201016475 六、發明說明： 【發明所屬之技術領域】 本發明係關於墨水的吐出技術，特別是關於吐出自發 光型顯示裝置用的螢光墨水之技術。 【先前技術】 在近年，使用噴墨方式的印刷裝置（噴墨式印刷裝置） φ ，從該印刷裝置的噴嘴吐出墨水，形成顯示裝置的彩色墨 水匣。 但，從噴墨式印刷裝置所吐出的墨水的吐出量，會因 噴頭之隨著時間的改變、噴射圖案、墨水的特性分佈等的 影饗，產生不穩定之問題。墨水的吐出量的分佈，會直接 影響到畫素之色度的分佈。 爲了解決此問題，以至少2等級以上的色濃度來形成 吐出彩色墨水匣，藉由測定其色濃度，來補正各噴嘴的吐 ® 出量的分佈之方法爲眾所皆知（參照下述專利文獻1)。 [專利文獻1]日本專利3 106110號 【發明內容】 [發明所欲解決之課題] 有機EL、FED等的自發光型的顯示器係與液晶顯示 裝置不同，採用當照射紫外線時可放出可見光之螢光墨水 。多數的螢光墨水在可見光下呈無色，在以噴墨式印刷裝 置對印刷對象物進行塗佈之情況時，無法精密地測定各畫 -5- 201016475 素的色濃度。各噴嘴的吐出量的分佈會直接影響畫素的發 光強度之分佈，造成顯示器品質降低。 [用以解決課題之手段] 爲了解決上述課題，本發明之印刷裝置，係具備控制 裝置；具有複數個噴嘴，從前述噴嘴吐出依據來自於前述 控制裝置的控制訊號之量的墨的印刷頭；及使基板對前述 印刷頭呈相對直線性移動之移動裝置，前述控制裝置係從 前述噴嘴，使前述墨水噴佈於與前述基板的移動方向交叉 之噴佈方向所排列的噴佈位置之印刷裝置，其特徵爲：具 有：位於較前述印刷頭更靠近前述基板的移動方向的下游 側，對噴佈於前述噴佈位置之前述墨水照射測定光的照射 裝置；和測定被照射了前述測定光之前述墨水的發射光的 受光裝置，前述控制裝置，構成依據前述受光裝置的測定 結果，可變更前述控制訊號。 又，在本發明之印刷裝置，其中，具有將前述測定結 果與前述凹部的前述基板上的位置對應並加以記憶之記憶 裝置，前述控制訊號係從被前述記憶裝置所記憶的內容予 以變更。 又，在本發明之印刷裝置，其中，具有使前述照射裝 置與前述受光裝置沿著前述噴佈方向之方向移動的感測器 移動裝置。 又，在本發明之成膜方法，係對分別設置於印刷頭的 複數個噴嘴之吐出控制元件傳達控制訊號，使含有螢光體 201016475 的墨水從前述噴嘴吐出，並噴佈於基板後形成蜜光膜之成 膜方法，其特徵爲：對噴佈於前述基板之前述墨水照射電 磁波而使其發光，測定從前述墨水所釋出的發射光’比較 從複數個前述噴嘴中之一個前述噴嘴所吐出的前述墨水的 前述發射光的測定結果、和預先所設定的基準値’判斷從 一個前述噴嘴所吐出的前述墨水的吐出量的過與不足’當 判斷爲前述吐出量少時，變更前述控制訊號，增加一個前 ❿ 述噴嘴的前述吐出量，而當判斷爲前述吐出量多時’變更 前述控制訊號，使前述吐出量減少。 又，在本發明之成膜方法，其中，使前述基板對前述 印刷頭相對地移動，讓前述墨水噴佈於複數個噴佈位置之 方法，依據一個前述噴嘴所吐出之相互分離的複數個前述 墨水的前述發射光，變更一個前述噴嘴的前述控制訊號。 又，在本發明之成膜方法，其中，使前述基板對前述 印刷頭相對地移動，進行使前述墨水部分地噴佈於前述基 ® 板之部分塗佈，判斷前述吐出量的過與不足，在變更前述 控制訊號後，使前述印刷頭移動到前述基板的前述墨水未 噴佈的未塗佈部分，藉由已變更的前述控制訊號，使前述 墨水噴佈於前述未塗佈部分。 又，在本發明之成膜方法，其中，在複數片前述基板 形成前述螢光膜之方法，對一個前述基板噴佈前述墨水， 測定前述發射光後，藉由已變更的前述控制訊號，使前述 墨水噴佈於其他的前述基板。 又，在本發明之成膜方法，其中，在測定噴佈於前述 201016475 基板之前述墨水的前述發射光後，使前述墨水乾燥。 本發明係如上述所構成，預先決定使墨水噴佈於基板 之噴佈位置。噴佈位置與噴嘴是一對一的方式對應著，故 ，墨水的過與不足會依據每個噴嘴被區分。 依據噴佈於基板之墨水量，受光裝置的測定結果也會 改變。例如，當墨水量多時，發光強度高，而當墨水量少 時，發光強度會變低。 依據受光裝置的測定結果，改變噴嘴的吐出控制元件 的通電條件，使得在墨水量不足之情況，使吐出量變多， 而在墨水量過剩的情況，使吐出量變少，則能夠針對各色 ，使從各噴嘴噴佈於基板之墨水（例如螢光墨水）之發射光 的強度變得均等。 [發明效果] 能夠將對印刷對象物之吐出量作成均等。可獲得畫素 的色度分佈、發光強度之分佈少的自發光型顯示裝置。 參 【實施方式】 圖1(a)、（b)〜圖3(a)、（b)的符號10係顯示本發明的 一例之印刷裝置。圖1(a)〜圖3(a)爲從上方觀看的平面圖 、圖1(b)〜圖3(b)爲從側方觀看的側面圖。 如圖1(a)、（b)所示，此印刷裝置10具有基板搬運機 構（移動裝置）7、印刷機構8、和測定裝置9。基板搬運 機構7係具有水平配置之台移動軸11，在其上’水平地安 -8 - 201016475 裝著載置台12。 基板搬運機構7之結構爲具有台移動裝置31，載置台 12係藉由台移動裝置31沿著台移動軸11延伸的方向，可 在台移動軸11上，於水平面內呈直線地往復移動。印刷 機構8與測定裝置9,分別具有頭移動軸14、和感測器移 動軸15。頭移動軸14與感測器移動軸15分別呈水平地配 置於台移動軸11的上方。 φ 在頭移動軸14,安裝有印刷頭21，在感測器移動軸 15，安裝有照射裝置40、和受光裝置50。 印刷機構8與測定裝置9分別具有頭移動裝置32、和 感測器移動裝置33。藉由頭移動裝置32，使得印刷頭21 構成爲可沿著頭移動軸14的延伸方向進行往復移動，藉 由感測器移動裝置33，使得照射裝置40與受光裝置50沿 著感測器移動軸15的延伸方向，一同或個別地進行往復 移動（圖2(a)、（b)、圖3(a)、（b)中，省略各移動裝置31〜 Ο 33的圖示）。 頭移動軸14與感測器移動軸15延伸的方向、和台移 動軸11延伸的方向，是在正交的方向下被配置著’因此 ，印刷頭21、照射裝置40、和受光裝置50係朝與載置台 12的移動方向呈正交之方向移動。 台移動軸11的兩端中，當將其中一端稱爲載置台12 的移動開始位置，而將另一端稱爲移動終點位置時，頭移 動軸14配置於較感測器移動軸15更接近移動開始位置之 位置，感測器移動軸15配置於較頭移動軸14更接近移動 201016475 終點位置之位置。 圖1(a)、（b)係顯示在載置台12上配置作爲印刷對象 物之基板5，在移動開始位置呈靜止之狀態。基板5亦可 爲樹脂基板，亦可爲玻璃基板。 在移動開始位置上上基板5呈靜止的狀態，印刷頭21 配置於較該基板5更靠近移動終點位置。當使載置台12 移動時，被配置於載置台12上之基板5也與載置台12 — 同移動。 頭移動軸1 4及印刷頭21、感測器移動軸1 5、照射裝 置40、及受光裝置50係位於較載置台12上的基板5的移 動路徑之上方，基板5在不與頭印刷軸1 4、印刷頭21、 感測器移動軸15、照射裝置40、及受光裝置50衝突的情 況下，從移動開始位置朝移動終點位置移動。 當藉由此印刷裝置1 0對基板5吐出墨水之際，利用 頭移動裝置32，預先使印刷頭21移動，讓印刷頭21靜止 於基板5的移動路徑之上方。 當在該狀態下，藉由台移動裝置31使載置台12朝移 動終點位置的方向移動時，基板5會進入到印刷頭21的 正下方位置。在基板5表面，黑色的帶狀遮光性薄膜（例 如Cr層）呈格子狀地配置，構成黑色矩陣。在黑色矩陣 的薄膜之間，形成有由凹陷部分所構成之凹部（墨水袋） ，在此基板5，凹部成爲墨水的噴佈位置。 圖4(a)係顯示基板5的一部表面圖，符號6顯示凹部 ’符號17顯示黑色矩陣，y軸正方向顯示基板5的移動方 201016475 向’ X軸顯示水平且對基板5的移動方向呈正交之方向。 當將沿著載置台12的移動方向之排列設爲行，而將 沿著正交方向之排列設爲列時，則在圖4(a)中，顯示4列 12行（橫4、縱12)之凹部6。 在印刷頭21中與基板5相對向的表面，設有複數個 噴嘴22。此噴嘴22係沿著與基板5的移動方向呈正交方 向配置著’且以正交方向的間隔與凹部6的正交方向的間 φ 隔形成爲等間隔的方式配置著。 各噴嘴22係作成爲當基板5移動時，各自不同的凹 部6通過各噴嘴22的正下方位置，因此，沿著移動方向 排成一列之凹部6會通過相同噴嘴22的正下方位置。 印刷頭2 1連接於墨水供給系統3 5的複數個（在此爲 3個）墨水槽。（圖2(a)、（b)、圖3(a)、（b)中省略墨水供 給系統35的圖示）。 發射光爲紅色的螢光墨水、發射光爲綠色的螢光墨水 ® 、發射光爲藍色的螢光墨水配置於各自的墨水槽，對各噴 嘴22，供給發射光爲紅色、綠色、藍色中任一種顏色的螢 光墨水。 各凹部6係決定形成爲發射光呈紅色、綠色、藍色的 任一種顏色的螢光墨水層，吐出分別所對應之顏色的墨水 之噴嘴22係配置於所對應的顏色的凹部6通過正下方之 位置。對一個凹部6，吐出噴佈一種顏色的螢光墨水。 在各噴嘴22的內部，設有：針對每個噴嘴22，壓電 元件、加熱器等在印刷頭21內產生壓力而從噴嘴22吐出 -11 - 201016475 墨水之吐出控制元件。當對吐出控制元件通電時，從噴嘴 22對凹部6吐出螢光墨水，螢光墨水被噴佈於凹部6內。 當將與基板5的移動方向正交之方向作爲噴佈方向時 ，則如圖4 ( b )所示，對與排列於噴佈方向之噴嘴22相 同數量的凹部6，噴佈螢光墨水18R、18G、18B中的其中 一種顏色。 螢光墨水18R、18G、18B係具有溶媒（水、有機溶 媒等）、和分散或溶解於溶媒之螢光體，在乾燥前呈液體 狀態。 對一個凹部6，吐出並噴佈預先設定的次數同色的螢 光墨水。在設定次數爲複數次的情況，亦可一邊使基板5 移動一邊吐出螢光墨水18R、18G、18B，使螢光墨水18R 、18G、18B中之同色的螢光墨水噴佈於相同凹部6內的 不同位置。 當將螢光墨水18R、18G、18B吐出設定次數時’使 基板5移動，讓噴不了螢光墨水18R、18G、18B之凹部6 朝移動方向下游側移動，而使噴佈螢光墨水WR'ISG、 18B前的凹部6從移動方向上游側朝噴嘴22的正下方移 動，位於正下方後，從各噴嘴22吐出設定次數之螢光墨 水 18R、 18G、 18B。 圖2(a) 、（b)係顯示反復進行基板5的移動、和 吐出設定次數之製程，而在從噴嘴22通過的行之一端到 另一端爲止的凹部6配置螢光墨水18R、18G、18B之狀 201016475 在沿著與基板5的移動方向正交的方向延伸之χ軸方 向排列的凹部6的數量較噴嘴22的數量多之情況，雖使 噴嘴22靜止，讓基板5移動一次，吐出螢光墨水18R、 18G、18B，也僅可將螢光墨水 18R、18G、18B塗佈於基 板5的一部分領域，無法塗佈於全部的領域。 在此情況，以使基板5移動進行塗佈後，使印刷頭2 1 朝X軸方向移動，並使鄰接於塗佈有螢光墨水18R、18G ❹ 、18B之領域的凹部6通過噴嘴22的正下方位置的方式 ，反復進行基板5的移動、設定次數之吐出動作時，則即 使在與塗佈有螢光墨水18R、18G、18B之領域隣接的領 域，亦可塗佈螢光墨水18R、18G、18B。 如此，反復進行基板5的移動與印刷頭21的χ軸方 向的移動、和螢光墨水 18R、18G、18B之塗佈，對一片 基板5的全部的凹部6配置螢光墨水18R、18G、18B。 亦可在每次使印刷頭21x軸方向移動，讓返回到基板 © 5移動開始位置，使基板5朝相同移動方向移動，來吐出 螢光墨水18R、18G、18B，亦可不使基板5返回到移動開 始位置，而一邊朝相反方向移動一邊將螢光墨水18R、 1 8G、1 8B 吐出。 將在全部的凹部6配置有螢光墨水18R、18G、18B 之基板5朝移動終點位置移動，配置到測定裝置9的正下 方（圖 3(a) 、( b))。 圖5係印刷裝置10的控制系統之方塊圖，符號3 0顯 示控制裝置。在此控制裝置30，連接有照射裝置40、受 13- 201016475 光裝置50、印刷頭21、台移動裝置31、頭移動裝置32、 及感測器移動裝置33,這些裝置之動作被控制裝置30所 控制。 控制裝置3 0使感測器移動裝置33作動，而將照射裝 置40與受光裝置50配置於凹部6上。在此，照射裝置40 與受光裝置50係一同地移動。 照射裝置40係爲例如以高壓水銀燈作爲光源之紫外 線照射裝置，在此，將位於紫外線領域之作爲測定光的雷 @ 射光呈定點狀照射，對任一個凹部6內的螢光墨水18R、 18G、18B照射測定光。由於螢光墨水18R、18G、18B含 有螢光體，故當被照射測定、光時，能夠放出作爲發射光之 紅、綠、藍的任一種顏色的可見光。 受光裝置50具有未圖示的受光部。受光裝置50與照 射裝置40之位置關係係作成被照射測定光之凹部6與受 光部相對面，受光部接收從該凹部6內的螢光墨水18R、 18G、18B所放出的發射光。 〇 在受光裝置50內部設有測定電路，用以測定所接收 的發射光的發光強度、輝度、波長等。控制裝置30具有 如圖5所示的記憶裝置60，用來記憶被受光裝置50所測 定到的測定結果。 如上述，沿著基板5的移動方向排成一列之凹部6係 通過相同的噴嘴22的正下方位置。使照射裝置40與受光 裝置50移動，針對每個各噴嘴22通過之行，對1個至複 數個凹部6照射測定光並接收發射光，將其測定結果與凹 -14 - 201016475 部6的行及列對應並記憶於記憶裝置60。 即，在記憶裝置60，針對吐出螢光墨水18R、18G、 18B之所有的噴嘴22，將所吐出之螢光墨水18R、18G、 18B的發射光的測定結果、和該吐出位置（凹部6)之位 置資訊賦予關聯性並加以記憶。 再者，所記憶之測定結果係爲發射光的強度、輝度、 色度等的測定値、與運算測定値之演算値的其中一方或雙 φ 方。在各噴嘴22對相同基板5的2個以上的凹部6噴佈 螢光墨水18R、18G、18B之情況，演算値係可將一個噴 嘴22噴佈螢光墨水18R、18G、18B之複數個凹部6的測 定値的差之値的分佈、平均値、總計値作成爲測定結果。 在記憶裝置60，預先設定作爲測定結果之基準値。控 制裝置30係將記憶裝置60所記億或算出之測定結果與基 準値進行比較，判斷來自於噴嘴22之墨水的吐出量是否 有過與不足之情況。由於噴嘴22所通過之凹部6的行已 ® 被決定，故，控制裝置30可從凹部6的位置資訊，特定 產生過與不足之噴嘴22» 當變更從控制裝置30朝吐出控制元件傳達的控制訊 號時，則對吐出控制元件之通電條件（驅動波形、施加電 壓的大小、電壓施加時間等）會改變，使得來自於噴嘴22 之吐出量被增加、或減少。 預先訂定欲變更之通電條件，並預先調査該通電條件 與測定結果之關係，將該關係與測定結果之目標値設定於 記憶裝置60。 -15- 201016475 控制裝置30係在對新的基板5開始進行來自於噴嘴 22之吐出動作前，針對判斷爲產生過與不足之噴嘴22’ 吐出控制元件的通電條件變更控制訊號，使測定結果成爲 目標値。 即，針對被判斷爲吐出量少之噴嘴22，變更控制訊號 ，使吐出量增加’而針對被判斷爲吐出量多之噴嘴22 ’變 更控制訊號，使吐出量減少。而針對被判斷爲吐出量未產 生過與不足之噴嘴22，不變更控制訊號。 @ 由於藉由變更控制訊號，修正吐出量的過與不足，故 ，可在各凹部6，配置所設定的量之螢光墨水18R、18G、 1 8B。 將結束發射光的測定之基板5搬入到未圖示的乾燥裝 置，在該乾燥裝置內讓螢光墨水18R、18G、18B乾燥， 除去溶媒，若有需要，則利用雷射退火裝置等，在乾燥後 將螢光墨水18R、18G、18B予以結晶化。乾燥後的螢光 墨水18R、18G、18B爲固態，成爲FEP、PDP、有機EL 〇 元件等的顯示裝置的自發光型彩色墨水匣（螢光膜）。 在與複數片基板5連續地配置螢光墨水18R、18G、 18B之情況，發射光的測定，亦可針對各個基板5進行， 亦可針對每複數片進行。 又，亦可如圖2(a) 、 （b)所示，在將螢光墨水 18R、18G、18B塗佈於基板5的一部分的領域之狀態下，[Technical Field] The present invention relates to a technique for discharging ink, and more particularly to a technique for discharging fluorescent ink for a spontaneous light type display device. [Prior Art] In recent years, an inkjet printing device (inkjet printing device) φ is used to discharge ink from a nozzle of the printing device to form a color ink cartridge of the display device. However, the amount of ink discharged from the ink jet printing apparatus is unstable due to the change of the head over time, the pattern of the ejection pattern, the characteristic distribution of the ink, and the like. The distribution of the amount of ink discharged directly affects the distribution of the chromaticity of the pixels. In order to solve this problem, it is known to form a discharge color ink cartridge by a color density of at least two or more levels, and to adjust the color density of each nozzle to correct the distribution of the discharge amount of each nozzle (refer to the following patent). Document 1). [Patent Document 1] Japanese Patent No. 3 106110 [Disclosed] The problem of the invention to be solved is that a self-luminous display such as an organic EL or an FED is different from a liquid crystal display device in that a visible light can be emitted when ultraviolet rays are irradiated. Light ink. Most of the fluorescent inks are colorless under visible light, and when the printing target is applied by an ink jet printing apparatus, the color density of each of the paintings -5 - 201016475 cannot be accurately measured. The distribution of the discharge amount of each nozzle directly affects the distribution of the luminous intensity of the pixels, resulting in a deterioration in the quality of the display. [Means for Solving the Problems] In order to solve the above problems, a printing apparatus according to the present invention includes a control device, and a printing head having a plurality of nozzles for discharging ink from the nozzles in accordance with a control signal from the control device; And a moving device for moving the substrate to the print head in a relatively linear manner, wherein the control device is a printing device that ejects the ink from a position at which the ink is ejected in a direction in which the direction of movement of the substrate intersects. Further, the method further includes: an irradiation device that irradiates the measurement light to the ink sprayed on the discharge position at a downstream side of the printing head in a moving direction of the substrate; and measures the irradiation of the measurement light In the light receiving device that emits light of the ink, the control device may change the control signal according to a measurement result of the light receiving device. Further, in the printing apparatus of the present invention, there is provided a memory device in which the measurement result is associated with and stored in the position on the substrate of the concave portion, and the control signal is changed from the content stored in the memory device. Further, the printing apparatus of the present invention includes a sensor moving device that moves the irradiation device and the light receiving device in the direction of the discharge direction. Further, in the film forming method of the present invention, the control signal is transmitted to the discharge control elements provided in the plurality of nozzles of the print head, and the ink containing the phosphor 201016475 is discharged from the nozzle and sprayed on the substrate to form a honey. A film forming method of a light film, wherein the ink sprayed on the substrate is irradiated with electromagnetic waves to emit light, and the emitted light emitted from the ink is measured as compared with one of the plurality of nozzles. The measurement result of the emitted light of the ink to be ejected and the reference 値' set in advance determine that the amount of discharge of the ink discharged from one of the nozzles is insufficient. When it is determined that the discharge amount is small, the control is changed. The signal is increased by one of the discharge amounts of the front nozzle, and when it is determined that the discharge amount is large, the control signal is changed to reduce the discharge amount. Further, in the film forming method of the present invention, the method of moving the substrate relative to the print head and allowing the ink to be sprayed on the plurality of spray positions is based on a plurality of the plurality of mutually separated ones discharged from the nozzles The aforementioned emitted light of the ink changes the aforementioned control signal of one of the nozzles. Further, in the film forming method of the present invention, the substrate is relatively moved toward the printing head, and a portion of the ink is partially sprayed onto the base plate, and the amount of the discharge is insufficient. After the control signal is changed, the print head is moved to an uncoated portion of the substrate on which the ink is not sprayed, and the ink is sprayed onto the uncoated portion by the modified control signal. Further, in the film forming method of the present invention, in the method of forming the fluorescent film on the plurality of substrates, the ink is sprayed onto one of the substrates, and the emitted light is measured, and then the control signal is changed by the control signal. The ink is sprayed on the other substrate. Further, in the film forming method of the present invention, after the emitted light of the ink sprayed on the substrate of 201016475 is measured, the ink is dried. The present invention is constructed as described above, and the position at which the ink is ejected onto the substrate is determined in advance. The position of the spray corresponds to the nozzle in a one-to-one manner, so that the over and under of the ink is differentiated according to each nozzle. The measurement result of the light receiving device also changes depending on the amount of ink sprayed on the substrate. For example, when the amount of ink is large, the luminous intensity is high, and when the amount of ink is small, the luminous intensity is lowered. According to the measurement result of the light-receiving device, the energization condition of the discharge control element of the nozzle is changed so that the amount of discharge is increased when the amount of ink is insufficient, and when the amount of ink is excessive, the amount of discharge is reduced, and the amount of discharge can be made for each color. The intensity of the emitted light of the ink (for example, fluorescent ink) sprayed on the substrate by each nozzle becomes equal. [Effect of the Invention] It is possible to make the discharge amount of the printing target uniform. A self-luminous display device having a chromaticity distribution of a pixel and a small distribution of luminous intensity can be obtained. [Embodiment] Fig. 1 (a) and (b) to Fig. 3 (a) and (b) are reference numerals 10 showing a printing apparatus according to an example of the present invention. 1(a) to 3(a) are plan views as seen from above, and Figs. 1(b) to 3(b) are side views as seen from the side. As shown in Figs. 1(a) and 1(b), the printing apparatus 10 includes a substrate transport mechanism (moving device) 7, a printing mechanism 8, and a measuring device 9. The substrate transport mechanism 7 has a stage moving shaft 11 arranged horizontally, and the mounting table 12 is mounted on the upper side horizontally -8 - 201016475. The substrate transport mechanism 7 has a stage moving device 31. The mounting table 12 is reciprocally movable in a horizontal plane on the stage moving shaft 11 by the stage moving device 31 extending in the direction along the stage moving shaft 11. The printing mechanism 8 and the measuring device 9 have a head moving shaft 14 and a sensor moving shaft 15, respectively. The head moving shaft 14 and the sensor moving shaft 15 are horizontally disposed above the table moving shaft 11, respectively. φ The print head 21 is attached to the head moving shaft 14, and the irradiation device 40 and the light receiving device 50 are attached to the sensor moving shaft 15. The printing mechanism 8 and the measuring device 9 have a head moving device 32 and a sensor moving device 33, respectively. By the head moving device 32, the print head 21 is configured to reciprocate along the extending direction of the head moving shaft 14, and the illuminating device 40 and the light receiving device 50 are moved along the sensor by the sensor moving device 33. The extending direction of the shaft 15 is reciprocated together or separately (in the drawings of FIGS. 2(a), (b), 3(a), and (b), the respective moving devices 31 to 33 are omitted. The direction in which the head moving shaft 14 and the sensor moving shaft 15 extend and the direction in which the table moving shaft 11 extends are arranged in the orthogonal direction. Therefore, the printing head 21, the irradiation device 40, and the light receiving device 50 are arranged. It moves in a direction orthogonal to the moving direction of the mounting table 12. Among the two ends of the stage moving shaft 11, when one end is referred to as a movement start position of the stage 12, and the other end is referred to as a movement end position, the head moving shaft 14 is disposed closer to the movement than the sensor moving axis 15. At the position of the starting position, the sensor moving shaft 15 is disposed closer to the end position of the head moving axis 14 to move the 201016475. Fig. 1 (a) and (b) show a state in which the substrate 5 as a printing target is placed on the mounting table 12, and the movement start position is in a stationary state. The substrate 5 may be a resin substrate or a glass substrate. The upper substrate 5 is in a stationary state at the movement start position, and the print head 21 is disposed closer to the movement end position than the substrate 5. When the mounting table 12 is moved, the substrate 5 placed on the mounting table 12 also moves together with the mounting table 12. The head moving shaft 14 and the print head 21, the sensor moving shaft 15, the illuminating device 40, and the light receiving device 50 are located above the moving path of the substrate 5 on the mounting table 12, and the substrate 5 is not printed on the head. When the print head 21, the sensor moving shaft 15, the irradiation device 40, and the light receiving device 50 collide, the movement is started from the movement start position toward the movement end position. When the ink is ejected to the substrate 5 by the printing apparatus 10, the head moving device 32 moves the printing head 21 in advance to stop the printing head 21 above the moving path of the substrate 5. When the stage moving device 31 moves the mounting table 12 in the direction of the end position of the movement in this state, the substrate 5 enters the position directly below the printing head 21. On the surface of the substrate 5, a black strip-shaped light-blocking film (e.g., a Cr layer) is arranged in a lattice shape to constitute a black matrix. A concave portion (ink bag) composed of a concave portion is formed between the films of the black matrix, and the concave portion serves as a discharge position of the ink on the substrate 5. 4(a) shows a partial surface view of the substrate 5, the symbol 6 shows that the concave portion 'symbol 17 shows a black matrix, and the y-axis positive direction shows the moving side of the substrate 5 201016475 to the 'X-axis display level and the moving direction of the substrate 5 In the direction of the orthogonal. When the arrangement along the moving direction of the mounting table 12 is a row and the arrangement along the orthogonal direction is a column, in FIG. 4(a), four columns of 12 rows (horizontal 4, vertical 12) are displayed. a recess 6). A plurality of nozzles 22 are provided on the surface of the printing head 21 opposed to the substrate 5. The nozzles 22 are disposed in a direction orthogonal to the moving direction of the substrate 5, and are disposed at equal intervals with the interval φ between the orthogonal directions of the recesses 6 at intervals in the orthogonal direction. Each of the nozzles 22 is configured such that when the substrate 5 moves, the respective concave portions 6 pass through the positions directly below the respective nozzles 22. Therefore, the concave portions 6 arranged in a row along the moving direction pass through the position directly below the same nozzle 22. The print head 21 is connected to a plurality of (here, three) ink tanks of the ink supply system 35. (The illustration of the ink supply system 35 is omitted in Fig. 2 (a), (b), Fig. 3 (a), and (b). Fluorescent inks emitting red light, fluorescent inks emitting green light, and fluorescent inks emitting blue light are disposed in respective ink tanks, and for each nozzle 22, the emitted light is red, green, and blue. Fluorescent ink of any color. Each of the concave portions 6 determines a fluorescent ink layer formed in any one of red, green, and blue colors, and the nozzles 22 that discharge the inks of the respective colors are disposed directly below the concave portion 6 of the corresponding color. The location. For one recess 6, a fluorescent ink of one color is ejected. Inside each of the nozzles 22, for each of the nozzles 22, a piezoelectric element, a heater, or the like is supplied with pressure in the printing head 21 to eject a discharge control element of -11 - 201016475 ink from the nozzle 22. When the discharge control element is energized, the fluorescent ink is discharged from the nozzle 22 to the concave portion 6, and the fluorescent ink is sprayed into the concave portion 6. When the direction orthogonal to the moving direction of the substrate 5 is the direction of the discharge, as shown in FIG. 4(b), the fluorescent ink 18R is sprayed on the same number of recesses 6 as the nozzles 22 arranged in the discharge direction. One of the colors of 18G and 18B. The fluorescent inks 18R, 18G, and 18B have a solvent (water, an organic solvent, or the like) and a phosphor dispersed or dissolved in a solvent, and are in a liquid state before drying. To one of the concave portions 6, the fluorescent ink of the same color as the predetermined number of times is discharged and ejected. When the number of times is set to be plural, the fluorescent inks 18R, 18G, and 18B can be discharged while the substrate 5 is moved, and the fluorescent ink of the same color among the fluorescent inks 18R, 18G, and 18B can be sprayed in the same concave portion 6. Different locations. When the fluorescent inks 18R, 18G, and 18B are discharged a predetermined number of times, the substrate 5 is moved, and the concave portion 6 of the fluorescent inks 18R, 18G, and 18B is not moved toward the downstream side in the moving direction, and the fluorescent ink WR' is sprayed. The concave portion 6 before the ISG and 18B moves from the upstream side in the moving direction toward the immediately below the nozzle 22, and is positioned immediately below, and then the fluorescent inks 18R, 18G, and 18B are set a predetermined number of times from the respective nozzles 22. 2(a) and 2(b) show a process of repeating the movement of the substrate 5 and the number of times of discharge setting, and the fluorescent inks 18R and 18G are disposed in the concave portion 6 from one end of the row from the nozzle 22 to the other end. 18B shape 201016475 In the case where the number of the concave portions 6 arranged in the z-axis direction extending in the direction orthogonal to the moving direction of the substrate 5 is larger than the number of the nozzles 22, the nozzle 22 is stopped, the substrate 5 is moved once, and the discharge is performed. In the fluorescent inks 18R, 18G, and 18B, only the fluorescent inks 18R, 18G, and 18B can be applied to a part of the substrate 5, and it is not possible to apply them to all fields. In this case, after the substrate 5 is moved and applied, the print head 2 1 is moved in the X-axis direction, and the concave portion 6 adjacent to the field in which the fluorescent inks 18R, 18G 、, 18B are applied is passed through the nozzle 22. When the substrate 5 is repeatedly moved and the ejection operation is performed a predetermined number of times, the fluorescent ink 18R can be applied even in a region adjacent to the field in which the fluorescent inks 18R, 18G, and 18B are applied. 18G, 18B. In this manner, the movement of the substrate 5 and the movement of the print head 21 in the z-axis direction and the application of the fluorescent inks 18R, 18G, and 18B are repeated, and the fluorescent inks 18R, 18G, and 18B are disposed on all the concave portions 6 of one of the substrates 5. . It is also possible to move the print head 21x in the axial direction, return to the substrate © 5 movement start position, and move the substrate 5 in the same movement direction to discharge the fluorescent inks 18R, 18G, and 18B, or return the substrate 5 to the substrate 5 The start position is moved, and the fluorescent inks 18R, 18G, and 18B are ejected while moving in the opposite direction. The substrate 5 in which the fluorescent inks 18R, 18G, and 18B are disposed in all of the concave portions 6 is moved toward the movement end position, and is placed directly below the measuring device 9 (Fig. 3 (a), (b)). Figure 5 is a block diagram of the control system of the printing unit 10, and symbol 30 shows the control unit. In this control device 30, an illumination device 40, a 13-201016475 optical device 50, a print head 21, a table moving device 31, a head moving device 32, and a sensor moving device 33 are connected, and the actions of these devices are controlled by the device 30. Controlled. The control device 30 causes the sensor moving device 33 to operate, and the irradiation device 40 and the light receiving device 50 are disposed on the concave portion 6. Here, the irradiation device 40 moves together with the light receiving device 50. The irradiation device 40 is, for example, an ultraviolet ray irradiation device that uses a high-pressure mercury lamp as a light source. Here, the ray light that is the measurement light in the ultraviolet ray field is irradiated in a fixed pattern, and the fluorescent inks 18R and 18G in any one of the concave portions 6 are 18B illuminates the measurement light. Since the fluorescent inks 18R, 18G, and 18B contain the phosphors, when the light is measured and irradiated, visible light of any one of red, green, and blue colors of the emitted light can be emitted. The light receiving device 50 has a light receiving unit (not shown). The positional relationship between the light-receiving device 50 and the illuminating device 40 is the surface on which the concave portion 6 to be irradiated with the measurement light and the light-receiving portion are opposed, and the light-receiving portion receives the emitted light emitted from the fluorescent inks 18R, 18G, and 18B in the concave portion 6.测定 A measuring circuit is provided inside the light receiving device 50 for measuring the luminous intensity, luminance, wavelength, and the like of the received emitted light. The control device 30 has a memory device 60 as shown in Fig. 5 for memorizing the measurement results measured by the light receiving device 50. As described above, the recesses 6 arranged in a row along the moving direction of the substrate 5 pass through the position directly below the same nozzle 22. The irradiation device 40 and the light-receiving device 50 are moved, and one to a plurality of concave portions 6 are irradiated with measurement light for each of the nozzles 22, and the emission light is received, and the measurement result is compared with the row of the concave-14 - 201016475 portion 6. The columns correspond to and are memorized in the memory device 60. In other words, in the memory device 60, the measurement results of the emitted light of the discharged fluorescent inks 18R, 18G, and 18B and the discharge position (recessed portion 6) are applied to all of the nozzles 22 that discharge the fluorescent inks 18R, 18G, and 18B. The location information is associated and memorized. In addition, the measured result of the memory is one of the measurement 値 of the intensity, the luminance, the chromaticity, and the like of the emitted light, and one of the calculations of the measurement 値 or the double φ square. When each of the nozzles 22 sprays the fluorescent inks 18R, 18G, and 18B to the two or more recessed portions 6 of the same substrate 5, the plurality of concave portions of the fluorescent inks 18R, 18G, and 18B can be sprayed by one nozzle 22 by calculation. The distribution of the difference 6 of the measurement of 値, the average 値, and the total 値 are the measurement results. In the memory device 60, a reference frame as a measurement result is set in advance. The control device 30 compares the measurement result calculated by the memory device 60 with the calculated value and the reference ,, and determines whether or not the discharge amount of the ink from the nozzle 22 is excessive or insufficient. Since the row of the recesses 6 through which the nozzles 22 have been determined, the control device 30 can specifically generate the control of the nozzles from the recesses 6 by changing the position information of the recesses 6 from the control device 30 to the discharge control member. At the time of the signal, the energization condition (drive waveform, magnitude of applied voltage, voltage application time, etc.) of the discharge control element is changed so that the discharge amount from the nozzle 22 is increased or decreased. The energization condition to be changed is determined in advance, and the relationship between the energization condition and the measurement result is investigated in advance, and the relationship 与 and the target value of the measurement result are set in the memory device 60. -15-201016475 The control device 30 changes the control condition for the energization condition of the discharge control unit that has been determined to have occurred and is insufficient before the new substrate 5 starts to be ejected from the nozzle 22, so that the measurement result becomes Target 値. In other words, the nozzle 22, which is determined to have a small discharge amount, changes the control signal to increase the discharge amount, and changes the control signal to the nozzle 22' which is determined to have a large discharge amount, thereby reducing the discharge amount. On the other hand, for the nozzle 22 which is judged to have not produced or failed the discharge amount, the control signal is not changed. @ By changing the control signal to correct the excessive or insufficient discharge amount, the set amount of fluorescent inks 18R, 18G, and 18B can be disposed in each of the concave portions 6. The substrate 5 that has finished measuring the emitted light is carried into a drying device (not shown), and the fluorescent inks 18R, 18G, and 18B are dried in the drying device to remove the solvent, and if necessary, a laser annealing device or the like is used. After drying, the fluorescent inks 18R, 18G, and 18B are crystallized. The fluorescent inks 18R, 18G, and 18B after drying are solid-state, and are self-luminous color ink cartridges (fluorescent films) of display devices such as FEP, PDP, and organic EL devices. When the fluorescent inks 18R, 18G, and 18B are continuously disposed on the plurality of substrates 5, the measurement of the emitted light may be performed for each of the substrates 5, or may be performed for each of the plurality of sheets. Further, as shown in FIGS. 2(a) and 2(b), in the state where the fluorescent inks 18R, 18G, and 18B are applied to a part of the substrate 5,
進行發射光的測定，在變更控制訊號後，對與塗佈有螢光 墨水18R、18G、18B之領域隣接的領域塗佈螢光墨水18R -16- 201016475 、18G、18B。在此情況，在相同的基板5內，吐出量被修 正，能以修正後的吐出量進行吐出。 發射光的測定，亦可在藉由乾燥裝置使螢光墨水18R 、18G、18B乾燥後進行，但由於噴嘴22的吐出量的修正 延遲（通常爲對2、3片基板進行吐出後），在噴嘴22的 吐出量產生異常之狀態下，會有螢光墨水18R、18G、18B 被長時間吐出之虞，故，發射光的測定係在進行乾燥前進 G 行爲佳。 在使2種顏色以上的螢光墨水18R、18G、18G噴佈 於基板5之情況，若預先針對螢光墨水18R、18G、18G 之發射光的每種顏色決定基準値，則藉由變更控制訊號， 可使在每種顏色，使發射光的測定結果一致。 設定於控制裝置30之基準値，亦可爲一個，亦可爲 測定値之變化量、和測定値之上限値等二個以上。又，目 標値與基準値亦可相同，亦可不同。 ® 在上述實施例，說明了關於針對每個凹部6照射測定 光之情況，但亦可一次針對2個以上的凹部6照射測定光 。在此情況，亦可在受光裝置50設置2個以上的受光部 ，同時接收來自於2個以上的凹部6之發射光，使得可接 收來自於2個以上的凹部6之發射光。受光裝置50與照 射裝置40的配置，未被特別限定’亦可與印刷頭21同樣 地安裝於頭移動軸14。 測定光係爲使含於螢光墨水18R、18G、18B之螢光 體激起、並發光之電磁波，在此爲紫外線。照射裝置40 -17- 201016475 係例如，紫外線照射裝置、短波長紫外線雷射照射裝置， 亦可爲照射電子之電子槍等。 受光裝置50未被特別限定，可爲輝度計、分光光度 計、XYZ感測器等。受光裝置50係用來測定例如，在紅 色發光爲波長650nm的發光強度，在綠色發光爲以波長 540nm爲中心之發光強度，在藍色發光則爲以波長440nm 爲中心之發光強度。 以上說明了關於測定對使用於實際上顯示裝置的製造 @ 之基板5噴佈之墨水的發射光的情況，但本發明不限於此 。例如，亦可對測定用的虛擬基板從複數個噴嘴22在複 數個部位噴佈螢光墨水18R、1 8G、18B，測定噴佈於虛擬 基板之螢光墨水18R、18G、18B的發射光。從該測定結 果變更控制訊號，對用於實際製造之基板5塗佈螢光墨水 1 8R、1 8G、1 8B。 發射光的測定，不需針對印刷頭2 1的所有噴嘴22進 行，針對用於下一次開始進行印刷之時的噴嘴22進行即 β 可。 本發明的印刷裝置及成膜方法係適用於不使用光源’ 而藉由照射電磁波來放出可見光之彩色墨水匣的成膜’使 用於有機 EL ( Electro-Luminescence )顯不裝置、SED ( 表面傳導電子發射顯示器；Surface-conduction Electron-emitter Display ) 、FED (場發射顯示器；Field EmissionThe emission light is measured, and after the control signal is changed, the fluorescent inks 18R - 16 - 201016475 , 18G , and 18B are applied to a region adjacent to the region where the fluorescent inks 18R, 18G, and 18B are applied. In this case, in the same substrate 5, the discharge amount is corrected, and the discharge can be performed with the corrected discharge amount. The measurement of the emitted light may be performed after the fluorescent inks 18R, 18G, and 18B are dried by the drying device, but the correction of the discharge amount of the nozzles 22 is delayed (usually after discharging the two or three substrates). In the state in which the discharge amount of the nozzle 22 is abnormal, the fluorescent inks 18R, 18G, and 18B are ejected for a long period of time. Therefore, the measurement of the emitted light is preferably performed in the dry progress G. When the fluorescent inks 18R, 18G, and 18G of two or more colors are sprayed onto the substrate 5, if the reference 値 is determined for each color of the emitted light of the fluorescent inks 18R, 18G, and 18G in advance, the control is changed by the change. The signal, in each color, makes the measurement of the emitted light consistent. The reference number set in the control device 30 may be one, or two or more of the amount of change in the measurement enthalpy and the upper limit 値 of the measurement enthalpy. Also, the target 値 and the reference 値 may be the same or different. In the above embodiment, the case where the measurement light is applied to each of the concave portions 6 has been described, but the measurement light may be irradiated to the two or more concave portions 6 at a time. In this case, two or more light receiving units may be provided in the light receiving device 50, and the emitted light from the two or more concave portions 6 may be received so that the emitted light from the two or more concave portions 6 can be received. The arrangement of the light receiving device 50 and the irradiation device 40 is not particularly limited. It can also be attached to the head moving shaft 14 in the same manner as the printing head 21. The measurement light is an electromagnetic wave that causes the phosphors contained in the fluorescent inks 18R, 18G, and 18B to ignite and emit light, and is ultraviolet rays. The irradiation device 40-17-201016475 is, for example, an ultraviolet irradiation device, a short-wavelength ultraviolet laser irradiation device, or an electron gun that irradiates electrons. The light receiving device 50 is not particularly limited and may be a luminance meter, a spectrophotometer, an XYZ sensor or the like. The light-receiving device 50 is used to measure, for example, an emission intensity at a wavelength of 650 nm in red emission, an emission intensity centered on a wavelength of 540 nm in green emission, and an emission intensity centered on a wavelength of 440 nm in blue emission. The case where the emitted light of the ink to be ejected to the substrate 5 of the manufacturing device of the actual display device is measured has been described above, but the present invention is not limited thereto. For example, the fluorescent inks 18R, 18G, and 18B may be sprayed from a plurality of nozzles 22 at a plurality of locations on the dummy substrate for measurement, and the emitted light of the fluorescent inks 18R, 18G, and 18B sprayed on the dummy substrate may be measured. The control signal is changed from the measurement result, and the fluorescent inks 1 8R, 18G, and 18B are applied to the substrate 5 for actual production. The measurement of the emitted light does not need to be performed for all the nozzles 22 of the printing head 21, and the nozzle 22 for the next printing start is performed. The printing apparatus and the film forming method of the present invention are applied to film formation of a color ink cartridge which emits visible light by irradiating electromagnetic waves without using a light source '. For use in an organic EL (Electro-Luminescence) display device, SED (Surface conduction electron) Emissive display; Surface-conduction Electron-emitter Display), FED (field emission display; Field Emission
Display) 、PDP (電漿顯示器）等的顯示裝置。 在使用作爲吐出控制元件具有128個壓電元件之致動 -18- 201016475 器的印刷頭（Diamtix製頭SE — 3 )之噴墨印刷機，照射 波長365 nm的測定光，以分光光度計進行受光，調整噴嘴 22的吐出量之情況時，能夠將基板5的色度分佈抑制於在 X、y色度計上的3σ 0.0 02以內。 【圖式簡單說明】 圖1(a)是用來說明本發明的印刷裝置之平面圖，（b)是 〇 其側面圖。 圖2(a)是用來說明使用本發明的印刷裝置之成膜製程 的平面圖（1)，（b)是其側面圖。 圖3是（a)用來說明使用本發明的印刷裝置之成膜製程 的平面圖（1)，（b)是其側面圖。 圖4(a)、（b)是用來說明基板表面的凹部之圖。 圖5是用來說明本發明的印刷裝置的控制系統之方塊Display devices such as Display) and PDP (plasma display). An ink jet printer using a print head (Diamtix head SE-3) having an actuator -18-201016475 as a discharge control element having 128 piezoelectric elements, irradiating measurement light having a wavelength of 365 nm, and performing spectrophotometry When the light is received and the discharge amount of the nozzle 22 is adjusted, the chromaticity distribution of the substrate 5 can be suppressed to within 3σ 0.0 02 on the X, y chromaticity meter. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) is a plan view showing a printing apparatus of the present invention, and (b) is a side view thereof. Fig. 2 (a) is a plan view (1) for explaining a film forming process using the printing apparatus of the present invention, and (b) is a side view thereof. Figure 3 is a plan view (1) for explaining a film forming process of a printing apparatus to which the present invention is applied, and (b) is a side view thereof. 4(a) and 4(b) are views for explaining a concave portion on the surface of the substrate. Figure 5 is a block for explaining the control system of the printing apparatus of the present invention.
I C3 I 圖。 « 【主要元件符號說明】 5 :基板 1 0 :印刷裝置 21 :印刷頭 22 :噴嘴 3 0 :控制裝置 40 :照射裝置 5 0 :受光裝置 -19 _I C3 I map. « [Main component symbol description] 5 : Substrate 1 0 : Printing device 21 : Print head 22 : Nozzle 3 0 : Control device 40 : Illumination device 5 0 : Light receiving device -19 _