was confirmed that a through-hole was formed in the inner conductor as in the case of the sample of the comparative example (see Table 1). This is considered to be due to the fact that the particle size of the # ferrite particles exceeds the range of the present invention (M~2#m, which is relatively large, and the ferrite particles having a relatively large particle diameter will be The internal electrode is pressed and the surface of the internal conductor is increased. In contrast, the particle diameter (average particle diameter) of the ferrite particles constituting the magnetic ceramic layer (ferrite layer) is 〇.6~2〇 The range of the surface roughness of the inner conductor Ra A 0.1 to 2 〇 实施 实施 实施 实施 5 No breakage was observed in the surge test (the number of samples n=i〇〇). Further, although not shown in Table 1, it was confirmed that the firing rate of the inner conductor was opposite to that of the magnetic ceramic layer. When the particle size (average particle diameter) of the ferrite particles constituting the magnetic ceramic layer (ferrite layer) exceeds 2 m, there is a case where the ferrite particles of the ferrite layer (ferrite layer) are more than 2 m. It is also possible to obtain a laminated inductor that does not cause a disconnection in the surge test. The yield of the other π-face is preferably the particle size (average particle diameter) of the iron emulsion particles constituting the magnetic ceramic layer (ferrite layer). The smaller the inner conductor is, the smaller the unevenness of the inner conductor is, and the lower the mechanical strength of the laminated inductor, the lower the inductance, etc., which is not preferable. 18 201032247 Further, the surface of the inner conductor is thick. In the case of the sample of the example i of the particle size of the ferrite particle = 1//111, the surface of the inner conductor was not formed with a large unevenness and was relatively flat (see Fig. 3 (a). )) 'and also did not see the through hole (see Figure 3 (^)) (see Table 丄). Further, with respect to the samples of Example 25 which satisfy the requirements of the present invention in Sample Nos. 2 to 5, it was confirmed that the surface of the internal conductor was relatively flat, and no through-holes were observed (see Table 1). Moreover, in the present invention, it has been confirmed that even when the particle diameter of the ferrite particles is in the range of 〇丨2 to 〇Am, the firing shrinkage ratio of the inner conductor is compared with the firing of the magnetic ceramic layer (ferrite layer). When the shrinkage ratio is less than 40% (1% by weight or more), a laminated inductor (sample No. 1) having an inner conductor which is flat and has no through-holes can be obtained, and even if the internal conductor has a firing shrinkage ratio with respect to the magnetic ceramics When the firing shrinkage ratio (relative firing shrinkage ratio) of the layer (ferrite layer) is 11%, it is possible to obtain a laminated inductor having excellent characteristics of a flat conductor having no flat through holes (see sample No. 3). Further, although not particularly shown in Table 1, if the firing shrinkage ratio of the inner conductor is less than 10% with respect to the firing shrinkage ratio (relative firing shrinkage ratio) of the magnetic ceramic layer (ferrite layer), The magnetic ceramic layer (ferrite layer) was seen to have cracks. & is considered to be caused by the excessive difference between the amount of shrinkage of the inner conductor & and the amount of shrinkage of the magnetic ceramic layer (ferrite layer). The smaller the particle diameter of the ferrite particles after sintering, the smaller the unevenness of the inner conductor is, which is preferable, but if it is reduced to less than 〇bm, cracks may occur as described above or the strength or inductance of the laminated inductor may be higher. A big drop, so it is not ideal. 19 201032247 In the above embodiment, the laminated inductor not including the non-magnetic layer is described as an example. However, the present invention is also applicable to a laminated inductor having a structure of a magnetic circuit including a ferromagnetic layer. Further, in the above-described embodiment, the laminated coil component is described as an example of the laminated inductor. However, the present invention is also applicable to various laminated coil components such as a laminated impedance element or a laminated transformer. The other aspect of the invention is not limited to the above embodiment, and the thickness of the inner conductor, the thickness of the magnetic ceramic layer, the size of the product, the firing condition of the laminated body (magnetic ceramic body), and the like can be variously within the scope of the invention. Should be used and deformed. As described above, according to the present invention, it is possible to obtain a laminated coil component in which the internal conductor does not have a large unevenness, flatness, smoothness, and good surge resistance. Therefore, the present invention can be widely applied to various laminated coil parts typified by a laminated inductor or a laminated impedance element having a configuration in which a coil is provided in a magnetic ceramic. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front cross-sectional view showing the configuration of a laminated coil component according to an embodiment of the present invention. Fig. 2 is an exploded perspective view showing the configuration of a main part of a laminated coil component according to an embodiment of the present invention. Fig. 3 is a conical image showing the laminated inductance of the sample number 丨 (Example 丨), and (a) is a CT image when viewed from obliquely above, and is a CT image when viewed from above. 20 201032247 Fig. 4 is a conical CT image showing the laminated inductor of sample No. 6 (Comparative Example 1), and (a) is a CT image at the time of CT observation when viewed obliquely from above.疋View from above [Main component symbol description] 1 Magnetic ceramic layer (ferrite layer) 2 Internal conductor
3 通孔 4 , 線圈 4a、4b 抽出電極 5 磁性體陶瓷主體（鐵氧體主體） 5a、5b磁性體陶瓷主體的端面 6a、6b 外部電極3 through hole 4 , coil 4a, 4b extraction electrode 5 magnetic ceramic body (ferrite body) 5a, 5b magnetic ceramic body end faces 6a, 6b external electrode
21twenty one