JPS6311073A - Vibrating wave motor - Google Patents

Vibrating wave motor

Info

Publication number
JPS6311073A
JPS6311073A JP61152952A JP15295286A JPS6311073A JP S6311073 A JPS6311073 A JP S6311073A JP 61152952 A JP61152952 A JP 61152952A JP 15295286 A JP15295286 A JP 15295286A JP S6311073 A JPS6311073 A JP S6311073A
Authority
JP
Japan
Prior art keywords
vibrating
vibration
elastic body
wave motor
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61152952A
Other languages
Japanese (ja)
Other versions
JPH0516274B2 (en
Inventor
Hitoshi Mukojima
仁 向島
Ichiro Okumura
一郎 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61152952A priority Critical patent/JPS6311073A/en
Priority to GB8618332A priority patent/GB2183929B/en
Priority to DE19863626389 priority patent/DE3626389A1/en
Publication of JPS6311073A publication Critical patent/JPS6311073A/en
Priority to US07/991,716 priority patent/US5347192A/en
Publication of JPH0516274B2 publication Critical patent/JPH0516274B2/ja
Priority to US08/939,119 priority patent/US5892317A/en
Priority to US09/204,268 priority patent/US5952766A/en
Granted legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To improve the yielding force and speed, by specifying a bar vibrating body with multiple lugs for a vibrating substance, and by setting the natural frequency of transverse vibration of this lug higher than the vibration frequency of a motor. CONSTITUTION:A vibrating wave motor is composed of a group of piezoelectric elements 1, an elastic body 21 as a vibrating substance, a moving body 3, a supporting vibration absorber 4 and an anchor body 5. By the travelling vibrating wave of a group of piezoelectric elements 1, etc. the moving body 3 coming into contact with the elastic body 21 is forced to move in the direction of an arrow A or in the reverse direction. At this moment, multiple lugs 21A extended from the bottom of the elastic body 21 are provided in the whole circuit of the elastic body 21. The form of the lug 21A is selected so that the natural frequency of the transverse vibration of the beam of this lug 21A may become higher than the vibrating frequency of the motor. Thus, the travelling wave is not disturbed and its yielding force is not reduced even if the length 1 of the lug 21A is elongated and the pressure W to apply is increased.

Description

【発明の詳細な説明】 (技術分野) 本発明は進行性振動波によって駆動される振動波モータ
、特にその振動体の構造に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a vibration wave motor driven by progressive vibration waves, and particularly to the structure of its vibrator.

(従来技術) 振動波モータは、例えば圧電振動子に周波電圧を印加し
た時に生じる振動運動を駆動力として利用するもので、
従来の電磁モータに比べて巻線を必要としない為、構造
が簡単で小型になり、低速回転時にもトルクが得られる
という利点があり、近年注目されている。
(Prior art) A vibration wave motor uses, for example, the vibration motion generated when a frequency voltage is applied to a piezoelectric vibrator as a driving force.
Compared to conventional electromagnetic motors, they do not require windings, so they have a simpler and smaller structure, and have the advantage of being able to provide torque even when rotating at low speeds, and have attracted attention in recent years.

かかる振動波モータにおいて振動体の変位を移動体へ伝
達する方法としては特開昭59−178988号公報、
特開昭59−201685号公報等で開示される様な方
法が提案されている。
A method for transmitting the displacement of a vibrating body to a moving body in such a vibration wave motor is disclosed in Japanese Patent Application Laid-open No. 178988/1988;
Methods such as those disclosed in Japanese Patent Application Laid-Open No. 59-201685 have been proposed.

第1図は、かかる従来例の構成の概略を説明する図で、
第2図はその動作原理を説明するものである。
FIG. 1 is a diagram illustrating the outline of the configuration of such a conventional example,
FIG. 2 explains its operating principle.

1は電気−機械変換素子としての圧電素子群、2は振動
体としての弾性体、3は移動体、4は支持用の吸振材、
5は固定体である。圧電素子群lは例えば第3図の平面
図に示す様に、点線で示す扇形の部分が(+)、(−)
の記号で示す様に厚み方向に分極処理されている。
1 is a piezoelectric element group as an electro-mechanical conversion element, 2 is an elastic body as a vibrating body, 3 is a moving body, 4 is a vibration absorbing material for support,
5 is a fixed body. For example, as shown in the plan view of FIG. 3, piezoelectric element group l has sector-shaped parts indicated by dotted lines (+) and (-).
As shown by the symbol, it is polarized in the thickness direction.

1aで表わされるA相を形成する圧電素子群に不図示の
電源より交流電圧v==vosinωtを印加し、また
、λ/4位相のずれた位置にある1bで表わされるB相
を形成する圧電素子群にV=±VOcosωtを印加し
て、圧電素子群lに接合される弾性体2に進行性の屈曲
表面波(即ち進行性振動波)を発生させる。これにより
弾性体2に接触する移動体3を矢印A或いはその逆方向
に移動させる。
An AC voltage v==vosinωt is applied from a power source (not shown) to the piezoelectric element group forming the A phase represented by 1a, and the piezoelectric elements forming the B phase represented by 1b located at a position shifted by λ/4 in phase are applied. By applying V=±VO cos ωt to the element group, a progressive bending surface wave (that is, a progressive vibration wave) is generated in the elastic body 2 joined to the piezoelectric element group 1. As a result, the movable body 3 in contact with the elastic body 2 is moved in the direction of arrow A or the opposite direction.

弾性体2には進行性の屈曲表面波の振幅を拡大する突起
2Aが設けられている。尚、振巾の拡大率は突起2Aの
長さ1(第1図参照)によって決定される。
The elastic body 2 is provided with a protrusion 2A that increases the amplitude of the progressive bending surface wave. Incidentally, the magnification rate of the swing width is determined by the length 1 of the protrusion 2A (see FIG. 1).

前記移動体3は加圧力W(第1図参照)で弾性体2に加
圧接触し、弾性体2との摩擦力により速度Uで移動する
。圧電素子群1及び弾性体2よりなる振動体は、フェル
トなどの吸振材4で支持され、固定体5に振動を伝えな
い構造となっている。
The movable body 3 presses into contact with the elastic body 2 with a pressure W (see FIG. 1), and moves at a speed U due to the frictional force with the elastic body 2. The vibrating body made up of the piezoelectric element group 1 and the elastic body 2 is supported by a vibration absorbing material 4 such as felt, and has a structure in which vibrations are not transmitted to the fixed body 5.

以上の様な構成において移動体3の速度Uを速(する為
には突起2人の長さlを長くすれば速(なるが、速度U
を上げる為に突起2Aの長さlを長くし過ぎると、前記
モータ駆動用周波電圧の周波数(駆動周波数)より突起
2Aの横振動の固有振動数の方が低くなり過ぎて弾性体
2の進行波が摩擦面でほとんど吸収され、摩擦面の摩擦
係数μと加圧力Wで決定(p=μW)される発生力Pが
生じなくなるという問題があった。
In the above configuration, the speed U of the moving body 3 can be increased by increasing the length l of the two protrusions.
If the length l of the protrusion 2A is made too long in order to raise the elastic body 2, the natural frequency of the transverse vibration of the protrusion 2A becomes too low than the frequency (drive frequency) of the frequency voltage for driving the motor, and the movement of the elastic body 2 is reduced. There is a problem in that most of the waves are absorbed by the friction surface, and the generated force P determined by the friction coefficient μ of the friction surface and the pressing force W (p=μW) is not generated.

一方    −加圧力Wを高くす ると前記突起2Aの底部に加圧力が集中し、弾性体2に
発生した進行波が妨げられるという問題が生じていた。
On the other hand, if the pressing force W is increased, the pressing force concentrates on the bottom of the projection 2A, causing a problem that the traveling waves generated in the elastic body 2 are obstructed.

(目的) 本発明の目的は前記従来モータの欠点を除去し、前記発
生力及び速度を同時に向上させた振動波モータを提供せ
んとするものである。以下図面を用いて本発明について
詳述する。
(Objective) An object of the present invention is to provide a vibration wave motor that eliminates the drawbacks of the conventional motor and improves the generated force and speed at the same time. The present invention will be explained in detail below using the drawings.

第4図は本発明の一実施例の要部構成図であり、21は
振動体としての弾性体、21Aは弾性体21の底部より
伸びた複数9突起で、該突起21Aは第5図(尚、第5
図は突起21Aの一部のみを示す)示の様に弾性体21
の全周に渡って設けられている。
FIG. 4 is a configuration diagram of a main part of an embodiment of the present invention, where 21 is an elastic body as a vibrating body, 21A is a plurality of nine protrusions extending from the bottom of the elastic body 21, and the protrusions 21A are shown in FIG. Furthermore, the fifth
(The figure shows only a part of the protrusion 21A) As shown, the elastic body 21
It is located all around the area.

突起21Aはその底部面21aを固定端、頂部面21b
を自由端とした場合の梁の横振動の固有振動数ω1が、
モータの駆動周波数より高(なるような形状に形成され
る。尚、ω1は E・・・ヤング率、ρ・・・密度、 A・・・突起21
Aの頂部から底部までの断面積を平均した時の断面積、
■・・・突起の断面2次モーメント、  l・・・突起
21Aの底部面から頂部面までの長さ、で表わされる。
The protrusion 21A has a bottom surface 21a as a fixed end and a top surface 21b as a fixed end.
The natural frequency ω1 of the transverse vibration of the beam when is the free end is
It is formed into a shape that is higher than the driving frequency of the motor. Note that ω1 is E...Young's modulus, ρ...density, A...protrusion 21
The cross-sectional area when the cross-sectional area from the top to the bottom of A is averaged,
(2) Represented by the second moment of area of the protrusion, and l...The length from the bottom surface to the top surface of the protrusion 21A.

又突起21Aの底部21aの面積は底部にかかる面圧を
下げる為に頂部21bの面積に比べて大きく形成される
Further, the area of the bottom portion 21a of the protrusion 21A is formed larger than the area of the top portion 21b in order to reduce the surface pressure applied to the bottom portion.

尚、第4図示実施例に於て第1図示機素と同一機能を有
する機素には同一符号を付してその説明を省略する。上
記構成にかかる振動波モータの動作原理については前述
の特開昭59−201685号公報のそれと同様なので
省略する。
In the fourth illustrated embodiment, elements having the same functions as those of the first illustrated element are given the same reference numerals and their explanations will be omitted. The operating principle of the vibration wave motor according to the above configuration is the same as that of the above-mentioned Japanese Patent Application Laid-Open No. 59-201685, so a description thereof will be omitted.

本実施例では突起21Aの形状が上述の様な形状である
ので突起lの長さを長くし、また加圧力Wを大きくして
も進行波が妨げられたり、また発生力Pが小となる様な
こともない。従って所望の速度が得られ、かつ同時に大
きな発生力が得られるものである。
In this embodiment, since the shape of the protrusion 21A is as described above, even if the length of the protrusion 1 is increased and the pressing force W is increased, the traveling wave will not be hindered, and the generated force P will be small. There's nothing wrong with that. Therefore, a desired speed can be obtained and, at the same time, a large generated force can be obtained.

また、前記突起21Aの側面と前記移動体3との摩擦面
となす角度θ(第4図参照)は90°より小さく形成さ
れる。従って本実施例では突起21Aを鍛造(鋳造)等
の型成形で作り易くなる効果もある。
Further, the angle θ (see FIG. 4) between the side surface of the protrusion 21A and the friction surface of the movable body 3 is formed to be smaller than 90°. Therefore, this embodiment has the effect that the protrusion 21A can be easily formed by molding such as forging (casting).

第6図〜第8図は本発明にかかる振動波モータの他の実
施例の要部構成図で、弾性体のみを示すものである。2
2,23.24が第4図示弾性体と同様であって形状の
みが異なる弾性体、22A、 23A。
6 to 8 are main part configuration diagrams of other embodiments of the vibration wave motor according to the present invention, showing only the elastic body. 2
2, 23, and 24 are elastic bodies 22A and 23A that are similar to the elastic bodies shown in the fourth figure but differ only in shape.

24Aが突起である。進行波の進行方向は矢印Aで示し
ている。
24A is a protrusion. The direction of travel of the traveling wave is indicated by arrow A.

基本的特性は第4図示の弾性体21及び突起21Aと同
様である。第6図示実施例は・突起22Aを底部22a
から頂部22bまでの間で多段階に断面積を減少させる
(第6図では2段階)ものであり、第7図は突起23A
を底部23aから頂部23bまでの間で角度θを90°
以下から90°付近まで変化させたものであり、第8図
は逆に90°付近から90’ 以下まで変化させた側面
としたものである。
The basic characteristics are the same as those of the elastic body 21 and projection 21A shown in the fourth figure. In the sixth illustrated embodiment, the protrusion 22A is attached to the bottom 22a.
The cross-sectional area is reduced in multiple steps (two steps in FIG. 6) between the top part 22b and the top part 22b, and FIG.
The angle θ is 90° between the bottom 23a and the top 23b.
Figure 8 shows the side surface changed from around 90° to around 90' or less.

また、以上述べた以外の突起形状であっても、突起の頂
部面積に比べて底部面積が大きいものであれば同様の効
果が生じるものである。
Further, even with protrusion shapes other than those described above, the same effect can be produced as long as the bottom area of the protrusion is larger than the top area.

以上のように本発明では振動体を複数の突起を有する棒
状振動体とし、該突起の横振動の固有振動数がモータの
駆動周波数より高くなる様に突起の形状を形成したので
、充分な発生力が得られ、かつ所望の速度が得られるも
のである。
As described above, in the present invention, the vibrating body is a rod-shaped vibrating body having a plurality of protrusions, and the shape of the protrusions is formed so that the natural frequency of the transverse vibration of the protrusions is higher than the driving frequency of the motor. It is possible to obtain both force and desired speed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の振動波モータの要部構成図、第2図は第
1図示モータの動作説明図、第3図は第1図示モータの
圧電素子群の配置図、第4図は本発明を適用した振動波
モータの要部構成図、 第5図は第4図示モータの振動体の斜視図、第6図乃至
第8図は本発明にかかる振動波モータの他の実施例の要
部構成図である。 図において、 21、 22. 23. 24  ・・・弾性体、2L
A、22A、23A、24A  ・・・突起である。
Fig. 1 is a configuration diagram of main parts of a conventional vibration wave motor, Fig. 2 is an explanatory diagram of the operation of the motor shown in the first drawing, Fig. 3 is a layout diagram of the piezoelectric element group of the motor shown in the first drawing, and Fig. 4 is the invention of the present invention. FIG. 5 is a perspective view of the vibrating body of the motor shown in FIG. 4, and FIGS. 6 to 8 are main parts of other embodiments of the vibration wave motor according to the present invention. FIG. In the figure, 21, 22. 23. 24...Elastic body, 2L
A, 22A, 23A, 24A...Protrusions.

Claims (3)

【特許請求の範囲】[Claims] (1)電気−機械変換素子に周波電圧を印加することに
よって振動体に進行性振動波を発生させ、該振動波によ
り前記振動体の接触部に接触する移動体を摩擦駆動する
振動波モータにおいて、前記振動体を前記移動体との接
触側に複数の突起を設けた棒状振動体とし、かつ該突起
の曲げ振動の固有振動数が前記周波電圧の周波数より高
くなる様な形状としたことを特徴とする振動波モータ。
(1) In a vibration wave motor that generates progressive vibration waves in a vibrating body by applying a frequency voltage to an electro-mechanical conversion element, and uses the vibration waves to frictionally drive a moving body that contacts a contact portion of the vibrating body. , the vibrating body is a rod-shaped vibrating body having a plurality of protrusions on the side in contact with the movable body, and the shape is such that the natural frequency of the bending vibration of the protrusions is higher than the frequency of the frequency voltage. Features a vibration wave motor.
(2)前記突起の頂部面積が底部面積より小さいことを
特徴とする特許請求の範囲第(1)項記載の振動波モー
タ。
(2) The vibration wave motor according to claim (1), wherein the top area of the protrusion is smaller than the bottom area.
(3)前記突起の側面と前記移動体とのなす角度が90
゜より小さい事を特徴とする特許請求の範囲第(1)項
記載の振動波モータ。
(3) The angle between the side surface of the protrusion and the movable body is 90
The vibration wave motor according to claim (1), characterized in that the vibration wave motor is smaller than .degree.
JP61152952A 1985-08-05 1986-06-30 Vibrating wave motor Granted JPS6311073A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP61152952A JPS6311073A (en) 1986-06-30 1986-06-30 Vibrating wave motor
GB8618332A GB2183929B (en) 1985-08-05 1986-07-28 Vibration wave motor
DE19863626389 DE3626389A1 (en) 1985-08-05 1986-08-04 HIKING SHAFT MOTOR
US07/991,716 US5347192A (en) 1985-08-05 1992-12-16 Vibration wave motor
US08/939,119 US5892317A (en) 1985-08-05 1997-09-26 Vibration wave motor
US09/204,268 US5952766A (en) 1985-08-05 1998-12-03 Vibration wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61152952A JPS6311073A (en) 1986-06-30 1986-06-30 Vibrating wave motor

Publications (2)

Publication Number Publication Date
JPS6311073A true JPS6311073A (en) 1988-01-18
JPH0516274B2 JPH0516274B2 (en) 1993-03-03

Family

ID=15551746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61152952A Granted JPS6311073A (en) 1985-08-05 1986-06-30 Vibrating wave motor

Country Status (1)

Country Link
JP (1) JPS6311073A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255484A (en) * 1988-04-05 1989-10-12 Aisin Seiki Co Ltd Elastic body for ultrasonic motor
JPH0226278A (en) * 1988-07-12 1990-01-29 Matsushita Electric Ind Co Ltd Ultrasonic motor
US4980599A (en) * 1989-02-15 1990-12-25 Aisin Seiki Kabushiki Kaisha Ultrasonic motor
US5025186A (en) * 1989-06-26 1991-06-18 Seiko Instruments Inc. Ultrasonic motor
US5039899A (en) * 1989-02-28 1991-08-13 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer
US5055732A (en) * 1988-04-05 1991-10-08 Aisin Seiki Kabushiki Kaisha Ultrasonic motor
US5079470A (en) * 1989-04-28 1992-01-07 Seiko Instruments Inc. Standing-wave type ultrasonic motor and timepiece
US5136200A (en) * 1989-07-27 1992-08-04 Olympus Optical Co., Ltd. Ultransonic motor
US5162692A (en) * 1986-10-26 1992-11-10 Olympus Optical Company Limited Ultrasonic oscillator and ultrasonic motor using the same
US5204577A (en) * 1989-05-15 1993-04-20 Nikon Corporation Ultrasonic motor improved in driving efficiency
US5300850A (en) * 1989-02-14 1994-04-05 Canon Kabushiki Kaisha Vibration wave motor
US5347192A (en) * 1985-08-05 1994-09-13 Canon Kabushiki Kaisha Vibration wave motor

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125052A (en) * 1979-03-19 1980-09-26 Toshio Sashita Motor equipment utilizing ultrasonic vibration
JPS5778378A (en) * 1980-10-30 1982-05-17 Toshio Sashita Motor device utilizing supersonic vibration
JPS59178988A (en) * 1983-03-29 1984-10-11 Shinsei Kogyo:Kk Stator of surface wave motor
JPS59178981A (en) * 1983-03-25 1984-10-11 Canon Inc Controlling method of vibration wave motor
JPS59201685A (en) * 1983-04-30 1984-11-15 Canon Inc Vibration wave motor
JPS6022479A (en) * 1983-07-18 1985-02-04 Shinsei Kogyo:Kk Stator of surface wave motor and improvement in movable element
JPS61116979A (en) * 1984-11-08 1986-06-04 Matsushita Electric Ind Co Ltd Supersonic wave drive motor
JPS62193571A (en) * 1986-02-18 1987-08-25 Matsushita Electric Ind Co Ltd Ultrasonic motor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125052A (en) * 1979-03-19 1980-09-26 Toshio Sashita Motor equipment utilizing ultrasonic vibration
JPS5778378A (en) * 1980-10-30 1982-05-17 Toshio Sashita Motor device utilizing supersonic vibration
JPS59178981A (en) * 1983-03-25 1984-10-11 Canon Inc Controlling method of vibration wave motor
JPS59178988A (en) * 1983-03-29 1984-10-11 Shinsei Kogyo:Kk Stator of surface wave motor
JPS59201685A (en) * 1983-04-30 1984-11-15 Canon Inc Vibration wave motor
JPS6022479A (en) * 1983-07-18 1985-02-04 Shinsei Kogyo:Kk Stator of surface wave motor and improvement in movable element
JPS61116979A (en) * 1984-11-08 1986-06-04 Matsushita Electric Ind Co Ltd Supersonic wave drive motor
JPS62193571A (en) * 1986-02-18 1987-08-25 Matsushita Electric Ind Co Ltd Ultrasonic motor

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5347192A (en) * 1985-08-05 1994-09-13 Canon Kabushiki Kaisha Vibration wave motor
US5162692A (en) * 1986-10-26 1992-11-10 Olympus Optical Company Limited Ultrasonic oscillator and ultrasonic motor using the same
JPH01255484A (en) * 1988-04-05 1989-10-12 Aisin Seiki Co Ltd Elastic body for ultrasonic motor
US5055732A (en) * 1988-04-05 1991-10-08 Aisin Seiki Kabushiki Kaisha Ultrasonic motor
JPH0226278A (en) * 1988-07-12 1990-01-29 Matsushita Electric Ind Co Ltd Ultrasonic motor
US5300850A (en) * 1989-02-14 1994-04-05 Canon Kabushiki Kaisha Vibration wave motor
US4980599A (en) * 1989-02-15 1990-12-25 Aisin Seiki Kabushiki Kaisha Ultrasonic motor
US5039899A (en) * 1989-02-28 1991-08-13 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer
US5079470A (en) * 1989-04-28 1992-01-07 Seiko Instruments Inc. Standing-wave type ultrasonic motor and timepiece
US5204577A (en) * 1989-05-15 1993-04-20 Nikon Corporation Ultrasonic motor improved in driving efficiency
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