JP2010108459A - Gas supply system, and block-like flange - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas supply apparatus which can supply complicated process gas and reduce the floor occupancy area. <P>SOLUTION: The gas supply apparatus is provided with a first line and a second line and the gas supplying apparatus, wherein the first line is connected to a first mass flow controller MB, the second line is connected to a second mass flow controller MC, the first line is provided with a first valve VB3 and a second valve VB2, and the second line is provided with a third valve VC3 and a fourth valve VC2; and is connected to supply ports for supplying four types of gases A, B, C, D. In this case, the gas A and the gas B are the same gas GAS6, the first valve VB3 and the third valve VC3 are connected to the supply port for supplying the gas GAS6, the second valve VB2 is connected to the supply port for supplying gas GAS5, and the fourth valve VC2 is connected to the supply port for supplying gas GAS8. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is a gas supply device having a first line and a second line, wherein the first line is connected to a first mass flow controller, the second line is connected to a second mass flow controller, and One line has a first valve and a second valve, and the second line has a third valve and a fourth valve, and is connected to a supply port for supplying four types of gases A, B, C, and D. The present invention relates to a gas supply device.

Conventionally, as this type of technology, an invention aimed at reducing the number of mass flow controllers that are expensive and relatively large devices and reducing the floor occupation area is described in Patent Document 1 and Patent Document 2 below. A gas supply apparatus is disclosed.
As shown in FIG. 32, the gas supply device 300 described in Patent Document 1 includes three mass flow controllers 301MA that control the gas flow rate before mixing. Furthermore, three on-off valves 302VA, 303VA, and 304VA are connected to the mass flow controller 301MA. In FIG. 32, three on-off valves are provided for easy comparison with the present invention. A line connected to the mass flow controller 301MA is defined as a first line.
With this configuration, the number of mass flow controllers that are expensive and relatively large devices can be reduced.
However, in the invention according to Patent Document 1, for example, when the process gas G1 is frequently used when supplying the process gas, the process gas G1 can be supplied only through one mass flow controller 301MA. Then, other process gases G2 and G3 communicating with the same mass flow controller 301MA cannot be supplied simultaneously in the first line. Then, when supplying the other process gases G2 and G3, the supply of the process gas G1 had to be stopped. For this reason, there is a problem that a complicated process cannot be handled or a new mass flow controller is required for the handling.

Then, there exists an invention which concerns on patent document 2 as what solves the subject of the invention which concerns on patent document 1. FIG.
As shown in FIG. 33, the gas supply device 200 described in Patent Document 2 includes three mass flow controllers 201MA, 201MB, and 201MC. Eight on-off valves 212A to 212H communicate with the mass flow controller 201MA. In addition, eight on-off valves communicate with the other mass flow controllers 201MB and 201MC, respectively. The line communicating with the mass flow controller 201MA is a first line, the mass flow controller 201MB is a second line, and the mass flow controller 201MC is a third line. For example, when supplying the process gas G1, the process gas G1 can be supplied from any of the first to third lines by opening any of the on-off valves 212A, 213A, or 214A. Therefore, even when the process gas to be frequently supplied, for example, the process gas G1 is supplied through the first line, the other process gases G2 and G3 can be supplied through the other second and third lines. Therefore, the other process gases G2 and G3 can be supplied without stopping the supply of the process gas G1.

Japanese Patent No. 3904368 JP 2003-91322 A

However, the conventional gas supply apparatus 200 has the following problems.
For example, the gas supply device 200 requires 24 on-off valves. As a result, the number of on-off valves is increased, which causes a problem that the manufacturing cost is increased and a floor occupied area is increased.
As described above, in the gas supply device 300 according to Patent Document 1, the number of on-off valves is small. For example, when there is a process gas G1 that is frequently used when supplying gas, there is only one on-off valve. If the process gas G1 can be supplied only through the mass flow controller 301MA, other process gases G2 and G3 communicating with the same mass flow controller 301MA cannot be supplied simultaneously in the first line. Then, when supplying the other process gases G2 and G3, the supply of the process gas G1 had to be stopped. Therefore, there is a problem that it is not possible to cope with a complicated process or a new mass flow controller is required for the correspondence.

  Moreover, in the gas supply apparatus 300 according to Patent Document 1, since the supply source of the process gas used in the process for each process and all the pipes for supplying the process gas are directly connected to the on-off valves, There was a problem that the pipes were congested and the floor occupation area could not be reduced.

  Therefore, the present invention has been made to solve the above-mentioned problems, and other process gases can be used without stopping the supply of the process gas that is frequently used, thereby reducing the floor occupation area. It is an object of the present invention to provide a gas supply device that can perform the above operation.

In order to achieve the above object, a gas supply device and a block-shaped flange according to the present invention have the following configurations.
(1) A gas supply device having a first line and a second line, wherein the first line is connected to the first mass flow controller, the second line is connected to the second mass flow controller, and the first line is the first line In a gas supply device having one valve and a second valve, the second line having a third valve and a fourth valve, and being connected to a supply port for supplying four types of gases A, B, C and D Gas A and Gas B are the same gas, the first valve and the third valve are connected to a supply port for supplying gas A, and the second valve is connected to a supply port for supplying gas C And the fourth valve is connected to a supply port for supplying the gas D.
(2) In the gas supply device according to (1), the gas supply device has a block-like flange attached to the lower surface of the manifold block attached to the on-off valve, and the block-like flange has a connection port to which a pipe is connected and a manifold block. It has a flange communication passage that connects the manifold communication passage connected to the formed on-off valve and the connection port, and a pipe escape portion for ensuring a space through which the pipe passes.
(3) The gas supply device according to (1) or (2) is characterized by having a flow rate verification system on the exhaust side of the circuit.
(4) The gas supply device of (1) or (2) is characterized in that the block-like flange can be attached to the manifold block in either the vertical direction or the horizontal direction.
(5) In the block-like flange attached to the lower surface of the manifold block attached to the on-off valve, the block-like flange includes a connection port to which a pipe is connected, and a manifold communication path connected to the on-off valve formed on the manifold block. It has a flange communication passage that communicates with the connection port, and a pipe escape portion for securing a space through which the pipe passes.
(6) The block-shaped flange of (5) is characterized in that the block-shaped flange can be attached to the manifold block in either the vertical direction or the horizontal direction.

The operation and effect of the gas supply device and the block-shaped flange will be described.
(1) According to the gas supply device according to the invention, the gas A and the gas B are the same gas, the first valve and the third valve are connected to a supply port for supplying the gas A, the second valve Is connected to a supply port for supplying gas C, and the fourth valve is connected to a supply port for supplying gas D. For example, when supplying gas, the process gas G1 frequently used is Even in some cases, the process gas G1 can be supplied through two mass flow controllers. Therefore, when supplying other process gas G2 and G3 simultaneously, process gas G2 or G3 can be supplied simultaneously by using process gas G1 of the other mass flow controller. Therefore, since a complicated process can be handled, a new mass flow controller is not required.
(2) It has the configuration of (1), and further has a block-like flange attached to the lower surface of the manifold block attached to the on-off valve. The block-like flange is connected to the connection port to which the pipe is connected and the manifold block. By adopting a configuration that includes a flange communication path that connects the manifold communication path connected to the formed on-off valve and the connection port, and a pipe escape portion for securing a space through which the pipe passes, Since pipes can be arranged, useless space can be reduced, and the floor occupation area can be reduced.
(3) Since it has the configuration of (1) or (2) and further has a flow rate verification system on the exhaust side of the circuit, it is possible to determine the malfunction of the mass flow controller by measuring the flow rate of the mass flow controller. It can be carried out.
(4) Since it has the configuration of (1) or (2), and further adopts a configuration in which the block-like flange can be attached to the manifold block in either the vertical direction or the horizontal direction, the gas supply The gas supply apparatus can be designed according to the place where the apparatus is installed. Therefore, the gas supply device can be arranged even in a space-saving manner.

(5) In the block-like flange attached to the lower surface of the manifold block attached to the on-off valve, the block-like flange includes a connection port to which a pipe is connected, and a manifold communication path connected to the on-off valve formed on the manifold block. Since it has a flange communication passage that communicates with the connection port and a pipe escape portion for securing a space through which the pipe passes, the pipe can be tidy, so that useless space can be reduced. The area can be reduced.
(6) Since it has the configuration of (5), and further adopts a configuration in which the block-like flange can be attached to the manifold block in either the vertical direction or the horizontal direction, it is adapted to the installation location. The gas supply device can be designed. Therefore, the gas supply device can be arranged even in a space-saving manner.

  Next, an embodiment of a gas supply device and a block-shaped flange according to the present invention will be described with reference to the drawings.

(First embodiment)
<Overall configuration of gas supply device>
FIG. 1 shows a circuit diagram of the gas supply device 1. The gas supply apparatus 1 employs a type in which an intake port is provided on a side surface as a gas supply method.
As shown in FIG. 1, the gas supply apparatus 1 is connected to eight types of process gases GAS1, GAS2, GAS3, GAS4, GAS5, GAS6, GAS7, GAS8, and a gas source of purge gas. (Process gas GAS6 corresponds to gas A and gas B in the claims.)
A flow path H1 that communicates with a gas source of the process gas GAS1 communicates with an input port of the on-off valve VA1. The flow path that communicates with the output port of the on-off valve VA1 communicates with the input port of the mass flow controller MA. The flow path communicating with the output port of the mass flow controller MA communicates with the input port of the on-off valve VA4. A flow path H9 communicates with the output port of the on-off valve VA4, and the flow path H9 branches into a flow path H9a toward the chamber and a flow path H9b toward the exhaust pipe. A flow rate verification system R1 is connected to the flow path H9b.
Since the flow rate verification system R1 is connected to the flow path H9b, it is possible to determine the malfunction of the mass flow controller.

The flow path H2 that communicates with the gas source of the process gas GAS2 communicates with the input port of the on-off valve VA2. The flow path communicating with the output port of the on-off valve VA2 communicates with the input port of the mass flow controller MA. The flow path communicating with the output port of the mass flow controller MA communicates with the input port of the on-off valve VA4. The configuration from the on-off valve VA4 is the same as that described above.
The circuit of the process gas GAS3, GAS4, GAS5, GAS7, and GAS8 to the chamber and the exhaust pipe has the same configuration as the circuit of the process gas GAS1 and GAS2, and the description thereof is omitted. (The line connected to the mass flow controller MB corresponds to the first line in the claims, and the mass flow controller MB corresponds to the first mass flow controller. The line connected to the mass flow controller MC is the second line in the claims. The mass flow controller MC corresponds to the second mass flow controller.)

The flow path H6 connected to the gas source of the process gas GAS6 branches from the middle into the flow path H6a and the flow path H6b. One flow path H6a communicates with the input port of the on-off valve VB3. (The on-off valve VB3 corresponds to the first valve in the claims.) The other flow path H6b communicates with the input port of the on-off valve VC3. (The on-off valve VC3 corresponds to the second valve in the claims).
The flow path communicating with the output port of the on-off valve VB3 communicates with the input port of the mass flow controller MB. The flow path communicating with the output port of the other on-off valve VC3 communicates with the input port of the mass flow controller MC.
The flow path communicating with the output port of the mass flow controller MB communicates with the input port of the on-off valve VB4. The flow path communicating with the output port of the mass flow controller MC communicates with the on-off valve VC4.
A flow path H9 communicates with the output ports of the on-off valve VB4 and the on-off valve VC4, and the flow path H9 branches into a flow path H9a toward the chamber and a flow path H9b toward the exhaust pipe. A flow rate verification system R1 is connected to the flow path H9b.

The flow path connected to the gas source of the purge gas communicates with the input port of the on-off valve P1, and the flow path communicated with the output port of P1 communicates with the input ports of the on-off valves P2, PA, PB, and PC. ing.
The flow path communicating with the output port of the on-off valve PA communicates with the input port of the mass flow controller MA. The flow path communicating with the output port of the on-off valve PB communicates with the input port of the mass flow controller MB. The flow path communicating with the output port of the on-off valve PC communicates with the input port of the mass flow controller MC.
The flow path H9 communicating with the output ports of the mass flow controllers MA, MB, and MC branches into a flow path H9a toward the chamber and a flow path H9b toward the exhaust pipe. A flow rate verification system R1 is communicated with the flow path H9b.

FIG. 2 shows an external top perspective view of the gas supply device 1. FIG. 3 shows a bottom view of the gas supply device 1. FIG. 4 shows an external lower perspective view of the gas supply device 1.
The configurations of FIGS. 2, 3, and 4 correspond to the circuit diagram of FIG.
As shown in FIGS. 3 and 4, there are manifolds 2A, 2B, 2C and V-shaped flow path blocks 3A, 3B, 3C.
A mass flow controller MA is fixed by screws (not shown) so as to connect the manifold 2A and the V-shaped flow path block 3A. The manifold 2A, the V-shaped flow path block 3A, and the mass flow controller MA are integrated.
Description of the manifold 2B, the V-shaped flow path block 3B, and the mass flow controller MB is omitted because the manifold 2C, the V-shaped flow path block 3C, and the mass flow controller MC have the same configuration.
The first flow path block 4 is fixed to the ends of the manifolds 2A, 2B, and 2C with screws (not shown). The second flow path block 5 is fixed to the ends of the V-shaped flow path blocks 3A, 3B, 3C by screws (not shown). Since the first flow path block 4 and the second flow path block 5 are fixed, the gas supply device 1 is integrated as a whole.

As shown in FIG. 2, a port block 10 that communicates with a gas source of the process gas is installed from the side surface of the gas supply device 1 (the side surface of the manifold 2A or the side surface of the manifold 2C). In the present embodiment, the input port of the port block 10 faces in the horizontal direction, but the input port can be placed in any direction, such as up, down, or the like.
Specifically, the port block 10 communicates with a process gas source to which the process gas GAS1 is supplied. The port block 12 communicates with a process gas source to which the process gas GAS2 is supplied.
Since the process gases GAS3 to GAS8 have the same configuration as the process gases GAS1 and GAS2, description thereof will be omitted.

FIG. 5 shows an AA cross-sectional view of the gas supply device 1 of FIG.
As shown in FIGS. 3 and 5, block-like flanges BA1, BA2, and BA3 are fixed to the manifold 2A with screws. The block-shaped flange BA1 is positioned directly below the on-off valve VA1, the block-shaped flange BA2 is positioned directly below the on-off valve VA2, and the block-shaped flange BA3 is positioned directly below the on-off valve VA3.
As shown in FIG. 5, the flange communication path FA1 in the block-shaped flange BA1 communicates with the manifold communication path RA1 in the manifold 2A and communicates with the on-off valve VA1. A flange communication path FA2 in the block-shaped flange BA2 communicates with the manifold communication path RA2 in the manifold 2A and communicates with the on-off valve VA2. The flange communication path FA3 in the block-shaped flange BA3 communicates with the manifold communication path RA3 in the manifold 2A and communicates with the on-off valve VA3.
Block-like flanges BB1, BB2, and BB3 are fixed to the manifold 2B with screws. Although not shown, the block-shaped flange BB1 is positioned directly below the on-off valve VB1, the block-shaped flange BB2 is positioned directly below the on-off valve VB2, and the block-shaped flange BB3 is positioned directly below the on-off valve VB3. .
Block-shaped flanges BC1, BC2, and BC3 are fixed to the manifold 2C with screws. Although not shown, the block-shaped flange BC1 is positioned directly below the on-off valve VC1, the block-shaped flange BC2 is positioned directly below the on-off valve VC2, and the block-shaped flange BC3 is positioned directly below the on-off valve VC3. To do.
Although not shown, the manifold communication passages are formed in the manifolds 2B and 2C, and the flange communication passages are formed in the block-shaped flanges, which communicate with the on-off valves VB1, VB2, VB3, VC1, VC2, and VC3, respectively. is doing.

As shown in FIGS. 3 and 4, the pipe K1 communicated from the port block 11 communicates with a block-shaped flange BA1 communicated with the on-off valve VA1. (The pipe K1 constitutes a part of the flow path H1 in the circuit diagram.) The pipe K2 communicated with the port block 12 communicates with the block-shaped flange BA2 communicated with the on-off valve VA2. A pipe K3 communicating with the port block 13 communicates with a block-like flange BA3 communicating with the on-off valve VA3.
The block-shaped flanges BA1, BA2, and BA3 are L-shaped block-shaped flanges 60. Note that the flange communication path FA1 in the block-shaped flange BA1, the flange communication path FA2 in the block-shaped flange BA2, and the flange communication path FA3 in the block-shaped flange BA3 shown in FIG. 5 correspond to a flange communication path 66 described later. To do.

The configuration of the L-type block-shaped flange 60 will be described with reference to FIG. FIG. 8 shows diagrams (a) to (d), respectively. (A) shows an external perspective view. (B) shows a plan view. (C) shows a side view. (D) shows a front view. In order to facilitate understanding of the internal flange communication port 65 and the flange communication channel 66, the flange communication port 65 and the flange communication channel 66 are indicated by dotted lines in the drawings.
The block-shaped flange 60 has a rectangular parallelepiped shape. The block-shaped flange 60 includes an upper surface 61a, a lower surface 61b, a front surface 61c, a back surface 61d, a left side surface 61e, and a right side surface 61f.
A connection port 64 is fixed vertically in the upper left of the front face 61c. The connection port 64 communicates with a flange communication path 66 formed inside the block-like flange. The flange communication path 66 communicates with a flange communication port 65 formed in the lower surface 61b. The flange communication path 66 is a flow path that connects the manifold communication path connected to the on-off valve formed in the manifold block and the connection port 64.
A pipe escape portion 62, which is a notch for passage of the pipe, is formed at a location where the upper surface 61a and the right side surface 61f are joined. The shape of the pipe escape portion 62 includes a space in which two pipes through which the process gas passes can be accommodated. That is, the height X of the pipe escape portion 62 and the length of the longest portion of the depth Y need to be long enough for two pipes to pass through. A through hole 63 a is formed on the front surface 61 c side of the pipe escape portion 62. A through hole 63b is formed on the back surface 61d side of the pipe escape portion 62.
The through hole 63a and the through hole 63b are located on the diagonal line of the lower surface 61b of the block-shaped flange 60, and a flange communication port 65 is formed therebetween. Therefore, when the screw hole of the manifold is fixed with a screw, a uniform pressing force can be applied to the joint portion of the flange communication port 65 and the manifold communication channel. Therefore, it is possible to prevent leakage from the joint portion between the flange communication port 65 and the manifold communication passage.

As shown in FIGS. 3 and 4, the pipe K4 communicated from the port block 14 passes through the pipe escape portion 62 of the block-shaped flange 60, which is the block-shaped flange BA1, to the block-shaped flange BB1 communicated with the on-off valve VB1. Communicate. The shape of the block-shaped flange BB1 employs a center-type block-shaped flange 40 described later.
The pipe K5 communicated with the port block 15 communicates with the block-shaped flange BB2 communicated with the on-off valve VB2 through the pipe escape portion 62 of the block-shaped flange 60 which is the block-shaped flange BA2. As the shape of the block-shaped flange BB2, a center-type block-shaped flange 40 described later is adopted.

The configuration of the center type block-shaped flange 40 will be described with reference to FIG. FIG. 6 shows diagrams (a) to (d), respectively. (A) shows an external perspective view. (B) shows a plan view. (C) shows a side view. (D) shows a front view. In order to facilitate understanding of the internal flange communication port 45 and the flange communication passage 46, the flange communication port 45 and the flange communication passage 46 are indicated by dotted lines in the drawings.
The block-shaped flange 40 has a rectangular parallelepiped shape. The block-shaped flange 40 includes an upper surface 41a, a lower surface 41b, a front surface 41c, a back surface 41d, a left side surface 41e, and a right side surface 41f.
A connection port 44 is fixed in the vertical direction on the center of the front surface 41c. The connection port 44 communicates with a flange communication path formed inside the block-like flange. The flange communication path 46 communicates with a flange communication port 45 formed in the lower surface 41b. The flange communication path 46 is a flow path that connects the manifold communication path connected to the on-off valve formed in the manifold block and the connection port 44.
A pipe escape portion 42a, which is a notch through which the pipe passes, is formed at a location where the upper surface 41a and the left side surface 41e are joined. The shape of the pipe escape portion 42a includes a space in which one pipe through which the process gas passes is accommodated. That is, the height X of the pipe escape portion 42a and the length of the longest portion of the depth Y need to be long enough for one pipe to pass. A through hole 43a is formed on the front surface 41c side of the pipe escape portion 42a.
A pipe escape portion 42b, which is a notch portion through which the pipe passes, is formed at a location where the upper surface 41a and the right side surface 41f are joined. The shape of the pipe escape portion 42b includes a space in which one pipe through which the process gas passes is accommodated. That is, the height X of the pipe escape portion 42b and the length of the longest portion of the depth Y need to be long enough for one pipe to pass. A through hole 43b is formed on the back surface 41d side of the pipe escape portion 42b.
The effects of the through hole 43a and the through hole 43b are the same as those of the block-shaped flange 60.

  The pipe K6a that communicates with the port block 16 passes through the pipe escape portion 62 of the block-shaped flange 60 that is the block-shaped flange BA3, and communicates with the block-shaped flange BB3 that communicates with the on-off valve VB3. As the shape of the block-shaped flange BB3, the block-shaped flange 80 of the second connection type is adopted.

The configuration of the second connection type block-shaped flange 80 will be described with reference to FIG. FIG. 10 shows diagrams (a) to (d), respectively. (A) shows an external perspective view. (B) shows a plan view. (C) shows a side view. (D) shows a front view. The flange communication port 85 and the flange communication passage 86 are indicated by dotted lines in each drawing so that the internal flange communication port 85 and the flange communication passage 86 can be easily understood.
The block-shaped flange 80 has a rectangular parallelepiped shape. The block-shaped flange 80 includes an upper surface 81a, a lower surface 81b, a front surface 81c, a back surface 81d, a left side surface 81e, and a right side surface 81f.
A first connection port 84a is fixed in the vertical direction on the center of the front surface 81c. A second connection port 84b is fixed in the vertical direction on the center of the back surface 81d. The first connection port 84a and the second connection port 84b are communicated with each other through a flange communication path 86a formed inside.
Further, a flange communication path 86b is formed perpendicularly to the flange communication port 85 on the lower surface 81b from the middle of the flange communication path 86a. The flange communication path 86 is a flow path that connects the manifold communication path connected to the on-off valve formed in the manifold block, the first connection port 84a, and the second connection port 84b.
A pipe escape portion 82a, which is a notch portion through which the pipe passes, is formed at a location where the upper surface 81a and the left side surface 81e are joined. The shape of the pipe escape portion 82a is provided with a space in which one pipe through which the process gas passes is accommodated. That is, the height X of the pipe escape portion 82a and the length of the longest portion of the depth Y need to be long enough for one pipe to pass. A through hole 83a is formed on the front surface 81c side of the pipe escape portion 82a.
A pipe escape portion 82b, which is a notch portion through which the pipe passes, is formed at a location where the upper surface 81a and the right side surface 81f are joined. The shape of the pipe escape portion 82b includes a space in which one pipe through which the process gas passes is accommodated. That is, the height X of the pipe escape portion 82b and the length of the longest portion of the depth Y need to be long enough for one pipe to pass. A through hole 83b is formed on the back surface 81d side of the pipe escape portion 82b.
The effects of the through hole 83a and the through hole 83b are the same as those of the block-shaped flange 60.

The pipe K7 communicated from the port block 17 first passes through the pipe escape portion 62 of the block-like flange 60 which is the block-like flange BA1, and secondly the second pipe escape of the block-like flange 40 which is the block-like flange BB1. It communicates with the block-shaped flange BC1 connected to the on-off valve VC1 through the portion 42b. The shape of the block-shaped flange BC1 employs the R-type block-shaped flange 50 described above.
The pipe K8 communicating from the port block 18 first passes through the pipe escape portion 62 of the block-like flange 60 which is the block-like flange BA2, and secondly escapes from the second pipe of the block-like flange 40 which is the block-like flange BB2. It communicates with the block-shaped flange BC2 that communicates with the on-off valve VC2 through the portion 42b. The shape of the block-shaped flange BC2 employs the R-type block-shaped flange 50 described above.
The pipe K6a that communicates with the port block 16 communicates with the first connection port 84a of the block-shaped flange 80 that is the block-shaped flange BB3. The port communication path 87 in the block-shaped flange 80 communicates with the second connection port 84b. One end of a pipe K6b communicates with the second connection port 84b. The other end of the pipe K6b communicates with the block-shaped flange BC3. The block-shaped flange BC3 employs the center-type block-shaped flange 40 described above.

<Overall configuration of block flange>
There are various types of block-shaped flanges in addition to the above-mentioned block-shaped flange. 6 to 19 show various patterns of the block-like flange. FIGS. 6 to 19 show diagrams (a) to (d), respectively. (A) shows an external perspective view. (B) shows a plan view. (C) shows a side view. (D) shows a front view.
20 and 21 show the patterns of the raised flange. FIGS. 20 and 21 show diagrams (a) to (d), respectively. (A) shows an external perspective view. (B) shows a plan view. (C) shows a rear view. (D) shows a front view.
In addition, in order to make it easy to understand the internal flange communication port and the flange communication channel, the flange communication port and the flange communication channel are indicated by dotted lines in each drawing.
Hereinafter, the block-shaped flanges 50, 70, 90, 100, 110, 120, 130, 140, 150, 160, 170 and the raised blocks 180, 190 other than the block-shaped flanges 40, 60, 80 described above will be described.

The configuration of the R type block-shaped flange 50 will be described with reference to FIG.
The block-shaped flange 50 has a rectangular parallelepiped shape. The block-shaped flange 50 includes an upper surface 51a, a lower surface 51b, a front surface 51c, a back surface 51d, a left side surface 51e, and a right side surface 51f.
A connection port 54 is fixed vertically in the upper right of the front surface 51c. The connection port 54 communicates with a flange communication path 56 formed inside the block-like flange. The flange communication path 56 communicates with a flange communication port 55 formed on the lower surface 51b. The flange communication path 56 is a flow path that connects the manifold communication path connected to the on-off valve formed in the manifold block and the connection port 54.
A pipe escape portion 52, which is a notch portion through which the pipe passes, is formed at a location where the upper surface 51a and the left side surface 51e are joined. The shape of the pipe escape portion 52 includes a space in which two pipes through which the process gas passes can be accommodated. That is, the height X of the pipe escape portion 52 and the length of the longest portion of the depth Y need to be long enough for two pipes to pass through. A through hole 53 a is formed on the front side 51 c side of the pipe escape portion 52. A through hole 53 b is formed on the back surface 51 d side of the pipe escape portion 52.
The through-hole 53a and the through-hole 53b are located on the diagonal line of the lower surface 51b of the block-shaped flange 50, and the flange communication port 55 is formed between them. Therefore, when the screw hole of the manifold is fixed with a screw, a uniform pressing force can be applied to the joint portion of the flange communication port 55 and the communication port of the manifold communication path. Therefore, it is possible to prevent leakage from the joint portion between the flange communication port 55 and the manifold communication passage.

The configuration of the first connection type block-shaped flange 70 will be described with reference to FIG.
The block-shaped flange 70 has a rectangular parallelepiped shape. The block-shaped flange 70 is composed of an upper surface 71a, a lower surface 71b, a front surface 71c, a back surface 71d, a left side surface 71e, and a right side surface 71f.
A first connection port 74a is fixed vertically in the upper right of the front surface 71c. A second connection port 74b is fixed in the vertical direction on the upper left of the back surface 71d. The first connection port 74a communicates with a flange communication path 76a formed inside the block-shaped flange. The second connection port 74b communicates with a flange communication path 76b formed inside the block-like flange. The flange communication passages 76a and 76b communicate with a flange communication port 75 formed in the lower surface 71b. The flange communication paths 76a and 76b are flow paths that connect the manifold connection path connected to the on-off valve formed in the manifold block, the first connection port 74a, and the second connection port 74b.
At the center of the upper surface 71a, a pipe escape portion 72, which is a cutout portion through which the pipe passes, is formed. The shape of the pipe escape portion 72 has a space in which one pipe through which the process gas passes can be accommodated. That is, the height X of the pipe escape portion 72 and the length of the longest portion of the depth Y need to be long enough for one pipe to pass. A through hole 73 a is formed on the front surface 71 c side of the pipe escape portion 72. A through hole 73b is formed on the back surface 71d side of the pipe escape portion 72.
The effect of the through hole 73a and the through hole 73b is the same as that of the block-shaped flange 50.

The configuration of the third connection type block-shaped flange 90 will be described with reference to FIG.
The block-shaped flange 90 has a rectangular parallelepiped shape. The block-shaped flange 90 includes a top surface 91a, a bottom surface 91b, a front surface 91c, a back surface 91d, a left side surface 91e, and a right side surface 91f.
A first connection port 94a is fixed vertically in the upper left of the front face 91c. A second connection port 94b is fixed in the vertical direction on the center of the left side surface 91e. The first connection port 94a and the second connection port 94b communicate with each other through a flange communication path 96a formed inside. Further, a flange communication path 96b is formed from the middle of the flange communication path 96a to the flange communication port 95 of the lower surface 91b. Both the first connection port 94a and the second connection port 94b communicate with a flange communication path 96 formed inside the block-shaped flange. The flange communication path 96 communicates with a flange communication port 95 formed in the lower surface 91b. The flange communication path 96 is a flow path that connects the manifold communication path connected to the on-off valve formed in the manifold block, the first connection port 94a, and the second connection port 94b.
A pipe escape portion 92 that is a cutout portion through which the pipe passes is formed at a location where the upper surface 91a and the right side surface 91f are joined. The shape of the pipe escape portion 92 includes a space in which two pipes through which process gas passes can be accommodated. That is, the height X of the pipe escape portion 92 and the length of the longest portion of the depth Y need to be long enough for two pipes to pass through. A through hole 93 a is formed on the front face 91 c side of the pipe escape portion 92. Further, a through hole 93b is formed on the back surface 91d side of the pipe escape portion 92.
The effects of the through hole 93a and the through hole 93b are the same as those of the block-shaped flange 50.

The configuration of the fourth connection type block-shaped flange 100 will be described with reference to FIG.
Since the fourth type block-shaped flange 100 has substantially the same configuration as that of the first connection type block-shaped flange 70 of FIG. 9, the description of the different configurations will be omitted.
The block-shaped flange 100 has a rectangular parallelepiped shape. The block-shaped flange 100 includes an upper surface 101a, a lower surface 101b, a front surface 101c, a back surface 101d, a left side surface 101e, and a right side surface 101f.
A first connection port 104a is fixed vertically in the upper left of the front face 101c. A second connection port 104b is fixed in the vertical direction on the upper right side of the back surface 101d. The difference in configuration from the block-like flange 70 is the difference in the arrangement position of the connection port.

The configuration of the fifth connection type block-shaped flange 110 will be described with reference to FIG.
Since the fifth type block-shaped flange 110 has substantially the same configuration as the third connection type block-shaped flange 90 of FIG. 11, the description of the different configurations will be omitted.
The block-shaped flange 110 has a rectangular parallelepiped shape. The block-shaped flange 110 includes a top surface 111a, a bottom surface 111b, a front surface 111c, a back surface 111d, a left side surface 111e, and a right side surface 111f.
A first connection port 114a is fixed in the vertical direction on the center of the front surface 111c. A second connection port 114b is fixed vertically in the upper right of the left side surface 111e. The difference in configuration from the block-shaped flange 90 is the difference in the arrangement position of the connection port.

The configuration of the block flange of the second center type 120 will be described with reference to FIG.
Since the second center type block-shaped flange 120 has substantially the same configuration as the center-type block-shaped flange 40 of FIG. 6, the description of the different configurations will be omitted, and other descriptions will be omitted.
The block-shaped flange 120 has a rectangular parallelepiped shape. The block-shaped flange 120 includes a top surface 121a, a bottom surface 121b, a front surface 121c, a back surface 121d, a left side surface 121e, and a right side surface 121f.
A pipe escape portion 122a, which is a notch through which the pipe passes, is formed at a location where the upper surface 121a and the left side surface 121e are joined. A pipe escape portion 122b, which is a notch through which the pipe passes, is formed at a location where the upper surface 121a and the right side surface 121f are joined. A pipe escape portion 122c, which is a notch through which the pipe passes, is formed at a location where the upper surface 121a and the rear surface 121d are joined. The difference in configuration from the block-shaped flange 40 is a difference in whether or not the pipe escape portion 122c is formed.

The configuration of the block flange of the third center type 130 will be described with reference to FIG.
The third center type block-shaped flange 130 has substantially the same configuration as that of the center-type block-shaped flange 40 of FIG. 6, and therefore, other configurations will be omitted by describing different configurations.
The block-shaped flange 130 has a rectangular parallelepiped shape. The block-shaped flange 130 includes an upper surface 131a, a lower surface 131b, a front surface 131c, a back surface 131d, a left side surface 131e, and a right side surface 131f.
A pipe escape portion 132a, which is a notch through which the pipe passes, is formed at a location where the upper surface 131a and the left side surface 131e are joined. A pipe escape portion 132b, which is a notch through which the pipe passes, is formed at a location where the upper surface 131a and the right side surface 131f are joined. A pipe escape portion 132c, which is a notch for passage of the pipe, is formed at a location where the upper surface 131a and the rear surface 131d are joined.
A through hole 133b is formed on the front surface 131c side of the pipe escape portion 132b. A through hole 133a is formed on the back surface 131d side of the pipe escape portion 132a.
The difference in configuration from the block-like flange 40 is the difference in whether or not the pipe escape portion 132c is formed and the difference in the position of the through hole.

The configuration of the second R type 140 block-shaped flange will be described with reference to FIG.
Since the second R-type block-shaped flange 140 has substantially the same configuration as the R-type block-shaped flange 50 of FIG. 7, the description of the different configurations will be omitted and other descriptions will be omitted.
The block-shaped flange 140 has a rectangular parallelepiped shape. The block-shaped flange 140 includes an upper surface 141a, a lower surface 141b, a front surface 141c, a back surface 141d, a left side surface 141e, and a right side surface 141f.
A pipe escape portion 142a, which is a notch for passage of the pipe, is formed at a location where the upper surface 141a and the left side surface 141e are joined. The shape of the pipe escape portion 142a includes a space in which two pipes through which process gas passes can be accommodated. A pipe escape portion 142b, which is a notch through which the pipe passes, is formed at a location where the upper surface 141a and the back surface 141d are joined. The shape of the pipe escape portion 142b includes a space in which one pipe through which the process gas passes is accommodated.
The difference in configuration from the block-shaped flange 50 is whether or not the pipe escape portion 142b is formed.

The configuration of the second L type 150 block-shaped flange will be described with reference to FIG.
Since the second L-type block-shaped flange 150 has substantially the same configuration as that of the L-type block-shaped flange 60 of FIG. 8, other configurations will be omitted by describing different configurations.
The block-shaped flange 150 has a rectangular parallelepiped shape. The block-shaped flange 150 includes an upper surface 151a, a lower surface 151b, a front surface 151c, a back surface 151d, a left side surface 151e, and a right side surface 151f.
A pipe escape portion 152a, which is a notch for passage of the pipe, is formed at a location where the upper surface 151a and the right side surface 151f are joined. The shape of the pipe escape portion 152a has a space in which two pipes through which process gas passes can be accommodated. A pipe escape portion 152b, which is a notch portion through which the pipe passes, is formed at a location where the upper surface 151a and the back surface 151d are joined. The shape of the pipe escape portion 152b includes a space in which one pipe through which the process gas passes is accommodated.
The difference in configuration from the block-shaped flange 60 is whether or not the pipe escape portion 152b is formed.

The structure of the block-shaped flange of the sixth connection type 160 will be described with reference to FIG.
Since the block connection flange 160 of the sixth connection type has substantially the same configuration as the block connection flange 90 of the third connection type in FIG. 11, the description of the different configurations will be omitted and other descriptions will be omitted.
The block-shaped flange 160 has a rectangular parallelepiped shape. The block-shaped flange 160 includes an upper surface 161a, a lower surface 161b, a front surface 161c, a back surface 161d, a left side surface 161e, and a right side surface 161f.
A pipe escape portion 162a, which is a notch for passage of the pipe, is formed at a location where the upper surface 161a and the right side surface 161f are joined. The shape of the pipe escape portion 162a includes a space in which two pipes through which process gas passes can be accommodated. A pipe escape portion 162b, which is a notch portion through which the pipe passes, is formed at a location where the upper surface 161a and the rear surface 161d are joined. The shape of the pipe escape portion 162b includes a space in which one pipe through which the process gas passes is accommodated.
The difference in configuration from the block-shaped flange 90 is whether or not the pipe escape portion 162b is formed.

The configuration of the seventh connection type block-shaped flange 170 will be described with reference to FIG.
The seventh connection type block-shaped flange 170 has substantially the same configuration as the fifth connection type block-shaped flange 110 of FIG. 13, and therefore, the description of the different configurations will be omitted.
The block-shaped flange 170 has a rectangular parallelepiped shape. The block-shaped flange 170 includes an upper surface 171a, a lower surface 171b, a front surface 171c, a back surface 171d, a left side surface 171e, and a right side surface 171f.
A pipe escape portion 172a, which is a notch for passage of the pipe, is formed at a location where the upper surface 171a and the rear surface 171d are joined. The shape of the pipe escape portion 172a includes a space in which two pipes through which process gas passes can be accommodated. A pipe escape portion 172b, which is a notch portion through which the pipe passes, is formed at a place where the upper surface 171a and the right side surface 171f are joined. The shape of the pipe escape portion 172b includes a space in which one pipe through which the process gas passes is accommodated.
The difference in configuration from the block-shaped flange 110 is whether or not the pipe escape portion 172b is formed.

The configuration of the first raised flange 180 will be described with reference to FIG.
The first raised flange 180 has a rectangular parallelepiped shape. The first raised flange 180 includes an upper surface 181a, a lower surface 181b, a front surface 181c, a back surface 181d, a left side surface 181e, and a right side surface 181f.
A connection port 187 is formed at the center of the upper surface 181a. A communication port 185 is formed at the center of the lower surface 181b. A flange communication path 186 communicates from the connection port 187 to the communication port 185.
Through holes 183 a and 183 b are formed so as to sandwich the connection port 187 and the communication port 185. The through holes 183a and 183b penetrate to the lower surface 181b.
The height X of the raised flange 180 is at least higher than the diameter of the pipe.

The configuration of the second raised flange 190 will be described with reference to FIG.
Since the second raised flange 190 has substantially the same configuration as that of the first raised flange 180 in FIG. 20, the description of the different configurations will be omitted and other descriptions will be omitted.
The height X of the second raised flange 190 is twice the height X of the first raised flange 190.
The difference in configuration from the first raised flange 180 is the difference in height X.

The effect by providing a block-shaped flange is as follows.
Pipe escape portions are formed in the block-shaped flanges 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, and 170. When passing the pipe, as shown in FIGS. 3 and 5, the pipe escape portion can be passed therethrough, so there is no need to pass the pipe while avoiding other block-like flanges. Therefore, since the pipe can be drawn in a straight line, a simple pipe structure can be obtained. In addition, since the pipes can be arranged, useless space can be reduced, and the floor occupation area can be reduced. Pipes can be saved at the same time.

<Process gas supply method>
The process gas supply method will be described with reference to the circuit diagram of FIG.
For example, when the process gas GAS1 is sent to the chamber, the process gas GAS1 is filled to the flow path H1. In this state, the on-off valves VA1 and VA4 are opened by control means (not shown). Thereby, the process gas GAS1 passes through the flow path H1 and is sent into the chamber through the mass flow controller MA.
When the process gases GAS2, GAS3, GAS4, GAS5, GAS7, and GAS8 are fed into the chamber, there is no difference from the supply method in which the process gas GAS1 is fed into the chamber, and the description is omitted.

There are two methods for supplying the process gas GAS6 to the chamber. The first method is a method of feeding the chamber through the mass flow controller MB. The second method is a method of feeding into the chamber through the mass flow controller MC.
In the first method, when the process gas GAS6 is filled up to the flow path H6, the on-off valves VB3 and VB4 are opened by control means (not shown). Thereby, the process gas GAS6 passes through the flow path H6a and is sent into the chamber through the mass flow controller MB.
In the second method, when the process gas GAS6 is filled to the flow path H6, the on-off valves VC3 and VC4 shown in FIG. Thereby, the process gas GAS6 passes through the flow path H6b and is sent into the chamber through the mass flow controller MC.

As described above in detail, according to the gas supply apparatus 1 of the present embodiment, because of the above two methods, the frequently used process gas GAS6 can be switched by switching the on-off valve VB3 or the on-off valve VC3. It is possible to select whether to supply to the chamber through the mass flow controller MB or the mass flow controller MC. Therefore, for example, when other process gases GAS7 and GAS6 are supplied simultaneously, the process gases GAS6 and GAS7 can be supplied simultaneously by using the mass flow controller MB for the process gas GAS6.
Further, for example, when other process gases GAS4 and GAS6 are supplied simultaneously, the process gases GAS6 and GAS4 can be supplied simultaneously by using the mass flow controller MC for the process gas GAS6.
Therefore, even when there is a frequently used process gas GAS6, the process gas GAS6 can be supplied through the two mass flow controllers MB and MC, so that a complicated process can be handled. Therefore, no new mass flow controller is required.

The block-shaped flanges 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, and 170 are connected ports connected to pipes and on-off valves formed in the manifold block. Since the pipes can be organized by having a flange communication path that connects the manifold communication path and the connection port connected to each other and a pipe escape portion for securing a space through which the pipe passes, useless space is provided. Therefore, the floor area can be reduced.
Further, by having the flow rate verification system R1 on the exhaust side of the circuit, it is possible to determine the malfunction of the mass flow controller.
Moreover, according to the gas supply apparatus 1 of a present Example, a port block can be installed in the side surface of a gas supply apparatus. Therefore, the gas supply device can be designed according to the place where the gas supply device is installed. For example, when a space cannot be secured in the line side direction of the gas supply device, the gas supply device is installed by installing the port block in the side surface direction like the gas supply device 1 in the first embodiment. Can do.

(Second Embodiment)
FIG. 22 shows an external top perspective view of the gas supply device 21. FIG. 23 shows a bottom view of the gas supply device 21. FIG. 24 shows an external lower perspective view of the gas supply device 21. FIG. 25 shows a BB cross-sectional view of the gas supply device 21 of FIG.
The gas supply device 21 employs a type having an intake port in the line direction as a gas supply method.
The gas supply device 21 is designed based on the circuit diagram of FIG. 1 used in the first embodiment. Therefore, since the basic configuration is not different from the gas supply device 1 in the first embodiment, the following description will be made on differences from the gas supply device 1.

From the line side (the first flow path block 4 side or the second flow path block 5 side) of the gas supply device 21, a port block 10 communicating with the gas source of the process gas is installed. In the present embodiment, the input port of the port block 10 faces in the horizontal direction, but the input port can be placed in any direction, such as up, down, or the like.
Specifically, the port block 10 communicates with a process gas source to which the process gas GAS1 is supplied. The port block 12 communicates with a process gas source to which the process gas GAS2 is supplied.
Since the process gases GAS3 to GAS8 have the same configuration as the process gases GAS1 and GAS2, description thereof will be omitted.

As shown in FIGS. 23 and 24, the flow path K6a communicating from the port block 16 is connected to the second connection port 94b of the block-shaped flange 90 which is the block-shaped flange BB13. The port communication passage 96a in the block-shaped flange 90 is communicated with the first connection port 94a. One end of a pipe K6b communicates with the first connection port 94a. The other end of the flow path K6b is connected to the block-shaped flange BC13.
The block-shaped flange BC13 employs the block-shaped flange 50 shown in FIG. The connection port 54 of the block-shaped flange 50 does not face the line side direction of the gas supply device 21 but faces the side surface direction.
Since the pipes communicating from the other port blocks 11, 12, 13, 14, 15, 17, and 18 are not greatly different from those in the first embodiment, description thereof is omitted.

  As described above in detail, according to the gas supply device 21 of this example, the port block can be installed on the line side by directing the block-shaped flange to the line side different from the side surface of the first embodiment. it can. Therefore, the gas supply device can be designed according to the place where the gas supply device is installed. For example, when a space cannot be secured in the side surface direction of the gas supply device, the gas supply device can be installed by installing the port block on the line side like the gas supply device 21 in the second embodiment. it can.

(Third embodiment)
FIG.26 and FIG.27 shows the circuit diagram of the gas supply apparatus 22 in 3rd Embodiment. The gas supply device 22 of FIGS. 26 and 27 has a flow path H10 connected to the chamber and the exhaust pipe before the mass flow controllers MA3 and MB3.
By providing the flow path H10 in front of the mass flow controllers MA3 and MB3, the purge exhaust efficiency when the purge gas is flowed can be increased.
FIG. 26 is a circuit diagram in which the first embodiment is simplified, and the flow path H10 is provided. FIG. 27 is a circuit diagram of the prior art in which the flow path H10 is provided.

(Fourth embodiment)
28 and 29 show circuit diagrams of the gas supply device 23 in the fourth embodiment. The gas supply device 23 of FIGS. 28 and 29 is characterized by having a flow path H11 connected to the chamber and the exhaust pipe after the mass flow controllers MA4 and MB4.
By providing the flow path H11 after the mass flow controllers MA4 and MB4, for example, when the process gas GAS1 is used and the mass flow controller MA4 is used, the unused mass flow controller MB4 is used and the mass flow controller MB4 is verified. It can be performed. Thereby, the malfunction of the mass flow controller MB4 can be detected.
FIG. 28 is a circuit diagram in which the first embodiment is simplified, and the flow path H11 is provided. FIG. 29 is a circuit diagram of the prior art in which the flow path H11 is provided.

(Fifth embodiment)
FIG. 30 shows a top view of the gas supply device 24 in the fifth embodiment.
The gas supply device 24 is configured to dispose the gas supply device 1 in the first embodiment on both sides.
By adopting a configuration in which the gas supply device 1 is disposed on both sides, the internal volume of the gas merging portion G1 can be greatly reduced, and the measurement time of the flow rate verification system can be greatly shortened.
In addition, the mass flow controller can be verified by installing the flow rate verification system R2. Thereby, a malfunction of the mass flow controller can be detected.

(Sixth embodiment)
FIG. 31 is a side view showing a partial cross section of the gas supply device 25 in the sixth embodiment. Specifically, a cross-sectional view from the center of the side-by-side on-off valves VA11, VB11.
The on-off valve VA11 communicates with the manifold NA1, and the on-off valve VB11... Communicates with the manifold NA2.
The raising block KA1 communicates with the manifold NA1, the raising block KA2 communicates with the manifold NA2, and the raising block KA3 or less and the raising block KA6 are connected to the manifold NA3 or lower and the manifold NA6. Are communicating. The raising blocks KA1, KA2, and KA3 employ the above-described raising block 190. The raising block KA4, KA5, KA6 employs the raising block 180 described above.
A block-shaped flange CA communicates with the raising block KA1. A block-shaped flange CB communicates with the raising block KA2. Similarly, the block-shaped flange CC and below communicate with the raised block KA3 and below.
A block-shaped flange CG communicates with the manifold NA7, a block-shaped flange CH communicates with the manifold NA8, and a block-shaped flange CI communicates with the manifold NA9.

The pipe TC communicating with the port block IC communicates with the block-shaped flange CH and communicates with the on-off valve VH11. The pipe TB communicating with the port block IB communicates with the block-shaped flange CE, communicates with the raising block KA5, and communicates with the on-off valve VE11. The pipe TA communicating with the port block IA communicates with the block-shaped flange CB, communicates with the raised block KA2, and communicates with the open / close VB11.
By using the raising block KA5, it is possible to arrange four or more open / close valves side by side. That is, the pipe TB communicating with the port block IB can be passed under the block-like flanges CG, CH, CI by the raising block KA5. Therefore, the pipe TB can be communicated with the block-shaped flange CE without causing interference with the block-shaped flanges CG, CH, CI. Thereby, four or more side-by-side and on-off valves can be arranged.
In the present embodiment, seven or more side-by-side valves can be arranged side by side by using the raising block KA2. That is, the pipe TA communicating with the port block IA can be passed under the block-shaped flanges CD, CE, CF, CG, CH, CI by the raising block KA2. Therefore, the pipe TB can be communicated with the block-shaped flange CB without interfering with the block-shaped flanges CD, CE, CF, CG, CH, CI. Thereby, seven or more side-by-side and on-off valves can be arranged.

  As described above in detail, according to the gas supply device 25 of the present embodiment, four or more on-off valves can be arranged in the side surface direction or the line direction. Therefore, the gas supply device can be designed according to the place where the gas supply device is installed. For example, when a space cannot be secured in the line direction of the gas supply device, nine open / close valves can be arranged side by side as in the gas supply device 25 in the sixth embodiment. On the other hand, when a space cannot be secured in the side surface direction of the gas supply apparatus, four or more open / close valves can be arranged in series, although not shown in the drawing.

Note that the present invention is not limited to the above-described embodiment, and various applications are possible.
For example, as the on-off valve, a solenoid valve or the like can be used in addition to an air operated valve.
As for the positions of the two through holes of the block-shaped flange, if one through hole is located on the right front side, the other is located on the left rear side. On the contrary, if one through hole is on the left front side with respect to the front side, the other is on the right rear side.
In the block-shaped flange, two through holes are formed on the diagonal line on the lower surface of the block-shaped flange. However, two additional through-holes are added so that they are positioned at the four corners of the lower surface of the block-shaped flange. Can be formed. By forming through holes at the four corners of the lower surface of the block-shaped flange, a uniform pressing force can be applied to the joint between the flange communication port and the manifold communication channel when the manifold screw hole is fixed with screws. it can.
The height of the raised flange can be changed according to the embodiment.

The circuit diagram of the gas supply apparatus 1 is shown. 1 shows an external perspective view of the gas supply device 1. The bottom view of the gas supply apparatus 1 is shown. The external appearance lower perspective view of the gas supply apparatus 1 is shown. The AA sectional view of gas supply device 1 of Drawing 3 is shown. The figure of the center type block-shaped flange 40 is shown. A view of an R-type block-shaped flange 50 is shown. The figure of the L-type block-shaped flange 60 is shown. The figure of the block-shaped flange 70 of the 1st connection type is shown. The figure of the block-shaped flange 80 of the 2nd connection type is shown. The figure of the block-shaped flange 90 of the 3rd connection type is shown. The figure of the block-shaped flange 100 of the 4th connection type is shown. The figure of the block-shaped flange 110 of the 5th connection type is shown. The figure of the block-shaped flange 120 of the 2nd center type is shown. The figure of the block flange 130 of the 3rd center type is shown. The figure of the 2R type block-shaped flange 140 is shown. The figure of the 2L type block-shaped flange 150 is shown. The figure of the block-shaped flange 160 of the 6th connection type is shown. The figure of the block-shaped flange 170 of the 7th connection type is shown. A view of the first raised flange 180 is shown. A view of the second raised flange 190 is shown. The external upper perspective view of the gas supply apparatus 21 is shown. The bottom view of the gas supply apparatus 21 is shown. An external lower perspective view of the gas supply device 21 is shown. The BB sectional view of gas supply device 21 of Drawing 23 is shown. The 1st circuit diagram of the gas supply apparatus 22 in Example 3 is shown. The 2nd circuit diagram of the gas supply apparatus 22 in Example 3 is shown. The 1st circuit diagram of the gas supply apparatus 23 in Example 4 is shown. The 2nd circuit diagram of the gas supply apparatus 23 in Example 4 is shown. The top view of the gas supply apparatus 24 in Example 5 is shown. The side view showing the partial cross section of the gas supply apparatus 25 in Example 6 is shown. The circuit diagram of the gas supply apparatus 300 described in patent document 1 is shown. The circuit diagram of the gas supply apparatus 200 described in patent document 2 is shown.

Explanation of symbols

1 Gas supply device VA1, VA2, VA3, VA4 On-off valve VB1, VB2, VB3, VB4 On-off valve VC1, VC2, VC3, VC4 On-off valve PA, PB, PC, P1, P2 On-off valve H1-H9 Flow path MA, MB MC mass flow controller

Claims (6)

A gas supply device having a first line and a second line, wherein the first line is connected to a first mass flow controller, the second line is connected to a second mass flow controller, and the first line is a gas In the gas supply apparatus, which has a first valve for supplying A and a second valve for supplying gas C, the second line has a third valve for supplying gas B and a fourth valve for supplying gas D.
The gas A and the gas B are the same gas;
A gas supply device. The gas supply device according to claim 1,
Having a block-like flange attached to the lower surface of the manifold block attached to the on-off valve;
The block-shaped flange is
A connection port to which the pipe connects;
A flange communication passage communicating the manifold communication passage connected to the on-off valve formed in the manifold block and the connection port;
Having a pipe escape portion for securing a space through which the pipe passes,
A gas supply device. In the gas supply device according to claim 1 or 2,
Having a flow verification system on the exhaust side of the circuit;
A gas supply device. In the gas supply device according to claim 1 or 2,
The block-like flange can be attached to the manifold block in either the vertical direction or the horizontal direction;
A gas supply device. In the block-like flange attached to the lower surface of the manifold block attached to the on-off valve,
The block-shaped flange is
A connection port to which the pipe connects;
A flange communication passage communicating the manifold communication passage connected to the on-off valve formed in the manifold block and the connection port;
A pipe escape portion for securing a space through which the pipe passes;
A block-like flange characterized by comprising: The block-like flange of claim 5,
The block-like flange can be attached to the manifold block in either the vertical direction or the horizontal direction;
Block-shaped flange characterized by

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