TW200951401A - Correcting device, correction method and its controlling device - Google Patents

Correcting device, correction method and its controlling device

Info

Publication number
TW200951401A
TW200951401A TW098112480A TW98112480A TW200951401A TW 200951401 A TW200951401 A TW 200951401A TW 098112480 A TW098112480 A TW 098112480A TW 98112480 A TW98112480 A TW 98112480A TW 200951401 A TW200951401 A TW 200951401A
Authority
TW
Taiwan
Prior art keywords
defects
residual
unit
laser
dmd
Prior art date
Application number
TW098112480A
Other languages
Chinese (zh)
Inventor
Ryuichi Yamazaki
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200951401A publication Critical patent/TW200951401A/en

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Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Laser Beam Processing (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The present invention aims to automatically and accurately detect residual defects. Based on the glass substrate defect image captured by an image pick-up unit, an image processing unit is employed to detect defects and identify location and range of the defects. A laser oscillator outputs laser light for correcting the detected defects. Using a DMD (digital mirror device) unit, the laser light undergoes spatial light modulation to irradiate the defects. A laser shape control unit drives the driver that drives the DMD unit to output control signals according to the output data from the image processing unit. A residual defect detection unit acquires height information relevant to the height of the glass substrate within the range of the defects. According to the height information, presence of residual defects that require further correction after the defects have been corrected is evaluated. When the presence of residual defects is confirmed, laser irradiation is carried out on the residual defects in the same way as the laser irradiation on the defects.
TW098112480A 2008-04-22 2009-04-15 Correcting device, correction method and its controlling device TW200951401A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008111278A JP2009262161A (en) 2008-04-22 2008-04-22 Correcting apparatus, correcting method, control device, and program

Publications (1)

Publication Number Publication Date
TW200951401A true TW200951401A (en) 2009-12-16

Family

ID=41281260

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098112480A TW200951401A (en) 2008-04-22 2009-04-15 Correcting device, correction method and its controlling device

Country Status (3)

Country Link
JP (1) JP2009262161A (en)
CN (1) CN101564795A (en)
TW (1) TW200951401A (en)

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US11075496B2 (en) * 2018-06-28 2021-07-27 Samsung Electronics Co., Ltd. Laser dicing device, method of laser beam modulation, and method of dicing a substrate
CN108990299A (en) * 2018-07-27 2018-12-11 广东工业大学 A kind of laser amendment pcb board defect method based on image detection
JP7202106B2 (en) * 2018-08-31 2023-01-11 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing method and substrate processing apparatus
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JP7309277B2 (en) * 2019-09-12 2023-07-18 株式会社ディスコ POSITION ADJUSTMENT METHOD AND POSITION ADJUSTMENT DEVICE
JP2022098586A (en) * 2020-12-22 2022-07-04 大船企業日本株式会社 Adjusting method of machining point power in aperture mounted on printed circuit board laser processing apparatus, and printed circuit board laser processing apparatus that implements adjusting method of machining point power in aperture mounted on printed circuit board laser processing apparatus
US20240044806A1 (en) * 2021-02-18 2024-02-08 Hitachi High-Tech Corporation Optical foreign matter inspection device
CN113029032B (en) * 2021-03-26 2022-04-01 中南大学 High-precision surface shape measuring method and device based on spectrum confocal
CN113556934A (en) * 2021-06-24 2021-10-26 广东工业大学 Method and device for automatically detecting and quickly repairing printed circuit board
CN114203110B (en) * 2021-12-20 2023-01-03 五邑大学 High-resolution display chip compensation method and device and storage medium
CN117870576B (en) * 2024-03-13 2024-06-04 广东普洛宇飞生物科技有限公司 Laser system with real-time correction function and working method

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
TWI512687B (en) * 2013-03-22 2015-12-11 Screen Holdings Co Ltd Labeling method, labeling apparatus and defect inspecting apparatus

Also Published As

Publication number Publication date
JP2009262161A (en) 2009-11-12
CN101564795A (en) 2009-10-28

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