JPH0532991B2 - - Google Patents
Info
- Publication number
- JPH0532991B2 JPH0532991B2 JP58060526A JP6052683A JPH0532991B2 JP H0532991 B2 JPH0532991 B2 JP H0532991B2 JP 58060526 A JP58060526 A JP 58060526A JP 6052683 A JP6052683 A JP 6052683A JP H0532991 B2 JPH0532991 B2 JP H0532991B2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- slider
- movable element
- elastic body
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000033001 locomotion Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は各種の分野での駆動装置として有用
な超音波モータに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultrasonic motor useful as a drive device in various fields.
(従来の技術とその課題)
従来から広く用いられれている各種モータ装置
は、その駆動源として電磁力を応用したものが大
部分であり、各種用途に使われている。しかしこ
れら装置の大きさ、重量および回転力などは用い
られる材料の磁気的特性等によつて制限され、ま
た、その小型、軽量にも限界があつた。(Prior Art and its Problems) Most of the various motor devices that have been widely used in the past utilize electromagnetic force as their driving source, and are used for various purposes. However, the size, weight, rotational force, etc. of these devices are limited by the magnetic properties of the materials used, and there are also limits to their compact size and light weight.
一方、これらの従来のモータに代替するものと
して、本出願人によつて、超音波振動を利用した
モータ装置、すなわち、超音波振動子である弾性
体の表面において励起される振動波を、弾性体に
加圧接触する動体の運動に変換する装置がすでに
提案されている。 On the other hand, as an alternative to these conventional motors, the present applicant has developed a motor device that uses ultrasonic vibrations, that is, an ultrasonic vibrator that uses vibration waves excited on the surface of an elastic body. A device has already been proposed that converts the motion of a moving body into pressure contact with the body.
このモータ装置は、超音波の持つ強力な振動エ
ネルギーを回転または直進運動に変換するもので
ある。 This motor device converts the powerful vibrational energy of ultrasonic waves into rotational or linear motion.
そして、この超音波振動モータは、これまでに
ない特徴を持ち、小型、軽量化が図られることか
ら、各種分野への応用に極めて有用なものであ
る。しかしながら、その特徴にもかかわらず、そ
の具体化のためにはいくつかの改善すべき点があ
つた。たとえば、一般に、切削または研削加工さ
れた部品の平面度は約001mm〜0.1mm程度の誤差が
あるため、このような平面をもつた固定子表面に
剛体に近い素材の可動子の表面を加圧接触させて
も、ミクロ的にみれば各部品の面の粗さが、モー
タの動作原理を示した第1図における横振軸aと
近似し、均一な圧力で接触することが出来ず、駆
動力の伝達効果が著しく損なわれるという欠点が
あつた。従つて、従来では固定子表面は回転子表
面と共に超精密平面仕上げすることが必要であつ
た。 This ultrasonic vibration motor has unprecedented features and can be made smaller and lighter, making it extremely useful for applications in various fields. However, despite its characteristics, there were some points that needed to be improved in order to realize it. For example, the flatness of parts that have been cut or ground generally has an error of about 0.01 mm to 0.1 mm, so the surface of the mover, which is made of a material close to a rigid body, is pressed against the surface of the stator that has such a flat surface. Even if they are brought into contact, from a microscopic perspective, the surface roughness of each component is similar to the horizontal vibration axis a in Figure 1, which shows the operating principle of a motor, and it is not possible to contact them with uniform pressure, resulting in a drive failure. The disadvantage was that the force transmission effect was significantly impaired. Therefore, in the past, it was necessary to finish the stator surface together with the rotor surface into an ultra-precise flat surface.
(課題を解決するための手段)
この発明は、以上の通りの欠点を解消するため
になされたものであり、そのための手段として、
固定子と可動子とを有する超音波モータであつ
て、固定子は、励振されて表面に進行波を発生す
るものであり、可動子は、弾性体とスライダーと
を有し、スライダーは弾性体の表面に、もしくは
これと一体に形成され、かつ固定子に当接され、
可動子が固定子に対して相対的に可動するもので
ある超音波モータを提供するものである。(Means for Solving the Problems) This invention has been made in order to eliminate the above-mentioned drawbacks, and as a means for that purpose,
An ultrasonic motor having a stator and a movable element, where the stator is excited and generates a traveling wave on its surface, the movable element has an elastic body and a slider, and the slider has an elastic body. is formed on or integrally with the surface of the stator, and is in contact with the stator,
The present invention provides an ultrasonic motor in which a movable element is movable relative to a stator.
すなわち、この発明は、一般的加工による不完
全な平面を有する固定子表面に、スライダーを均
一に加圧接触して駆動させることにより、効率的
に大きな駆動力を発生させ、しかも、超精密加工
の作業を不要化した超音波モータ装置を提供する
ものである。 In other words, this invention efficiently generates a large driving force by driving the slider by uniformly pressing the slider into contact with the stator surface, which has an imperfect flat surface due to general machining. The present invention provides an ultrasonic motor device that eliminates the need for this work.
以下図面を参照してこの発明のモータ装置の動
作原理と実施例を説明する。 The operating principle and embodiments of the motor device of the present invention will be described below with reference to the drawings.
(作 用)
第1図は動作原理を説明するための一部拡大斜
視図である。金属等の固定子1の表面1a上に横
振動と縦振動が合成された振動波である進行波が
形成された状態を拡大して示している。(Function) FIG. 1 is a partially enlarged perspective view for explaining the principle of operation. This is an enlarged view showing a state in which a traveling wave, which is a vibration wave that is a combination of transverse vibration and longitudinal vibration, is formed on the surface 1a of a stator 1 made of metal or the like.
また、この第1図は進行波の伝搬状態(振動源
は図示せず)を示している。すなわち、質点Bに
着目すると、横振幅a(上下方向)と縦振幅b(左
右方向)との合成された波は楕円Q上を矢印Mの
方向に運動しており、その波は速度Uのスピード
で移動している。この運動は固定子表面1aのど
の点であつても同様であつて、この状態下でフリ
ーな可動子2を固定子1の表面上に加圧接触させ
ると、この可動子2は固定子1の波の頂点A及び
A′の部分でのみ接触し、かつこれら頂点A、
A′は振動速度V=2πfb((ただしfは振動数)で
矢印Mの方向に運動しているので、フリーな可動
子2は固定子1との摩擦力によつて矢印Nの方向
に駆動されることになる。 Moreover, this FIG. 1 shows the propagation state of a traveling wave (the vibration source is not shown). That is, when focusing on mass point B, a wave that is a combination of horizontal amplitude a (vertical direction) and vertical amplitude b (horizontal direction) is moving on ellipse Q in the direction of arrow M, and the wave has a velocity U. moving at speed. This movement is the same at any point on the stator surface 1a, and when the free movable element 2 is brought into pressure contact with the surface of the stator 1 under this condition, this movable element 2 moves onto the stator 1. crest A of the wave and
contact only at part A', and these vertices A,
Since A' is moving in the direction of arrow M at the vibration speed V = 2πfb (where f is the frequency), the free mover 2 is driven in the direction of arrow N by the frictional force with stator 1. will be done.
そこで、電気入力を一定として可動子2の機械
的駆動力((回転力または推進力)を増大させる
には、まず加圧接触力を大きくし、同時に波の多
数の頂点が動体面と均一な圧力で接触するように
する。 Therefore, in order to increase the mechanical driving force (rotational force or propulsive force) of the mover 2 while keeping the electrical input constant, first increase the pressurizing contact force, and at the same time make the many vertices of the wave uniform with the moving body surface. Make contact with pressure.
しかしながら、可動子2面では、固定子1の表
面から高い周波数の振動圧力を受け、法線方向と
接線方向に弾性変形による振動変位が生じる。特
に、可動子2の接線方向の変位は動体速度を大き
く低下させてしまう。 However, the movable element 2 receives high-frequency vibration pressure from the surface of the stator 1, and vibration displacement occurs in the normal and tangential directions due to elastic deformation. In particular, displacement of the movable element 2 in the tangential direction greatly reduces the speed of the moving body.
そこで、可動子2の具備すべき条件として考え
られることは、不完全な表面を有する固定子1表
面に常に追従し、高周波振動帯域では十分な慣性
抵抗を有する質量を持ち、法線方向の弾性率に対
して接線方向の弾性体を大きくることができるこ
とである。 Therefore, the conditions that can be considered for the mover 2 are that it always follows the surface of the stator 1, which has an imperfect surface, that it has a mass that has sufficient inertial resistance in the high frequency vibration band, and that it has elasticity in the normal direction. It is possible to increase the elastic body in the tangential direction with respect to the modulus.
このような観点から、この発明においては可動
子2を弾性体とともにスライダーを有するものと
し、このスライダーに、可動子2として具備すべ
き条件を満足させ、回転、直進等の運動を行う可
動子2として一体化さる。 From this point of view, in the present invention, the movable element 2 has an elastic body and a slider, and the slider satisfies the conditions that the movable element 2 should have, and the movable element 2 performs rotational, linear movement, etc. be integrated as one.
(実施例)
実施例 1
(小さく分割されたスライダー)
第2図において金属等の弾性体からなる固定子
1の表面は不完全な平面1Aを有している。そこ
で、この平面
1Aに十分追従するように、この発明において
は小さく分割されたスライダー5とこのスライダ
ー5に圧力を加えるためのたとえばゴム状の弾性
体3と支持体4により前記可動子2を一体的に構
成している。ここで、スライダー5は高周波帯域
で十分な弾性抵抗を有する質量を持つている。(Examples) Example 1 (Slider divided into small pieces) In FIG. 2, the surface of the stator 1 made of an elastic body such as metal has an incomplete plane 1A. Therefore, in order to sufficiently follow this plane 1A, in the present invention, the movable element 2 is integrated with the slider 5 divided into small pieces, an elastic body 3 made of rubber, for example, and a support 4 for applying pressure to the slider 5. It is structured according to Here, the slider 5 has a mass having sufficient elastic resistance in a high frequency band.
実施例 2
(異方性を持たせたスライダー)
第3図の例においても、固定子1の表面は不完
全な平面1Aを有している。この平面1Aに支持
体4とスライダー5で構成した前記可動子2を加
圧接触させている。ここで、スライダー5には、
低弾性率の部材5Aの内部に高弾性率部材5Bを
接線方向に埋め込んで法線方向と接線方向弾性率
に異方性を持たせている。つまり、このスライダ
ー5は、前記弾性体3と一体化している。特に、
繊維としてピアノ線を用いると大きな弾性質量を
持ち、極めて効果的である。Example 2 (Slider with anisotropy) Also in the example shown in FIG. 3, the surface of the stator 1 has an incomplete plane 1A. The movable element 2 composed of a support 4 and a slider 5 is brought into pressure contact with this plane 1A. Here, slider 5 has
The high elastic modulus member 5B is embedded in the tangential direction inside the low elastic modulus member 5A to provide anisotropy in the elastic modulus in the normal direction and the tangential direction. That is, this slider 5 is integrated with the elastic body 3. especially,
Using piano wire as the fiber has a large elastic mass and is extremely effective.
実施例 3
(可撓性を有するスライダー)
第4図に示した例においても固定子1の表面
は、不完全な表面1Aを有している。この面1A
に支持体4と可撓性を有する前記スライダー5に
該当するものとしての板状部材6、たとえばスチ
ール板等の高弾性率の板との間に低弾性率の弾性
体3を配置し、前記可動子2として一体的に構成
している。Example 3 (Flexible slider) Also in the example shown in FIG. 4, the surface of the stator 1 has an incomplete surface 1A. This side 1A
An elastic body 3 having a low elastic modulus is arranged between the support body 4 and a flexible plate-like member 6 corresponding to the slider 5, for example, a plate having a high elastic modulus such as a steel plate, and It is integrally constructed as the movable element 2.
実施例 4
(回転型モータ)
第5図は回転型モータの一例を断面図として示
している。Embodiment 4 (Rotary motor) FIG. 5 shows a cross-sectional view of an example of a rotary motor.
回転可動子2は、固定子7に当接するスライダ
ーとスプリング8とを有し、軸9に連結されてい
る。また、このモータは、軸受10および音響絶
縁体11を備えている。つまり、不完全な平面を
有する固定子7に円周方向に小さく分割したスラ
イダーを加圧接触している。個々のスライダーは
それぞれ複数のスプリング8により維持され、ス
プリング8は軸9に固定されている。 The rotary movable element 2 has a slider that contacts the stator 7 and a spring 8, and is connected to a shaft 9. The motor also includes a bearing 10 and an acoustic insulator 11. In other words, a slider divided into small pieces in the circumferential direction is pressed into contact with the stator 7 having an incomplete plane. Each individual slider is maintained by a plurality of springs 8, and the springs 8 are fixed to a shaft 9.
(発明の効果)
この発明は以上の説明から明らかなように、不
完全な平面を有する固定子表面に、均一な圧力で
接触する回転子または移動子を採用することによ
り、大きな効率で、さらに強い駆動力の発生を図
るという点で、極めて有用である。さらに、固定
子表面の平面加工精度が超精密加工を必要とせ
ず、一般的な加工条件で充分であり、大きな費用
負担を回避することが出来るという効果をも有し
ている。(Effects of the Invention) As is clear from the above description, the present invention achieves high efficiency by employing a rotor or a mover that contacts the stator surface having an imperfect plane with uniform pressure. This is extremely useful in terms of generating strong driving force. Furthermore, the flat surface machining accuracy of the stator surface does not require ultra-precision machining, and general machining conditions are sufficient, and a large cost burden can be avoided.
第1図は超音波モータの動作原理を示した一部
拡大斜視図、第2〜5図は本発明の実施例を示し
た一部拡大斜視図と断面図である。
1……固定子、1a……固定子表面、1A……
平面、2……可動子、3……ゴム状弾性体、4…
…支持体、5……スライダー、5A……低弾性率
部材、5B……高弾性率部材、6……板状部材
(スライダー)、7……固定子、8……スプリン
グ、9……軸、10……軸受、11……音響絶縁
体。
FIG. 1 is a partially enlarged perspective view showing the operating principle of an ultrasonic motor, and FIGS. 2 to 5 are a partially enlarged perspective view and sectional view showing an embodiment of the present invention. 1... Stator, 1a... Stator surface, 1A...
Plane, 2...Mover, 3...Rubber-like elastic body, 4...
... Support body, 5 ... Slider, 5A ... Low elastic modulus member, 5B ... High elastic modulus member, 6 ... Plate member (slider), 7 ... Stator, 8 ... Spring, 9 ... Shaft , 10... Bearing, 11... Acoustic insulator.
Claims (1)
であつて、固定子1は、励振されて表面に進行波
を発生するものであり、可動子2は、弾性体3と
スライダー5とを有し、スライダー5は弾性体3
の表面に、もしくはこれと一体に形成され、かつ
固定子1に当接され、可動子2が固定子1に対し
て相対的に可動するものである超音波モータ。 2 可動子2の弾性体3は、弾性率がその表面の
接線方向と法線方向に対し、異方向性を有するも
のである特許請求の範囲第1項記載の超音波モー
タ。[Claims] 1. An ultrasonic motor having a stator 1 and a movable element 2, in which the stator 1 is excited and generates a traveling wave on its surface, and the movable element 2 is made of an elastic body. 3 and a slider 5, the slider 5 has an elastic body 3
An ultrasonic motor that is formed on the surface of or integrally with the stator 1 and is brought into contact with the stator 1 so that the movable element 2 is movable relative to the stator 1. 2. The ultrasonic motor according to claim 1, wherein the elastic body 3 of the movable element 2 has an elastic modulus that has different directions with respect to the tangential direction and the normal direction of its surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58060526A JPS59188381A (en) | 1983-04-06 | 1983-04-06 | Improvement in rotor/movable element of surface wave motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58060526A JPS59188381A (en) | 1983-04-06 | 1983-04-06 | Improvement in rotor/movable element of surface wave motor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59188381A JPS59188381A (en) | 1984-10-25 |
JPH0532991B2 true JPH0532991B2 (en) | 1993-05-18 |
Family
ID=13144839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58060526A Granted JPS59188381A (en) | 1983-04-06 | 1983-04-06 | Improvement in rotor/movable element of surface wave motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59188381A (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0828985B2 (en) * | 1985-03-01 | 1996-03-21 | 株式会社新生工業 | Ultrasonic motor rotor / mover |
JPH06106026B2 (en) * | 1985-03-29 | 1994-12-21 | キヤノン株式会社 | Vibration wave motor |
JPS61224882A (en) * | 1985-03-29 | 1986-10-06 | Canon Inc | Vibration wave motor |
JPS62193567A (en) * | 1986-02-17 | 1987-08-25 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
JPS6268494U (en) * | 1985-10-19 | 1987-04-28 | ||
JPS62154792U (en) * | 1986-03-20 | 1987-10-01 | ||
JPS631381A (en) * | 1986-06-18 | 1988-01-06 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
JPH0445438Y2 (en) * | 1987-01-31 | 1992-10-26 | ||
JPH0819939B2 (en) * | 1987-11-30 | 1996-03-04 | 日本電気ホームエレクトロニクス株式会社 | Feed guide mechanism |
JP2526549Y2 (en) * | 1989-09-22 | 1997-02-19 | キヤノン株式会社 | Vibration wave device |
JP2008295234A (en) * | 2007-05-25 | 2008-12-04 | Canon Inc | Oscillatory wave drive unit |
JP5776270B2 (en) | 2011-03-29 | 2015-09-09 | セイコーエプソン株式会社 | Piezoelectric actuators, motors, robot hands and robots |
JP5843469B2 (en) * | 2011-04-26 | 2016-01-13 | キヤノン株式会社 | Vibration wave motor |
JP5929138B2 (en) | 2011-12-06 | 2016-06-01 | セイコーエプソン株式会社 | Piezoelectric motors and robots |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59101608A (en) * | 1982-12-03 | 1984-06-12 | Canon Inc | Lens driving device using oscillatory wave motor |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5966392U (en) * | 1982-10-25 | 1984-05-04 | ソニー株式会社 | Surface wave type ultrasonic motor |
JPS59155891U (en) * | 1983-04-04 | 1984-10-19 | キヤノン株式会社 | ultrasonic motor |
-
1983
- 1983-04-06 JP JP58060526A patent/JPS59188381A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59101608A (en) * | 1982-12-03 | 1984-06-12 | Canon Inc | Lens driving device using oscillatory wave motor |
Also Published As
Publication number | Publication date |
---|---|
JPS59188381A (en) | 1984-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0117353B2 (en) | ||
US5101132A (en) | Linear ultrasonic motor | |
JPS61224881A (en) | Vibration wave motor | |
JPH0532991B2 (en) | ||
JPH0117354B2 (en) | ||
JP3107933B2 (en) | Vibration wave driving device and device provided with vibration wave driving device | |
JPS59201685A (en) | Vibration wave motor | |
JPS6022479A (en) | Stator of surface wave motor and improvement in movable element | |
JPH04112686A (en) | Ultrasonic motor | |
JPS61224878A (en) | Vibration wave motor | |
KR930009211A (en) | Ultrasonic motor | |
JPH0636673B2 (en) | Drive | |
JPS59185180A (en) | Supersonic motor | |
JPS59185179A (en) | Supersonic motor | |
KR100376137B1 (en) | Ring-type Piezoelectric Ultrasonic Motor | |
JPH0588073B2 (en) | ||
JPS61185081A (en) | Drive device | |
JPS61102177A (en) | Surface wave drive motor | |
JPH0315278A (en) | Elastic vibrator in traveling bending vibration motor | |
JPH02311184A (en) | Ultrasonic motor | |
JPH0744854B2 (en) | Ultrasonic motor | |
JPH01177878A (en) | Oscillatory wave motor | |
JP2971971B2 (en) | Ultrasonic actuator | |
JPS61203872A (en) | Rotor/movable element of surface wave motor | |
JPS6231379A (en) | Surface wave motor utilizing ultrasonic vibration |