TW201009408A - Optical waveguide, optical waveguide module, and optical element mounting substrate - Google Patents

Abstract

To provide an optical waveguide having a new mirror structure that has no fouling of a mirror surface, has a low reflection loss, and hardly becomes a damage base when deformed. The optical waveguide comprises a core layer including a core part determining an optical path direction, and a clad part lower in refractive index than the core part; and clad layers laminated on both faces of the core layer. A hollow mirror structure defining the mirror surface for changing the optical path of light incident to the optical waveguide and light emitted from the optical waveguide is provided in a predetermined position along the optical path direction of the core part.

Description

201009408 VI. Description of the Invention: [Technical Field] The present invention relates to an optical waveguide, an optical waveguide module, and an optical element mounting substrate 0. [Prior Art] In recent years, the requirements for miniaturization and high performance of electronic equipment have been made. Increasingly. Among them, in order to cope with the increase in the speed of signals, the industry has researched that optical signals are connected between electronic components, thereby realizing the speed of signal transmission paths in electronic devices. Since the optical signal is used for connection, an opto-electric hybrid board including optical wiring and electrical wiring is used. The optical wiring includes an optical waveguide composed of a core portion and a cladding portion, and transmits an optical signal by transmitting light from a core portion of the optical waveguide. In an electronic device including an opto-electric hybrid substrate, a plurality of electronic components are mounted on the substrate. After the input/output signal of an electronic component is converted into an optical signal by the optical component, the optical waveguide transmits the optical signal. Then, after the transmitted optical signal is restored to an electrical signal by other optical components, the electrical signal is connected to other electronic components. Previously, in an opto-electric hybrid substrate, optical waveguides were formed in a hard plate, and the optical waveguide was integrated with the hard plate. For example, the optical element and the electronic component are mounted on the hard board, and the electrical signal is transmitted through the substrate from the mounting surface, and then transmitted through the electrical wiring formed on the opposite side surface, and the optical signal is formed in the substrate. The optical waveguide transmits and transmits the optical signal from the optical waveguide to the light-receiving portion of the optical element (see, for example, Japanese Patent Laid-Open Publication No. 2002-182049). In such an opto-electric hybrid board, the optical element is mounted on the substrate. Therefore, in the optical waveguide, 138984.doc 201009408 is provided with a mirror surface for bending the light transmitted in the optical waveguide in the vertical direction with respect to the substrate (for example, refer to Japan). Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. SUMMARY OF THE INVENTION However, the mirror surface previously provided in the optical waveguide is formed by cutting, hot stamping, laser processing, etc. from the cladding layer, so that one part of the cladding layer is completely missing. Causes the mirror of the core to be exposed to the surrounding environment. The mirror surface exposed to the surrounding environment is easily stained by the adhesion of dust or dust, so it is necessary to embed the opening portion with a resin or an insulating layer. However, when the mirror surface of the core is in contact with the resin or the insulating layer, the difference in refractive index between the mirror surface and the core portion becomes smaller than in the case of contact with air, resulting in a decrease in reflection efficiency. Further, in the conventional structure for drawing the mirror surface, the shape of the "notch" is added to the optical waveguide. Therefore, if the optical waveguide is deformed, the portion of the mirror structure is easily broken. In fact, in the optical waveguide in which a plurality of core portions are arranged at a narrow interval, the effect of the "notch" becomes conspicuous due to the parallel arrangement of the mirror structure, thereby causing the optical waveguide to be part of the mirror structure. Easy to break. Accordingly, it is an object of the present invention to provide an optical waveguide including a novel mirror structure which is not stained by the adhesion of dust or dust, and which is highly suppressed by the reflection loss caused by the mirror surface. It is also not easy to become the breakage point at the time of deformation. Moreover, the object of the present invention is to provide a miniaturized optical waveguide sheet having a high density and a high degree of freedom of optical wiring, which is a novel mirror structure and a complex 138984.doc 201009408. 2 Cross-waveguides in which the cores intersect, or a combination of such cross-waveguides. Furthermore, it is an object of the invention to provide an optical waveguide core and an optical element mounting substrate including such an optical waveguide. The above object (4) is achieved by the following inventions having the following constitutions (1) to (10).

(1) An optical waveguide characterized in that: (4) a wrap that is lower than a anger portion that determines a direction of an optical path surrounds the anger portion, and a predetermined position is provided at a position along the optical path of the core portion. A mirror-shaped hollow mirror structure that converts an optical path that is incident on the optical waveguide or light that is emitted from the optical waveguide. (2) The optical waveguide according to (1) above, wherein the hollow mirror structure has a height equal to or larger than a thickness of the core. (3) The optical waveguide according to (1) or (2) above, wherein in the same optical path including the specific position at which the hollow mirror structure is provided, an additional hollow is provided at a position different from the specific position Mirror structure. (4) The optical waveguide according to any one of (1) to (3) above, wherein the mirror surface of the hollow mirror structure is 4 〇 5 〇 with respect to the optical path direction. The angle. (5) The optical waveguide according to any one of (1) to (4) above, wherein the optical path direction is converted into a substantially normal direction with respect to a plane defined by the optical waveguide by the mirror surface. (6) The optical waveguide according to any one of (1) to (5) above, wherein the optical waveguide has a plurality of core portions arranged at a narrow interval, and the hollow mirror structure system is for each of the cores Partially and independently set up side by side. (7) The optical waveguide according to any one of (1) to (5) above, wherein the optical waveguide 138984.doc 201009408 is a plurality of cores arranged at a narrow interval, and the hollow mirror structure system A common hollow mirror structure is provided that spans two or more of the cores. (8) The optical waveguide according to any one of the above (1) to (5), wherein the branching optical waveguide of the optical waveguide core portion is provided with a hollow mirror structure at any position of each of the core portions of the branch. (9) The optical waveguide according to any one of (1) to (4) above, wherein the optical path direction is converted by the mirror surface in a plane defined by the optical waveguide. (10) The optical waveguide of the above (9) wherein the optical waveguide is a cross-waveguide in which a plurality of core portions intersect, and the hollow mirror structural system is disposed in at least one region of the intersection of the core portions. (11) The optical waveguide of the above (10), wherein the hollow mirror structure is disposed such that an optical path branches in the opposite direction in two directions. (12) The optical waveguide of (10) above, wherein the hollow mirror structure is disposed such that an optical path branches in three directions in the intersection. (13) The optical waveguide according to any one of (10) to (12), wherein the cross-connected waveguide overlaps the core by two or more layers of the cross-linked waveguide via the cladding layer, and The hollow mirror structure system arranged such that the upper and lower cores are optically connected is placed at a specific position. (14) The optical waveguide of any of (1) to (13), wherein the cross-waveguide includes an interference-preventing cladding structure, the interference-preventing cladding structure being disposed at a periphery of the intersection and the region There is a low refractive index having a lower refractive index than the above core. (15) The optical waveguide of any of (1) to (14) above, wherein the light wave 138984.doc 201009408 includes a core layer and a cladding layer laminated on both sides of the core layer, the core layer including the decision The core portion in the direction of the optical path and the cladding portion having a lower refractive index than the core portion. (16) The optical waveguide according to (15) above, wherein the core layer and the cladding layer are composed of a south molecular material. (17) The optical waveguide according to (16) above, wherein the polymer material comprises a main chain mainly composed of addition polymerization type norbornene. (18) An optical waveguide module comprising the optical waveguide and the light-emitting element and/or the light-receiving element according to any one of (1) to (8) and (15) to (17) above The hollow mirror structure is aligned with the light-emitting element and/or the light-receiving element in such a manner that light emitted from the light-emitting element is incident on the optical waveguide through the mirror surface of the hollow mirror structure, and/or Light emitted from the light wave is incident on the light receiving element via the mirror surface of the hollow mirror structure. (19) A light element mounting substrate comprising the optical waveguide module and the circuit substrate of the above (18). (20) The optical component mounting substrate of the above (丨9), wherein the optical waveguide module includes a receiving structure for providing between the electrode of the light emitting component and/or the light receiving component and the electrode of the circuit substrate Conductive. According to the present invention, the facet is not exposed to the surrounding environment by the arrangement of the mirrored hollow mirror structure in the core of the optical waveguide, thereby eliminating the specular contamination caused by the adhesion of dust or dust. Further, by bringing the mirror surface into contact with the air, the difference in refractive index between the core and the core portion is sufficiently ensured, and the reflection sensitivity on the mirror surface is extremely small. Further, the mirror structure is a hollow mirror structure, and the optical waveguide can be lifted without giving a "notch" shape to the optical waveguide. This mechanical strength is particularly remarkable when the plurality of core portions are arranged in a plurality of intervals at a narrow interval and the optical waveguides of the mirror structure are arranged side by side. Moreover, according to the present invention, by combining the novel mirror structure with the cross-waveguide or the multi-layered cross-waveguide, it is relatively simple to provide a light having a density and a degree of freedom in which the optical fiber is bent and laid. The waveguide sheet has a higher miniaturized optical waveguide sheet. [Embodiment] Hereinafter, an optical waveguide, an optical waveguide module, and an optical element mounting substrate of the present invention will be described in detail with reference to the preferred embodiment shown in the drawings. Fig. 1 shows the basic constitution of the optical waveguide of the present invention. Fig. 1(A) is a partial perspective view showing the optical waveguide i formed by the cladding layer (the upper cladding layer 3 and the lower cladding layer 4) having a refractive index lower than that of the core portion 2 which determines the optical path direction. The optical waveguide shown in Fig. 1(A), for example, as disclosed in the Japanese Patent Laid-Open Publication No. Hei. No. 199827, may be incorporated by the entire surface of the lower cladding layer 4 of the core portion 2 which is disposed in a specific pattern. It is produced by forming the upper cladding layer 3 by, for example, spin coating. As a basic constitution of the optical waveguide of the present invention, _ denotes a cladding layer including a core layer and a laminate layer on both sides (upper cladding layer 3, lower Qiu by love t丄 diagram, _ contains decision 1 = part of the solid core 2 of the optical waveguide 1 and a cladding 43 having a lower refractive index than the core W. The following is the best practice for implementing the invention in the optical waveguide of the type shown in Figure i(b) The mode is described in detail: the implementation is not limited to this type of optical waveguide. Figure 2 shows the former structure of the reticle mirror in the guide of the optical waveguide - 138984.doc 201009408 Fig. 2 shows a cross section obtained by cutting the optical waveguide 10 along the direction of the optical path in the direction of the optical path, for example, along the line B_B in Fig. 1(B). 〇 includes a mirror structure 14 that defines a mirror surface at an angle of about 45° with respect to the direction of the optical path. The mirror surface 'transmits the outer cladding layer from the surface of the optical waveguide 10 toward the optical waveguide 1 The light incident on the core 12 or the core 12 from the optical waveguide 1 transmits the upper cladding layer 11 toward the light The light path of the light emitted from the surface of the guide 10 is converted to a substantially normal direction with respect to the plane defined by the optical waveguide 10. The mirror structure 14 shown in Fig. 2 is partially completed by the lower cladding layer 13. The ground (through in the vertical direction) is formed by missing. As another example of the prior structure, there is also a mirror structure (not shown) in which one portion of the upper cladding layer 11 is partially or completely missing. It is shown that if one of the cladding layers is completely missing and the mirror surface of the core portion 12 is always exposed to the surrounding environment, the mirror surface is easily stained by the adhesion of dust or dust, and therefore the mirror structure body 4 is usually made of resin. Or the insulating layer is buried in the solid structure. However, if the mirror surface is in contact with the resin or the insulating layer, the difference in refractive index between the mirror surface and the core portion becomes smaller than that in the case of contact with air (refractive index), resulting in The reflection efficiency is lowered. Further, since the structure in which one part of the cladding layer is completely missing becomes a shape in which a "notch" is added to the optical waveguide, if the optical waveguide is deformed, stress is concentrated on the mirror structure' Fig. 3 is a schematic view showing an example of the hollow mirror structure of the present invention in which the mirror surface is defined in the optical waveguide. Fig. 3 is the same as Fig. 2, and shows the core portion 22 in the direction of the optical path to the optical waveguide 20. The cross section obtained by the cutting is performed. The optical waveguide 2 includes a mirror structure body 24 defining a mirror surface, which is 40 to 50. An angle of about 45. By the mirror surface, the outer surface of the optical waveguide 20 is transmitted through the upper cladding (4) to the light incident on the core portion 22 of the optical waveguide optical waveguide 20, or transmitted from the core portion 22 of the optical waveguide 2 The optical path of the light emitted from the upper cladding layer 21 toward the outside of the optical waveguide 2 is converted into a substantially normal direction with respect to the plane defined by the optical waveguide 20. The shape of the hollow mirror structure of the present invention is not limited as long as the direction of the optical path is converted into a substantially normal direction so as to penetrate the upper cladding layer. For example, the hollow mirror structure of the present invention may have a right-angled triangle in addition to the isosceles shape as shown in Fig. 3 along the cross section of the core. Further, the height of the hollow mirror structure is usually in the range of 30 to 80 μm, and as shown in FIG. 3, the height of the hollow mirror structure is substantially the same as the thickness of the core layer including the core portion 22, It may also be larger than the thickness of the core layer. As a case where the degree of twist of the hollow mirror structure of the present invention is larger than the thickness of the core layer, a hollow mirror structure 34 as shown in FIG. 4 (Α) straddles the upper cladding layer 31, the core portion 32, and the lower portion. The three-layered coating layer 33 has a hollow mirror structure 44 as shown in FIG. 4 (Β) across the two layers of the upper cladding layer 41 and the core portion 42, and as shown in FIG. 4(c). The aspect in which the hollow mirror structure 54 is shown across the two layers of the core 52 and the lower cladding layer 53 is within the scope of the invention. As shown in FIGS. 3 and 4, the hollow mirror structures 24, 34, 44, 54 of the present invention are completely sealed by the cladding layers 21, 23, 31, 33, 41, 43, 51, 53. There is no case where the mirror faces of the cores 22, 32, 42, 52 are stained by the adhesion of dust or dust from the surrounding environment. Further, since the inside of the hollow mirror structures 24, 34, 44, 54 of the present invention is filled with air (refractive index = 1), the refractive index difference between the mirror surface and the core portions 22, 32, 42, 52 is 138984.doc -10· 201009408 becomes large enough to suppress reflection losses. Further, since the hollow mirror structures 24, 34, 44, and 54 are not in the shape of the optical waveguide, the mechanical strength of the optical waveguide is remarkably improved. In the actual optical waveguide, as shown in Fig. 5(A), a plurality of the core portions 62 are arranged at a narrow interval, and the money towel empty mirror structure 64 is independently arranged in parallel for each of the anger portions. That is, in this case, since the hollow mirror structure of the present invention does not exert the "notch" effect, the optical waveguide is not hollow.

A portion of the mirror structure is easily broken, and a common hollow mirror structure 74 spanning two or more core portions 72 can be formed as shown in Fig. 5(B). The formation of such a hollow mirror structure 74, particularly in the case of a cutting process or a hot press application, can form a plurality of mirrors at a time and thus has the advantage of a process. As shown in Fig. 6, the optical waveguide of the present invention may be a branched optical waveguide in which the core portion 82 branches. In this case, the hollow mirror structure 84 can be provided at any position of each of the core portions of the branch. The branched optical waveguide itself is a well-known optical waveguide. In the present invention, for example, an optical split-wave type optical waveguide disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. An optical-optical-type optical waveguide as disclosed in Japanese Laid-Open Patent Publication No. 2006-330436, and a combination thereof. For the method of manufacturing the branched optical waveguide, reference can be made to each of the above publications. The optical waveguide of the present invention can be used as a VCSEL (Vertical Cavity Surface Emitting Laser), which is used in two different positions in the same optical path. A hollow mirror structure is disposed, and the light incident from the outer surface of the waveguide 138984.doc •11 - 201009408 is transmitted toward the core of the optical waveguide by a hollow mirror structure, and is bent in a substantially vertical direction. After being transported in the core, the transmitted light is bent in a substantially vertical direction by the hollow mirror structure, and then transmitted from the core of the optical waveguide to the outer cladding to the outside of the optical waveguide. By using the optical waveguide of the present invention, optical signals can be connected between electronic components, whereby the signal transmission path in the electronic device can be increased. The present invention can also be applied to an optical waveguide which converts an optical path [in a plane in which the optical waveguide 9 疋 is drawn as shown in Fig. 7]. In order to bend the optical path in a plane defined by the optical waveguide, the above-described branched optical waveguide in which the core is bent may be used. However, since the radius of curvature of the core has a certain limit (lower limit value), further miniaturization of the optical waveguide device can be achieved by using the mirror structure. Further, Fig. 7 shows a state in which the optical path LP is converted into a substantially right-angle direction. The conversion angle of the optical path LP is not limited, and can be arbitrarily set within a range of 〇18 to 〇, which is easy to understand. Further, the present invention is also applicable to the parent-type waveguide 90 of the plurality of core portions 92 as shown in Fig. 8. In the cross-shaped waveguide 9A shown in Fig. 8, the anger portion 92 is arranged in a checkerboard pattern. However, the cross structure of the core portion 92 is not limited to the orthogonal shape as shown in Fig. 8. In particular, the angle of intersection of the cores 92 can be made greater or smaller than 90. (orthogonal)' arbitrarily changes the interference ratio of light. It is possible to provide one or more optical paths LP in any direction by appropriately arranging the hollow mirror structure 94 in at least one region of the intersection of the core portions 92 of the cross-waveguide 90. Any ubiquitous optical waveguide. Any of the optical path conversion type optical waveguides in which the cross-type waveguide and the hollow mirror structure of the present invention are combined in the above manner can provide a miniaturized optical waveguide sheet with a radius of curvature more easily, 138984.doc • 12-201009408 The density and degree of freedom of the optical wiring of the miniaturized optical waveguide sheet is higher than that of the previously limited core or the optical waveguide sheet to which the optical fiber is bent. In the intersection of the core portion 92 of the cross-type waveguide 90, as shown in Fig. 9(A), it is possible to set one optical path LP in only one direction.

Empty mirror structure 94. Further, as shown in FIG. 9(B), the hollow mirror structure 94 may be provided by partially reflecting one of the light transmitted from one optical path, thereby dividing one optical path Lp into two directions including the straight direction. direction. Further, as shown in FIG. 9(C), a hollow mirror structure 94 that reflects one of the light beams transmitted from one optical path in one direction and an additional reflection of the remaining light in other directions may be provided. The hollow mirror structure 94 branches the strip light path LP into two sides including the straight direction as a combination of the aspect shown in FIG. 9(B) and the aspect shown in FIG. 9(c), such as As shown, the hollow mirror structure 94 that reflects one of the light transmitted from one optical path in one direction and the additional hollow mirror structure that reflects one of the remaining light in other directions can also be provided. Calling, and splitting an optical path LP into three directions including a straight direction. The optical path can also be three-dimensionally formed by stacking a plurality of cross-over materials. An example of such a multilayered cross-type waveguide is schematically shown in Fig. 1A. Fig. 1G(4) shows a partial perspective view in which the core (4) is vertically overlapped by the inter-layer cladding layer %: a multi-layered_intersection-type wave path. The two-layered f-type waveguide includes two core layers including a core portion 92 that determines the direction of the optical path and a cladding portion % having a lower refractive index than the core portion. Between the core layers, a layer having a sufficient thickness is disposed in order to prevent interference of the upper and lower directions of the four portions 92. 138984.doc •13·201009408] γ-cladding layer 95. Specifically, the thickness of the interlayer coating layer % should be set to 曰μΠ1, and the enthalpy should be set to 2 μm or more. An upper cladding layer 93 and a lower cladding layer 97 are disposed on the uppermost portion of the core layer and the lowermost trowel. Each core layer is formed into a cross-type waveguide as shown in FIG. Self-deflending, in each core layer, a hollow mirror structure is appropriately disposed in at least one region of the core parent region, thereby converting the light strip LP or more than two optical paths in a plane to any direction in order to The optical path Lp is three-dimensional, and the hollow mirror structure shown in FIG. 3 can be placed at a specific position so as to optically connect the upper and lower core portions. ® 10 (B) shows an example in which two upper two mirror structures 94 are disposed in such a manner as to optically connect the upper and lower core portions 92. In this case, the light which is converted into the normal direction by the two-mirror structure 94 in one side penetrates the interlayer coating layer 95. Light that has penetrated into the other core portion % located at the upper or lower portion can be propagated in the core portion 92 after being converted into the normal direction by the other hollow mirror structure 94. In order to reduce the optical loss when the interlayer coating layer 95 is penetrated, it is desirable to set the thickness of the interlayer coating 95 to 1 G (four) or less, preferably 5 μηι or less. The core layer of the multilayered cross-linked waveguide shown in the figure is two sheets, but the number of layers of the core layer is not limited and can be freely designed according to the use. By combining any of the optical path conversion type optical waveguides which are multilayered in the above manner with the hollow mirror structure of the present invention, it is possible to provide an optical waveguide sheet having higher density and freedom of optical wiring. In the cross-type waveguide shown in FIG. 8 to FIG. 10, there is a problem that one of the light transmitted on a certain optical path partially enters the other optical path in the intersection and the other optical path, Or the problem of light loss that is scattered by transmitting the sides of the other optical paths that are intersected. As a method for alleviating and eliminating the problem described in the above-mentioned J38984.doc 201009408, it is known that an interference-preventing coating structure is provided which is disposed outside the intersection of the cross-shaped waveguide and has a lower refractive index lower than that of the core. Fig. 11 shows an example of a cross-type waveguide including such an interference preventing cladding structure. As shown in FIG. 11, the anti-interference coating structure having a lower refractive index than the low refractive region of the core is disposed on the periphery of the intersection region, and can be formed by causing the core portion 92 to be fractured before and after the region 92. In this case, the refractive index of the low refractive region is equal to the surrounding cladding portion. In order to reduce the light loss, it is desirable that the interval at which the core portion 92 is broken (the width of the low refractive region) is preferably as small as possible, for example, the interval is set to 10 μm or less. Preferably, it is set to 5 μη or less. On the other hand, in order to make the light reflect the side of the intersection area 92, the low refractive area must have a fixed width. Therefore, according to the refractive index difference between the intersection area 92' and the low refractive area, the width of the low refractive area should also be set. It is at least 1 μηη, preferably 2 μη! or more. Further, if the width of the low refractive region is fixed, the narrower the width of the core portion, the less the interference. By providing such an interference preventing coating structure, light which is reflected on the side surface of the core portion 92 and transmitted on the optical path LP can be reflected on the side surface of the intersecting region 92 as well. Further, the intersecting structure of the core portion 92 of the cross-type waveguide 90 shown in Fig. 11 is a Orthogonal shape, but by providing the interference-preventing covering structure, the crossing angle of the core portion 92 is made larger or smaller than 90. (Orthogonal), the interference ratio also did not change. It is convenient to use the above-described anti-interference coating structure by using an appropriate mask when manufacturing an optical waveguide. For example, in the subsequent irradiation method, when the core layer is formed, 'the mask having the mask closed portions 91 and 9' shown in Fig. 12(A) is used to form a specific width at the outer periphery of the intersection portion of the core portion. The cladding portion 'by this can form an interference-preventing cladding structure while forming the core layer. As shown in Fig. 138984.doc 201009408, the shutter is closed to the ultraviolet light irradiation region 12 (B), and the cores 92, 92 are formed under the illuminating 91, 91' through the reticle. , forming a cladding portion 96 (low refractive region)

In addition to the patterning method described above, the disturbing cladding structure may be formed by, for example, the method of using the excimer laser to cut the intersection of the core and then cutting, and then filling the cut portion. Refractive index adjusting solution ': such as glycerin (refractive index is [called. The refractive index of the low refractive region must be low; the refractive index of the core portion, particularly preferably the same as the refractive index of the cladding portion. On the other hand, if the refractive index is low refractive region If the refractive index is too low, the Fresnel reflection snel reflecti()n) will be generated (the reflection caused by the difference in refractive index is poor. And as the adjustment method of the refractive index, the refractive index due to the temperature can also be utilized. The phenomenon of change is the thermo-optic effect (thermal_Gptieai(10)), or the phenomenon that the refractive index changes when the applied voltage is applied, that is, the electro-optical effect (electro_〇Ptical effect). The hollow mirror structure of the mirror surface of the present invention can be used by It is made by deleting one part of the core of the optical waveguide °P. When one part of the core is missing, it can be taken

For example, the laser processing method disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei 10-300961, for example, the cutting processing method disclosed in Japanese Laid-Open Patent Publication No. Hei 10-300961, for example, Japanese Patent Laid-Open No. Hei. No. 2006-98798 The imprint processing method disclosed in the publication. Right, the method of forming the hollow mirror structure using the laser processing method will be described briefly. The following is a case where a portion of the core of the optical waveguide is irradiated with a laser, and the irradiation region of the laser for the core is relatively changed. Thereby, the time for irradiating the portion of the core where the hollow mirror structure is irradiated with the laser is partially changed, I38984.doc •16· 201009408 and then adjusting the reach of the laser with respect to the depth direction of the core, and removing the core The material is constructed, whereby a hollow mirror structure can be formed. Thus, since the mirror surface can be formed by the irradiation of the laser, the hollow mirror structure can be easily formed in any pattern at any position. As the laser, for example, excimer lasers such as ArF and KrF, YAG lasers, c〇2 lasers, and the like can be cited. The irradiation energy of the laser is determined according to the constituent material of the ", preferably in the range of 100 to 1000 'mJ/cm 2 , particularly preferably in the range of 25 〇 to 700 mJ/cm 2 . If the & energy is within the above range, the composition of the core can be removed in a short time. The irradiation frequency of the laser depends on the constituent material of the core, and is preferably in the range of 50 to 300 Hz, particularly preferably in the range of 5 〇 to 2 〇〇. When the frequency is within the above range, the smoothness of the inclined surface (mirror surface) is particularly excellent. Further, the size of the laser irradiated to the core portion depends on the size of the hollow mirror structure to be formed, and is preferably 80 to 200 μm χ 8 〇 〜 2 〇〇 μιη, particularly preferably 100 to 150 μ ΐ χ 100 to 150 μηη. Thereby, a fine hollow mirror structure can be formed. • in the case of forming a hollow mirror structure for transforming the optical path LP in a plane defined by the optical waveguide 9A as shown in FIG. 7 or FIG. 8, irradiating a portion of the core of the optical waveguide with a laser, The irradiation area of the laser beam with respect to the core portion is relatively changed, whereby the constituent material of the core portion can be removed to form a hollow mirror structure. In this case, it is not necessary to change the degree of arrival of the laser in the depth direction with respect to the core. Fig. 13 shows an example of a method of forming the hollow mirror structure 94 at the intersection of the core portions 9 in the cross-shaped waveguide 9A shown in Fig. 8. As shown in Fig. 13(A), a laser irradiation 邛 98 is set at an angle of a region of the intersection of the core portions 92. Then, the optical waveguide 9 相对 is moved relative to the laser so that the laser irradiation 138984.doc • 17 - 201009408 portion 98 moves on the diagonal of the _ _ _ domain as shown by the arrow in Fig. 13 (A). The type of laser, the amount of illumination, and the frequency of exposure are as described above. The hollow mirror structure 94 shown in Fig. 3(Β) is formed by the laser irradiation unit 98 removing the constituent material of the core. ‘The part of the core of the optical waveguide is lacking. When the knife is missing, the above-mentioned core layer may be separately applied to the core layer including the core portion, or the above-mentioned processing may be performed from the side of the core layer of the laminate body which is laminated and laminated on one side of the core layer. . The carbon guide structure containing the hollow mirror structure of the present invention is completed by further laminating the cladding layer on the core layer on which the mirror surface is formed. In the case of forming a multilayered cross-linked waveguide, it is sufficient that two or more core layers and three or more cladding layers are alternately laminated so that the uppermost portion and the lowermost portion serve as cladding layers. Hereinafter, a method (post-irradiation method) suitable for the production of the optical waveguide of the present invention will be described with reference to Figs. 14 and 15'. First, as shown in Fig. 14, a core film material 1 having a first photoacid generator having a maximum absorption wavelength in the ultraviolet light region is provided. Then, for example, a portion of the core film material 1 is irradiated with a second ultraviolet light having a wavelength of the first absorption maximum wavelength by using the mask 120, whereby the cladding region of the core film material 100 is irradiated (the cladding portion 102) A core layer 1 1 〇 is formed by a refractive index difference with a non-irradiated area (core 丨〇丨). Instead of the photomask 12, a laser (not shown) including a wavelength of the first absorption maximum wavelength may be used, and the core film material 100 may be selectively irradiated to form a core layer i?0. The core mirror portion 1 of the obtained core layer 11 形成 can be formed by the above-described processing method to define a mirror-incorporated hollow mirror structure. Then, as shown in FIG. 15, for example, the cladding film material 200 containing the second photoacid generation 138984.doc -18-201009408 agent is contacted with at least one side of the core layer iio (for example, two sides in FIG. The second photoacid generator has a second absorption maximum wavelength different from the first absorption maximum wavelength. Then, the laminated body 230 composed of the core layer 11A and the cladding film material 200 is obtained by thermocompression bonding the core layer i 1〇 and the cladding film material 200 to each other. Then, the entire surface of the laminated body 230 is irradiated with the second ultraviolet light including the second absorption maximum wavelength and the wavelength of the first absorption maximum wavelength, for example, by using the wavelength cut filter 220. The material 200 is converted into a cladding layer 210 while enhancing the adhesion between the core layer 11A and the cladding layer 210. In the post-irradiation method, 'important is the absorption of the second photoacid generator contained in the core film material 1 〇〇 and the second photo acid generator contained in the cladding film material 200 in ultraviolet light. The maximum wavelength is different. In other words, the first photoacid generator and the second photoacid generator must be different in the absorption maximum wavelength of the ultraviolet light so that the first photoacid generator is irradiated onto the entire surface of the laminate after the thermocompression bonding. The second ultraviolet light does not substantially induce induction, and only the second photo acid generator substantially induces the second ultraviolet light. Here, when the second ultraviolet light including the second absorption maximum wavelength and not including the wavelength of the first absorption maximum wavelength is irradiated, it is convenient to use the wavelength cut filter 220. The wavelength cutoff filter blocks light having a wavelength shorter than a prescribed wavelength, and transmits only light having a longer wavelength than the wavelength. In the case of using such a wavelength cut filter, the first absorption maximum wavelength becomes inevitably shorter than the second absorption maximum wavelength. For example, when using a wavelength cutoff filter of 300 nm, 'as long as the first photoacid generator selects the first absorption maximum wavelength shorter than 300 nm' and the second photoacid generator selects the second absorption maximum wavelength than 300 nm. Longer 138984.doc -19- 201009408 can be. Of course, the post-irradiation method is not limited to the use of such a wavelength cut filter. When the second ultraviolet light is irradiated as a whole, the second absorption maximum wave may be longer than the second absorption maximum wavelength as long as the J photo-acid generator does not substantially induce induction. When the total irradiation of the second ultraviolet light is performed, the photoacid generator does not substantially induce induction, so that the first photoacid generator remaining in the core portion 1〇1 of the core layer does not generate an acid, resulting in an acid. The case where the refractive index difference generated when the core layer 110 is formed is reduced or disappears. That is, the waveguide structure of the core layer is not damaged by the full irradiation of the second ultraviolet light to the laminate. On the other hand, when the core layer 110 is thermocompression bonded, since the Tg (glass transition temperature) of the cladding film material 2 is at a lower state before the ultraviolet light is irradiated, it can be at a lower temperature and a lower pressure. A thermocompression bonding step is performed. The low temperature and low pressure of the thermocompression bonding step are very significant from the viewpoint that the hollow mirror structure of the core is not easily broken. Further, since the second photoacid generator contained in the coating film material 2 is first released by the second beam of external light after the thermocompression bonding step, the acid is first released. The polymerizable group in the coating film material 200 did not react before the thermocompression bonding step. As the core layer film material 1 形成 for forming the core layer 110, if it is a material which changes the refractive index by the irradiation of the external light or the heating, the s Any of the previously known materials. For example, a material containing a first photoacid generator and a polymer which is activated by irradiation of the first ultraviolet light and which releases an acid, which contains a main chain and The main chain branches and acts on at least a part of the molecular structure by the action of the acid released by the activated i-th photoacid generator. 138984.doc •20· 201009408 Debondable group (dissociative side group) which can be detached from the autonomous chain By. Examples of the first photoacid generator include, in addition to tetrakis(pentafluorophenyl)borate or hexafluoroantimonate, tetrakis(pentafluorophenyl)gallate, aluminate, and citrate. Other borate, gallate, carborane, halogenated carborane, and the like. As a commercial item of such a first photo-acid generator, for example, "RHODORSIL (registered trademark, the same below) PHOTOINITATOR 2074 (CAS No. 178233-72-2) available from Rhodia USA Co., Cranbury, NJ. No.)" TAG-372R (di-(2-(2-naphthyl)-2-oxoethyl) ruthenium tetrakis(pentafluorophenyl) available from Toyo Ink Manufacturing Co., Ltd., Tokyo, Japan "Borate: CAS No. 193957-54-9)", "MPI-103 (CAS No. 87709-41-9)" available from Midori Kagaku Co., Ltd., Tokyo, Japan, available from Tokyo "TAG-371 (CAS No. 193957-53-8)" obtained by Toyo Ink Manufacturing Co., Ltd., "TBTPS_TPFPB (three (4-Third) obtained from Tokyo Toyo Synthetic Industrial Co., Ltd.) Phenyl phenyl) ruthenium tetrakis(pentafluorophenyl) borate) and the like. When RHODORSIL PHOTOINITATOR 2074 is used as the first photoacid generator, a high pressure mercury lamp or a metal halide lamp can be preferably used as the first ultraviolet light irradiation means. Thereby, the core film material 100 can be supplied with ultraviolet light having a sufficient energy of less than 300 nm, so that the RHODORSIL PHOTOINITATOR 2074 can be efficiently decomposed to produce the above-mentioned acid. As the above polymer containing a detaching group, transparency can be used sufficiently high (colorless and transparent), and the detachable group can be detached by the action of the acid released by the first photoacid generator, preferably by protons (cutting) ), which causes its refraction 138984.doc • 21 - 201009408 rate change (preferably drop) go to Gan v?) test. As the detachment group, a preferred θ has at least one of a -ο- structure and a Si w w weight in the molecular structure. The above-mentioned soil which is separated from the thiol structure and the side structure is relatively easily separated by an acid, preferably a proton. Among them, the detachment group for reducing the radiance is preferably at least one of the phenyl structures. As (four) - the base,,. The composition of the two-component polymer is, for example, a cyclic hydrocarbon resin such as a urethane-based resin or a benzocyclobutene-based tree (tetra) Οβ, a propylene glycol acid-methyl acrylate resin, or a polycarbonate. , polystyrene, epoxy oxime, lanthanum, polyamin, polystyrene, etc., and one or more of these may be grouped. VIII, mouth (Inter-knife mixture, polymer blend (mixture), copolymer, etc.) makes it particularly preferable to use H-based resin (a rare polymer). From the use of a primary urethane-based polymer as a polymer, the core layer m has excellent optical transport properties: ,,,, and *, and since the fluorene-based polymer has a relatively hydrophobic nature, Therefore, it is possible to obtain the core layer 110 without water absorption. (4) As the norbornene-based polymer, it may be a monomer containing a single repeating unit (all 10 polymers) and containing more than two rare repeating units (copolymer) Any one of such a reduced-thinning polymer may, for example, be: (1) an addition of a primary urethane-type precursor ( ) an addition (co)polymer of a norbornene-type monomer obtained by polymerization, (2) an addition copolymer of a vinylene-type monomer and an ethylene or an olefin - (3) a enelate-type monomer and a non-co-diluted dilute, and other monomers as needed, an addition polymer such as an addition polymer, (4) a ring-opening (co)polymer of a norbornene type monomer, and if necessary (4) Hydrogenated tree of polymer 138984.doc -22- 201009408 fat, (5) ring-opening copolymer of falling ethylenic monomer and ethylene or α-olefin, and deuteration of the (co)polymer as needed a resin, (6) a ring-opening copolymer of a norbornene-type monomer and a non-co-tanning, or other monomer, and a polymer obtained by hydrogenating the (co)polymer as needed The ring-opening polymer. Examples of the polymer include a random copolymer, a block copolymer, an alternating hill polymer, etc. ', ❿ ❿ These norbornene-based polymers can be, for example, open-loop metathesis-polymerized ( R prospect), a combination of ROMP and hydrogenation, a radical or a cation, a polymerization using a cationic palladium polymerization initiator, and a polymerization initiator (for example) It is obtained by all known polymerization methods such as the polymerization of nickel or other transition metals. Among these, as the (four)-based polymer, it is preferred that (four) rare series: addition of each other (total a polymer' and a compound which is represented by the following formula (Structure B): a repeating unit. In addition to having a higher transparency and manageability, the olefinic polymer has a higher ..., f is particularly good at reaching the most embarrassing point of view:

B The above-described norbornene-based polymer can be preferably re-formed, for example, by using a lower body (the following is a single-synthesis of a urethane-based primary-crosslinking (four) rare monomer). In order to obtain a relatively high refractive index, the molecular 蛀槿 ^ ^ ^ ^ 通常 通常 通常 通常 通常 通常 通常 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 138 A monomer of a gas atom is used to synthesize (polymerize) a polymer. On the other hand, in order to obtain a polymer having a relatively low refractive index, it is usually selected to have a burnt group, an I atom, an ether structure (_ group), and 7 oxygen in a molecular structure. A synthetic (polymeric) polymer having a structure such as a sintered structure. As a norbornene-based polymer having a relatively high refractive index, a repeating unit containing an aromatic group and a phenyl group is preferred. The above (4) an ethylenic polymer: The high read rate. The aralkyl group (arylalkyl group) contained in the repeating unit of the aryl group (4) may, for example, be a benzyl group, a phenethyl group, a phenylpropyl group, a phenylbutyl group or a naphthylethyl group. Naphthylpropyl 'ethyl and propyl are preferably a benzyl or phenethyl group. The above contains a repeating unit. It is preferred that the pentene-based polymer has an extremely high refractive index. Further, the olefin-based polymer is preferably a repeating unit containing a thiol group. The lowering of the olefinic polymer is higher in flexibility. Therefore, by using the above-mentioned reduced I polymer, high flexibility (flexibility) can be imparted to the optical waveguide. Examples of the alkyl group contained in the repeating unit include a propyl group, a butyl group, a heptyl group, an octyl group, a decyl group, and a decyl group, and particularly preferably a hexyl group. Further, the alkyl groups may be linear. Or any of the branched forms. By including a repeating unit of hexyl decene, it is possible to prevent the refractive index of the whole of the polymer of the stagnation polymer from decreasing, and to maintain a high flexibility. The polymer is excellent in the transmittance of light in the above-mentioned wavelength region (particularly, the wavelength region in the vicinity of 85 Å (10)). It is preferable as a preferred specific example of such a gynecological polymer. Homopolymer, homopolymer of phenethyl fumarate, homogenization of nodal reduction己基138984.doc •24- 201009408 Copolymer of cebutene and phenethylnorfosene, copolymer of hexylpentene and sulfhydryl, etc., but not limited to these. In particular, as a cause A polymer having a refractive index which is desorbed by the detachment of the detachment group can be preferably a homopolymer of diphenylmethyl phosphatase, or a hexyl group and a diphenyl fluorenyl group. Further, the core layer film material for forming the core layer 110 may further contain: • a polymer which is compatible with the above polymer and has a refractive index different from that of the above polymer In the present case, the first photoacid generator releases a weakly coordinating anion upon irradiation of the first violet light, and the activation of the procatalyst is caused by the action of the weakly coordinating anion. The temperature is lowered and the activation viscosity is further heated, whereby the procatalyst can be activated to polymerize the monomer. Such a single system is a compound which reacts in an irradiation region of the outer light to form a reactant, and by the presence of the reactant, can be produced in the photo (4) domain and the untouched (four) domain towel of the core layer 110. Fold (four) difference. The reactant 'is exemplified by a polymer formed by polymerizing a monomer in a polymer (group f), a crosslinked structure formed by crosslinking the polymers with each other, and polymerized and self-polymerized in the polymer. At least one of a branching structure (branched polymer or side chain (side group)) of a branch. Here, in the muo, when the refractive index of the desired irradiation region becomes high (four), a polymer having a relatively low refractive index is used in combination with a monomer having a higher refractive index with respect to the polymer, and the desired irradiation is performed. In the case where the refractive index of the region becomes low, a polymer having a relatively high refractive index is used in combination with a monomer having a lower refractive index with respect to the polymer. Furthermore, the fact that the refractive index is "higher" or "lower" does not mean a refractive index of 138984.doc •25· 201009408, and indicates the relative relationship of a certain material to each other. And i, when the refractive index of the irradiation region in the core layer 110 is lowered by the reaction of the monomer (reaction of the reactant), the portion becomes the cladding portion 102, and when the refractive index of the irradiation region rises, This portion becomes the core portion 101. The monomer is not particularly limited as long as it is a compound having a polymerizable moiety, and examples thereof include a vinylene-based monomer, an acrylic acid (methacrylic acid) monomer, and an epoxy monomer. A vinyl monomer or the like may be used in combination of two or more of these. It is preferable to use (4) a rare monomer as a monomer. By using a reduced-dilute monomer, a core layer 11 (optical waveguide element) excellent in optical transmission performance and excellent in heat resistance and flexibility can be obtained. The olefinic monomer is a general term of a monomer containing at least one decylene skeleton represented by the following structural formula A, and examples thereof include compounds represented by the following structural formula c:

0 A

Ri -R?

-R3 C R4 In the above formula, 'a' represents a single bond or a double bond, and Ri to r4 each independently represent a hydrogen atom, a substituted or unsubstituted hydrocarbon group, or a functional substituent, and the claws represent an integer of 0 to 5. Wherein, when a is a double bond, any of r and &r; r2, and any of R3 and R4 does not exist. Examples of the unsubstituted hydrocarbyl group include, for example, a straight bond 138984.doc • 26 - 201009408 or a branched alkyl group having a carbon number of 1 to 10 (Cl to CiG), a linear chain or a branched chain. The alkenyl group having a carbon number of 2 to 10 (C2 to C1G), a linear or branched alkynyl group having a carbon number of 2 to 10 (C2 to C1Q), and a carbon number of 4 to 12 (C4 to Ci2) a cycloalkyl group, a cycloalkenyl group having a carbon number of 4 to 12 (C4 to Ci2), an aryl group having a carbon number of 6 to 12 (C6 to C12), and an aralkyl group having a carbon number of 7 to 24 (C7 to C24) Other than the above, R 1 and R 2 , R 3 and r 4 may each independently be an alkylene group having a carbon number of one. Specific examples of the alkyl group include mercapto, ethyl, propyl, isopropyl, butyl, isobutyl, t-butyl, t-butyl, pentyl, neopentyl, hexyl, heptyl. , octyl' thiol and sulfhydryl, but not limited to these. Specific examples of the alkenyl group include a vinyl group, an allyl group, a butenyl group, and a cyclohexenyl group, but are not limited thereto. Specific examples of the alkynyl group include an ethynyl group, a 1-propynyl group, a 2-propynyl group, a 1-butynyl group and a 2-butynyl group, but are not limited thereto. Specific examples of the cyclic alkyl group include a cyclopentyl group, a cyclohexyl group and a cyclooctyl group, but are not limited thereto. Specific examples of the aryl group include a phenyl group, a naphthyl group and an anthracenyl group, but are not limited thereto. Specific examples of the aralkyl group include a sulfhydryl group and a phenethyl group (phenethyl), but are not limited thereto. Further, specific examples of the alkylidenyl group include a methylidenyl group and an ethylidenyl group, but are not limited thereto. As the substituted hydrocarbon group, a part or all of a hydrogen atom contained in the above hydrocarbon group may be substituted by a dentate atom, that is, a halohydrocarbyl group, a perhalohydrocarbyl group, or 138984.doc •27- 201009408 Halogenated hydrocarbon group such as perhalocarbyl. Among the halogenated hydrocarbon groups, the dentate atom which is a substituted hydrogen atom is preferably at least one selected from the group consisting of a fluorine atom and a bromine, and more preferably a fluorine atom. Specific examples of the perhalogenated hydrocarbon group (all-co-hydrocarbon group or perhalogenated carbon group) include perfluorophenyl group, perfluorodecyl group (trifluoromethyl group), perfluoroethyl group, and perfluoro group. Propyl, perfluorobutyl, perfluorohexyl and the like. Further, the number of carbon atoms of the dentate alkyl group is from 1 to 10, and the number of carbon atoms is preferably from 〜2 〇. That is, the dentate alkyl group may be partially or completely dentated, linear or branched, and represented by the formula: -Czx" 2Z+1. Here, X" independently represents a halogen atom or a hydrogen atom, and Z represents an integer of 1 to 20. Further, the substituted hydrocarbon group 'is, in addition to being substituted by a halogen atom, further has a linear or branched carbon number of ^" (^~(:^ alkyl or haloalkyl, aryl and naphthene) a substituted cycloalkyl group, an aryl group and an aralkyl group (ara_alkyl), etc. Further, 'as a functional substituent', for example, -(CH2)n-CH(CF2)2-0-

Si(Me)3, -(CH2)n-CH(CF3)2-0-CH2-0-CH3, -(CH2)n-CH(CF3)2- 0-C(0)-0-C(CH3 3, -(CH2)nC(CF3)2-0H, -(CH2)nC(0)-NH2, -(CH2)nC(0)-Cl, -(CH2)nC(0)-0-R5, _(CH2)n_〇_ r5 ' -(CH2)„-0-C(0)-R5 > -(CH2)nC(0)-R5 ' -(CH2)n-0-C(0)- OR5, _(CH2)n-Si(R5)3, -(CH2)n-Si(OR5)3, -(CH2)n-0-Si(R5)3 and -(CH2)nC(0)-0R6 Here, in the above formulas, 11 represents an integer of 0 to 10, and R5 each independently represents a hydrogen atom, a linear or branched alkyl group having a carbon number of 1 to 20 (C wide C 2 Å). , a linear or branched carbon number of ~C20), a halogenated or perhalogenated alkyl group, a linear or branched carbon number 138984.doc • 28- 201009408

Is an alkenyl group of 2 to 10 (C2 to Cl.), a linear or branched carbon group having a carbon number of w (c2 C10), and a carbon number of 5 to 12 (c5 to d ring-ring base, carbon) The number of 6~U(C6~Cl4) aryl groups, carbon number 6~i4 (c6~c"), self-chemical or fully-alloyed aryl group or carbon number 7~24 (C7~C24) In the case of #, the hydrocarbon group represented by r5 represents the same smoky group as the hydrocarbon group shown by r1 to r%. As shown by ^~^, the hydrocarbon group represented by R5 may be toothed or fully dentated. For example, when tR5 is a toothed or fully A-calcined group having a carbon number of 1 to Zunguang, Rk is represented by the formula: -CZX''2Z+1. Here, z&x" is defined as above, and at least one of x is a halogen atom (e.g., a bromine atom, a gas atom or a fluorine atom). Here, the perhalogenated alkyl group means a group in which all of X" are halogen atoms in the above formula, and specific examples of the group include a trifluoromethyl group, a dichloromethyl group, -C7F15, and _CnF23. However, it is not limited to these. Specific examples of the all-A-aryl group include a five-gas group and a pentafluorophenyl group, but are not limited thereto. Further, examples of R6 include _C(CH3)3, •Si(CH3)3, -Ci^RYo-CHrCf^, and a cyclic group of the following:

Here, 'R7' represents a hydrogen atom or an alkyl group having a linear or branched carbon number of 5 (Ci to C5). The alkyl group may, for example, be methyl, ethyl or propyl 138984.doc 201009408, 1-propyl, butyl, i-butyl, tert-butyl, decyl, tert-pentyl or neopentyl. Further, in the cyclic group represented by the above-mentioned formula 4, a specific example in which (4) K乍 is r6 is formed between a single bond extending from the ring structure and an acid substituent, and examples thereof include a fluorenylmethylcyclohexyl group. Isobornyl, 2-methyl-2.isofosyl, 2·methyl-2-alkanoyl, tetrahydrofurfuranyl, tetrahydrogen-pyranyl (tetrahydr〇pyr_state 3 3-oxocycl〇hexan〇nyl, mevalonic lactonyl, ethoxyethyl, etc. Further, as it can be enumerated as follows: Cyclopropylmethyl (DCpm), dimethylcyclopropylmethyl (Dmcp), etc.: Y —CH A (Dcpm)

Y - C(CH3) (Dmcp) ❹ Further, as the monomer, a crosslinkable monomer (crosslinking agent) may be used instead of or in combination with the above monomers. The crosslinkable single system can produce a compound of a crosslinking reaction in the presence of a catalyst precursor as described below. By using a crosslinkable monomer', there is an advantage that the crosslinkable monomer is polymerized more rapidly, so that the time required for the formation (process) of the core layer 110 can be shortened, and the crosslinkable monomer is heated even though It is also not easy to evaporate, so the increase in vapor pressure can be suppressed. Further, since the crosslinkable monomer is different, the heat resistance of the core layer 110 can be improved. • Excellent, wherein the cross-linking property is low and the compound (4) contains a compound represented by the above structural formula A (lower-based double bond). As cross-linking 138,984.doc -30 - 201009408 福福佛 monomer's compounds having fused multicyclic ring systems and compounds linked to Unked multicydic systems. Examples of the compound of the continuous polycyclic ring system (crosslinking norbornene-based monomer of the continuous polycyclic ring system) include the following compounds:

In the above formula, Y represents a methylene group (_CH2_) group, and m represents an integer of 〇~5. Among them, when m is 0, γ is a single bond. Furthermore, for simplification, norbornadiene is considered to belong to a continuous polycyclic ring system and contains polymerizability.

Those who lower the terpene double bond. Specific examples of the compound of the continuous polycyclic ring system include the following compounds, but are not limited thereto: 138984.doc

C

On the other hand, examples of the compound which is a polycyclic ring system (crosslinkable norbornene-based monomer which is bonded to the polycyclic ring system -31 to 201009408) include the following compounds:

In the above formula, a each independently represents a single bond or a double bond, and m each independently represents an integer of 0 to 5, and R9 each independently represents a divalent hydrocarbon group, a divalent ether group or a divalent decyl group. Also, η is 〇 or 丨. Here, the term "bivalent substituent" means that the end portion contains two bonds which can be bonded to the structure of the enephene. Specific examples of the hydrocarbyl group include an alkylene group represented by the formula: _(CdH2d)_ (d is preferably an integer representing 丨~...) and a divalent aromatic group ( 3⁄4 base). The divalent stretching group is preferably a linear or branched carbon group having a carbon number of 1 to 1 Torr (C丨 to c丨〇), and examples thereof include a methylene group and an ethyl group. , propyl, butyl, pentyl, hexyl, hexyl, decyl, decyl. Further, the hydrogen atom of the branched alkyl group main chain is substituted by a linear or branched alkyl group. On the other hand, as the divalent aromatic group, a divalent phenyl group and a divalent naphthyl group are preferred. . Further, the divalent ether group is a group represented by _R'〇_R丨. Here, the R-knife is independent and represents the same as R9. Specific examples of the linked polycyclic ring-based compound include fluorine-containing compounds represented by the following formulas 9 and 9 except for the compounds represented by the following formulas 9, 10, and 12; a compound (crosslinking norbornene-based monomer containing fluorine), but is not limited to these:

138984.doc -32- 201009408

The compound represented by the formula 10 is dimethyl bis[bicyclo[2.2.1]hept-2-en-5-methoxy]decane, and in other nomenclature, it is called dimethyl bis(pentene).曱oxy) decane (abbreviated as "SiX"):

In the above formula, η represents an integer of 0 to 4;

138984.doc -33- 201009408

138984.doc •34- 201009408 In the above formula, m and η represent integers from 1 to 4, respectively;

Among the various crosslinkable norbornene-based monomers, particularly preferred is dimercaptobis(northene methoxy)decane (SiX). The SiX has a sufficiently low refractive index with respect to the alkylpentene-based polymer containing a repeating unit of an alkyl norbornene and/or a repeating unit of an aralkyl drop-ene. Therefore, the refractive index of the irradiation region irradiated with the first ultraviolet light described below can be reliably lowered to form the covering portion 102. Further, the difference in refractive index between the core portion 1〇1 and the cladding portion ι 2 can be increased, so that the characteristics (optical transmission performance) of the core layer 110 can be improved. Furthermore, • The above monomers may be used singly or in any combination. The primary catalyst is a substance which can initiate the reaction (polymerization reaction, crosslinking reaction, etc.) of the above monomers, and is activated by the action of the first photoacid generator activated by the irradiation of the first ultraviolet light. A substance whose temperature changes. As the primary catalyst (also referred to as a catalyst precursor), any compound may be used as long as the activation temperature changes (rises or falls) with the irradiation of the first ultraviolet light, and it is particularly preferable that the activation temperature is accompanied by i The decrease in ultraviolet light irradiation. Thereby, it is possible to form the optical waveguide 1 ίο with the heat necessary for forming the core layer 138984.doc 35· 201009408 at a relatively low temperature, and it is possible to prevent a decrease in characteristics (optical transmission performance) of the other layers. As such a primary catalyst, a primary catalyst containing at least one of the compounds represented by the following formulas (10) and (10) (mainly based on the compound) can be preferably used: (E(R)3)2Pd (Q) ) 2 (ia) [(E(R)3) aPd(Q)(LB)b]p[wCA]r (ib) where la, lb, E(R)3 represents the 15th group of neutral electrons a ligand of (4)w donor, E represents an element selected from Group 15 of the periodic table, r represents a moiety containing a hydrogen atom (or one of its isotopes) or a hydrocarbon group, and Q represents a selected from a carboxylate, a thiocarboxylic acid. Anionic ligands for esters and dithiocarboxylates. Further, in Formula Ib, LB represents a Lewis base, WCA represents a weakly coordinating anion, a represents an integer of 1 to 3, b represents an integer of 〇~2, and a total of 3 and 1? is 1 to 3, p And r represents the number of the balance of the charge of the palladium cation and the weakly coordinating anion. As a typical original catalyst according to formula la, it can be enumerated

Pr) 3) 2, Pd (OAc) 2 (P (Cy) 3) 2, Pd (02CCMe3) 2 (P (Cy) 3) 2, Pd (OAc) 2 (P (CP) 3) 2, Pd ( 02CCF3)2(P(Cy)3)2, Pd(02CC6H5)3(P(Cy)3)2, but is not limited to these. Here, Cp represents a cyclopentyl group, and Cy represents a cyclohexyl group. Further, as the original catalyst represented by the formula Ib, it is preferred that p and r are compounds each independently selected from the integers of 1 and 2. Pd(OAc)2(P(Cy)3)2 is exemplified as a typical catalyst according to the formula ib. Here, Cy represents a cyclohexyl group, and Ac represents an ethylenic group. 138984.doc -36- 201009408 These primary catalysts allow the monomer to react efficiently (in the case of a lowering of an olefinic monomer), a polymerization reaction or a crosslinking reaction is efficiently carried out by an addition polymerization reaction, etc.).

Further, in the state where the activation temperature is lowered (active potential state), as the original catalyst, it is preferable that the activation temperature is lower than the original activation temperature by 1 〇 to 8 > c or so (preferably 10 〜) About 50 ° C). Thereby, the refractive index difference between the core portion 101 and the cladding portion 102 can be reliably generated. As the primary catalyst, it is preferred to include at least one of Pd(OAC)2(P(i-Pr)3)2APd(〇Ac)2(p(Cy)3)2 (mainly The original catalyst. In addition, in the following, Pd(0Ac)2(P(i_Pr)3)2 may be abbreviated as "pdw", and milk (7)" may be abbreviated as "Pd785". When the core film material 100 is formed, a <layer varnish containing the above polymer, the photoacid generator and other desired additives is prepared. Examples of the solvent used for the preparation of the varnish for the anger layer include diethyl bis, diiso (tetra), tetrahydro n- ketone dimethyl ether methyl solvohexane, pentylene, furan, and pyridyl I, 2·. Dimethoxyethane (DME), i,4-dioxane (THF), tetrahydropyran (THp), anisole, digiyme, diethylene glycol oxime ( Solvents such as carbh〇1), such as ether solvent, ethyl cellosolve, and phenyl cellosolve are solvent hydrocarbons such as solvent alkane, heptane, and cyclohexane, and aromatics such as toluene and mesitylene. Group of flue-cured solvents, (唆, η, 呼, thiophene, methylpyrrolidone, one of the compounds of the family of heterocyclic compounds, hydrazine, hydrazine-dimethylformamide (dmF), Ν Ν _, - A A hydrazine-based solvent such as acetylamine (DMA), a solvent such as dichloromethane, chloroform or hydrazine, a halogen compound such as ethyl bromide, an ester solvent such as ethyl acetate or ethyl acetate, 138,984.doc - 37- 201009408 Various organic solvents such as a solvent such as methyl sulfonium (DMSO) or sulfolane, or a mixed solvent thereof, etc. Further, if necessary, a sensitizer is added to the layer varnish. The sensitizer has the function of increasing the sensitivity of the first photoacid generator to the second ultraviolet light, reducing the time or energy required for activation (reaction or decomposition), or The wavelength of the first ultraviolet light is converted to a wavelength suitable for the activation thereof. The sensitizer is appropriately selected depending on the sensitivity of the photoacid generator or the peak wavelength of absorption of the sensitizer, and is not particularly limited. Examples include scallions, anthrones, anthraquinones, phenanthrenes, chopsticks, benzophenones, and fluorescein (9, etc.) such as 9,1 〇-dibutoxy oxime (CAS No. 76275_14_4). ), red fluorene, indanthrene sulphur ♦ 9-ketone (th1 〇 xanthen-9-ones), etc., may be used alone or as a mixture. As a sensitizer Specific examples thereof include 2 isopropyl-9H-sulfur oxonone, 4 isopropyl -9H thioxanthone, Bu propyl I propoxy 9-oxopurine, and (4) h_thiazine. Or such a mixture of sputum, 9,1 〇--butoxy oxime (DBA) can be obtained from the Kawasaki of the Kanagawa Prefecture. Set containing the sensitizer is not particularly limited, but is preferably at least 〇.〇1 mass%, more preferably more than 〇.5% by mass, and further more preferably 1 mass% or more. Further, the upper limit value is preferably 5% by mass or less. Furthermore, Yan Feng ffi «L. added an antioxidant sword to the enamel in the beta layer. Borrow this. ' Prevents the generation of undesired free radicals or the natural oxygen of the polymer. The effect of the obtained core layer 11 can be improved. Make

For this antioxidant, the movable ^L J can be used better from Tarrytowni, NY 138984.doc -38- 201009408

Ciba (registered trademark, the same applies hereinafter) IRGANOX (registered trademark, the same applies hereinafter) 1076 and Ciba IRGAFOS (registered trademark, the same applies 168) obtained by Ciba Specialty Chemicals Co., Ltd. Further, as the other antioxidant, for example, Ciba Irganox (registered trademark, the same as below) 129 'Ciba Irganox 1330 'Ciba Irganox 1010 'Ciba Cyanox (registered trademark 'the same below) 1790, Ciba Irganox (registered trademark) 3 114, Ciba can be used. Irganox 3125 and so on.

The varnish for the core layer can be prepared by the following coating method and the desired film thickness, so that the viscosity of the varnish for the core layer (normal temperature) is preferably about 100 to 10,000 cp. It is about 150~5000 cP, and it is better to reach the range of 200~3500 CP to adjust the amount of solvent appropriately. The core film material 100 can be formed by applying the above-mentioned core layer varnish to a support substrate. As the support substrate, for example, a stone substrate, a dioxide dioxide substrate, a glass substrate, a quartz substrate, a polyethylene terephthalate (PET) film or the like can be used. Examples of the coating method include a doctor blade method, a spin coating method, a dipping method, a table coating method, a spray coating method, a dressing II coating method, a curtain coating method, and a die coating method, but are not limited thereto. The thickness of the coating is not specified, and the thickness thereof is about 5 to 200 μmη in the state before drying, preferably about 15 to 125 μm, and more preferably about 25 to 1 μm. Then, the core film material 1GG can be obtained by removing the solvent (desolvation) in the coating film, i.e., drying. As a method of removing the solvent (drying), for example, heating, placing at atmospheric pressure or reduced pressure T, 138984.doc _39· 201009408 (injection) of an inert gas material, etc., preferably β, by comparison, can be compared: For example, a method of heating a hot plate is used. Time to remove the solvent. In the case of heating, the heating temperature is better than the cooked barrier.

Seven or seven spoons C or so, better 30~45V

about. Also, the heating time is better than the C 吁 15~60 minutes, and the cup &amp; 曰 15~30 minutes.炅 疋 For the obtained core film material 1 可, the substrate can be peeled off and selectively irradiated with ultraviolet light. ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Irradiation of ultraviolet light: the covering portion 102. Therefore, an opening (a hole) equivalent to the pattern of the bag 102 to be formed is formed in the first cover 120. The opening is formed so that the first opening is irradiated. The transmissive portion of the external light transmission may be formed in advance (otherwise formed) (for example, a plate-shaped photomask), or may be formed into a core film material by, for example, a vapor phase film formation method or a coating method (4). As an example of the preferred one of the photomasks 12, a fresh mask made of quartz glass or a PET substrate or the like can be used, which is formed by a vapor phase film formation method (steaming, _, etc.). Among the metal films and the like, it is particularly preferable to use a photomask or the reason that the fine pattern can be formed with high precision and is easy to handle, thereby facilitating the improvement of productivity. It can be used to produce a photochemical reaction (change) of the bismuth photoacid generator. In particular, the 丨 ultraviolet light is based on The type of the photo-acid generator to be used and the type of the sensitizer when the sensitizer is used are appropriately selected, and it is preferably used in the range of 2 〇〇 to 45 〇 nm in the range of 138,984. Doc •40· 201009408 It has a peak wavelength. Also, the irradiation amount of the i-th ultraviolet light is preferably about 99 J/cm2, more preferably about 〜2 to 6 J/cm2, and even better. 0.2 to 3 J/cm 2 or so. Thereby, the ith photoacid generator can be reliably activated. When the first layer of ultraviolet light is irradiated to the core film material 1 through the mask 120, the first ultraviolet light is irradiated. The detaching agent present in the irradiation region reacts (bonds) or decomposes due to the action of the ith ultraviolet light, thereby releasing (generating) a cation (proton or other cation) and a weakly coordinating anion (WCA). Then, the cation makes The detachment group itself detaches from the main chain or cuts (light fading) in the middle of the molecular structure of the detachment group. Thereby, the number of detachment groups in the complete state in the irradiation region is smaller than that in the unirradiated region, and the refracting thereof The second refractive index is lower than the first refractive index Further, at this time, the refractive index of the unirradiated region 940 maintains the refractive index of the first refractive index. Thus, a refractive index difference (second refractive index <th order refractive index) is generated between the irradiated region and the non-irradiated region. Thereby, the core portion 101 (unirradiated region) and the cladding portion 丨02 (irradiation region) are formed. Further, in this case, the irradiation amount of the first ultraviolet light is preferably about 1 to 9 J/cm 2 , and more Preferably, it is about 3 to 6 J/em2, and more preferably about _6 to 6 J/cm2. By this, it is possible to reliably activate the release agent. Then, as needed, the core film material 1 The heat treatment is carried out. The heat-off treatment removes (cuts) the release group from the polymer, for example, from the irradiated region, or rearranges or crosslinks in the polymer. Further, at this time, it is considered that one part of the detachable group remaining in the coating portion 1〇2 (irradiation region) is further detached (cutting, therefore, by performing such heat treatment, the anger portion 1〇1 and the cladding portion can be coated The difference in refractive index between the portions 102 becomes larger. 138984.doc 41 201009408 The heat treatment is not particularly limited in the heat treatment, and the heat storage is not particularly limited, and the right one is better. Further, the heating time is set to be self-irradiating area φ古八&amp; l μ *... In addition to the detachment group which has been detached (cut), it is not particularly limited, and preferably 〇. 5 to 3 hours Left and right, it is better to be around J. In addition, 'option may be added one or more times of heat treatment (for example, 15 〇 ~ 縦 Cxl ~ 8 hours or so). Further, for example, before performing heat treatment In the state, a sufficient refractive index difference or the like can be obtained between the core portion ι〇ι and the cladding portion 102, and such a heating step can be omitted. The core portion 1〇1 and the cladding portion are formed through the above steps. The core layer 110 of 102. Thereafter, the core layer 11 is peeled off from the support substrate. In the sample, the core portion 101 and the cladding portion 1〇2 are composed of a reduced-fat polymer as a main material, and the reduced-thin polymer contains a main chain and a branch in the autonomous chain, and at least a part of the molecular structure can be The detachment group which is detached from the autonomous bond, the core portion 1G1 and the coating portion (10) are different in the number of the detachment groups in the state of the bond with the main chain, and the refractive index of the core portion is different. Further, when a monomer and a primary catalyst which are compatible with the above polymer and have a refractive index different from the above polymer are contained, the first ultraviolet light is irradiated to the core film material 100 via the mask 120. The ith photoacid generator present in the irradiation region irradiated with light reacts or decomposes due to the action of the first ultraviolet light, thereby releasing (generating) a cation (proton or other cation) and a weakly coordinating anion (WCA). Then, The cation or weakly coordinating anion changes (decomposes) the molecular structure of the original catalyst present in the irradiation region, and converts it into an active latent state (potential active state). Here, the potential of the activity State (or potential active state) of the original 138984.doc -42· 201009408 Catalyst refers to the catalyst precursor in the following state, that is, the activation temperature is lower than the original activation temperature, if the temperature does not rise, that is, at room temperature In this case, the monomer cannot be reacted in the irradiation region. Therefore, if the core film material 100' is stored at a temperature of, for example, about _4 〇ec after the irradiation of the first ultraviolet light, the state can be maintained without The monomer is reacted. Therefore, a plurality of core film materials 1 照射 after the first ultraviolet light is irradiated are prepared in advance, and the heat treatment is performed on the same, whereby the core layer i 10 can be obtained, and the point is obtained. Further, when the light having higher directivity such as laser light is used as the second ultraviolet light, the use of the photomask 12 can be omitted. Then, the core film material 100 is subjected to heat treatment (first heat treatment). Thereby, in the irradiation region, the original catalyst of the active latent state is activated (becomes an active state), thereby causing a reaction (polymerization reaction or crosslinking reaction) of the monomer. Then, when the monomer is reacted, the monomer concentration in the irradiation region is gradually lowered. Thereby, the monomer concentration differs between the irradiated region and the non-irradiated region, and in order to eliminate the difference, the monomer diffuses from the unirradiated region and concentrates in the irradiated region. As a result, in the irradiation region, the monomer or its reactant (polymer, crosslinked structure or branched structure) increases, and the structure derived from the monomer causes a large influence on the refractive index of the region, thereby causing the irradiation region. The second refractive index whose refractive index is lower than the first refractive index decreases. Further, as a monomer polymer, an addition (co)polymer is mainly formed. On the other hand, in the unirradiated region, by diffusing the monomer from the region toward the irradiation region, the monomer 1 is reduced, so that the polymer exhibits a large influence on the refractive index of the region, thereby causing refraction of the unirradiated region. The rate is higher than that of the third 138 138984.doc •43· 201009408 The third index of refraction rises. Thereby, a refractive index difference (second refractive index <third refractive index) is generated between the irradiation region and the non-irradiation region, thereby forming the core portion 1〇1 (unirradiated region) and the cladding portion 102 (irradiation region). The heating temperature in which the heating is buried is not particularly limited, but is preferably about 30 to 80 ° C, more preferably about 40 to 60 Torr. Further, the heating time is preferably set such that the reaction of the monomer in the irradiation region is substantially completed. Specifically, it is preferably about 2 hours, more preferably about hours. Then, the core layer film material 100 is subjected to a second heat treatment. Thereby, the original catalyst remaining in the unirradiated region and/or the irradiation region is activated (in an active state) directly or in association with the activation of the first photoacid generator, thereby causing the monomer remaining in each region to be generated. reaction. Thus, the stabilization of the obtained core portion 〇1 and the coating portion 102 can be achieved by reacting the early bodies remaining in the respective regions. The heating temperature in the second heat treatment is not particularly limited as long as it can activate the primary catalyst or the phthalic acid generator, and is preferably about 70 to 100 ° C, more preferably 80. ~90t: around. Also, the heating time is better, about 5 to 2 hours, and more preferably about 0.5 M hours. Then, the third heat treatment was performed on the core film material 1A. Thereby, it is possible to reduce the internal stress generated in the obtained core layer 110 or to stabilize the μ portion 101 and the cladding portion 102. The heating temperature in the third heat treatment is preferably set to be higher than the heating temperature in the second treatment by 2 (TC or more 'specifically, preferably about 90 to 180 ° C' is preferably 120~ 16 (about TC. Further, the heating time 13S984.doc -44 - 201009408 is preferably about 0.5 to 2 hours, more preferably about ow hours. Through the above steps, the core including the core 101 and the cladding portion 102 is formed. Layer 11 〇. Thereafter, the core layer 110 is peeled off from the support substrate. As the coating film material 2 用以 for forming the cladding layer 210, for example, an acrylic resin, a methacrylic resin, or a polycarbonate is exemplified. a cyclic olefin resin such as an ester, a polystyrene, an epoxy resin, a polyamine, a polyimine, a polybenzoxazole, a benzocyclobutene resin or a pentene resin, and the like Among them, the above-mentioned species or two (four) are added and used together (polymer mixture, polymer blend (mixture), copolymer, composite (layered body), etc.). Among them, especially heat resistance is excellent. From the viewpoint of the use, it is preferred to use a ring resin, a polysimine, a polybenzoxaphenone A cyclic olefin-based resin such as a resin or (d) a rare resin, or the like (including those of the above), and a terpene-based resin (northene-based polymer) is particularly preferred. Since the heat-reducing property of the reduced-difficult polymer is extremely high, even when a conductive layer (not shown) is formed on the optical waveguide 240, the optical waveguide 240 using φ as a constituent material of the cladding layer 210 is When the conductor layer is processed to form wiring, heating is performed when the optical element is mounted, and the coating layer 210 can be prevented from being softened and deformed. Further, since the reduced-olefin polymer has high hydrophobicity, it is difficult to produce The coating layer 210 which changes in size due to water absorption, etc. Further, it is also preferable from the viewpoint of lowering the rare polymer or reducing the rare-type monomer as a raw material, and being easy to obtain. The material having the decene-based polymer as the coating layer is the same as the material 138984.doc •45·201009408 which is preferably used as the constituent material of the core layer 11 , so the coating layer 210 Close to the core layer 110 The properties are higher, and the interlayer peeling between the coating layer 210 and the core layer 110 can be prevented. Thereby, the optical waveguide 240 excellent in durability can be obtained. As such a reduced-thin polymer, for example, (1) Addition (co)polymer of norbornene-type monomer obtained by precipitation (co)polymerization, (7) addition copolymer of tetra-type monomer and ethylene or heart olefin, (3) An addition polymer such as a reduced copolymer of a reduced monomer and a non-co-diene, and optionally other monomers, (4) a ring-opening (co)polymer of a norbornene monomer And a resin obtained by hydrogenating the (co)polymer as needed, (5) a ring-opening copolymer of a phlegm-type monomer and ethylene or an α-olefin, and optionally the (co)polymer a hydrogenated resin, (6) a ring-opening copolymer of a pendant olefinic monomer and a non-conjugated diene or other monomer, and a polymer obtained by hydrogenating the (co)polymer as needed Open-loop polymer. As such a polymer, a random copolymer, a block copolymer, an alternating copolymer, etc. are mentioned. The pentene-based polymer can be, for example, subjected to ring-opening metathesis polymerization (ROMP), a combination of ROMP and hydrogenation reaction, polymerization of a radical or a cation, polymerization using a cationic palladium polymerization initiator, or the like. It is obtained by all known polymerization methods such as polymerization of a ruthenium polymerization initiator (for example, a polymerization initiator of nickel or another transition metal). Among these, as the pendant olefin polymer, an addition (co)polymer is preferred. The addition (co)polymer is also preferable from the viewpoint of transparency, heat resistance and flexibility. In particular, the hail-lowering polymer is preferably a repeating unit containing a reduced oxime, and the repeating unit of the fluorene-containing phenene contains a substituent containing a polymerizable group or a substituent containing an aryl group. 138984.doc •46· 201009408 By using a repeating unit containing a pendant olefin, the repeating unit of the lowering olefin contains a substituent comprising a polymerizable group in the coating layer 2, and the decene-based t compound can be obtained. At least a portion of the polymerizable groups are crosslinked with each other directly or via a crosslinking agent. Further, the norbornene-based polymer may be crosslinked with the polymer for the core layer 110 by the kind of the polymerizable group, the kind of the crosslinking agent, the kind of the polymer used for the core layer 10, and the like. . In other words, it is preferred that the above-mentioned reduced-thickness polymer is cross-linked on at least a part of the polymerizable group. As a result, the strength of the cladding layer 210 itself or the adhesion of the cladding layer 21〇 to the core layer 11〇 can be further improved. As such a repeating unit of a vinylene containing a polymerizable group, a repeating unit of a norbornene containing a substituent of an epoxy group and a substituent containing a substituent containing a (fluorenyl) acryl group are preferred. At least one of a repeating unit of an alkene and a repeating unit of a norbornene containing a substituent of a oxoalkyl group. These polymerizable groups are preferred from the viewpoints of high reactivity among various polymerizable groups. Further, when a repeating unit containing two or more such fumarenes containing a polymerizable group is used, the crosslinking density can be further increased, and the above effects are more remarkable. On the other hand, by repeating units containing norbornene, the repeating unit of the norbornene contains a substituent containing an aryl group, and since the hydrophobicity of the aryl group is extremely high, the coating layer 21 can be more reliably prevented. Dimensional changes caused by water absorption, etc. Further, since the aryl group is excellent in fat solubility (lipophilic property) and has high affinity with the polymer used in the core layer 110 as described above, it is possible to more reliably prevent the coating layer 210 from being interposed between the core layer 110 and the core layer 110. The interlayer is peeled off, whereby the optical waveguide 240 having more excellent durability can be obtained. 138984.doc -47- 201009408 Further, the decene-based polymer is preferably a repeating unit containing an alkyl group. Further, the 'alkyl group' may be either linear or branched. By the repeating unit containing an alkyl norbornene, the flexibility of the decene-based polymer becomes high, so that the coating layer 210 can be imparted with high flexibility (flexibility). Further, the norbornene-based polymer containing a repeating unit of an alkylpyridene is also preferable from the viewpoint of excellent transmittance of light in the above-mentioned wavelength region (particularly, a region near 850 nmw). Further, the norbornene-based polymer used for the coating layer 210 preferably has a relatively low refractive index, and the repeating unit of the norbornene contains an aryl group if it is a repeating unit containing a norbornene. The substituent generally exhibits a tendency to have a higher refractive index, but it is also possible to prevent an increase in the refractive index by a repeating unit containing an alkylpentene. Therefore, as the vinylene-based polymer used for the coating layer 210, it is preferred to be represented by the following 16 to 19 or 23;

In the above formula, R represents a condensed group having a carbon number of H ,, a represents an integer of 〇 〜 3 , and ^ represents an integer ' p / q of 2 〇 or less; and the olefinic system represented by the above i6 Among the polymers, it is particularly preferable that R is a compound having a carbon number of 4 to 1 fluorene, and a and b are each a compound of 1, for example, butyl pentene and sulfhydryl J 138984.doc • 48 - 201009408 Copolymer of glyceryl ether norbornene, copolymer of norbornene, thiol-reducing copolymer, etc.; copolymer, hexyl decylene and methyl glycidyl ether thiol hydrazine and methyl glycidyl ether Fuene

V0 In the above formula, R represents an alkyl group having a carbon number of 1 to 1 Å, ... represents a hydrogen atom or a methyl group, a represents an integer of 〇 〜 3, and p/q is 2 Å or less; Among the olefin-based polymers, particularly preferred are those wherein R is an alkyl group having 4 to 1 carbon atoms and a is 1, such as butyl norbornene and acrylic acid 2 (5-norbornyl). a copolymer of a methyl ester, a copolymer of hexyl decylene and a 2-(5-norbornyl) methyl acrylate, a copolymer of fluorenyl decylene and an acrylic acid 2 (5-northenyl) methyl ester, etc. ;

In the above formula, R represents an entertainment having a carbon number of 1 to 1 Å; and a group of X independently represents a burning group having a number of 1 to 3, and a represents an integer of ～3, and p/q is 20 or less; Among the norbornene-based polymers represented by the above formula 20, particularly preferred are those having a carbon number of 4 to 10, a being 1 or 2, and X being a methyl or ethyl group, 138,984. Doc • 49- 201009408 For example, a copolymer of butyl norbornene with a decylethyl trimethoxy decane, a copolymer of hexyl decene with norbornenyl ethyl dimethyl decane, decyl decene Copolymer with norbornyl ethyltrimethoxydecane, copolymer of butyl norbornene and triethoxydecyldecene, copolymerization of hexylpentene and triethoxydecyl decene a copolymer of a fluorenyl decylene and a triethoxy decyl decyl urethane, a copolymer of a butyl pentene and a trimethoxy decyl decene, [I a copolymer of a base group, a copolymer of a sulfhydryl group, a copolymer of a sulfhydryl group, a copolymer of a decyl group, and a copolymer of a trimethoxy group

A1 and A2 are each independently but not simultaneously in the same formula, and R represents an alkyl group having a carbon number of 丨~1〇, and represents a substituent of the substituent represented by the following 22 to 24; P / as 20 or less;

In the above formula, a represents an integer of 0 to 3, and b represents an integer of Bu 3;

138984.doc .50- 201009408 In the above formula, R1 represents a hydrogen atom or a methyl group, and a represents an integer of 〇~3;

In the above formula, X each independently represents an alkyl group having a carbon number of 丨3, and a represents an integer of 〇~3; and as the norbornene-based polymer represented by the above-mentioned formula 19, for example, butyl norbornene is exemplified. Any of hexyl decene or fluorenyl thiol and 2-(5-northenyl)methyl acrylate, and nordecenylethyltrimethoxy decane, triethoxy decyl alkyl a terpolymer of either olefin or trimethoxydecyl pentene; any of butyl norbornene, hexyl decene or decyl pentene and acrylic acid 2_(5• a terpene methyl ester, and a terpolymer of methyl glycidyl ether norbornene; any of butyl norbornene, hexyl sulphate or decyl pentene and methyl glycidyl ether a ternary copolymer of any one of a terpene, a decyl-ethylenoxy decane, a triethoxy decyl pentene or a dimethoxy fluorenyl pentene;

In the above formula, R represents an alkyl group having a carbon number of 1 to 10, R2 represents a hydrogen atom, a methyl group or an ethyl group, "Ar represents an aryl group, X1 represents an oxygen atom or a methylene group, and X2 represents a carbon atom or a stone atom". a represents an integer of 〇~3, where c represents an integer of 1 to 3, and 138984.doc -51 - 201009408 p/q is 20 or less; among the descending (tetra) polymers represented by the above 23, particularly preferred is R is an alkyl group having 4 to 1 carbon atoms, ^ is an oxygen atom, &amp; is a halogen atom, Ar is a phenyl group, and R2 is a methyl group, ..., and a compound such as butyl group (tetra) and diphenyl group Copolymer of (4) f-oxyl copolymer, hexyl ruthenium and i-phenylmethyl-reduced (tetra) methoxy calcined copolymer, fluorenyl group (tetra) and diphenylmethyl group-methoxyl group Or R; is an alkyl group having a carbon number of 4 to 10, which is a methylene group, &amp; is a carbon atom, 'Ar is a phenyl group, R2 is a hydrogen atom, & is 〇, and a compound such as butyl (tetra) Copolymer of alkene with phenethyl group (tetra), copolymer of hexyl group (tetra) and phenethyl group (four), copolymer of fluorenyl group (tetra) and ethyl group (four); and, p/q or P/q+r As long as it is 2 inches or less, it is better 15 or less is more preferably about 0.1 to 10; whereby the effect of a plurality of repeating units containing a variety of decene can be sufficiently exerted. The above-described decene-based polymer has a refractive index lower than the above-described characteristics, and the cladding layer 210 is mainly composed of the above-mentioned noisecene-based polymer, whereby the light of the optical waveguide 24 can be further improved. Transmission performance. Further, in the case where the decene-based polymer contains a repeating unit of norbornene, the repeating unit of the norbornene contains a substituent containing a (meth)acryl fluorenyl group, and the (fluorenyl) acrylonitrile group may be mutually Crosslinking (polymerization) is relatively easy by heating, and the crosslinking reaction of the (meth)acrylic groups can be promoted by mixing the radical generating agent in the coating film material. As the radical generating agent, for example, 2,2-dimethoxy-1,2-diphenylethane-1-one, 丨'^bis (t-butylperoxy)_3,3 can be preferably used. , 5 • trimethylcyclohexane and the like. 138984.doc -52· 201009408 Further, when the (tetra) olefinic polymer comprises a repeating unit of (4), the repeating unit of the (tetra) olefin contains a repeating unit of a (tetra) olefin containing a substituent of an epoxy group, or contains In order to directly crosslink the polymerizable groups, the photoacid generator described above is mixed with the above-mentioned photoacid generator in the coating film material to cause epoxy or oxygenation by the action of the substance. The base of the base of the dream can be cross-linked. In order to crosslink the epoxy groups with each other, the (meth)acryloyl groups or the alkoxyalkyl groups, and at least one of the binders in the coating film material. The polymerizable group corresponding to each polymerizable group may be used. As the parent agent for the epoxy group having 3 epoxy groups, for example, 3 'glycidoxypropyltrimethoxy ketone (Y_Gps), polywei epoxy resin, or the like can be preferably used. As the crosslinking agent containing a (meth) acrylonitrile group, for example, fluorenyl methacryloxypropyltrimethyl decane tricyclo[52ι〇26] decane dimethyl diacetate can be preferably used. Vinegar, tripropylene glycol diacrylic acid vinegar, etc. As the crosslinking agent containing a siloxane group, for example, a decane coupling agent such as 3 glycidyloxypropyltrimethoxynonane or 3-aminopropyltrimethoxydecane can be preferably used. Further, various additives may be added (mixed) to the coating film material 2 crucible. For example, the monomer and the primary catalyst listed in the above-mentioned core film material 100 may be mixed in the coating film material 2?. Thereby, the monomer can be reacted in the coating layer 210, so that the refractive index of the coating layer 21 is changed. In particular, if a monomer containing a crosslinkable monomer is used as the monomer, at least a part of the pendant olefin polymer can be carried out via the crosslinkable monomer in the coating layer 21 138. Doc • 53- 201009408 Cross-linking. Further, the norbornene-based polymer may be crosslinked with the polymer used for the core layer 11 by the type of the crosslinking agent, the type of the polymer used for the core layer i, and the like. As other additives, the antioxidants mentioned above are mentioned. By mixing the antioxidant, deterioration of the coating film material 200 (northene-based polymer) due to oxidation can be prevented. The second photoacid generator included in the cladding film material 200 can be used for the absorption maximum wavelength (second absorption maximum wavelength) used in ultraviolet light and the first absorption maximum wavelength of the ith photoacid generator. . It is preferable that the second absorption wavelength is longer than the first absorption maximum wavelength, and particularly preferably the second absorption maximum wavelength is less than 300 nm' and the second absorption maximum wavelength is 300 ηηι or more. Examples of such a second photoacid generator include, in addition to tetrakis(pentafluorophenyl)borate or hexafluoroantimonate, tetrakis(pentafluorophenyl)gallate, aluminate, and citrate. Classes, other borate salts, gallates, carboranes, halogenated carboranes, and the like. As a commercial item of such a second photo-acid generator, for example, "TAG_ 3 82" which can be obtained from Tokyo Toyo Ink Manufacturing Co., Ltd., and can be obtained from Midori Kagaku Industrial Co., Ltd., Tokyo, Japan. "NAI-105 (CAS No. 85432-62-7)" and so on. When TAG-3 82 is used as the second photoacid generator, a high pressure mercury lamp or a metal toothed lamp can be preferably used as the second ultraviolet light irradiation means. Thereby, the coating film material 200 can be supplied with ultraviolet light of a sufficient energy of 300 nm or more, whereby the TAG-382 can be efficiently decomposed to generate the above-mentioned acid. 138984.doc -54- 201009408 When the cladding film material 200 is formed, a varnish for a coating layer containing the above polymer, a second photoacid generator, and other desired additives is prepared. The solvent used for the preparation of the varnish for a coating layer is the same as the solvent used in the preparation of the varnish for the above-mentioned anger layer. Further, if necessary, a sensitizer having the following functions may be added to the 'monthly paint', that is, the sensitivity of the second light 1 generating agent to the second ultraviolet light is increased, and the activation (reaction or decomposition) is reduced. 2) The required 0 temple or 6 amount ' or the wavelength of the 2nd ultraviolet light is converted to a wavelength suitable for its activation. The sensitizer is the same as the sensitizer added to the above-mentioned core varnish. Further, if necessary, an antioxidant for preventing the generation of undesired radicals or the natural oxidation of the polymer may be added to the varnish for the coating layer. As such an antioxidant, the same as the antioxidant added to the above-mentioned varnish for core layer can be mentioned. The varnish for the coating layer can be prepared by the following coating method = the desired film thickness, so that the viscosity of the coating varnish (normal temperature) is preferably about 1 G0 to 10 GG0 eP, and more The good thing is to reach 15. ~5 faces left and right, and further preferably, the amount of solvent is appropriately adjusted by means of a mode of about 200 to 35 〇〇 cP. The coating film material 200 is formed by applying the coating layer to the support substrate with a varnish. As the support substrate, for example, a stone substrate, a two-t-cut substrate, a glass substrate, a quartz substrate, a polyethylene terephthalate (PET) film, or the like can be used. Examples of the coating method include, but are not limited to, a knife method, a spin coating method, a dipping method, a table coating method, a spray coating method, an applicator coating method, a curtain coating method, and a die method. The thickness of the coating film is not particularly limited, and the thickness thereof is about 5 to 200 μηι in a state before drying, and 138984.doc 55-201009408 is preferably ίο~just_about, more preferably 15 to 65. Call it left and right. Then, the coating film material 200 can be obtained by removing the solvent (desolvation) in the coating film, i.e., drying. The method of removing the solvent (drying) may, for example, be a method of heating, placing under atmospheric pressure or reduced pressure, or spraying (injecting) an inert gas or the like. It is preferred to use, for example, a heating method using a hot plate. Thereby, the solvent can be removed relatively easily and in a short time. In the case of heating, the heating temperature is preferably 25 to 6 (about rc, more preferably about 3 to 45 tons. Also, the heating time is preferably 15 to 6 minutes or so, preferably 15 to 15). 30 minutes or so. _ The obtained coating layer (4) is peeled off from the support substrate, and then brought into contact with one or both sides of the core layer 110 to be thermally connected to each other. For thermocompression bonding, 5 is convenient. For example, a laminating machine can be used. When the post-irradiation method is used, the coating film material 2 which is subjected to thermocompression bonding is in a state in which the Tg of the external light is low, and thus it is possible to The thermocompression bonding step is not performed at a low temperature and a low pressure which are damaged by the hollow mirror structure provided in the core portion. The temperature of the thermocompression bonding is usually set to 80 to 13 (rc, preferably 100 to 120 ° C). The pressure of the thermocompression bonding is usually set to be in the range of 0.1 to 10 MPa, preferably 0.1 to 4 MPa. Further, when the thermocompression bonding is performed, the pressure is not obtained. The acid is released from the second photoacid generator contained in the coating film material 2〇〇. In the pressure bonding step, a vacuum atmosphere or vacuum is used as needed to minimize the gas components such as air remaining in the coating film material 2〇〇 and the core layer u〇&lt; Therefore, in order to suppress the generation of voids in the contact portion and obtain the laminate body 230 having good flatness, 138984.doc • 56- 201009408: good * in this case, the inside of the hollow mirror structure is also reduced in air or true. Second, as long as the collapse of the coating layer does not occur, that is, as long as the hollow mirror structure is not deformed, there is no problem. The reduced pressure environment or vacuum can be applied to the coating layer, the material 200 and the core layer, Or when the cladding film material is thermocompression bonded to the core, or both, the application of the reduced pressure environment or vacuum can be achieved by vacuum lamination, vacuum pressing, etc. Then, for example, wavelength cut filter is used. The light sheet 220 irradiates the entire surface of the laminated body 230 with the second ultraviolet light including the second absorption maximum wavelength and not including the wavelength of the first absorption maximum wavelength, thereby converting the cladding film material 2〇〇 into a package. Coating 210, while lifting the core layer i 1〇 The adhesion to the cladding layer 21 is, for example, when the first absorption maximum wavelength is less than 3 〇〇 nm and the second absorption maximum wavelength is 300 nm or more, the entire surface of the laminated body 23 can be irradiated. The second ultraviolet light having a wavelength of 300 nm or more. The acid is released from the second photo-acid generator contained in the coating film material 200 by the total irradiation of the second ultraviolet light. On the other hand, the core layer 11 The i-th photoacid generator contained in the crucible is substantially incapable of inducing the second ultraviolet light, so there is no case where the refractive index of the core portion 1〇 changes or decreases (over the cladding portion). The acid released from the photoacid generator catalyzes the crosslinking reaction of the polymerizable group of the constituent polymer of the coating film material 2〇〇. For example, when the constituent polymer contains an epoxy group, 'the cationic polymerization of the epoxy group is started by the acid released from the second photoacid generator' and is inside the cladding film material 2〇0. The crosslinked structure is formed such that the strength of the cladding layer 21 is improved. Further, in the case where the constituent polymer of the adjacent core layer 110 contains a polymerizable group (for example, an epoxy group) which can participate in the crosslinking reaction, the above cationic polymerization also affects 138984.doc -57-201009408 to the core The layer 110 is formed with a crosslinked structure between the cladding layer 210 and the core layer i 1 , so that the adhesion between the layers is improved. The amount of irradiation of the external light is preferably from about 10 to about 1000 J/cm2, more preferably from about 10 to about 500 J/cm2, and even more preferably from about 1 to about 3 Å/cm2. Thereby, the second photoacid generator can be reliably activated. Thereafter, the laminate 23 is subjected to heat treatment as needed to complete the crosslinking reaction of the cladding layer 210. This heat treatment can simultaneously process a plurality of laminates 23 by batch processing (oven heating) without pressurization, so that the productivity of the optical waveguide 240 is improved. The heating temperature is not particularly limited, but is preferably about 100 to 180 C, more preferably about 12 to 15 C. Further, the heating time is set to be sufficient to stop the crosslinking (hardening) reaction, and is not particularly limited, and is preferably about 30 to 120 minutes, more preferably about 45 to 9 minutes. 16 shows an optical waveguide module 350 including the optical waveguide and the light-emitting element and/or the light-receiving element. As shown in FIG. 16, the optical waveguide module 35 of the present invention includes an optical waveguide and a light-emitting element and/or a light-receiving element 355. The optical waveguide includes an upper cladding layer 35 1 , a core portion 352 , a lower cladding layer 353 , and a hollow mirror structure 354 ′. The light-emitting element and/or the light-receiving element 355 are mounted on the optical waveguide by a support member 357 . . By the mirror surface of the hollow mirror structure of the present invention, the light-emitting portion 3 56 of the self-luminous element 355 is transmitted through the upper cladding layer 351 to enter the light of the core portion 352 of the optical waveguide, or the upper portion of the optical waveguide 352 is transmitted from the upper portion of the optical waveguide. The optical path LP of the light emitted from the light receiving portion 356 of the light receiving element 35 to the cladding layer 351 is converted into a substantially vertical direction. For the light-emitting element and/or the light-receiving element in the optical waveguide module, reference is made to Japanese Laid-Open Patent Publication No. 2005-321560, Japanese Patent Laid-Open No. 2004-193610, and Japanese Patent Laid-Open No. 138984. 201009408 No. 9-148621. Fig. 17 shows an optical element mounting substrate 360 including the above optical waveguide module and circuit board. As shown in Fig. 17, the optical element mounting substrate 36 of the present invention includes an optical waveguide module A and a circuit board B. As shown in FIG. 17, the optical waveguide module a includes an optical waveguide and a light-emitting element and/or a light-receiving element 365. The optical waveguide includes an upper cladding layer 361, a core portion 362, a lower cladding layer 363, and a hollow mirror structure 364. The light-emitting element and/or the light-receiving element 365 are mounted on the optical waveguide via the metal protrusion 367 and the electrode pad 368. The conductor circuit 369 formed on the circuit board b is electrically connected to the light-emitting element and/or the light-receiving element 365 via a metal protrusion 367 and an electrode pad 368 (not shown). As an operation of mounting the substrate 360 as the optical element, for example, when the conductor circuit 369 outputs a k number to the light-emitting element 365, the light-emitting element 365 converts the electric signal into an optical signal, and then emits the optical signal from the light-emitting portion 366. The emitted light signal is transmitted through the upper cladding layer 361, and the optical path LP is converted into a substantially vertical direction by the mirror surface of the hollow mirror structure 364 and then incident on the core portion 362 of the optical waveguide. Thereafter, the incident pupil s is transmitted in the core portion 362, and the optical path lp is transmitted through the mirror surface of the other hollow mirror structure 364 (not shown) into a substantially vertical direction, and then transmitted through the upper cladding layer 361. The light is incident on the light receiving portion 366 of the other light receiving element 365. The optical signal incident on the light receiving element 365 is converted into an electrical signal and then input to another conductor circuit 369 (not shown). Thereby, the optical signal is transmitted at high speed between the two conductor circuits. For details of such an optical element mounting substrate, for example, it is possible to refer to Japanese Laid-Open Patent Publication No. Hei. No. Hei. 18(A) to (〇 denotes an optical element mounting substrate 37A, the optical element mounting substrate 370A's optical waveguide module includes electrodes and circuits for the light-emitting element and/or the light-receiving element 138984.doc-59·201009408 A conductive receiving structure is provided between the electrodes of the substrate. By providing such a receiving structure, the mounting precision is high, the transmission loss of light is reduced, and the distance between the light-emitting portion of the optical element and the core of the optical waveguide is shortened, so that the light is The transmission efficiency is improved, and the thinning of the optical element mounting substrate is also facilitated. In the aspect shown in FIG. 18(A), the optical waveguide module includes an optical waveguide and a light-emitting element and/or a light-receiving element 375, the optical waveguide The upper cladding layer 371, the core portion 372, the lower cladding layer 373, and the hollow mirror structure 374 are included, and the light-emitting element and/or the light-receiving element 375 are mounted on the optical waveguide via the metal protrusions 377. In the optical waveguide, A receiving structure portion (through hole) having a size sufficient to accommodate the metal protrusion portion 377 is formed. The conductor circuit 379 formed on the circuit board is connected to the light emitting element and/or the light emitting element via the metal protrusion portion 377 received in the receiving structure portion. The optical element 375 is electrically connected. In the aspect shown in Fig. 18(A), the optical waveguide module and the circuit board are joined by a conductive adhesive 378. The aspect shown in the figure is in the receiving structure portion. The conductor terminal portion for partially ensuring the height of the conductor portion is different from that shown in Fig. I. Further, the pattern shown in Fig. 18(c) is formed by the conductor terminal 380 formed throughout the reception. The structure and the fact that the light-emitting element and/or the light-receiving element do not contain the metal protrusion are different from those shown in Fig. 18 (A). The optical element mounting substrate 37 shown in Figs. 18(A) to (C) The basic operation of the cymbal is the same as the operation of the optical component mounting substrate described above with reference to Fig. 17. For details of the optical component mounting substrate including such a pure structural portion, reference can be made to Japanese Patent No. 149743 filed by the applicant of the present application. (2) The name of the invention, "optical element mounting board, optical circuit board, and optical element mounting board", was filed on May 3rd of the following year. 138984.doc 201009408 Embodiments Hereinafter, the implementation of the present invention will be described more specifically. Example 1. Example 1 · Contains hollow Preparation of core layer of structure &lt;Synthesis of hexyl decanoene (HxNB)/diphenylmethylnorsyl methoxy decane' (diPhNB) copolymer&gt; 'HxNB (CAS No. 22094-83) -3) (9.63 g, 0.054 mol), diPhNB (CAS No. 376634-34-3) (40.37 g, 0.126 Mo), 1-hexene (4.54 g, 0.054 mol) and toluene ( 150 g) was added to a 500 mL syringe bottle in a dry box and mixed, and further heated to 80 ° C in an oil bath to stir to prepare a solution. Pdl446 (1.04xl0_2 g, 7.2〇χ1 0·6 mol) and N,N-dimercaptobenzidine tetrakis(pentafluorophenyl)borate (DANFABA) (2·30χl0·2g, 2.88χl (r5 Mo The ear was added to the solution in the form of a concentrated di-methane solution (0.1 mL). The added mixture was stirred in a magnetic stirrer at 80 ° C for 2 hours, after which the reaction mixture (toluene solution) was shifted. In a larger beaker, if sterol (1 L) is added as a poor solvent, the fibrous white solid precipitates. The solid is filtered and collected, and then vacuumed in an oven at 60 ° C. After drying, a product having a dry mass of 19.0 g (yield: 38%) was obtained from the product, and the molecular weight of the product was measured by gel permeation chromatography (GPC: THF solvent, polystyrene conversion). Mass average molecular weight (Mw) = 1 8,000, and number average molecular weight (Mn) = 60,000. The product was measured by 1H-NMR and determined to be HxNB/diPhNB copolymer represented by the following structural formula (x = 0.32). , y = 0.68, n = 5). Using the prism to legalize the copolymer 138984.doc • 61 · 2 01009408 The refractive index was measured. The refractive index was 1.5695 in the TE mode (Transverse Electric mode) and the refractive index in the TM mode (Transverse Magnetic mode) was 1.5681. .

&lt;Preparation of varnish for core layer&gt; A 10 wt% copolymer solution (30 g) was prepared by dissolving the above HxNB/diPhNB copolymer in trisylbenzene under yellow light. In addition, unlike the glass bottle of 100 mL capacity, HxNB (42.03 g, 0.24 mol) and bisnorthene nonyloxy dimethyl decane (SiX, CAS No. 376609-87-9) were added. 7.97 g, 0.026 mol), and further adding two antioxidants [Irganox 1076 (0.5 g) and Irgafos 168 (0.125 g) manufactured by Ciba Corporation) to obtain a monomer antioxidant solution. To the above copolymer solution 30.0 g, the above monomer antioxidant solution 3.0 g, Pd(PCy3) 2 (OAc) 2 (Pd785) (4.95 x l 〇 -4 g, 6.29 x 10 7 mol, di-methane methane) was added. 0.1 mL), and the first photoacid generator that absorbs a maximum wavelength of 220 nm [RHODORSIL (registered trademark) PHOTOINITIATOR 2074 (CAS No. 178233-72-2) (2.55xl0·3 g, 2.5 1χ 1 (Γ6莫) The ear, methylene chloride (0.1 mL), was uniformly dissolved, and then filtered using a 0.2 μm pore size filter 138984.doc • 62-201009408 to prepare a core varnish. &lt;core layer (single layer optical waveguide) Production of element film] The anger layer was sprayed with 10 g of varnish onto a film of 250 μπΐ2 polyethylene terephthalate (PET), and the core layer was expanded with a varnish to a substantially fixed thickness. The coating film of the varnish for the core layer (the thickness before drying is 7 〇μπι). The coating film and the PET film are placed together on a hot plate 'heated at 5 rc for 45 minutes' to thereby evaporate the toluene to obtain a thickness. It is a dry coating film of 5 〇μιη. It uses a two-pressure mercury lamp or a metal halide lamp, and passes through the containing portion and the cladding portion. Corresponding to the mask of the specific opening pattern, the dried coating film is irradiated with the first ultraviolet light having a wavelength of less than 300 nm or less than 365 nm (the irradiation amount is 500 mJ/cm 2 ). The coated film after the irradiation is placed in an oven. The heat treatment is carried out by initially heating at 50 ° C for 30 minutes and then heating at 85 ° C for 30 minutes and then heating at 150 ° C for 60 minutes. It can be initially at 5 Torr. When the heating was 10 hours, the waveguide pattern in the coating film was visually confirmed. After the heat treatment, the coating film was peeled off from the PET film to form a core layer (single-layer optical waveguide element film). &lt;Adjustment of excimer laser &gt; Before the formation of the hollow mirror structure shown in Fig. 3 in the above-mentioned core layer, the molecular laser device (ATLX-3 00SI, manufactured by ATL LaserTechnik Co., Ltd.) was aligned in the following manner to make it set to the excimer After the pressure in the chamber in the laser device is temporarily less than 1 mbar, the chamber is filled with ArF premixed gas (Ar: 4.13%, f2: 0.17%, helium: the remainder) to 65 〇〇 mbar. In the above excimer laser device The laser light is adjusted by concentrating the laser light 138984.doc -63 - 201009408 through a lens, and then passing it through a stainless steel mask that is processed to form a square hole of 1000 x 1000 μπι. The projection is reduced, eventually making the illuminated area substantially 100x100 μπι. The excimer laser was oscillated at a frequency of 100 Hz, and the output of the laser light that finally reached the processing surface (through the reticle) was measured using a power meter (PE50-DIF-U, manufactured by OPHIR Japan Co., Ltd.), and the result was 3 · 5 mW. &lt;Mirror processing&gt; The surface of the core layer (single-layer optical waveguide element film) (thickness 50 μm, core layer width 50 μηι) on the opposite side to the mirror-finished surface is attached to an adhesive substrate (Magic) -resin : manufactured by Toyo Corporation, Inc.). The substrate is placed on a fine movement stage of the excimer laser device, and the fixed surface of the substrate is sucked and fixed. Then, the micro-motion stage is rotated so that the longitudinal direction of the core of the three-layer waveguide coincides with the movable direction of the micro-motion stage, and the alignment is adjusted so that the center of the laser irradiation area (100×100 μηι) reaches the center of the core. The way to adjust. Then, while the He gas as the assist gas flows to the mirror processing portion at 2.0 L/min, the micro-motion stage is moved by 150 μm in the optical path direction at 16 μm/sec, and the laser light having a frequency of 100 Hz is irradiated thereto. . After the irradiation, the core layer was cut along the core, and the cross section was observed, and as a result, a 45-degree inclination was formed with respect to the plane defined by the core layer. Further, the inclined surface (mirror surface) was observed using a scanning electron microscope (SEM, Scanning Electron Microscope), and as a result, almost no smear accumulated on the mirror surface (laser ablation) Object), the mirror is very smooth. 2. Preparation of coating film material 138984.doc -64- 201009408 <Synthesis of decyl-norbornene (DeNB)/mercapto-glycidyl ether decene (AGENB) copolymer> DeNB (CAS No. No. 22094-85-5) (16.4 g, 0.07 mol), AGENB (CAS No. 3188-75-8) (5.41 g, 0.03 mol) and toluene (58.0 g) were added to the 500 mL capacity in the dry box. The serum bottles were mixed and further heated to 80 ° C in an oil bath to be stirred to prepare a solution. To the solution was added (?6-toluene)Ni(C6F5)2 (0.69 g, 0.0014 mol) in a solution of benzene (5 g). The added mixture was stirred in a magnetic stirrer and stirred at room temperature for 4 hours. To the mixture was added toluene (87.0 g) and stirred vigorously. Thereafter, the reaction mixture (the benzene solution) was transferred to a larger beaker, and if methanol (1 L) as a poor solvent was added dropwise thereto, a fibrous white solid precipitated. The solid matter was collected by filtration, and then vacuum-dried in an oven at 60 ° C to obtain a product having a dry mass of 17.00 g (yield: 87%). The molecular weight of the product was measured by GPC (THF solvent, polystyrene conversion), and as a result, Mw = 75,000 and Mn = 30,000. The product was measured by 1H-NMR and determined to be a DeNB/AGENB copolymer represented by the following structural formula (x = 0.77, y = 0.23, n = 10). The refractive index of the copolymer was measured by a ruthenium coupling method. • The result was a refractive index of 1.5153 in the TE mode at a wavelength of 633 nm, and a refractive index of 1.5151 in the -TM mode.

138984.doc -65- 201009408 &lt;Preparation of varnish for coating layer&gt; Under the yellow light, the above copolymer 1 〇 g was dissolved in dehydrated sputum to prepare 2 〇

Wt〇/. Copolymer solution (50 g). Two antioxidants were added to the solution [Irganox 1076 (0.01 gmrgaf〇s ι68 (〇〇〇25 g)) manufactured by Ciba and a second photoacid generator with a maximum absorption wavelength of 335 nm (manufactured by Toyo Ink Manufacturing Co., Ltd.). After TAG-382, 0.2 g), it was uniformly dissolved, and then filtered using a 〇2 μπι pore size filter to prepare a coating varnish. &lt;Preparation of coating film material&gt; 10 g of varnish was injected onto a PET film having a thickness of 100 μm disposed on a water platform, and the coating layer was spread with a doctor blade to a substantially fixed thickness to form a coating film for the coating varnish (before drying) The thickness of the coating film was 30 μm. The coating film was placed in a dryer together with a PET film, and heated at 5 (rc for 15 minutes) to evaporate the toluene to obtain a dried coating film having a thickness of 2 μm. The dried coating film is peeled off from the PET film to form a coating film material. 3. The three-layer optical waveguide is manufactured in one layer on each surface of the core layer (20×20 cm in size) containing the hollow mirror structure. One piece of the above coating film material (size 25x25 cm). The three-layer laminated body was put into a laminator set to 12 ° C, and thermocompression-bonded for 5 minutes under a pressure of 0.2 MPa. Thereafter, the three-layer laminated body was returned to room temperature and normal pressure, and the three-layer laminated layer was laminated. A PET film having a thickness of 100 μm is disposed between the body and the high pressure mercury lamp as a wavelength blocking filter for blocking wavelengths below 300 nm. Then, the second ultraviolet light is irradiated from the high pressure mercury lamp through the wavelength cut filter (the amount of irradiation is 100 mj/cm2). After the irradiation, the three-layer laminated body is not placed 138984.doc 66-201009408, and placed directly into the dryer (placement time is 〇 minute), and heated at 150C for 30 minutes to complete the package. The hardening stratification of the coating film material and the adhesion between the core layer/cladding layer strengthens the Pingping stomach # /, 1 will insert the double-sided adhesive tape into a copper layer (conductor layer) with a thickness of 45 and a three-layer laminate The two were joined by roll lamination, and then the following evaluation was performed. 4. Evaluation ° &lt;Transmission loss&gt; Regarding the transmission loss of the obtained three-layer optical waveguide, the following truncation method was used. Determination, the retrospective method refers to the light generated by the laser diode After the fiber is input from the end of the core, the output from the other end is measured, and then the length of the core is cut into several levels, and the light output is measured for each length. The optical loss is expressed by the following equation: Total optical loss (dB) = -l〇i Og(pn/p〇) In the above formula, Pn is determined at the other end of the core of each length of Pi, P2, ... pn Output, PO is the measurement output of the light source at the end of the fiber before coupling the fiber to one end of the core. Secondly, the total optical loss is shown in Figure 19. The regression line of the data is represented by the following formula. y=mx+b In the above formula, m represents the light transmission loss, and b represents the coupling loss. The optical waveguide of Example 1 has a transmission loss of 0.06 dB/cm. &lt;Mirror Loss&gt; Regarding the loss of the mirror portion of the obtained three-layer optical waveguide, the light generated from the laser diode or the surface-emitting laser (VCSEL) is transmitted through the optical fiber from the core 138984.doc - 67- 201009408 One-end input, and measure the output of the light that penetrates the cladding after being reflected by the inclined portion of the mirror, and obtain the total optical loss represented by the following equation. Total optical loss (dB) = -101 〇g(Pl/P〇) In the above formula, P1 is the output measured at the upper part of the inclined portion, and p〇 is the end of the optical fiber before coupling the optical fiber to one end of the core. The measured output of the light source. The loss of the mirror portion is calculated from the total optical loss obtained minus the loss of the straight portion and the loss of the coupling portion between the optical fiber and the core. The loss of the mirror portion of the optical waveguide of Example 1 was 0.5 dB/cm. &lt;Smoothness of Mirror Section&gt; Regarding the smoothness of the mirror portion of the obtained three-layer optical waveguide, a laser scanning microscope (Lxet OLS-3 100 manufactured by Olympus Corporation) was used. The maximum height of the protrusions on the mirror surface is directly measured by setting the mirror surface of the three-layer optical waveguide to be substantially horizontal. The smoothness of the mirror portion of the implemented optical waveguide is less than 100 nm. &lt;Tensile Strength&gt; When the two-layer optical waveguide obtained by the field is cut into the shape of the test piece specified in JIS K7127, the mirror is placed at the narrowest parallel portion corresponding to the center of the test piece. The both ends of the sheet are clamped to the chuck portion of the tensile testing machine (A&amp;D shares, tensile tester tensil〇n stm_T-5〇), and then the crosshead speed is maintained at 5 The em/min-face allows the test maneuver to measure the strength of the test piece when it is broken. The optical waveguide of the embodiment has a tensile strength of 5 〇〇 gf/cm or more. &lt;Gase generation amount&gt; When a mirror portion (hollow mirror structure) of a two-layer optical waveguide is prepared, the fine carbonized dust adhered to the mirror portion by excimer laser ablation is observed by visual observation 138984.doc 201009408 (Glue) production amount (attachment area). In the optical waveguide of Example 1, almost no slag was observed. Comparative Example 1 A three-layer optical waveguide was produced at one time in the same manner as in Example 1 except that mirror processing was not performed on the core layer (single-layer optical waveguide element film). Then, using the excimer laser adjusted in the same manner as in Embodiment 1, the three-layer optical waveguide was subjected to mirror processing in the following manner. The base film (PES) on one side of the above-mentioned three-layer optical waveguide was peeled off, and then the surface on the opposite side to the mirror-finished surface was attached to an adhesive substrate (Magic-resin: manufactured by Toyo Corporation). . The substrate is placed on a micro-motion stage of the excimer laser device, and the fixed surface of the substrate is fixed. Then, the micro-motion stage is rotated so that the longitudinal direction of the core of the three-layer waveguide coincides with the movable direction of the micro-motion stage, and alignment adjustment is performed so that the center of the laser irradiation area (1 〇〇χ 1 〇〇 μηη) Adjust the way to the center of the core. Then, while the He gas as the assist gas flows to the mirror processing portion of the core at 2.0 L/min, the micro-motion stage is moved by 15 μm in the optical path direction at 16 μm/sec, and the irradiation frequency is 1 〇〇 Hz. Laser. After the irradiation, the three-layer optical waveguide was cut along the core, and the cross-section was observed. As a result, the core layer was spread from the lower cladding layer, and a 45-degree inclination was formed with respect to the plane defined by the three-layer optical waveguide. Further, when the inclined surface (mirror surface) was observed using a scanning electron microscope (SEM), the adhesion area of the slag (carbonized laser ablation material) deposited on the mirror surface was wider than that of the example i, but the mirror surface was smooth. . 138984.doc -69· 201009408 The measurement of the transmission loss, the mirror loss, the mirror: smoothness, the tensile strength, and the amount of glue generation were measured in the same manner as in the example i. The results of the measurements are summarized in Table i together with the measurement results of the above examples. Table 1 Transmission loss dB/cm &lt; 0.1 dB &lt;1.0 —_____ &lt;100 Example 1 Tensile strength g^cm &gt;500 Slag production amount---- 比较 Less Comparative Example 1 ----- --- &lt;0.1 ---- 1 &lt;1.0 —s〇〇___ &lt;50 Ding people can be seen from Table 1, regarding the performance of the mirror (transmission loss, mirror loss, smoothness), Example 1 and comparison There are no significant differences between the cases. On the other hand, regarding the tensile strength representing the mechanical strength of the optical waveguide, Example 5 showed a value of 10 times or more of Comparative Example 1. Further, Comparative Example 1 was more than Comparative Example 1 in terms of the amount of generated slag. The reason for this is that, in contrast to the example i in which the core layer is ablated, in the comparative example i, not only the core 1 but also the coating layer must be peeled off. Since the size of each rubber particle is 100 nm or less, the rubber particle does not have a large influence on the smoothness, but (4) when the amount of production increases, the glue particles agglomerate each other and damage the mirror surface. Make mirror loss: worse. In addition, when the mirror surface of the embodiment is coated, it is not closed, so it is less likely to be stained by the adhesion of dust or dust from the outside than the mirror surface exposed to the surrounding environment. Further, as an advantage of mirroring, in the comparative example i, in order to ablate the upper cladding with a fixed wedge angle, a relatively large mask (core layer width: multiple or more) is required, and艸 Just peel off the layer: Yes, so you can use a smaller mask (15 times more than the width of the core). 138984.doc 201009408 Example 2 In the same manner as in Example 制造, the manufacture of the &lt;core layer (single layer optical waveguide element film)> and &lt;mirror processing&gt; was changed as follows. A three-layer optical waveguide that interferes with the cross-waveguide shape of the cladding structure. &lt;Preparation of a cross-type waveguide core layer including an interference-preventing coating structure&gt; 10 g of a core layer varnish was injected on a polyethylene terephthalate (PET) film having a thickness of 25 〇μπΐ2, and used to a knife The core layer is expanded to a substantially constant thickness with a varnish to form a coating film for the varnish for the core layer (the thickness before drying is 7 〇μπ〇. The coating film is placed on the heating plate together with the PET film at 5 (^ The mixture was heated for 45 minutes, whereby toluene was evaporated to obtain a dried coating film having a thickness of 5 Å. A still-pressure mercury lamp or a metal-based lamp was used, and the transmission contained a specific one corresponding to the core as shown in Fig. 12(A). Closed pattern (core width % μηη··number of core layers / 12 longitudinal directions; 12 transverse directions: core layer spacing / longitudinal Η, μη, · lateral 125 μιη: orthogonal shape), and with cladding and low refraction The mask corresponding to the specific opening pattern (the low refractive area width is 5 pm), and the dried coating film is irradiated with the first ultraviolet light having a wavelength of less than 3〇〇nn^$ 365 (the irradiation amount is 500 mj/ Cm2). The irradiated coating film is placed in an oven, and the following heat treatment is performed, that is, initially at 5 Heat for 3 minutes at 〇r, then heat at 85 30 for 30 minutes, then heat at 15 〇() (: for 6 〇 minutes. It can be heated at the first 50 minutes under the armpit for 1 minute to visualize. The waveguide pattern in the coating film is confirmed. After the heat treatment, the coating film is peeled off from the pET film to form a cross-waveguide core layer including the interference-preventing coating structure. <Mirror processing> The core layer (including anti-interference) The cross-shaped waveguide core layer of the cladding structure) (thickness 138984.doc •71 · 201009408 degree 50 μιη 'core layer width 50 μηη) is attached to the adhesive substrate on the opposite side of the mirror processing surface (Magic -resin : manufactured by Toyo Corporation Co., Ltd.) The substrate is placed on the micro-motion stage of the excimer laser device to 'suck the fixed surface of the substrate and fixed. Then, the length direction of the core of the two-layer waveguide is fixed. After the micro-motion stage is rotated in alignment with the movable direction of the micro-motion stage, the alignment is adjusted so that the center of the laser irradiation area (1〇χ7〇-μιη) reaches the center of the intersection area of the core. Then, one side is adjusted. Make The He gas of the assist gas flows to the mirror processing portion of the core at 2·〇L/min, and the micro-motion stage is moved by 70 μm at 5 pm/sec on the diagonal line of the intersection of the core and the region, and the irradiation frequency is 1 Hz laser. After the irradiation, the cutting surface was observed using a scanning electron microscope (SEM), and as a result, almost no slag accumulated on the cutting surface (carbonized laser stripping property) was observed. Very smooth. The transmission loss, the mirror loss, the smoothness of the mirror portion, the tensile strength, and the amount of gelation were measured in the same manner as in Example i. As a result, the cross-type of the anti-interference coating structure of Example 2 was obtained. Any of the characteristics of the waveguide-shaped three-layer optical waveguide shows the same characteristics as the optical waveguide of the embodiment. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 (4) and (8) schematically show a part of a basic structure of an optical waveguide, and a perspective view; Fig. 2 is a schematic view showing an example of a prior art structure for delineating a &lt;鲵 plane in an optical waveguide; Fig. 3 is a cross-sectional view schematically showing an example of a hollow mirror structure of the present invention for defining a facet in an optical waveguide. 138984.doc • 72· 201009408 Fig. 4 (A) to (C) are schematic diagrams A cross-sectional view of a hollow mirror structure of another aspect of the present invention is schematically shown; and FIGS. 5(A) and (B) are schematic views showing a plan view of a plurality of optical waveguides in which a plurality of cores are disposed in the present invention. Figure 6 is a plan view schematically showing an optical waveguide of a core portion of the present invention; Figure 7 is a plan view schematically showing an optical waveguide of the present invention for converting an optical path direction into a substantially right angle in a plane; A plan view schematically showing a cross-type waveguide including a hollow mirror structure of the present invention; and Figs. 9(A) to (D) are schematic views showing various branches of the optical path of the present invention; Fig. 10(A) And (B) schematically represents the inclusion of the present invention. FIG. 11 is a plan view schematically showing an example of a cross-type waveguide having an interference-preventing cladding structure; FIG. 12 (A) and (B) are schematically shown. A plan view (A) and a cross-sectional view (B) of a part of a step of a method suitable for the manufacture of an interference-preventing cladding structure; • Figures 13 (A) and (B) schematically show that the present invention is suitable for A plan view of a part of the steps of the method of arranging the hollow mirror structure at the intersection of the cross-type waveguides; FIG. 14 is a view schematically showing a part of the steps of the method (post-illumination method) suitable for the manufacture of the optical waveguide of the present invention. Cross-sectional view of FIG. 1 is a cross-sectional view schematically showing a part of a step of a method (post-irradiation method) suitable for the manufacture of an optical waveguide of the present invention; FIG. A cross-sectional view showing an example of an optical waveguide module including an optical waveguide and a light-emitting element and/or a light-receiving element of the present invention; FIG. 17 is a view schematically showing light including an optical waveguide module and a circuit substrate of the present invention. A cross-sectional view of an example of a component mounting substrate; Fig. 18 (A) to (C) schematically show a cross-sectional view of an example of the optical component mounting substrate of the present invention including a receiving structure; and Fig. 19 shows a companion core A graph of the change in total optical loss as a function of the length of the portion. [Description of main component symbols] Optical waveguide core upper cladding layer &amp; cladding lower cladding layer 1 , 10 ' 20 , 90 , 240 2 ' 12 ' 22 ' 32 ' 42 ' 52 ' 62, 72, 82, 92 ' 101 ' 352 ' 362 ' 372 3, 1 1 , 21 , 31 , 41 , 51 , 93 , 351 , 361 , 371 3 ' , 96 , 102 4 , 13 , 23 , 33 , 43 , 53 , 97 , 353 , 363, 373 14 ' 24 ' 34 ' 44 ' 54 ' 64 ' 74, 84 ' 94 ' 354 ' 364, 374 91, 91, mask closed 138984.doc 74- 201009408

92' intersection area 95 interlayer coating 98 laser irradiation unit 100 core film material 110 core layer 120 photomask 200 cladding film material 210 cladding layer 220 wavelength cut filter 230 laminated body 350 optical waveguide module 355 ' 365 ' 375 light-emitting element and/or light-receiving element 356 light-receiving portion 357 supporting member 360 &gt; 370 optical element mounting substrate 366 light-emitting portion 367 ' 377 metal protruding portion 368 electrode pad 369, 379 conductor circuit 378 conductive adhesive 380 conductor wiring Column A Optical Waveguide Module B Circuit Board LP Optical Path 138984.doc -75-

Claims (1)

201009408 VII. Patent application scope: ^ An optical waveguide characterized in that it is surrounded by a cladding layer having a refractive index lower than a core portion that determines the direction of the optical path, and is in the direction of the optical path of the core portion. At a specific position, a hollow mirror structure that defines a mirror surface is provided, and the mirror surface converts an optical path that is incident on the optical waveguide or light that is emitted from the optical wave. 2. The optical waveguide of claim 1, wherein the height of the hollow mirror structure is the same as or greater than the thickness of the core. 3. The optical waveguide according to claim 1 or 2, wherein an additional hollow mirror structure is provided at a position different from the specific position in the same optical path including the specific position at which the hollow mirror structure is provided. 4. The optical waveguide of claim 1, wherein the mirror surface of the hollow mirror structure is at an angle of 4 〇 5 相对 with respect to the direction of the optical path. The optical waveguide of claim 1, wherein the optical path direction is converted into a substantially normal direction by a plane defined by the mirror relative to the optical waveguide. 6. The optical waveguide of claim 1, wherein the optical waveguide has a plurality of cores disposed at a plurality of intervals in a narrow interval and the hollow mirror structure is independently juxtaposed for each of the cores. 7. The optical waveguide of claim 1, wherein the optical waveguide has a plurality of cores disposed at a narrow interval, I38984.doc 201009408 and the hollow mirror structure is disposed across the two or more cores The common hollow mirror structure of the department. 8) The optical waveguide according to claim 1, wherein the optical waveguide of the optical waveguide core portion is provided with a hollow mirror structure at any position of each of the core portions of the branch. 9. The optical waveguide of claim 1, wherein the optical path is converted by the mirror in a plane defined by the optical waveguide. 10. The optical waveguide of claim 9, wherein the optical waveguide is plural The core intersects and intersects the waveguide, and the hollow mirror structure is disposed in at least one region of the intersection of the core. 11. The optical waveguide of claim 10, wherein the hollow mirror structure is such that The optical path is disposed in such a manner as to branch in two directions in the intersecting region. 12. The optical waveguide of claim 1, wherein the hollow mirror structure is such that one optical path branches in three directions in the intersecting region. 13. The optical waveguide of claim 1, wherein the cross-waveguide overlaps two or more multi-layered parent-fork waveguides by superposing the cores via the cladding layer, and optically connects the upper and lower cores The hollow mirror structure configured in a manner is disposed at a specific position. 14. The optical waveguide of claim 1, wherein the cross-waveguide comprises an interference-proof cladding structure, the interference-proof cladding 138984.doc 201 009408 is a low refractive region of the field a outside the region. The peripheral portion is provided with a refractive index lower than that of the core portion 15. The optical waveguide of claim 10, wherein the optical waveguide comprises a core layer of #θθ And a cladding layer laminated on both sides of the core layer, the core layer comprising a core portion defining a light direction and a cladding portion having a lower refractive index than the core portion. 16. The optical waveguide of claim 15, wherein the core Layer and the wrap® gentleman a \,,, The stratification is composed of molecular materials. 17. The optical waveguide of claim 16, wherein the polymer material comprises a main chain of an addition polymerization type. 18. An optical waveguide module, comprising: the optical waveguide and the light-emitting element and/or the light-receiving element according to any one of claims 8 to 15 and 17, wherein the hollow mirror structure The light-emitting element and/or the light-receiving element are aligned in such a manner that light emitted from the light-emitting element is incident on the optical waveguide via a mirror surface of the hollow mirror structure, and/or light emitted from the light wave is passed through the light-emitting element The mirror surface of the hollow mirror structure is incident on the light receiving element. An optical element mounting substrate comprising the optical waveguide module of claim 18 and a circuit substrate. 20. The optical component mounting substrate of claim 19, wherein the optical waveguide module comprises a receiving structure for receiving electrical conduction between an electrode of the light emitting component and/or the light receiving component and an electrode of the circuit substrate. 138984.doc