CN101725752A

CN101725752A - Air supply device and lumpy flange

Info

Publication number: CN101725752A
Application number: CN200910174923A
Authority: CN
Inventors: 井上贵史; 西村康典
Original assignee: CKD Corp
Current assignee: CKD Corp
Priority date: 2008-11-03
Filing date: 2009-11-03
Publication date: 2010-06-09
Anticipated expiration: 2029-11-03
Also published as: JP2010108459A; TW201024588A; KR20100049486A; TWI395903B; CN101725752B; JP4700095B2; KR101113823B1

Abstract

The invention provides an air supply device and a lumpy flange. The air supply device is capable of supplying complex technology air and reducing the ground occupancy area. In the air supply device with a first line and a second line, the first line is connected with a first mass flow controller (MB) and the second line is connected with a second mass flow controller (MC) and the first line comprises a first switching valve (VB3) of the supply air A and a second switching valve (VB2) of the supply air C and the second line comprises a third switching valve (VC3) of the supply air B and a fourth switching valve (VC2) of the supply air D and in the air supply device (1), the air A and the air B are same gas.

Description

Gas supply device and lumpy flange

Technical field

The present invention relates to a kind of gas supply device, it has first circuit and second circuit, this first circuit is connected with first mass flow controller, this second circuit is connected with second mass flow controller, this first circuit has first open and close valve and second open and close valve, this second circuit has the 3rd open and close valve and the 4th open and close valve, and this gas supply device is connected with the supplying mouth of supplying with four kinds of gas A, B, C, D.

Background technique

At present, as this technology, publicity has the gas supply device of record in following patent documentation 1 and the patent documentation 2, and the purpose of its invention is that reducing high price and bigger device is the use number of mass flow controller, reduces the ground occupied area.

Shown in figure 32, the gas supply device 300 of patent documentation 1 record has the mass flow controller 301MA of the gas flow before control mixes.In addition, in mass flow controller 301MA, be connected with three open and close valve 302VA, 303VA, 304VA.In Figure 32,, be set with three open and close valves in order to be easy to contrast with the present invention.The circuit that will be connected with mass flow controller 301MA is set at first circuit.

Owing to have this structure, can reduce high price and bigger device is the use number of mass flow controller.

But, in the invention of patent documentation 1, for example, when supplying with process gas, under the situation of the process gas G1 that frequent use is arranged, be set in the time of to supply with process gas G1 by a mass flow controller 301MA, can not in first circuit, supply with other process gas G2, G3 simultaneously by same mass flow controller 301MA.So, when supplying with other process gas G2, G3, must stop the supply of process gas G1.Therefore, existence can not be corresponding with the technology of complexity, maybe needs to be used for the problem of corresponding new mass flow controller.

So the problem as the invention that solves patent documentation 1 has the invention of patent documentation 2.

As shown in figure 33, patent documentation 2 described gas supply devices 200 have three mass flow controller 201MA, 201MB, 201MC.On mass flow controller 201MA, be communicated with eight open and close valves of open and close valve 212A～212H.In addition, other mass flow controller 201MB, 201MC also are communicated with eight open and close valves respectively.The circuit that will be communicated with mass flow controller 201MA is set at first circuit, and the circuit that will be communicated with mass flow controller 201MB is set at second circuit, and the circuit that will be communicated with mass flow controller 201MC is set at tertiary circuit.For example, when supplying with process gas G1, as long as, just can supply with process gas G1 by any circuit from first circuit to tertiary circuit with any is opened among open and

close valve

212A, 213A or the 214A.Therefore, supplying with the frequent process gas of supplying with first circuit for example during process gas G1, also can supply with other process gas G2, G3 by enough second, third other circuits.Therefore, even do not stop the supply of process gas G1, also can supply with other process gas G2, G3.

Patent documentation 1: No. 3904368, Japan's special permission

Patent documentation 2: TOHKEMY 2003-91322 communique

But, in existing gas supply device 200, have following problem.

For example, in gas supply device 200, open and close valve needs 24.Therefore, open and close valve increases, so exist manufacture cost to increase and the ground occupied area becomes big problem.

In addition, as mentioned above, in the gas supply device 300 of patent documentation 1, the number of open and close valve is few, but, for example during supply gas, under the situation that the process gas G1 that uses is continually arranged, be set in the time of to supply with process gas G1 by a mass flow controller 301MA, in first circuit, can not supply with other process gas G2, G3 simultaneously by same mass flow controller 301MA.So, when supplying with other process gas G2, G3, must stop process gas G1 and supply with.Therefore, existence can not be corresponding with the technology of complexity, perhaps needs to be used for the problem of corresponding new mass flow controller.

In addition, in the gas supply device 300 of patent documentation 1, directly be connected with each open and close valve with the whole pipe that is used to supply with this process gas at the supply source of the employed process gas of each technology of each technology, therefore, exist pipe to mix, can not reduce the problem of ground occupied area.

Summary of the invention

Therefore, the present invention develops for addressing the above problem, and its purpose is, a kind of gas supply device is provided, and can not stop the supply of the frequent process gas that uses and can use other process gas, and can reduce the ground occupied area.

For achieving the above object, a first aspect of the present invention provides a kind of gas supply device and lumpy flange, and it has following structure.

(1) a kind of gas supply device, have first circuit and second circuit, first circuit is connected with first mass flow controller, second circuit is connected with second mass flow controller, first circuit has first open and close valve and second open and close valve, second circuit has the 3rd open and close valve and the 4th open and close valve, four kinds of gas A of this gas supply device and supply, B, C, the supplying mouth of D connects, it is characterized by, gas A and gas B are same gas, first open and close valve and the 3rd open and close valve are connected with the supplying mouth of supply gas A, and second open and close valve is connected with the supplying mouth of supply gas C, and the 4th open and close valve is connected with the supplying mouth of supply gas D.

(2) as (1) described gas supply device, it is characterized by, has lumpy flange, it is installed in the lower surface of the manifold blocks of installing on all open and close valves, and lumpy flange has: the pipe in the connection mouth that is connected with pipe, the flange access that will be communicated with the manifold access and the connection mouth of the open and close valve binding that is formed at manifold blocks and the space that is used to guarantee that pipe passes through is dodged portion.

(3) (1) or (2) described gas supply device is characterized by, and the exhaust side in the loop has flow quantity detecting system.

(4) (1) or (2) described gas supply device is characterized by, and lumpy flange can both be installed on the manifold blocks in the either direction of longitudinal direction, transverse direction.

(5) a kind of lumpy flange, it is installed in the lower surface of the manifold blocks of installing on the open and close valve, it is characterized by, lumpy flange has: the pipe in the connection mouth that is connected with pipe, the flange access that will be communicated with the manifold access and the connection mouth of the open and close valve binding that is formed at manifold blocks and the space that is used to guarantee that pipe passes through is dodged portion.

(6) (5) described lumpy flange is characterized by, and lumpy flange can both be installed on the described manifold blocks in the either direction of longitudinal direction, transverse direction.

Effect and effect to described gas supply device and lumpy flange describe.

(1) according to the gas supply device of described invention, gas A and gas B are same gas, first open and close valve and the 3rd open and close valve are connected with the supplying mouth of supply gas A, second open and close valve is connected with the supplying mouth of supply gas C, the 4th open and close valve is connected with the supplying mouth of supply gas D, therefore, and for example during supply gas, even under the situation that the process gas G1 that uses is continually arranged, also can supply with process gas G1 by two mass flow controllers.Therefore, supply with at the same time under other the situation of process gas G2, G3,, can supply with process gas G2 or G3 simultaneously by process gas G1 being used other mass flow controller.Therefore, can be corresponding with the technology of complexity, therefore, do not need new mass flow controller.

(2) structure that has (1), in addition, has the lumpy flange of installing at the lower surface of the manifold blocks that is installed on open and close valve, lumpy flange has: the pipe in the connection mouth that is connected with pipe, the flange access that will be communicated with the manifold access and the connection mouth of the open and close valve binding that is formed at manifold blocks and the space that is used to guarantee that pipe passes through is dodged portion, by adopting above-mentioned structure, can put pipe in order, therefore, therefore the space that can cut the waste can reduce the ground occupied area.

(3) formation that has (1) or (2) in addition, adopts the exhaust side in the loop to have the structure of flow quantity detecting system, therefore, by the flow of quality measurement stream controller, can carry out the judgement of the unfavorable condition of mass flow controller.

(4) structure that has (1) or (2) in addition, adopts lumpy flange can both be installed on structure on the manifold blocks in the either direction of longitudinal direction, transverse direction, therefore, can design gas supply device according to the place that gas supply device is set.Therefore, can save the space and dispose gas supply device.

(5) a kind of lumpy flange, be installed in the lower surface of the manifold blocks of installing on the open and close valve, lumpy flange has: the pipe in the connection mouth that is connected with pipe, the flange access that will be communicated with the manifold access and the connection mouth of the open and close valve binding that is formed at manifold blocks and the space that is used to guarantee that pipe passes through is dodged portion, therefore, can put pipe in order, therefore, the space that can cut the waste, therefore, can reduce the ground occupied area.

(6) structure that has (5) in addition, adopts lumpy flange can both be installed on structure on the manifold blocks in the either direction of longitudinal direction, transverse direction, therefore, can design gas supply device according to the place that is provided with.Therefore, can save the space and dispose gas supply device.

Description of drawings

Fig. 1 represents the circuit diagram of gas supply device;

Fig. 2 represents the outward appearance top perspective view of gas supply device;

Fig. 3 represents the worm's eye view of gas supply device;

Fig. 4 represents the outward appearance face upwarding stereogram of gas supply device;

The AA sectional drawing of the gas supply device of Fig. 5 presentation graphs 3;

Fig. 6 A represents the stereoscopic figure of the lumpy flange of center type;

Fig. 6 B represents the plan view of the lumpy flange of center type;

Fig. 6 C represents the side view of the lumpy flange of center type;

Fig. 6 D represents the plan view of the lumpy flange of center type;

Fig. 7 A represents the stereoscopic figure of the lumpy flange of R type;

Fig. 7 B represents the plan view of the lumpy flange of R type;

Fig. 7 C represents the side view of the lumpy flange of R type;

Fig. 7 D represents the plan view of the lumpy flange of R type;

Fig. 8 A represents the stereoscopic figure of the lumpy flange of L type;

Fig. 8 B represents the plan view of the lumpy flange of L type;

Fig. 8 C represents the side view of the lumpy flange of L type;

Fig. 8 D represents the plan view of the lumpy flange of L type;

Fig. 9 A represents the stereoscopic figure of the lumpy flange of first connection type;

Fig. 9 B represents the plan view of the lumpy flange of first connection type;

Fig. 9 C represents the side view of the lumpy flange of first connection type;

Fig. 9 D represents the plan view of the lumpy flange of first connection type;

Figure 10 A represents the stereoscopic figure of the lumpy flange of second connection type;

Figure 10 B represents the plan view of the lumpy flange of second connection type;

Figure 10 C represents the side view of the lumpy flange of second connection type;

Figure 10 D represents the plan view of the lumpy flange of second connection type;

Figure 11 A represents the stereoscopic figure of the lumpy flange of the 3rd connection type;

Figure 11 B represents the plan view of the lumpy flange of the 3rd connection type;

Figure 11 C represents the side view of the lumpy flange of the 3rd connection type;

Figure 11 D represents the plan view of the lumpy flange of the 3rd connection type;

Figure 12 A represents the stereoscopic figure of the lumpy flange of the 4th connection type;

Figure 12 B represents the plan view of the lumpy flange of the 4th connection type;

Figure 12 C represents the side view of the lumpy flange of the 4th connection type;

Figure 12 D represents the plan view of the lumpy flange of the 4th connection type;

Figure 13 A represents the stereoscopic figure of the lumpy flange of the 5th connection type;

Figure 13 B represents the plan view of the lumpy flange of the 5th connection type;

Figure 13 C represents the side view of the lumpy flange of the 5th connection type;

Figure 13 D represents the plan view of the lumpy flange of the 5th connection type;

Figure 14 A represents the stereoscopic figure of the lumpy flange of second center type;

Figure 14 B represents the plan view of the lumpy flange of second center type;

Figure 14 C represents the side view of the lumpy flange of second center type;

Figure 14 D represents the plan view of the lumpy flange of second center type;

Figure 15 A represents the stereoscopic figure of the lumpy flange of the 3rd center type;

Figure 15 B represents the plan view of the lumpy flange of the 3rd center type;

Figure 15 C represents the side view of the lumpy flange of the 3rd center type;

Figure 15 D represents the plan view of the lumpy flange of the 3rd center type;

Figure 16 A represents the stereoscopic figure of the lumpy flange of the 2nd R type;

Figure 16 B represents the plan view of the lumpy flange of the 2nd R type;

Figure 16 C represents the side view of the lumpy flange of the 2nd R type;

Figure 16 D represents the plan view of the lumpy flange of the 2nd R type;

Figure 17 A represents the stereoscopic figure of the lumpy flange of the 2nd L type;

Figure 17 B represents the plan view of the lumpy flange of the 2nd L type;

Figure 17 C represents the side view of the lumpy flange of the 2nd L type;

Figure 17 D represents the plan view of the lumpy flange of the 2nd L type;

Figure 18 A represents the stereoscopic figure of the lumpy flange of the 6th connection type;

Figure 18 B represents the plan view of the lumpy flange of the 6th connection type;

Figure 18 C represents the side view of the lumpy flange of the 6th connection type;

Figure 18 D represents the plan view of the lumpy flange of the 6th connection type;

Figure 19 A represents the stereoscopic figure of the lumpy flange of the 7th connection type;

Figure 19 B represents the plan view of the lumpy flange of the 7th connection type;

Figure 19 C represents the side view of the lumpy flange of the 7th connection type;

Figure 19 D represents the plan view of the lumpy flange of the 7th connection type;

Figure 20 A represents that first increases the stereoscopic figure of flange;

Figure 20 B represents that first increases the plan view of flange;

Figure 20 C represents that first increases the rear view of flange;

Figure 20 D represents that first increases the plan view of flange;

Figure 21 A represents that second increases the stereoscopic figure of flange;

Figure 21 B represents that second increases the plan view of flange;

Figure 21 C represents that second increases the rear view of flange;

Figure 21 D represents that second increases the plan view of flange;

Figure 22 represents the outward appearance top perspective view of embodiment 2 gas supply device;

Figure 23 represents the worm's eye view of embodiment 2 gas supply device;

Figure 24 represents the outward appearance face upwarding stereogram of embodiment 2 gas supply device;

Figure 25 represents the BB sectional drawing of the gas supply device of Figure 23;

Figure 26 represents first circuit diagram of embodiment 3 gas supply device;

Figure 27 represents second circuit diagram of embodiment 3 gas supply device;

Figure 28 represents first circuit diagram of embodiment 4 gas supply device;

Figure 29 represents second circuit diagram of embodiment 4 gas supply device;

Figure 30 represents the plan view of embodiment 5 gas supply device;

Figure 31 represents the side view of part section of embodiment 6 gas supply device;

Figure 32 represents the circuit diagram of patent documentation 1 described gas supply device;

Figure 33 represents the circuit diagram of patent documentation 2 described gas supply devices.

Label declaration

1 gas supply device

VA1, VA2, VA3, VA4 open and close valve

VB1, VB2, VB3, VB4 open and close valve

VC1, VC2, VC3, VC4 open and close valve

PA, PB, PC, P1, P2 open and close valve

H1～H9 stream

MA, MB, MC mass flow controller

Embodiment

Lower surface is with reference to a kind of mode of execution of description of drawings gas supply device of the present invention and lumpy flange.

(first mode of execution)

The overall structure of＜gas supply device 〉

Fig. 1 represents the circuit diagram of gas supply device 1.Gas supply device 1 adopts the side to possess the form of suction port as the gas supply mode.

As shown in Figure 1, gas supply device 1 is communicated with the gas source of eight kinds of process gas GAS1, GAS2, GAS3, GAS4, GAS5, GAS6, GAS7, GAS8 and purge gas.(process gas GAS6 and gas A and gas B are suitable.)

The stream H1 that is communicated with the gas source of process gas GAS1 is communicated with the inlet opening of open and close valve VA1.The stream that is communicated with the delivery outlet of open and close valve VA1 is communicated with the inlet opening of mass flow controller MA.The stream that is communicated with the delivery outlet of mass flow controller MA is communicated with the inlet opening of open and close valve VA4.Be communicated with stream H9 on the delivery outlet of open and close valve VA4, stream H9 branches into to the stream H9a of chamber with to the stream H9b of outlet pipe.In stream H9b, be connected with flow quantity detecting system R1.

In stream H9b, be connected with flow quantity detecting system R1, thus, can carry out the judgement of the unfavorable condition of mass flow controller.

The stream H2 that is communicated with the gas source of process gas GAS2 is communicated with the inlet opening of open and close valve VA2.The stream that is communicated with the delivery outlet of open and close valve VA2 is communicated with the inlet opening of mass flow controller MA.The stream that is communicated with the delivery outlet of mass flow controller MA is communicated with the inlet opening of open and close valve VA4.The structure of open and close valve VA4 is and above-mentioned identical structure.

Adopt and the identical structure in loop of above-mentioned process gas GAS1, GAS2 to the chamber of process gas GAS3, GAS4, GAS5, GAS7, GAS8 and to the loop of outlet pipe, therefore, omit its explanation.(circuit that links with mass flow controller MB is suitable with first circuit, and mass flow controller MB is suitable with first mass flow controller.The circuit that links with mass flow controller MC is suitable with second circuit, and mass flow controller MC is suitable with second mass flow controller.)

The stream H6 that is connected with the gas source of process gas GAS6 is from branching into two of stream H6a and stream H6b midway.One stream H6a is communicated with (open and close valve VB3 is suitable with first open and close valve) with the inlet opening of open and close valve VB3.Another stream H6b is communicated with (open and close valve VC3 is suitable with second open and close valve) with the inlet opening of open and close valve VC3.

The stream that is communicated with the delivery outlet of open and close valve VB3 is communicated with the inlet opening of mass flow controller MB.The stream that is communicated with the delivery outlet of another open and close valve VC3 is communicated with the inlet opening of mass flow controller MC.

The stream that is communicated with the delivery outlet of mass flow controller MB is communicated with the inlet opening of open and close valve VB4.The stream that is communicated with the delivery outlet of mass flow controller MC is communicated with open and close valve VC4.

Be communicated with stream H9 on the delivery outlet of open and close valve VB4 and open and close valve VC4, stream H9 branches into to the stream H9a of chamber with to the stream H9b of outlet pipe.In stream H9b, be connected with flow quantity detecting system R1.

The stream that is connected with the gas source of purge gas is communicated with the inlet opening of open and close valve P1, and the stream that is communicated with the delivery outlet of P1 is communicated with the inlet opening of open and close valve P2, PA, PB, PC.

The stream that is communicated with the delivery outlet of open and close valve PA is communicated with the inlet opening of mass flow controller MA.The stream that is communicated with the delivery outlet of open and close valve PB is communicated with the inlet opening of mass flow controller MB.The stream that is communicated with the delivery outlet of open and close valve PC is communicated with the inlet opening of mass flow controller MC.

The stream H9 that is communicated with the delivery outlet of mass flow controller MA, MB, MC branches into to the stream H9a of chamber with to the stream H9b of outlet pipe.In stream H9b, be connected with flow quantity detecting system R1.

Fig. 2 represents the outward appearance top perspective view of gas supply device 1.Fig. 3 represents the worm's eye view of gas supply device 1.Fig. 4 represents the outward appearance face upwarding stereogram of gas supply device 1.

The structure of Fig. 2, Fig. 3 and Fig. 4 is corresponding with the circuit diagram of Fig. 1.

As shown in Figures 3 and 4, manifold blocks 2A, 2B, 2C and V

word stream piece

3A, 3B, 3C are arranged.

By not shown screw mass flow controller MA is set in mode with manifold blocks 2A and V word stream piece 3A binding.Manifold blocks 2A, V word stream piece 3A and mass flow controller MA become one.

For manifold blocks 2B, V word stream piece 3B, mass flow controller MB, in addition, also all adopt identical structure for manifold blocks 2C, V word stream piece 3C, mass flow controller MC, therefore omit explanation.

The first stream piece 4 is arranged at the end of

manifold blocks

2A, 2B, 2C by not shown screw.The second stream piece 5 is arranged at the end of V

word stream piece

3A, 3B, 3C by not shown screw.By fixedly installing the first stream piece 4 and the second stream piece 5, gas supply device 1 becomes one as a whole.

As shown in Figure 2, the side (side of the side of manifold blocks 2A or manifold blocks 2C) from gas supply device 1 is provided with the buccal mass 10 that is communicated with the gas source of process gas.In the present embodiment, the inlet opening of buccal mass 10 is towards substantially horizontal, still, the inlet opening also can be set at towards upper and lower, other etc. direction.

For buccal mass 10, particularly, what be communicated with the process gas source of supplying with process gas GAS1 is buccal mass 11.What be communicated with the process gas source of supplying with process gas GAS2 is buccal mass 12.

For process gas GAS3～GAS8, adopt and above-mentioned process gas GAS1, structure that GAS2 is identical therefore omission explanation.

The AA sectional drawing of the gas supply device 1 of Fig. 5 presentation graphs 3.

As Fig. 3 and shown in Figure 5, on manifold blocks 2A, be provided with lumpy flange BA1, BA2, BA3 by screw.Lumpy flange BA1 be positioned at open and close valve VA1 under, lumpy flange BA2 be positioned at open and close valve VA2 under, lumpy flange BA3 be positioned at open and close valve VA3 under.

As shown in Figure 5, the flange access FA1 in the lumpy flange BA1 is communicated with the manifold access RA1 in the manifold blocks 2A, and is communicated with open and close valve VA1.Flange access FA2 in the lumpy flange BA2 is communicated with the manifold access RA2 in the manifold blocks 2A, and is communicated with open and close valve VA2.Flange access FA3 in the lumpy flange BA3 is communicated with the manifold access RA3 in the manifold blocks 2A, and is communicated with open and close valve VA3.

On manifold blocks 2B, be provided with lumpy flange BB1, BB2, BB3 by screw.Not shown, lumpy flange BB1 be positioned at open and close valve VB1 under, lumpy flange BB2 be positioned at open and close valve VB2 under, lumpy flange BB3 be positioned at open and close valve VB3 under.

On manifold blocks 2C, be provided with lumpy flange BC1, BC2, BC3 by screw.Not shown, lumpy flange BC1 be positioned at open and close valve VC1 under, lumpy flange BC2 be positioned at open and close valve VC2 under, lumpy flange BC3 be positioned at open and close valve VC3 under.

Not shown, in

manifold blocks

2B, 2C, be formed with the manifold access, on lumpy flange, form the flange access, be communicated with respectively with open and close valve VB1, VB2, VB3, VC1, VC2, VC3.

As shown in Figures 3 and 4, be communicated with (part that pipe K1 constitutes the stream H1 of circuit diagram) from the pipe K1 of buccal mass 11 connections and the lumpy flange BA1 that is communicated with open and close valve VA1.Be communicated with from the pipe K2 of buccal mass 12 connections and the lumpy flange BA2 that is communicated with open and close valve VA2.Be communicated with from the pipe K3 of buccal mass 13 connections and the lumpy flange BA3 that is communicated with open and close valve VA3.

The shape of lumpy flange BA1, BA2, BA3 adopts the lumpy flange 60 of L type.In addition, as shown in Figure 5, the flange access FA3 in flange access FA2, the lumpy flange BA3 in flange access FA1, the lumpy flange BA2 in the lumpy flange BA1 is suitable with flange access described later 66.

The structure of the lumpy flange 60 of L type is described with Fig. 8.Fig. 8 A represents stereoscopic figure.Fig. 8 B represents plan view.Fig. 8 C represents side view.Fig. 8 D represents plan view.In addition, flange connecting port 65 and flange access 66 for easy to understand inside dot flange connecting port 65 and flange access 66 in each accompanying drawing.

Lumpy flange 60 is made rectangular shape.Lumpy flange 60 is made of upper surface 61a, lower surface 61b, positive 61c, back side 61d, left surface 61e and each face of right flank 61f.

On the upper left side of positive 61c, vertically be set with connection mouth 64.Connection mouth 64 is communicated with the flange access 66 that is formed at lumpy flange inside.Flange access 66 is communicated with flange connecting port 65 on being formed at lower surface 61b.The stream that flange access 66 is communicated with for the manifold access that will link with the open and close valve that is formed at manifold blocks and connection mouth 64.

Be formed with at the position of the joint of upper surface 61a and right flank 61f be used for notch that pipe passes through promptly pipe dodge portion 62.The shape that pipe is dodged portion 62 possesses the space of accommodating the pipe that two process gass pass through.That is, the height X that pipe is dodged portion 62 need be set at the height of the diameter amount of a pipe, and the length of long part of depth 2Y need be set at the length of the diameter amount of two pipes.The positive 61c side of dodging portion 62 at pipe is formed with through hole 63a.In addition, the back side 61d side of dodging portion 62 at pipe is formed with through hole 63b.

Through hole 63a and through hole 63b are positioned on the diagonal of lower surface 61b of lumpy flange 60, are formed with flange connecting port 65 betwixt.Therefore, at the screw hole by screw and manifold blocks fixedly the time, can apply uniform pressure to the joining portion of the connecting port of flange connecting port 65 and manifold access.Therefore, can prevent leakage from the joining portion of the connecting port of flange connecting port 65 and manifold access.

As shown in Figures 3 and 4, the pipe K4 that is communicated with from buccal mass 14 is that the pipe of lumpy flange 60 is dodged portion 62 and is communicated with the lumpy flange BB1 that is communicated in open and close valve VB1 by lumpy flange BA1.The shape of lumpy flange BB1 adopts the lumpy flange 40 of center type described later.

The pipe K5 that is communicated with from buccal mass 15 is that the pipe of lumpy flange 60 is dodged portion 62 and is communicated with the lumpy flange BB2 that is communicated in open and close valve VB2 by lumpy flange BA2.The shape of lumpy flange BB2 adopts the lumpy flange 40 of center type described later.

The structure of the lumpy flange 40 of center type is described with Fig. 6.Fig. 6 A represents stereoscopic figure.Fig. 6 B represents plan view.Fig. 6 C represents side view.Fig. 6 D represents plan view.In addition, flange connecting port 45 and flange access 46 for easy to understand inside dot flange connecting port 45 and flange access 46 in each accompanying drawing.

Lumpy flange 40 is made rectangular shape.Lumpy flange 40 is made of upper surface 41a, lower surface 41b, positive 41c, back side 41d, left surface 41e and each face of right flank 41f.

Above the center of positive 41c, vertically be set with connection mouth 44.Connection mouth 44 is communicated with the flange access 46 that is formed at lumpy flange inside.Flange access 46 is communicated with the flange connecting port 45 that is formed at lower surface 41b.The stream that flange access 46 is communicated with for the manifold access that will link with the open and close valve that is formed at manifold blocks and connection mouth 44.

Be formed with at the position of the joint of upper surface 41a and left surface 41e be used for notch that pipe passes through promptly pipe dodge the 42a of portion.The shape that pipe is dodged the 42a of portion possesses the space of accommodating the pipe that a process gas passes through.That is, the pipe length of long part of dodging the height X of the 42a of portion and depth Y need be set at the length of the diameter amount of a pipe.The positive 41c side of dodging the 42a of portion at pipe is formed with through hole 43a.

Be formed with at the position that upper surface 41a and right flank 41f engage be used for notch that pipe passes through promptly pipe dodge the 42b of portion.The shape that pipe is dodged the 42b of portion possesses the space of accommodating the pipe that a process gas passes through.That is, the pipe length of long part of dodging the height X of the 42b of portion and depth Y need be set at the length of the diameter amount of a pipe.The back side 41d side of dodging the 42b of portion at pipe is formed with through hole 43b.

The effect of through hole 43a and through hole 43b is identical with above-mentioned lumpy flange 60.

The pipe K6a that is communicated with from buccal mass 16 is that the pipe of lumpy flange 60 is dodged portion 62 and is communicated with the lumpy flange BB3 that is communicated in open and close valve VB3 by lumpy flange BA3.The shape of lumpy flange BB3 adopts the lumpy flange 80 of second connection type.

The structure of the lumpy flange 80 of second type is described with Figure 10.Figure 10 A represents stereoscopic figure.Figure 10 B represents plan view.Figure 10 C represents side view.Figure 10 D represents plan view.In addition, flange connecting port 85 and flange access 86 for easy to understand inside dot flange connecting port 85 and flange access 86 in each accompanying drawing.

Lumpy flange 80 is made rectangular shape.Lumpy flange 80 is made of upper surface 81a, lower surface 81b, positive 81c, back side 81d, left surface 81e and each face of right flank 81f.

Above the center of positive 81c, vertically be set with the first connection mouth 84a.In addition, top, the center of 81d vertically is set with the second connection mouth 84b overleaf.The first connection mouth 84a and the second connection mouth 84b are communicated with by being formed at inner flange access 86a.

In addition, be vertically formed flange access 86b with respect to the flange connecting port 85 of lower surface 81b midway from flange access 86a.The stream that flange access 86 is communicated with for the manifold access that will link with the open and close valve that is formed at manifold blocks and the first connection mouth 84a and the second connection mouth 84b.

Be formed with at the position that upper surface 81a and left surface 81e engage be used for notch that pipe passes through promptly pipe dodge the 82a of portion.The shape that pipe is dodged the 82a of portion possesses the space of accommodating the pipe that a process gas passes through.That is, the pipe length of long part of dodging the height X of the 82a of portion and depth Y need be set at the length of the diameter amount of a pipe.The positive 81c side of dodging the 82a of portion at pipe is formed with through hole 83a.

Be formed with at the position that upper surface 81a and right flank 81f engage be used for notch that pipe passes through promptly pipe dodge the 82b of portion.The shape that pipe is dodged the 82b of portion possesses the space of accommodating the pipe that a process gas passes through.That is, the pipe length of long part of dodging the height X of the 82b of portion and depth Y need be set at the length of the diameter amount of a pipe.The back side 81d side of dodging the 82b of portion at pipe is formed with through hole 83b.

The effect of through hole 83a and through hole 83b is identical with above-mentioned lumpy flange 60.

The pipe K7 that is communicated with from buccal mass 17 is that the pipe of lumpy flange 60 is dodged portion 62 by lumpy flange BA1 at first, is that second pipe of lumpy flange 40 is dodged the 42b of portion by lumpy flange BB1 then, is communicated with the lumpy flange BC1 that is connected in open and close valve VC 1.The shape of lumpy flange BC1 adopts the lumpy flange 50 of above-mentioned R type.

The pipe K8 that is communicated with from buccal mass 18 is that the pipe of lumpy flange 60 is dodged portion 62 by lumpy flange BA2 at first, is that second pipe of lumpy flange 40 is dodged the 42b of portion by lumpy flange BB2 then, is communicated with the lumpy flange BC1 that is communicated in open and close valve VC2.The shape of lumpy flange BC2 adopts the lumpy flange 50 of above-mentioned R type.

The pipe K6a that is communicated with from buccal mass 16 and lumpy flange BB3 are that the first connection mouth 84a of lumpy flange 80 is communicated with.Be communicated with mouthful access (not shown) and and second connection mouth 84b connection in the lumpy flange 80.On the second connection mouth 84b, be communicated with the end of pipe K6b.The other end of pipe K6b is communicated with lumpy flange BC3.Lumpy flange BC3 adopts the lumpy flange 40 of above-mentioned center type.

The overall structure of＜lumpy flange 〉

Lumpy flange also has other various patterns except that above-mentioned lumpy flange.Fig. 6～Figure 19 represents the various patterns of lumpy flange.Expression has A～D figure respectively in Fig. 6～Figure 19.A represents stereoscopic figure.B represents plan view.C represents side view.D represents plan view.

Figure 20 and Figure 21 represent to increase the pattern of flange.Expression has A～D figure respectively in Figure 20 and Figure 21.A represents stereoscopic figure.B represents plan view.C represents rear view.D represents plan view.

In addition, flange connecting port and flange access for easy to understand inside dot flange connecting port and flange access in each accompanying drawing.

Below, to the lumpy flange except that above-mentioned

lumpy flange

40,60,80 50,70,90,100,110,120,130,140,150,160,170 and increase flange 180,190 and describe.

The structure of the lumpy flange 50 of application drawing 7 explanation R classes.

Lumpy flange 50 is made rectangular shape.Lumpy flange 50 is made of upper surface 51a, lower surface 51b, positive 51c, back side 51d, left surface 51e and each face of right flank 51f.

In the upper right of positive 51c, vertically be set with connection mouth 54.Connection mouth 54 is communicated with the flange access 56 that is formed at lumpy flange inside.Flange access 56 is communicated with the flange connecting port 55 that is formed at lower surface 51b.The stream that flange access 56 is communicated with for the manifold access that will link with the open and close valve that is formed at manifold blocks and connection mouth 54.

Be formed with at the position that upper surface 51a and left surface 51e engage be used for notch that pipe passes through promptly pipe dodge portion 52.The shape that pipe is dodged portion 52 possesses the space of accommodating the pipe that two process gass pass through.That is, the height X that pipe is dodged portion 52 need be set at the height of the diameter amount of a pipe, and the length of long part of depth 2Y need be set at the length of the diameter amount of two pipes.The positive 51c side of dodging portion 52 at pipe is formed with through hole 53a.In addition, the back side 51d side of dodging portion 52 at pipe is formed with through hole 53b.

Through hole 53a and through hole 53b are positioned on the diagonal of lower surface 51b of lumpy flange 50, are formed with flange connecting port 55 betwixt.Therefore, at the screw hole by screw and manifold blocks fixedly the time, can apply uniform pressure to the joining portion of the connecting port of flange connecting port 55 and manifold access.Therefore, can prevent leakage from the joining portion of the connecting port of flange connecting port 55 and manifold access.

The structure of the lumpy flange 70 of first connection type is described with Fig. 9.

Lumpy flange 70 is made rectangular shape.Lumpy flange 70 is made of upper surface 71a, lower surface 71b, positive 71c, back side 71d, left surface 71e and each face of right flank 71f.

In the upper right of positive 71c, vertically be set with the first connection mouth 74a.In addition, the upper left side of 71d vertically is set with the second connection mouth 74b overleaf.The first connection mouth 74a is communicated with the flange access 76a that is formed at lumpy flange inside.In addition, the second connection mouth 74b is communicated with the flange access 76b that is formed at lumpy flange

inside.Flange access

76a, 76b are communicated with the flange connecting port 75 that is formed at lower surface

71b.Flange access

76a, 76b stream for being communicated with the manifold access that links with open and close valve that is formed at manifold blocks and the first connection mouth 74a and the second connection mouth 74b.

Be formed with at the center of upper surface 71a be used for notch that pipe passes through promptly pipe dodge portion 72.The shape that pipe is dodged portion 72 possesses the space of accommodating the pipe that a process gas passes through.That is, the pipe length of long part of dodging the height X of portion 72 and depth Y need be set at the length of the diameter amount of a pipe.The positive 71c side of dodging portion 72 at pipe is formed with through hole 73a.In addition, the back side 71d side of dodging portion 72 at pipe is formed with through hole 73b.

The effect of through hole 73a and through hole 73b is identical with above-mentioned lumpy flange 50.

The structure of the lumpy flange 90 of the 3rd connection type is described with Figure 11.

Lumpy flange 90 is made rectangular shape.Lumpy flange 90 is made of upper surface 91a, lower surface 91b, positive 91c, back side 91d, left surface 91e and each face of right flank 91f.

On the upper left side of positive 91c, vertically be set with the first connection mouth 94a.In addition, above the center of left surface 91e, vertically be set with the second connection mouth 94b.The first connection mouth 94a and the second connection mouth 94b are communicated with by being formed at inner flange access 96a.In addition, be formed with flange access 96b with respect to the flange connecting port 95 of lower surface 91b midway from flange access 96a.The first connection mouth 94a and the second connection mouth 94b are communicated with the flange access 96 that is formed at lumpy flange inside.Flange access 96 is communicated with the flange connecting port 95 that is formed at lower surface 91b.The stream of flange access 96 for being communicated with manifold access, the first connection mouth 94a and the second connection mouth 94b that the open and close valve that is formed at manifold blocks links.

Be formed with at the position that upper surface 91a and right flank 91f engage be used for notch that pipe passes through promptly pipe dodge portion 92.The shape that pipe is dodged portion 92 possesses the space of accommodating the pipe that two process gass pass through.That is, the height X that pipe is dodged portion 92 need be set at the height of diameter amount, and the length of long part of depth 2Y need be set at the length of the diameter amount of two pipes.The positive 91c side of dodging portion 92 at pipe is formed with through hole 93a.In addition, the back side 91d side of dodging portion 92 at pipe is formed with through hole 93b.

The effect of through hole 93a and through hole 93b is identical with above-mentioned lumpy flange 50.

The structure of the lumpy flange 100 of the 4th connection type is described with Figure 12.

The lumpy flange 100 of the 4th type is set at the structure roughly the same with the lumpy flange 70 of first connection type of Fig. 9, therefore, different structures is described, and thus, omits the explanation of other 102,103a, 103b, 105,106a, 106b.

Lumpy flange 100 is made rectangular shape.Lumpy flange 100 is made of upper surface 101a, lower surface 101b, positive 101c, back side 101d, left surface 101e and each face of right flank 101f.

On the upper left side of positive 101c, vertically be set with the first connection mouth 104a.In addition, the upper right of 101d vertically is set with the second connection mouth 104b overleaf.With the difference of lumpy flange 70 structures is that the allocation position of connection mouth is different.

The structure of the lumpy flange 110 of the 5th connection type is described with Figure 13.

The lumpy flange 110 of the 5th type is set at the structure roughly the same with the lumpy flange 90 of the 3rd connection type of Figure 11, therefore, different structures is described, and thus, omits other 112,113a, 113b, 115,116 explanation.

Lumpy flange 110 is made rectangular shape.Lumpy flange 110 is made of upper surface 111a, lower surface 111b, positive 111c, back side 111d, left surface 111e and each face of right flank 111f.

Above the center of positive 111c, vertically be set with the first connection mouth 114a.In addition, in the upper right of left surface 111e, vertically be set with the second connection mouth 114b.With the difference of lumpy flange 90 structures is that the allocation position of connection mouth is different.

The structure of the lumpy flange 120 of second center type is described with Figure 14.

The lumpy flange 120 of second center type is set at the structure roughly the same with the lumpy flange 40 of the center type of Fig. 6, therefore, different structures is described, and thus, omits other 123a, 123b, 125,126 explanation.

Lumpy flange 120 is made rectangular shape.Lumpy flange 120 is made of upper surface 121a, lower surface 121b, positive 121c, back side 121d, left surface 121e and each face of right flank 121f.

Be formed with at the position that upper surface 121a and left surface 121e engage be used for notch that pipe passes through promptly pipe dodge the 122a of portion.Be formed with at the position that upper surface 121a and right flank 121f engage be used for notch that pipe passes through promptly pipe dodge the 122b of portion.Be formed with at the position that upper surface 121a and back side 121d engage be used for notch that pipe passes through promptly pipe dodge the 122c of portion.With the difference of lumpy flange 40 structures is whether to form pipe to dodge the different of the 122c of portion.

The structure of the lumpy flange 130 of the 3rd center type is described with Figure 15.

The lumpy flange 130 of the 3rd center type is set at the structure roughly the same with the lumpy flange 40 of the center type of Fig. 6, therefore, different structures is described, and thus, omits other 135,136 explanation.

Lumpy flange 130 is made rectangular shape.Lumpy flange 130 is made of upper surface 131a, lower surface 131b, positive 131c, back side 131d, left surface 131e and each face of right flank 131f.

Be formed with at the position that upper surface 131a and left surface 131e engage be used for notch that pipe passes through promptly pipe dodge the 132a of portion.Be formed with at the position that upper surface 131a and right flank 131f engage be used for notch that pipe passes through promptly pipe dodge the 132b of portion.Be formed with at the position that upper surface 131a and back side 131d engage be used for notch that pipe passes through promptly pipe dodge the 132c of portion.

The positive 131c side of dodging the 132b of portion at pipe is formed with through hole 133b.The back side 131d side of dodging the 132a of portion at pipe is formed with through hole 133a.

Dodge the difference of position of the different and through hole of the 132c of portion with the difference of lumpy flange 40 structures for whether forming pipe.

The structure of the lumpy flange 140 of the 2nd R type is described with Figure 16.

The lumpy flange 140 of the 2nd R type is set at the structure roughly the same with the lumpy flange 50 of the R type of Fig. 7, therefore, different structures is described, and thus, omits other 145,146 explanation.

Lumpy flange 140 is made rectangular shape.Lumpy flange 140 is made of upper surface 141a, lower surface 141b, positive 141c, back side 141d, left surface 141e and each face of right flank 141f.

Be formed with at the position that upper surface 141a and left surface 141e engage be used for notch that pipe passes through promptly pipe dodge the 142a of portion.The shape that pipe is dodged the 142a of portion possesses the space of accommodating the pipe that two process gass pass through.Be formed with at the position that upper surface 141a and back side 141d engage be used for notch that pipe passes through promptly pipe dodge the 142b of portion.The shape that pipe is dodged the 142b of portion possesses the space of accommodating the pipe that a process gas passes through.

With the difference of lumpy flange 50 structures is whether to form pipe to dodge the different of the 142b of portion.

The structure of the lumpy flange 150 of the 2nd L type is described with Figure 17.

The lumpy flange 150 of the 2nd L type is set at the structure roughly the same with the lumpy flange 60 of the L type of Fig. 8, therefore, different structures is described, and thus, omits other 155,156 explanation.

Lumpy flange 150 is made rectangular shape.Lumpy flange 150 is made of upper surface 151a, lower surface 151b, positive 151c, back side 151d, left surface 151e and each face of right flank 151f.

Be formed with at the position that upper surface 151a and right flank 151f engage be used for notch that pipe passes through promptly pipe dodge the 152a of portion.The shape that pipe is dodged the 152a of portion possesses the space of accommodating the pipe that two process gass pass through.Be formed with at the position that upper surface 151a and back side 151d engage be used for notch that pipe passes through promptly pipe dodge the 152b of portion.The shape that pipe is dodged the 152b of portion possesses the space of accommodating the pipe that a process gas passes through.

With the difference of lumpy flange 60 structures is whether to form pipe to dodge the different of the 152b of portion.

The structure of the lumpy flange 160 of the 6th connection type is described with Figure 18.

The lumpy flange 160 of the 6th connection type is set at the structure roughly the same with the lumpy flange 90 of the 3rd connection type of Figure 11, therefore, different structures is described, and thus, omits other 165,166 explanation.

Lumpy flange 160 is made rectangular shape.Lumpy flange 160 is made of upper surface 161a, lower surface 161b, positive 161c, back side 161d, left surface 161e and each face of right flank 161f.

Be formed with at the position that upper surface 161a and right flank 161f engage be used for notch that pipe passes through promptly pipe dodge the 162a of portion.The shape that pipe is dodged the 162a of portion possesses the space of accommodating the pipe that two process gass pass through.Be formed with at the position that upper surface 161a and back side 161d engage be used for notch that pipe passes through promptly pipe dodge the 162b of portion.The shape that pipe is dodged the 162b of portion possesses the space of accommodating the pipe that a process gas passes through.

With the difference of lumpy flange 90 structures is whether to form pipe to dodge the different of the 162b of portion.

The structure of the lumpy flange 170 of the 7th connection type is described with Figure 19.

The lumpy flange 170 of the 7th connection type is set at the structure roughly the same with the lumpy flange 110 of the 5th connection type of Figure 13, therefore, different structures is described, and thus, omits other 175,176 explanation.

Lumpy flange 170 is made rectangular shape.Lumpy flange 170 is made of upper surface 171a, lower surface 171b, positive 171c, back side 171d, left surface 171e and each face of right flank 171f.

Be formed with at the position that upper surface 171a and back side 171d engage be used for notch that pipe passes through promptly pipe dodge the 172a of portion.The shape that pipe is dodged the 172a of portion possesses the space of accommodating the pipe that two process gass pass through.Be formed with at the position that upper surface 171a and right flank 171f engage be used for notch that pipe passes through promptly pipe dodge the 172b of portion.The shape that pipe is dodged the 172b of portion possesses the space of accommodating the pipe that a process gas passes through.

With the difference of lumpy flange 110 structures is whether to form pipe to dodge the different of the 172b of portion.

Illustrate that with Figure 20 first increases the structure of flange 180.

First increases flange 180 makes rectangular shape.First increases flange 180 is made of upper surface 181a, lower surface 181b, positive 181c, back side 181d, left surface 181e and each face of right flank 181f.

Be formed with connection mouth 187 at the center of upper surface 181a.Be formed with connecting port 185 at the center of lower surface 181b.185 are communicated with flange path 186 from connection mouth 187 to connecting port.

Mode be clamped and connected mouth 187 and connecting port 185 forms through hole 183a, 183b.Through

hole

183a, 183b penetrate into lower surface 181b.

The height V that increases flange 180 is at least than the diameter height of a pipe.

Illustrate that with Figure 21 second increases the structure of flange 190.

Second increases flange 190 is set at first of Figure 20 and increases the roughly the same structure of flange 180, therefore, different structures is described, thus, omit other 191a, 191b, 191c, 191d, 191e, 191f, 193a, 193b, 195,196,197 explanation.

The second height W that increases flange 190 first increases the height at double of the height V of flange 180.

With first difference of increasing flange 180 structures is the different of height W.

It is as described below to possess the obtained effect of lumpy flange.

In

lumpy flange

40,50,60,70,80,90,100,110,120,130,140,150,160,170, be formed with pipe and dodge portion.As Fig. 3 and shown in Figure 5, by when pipe, can dodge portion by pipe, therefore, do not need to dodge other lumpy flange and by pipe.Therefore, can straight line shape ground trombone slide, therefore can make the structure of simple pipe.In addition, can put pipe in order, therefore, the ground occupied area, can be reduced in the space that can cut the waste therefore.Also can realize simultaneously the saving of pipe.

The supplying method of＜process gas 〉

The supplying method of process gas describes with the circuit diagram of Fig. 1.

For example, to chamber delivery technology gas GAS1 the time, process gas GAS1 becomes the state that is filled to stream H1.When this state, open and close valve VA1, VA4 are opened by not shown control unit.Thus, process gas GAS1 is transported to chamber by stream H1 and by mass flow controller MA.

When chamber delivery technology gas GAS2, GAS3, GAS4, GAS5, GAS7, GAS8,, therefore omit explanation with carry the supplying method of above-mentioned process gas GAS1 to chamber identical.

As supplying method two kinds of methods are arranged to chamber delivery technology gas GAS6.The method of first method for carrying to chamber by mass flow controller MB.The method of second method for carrying to chamber by mass flow controller MC.

In first method, when process gas GAS6 becomes the state that is filled to stream H6, open and close valve VB3, VB4 are opened by not shown control unit.Thus, process gas GAS6 is by stream H6a, be delivered to chamber by mass flow controller MB.

In second method, when process gas GAS6 becomes the state that is filled to stream H6, as shown in Figure 1, open and close valve VC3, VC4 are opened by not shown control unit.Thus, process gas GAS6 is delivered to chamber by stream H6b and by mass flow controller MC.

More than, as describing in detail, gas supply device 1 according to present embodiment, have above-mentioned two kinds of methods, thus, for the process gas GAS6 of frequent use,, can select to supply with to chamber by mass flow controller MB or mass flow controller MC by switching open and close valve VB3 or open and close valve VC3.Therefore, for example, supply with at the same time under the situation of other process gas GAS7 and GAS6,, thus, can supply with process gas GAS6 and GAS7 simultaneously by for process gas GAS6 service property (quality) stream controller MB.

In addition, for example, supply with at the same time under the situation of other process gas GAS4 and GAS6,, thus, can supply with process gas GAS6 and GAS4 simultaneously by for process gas GAS6 service property (quality) stream controller MC.

Therefore, even under the situation that the process gas GAS6 that uses is continually arranged, owing to can supply with process gas GAS6 by two mass flow controller MB, MC, and therefore, can be corresponding with the technology of complexity.Therefore, do not need new mass flow controller.

In addition,

lumpy flange

40,50,60,70,80,90,100,110,120,130,140,150,160,170 has: the pipe in flange access that the connection mouth that pipe connects, the manifold access that will link with the open and close valve that is formed at manifold blocks and connection mouth are communicated with and the space that is used to guarantee that pipe passes through is dodged portion, thus, can put pipe in order, so space that can cut the waste, therefore, can reduce the ground occupied area.

In addition, the exhaust side in the loop has flow quantity detecting system R1, thus, can carry out the judgement of the unfavorable condition of mass flow controller.

In addition, according to the gas supply device 1 of present embodiment, can buccal mass be set in the side of gas supply device.Therefore, can the corresponding gas supply device that designs with the place that gas supply device is set.For example, in the time of on the direction of the line side of gas supply device, can not guaranteeing the space, the such buccal mass of gas supply device 1 of first mode of execution is set, thus, gas supply device can be set in side surface direction.

(second mode of execution)

Figure 22 represents the outward appearance top perspective view of gas supply device 21.Figure 23 represents the worm's eye view of gas supply device 21.Figure 24 represents the outward appearance face upwarding stereogram of gas supply device 21.Figure 25 represents the BB sectional drawing of the gas supply device 21 of Figure 23.

Gas supply device 21 adopts the form that possesses suction port at circuit direction as the gas supply mode.

Gas supply device 21 be use in first mode of execution, according to the device of the circuit diagram of Fig. 1 design.Therefore, the gas supply device 1 of the basic structure and first mode of execution is identical, therefore, below, to describing with gas supply device 1 different point.

From the line side (the first stream piece, 4 sides or the second stream piece, 5 sides) of gas supply device 21 buccal mass 10 that is communicated with the gas source of process gas is set.In the present embodiment, the inlet opening of buccal mass 10 is towards substantially horizontal, still, the inlet opening also can be up and down, other etc. direction.

For buccal mass 10, particularly and what supply with that the process gas source of process gas GAS1 is communicated with is buccal mass 11.What be communicated with the process gas source of supplying with process gas GAS2 is buccal mass 12.

As Figure 23 and shown in Figure 24, the second connection mouth 94b that pipe K6a that is communicated with from buccal mass 16 and lumpy flange BB 13 are lumpy flange 90 is connected.Be communicated with the mouth access 96a in the lumpy flange 90 and be communicated with the first connection mouth 94a.On the first connection mouth 94a, be communicated with the end of pipe K6b.The other end of stream K6b is connected with lumpy flange BC13.

Lumpy flange BC13 adopts above-mentioned lumpy flange shown in Figure 8 50.The connection mouth 54 of lumpy flange 50 is towards the line side of gas supply device 21 direction, and towards side surface direction.

The pipe that is communicated with from other

buccal mass

11,12,13,14,15,17,18 and the structure of first mode of execution are roughly the same, therefore omit explanation.

As described above in detail,, make lumpy flange, thus, can buccal mass be set at the line side face towards the line side different with the side of first mode of execution according to the gas supply device 21 of present embodiment.Therefore, can the corresponding gas supply device that designs with the place that gas supply device is set.For example, in the time of on the side surface direction of gas supply device, can not guaranteeing the space, the such buccal mass of gas supply device 21 of second mode of execution is set in the line side, thus, gas supply device can be set.

(the 3rd mode of execution)

Figure 26 and Figure 27 represent the circuit diagram of the gas supply device 22 of the 3rd mode of execution.The gas supply device 22 of Figure 26 and Figure 27 is characterized by, and has the stream H10 that connects chamber and outlet pipe before mass flow controller MA3, MB3.

Stream H10 was set before mass flow controller MA3, MB3, thus, can improves the purging exhaust efficiency when flowing into purge gas.

Figure 26 is the figure that stream H10 is set in the circuit diagram of having simplified first mode of execution, and Figure 27 is the figure that stream H10 is set in the circuit diagram of present technology.

(the 4th mode of execution)

Figure 28 and Figure 29 represent the circuit diagram of the gas supply device 23 of the 4th mode of execution.The gas supply device 23 of Figure 28 and Figure 29 is characterized by, and has the stream H11 that connects chamber and outlet pipe after mass flow controller MA4, MB4.

Stream H11 is set after mass flow controller MA4, MB4, thus, for example, when using process gas GAS 1 and service property (quality) stream controller MA4, can uses untapped mass flow controller MB4 to carry out the detection of mass flow controller MB4.Thus, can detect the unfavorable condition of mass flow controller MB4.

Figure 28 is the figure that stream H11 is set in the circuit diagram of having simplified first mode of execution, and Figure 29 is the figure that stream H11 is set in the circuit diagram of present technology.

(the 5th mode of execution)

Figure 30 represents the plan view of the gas supply device 24 of the 5th mode of execution.

Gas supply device 24 disposes the structure of the gas supply device 1 of first mode of execution for both sides.

By adopting the structure of both sides configuration gas supply device 1, can significantly reduce the internal volume of the gas interflow G1 of portion, can shorten the minute of flow quantity detecting system significantly.

In addition, by flow quantity detecting system R2 is set, can carry out the detection of mass flow controller.Thus, can detect the unfavorable condition of mass flow controller.

(the 6th mode of execution)

Figure 31 represents side view, and it represents the part section of the gas supply device 25 of the 6th mode of execution.Particularly, expression is from horizontal open and close valve VA11, VB11 side by side ... the center carry out the figure of section.

By the open and close valve VA11 that is communicated with manifold blocks NA1, the open and close valve VB11 that is communicated with manifold blocks NA2 ... constitute.

On manifold blocks NA1, be communicated with and increase piece KA1, on manifold blocks NA2, be communicated with and increase piece KA2, increase below the piece KA3 to increasing piece KA6 being communicated with to manifold blocks NA6 below the manifold blocks NA3.Increase piece KA1, KA2, KA3 and adopt the above-mentioned piece 190 of increasing.Increase piece KA4, KA5, KA6 and adopt the above-mentioned piece 180 of increasing.

Be communicated with lumpy flange CA on the piece KA1 increasing.Be communicated with lumpy flange CB on the piece KA2 increasing.Be communicated with similarly below the lumpy flange CC increasing below the piece KA3.

On manifold blocks NA7, be communicated with lumpy flange CG, on manifold blocks NA8, be communicated with lumpy flange CH, on manifold blocks NA9, be communicated with lumpy flange CI.

The pipe TC that is communicated with buccal mass IC is communicated with lumpy flange CH, is communicated with to open and close valve VH11.The pipe TB that is communicated with buccal mass IB is communicated with lumpy flange CE, is communicated with to increase piece KA5, and is communicated with to open and close valve VE11.The pipe TA that is communicated with buccal mass IA is communicated with lumpy flange CB, is communicated with to increase piece KA2, and is communicated with to open and close valve VB11.

Increase piece KA5 by use, can the open and close valve more than four laterally arranged side by side.That is, the pipe TB that is communicated with buccal mass IB can pass through the below of lumpy flange CG, CH, CI by increasing piece KA5.Therefore, pipe TB and lumpy flange CG, CH, CI are not interfered with each other, can make it to be communicated with lumpy flange CE.Thus, can the open and close valve more than four laterally arranged side by side.

In the present embodiment, increase piece KA2 by further use, can the open and close valve more than seven laterally arranged side by side.That is, the pipe TA that is communicated with buccal mass IA can pass through the below of lumpy flange CD, CE, CF, CG, CH, CI by increasing piece KA2.Thus, pipe TB and lumpy flange CD, CE, CF, CG, CH, CI are not interfered with each other, can make it to be communicated with lumpy flange CB.Thus, can the open and close valve more than seven laterally arranged side by side.

As described above in detail, according to the gas supply device 25 of present embodiment, can arrange open and close valve more than four at side surface direction or circuit direction.Therefore, can the corresponding gas supply device that designs with the place that gas supply device is set.For example, in the time of on the circuit direction of gas supply device, can not guaranteeing the space, as the gas supply device 25 of the 6th mode of execution, can nine open and close valves laterally arranged side by side.On the contrary, in the time of on the side surface direction of gas supply device, can not guaranteeing the space, though not shown among the figure, can the open and close valve more than four vertically arranged side by side.

In addition, the invention is not restricted to above-mentioned mode of execution, can carry out various application.

For example, open and close valve can also use solenoid valve etc. except using pneumatic valve.

For the position of two through holes of lumpy flange, if be positioned at the right front with respect to positive through hole, then another is located in the left back.Otherwise if be positioned at the left front with respect to positive through hole, then another is located in the right back.

In lumpy flange, two through holes are positioned on the diagonal of lower surface of lumpy flange and form, and still, can increase by two through holes again and form in the mode at four angles of the lower surface that is positioned at lumpy flange.Become through hole by quadrangle, at the screw hole that utilizes screw and manifold blocks fixedly the time, can apply uniform pressure the joining portion of the connecting port of flange connecting port and manifold access at the lower surface of lumpy flange.

The height of increasing flange is by further design alteration of mode of execution.

Claims

1. gas supply device, have first circuit and second circuit, this first circuit is connected with first mass flow controller, this second circuit is connected with second mass flow controller, this first circuit has first open and close valve of supply gas A and second open and close valve of supply gas C, this second circuit has the 3rd open and close valve of supply gas B and the 4th open and close valve of supply gas D, it is characterized in that

Described gas A and described gas B are same gas.

2. gas supply device as claimed in claim 1 is characterized in that,

Have lumpy flange, this lumpy flange is installed in the lower surface of the manifold blocks of being installed on described all open and close valve,

Described lumpy flange has:

The connection mouth that is connected with pipe;

The flange access, manifold access that will be connected with the described open and close valve that is formed at described manifold blocks and described connection mouth are communicated with; And

The pipe in the space that is used to guarantee that described pipe passes through is dodged portion.

3. as claim 1 or the described gas supply device of claim 2, it is characterized in that,

Exhaust side in the loop has flow quantity detecting system.

4. as claim 1 or the described gas supply device of claim 2, it is characterized in that,

Described lumpy flange can both be installed on the described manifold blocks on the either direction of longitudinal direction, transverse direction.

5. lumpy flange, the lower surface of the manifold blocks that is installed on the open and close valve to be installed is characterized in that,

Described lumpy flange has:

The connection mouth that is connected with pipe;

6. lumpy flange as claimed in claim 5 is characterized in that,