201026948 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種非接觸式驅動裝置，尤指一種結合 磁力與聲波效應產生驅動力之非接觸式驅動裴置設計。 【先前技術】 -項具有作動能力的產品，其構造基本上必須藉由馬 達提供驅動源，因&，馬達在現代科技發展上，佔有舉足 輕重的地位。隨著科技不斷的接 _ ^ ❹ 文个斲的精進，馬達的研發也逐漸地 朝向微小化及精密化等方向發展入 寸刀问發展。現今馬達也不再侷限應 用於簡單的控制及驅動功 勒功用冋時因微小化及精密化的發 展趨勢’馬達之設計也必須具備有高精密定位、微小震動、 靜音等特性，是故，傳統的電磁式馬達難以達到前述特性 的需求，因而有了超音波馬達的研發。 有關前述的超音波馬達，概可區分接觸式超音波馬達 及非接觸式超音波馬達兩大類，其中： 所述的接觸式超音波馬達，其主要係利用機械式振動 技術手段產生驅動源，相較於-般電磁式馬達，該接觸式 超音波馬達因無電磁干播的 -Γ、，、* m 丁慢的問逋’可以適用於如：醫療儀 器等需要避免電磁埸笙搭’、 尤电域W等環境中使用，且該接觸式超音波馬 達具有高精密定位的功@ _ 月b，以及無聲、低速高扭矩等功能 特性，特別適詩微小型結構的技術領域，如：資訊產品、 醫學工程及監視系統等等。 准月J述接觸式超音波馬達設計，因係利用機械式振動 的技術手奴產生驅動源，由於機械式振動機構中的摩擦現 象造成能量損耗，及合吝 ^ Λ 3產生熱，使付该超音波馬達的能量 201026948 轉換效率偏低，以及伟用I入庙镗从 使π°ρ紐等缺點，而且，接觸式超 曰波馬達之動態模型非常複 系統參數易於操作溫度、 貝戰及施加於動子盘定早ΜΙΑ — 疋子間的靜向力所影響，導致快速精 岔疋位控制方面較為困難。 拍立=述的非接觸式超音波馬達，其係為改善前述接觸式 超曰波馬達摩擦驅動技術的缺 t、丄π赞的。該非接觸式超 日波馬達的特色，其構造設計係 ^ ΗΗ .. 4丹疋千間無互相接 m 參 觸的關係’並利用聲波效應原理（neaMie丨d acoustic levitation，NFAL)產生驅動源來推動動子做連續運動。 亦即利用動子與定子間的介質（如：空氣或液體等）產生擾 2驅動動子運動，且因動子與定子間並無摩擦損耗及教 產生，使得該非接觸式超音波馬達具有優於 ： 馬達運轉效能》 惟前述非接觸式超音波馬達是近十年才開始研 術領域，目前_的研究尚未完4，例如：可對動 之浮力低、推動力量低、易受外I +播 ’、 h外界干擾、以及易產生行動 方向以外的振動，巾導致動子移動轉偏料問題， 有效地克服，造成其動子之運動較不平順。 ° 【發明内容】 本發明之主要目的在於提供一種非接觸式驅動裝置， 希藉設計，提供一種將磁力與聲波效應作效率地結2，、 能克服先前非接觸式超音波馬達之動子運 並 的問題。 个平順及偏移 為達成前揭目的，本發明所設計的非 置，係包括： 他勒衮 201026948 二組振動產生器’分別包括二壓電致動元件，用以分 別為振動產生源及振動吸收源，其中第一振動產生器之二 壓電致動元件間隔平行排列地縱向組設定位，第二振動產 生器之一壓電致動元件係間隔平行排列地橫向組設於第一 振動產生器一側； 一基座’係包括第一振動平台以及第二振動平台，該 第一振動平台水平組設於第一振動產生器之二壓電致動元 件間，該第二振動平台垂向設置於該第一振動平台一側， ©且組接於第二振動產生器之二壓電致動元件間，第二振動 平台頂邊鄰近第一振動平台一側邊並保持一段間距； 一承載板，係包括一水平段以及一自該水平段一側邊 向下垂直延伸的垂直段，該水平段跨置於第一振動平台上 方，该垂直段位於該第二振動平台侧邊，且該承載板之水 平段相對於垂直段之另側邊具有一磁性導引邊；以及 一磁浮導引器，其上具有一磁浮導槽，提供承載板之 _磁！·生導引邊伸入其中，並藉彼此相斥磁力而呈飄浮狀。 本發明所設計的另一非接觸式驅動裝置，係包括： —組振動產生器，每一振動產生器分別包括二壓電致 動元件呈間隔平行排列地縱向組設，且該二振動產生器相 鄰併列； 基座，其包括有二組磁性振動平台，每—磁性振動 平〇連接於一組振動產生器的二壓電致動元件間，該二組 磁性振動平台相鄰間隔平行排列，該二磁性振動平台於彼 此相對的内側面上各設有一磁浮導槽；以及 一承載板，其兩側面各具有一磁性導引邊分別伸入該 201026948 的磁力而使 二磁性振動平台的磁浮導槽中，並藉彼此相斥 該承載板飄浮該二磁性振動平台間。201026948 VI. Description of the Invention: [Technical Field] The present invention relates to a non-contact type driving device, and more particularly to a non-contact type driving device design that generates a driving force in combination with a magnetic force and an acoustic wave effect. [Prior Art] - The product with the ability to act, the structure must basically provide the driving source through the motor, because the motor plays a pivotal role in the development of modern technology. With the continuous advancement of technology, the development of motors has gradually evolved toward miniaturization and precision. Nowadays, motors are no longer limited to simple control and drive power. The development trend of miniaturization and precision 'motor design must also have high-precision positioning, micro-vibration, mute, etc. The electromagnetic motor is difficult to meet the aforementioned characteristics, and thus the development of an ultrasonic motor has been made. Regarding the aforementioned ultrasonic motor, it is possible to distinguish between a contact ultrasonic motor and a non-contact ultrasonic motor, wherein: the contact ultrasonic motor mainly uses a mechanical vibration technique to generate a driving source, and the phase Compared with the general electromagnetic motor, the contact ultrasonic motor can be applied to the electromagnetic field without the electromagnetic dry--, ,, * 丁 可以 可以 可以 可以 可以 可以 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗 医疗It is used in an environment such as electric field W, and the contact ultrasonic motor has high-precision positioning work @ _月 b, and functions such as silent, low-speed and high-torque, and is particularly suitable for the technical field of poetic micro-structure, such as: information products , medical engineering and surveillance systems, etc. The design of the contact type ultrasonic motor of the quasi-monthly J is due to the use of the technical vibration of the mechanical vibration to generate the driving source, the energy loss caused by the friction phenomenon in the mechanical vibration mechanism, and the heat generated by the combination , 3 使 3 Ultrasonic motor energy 201026948 conversion efficiency is low, and the use of I into the temple to make π °ρ New Zealand and other shortcomings, and, the dynamic model of the contact super-chopper motor is very complex system parameters are easy to operate temperature, shelling and application It is difficult to control the fast precision position due to the static force between the scorpions. The non-contact ultrasonic motor described in the pedestal is to improve the friction driving technology of the above-mentioned contact type super chopper motor. The characteristics of the non-contact super-day wave motor are that the structure design system ^ ΗΗ .. 4 疋 疋 疋 无 无 互相 互相 互相 互相 并 并 并 并 nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea nea Push the mover to make continuous movements. That is to say, the medium between the mover and the stator (such as air or liquid) generates the disturbance 2 to drive the movement of the mover, and there is no friction loss and teaching between the mover and the stator, so that the non-contact ultrasonic motor has excellent In: Motor operation efficiency, but the above-mentioned non-contact ultrasonic motor is only in the field of research in the past ten years. At present, the research of _ has not been completed. For example, it can be low in buoyancy, low in driving force, and vulnerable to external I + Broadcasting, h external disturbances, and vibrations other than the direction of action, the towel causes the mover to move the material, and effectively overcomes, causing the movement of the mover to be less smooth. [Disclosure] The main object of the present invention is to provide a non-contact driving device, which provides a magnetic coupling and an acoustic wave effect to effectively overcome the previous non-contact ultrasonic motor. And the problem. The flatness and offset are achieved by the present invention. The non-set design of the present invention includes: He Lewei 201026948 Two sets of vibration generators respectively include two piezoelectric actuation elements for respectively generating vibration source and vibration An absorption source, wherein the two piezoelectric actuators of the first vibration generator are arranged in a longitudinal group at intervals, and one of the piezoelectric actuators of the second vibration generator is laterally arranged in parallel to the first vibration generation a pedestal includes a first vibration platform and a second vibration platform, the first vibration platform being horizontally disposed between the two piezoelectric actuation elements of the first vibration generator, the second vibration platform being vertically And disposed on a side of the first vibration platform, and is connected between the two piezoelectric actuators of the second vibration generator, and the top edge of the second vibration platform is adjacent to one side of the first vibration platform and maintains a spacing; The plate includes a horizontal section and a vertical section extending vertically downward from a side of the horizontal section, the horizontal section is disposed above the first vibration platform, and the vertical section is located at a side of the second vibration platform. And the horizontal section of the carrier plate has a magnetic guiding edge with respect to the other side of the vertical section; and a magnetic floating guiding device having a magnetic floating guiding groove thereon for providing the magnetic plate of the carrier plate! · The raw guiding edge extends into it and floats by repulsing the magnetic force. Another non-contact driving device designed by the present invention comprises: a group vibration generator, each of the vibration generators respectively comprising a bimorph actuating element longitudinally arranged in parallel at intervals, and the two vibration generators Adjacent adjacent; the susceptor includes two sets of magnetic vibrating platforms, each of which is connected between two piezoelectric actuating elements of a set of vibrating generators, and the two sets of magnetic vibrating platforms are arranged adjacent to each other in parallel. The two magnetic vibrating platforms are respectively provided with a magnetic floating guiding groove on the inner side surfaces opposite to each other; and a supporting plate having a magnetic guiding edge on each of the two sides respectively extending into the magnetic force of the 201026948 to make the magnetic floating guide of the two magnetic vibration platform The two magnetic vibrating platforms float between the two slots in the slot and by repelling each other.
本發明藉由前揭技術方案之設計，其特點在於 明之非接觸式驅動冑置主要係利用㈣组振動產i器中之二 壓電致動元件作為振動產生源分別產生高振幅振動，透過 基座的二組振動平台表面產生行波變形，#由振i之空氣 形成近場聲波效應產生令承載板飄浮之聲波浮力，以:藉 由：組振動平台產生聲波振動產生充足的推力以驅動承載 板行進’ 以另—i電致動元件作為振動吸收源於遠端吸 收振動能量，避免行波反射而干擾振動源提供的行波，另 利用磁性導引器或令基座的三振動平台直接設計成磁性振 動平台’以及承載板側邊設計有磁性導引邊，藉以利用磁 性導引器對承載板提供之磁斥力，使承載板於基座上維持 不接觸的飄浮狀態，控制承載板處於預定的飄浮高度，並 對承载板的行進路徑提供引導性之固定限位作用，是故， 本發明透過磁力與聲波效應作效率地結合，可以有效避免 承載板運動日守產生偏移的問題，進而使承載板的運動更加 平順。 【實施方式】 如第一、二圖所示，係分別揭示本發明非接觸式驅動 農置之數種具體可行的較佳實施例，其中第一、二圖所示 之非接觸式驅動裝置第一較佳實施例，其組成主要包括二 組振動產生器（1)(1A)、一基座（2)、一承載板（3)以及一 磁浮導引器（4)，其中： 該二組振動產生器（1)( 1 A )係分別包括二壓電致動元 7 .201026948 件（10)(10A)(11)(11A)，各振動產生器（1)(1A)中之一 壓電致動元件（10)(10A)係作為振動產生源，另一壓電致 動元件（11)(11A)則作為振動吸收源，其中第一振動產生 器（1)之二壓電致動元件（1 〇)(11)係間隔平行排列地縱向 組設定位，該二壓電致動元件（10)(11)的作用端位於上 方，第二振動產生器（1A)之二壓電致動元件（1〇a)(11a) 係間隔平行排列地橫向組設於第一振動產生器（1 ) 一侧， 其一壓電致動元件（10A)之作用端朝向第一振動產生器（1) ❹對應的縱向壓電致動元件（10)，另一壓電致動元件〇1 a ) 之作用端朝向第一振動產生器（1)對應另一縱向壓電致動 元件（11)。 所述的基座（2)包括第一振動平台（2〇 )以及第二振動 平台（21) ’該第一振動平台（20)係水平組設於第一振動產 生器（1)之一壓電致動元件（10)(11)之作用端間，該第二 振動平台（21)係垂向設置於該第一振動平台（2〇)一側，該 第二振動平台（21)並組接於第二振動產生器（1A)之二壓 ® 電致動元件（1〇Α)(11Α)之作用端間，第二振動平台（21) 的頂邊鄰近第一振動平台（20) —側邊並保持一段適當的間 距，所述的基座（2)中的第一振動平台（2〇)與第二振動平 台（21)係分別由該二振動產生器（丨）。a )中作為振動產生 源之壓電致動元件（10)(10A)輸入高_振幅的振動，使該第 一振動平台（20)、第二振動平台（21)表面分別產生朝另一 壓電致動元件（11)(11A)方向傳遞的行波振動，並由該二 振動產生器（1)(1A )中作為振動吸收源之壓電致動元件 (11)吸收該行波振動，避免行波反射。 .201026948 所述的承載板（3)包括一水平段（30)以及一垂直段（31) 自該水平段（30)—側邊向下垂直延伸，該承載板（3)並以 其水平段（30)跨置於第一振動平台（20)上方，該垂直段（31) 位於該第二振動平台（21)側邊，該承載板（3)之水平段（3〇) 相對於垂直段（31)之另側邊具有一磁性導引邊（32)，其中 可於該承載板（3)相對於垂直段（31)之另側邊貼設有磁性 片（33)，使其表面具磁性，而構成該磁性導引邊（)，於 本較佳實施例中，係於承載板（3)預定磁性導引邊（32)之 參側邊頂面及底面各貼附有一磁性片（3 3)。 所述的磁浮導引器（4)，係一具有磁性的構件，該磁 浮導引H⑷具有—磁浮導槽⑷），提供承载板⑻設有磁 •性片（33)的磁性導引邊（32)伸入其中，利用該同磁極性相 •斥的磁力原理，使承載板（3)—端的磁性導引邊（32)藉由 磁力作用而呈飄浮狀態。 前述非接觸式驅動裝置第一較佳實施例，於使用時， 如第一、二圖所示，其係令第一振動產生器⑴、第二振 動產生is (1 A )作為振動產生源之壓電致動元件（i〇)(i〇a ) 輸出高振幅的振動，藉由近場聲波效應提供承載板⑺直 線運動所需的驅動力以及浮力，其中： 該非接觸式驅動裝置係藉由第一振動產生器（1)對該 基座（2)之第一振動平台（2〇)提供自壓電致動元件朝 另一塵電致動元件（11)方向傳遞的行波振動，透過該第一 振動平台(20)對承載板⑶的水平段(3〇)提供垂直方向的 聲波浮力及提供承载板（3)直線移動之推力；另一方面， 係藉由第二振動平台（21)對該基座⑺之第二振動平台⑵） 201026948 提供自壓電致動元件（10A)朝另一壓電致動元件（11A)方 向傳遞的行波振動，藉由第二振動平台（21)對承載板（3) — 的垂直段（31)提供水平方向的聲波浮力，以及提供承載板 (3)直線移動之輔助推力，使該承載板（3)藉由垂直方向及 水平方向聲波浮力而飄浮於基座（2)上而不接觸，以及該 承載板（3)透過基座（2)於垂直方向及水平方向之行波振動 所產生的驅動力作用下朝預定的方向直線行進。 此外，該第一、第二振動產生器（1)(1 A )係藉由作為 振動吸收源之壓電致動元件（丨丨）（丨丨A )於遠端吸收該些振 動波的能量，避免行波反射而產生干擾，同時，該磁浮導 引盗（4)與承載板（3)的磁性導引邊（32)間利用相斥之磁力 作用以及承載板（3)在基座（2)所提供之垂直及水平方向 '的聲波浮力作用下維持預定的飄浮高度，對承載板（3)之 移動提供固定之限位作用，使承載板（3)於基座（2)上方作 直線運動，而不會產生其他方向的振動，用以防止承載板 φ移動時產生側向偏移現象，使該承載板（3)在該磁浮導引 器（4)的引導下平順地作直線運動。 萬該超曰波馬達欲驅動該承載板（3)反向移動時，係 令原作為振動供應源的壓電致動元件（1〇)(1〇A )變換為振 動吸收源，原作為振動吸收源的壓電致動元件（11)(丨丨A ) 、為振動供應源，用以產生反向的行波振動驅動承載板 (3)反向運動。 如第二、四圖所示，係揭示本發明非接觸式驅動裝置 之第—較佳實施例，其組成主要包括二組振動產生器（5 )、 基座、以及一承載板（7 )，其令： 10 201026948 該二組振動產生器（5)係分別包括二壓電致動元件 ⑽(5”，|振動產生器（5)中之一壓電致動元件⑽作 為振動產生源’另4電致動元件（51)作為振動吸收源， 該二組振動產生器⑸之二壓電致動元件⑽）（51)係間隔 平行排列地縱向組較位，且該二振動產生器⑸之二壓 電致動兀件（50)(51)對應相鄰併列該些壓電致動元件 (50)(51)的作用端均位於上方。The invention is characterized by the prior art solution, characterized in that the non-contact driving device of the invention mainly uses the two piezoelectric actuating elements in the (four) group vibrating generator as the vibration generating source to generate high amplitude vibration respectively, and the transmitting base The surface of the two sets of vibrating platform of the seat generates traveling wave deformation, and the near-field acoustic wave effect generated by the air of the vibrating i generates the buoyancy of the acoustic wave floating on the carrying plate to: generate sufficient thrust by the vibration vibration of the group vibration platform to drive the bearing The board travels with the other-i electric actuating element as the vibration absorption source to absorb the vibration energy at the far end, avoiding the traveling wave reflection and interfering with the traveling wave provided by the vibration source, and using the magnetic guide or the three vibration platform of the base directly The magnetic vibration platform is designed as well as the magnetic guide edge on the side of the carrier plate, so that the magnetic repulsion force provided by the magnetic guide to the carrier plate is used to maintain the floating state of the carrier plate on the pedestal without contact, and the control carrier plate is at The predetermined floating height provides a guiding fixed limit function for the traveling path of the carrier plate. Therefore, the present invention performs magnetic and acoustic effects. The combination of efficiency can effectively avoid the problem that the movement of the carrier plate is shifted, and the movement of the carrier plate is smoother. [Embodiment] As shown in the first and second figures, respectively, several specific and feasible preferred embodiments of the non-contact driving agricultural device of the present invention are disclosed, wherein the non-contact driving device shown in the first and second figures In a preferred embodiment, the composition mainly comprises two sets of vibration generators (1) (1A), a base (2), a carrier plate (3) and a magnetic float guide (4), wherein: the two groups The vibration generator (1) ( 1 A ) respectively includes a piezoelectric actuator 7 . 201026948 (10) (10A) (11) (11A), one of the vibration generators (1) (1A) The electro-actuating element (10) (10A) acts as a vibration generating source, and the other piezoelectric actuating element (11) (11A) acts as a vibration absorbing source, wherein the first vibration generator (1) is piezoelectrically actuated The component (1 〇) (11) is a longitudinal group set position which is arranged in parallel, the active end of the piezoelectric actuator (10) (11) is located above, and the second vibration generator (1A) is piezoelectrically induced. The movable element (1〇a) (11a) is laterally arranged in parallel with one another on the side of the first vibration generator (1), and the active end of a piezoelectric actuator element (10A) faces the first vibration (1) ❹ corresponding longitudinal piezoelectric actuating element (10), the active end of the other piezoelectric actuating element 〇1 a ) facing the first vibration generator (1) corresponding to the other longitudinal piezoelectric actuating element ( 11). The base (2) includes a first vibration platform (2〇) and a second vibration platform (21). The first vibration platform (20) is horizontally assembled to one of the first vibration generators (1). Between the working ends of the electric actuating elements (10) (11), the second vibrating platform (21) is vertically disposed on one side of the first vibrating platform (2〇), and the second vibrating platform (21) is combined Connected between the active ends of the second pressure® electro-actuating element (1〇Α) (11Α) of the second vibration generator (1A), the top edge of the second vibration platform (21) is adjacent to the first vibration platform (20). The first vibration platform (2〇) and the second vibration platform (21) in the base (2) are respectively separated by the two vibration generators (丨). a piezoelectric actuator element (10) (10A) as a vibration generating source inputs high-amplitude vibration, so that the first vibration platform (20) and the second vibration platform (21) surface respectively generate another pressure The traveling wave vibration transmitted in the direction of the electric actuating element (11) (11A), and the traveling wave vibration is absorbed by the piezoelectric actuating element (11) as the vibration absorbing source in the two vibration generators (1) (1A), Avoid traveling wave reflections. The carrier plate (3) described in .201026948 comprises a horizontal section (30) and a vertical section (31) extending vertically downward from the horizontal section (30) - the carrier board (3) and its horizontal section (30) straddle the first vibration platform (20), the vertical section (31) is located on the side of the second vibration platform (21), and the horizontal section (3〇) of the carrier board (3) is opposite to the vertical section The other side of (31) has a magnetic guiding edge (32), wherein a magnetic piece (33) can be attached to the other side of the carrying plate (3) with respect to the other side of the vertical section (31), so that the surface has Magnetically, the magnetic guiding edge is formed. In the preferred embodiment, a magnetic piece is attached to each of the top and bottom surfaces of the side of the predetermined magnetic guiding edge (32) of the carrier plate (3). 3 3). The magnetic levitation guide (4) is a magnetic member, and the magnetic levitation guide H(4) has a magnetic floating guide groove (4), and the carrier plate (8) is provided with a magnetic guiding edge of the magnetic sheet (33) ( 32) Extending into it, using the magnetic principle of the same magnetic polarity phase and repulsive, the magnetic guiding edge (32) of the end of the carrier plate (3) is floated by the action of magnetic force. In the first preferred embodiment of the non-contact type driving device, as shown in the first and second figures, the first vibration generator (1) and the second vibration generating is (1 A) are used as vibration generating sources. The piezoelectric actuator (i〇a) (i〇a) outputs a high-amplitude vibration, and provides a driving force and a buoyancy required for linear movement of the carrier plate (7) by a near-field acoustic wave effect, wherein: the non-contact driving device is The first vibration generator (1) supplies the first vibration platform (2〇) of the base (2) with traveling wave vibration transmitted from the piezoelectric actuation element toward the other dust electric actuation element (11), through The first vibration platform (20) provides vertical buoyancy buoyancy to the horizontal section (3) of the carrier plate (3) and provides thrust for linear movement of the carrier plate (3); on the other hand, the second vibration platform (21) The second vibration platform (2) of the susceptor (7) 201026948 provides traveling wave vibration transmitted from the piezoelectric actuator element (10A) toward the other piezoelectric actuator element (11A) by the second vibration platform (21) Providing horizontal acoustic buoyancy to the vertical section (31) of the carrier plate (3). And providing an auxiliary thrust of the linear movement of the carrying plate (3), so that the carrying plate (3) floats on the base (2) by the buoyancy of the vertical direction and the horizontal direction without contact, and the carrying plate (3) transmits The susceptor (2) linearly travels in a predetermined direction by a driving force generated by the traveling wave vibration in the vertical direction and the horizontal direction. Further, the first and second vibration generators (1) (1 A) absorb the energy of the vibration waves at the distal end by a piezoelectric actuator (丨丨) (作为A) as a vibration absorption source. To avoid interference caused by traveling wave reflection, and at the same time, the magnetic attraction between the maglev guiding thief (4) and the magnetic guiding edge (32) of the carrying board (3) is utilized by the repulsive magnetic force and the carrier plate (3) is at the pedestal ( 2) Maintaining the predetermined floating height under the action of the buoyant buoyancy provided in the vertical and horizontal directions, providing a fixed limit on the movement of the carrier plate (3), so that the carrier plate (3) is placed above the base (2) Linear motion without vibration in other directions to prevent lateral offset when the carrier plate φ moves, so that the carrier plate (3) smoothly straightens under the guidance of the magnetic float guide (4) motion. When the super-chopping motor is to drive the carrier plate (3) to move in the opposite direction, the piezoelectric actuator (1〇A) (1〇A), which is originally used as a vibration supply source, is converted into a vibration absorption source, which is originally used as a vibration source. The piezoelectric actuating element (11) (丨丨A) of the absorption source is a vibration supply source for generating a reverse traveling wave vibration to drive the reverse movement of the carrier plate (3). As shown in the second and fourth figures, a preferred embodiment of the non-contact driving device of the present invention is disclosed, the composition of which mainly comprises two sets of vibration generators (5), a base, and a carrier plate (7). The order of: 10 201026948 The two sets of vibration generators (5) respectively comprise a piezoelectric actuator (10) (5), one of the vibration generators (5) as a vibration generating source, respectively. 4, the electric actuating element (51) as a vibration absorbing source, the two piezoelectric actuating elements (10)) (51) of the two sets of vibration generators (5) are vertically aligned in a parallel arrangement, and the two vibration generators (5) The two piezoelectric actuators (50) (51) are located above the active ends of the adjacent piezoelectric actuators (50) (51).
所述之基座包含有二個磁性振動平台（6)，該二磁性 振動平台(6)係分別連接該二組振動產生器⑸中二壓電致 動元件（50K51)的作用端間，該二組磁性振動平台⑷相 鄰間隔平行㈣’該二磁性振動平台⑻係為具有磁性的 構件，且於彼此相對的㈣面上各設有—磁料槽（6〇)。The base includes two magnetic vibration platforms (6) connected between the active ends of the two piezoelectric actuation elements (50K51) of the two sets of vibration generators (5), respectively. The two sets of magnetic vibrating platforms (4) are adjacent to each other in parallel (four). The two magnetic vibrating platforms (8) are magnetic members, and magnetic grooves (6 turns) are provided on the opposite sides of each other.
該承載板（7)兩側各具有一磁性導引邊（71)，於本較 佳實施例中，係令該承載板⑺之磁性導引邊⑺）之兩側 邊頂面及底面各設有-磁性片（72)，使該承載板⑺兩側 分別形成-磁性導引邊（71) ’該承載板⑺係以兩側磁性 導引邊⑺）分別伸人該二磁性振動平台⑻的磁浮導槽⑽) ^藉由同磁極性相斥的磁力作用，使該承載板⑺飄浮 3亥一磁性振動平台（6 )間而不接觸。 前述非接觸式驅動裝置第三較佳實施例，於使用時， 如第四、五圖所示，其係令該基座.之二振動產生器⑸中 的-屋電致動元件（5G)作為振動供應源，用以產生高振鴨 的振動’並分別透過該二磁性振動平台⑹朝振動吸收： (51)方向傳遞的行波振動，使飄浮於該二磁性振動平台（6) 間的承載⑺在行波振動結合磁力所產生的行波磁力的 11 201026948 驅動作用下’推動該承載板⑺朝預定的方向行進；此外， 該二振動產生器⑸中的另—壓電致.動元件⑸)則係作為 振動吸收源’於遠端吸收該振動波的能量，避免行波反射 而產生干擾。 ❹ Φ 另-方面’該非接觸式驅動裝置更藉由該二磁性振動 平台⑹利用磁力同極相斥的原理，維持承載板⑺於預定 的飄洋…並於該承載板⑺兩侧提供磁力固定之限位 作用’使該承載板⑺僅能沿著該二磁性振動平台⑻的磁 汗導槽（6G)作直線運動，而不會產生其他方向的振動而產 生側向偏移現象’使該承載板⑺在該二磁性振動平台⑻ 振動驅動及引導下平順地作直線運動。 當該超音波馬達欲藤動該承載板⑺反向移動時，係 令原作為振動供應源的壓電致動元件（5G)變換為振動吸收 源，原作為振動吸收源的壓電致動元件⑼變換為振動供 應源’用以產生反向的行波振動驅動承載板⑺反向運動。 由以上具體實施丫列的構造及作動說明中可以瞭解，本 發明所設計之非接觸式㈣裝置，其主要係㈣兩振動產 生器之振動產生器分別產生高振幅振動，並透過基座的振 動平台產生行波，㈣用近場聲波效應產生浮力與推力驅 動承載板行進’並藉由另側振動吸收器吸收振動能量，避 免行波反射而干擾振動源提供的行波，另利用磁性導引 器’或令基座的二振動平台直接設計成磁性振動平台，對 子側邊預設的磁性導引邊提供磁斥力，使承載板於基座上 維持不接觸的飄浮狀態，並控制承載板於預定的飄浮高 度，且利用磁性力對承載板的行進路徑提供輔助性導引作 12 進而使承載板的運動更 參Each of the two sides of the carrying board (7) has a magnetic guiding edge (71). In the preferred embodiment, the top side and the bottom side of the magnetic guiding edge (7) of the carrying board (7) are respectively disposed. a magnetic sheet (72) is formed on both sides of the carrier plate (7) to form a magnetic guiding edge (71). The carrier plate (7) is extended by two magnetically vibrating sides (7) respectively. The magnetic floating guide groove (10)) enables the carrier plate (7) to float between the three magnetic-vibration platforms (6) without contact by the magnetic force repulsive with the magnetic polarity. The third preferred embodiment of the foregoing non-contact type driving device, when used, as shown in the fourth and fifth figures, is the - electric actuating element (5G) in the vibration generator (5) of the base. As a vibration supply source, the vibration of the high-vibration duck is generated and transmitted through the two magnetic vibration platform (6) to the vibration absorption: (51) direction of the traveling wave vibration, so as to float between the two magnetic vibration platforms (6) The carrier (7) drives the carrier plate (7) in a predetermined direction under the driving force of the traveling wave vibration combined with the traveling wave magnetic force generated by the magnetic force 11 201026948; in addition, the other piezoelectric actuator in the two vibration generators (5) (5)) As the vibration absorption source, the energy of the vibration wave is absorbed at the distal end to avoid interference caused by traveling wave reflection. Φ Φ OTHER-the 'the non-contact drive device further maintains the carrier plate (7) on the predetermined floating ocean by using the principle of magnetic reciprocal repulsion by the two magnetic vibration platform (6) and provides magnetic fixing on both sides of the carrier plate (7) The limit action ' enables the carrier plate (7) to move linearly along the magnetic sweat channel (6G) of the two magnetic vibration platform (8) without generating vibration in other directions to cause a lateral offset phenomenon. The carrier plate (7) smoothly moves linearly under the vibration driving and guiding of the two magnetic vibration platforms (8). When the ultrasonic motor moves the carrier plate (7) in the opposite direction, the piezoelectric actuator element (5G), which is the vibration supply source, is converted into a vibration absorption source, and the piezoelectric actuator element originally used as the vibration absorption source. (9) Transforming into a vibration supply source 'to generate a reverse traveling wave vibration to drive the carrier plate (7) to move in the opposite direction. It can be understood from the structure and operation description of the above specific implementation that the non-contact type (four) device designed by the present invention mainly uses (four) the vibration generators of the two vibration generators respectively generate high-amplitude vibration and vibrate through the susceptor. The platform generates traveling waves, (4) generates buoyancy and thrust to drive the carrier plate with near-field acoustic wave effect and absorbs vibration energy by the other side vibration absorber, avoids traveling wave reflection and interferes with the traveling wave provided by the vibration source, and uses magnetic guidance 'Or the two vibration platform of the base directly designed as a magnetic vibration platform, providing a magnetic repulsive force to the magnetic guiding edge preset on the sub-side, so that the carrier plate maintains a non-contact floating state on the base, and controls the carrier plate At a predetermined floating height, and using magnetic force to provide an auxiliary guide for the travel path of the carrier plate, thereby making the movement of the carrier plate more
201026948 用，避免承载板運動時產生偏移， 加平順。 > 示上所述，本發明以且备丨κ 士入 創新的磁力與S波效應作有效 ==:’使其在實施上確可有效地避免先二 =載=動時產生偏移的現象，故本發明確可提供—項具 有產業利用價值之非接觸式驅動裝置設計。 【圖式簡單說明】 的J:!係本發明非接觸式驅動裝置之第-較佳實施例 的立體不意圖。 第二圖係第一圖係所示非接觸式驅動裝置第—較佳實 施例之側視平面示意圖。 第^圖係本發明非接觸式驅動裝置之第二較佳實施例 第四圖係、帛三圖係所示非接觸式驅動裝置第二較佳實 施例之側視平面示意圖。 第五圖係、本發明非接冑式驅動裝i第二較佳實施例的 作動示意圖。 【主要元件符號說明】 (1) 振動產生器 (10) 壓電致動元件 (11) 壓電致動元件 (2) 基座 (21)第二振動平台 (3) 承載板 (1 A )振動產生器 (10A )壓電致動元件 (11 A )壓電致動元件 (20)第一振動平台 (30)水平段 13 201026948 (31)垂直段 (33)磁性片 (32)磁性導引邊 (4)磁浮導引器 (40)磁浮導槽 (5)振動產生器 (51)壓電致動元件 (5 0)壓電致動元件 (6)磁性振動平台 (60)磁浮導槽 (7)承載板 (72)磁性片 (71)磁性導引邊201026948 is used to avoid offset when the carrier plate moves, and smoothing. > As indicated above, the present invention is effective for the magnetic and S-wave effects of the 丨 士 士 士 士 士 = = = ' ' ' ' = = = = = = = = = = = = = = = = = = = = = = = = = = = Phenomenon, the present invention can indeed provide - a non-contact drive device design with industrial utilization value. J:! is a perspective view of the first preferred embodiment of the non-contact type driving device of the present invention. The second drawing is a side plan view of the first preferred embodiment of the non-contact driving device shown in the first drawing. BRIEF DESCRIPTION OF THE DRAWINGS A second preferred embodiment of the non-contact type driving device of the present invention is a side plan view of a second preferred embodiment of the non-contact type driving device shown in the fourth and third drawings. Fig. 5 is a schematic view showing the operation of the second preferred embodiment of the non-connected driving device of the present invention. [Main component symbol description] (1) Vibration generator (10) Piezoelectric actuator (11) Piezoelectric actuator (2) Base (21) Second vibration platform (3) Carrier plate (1 A) vibration Generator (10A) Piezoelectric Actuating Element (11 A) Piezo Actuating Element (20) First Vibration Stage (30) Horizontal Section 13 201026948 (31) Vertical Section (33) Magnetic Sheet (32) Magnetic Leading Edge (4) Maglev guide (40) Maglev guide groove (5) Vibration generator (51) Piezoelectric actuating element (50) Piezoelectric actuating element (6) Magnetic vibrating platform (60) Magnetic floating guide groove (7) Carrier plate (72) magnetic sheet (71) magnetic guiding edge