201024588 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種氣體供應裝置，在且古 %开，第一線路 及第二線路的氣體供應裝置中，該第一線路係與第—質量 流量控制器連接，該第二線路係與第二質量流量控制器連 接，該第一線路係具有第一開閉閥及第二開閉閥，該第一 線路係具有第三開閉閥及第四開閉閥’氣體供應裝置與= 應四種類的氣體A、B、C、D的供應埠連接。 ❹ I先前技術】 習知，作為此種技術，在將減少昂貴且比較大的裝置 的質量流量控制器的使用數目、縮小地板佔有面積作為目 •的的發明中，在下述的專利文獻1及專敎獻2被記載的 氣體供應裝置被揭露。 如第32圖所示般，被記載於專利文獻χ的氣艘供應裝 e 置300係，具有控制混合前的氣體流量的質量流量批制$ 3瞧。又，在質量流量.控制器3_方面，三== 3〇2U、303VA、304VA連接。在第32圖中，與本發明對比 容易般將開閉閥作為三個。將連接於f量流量控制器3〇皿 的線路作為第一線路。 藉由具有該構成，可減少昂貴且比較大的裝置的質量 流量控制器的使用數目。 然而，在有關專利文獻i的發明中，例如，在供應製 程氣體之際，在具有頻繁地使用的製程氣體π的情形方 3 201024588 面，只通過一個質量流量控制器301MA而供應製程氣體gi 的話，無法將通過相同的質量流量控制器301MA的其他製 程氣體G2、G3同時藉由第一線路供應。這樣的話，在供應 其他製裎氣體G2、G3之際，必須停止製程氣體G1的供應。 因此，有無法對應於複雜的製程、必須為了對應而有新的 質量流量控制器的問題。 在此，作為解決有關專利文獻丨的發明的課題的發 明’如有關專利文獻2的發明。 如第33圖所示般，被記载於專利文獻2的氣體供應裝 置200係，具有三個質量流量控制器2〇1ma、2〇1mb、2〇imc。 在質量流量控制器201MA方面，到開閉閥212a~212h為止 的八個開閉閥連通。又，在其他的質量流量控制器2〇1肫、 210MC也分別連通八個開閉閥❶將連通於質量流量控制器 201MA的線路作為第一線路，連通於質量流量控制器2〇iMB 的線路係作為第二線路，連通於質量流量控制器2〇imc的 線路係作為第三線路。例如，在供應製程氣體gi時將開 閉閥212A、213A '或214A的任一個開閥的話，可將製程 氣體G1從第-線路㈣三線路的任—個線路供應。因此， 在將頻繁地供應的製程氣想，例如，製程氣艘^藉由第一 線路供應時，可將其他製程氣體G2、G3藉由其他第二、第 三線路供應。因此，不需停止製程氣體G1的供應，可供應 其他製程氣體G2、G3。 [專利文獻1]日本專利3904368號公報 [專利文獻2]日本特開2003-91 322號公報 201024588 【發明内容】 [發明所欲解決之問題] 然而’在習知的氣體供應裝置200方面，有以下的問 題0 例如，在氣體供應裝置200,開閉閥必須有24個。因 此’由於開閉閥增加，有製造成本提高的問题，以及地板 佔有面積變大的問題。 〇 又’如上述般，在有關專利文獻1的氣體供應裝置 300’開閉閥的數目少，例如，在供應氣體之際，在有頻繁 地使用的製程氣體G1的情形方面，只通過一個質量流量控 制器301MA而供應製程氣體G1的話，無法將通過相同的質 量流量控制器301MA的其他製程氣體G2、G3同時藉由第一 '線路供應。這樣的話，在供應其他製程氣醴G2、G3之際， =須停止製程氣體G1的供應。因此，有無法對應於複雜的 氣程、必須為了對應而有新的質量流量控制器的問題。 ® 又，在有關專利文獻1的氣體供應裝置3〇〇中，由於 在各製程、在每一製程使用的製程氣體的供應源和供應此 製程氣體用的全部管路在各開閉閥直接連接，有管路混 雜’無法縮小地板佔有面積的問題。 因此’本發明係為了解決上述問題點，將提供可不停 止頻繁地使用的製程氣髏的供應而使用其他的製程氣髏、 縮小地板佔有面積的氣體供應裝置作為目的。 [解決問題之技術手段] 為了達成上述目的，本發明的一實施例中的氣體供應 5 201024588 裝置、塊狀凸緣係，具有下述般的構成。 ⑴在具有第—線路及第二線路的氣體供應裝置中，第 -線路係被連接至第一質量流量控制器，第二線路係被連 接至第二質量流量控制器，第一線路係具有第一開閉閥及 第二開㈣，第二線路係具有第三開閉閥及第四開閉間， 氣體供應裝置與供應四種類的氣體a、b、c、d的供應埠連 接，氣體A和氣體B係為相同的氣體，第一開閉閱及第三 開閉閥係與供應氣體A的供應埠連接，第二開_係與供 應氣體G的供應埠連接，第四開閉閥係與供應氣^的供 應埠連接。 (2) 在記載於（1)的氣體供應裝置中，具有在被安裝於 所有的開閉閥的歧管塊的下面被安裝的塊狀凸緣，其中塊 狀凸緣係，包括：管路連接的連接埠、將被形成於歧管塊 且被連結至開閉閥的歧管連通路以及連接埠連通的凸緣連 通路、以及確保管路通過的空間用的管路迴避部。 (3) 在記載於（1)或（2)的氣體供應裝置中，在迴路的排 氣側具有流量檢測系統。 (4) 在記載於（1)或（2)的氣體供應裝置中，塊狀凸緣係 即使在縱方向、橫方向的任一方，可被安裝於歧管塊。 (5) 在被女裝於開閉閥的歧管塊的下面被安裝的塊狀 凸緣中’塊狀凸緣係包括：管路連接的連接埠、將被形成 於歧管塊且被連結至開閉閥的歧管連通路以及連接埠連通 的凸緣連通路、以及確保管路通過的空間用的管路迴避部。 (6) 在記載於（5)的塊狀凸緣中，塊狀凸緣係即使在縱 201024588 方向、橫方向的任一方，可被安裝於歧管塊。 [發明的效果] 說明有關上述氣體供應裝置、塊狀凸緣的作用及效果。 (1) 根據有關上述發明的氣體供應裝置的話，由於氣體 A和氣體B係為相同的氣體，第一開閉閥及第三開閉閥係 與供應氣體A的供應埠連接，第二開閉閥係與供應氣體c 的供應埠連接，第四開閉閥係與供應氣體D的供應埠連 魯 接例如在供應耽體之際’即使有頻繁地使用的製程氣 體G1的情形，可通過兩個質量流量控制器而供應製程氣體 G1。因此’在同時供應其他製程氣體G2、g3的情形方面， 藉由將製程氣體G1使用另一方的質量流量控制器，可同時 供應製程氣體G2或G3。因此，由於可對應複雜的製程氣 • 體’沒有新的質量流量控制器的必要。 (2) 具有（1)的構成，更具有在被安裝於開閉閣的歧管 塊的下面被安裝的塊狀凸緣，其中塊狀凸緣係，包括：管 Ο 路連接的連接埠、將被形成於歧管塊且被連結至開閉閥的 歧管連通路以及連接埠連通的凸緣連通路、以及確保管路 通過的空間用的管路迴避部，藉由採用這樣的構成，由於 可整頓管路’可減少浪費的空間，可縮小地板佔有面積。 (3) 採用具有（1)或（2)的構成，且在迴路的排氣側更1 有流量檢測系統的構成，所以藉由檢測質量流量控制器的 流量，可進行質量流量控制器的不恰當的判定。 (4) 採用具有（1)或（2)的構成，且塊狀凸緣係即使在縱 方向、橫方向的任一方，可被安裝於歧管塊的構成，所以 7 201024588 配置氣逋供應裝置的場所，可設計氣體供應裝置。因 此，即使在空間精簡下也可配置氣體供應裝置。 (5) 在破安裝於開閉閥的歧管塊的下面被安裝的塊狀 凸緣中，塊狀凸緣係包括：管路連接的連接埠、將被形成 於歧管塊且被連結至開閉閥的歧管連通路以及連接埠連通 的凸緣連通路、以及確保管路通過的空間用的管路迴避 4由於可整頻管路，可減少浪費的空間，可縮小地板佔 有面積。 (6) 採用具有（5)的構成，且塊狀凸緣係即使在縱方 向、橫方向的任一方’可被安裝於歧管塊的構成，所以配 。設置的場所’可設計氣鱧供應裝置。因此，即使在空間 精簡下也可配置氣體供應裝置。 【實施方式】 双下有關本發明的氣體供應装置、塊狀凸緣的一實施 例’參考囷式詳細說明。 (第一實施例） 〈氣體供應裝置的全體構成> 第1圖係表不氣體供應裝置i的迴路圖。氣體供應裝 置1係，作為氣體供應方式、採用在側面具備吸入口的形 式。 如第1圖所示般，氣艘供應裝置i係，八種類的製程 氣想 GAS1、GAS2、GAS3、GAS4、GAS5 GAS6 GAS7、GAS8 以及淨化氣體的氣體源被連通。（製程氣體GAS6係，相當 201024588 於氣體A、及氣體B) 連通於製程氣體GAS1的氣體源的流路H1係，與開閉 閥VA1的輸入埠連通。連通於開閉閥VA1的輸出埠的流路 係，與質量流量控制器MA的輸入埠連通。連通於質量流量 控制器MA的輸出埠的流路係，與開閉閥VA4的輸入埠連 通。流路H9連通於開閉閥VA4的輪出埠，流路⑽係分歧 為朝向腔室的流路H9a和朝向排氣管的流路jj9b。在流路 H9b方面，流量檢測系統ri被連接。 在流路H9b方面，藉由流量檢測系統R1被連接，可進 行質量流量控制器的不恰當的判定。 連通於製程氣體GAS2的氣體源的流路係，與開閉 閱VA2的輸入埠連通。連通於開閉閥VA2的輸出埠的流路 係’與質量流量控制器MA的輪入埠連通。連通於質量流量 控制器MA的輸出埠的流路係，與開閉閥VA4的輸入埠連 通。從開閉閥VA4的構成係，與上述相同的構成。 製程氣體GAS3、GAS4、GAS5、GAS7、GAS8朝腔室及排 氣管的迴路係’由於採用與上述製程氣體GAS1、GASi的迴 路相同的構成’省略說明。（連結於質量流量控制器MB的 線路係’相當於第一線路；質量流量控制器MJB係，相當於 第一質量流量控制器。連結於質量流量控制器MC的線路 係’相當於第二線路；質量流量控制器MC係，相當於第二 質量流量控制器。） 連接於製程氣體GAS6的氣體源的流路H6係，從途中 习歧為兩個流路H6a和流路H6b。一方的流路H6a係，边 9 201024588 開閉閥VB3的輸入埠連通。（開閉閥VB3係，相當於第一開 閉閥。）另一方的流路H6b係，與開閉閥VC3的輸入埠連通。 (開閉閥VC3係，相當於第二開閉閥。） 連通於開閉閥VB3的輸出埠的流路係，連通於質量流 量控制器MB的輸入埠。連通於另一方的開閉閥VC3的輪出 埠的流路係’連通於質量流量控制器MC的輸入埠。 連通於質量流量控制器MB的輪出埠的流路係，連通於 開閉閥VB4的輸入埠。連通於質量流量控制器MC的輸出埠 的流路係，連通於開閉閥VC4。 流路H9連通於開閉閥VB4及開閉閥VC4的輸出埠，流 路H9係分歧為朝向腔室的流路H9a和朝向排氣管的流路 在流路H9b方面，流量檢測系統Rl被連接。 連接於淨化氣體的氣體源的流路係，與開閉閥ρι的輸 入埠連通’連通於P1的輸出埠的流路係連通於開閉間Μ、 ρα、ρβ、pc的輸入埠。 建通於開閉閥PA的輸 u 咬艰π頁重流Η ^制器ΜΑ的輸入痒。連通於開關ρβ的輪出蜂的流路係 :於質量流量控制器ΜΒ的輸入埠。連通於開閉閥％ ^ *埠的流路係，連通於質量流量控制器此的輸入蜂。 H9倍連通、於質量流量控制11 MA、MB、MC的輪出埠的流辟 、，分歧為朝向腔室的流路H9a和朝 咖。在Μ ”向排氣管的流路 在抓路H9b方面，流量檢測系統R1被連接。 第2圖係表示氣趙供應裝置！的外觀上方立 圖係表示氣體供應裝置丨的下面翮 供應裝置1的下面圖。第4囷係表示氣體 201024588 供應裝置1的外觀下方立體圖。 第2圖第3圖、及第4圖的構成係對應於第1圖的 迴路圖。 如第3圖及第4圖所示般，有歧管塊2入、2卜2。及豕 字流路塊3A、3B、3C。 將歧管塊2A及V字流路塊^連結般，質量流量控制 器MA藉由未圖不的螺絲被固設。歧管塊2A、V字流路塊 • 3A、及質量流量控制器㈣、，成為一體。 由於有關歧管塊2B、V字流路塊3B、質量流量控制器 MB、以及有關歧管塊2C、”流路塊3c、及質量流量控制 器MC也採用同樣的構成，省略說明。 第一流路塊4係’在歧管塊2A、2B' 2C的端，藉由未 ®示的螺絲被固設。第二流路塊5係’在^流路塊3A、 B 3C的端’藉由未圖示的螺絲被固設。藉由第—流路塊 4和第二流路塊5被固設’氣趙供應裝置工係，作為全艘 © 成為一體。 如第2圖所不般，從氣體供應裝置1的側面（歧管塊 、的侧面、或歧管塊2C的側面）係，朝製程氣體的氣鱧源 連通的埠塊1G被設置。在本實施例中，埠塊1Q的輸入口 '、朝向水平方向’但輪人口也可設置在上、下、其他方向。 知埠塊10係，具體而言，朝製程氣體GAS1被供應的製 氣體源連通為蟑塊Ue朝製程氣體GAS2被供應的製程 氣趙源連通為埠塊12。 有關於製程氣體GAS3乃至^別係，由於採用與上述 11 201024588 製程氣體GAS 1、GAS2相同的構成而省略說明。 第5圖係表示第3圖的氣體供應裝置1的AA剖面圖。 如第3圖及第5圖所示般，在歧管塊2A方面，塊狀凸 緣BA1、BA2、BA3係，藉由螺絲被固設。塊狀凸緣BA1係， 位於開閉閥VA1的正下方；塊狀凸緣BA2係，位於開閉閥 VA2的正下方；塊狀凸緣ba3係，位於開閉閥VA3的正下 方0 如第5圖所示般，塊狀凸緣BA1内的凸緣連通路FA1 係’將歧管塊2A内的歧管連通路RA1連通，而連通至開閉 _ 閥VA1 ^塊狀凸緣BA2内的凸緣連通路FA2係，將歧管塊 2A内的歧管連通路RA2連通，而連通至開閉閥VA2。塊狀 凸緣BA3内的凸緣連通路FA3係，將歧管塊2A内的歧管連 通路RA3連通’而連通至開閉閥VA3。 在歧管塊2B方面，塊狀凸緣BB1、M2、BB3係，藉由 螺絲被固設。雖然未圖示，塊狀凸緣BB1係，位於開閉闕 VB1的正下方；塊狀凸緣BB2係，位於開閉閥VB2的正下 方；塊狀凸緣BB3係，位於開閉閥VB3的正下方。 ® 在歧管塊2C方面，塊狀凸緣ΒΠ、BC2、BC3係，藉由 螺絲被固設。雖然未圖示，塊狀凸緣BC1係，位於開閉閱 VC1的正下方；塊狀凸緣BC2係，位於開閉閥vC2的正下 方；塊狀凸緣BC3係，位於開閉閥VC3的正下方。 雖然未圖示’在歧管塊2B、2C方面，歧管連通路被形 成，在塊狀凸緣方面’凸緣連通路被形成，在開閉閥vbi、 VB2、VB3、VC1、VC2、VC3 分別連通。 12 201024588 如第3圖及第4圖所示般，從埠塊11連通的管路κΐ 係’與連通於開閉閥VA1的塊狀凸緣ΒΑ1連通。（管路Κ1 係’構成迴路圖中的流路Η1的一部份。）從埠塊12連通的 管路Κ2係’與連通於開閉閥VA2的塊狀凸緣：ΒΑ2連通。從 埠塊13連通的管路Κ3係，與連通於開閉閥VA3的塊狀凸 緣ΒΑ3連通。 塊狀凸緣ΒΑ1、ΒΑ2、ΒΑ3的形狀係’採用L形式的塊 _ 狀凸緣60。又，在第5圖表示、塊狀凸緣ΒΑ1内的凸緣連 通路FA1、塊狀凸緣BA2内的凸緣連通路FA2、塊狀凸緣 BA3内的凸緣連通路FA3係，相當於後述的凸緣連通路66。 利用第8周，說明L形式的塊狀凸緣60的構成。第 8A圈係表示外觀立體圖。第8B圖係表示平面圖。第8C圃 • 係表示側面圖。第8D圖係表示正面圖。又，内部的凸緣連 通口 65及凸緣連通路66容易理解般’將凸緣連通口 65及 凸緣連通路66在各圖示中以虛線表示。 ® 塊狀凸緣60係，為矩方體形狀。塊狀凸緣60係，由 上面61a、下面61b、正面61c、背面61d、左侧面61e、 及右側面61ί的面所構成。 在正面61c的左上，連接埠64被固設在垂直方向。連 接埠64係，與被形成於塊狀凸緣内部的凸緣連通路66連 通。凸緣連通路66係連通至被形成於下面61b的凸緣連通 口 65。凸緣連通路66係’將被形成於歧管塊且被連結至 開閉閥的歧管連通路和連接埠64連通的流路。 在上面61a和右侧面6if的接合的場所方面，管路通 13 201024588 過用的缺口部的管路迴避部62被形成。管路迴避部μ的 形狀係，具備製程氣體通過的管路收納兩根的空間。亦即， 管路迴避部62的高度X係將管路一根的直徑部份的高度祚 為必要，深度2Y的最長部分的長度係將管路兩根的直徑部 份的長度作為必要。在管路迴避部62的正面61c侧貫通 孔63a被形成。又，在管路迴避部62的背面6ld側貫通 孔63b被形成。 貫通孔63a和貫通孔63b係，位於塊狀凸緣6〇的下面 61b的對角線上，在其間’凸緣連通口 被形成。因此， 藉由螺絲與歧管塊的螺孔固定時，可將均一的按壓力給予 凸緣連通口 65和歧管連通路的連通口的接合部。藉此，讦 防止從凸緣連通口 65和歧管連通路的連通口的接合部的 浅漏。 . 如第3圖及第4屬所示般，從埠塊14連通的管路K4 係，通過作為塊狀凸緣BA1的塊狀凸緣6〇的管路迴避部 62 ’與連通於開閉閥VB1的塊狀凸緣BB1連通。塊狀凸緣 ❹ BB1的形狀係，採用後述的中心形式的塊狀凸緣 從埠塊15連通的管路K5係’通過作為塊狀凸緣BA2 的塊狀凸緣60的管路迴避部62 1連通至連通於開閉閥VB2 的塊狀凸緣BB2。塊狀凸緣BB2的形狀係，採用後述的中 心形式的塊狀凸緣40。 利用第6圖，說明中心形式的塊狀凸緣40的構成。第 6A圖係表示外觀立體圖。第6B圖係表示平面圈。第6C圖 係表示侧面囷。第6D圖係表示正面圖。又，内部的凸緣連 14 201024588 通口 45及凸緣連通路46容易理解般，將凸緣連通口 45及 凸緣連通路46在各圖示中以虛線表示。 塊狀凸緣40係，為矩方體形狀。塊狀凸緣4〇係，由 上面41a、下面41b、正面41c、背面41d、左側面41e、 及右側面41 f的面所構成。 在正面41c的中心上，連接埠44被固設在垂直方向。 連接埠44係’與被形成於塊狀凸緣内部的凸緣連通路46 φ 連通。凸緣連通路46係在被形成於下面4 lb的凸緣連通口 45連通。凸緣連通路46係，將在被形成於歧管塊且被連 結至開閉閥的歧管連通路和連接埠44連通的流路。 在上面41a和左側面41e的接合的場所方面，管路通 過用的缺口部的管路迴避部42a被形成。管路迴避部42a 的形狀係，具備製程氣體通過的管路收納一根的空間。亦 即，管路迴避部42 a的高度X、以及深度γ的最長部分的 長度係，將管路一根的直徑部份的長度作為必要。在管路 ® 遥避部42a的正面41c側，貫通孔43a被形成。 在上面41a和右側面41ί的接合的場所方面，管路通 過用的缺口部的管路迴避部42b被形成。管路迴避部4此 的形狀係’具備製程氣體通過的管路收納一根的空間。亦 即，管路迴避部42b的高度x、以及深度γ的最長部分的 長度係，將管路一根的直徑部份的長度作為必要。在管路 迴避部42b的背面41d側，貫通孔彳北被形成。 有關貫通孔43a和貫通孔43b的效果係和上述塊狀凸 緣60相同。 15 201024588 從埠塊16連通的管路K6a係，通過作為塊狀凸緣βΑ3 的塊狀凸緣60的管路迴避部62，連通至連通於開閉閥vb3 的塊狀凸緣BB3。塊狀凸緣BB3的形狀係’採用第二連接 形式的塊狀凸緣80。 利用第10圖，說明第二連接形式的塊狀凸緣8〇的構 成。第10A圖係表示外覯立體圖。第1〇B圖係表示平面圖。 第10C圖係表示侧面圖。第10D圖係表示正面圖。又，内 部的凸緣連通口 85及凸緣連通路86容易理解般，將凸緣 連通口 85及凸緣連通路86在各圖示中以虛線表示。 塊狀凸緣80係，為矩方體形狀。塊狀凸緣8〇係，由 上面81a、下面81b、正面81c、背面81d、左侧面8le、 及右側面81 f的面所構成。 在正面81c的中心上，第一連接埠84a被固設在垂直 方向。又’在背面81d的中心上，第二連接埠84b被固設 在垂直方向。第一連接埠84a和第二連接埠84b係，藉由 被形成於内部的凸緣連通路86a被連通。 又’凸緣連通路86b係從凸緣連通路86a的途中對於 下面81b的凸緣連通口 85垂直地被形成。凸緣連通路86 係’將在被形成於歧管塊且被連結至開閉閥的歧管連通路 和第一連接埠84a、及第二連通埠84b連通的流路。 在上面81a和左側面81e的接合的場所方面，管路通 過用的缺口部的管路迴避部82a被形成。管路迴避部82a 的形狀係，具備製程氣體通過的管路收納一根的空間。亦 即’管路迴避部82a的高度X、以及深度γ的最長部分的 201024588 長度係，將管路一根的直徑部份的長度作為必要。在管路 迴避部82a的正面81c侧’貫通孔83a被形成。 在上面81a和右侧面的接合的場所方面，管路通 過用的.缺口部的管路迴避部82b被形成。管路迴避部82b 的形狀係，具備製程氣體通過的管路收納一根的空間。亦 即，管路迴避部82 b的尚度X、以及深度γ的最長部分的 長度係，將管路一根的直徑部份的長度作為必要。在管路 迴避部82b的背面81 d側’貫通孔83b被形成。 有關貫通孔83a和貫通孔83b的效果係和上述塊狀凸 緣60相同。 從璋塊17連通的管路K7係’第一為通過作為塊狀占 緣BA1的塊狀凸緣60的管路迴避部62，第二為通過作為 塊狀凸緣BB1的塊狀凸緣40的第二管路迴避部42 b，連通 至連接於開閉閥VC1的塊狀凸緣BC1。塊狀凸緣BC1的形 狀係，採用上述的R形式的塊狀凸緣50。 ❿ 從埠塊18連通的管路K8係，第一為通過作為魏狀凸 緣BA2的塊狀凸緣60的管路迴避部62，第二為通過作為 塊狀凸緣BB2的塊狀凸緣40的第二管路迴避部42b，連通 至連通於開閉閥VC2的塊狀凸緣BC2。塊狀凸緣BC2的形 狀係，採用上述的R形式的塊狀凸緣5〇。 從埠塊16連通的管路K6a係，連通至作為塊狀凸緣 BB3的塊狀凸緣80的第一連接砗84a。將塊狀凸緣80内的 埠連通路（未圖示）連通而朝第二連接埠84b連通。在第二 連接埠84b方面，管路K6b的一端連通。管路K6b的另一 17 201024588 端係連通至塊狀凸緣BC3。塊狀凸緣BC3係，採用上述# 中心形式的塊狀凸緣4 0。 〈塊狀凸緣的全體構成〉 在塊狀凸緣方面，上述的塊狀凸緣之外，有各種的樣 式。在第6圖乃至第19圖，表示塊狀凸緣的各種樣式。在 第6圖乃至第19圖方面，A乃至D圖分別被表示。a係表 示外觀立體圖。B係表示平面圖◊ C係表示側面圖。d係表 示正面圖。 在第20圖及第21圖’表示抬高凸緣的樣式。在第2〇 _ 圖及第21圖方面’ A乃至D囷分別被表示。A係表示外觀 立體圓。B係表示平面圖。C係表示背面圖。D係表示正面 圖。 又，内部的凸緣連通口及凸緣連通路容易理解般，將 凸緣連通口及凸緣連通路在各圖示中以虛線表示。 在以下，說明有關上述的塊狀凸緣40、60、80以外的 塊狀凸緣 50、70、90、1〇〇、11〇、120、130、140、150、 160、170以及抬高凸緣180、190。 ® 利用第7圖，說明R形式的塊狀凸緣50的構成。 塊狀凸緣50係，為矩方體形狀。塊狀凸緣50係，由 上面51a、下面51b、正面51c、背面51d、左側面51e、 及右側面51f的面所構成。 在正面51c的右上，連接埠54被固設在垂直方向。連 接埠54係’與被形成於塊狀凸緣内部的凸緣連通路56連 通。凸緣連通路56係連通至被形成於下面51b的凸緣連通 18 201024588 口 55。凸緣連通路56係’將被形成於歧管塊且被連結至 開閉閥的歧管連通路和連接埠54連通的流路。 在上面51a和左侧面51e的接合的場所方面，管路通 過用的缺口部的管路迴避部52被形成。管路迴避部的 形狀係，具備製程氣體通過的管路收納兩根的空間。亦即， 管路迴避部52的高度X係將管路一根的直徑部份的高度作 為必要，深度2Y的最長部分的長度係將管路兩根的直徑部 參份的長度作為必要。在管路迴避部52的正面51c側，貫通 孔53a被形成。又，在管路迴避部52的背面51d側，貫通 孔53b被形成。 貫通孔53a和貫通孔53b係，位於塊狀凸緣50的下面 5 lb的對角線上’在其間’凸緣連通口 55被形成。因此， 藉由螺絲與歧管塊的螺孔固定時，可將均一的按屋力給予 至凸緣連通口 55和歧管連通路的連通口的接合部。藉此， 可防止從凸緣連通口 55和歧管連通路的連通口的接合部 ❿的茂漏。 利用第9圖’說明第一連接形式的塊狀凸緣7〇的構成。 塊狀凸緣70係’為矩方體形狀。塊狀凸緣7〇係，由 上面71a、下面71b、正面71c、背面71d、左侧面71e、 及右側面71f的面所構成。 在正面71c的右上，第一連接埠74a被固設在垂直方 向。又，在背面71d的左上，第二連接埠74b被固設在垂 直方向。第一連接埠74a係，與被形成塊狀凸緣内部的凸 緣連通路76a連通。又，第二連接埠74b係，與被形成塊 201024588 狀凸緣内部的凸緣連通路76b連通。凸緣連通路76a、76b 係’連通至被形成於下面71b的凸緣連通口 75。凸緣連通 路76a、76b係’將被形成於歧管塊且被連結至開閉閥的歧 管連通路和第一連接埠74a、以及第二連接埠74b連通的 流路。 在上面71a的中心方面’管路通過用的缺口部的管路 迴避部72被形成。管路迴避部72的形狀係，具備製程氣 體通過的管路收納一根的空間。亦即，管路迴避部72的高 度X、及深度Y的最長部分的長度係，將管路一根的直徑 部份的長度作為必要。在管路迴避部72的正面71c側，貫 通孔73a被形成。又，在管路迴避部72的背面71d側，貫 通孔73b被形成。 有關貫通孔73a和貫通孔73b的效果係和上述塊狀凸 緣50相同。 利用第Π圖，說明第三連接形式的塊狀凸緣9〇的構 成。 塊狀凸緣90係，為矩方體形狀。塊狀凸緣9〇係，由 上面91a、下面91b、正面91c、背面91d、左側面91e、 及右側面91ί的面所構成。 在正面91c的左上，第—連接埠94a被固設在垂直方 向。又，在左側面91e的中心上，第二連接埠94b被固設 在垂直方向。第一連接埠94a和第二連接埠94b係，藉由 被形成於内部的凸緣連通路961)而被連通。又，凸緣連通 路96b係從凸緣連通路96a的途中對於下面911)的凸緣連 201024588 通口 95被形成。第一連接埠94a及第二連接埠94b係一 起’與被形成於塊狀凸緣内部的凸緣連通路96被連通。凸 緣連通路96係’連通至被形成於下面91b的凸緣連通口 95 °凸緣連通路96係，將在被形成於歧管塊且被連結至開 閉閥的歧管連通路和第一連接埠94a、及第二連接埠94b 連通的流路。 在上面91a和右侧面91 f的接合的場所方面，管路通 ❹ 過用的缺口部的管路迴避部92被形成。管路迴避部92的 形狀係，具備製程氣體通過的管路收納兩根的空間。亦即， 管路迴避部92的高度X的直徑部份的高度、深度2 γ的最 長部分的長度係，將管路兩根的直徑部份的長度作為必 要。在管路迴避部92的正面91c側，貫通孔93a被形成。 又，在管路迴避部92的背面9ld側，貫通孔g 313被形成。 有關貫通孔93a和貫通孔93b的效果係和上述塊狀凸 緣5 0相同。 ® 利用第12圖，說明第四連接形式的塊狀凸緣100的構 成。 第四形式的境狀.凸緣1〇〇係，由於與第9 .圓的第一連 接形式的塊狀凸緣70的構成大致相同，藉由說明不同的構 成’省略其他 1 02、1 03a、1 03b、1 05、1 〇6a、1 06b 的說明。 塊狀凸緣100係’為矩方體形狀。塊狀凸緣1〇〇係， 由上面101a、下面l〇lb、正面l〇ic、背面1〇ld、左侧面 1 〇 I e、及右側面1 〇 1 f的面所構成。 在正面101c的左上，第一連接埠1〇4a被固設在垂直 21 201024588 方向。又’在背面101d的右上’第二連接埠i〇4b被固設 在垂直方向。和塊狀凸緣70的構成的不同係，連接痒的配 置位置不同。 利用第13圖’說明第五連接形式的塊狀凸緣的構 成。 第五形式的塊狀凸緣110係’由於與第11圖的第三連 接形式的塊狀凸緣90的構成大致相同，藉由說明不同的構 成，省略其他112、113a、113b、115、116的說明。 塊狀凸緣110係，為矩方體形狀。塊狀凸緣係， ❹ 由上面111a'下面111b、正面111c、背面llld、左側面 111 e、及右側面111 f的面所構成。 在正面111c的中心上，第一連接埠114a被固設在垂 直方向。又’在左側面llle的右上，第二連接埠U4b被 固設在垂直方向。和塊狀凸緣90的構成的不同係，連接痒 的配置位置不同。 利用第14圖’說明第二中心形式的塊狀凸緣的 成。 © 第二中心形式的塊狀凸緣120係，由於與第6圖的中 心形式的塊狀凸緣40的構成大致相同’藉由說明不同的構 成，省略其他123a、123b、125、126的說明。 塊狀凸緣120係，為矩方體形狀。塊狀凸緣12〇係， 由上面121a、下面121b、正面121c、背面121d、左侧面 121e、及右側面121f的面所構成。 在上面121a和左側面121e的接合的場所方面，管路 22 201024588 通過用的缺口部的管路迴避部122a被形成。在上面i2ia 和右側面121ί的接合的場所方面，管路通過用的缺口部的 管路迴避部122b被形成。在上面i2la和背面I21d的接合 的場所方面’管路通過用的缺口部的管路迴避部122c被形 成。和塊狀凸緣40的構成的不同係，管路迴避部i22c被 形成與否不同。 利用第1 5圖’說明第三中心形式的塊狀凸緣13〇的構 成。201024588 VI. Description of the Invention: [Technical Field] The present invention relates to a gas supply device, and in the gas supply device of the first line and the second line, the first line system and the first a mass flow controller is connected, the second line is connected to the second mass flow controller, the first line has a first opening and closing valve and a second opening and closing valve, the first line has a third opening and closing valve and a fourth opening and closing The valve 'gas supply unit is connected to the supply 埠 of the four types of gases A, B, C, D. In the prior art, as a technique for reducing the number of use of the mass flow controller of the expensive and relatively large device and reducing the floor area, the following Patent Document 1 and The gas supply device that is dedicated to 2 is disclosed. As shown in Fig. 32, the gas ship supply unit 300, which is described in the patent document, has a mass flow rate of $3瞧 for controlling the flow rate of the gas before mixing. Further, in the mass flow rate controller 3_, three == 3〇2U, 303VA, and 304VA are connected. In Fig. 32, the opening and closing valve is preferably three as compared with the present invention. The line connected to the f-volume flow controller 3 is used as the first line. By having this configuration, the number of use of the mass flow controller of an expensive and relatively large device can be reduced. However, in the invention relating to the patent document i, for example, when the process gas is supplied, in the case of the process gas π which is frequently used, the process gas gi is supplied only through one mass flow controller 301MA. The other process gases G2, G3 passing through the same mass flow controller 301MA cannot be supplied simultaneously by the first line. In this case, the supply of the process gas G1 must be stopped when the other process gases G2 and G3 are supplied. Therefore, there is a problem that it is impossible to cope with a complicated process and a new mass flow controller must be provided for correspondence. Here, as an invention for solving the problem of the invention related to the patent document ’, the invention related to Patent Document 2 is as follows. As shown in Fig. 33, the gas supply device 200 described in Patent Document 2 has three mass flow controllers 2〇1ma, 2〇1mb, and 2〇imc. In the mass flow controller 201MA, the eight opening and closing valves up to the opening and closing valves 212a to 212h are in communication. Further, the other mass flow controllers 2〇1, 210MC are also connected to the eight open/close valves, respectively, and the line connected to the mass flow controller 201MA is used as the first line, and is connected to the line system of the mass flow controller 2〇iMB. As the second line, the line connected to the mass flow controller 2〇imc serves as the third line. For example, when any one of the opening and closing valves 212A, 213A' or 214A is opened when the process gas gi is supplied, the process gas G1 can be supplied from any one of the first line (four) and three lines. Therefore, in the process of supplying the frequently supplied process, for example, when the process gas is supplied by the first line, the other process gases G2, G3 can be supplied by the other second and third lines. Therefore, it is not necessary to stop the supply of the process gas G1, and other process gases G2 and G3 can be supplied. [Patent Document 1] Japanese Patent No. 3904368 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2003-91 No. 322 No. 201024588 [Problem to be Solved by the Invention] However, in the conventional gas supply device 200, there is The following problem 0 For example, in the gas supply device 200, there are 24 on-off valves. Therefore, since the opening and closing valve is increased, there is a problem that the manufacturing cost is increased, and the floor occupancy area becomes large. Further, as described above, the number of the opening and closing valves of the gas supply device 300' of the patent document 1 is small, for example, when the gas is supplied, only one mass flow rate is passed in the case of the process gas G1 which is frequently used. When the controller 301MA supplies the process gas G1, the other process gases G2 and G3 passing through the same mass flow controller 301MA cannot be supplied simultaneously by the first 'line. In this case, when the other process gases G2 and G3 are supplied, the supply of the process gas G1 must be stopped. Therefore, there is a problem that it is impossible to cope with a complicated gas path and a new mass flow controller must be provided for correspondence. Further, in the gas supply device 3 of the related patent document 1, since the supply source of the process gas used in each process and each process and the entire line for supplying the process gas are directly connected to the respective opening and closing valves, There is a mixture of pipes that cannot reduce the floor area. Therefore, the present invention has been made in an effort to solve the above problems, and to provide a gas supply device that can use a plurality of process gases and reduce the floor occupancy area without stopping the supply of the process gas frequently used. [Means for Solving the Problem] In order to achieve the above object, the gas supply 5 201024588 device and the block flange system according to an embodiment of the present invention have the following configuration. (1) In the gas supply device having the first line and the second line, the first line is connected to the first mass flow controller, and the second line is connected to the second mass flow controller, the first line has the first An opening and closing valve and a second opening (4), the second circuit has a third opening and closing valve and a fourth opening and closing chamber, and the gas supply device is connected with a supply port for supplying four kinds of gases a, b, c, and d, and the gas A and the gas B The same gas is used, the first opening and closing and the third opening and closing valve are connected to the supply port of the supply gas A, the second opening is connected to the supply port of the supply gas G, and the fourth opening and closing valve system is supplied with the supply gas.埠 Connect. (2) The gas supply device according to (1), which has a block flange that is attached to a lower surface of a manifold block that is attached to all of the opening and closing valves, wherein the block flange system includes: a pipe connection The connection port is formed in the manifold block, and is connected to the manifold communication path of the opening and closing valve, the flange communication path connecting the ports, and the pipe avoiding portion for ensuring the space through which the pipe passes. (3) In the gas supply device according to (1) or (2), the flow rate detecting system is provided on the exhaust side of the circuit. (4) In the gas supply device according to (1) or (2), the block flange can be attached to the manifold block even in either the longitudinal direction or the lateral direction. (5) In the block flange to which the female pipe is mounted under the manifold block of the opening and closing valve, the 'bulk flange includes: a pipe connection connection, which will be formed in the manifold block and connected to The manifold communication passage of the opening and closing valve, the flange communication passage that connects the weir, and the pipeline avoiding portion for ensuring the space through which the pipeline passes. (6) In the block flange described in (5), the block flange can be attached to the manifold block even in the longitudinal direction of the vertical direction 201024588 or the lateral direction. [Effects of the Invention] The operation and effects of the gas supply device and the block flange described above will be described. (1) According to the gas supply device according to the above aspect of the invention, since the gas A and the gas B are the same gas, the first on-off valve and the third on-off valve are connected to the supply port of the supply gas A, and the second on-off valve system is The supply of the supply gas c is connected, and the supply of the fourth on-off valve system and the supply gas D is connected, for example, when the carcass is supplied, even if the process gas G1 is frequently used, it can be controlled by two mass flows. The process gas G1 is supplied. Therefore, in the case where other process gases G2, g3 are simultaneously supplied, the process gas G2 or G3 can be simultaneously supplied by using the process gas G1 using the other mass flow controller. Therefore, there is no need for a new mass flow controller due to the complexity of the process gas. (2) The configuration of (1) further includes a block flange mounted on a lower surface of the manifold block attached to the opening and closing cabinet, wherein the block flange system includes: a connection port connecting the pipe and the road, The manifold communication path formed in the manifold block and connected to the opening and closing valve, the flange communication path connecting the ports, and the pipe avoiding portion for ensuring the space through which the pipe passes are adopted. The rectification of the pipeline 'can reduce the wasted space and reduce the floor area. (3) The configuration of (1) or (2) is adopted, and the flow detection system is further provided on the exhaust side of the circuit. Therefore, by detecting the flow rate of the mass flow controller, the mass flow controller can be performed. Proper judgment. (4) The configuration of (1) or (2) is adopted, and the block flange can be attached to the manifold block even in either the longitudinal direction or the lateral direction. Therefore, 7 201024588 is configured with a gas supply device. The location of the gas supply can be designed. Therefore, the gas supply device can be configured even in a space-simplified manner. (5) In the block flange that is attached to the lower surface of the manifold block that is attached to the opening and closing valve, the block flange includes a connection port that is connected to the pipe, is formed in the manifold block, and is connected to the opening and closing. The manifold communication path of the valve, the flange communication path connecting the ports, and the pipe bypass for ensuring the space through which the pipe passes can be reduced by the frequency-reducing pipe, and the floor space can be reduced. (6) The configuration of (5) is adopted, and the block flange is configured such that either one of the longitudinal direction and the lateral direction can be attached to the manifold block. The location of the installation can be designed as a gas supply. Therefore, the gas supply device can be configured even in a space-simplified manner. [Embodiment] An embodiment of a gas supply device and a block flange according to the present invention will be described in detail with reference to the drawings. (First Embodiment) <Overall Configuration of Gas Supply Device> Fig. 1 is a circuit diagram showing a gas supply device i. The gas supply device 1 is a gas supply method and has a suction port on the side. As shown in Fig. 1, the gas ship supply unit i is connected to eight types of process gases, such as GAS1, GAS2, GAS3, GAS4, GAS5, GAS6, GAS7, GAS8, and a gas source for the purge gas. (Process gas GAS6, equivalent to 201024588 in gas A and gas B) The flow path H1 of the gas source connected to the process gas GAS1 is in communication with the input port of the opening and closing valve VA1. The flow path that is connected to the output port of the opening and closing valve VA1 is in communication with the input port of the mass flow controller MA. The flow path of the output port connected to the mass flow controller MA is connected to the input port of the opening and closing valve VA4. The flow path H9 communicates with the wheel 埠 of the opening and closing valve VA4, and the flow path (10) is divided into a flow path H9a toward the chamber and a flow path jj9b toward the exhaust pipe. In the flow path H9b, the flow detection system ri is connected. In the case of the flow path H9b, the flow rate detecting system R1 is connected, and an inappropriate determination of the mass flow controller can be performed. The flow path of the gas source connected to the process gas GAS2 is in communication with the input port of the opening and closing VA2. The flow path of the output port communicating with the opening and closing valve VA2 is in communication with the wheel enthalpy of the mass flow controller MA. The flow path of the output port connected to the mass flow controller MA is connected to the input port of the opening and closing valve VA4. The configuration of the opening and closing valve VA4 is the same as that described above. The loops of the process gases GAS3, GAS4, GAS5, GAS7, and GAS8 toward the chamber and the exhaust pipe are the same as those of the above-described process gases GAS1, GASi. (The line system connected to the mass flow controller MB corresponds to the first line; the mass flow controller MJB is equivalent to the first mass flow controller. The line system connected to the mass flow controller MC is equivalent to the second line. The mass flow controller MC is equivalent to the second mass flow controller. The flow path H6 of the gas source connected to the process gas GAS6 is divided into two flow paths H6a and H6b from the middle. One of the flow paths H6a, the side 9 201024588 The opening and closing valve VB3 is connected to the input port. (The opening and closing valve VB3 is equivalent to the first opening/closing valve.) The other flow path H6b is in communication with the input port of the opening and closing valve VC3. (The opening and closing valve VC3 is equivalent to the second opening/closing valve.) The flow path of the output port communicating with the opening and closing valve VB3 is connected to the input port of the mass flow controller MB. The flow path of the turn-off 连通 connected to the other open/close valve VC3 is connected to the input port of the mass flow controller MC. The flow path of the wheel that is connected to the mass flow controller MB is connected to the input port of the opening and closing valve VB4. The flow path that is connected to the output 埠 of the mass flow controller MC is connected to the opening and closing valve VC4. The flow path H9 communicates with the output 埠 of the opening and closing valve VB4 and the opening and closing valve VC4, and the flow path H9 is branched into a flow path H9a toward the chamber and a flow path toward the exhaust pipe. The flow rate detecting system R1 is connected to the flow path H9b. The flow path of the gas source connected to the purge gas communicates with the input port of the opening and closing valve ρ. The flow path of the output port connected to P1 communicates with the input port of the opening and closing Μ, ρα, ρβ, pc. Jiantong's input and closing valve PA's input u bite hard π page reflow Η ^ device ΜΑ input itch. The flow path of the wheeled bee connected to the switch ρβ: at the input port of the mass flow controller ΜΒ. A flow path system connected to the opening and closing valve % ^ *埠 is connected to the input bee of the mass flow controller. H9 times the connection, the circulation of the mass flow control 11 MA, MB, MC, and the divergence, the divergence is the flow path H9a toward the chamber and the café. The flow detection system R1 is connected to the flow path to the exhaust pipe in the path H9b. The second figure shows the appearance of the gas supply device! The upper view shows the lower supply of the gas supply device. Fig. 4 is a perspective view showing the appearance of gas 201024588 supply device 1. The structure of Fig. 2, Fig. 3 and Fig. 4 corresponds to the circuit diagram of Fig. 1. Fig. 3 and Fig. 4 As shown, there are manifold blocks 2, 2 and 2, and 流 word channel blocks 3A, 3B, and 3C. The manifold block 2A and the V-word block are connected, and the mass flow controller MA is not The screws of the figure are fixed. The manifold block 2A, the V-shaped flow path block • 3A, and the mass flow controller (4) are integrated. Since the manifold block 2B, the V-shaped flow path block 3B, and the mass flow controller The same configuration is also adopted for the MB and the manifold block 2C, the flow path block 3c, and the mass flow controller MC, and the description thereof will be omitted. The first flow path block 4 is fixed at the end of the manifold block 2A, 2B' 2C by a screw not shown. The second flow path block 5 is fixed at the end of the flow path blocks 3A and B3C by screws (not shown). The first flow path block 4 and the second flow path block 5 are fixed to the 'gas supply device', and the whole ship is integrated. As shown in Fig. 2, from the side surface of the gas supply device 1 (the side surface of the manifold block, or the side surface of the manifold block 2C), the block 1G that communicates with the gas source of the process gas is provided. In the present embodiment, the input port ' of the block 1Q is oriented in the horizontal direction', but the wheel population may be set in the up, down, and other directions. The block 10 is specifically connected to the process gas supplied to the process gas GAS1 so that the process gas supplied from the block Ue to the process gas GAS2 is connected to the block 12. Regarding the process gas GAS3 and the like, the same configuration as that of the above-described 11 201024588 process gases GAS 1 and GAS2 is adopted, and the description thereof is omitted. Fig. 5 is a cross-sectional view showing the AA of the gas supply device 1 of Fig. 3. As shown in Figs. 3 and 5, in the manifold block 2A, the block flanges BA1, BA2, and BA3 are fixed by screws. The block flange BA1 is located directly below the opening and closing valve VA1; the block flange BA2 is located directly below the opening and closing valve VA2; and the block flange ba3 is located directly below the opening and closing valve VA3 as shown in Fig. 5. As shown, the flange communication path FA1 in the block flange BA1 communicates with the manifold communication path RA1 in the manifold block 2A, and communicates to the flange communication path in the opening and closing_valve VA1 ^block flange BA2 The FA2 system connects the manifold communication passage RA2 in the manifold block 2A to the opening and closing valve VA2. The flange communication passage FA3 in the block flange BA3 communicates with the manifold passage RA3 in the manifold block 2A and communicates with the opening and closing valve VA3. In the manifold block 2B, the block flanges BB1, M2, and BB3 are fixed by screws. Although not shown, the block flange BB1 is located immediately below the opening and closing 阙 VB1; the block flange BB2 is located directly below the opening and closing valve VB2; and the block flange BB3 is located directly below the opening and closing valve VB3. ® In the manifold block 2C, the block flanges BC, BC2, BC3 are fixed by screws. Although not shown, the block flange BC1 is located immediately below the opening and closing VC1; the block flange BC2 is located directly below the opening and closing valve vC2; and the block flange BC3 is located directly below the opening and closing valve VC3. Although not shown in the manifold blocks 2B and 2C, the manifold communication path is formed, and in the case of the block flange, the flange communication path is formed, and the opening and closing valves vbi, VB2, VB3, VC1, VC2, and VC3 are respectively Connected. 12 201024588 As shown in Fig. 3 and Fig. 4, the line κΐ connected from the block 11 communicates with the block flange 连通1 that communicates with the opening and closing valve VA1. (The pipe Κ 1 system constituts a part of the flow path Η 1 in the circuit diagram.) The pipe Κ 2 system that communicates with the dam block 12 communicates with the block flange ΒΑ 2 that communicates with the opening and closing valve VA2. The line Κ3 that communicates from the block 13 communicates with the block-shaped flange 连通3 that communicates with the opening and closing valve VA3. The shape of the block flanges ΒΑ1, ΒΑ2, and ΒΑ3 is a block-shaped flange 60 in the form of L. Further, Fig. 5 shows the flange communication path FA1 in the block flange ΒΑ1, the flange communication path FA2 in the block flange BA2, and the flange communication path FA3 in the block flange BA3, which is equivalent to The flange communication path 66 to be described later. The configuration of the L-shaped block flange 60 will be described using the eighth week. The 8A circle shows an appearance perspective view. Fig. 8B is a plan view. Section 8C • A side view. The 8D drawing shows a front view. Further, the inner flange communication port 65 and the flange communication path 66 are easily understood. The flange communication port 65 and the flange communication path 66 are indicated by broken lines in the respective drawings. ® Block flange 60 is a rectangular square shape. The block flange 60 is composed of a surface of the upper surface 61a, the lower surface 61b, the front surface 61c, the rear surface 61d, the left side surface 61e, and the right side surface 61. On the upper left side of the front surface 61c, the connection port 64 is fixed in the vertical direction. The 埠 64 series is connected to the flange communication path 66 formed inside the block flange. The flange communication passage 66 is in communication with the flange communication port 65 formed on the lower surface 61b. The flange communication passage 66 is a flow passage that is formed in the manifold block and connected to the manifold communication passage of the opening and closing valve and the connection port 64. In the place where the upper surface 61a and the right side surface 6if are joined, the pipe avoiding portion 62 of the notch portion which is used for the pipe passage 13 201024588 is formed. The shape of the pipe avoiding portion μ is a space in which two pipes are accommodated in the pipe through which the process gas passes. That is, the height X of the pipe avoiding portion 62 is necessary to increase the height of the diameter portion of the pipe, and the length of the longest portion of the depth 2Y is necessary to lengthen the diameter portions of the two pipes. A through hole 63a is formed on the front surface 61c side of the line avoiding portion 62. Further, a through hole 63b is formed on the back surface 6ld side of the line avoiding portion 62. The through hole 63a and the through hole 63b are formed on the diagonal line of the lower surface 61b of the block flange 6〇, and the flange communication port is formed therebetween. Therefore, when the screw is fixed to the screw hole of the manifold block, a uniform pressing force can be given to the joint portion of the flange communication port 65 and the communication port of the manifold communication path. Thereby, 浅 prevents shallow leakage from the joint portion of the communication port of the flange communication port 65 and the manifold communication path. As shown in Fig. 3 and the fourth genus, the line K4 that communicates from the block 14 passes through the line avoiding portion 62' which is the block flange 6 of the block flange BA1 and communicates with the opening and closing valve. The block flange BB1 of VB1 is in communication. The shape of the block flange BB1 is a pipe escape portion 62 that passes through the block flange 60 as the block flange BA2 by a pipe K5 that communicates from the block 15 by a block flange of a center type, which will be described later. 1 is connected to the block flange BB2 that communicates with the opening and closing valve VB2. The shape of the block flange BB2 is a block flange 40 of a center type which will be described later. The configuration of the block flange 40 in the center form will be described using Fig. 6 . Fig. 6A is a perspective view showing the appearance. Figure 6B shows a plane circle. Figure 6C shows the side 囷. Figure 6D shows a front view. Further, the inner flange connection 14 201024588 port 45 and the flange communication path 46 are easily understood, and the flange communication port 45 and the flange communication path 46 are indicated by broken lines in the respective drawings. The block flange 40 is a rectangular square shape. The block-shaped flange 4 is formed of a surface of the upper surface 41a, the lower surface 41b, the front surface 41c, the rear surface 41d, the left side surface 41e, and the right side surface 41f. At the center of the front surface 41c, the port 44 is fixed in the vertical direction. The port 44 is connected to the flange communication path 46 φ formed inside the block flange. The flange communication passage 46 communicates with the flange communication port 45 formed at the lower side 4 lb. The flange communication passage 46 is a flow passage that communicates with the manifold 44 that is formed in the manifold block and that is connected to the opening and closing valve. In the place where the upper surface 41a and the left side surface 41e are joined, the pipe line is formed by the pipe avoiding portion 42a of the notch portion for use. The shape of the pipe avoiding portion 42a is a space in which one pipe is accommodated in the pipe through which the process gas passes. That is, the height X of the pipe avoiding portion 42a and the length of the longest portion of the depth γ are necessary to lengthen the diameter portion of one of the pipes. A through hole 43a is formed on the front surface 41c side of the pipe ® escape portion 42a. In the place where the upper surface 41a and the right side surface 41 are joined, the pipe line is formed by the pipe avoiding portion 42b of the notch portion for use. The shape of the pipe avoiding portion 4 is a space in which a pipe through which the process gas passes is accommodated. That is, the height x of the line avoiding portion 42b and the length of the longest portion of the depth γ are necessary to lengthen the diameter portion of one of the tubes. On the back surface 41d side of the line avoiding portion 42b, a through hole north is formed. The effect of the through hole 43a and the through hole 43b is the same as that of the above-described block flange 60. 15 201024588 The pipe K6a that is connected from the block 16 is connected to the block flange BB3 that communicates with the opening and closing valve vb3 via the pipe avoiding portion 62 that is the block flange 60 of the block flange βΑ3. The shape of the block flange BB3 is a block flange 80 in the form of a second joint. The configuration of the block flange 8A of the second connection type will be described using Fig. 10. Fig. 10A is a perspective view of the outer casing. Figure 1B shows a plan view. Figure 10C shows a side view. The 10th figure shows a front view. Further, the flange communication port 85 and the flange communication path 86 are easily understood, and the flange communication port 85 and the flange communication path 86 are indicated by broken lines in the respective drawings. The block flange 80 is a rectangular square shape. The block-shaped flange 8 is formed of a surface of the upper surface 81a, the lower surface 81b, the front surface 81c, the rear surface 81d, the left side surface 8le, and the right side surface 81f. At the center of the front surface 81c, the first port 84a is fixed in the vertical direction. Further, at the center of the back surface 81d, the second connecting jaw 84b is fixed in the vertical direction. The first port 84a and the second port 84b are connected by a flange communication path 86a formed inside. Further, the flange communication passage 86b is formed perpendicularly to the flange communication port 85 of the lower surface 81b from the middle of the flange communication passage 86a. The flange communication path 86 is a flow path that communicates with the first communication port 84a and the second communication port 84b, which are formed in the manifold block and connected to the manifold communication passage of the opening and closing valve. In the place where the upper surface 81a and the left side surface 81e are joined, the pipe line is formed by the pipe avoiding portion 82a of the notch portion for use. The shape of the pipe avoiding portion 82a is a space in which one pipe is accommodated in the pipe through which the process gas passes. That is, the height X of the pipe avoiding portion 82a and the length of the longest portion of the depth γ of 201024588 are necessary for the length of the diameter portion of the pipe. The through hole 83a is formed on the side of the front surface 81c of the line avoiding portion 82a. In the joint place of the upper surface 81a and the right side surface, the pipe line is formed by the pipe avoiding portion 82b of the notched portion. The shape of the pipe avoiding portion 82b is a space in which one pipe is accommodated in the pipe through which the process gas passes. That is, the length X of the line avoiding portion 82b and the length of the longest portion of the depth γ are necessary to lengthen the diameter portion of one of the tubes. The through hole 83b is formed on the side of the back surface 81d of the line avoiding portion 82b. The effect of the through hole 83a and the through hole 83b is the same as that of the above-described block flange 60. The pipe K7 that communicates from the block 17 is first passed through the pipe avoiding portion 62 as the block flange 60 of the block-shaped flange BA1, and the second through the block flange 40 as the block flange BB1. The second pipe avoiding portion 42b communicates with the block flange BC1 connected to the opening and closing valve VC1. The shape of the block flange BC1 is the above-described R-shaped block flange 50.线 The line K8 that is connected from the block 18, first through the pipe avoiding portion 62 as the block flange 60 of the weir flange BA2, and second through the block flange as the block flange BB2 The second pipe avoiding portion 42b of 40 communicates with the block flange BC2 that communicates with the opening and closing valve VC2. The shape of the block flange BC2 is the above-described R-shaped block flange 5〇. The line K6a communicating from the block 16 is connected to the first port 84a as the block flange 80 of the block flange BB3. The 埠 communication passage (not shown) in the block flange 80 is communicated to communicate with the second connection 埠 84b. In the second port 84b, one end of the line K6b is connected. The other 17 201024588 end of line K6b is connected to the block flange BC3. The block flange BC3 is a block flange 40 of the above-mentioned # center type. <Overall Configuration of Block Flange> In terms of the block flange, various types of the above-described block flanges are available. In Fig. 6 to Fig. 19, various patterns of the block flange are shown. In the sixth to the 19th, the graphs A and D are respectively shown. The a line shows the appearance of a perspective view. B is a plan view ◊ C is a side view. The d series shows the front view. Fig. 20 and Fig. 21 show the pattern of the raised flange. In the second and third figures, 'A and D' are respectively indicated. The A system indicates the appearance of a solid circle. The B system represents a plan view. The C system shows the rear view. The D system indicates the front view. Further, the internal flange communication port and the flange communication path are easily understood, and the flange communication port and the flange communication path are indicated by broken lines in the respective drawings. In the following, the block flanges 50, 70, 90, 1〇〇, 11〇, 120, 130, 140, 150, 160, 170 and the raised flange 180 other than the above-described block flanges 40, 60, 80 will be described. 190. ® The configuration of the R-shaped block flange 50 will be described using Fig. 7. The block flange 50 is a rectangular parallelepiped shape. The block flange 50 is composed of a surface of the upper surface 51a, the lower surface 51b, the front surface 51c, the rear surface 51d, the left side surface 51e, and the right side surface 51f. On the upper right side of the front surface 51c, the connecting jaw 54 is fixed in the vertical direction. The connecting jaw 54 is connected to the flange communication passage 56 formed inside the block flange. The flange communication passage 56 is communicated to the flange communication 18 201024588 port 55 formed on the lower surface 51b. The flange communication passage 56 is a flow passage that is formed in the manifold block and connected to the manifold communication passage of the opening and closing valve and the connection port 54. In the place where the upper surface 51a and the left side surface 51e are joined, the piping is formed by the piping avoiding portion 52 of the notched portion for use. The shape of the pipe avoiding portion is a space in which two pipes are accommodated in the pipe through which the process gas passes. That is, the height X of the line avoiding portion 52 is necessary to increase the height of the diameter portion of the pipe, and the length of the longest portion of the depth 2Y is necessary to lengthen the diameter portion of the two pipes. A through hole 53a is formed on the front surface 51c side of the line avoiding portion 52. Further, on the side of the back surface 51d of the line avoiding portion 52, a through hole 53b is formed. The through hole 53a and the through hole 53b are formed on the diagonal line "between" the upper side of the block flange 50, and the flange communication port 55 is formed. Therefore, when the screw is fixed to the screw hole of the manifold block, a uniform pressing force can be given to the joint portion of the flange communication port 55 and the communication port of the manifold communication path. Thereby, leakage of the joint portion 从 from the communication port of the flange communication port 55 and the manifold communication passage can be prevented. The configuration of the block flange 7〇 of the first connection type will be described using Fig. 9'. The block flange 70 is in the shape of a rectangular parallelepiped. The block-shaped flange 7 is formed of a surface of the upper surface 71a, the lower surface 71b, the front surface 71c, the rear surface 71d, the left side surface 71e, and the right side surface 71f. On the upper right side of the front surface 71c, the first connecting jaw 74a is fixed in the vertical direction. Further, on the upper left side of the back surface 71d, the second connecting jaw 74b is fixed in the vertical direction. The first port 74a is in communication with the flange communication path 76a formed inside the block flange. Further, the second port 74b is in communication with the flange communication path 76b inside the block forming flange 201024588. The flange communication passages 76a, 76b are connected to the flange communication port 75 formed on the lower surface 71b. The flange communication passages 76a, 76b are a flow passage that is formed in the manifold block and that is connected to the manifold communication passage of the opening and closing valve, and the first connection port 74a and the second port 74b. In the center of the upper surface 71a, the line avoiding portion 72 of the notch portion for the passage is formed. The shape of the pipe avoiding portion 72 is such a space as to accommodate one of the pipes through which the process gas passes. That is, the height X of the pipe avoiding portion 72 and the length of the longest portion of the depth Y are necessary to lengthen the diameter portion of one of the pipes. A through hole 73a is formed on the front surface 71c side of the line avoiding portion 72. Further, on the side of the back surface 71d of the line avoiding portion 72, a through hole 73b is formed. The effect of the through hole 73a and the through hole 73b is the same as that of the above-described block flange 50. The configuration of the block flange 9A of the third connection type will be described using a second diagram. The block flange 90 is a rectangular parallelepiped shape. The block-shaped flange 9 is formed of a surface of the upper surface 91a, the lower surface 91b, the front surface 91c, the rear surface 91d, the left side surface 91e, and the right side surface 91. On the upper left side of the front surface 91c, the first connecting port 94a is fixed in the vertical direction. Further, at the center of the left side surface 91e, the second connecting jaw 94b is fixed in the vertical direction. The first port 94a and the second port 94b are connected by the flange communication path 961) formed inside. Further, the flange communication passage 96b is formed from the flange connection 201024588 port 95 of the lower surface 911) from the middle of the flange communication passage 96a. The first port 94a and the second port 94b are in communication with the flange communication path 96 formed inside the block flange. The flange communication passage 96 is connected to the flange communication passage 95 formed in the lower surface 91b, and is connected to the manifold communication passage 96, and is connected to the manifold communication passage formed in the manifold block and connected to the opening and closing valve. A flow path that connects the port 94a and the second port 94b. In the place where the upper surface 91a and the right side surface 91f are joined, the pipe avoiding portion 92 of the notch portion through which the pipe is passed is formed. The shape of the pipe avoiding portion 92 is a space in which two pipes are accommodated in the pipe through which the process gas passes. That is, the height of the diameter portion of the pipe avoiding portion 92 and the length of the longest portion of the depth 2 γ are necessary to lengthen the diameter portions of the two pipes. A through hole 93a is formed on the front surface 91c side of the line avoiding portion 92. Further, a through hole g 313 is formed on the back surface 9ld side of the line avoiding portion 92. The effect of the through hole 93a and the through hole 93b is the same as that of the above-described block flange 50. ® The construction of the block flange 100 of the fourth connection form will be described using Fig. 12. The shape of the fourth form. The flange 1 is substantially the same as the configuration of the block flange 70 of the first connection form of the ninth circle, and the other configurations are omitted by omitting other 02, 103a , 1 03b, 1 05, 1 〇 6a, 1 06b description. The block flange 100 is in the shape of a rectangular parallelepiped. The block-shaped flange 1 is composed of a surface of the upper surface 101a, the lower surface 10b, the front surface 1〇ic, the rear surface 1〇ld, the left side surface 1 〇 I e , and the right side surface 1 〇 1 f. On the upper left side of the front side 101c, the first port 埠1〇4a is fixed in the direction of the vertical 21 201024588. Further, the second connection 埠i 〇 4b on the upper right side of the back surface 101d is fixed in the vertical direction. The difference from the configuration of the block flange 70 is that the arrangement position of the joint is different. The constitution of the block flange of the fifth connection form will be described using Fig. 13'. The block flange 110 of the fifth form is substantially the same as the configuration of the block flange 90 of the third connection form of Fig. 11, and the other configurations 112, 113a, 113b, 115, 116 are omitted by explaining different configurations. instruction of. The block flange 110 is a rectangular square shape. The block flange system is composed of the upper surface 111a' lower surface 111b, the front surface 111c, the rear surface 111d, the left side surface 111e, and the right side surface 111f. At the center of the front surface 111c, the first port 114a is fixed in the vertical direction. Further, on the upper right side of the left side surface llle, the second connection port U4b is fixed in the vertical direction. The difference from the configuration of the block flange 90 is different in the arrangement position of the connection itch. The formation of the block flange of the second center form will be described using Fig. 14'. © The block flange 120 of the second center type is substantially the same as the structure of the block flange 40 of the center form of Fig. 6 'By explaining the different configurations, the description of the other 123a, 123b, 125, 126 is omitted. . The block flange 120 is a rectangular parallelepiped shape. The block-shaped flange 12 is formed of a surface of the upper surface 121a, the lower surface 121b, the front surface 121c, the rear surface 121d, the left side surface 121e, and the right side surface 121f. In the place where the upper surface 121a and the left side surface 121e are joined, the pipe 22 201024588 is formed by the pipe avoiding portion 122a of the notched portion. In the place where the upper i2ia and the right side 121ί are joined, the pipe is formed by the pipe avoiding portion 122b of the notch portion for use. In the place where the i2la and the back surface I21d are joined, the pipe is formed by the pipe avoiding portion 122c of the notch portion. The difference from the configuration of the block flange 40 is different in whether or not the pipe avoiding portion i22c is formed. The configuration of the block-shaped flange 13A of the third center form will be described using Fig. 15'.
W 第三中心形式的塊狀凸緣13()係，由於與第6圖的中 心形式的塊狀凸緣40的構成大致相同，藉由說明不同的構 成，省略其他135、136的說明。 塊狀凸緣130係，為矩方體形狀。塊狀凸緣13〇係， 由上面131a、下面131b、正面131c、背面131d、左侧面 131e、及右側面i31f的面所構成。 在上面131a和左侧面131e的接合的場所方面，管路 ® 通過用的缺口部的管路迴避部132a被形成。在上面131a 和右側面131f的接合的場所方面，管路通過用的缺口部的 管路迴避部13 2b被形成。在上面131a和背面I31d的接合 的#所方面’管路通過用的缺口部的管路避避部132c被形 成。 在管路迴避部1 32b的正面131c側，貫通孔133b被形 成。在管路迴避部132a的背面131(1側，貫通孔ι33&被形 成。 和塊狀凸緣40的構成的不同係，管路迴避部i32c被 23 201024588 形成與否不同 '以及貫通孔的位置的不同。 利用第161，說明第式的塊狀凸緣14〇的構成。 第二R形式的塊狀凸緣140係，由於與第7囷的 式的塊狀凸緣50的構成大致相同，藉由說明不同的構成， 省略其他145、146的說明。 塊狀凸緣U0係，為矩方體形狀。塊狀凸緣140係， 由上面141a、下面141b、正面Ulc、背面Uld、左側面 141e、及右側面i4if的面所構成。 在上面141a和左侧面i41e的接合的場所方面，管路 〇 通過用的缺口部的管路迴避部142a被形成。管路迴避部 142a的形狀係，具備製程氣體通過的管路收納兩根的空 間。在上面141a和背面Hid的接合的場所方面，管路通 過用的缺口部的管路迴避部142b被形成。管路迴避部14別 的形狀係，具備製程氣體通過的管路收納一根的空間。 和塊狀凸緣50的構成的不同係，管路迴避部14訃被 形成與否不同。 利用第17圖’說明第二[形式的塊狀凸緣15〇的構成。參 第二L形式的塊狀凸緣15〇係，由於與第8圖的^形 式的塊狀凸緣60的構成大致相同，藉由說明不同的構成， 省略其他155、156的說明。 塊狀凸緣150係，為矩方體形狀。塊狀凸緣15〇係， 由上面151a、下面151b、正面151c、背面151d、左側面 151e、及右侧面151f的面所構成。 在上面151a和右側面151f的接合的場所方面管路 24 201024588 通過用的缺口部的管路迴避部152a被形成。管路迴避部 152 a .的形狀係，具僙製程氣體通過的管路收納兩根的空 間。在上面151a和背面151d的接合的場所方面，管路通 過用的缺口部的管路迴避部152b被形成。管路迴避部“讣 的形狀係，具備製程氣體通過的管路收納一根的空間。 和塊狀凸緣60的構成的不同係，管路迴避部152b被 形成與否不同。 ❿ 利用第18圖，說明第六連接形式的塊狀凸緣160的構 成。 第六連接形式的塊狀凸緣160係，由於與第圓的第 二連接形式的塊狀凸緣9〇的構成大致相同，藉由說明不同 的構成’省略其他165、166的說明》 塊狀凸緣160係，為矩方體形狀。塊狀凸緣ι6〇係， 由上面161a、下面161b、正面161c、背面161d、左侧面 161e、及右側面i61f的面所構成。 ® 在上面16la和右側面161f的接合的場所方面，管路 通過用的缺口部的管路迴避部162a被形成。管路迴避部 162a的形狀係’具備製程氣體通過的管路收納兩根的空 間。在上面161a和背面161d的接合的場所方面，管路通 過用的缺口部的管路迴避部162b被形成。管路迴避部162b 的形狀係，具備製程氣體通過的管路收納一根的空間。 和塊狀凸緣90的構成的不同係，管路迴避部i62b被 形成與否不同。 利用第19圖，說明第七連接形式的塊狀凸緣ι7〇的構 25 201024588 成。 第七連接形式的塊狀凸緣170係’由於與第13圖的第 五連接形式的塊狀凸緣11〇的構成大致相同，藉由說明不 同的構成，省略其他175、176的說明。 塊狀凸緣170係’為矩方艘形狀。塊狀凸緣17〇係， 由上面171a、下面171b、正面171c、背面uid、左侧面 171e、及右側面171f的面所構成。 在上面171a和背面171d的接合的場所方面，管路通 過用的缺口部的管路迴避部172a被形成。管路迴避部172a 的形狀係，具備製程氣體通過的管路收納兩根的空間。在 上面171a和右側面171f的接合的場所方面，管路通過用 的缺口部的管路迴避部172b被形成。管路迴避部i72b的 形狀係，具備製程氣體通過的管路收納一根的空間。 和塊狀凸緣110的構成的不同係，管路迴避部172b被 形成與否不同。 利用第20圖，說明第一抬高凸緣180的構成。 抬高凸緣180係，為矩方體形狀。第一抬高凸緣18〇 係，由上面181a、下面；181b、正面181c、背面I81d、左 側面181e、及右側面181f的面所構成。 在上面181a的中心，連接口 187被形成。在下面181b 的中心，連通口 185被形成。從連接口 187到連通口 185 為止係，凸緣連通路186連通。 將連接口 187及連通口 185挾持般、貫通孔183a、183b 被形成。貫通孔18 3a、183b係，貫通至下面181b為止。 201024588 抬高凸緣180的高度¥係，至少比管路一根的直徑高 利用第21圖，說明第二抬高凸緣19〇的構成。 第二抬高凸緣ϊ90係，由於與第20圖的第一抬高凸緣 180的構成大致相同，藉由說明不同的構成，省略其他 191a、191b、191c、191d、191e、191f、193a、i93b、i95、 1 96、1 97的說明。 為第一抬高凸緣190The block flange 13 of the third center form is substantially the same as the block flange 40 of the center of Fig. 6, and the description of the other 135, 136 will be omitted by explaining the different configurations. The block flange 130 is a rectangular parallelepiped shape. The block flange 13 is formed of a surface of the upper surface 131a, the lower surface 131b, the front surface 131c, the rear surface 131d, the left side surface 131e, and the right side surface i31f. In the place where the upper surface 131a and the left side surface 131e are joined, the pipe ® is formed by the pipe avoiding portion 132a of the notch portion for use. In the place where the upper surface 131a and the right side surface 131f are joined, the pipe is formed by the pipe avoiding portion 13 2b of the notch portion for use. The line of the joint of the upper surface 131a and the back surface I31d is formed by the line avoiding portion 132c of the notch portion for use. The through hole 133b is formed on the front surface 131c side of the line avoiding portion 1 32b. In the back surface 131 of the pipe avoiding portion 132a (the one side, the through hole ι33 & is formed. The difference between the configuration of the block flange 40 and the block avoiding portion i32c is different from 23 201024588' and the position of the through hole. The configuration of the block flange 14 of the first embodiment will be described with reference to 161. The block flange 140 of the second R type is substantially the same as the block flange 50 of the seventh embodiment. The description of the other configurations 145 and 146 will be omitted. The block flange U0 is a rectangular square shape. The block flange 140 is composed of the upper surface 141a, the lower surface 141b, the front surface Ulc, the rear surface Uld, and the left side surface. 141e and the surface of the right side surface i4if. In the place where the upper surface 141a and the left side surface i41e are joined, the pipe line is formed by the pipe avoiding portion 142a of the notch portion for use. The shape of the pipe avoiding portion 142a is The space in which the process gas passes is accommodated in two. In the place where the upper surface 141a and the back surface Hid are joined, the pipe is formed by the pipe avoiding portion 142b of the notch portion. The pipe avoiding portion 14 has another shape. Department, with the pipeline through which the process gas passes The space in which one space is accommodated differs from the configuration of the block flange 50 in that the pipe avoiding portion 14 is formed differently. The configuration of the second [form block flange 15" will be described with reference to Fig. 17'. The block flange 15 of the second L type is substantially the same as the block flange 60 of the form of Fig. 8, and the description of the other configurations is omitted, and the description of the other 155 and 156 is omitted. The flange 150 is a rectangular parallelepiped shape, and the block flange 15 is formed by a surface of the upper surface 151a, the lower surface 151b, the front surface 151c, the rear surface 151d, the left side surface 151e, and the right side surface 151f. In the place where the right side surface 151f is joined, the pipe line 24 201024588 is formed by the pipe avoiding portion 152a of the notch portion used. The pipe avoiding portion 152 a is shaped to accommodate two spaces in the pipe through which the process gas passes. In the place where the upper surface 151a and the back surface 151d are joined, the pipe is formed by the pipe avoiding portion 152b of the notch portion for use. The pipe avoiding portion "the shape of the crucible is one in which the pipe through which the process gas passes is accommodated. Space. Different from the composition of the block flange 60 The pipe avoiding portion 152b is formed differently. ❿ The configuration of the block flange 160 of the sixth connection type will be described with reference to Fig. 18. The block flange 160 of the sixth connection type is due to the The configuration of the two-piece block flanges 9A is substantially the same, and the different configurations "Description of the other 165s and 166s" will be described. The block flanges 160 are rectangular members. The block flanges are 〇6 The surface is composed of the upper surface 161a, the lower surface 161b, the front surface 161c, the back surface 161d, the left side surface 161e, and the right side surface i61f. In the place where the upper surface 16la and the right side surface 161f are joined, the pipe is formed by the pipe avoiding portion 162a of the notch portion for use. The shape of the pipe avoiding portion 162a is a space in which two pipes are accommodated in the pipe through which the process gas passes. In the place where the upper surface 161a and the rear surface 161d are joined, the pipe line is formed by the pipe avoiding portion 162b of the notch portion for use. The shape of the pipe avoiding portion 162b is a space in which one pipe is accommodated in the pipe through which the process gas passes. The difference from the configuration of the block flange 90 is different in whether or not the pipe avoiding portion i62b is formed. With reference to Fig. 19, the structure of the block flange ι7 第七 of the seventh connection form will be described. The block flange 170 of the seventh connection type is substantially the same as the block flange 11A of the fifth connection form of Fig. 13, and the description of the other structures 175 and 176 will be omitted by explaining the different configurations. The block flange 170 is 'in the shape of a rectangular square. The block-shaped flange 17 is formed of a surface of the upper surface 171a, the lower surface 171b, the front surface 171c, the rear surface uid, the left side surface 171e, and the right side surface 171f. In the place where the upper surface 171a and the back surface 171d are joined, the pipe line is formed by the pipe avoiding portion 172a of the notch portion for use. The shape of the pipe avoiding portion 172a is a space in which two pipes are accommodated in the pipe through which the process gas passes. In the place where the upper surface 171a and the right side surface 171f are joined, the pipe is formed by the pipe avoiding portion 172b of the notch portion for use. The shape of the pipe avoiding portion i72b is a space in which a pipe through which the process gas passes is accommodated. The difference from the configuration of the block flange 110 is different depending on whether the pipe avoiding portion 172b is formed or not. The configuration of the first raised flange 180 will be described using Fig. 20. The raised flange 180 is a rectangular square shape. The first raised flange 18 is formed by the faces of the upper surface 181a, the lower surface 181b, the front surface 181c, the rear surface I81d, the left side surface 181e, and the right side surface 181f. At the center of the upper surface 181a, a connection port 187 is formed. At the center of 181b below, a communication port 185 is formed. The flange communication path 186 is connected from the connection port 187 to the communication port 185. The connection port 187 and the communication port 185 are held together, and the through holes 183a and 183b are formed. The through holes 18 3a and 183b are penetrated to the lower surface 181b. 201024588 The height of the raised flange 180 is at least higher than the diameter of one of the pipes. The structure of the second raised flange 19A will be described with reference to Fig. 21. The second raised flange ϊ 90 is substantially the same as the first raised flange 180 of Fig. 20, and the other configurations 191a, 191b, 191c, 191d, 191e, 191f, 193a, i93b, i95, 1 96, 1 97 description. For the first raised flange 190
第二抬高凸緣190的高度w係 的if?度V的兩倍的高度。 和第一抬高凸緣180的構成的不同係，高度ff的不同c 根據具備塊狀凸緣的效果係，如以下所述般。 在塊狀凸緣 40、50、60、70、80' 90、1〇〇、110、12〇、 130、140、150、160、170方面，管路迴避部被形成。在 通過管路之際’如帛3圖及第5圖所示般，心可逍過管 路迴避部’不必迴避其他塊狀凸緣而使管路通過、因此， 由於可將管路以直線狀拉伸’可作為單純的管路構造。又 由於可整頓管H減少浪費的㈣而可縮小地板佔有面 積，也可同時達到管路的節約。 〈製程氣體的供應方法〉 製程氣體的供應方法係利用第1圖的迴路圖說明。 例如’在將製程氣體GAS1傳送至腔室時，製程 GAS1係，成為被充填至流路耵為止的狀態。在此狀 將開閉閥VA1、VA4藉由夹m “ “ < 稭宙禾圖不的控制手段開閥。藉此，制 程氣體GAS1係，通過流路η】，、思新s 4且 、、狀略til，通過質量流量控制器 朝腔室被送入。 阳 27 201024588 在將製程氣體 GAS2、GAS3、GAS4、GAS5、GAS7、GAS8 朝腔室送入之際，由於與上述將製程氣體GAS1朝腔室送入 的供應方法沒有不同，省略說明。 作為將製程氣體GAS6朝腔室送入的供應方法，有兩個 方法。第一方法係，通過質量流量控制器mb而朝腔室送入 的方法。第二方法係，通過質量流量控制器MC而朝腔室送 入的方法。 第一方法係，製程氣體GAS6係在被充填至流路H6為 止的狀態時，將開閉閥VB3、VB4藉由未圖示的控制手段開 ⑩ 閱°藉此’製程氣體GAS6係，通過流路H6a，通過質量流 量控制器MB而朝腔室被送入。 第二方法係’製程氣體GAS6係在被充填至流路H6為 止的狀態時，將在第1圖表示、開閉閥VC3、VC4藉由未圖 不的控制手段開閥。藉此，製程氣體GAS6係，通過流路 H6b通過質量流量控制器jjC朝腔室被送入。 如以上詳細說明般’根據本實施例的氣體供應裝置1 的1^ ’藉由有上述兩個方法’有關頻繁地使用的製程氣體© ，AS6係，藉由將開閉閥VB3或開閉閥VC3切替，可選擇通 應質量流量控制器MB或質量流量控制器MC而朝腔室供 供因此’例如’在將其他的製程空氣GAS7和GAS6同時 ^應的清形方面’有關製程氣體GAS6 ’藉由使用質量流量 二，器^，可同時供應製程氣體GAS6及GAS7。 ^ ^ 例如，在將其他的製程空氣GAS4和GAS6同時供 ’有關製程氣體GAS6，藉由使用質量流量控 28 201024588 制器MC，可同時供應製程氣體GAS6及GAS4。 因此，即使在有頻繁地使用的製程氣體GAS6的情形， 由於可通過兩個質量流量控制器MB、MC而供應製程氣體 GAS6，可對應於複雜的製程。因此，使新的質量流量控制 器沒有必要。 又，由於塊狀凸緣 40、50、60、70、80、90、100、 110、120、130、14〇、15〇、160、170 係，藉由具有管路The height of the second raised flange 190 is twice the height of the if degree V. The difference from the configuration of the first raised flange 180 is that the difference c in height ff is based on the effect of having a block flange as follows. In the case of the block flanges 40, 50, 60, 70, 80' 90, 1 〇〇, 110, 12 〇, 130, 140, 150, 160, 170, the pipe avoiding portion is formed. When passing through the pipeline, as shown in Fig. 3 and Fig. 5, the heart can pass through the pipe avoiding portion. It is not necessary to avoid other block flanges to pass the pipe. Therefore, the pipe can be straight. Stretching can be used as a simple pipe structure. Moreover, since the tube H can be rectified to reduce waste (4) and the floor area can be reduced, the pipeline can be saved at the same time. <Method of Supplying Process Gas> The method of supplying the process gas is explained using the circuit diagram of Fig. 1 . For example, when the process gas GAS1 is transferred to the chamber, the process GAS1 is in a state of being filled into the flow path. In this case, the opening and closing valves VA1, VA4 are opened by means of a control means of "meach". Thereby, the process gas GAS1 is fed into the chamber through the mass flow controller through the flow path η], the new s 4 and the slightly til. Yang 27 201024588 When the process gases GAS2, GAS3, GAS4, GAS5, GAS7, and GAS8 are fed into the chamber, the description is omitted since the supply method of feeding the process gas GAS1 to the chamber is not different. As a supply method for feeding the process gas GAS6 toward the chamber, there are two methods. The first method is a method of feeding into the chamber through the mass flow controller mb. The second method is a method of feeding into the chamber through the mass flow controller MC. In the first method, when the process gas GAS6 is in the state of being filled in the flow path H6, the opening and closing valves VB3 and VB4 are opened by a control means (not shown), and the process gas GAS6 is passed through the flow path. H6a is fed into the chamber through the mass flow controller MB. In the second method, when the process gas GAS6 is filled in the flow path H6, the on-off valves VC3 and VC4 shown in Fig. 1 are opened by a control means not shown. Thereby, the process gas GAS6 is fed into the chamber through the mass flow controller JjC through the flow path H6b. As described in detail above, the gas supply apparatus 1 according to the present embodiment is replaced by the above-mentioned two methods 'related to the frequently used process gas©, AS6 system, by switching the opening and closing valve VB3 or the opening and closing valve VC3 The mass flow controller MB or the mass flow controller MC can be selected to supply the chamber, so that 'for example, 'the process gas GAS6' related to the clearing of the other process air GAS7 and GAS6 The process gas GAS6 and GAS7 can be supplied simultaneously using the mass flow rate two. ^ ^ For example, the process gases GAS6 and GAS4 can be supplied simultaneously by supplying the other process gases GAS4 and GAS6 to the process gas GAS6 by using the mass flow control. Therefore, even in the case of the process gas GAS6 which is frequently used, since the process gas GAS6 can be supplied through the two mass flow controllers MB, MC, it can correspond to a complicated process. Therefore, it is not necessary to have a new mass flow controller. Also, due to the block flanges 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 14 〇, 15 〇, 160, 170,
連接的連接璋、將被形成於歧管塊且被連結至開閉閥的歧 管連通路和連接埠連通的凸緣連通路、以及確保管路通過 的空間用的管路迴避部’可整頓管路’可減少浪費的空間 而可縮小地板佔有面積。 又，藉由在迴路的排氣側具有流量檢測系統El，可進 行質量流量控制器的不恰當的判定。 ❹ 又’根據本實施例的氣體供應裝置 I的話，可將埠塊 設置於氣體供應裝置的側面。因此 置的場所，可設計氣體供應裝置。 裝置的線路側方向確保空間時係， 氣體供應裝置1般將埠塊設置於侧 應裝置。 ’配合設置氣體供應裝 例如，無法在氣髏供應 藉由如第一實施例中的 面方向，可設置氣體供 (第二實施例） 第22圖係表示氣體供應裝置 a _ 的外觀上方立體圖。 第23圖係表示氣體供應裝置21的 卜面圖。第24圖係表示 氣體供應裝置21的外觀下方立體圖。 _ 第25圖係為第23圖 的氣體供應裝置21的BB剖面圖。 29 201024588 氣體供應裝置21係，作為氣體供應方式可採用將進入 口在線路方向具備的形式。 氣體供應裝置21係，在第一實施例被利用，基於第i 圖的迴路圖被設計。因此，基本的構成係，由於與第一實 施例中的氣體供應裝置1没有不同，在以下，說明有關與 氣體供應裝置1的不同點。 從氣體供應裝置21的線路側（第一流路塊4側、或第 二流路塊5側）係，朝製程氣趙的氣體源連通的埠塊1〇被 設置。在本實施例中，埠塊1〇的輪入口係朝向水平方向，_ 但輸入口也可設置在上、下、其他的方向。 埠塊10係，具體而言，朝製程氣體GAS1被供應的製 程氣體源連通為埠塊11。朝製程氣想GAS2被供應的製程 氣體源連通為埠塊12。 有關製程氣體GAS3乃至⑽係，由於採用與上述製 程氣體GAS1、GAS2相同的構成而省略說明。 如第23圖及第24圖所示般，從料16連通的管路 …係，連接至作為塊狀凸緣咖3的塊狀凸緣9。的第二 j接埠94b。將塊狀凸緣9〇内料連通路恤連通而朝第 —、接埠94a連通。在第一連接埠方面，管路的 —端連通。流路K6b的另-端係連接至塊狀凸緣觀。 塊狀凸緣BC13係’採用在上述的第8圖所示的塊狀凸 ” 5〇。塊狀凸緣50的連接埠54係，不朝向氣體供應裝置 的線路側方向，朝向側面方向。 從其他埠換11、19、. 塊 12 13、14、15、17、18連通的管路 30 201024588 係’由於與第一實施例的構成大致上沒有不同，省略說明。 如以上詳細說明般，根據本實施例的氣體供應裝置21 的話，藉由將塊狀凸緣朝向與第一實施例的侧面.不同的線 路侧’可將埠塊設置於線路侧。因此，配合設置氣體供應 裝置的場所’可設計氣體供應裝置。例如，無法在氣體供 應裝置的側面方向確保空間時係，藉由如第二實施例中的 氣體供應裝置21般將埠塊設置於線路侧’可設置氣體供應 裝置。 (第三實施例） 第.26圖及第27圖係，表示第三實施例中的氣體供應 裝置22的迴路圖。第26圖及第27圖的氣體供應裝置22 係，在質量流量控制器MA3、MB3之前，具有朝腔室及排氣 管聯繫的流路H10作為特徵。 藉由在質量流量控制器MA3、MB3之前，設置流路H1〇, 可提高將淨化氣體流動時的淨化排氣效率。 第26圖係’在將第一實施例簡略的迴路圖，設置流路 H10的圖不；第27圖係’在習知技術的迴路圖設置流路H1〇 的圖示。 (第四實施例） 第28圖及第29圖係’表示第四實施例中的氣體供應 裝置23的迴路圖。第28圖及第29圖的氣體供應裝置23 係，在質量流量控制器MA4、MB4之後，具有朝腔室及排氣 管聯繫的流路H11作為特徵。 藉由在質量流量控制器MA4、MB4之後，設置流路HI 1， 31 201024588 例如，在使用製程氣體GAS1而使用質量流量控制器MA4 時，可使用不使用的質量流量控制器MB4、進行質量流量 控制器MB4的檢測。藉此，可檢測質量流量控制器MB4的 不恰當。 第28圖係，在將第一實施例簡略的迴路圖設置流路 H11的圖不，第29圖係，在習知技術的迴路囷設置流路HU 的圖示。 (第五實施例） 第30圖係’表示第五實施例中的氣體供應裝置以的參 上面圖。 氣體供應裝置24係，將第一實施例中的氣體供應裝置 1兩側配置的構成。 藉由採用將氣體供應裝置1兩側配置的構成，可將氣 體合流部G1的内容積大幅削減而將流量檢測系統的測* 時間大幅縮短。 又，藉由設置流量檢測系統R2，可進行質量流量控制 器的檢測。藉此’可得知質量流量控制器的不恰當。 ® (第六實施例） 第31圖係為表示第六實施例中的氣體供應裝置25的 -部份剖面的側面圖。具體而言，表示從橫列的開閉閥 VA11、VB11…的中心作為剖面的圖示。 藉由連通至歧管塊NA1的開閉間VA11、連通至歧管塊 NA2的開閉閥VB11…被構成。 在歧管塊NA1方面，抬高塊Ul連通；在歧管塊_ 32 201024588 方面，抬高媿KA2連通；；^ 1+拉& M 4 在歧管塊NA3以下、到歧管塊NA6 為止方面，抬高塊KA3以ΤΓ 4A >必τ, * η 下、抬尚塊ΚΑ6連通。抬高塊ΚΑΙ、 ΚΑ2、ΚΑ3係’採用上述的仏 的抬尚塊190。抬高塊|[Α4、ΚΑ5、 ΚΑ6係，採用上述的抬高塊ΐ8〇。 塊狀凸緣CA連通。在抬高塊ΚΑ2 在抬高塊ΚΑ3以下也相同，塊狀 在抬高塊ΚΑ1方面， 方面’塊狀凸緣CB連通。 凸緣CC以下連通。The connected port, the manifold communication path to be connected to the manifold block and connected to the opening and closing valve, and the flange communication path for connecting the ports, and the pipe avoiding portion for securing the space through which the pipe passes can rectify the pipe Road 'can reduce the waste space and reduce the floor area. Further, by having the flow rate detecting system El on the exhaust side of the circuit, an inappropriate determination of the mass flow controller can be performed. Further, according to the gas supply device 1 of the present embodiment, the crucible block can be disposed on the side of the gas supply device. Therefore, the place where the gas supply device can be designed. The line side direction of the apparatus ensures the space time, and the gas supply unit 1 places the block in the side unit. For example, it is impossible to supply gas in the gas supply by the direction of the surface as in the first embodiment, and the gas supply can be provided. (Second Embodiment) Fig. 22 is a perspective view showing the appearance of the gas supply device a_. Fig. 23 is a plan view showing the gas supply device 21. Fig. 24 is a perspective view showing the appearance of the gas supply device 21 below. Fig. 25 is a BB sectional view of the gas supply device 21 of Fig. 23. 29 201024588 The gas supply device 21 is a gas supply system in which the inlet port is provided in the line direction. The gas supply device 21 is utilized in the first embodiment, and is designed based on the circuit diagram of the i-th diagram. Therefore, the basic configuration is different from that of the gas supply device 1 in the first embodiment, and the difference from the gas supply device 1 will be described below. From the line side (the first flow path block 4 side or the second flow path block 5 side) of the gas supply device 21, a block 1 that communicates with the gas source of the process gas is provided. In the present embodiment, the wheel inlet of the block 1〇 is oriented in the horizontal direction, but the input port may be disposed in the upper, lower, and other directions. The block 10, in particular, the process gas source supplied to the process gas GAS1 is connected to the block 11. The process gas source that the GAS2 is supplied to is connected to the block 12 is connected to the process block. The process gases GAS3 and (10) are the same as those of the process gases GAS1 and GAS2 described above, and the description thereof is omitted. As shown in Figs. 23 and 24, the piping communicating from the material 16 is connected to the block flange 9 as the block flange 3. The second j is connected to 94b. The block flange 9 is connected to the inner communication passage and communicates with the first and second ends 94a. In terms of the first port, the end of the line is connected. The other end of the flow path K6b is connected to the block flange view. The block flange BC13 is formed by the above-mentioned block-shaped projections 5 shown in Fig. 8. The connection flange 54 of the block-shaped flange 50 is oriented not in the direction of the line side of the gas supply device, but in the side direction. The other pipelines 11 , 19 , and the pipelines 30 13 , 14 , 15 , 17 , 18 are connected to each other. 201024588 is not substantially different from the configuration of the first embodiment, and the description thereof is omitted. In the gas supply device 21 of the present embodiment, the block can be placed on the line side by the block side flange facing the side of the first embodiment. Therefore, the place where the gas supply device is provided is matched. The gas supply device can be designed. For example, it is impossible to ensure a space in the side direction of the gas supply device, and the gas supply device can be provided by placing the block on the line side as in the gas supply device 21 in the second embodiment. Third Embodiment) Figs. 26 and 27 are circuit diagrams showing a gas supply device 22 in a third embodiment. The gas supply device 22 in Figs. 26 and 27 is a mass flow controller MA3. , MB3 It is characterized by a flow path H10 that communicates with the chamber and the exhaust pipe. By providing the flow path H1〇 before the mass flow controllers MA3 and MB3, the purification exhaust efficiency when the purge gas flows can be improved. In the diagram of the circuit diagram of the first embodiment, the diagram of the flow path H10 is set; the figure 27 is a diagram of the circuit diagram setting flow path H1 of the prior art. (Fourth embodiment) 28 and 29 are circuit diagrams showing the gas supply device 23 in the fourth embodiment. The gas supply devices 23 in Figs. 28 and 29 have a cavity facing the mass flow controllers MA4 and MB4. The flow path H11 associated with the exhaust pipe is characterized by the flow path HI 1, 31 201024588 after the mass flow controllers MA4, MB4, for example, when the mass flow controller MA4 is used using the process gas GAS1, The quality flow controller MB4 is detected using the unused mass flow controller MB4. Thereby, the inappropriateness of the mass flow controller MB4 can be detected. Fig. 28 is a flow chart setting flow in the first embodiment Road H11's picture is not, the 29th Fig. 30 is a diagram showing a flow path HU in a circuit of the prior art. (Fifth Embodiment) Fig. 30 is a view showing a gas supply device in a fifth embodiment, and a gas supply device. The configuration of the gas supply device 1 in the first embodiment is arranged on both sides. By adopting a configuration in which both sides of the gas supply device 1 are disposed, the internal volume of the gas merging portion G1 can be greatly reduced, and the flow rate detecting system can be measured. * The time is greatly shortened. By setting the flow detection system R2, the mass flow controller can be detected. This can be used to know that the mass flow controller is not appropriate. (Sixth embodiment) Figure 31 is A side view showing a partial cross section of the gas supply device 25 in the sixth embodiment. Specifically, the center of the opening and closing valves VA11, VB11, ... of the course is shown as a cross section. The opening and closing valve VA11 that communicates with the manifold block NA1 and the opening and closing valve VB11 that communicates with the manifold block NA2 are configured. In the manifold block NA1, the elevated block U1 is connected; in the manifold block _ 32 201024588, the elevation 愧 KA2 is connected;; ^ 1+ pull & M 4 is below the manifold block NA3, to the manifold block NA6 In respect, the block KA3 is raised to ΤΓ 4A > τ, * η, and the block ΚΑ6 is connected. Raise the block ΚΑΙ, ΚΑ 2, ΚΑ 3 series' using the above-mentioned 仏 lifting block 190. Raise the block|[Α4, ΚΑ5, ΚΑ6 series, using the above-mentioned lifting block ΐ8〇. The block flange CA is connected. The lifting block 2 is also the same under the raising block 3, and the block is in the aspect of raising the block 1 in terms of the block flange CB. The flange CC is connected below.
塊狀凸緣CG連通；在歧管塊να8 ’在歧管塊ΝΑ9方面，塊狀凸緣 在歧管塊ΝΑ7方面， 方面’塊狀凸緣CH連通 CI連通。 與埠塊IC連通的管路tc係，連通至塊狀凸緣CH，朝 開閉閥VH11連通。與埠塊IB連通的管路㈣，連通至塊 狀凸緣CE ’將抬高塊KA5迷通’朝開閉閥VE11連通。與 埠塊U連通的管路TA係’連通至塊狀凸緣cb，將抬高塊 KA2連通，朝開閉閥VB11連通。 藉由使用抬高塊KA5，可將開閉閥橫列並列四個以上。 亦即，與埠塊IB連通的管路TB#、，藉由抬高塊W，可 通過塊狀凸緣CG、CH、CI之下。因此 使管路ΤΒ不與塊 狀凸緣CG、CH、CI干涉，可與塊狀凸緣CE連通。藉此 可將開閉閥橫列並列四個以上。 在本實施例中，更藉由使用抬高塊KA2而將開閉閥橫 列並列七個以上。亦即，與埠塊IA連通的管路TA係藉The block flange CG is in communication; in the manifold block να8', in terms of the manifold block ,9, the block flange is in the manifold block ΝΑ7, and the block flange CH is in CI communication. The line tc communicating with the block IC is connected to the block flange CH and communicates with the opening and closing valve VH11. The pipe (4) communicating with the block IB is connected to the block flange CE' to connect the lift block KA5 to the opening and closing valve VE11. The pipe TA system that communicates with the block U communicates with the block flange cb, and connects the lift block KA2 to communicate with the opening and closing valve VB11. By using the raising block KA5, the opening and closing valve can be arranged in parallel for four or more. That is, the pipe TB# communicating with the block IB can pass through the block flanges CG, CH, and CI by raising the block W. Therefore, the pipe ΤΒ does not interfere with the block flanges CG, CH, and CI, and can communicate with the block flange CE. Thereby, the opening and closing valve can be arranged in parallel for four or more. In the present embodiment, the opening and closing valve is arranged in parallel by seven or more by using the raising block KA2. That is, the pipeline TA connected to the block IA is borrowed
由抬高塊KA2 ’可通過塊狀凸緣CD、CE、CF、CG、CH、CI 以下。因此，使管路TB不與塊狀凸緣CD、CE、CF、CG、 33 201024588 CH、CI干涉’可與塊狀凸緣CB連通。藉此，可將開閉閥 橫列並列七個以上。 如以上詳細說明般，根據本實施例的氣體供應裝置25 的話’可將開閉閥在側面方向或線路方向並列四個以上。 匕配0执置氣體供應裝置的場所，可設計氣體供應裝 例如在無法在氣體供應裝置的線路方向確保空間時 係，如第六實施例中的氣體供應裝置25般，可將開閉閥在 橫列並列九個。相對地’在無法在氣體供應裝置的侧面方 向確保空間時係’雖然在圖中未表示，可將開閉閱在縱列參 並列四個以上。 又，本發明係，不被限定於上述實施例，可有各種的 應用。 例如，開閉閥係，空氣操作閥之外，可使用電磁閥等。 塊狀凸緣的兩個貫通孔的位置係，對於正面，一方的 貫通孔在右前方的話’另一方係位於左後方。相反地，對 於正面，一方的貫通孔在左前方的話，另一方係位於右後 方。 在塊狀凸緣方面，兩個貫通孔係，位於塊狀凸緣的下 面的對角線上而被形成，但可更加上兩個貫通孔，而位於 塊狀凸緣的下面的四角落般形成。藉由在塊狀凸緣的下面 的四角落形成貫通孔，藉由螺絲與歧管塊的螺孔固定時， 了將均一的按壓力給予至凸緣連通口和歧管連通路的連通 口的接合部。 抬尚凸緣的南度係，根據實施形態可變更設計。 34 201024588 【圖式簡單說明】 第1圈係表示氣體供應裝置的迴路圖； 第2圖係表示氣體供應裝置的外觀上方立體圖； 第3圖係表示氣體供應裝置的下面圊； $ 4圖係表示氣體供應裝置的外觀下方立體圖； 第5圖係為第3圖的氣體供應裝置的AA剖面圖； Φ 第6A圖係表示中心形式的塊狀凸緣的外觀立體圖； $ 6B圖係表示中心形式的塊狀凸緣的平面圖； $ 6C圖係表示中心形式的塊狀凸緣的侧面圖； 圖係表示中心形式的塊狀凸緣的正面圖； 第7A圖係表示r形式的塊狀凸緣的外觀立體圓； 第 7B 1st 181係表示R形式的塊狀凸緣的平面圖； 第7C圈在立 _贷'表示R形式的塊狀凸緣的侧面圖；The raised block KA2' can pass through the block flanges CD, CE, CF, CG, CH, CI or less. Therefore, the pipe TB can be made to communicate with the block flange CB without interfering with the block flanges CD, CE, CF, CG, 33 201024588 CH, CI. Thereby, the on-off valve can be arranged in parallel for seven or more. As described in detail above, according to the gas supply device 25 of the present embodiment, the on-off valve can be arranged in parallel in the side direction or the line direction by four or more. In the place where the gas supply device is disposed, the gas supply device can be designed, for example, when the space cannot be secured in the direction of the line of the gas supply device. As in the gas supply device 25 in the sixth embodiment, the opening and closing valve can be horizontally The column is juxtaposed nine. In contrast, when the space cannot be secured in the side direction of the gas supply device, although not shown in the drawing, the opening and closing can be arranged in four or more columns. Further, the present invention is not limited to the above embodiment, and various applications are possible. For example, an electromagnetic valve or the like can be used in addition to the opening and closing valve system and the air operating valve. The position of the two through holes of the block flange is such that one of the through holes on the front side is on the right front side, and the other side is located on the left rear side. Conversely, for the front side, if one of the through holes is on the left front side and the other side is on the right rear side. In the case of a block flange, two through holes are formed on the diagonal line below the block flange, but may be further formed by two through holes and formed at four corners below the block flange. . By forming a through hole at four corners of the lower surface of the block flange, when the screw is fixed to the screw hole of the manifold block, a uniform pressing force is given to the communication port of the flange communication port and the manifold communication path. Joint. The south degree of the flange is raised, and the design can be changed according to the embodiment. 34 201024588 [Simple description of the diagram] The first circle represents the circuit diagram of the gas supply device; the second diagram shows the perspective view of the gas supply device; the third diagram shows the lower surface of the gas supply device; Fig. 5 is a perspective view of the gas supply device of Fig. 3; Fig. 6A is a perspective view showing the appearance of a block flange in the center; $6B is a central form A plan view of a block flange; a $6C diagram showing a side view of a block flange in the form of a center; a diagram showing a front view of a block flange in the form of a center; and a figure 7A showing a block flange in the form of r 7B 1st 181 is a plan view showing a block flange of the R form; and a 7C circle is a side view of the block flange of the R form;
$ 7D圖係A L 表示R形式的塊狀凸緣的正面圈； 響 帛8A囷係主_ 係表示L形式的塊狀凸緣的外觀立體囷； 第8B圖係主 承表示L形式的塊狀凸緣的平面圖； 第8C阖係 a 1恭表示L形式的塊狀凸緣的侧面圖； 第8D圖筱* a 1糸表示L形式的塊狀凸緣的正面圖； 第9.A顧及 圈. 你表示第一連接形式的塊狀凸緣的外親立體 第9B圖係_ 1恭表示第一連接形式的塊狀凸緣的平面囷； 第9C圖係| 你表示第一連接形式的塊狀凸緣的側面圖； 第9D谭传 _ $表示第一連接形式的塊狀凸緣的正面圖； 35 201024588 第10A圖係表示第二連接形式的塊狀凸緣的外觀立體 > · 圏， 第10Β圖係表示第二連接形式的塊狀凸緣的平面圖； 第10C圖係表示第二連接形式的塊狀凸緣的側面圖； 第10D圖係表示第二連接形式的塊狀凸緣的正面圖； 第11Α圖係表示第三連接形式的塊狀凸緣的外觀立體 圖； 第11Β圖係表示第三連接形式的塊狀凸緣的平面圖； 第11C圖係表示第三連接形式的塊狀凸緣的側面圖； Θ 第11D圖係表示第三連接形式的塊狀凸緣的正面圖； 第12A圖係表示第四連接形式的塊狀凸緣的外觀立體 圏， 第12B困係表示第四連接形式的塊狀凸緣的平面圖； 第12C圖係表示第四連接形式的塊狀凸緣的侧面圖； 第12D圖係表示第四連接形式的塊狀凸緣的正面圖； 第13A圖係表示第五連接形式的塊狀凸緣的外觀立體 I» · ® 圃， 第13B圖係表示第五連接形式的塊狀凸緣的平面圖； 第13C圖係表示第五連接形式的塊狀凸緣的側面圖； 第13D圖係表示第五連接形式的塊狀凸緣的正面圖； 第14A圖係表示第二中心形式的塊狀凸緣的外觀立體 圍， 第14B圈係表示第二中心形式的塊狀凸緣的平面圖·， 第14C圖係表示第二中心形式的塊狀凸緣的侧面圖； 36 201024588 第14D圖係表示第二中心形式的塊狀凸緣的正面圓； 第1 5 A圖係表示第三中心形式的塊狀凸緣的外觀立體 wn · 圖， 第15B圖係表示第三中心形式的塊狀凸緣的平面圖； 第1 5C囷係表示第三中心形式的塊狀凸緣的侧面圊； 第15D圖係表示第三中心形式的塊狀凸緣的正面圖； 第16A圖係表示第二r形式的媿狀凸緣的外觀立體圖； ❹ 第16B圖係表示第二R形式的塊狀凸緣的平面圖； 第1 6C囷係表示第二R形式的塊狀凸緣的側面圖； 第16D圖係表示第二r形式的塊狀凸緣的正面圖； 第17A周係表示第二l形式的塊狀凸緣的外觀立體圓； 第17B圖係表示第二[形式的塊狀凸緣的平面圖； 第17C圓係表示第二[形式的塊狀凸緣的侧面圖； 第17D圖係表示第二[形式的塊狀凸緣的正面圖； $ 18A圖係表示第六連接形式的塊狀凸緣的外觀立體 ❹ 圖； 第18β圖係表示第六連接形式的塊狀凸緣的平面阖； $ 18C ®係、表示第六連接形式的塊狀凸緣的側面圖； 第18D圖係类备 最不第六連接形式的塊狀凸緣的正面圖； 第19Α圖係矣^ #衣不第七連接形式的塊狀凸緣的外觀立體 |£| · 圖， 第19Β圖係矣_ # '夂$第七連接形式的塊狀凸緣的平面圖； 第19C圖係表 %$第七連接形式的塊狀凸緣的侧面圖； 第19D圖係表_ 夂ν第七連接形式的塊狀凸緣的正面圖； 37 201024588 第20A圖係表示第一抬高凸緣的外觀立體圖； 第20B圖係表示第一抬高凸緣的平面圖； 第20C圖係表示第一抬高凸緣的背底面圖； 第20D囷係表示第一抬高凸緣的正面圖； 第21A囷係表示第二抬高凸緣的外觀立體圖； 第21B圖係表示第二抬高凸緣的平面圖； 第21C圖係表示第二抬高凸緣的背面圖； 第21D圖係表示第二抬高凸緣的正面圖； 第22囷係表示第二實施例中的氣體供應裝置的外觀 · 上方立體圖； 第23圖係表示第二實施例中的氣體供應裝置的下面 圓； 第24圖係表示第二實施例中的氣體供應裝置的外觀 下方立體圖； 第25圖係為第23圖的氣體供應裝置的BB剖面圖； 第26圖係表示第三實施例中的氣體供應裝置的第一. 迴路圖； 第27圖係表示第三實施例中的氣體供應裝置的第二 迴路圖； 第28圖係表示第四實施例中的氣體供應裝置的第一 迴路圖； 第29圖係表示第四實施例中的氣體供應裝置的第二 迴路圖； 第30圖係表示第五實施例中的氣體供應裝置的上面 38 201024588 _ ， 第31圖係為表示第六實施例中的氣體供應裝置的一 部份剖面的側面圖； 第32圖係表示被記載於專利文獻1的氣體供應裝置的 迴路圖；以及 第3 3圖係表示被記載於專利文獻2的氣體供應裝置的 迴路圖。 【主要元件符號說明】 1氣體供應裝置、 VA1 、 VA2 、 VA3 、 VA4 開閉閥、 ' VB1、VB2、VB3、VB4 開閉闕、 VC1、VC2、VC3、VC4 開閉閥、 PA、PB、PC、PI、P2 開閉閥、 Hl~fl9流路、 . MA、MB、MC質量流量控制器。 39The $7D figure AL represents the front ring of the R-shaped block flange; the ring 8A is the main form of the L-shaped block flange; the 8B figure shows the L form block A plan view of the flange; 8C is a side view of the block flange in the form of L; Fig. 8DFig. a 1 糸 shows a front view of the block flange in the form of L; You represent the outer pro-stereoscopic 9B diagram of the first connection form of the block flange _ 1 represents the plane 囷 of the block flange of the first connection form; the 9C diagram | you represent the block of the first connection form Side view of the flange; 9D Tan Chuan_$ front view showing the block flange of the first connection form; 35 201024588 Fig. 10A is a perspective view showing the appearance of the block flange of the second connection type. Figure 10 is a plan view showing a block flange of a second connection form; Figure 10C is a side view showing a block flange of a second connection form; Figure 10D is a block flange showing a second connection form Front view; Fig. 11 is a perspective view showing the appearance of a block flange of a third connection form; A plan view of a block flange in the form of a triple connection; Fig. 11C is a side view showing a block flange of a third connection form; Θ 11D is a front view showing a block flange of a third connection form; The figure shows the appearance of the block flange of the fourth connection form, the 12B shows the plan view of the block flange of the fourth connection form, and the 12C shows the side of the block flange of the fourth connection form. Fig. 12D is a front view showing a block flange of a fourth connection form; Fig. 13A is a view showing the appearance of a block flange of a fifth connection form, a stereoscopic shape I» · ® 圃, and Fig. 13B shows a fifth Fig. 13C is a side view showing a block flange of a fifth connection form; Fig. 13D is a front view showing a block flange of a fifth connection form; Fig. 14A is a view The outer circumference of the block flange of the second center form is shown, the 14B circle shows a plan view of the block flange of the second center form, and the 14C figure shows the side view of the block flange of the second center form. ; 36 201024588 Figure 14D shows the second central shape a frontal circle of a block-like flange of the formula; a view of the first fifth embodiment of the block-shaped flange of the third center form, and a plan view of the block-shaped flange of the third center form; The 15th C 表示 indicates the side 圊 of the block flange of the third center form; the 15D is a front view of the block flange of the third center form; and the 16A figure shows the r shape of the second r form A perspective view of the edge of the edge; ❹ Figure 16B shows a plan view of the block flange of the second R form; a 16C shows a side view of the block flange of the second R form; and Fig. 16D shows a second r Front view of a block flange of the form; section 17A indicates the appearance of a solid circle of the block flange of the second l form; and Fig. 17B shows a plan view of the second [form block flange; 17C circle system A side view showing a second [form of a block flange; a 17D view showing a front view of the second form of the block flange; and a $18A view showing the appearance of a block flange of the sixth connection form. Figure 18; Figure 18β shows the plane 阖 of the block flange of the sixth connection; $ 18C ® Side view of the block flange in the form of a joint; Fig. 18D is a front view of the block flange of the least connected form; Fig. 19 is a block flange of the seventh joint form Appearance Stereoscopic|£| · Figure, Figure 19: 夂 _ # '夂 $ plan view of the block flange of the seventh connection form; Figure 19C is a side view of the block flange of the %$ seventh connection form 19D is a front view of a block flange of a seventh connection form; 37 201024588 Fig. 20A is a perspective view showing the appearance of the first raised flange; Fig. 20B is a plan view showing the first raised flange; 20C is a rear bottom view of the first raised flange; 20D is a front view of the first raised flange; 21A is an external perspective view of the second raised flange; and 21B is a plan view showing the second raised flange 21C is a rear view showing the second raised flange; 21D is a front view showing the second raised flange; and 22nd is a front view and an upper perspective view showing the gas supply device in the second embodiment; Indicates the gas supply in the second embodiment The lower circle of the apparatus; Fig. 24 is a perspective view showing the appearance of the gas supply device in the second embodiment; Fig. 25 is a BB sectional view of the gas supply device of Fig. 23; and Fig. 26 is a third embodiment. The first circuit diagram of the gas supply device in the middle; the second circuit diagram of the gas supply device in the third embodiment; the second circuit diagram showing the gas supply device in the fourth embodiment; Figure 29 is a second circuit diagram showing the gas supply device in the fourth embodiment; Figure 30 is a view showing the upper surface of the gas supply device in the fifth embodiment 38 201024588 _ , and the third figure is the sixth representation Fig. 32 is a side view showing a gas supply device of Patent Document 1, and Fig. 3 is a view showing a gas described in Patent Document 2; A circuit diagram of the supply unit. [Description of main components] 1 gas supply device, VA1, VA2, VA3, VA4 on-off valve, 'VB1, VB2, VB3, VB4 open/closed, VC1, VC2, VC3, VC4 on-off valve, PA, PB, PC, PI, P2 on-off valve, Hl~fl9 flow path, . MA, MB, MC mass flow controller. 39