KR101113823B1 - Gas supply unit and block-shaped flange - Google Patents

Abstract

It is possible to provide a gas supply device capable of supplying a complicated process gas and reducing the footprint. In the gas supply device 1 having a first line and a second line, the first line is connected to a first massflow controller MB, and the second line is connected to a second massflow controller MC. The first line includes a first on-off valve VB3 for supplying gas A and a second on-off valve VB2 for supplying gas C, and the second line includes a third on-off valve for supplying gas B. In the gas supply device 1 including the valve VC3 and the fourth open / close valve VC2 for supplying the gas D, the gas A and the gas B are the same gas.

Description

GAS SUPPLY UNIT AND BLOCK-SHAPED FLANGE}

The present invention provides a gas supply apparatus including a first line and a second line, wherein the first line is connected to a first massflow controller, and the second line is connected to a second massflow controller. One line includes a first on-off valve and a second on-off valve, and the second line includes a third on-off valve and a fourth on-off valve, and supplies a supply port for supplying four types of gases A, B, C, and D. And a gas supply device connected to the gas supply unit.

Conventionally, the gas supply device described in Patent Documents 1 and 2 described below is an invention for the purpose of reducing the effective area of occupancy while reducing the number of uses of a mass flow controller, which is an expensive and relatively large device. Is disclosed.

The gas supply apparatus 300 of patent document 1 shown in FIG. 32 has the mass flow controller 301MA which controls the gas flow volume before mixing. In addition, three on-off valves 302VA, 303VA and 304VA are connected to the mass flow controller 301MA. In Fig. 32, three open / close valves are provided for easy comparison with the present invention. Mass Flow Controller The line connected to the mass flow controller 301MA is called a first line.

The above configuration can reduce the number of massflow controllers, which are expensive and relatively large devices.

However, in the invention according to Patent Document 1, for example, in the case of the process gas G1 which is frequently used when supplying the process gas, the process gas G1 is used in addition to passing through one massflow controller 301MA. When it cannot be supplied, other process gases G2 and G3 passing through the same massflow controller 301MA cannot be supplied to the first line at the same time. Then, when supplying the other process gas G2, G3, supply of the process gas G1 should be stopped. As a result, there is a problem that it is not possible to cope with complicated processes, or a new massflow controller is required to cope.

Here, in order to solve the subject of invention which concerns on patent document 1, there exists invention regarding patent document 2.

As shown in FIG. 33, the gas supply apparatus 200 of patent document 2 has three mass flow controllers 201MA, 201MB, and 201MC. Eight on-off valves to the on / off valves 212A to 212H are passed through the mass flow controller 201MA. In addition, eight on / off valves pass through the other mass flow controllers 201MB and 201MC, respectively. The line passing through the massflow controller 201MA is called the first line, the line passing through the massflow controller 201MB is called the second line, and the line passing through the massflow controller 201MC is called the third line. do. For example, when supplying the process gas G1, when one of the opening-closing valves 212A, 213A, or 213A is closed, the process gas G1 can be supplied to any of the first to third lines. Therefore, even when the process gas to be frequently supplied, for example, the process gas G1 is supplied to the first line, the other process gases G2 and G3 can be supplied to the other second and third lines. Therefore, the other process gases G2 and G3 can be supplied without stopping the supply of the process gas G1.

[Patent Document 1] Japanese Patent No. 390468

[Patent Document 2] Japanese Unexamined Patent Publication No. 2003-91322

However, the conventional gas supply device 200 has the following problems.

For example, the gas supply device 200 required 24 on / off valves. Therefore, since the opening / closing valve increases, there exists a problem that manufacturing cost increases and an occupancy area become large.

As described above, in the gas supply device 300 according to Patent Literature 1, the number of on-off valves is small, but, for example, when there is a process gas G1 that is frequently used when supplying gas, there is one mass flow. If the process gas G1 can be supplied only through the controller 301MA, other process gases G2 and G3 passing through the same massflow controller 301MA cannot be simultaneously supplied to the first line. Then, when supplying the other process gas G2, G3, supply of the process gas G1 should be stopped. For this reason, there is a problem that it is impossible to cope with complicated processes, or that a new massflow controller is required to cope.

Moreover, in the gas supply apparatus 300 which concerns on patent document 1, since the supply source of the process gas used for a process for every process, and the whole pipe for supplying the process gas are directly connected to each on-off valve, a pipe is crowded. There was a problem that the occupied area could not be made small.

The present invention has been made to solve the above problems, and it is an object of the present invention to provide a gas supply device capable of using other process gases and reducing the occupied area without stopping supply of frequently used process gases. It is done.

In order to achieve the above object, the gas supply device and the block-shaped flange of one aspect of the present invention has the following configuration.

(1) A gas supply device including a first line and a second line, wherein the first line is connected to a first massflow controller, and the second line is connected to a second massflow controller. One line includes a first on-off valve for supplying gas A and a second on-off valve for supplying gas C, and the second line includes a third on-off valve for supplying gas B and a fourth on-off valve for supplying gas D. It includes, The gas A and the gas B is characterized in that the same gas.

(2) The gas supply device described in (1), wherein the gas supply device includes a block flange that can be installed on a lower surface of the manifold block provided in all the open / close valves, and the block flange includes a connection port to which a pipe is connected, and the manifold. It characterized in that it comprises a mad fold communication path connected to the on-off valve formed in the fold block and a flange communication path for communicating the connection port, and a pipe relief portion for securing a space through which the pipe passes.

(3) The gas supply apparatus as described in (1) or (2), characterized by including a flow rate inspection system on the exhaust side of the circuit.

(4) The gas supply device according to (1) or (2), wherein the block-shaped flange can be installed in the manifold block in either the longitudinal direction or the transverse direction.

(5) A block-shaped flange that can be installed on a lower surface of a manifold block provided in an on / off valve, wherein the block-shaped flange is a connection port to which a pipe is connected, and a mad fold communication path connected to the on / off valve formed on the manifold block. And a flange communication path communicating with the connection port, and a pipe relief part for securing a space through which the pipe passes.

(6) The block-shaped flange according to (5), wherein the block-shaped flange can be provided in the manifold block either in the longitudinal direction or the transverse direction.

The operation and effects of the gas supply device and the block flange will be described.

(1) According to the gas supply device according to the above invention, gas A and gas B are the same gas, and the first on-off valve and the third on-off valve are connected to a supply port for supplying gas A, and the second on-off valve is Since it is connected to the supply port which supplies gas C, even when it is the process gas G1 which is used frequently, for example, when supplying gas, it can supply process gas G1 through two massflow controllers. have. Therefore, in the case of supplying different process gases G2 and G3 at the same time, the process gas G1 can be supplied at the same time by using the other mass flow controller. Can be. Thus, it can cope with complex processes, eliminating the need for a new massflow controller.

(2) It has the structure of (1), and also includes the block type flange which can be installed in the lower surface of the manifold block provided in an on-off valve, A block-shaped flange is formed in the connection port to which a pipe connects, and the said manifold block. Since the pipe can be arranged by adopting a configuration including a mad fold communication path connected to the on-off valve, a flange communication path communicating with the connection port, and a pipe relief portion for securing a space through which the pipe passes. As a result, the space used can be reduced by reducing unnecessary space.

(3) Since the configuration of (1) or (2) is employed and the configuration including a flow rate inspection system on the exhaust side of the circuit is adopted, an abnormality of the massflow controller can be obtained by measuring the flow rate of the massflow controller. Can be determined.

(4) Since the block flange has the configuration of (1) or (2), and the block flange can be installed in the manifold block in either the longitudinal direction or the transverse direction, a gas supply device is provided. Depending on the location, the gas supply device can be designed. Therefore, even if the space is insufficient, the gas supply device can be arranged.

(5) A block-shaped flange that can be installed on a lower surface of a manifold block provided in an on / off valve, wherein the block-shaped flange is a connection port to which a pipe is connected, and a mad fold communication path connected to the on / off valve formed on the manifold block. And a flange communication path for communicating with the connection port, and a pipe relief portion for securing a space through which the pipe passes, so that the pipe can be trimmed and the unnecessary space can be reduced, thereby reducing the occupied area.

(6) Since the block flange has a configuration of (5) and can be installed in the manifold block in either the longitudinal direction or the transverse direction, depending on the place where the gas supply device is installed, For example, the gas supply system can be designed. Therefore, even if the space is insufficient, the gas supply device can be arranged.

Subsequently, an embodiment of the gas supply device and the block flange according to the present invention will be described with reference to the drawings.

(First embodiment)

<Overall Configuration of Gas Supply Device>

1 is a circuit diagram of a gas supply device 1. The gas supply device 1 adopts a type in which a gas inlet is included on the side as a gas supply method.

As shown in FIG. 1, the gas supply apparatus 1 has eight types of process gases GAS1, GAS2, GAS3, GAS4, GAS5, GAS6, GAS7, and GAS8 communicating with gas sources (process gas (process gas ( GAS6) corresponds to gas A and gas B).

The flow path H1 communicating with the gas source of the process gas GAS1 is connected with the input port of the on-off valve VA1. The flow passage communicating with the output port of the on / off valve VA1 communicates with the input port of the mass flow controller MA. The flow passage communicating with the output port of the mass flow controller MA communicates with the input port of the on-off valve VA4. A flow path H9 communicates with the output port of the on-off valve VA4, and the flow path H9 is branched into a flow path H9a facing the chamber side and a flow path H9b facing the exhaust pipe side direction. The flow rate test system R1 is connected to the oil passage H9b.

The abnormality of the mass flow controller can be determined by connecting the flow rate test system R1 to the oil passage H9b.

The flow path H2 communicating with the gas source of the process gas GAS2 communicates with the input port of the on-off valve VA2. The flow passage communicating with the output port of the on-off valve VA2 communicates with the input port of the mass flow controller MA. The flow passage communicating with the output port of the mass flow controller MA communicates with the input port of the on-off valve VA4. The configuration of the on-off valve VA4 is the same as that described above.

Since the circuits to the chambers and the exhaust pipes of the process gases GAS3, GAS4, GAS5, GAS7, and GAS8 adopt the same configuration as the circuits of the process gases GAS1 and GAS2, description thereof is omitted. (The line communicating with the massflow controller MB corresponds to the first line, and the massflow controller MB corresponds to the first massflow controller. The line connected to the massflow controller MC is the second line. The mass flow controller MC corresponds to the second mass flow controller.)

The flow path H6 connected to the gas source of process gas GAS6 is branched into two, the flow path H6a and the flow path H6b in the middle. One flow path H6a communicates with an input port of the on-off valve VB3. (The open / close valve VB3 corresponds to the first open / close valve.) The other flow path H6b communicates with the input port of the open / close valve VC3. (The open / close valve VC3 corresponds to the second open / close valve.)

The flow passage communicating with the output port of the on-off valve VB3 communicates with the input port of the mass flow controller MB. The flow passage communicating with the output port of the other open / close valve VC3 communicates with the input port of the mass flow controller MC.

The flow passage communicating with the output port of the mass flow controller MB communicates with the input port of the on-off valve VB4. The flow passage communicating with the output port of the mass flow controller MC communicates with the on-off valve VC4.

A flow path H9 communicates with the output ports of the open / close valve VB4 and the open / close valve VC4, and the flow path H9 is branched into a flow path H9a facing the chamber direction and a flow path H9b facing the exhaust pipe direction. . The flow rate test system R1 is connected to the oil passage H9b.

The flow path connected to the gas source of the purge gas is connected to the input port of the on-off valve P1, and the flow path connected to the output port of the P1 is connected to the input ports of the on-off valves P2, PA, PB, and PC. have.

The flow passage communicating with the output port of the open / close valve PA communicates with the input port of the mass flow controller MA. The flow passage communicating with the output port of the on-off valve PB communicates with the input port of the mass flow controller MB. The flow passage communicating with the output port of the on-off valve PC communicates with the input port of the mass flow controller MC.

The flow path H9 communicating with the output ports of the mass flow controllers MA, MB, and MC is branched into a flow path H9a facing the chamber side and a flow path H9b facing the exhaust pipe side. The flow rate test system R1 communicates with the flow path H9b.

2 is a perspective upper view of the gas supply device 1. 3 is a bottom view of the gas supply device 1. 4 is an external view downward perspective view of the gas supply device 1.

2 to 4 correspond to the circuit diagram of FIG. 1.

As shown in Figs. 3 and 4, there are manifold blocks 2A, 2B and 2C and V-shaped flow path blocks 3A, 3B and 3C.

The mass flow controller MA is fixed by screws (not shown) to connect the manifold block 2A and the V-shaped flow path block 3A. The manifold block 2A, the V-shaped flow path block 3A and the mass flow controller MA are integrated.

The manifold block 2B, the V-shaped flow path block 3B, and the mass flow controller MB, and the manifold block 2C, the V-shaped flow path block 3C, and the massflow controller MC are also described. Since the same configuration is adopted, the description is omitted.

The first flow path block 4 is fixed to the ends of the manifold blocks 2A, 2B, and 2C by screws (not shown). The second flow path block 5 is fixed to the ends of the V-shaped flow path blocks 3A, 3B, and 3C by screws (not shown). The gas supply device 1 is integrated as a whole by fixing the first flow path block 4 and the second flow path block 5.

As shown in FIG. 2, a port block 10 is installed on the side of the gas supply device 1 (the side of the manifold block 2A or the side of the manifold block 2C) to communicate with the gas source of the process gas. It is. In the present embodiment, the input port of the port block 10 faces the horizontal direction, but the input port can be provided in the up, down, and other directions.

Specifically, the port block 10 communicates with a process gas source provided with the process gas GAS1. The port block 12 communicates with the process gas source to which the process gas GAS2 is supplied.

Regarding the process gases GAS3 to GAS8, the same configuration as that of the process gases GAS1 and GAS2 is adopted, so description thereof is omitted.

5 is a cross-sectional view AA of the gas supply device 1 of FIG.

3 and 5, block flanges BA1, BA2, and BA3 are fixed to the manifold block 2A by screws. The block flange BA1 is located directly below the shutoff valve VA1, the block flange BA2 is located directly below the shutoff valve VA2, and the block flange BA3 is immediately below the shutoff valve VA3. It is located below.

As shown in FIG. 5, the flange communication path FA1 in the block flange BA1 communicates with the manifold communication path RA1 in the manifold block 2A and communicates with the on-off valve VA1. The flange communication path FA2 in the block flange BA2 communicates with the manifold communication path RA2 in the manifold block 2A and communicates with the on-off valve VA2. The flange communication path FA3 in the block flange BA3 communicates with the manifold communication path RA3 in the manifold block 2A and communicates with the on-off valve VA3.

Block-shaped flanges BB1, BB2 and BB3 are fixed to the manifold block 2B by screws. Although not shown, the block flange BB1 is located directly below the shutoff valve VB1, the block flange flange BB2 is located directly below the shutoff valve VB2, and the block flange BB3 is the shutoff valve. It is located directly below (VB3).

Block-shaped flanges BC1, BC2, BC3 are fixed to the manifold block 2C by screws. Although not shown, the block flange BC1 is located directly below the shutoff valve VC1, the block flange flange BC2 is located directly below the shutoff valve VC2, and the block flange flange BC3 is the shutoff valve. It is located directly below (VC3).

Although not shown, manifold communication paths are formed in the manifold blocks 2B and 2C, flange communication paths are formed in the block flange, and the valves VB1, VB2, VB3, VC1, VC2, and VC3 are provided. Each is in communication.

3 and 4, the pipe K1 communicating with the port block 11 communicates with the block flange BA1 communicating with the on-off valve VA1. (The pipe K1 constitutes a part of the flow path H1 in the circuit diagram.) The pipe K2 communicating with the port block 12 communicates with the block flange BA2 communicating with the on / off valve VA2. . The pipe K3 communicating with the port block 13 communicates with the block flange BA3 communicating with the on-off valve VA3.

The shape of the block flanges BA1, BA2, and BA3 employs an L type block flange 60. FIG. In addition, the flange communication path FA1 in the block flange BA1, the flange communication path FA2 in the block flange BA2, and the flange communication path FA3 in the block flange BA3 shown in FIG. It corresponds to the flange communication path 66 mentioned later.

8, the structure of L type block flange 60 is demonstrated. FIG. 8A shows an external perspective view and FIG. 8B shows a top view. FIG. 8C shows a side view and FIG. 8D shows a front view. In addition, the flange communication path 65 and the flange communication path 66 are shown with the dotted line in each figure in order to understand the internal flange communication path 65 and the flange communication path 66 easily.

The block flange 60 has a rectangular parallelepiped shape. The block-shaped flange 60 is comprised from the surface of the upper surface 61a, the lower surface 61b, the front surface 61c, the back surface 61d, the left surface 61e, and the right surface 61f.

The tangential port 64 is fixed and provided in the vertical direction at the upper left of the front surface 61c. The connection port 64 communicates with the flange communication path 66 formed inside the block flange. The flange communication path 66 communicates with the flange communication path 65 formed on the lower surface 61b. The flange communication path 66 is a flow path communicating the manifold communication path and the connection port 64 connected to the on / off valve formed in the manifold block.

The pipe relief part 62 which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 61a and the right surface 61f. The shape of the pipe relief portion 62 includes a space in which two pipes through which the process gas passes are located. That is, the height X of the pipe relief part 62 requires the height of the diameter of one pipe, and the length of the longest part of the depth 2Y needs the length of the diameter of two pipes. The through hole 63a is formed in the front side 61c side of the pipe relief part 62. As shown in FIG. Moreover, the through hole 63b is formed in the back surface 61d side of the pipe relief part 62. As shown in FIG.

The through-hole 63a and the through-hole 63b are located on the diagonal of the lower surface 61b of the block-shaped flange 60, and the flange communication path 65 is formed between them. Therefore, when fixing with the screw hole of a manifold block with a screw, uniform pressure can be applied to the joint part of the communication hole of the flange communication path 65 and the manifold communication path. Therefore, leakage at the junction of the communication port of the flange communication path 65 and the manifold communication path can be prevented.

3 and 4, the pipe K4 communicating in the port block 14 passes through the pipe relief part 62 of the block flange 60, which is the block flange BA1, and opens and closes the valve ( It communicates with the block flange BB1 communicating with VB1). The block-shaped flange 40 of the center type mentioned later is employ | adopted as the shape of the block-shaped flange BB1.

The pipe K5 communicating with the port block 15 passes through the pipe relief portion 62 of the block flange 60, which is the block flange BA2, and communicates with the on / off valve VB2. ) Is communicating. The block-shaped flange 40 of the center type mentioned later is employ | adopted for the shape of the block-shaped flange BB2.

With reference to FIG. 6, the structure of the center type block flange 40 is demonstrated. FIG. 6A shows an external perspective view, FIG. 6B shows a plan view, FIG. 6C shows a side view, and FIG. 6D shows a front view. In addition, in order to understand the flange communication path 45 and the flange communication path 46 inside, the flange communication path 45 and the flange communication path 46 are shown with the dotted line in each figure.

The block flange 40 has a rectangular parallelepiped shape. The block-shaped flange 40 is comprised from the surface of the upper surface 41a, the lower surface 41b, the front surface 41c, the rear surface 41d, the left surface 41e, and the right surface 41f.

The tangential port 44 is fixed and provided in the vertical direction at the center upper part of the front surface 41c. The connection port 44 communicates with the flange communication path 46 formed inside the block flange. The flange communication path 46 communicates with the flange communication path 45 formed on the lower surface 41b. The flange communication path 46 is a flow path for communicating the manifold communication path and the connection port 44 connected to the on / off valve formed in the manifold block.

The pipe relief part 42a which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 41a and the left surface 41e. The shape of the pipe relief portion 42a includes a space in which one pipe through which the process gas passes is located. That is, the height X of the pipe relief part 42a and the length of the longest part of the depth Y require the length equal to the diameter of one pipe. The through hole 43a is formed in the front face 41c side of the pipe relief part 42a.

The pipe relief part 42b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 41a and the right surface 41f. The shape of the pipe relief portion 42b includes a space in which two pipes through which the process gas passes are located. That is, the height X of the pipe relief part 42b and the length of the longest part of the depth Y require the length equal to the diameter of one pipe. The through hole 43b is formed in the back surface 41d side of the pipe relief part 42b.

The effects on the through hole 43a and the through hole 43b are the same as those of the block flange 60.

The pipe K6a communicating with the port block 15 passes through the pipe relief portion 62 of the block flange 60, which is the block flange BA3, and communicates with the on / off valve VB3. ) Is communicating. The block-shaped flange BB3 employs the block-shaped flange 80 of the second connection water bath.

The structure of the block-shaped flange 80 of a 2nd connection type is demonstrated using FIG. 10A shows an external perspective view, FIG. 10B shows a top view, FIG. 10C shows a side view, and FIG. 10D shows a front view. In addition, in order to understand the flange communication path 85 and the flange communication path 86 inside, the flange communication path 85 and the flange communication path 86 were shown with the dotted line in each figure.

The block flange 80 has a rectangular parallelepiped shape. The block-shaped flange 80 is comprised from the surface of the upper surface 81a, the lower surface 81b, the front surface 81c, the rear surface 81d, the left surface 81e, and the right surface 81f.

The first tangential port 84a is fixed and provided in the vertical direction at the center upper portion of the front face 81c. In addition, the second connection port 84b is fixed and provided in the vertical direction at the center upper portion of the rear surface 81d. The first connection port 84a and the second connection port 84b communicate with each other by a flange communication path 86a formed therein.

Moreover, the flange communication path 86b is formed perpendicularly to the flange communication path 85 of the lower surface 81b in the middle of the flange communication path 86a. The flange communication path 86 is a flow path for communicating the manifold communication path connected to the on / off valve formed in the manifold block, the first connection port 84a and the second connection port 84b.

The pipe relief part 82a which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 81a and the left surface 81e. The shape of the pipe relief portion 82a includes a space in which one pipe through which the process gas passes is located. That is, the height X of the pipe relief part 82a and the length of the longest part of the depth Y require the length equal to the diameter of one pipe. The through hole 83a is formed in the front side 81c side of the pipe relief part 82a.

The pipe relief part 82b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 81a and the right surface 81f. The shape of the pipe relief portion 82b includes a space in which two pipes through which the process gas passes are located. That is, the height X of the pipe relief part 82b and the length of the longest part of the depth Y require the length equal to the diameter of one pipe. The through hole 83b is formed in the back surface 81d side of the pipe relief portion 82b.

The effects on the through holes 83a and 83b are the same as those of the block flange 60.

The pipe K7 communicating with the port block 17 passes through the pipe relief portion 62 of the block flange 60, which is a block flange BA1 at first, and is a block flange BB1 at the second. It passes through the 2nd pipe relief part 42b of the block flange 40, and communicates with the block flange BC1 connected to the on-off valve VC1. As for the shape of the block flange BC1, the above-described R type block flange 50 is adopted.

The pipe 87 communicating with the port block 18 passes through the pipe relief portion 62 of the block flange 60, which is a block flange BA2 first, and is a block flange BB2. It passes through the 2nd pipe relief part 42b of the block flange 40, and communicates with the block flange BC2 connected to on-off valve VC2. The block-shaped flange 50 of the R type which adopted the shape of block-shaped flange BC2 is employ | adopted.

The pipe K6a which communicates with the port block 16 communicates with the 1st connection port 84a of the block flange 80 which is a block flange BB3. A port communication path (not shown) in the block flange 80 communicates with the second connection port 84b. One end of the pipe K6b communicates with the second connection port 84b. The other end of the pipe K6b communicates with the block flange BC3. The block-shaped flange BC3 employs the above-described center-type block-shaped flange 40.

<Overall Configuration of Block Flange>

The block flange has various patterns besides the block flange described above. 6 to 19 show various patterns of block flanges. 6 to 19 show views a to d, respectively. a is an external perspective view, b is a top view, c is a side view, and d is a front view.

20 to 21 show the pattern of stacking flanges. 20 to 21, views of a to d are shown, respectively. a is an external perspective view, b is a top view, c is a side view, and d is a front view.

In addition, the flange communication path and the flange communication path are shown by the dotted line for easy understanding of the internal flange communication path and the flange communication path.

Hereinafter, block-shaped flanges 50, 70, 90, 100, 110, 120, 130, 140, 160, 170 and stacking flanges 180, 190 other than the block-shaped flanges 40, 60, 80 described above. Explain about.

7, the structure of the R type block flange 50 is demonstrated.

The block flange 50 has a rectangular parallelepiped shape. The block-shaped flange 50 is comprised from the surface of the upper surface 51a, the lower surface 51b, the front surface 51c, the back surface 51d, the left surface 51e, and the right surface 51f.

A tangential port 54 is fixed and provided in the vertical direction on the upper right side of the front surface 51c. The connection port 54 communicates with the flange communication path 56 formed inside the block flange. The flange communication path 56 communicates with the flange communication path 55 formed in the lower surface 51b. The flange communication path 56 is a flow path communicating the manifold communication path and the connection port 54 connected to the on / off valve formed in the manifold block.

The pipe relief part 52 which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 51a and the left surface 51e. The shape of the pipe relief portion 52 includes a space in which two pipes through which the process gas passes are located. That is, the height X of the pipe relief part 52 needs the height of the diameter of one pipe, and the length of the longest part of the depth 2Y needs the length of the diameter of two pipes. The through hole 53a is formed in the front face 51c side of the pipe relief part 52. As shown in FIG. Moreover, the through hole 53b is formed in the back surface 51d side of the pipe relief part 52. As shown in FIG.

The through hole 53a and the through hole 53b are located on the diagonal of the lower surface 51b of the block-shaped flange 50, and the flange communication path 55 is formed between them. Therefore, when fixing with the screw hole of a manifold block with a screw, uniform pressure can be applied to the joint part of the communication hole of the flange communication path 55 and the manifold communication path. Therefore, leakage at the junction of the communication port of the flange communication path 55 and the manifold communication path can be prevented.

With reference to FIG. 9, the structure of the block flange 70 of a 1st connection type is demonstrated.

The block flange 70 has a rectangular parallelepiped shape. The block-shaped flange 70 is comprised from the surface of the upper surface 71a, the lower surface 71b, the front surface 71c, the back surface 71d, the left surface 71e, and the right surface 71f.

In the upper right part of the front surface 71c, the 1st tangential port 74a is fixed and provided in the vertical direction. Moreover, the 2nd connection port 74b is fixed and provided in the vertical direction in the upper left part of 71 d of back surfaces. The first connection port 74a communicates with the flange communication path 76a formed inside the block flange. The second connection port 74b communicates with a flange communication path 76b formed inside the block flange. The flange communication paths 76a and 76b communicate with the flange communication path 75 formed on the lower surface 71b. The flange communication paths 76a and 76b are flow paths for communicating the manifold communication path connected to the on / off valve formed in the manifold block, the first connection port 74a and the second connection port 74b.

In the center of the upper surface 71a, the pipe relief part 72 which is a cutout part through which a pipe passes is formed. The shape of the pipe relief portion 72 includes a space in which one pipe through which the process gas passes is located. That is, the height X of the pipe relief part 72 and the length of the longest part of the depth Y require the length equal to the diameter of one pipe. The through hole 73a is formed in the front face 71c side of the pipe relief part 72. As shown in FIG. Moreover, the through hole 73b is formed in the back surface 71d side of the pipe relief part 72. As shown in FIG.

The effects on the through hole 73a and the through hole 73b are the same as those of the block flange 50.

The structure of the block-shaped flange 90 of a 3rd connection type is demonstrated using FIG.

The block flange 90 has a rectangular parallelepiped shape. The block-shaped flange 90 is comprised from the surface of the upper surface 91a, the lower surface 91b, the front surface 91c, the back surface 91d, the left surface 91e, and the right surface 91f.

In the upper left part of the front face 91c, the 1st tangential port 94a is fixed and provided in the vertical direction. Moreover, the 2nd connection port 94b is fixed and provided in the vertical direction in the center upper part of the left side surface 91e. The first connection port 94a and the second connection port 94b communicate with each other by a flange communication path 96a formed therein. Moreover, the flange communication path 96b is formed with respect to the flange communication path 95 of the lower surface 91b in the middle of the flange communication path 96a. The first connection port 94a and the second connection port 84b communicate with the flange communication path 96 formed inside the block flange together. The flange communication path 96 communicates with the flange communication path 95 formed on the lower surface 91b. The flange communication path 96 is a flow path for communicating the manifold communication path connected to the on / off valve formed in the manifold block, the first connection port 94a and the second connection port 94b.

The pipe relief part 92 which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 91a and the right surface 51f. The shape of the pipe relief portion 92 includes a space in which two pipes through which the process gas passes are located. That is, the height X of the pipe relief part 92 needs the height of the diameter of one pipe, and the length of the longest part of the depth 2Y needs the length of the diameter of two pipes. The through hole 93a is formed in the front face 91c side of the pipe relief part 92. As shown in FIG. In addition, a through hole 93b is formed at the rear surface 91d of the pipe relief portion 92.

The effects on the through hole 93a and the through hole 93b are the same as those of the block flange 50.

The structure of the block-shaped flange 100 of a 4th connection type is demonstrated using FIG.

Since the block-shaped flange 100 of the fourth connection type is substantially the same as the block-shaped flange 70 of the first connection type in FIG. 9, other configurations will be described, and other 102, 103a, 103b, 105, 106a, The description of 106b is omitted.

The block flange 100 has a rectangular parallelepiped shape. The block-shaped flange 100 is comprised from the surface of the upper surface 101a, the lower surface 101b, the front surface 101c, the back surface 101d, the left surface 101e, and the right surface 101f.

In the upper left portion of the front surface 101c, the first tangential port 104a is fixed and provided in the vertical direction. In addition, the second connection port 104b is fixed to the upper right side of the rear surface 101d in the vertical direction. What is different from the structure of the block flange 70 is that the arrangement positions of the connection ports are different.

The structure of the block-shaped flange 110 of a 5th connection type is demonstrated using FIG.

Since the block-shaped flange 110 of the fifth connection type is substantially the same as the block-shaped flange 90 of the third connection type in FIG. 11, another configuration will be described, and the other 112, 113a, 113b, 115, and 116 Omit the description.

The block flange 110 has a rectangular parallelepiped shape. The block-shaped flange 110 is comprised from the surface of the upper surface 111a, the lower surface 111b, the front surface 111c, the back surface 111d, the left surface 111e, and the right surface 111f.

The first tangential port 114a is fixed and provided in the vertical direction at the center upper portion of the front surface 111c. In addition, on the upper right side of the left surface 111e, the second connection port 114b is fixed and provided in the vertical direction. What is different from the structure of the block flange 90 is that the arrangement positions of the connection ports are different.

The structure of the block-shaped flange 120 of the 2nd center type is demonstrated using FIG.

Since the block center flange 120 of the 2nd center type is substantially the same as the block type flange 40 of FIG. 6, it demonstrates another structure and abbreviate | omits description of other 123a, 123b, 125, 126. .

The block flange 120 has a rectangular parallelepiped shape. The block-shaped flange 120 is comprised with the surface of the upper surface 121a, the lower surface 121b, the front surface 121c, the back surface 121d, the left surface 121e, and the right surface 121f.

The pipe relief part 122a which is a notch for a pipe to pass through is formed in the part which joins the upper surface 121a and the left surface 121e. The pipe relief part 122b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 121a and the right surface 121f. The pipe relief part 122c which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 121a and the back surface 121d. What is different from the structure of the block flange 40 is whether the pipe relief part 122c is formed.

The structure of the block-shaped flange 130 of a 3rd center type is demonstrated using FIG.

Since the block center flange 130 of the 3rd center type is substantially the same as the block type flange 40 of the center type of FIG. 6, another structure is demonstrated and the description of another 135 and 136 is abbreviate | omitted.

The block flange 130 has a rectangular parallelepiped shape. The block flange 130 is composed of a top surface 131a, a bottom surface 131b, a front surface 131c, a back surface 131d, a left surface 131e, and a right surface 131f.

The pipe relief part 132a which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 131a and the left surface 131e. The pipe relief part 132b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 131a and the right side surface 131f. The pipe relief part 132c which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 131a and the back surface 131d.

The through hole 133b is formed in the front side 131c side of the pipe relief part 132b, and the through hole 133a is formed in the back surface 131b side of the pipe relief part 132a.

What is different from the structure of the block-shaped flange 40 is whether the pipe relief part 132c is formed, and a position difference of a through hole.

The structure of the block-shaped flange 140 of 2nd R type is demonstrated using FIG.

Since the block flange 140 of the second R type is substantially the same as the block flange flange 50 of the R type in FIG.

The block flange 140 has a rectangular parallelepiped shape. The block-shaped flange 140 is comprised by the surface of the upper surface 141a, the lower surface 141b, the front surface 141c, the back surface 141d, the left surface 141e, and the right surface 141f.

The pipe relief part 142a which is a notch for a pipe to pass through is formed in the part which joins the upper surface 141a and the left surface 141e. The shape of the pipe relief portion 142a includes a space in which two pipes through which the process gas passes are located. The pipe relief part 142b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 141a and the back surface 141d. The shape of the pipe relief portion 142b includes a space in which one pipe through which the process gas passes is located.

What is different from the structure of the block flange 50 is whether the pipe relief part 132b is formed.

17, the structure of the 2 L type block flange 150 is demonstrated.

Since the block flange 150 of the second L type has a configuration substantially the same as that of the block type flange 60 of FIG. 8, only the other configuration is described, and descriptions of the other 155 and 156 are omitted.

The block flange 150 has a rectangular parallelepiped shape. The block flange 150 is composed of a top surface 151a, a bottom surface 151b, a front surface 151c, a back surface 151d, a left surface 151e and a right surface 151f.

The pipe relief part 152a which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 151a and the right side surface 151f. The shape of the pipe relief portion 152a includes a space in which two pipes through which the process gas passes are located. The pipe relief part 152b which is a notch for a pipe to pass through is formed in the part which joins the upper surface 151a and the back surface 151d. The shape of the pipe relief portion 152b includes a space in which one pipe through which the process gas passes is located.

What is different from the structure of the block flange 60 is whether the pipe relief part 152b is formed.

The structure of the block-shaped flange 160 of a 6th connection type is demonstrated using FIG.

Since the block-shaped flange 160 of the sixth connection type is substantially the same as the block-shaped flange 90 of the third connection type in FIG. 11, only the other configuration is described, and descriptions of other 165 and 166 are omitted.

The block flange 160 has a rectangular parallelepiped shape. The block-shaped flange 160 is comprised from the surface of the upper surface 161a, the lower surface 161b, the front surface 161c, the back surface 161d, the left surface 161e, and the right surface 161f.

The pipe relief part 162a which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 161a and the right surface 161f. The shape of the pipe relief portion 162a includes a space in which two pipes through which the process gas passes are located. The pipe relief part 162b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 161a and the back surface 161d. The shape of the pipe relief portion 152b includes a space in which one pipe through which the process gas passes is located.

What is different from the structure of the block flange 90 is whether the pipe relief part 162b is formed.

The structure of the block flange 170 of a 7th connection type is demonstrated using FIG.

Since the block flange 170 of the seventh connection type is substantially the same in configuration as the block flange 110 of the fifth connection type in FIG. 13, only the other configuration is described, and descriptions of the other 175 and 176 are omitted.

The block flange 170 has a rectangular parallelepiped shape. The block flange 170 is composed of the upper surface 171a, the lower surface 171b, the front surface 171c, the rear surface 171d, the left surface 171e and the right surface 171f.

The pipe relief part 172a which is a notch for a pipe to pass through is formed in the part which joins the upper surface 171a and the back surface 171d. The shape of the pipe relief portion 172a includes a space in which two pipes through which the process gas passes are located. The pipe relief part 172b which is the notch part for a pipe to pass through is formed in the part which joins the upper surface 151a and the right surface 17fd. The shape of the pipe relief portion 172b includes a space in which one pipe through which the process gas passes is located.

What is different from the structure of the block-shaped flange 110 is whether the pipe relief part 172b is formed.

The structure of the 1st stacking block shape flange 180 is demonstrated using FIG.

The first stacking block-shaped flange 180 has a rectangular parallelepiped shape. The 1st stacking block-shaped flange 180 is comprised from the surface of the upper surface 181a, the lower surface 181b, the front surface 181c, the back surface 181d, the left surface 181e, and the right surface 181f.

The connection port 187 is formed in the center of the upper surface 181a. The communication port 185 is formed in the center of the lower surface 181b. The flange communication path 186 communicates with the connection port 187 through the communication port 185.

Through-holes 183a and 183b are formed between the connecting portion 187 and the communication port 185. The through holes 183a and 183b penetrate to the lower surface 181b.

The height V of the first stacking flange 180 is at least greater than the diameter of one pipe.

The structure of the 2nd stacking block shape flange 190 is demonstrated using FIG.

Since the second stacking flange 190 is almost the same as the configuration of the first stacking flange 180 of FIG. Description of 195, 196, and 197 is omitted.

The height W of the second stacking flange 190 is the height of twice the height V of the first stacking flange 180.

The difference from the configuration of the first stacking flange 180 is the difference in height (W).

The effect by including a block flange is as follows.

Pipe relief portions are formed in the block flanges 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, 170. When passing through the pipe, it is possible to pass through the pipe relief portion, as shown in Figs. Therefore, since a pipe can be made linear, a pipe of simple structure is also possible. In addition, since the pipe can be arranged, unnecessary space can be reduced, thereby reducing the occupied area. Savings in pipes can also be achieved at the same time.

<Process gas supply method>

The supplying process gas will be described using the circuit diagram of FIG. 1.

For example, when the process gas GAS1 is sent to the chamber, the process gas GAS2 is filled up to the flow path H1. In this state, the open / close valves VA1 and VA4 are opened by control means (not shown). As a result, the process gas GAS1 is sent to the chamber through the mass flow controller MA through the flow path H1.

When the process gases GAS2, GAS3, GAS4, GAS5, GAS7, and GAS8 are sent to the chamber, the description thereof will be omitted because it is the same as the supply method for sending the process gas GAS1 to the chamber.

There are two methods for supplying the process gas GAS6 to the chamber. The first method is to send to the chamber through the mass flow controller (MB). The second method is to send to the chamber through the mass flow controller (MC).

In the first method, when the process gas GAS6 is filled up to the flow path H6, the open / close valves VB3 and VB4 are opened to control means (not shown). As a result, the process gas GAS6 is passed through the flow path H6a and sent to the chamber through the mass flow controller MB.

In the second method, when the process gas GAS6 is filled to the flow path H6, the opening / closing valves VC3 and VC4, which are timed in FIG. 1, are opened to control means (not shown). As a result, the process gas GAS6 is passed through the flow path H6b and sent to the chamber through the mass flow controller MC.

As described above in detail, according to the gas supply device 1 of the present embodiment, the open / close valve VB3 or the open / close valve VC3 is used for the process gas GAS6 which is frequently used by the above two methods. By changing, it is possible to select whether to supply to the chamber via the massflow controller MB or the massflow controller MC. Therefore, for example, when supplying different process gas GAS7 and process gas GAS6 simultaneously, using the mass flow controller MB with respect to process gas GAS6, process gas GAS6 and a process are carried out. The gas GAS7 can be supplied at the same time.

For example, when the other process gas GAS4 and the process gas GAS6 are supplied simultaneously, the process gas GAS6 and the process gas (using the mass flow controller MC) are used with respect to the process gas GAS6. GAS4) can be supplied at the same time.

Therefore, even when there are frequently used process gases GAS6, the process gases GAS6 can be supplied through the two massflow controllers MB and MC, so that complicated processes can be coped with. Therefore, no new massflow controller is required.

In addition, the block flange (40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, 170) is a connection port to which the pipe is connected, and the on-off valve formed in the manifold block It has a flange communication path for connecting the manifold communication path and the connection port connected to the pipe, and a pipe relief part for securing a space for the pipe to pass through, so that the pipe can be arranged, thereby reducing unnecessary space and reducing the occupying area. It can be made small.

In addition, since the flow rate test system R1 is provided on the exhaust side of the circuit, the abnormality of the mass flow controller can be determined.

In addition, according to the gas supply apparatus 1 of this embodiment, a port block can be provided in the side surface of a gas supply apparatus. Therefore, the gas supply apparatus can be designed according to the place where the gas supply apparatus is installed. For example, when a space cannot be secured in the line direction of the gas supply device, like the gas supply device 1 of the first embodiment, the port block can be provided in the side direction to install the gas supply device. have.

(2nd embodiment)

22 shows an externally upward perspective view of the gas supply device 21. 23 shows a bottom view of the gas supply device 21. 24 shows an external view downward perspective of the gas supply device 21. FIG. 25 is a sectional view taken along line BB of the gas supply device 21 of FIG.

The gas supply device 21 adopts a type in which a gas inlet is included in the line direction as a gas supply method.

The gas supply device 21 is designed based on the circuit diagram of FIG. 1 used in the first embodiment. Therefore, since the basic structure is the same as that of the gas supply apparatus 1 of 1st Embodiment, it demonstrates that it differs from the gas supply apparatus 1 below.

On the line side of the gas supply device 21 (the first flow path block 4 side or the second flow path block 5 side), a port block 10 communicating with the gas source of the process house is provided. In the present embodiment, the input port of the port block 10 faces the horizontal direction, but the input port may face the up, down, and other directions.

Specifically, the port block 10 communicates with a process gas gas source to which the process gas GAS1 is supplied. The port block 12 communicates with a process gas gas source to which the process gas GAS2 is supplied.

Process gas GAS3 to process gas GAS8 have the same structure as said process gas GAS1 and GAS2, and description is abbreviate | omitted.

23 and 24, the pipe K6a communicating with the port block 16 is connected to the second connection port 94b of the block flange 90, which is the block flange BB13. The port communication path 96a in the block flange 90 communicates with the first connection port 94a. The first connection port 94a communicates with one end of the pipe K6b. The other end of the pipe K6b is connected to the block flange BC13.

The block flange BC13 employs the block flange 50 shown in Fig. 7 described above. The connection port 54 of the block-shaped flange 50 does not face the line direction of the gas supply device 21, but does face the side direction.

The pipe communicating with other port blocks 11, 12, 13, 14, 15, 17, and 18 does not have a large difference between the first embodiment and the description thereof is omitted.

As described in detail above, according to the gas supply device 21 of the present embodiment, the port block can be provided on the line side with the block flange facing the line side different from the side face of the first embodiment. Therefore, the gas supply device can be designed according to the place where the gas supply device is to be installed. For example, when a space cannot be secured in the lateral direction of the gas supply device, like the gas supply device 21 of the second embodiment, a port block can be provided in line groups to provide a gas supply device.

(Third embodiment)

26 and 27 are circuit diagrams of the gas supply device 22 of the third embodiment. 26 and 27 are characterized in that the gas supply device 22 has a flow path H10 connected to the chamber and the exhaust pipe in front of the mass flow controllers MA3 and MB3.

A flow path H10 is formed in front of the mass flow controllers MA3 and MB3 to increase the purge exhaust efficiency when the purge gas flows.

FIG. 26 shows the flow path H10 formed on the circuit diagram of the first embodiment, and FIG. 27 shows the flow path H10 formed on the circuit diagram of the prior art.

(4th Embodiment)

28 and 29 are circuit diagrams of the gas supply device 23 of the fourth embodiment. The gas supply device 23 of FIGS. 28 and 29 is characterized by having a flow path 11 connected to the chamber and the exhaust pipe behind the mass flow controllers MA4 and MB4.

By forming the flow path H11 behind the mass flow controllers MA4 and MB4, for example, when the mass flow controller MA4 is used when the process gas GAS1 is used, the unused mass flow controller MB4 is used. You can test the massflow controller (MB4). Thereby, abnormality of the mass flow controller MB4 can be detected.

FIG. 28 shows the flow path H11 formed on the circuit diagram of the first embodiment, and FIG. 29 shows the flow path 11 formed on the circuit diagram of the prior art.

(Fifth Embodiment)

30 shows a top view of the gas supply device 24 of the fifth embodiment.

The gas supply device 24 has a configuration in which both of the gas supply devices 1 of the first embodiment are disposed.

By adopting the structure in which both the gas supply apparatus 1 of 1st Embodiment is employ | adopted, the internal volume of the gas confluence part G1 can be largely reduced, and the measurement time of a flow rate inspection system can be shortened significantly.

In addition, the mass flow controller R2 can be provided to test the mass flow controller. Thereby, abnormality of a mass flow controller can be detected.

(Sixth Embodiment)

FIG. 31 shows a side view showing a partial cross section of the gas supply device 25 of the sixth embodiment. Specifically, the cross-sectional view at the center of the horizontally open / close valves VA11, Vb11, ???

The switching valve VA11 communicates with the manifold block NA1, and the open and close valves VB11 ??? communicate with the manifold block NA2.

The stacking block KA1 communicates with the manifold block NA1, and the stacking block KA2 communicates with the manifold block NA2, and is less than or equal to the manifold block NA3 and the manifold block NA6. Up to stacking block KA3 and below, stacking block KA6 is connected. The stacking blocks KA1, KA2, KA3 employ the stacking block 190 described above. The stacking blocks KA4, KA5, and KA6 employ the stacking blocks 180 described above.

Block-shaped flange CA communicates with stacking block KA1. The block-shaped flange CB communicates with the stacking block KA2. The block-shaped flange CC and the like also communicate with the stacking block KA3 or less similarly.

Block-shaped flange CG communicates with manifold block NA7, block-shaped flange CH communicates with manifold block NA8, and block-shaped flange CI communicates with manifold block NA9. In communication.

The pipe TC communicating with the port block IC communicates with the block flange CH and communicates with the on-off valve VH11. The pipe TB communicating with the port block IB communicates with the block flange CE and communicates with the on-off valve VE11. The pipe TA communicating with the port block IA communicates with the block flange CB, communicates with the stacking block KA2, and communicates with the on-off valve VB11.

The stacking block (KA50) can be used to arrange four or more shut-off valves side by side. That is, the pipe TB communicating with the port block IB may pass under the block-shaped flanges CG, CH, and CI by the stacking block KA5. Therefore, the pipe TB can be communicated with the block flange CE without interfering with the block flanges CG, CH, and CI. Thereby, four or more switching valves can be arranged side by side horizontally.

In this embodiment, 7 or more switching valves can also be arranged side by side using the stacking block KA2. That is, the pipe TA communicating with the port block IA can pass under the block-shaped flanges CD, CE, CF, CG, CH, and CI by the stacking block KA2. Therefore, the pipe TA can communicate with the block flange CB without interfering with the block flanges CD, CE, CF, CG, CH, CI. Thereby, seven or more switching valves can be arranged side by side horizontally.

As described in detail above, according to the gas supply device 25 of the present embodiment, four or more on-off valves can be arranged in both directions or line directions. Therefore, the gas supply apparatus can be designed according to the place where the gas supply apparatus is installed. For example, when the space cannot be secured in the line direction of the gas supply device, like the gas supply device 25 of the sixth embodiment, nine open / close valves can be arranged side by side. On the contrary, when the space cannot be secured in the lateral direction of the gas supply device, although not shown, four or more open / close valves can be arranged side by side.

In addition, this invention is not limited to the said embodiment, It can apply variously.

For example, a solenoid valve may be used as the on / off valve in addition to the air operated valve.

The two through-hole positions of the block-shaped flange are located on the front side, when one of the through blood is on the right front side, and the other is on the left rear side. Conversely, with respect to the front side, if one through hole is in the left front side, the other side is located in the right rear side.

In the block flange, two through holes are formed diagonally on the lower surface of the block flange, but two through holes may be added to be formed at four corners of the lower surface of the block flange. When through-holes are formed at four corners of the lower surface of the block-shaped flange and fixed to the screw holes of the manifold block by screws, uniform pressure can be applied to the joint portion of the flange communication port and the communication port of the manifold communication path.

The height of the stacking block can be changed by design according to the embodiment.

1 shows a circuit diagram of a gas supply device.

2 is a perspective view from above of the gas supply apparatus.

3 shows a bottom view of the gas supply device.

4 is a perspective view showing the external appearance of the gas supply device.

FIG. 5 is a sectional view taken along line AA of the gas supply device of FIG. 3.

Fig. 6A shows an external perspective view of a block flange of a center type.

6B shows a plan view of a block flange of a center type.

Fig. 6C shows a side view of a block flange of a center type.

Fig. 6D shows a front view of the block flange of the center type.

Fig. 7A shows an external perspective view of an R type block flange.

Fig. 7B shows a plan view of an R type block flange.

Fig. 7C shows a side view of an R type block flange.

7D shows a front view of a block flange of the R type.

Fig. 8A shows an external perspective view of an L type block flange.

Fig. 8B shows a plan view of an L type block flange.

8C shows a side view of an L type block flange.

Fig. 8D shows a front view of the block flange of the L type.

Fig. 9A shows an external perspective view of a block flange of a first connection type.

9B shows a plan view of a block flange of a first connection type.

9C shows a side view of a block flange of a first connection type.

9D shows a front view of a block flange of the first connection type.

Fig. 10A shows an external perspective view of a block flange of a second connection type.

10B shows a plan view of a block flange of a second connection type.

10C shows a side view of a block flange of a second connection type.

10D shows a front view of a block flange of the second connection type.

11A shows an external perspective view of a block flange of a third connection type.

11B shows a plan view of a block flange of a third connection type.

11C shows a side view of a block flange of a third connection type.

11D shows a front view of a block flange of a third connection type.

12A shows an external perspective view of a block flange of a fourth connection type.

12B shows a plan view of a block flange of a fourth connection type.

12C shows a side view of a block flange of a fourth connection type.

12D shows a front view of a block flange of a fourth connection type.

Fig. 13A shows an external perspective view of a block flange of a fifth connection type.

13B shows a plan view of a block flange of a fifth connection type.

13C shows a side view of a block flange of a fifth connection type.

13D shows a front view of a block flange of a fifth connection type.

14A shows an external perspective view of a block flange of a second center type.

14B shows a plan view of a block-shaped flange of the second center type.

14C shows a side view of a block flange of a second center type.

14D shows a front view of a block flange of a second center type.

Fig. 15A shows an external perspective view of a block flange of a third center type.

15B shows a plan view of a block-shaped flange of the third center type.

15C shows a side view of a block flange of a third center type.

15D shows a front view of a block flange of a third center type.

Fig. 16A shows an external perspective view of a block flange of a second R type.

16B shows a plan view of a block flange of a second R type.

FIG. 16C shows a side view of a block flange of a second R type. FIG.

16D shows a front view of a block flange of a second R type.

17A shows an external perspective view of a block flange of a second L type.

17B shows a plan view of a block flange of a second L type.

17C shows a side view of a block flange of a second L type.

17D shows a front view of a block flange of a second L type.

18A shows an external perspective view of a block flange of a sixth connection type.

18B shows a plan view of a block flange of a sixth connection type.

18C shows a side view of a block flange of a sixth connection type.

18D shows a front view of a block flange of a sixth connection type.

19A shows an external perspective view of a block flange of a seventh connection type.

19B shows a plan view of a block flange of a seventh connection type.

19C shows a side view of a block flange of a seventh connection type.

19D shows a front view of a block flange of a seventh connection type.

20A shows an external perspective view of the first stacking block.

20B shows a top view of the first stacking block.

20C shows a bottom view of the first stacking block.

20D shows a front view of the first stacking block.

21A shows an external perspective view of the second stacking block.

21B shows a top view of the second stacking block.

21C shows a bottom view of the second stacking block.

21D shows a front view of the second stacking block.

FIG. 22 is a perspective view of an appearance upward of the gas supply device of Example 2. FIG.

FIG. 23 shows a bottom view of the gas supply device of Example 2. FIG.

24 shows an external view downward perspective view of the gas supply device of the second embodiment.

FIG. 25 is a sectional view taken along line BB of the gas supply device of FIG.

FIG. 26 shows a first circuit diagram of the gas supply device of Embodiment 3. FIG.

FIG. 27 shows a second circuit diagram of the gas supply device of Embodiment 3. FIG.

FIG. 28 shows a first circuit diagram of the gas supply device of Embodiment 4. FIG.

Fig. 29 shows a second circuit diagram of the gas supply device of the fourth embodiment.

30 shows a top view of the gas supply device of a fifth embodiment.

FIG. 31 shows a side view showing a partial cross section of the gas supply device of Example 5. FIG.

32 shows a circuit diagram of a gas supply device described in Patent Document 1. As shown in FIG.

33 is a circuit diagram of a gas supply device described in Patent Document 2. FIG.

Explanation of the sign

1 gas supply device

VA1, VA2, VA3, VA4 On / Off Valve

VB1, VB2, VB3, VB4 On / Off Valve

VC1, VC2, VC3, VC4 on-off valve

PA, Pb, PC, P1, P2 On / Off Valve

H1-H9 euro

MA, MB, MC Massflow Controller

Claims (6)

A gas supply device comprising a first line and a second line, The first line is connected to a first massflow controller, The second line is connected to a second massflow controller, The first line includes a first on-off valve for supplying gas A and a second on-off valve for supplying gas C, The second line includes a third on-off valve for supplying gas B and a fourth on-off valve for supplying gas D, The gas A and the gas B are the same gas, It includes a plurality of block-shaped flange that can be installed on the lower surface of the manifold block that can be installed on the lower surface of the first on-off valve, the second on-off valve, the third on-off valve, the fourth on-off valve, The block-shaped flange is (a) a connection port to which the gas flowing pipe is connected, (b) a manifold communication path connected to the on / off valve formed in the manifold block therein and a flange communication to communicate with the connection port. (C) a pipe relief part for securing a space through which the pipe passes; The first on-off valve and the second on-off valve are arranged in series in the flow direction of the gas, the third on-off valve and the fourth on-off valve are arranged in parallel with the first, second on-off valve, And the pipe is disposed orthogonal to or parallel to the gas flow direction, and positioned in the pipe relief portion formed on the bottom surface of the block-shaped flange. The method of claim 1, A gas supply device comprising a flow rate inspection system on the exhaust side of the circuit. The method according to claim 1 or 2, And said block-shaped flange can be installed in said manifold block in either the longitudinal or transverse direction. In the block flange used in the gas supply device according to claim 1, Block-shaped flange that can be installed on the lower surface of the manifold block installed in the shutoff valve, The block flange is Connection port for pipe connection to the outside, A flange communication path communicating with the connection port and a manifold communication path connected to the on / off valve formed in the manifold block therein; Block-shaped flange, characterized in that it comprises a pipe relief portion for securing a space through which the pipe passes. 5. The method of claim 4, The block flange is block-shaped flange, characterized in that can be installed in the manifold block, either in the longitudinal direction, transverse direction. delete

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