TW201030057A - Phenolic hydroxyl group-containing polyimide resin and photosensitive resin composition using same - Google Patents
Phenolic hydroxyl group-containing polyimide resin and photosensitive resin composition using same Download PDFInfo
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- TW201030057A TW201030057A TW98134725A TW98134725A TW201030057A TW 201030057 A TW201030057 A TW 201030057A TW 98134725 A TW98134725 A TW 98134725A TW 98134725 A TW98134725 A TW 98134725A TW 201030057 A TW201030057 A TW 201030057A
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1003—Preparatory processes
- C08G73/1007—Preparatory processes from tetracarboxylic acids or derivatives and diamines
- C08G73/101—Preparatory processes from tetracarboxylic acids or derivatives and diamines containing chain terminating or branching agents
- C08G73/1017—Preparatory processes from tetracarboxylic acids or derivatives and diamines containing chain terminating or branching agents in the form of (mono)amine
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- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
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- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
- C08G73/105—Polyimides containing oxygen in the form of ether bonds in the main chain with oxygen only in the diamino moiety
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- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1057—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
- C08G73/1064—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing sulfur
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- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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- C08G73/1075—Partially aromatic polyimides
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- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1075—Partially aromatic polyimides
- C08G73/1078—Partially aromatic polyimides wholly aromatic in the diamino moiety
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D163/00—Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09D179/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
- C09D179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C09D179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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Abstract
Description
201030057 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種可於驗水溶液進行顯影之正型感光 性聚醯亞胺樹脂組成物。該聚醯亞胺樹脂組成物儲藏穩定 性優異,其硬化物即使不含有函系難燃劑、銻化合物、磷 系化合物,難燃性及耐熱性亦優異且具有充分之可撓性, 因此有用於作為薄型封裝基板用阻焊罩(solder mask)、可撓 性印刷配線板用覆蓋膜(c〇verlay)、多層印刷配線板用層間 絕緣膜、半導體保護(passivati〇n)膜等。 【先前技術】 現在’一部分的民生用印刷配線板以及大部分的產業 用印刷配線板的阻焊層方面,從高精度、高密度的觀點來 看,係使用利用光触刻法(photolithography)進行曝光後,進 行顯影處理而形成圖案,再以熱及/或光照射進行最終硬化 而得之光硬化型樹脂組成物。而考量到環境問題,就顯影 液而言,使用稀鹼水溶液之鹼性顯影型的液狀阻焊罩係成 為顯影液之主流。尤其對於適用於球格陣列(baU gdd打以幻 基板、可撓性基板之阻焊罩、覆蓋膜係要求柔軟性,且就 其材料而言’專利文獻丨中係提出—種組成物,其使用有 由具有柔軟構造之多官能㈣系環氧樹脂與(甲基)丙稀酸 之反應物和多元酸酐進行反應所得之化合物。 另一方面’聚醯亞胺具有 電氣特性、耐藥品性等各種優 電氣、電子零件、半導體、通 耐熱性、難燃性、柔軟性、 異之特性,而被廣泛使用於 訊機器及其之電路零件、週 201030057 邊機器。然而,聚醯亞胺樹脂因為難溶於有機溶劑,因此 採用將其之前驅物即聚醯胺酸塗布於基材,再使塗膜乾燥 後’進行曝光、顯影使之圖案化’接著以35〇〇c左右進行加 熱、脫水之方法(專利文獻2)。專利文獻3中係記載可溶於 /谷劑之嵌段共聚聚醯亞胺組成物’並記載不需進行脫水閉 環即可於鹼水溶液進行顯影之樹脂組成物。 專利文獻1 :日本公開專利:專利第2868丨9〇號公報 ❹ 專利文獻2 :日本公開專利:特開平6-273932號公報 專利文獻3 : W02003/060001號國際公開小冊 【發明内容】 然而,專利文獻1中所揭示之使用有阻焊罩組成物之 硬化物的情況時,雖然感光性優異,可利用稀鹼水溶液進 行顯影,且表面之耐崩裂性獲得改善,但不僅為可燃性, 且可撓性方面亦不足,無法追隨極度的彎曲,此為其問題 所在。 ❹ 又專利文獻2中所揭示之感光性聚醯亞胺前驅物組 成物雖然硬化後之物性優異,但保存穩定性低,且閉環時 脫欠所致之收縮會激烈地發生,此為其問題所在。專利 文獻巾所揭7F之可溶於溶劑之嵌段共聚聚醢亞胺組成物 雖然不需脫水閉環, i~無法滿足顯影性、解像性、密合性 及耐熱性等方面。 本發明之目I & ^ „ 的係提供一種樹脂組成物及其硬化物,該 樹月曰組成物可田庙人 .._ .. 應5日各種電子機器之高機能化’且滿足 難燃性、耐熱性、 機械特性、可撓性等各種特性。 5 201030057 努力研究之結果而完 本發明人等為了解決上述問題 成本發明。 亦即,本發明係關於: …⑴-種含盼性經基之聚酿亞胺樹脂⑷,其係由四元酸 酐⑷为子中具有至少二個胺基與至少一個盼性幾基 之胺基苯㈣合物(b)及二胺基化合物⑷進行共縮合反應所 得者’其中’四元酸二肝⑷之中5莫耳%以上為選自由下述 式(1)所構成群中之1種以上的脂環式四元酸二酐:201030057 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a positive-type photosensitive polyimide resin composition which can be developed in an aqueous solution. The polyimine resin composition is excellent in storage stability, and the cured product is excellent in flame retardancy and heat resistance and has sufficient flexibility even if it does not contain a flame retardant, an antimony compound, or a phosphorus compound. It is used as a solder mask for a thin package substrate, a cover film for a flexible printed wiring board, an interlayer insulating film for a multilayer printed wiring board, a semiconductor protective film, or the like. [Prior Art] In terms of high-precision, high-density, the use of photolithography is a part of the printed wiring board for the people's livelihood and the solder resist layer of most industrial printed wiring boards. After the exposure, a development process is carried out to form a pattern, and then a photocurable resin composition obtained by final curing by heat and/or light irradiation is used. In consideration of environmental problems, in the case of a developing solution, an alkaline developing type liquid solder mask using a dilute aqueous alkali solution is the mainstream of the developing solution. In particular, it is suitable for a ball grid array (baU gdd is used as a magic substrate, a solder mask of a flexible substrate, a cover film system, and a softness is required, and in terms of its material, the patent document) proposes a composition. A compound obtained by reacting a reaction product of a polyfunctional (tetra) epoxy resin having a soft structure with (meth)acrylic acid and a polybasic acid anhydride is used. On the other hand, 'polyimine has electrical properties, chemical resistance, etc. A variety of excellent electrical, electronic components, semiconductors, heat resistance, flame retardancy, softness, and different characteristics, and is widely used in the machine and its circuit parts, week 201030057 side machine. However, because of the polyimide resin It is hardly soluble in organic solvents. Therefore, it is applied to the substrate by using the precursor, ie, polylysine, and then drying the coating film, then performing exposure and development to pattern it. Then heating and dehydrating at about 35 ° C. (Patent Document 2). Patent Document 3 describes a block copolymerized polyamidene composition which is soluble in/treat, and describes that it can be developed in an aqueous alkali solution without performing a dehydration ring closure. Patent Document 1: Japanese Laid-Open Patent Publication No. 2 868 丨 〇 〇 专利 专利 专利 : : : : : : : 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明However, in the case of using a cured product of the solder resist cover composition disclosed in Patent Document 1, although excellent in photosensitivity, development can be carried out using a dilute aqueous alkali solution, and the chipping resistance of the surface is improved, but not only The flammability and the flexibility are insufficient, and it is impossible to follow the extreme bending. This is a problem. ❹ The photosensitive polyimide intermediate precursor composition disclosed in Patent Document 2 is excellent in physical properties after curing. The storage stability is low, and the shrinkage caused by the deflation in the closed loop occurs fiercely, which is the problem. The solvent-soluble block copolymerized polyimide composition disclosed in Patent Document No. 7F does not require dehydration. The closed loop, i~ cannot satisfy the developability, the resolution, the adhesion, the heat resistance, etc. The object of the present invention I & ^ „ provides a resin composition and a cured product thereof. The composition of the tree moon 可 可 庙 庙 . . . . . . . . . . . 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可The present inventors have solved the above problems in order to solve the above problems. That is, the present invention relates to: (1) a kind of aramid resin (4) containing a desired transuretic group, which has at least a tetrabasic acid anhydride (4). The co-condensation reaction of two amine groups with at least one amino group benzene (tetra) compound (b) and diamine compound (4) of the desired group is less than 5 mol% of the tetrabasic acid (4) One or more alicyclic tetrabasic dianhydrides selected from the group consisting of the following formula (1) are selected:
(2) 如上述(1)記載之含酚性羥基之聚醯亞胺樹脂(A),其 中’四元酸二酐(a)係含有式(1)所表示之化合物群以外的四 元酸二酐,且該四元酸二酐係選自由3,3,,4,4,-二苯颯四 後酸二酐、3,3’ ,4,4’ -二苯甲酮四叛酸二酐、3,3’ ,4,4,-聯苯四羧酸二酐及3,3,,4,4’ -二笨基醚四羧酸二酐所構成 群中之1種以上、 (3) 如上述(1)〜(2)中任一項記載之含酚性羥基之聚醯亞 201030057 胺樹脂(A) ’其中,胺基苯酚化合物(b)係選自由3,3’ _二胺 基-4,4,·二羥基二苯颯、3,3’ -二胺基-4,4,·二羥基二苯基 醚、3,3’ _二胺基_4,4,-二羥基聯苯、3,3,_二胺基-4,4, _ 二羥基二苯曱酮、2,2-雙(3-胺基-4-羥基苯基)曱烷、2,2-雙 (3-胺基-4-羥基苯基)乙烷、2,2-雙(3-胺基-4·羥基苯基)丙 烷、1,3-六氟-2,2-雙(3-胺基-4-羥基苯基)丙烷及9,9,_雙(3_ 胺基-4·羥基苯基)苟所構成群中之1種以上、 ❹ 如上述(1)〜(3)中任一項記载之含酚性羥基之聚醯亞 胺樹脂(A) ’其中,二胺基化合物(〇係選自由3,4,_二胺基 二苯基醚、4,4’ -二胺基二苯基醚、3,3,-二胺基二苯砜、 4,4 •二胺基二苯砜、4,4’ _二胺基二苯基甲烷、丨,4_二胺 基苯、1’3-二胺基苯、i,3^_(3_胺基苯氧基)苯、丨_…胺基 本基)-1,3,3-三甲基_1H•茚_5_胺及聚矽氧二胺(siiic〇ne diamine)所構成群中之1種以上、 (5) 如上述⑴〜⑷中任—項記載之含紛性經基之聚醯亞 〇 胺樹脂(A),其之羥基當量為200〜5,000g/eq.、 (6) 種正型感光性聚醯亞胺樹脂組成物,其含有上述 ⑴心中任―項所記載之含盼性經基之聚酿亞胺樹脂⑷、 重氮系正f感光劑⑻及作為任意成分之環氧樹脂⑹、 ⑺一種基材,其係具有上述⑹記載之正型感光性聚醯 亞胺樹脂板成物的層。 發明效果 含有本發明含酚 聚醯亞胺樹脂組成物 性經基之聚醯亞胺樹脂之正型感光性 倚藏穩定性、顯影性及解像性優異, 7 201030057 且可減低顯影時之膜耗損,再者,其之硬化物密合性、耐 溶劑性、耐酸性、耐熱性及難燃性優異,且具有充分之可 撓性。因此’本發明之樹脂組成物及其之硬化物係有用於 薄型封裝基板用阻焊罩、可撓性印刷配線板用覆蓋膜、多 層印刷配線板用層間絕緣膜、半導體保護膜等廣範圍的用 途。 【實施方式】 本發明之含酚性羥基之聚醯亞胺樹脂(A)係由特定構造 之四元酸二酐(a)、一分子中具有至少二個胺基與至少一個 酚性羥基之胺基苯酚化合物(b)及二胺基化合物(c)進行反應 所得。將反應中所用之四元酸二酐(a) 1分子中的酸酐基數目 及四元酸二肝(a)之莫耳數分別定為X及x,將胺基苯盼化 合物(b)l分子中的胺基數目及胺基苯酚化合物(b)i莫耳數 分別定為Y及y ’將二胺基化合物(c)之莫耳數定為z時, 若Xx>Yy+2z時則末端為酸針,若xx<Yy+2z時則末端為 胺。此時,Xx/(Yy+2z)之値較佳為0.5〜2之範圍,更佳為 〇·7〜1.5之範圍。再更佳為該値為0.8以上且小於1時,最 佳為0.9以上且小於1之範圍,此情況時,所得之聚醯亞胺 的兩末端為胺基。當該値低於〇·5、或者高於2時,分子量 小且未反應之原料殘留,無法獲得硬化後之耐熱性、可撓 性等各種特性。又,胺基苯酚化合物(b),較佳之添加方式 係使反應所得之含酚性羥基之聚醯亞胺樹脂的酚性經基 _量成為200〜5,〇〇〇g/eq.之範圍。當低於200g/eq.時,酸性 會變強因而鹼性水溶液顯影時易於發生膜耗損、剝離。當 201030057 高於5,000g/eq.時,鹼性顯影性會大幅降低。 本發明之含酚性羥基之聚醯亞胺樹脂(A)係經由酸酐構 造與胺基之單純脫水縮合反應來合成。因此,用以合成出 具有所要之末端構造(酸酐基或胺基)及羥基當量之含酚性 經基之聚酿亞胺樹脂(A)所必要之四元酸二酐(a)、胺基苯盼 化合物(b)及二胺基化合物(c)之添加量可由(a)〜(c)各別之分 子量與一分子中之酸酐構造數目、胺基數目及酚性羥基數 ^ 目容易地算出。 〇 舉例而言,例如本發明之實施例i中被用作為含酚性 經基之聚酿亞胺樹脂(A)原料之四元酸二酐⑷即 BPDA-H(氫化3,3’ ,4,4’ -聯苯四羧酸二酐,分子量(2) The phenolic hydroxyl group-containing polyimine resin (A) according to the above (1), wherein the tetrabasic acid dianhydride (a) contains a tetrabasic acid other than the compound group represented by the formula (1) a dianhydride, and the tetrabasic acid dianhydride is selected from the group consisting of 3,3,4,4,-diphenylfluorene tetra-acid dianhydride, 3,3',4,4'-benzophenone tetrahydro acid One or more of the group consisting of anhydride, 3,3', 4,4,-biphenyltetracarboxylic dianhydride and 3,3,4,4'-diphenyl ether tetracarboxylic dianhydride (3) The phenolic hydroxyl group-containing polyphthalocyanine 201030057 amine resin (A) as described in any one of the above (1) to (2) wherein the aminophenol compound (b) is selected from 3,3'-diamine 4--4,4,dihydroxydiphenylhydrazine, 3,3'-diamino-4,4,dihydroxydiphenyl ether, 3,3'-diamino-4 4,4,-dihydroxy Biphenyl, 3,3,-diamino-4,4,-dihydroxydibenzophenone, 2,2-bis(3-amino-4-hydroxyphenyl)decane, 2,2-dual ( 3-amino-4-hydroxyphenyl)ethane, 2,2-bis(3-amino-4.hydroxyphenyl)propane, 1,3-hexafluoro-2,2-bis(3-amino group -4-hydroxyphenyl)propane and 9,9,_bis(3_amino-4.hydroxyphenyl)anthracene The phenolic hydroxyl group-containing polyimine resin (A) as described in any one of the above (1) to (3) wherein the diamine compound (the oxime is selected from 3, 4,_Diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3,-diaminodiphenyl sulfone, 4,4 • diaminodiphenyl sulfone, 4, 4 '_Diaminodiphenylmethane, anthracene, 4-diaminobenzene, 1'3-diaminobenzene, i,3^-(3-aminophenoxy)benzene, anthracene-...amine basic group One or more of the groups consisting of -1,3,3-trimethyl-1H•indole-5-amine and siiic〇ne diamine, (5) as in the above (1) to (4) The polyamidamine resin (A) having a heterogeneous group, wherein the hydroxyl equivalent is 200 to 5,000 g/eq., and (6) a positive photosensitive polyimide resin composition, The base material having the above-mentioned (1) a desired base group-containing polyanilin resin (4), a diazo-based positive-f-sensitizer (8), and an epoxy resin (6) or (7) as an optional component, which have the above-mentioned (6) A layer of a positive photosensitive polyimide film formed as described above. Advantageous Effects of Invention The polyimine resin containing the phenolic polyimine resin composition of the present invention is excellent in positive photosensitive stability, developability, and resolution, 7 201030057 and can reduce film loss during development. Further, it has excellent hardenability, solvent resistance, acid resistance, heat resistance, and flame retardancy, and has sufficient flexibility. Therefore, the resin composition of the present invention and the cured product thereof are widely used in a solder mask for a thin package substrate, a cover film for a flexible printed wiring board, an interlayer insulating film for a multilayer printed wiring board, and a semiconductor protective film. use. [Embodiment] The phenolic hydroxyl group-containing polyimine resin (A) of the present invention has a specific structure of tetrabasic acid dianhydride (a), has at least two amine groups in one molecule, and at least one phenolic hydroxyl group. The aminophenol compound (b) and the diamine compound (c) are reacted. The number of acid anhydride groups in the molecule of the tetrabasic acid dianhydride (a) used in the reaction and the number of moles of the tetrabasic acid dihepatic (a) are respectively defined as X and x, and the amine benzene is expected to be a compound (b) The number of amine groups in the molecule and the number of moles of the aminophenol compound (b) i are determined as Y and y ', respectively, when the number of moles of the diamine compound (c) is z, if Xx > Yy + 2z The end is an acid needle, and if xx < Yy + 2z, the end is an amine. In this case, the enthalpy of Xx/(Yy+2z) is preferably in the range of 0.5 to 2, more preferably in the range of 〇·7 to 1.5. More preferably, when the enthalpy is 0.8 or more and less than 1, it is preferably 0.9 or more and less than 1. In this case, both ends of the obtained polyfluorene imide are an amine group. When the enthalpy is less than 〇·5 or higher than 2, the raw material having a small molecular weight and unreacted remains, and various properties such as heat resistance and flexibility after curing cannot be obtained. Further, the aminophenol compound (b) is preferably added in such a manner that the phenolic base group amount of the phenolic hydroxyl group-containing polyimine resin obtained by the reaction is 200 to 5, 〇〇〇g/eq. . When it is less than 200 g/eq., the acidity becomes strong and film loss and peeling tend to occur upon development of the alkaline aqueous solution. When 201030057 is higher than 5,000g/eq., the alkali developability is greatly reduced. The phenolic hydroxyl group-containing polyimine resin (A) of the present invention is synthesized by a simple dehydration condensation reaction of an acid anhydride structure with an amine group. Therefore, the tetrabasic dianhydride (a) and the amine group necessary for synthesizing the phenolic transmissive polyacrylamide resin (A) having a desired terminal structure (an acid anhydride group or an amine group) and a hydroxyl equivalent amount are used. The amount of the benzene-promoting compound (b) and the diamine-based compound (c) can be easily changed from the respective molecular weights of (a) to (c) and the number of anhydride structures in one molecule, the number of amine groups, and the number of phenolic hydroxyl groups. Calculated. For example, for example, in the example i of the present invention, tetrabasic dianhydride (4) which is used as a raw material of the phenolic transmissive base resin (A), BPDA-H (hydrogenated 3, 3', 4) , 4'-biphenyltetracarboxylic dianhydride, molecular weight
306.31)、1分子中具有二個胺基與二個酚性羥基之胺基苯酚 化合物(b)即ABPS(3,3,_二胺基_4,4,-二羥基二笨砜,分子 置280.30)及一胺基化合物(c)即APB-N(1,3-雙-(3-胺基笨氧 基)苯,分子量292.34)之組合中,當欲使含酚性羥基之聚醯 Q 亞胺樹脂(A)的末端為胺時,相對於BPDA-H 1莫耳,使用 ABPS與APB-N合計1莫耳以上、2莫耳以下之量即可。又 此時,為了使含酚性羥基之聚醯亞胺樹脂(A)的酚性羥基當 量為200〜5,000g/eq.之範圍’則當例如相對於bPDA_h 1莫 耳使用ABPS與APB-N合計1莫耳時,使用ABPS約0.06 莫耳以上(未滿1莫耳),當相對於BPDA-H 1莫耳使用ABPS 與APB-N合計1.5莫耳時,使用ABPS約〇 〇7莫耳以上(未 滿1_5莫耳),當相對於BPDA_h 1莫耳使用ABPS與APB-N 合計2莫耳時,使用ABPS約0.09莫耳以上(未滿2莫耳) 9 201030057 本發明中為四元酸二酐(a)必須成分之式(1)所表示之化 合物群之氫化3,3’ ,4,4’ -聯苯四羧酸二酐及氫化均苯四酸 二酐與一般之四元酸二酐的氫化物相比,與胺基之反應性 優異’因此由共縮合反應所得之含酚性羥基之聚醯亞胺樹 脂具有優異之溶劑溶解性與柔軟性。又,配合重氮系正型 感光劑(B)使成為正型感光性聚醯亞胺時,顯影時對鹼水溶 液之溶解性提升,因此顯影時間可縮短,並且可抑制正型 之缺點即膜耗損。又,對於曝光時所用之紫外線的穿透率 亦優異,因此感光劑的反應效率高而可厚膜化。又,伴隨 著四元酸二酐(a)中之該等特定構造的四元酸二酐(氫化 3,3’ ,4,4’ ·聯苯四羧酸二酐及/或氫化均苯四酸二酐)的比 例降低,上述特性亦會低落,因此四元酸二酐(a)中該等特 定構造之四元酸二酐所占之含量通常為5莫耳%以上,較佳 為3〇莫耳%以上’更佳為7()莫耳%以上,再更佳為 •ΒΓ ΟΖ Λ ν 夫 又, 氣化均苯四酸二肝,除了式⑴之化合物群所包人 :化合物以外,異構物有下述式⑺所表示之化合物但二 著反應進行而反應主鏈會 ㈣而反應性會顯著 地變差故不適合使用。 茶 201030057 Ο Ο306.31), an aminophenol compound having two amine groups and two phenolic hydroxyl groups in one molecule (b), ABPS (3,3,-diamino-4 4,4-dihydroxydiphenyl sulfone, molecularly placed 280.30) and a combination of a monoamine compound (c), APB-N (1,3-bis-(3-aminophenyloxy)benzene, molecular weight 292.34), when a polyphenol Q containing a phenolic hydroxyl group is desired When the terminal of the imide resin (A) is an amine, it may be used in an amount of 1 mol or more and 2 mol or less in total of ABPS and APB-N with respect to BPDA-H 1 mole. In this case, in order to make the phenolic hydroxyl equivalent of the phenolic hydroxyl group-containing polyimine resin (A) in the range of 200 to 5,000 g/eq., when, for example, ABPS and APB-N are used with respect to bPDA_h 1 When the total amount is 1 m, use ABPS of about 0.06 m or more (less than 1 m). When using ABPS and APB-N total 1.5 m with respect to BPDA-H 1 Mo, use ABPS about 7 m. Above (less than 1_5 moles), when using ABPS and APB-N total 2 mus relative to BPDA_h 1 Mo, use ABPS about 0.09 m or more (less than 2 m) 9 201030057 In the present invention, it is quaternary Acidic dianhydride (a) The hydrogenated 3,3',4,4'-biphenyltetracarboxylic dianhydride of the compound group represented by the formula (1) and the hydrogenated pyromellitic dianhydride and the general quaternary The hydride of the acid dianhydride is superior to the amine group. Therefore, the phenolic hydroxyl group-containing polyimine resin obtained by the co-condensation reaction has excellent solvent solubility and flexibility. In addition, when the diazo-based positive photosensitive agent (B) is used as the positive photosensitive polyimide, the solubility in the aqueous alkali solution during development is improved, so that the development time can be shortened, and the film which can suppress the positive type is the film. Loss. Further, since the transmittance of the ultraviolet ray used for the exposure is also excellent, the reaction efficiency of the sensitizer is high and the film thickness can be increased. Further, with the specific structure of the tetrabasic acid dianhydride (hydrogenated 3,3', 4,4'-biphenyltetracarboxylic dianhydride and/or hydrogenated tetraphenylene) in the tetrabasic acid dianhydride (a) The ratio of the acid dianhydride is lowered, and the above characteristics are also low. Therefore, the content of the tetrabasic acid dianhydride of the specific structure in the tetrabasic acid dianhydride (a) is usually 5 mol% or more, preferably 3 More than 5% of the molars are more than 7% of the molars of more than 7%, and more preferably ΒΓ ΟΖ Λ ν 又 又 ,, gasification of pyromellitic acid liver, in addition to the compound of formula (1): The isomer has a compound represented by the following formula (7), but the reaction proceeds, and the main chain (4) is reacted, and the reactivity is remarkably deteriorated, so that it is not suitable for use. Tea 201030057 Ο Ο
、〇 (2) 本發明中,用以制、 ❹ 四元酸二酐(a)含有、造含酚性羥基之聚醯亞胺樹脂(A)之 莫耳%以上即可,H〇)所表示之脂環式四元酸二酐至少5 二酐。 以脂環式四元酸二酐亦可併用其他四元酸 "T併用之其他四开赌 一 %酸二酐的具體例可舉出:均苯四酸 軒乙一醇-雙(偏笨三酸肝)、甘油-雙(偏苯三酸肝)單乙 酸醋、1,2,3,4,-丁烷四羧酸一 -, ’ 吸鳗—酐、3,3 ,4,4 _聯苯四羧酸二 酐、3,3,4,4 -二笨甲,四羧酸二酐、3,3’,4,4,聯苯四 羧酸-酐3,3,4,4 二苯基醚四羧酸二酐、2,2-雙(3 4· 去水二缓基苯基)丙烧、2,2_雙(3,4_去讀基苯基)六1丙统、 5-(2,5-二氧四氫-3-呋喃基)-3_甲基環己烯],2二羧酸酐、 3a,4,5,9b-四氫-5-(四氫·2,5-二氧_3_吱n南基)_萘,2<]吱喃 •1,3-二酮、υ,Μ·環己烷四羧酸二酐、雙環(22斗辛·7_ 烯-2,3,5,6-四羧酸二酐及雙環[2.2·2]辛烷_2,3,5,6_四羧酸二 酐等。其中,從溶劑溶解性、對基材之密合性、感光性方 面來看,以3,3 ,4,4 _二苯硬四敌酸二奸、3,3,,4 4,· 二苯甲酮四羧酸二酐、3,3,,4,4, 聯笨四羧酸二’酐或 3,3 ,4,4 -二苯基醚四羧酸二酐為佳。可與該等併用之其 11 201030057 他四元酸二肝可使用1種或混合2種以上。(2) In the present invention, the quaternary acid dianhydride (a) is contained in the quaternary acid dianhydride (a), and the phenolic hydroxyl group-containing polyimine resin (A) may be at least mol%, H〇) The alicyclic tetrabasic dianhydride is represented by at least 5 dianhydride. Specific examples of the alicyclic tetrabasic acid dianhydride may be used in combination with other quaternary acid "T and the other four gambling hexanic acid dianhydride may be mentioned: pyromellitic acid oxetane-double (partially three Acid liver), glycerol-bis(trimellitic acid liver) monoacetic acid vinegar, 1,2,3,4,-butane tetracarboxylic acid mono-, 'sucking-anhydride, 3,3,4,4 _ Pyromellitic dianhydride, 3,3,4,4-di-p-methyl, tetracarboxylic dianhydride, 3,3',4,4,biphenyltetracarboxylic acid-anhydride 3,3,4,4 diphenyl Ether ether tetracarboxylic dianhydride, 2,2-bis(3 4·dehydrated bis-phenyl)propane, 2,2-bis(3,4-disionylphenyl)hexa- 1 propyl, 5 -(2,5-dioxotetrahydro-3-furanyl)-3_methylcyclohexene], 2 dicarboxylic anhydride, 3a, 4,5,9b-tetrahydro-5-(tetrahydro-2, 5-Dioxo_3_吱n南基)_naphthalene, 2<] oxime 1,3-dione, hydrazine, hydrazine·cyclohexane tetracarboxylic dianhydride, bicyclo (22 octane·7-ene- 2,3,5,6-tetracarboxylic dianhydride and bicyclo[2.2.2]octane-2,3,5,6-tetracarboxylic dianhydride, etc. Among them, solvent solubility, denseness to the substrate In terms of compatibility and photosensitivity, 3,3,4,4 _ diphenyl hard tetracarboxylic acid, 3,3,,4 4,·benzophenone tetracarboxylic dianhydride, 3,3 , 4,4, bis-tetracarboxylic acid bis-anhydride or 3,3,4,4-diphenyl ether tetracarboxylic dianhydride is preferred. It can be used together with the 11 201030057 he tetrabasic acid liver Use one type or a mixture of two or more types.
本發明中,用以製造含酚性羥基之聚醯亞胺樹脂之 胺基苯酚化合物(b)只要是一分子中具有至少二個胺基與至 少一個酚性羥基之化合物即可,並無特別限制,較佳例如 為一分子中具有二個胺基與二個酚性羥基之化合物。就可 使用之胺基表盼化合物(b)而言,以3,3,_二胺基_4,4,_二 羥基二苯砜、3,3’ _二胺基_4,4,_二羥基二苯基醚、3,3,_ 二胺基-4,4,-二羥基聯苯、3,3’ _二胺基_4,4,二羥基二苯 曱酮、2,2-雙(3-胺基-4-羥基苯基)甲烷、2,2_雙(3·胺基_4_羥 基笨基)乙燒、2,2-雙(3-胺基-4-羥基苯基)丙烧、13_六氟 -2,2-雙(3-胺基-4-羥基苯基)丙烷及99,_雙(3胺基_4羥基 苯基)芴等為佳,以3,3’ -二胺基-4,4,·二羥基二苯砜、 3,3 _二胺基-4,4,_二羥基二苯曱酮、2,2·雙(3·胺基_4_羥 基苯基)丙烷、1,3-六氟-2,2-雙(3-胺基-4-羥基苯基)丙烷或 9,9 -雙(3_胺基-4-羥基苯基)芴為較佳,以3,3’ -二胺基 〇 -4,4 -一經基二苯礙、3,3’ _二胺基-4,4,-二經基二苯甲酮 或1,3-六氟-2,2-雙(3-胺基-4-羥基苯基)丙烷為更佳。該等胺 基苯酚化合物(b)可使用1種,亦可混合2種以上使用。 本發明中,就用以製造含酚性羥基之聚醯亞胺樹脂(A) 之二胺基化合物(c)而言,除上述胺基苯酚化合物中所包 含之化合物以外,只要是1分子中具有2個胺基之化合物 即可,可使用任一種。可使用之二胺基化合物(c)的具體例 可舉出:間苯二胺、對苯二胺、間甲苯二胺、4,4,-二胺基 二苯基醚、3,3’ -二甲基-4,4’ -二胺基二苯基醚、3,4·-二胺 12 201030057 基二苯基醚、4,4’ -二胺基二苯硫醚、3,3’ -二曱基-4,4’ -二胺基二苯硫醚、3,3’ -二乙氧基-4,4’ -二胺基二苯硫醚、 3,3’ -二胺基二苯硫醚、4,4’ -二胺基二苯甲酮、3,3’ -二 甲基-4,4’ -二胺基二苯甲酮、3,3’ ·二胺基二苯基曱烷、 4,4’ -二胺基二苯基甲烷、3,4’ -二胺基二苯基甲烷、3,3’ -二甲氧基-4,4’ -二胺基二苯硫醚、2,2’ -雙(3-胺基苯基) 丙烷、2,2’ -雙(4-胺基苯基)丙烷、4,4’ -二胺基二苯基亞 ❺ 石風、3,3 -二胺基二苯艰、4,4’ -二胺基二苯礙、1,4-二胺· 基苯、1,3-二胺基苯、1,3-雙-(3-胺基苯氧基)苯、1·(4-胺基 苯基)-1,3,3-三甲基-1Η-茚-5-胺、聯苯胺(benzidine)、2,2’ -二甲基聯苯胺、3,3’ -二甲基聯苯胺、3,3’ -二甲氧基聯苯 胺、3,3’ -二胺基聯苯、對亞二甲苯二胺、間亞二甲苯二胺、 鄰亞二甲苯二胺、2, 2’ -雙(3-胺基苯氧基苯基)丙烷、2,2, -雙(4-胺基苯氧基苯基)丙烷、l,3-雙(4-胺基苯氧基苯基) 苯、1,3’ -雙(3-胺基苯氧基苯基)丙烷、雙(4-胺基-3-甲基苯 ◎ 基)曱烧、雙(4-胺基-3,5-二甲基苯基)甲烧、雙(4-胺基-3-乙 基苯基)甲烧、雙(4-胺基-3,5-二乙基苯基)曱烧、雙(4_胺基 -3-丙基苯基)甲烷、雙(4-胺基-3,5-二丙基苯基)甲烷、聚硬 氧二胺、異氟爾酮二胺、六亞甲基二胺及三甲基六亞甲基 二胺等’但並不限定於該等。其中,較佳為發揮對基材之 密合性、顯影性、可撓性優異之效果的3,4’ -二胺基二苯基 醚、4,4’ -二胺基二苯醚、3,3’ -二胺基二苯砜、4,4’ ·二 胺基二苯礙、4,4 _二胺基二苯基曱烧、1,4 -二胺基苯、1 3· 二胺基苯、1,3-雙-(3-胺基苯氧基)苯、1_(4_胺基笨基)_13 3_ 13 201030057 三甲基-1H-茚-5-胺、聚矽氧二胺或2,2,二甲基聯苯胺;更 佳為3,4’ -二胺基二苯基醚、4,4,-二胺基二苯颯、丨,4-二 胺基苯、1,3-雙_(3_胺基苯氧基)苯或ι_(4-胺基苯基)-1,3,3_ 三甲基-1H-茚_5_胺;尤佳為3,4,-二胺基二苯基醚、或丨,3· 雙-(3-胺基笨氧基)苯。該等二胺基化合物(c)可使用1種, 亦可混合2種以上使用。 就本發明之含酚性羥基之聚醯亞胺樹脂而言,較佳In the present invention, the aminophenol compound (b) for producing a phenolic hydroxyl group-containing polyimine resin is not particularly limited as long as it is a compound having at least two amine groups and at least one phenolic hydroxyl group in one molecule. The limitation is preferably, for example, a compound having two amine groups and two phenolic hydroxyl groups in one molecule. In the case of the amine-based compound (b) which can be used, 3,3,-diamino-4,4,4-dihydroxydiphenyl sulfone, 3,3'-diamino group _4,4,_ Dihydroxydiphenyl ether, 3,3,-diamino-4,4,-dihydroxybiphenyl, 3,3'-diamino-4,4,dihydroxydibenzophenone, 2,2- Bis(3-amino-4-hydroxyphenyl)methane, 2,2-bis(3.amino-4-ylhydroxy)acetophenone, 2,2-bis(3-amino-4-hydroxybenzene Acetylene, 13_hexafluoro-2,2-bis(3-amino-4-hydroxyphenyl)propane and 99,_bis(3amino-4-hydroxyphenyl)anthracene, etc., preferably , 3'-diamino-4,4,dihydroxydiphenyl sulfone, 3,3-diamino-4,4,-dihydroxydibenzophenone, 2,2·bis (3·amino group _ 4-hydroxyphenyl)propane, 1,3-hexafluoro-2,2-bis(3-amino-4-hydroxyphenyl)propane or 9,9-bis(3-amino-4-hydroxyphenyl)芴 is preferred, with 3,3'-diaminopurine-4,4-diaminobenzophenone, 3,3'-diamino-4,4,-di-dibenzophenone or 1 More preferably, 3-hexafluoro-2,2-bis(3-amino-4-hydroxyphenyl)propane. These amino phenol compounds (b) may be used alone or in combination of two or more. In the present invention, the diamine-based compound (c) for producing the phenolic hydroxyl group-containing polyimine resin (A) is, in addition to the compound contained in the above aminophenol compound, in one molecule. Any compound having two amine groups may be used, and any of them may be used. Specific examples of the diamine-based compound (c) which can be used include m-phenylenediamine, p-phenylenediamine, m-toluenediamine, 4,4,-diaminodiphenyl ether, and 3,3'- Dimethyl-4,4'-diaminodiphenyl ether, 3,4·-diamine 12 201030057 bisdiphenyl ether, 4,4'-diaminodiphenyl sulfide, 3,3' - Dimercapto-4,4'-diaminodiphenyl sulfide, 3,3'-diethoxy-4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl Thioether, 4,4'-diaminobenzophenone, 3,3'-dimethyl-4,4'-diaminobenzophenone, 3,3'-diaminodiphenylfluorene Alkane, 4,4'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 3,3'-dimethoxy-4,4'-diaminodiphenyl sulfide , 2,2'-bis(3-aminophenyl)propane, 2,2'-bis(4-aminophenyl)propane, 4,4'-diaminodiphenylarylene, 3 , 3-diaminodiphenyl, 4,4'-diaminodiphenyl, 1,4-diamine-based, 1,3-diaminobenzene, 1,3-bis-(3- Aminophenoxy)benzene, 1(4-aminophenyl)-1,3,3-trimethyl-1Η-indol-5-amine, benzidine, 2,2'-di Benzyl aniline, 3,3'-dimethylbenzidine, 3,3'-dimethoxybenzidine, 3,3'-diaminobiphenyl, p-xylylenediamine, m-xylene Amine, o-xylene diamine, 2, 2'-bis(3-aminophenoxyphenyl)propane, 2,2,-bis(4-aminophenoxyphenyl)propane, l,3 - bis(4-aminophenoxyphenyl)benzene, 1,3'-bis(3-aminophenoxyphenyl)propane, bis(4-amino-3-methylphenyl)pyrene Burned, bis(4-amino-3,5-dimethylphenyl)methane, bis(4-amino-3-ethylphenyl)methane, bis(4-amino-3,5- Diethylphenyl) oxime, bis(4-amino-3-propylphenyl)methane, bis(4-amino-3,5-dipropylphenyl)methane, polystearyldiamine, Isoflurane diamine, hexamethylene diamine, trimethyl hexamethylene diamine, etc. 'but are not limited thereto. Among them, 3,4'-diaminodiphenyl ether and 4,4'-diaminodiphenyl ether, which are excellent in adhesion to a substrate, developability, and flexibility, are preferred. , 3'-diaminodiphenyl sulfone, 4,4'-diaminodiphenyl, 4,4-diaminodiphenyl fluorene, 1,4-diaminobenzene, 1,3-diamine Benzobenzene, 1,3-bis-(3-aminophenoxy)benzene, 1-(4-aminophenyl)_13 3_ 13 201030057 Trimethyl-1H-indole-5-amine, polyoxydiamine Or 2,2, dimethylbenzidine; more preferably 3,4'-diaminodiphenyl ether, 4,4,-diaminodiphenyl hydrazine, anthracene, 4-diaminobenzene, 1, 3-bis-(3-aminophenoxy)benzene or iota-(4-aminophenyl)-1,3,3-trimethyl-1H-indole-5-amine; especially preferably 3,4,- Diaminodiphenyl ether, or hydrazine, 3·bis-(3-aminophenyloxy)benzene. These diamine-based compounds (c) may be used alone or in combination of two or more. For the phenolic hydroxyl group-containing polyimine resin of the present invention, it is preferred
係由四70酸二酐(a)、上述較佳之胺基苯酚化合物(b)及上述 較佳之二胺基化合物(c)的組,合所得者,該四元酸二酐(a)係 選自由式(1)所表示之化合物群之化合物之丨種以上的四元 酸一酐與上述較佳之可併用之其他四元酸酐之混合物;尤 佳為由四元酸二酐(a)、上述較佳之胺基苯酚化合物0)及上 述較佳之二胺基化合物(c)的組合所得者,該四元酸二酐 係選自由式(1)所表示之化合物群之化合物之1種以上。 亦即更具體而舌,尤佳之含酚性羥基之聚醯亞胺樹And a combination of tetrakisic acid dianhydride (a), the above preferred aminophenol compound (b) and the above preferred diamine compound (c), wherein the tetrabasic acid dianhydride (a) is selected a mixture of a tetrabasic acid monoanhydride of a compound of the compound group represented by the formula (1) and a tetravalent acid anhydride which is preferably used in combination with the above; more preferably a tetrabasic acid dianhydride (a), the above The combination of the preferred aminophenol compound 0) and the above-mentioned preferred diamine compound (c) is one or more selected from the group consisting of compounds represented by the formula (1). That is, more specific and tongue, especially the phenolic hydroxyl-containing polyimide tree
月曰(A)係由以下方式所製造而得者:四元酸二酐q)使用選自 由式⑴所表示之化合物群之化合物之i種以上的四元酸: 酐、與3,3’ ,4,4’ -二苯碾四羧酸二酐、33, 44,_二為 甲酮四綾酸二奸、3,3, ,M, _聯苯四叛酸二閉^ 3,3,4,4’-二苯基醚四羧酸二酐之混合物;胺基苯酚化名 物(b)使用 3,3,-二胺基 _4 4, - « * 妝丞4,4 羥基二笨砜、3,3,_二胺邊 -4,4’ -二羥基二苯基醚、3 3, _ _ , 不丞甿U _ 一胺基_4,4, ·二羥基聯苯The cerium (A) is produced by the following method: tetrabasic acid dianhydride q) using one or more kinds of tetrabasic acids selected from the compound group represented by the formula (1): anhydride, and 3, 3' , 4,4'-diphenyl-tetracarboxylic dianhydride, 33, 44, _ two are ketone tetradecanoic acid, 3,3, ,M, _biphenyl tetra-retensive two closed ^ 3,3, a mixture of 4,4'-diphenyl ether tetracarboxylic dianhydride; an amino phenolated name (b) using 3,3,-diamino _4 4, - « * makeup 丞 4,4 hydroxydiphenyl sulfone , 3,3,-diamine side-4,4'-dihydroxydiphenyl ether, 3 3, _ _ , not 丞氓 U _ amino group _4,4, ·dihydroxybiphenyl
— 丞一本甲酮、2,2-雙(3-胺基-4-羥J 本基)甲烧、2,2-雙(3-胺基_4_羥基贫且、,^— 丞 one ketone, 2,2-bis(3-amino-4-hydroxyj-group)-methyl, 2,2-bis(3-amino-4_hydroxy-poor, ^
故暴本基)乙烷、2,2-雙(3-胺J 14 201030057 -4-羥基苯基)丙烷、1,3-六氟·2,2-雙(3-胺基-4-羥基苯基)丙 烧及9,9’ -雙(3-胺基-4-羥基苯基)芴、較佳為3,3,-二胺基 _4,4’ -二羥基二苯颯、3,3’ _二胺基_4,4,_二羥基二苯甲 酮、2,2-雙(3-胺基-4-羥基苯基)丙烷、丨,3_六氟_2,2_雙(3_胺 基-4-羥基苯基)丙烷或9,9’ -雙(3-胺基-4-羥基苯基)芴、 更佳為3,3’ -二胺基-4,4’ -二羥基二苯颯、3,3’ -二胺基 -4,4’ -二羥基二苯曱酮或ι,3_六氟_2,2_雙(3_胺基_4_羥基苯 0 基)丙烷;二胺基化合物(c)使用3,4,-二胺基二苯基醚、 4,4’ -二胺基二苯基醚、3,3’ -二胺基二苯礙、4,4’ -二胺 基一苯礙、4,4 -二胺基二笨基甲烧、1,4-二胺基苯、1,3· 二胺基苯、1,3-雙-(3-胺基苯氧基)苯、ι_(4-胺基苯基)_丨,33 _ 三甲基-1H-茚-5-胺、聚矽氧二胺或2,2,-二曱基聯苯胺、 較佳為3,4 -一胺基二苯基醚、4,4’ -二胺基二苯硬、1,4· 二胺基苯、1,3-雙-(3-胺基苯氧基)苯或ι_(4_胺基苯 基)-1,3,3-三曱基-1H -茚-5-胺、更佳為3,4,-二胺基二苯基 Q 醚或1,3-雙-(3-胺基苯氧基)苯所製造而得者。 本發明之含酚性羥基之聚醯亞胺樹脂(A)可藉由在内醋 與鹼之平衡反應所生成之觸媒的存在下,使四元酸二肝 (a)、胺基苯酚化合物(b)及二胺基化合物(c)進行共縮合反應 而獲得。此時,當併用甲苯、二甲苯等脫水劑時則反應會 進行因而更有效率。藉由此製造方法,可於不用保護官能 基即酚性羥基的情況下’甚至於不會引起酚性經基與其他 反應基(例如酸酐、胺基)進行反應的情況下,容易地製造直 鍵狀的芳香族聚醢亞胺共聚物。雖然也可以是如專利文獻 15 201030057 3所揭示之嵌段共聚物,但由合成之簡便性等來看,非嵌段 共聚物較佳。因此,本發明中通常可藉由一段反應來合成 上述所要之聚醯亞胺。 該反應中,四元酸二酐(a)與二胺成分(胺基苯酚化合物 (b)及二胺基化合物(c))之使用比例較佳係使用上述範圍。當 欲獲得高分子量者時’使用理論當量或者以任一者為1〇莫 耳%以下、較佳為5莫耳%以下之稍微過剩的方式使用為 佳。本發明之含酚性羥基之聚醯亞胺樹脂只要是以上述方 式所合成者’則可使用任何種類,較佳為以二胺成分稍微 過剩(過剩量為〇_1〜5莫耳%左右)的方式所獲得之兩末端為 胺基之聚醯亞胺樹脂。又’胺基笨酚化合物與二胺基化 合物(c)兩者之使用比例(莫耳比例),較佳為相對於胺基苯酚 化合物(b)l莫耳’二胺基化合物莫耳、更佳為 0.1〜2.5莫耳左右。 當以此比例使用時,因應該等化合物之使用比例來決 疋聚酿亞胺樹脂中之各成分的比例。 使用作為上述觸媒之内酯較佳為T·戊内酯,使用作為 上述觸媒之鹼較佳為吡啶、N-曱基嗎啉。 含酚性羥基之聚醯亞胺樹脂(A)合成時所使用之溶劑可 舉出:曱乙酮、曱丙酮、曱基異丙酮、曱丁酮、曱基異丁 酮、曱基正己酮'二乙酮、二異丙酮、二異丁酮、環戊酮、 環己酮、甲基環己酮、乙醯丙鲖、丁内酯、二丙酮醇、 環己稀-1-嗣、二丙醚、二異丙越、二丁醚、四氫吱喃、四 氫"比喃、乙基異戊醚、乙基-第三丁醚、乙基苄基醚、甲酚 16 201030057 基甲基醚、苯甲醚、苯乙醚、乙酸甲酯、乙酸乙酯、乙酸 丙酯、乙酸異丙酯、乙酸丁酯、乙酸異丁酯、乙酸戊酯、 乙酸異戊酯、乙酸2-乙基己酯、乙酸環己酯、乙酸曱基環 己酯、乙酸苄酯、乙醯乙酸曱酯、乙醯乙酸乙酯、丙酸曱 酯、丙酸乙酯、丙酸丁酯、丙酸节酯、丁酸甲酯、丁酸乙 酯、丁酸異丙酯、丁酸丁酯、丁酸異戊酯、乳酸曱酯、乳 酸乙酯、乳酸丁酯、異戊酸乙酯、異戊酸異戊酯、草酸二 〇 乙醋、草酸二丁酯、苯甲酸曱酯、苯甲酸乙酯、苯甲酸丙 酯、水楊酸曱酯、N-甲基吡咯烷酮、N,N_:甲基甲醯胺、 Ν,Ν-一曱基乙酿胺及二曱基亞硬等,但並不限定於該等。 該等溶劑可使用1種亦可混合2種以上使用。此時之溶劑 較佳為會將反應所生成之含酚性羥基之聚醯亞胺樹脂(Α)加 以溶解之溶劑,且較佳為r _丁内酯等_系溶劑、更佳為具 有4〜5員環之環狀酮。 以下更具體說明含酚性羥基之聚醯亞胺樹脂(A)之製造 〇 方法。首先,在氮等惰性氣體環境下,於混合有作為觸媒 之内酯與鹼的上述任一溶劑中,適當添加二胺成分(胺基苯 盼化合物(b)及二胺基化合物(c))及四元酸二酐(a)、以及視 需要添加之用以除去反應中所生成之水之脫水劑,接著於 加熱攪拌下,一邊餾去醯亞胺環形成時所生成之水,一邊 充分進行反應’藉此獲得含酚性羥基之聚醯亞胺樹脂(A)溶 液。此時之脫水劑例如有甲苯、二甲苯等。反應溫度通常 較佳為120〜23(TC。反應時間受到最終所要之聚醯亞胺的聚 合度及反應溫度很大的影響。通常係在依據所要的聚醯亞 17 201030057 胺聚合度而設定之條件下(例如:四元酸二酐(a)與二胺成分 之使用比例及反應溫度等),當隨著反應進行之黏度上昇到 達平衡,到獲得最大分子量為止使反應持續進行為佳,通 常數分鐘〜20小時左右。又,可將所得之溶液投入曱醇及己 烷等貧溶劑中將生成聚合物分離之後,再利用沉澱法進行 精製以除去副產物,藉此獲得高純度之含酚性羥基之聚醯 亞胺樹脂(A)。 上述方式所得之本發明之含酚性羥基之聚醯亞胺樹脂 (A)的數量平均分子量較佳為5000〜50000左右,更佳為 8000〜30000左右,重量平均分子量較佳為30000〜300000左 右,更佳為50000-200000左右,固體成分之羥基當量為 200〜5000g/eq·,較佳為 300~4000g/eq.,更佳為 400〜2000g/eq.,再更佳為 400〜1000g/eq· ’ 最佳為 450〜650g/ eq.。又,數量平均分子量及重量平均分子量係利用膠體過 濾層析法所得之聚乙烯換算出之數値(以下相同)。 接著說明本發明之正型感光性聚醯亞胺樹脂組成物。 本發明之正型感光性聚醯亞胺樹脂組成物係一種含有 本發明之含酚性羥基之聚醯亞胺樹脂(A)及重氮系正型感光 劑(B)之組成物。 本發明之正型感光性聚醯亞胺樹脂組成物中之含酚性 羥基之聚醯亞胺樹脂(A)的含有比例,當以該樹脂組成物之 固體成分為100重量%的情況時,通常為20~95重量%,較 佳為40〜95重量%,更佳為50〜95重量%,再更佳為60〜90 重量%。 18 201030057 本發明之正型感光性聚酿亞胺樹脂組成物中所用之重 氮(diazo)系正型感光劑只要是重氮醌磺酸化合物(重氮 酿續it化合物)的醋等這樣具有偶氮(diazid〇)基,且經由光 照會產生酸,並且可使用於正型顯影之感光劑即可,並不 特別限定。可舉出例如磺酸取代偶氮醌化合物與羥基化合 物之Sb,較佳為重氮醒續酸化合物與經基化合物(較佳為苯 酚化合物)之酯。該酯可舉出重氮苯醌磺醯酯、重氮萘醌磺 ❹ 酿®曰專’較佳為重氮萘酿項酿醋。 重氮(diazo)酿項酸之酯可舉出:丨,2_偶氮笨酿·續酸 酯、1,2-萘醌-2-偶氮(diazido)-5-磺酸酯、1,2-萘醌_2_偶氮-4- 磺酸酯、1,2-萘醌-2-偶氮-5-磺酸酯-鄰甲酚酯及丨,2_萘醌_2_ 偶氮-5-磺酸酯-對曱酚酯等。用作為上述酯之酯化成分(羥基 化合物)較佳為苯酚化合物,可舉出例如:2,4_二羥基二苯 甲酮、2,3,4-三羥基二苯甲酮、2,3,4,4,-四羥基二苯甲酮、 2,2’ ,3,4,4,·五羥基二苯曱酮、苯酚、l53_二羥基苯、1 3 φ 三羥基苯、雙酚A、雙酚F、雙酚S、酚醛樹脂、没食子酸 甲酯、没食子酸乙酯及没食子酸苯酯等。 重氮系正型感光劑(B)之添加量,相對於含酚性羥基之 聚酿亞胺樹脂(A),通常為5〜30重量%、較佳為1〇〜2〇重量 %。 本發明之正型感光性樹脂組成物亦可含有環氧樹脂(C) 作為任意成分。環氧樹脂(C)之添加目的係於鹼性顯影後與 含酚性羥基之聚醯亞胺樹脂(A)中的酚性羥基及末端酸軒基 或末端胺基進行反應。亦即,於圖案化後,使環氧樹脂(c)、 19 201030057 與3酚性羥基之聚醯亞胺樹脂中之上述反應性取代基進 行反應,因而本發明之聚醯亞胺樹脂的交聯密度會增加, 對極性溶劑之耐受性提升,同時對基材之密合性、耐熱性 提升°此時之反應溫度較佳為150〜250°C。 該環氧樹脂(C)只要是1分子中具有環氧基2個以上者 即不特別限定,但從機械強度、難燃性等角度來看,較佳 為具有笨環、聯苯環、萘環這樣的芳香族環的環氧樹脂。 具體而言可舉出:酚醛型環氧樹脂、含亞二甲苯(xylylene) ◎ 骨架之環氧樹脂、含聯苯骨架之環氧樹脂、雙酚A型環氧 樹脂、雙酚F型環氧樹脂、三苯基甲烷型環氧樹脂及乙二 醛(glyoxal)型環氧樹脂,從與含酚性羥基之聚醯亞胺樹脂(A) 之相溶性的觀點來看尤佳為含聯苯骨架之環氧樹脂。 環氧樹脂(C)之添加量’相對於含酚性羥基之聚醯亞胺 樹脂(A)之盼性羥基與末端酸酐基或末端胺基之合計,環氧 樹脂(C)中之環氧基為〇.5當量範圍的量為佳。又,含 盼性經基之聚酿亞胺樹脂(A)中的酚性羥基及酸酐基或胺基 ❹ 的量可由合成含酚性羥基之聚醯亞胺樹脂(A)之際所使用之 四元酸二酐(a)、胺基苯酚化合物(b)及二胺基化合物(c)之莫 耳數、一分子中之酸酐構造的數目、胺基的數目及酚性羥 基的數目來算出。 本發明之正型感光性聚醯亞胺樹脂組成物中之含酚性 經基之聚醯亞胺樹脂(A)與環氧樹脂(C)之重量比例因為會 隨著所使用之化合物的活性氫當量、環氧基當量而變動, 故無法一概而論’一般而言,相對於含酚性羥基之聚醯亞 20 201030057 胺樹脂(A)100重量份(固體成分),環氧樹脂(c)為i5〜2〇〇重 量份,較佳為20〜100重量份,更佳為25〜8〇重量份,再更 佳為30〜70重量份之範圍。 本發明之正型感光性聚醯亞胺樹脂組成物中可視需要 添加熱硬化觸媒來促進含苯酚羥基之聚醯亞胺樹脂(A)與環 氧樹脂(C)之熱硬化反應。熱硬化觸媒可舉出:2·甲基咪唑、 2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基_4,5-二羥基甲基咪 〇 唑、2-苯基_4_甲基-5-羥基甲基咪唑等咪唑類、2-(二甲基胺 基甲基)苯盼、1,8-二氮雜-二環(5,4,0)十一烯_7等三級胺 類、三苯基膦等膦類及辛酸錫等金屬化合物等,較佳為味 圭類。熱硬化觸媒之添加罝’相對於上述環氧樹脂(C)之添 加量為0〜10重量% ’較佳為(M〜7重量%,更佳為〇 2〜5重 量% 〇 本發明之正型感光性t酿亞胺樹脂組成物,從使用時 之便利性來看含有會溶解該聚酼亞胺之溶劑(聚醯亞胺溶解 〇 性溶劑)為佳。該溶劑以被舉例作為合成時使用之溶劑之聚 醯亞胺溶解性溶劑為佳,更佳為γ _ 丁内酯等具有4〜5員環 之環狀酮類。當該聚醯亞胺樹脂組成物為含有溶劑之樹脂 溶液時,相對於該樹脂溶液整體之固體成分的含量為1〇〜65 重量% ’較佳為20〜50重量%,更佳為25〜50重量%。該樹 脂溶液可使用來形成本發明之正型感光性聚醯亞胺樹脂組 成物所構成之膜、層。就該膜或該層之形成而言,可於平 面之光滑基材上塗布該樹脂溶液,並使塗膜於通常為 〜ll〇°C、較佳為60〜100°C之溫度進行乾燥來形成。 21 201030057 本發明之正型感光性聚醯亞胺樹脂組成物視需要亦可 加入滑石、硫酸鋇、碳酸鈣、碳酸鎂、鈦酸鋇、氫氧化鋁、 氧化銘、二氧化矽、黏土等填充劑、Aerosil等搖變劑、 酞菁藍(Phthal〇Cyanine)、酞菁綠、氧化鈦等著色劑、聚矽 氧、氟系的整平劑、消泡劑等。該等係使用佔本發明之正 型感光性聚醯亞胺樹脂組成物(固體成分)中〇〜5〇重量%的 量。 本發月之正型感光性聚酿亞胺樹脂組成物亦可以樹脂 組成物受到支持膜與保護膜以三明治方式包夾而成之構造 所成之乾膜抗姓劑(dry film resist)型態來使用。 本發明之正型感光性聚醯亞胺樹脂組成物(液狀或膜狀) 係有用於作為電子零件之層間絕緣材料、用以連接光零件 間之光學波導或印刷基板用之阻焊劑(s〇lder resist)、覆蓋膜 等光阻材料’此外亦可使用作為濾光片、印刷油墨、配向 膜、密封劑、塗料、塗布劑、接著劑等。 本發月之正型感光性聚醯亞胺樹脂組成物之硬化物係 ❹ 利用於例如光阻膜、增層(build_up)工法用之層間絕緣材料 那樣的電氣、電子零件。該等之具體用途例如:電腦、家 電製。〇、攜帶型機器等。該硬化物層之膜厚為6〇“爪左 右,較佳為5〜100" m左右。 具有本發明之正型感光性聚醯亞胺樹脂組成物之硬化 物的基板可藉由例如以下的方式來獲得。亦即,當使用液 狀之樹脂組成物時,可利用網版印刷法、喷霧法輥塗法、 靜電塗布法、簾塗法等方法,以乾燥後之膜厚為⑼以爪 22 201030057 的方式將本發明之組成物塗布於基板,再使塗膜於通常為 50〜140°C、較佳為60〜12(Γ(:κ溫度進行乾燥,藉此來形成 塗膜〃後透過形成有曝光圖案之光罩,直接或間接地 以通常為10〜20〇〇mJ/cm2之強度對塗膜照射活性能量線再 使用後述之顯影液,利用例如喷霧、搖動浸潰、刷塗 (brushing)、洗滌(scrubbing)等來進行顯影。其後,視需要 照射紫外線,並以通常為100〜25(rc、較佳為14〇〜22〇<)(:之 〇溫度進行加熱處理,藉此獲得具有難燃性優異且滿足耐熱 性、耐溶劑性、耐酸性、密合性、可撓性等各種特性之聚 酿亞胺樹脂組成物硬化膜之基板。 上述活性能量線可舉出紫外線、可見光線、紅外線、 電子線、放射線等,若考量使用用途’則尤佳為紫外線或 電子線。 上述顯影所使用之鹼水溶液可使用氫氧化钾、氫氧化 鈉、碳酸鈉、碳酸鉀、碳酸氳鈉、碳酸氫鉀、磷酸鈉、磷 Q 酸鉀等無機鹼水溶液或四甲基氫化銨、四乙基氫化銨、四 丁基氫化銨、單乙醇胺、二乙醇胺、三乙醇胺等有機鹼水 溶液。 實施例 以下以實施例更具體說明本發明,但本發明並不限定 於以下實施例。 實施例1 於附有攪拌裝置、回流管、水分捕集器及溫度計之 500mL燒瓶中通氮氣後,於其中填入作為溶劑之了 _丁内酯 23 201030057 132.78g、作為觸媒之戊内酯i.i9g及吡啶i.88g、作為 四元酸二酐⑷之BPDA-H(氳化3,3,,4,4,-聯苯四羧酸二 酐、岩谷瓦斯股份有限公司製、分子量3〇6 31)36 41g、作 為胺基苯酚化合物(b)之ABPS(3,3,-二胺基-4,4,-二羥基 二苯颯、日本化藥股份有限公司製、分子量28〇 3〇)16 58g、 作為二胺基化合物(c)之APB-N(1,3-雙-(3-胺基苯氧基)苯、 三井化學股份有限公司製、分子量292.34) 18.50g、作為脫 水劑之曱苯28_66g,再一邊以180〇c 8小時除去反應中所生 成之水一邊進行攪拌,以獲得含有具酚性羥基之聚醯亞胺 樹脂33.6重量%之樹脂溶液(將此溶液定為A_i)。所得之聚 醯亞胺樹脂的羥基當量(固體成分)為568 18g/eq•,苯乙烯換 算之數量平均分子量為22,100,重量平均分子量為1〇9 〇〇〇。 實施例2 ❿ 於附有攪拌裝置、回流管、水分捕集器及溫度計之 5〇〇mL燒瓶中通氮氣後,於其中填入作為溶劑之丁内酯 1 33.99g、作為觸媒之r _戊内酯i 71g及吡啶2 69g、作為 四tl酸二酐(a)之下述式(3)構造所表示之pMDA_Hs(氫化均 苯四酸二酐岩谷瓦斯股份有限公司製、分子量 224.17)38.18g、作為胺基苯酚化合物卬)之ΒΑρΑ(ι,3六氟 雙(3_胺基_4_經基苯基)丙烧曰本化藥股份有限:司 製、分子量366.26)21.28g、作為二胺基化合物⑷之仏二 胺基苯(分子量H)8.14)12.69g、作為脫水劑之甲笨28 9^ 再-邊以180。。“、時除去反應中所生成之水一邊進行攪 拌,以獲得含有具酚性羥基之聚醯亞胺樹脂33 〇重量%之 24 201030057 樹脂溶液(將此溶液定為A-2^所得之聚醯亞胺樹脂之羥基 當量(固體成分)為568.18g/eq.’笨乙烯換算之數量平均分子 量為23,600 ’重量平均分子量為115,〇〇〇。Ethyl, 2,2-bis(3-amine J 14 201030057 -4-hydroxyphenyl)propane, 1,3-hexafluoro·2,2-bis(3-amino-4-hydroxyl) Phenyl)propane and 9,9'-bis(3-amino-4-hydroxyphenyl)fluorene, preferably 3,3,-diamino-4,4'-dihydroxydiphenylhydrazine, 3 , 3' _diamino-4,4,-dihydroxybenzophenone, 2,2-bis(3-amino-4-hydroxyphenyl)propane, anthracene, 3_hexafluoro_2, 2_ Bis(3-amino-4-hydroxyphenyl)propane or 9,9'-bis(3-amino-4-hydroxyphenyl)anthracene, more preferably 3,3'-diamino-4,4 '-Dihydroxydiphenyl hydrazine, 3,3'-diamino-4,4'-dihydroxydiphenyl fluorenone or ι,3_hexafluoro-2,2_bis(3_amino-4_hydroxyl) Benzene)propane; diamine compound (c) using 3,4,-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl , 4,4'-diamino-benzophenone, 4,4-diaminodipyridyl, 1,4-diaminobenzene, 1,3-diaminobenzene, 1,3-double -(3-Aminophenoxy)benzene, iota-(4-aminophenyl)-indole, 33-trimethyl-1H-indole-5-amine, polyoxydiamine or 2,2,-di Mercaptobenzidine, preferably 3,4 - Aminodiphenyl ether, 4,4'-diaminodiphenyl hard, 1,4-diaminobenzene, 1,3-bis-(3-aminophenoxy)benzene or ι_(4-amine Phenyl)-1,3,3-trimethyl-1H-indole-5-amine, more preferably 3,4,-diaminodiphenyl Q ether or 1,3-bis-(3-amine Phenoxy group) is produced by benzene. The phenolic hydroxyl group-containing polyimide resin (A) of the present invention can make the tetrabasic acid (a) and the aminophenol compound in the presence of a catalyst formed by an equilibrium reaction between vinegar and a base. (b) and the diamine-based compound (c) are obtained by a co-condensation reaction. At this time, when a dehydrating agent such as toluene or xylene is used in combination, the reaction proceeds and is thus more efficient. By this manufacturing method, it is possible to easily manufacture a straight portion without causing a reaction of a phenolic thiol group with another reactive group (for example, an acid anhydride or an amine group) without protecting a functional group, that is, a phenolic hydroxyl group. A key-shaped aromatic polyimine copolymer. Although the block copolymer disclosed in Patent Document 15 201030057 3 may be used, the non-block copolymer is preferred from the viewpoint of ease of synthesis and the like. Therefore, in the present invention, the above-mentioned desired polyimine is usually synthesized by a reaction. In the reaction, the use ratio of the tetrabasic acid dianhydride (a) and the diamine component (the aminophenol compound (b) and the diamine compound (c)) is preferably in the above range. When it is desired to obtain a high molecular weight, it is preferred to use a theoretical excess or a slightly excess of 1 mol% or less, preferably 5 mol% or less. The phenolic hydroxyl group-containing polyimine resin of the present invention may be used in any type as long as it is synthesized in the above manner, and it is preferred that the diamine component is slightly excessive (the excess amount is about 〜1 to 5 mol%). The two ends obtained are amine-based polyimine resins. Further, the ratio of use of the 'amino phenol compound and the diamine compound (c) (mole ratio) is preferably relative to the amino phenol compound (b) 1 molar 'diamine compound Mo, more Good for 0.1~2.5 m. When used in this ratio, the proportion of each component in the polyamidene resin is determined by the ratio of use of the compound. The lactone to be used as the above catalyst is preferably T. valerolactone, and the base to be used as the catalyst is preferably pyridine or N-mercaptomorpholine. The solvent used in the synthesis of the phenolic hydroxyl group-containing polyimine resin (A) may be exemplified by: acetophenone, oxime acetone, decyl isopropanone, indolinone, decyl isobutyl ketone, decyl hexanone. Diethyl ketone, diisopropanone, diisobutyl ketone, cyclopentanone, cyclohexanone, methylcyclohexanone, acetophenone, butyrolactone, diacetone alcohol, cyclohex-1-ene, dipropylene Ether, diisopropyl, dibutyl ether, tetrahydrofuran, tetrahydro "pyran, ethyl isoamyl ether, ethyl-tert-butyl ether, ethylbenzyl ether, cresol 16 201030057 methyl Ether, anisole, phenylethyl ether, methyl acetate, ethyl acetate, propyl acetate, isopropyl acetate, butyl acetate, isobutyl acetate, amyl acetate, isoamyl acetate, 2-ethylhexyl acetate Ester, cyclohexyl acetate, decyl cyclohexyl acetate, benzyl acetate, decyl acetate, ethyl acetate, decyl propionate, ethyl propionate, butyl propionate, propionate, Methyl butyrate, ethyl butyrate, isopropyl butyrate, butyl butyrate, isoamyl butyrate, decyl lactate, ethyl lactate, butyl lactate, ethyl isovalerate, isovalerate Ester, oxalic acid Ethyl vinegar, dibutyl oxalate, decyl benzoate, ethyl benzoate, propyl benzoate, decyl salicylate, N-methylpyrrolidone, N, N_: methyl formamide, hydrazine, hydrazine - It is not limited to these. These solvents may be used alone or in combination of two or more. The solvent at this time is preferably a solvent which dissolves the phenolic hydroxyl group-containing polyimine resin (Α) formed by the reaction, and is preferably a solvent such as r-butyrolactone, more preferably 4 ~5 member ring of cyclic ketone. Hereinafter, the method for producing the phenolic hydroxyl group-containing polyimine resin (A) will be more specifically described. First, a diamine component (amino benzene-promoting compound (b) and a diamine-based compound (c) is appropriately added to any of the above solvents in which a lactone and a base as a catalyst are mixed in an inert gas atmosphere such as nitrogen. And the tetrabasic acid dianhydride (a) and the dehydrating agent for removing the water formed in the reaction, if necessary, and then distilling off the water formed by the formation of the quinone ring while heating and stirring. The reaction is sufficiently carried out 'by this to obtain a solution of a phenolic hydroxyl group-containing polyimine resin (A). The dehydrating agent at this time is, for example, toluene, xylene or the like. The reaction temperature is usually preferably from 120 to 23 (TC. The reaction time is affected by the polymerization degree of the final polyimine and the reaction temperature. Usually, it is set according to the desired degree of polymerization of the polyene 17 201030057. Under the conditions (for example, the ratio of the use of the tetrabasic acid dianhydride (a) to the diamine component, the reaction temperature, etc.), when the viscosity increases as the reaction progresses, the reaction proceeds continuously until the maximum molecular weight is obtained. In a few minutes to about 20 hours, the obtained solution can be separated into a poor solvent such as decyl alcohol or hexane to separate the resulting polymer, and then purified by a precipitation method to remove by-products, thereby obtaining a high-purity phenol. The polyhydroxyimine resin (A) having a hydroxyl group. The number average molecular weight of the phenolic hydroxyl group-containing polyimine resin (A) of the present invention obtained in the above manner is preferably from about 5,000 to 50,000, more preferably from 8,000 to 30,000. The weight average molecular weight is preferably about 30,000 to 300,000, more preferably about 50,000 to 200,000, and the hydroxyl equivalent of the solid component is from 200 to 5,000 g/eq., preferably from 300 to 4,000 g/eq., more preferably 40. 0 to 2000 g/eq., more preferably 400 to 1000 g/eq·' is preferably 450 to 650 g/eq. Further, the number average molecular weight and the weight average molecular weight are converted by polyethylene obtained by colloidal filtration chromatography. The following is a description of the positive photosensitive polyimide resin composition of the present invention. The positive photosensitive polyimide resin composition of the present invention is a phenolic hydroxyl group containing the present invention. A composition of a polyimine resin (A) and a diazo-based positive photosensitive agent (B). A phenolic hydroxyl group-containing polyimine resin in a positive photosensitive polyimide resin composition of the present invention ( The content ratio of A) is usually 20 to 95% by weight, preferably 40 to 95% by weight, more preferably 50 to 95% by weight, based on 100% by weight of the solid content of the resin composition. More preferably, it is 60 to 90% by weight. 18 201030057 The diazo-based positive sensitizer used in the positive photosensitive polyimide resin composition of the present invention is a diazonium sulfonic acid compound (diazobenzene) The vinegar of the continuation of the compound) has an azo (dizid) group and is via light. The sensitizing agent which can be used for positive development can be used, and is not particularly limited, and examples thereof include Sb which is a sulfonic acid-substituted azo compound and a hydroxy compound, preferably a diazo sulfonic acid compound and a thiol compound. An ester of a compound (preferably a phenol compound), which may be diazonium sulfonate or diazonaphthoquinone sulfonate®, preferably diazonium. The ester of the acid acid can be exemplified by hydrazine, 2 azo alkaloids, 1,2-naphthoquinone-2-diazido-5-sulfonate, 1,2-naphthoquinone _ 2_Azo-4-sulfonate, 1,2-naphthoquinone-2-azo-5-sulfonate-o-cresol and hydrazine, 2_naphthoquinone-2_azo-5-sulfonate - p-phenolic esters and the like. The esterifying component (hydroxy compound) used as the above ester is preferably a phenol compound, and examples thereof include 2,4-dihydroxybenzophenone, 2,3,4-trihydroxybenzophenone, and 2,3. ,4,4,-tetrahydroxybenzophenone, 2,2',3,4,4,pentahydroxydibenzophenone, phenol, l53_dihydroxybenzene, 1 3 φ trihydroxybenzene, bisphenol A , bisphenol F, bisphenol S, phenolic resin, methyl gallate, ethyl gallate and phenyl gallate. The amount of the diazo-based positive sensitizer (B) to be added is usually 5 to 30% by weight, preferably 1 to 2% by weight, based on the phenolic hydroxyl group-containing polyienimine resin (A). The positive photosensitive resin composition of the present invention may contain an epoxy resin (C) as an optional component. The epoxy resin (C) is added for the purpose of reacting with a phenolic hydroxyl group and a terminal acid or a terminal amine group in the phenolic hydroxyl group-containing polyimine resin (A) after alkaline development. That is, after the patterning, the epoxy resin (c), 19 201030057 is reacted with the above reactive substituent in the polyphenolimine resin of the phenolic hydroxyl group, and thus the crosslinking of the polyimine resin of the present invention The bonding density is increased, the resistance to the polar solvent is improved, and the adhesion to the substrate and the heat resistance are improved. The reaction temperature at this time is preferably 150 to 250 °C. The epoxy resin (C) is not particularly limited as long as it has two or more epoxy groups per molecule, but is preferably a cyclopentene, a biphenyl ring or a naphthalene from the viewpoints of mechanical strength, flame retardancy and the like. An epoxy resin having such an aromatic ring. Specific examples thereof include a phenolic epoxy resin, an epoxy resin containing xylylene ◎ skeleton, an epoxy resin containing a biphenyl skeleton, a bisphenol A epoxy resin, and a bisphenol F epoxy resin. Resin, triphenylmethane type epoxy resin and glyoxal type epoxy resin are preferably biphenyl-containing from the viewpoint of compatibility with a phenolic hydroxyl group-containing polyimine resin (A). Skeleton epoxy resin. The amount of the epoxy resin (C) added is relative to the total of the desired hydroxyl group of the phenolic hydroxyl group-containing polyimine resin (A) and the terminal acid anhydride group or terminal amine group, and the epoxy resin in the epoxy resin (C) The amount of the base is preferably in the range of 5 equivalents. Further, the amount of the phenolic hydroxyl group and the acid anhydride group or the amine group in the polyamidene resin (A) having a desired basis can be used for synthesizing the phenolic hydroxyl group-containing polyimine resin (A). The number of moles of the tetrabasic acid dianhydride (a), the aminophenol compound (b) and the diamine compound (c), the number of anhydride structures in one molecule, the number of amine groups, and the number of phenolic hydroxyl groups are calculated. . The weight ratio of the phenolic transmissive polyimine resin (A) to the epoxy resin (C) in the positive photosensitive polyimide resin composition of the present invention is dependent on the activity of the compound used The hydrogen equivalent and the epoxy equivalent vary, so it cannot be generalized. In general, the epoxy resin (c) is 100 parts by weight (solid content) relative to the phenolic hydroxyl group-containing polyphthalocyanine 20 201030057 amine resin (A). I5 to 2 parts by weight, preferably 20 to 100 parts by weight, more preferably 25 to 8 parts by weight, still more preferably 30 to 70 parts by weight. In the positive photosensitive polyimide resin composition of the present invention, a thermosetting catalyst may be added as needed to promote the thermosetting reaction of the phenolic hydroxyl group-containing polyimine resin (A) and the epoxy resin (C). Examples of the thermosetting catalyst include: 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole, 2- Imidazoles such as phenyl_4-methyl-5-hydroxymethylimidazole, 2-(dimethylaminomethyl)benzene, 1,8-diaza-bicyclo(5,4,0) A metal compound such as a tertiary amine such as monoene-7 or a phosphine such as triphenylphosphine or tin octylate is preferable. The addition amount of the thermosetting catalyst 罝 is 0 to 10% by weight with respect to the epoxy resin (C). It is preferably (M to 7 wt%, more preferably 2 to 5 wt%). The positive photosensitive t-imine resin composition preferably contains a solvent which dissolves the polyimine (polyimine dissolved in an inert solvent) from the viewpoint of convenience in use. The solvent is exemplified as a synthesis. Preferably, the solvent used in the solvent is a polyimine-soluble solvent, more preferably a cyclic ketone having 4 to 5 member rings such as γ-butyrolactone. When the polyimide resin composition is a solvent-containing resin In the case of the solution, the content of the solid component relative to the entire resin solution is from 1 to 65 wt%, preferably from 20 to 50% by weight, more preferably from 25 to 50% by weight. The resin solution can be used to form the present invention. A film or layer composed of a positive photosensitive polyimide resin composition. For the formation of the film or the layer, the resin solution can be applied to a flat smooth substrate, and the coating film is usually used. It is formed by drying at a temperature of ll 〇 ° C, preferably 60 to 100 ° C. 21 201030057 The positive photosensitive polyimide resin composition of the present invention may also be added with a filler such as talc, barium sulfate, calcium carbonate, magnesium carbonate, barium titanate, aluminum hydroxide, oxidized indium, cerium oxide or clay, if necessary. A shaker such as Aerosil, a coloring agent such as Phthal〇Cyanine, phthalocyanine green, or titanium oxide, a polyfluorene oxide, a fluorine-based leveling agent, an antifoaming agent, etc. These systems are used in the present invention. The amount of 〇~5〇% by weight of the photosensitive polyimide composition (solid content). The positive photosensitive polyimide resin composition of this month may also be supported by a support film and a protective film. The dry film resist type formed by sandwiching the structure is used. The positive photosensitive polyimide resin composition (liquid or film) of the present invention is useful. It is used as an interlayer insulating material for electronic components, an optical waveguide for connecting optical components, a solder resist for printed circuit boards, a photoresist material such as a cover film, and the like as a filter or printing ink. , alignment film, sealant, coating , a coating agent, an adhesive, etc. The cured product of the positive-type photosensitive polyimide resin composition of the present month is used for electrical purposes such as a photoresist film or an interlayer insulating material for a build-up process. The specific use of the electronic component is, for example, a computer or a home appliance, a portable device, etc. The film thickness of the cured layer is 6 〇 "about the claw, preferably about 5 to 100 " m. The substrate of the cured product of the positive photosensitive polyimide resin composition can be obtained, for example, in the following manner. That is, when a liquid resin composition is used, a screen printing method or a spray roll can be used. By a coating method, an electrostatic coating method, a curtain coating method, or the like, the composition of the present invention is applied to a substrate by a film thickness of (9) after drying, and the coating film is usually 50 to 140 ° C. Preferably, it is 60 to 12 (Γ (: κ temperature is dried, thereby forming a coating film and then passing through a photomask formed with an exposure pattern, directly or indirectly with an intensity of usually 10 to 20 μm/cm 2 The coating film is irradiated with an active energy ray and then developed using the latter. The liquid is developed by, for example, spraying, shaking, brushing, scrubbing, or the like. Thereafter, ultraviolet rays are irradiated as needed, and heat treatment is performed at a temperature of usually 100 to 25 (rc, preferably 14 Å to 22 Å), thereby obtaining excellent flame retardancy and satisfying heat resistance. The substrate of the cured film of the polyi-imine resin composition having various properties such as solvent resistance, acid resistance, adhesion, and flexibility. Examples of the active energy ray include ultraviolet rays, visible rays, infrared rays, electron beams, radiation, and the like. It is especially preferable to use ultraviolet rays or electron wires for the purpose of use. The aqueous alkali solution used for the above development may be potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium cesium carbonate, potassium hydrogencarbonate, sodium phosphate or phosphorus. An aqueous solution of an inorganic alkali such as potassium acid or an organic alkali solution such as tetramethylammonium hydride, tetraethylammonium hydride, tetrabutylammonium hydride, monoethanolamine, diethanolamine or triethanolamine. EXAMPLES Hereinafter, the present invention will be more specifically described by way of examples. However, the present invention is not limited to the following examples. Example 1 After a nitrogen gas was passed through a 500 mL flask equipped with a stirring device, a reflux tube, a moisture trap, and a thermometer, it was filled therein. Solvents _butyrolactone 23 201030057 132.78g, as a catalyst for the lactone i.i9g and pyridine i.88g, as a tetrabasic dianhydride (4) BPDA-H (氲化3,3,,4,4 ,-biphenyltetracarboxylic dianhydride, manufactured by Iwatani Gas Co., Ltd., molecular weight 3〇6 31) 36 41 g, ABPS (3,3,-diamino-4,4, as the aminophenol compound (b) -Dihydroxydiphenyl hydrazine, manufactured by Nippon Kayaku Co., Ltd., molecular weight 28〇3〇) 16 58g, APB-N (1,3-bis-(3-aminophenoxy) as diamine compound (c) Benzene, manufactured by Mitsui Chemicals Co., Ltd., molecular weight: 292.34) 18.50 g, 28-66 g of toluene as a dehydrating agent, and stirred while removing water generated in the reaction at 180 ° C for 8 hours to obtain phenolic properties. a hydroxyl group-containing polyimine resin (33.6 wt% of a resin solution (this solution is designated as A_i). The obtained polyiminoimine resin has a hydroxyl equivalent (solid content) of 568 18 g/eq•, and the number average molecular weight in terms of styrene It is 22,100 and has a weight average molecular weight of 1〇9 〇〇〇. Example 2 附 with stirring device, return pipe, moisture trap and temperature After passing nitrogen gas through a 5 mL flask, 1 33.99 g of butyrolactone as a solvent, 71 g of r-valerolactone i as a catalyst, and 69 g of pyridine were used as tetradecanoic acid dianhydride (a). The pMDA_Hs (manufactured by hydrogenated pyromellitic dianhydride lava gas granules, molecular weight 224.17) 38.18 g, which is an aminophenol compound 卬) (ι, 3 hexafluoride) represented by the following formula (3) (3_Amino_4_Phenylphenyl)-propanone oxime Chemical Co., Ltd. Limited: system, molecular weight 366.26) 21.28g, as the diamine compound (4) 仏diaminobenzene (molecular weight H) 8.14) 12.69 g, as a dehydrating agent, a stupid 28 9^ and then - with 180. . "When the water formed in the reaction is removed, the mixture is stirred to obtain a 23 201030057 resin solution containing 33% by weight of the phenolic hydroxyl group-containing polyimine resin (this solution is obtained as A-2^). The hydroxyl equivalent (solid content) of the imine resin was 568.18 g/eq. The number average molecular weight in terms of stupid ethylene was 23,600 'the weight average molecular weight was 115, 〇〇〇.
(3) 實施例3 於附有攪拌裝置、回流管、水分捕集器及溫度計之 5 0 OmL燒瓶中通氮氣後,於其中填入作為溶劑之7 _ 丁内酯 132.40g、作為觸媒之戊内酯i.〇3g及吡啶i.62g、作為 四元酸二酐(a)之DSDA(3,3,,4,4’ -二苯砸1四叛酸二酐、新 日本理化股份有限公司製、分子量358.28)34.90g、 BPDA-H(氫化3,3’ ,4,4’ ·聯苯四羧酸二酐岩谷瓦斯股份 有限公司製、分子量306.3 1)1.5 8g、作為胺基苯酚化合物(b) 之ABFL(9,9’ -雙(3-胺基-4-羥基苯基)芴、日本化藥股份有 限公司製、分子量380.44 )24.73g、作為二胺基化合物(c)之 4,4’ -二胺基二苯颯(分子量248.30)10.09g、作為脫水劑之 甲苯28.57g,再一邊以180°C 8小時除去反應中所生成之水 一邊進行攪拌,以獲得含有具酚性羥基之聚醯亞胺樹脂33.8 重量%之樹脂溶液(將此溶液定為A-3)。所得之聚醯亞胺樹 25 201030057 脂之羥基當量(固體成分)為520.〇g/eq.,苯乙烯換算之數量 平均分子量為19,800,重量平均分子量為97,2〇(^ 實施例4 於附有攪拌裝置、回流管、水分捕集器及溫度計之 500mL燒瓶中通氮氣後,於其中填入作為溶劑之^ 丁内酯 132.85g、作為觸媒之^ -戊内g旨i.22g及u比咬i.93g、作為 四元酸二酐(a)之BTDA(3,3 ’ ,4,4,_二苯曱酮四叛酸二 酐、daicel化學工業股份有限公司製、分子量 ❹ 322.23)37.28g、PMDA-HS(氫化均苯四酸二肝、岩谷瓦斯股 伤有限公司製、分子量224.17) 1.3 7g、作為胺基苯酚化合物 (b)之BAA(2,2-雙(3-胺基-4-經基苯基)丙烧、日本化藥股份 有限公司製、分子量258.32)16.68g、作為二胺基化合物(c) 之TMDA(l-(4-胺基苯基)-l,3,3-三甲基_ιΗ-茚_5_胺、日本純 良藥品股份有限公司製、分子量266.38)16 21g、作為脫水 劑之甲苯28.68g,再一邊以18(TC8小時除去反應中所生成 之水一邊進行攪拌,以獲得含有具酚性羥基之聚醯亞胺樹 ❹ 脂33.6重量%之樹脂溶液(將此溶液定為A_4)。所得之聚醯 亞胺樹脂之羥基當量(固體成分)為52〇.〇g/eq,苯乙烯換算 之數量平均分子量為26,200,重量平均分子量為122〇〇〇。 實施例5 於附有攪拌裝置、回流管、水分捕集器及溫度計之 5〇〇mL燒瓶中通氮氣後,於其中填入作為溶劑之丁内酯 133.21g、作為觸媒之戊内酯i.37g及吡啶2丨、、作為 四元酸二酐(a)之BPDA-H(氫化3,3,,4,4, _聯笨四羧酸二 26 201030057 針、岩谷瓦斯股份有限公司製、分子量306 31)41 96g、作 為胺基苯酚化合物(b)之ABPS(3,3,-二胺基-4,4,-二羥基 二苯爾、曰本化藥股份有限公司製、分子量280.30)2.40g、 作為二胺基化合物(勾之3 4,_〇Da(3,4,-二胺基二苯基 謎、JFE化學股份有限公司製、分子量200.24)2 7.3 6g、作 為脫水劑之甲苯28.76g,再一邊以180°C8小時除去反應中 所生成之水一邊進行攪拌,以獲得含有具酚性羥基之聚醯 ❾ 亞胺樹脂33.4重量%之樹脂溶液(將此溶液定為a_5)。所得 之聚醯亞胺樹脂之羥基當量(固體成分)為39〇〇g/eq,苯乙 稀換算之數量平均分子量為9,400,重量平均分子量為 61,000。 比較例1 於附有攪拌裝置、回流管、水分捕集器及溫度計之 500mL燒瓶中通氮氣後’於其中填入作為溶劑之7 _丁内醋 132.76g、作為觸媒之戊内酯l.i8g及η比α定i.87g、作為 0 四元酸二酐⑷之ODPA(3,3,,4,4,-二苯基醚四缓酸二 酐、manac公司製、分子量310_22)36.64g、作為胺基苯齡 化合物(b)之ABPS(3,3’ -二胺基-4,4,-二羥基二苯砜、曰本 化藥股份有限公司製、分子量280.30)16.59g、作為二胺基 化合物(c)之APB-N(1,3-雙-(3-胺基苯氧基)苯、三井化學股 份有限公司製、分子量292.34) 18.27g、作為脫水劑之曱苯 28.66g,再一邊以180°C8小時除去反應中所生成之水一邊 進行攪拌,以獲得含有具酚性羥基之聚醯亞胺樹脂33.6重 量%之樹脂溶液(將此溶液定為R-1)。所得之聚醯亞胺樹脂 27 201030057 之經基當量(固體成分)為568.1 8g/eq.,苯乙稀換算之數量平 均分子量為20,200,重量平均分子量為101,500。 實施例6〜10 將作為含酚性羥基之聚醯亞胺樹脂之實施例1、2、3、 4 及 5 中所得之樹脂溶液(Α-1)、(Α-2)、(Α-3)、(Α-4)&(Α-5)、 作為重氮系正型感光劑之DTEP-350(2,3,4,4’ -四羥基二苯 甲酮之1,2 -萘酿_2_偶氣-5-績酸S旨化物、daitochemix股份有 限公司)、作為環氧樹脂之NC-3000(含聯苯骨架之環氧樹 ❹ 脂、曰本化藥股份有限公司製、環氧基當量28〇g/eq.、軟化 點為60°C)以及作為硬化促進劑之2-苯基-4,5-二羥基甲基 p米。坐(2PHZ)以表1所示之配合比例(單位為「重量份」;只要 不特別定義皆為重量份)加以混合以獲得本發明之正型感光 性聚醯亞胺樹脂組成物。 比較例2 將作為比較用之聚醯亞胺樹脂之比較例1中所得之樹 脂溶液(R-1)、做為重氮系正型感光劑之DTEP-350、作為環 氧樹脂之NC- 3〇〇〇以及作為硬化促進劑之2PHZ以表1所 示之配合比例加以混合以獲得比較用之正型感光性聚醯亞 胺樹脂組成物。 28 201030057 表1 實施例6 實施例7 實施例8 實施例9 實施例10 比趁例2 A-1 10.00 A-2 10.00 A-3 10.00 A-4 10.00 A-5 10.00 R-1 10.00 Λ CA DTEP-350 0.50 0.50 0.50 0.50 0.50 NC-3000 1.32 1.32 1.32 1.32 1 *50 2PHZ 0.02 0.02 0.02 0.02 1 0.02 (ι)印刷基板上之乾燥樹脂膜的形成、顯影及硬化與其 之評價 Ο 利用網版印刷法將上述正型感光性聚醯亞胺樹脂組成 物以乾燥時膜厚成為20 的方式塗布於印刷基板,並以 100C之熱風乾燥器將塗膜乾燥3〇分鐘,以獲得於基板上 膜厚為20 之乾燥樹脂膜。使用該乾燥樹脂膜進行以下 之評價試驗。 ❹ (1)黏性(tackiness) 利用後述方法評價所得之乾燥樹脂膜的黏性,並將評 價結果不於表2。 (2)顯影性及解像性 接著將描繪有L/S=25 β m/25 /zm圖案之光罩密合於上 述所得之基板上的乾燥樹脂膜,並使用紫外線曝光裝置 (ORC製作所股份有限公司、型號hmw-680GW)照射積算光 量1000mJ/Cm2之紫外線。照射後以3重量%氫氧化鈉水溶 液進行120秒、2.〇kg/cm2加壓之加壓顯影,再施以水洗以 29 201030057 除去紫外線照射部位之樹脂。以後述之方法針對所得之顯 影後樹脂膜的轉印圖案評價顯影牲及解像性,將評價社果 示於表2。 w (3)密合性、塗膜減少率、耐溶劑性、耐酸性、耐熱性' 耐PCT性及耐熱衝擊性 以180 c之熱風乾燥器將上述顯影後之樹脂膜加熱的 为鐘,並使之硬化,使用所得之樹脂硬化膜,以後述方法 針對上述各項目進行評價,並將評價結果示於表2。 (II) 於聚醯亞胺膜基板之基板翹曲及彎曲性評價 上述⑴中,除了將印刷基板變更為厚度25"m之聚醯 亞胺膜以外,係以與上述⑴相同之方法於聚醯亞胺膜上製 作樹脂硬化膜,以後述方法評價所得之膜的翹曲(基板翹曲) 及彎曲性’並將評價結果示於表2。 (III) 樹脂硬化膜之難燃性評價 上述(I)中,除了將印刷基板變更為PET膜以外,係以 與上述(I)相同之方法作成樹脂硬化膜,再從基材之ΡΕτ膜 僅剝除樹脂硬化膜。以後述方法評價所得之樹脂硬化膜的 難燃性,並將評價結果示於表2。 上述(I)~(III)之試驗方法及評價方法如下。 (i)黏性 以脫脂棉擦於塗布於印刷基板之乾燥後的樹脂膜上, 並以下述基準評價黏性。 〇…脫脂棉無法黏上去 X…脫脂棉的棉絮黏在膜上 30 201030057 (ii) 顯影性 以目視觀察顯影中的樹脂膜外觀,評估到曝光部的樹 脂組成物完全除去為止之時間。 (iii) 解像性 以顯微鏡觀察顯影、水洗後之樹脂膜的轉印圖案外 觀,並以下述基準評價解像性。 〇…未曝光部位未剝離,且直線狀的圖案邊緣再現 ❾ X…未曝光部位發生剝離,或圖案邊緣呈波浪狀 (iv) 密合性 依據JIS K5400 ’於基板上之樹脂硬化膜製作見 方之棋盤格1〇〇個後,進行利用玻璃紙膠帶(cellophane tape)之剝離(peeling)試驗,並以下述基準評價密合性。 〇…無剝離。 △…雖無剝離但棋盤格的邊緣呈鋸齒狀。 X.·· 1/100個以上剝離。 〇 (V)塗膜減少率 評價經顯影及18 0 °C加熱6 0分鐘後之樹脂硬化膜的厚 度相對於印刷基板上之乾燥樹脂膜之厚度的減少率。 (vi)耐溶劑性 將印刷基板上之樹脂硬化膜於室溫下浸潰於N_曱基。比 洛烧酮30分鐘。將其取出並確認外觀上有無異常後,進行 利用玻璃紙膠帶之剝離試驗,並以下述基準評價耐溶劑性。 〇…表面無異常,且亦無膨脹或剝離。 △…表面粗糙,但無膨脹或剝離。 31 201030057 X----有膨服或剝離。 (vii) 耐酸性 將印刷基板上之樹脂硬化膜於室溫下浸潰於3.5 %鹽酸 水溶液30分鐘。將其取出並確認外觀上有無異常後,進行 利用玻璃紙膠帶之剝離試驗,並以下述基準評價耐酸性。 〇…表面無異常,且亦無膨脹或剝離。 △…表面粗糙,但無膨脹或剝離。 X··..有膨脹或剝離。 (viii) 耐熱性 於印刷基板上之樹脂硬化膜塗布松香系助焊劑(flux)& 於270。(:之焊料槽進行10秒幻次之浸潰。放冷至室溫後, 進行利用玻璃紙膠帶之剝離試驗,並以下述基準評價耐熱 性。 〇…表面無異常,且亦無膨脹或剝離。 △…表面粗糙,但無膨脹或剝離。 X —有膨服或剝離。 (ix) 耐 PCT 性 將印刷基板上之樹脂硬化膜浸潰於丨2丨C、2大氣壓之 良中96小時。將其取出確認外觀上有無異常後,進行利 用破璃紙膠帶之剝離試驗,並以下述基準評價耐性。 (PCT : Pressure Cooker Test) 〇·..表面無異常,且亦無膨脹或剝離。 X. · ·.有膨服或剝離。 (X)耐熱衝擊性 201030057 對於印刷基板上之樹脂硬化膜實施以-55 °C x30分鐘及 125°C x30分鐘作為1循環之熱履歷1〇〇〇循環後,以顯微鏡 觀察表面外觀,並以下述基準評價耐熱衝擊性。 〇...表面無發生崩裂者。 X.·,.表面有發生崩裂者。 (xi) 基板翹曲 以目視觀察具有樹脂硬化膜之聚醯亞胺膜的外觀,並 以下述基準評價基板的龜曲情況。 ϋ ¥ 〇…於膜未見到翹曲。 △…於膜見到極些微的紐曲。 X·.··於膜見到翹曲。 (xii) 彎曲性 將具有樹脂硬化膜之聚酿亞胺膜彎曲丨度,以目視 觀察外觀’並以下述基準評價彎曲性。 〇..·於樹脂硬化膜未見到裂痕。 X...於樹脂硬化膜發生裂痕。 p (xiii)難燃性 將從PET膜剝離下來之樹脂硬化膜切成丨cin寬之短方 形後’觀察靠近燃燒器之火時之動靜,並以下述基準評價 難燃性。 〇…未燃燒,或一離開燃燒器即瞬間媳滅。 X··.即使離開了燃燒器仍會燃燒—段時間。 33 201030057 表2 實施例6 實施例7 實施例8 實施例9 實施例10 比較例2 黏性 〇 0 〇 〇 〇 〇 顯影性 1.2分鐘 1.1分鐘 1.5分鐘 1.5分鐘 1.8分鐘 2分鐘 仍無法顯影 解像性 〇 〇 〇 〇 〇 X 密合性 〇 〇 〇 〇 〇 △ 塗膜減少率 9.2% 8.5% 10.5% 12.5% 12.5% 35.0% 耐溶劑性 〇 〇 〇 〇 Δ △ 耐酸性 〇 〇 〇 〇 0 〇 对熱性 〇 〇 〇 〇 0 Δ 耐PCT性 〇 〇 〇 〇 〇 〇 对熱衝擊性 〇 〇 〇 〇 〇 〇 基板翹曲 〇 〇 △ Λ 〇 Δ 弩曲性 〇 〇 〇 〇 〇 〇 難燃性 〇 〇 〇 〇 〇 〇 由上述結果可明瞭到,本發明之含酚性羥基之聚醢亞 胺樹脂合成容易,且使用有其之正型感光性樹脂組成物圖 案化容易’與基板之密合性、難燃性及耐熱性優異,具有 充分之可撓性。 (產業利用性) 含有本發明含酚性羥基之聚醯亞胺樹脂之正型感光性 · 聚醯亞胺樹脂組成物儲藏穩定性、顯影性及解像性優異, 且可減少顯影時之膜耗損,再者其之硬化物的密合性、耐 溶劑性、耐酸性、耐熱性及難燃性優異,且具有充分之可 撓性。因此,本發明之樹脂組成物及其之硬化物係有用於 薄型封裝基板用阻焊罩、可撓性印刷配線板用覆蓋膜、多 層印刷配線板用層間絕緣膜、半導體保護膜等廣泛的範圍。 雖參照特定態樣詳細說明本發明,但本發明技術領域 中具有通常知識者皆知到可在不脫離本發明精神與範圍之 34 201030057 下進行各種變更與修改。 又,本申請係基於2008年10月14日申請之曰本專利 申請(日本特願20〇8·264926),並經引用而援用其整體。又’ 此處所引用之所有的參考部分係整體沿用於本發明。 【圖式簡單說明】 無 【主要元件符號說明】 無 ❹(3) Example 3 After passing nitrogen gas through a 50 OmL flask equipped with a stirring device, a reflux tube, a moisture trap, and a thermometer, 132.40 g of 7-butyrolactone as a solvent was charged therein as a catalyst. Valerolactone i.〇3g and pyridine i.62g, DSDA as a tetrabasic acid dianhydride (a) (3,3,,4,4'-diphenylfluorene 1 tetra-retensive dianhydride, New Japan Physical and Chemical Co., Ltd. Company, molecular weight 358.28) 34.90g, BPDA-H (hydrogenated 3,3',4,4'-biphenyltetracarboxylic dianhydride rock valley gas company, molecular weight 306.3 1) 1.5 8g, as an aminophenol compound (b) ABFL (9,9'-bis(3-amino-4-hydroxyphenyl)anthracene, manufactured by Nippon Kayaku Co., Ltd., molecular weight 380.44) 24.73 g, as the diamine compound (c) 4,0-diaminodiphenyl hydrazine (molecular weight: 248.30), 10.09 g, toluene (28.57 g) as a dehydrating agent, and further stirred while removing water formed in the reaction at 180 ° C for 8 hours to obtain a phenolic property. Hydroxyl polyimide resin 33.8 wt% resin solution (this solution was designated as A-3). The resulting polyiminoimine tree 25 201030057 has a hydroxyl equivalent weight (solid content) of 520. 〇g/eq., a number average molecular weight of 19,800 in terms of styrene, and a weight average molecular weight of 97,2 〇 (^ Example 4 After a nitrogen gas was passed through a 500 mL flask equipped with a stirring device, a reflux tube, a water trap, and a thermometer, 132.85 g of the lactone was used as a solvent, and the catalyst was used as a catalyst. u bite i.93g, as quaternary acid dianhydride (a) BTDA (3,3 ',4,4,_dibenzophenone tetrahydro acid dianhydride, manufactured by Daicel Chemical Industry Co., Ltd., molecular weight 322 322.23 37.28g, PMDA-HS (manufactured by pyromellitic acid dihepatic acid, Iwatani Gass Co., Ltd., molecular weight 224.17) 1.3 7g, BAA as an aminophenol compound (b) (2,2-bis(3-amine) 4--4-phenylphenyl)propane, manufactured by Nippon Kayaku Co., Ltd., molecular weight 258.32) 16.68 g, TMDA (1-(4-aminophenyl)-l, as the diamine compound (c), 3,3-Trimethyl_ιΗ-茚_5_amine, manufactured by Nippon Pure Pharmaceutical Co., Ltd., molecular weight 266.38) 16 21g, toluene 28.68g as a dehydrating agent, and 18 (TC) The water formed in the reaction was removed while stirring for 8 hours to obtain a resin solution containing 33.6 wt% of a polyamidimine resin having a phenolic hydroxyl group (this solution was designated as A_4). The obtained polyimine resin The hydroxyl equivalent (solid content) was 52 〇g/eq, the number average molecular weight in terms of styrene was 26,200, and the weight average molecular weight was 122 Å. Example 5 was equipped with a stirring device, a reflux tube, and moisture trapping. After passing nitrogen gas through a 5 〇〇 mL flask of a thermometer and a thermometer, 133.21 g of butyrolactone as a solvent, i.37 g of valerol as a catalyst, and pyridine 2 oxime were added as a tetrabasic acid dianhydride ( a) BPDA-H (hydrogenation 3,3,,4,4, _ phenyl stearic acid hexahydrate 26 26 201030057 needle, manufactured by Iwatani Gas Co., Ltd., molecular weight 306 31) 41 96 g, as an aminophenol compound (b) ABPS (3,3,-diamino-4,4,-dihydroxydiphenyl, manufactured by Sakamoto Chemical Co., Ltd., molecular weight 280.30) 2.40 g, as a diamine compound (Hook 3 4, _ 〇Da (3,4,-diaminodiphenyl mystery, manufactured by JFE Chemical Co., Ltd., molecular weight 200.24) 2 7.3 6g, as The toluene was 28.76 g of toluene, and the mixture was stirred while removing water formed in the reaction at 180 ° C for 8 hours to obtain a resin solution containing 33.4% by weight of a polyaniline resin having a phenolic hydroxyl group. For a_5). The obtained polyiminoimine resin had a hydroxyl equivalent (solid content) of 39 〇〇g/eq, a number average molecular weight of 9,400 in terms of styrene, and a weight average molecular weight of 61,000. Comparative Example 1 After passing nitrogen gas through a 500 mL flask equipped with a stirring device, a reflux tube, a moisture trap, and a thermometer, '13.76 g of 7-butylic vinegar as a solvent was added thereto, and a lactone as a catalyst was added. I8g and η ratio i.87g, ODPA (3,3,4,4,-diphenyl ether tetra-hypo-dianhydride, manufactured by Manac, molecular weight 310_22) as 0-tetrabasic acid dianhydride (4) 36.64g ABPS (3,3'-diamino-4,4,-dihydroxydiphenyl sulfone, manufactured by Sakamoto Chemical Co., Ltd., molecular weight 280.30) as an aminophenyl compound (b), 16.59 g, as two APB-N (1,3-bis-(3-aminophenoxy)benzene, manufactured by Mitsui Chemicals, Inc., molecular weight: 292.34) of the amine compound (c), 18.27 g, and 28.66 g of toluene as a dehydrating agent. Further, while stirring the water formed in the reaction at 180 ° C for 8 hours, stirring was carried out to obtain a resin solution containing 33.6% by weight of a polyimine resin having a phenolic hydroxyl group (this solution was designated as R-1). The base equivalent (solid content) of the obtained polyimine resin 27 201030057 was 568.1 8 g/eq., and the average molecular weight in terms of styrene was 20,200, and the weight average molecular weight was 101,500. Examples 6 to 10 Resin solutions (Α-1), (Α-2), (Α-3) obtained in Examples 1, 2, 3, 4 and 5 as a phenolic hydroxyl group-containing polyimine resin. ), (Α-4)&(Α-5), DTEP-350 (2,3,4,4'-tetrahydroxybenzophenone 1,2-naphthalene) as a diazo-based positive sensitizer _2_Oto-5-acid acid S, daitochemix Co., Ltd.), NC-3000 as an epoxy resin (epoxy tree resin containing biphenyl skeleton, manufactured by Sakamoto Chemical Co., Ltd., The oxy equivalent weight is 28 〇g/eq., the softening point is 60 ° C), and the 2-phenyl-4,5-dihydroxymethyl p-m which is a hardening accelerator. The sitting (2PHZ) was mixed in the proportion shown in Table 1 (the unit is "parts by weight"; unless otherwise specified, parts by weight) to obtain a positive photosensitive polyimide resin composition of the present invention. Comparative Example 2 A resin solution (R-1) obtained in Comparative Example 1 as a comparative polyimide resin, DTEP-350 as a diazo-based positive sensitizer, and NC-3 as an epoxy resin. 〇〇 and 2PHZ as a hardening accelerator were mixed at a mixing ratio shown in Table 1 to obtain a positive photosensitive polyimide resin composition for comparison. 28 201030057 Table 1 Example 6 Example 7 Example 8 Example 9 Example 10 Comparative Example 2 A-1 10.00 A-2 10.00 A-3 10.00 A-4 10.00 A-5 10.00 R-1 10.00 Λ CA DTEP -350 0.50 0.50 0.50 0.50 0.50 NC-3000 1.32 1.32 1.32 1.32 1 *50 2PHZ 0.02 0.02 0.02 0.02 1 0.02 (I) Formation, development and hardening of a dried resin film on a printed circuit board and evaluation thereof Ο Using screen printing method The positive-type photosensitive polyimide resin composition was applied to a printing substrate so as to have a film thickness of 20 at the time of drying, and the coating film was dried in a hot air dryer of 100 C for 3 minutes to obtain a film thickness of 20 on the substrate. Dry resin film. The following evaluation test was carried out using this dried resin film. ❹ (1) tackiness The viscosity of the obtained dried resin film was evaluated by the method described later, and the evaluation results were not shown in Table 2. (2) Developability and resolution Next, a dry resin film in which a mask having an L/S=25 β m/25 /zm pattern is adhered to the substrate obtained above is used, and an ultraviolet exposure apparatus (ORC Manufacturing Co., Ltd.) is used. Co., Ltd., model hmw-680GW) irradiates ultraviolet light with an integrated light quantity of 1000mJ/cm2. After the irradiation, the mixture was subjected to pressure development with a 3% by weight aqueous sodium hydroxide solution for 120 seconds and 2. 〇kg/cm2, and then washed with water to remove the resin of the ultraviolet irradiation portion at 29 201030057. The developing method and the resolution of the transfer pattern of the obtained resin film after the evaluation were evaluated by the method described later, and the evaluation results are shown in Table 2. w (3) Adhesiveness, film reduction rate, solvent resistance, acid resistance, heat resistance PCT resistance and thermal shock resistance The resin film after development is heated in a hot air dryer of 180 c, and The obtained resin cured film was used, and the above-mentioned respective items were evaluated by the method described later, and the evaluation results are shown in Table 2. (II) Evaluation of warpage and bendability of the substrate on the polyimide film substrate In the above (1), in addition to changing the printed substrate to a polyimide film having a thickness of 25 " m, the same method as in the above (1) was used for the polymerization. A resin cured film was formed on the quinone imine film, and warpage (substrate warpage) and bendability of the obtained film were evaluated by the method described later, and the evaluation results are shown in Table 2. (III) Evaluation of flame retardancy of the resin cured film In the above (I), except that the printed substrate was changed to a PET film, a resin cured film was formed in the same manner as in the above (I), and only the substrate was formed from the film. Strip the resin cured film. The flame retardancy of the obtained resin cured film was evaluated by the method described later, and the evaluation results are shown in Table 2. The test methods and evaluation methods of the above (I) to (III) are as follows. (i) Adhesiveness The dried resin film applied to the printed circuit board was wiped with absorbent cotton, and the tackiness was evaluated by the following criteria. 〇...The absorbent cotton cannot be adhered to X. The cotton wool of the absorbent cotton is adhered to the film. 30 201030057 (ii) Developability The appearance of the resin film in development was visually observed, and the time until the resin composition of the exposed portion was completely removed was evaluated. (iii) Resolution The appearance of the transfer pattern of the resin film after development and water washing was observed under a microscope, and the resolution was evaluated by the following criteria. 〇...The unexposed part is not peeled off, and the linear pattern edge is reproduced ❾X...The unexposed part is peeled off, or the edge of the pattern is wavy (iv) Adhesiveness is made according to JIS K5400' Resin cured film on the substrate. After one checkerboard was placed, a peeling test using a cellophane tape was performed, and the adhesion was evaluated by the following criteria. Oh... no peeling. △... Although there is no peeling, the edge of the checkerboard is jagged. X.·· 1/100 or more peeling. 〇 (V) Coating film reduction rate The decrease rate of the thickness of the cured resin film after development and heating at 180 ° C for 60 minutes with respect to the thickness of the dried resin film on the printed substrate was evaluated. (vi) Solvent resistance The resin cured film on the printed substrate was immersed in N_fluorene at room temperature. More than 30 minutes of ketone. After the film was taken out and the appearance was confirmed to be abnormal, the peeling test by the cellophane tape was carried out, and the solvent resistance was evaluated by the following criteria. 〇...The surface is free of abnormalities and there is no swelling or peeling. △...The surface is rough, but there is no swelling or peeling. 31 201030057 X----With expansion or peeling. (vii) Acid resistance The resin cured film on the printed substrate was immersed in a 3.5% aqueous hydrochloric acid solution at room temperature for 30 minutes. After the film was taken out and the appearance was confirmed to be abnormal, the peeling test by the cellophane tape was performed, and the acid resistance was evaluated by the following criteria. 〇...The surface is free of abnormalities and there is no swelling or peeling. △...The surface is rough, but there is no swelling or peeling. X··.. has swelling or peeling. (viii) Heat resistance The resin cured film on the printed substrate was coated with a rosin-based flux & (The solder bath was subjected to a 10 second phantom dipping. After cooling to room temperature, the peeling test by the cellophane tape was performed, and the heat resistance was evaluated by the following criteria. 〇 The surface was free from abnormalities and there was no swelling or peeling. △...The surface is rough, but there is no expansion or peeling. X—Expansion or peeling. (ix) PCT resistance The resin cured film on the printed substrate is immersed in 丨2丨C, 2 atmospheres for 96 hours. After the removal was confirmed to have an abnormality in appearance, a peeling test using a paper-breaking tape was performed, and the resistance was evaluated by the following criteria. (PCT: Pressure Cooker Test) 〇·.. The surface was free from abnormalities and did not swell or peel. ································································································ The surface appearance was observed with a microscope, and the thermal shock resistance was evaluated on the basis of the following criteria: 〇...The surface was not cracked. X.·,. The surface was cracked. (xi) The substrate was warped to visually observe the resin cured film. Polyimine film The appearance was evaluated on the basis of the following criteria: ϋ ¥ 〇... No warpage was observed on the film. △... The film was slightly inferior to the film. X····The film was warped. Xii) Flexibility The bending property of the polyimide film having the cured resin film was observed, and the appearance was visually observed and the flexibility was evaluated by the following criteria. 〇.. No crack was observed in the cured film of the resin. The resin cured film is cracked. p (xiii) Flame retardancy The resin cured film peeled off from the PET film is cut into a short square of 丨 cin width, and then the movement near the burner is observed, and the flame retardancy is evaluated on the basis of the following criteria. 〇...Unburned, or quenched as soon as it leaves the burner. X··. Burns even if it leaves the burner for a period of time. 33 201030057 Table 2 Example 6 Example 7 Example 8 Example 9 Implementation Example 10 Comparative Example 2 Viscosity 〇0 〇〇〇〇 developability 1.2 minutes 1.1 minutes 1.5 minutes 1.5 minutes 1.8 minutes 2 minutes still unable to develop resolution 〇〇〇〇〇X adhesion 〇〇〇〇〇△ Coating film Reduction rate 9.2% 8.5% 10.5% 12.5% 12.5% 35.0% Resistant to dissolution Properties 〇〇〇〇Δ △ Acid resistance 〇〇〇〇0 〇 Thermal 〇〇〇〇0 Δ PCT resistance 热 Thermal shock 〇〇〇〇〇〇 substrate warpage 〇〇 Λ 〇 〇 Δ 弩 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 〇〇〇〇〇〇 The patterning of the resin composition is easy to be excellent in adhesion to a substrate, flame retardancy, and heat resistance, and has sufficient flexibility. (Industrial use) The positive photosensitive property of the polyimine resin containing the phenolic hydroxyl group of the present invention. The polyimide polyimide resin composition is excellent in storage stability, developability, and resolution, and can reduce film during development. The wear and tear are excellent in adhesion, solvent resistance, acid resistance, heat resistance, and flame retardancy, and have sufficient flexibility. Therefore, the resin composition of the present invention and the cured product thereof are widely used in a solder mask for a thin package substrate, a cover film for a flexible printed wiring board, an interlayer insulating film for a multilayer printed wiring board, and a semiconductor protective film. . While the invention has been described in detail with reference to the specific embodiments of the present invention, it will be understood that various modifications and changes can be made without departing from the spirit and scope of the invention. Further, the present application is based on a patent application filed on Oct. 14, 2008 (Japanese Patent Application No. Hei. Further, all of the reference portions cited herein are used in their entirety. [Simple description of the diagram] None [Key component symbol description] None ❹
3535
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JP5773116B2 (en) * | 2009-12-03 | 2015-09-02 | Jsr株式会社 | Liquid crystal aligning agent and liquid crystal display element |
JP5526766B2 (en) * | 2009-12-25 | 2014-06-18 | Jsr株式会社 | Radiation-sensitive resin composition, interlayer insulating film and method for forming the same |
JP5641652B2 (en) * | 2011-03-31 | 2014-12-17 | 日本化薬株式会社 | Photosensitive resin composition |
JP6085920B2 (en) * | 2012-09-10 | 2017-03-01 | 日立化成株式会社 | Photosensitive resin composition, film adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, and semiconductor device |
KR102091796B1 (en) * | 2012-09-27 | 2020-03-20 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Polyimide resin composition |
EP3286605B1 (en) | 2015-04-21 | 2023-06-28 | FujiFilm Electronic Materials USA, Inc. | Photosensitive polyimide compositions |
JP2017025163A (en) * | 2015-07-17 | 2017-02-02 | Jnc株式会社 | Resin solution composition and polyimide film |
JP6718678B2 (en) * | 2015-12-25 | 2020-07-08 | ソマール株式会社 | Polyimide copolymer and molded product using the same |
CN108780275B (en) * | 2016-03-28 | 2022-11-08 | 东丽株式会社 | Photosensitive film |
DE102016114661A1 (en) | 2016-08-08 | 2018-02-08 | Wobben Properties Gmbh | Tower segment, tower section, tower, wind turbine and method for producing a tower segment and connecting tower segments |
JP7259475B2 (en) * | 2019-03-27 | 2023-04-18 | 東レ株式会社 | Photosensitive resin composition, photosensitive resin composition film, and semiconductor device using these |
CN112180685B (en) * | 2020-10-28 | 2024-06-25 | 武汉柔显科技股份有限公司 | Positive photosensitive resin composition, cured film and pattern processing method of cured film |
CN115315463B (en) * | 2021-03-08 | 2023-06-20 | 杰富意化学株式会社 | Polyimide resin, method for producing same, polyimide resin solution, coating material, and molding material |
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JP4639697B2 (en) * | 2004-08-31 | 2011-02-23 | 新日本理化株式会社 | Imide group-containing diamine, imide group-containing polyimide precursor, positive photosensitive resin composition containing the precursor, method for producing positive pattern, and electronic component |
JP2006100241A (en) * | 2004-09-06 | 2006-04-13 | Mitsubishi Gas Chem Co Inc | Solid polyelectrolyte membrane |
WO2007052540A1 (en) * | 2005-11-01 | 2007-05-10 | Jsr Corporation | Photosensitive resin composition |
US20090202793A1 (en) * | 2006-07-11 | 2009-08-13 | Nippon Kayaku Kabushiki Kaisha | Photosensitive, Aqueous Alkaline Solution-Soluble Polyimide Resin and Photosensitive Resin Composition Containing the same |
WO2008153101A1 (en) * | 2007-06-15 | 2008-12-18 | Nissan Chemical Industries, Ltd. | Resin composition for forming heat-cured film |
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