TW200949445A - Photosensitive resin composition, photospacer and method of manufacturing the same, protective film, colored pattern, substrate for display device, and display apparatus - Google Patents

Photosensitive resin composition, photospacer and method of manufacturing the same, protective film, colored pattern, substrate for display device, and display apparatus Download PDF

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TW200949445A
TW200949445A TW98109829A TW98109829A TW200949445A TW 200949445 A TW200949445 A TW 200949445A TW 98109829 A TW98109829 A TW 98109829A TW 98109829 A TW98109829 A TW 98109829A TW 200949445 A TW200949445 A TW 200949445A
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photosensitive resin
resin composition
substrate
display device
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TW98109829A
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TWI447521B (en
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Yuuichi Fukushige
Kazuhito Miyake
Kenta Yamazaki
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Fujifilm Corp
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  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

To increase the polymerized hardness during photo exposure, and to form pattern structure and protective film at low heating temperature or under no heating process. Solution: Photosensitive resin composition containing resin, polymerized chemical compound having the following structure part (I) [in the structure part (I), X represents hydrogen atoms or methyl group, and * represents combining bond], and photosensitive resin composition of photo-polymerization inducer. Said polymerized chemical compound preferably has two or more than three structure parts (I) in the molecule.

Description

200949445 六、發明說明: 【發明所屬之技術領域】 本發明係關於感光性樹脂組成物、光間隔物及其形成 方法、保護膜、著色圖案、顯示裝置用基板、以及顯示裝 置。 【先前技術】 液晶顯示裝置係廣泛使用於顯示高畫質畫像的顯示裝 置。 〇 液晶顯示裝置一般係在一對的基板(以下,亦稱爲「顯 示裝置用基板」)間,根據指定的配向配置能形成畫像顯示 之液晶層,均勻地維持該基板間隔、亦即液晶層的厚度係 爲決定畫質的要素之一,爲此配置了用以固定保持液晶層 厚度的間隔物。該基板之間的厚度一般稱爲「晶胞厚」,晶 胞厚一般係爲前述液晶層的厚度,換言之,表示對顯示領 域的液晶施加電場之2片電極間的距離者。 顯示裝置用基板(例如,彩色濾光片基板、有源矩陣基 © 板等)係在基板上形成著色圖案、保護膜等的構造物而構成 的。此等之構造物之中,著色圖案、保護膜的形成方法係 以使用感光性樹脂組成物且藉由微影術而形成的方法爲主 流。 又,關於間隔物在以往係藉由珠粒散布而形成的,但 是在近年來係使用感光性樹脂組成物並藉由微影術,可形 成位置精度高的間隔物。使用像這樣的感光性樹脂組成物 而形成之間隔物係被稱爲光間隔物。 關於感光性樹脂組成物,從以往開始已有各種的檢 200949445 討,例如,已揭示使用有乙烯性不飽和羧酸等與乙烯性不 飽和化合物的共聚物及特定的光聚合引發劑之感光性樹脂 組成物(例如,參照特開2007-86565號公報}。又,已揭 示有由連結具有特定構造的脂肪族環狀烴基之構成單位、 具有酸性官能基之構成單位與具有自由基聚合性基之構成 單位的分子構造之脂肪族環狀烴基含有共聚物所構成的硬 化性樹脂(例如,參照特開2002-293837號公報}。 【發明内容】 Φ 根據本發明的態樣,能提供提高曝光時的聚合硬化 性、在低溫加熱或無加熱處理下的圖案構造物、保護膜的 形成爲可能之感光性樹脂組成物、使用它之光間隔物及其 形成方法、保護膜、著色圖案、以及具備彼等之顯示裝置 用基板、及具備該顯示裝置用基板之顯示裝置。前述感光 性樹脂組成物係含有樹脂、具有下述構造部分(I)之聚合性 化合物〔構造部分(I)中,X係表示氫原子或甲基,*係表 示結合鍵〕、與光聚合引發劑的感光性樹脂組成物,前述聚 Ο 合性化合物係較佳爲在分子中具有2個或3個以上的構造 部分(I)。[Technical Field] The present invention relates to a photosensitive resin composition, a photo spacer, a method for forming the same, a protective film, a colored pattern, a substrate for a display device, and a display device. [Prior Art] A liquid crystal display device is widely used in a display device for displaying a high-quality image. The liquid crystal display device is generally disposed between a pair of substrates (hereinafter also referred to as "display device substrate"), and a liquid crystal layer capable of forming an image is arranged in accordance with a predetermined alignment, and the substrate interval, that is, the liquid crystal layer is uniformly maintained. The thickness is one of the elements determining the image quality, and a spacer for fixing the thickness of the liquid crystal layer is disposed for this purpose. The thickness between the substrates is generally referred to as "cell thickness", and the cell thickness is generally the thickness of the liquid crystal layer, in other words, the distance between the two electrodes for applying an electric field to the liquid crystal in the display region. The display device substrate (for example, a color filter substrate, an active matrix substrate, or the like) is formed by forming a structure such as a colored pattern or a protective film on the substrate. Among these structures, the method of forming the colored pattern and the protective film is a method in which a photosensitive resin composition is used and formed by lithography. Further, the spacer is conventionally formed by scattering of beads. However, in recent years, a photosensitive resin composition has been used, and by lithography, a spacer having high positional accuracy can be formed. A spacer formed using such a photosensitive resin composition is referred to as a photo spacer. For the photosensitive resin composition, various kinds of tests have been made in the past. For example, it has been disclosed that a copolymer of an ethylenically unsaturated compound such as an ethylenically unsaturated carboxylic acid and a specific photopolymerization initiator are used. Further, a constituent unit of an aliphatic cyclic hydrocarbon group having a specific structure, a constituent unit having an acidic functional group, and a radical polymerizable group have been disclosed (see, for example, JP-A-2007-86565). The aliphatic cyclic hydrocarbon group of the molecular structure of the constituent unit contains a curable resin composed of a copolymer (for example, see JP-A-2002-293837). [Invention] Φ According to the aspect of the present invention, it is possible to provide an exposure improvement. Photopolymerization hardenability, pattern structure under low temperature heating or no heat treatment, photosensitive resin composition which is possible to form a protective film, photo spacer using the same, a method for forming the same, a protective film, a coloring pattern, and A substrate for a display device and a display device including the substrate for the display device. The photosensitive resin composition A polymerizable compound containing a resin and having the following structural part (I) [in the structural part (I), X represents a hydrogen atom or a methyl group, * represents a bonding bond], and a photosensitive resin composition with a photopolymerization initiator The polyadhesive compound preferably has two or more structural moieties (I) in the molecule.

X OH * (I) 〇 發明所欲解決之課題 在前述以往的感光性樹脂組成物中,一般的光聚合性 200949445 單體係使用二季戊四醇六丙烯酸酯、二季戊四醇五丙烯酸 酯等的具有乙烯性不飽和鍵之單體。 然而,使用以往的感光性樹脂組成物而在基板上形成 圖案構造物(例如,光間隔物、著色圖案等。以下相同)、 形成保護膜之情形中,僅曝光的話聚合硬化未必就充分 了,而且在曝光、顯像後施加高溫的加熱處理之必要情形 很多。又,當要求精細度之光間隔物等的圖案構造物的形 成時,在防止形狀偏移之點,一般係認爲曝光之際的聚合 Φ 反應快速係爲所期望的。 本發明係有鑑於上述而完成的,以達成下述目的爲課 題》 亦即,本發明係以提供在曝光時的聚合硬化性優異、 能夠在低溫加熱處理或無加熱下得到圖案構造物、保護膜 之感光性樹脂組成物爲目的。 又,本發明係以提供具有均一性高的剖面形狀,且高 度均一性優異之光間隔物及其製法爲目的。 Ο 又,本發明係以提供膜厚均一性優異之保護膜,或具 有均一性高的剖面形狀,且膜厚均一性優異之著色圖案爲 目的。 又,本發明係以提供在使用於顯示裝置之際能夠抑制 顯示不均之顯示裝置用基板、及顯示不均受到抑制之顯示 裝置爲目的。 解決課題之手段 本發明係得到在分子中含有特定構造部分之聚合性化 合物在提供光而進行之聚合反應爲快速,所以成形性優 200949445 異,而且與以往稱爲所謂後烘烤之高溫加熱不同,例如在 不滿200°C之低溫下加熱、或即使不進行加熱處理亦能提 高硬化性的知見,且基於該知見而完成者。 爲達成前述課題之具體手段係如以下所示。 <1>一種感光性樹脂組成物,其係含有樹脂、具有下 述構造部分(I)之聚合性化合物、與光聚合引發劑之感光性 樹脂組成物。下述構造部分(I)中,X係表示氫原子或甲基, 「*」係表示結合鍵。X OH * (I) In the conventional photosensitive resin composition, general photopolymerization 200949445 single system uses ethylene such as dipentaerythritol hexaacrylate or dipentaerythritol pentaacrylate. Monomer of unsaturated bonds. However, in the case where a conventional photosensitive resin composition is used to form a pattern structure (for example, a photo spacer, a colored pattern, or the like, the same applies hereinafter) and a protective film is formed on the substrate, the polymerization hardening is not necessarily sufficient only by exposure. Moreover, it is necessary to apply a high-temperature heat treatment after exposure and development. Further, when a pattern structure such as a fine photo spacer is required to be formed, it is generally considered that the polymerization Φ reaction at the time of exposure is fast as desired in order to prevent the shape from shifting. The present invention has been made in view of the above, and has an object to achieve the following object. That is, the present invention provides excellent polymer curability at the time of exposure, and can obtain a pattern structure and protection under low-temperature heat treatment or no heating. The photosensitive resin composition of the film is intended for the purpose. Further, the present invention has an object of providing a photo spacer having a high cross-sectional shape with high uniformity and excellent uniformity in height and a method for producing the same. Further, the present invention is intended to provide a protective film having excellent film thickness uniformity or a colored pattern having a uniform cross-sectional shape and excellent film thickness uniformity. Further, the present invention has an object of providing a display device substrate capable of suppressing display unevenness and a display device having suppressed display unevenness when used in a display device. Means for Solving the Problems According to the present invention, a polymerizable compound having a specific structural moiety in a molecule is rapidly polymerized by providing light, so that the formability is excellent, and the shape is excellent, and it is different from the high temperature heating which has been called so-called post-baking. For example, it can be improved by heating at a low temperature of less than 200 ° C or improving the hardenability even without heat treatment, and is completed based on the knowledge. The specific means for achieving the above problems are as follows. <1> A photosensitive resin composition containing a resin, a polymerizable compound having the following structural portion (I), and a photosensitive resin composition with a photopolymerization initiator. In the following structural part (I), X represents a hydrogen atom or a methyl group, and "*" represents a bond.

X OH * (I) 〇 &lt; 2 &gt;如前述&lt;1&gt;記載之感光性樹脂組成物,其中前述聚 合性化合物係在分子中具有至少2個的前述構造部分(I卜 &lt; 3 &gt;如前述&lt; 1&gt;或前述&lt;2 &gt;記載之感光性樹脂組成物’ 其中前述聚合性化合物係具有連結含有前述構造部分(1)的 Ο 2個基之對稱構造。 &lt; 4 &gt;如前述&lt;1&gt;記載之感光性樹脂組成物,其中前述具 有構造部分(I,)之聚合性化合物係爲下述構造式(η )所表示 之聚合性化合物。The photosensitive resin composition of the above-mentioned <1>, wherein the polymerizable compound has at least two of the aforementioned structural moieties in the molecule (Ib &lt; 3 &gt; The photosensitive resin composition described in the above-mentioned <1>, wherein the polymerizable compound has a symmetrical structure in which two groups of the above-mentioned structural portion (1) are bonded to each other. &lt;4 &gt; The photosensitive resin composition according to the above-mentioned <1>, wherein the polymerizable compound having the structural moiety (I) is a polymerizable compound represented by the following structural formula (η).

200949445 〔式中,R係表示在2價烴基之碳-碳間含有至少1個 醚鍵之連結基。X係表示氫原子、甲基〕。 &lt;5&gt;如前述&lt;4&gt;記載之感光性樹脂組成物,其係在前述 構造式(Π)中,R表示- CH2-〇-Ra-〇-CH2-,Ra表示選自於 由伸烷基部位、伸芳基部位、及組合此等的部位所構成群 組之連結基。 &lt;6&gt;如前述&lt;1&gt;~前述&lt;5&gt;項中任一項之感光性樹脂組 成物,其中前述樹脂係在側鏈具有分枝及/或脂環構造、酸In the formula, R represents a linking group containing at least one ether bond between carbon and carbon of a divalent hydrocarbon group. X is a hydrogen atom or a methyl group. <5> The photosensitive resin composition according to the above <4>, wherein R is -CH2-〇-Ra-〇-CH2-, and Ra is selected from the group consisting of The linking group of the group formed by the base portion, the aryl group, and the portion in which these are combined. The photosensitive resin composition according to any one of the above-mentioned items, wherein the resin has a branching and/or alicyclic structure and an acid in a side chain.

性基、以及乙烯性不飽和鍵。 &lt;7&gt;如前述&lt;6&gt;記載之感光性樹脂組成物,其中前述樹 脂的酸價爲20mgKOH/g以上。 &lt; 8 &gt;如前述&lt;6&gt;記載之感光性樹脂組成物,其中前述具 有分枝及/或脂環構造之基係下述通式(3)所表示之基。A base, and an ethylenically unsaturated bond. The photosensitive resin composition of the above-mentioned <6>, wherein the acid value of the resin is 20 mgKOH/g or more. The photosensitive resin composition according to the above-mentioned <6>, wherein the group having a branched and/or alicyclic structure is a group represented by the following formula (3).

通式(3)中,X係表示2價的有機連結基,可無取代、 亦可具有取代基。7係表示1或2’11係表示〇~15的整數。 &lt;9&gt;一種光間隔物,其係使用如前述&lt;1&gt;~前述&lt;8&gt;項 中任一項之感光性樹脂組成物而形成的。 &lt;10&gt;—種光間隔物之製法,其係含有至少下述步驟 (甲)~(丙): (甲)將前述&lt;1&gt;~前述&lt;8&gt;項中任一項之感光性樹脂組 成物的被膜形成於基板上之形成步驟; 200949445 (乙)曝光前述被膜的至少一部份之曝光步驟; (丙)顯像曝光後的前述被膜之顯像步驟。 &lt;11&gt;如前述&lt;1〇&gt;記載之光間隔物之製法,其中更具有 加熱顯像後的前述被膜之加熱步驟,且在加熱時的最高溫 度爲4 0 °C以上,1 4 5 °c以下。 &lt;12&gt;—種保護膜,其係使用如前述&lt;1&gt;~前述&lt;8&gt;項中 任一項之感光性樹脂組成物而形成的。 &lt;13&gt; —種著色圖案,其係使用如前述&lt;1&gt;~前述&lt;8&gt;項 φ 中任一項之感光性樹脂組成物而形成的。 &lt;14&gt;一種顯示裝置用基板,其係具備使用如前述&lt;1&gt;~ 前述&lt;8&gt;項中任一項之感光性樹脂組成物而形成的前述光 間隔物、前述保護膜、及前述著色圖案之至少1者。 &lt;15&gt;—種顯示裝置,其係具備如前述&lt;14&gt;記載之顯示 裝置用基板。 【實施方式】 實施發明之形態 ® 以下,詳細說明本發明的感光性樹脂組成物,進而詳 述使用該感光性樹脂組成物之光間隔物及其形成方法、保 護膜、著色圖案、顯示裝置用基板、以及顯示裝置。 《感光性樹脂組成物&gt; 本發明的感光性樹脂組成物係至少使用樹脂、具有以 下所示構造部分(I)之聚合性化合物、與光聚合引發劑而構 成者。又,可按照需要,進一步使用其他成分來構成。 —般使用感光性樹脂組成物以在基板上形成圖案構造 物(例如,光間隔物、著色圖案等。以下同樣)、保護膜之 200949445 情形中,因爲僅曝光而會容易使得聚合硬化變得不充分, 所以爲了進一步加速聚合硬化,一般係在曝光 '顯像後施 加在高溫中的加熱處理。然而,一施加高溫的加熱處理, 就會招來所形成的圖案構造物、保護膜的惡化,或基板上 的已經設立的圖案構造物、保護膜係因重複施加的熱而惡 化。例如,在具有著色圖案的彩色濾光片基板上形成光間 隔物之情形中,會導致這樣所形成之光間隔物本身的惡 化,又已經形成於基板上的著色圖案會因所賦予的更多的 〇 熱而惡化。相對於此,在本發明藉由前述構成感光性樹脂 組成物,會加速曝光時的聚合進行,所以成形性優異,此 外提高曝光時的聚合硬化性,即使在低溫加熱(例如1 45°C 以下)、無加熱處理下,亦可形成有均一性的圖案構造物、 保護膜。藉此,不僅可抑制圖案構造物、保護膜的形狀偏 移,而且能有效地抑制這樣所形成的圖案構造物、保護膜 所遭受到的惡化及基板上的已經設立的圖案構造物、保護 膜因熱所重複遭受的惡化。 〇 以下,說明樹脂、具有構造部分(I)之聚合性化合物、 光聚合引發劑、及其他的成分。 &lt;具有構造部分(I)之聚合性化合物&gt; 本發明的感光性樹脂組成物係含有具有下述構造部分 (I)之聚合性化合物(以下’亦稱爲「特定聚合性化合物J ) 的至少1種。聚合性化合物係受到來自後述之光聚合引發 劑的自由基的作用並引起聚合反應而形成硬化膜者。關於 由該特定聚合性化合物所引起的作用尙未明確’但是推測 藉由具有下述構造部分(I)所示之構造,因而使得不飽和雙 -10- 200949445 鍵部分在曝光時的反應進行加速,所以爲聚合硬化性優異 者。In the formula (3), X represents a divalent organic linking group, and may be unsubstituted or may have a substituent. 7 indicates that 1 or 2'11 represents an integer of 〇~15. &lt;9&gt; A photo spacer formed by using the photosensitive resin composition according to any one of the above items <1> to <8>. &lt;10&gt; - A method for producing a photo spacer, which comprises at least the following steps (A) to (C): (a) the photosensitivity of any of the above &lt;1&gt; to the aforementioned &lt;8&gt; a step of forming a film of the resin composition on the substrate; 200949445 (b) exposing at least a portion of the film to an exposure step; (c) a step of developing the film after the imagewise exposure. &lt;11&gt; The method for producing a photo spacer according to the above <1>, wherein the heating step of the film after heating is further performed, and the maximum temperature during heating is 40 ° C or higher, 14 Below 5 °c. &lt;12&gt; A protective film formed by using the photosensitive resin composition according to any one of the above items <1> to <8>. &lt;13&gt; The coloring pattern is formed by using the photosensitive resin composition according to any one of the above &lt;1&gt; to &lt;8&gt; The substrate for a display device, wherein the photo spacer, the protective film, and the photosensitive spacer are formed by using the photosensitive resin composition according to any one of the above items <1> to <8>. At least one of the aforementioned coloring patterns. &lt;15&gt; A display device comprising the substrate for a display device according to the above &lt;14&gt;. [Embodiment] The embodiment of the invention is described in detail below. The photosensitive resin composition of the present invention will be described in detail, and the photo spacer using the photosensitive resin composition, a method for forming the same, a protective film, a colored pattern, and a display device will be described in detail. a substrate, and a display device. <<Photosensitive Resin Composition>> The photosensitive resin composition of the present invention is at least a resin, a polymerizable compound having the structural portion (I) shown below, and a photopolymerization initiator. Further, other components may be further used as needed. In the case where a photosensitive resin composition is generally used to form a pattern structure (for example, a photo spacer, a coloring pattern, or the like, the same applies hereinafter) and a protective film in the case of 200949445, it is easy to cause polymerization hardening to be caused by exposure alone. Sufficient, in order to further accelerate the polymerization hardening, it is generally applied to heat treatment at a high temperature after exposure to development. However, when a heat treatment is applied at a high temperature, the formed pattern structure or the protective film is deteriorated, or the pattern structure and the protective film which have been formed on the substrate are deteriorated by repeated application of heat. For example, in the case of forming a photo spacer on a color filter substrate having a colored pattern, the photo spacer itself thus formed may be deteriorated, and the colored pattern already formed on the substrate may be imparted by The heat is getting worse. On the other hand, in the present invention, since the composition of the photosensitive resin composition accelerates the polymerization during the exposure, the moldability is excellent, and the polymer hardenability at the time of exposure is improved, and the film is heated at a low temperature (for example, 1 45 ° C or less). A uniform pattern structure or a protective film may be formed without heat treatment. Thereby, it is possible to suppress not only the pattern structure and the shape shift of the protective film, but also to effectively suppress the deterioration of the pattern structure and the protective film formed as described above, and the established pattern structure and protective film on the substrate. Deterioration due to repeated heat. 〇 Hereinafter, a resin, a polymerizable compound having a structural portion (I), a photopolymerization initiator, and other components will be described. &lt;Polymerizable compound having a structural part (I)&gt; The photosensitive resin composition of the present invention contains a polymerizable compound having the following structural part (I) (hereinafter referred to as "specifically polymerizable compound J") At least one type of polymerizable compound is subjected to a radical reaction from a photopolymerization initiator to be described later, and causes a polymerization reaction to form a cured film. The effect by the specific polymerizable compound is not clear, but it is presumed that The structure shown in the following structural part (I) is such that the reaction of the unsaturated double-10-200949445 bond portion at the time of exposure is accelerated, so that it is excellent in polymerization hardenability.

X OH (I) 〇 前述構造部分(I)中’ X係表示氫原子或甲基,又,式 中的「*」係表示結合鍵。 Φ 本發明中的特定聚合性化合物若爲前述具有構造部分 (I)之化合物,則沒有特別地限制,可選擇本發明的感光性 樹脂組成物的任意1種或2種以上而構成。 具有構造部分(I)之化合物係可舉例如:具有1個構造 部分⑴之化合物、2或3個以上的構造部分(I)係在各結合 鍵(*)間經由2價或3價以上的連結基而鍵結之化合物、 及2個的構造部分(I)係以各結合鍵(*)而直接鍵結之化合 物。 具有1個構造部分(I)之化合物係可舉例如:在構造部 分(I)的結合鍵(*)、例如在1價烴基之碳-碳間,鍵結含有 至少1個醚鍵(-〇-)之連結基的化合物。具有1個構造部分 (I)之化合物的具體例係可舉例如下述的化合物。此外’下 述的各具體例係表示「-X」爲「-Η」或「_CH3」之化合物 兩者。 -11- 200949445 χ ΟΗX OH (I) ’ In the above structural part (I), the 'X system represents a hydrogen atom or a methyl group, and the "*" in the formula represents a bond. Φ The specific polymerizable compound of the present invention is not particularly limited as long as it is a compound having a structural portion (I), and any one or two or more of the photosensitive resin compositions of the present invention can be selected. The compound having a structural moiety (I) may, for example, be a compound having one structural moiety (1), or two or more structural components (I) via a divalent or trivalent or higher valence between each bonding bond (*). The compound to which the linking group is bonded and the two structural parts (I) are compounds which are directly bonded by each bonding bond (*). The compound having one structural moiety (I) may, for example, be a bond (*) in the structural moiety (I), for example, a carbon-carbon in a monovalent hydrocarbon group, and the bond contains at least one ether bond (-〇) -) a compound of a linking group. Specific examples of the compound having one structural portion (I) include the following compounds. Further, each of the specific examples described below indicates that "-X" is a compound of "-Η" or "_CH3". -11- 200949445 χ ΟΗ

'CH-O- -CH2j-〇-CH3 ’η'CH-O- -CH2j-〇-CH3 ’η

χο X ΟΗ η為1〜8的整數 ο. 、CH-0-{-CH2j-0-CH2CH3 /ηΧο X ΟΗ η is an integer from 1 to 8 ο. , CH-0-{-CH2j-0-CH2CH3 /η

OH n為1〜8的整數 ΟΗ ,ο. Φ ο ❿OH n is an integer from 1 to 8 ΟΗ , ο. Φ ο ❿

oh2o-ch2—ch-ch2-o-ch3 ch3 ch2-〇-ch2—CH-CH2-O-CH3Oh2o-ch2—ch-ch2-o-ch3 ch3 ch2-〇-ch2—CH-CH2-O-CH3

η CH2j-CH3 n、m為1 ~8的整數 H3C ch3\/ CH2-〇-CH2—C-CH2-O-CH3 CH2-〇-CH2-( )—CH2-O-CH3η CH2j-CH3 n, m is an integer from 1 to 8 H3C ch3\/ CH2-〇-CH2—C-CH2-O-CH3 CH2-〇-CH2-( )-CH2-O-CH3

X OHX OH

200949445200949445

X OHX OH

e 〇 〇 OCCH3 H3CC〇v 1 OCH2 〇 〇 H3CCO. 〇 11 H3CCO*e 〇 〇 OCCH3 H3CC〇v 1 OCH2 〇 〇 H3CCO. 〇 11 H3CCO*

HO. HO-HKT ΌHO. HO-HKT Ό

OCH2 〇 OCCH3 OH OCH: ΌΗ 、〇H OH X 〇 〇OCH2 〇 OCCH3 OH OCH: ΌΗ, 〇H OH X 〇 〇

OH X 〇 〇OH X 〇 〇

X 其中,從溶解性、黏度等的觀點,以構造部分(i)的結 -13- 200949445 合鍵(*)上鍵結有醚基、環氧乙烷基、醇基等之化合物爲 佳,特別是以醚、環氧乙烷基等爲佳。 前述2價或3價以上的連結基係可從多價的基之中任 意地選擇,可舉例如:2價或3價以上的烴基、在2價或 3價以上的烴基之碳-碳間含有1或2個以上的醚鍵(-0-) 之基、-〇-、-S_、酯鍵、醯胺基、胺基等、及組合此等之 至少2者的2價基等。 2價或3價以上的連結基的具體例係如下所示。但是, φ 在本發明並不受限於此等。此外,具體例中的「*」係表 示結合鍵。 ^ 瘳 -14- 200949445X Among them, from the viewpoints of solubility, viscosity, etc., it is preferable to bond a compound such as an ether group, an oxirane group or an alcohol group to a bond (*) of the structure (i). It is preferably an ether, an oxirane group or the like. The above-mentioned divalent or trivalent or higher linking group may be arbitrarily selected from the polyvalent group, and examples thereof include a divalent or trivalent or higher hydrocarbon group and a carbon-carbon intermetallic group having a divalent or trivalent or higher hydrocarbon group. A group containing one or two or more ether bonds (-0-), -〇-, -S_, an ester bond, a guanamine group, an amine group, and the like, and a divalent group or the like in which at least two of them are combined. Specific examples of the linking group of divalent or trivalent or higher are as follows. However, φ is not limited to this invention in the present invention. Further, "*" in the specific example indicates a binding key. ^ 瘳 -14- 200949445

OH * —CH2-O-CH2-CH-CH2-O-CH2- *OH * —CH2-O-CH2-CH-CH2-O-CH2- *

* 一 H2CO* One H2CO

* 一CH2-0~CH2-CH-0-CH2— ** One CH2-0~CH2-CH-0-CH2— *

HO 、OCH2—* HO OCH2-* * _CH2-0_CH2-CH2_CH2-CH2-0-CH2_ * HO^J^O *-h2co^HO, OCH2—* HO OCH2-* * _CH2-0_CH2-CH2_CH2-CH2-0-CH2_ * HO^J^O *-h2co^

CH3CH3 * —CH2-0-CH2-C-CH2-0-CH2-* OCH2一* * - H2CO 人 OCH2 - * CH2~0-CH2~ ** -CH2-0-CH2 HO- -H2C〇&quot; och2. 'OCH,-CH3CH3 * —CH2-0-CH2-C-CH2-0-CH2-* OCH2一* * - H2CO Human OCH2 - * CH2~0-CH2~ ** -CH2-0-CH2 HO- -H2C〇&quot; och2 . 'OCH,-

*-H2CO I OCH2 - * *_h2co、」*-H2CO I OCH2 - * *_h2co,"

*-h2co och2-* * -HjCO^ ^OCHj - * *—h2co och2-* 從曝光時的聚合進行快速且能進行良好的硬化、即使 經低溫加熱與無加熱處理、以能形成有均一性之圖案構造 物、保護膜的觀點,較佳係在分子內具有2或3個以上的 前述構造部分(I)之特定聚合性化合物。 此外,基於相同的觀點,較佳係在分子內具有2個構 -15- 200949445 造部分(I)、鍵結含有構造部分⑴之相同的2個基之對稱構*-h2co och2-* * -HjCO^ ^OCHj - * *-h2co och2-* Fast and good hardening from polymerization at the time of exposure, even after low-temperature heating and no heat treatment, to form uniformity The viewpoint of the pattern structure and the protective film is preferably a specific polymerizable compound having two or more of the structural portions (I) in the molecule. Further, based on the same point of view, it is preferred to have two structures in the molecule: -15-200949445 (I), and the bond contains the same two bases of the structure (1).

造、亦即含有連結2個構造部分(I)之連結基的分子構造全 體係構成爲對稱構造之化合物爲佳。對稱構造的較佳化合 物係可舉例如:下述構造式(11)所示之化合物。It is preferred to form a compound having a symmetrical structure in which the entire molecular structure of the linking group linking the two structural portions (I) is contained. Preferred compounds of the symmetrical structure include, for example, the compounds represented by the following structural formula (11).

2價烴基之碳-碳間含有至少1個醚鍵(-〇-)之連結基,較佳 爲在2價烴基之碳-碳間含有至少1個醚鍵(-0-)之連結基。 R所表示的「含2價烴基之基」係可舉例如:僅以 CnH2n(ng 1)所示之烴基所構成的2價基,及以CnH2n(n 21)所示之烴基,與組合選自於醚鍵、酯鍵、醯胺基、胺 基等之至少1個的2價基等。η的範圍係在1~8爲適宜。 又,R所表示的「在2價烴基之碳-碳間含有至少1個 ® 醚鍵之連結基」若爲含有配置於碳-碳間之1或2個以上的 氧原子與碳原子及氫原子之2價基的話,沒有特別地限 制,可舉例如:含有- (AL及/或AR)_0 — (AL及/或aR)_、 -(AL 及 / 或 AR)-0-(AL 及 / 或 AR)-0-、-(AL 及 / 或 AR)-0-(AL及/或AR)_〇_(AL及/或之2價基爲適宜。 此外,AL表示伸院基,AR表示伸芳基。 前述伸焼基(AL)係可爲直鏈、分枝鏈中任—者,前述 伸烷基及伸芳基(AR)係可爲無取代、亦可爲以取代基所取 代的。經取代之情形的取代基係可舉例如:與在下述Μ -16- 200949445 中所列舉的下述取代基爲相同之基。 R之中’從曝光時的聚合進行快速且能進行良好的硬 化之點’較佳爲含有2以上的氧原子之情形,更佳係 -CH2-〇-Ra-〇-CH2-之情形。此處,Ra係表示由伸院基部 位、伸芳基部位、及此等組合之部位所構成群組所選擇之 連結基。在Ra所示伸烷基部位的碳-碳鍵間,可更配置有 1或2個以上的醚鍵。 前述Ra所表示之伸烷基部位係沒有特別地限制,可無 © 取代、亦可經取代基所取代的。經取代之情形的取代基係 可舉例如:碳數1~8的烷基(例;甲基、乙基、丁基、己基、 辛基)、羥基、鹵素基等的1價取代基。 伸烷基部位的具體例係可舉例如:亞甲基、伸乙基、 伸丙基、伸丁基、2 -羥丙基、2 -甲基伸乙基、2 -二甲基伸 乙基、伸環己基等。 其中,前述伸烷基部位從溶劑溶解性、析出抑制之點, 以碳數1~8的取代或無取代之伸烷基爲佳,碳數1~6的取 胃代或無取代之伸烷基爲較佳。 前述Ra所表示之伸芳基部位係沒有特別地限制,可無 取代、亦可經取代基所取代的。經取代之情形的取代基係 可舉例如:與在前述伸烷基部位的情形爲相同的取代基。 伸芳基部位的具體例係可舉例如伸苯基、伸萘基等。 碳代 以取 , 的 點 8 之 6 制數 抑碳 出, 析佳 、 爲 性基 解芳 溶伸 劑之 溶代 從取 係無 位或 部代 基取 芳的 伸 ο , ί 中 6 其數 例 舉 可 係 位 部 合 組 的 位 部 基 芳 ο 圭伸 MB 較及 爲位 基部 芳基 伸烷 之伸 代, 取又 無 或 -17- 200949445 如 : -C6H4-C(CH3}2-C6H4- 、 -(CH2)2-〇-C6H4-C(CH3)2-C6H4-〇-(CH2)2- 、 -(CH2)3-〇-C6H4-C(CH3)2-C6H4-〇-(CH2)3-等。 前述R所表示之「-CH2-〇-Ra-〇-CH2-」的具體例係 如下所示。但是,在本發明並不受限於此等。此# ’胃胃The carbon-carbon of the divalent hydrocarbon group contains at least one ether bond (-〇-) linking group, and preferably a linking group containing at least one ether bond (-0-) between the carbon-carbon of the divalent hydrocarbon group. The "divalent hydrocarbon group-containing group" represented by R is, for example, a divalent group composed only of a hydrocarbon group represented by CnH2n (ng 1), and a hydrocarbon group represented by CnH2n (n 21), and a combination thereof. A divalent group derived from at least one of an ether bond, an ester bond, a guanamine group, and an amine group. The range of η is suitable from 1 to 8. In addition, the "linking group containing at least one ® ether bond between carbon-carbon of a divalent hydrocarbon group" includes one or two or more oxygen atoms and carbon atoms and hydrogen disposed between carbon and carbon. The atomic divalent group is not particularly limited, and may include, for example, - (AL and/or AR)_0 - (AL and / or aR) _, - (AL and / or AR) - 0 - (AL and / or AR)-0-, -(AL and / or AR)-0-(AL and / or AR)_〇_(AL and / or 2 valence is suitable. In addition, AL stands for extension, AR The above-mentioned stretching group (AL) may be any of a straight chain or a branched chain, and the alkylene group and the extended aryl group (AR) may be unsubstituted or substituted. The substituents in the case of substitution may, for example, be the same groups as those exemplified below in Μ -16- 200949445. In the case of R, polymerization from exposure is rapid and can be carried out. The point of good hardening is preferably a case where two or more oxygen atoms are contained, and more preferably -CH2-〇-Ra-〇-CH2-. Here, the Ra system is represented by a stretching base portion and an extended aryl portion. And the group selected by the combination of these parts The linking group is selected. One or two or more ether bonds may be further disposed between the carbon-carbon bonds of the alkyl group represented by Ra. The alkyl group represented by the above Ra is not particularly limited, and may be omitted. The substituent may be substituted or substituted with a substituent. The substituent in the case of substitution may, for example, be an alkyl group having 1 to 8 carbon atoms (for example, methyl group, ethyl group, butyl group, hexyl group or octyl group). A monovalent substituent such as a hydroxyl group or a halogen group. Specific examples of the alkylene moiety include a methylene group, an ethyl group, a propyl group, a butyl group, a 2-hydroxypropyl group, and a 2-methyl group. Ethyl, 2-dimethylexylethyl, cyclohexyl, etc. wherein the alkylene moiety is from a solvent solubility and precipitation inhibition point, and a substituted or unsubstituted alkyl group having 1 to 8 carbon atoms is Preferably, the alicyclic or unsubstituted alkylene group having 1 to 6 carbon atoms is preferred. The exoaryl moiety represented by the above Ra is not particularly limited and may be unsubstituted or substituted with a substituent. The substituent in the case of substitution may, for example, be the same substituent as in the case of the above alkylene moiety. Specific examples of the aryl moiety For example, a phenyl group, a naphthyl group, etc., a carbon number is taken, and a point 8 is a number of carbons, and a solution is obtained, and the dissolution of the aromatic swellable agent is taken from the no-position or the partial base. The extension of the ο, ί zhong 6 number of examples can be tied to the group of the base part of the base of the ο 圭 伸 MB compared to the base aryl aralkyl extension, take no or -17- 200949445 such as: -C6H4 -C(CH3}2-C6H4-, -(CH2)2-〇-C6H4-C(CH3)2-C6H4-〇-(CH2)2-, -(CH2)3-〇-C6H4-C(CH3) 2-C6H4-〇-(CH2)3- and the like. Specific examples of "-CH2-〇-Ra-〇-CH2-" represented by the above R are as follows. However, the invention is not limited thereto. This # ' stomach stomach

例中的「*」係表示結合鍵。 (1) OH ,CH2_〇~CH2_ * —CH2-〇-CH2~CH-CH2-〇-CH2一* (6) * —CH2-〇-CH2 ⑺The "*" in the example indicates a binding key. (1) OH , CH2_〇~CH2_ * —CH2-〇-CH2~CH-CH2-〇-CH2** (6) * —CH2-〇-CH2 (7)

(3) CH3 * -ch2-o-ch2-ch-o-ch2-* (4) * -CH2-O-CH2-CH2-CH2-CH2-O-CH2· ❹ (5) C^CH3 •—CH2-〇-CH2-C-CH2-〇-CH2— * (8) -H2CO' HO&quot; ⑼ 夕H 、och2-,(3) CH3 * -ch2-o-ch2-ch-o-ch2-* (4) * -CH2-O-CH2-CH2-CH2-CH2-O-CH2· ❹ (5) C^CH3 •—CH2 -〇-CH2-C-CH2-〇-CH2— * (8) -H2CO' HO&quot; (9) Xi H, och2-,

HO 〇CH2_* H0十。十OH *-H2co UH 再者,前述Ra所表示之連結基從曝光時的聚合反應性 爲良好之點,以對稱構造爲佳。對稱構造之連結基的具體 例係可舉例如:上述的具體例(1)、(2)、(4)~(9)等的情形 做爲具體之例所列舉的。 本發明中特定聚合性化合物的分子量’以重量平均分 -18- 200949445 子量計爲100~3000爲佳,100~2000爲更佳’ 100- 1500 爲特佳。特定聚合性化合物的分子量爲1〇〇以上,從抑制 昇華之點而言係爲所期望的,爲3000以下從溶解性之點 而言係爲所期望的。 此外,重量平均分子量係以凝膠滲透層析法(GPC)來進 行測定。關於GPC係詳細表示於後記之實施例的項目中。 以下,顯示前述具有構造部分(I)之特定聚合性化合物 的具體例〔例示化合物(1)~(20)及(M-1)~(M-15)〕。但是, 0 在本發明並不受限於此等。HO 〇CH2_* H0 ten. Further, the OH *-H2co UH is preferably a symmetrical structure in which the linking group represented by the above-mentioned Ra is excellent in polymerization reactivity at the time of exposure. Specific examples of the linking group of the symmetrical structure include, for example, the specific examples (1), (2), (4) to (9) described above, and are exemplified as specific examples. The molecular weight of the specific polymerizable compound in the present invention is preferably from 100 to 3,000 by weight average of from -18 to 200949445, and more preferably from 100 to 2,000 is more preferably -100 to 1500. The molecular weight of the specific polymerizable compound is 1 Å or more, which is desirable from the viewpoint of suppressing sublimation, and 3,000 or less is desirable from the viewpoint of solubility. Further, the weight average molecular weight is measured by gel permeation chromatography (GPC). The GPC system is shown in detail in the item of the following example. Hereinafter, specific examples (exemplary compounds (1) to (20) and (M-1) to (M-15)) of the specific polymerizable compound having the structural portion (I) will be described. However, 0 is not limited to this invention in the present invention.

-19- 200949445-19- 200949445

(1) 〇H 〇(1) 〇H 〇

OHOH

OHOH

(5) OH CH2-O-CH2-CH-CH2-O-CH2(5) OH CH2-O-CH2-CH-CH2-O-CH2

CH3 I CH2-0-CH2-CH-0-CH2CH3 I CH2-0-CH2-CH-0-CH2

OHOH

OHOH

OHOH

OH 〇, OH2-O-CH-CH2-CH2-O-CH2OH 〇, OH2-O-CH-CH2-CH2-O-CH2

CH 3CH 3

-20- 200949445 (6)-20- 200949445 (6)

OH nr O, ,/CH3 o CH2-0-CH2-C-CH2-0-CH2 、σOH nr O, , /CH3 o CH2-0-CH2-C-CH2-0-CH2 , σ

OH o (7) OH 0、 CHfO-CH:OH o (7) OH 0, CHfO-CH:

.CH2-O-CH2 11 γ^〇Λ^&gt;.CH2-O-CH2 11 γ^〇Λ^&gt;

OH Ο (8) OH 认 CHrO 〇 oOH Ο (8) OH recognize CHrO 〇 o

O-CH2 |[O-CH2 |[

OHOH

⑼ O(9) O

O 〇O 〇

HO-HO-

OH (10)OH (10)

OH ⑩ ~~H2C〇y 〇 /〇H OH OCH2—1 -° -21 - 200949445 (11) OH Ο ch3 〇 (1&gt;3 Λγ° 〇OH 10 ~~H2C〇y 〇 /〇H OH OCH2—1 -° -21 - 200949445 (11) OH Ο ch3 〇 (1&gt;3 Λγ° 〇

OH CH 3 參 (13)OH CH 3 Reference (13)

〒Η3 CH2-O-CH2-CH-O-CH2 Ο 〇〒Η3 CH2-O-CH2-CH-O-CH2 Ο 〇

OH CH3 OH 〇O, 〇OH CH3 OH 〇O, 〇

〇 OH CH3 OH CH2 -〇-CH-CH2-CH2-〇-CH2 ch3 〇 ❹ OH ihu -22- 200949445 (16) CH3Λτ°' ο〇 OH CH3 OH CH2 -〇-CH-CH2-CH2-〇-CH2 ch3 〇 ❹ OH ihu -22- 200949445 (16) CH3Λτ°' ο

OH C々3/CH3 Hn-C-CH^ 〇 CH2~0~0H2~0&quot;0H2~0~0H2 (17) OH CH3 ,ch2-o-ch2 CH3OH C々3/CH3 Hn-C-CH^ 〇 CH2~0~0H2~0&quot;0H2~0~0H2 (17) OH CH3 ,ch2-o-ch2 CH3

OH Ό人f OH CH3 、CHr〇-CH2OH Ό人 f OH CH3 , CHr〇-CH2

(18)(18)

-23--twenty three-

200949445 (Μ-D (Μ-2) ^Ύ'200949445 (Μ-D (Μ-2) ^Ύ'

ΟΗ I ~CHr0-CH2-CH-CH2-0-CH3ΟΗ I ~CHr0-CH2-CH-CH2-0-CH3

PCI (Μ-3)PCI (Μ-3)

1、m=1〜8的整教 (Μ-4) OCH〇1, m = 1 ~ 8 of the whole religion (Μ-4) OCH〇

(M-5) OH —〇Η2·〇、(M-5) OH —〇Η2·〇,

❹ (M-7)❹ (M-7)

(M-6) &quot;Y-r0 Ho O o-ch3 \A OCHy OH OCH2(M-6) &quot;Y-r0 Ho O o-ch3 \A OCHy OH OCH2

OH I och2 ^OCHo nrc .0 OH HO. /OCH2 I N f OH οοηΓι^ 0 i^〇ch2-L/°'Y^ —och2 )CH2 oh (M-8)OH I och2 ^OCHo nrc .0 OH HO. /OCH2 I N f OH οοηΓι^ 0 i^〇ch2-L/°'Y^ —och2 )CH2 oh (M-8)

° OH ° OH och2 och2 un^°r 丫&quot;r och2、 N)CH2 ?h 、0, 200949445 (M-9) ch3° OH ° OH och2 och2 un^°r 丫&quot;r och2, N)CH2 ?h , 0, 200949445 (M-9) ch3

OHOH

OH Q\^—CH2-〇-CH2—CH-CH2-O-CH3OH Q\^—CH2-〇-CH2—CH-CH2-O-CH3

(M-10)(M-10)

(M-12)(M-12)

-25- 200949445 (Μ-13)-25- 200949445 (Μ-13)

(Μ-14) OH ΗΟ、 och2(Μ-14) OH ΗΟ, och2

Ο OH~~οαί ο ΌΟ OH~~οαί ο Ό

(Μ-15) ch3 oh h OH ' och2(Μ-15) ch3 oh h OH ' och2

OH -〇CH2OH -〇CH2

-26 200949445 具有構造部分(I)之聚合性化合物(特定聚合性化合物) 在感光性樹脂組成物中的含量,係相對於組成物的全固體 成分,以1~60質量%爲佳,10~55質量%爲較佳。特定聚 合性化合物的含量爲1質量%以上,則曝光時的聚合硬化 性係爲良好,可形成抑制形狀偏移之圖案構造物、保護膜, 且亦可避免經由像在低溫下的加熱處理或無加熱處理所形 成之圖案構造物、保護膜的惡化或已經設立的圖案構造 物、保護膜的惡化。又,爲60質量%以下則對於液體的黏 〇 度、硬化物的硬度等的調整、曝光感度的調整等係爲有效。 在本發明的感光性樹脂組成物中,除了上述的特定聚 合性化合物以外,亦可更含有具有乙烯性不飽和鍵之其他 的聚合性化合物。其他的聚合性化合物係可由構成眾所周 知的組成物之聚合性化合物中來選擇使用,可舉例如:特 開2006-23696號公報的段落號碼[0010卜[0020]中記載 之成分、與特開 2006-6492 1 號公報的段落號碼 [0027卜[0053]中所記載之成分。 ® 在不損及本發明效果之範圍內可含有其他的聚合性化 合物。 在本發明中,含有特定聚合性化合物之聚合性化合物 的合計量、與後述之樹脂的合計量之質量比率〔聚合性化 合物的合計量/樹脂的合計量〕,從顯像性、力學特性之觀 點,以0.5~2.0爲佳,0.6~1.8爲較佳,0.7~1_5爲特佳。 質量比率在前述範圍内則能得到良好的顯像性,例如當形 成光間隔物等時’能夠得到具有力學強度之光間隔物。 &lt;樹脂&gt; -27- 200949445 本發明的感光性樹脂組成物係含有至少一種的樹脂。 樹脂係沒有特別地限制,以對於鹸性水溶液顯示膨潤性之 化合物爲佳,以對於鹼性水溶液顯示溶解性之化合物爲較 佳。 對於鹸性水溶液顯示膨潤性或溶解性之樹脂係可舉例 如:具有酸性基者爲適宜,具體上以在環氧化合物導入乙 烯性不飽和雙鍵與酸性基之化合物(環氧丙烯酸酯化合 物)、於側鏈具有(甲基)丙烯醯基及酸性基之乙烯基共聚 φ 物、環氧丙烯酸酯化合物、與在側鏈具有(甲基)丙烯醯基 及酸性基之乙烯基共聚物的混合物、馬來醯胺酸系共聚物 等爲佳。 前述酸性基係沒有特別地限制,可視其目的來適當選 擇,可舉例如:羧基、磺酸基、磷酸基等,此等之中,從 原料的入手性等之觀點,以羧基爲佳。 樹脂在本發明之感光性樹脂組成物中的含量,係相對 於感光性樹脂組成物的全固體成分,以5~ 70質量%爲佳, © 1〇~50質量%爲較佳。該含量爲5質量%以上則能維持感 光樹脂層的膜強度,且能良好地保持該感光樹脂層的表面 黏著性,爲70質量%以下則曝光感度係爲良好。 在本發明中的樹脂係從在聚合硬化後施加外力而變形 之際的變形回復性爲良好之點,較佳爲含有在側鏈具有分 枝及/或脂環構造、酸性基、以及乙烯性不飽和鍵之樹脂(以 下,亦稱爲「樹脂A」)的至少1種之情形。 樹脂A係具有酸性基而具備顯像性的同時,藉由具有 乙烯性不飽和鍵,由於具備高的聚合反應性、且具有優異 -28- 200949445 的液保存性及在乾膜的經時保存性,所以能賦予圖案構造 物可控制成所期望的形狀及膜厚(高度等)的控制性。又, 具有分枝及/或脂環構造,且可提高所形成之圖案構造物受 到外力之際的壓縮彈性率、由壓縮變形的變形回復性。因 此,在構成例如顯示裝置用的光間隔物等的圖案構造物上 係爲有用的。 此處,分枝及/或脂環構造、酸性基、以及乙烯性不飽 和鍵係可含有於分別不同的側鏈中,亦可組合一部份而含 0 有於相同的側鏈中,也可以全部含有於相同的側鏈中。 此外’在本說明書中,(甲基)丙烯醯基係表示丙烯醯 基或甲基丙烯醯基,(甲基)丙烯酸酯係表示丙烯酸酯或甲 基丙烯酸酯’(甲基)丙烯酸係表示丙烯酸或甲基丙烯酸,(甲 基)丙烯醢胺係表示丙烯醯胺或甲基丙烯醯胺,(甲基)丙烯 醯苯胺係表示丙烯醯苯胺或甲基丙烯醯苯胺。 (分枝及/或脂環構造) 樹脂A係在鍵結於樹脂主鏈之側鏈上,至少含有1種 © 的分枝及/或脂環構造。分枝及/或脂環構造係可複數含有 於樹脂A的側鏈中。又,分枝及/或脂環構造係可與酸性基 及/或乙稀性不飽和鍵一起含有於樹脂A的側鏈中。 又’分枝及/或脂環構造係可直接鍵結於樹脂A的主鏈 上’且可僅以分枝及/或脂環構造來構成樹脂A的側鏈,亦 可透過2價的有機連結基鍵結於樹脂a的主鏈上,來構成 具有分枝及/或脂環構造之基的樹脂A的側鏈。 前述2價的有機連結基較佳爲選自於伸烷基、伸芳 基、醋基、酿胺基、及醚基之一者或其組合。前述伸烷基 -29- 200949445 係以總碳數1~20的伸烷基爲佳,尤佳爲1~10。具體上, 可舉例如:亞甲基、伸乙基、伸丙基、伸丁基、伸戊基、 伸己基、伸辛基、十二烯基、十八烯基等,此等係可具有 分枝/環狀構造、官能基,尤佳爲亞甲基、伸乙基、伸辛基。 前述伸芳基係以總碳數6~20的伸芳基爲佳,尤佳爲 6~12。具體上,可舉例如:伸苯基、伸聯苯基、萘基、蒽 基等,此等係可具有分枝、官能基,尤佳爲伸苯基、伸聯 苯基。 ❹ 分枝及/或脂環構造係從顯像性、彈性回復率等的觀 點,以能透過至少酯基(-COO-)鍵結於樹脂A之主鏈的形 態爲佳。該形態係分枝及/或脂環構造不限於僅透過酯基 (-COO-)而鍵結於樹脂A之主鏈的形態,亦可爲分枝及/或 脂環構造爲透過含有酯基(-COO-)之2價的連結基而鍵結 於樹脂A之主鏈的形態。亦即,分枝及/或脂環構造與酯鏈 之間、及/或酯鏈與樹脂A的主鏈之間,亦可含有其他的原 子與其他的連結基。 ® 前述分枝構造係可舉例如碳原子數3~12個之分枝狀 的烷基,例如以異丙基、異丁基、第二丁基、第三丁基、 異戊基、新戊基、2-甲基丁基、異己基、2-乙基己基、2-甲基己基、異戊基、第三戊基、3-辛基、第三辛基等爲佳。 此等之中,尤以異丙基、第二丁基、第三丁基、異戊基等 爲更佳,以異丙基、第二丁基、第三丁基等爲特佳。 前述脂環構造係可舉例如碳原子數5〜20個的脂環式 烴基’例如以環戊基、環己基、環庚基、環辛基、降萡基、 異萡基、金剛烷基、三環癸基、二環戊烯基、二環戊基、 -30- 200949445 三環戊烯基、及三環戊基等以及具有此等之基爲 之中,尤以二環戊烯基、環己基、降萡基、異萡 烷基、三環癸基、三環戊烯基、三環戊基等爲更 環戊烯基、環己基、降萡基、異萡基、三環戊烯 佳,以二環戊烯基、三環戊烯基爲特佳。 再者,具有分枝及/或脂環構造之基係以具有 (3)所示之基所構成的形態爲佳。-26 200949445 The content of the polymerizable compound (specifically polymerizable compound) having a structure (I) in the photosensitive resin composition is preferably from 1 to 60% by mass based on the total solid content of the composition, 10~ 55 mass% is preferred. When the content of the specific polymerizable compound is 1% by mass or more, the polymer curable property at the time of exposure is good, and a pattern structure or a protective film which suppresses the shape shift can be formed, and heat treatment at a low temperature or There is no deterioration of the pattern structure formed by the heat treatment, the deterioration of the protective film, or the established pattern structure or the protective film. When the amount is 60% by mass or less, the viscosity of the liquid, the hardness of the cured product, and the like, and the adjustment of the exposure sensitivity are effective. In addition to the specific polymerizable compound described above, the photosensitive resin composition of the present invention may further contain another polymerizable compound having an ethylenically unsaturated bond. Other polymerizable compounds may be selected from the group of the polymerizable compounds constituting the well-known composition, and the composition of the paragraph number [0010] [0020], and the special opening 2006 of JP-A-2006-23696, for example. -6492 Paragraph No. 1 No. 1 [0027] [0053] The components described in [0053]. ® may contain other polymerizable compounds within the range not impairing the effects of the present invention. In the present invention, the mass ratio of the total amount of the polymerizable compound containing the specific polymerizable compound to the total amount of the resin to be described later (the total amount of the polymerizable compound/the total amount of the resin) is from the developing property and the mechanical property. The viewpoint is preferably 0.5 to 2.0, 0.6 to 1.8 is preferred, and 0.7 to 1_5 is particularly good. When the mass ratio is within the above range, good developability can be obtained, for example, when a photo spacer or the like is formed, a photo spacer having mechanical strength can be obtained. &lt;Resin&gt; -27- 200949445 The photosensitive resin composition of the present invention contains at least one kind of resin. The resin is not particularly limited, and is preferably a compound which exhibits swellability to an aqueous alkaline solution, and preferably a compound which exhibits solubility in an aqueous alkaline solution. The resin which exhibits swellability or solubility in an aqueous alkaline solution is, for example, a compound having an acidic group, and specifically a compound (epoxy acrylate compound) in which an ethylenically unsaturated double bond and an acidic group are introduced into an epoxy compound. a mixture of a vinyl copolymer φ having a (meth) acryl fluorenyl group and an acidic group, an epoxy acrylate compound, and a vinyl copolymer having a (meth) acryl fluorenyl group and an acidic group in a side chain A maleic acid-based copolymer or the like is preferred. The acidic group is not particularly limited, and may be appropriately selected depending on the intended purpose, and examples thereof include a carboxyl group, a sulfonic acid group, and a phosphoric acid group. Among them, a carboxyl group is preferred from the viewpoint of the starting property of the raw material and the like. The content of the resin in the photosensitive resin composition of the present invention is preferably from 5 to 70% by mass based on the total solid content of the photosensitive resin composition, and is preferably from 1 to 50% by mass. When the content is 5% by mass or more, the film strength of the photosensitive resin layer can be maintained, and the surface adhesiveness of the photosensitive resin layer can be favorably maintained. When the content is 70% by mass or less, the exposure sensitivity is good. The resin in the present invention is excellent in deformation recovery property when deformed by applying an external force after polymerization hardening, and preferably contains a branching and/or alicyclic structure, an acidic group, and an ethyl group in a side chain. At least one of a resin having an unsaturated bond (hereinafter also referred to as "resin A"). Resin A has an acidic group and has developability, and has an ethylenically unsaturated bond, and has high polymerization reactivity, and has excellent liquid preservability of -28-200949445 and storage over time of dry film. Since the pattern structure can be controlled to have a desired shape and controllability of the film thickness (height, etc.). Further, it has a branching and/or alicyclic structure, and can improve the compressive modulus of elasticity of the formed pattern structure when subjected to an external force, and the deformation recovery property by compression deformation. Therefore, it is useful for forming a pattern structure such as a photo spacer for a display device. Here, the branching and/or alicyclic structure, the acidic group, and the ethylenically unsaturated bond may be contained in different side chains, or may be combined in one part and 0 in the same side chain, They may all be contained in the same side chain. Further, in the present specification, the (meth)acrylonitrile group means an acryl fluorenyl group or a methacryl fluorenyl group, and the (meth) acrylate type means an acrylate or methacrylate type '(meth)acrylic acid means acrylic acid Or methacrylic acid, (meth) acrylamide refers to acrylamide or methacrylamide, and (meth) acryl anilide means acrylamide or methacrylamide. (Branch and/or alicyclic structure) Resin A is composed of at least one kind of branching and/or alicyclic structure bonded to the side chain of the resin main chain. The branched and/or alicyclic structure may be plurally contained in the side chain of the resin A. Further, the branching and/or alicyclic structure may be contained in the side chain of the resin A together with the acidic group and/or the ethylenically unsaturated bond. Further, the 'branched and/or alicyclic structure can be directly bonded to the main chain of the resin A' and the side chain of the resin A can be formed only by the branching and/or alicyclic structure, and the organic chain can also be transmitted through the divalent organic The linking group is bonded to the main chain of the resin a to form a side chain of the resin A having a branching and/or alicyclic structure. The above divalent organic linking group is preferably selected from one of an alkylene group, an extended aryl group, a vinegar group, an amine group, and an ether group, or a combination thereof. The alkylene group -29-200949445 is preferably an alkylene group having a total carbon number of from 1 to 20, particularly preferably from 1 to 10. Specifically, for example, a methylene group, an ethylidene group, a propyl group, a butyl group, a pentyl group, a hexyl group, a decyl group, a dodecenyl group, an octadecyl group, etc. may be mentioned. Branch/ring structure, functional group, especially preferably methylene, ethyl, and octyl. The above-mentioned aryl group is preferably a aryl group having a total carbon number of 6 to 20, particularly preferably 6 to 12. Specifically, for example, a phenyl group, a phenylene group, a naphthyl group or a fluorenyl group may be mentioned, and these may have a branch or a functional group, and more preferably a phenyl group or a phenyl group. The branching and/or alicyclic structure is preferably in a form capable of permeating at least the ester group (-COO-) to the main chain of the resin A from the viewpoints of developmental properties, elastic recovery ratio, and the like. The branching and/or alicyclic structure of the form is not limited to a form in which the main chain of the resin A is bonded only by the ester group (-COO-), and the branch and/or the alicyclic structure may be configured to transmit the ester group. The divalent linking group of (-COO-) is bonded to the main chain of the resin A. That is, other atoms and other linking groups may be contained between the branching and/or alicyclic structure and the ester chain, and/or between the ester chain and the main chain of the resin A. ® The aforementioned branched structure may, for example, be a branched alkyl group having 3 to 12 carbon atoms, for example, an isopropyl group, an isobutyl group, a second butyl group, a third butyl group, an isobutyl group, a neopentane group. A group, 2-methylbutyl group, isohexyl group, 2-ethylhexyl group, 2-methylhexyl group, isopentyl group, a third pentyl group, a 3-octyl group, a third octyl group or the like is preferred. Among these, an isopropyl group, a second butyl group, a tert-butyl group, an isopentyl group or the like is more preferable, and an isopropyl group, a second butyl group, a third butyl group or the like is particularly preferable. The alicyclic structure may, for example, be an alicyclic hydrocarbon group having 5 to 20 carbon atoms, for example, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a decyl group, an isodecyl group, an adamantyl group, Tricyclodecyl, dicyclopentenyl, dicyclopentyl, -30- 200949445 tricyclopentenyl, and tricyclopentyl, and the like, especially dicyclopentenyl, Cyclohexyl, norbornyl, isodecyl, tricyclodecyl, tricyclopentenyl, tricyclopentyl, etc. are more cyclopentenyl, cyclohexyl, norbornyl, isodecyl, tricyclopentene Preferably, dicyclopentenyl and tricyclopentenyl are particularly preferred. Further, the base having a branched and/or alicyclic structure is preferably a form having a group represented by (3).

通式(3)中,X係表示2價的有機連結基,可 亦可具有取代基。7係表示1或2,11係表示0~15 前述2價的有機連結基係爲選自於伸烷基、 酯基、醯胺基、及醚基之一者或其組合爲佳,此 具有取代基。 ® 前述伸烷基係以總碳數1 ~ 2 0的伸烷基爲佳 1〜10的伸烷基。具體上,可舉例如亞甲基、伸乙 基、伸丁基、伸戊基、伸己基、伸辛基、十二烯 烯基等的基,此等係可具有分枝/環狀構造、官能 爲亞甲基、伸乙基、伸辛基。 前述伸芳基係以總碳數6~20的伸芳基爲佳 6~12的伸芳基。具體上,可舉例如伸苯基、伸聯 基、蒽基等,此等係可具有分枝、官能基,尤佳;i 伸聯苯基。 佳。此等 基、金剛 佳,以二 基等爲更 下述通式 通式(3) 無取代、 &gt;的整數。 伸芳基、 等係亦可 ,尤佳爲 基、伸丙 基、十八 基’尤佳 ,尤佳爲 苯基、萘 丨伸苯基、 -31- 200949445 經取代之情形的取代基,可舉例如具有烷基、羥基、 胺基、鹵素基、芳香環基、脂環構造之基等。 在樹脂A的合成中,用以將分枝及/或脂環構造導入側 鏈用的單體係可舉例如:苯乙烯類、(甲基)丙烯酸酯類、 乙烯基醚類、乙烯基酯類、(甲基)丙烯醯胺類等,以(甲基) 丙烯酸酯類、乙烯基酯類、(甲基)丙烯醯胺類爲佳,以(甲 基)丙烯酸酯類爲較佳。 在樹脂A的合成中,用以將分枝構造導入側鏈之具體 〇 單體係可舉例如:(甲基)丙烯酸異丙酯、(甲基)丙烯酸異丁 酯、(甲基)丙烯酸第二丁酯、(甲基)丙烯酸第三丁酯、(甲 基)丙烯酸異戊酯、(甲基)丙烯酸第三戊酯、(甲基)丙烯酸 第二異戊酯、(甲基)丙烯酸2-辛酯、(甲基)丙烯酸3-辛酯、 (甲基)丙烯酸第三辛酯等,其中,尤以(甲基)丙烯酸異丙 酯、(甲基)丙烯酸異丁酯、甲基丙烯酸第三丁酯等爲佳, 以甲基丙烯酸異丙酯、甲基丙烯酸第三丁酯等爲較佳。 在樹脂A的合成中,用以導入脂環構造於側鏈用的單 Ο 體係可舉例如具有碳原子數5~20個之脂環式烴基的(甲基) 丙烯酸酯。具體之例可舉例如:(甲基)丙烯酸(雙環〔2.2.1] 庚基-2)酯、(甲基)丙烯酸1-金剛烷酯、(甲基)丙烯酸2-金 剛烷酯、(甲基)丙烯酸3-甲基-1-金剛烷酯、(甲基}丙烯酸 3,5-二甲基-1-金剛烷酯、(甲基)丙烯酸3-乙基金剛烷酯、 (甲基)丙烯酸3-甲基-5-乙基-1-金剛烷酯、(甲基)丙烯酸 3,5,8 -三乙基-1-金剛烷酯、(甲基)丙烯酸3,5 -二甲基- 8-乙基-1-金剛烷酯、(甲基)丙烯酸2-甲基-2-金剛烷酯、(甲 基)丙烯酸2-乙基-2-金剛烷酯、(甲基)丙烯酸3-羥基-Ι α- 200949445 金剛烷酯、(甲基)丙烯酸八氫-4,7-蓋烷基茚-5-酯、(甲基) 丙嫌酸八氫_4,7 -蓋垸基節-1-基甲醋、(甲基)丙稀酸|__蓋 酯、(甲基)丙烯酸三環癸酯、(甲基)丙烯酸3-羥基-2,6,6-三甲基-雙環〔3.1.1〕庚酯、(甲基)丙烯酸3,7,7-三甲基 -4-羥基-雙環〔4_1.0〕庚酯、(甲基)丙烯酸(降)萡酯、(甲 基)丙烯酸異萡酯、(甲基)丙烯酸小茴香酯、(甲基)丙烯酸 2,2,5-三甲基環己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸 二環戊烯酯、(甲基)丙烯酸三環戊烯酯等。 〇 此等(甲基)丙烯酸酯之中,從體積越大的官能基壓縮 彈性率、變形回復性越良好之點,以(甲基)丙烯酸環己酯、 (甲基)丙烯酸(降)萡酯、(甲基)丙烯酸異萡酯、(甲基)丙烯 酸1-金剛烷酯、(甲基)丙烯酸2-金剛烷酯、(甲基)丙烯酸 小茴香酯、(甲基)丙烯酸1-蓋酯、(甲基)丙烯酸三環癸酯、 (甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸三環戊烯酯等爲 佳,以(甲基)丙烯酸環己酯、(甲基)丙烯酸(降)萡酯、(甲基) 丙烯酸異萡酯、(甲基)丙烯酸2-金剛烷酯、(甲基)丙烯酸 © 二環戊烯酯、(甲基)丙烯酸三環戊烯酯爲特佳。 又,在樹脂A的合成中,將脂環構造導入於側鏈用的 單體係可舉例如下述通式(4)或(5)所示之化合物。此處’在 通式(4)、(5)中,X係表示2價的有機連結基,R係表示氫 原子或甲基,y係表示1或2,η係表示〇~15。通式(4)、 (5)之中,尤以y=l或2、η = 0~8爲佳,較佳爲y=l或2、 n = 0~4(更佳爲n = 0~2)。通式(4)或(5)所示之化合物的較佳 具體例係可舉例如下述化合物D-1~D-11、T-1-T-12。 其中,從變形回復率之點,以下述通式(4)所示之化合 -33- 200949445 物爲佳。In the formula (3), X represents a divalent organic linking group and may have a substituent. 7 is a 1 or 2, and 11 is a 0 to 15. The divalent organic linking group is preferably one selected from the group consisting of an alkyl group, an ester group, a decyl group, and an ether group, or a combination thereof. Substituent. ® The above alkylene group is an alkylene group having a total alkyl group of 1 to 20 carbon atoms and preferably 1 to 10 alkyl groups. Specifically, for example, a group such as a methylene group, an ethylidene group, a butyl group, a pentyl group, a hexyl group, a decyl group, a dodecenyl group, or the like may be mentioned, and these may have a branched/annular structure. The function is methylene, ethyl, and octyl. The above-mentioned aryl group is an extended aryl group having a total carbon number of 6 to 20 and preferably an extended aryl group of 6 to 12. Specifically, for example, a phenyl group, a stretched group, a fluorenyl group or the like may be mentioned, and these may have a branch or a functional group, and particularly preferably; good. Such a group, a ruthenium, or a dibasic group is an integer of the following formula (3) unsubstituted, &gt;. The aryl group, the aryl group, etc. may also be a base, a propyl group, an octadecyl group, preferably a phenyl group, a naphthoquinone phenyl group, a substituent substituted in the case of -31-200949445, For example, it has an alkyl group, a hydroxyl group, an amine group, a halogen group, an aromatic ring group, an alicyclic structure, and the like. In the synthesis of the resin A, a single system for introducing a branching and/or alicyclic structure into a side chain may, for example, be a styrene, a (meth) acrylate, a vinyl ether or a vinyl ester. The (meth) acrylates, vinyl acetates, and (meth) acrylamides are preferred, and (meth) acrylates are preferred. In the synthesis of the resin A, a specific system for introducing the branched structure into the side chain may, for example, be isopropyl (meth)acrylate, isobutyl (meth)acrylate or (meth)acrylic acid. Dibutyl ester, tert-butyl (meth)acrylate, isoamyl (meth)acrylate, third amyl (meth)acrylate, second isoamyl (meth)acrylate, (meth)acrylic acid 2 -octyl ester, 3-octyl (meth)acrylate, third octyl (meth)acrylate, etc., among which isopropyl (meth)acrylate, isobutyl (meth)acrylate, methacrylic acid The third butyl ester or the like is preferred, and isopropyl methacrylate, butyl methacrylate or the like is preferred. In the synthesis of the resin A, the monofluorene system for introducing the alicyclic structure to the side chain may, for example, be a (meth) acrylate having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. Specific examples include (meth)acrylic acid (bicyclo[2.2.1]heptyl-2) ester, 1-adamantyl (meth)acrylate, 2-adamantyl (meth)acrylate, (a) 3-methyl-1-adamantyl acrylate, 3,5-dimethyl-1-adamantyl (meth) acrylate, 3-ethyladamantyl (meth) acrylate, (methyl) 3-methyl-5-ethyl-1-adamantyl acrylate, 3,5,8-triethyl-1-adamantyl (meth)acrylate, 3,5-dimethyl (meth)acrylate - 8-Ethyl-1-adamantyl ester, 2-methyl-2-adamantyl (meth)acrylate, 2-ethyl-2-adamantyl (meth)acrylate, (meth)acrylic acid 3 -Hydroxy-Ι α- 200949445 Adamantyl ester, octahydro-4,7-captoalkyl-5-ester (meth) acrylate, (methyl) acrylic acid octahydro _4,7-glycine base -1-methyl ketone, (meth) acrylic acid | __ capping ester, tricyclodecyl (meth) acrylate, 3-hydroxy-2,6,6-trimethyl-bicyclo(methyl) acrylate [3.1.1]heptyl ester, 3,7,7-trimethyl-4-hydroxy-bicyclo[4_1.0]heptyl (meth)acrylate, (meth)acrylic acid (nor) decyl ester, Isodecyl (meth)acrylate, fenyl (meth)acrylate, 2,2,5-trimethylcyclohexyl (meth)acrylate, cyclohexyl (meth)acrylate, (meth)acrylic acid Dicyclopentenyl ester, tricyclopentenyl (meth) acrylate, etc. Among these (meth) acrylates, the functional group having a larger volume is more compressive and the recovery property is better. Cyclohexyl (meth) acrylate, decyl methacrylate, isodecyl (meth) acrylate, 1-adamantyl (meth) acrylate, 2-adamantyl (meth) acrylate , fenyl (meth)acrylate, 1-caprate (meth)acrylate, tricyclodecyl (meth)acrylate, dicyclopentenyl (meth)acrylate, tricyclopentene (meth)acrylate Preferred as esters, such as cyclohexyl (meth)acrylate, decyl (meth)acrylate, isodecyl (meth)acrylate, 2-adamantyl (meth)acrylate, (methyl) Acrylic acid dicyclopentenyl ester, tricyclopentenyl (meth)acrylate is particularly preferred. Also, in the synthesis of resin A The single system for introducing the alicyclic structure into the side chain may, for example, be a compound represented by the following formula (4) or (5). Here, in the general formulae (4) and (5), X represents 2 The organic linking group of a valence, R represents a hydrogen atom or a methyl group, y represents 1 or 2, and η represents 〇~15. Among the general formulae (4) and (5), y=l or 2, η Preferably, 0 to 8 is preferable, and y = 1 or 2, and n = 0 to 4 (more preferably n = 0 to 2). Preferred specific examples of the compound represented by the formula (4) or (5) For example, the following compounds D-1 to D-11 and T-1-T-12 are preferable. Among them, from the point of the deformation recovery rate, it is preferably a compound of the following formula (4): -33-200949445.

通式(4)General formula (4)

ch2 通式(5) 在前述通式(4)~(5)中,X所示之2價的有機連結基係 可無取代、亦可具有取代基,與前述通式(3)中的X所示之 2價的有機連結基同義,較佳態樣亦爲相同。Ch2 General formula (5) In the above formulae (4) to (5), the divalent organic linking group represented by X may be unsubstituted or may have a substituent, and X in the above formula (3) The two-valent organic linking groups shown are synonymous, and the preferred aspects are also the same.

-34· 200949445 Η Η2〇=〇—O-CH2CH2-Ο-H2C=CH-C-〇 — D- ι D-3 H2C=C—C-〇-CH2CH2-〇^J]^ H2C=CH-C-0-0^) D- 2 ❹ D-49^3 Η2〇=〇Η-〇-0-φ3 D- 5 CH3 H2C=i-C-〇CH2CH2CH2—〇II 〇-34· 200949445 Η Η2〇=〇—O-CH2CH2-Ο-H2C=CH-C-〇—D- ι D-3 H2C=C—C-〇-CH2CH2-〇^J]^ H2C=CH-C -0-0^) D- 2 ❹ D-49^3 Η2〇=〇Η-〇-0-φ3 D- 5 CH3 H2C=iC-〇CH2CH2CH2—〇II 〇

D—6 〇h3 H2C=i-C-〇CH2CH2CH2CH2—〇 〇D—6 〇h3 H2C=i-C-〇CH2CH2CH2CH2—〇 〇

D-7D-7

?H3 H2C=C-C-OCH2CH2OCH2CH2—0士入L〉 o ch3 I J H2〇=C_C —OCH 2CH 2〇C H2CH2—〇 o ch3 H2C=i-C-OCH2CH2OCH2CH2OCH2CH2—〇 十 OH3 H2C=C-C-OCH2CH2OCH2CH2—0 士 into L> o ch3 I J H2〇=C_C —OCH 2CH 2〇C H2CH2—〇 o ch3 H2C=i-C-OCH2CH2OCH2CH2OCH2CH2—〇 十 O

D-9 D-8D-9 D-8

D-10D-10

ch3 H2C=C-C-OCH2CHII ] 0 CH -O-h-Ch3 H2C=C-C-OCH2CHII ] 0 CH -O-h-

D-11 -35- 3 200949445 ^°-Θ3〇 ο 0+D-11 -35- 3 200949445 ^°-Θ3〇 ο 0+

-1 Τ-5-1 Τ-5

Τ-6 Τ-2Τ-6 Τ-2

Τ- Τ-3Τ- Τ-3

Τ-4 々〇Τ-4 々〇

〇η3 h2c=c-c-och2ch2och2ch2—ο- ο Τ-8〇η3 h2c=c-c-och2ch2och2ch2—ο- ο Τ-8

Τ-9 ❹ CH3 H2C=i-C-OCH2CH2OCH2CH2—〇- οΤ-9 ❹ CH3 H2C=i-C-OCH2CH2OCH2CH2—〇- ο

Τ-10Τ-10

-36- 200949445 在樹脂A的合成中,將脂環構造導入於側鏈用的單體 係可使用適宜製造者,亦可使用市售品。 前述市售品係可舉例如日立化成工業(股)製; FA-511A、FA-512A(S}、FA-512M、FA-513A、FA-513M、 TCPD-A、TCPD-M、H-TCPD-A、H-TCPD-M、TOE-A、 TOE-M、H-TOE-A、H-TOE-M等。此等之中,從顯像性 優異、變形回復率優異之點而言,以FA-512A(S)、512M 爲佳。 φ (酸性基) 樹脂A係在鍵結於主鏈之側鏈上,具有至少1種的酸 性基。酸性基係可複數含有於側鏈中。又,酸性基係可與 前述分枝及/或脂環構造、以及在與主鏈之間透過酯基所配 置的乙烯性不飽和鍵一起含有於在樹脂A的側鏈中。 又,前述酸性基係可直接鍵結於樹脂A的主鏈上而僅 以酸性基來構成樹脂A的側鏈,亦可透過2價的有機連結 基鍵結於樹脂A的主鏈上,而構成爲具有酸性基之基的樹 © 脂A的側鏈。此處,關於2價的有機連結基係可舉例如在 前述分枝及/或脂環構造的説明中所例示之2價的有機連 結基,較佳範圍亦爲相同。 前述酸性基係沒有特別地限制,可從眾所周知者之中 來適當選擇,可舉例如:羧基、磺酸基、磺醯胺基、磷酸 基、酚性羥基等。此等之中,從顯像性、及硬化膜的耐水 性爲優異之點,以羧基、酚性羥基爲佳。 在樹脂A的合成中,導入前述酸性基用的單體之具體 例係可從眾所周知者之中來適當選擇,可舉例如:(甲基) -37- 200949445 丙烯酸、乙烯基安息香酸、馬來酸、馬來酸單烷基酯、富 馬酸、衣康酸、丁烯酸、桂皮酸、山梨酸、α-氰基桂皮酸、 丙烯酸二聚物、具有羥基之單體與環狀酸酐的加成反應 物、ω-羧基-聚己酸內酯單(甲基)丙烯酸酯等。此等係可使 用適宜製造者,亦可使用市售品。 前述具有羥基之單體與環狀酸酐的加成反應物中所使 用的具有羥基之單體,可舉例如:2 -羥乙基(甲基)丙烯酸 酯等。前述環狀酸酐係可舉例如:馬來酸酐、苯二甲酸酐、 . 環己烷二羧酸酐等。 單體的市售品係可舉例如:東亞合成化學工業(股) 製;ARONIX Μ-5300、ARONIX Μ-5400、ARONIX M-5500、ARONIX Μ-5600、新中村化學工業(股)製;ΝΚ ESTER CB-1、NK ESTER CBX-1、共榮社油脂化學工業(股) 製;HOA-MP、HOA-MS、大阪有機化學工業(股)製; VISCOAT #2 100等。此等之中,從顯像性優異、低成本 之點,以(甲基)丙烯酸等爲佳。 © (乙烯性不飽和鍵) 樹脂A係在側鏈含有至少1種的乙烯性不飽和鍵。在 樹脂A中,乙烯性不飽和鍵較佳係透過酯基配置在與主鏈 之間。該乙烯性不飽和鍵係可複數含有於側鏈中。又,乙 烯性不飽和鍵係可與前述分枝及/或脂環構造、以及/或前 述酸性基一起含有於樹脂A的側鏈中。 又,乙烯性不飽和鍵係可透過至少1個酯基(-COO-) 鍵結於與樹脂A的主鏈之間,亦可僅以乙烯性不飽和鍵與 酯基來構成樹脂A的側鏈。又,在樹脂A的主鏈與酯基之 -38- 200949445 間、及/或在酯基與乙烯性不飽和鍵之間,可更具有2價的 有機連結基,乙烯性不飽和鍵係亦可構成「在與主鏈之間 具有透過酯基所配置的乙烯性不飽和鍵之基」的樹脂A之 側鏈。此處,關於2價的有機連結基,可舉例如在分枝及/ 或脂環構造的説明中所例示之2價的有機連結基,較佳範 圍亦爲相同。 又,乙烯性不飽和鍵係較佳爲導入(甲基)丙烯醯基而 配置的。-36- 200949445 In the synthesis of the resin A, the monomer for introducing the alicyclic structure into the side chain can be suitably used, or a commercially available product can be used. The commercially available product may be, for example, a Hitachi Chemical Industry Co., Ltd.; FA-511A, FA-512A (S}, FA-512M, FA-513A, FA-513M, TCPD-A, TCPD-M, H-TCPD -A, H-TCPD-M, TOE-A, TOE-M, H-TOE-A, H-TOE-M, etc. Among these, from the viewpoint of excellent developability and excellent deformation recovery rate, Preferably, FA-512A (S) or 512 M. φ (Acid) The resin A has at least one acidic group bonded to the side chain of the main chain, and the acidic group may be contained in the side chain in plural. Further, the acidic group may be contained in the side chain of the resin A together with the branching and/or alicyclic structure and the ethylenically unsaturated bond disposed between the main chain and the ester group. The base system may be directly bonded to the main chain of the resin A to form a side chain of the resin A only by an acidic group, or may be bonded to the main chain of the resin A through a divalent organic linking group to be acidic. The base of the tree is a side chain of the lipid A. Here, the divalent organic linking group may be, for example, a divalent organic linking group exemplified in the description of the branching and/or alicyclic structure. Good range is also the same The acidic group is not particularly limited, and may be appropriately selected from among those skilled in the art, and examples thereof include a carboxyl group, a sulfonic acid group, a sulfonylamino group, a phosphoric acid group, a phenolic hydroxyl group, and the like. The image and the water resistance of the cured film are excellent, and a carboxyl group or a phenolic hydroxyl group is preferred. In the synthesis of the resin A, a specific example of the monomer for introducing the acidic group can be appropriately selected from the well-known ones. For example, (meth)-37-200949445 acrylic acid, vinyl benzoic acid, maleic acid, monoalkyl maleate, fumaric acid, itaconic acid, crotonic acid, cinnamic acid, sorbic acid , α-cyano cinnamic acid, acrylic acid dimer, addition reaction of a monomer having a hydroxyl group and a cyclic acid anhydride, ω-carboxy-polycaprolactone mono(meth)acrylate, etc. A commercially available product may be used as a suitable manufacturer. The monomer having a hydroxyl group used in the addition reaction of the monomer having a hydroxyl group and a cyclic acid anhydride may, for example, be 2-hydroxyethyl (methyl). Acrylate, etc. The cyclic acid anhydride may, for example, be maleic acid Anhydride, phthalic anhydride, cyclohexanedicarboxylic anhydride, etc. Commercially available monomers include, for example, East Asian Synthetic Chemical Industry Co., Ltd.; ARONIX®-5300, ARONIX®-5400, ARONIX M-5500 , ARONIX Μ-5600, Xinzhongcun Chemical Industry Co., Ltd.; ΝΚ ESTER CB-1, NK ESTER CBX-1, Kyoeisha Oil Chemical Industry Co., Ltd.; HOA-MP, HOA-MS, Osaka Organic Chemical Industry (Stock) system; VISCOAT #2 100, etc. Among these, (meth)acrylic acid, etc. are preferable from the point of excellent imaging performance and low cost. © (Ethylene Unsaturated Bond) Resin A contains at least one ethylenically unsaturated bond in the side chain. In the resin A, the ethylenically unsaturated bond is preferably disposed between the main chain through the ester group. The ethylenically unsaturated bond may be plurally contained in the side chain. Further, the ethylenically unsaturated bond may be contained in the side chain of the resin A together with the above-mentioned branching and/or alicyclic structure and/or the above acidic group. Further, the ethylenically unsaturated bond may be bonded to the main chain of the resin A through at least one ester group (-COO-), or may be formed only by an ethylenically unsaturated bond and an ester group. chain. Further, between the main chain of the resin A and the ester group of -38 to 200949445, and/or between the ester group and the ethylenically unsaturated bond, the divalent organic linking group may be further provided, and the ethylenically unsaturated bond is also A side chain of the resin A which has a "base having an ethylenically unsaturated bond disposed through the ester group between the main chain" can be formed. Here, the divalent organic linking group may, for example, be a divalent organic linking group exemplified in the description of the branching and/or alicyclic structure, and the preferred range is also the same. Further, the ethylenically unsaturated bond is preferably disposed by introducing a (meth) acrylonitrile group.

在樹脂A的合成中,將(甲基)丙烯醯基導入於側鏈之 方法係可從眾所周知的方法之中來適當選擇,可舉例如: 將具有環氧基之(甲基)丙烯酸酯附加於具有酸性基之重複 單位的方法、將具有異氰酸酯基之(_基)丙烯酸酯附加於 具有羥基之重複單位的方法、將具有羥基之(甲基)丙烯酸 酯附加於具有異氰酸酯基之重複單位的方法等。 其中,尤以在具有酸性基之重複單位上,附加具有環 氧基之(甲基)丙烯酸酯的方法爲最容易製造,從低成本之 點而言爲佳。 前述具有環氧基之(甲基)丙烯酸酯係沒有特別地限 制,例如以下述構造式(A)所示之化合物及下述構造式(B) 所示之化合物爲佳。In the synthesis of the resin A, a method of introducing a (meth) acrylonitrile group into a side chain can be appropriately selected from known methods, and for example, a (meth) acrylate having an epoxy group is added. a method of adding a repeating unit having an acidic group, a method of attaching an (-) acrylate having an isocyanate group to a repeating unit having a hydroxyl group, and attaching a (meth) acrylate having a hydroxyl group to a repeating unit having an isocyanate group. Method, etc. Among them, a method of adding a (meth) acrylate having an epoxy group to a repeating unit having an acidic group is particularly easy to manufacture, and it is preferable from the viewpoint of low cost. The (meth) acrylate having an epoxy group is not particularly limited, and for example, a compound represented by the following structural formula (A) and a compound represented by the following structural formula (B) are preferred.

構造式(A〉 -39- 200949445 前述構造式(A)中’ R1係表示氫原子或甲基。Li係表 示有機基。Structural Formula (A> -39- 200949445 In the above structural formula (A), R1 represents a hydrogen atom or a methyl group, and Li represents an organic group.

構造式(B) 前述構造式(B)中,R2係表示氫原子或甲基。L2 _ _ 示有機基。W係表示4 ~7員環的脂肪族烴基。 前述構造式(A)所示之化合物及構造式(B)所示之# 物之中,以構造式(A)所示之化合物比構造式(B)要更好。 在前述構造式(A)及(B)中,Li及L2係各自獨立爲碳數ι~4 之伸烷基者爲較佳。 前述構造式(A)所示之化合物或構造式(B)所示之化合 物係沒有特別地限制,可舉例如以下之例示化合物 (1)-(10) 0 Ο -40 · 200949445In the above structural formula (B), R2 represents a hydrogen atom or a methyl group. L2 _ _ shows an organic group. The W system represents an aliphatic hydrocarbon group of 4 to 7 membered rings. Among the compounds represented by the above structural formula (A) and the structures represented by the structural formula (B), the compound represented by the structural formula (A) is more preferable than the structural formula (B). In the above structural formulae (A) and (B), it is preferred that Li and L2 are each independently an alkyl group having a carbon number of 1-4. The compound represented by the above structural formula (A) or the compound represented by the structural formula (B) is not particularly limited, and examples thereof include the following exemplified compounds (1)-(10) 0 Ο -40 · 200949445

-41 - 200949445 ~~其他的單體~~ 在本發明的樹脂A中,可使用其他的單體導入其他的 基。 前述其他的單體係沒有特別地限制,可舉例如:(甲基) 丙烯酸酯、苯乙烯、具有乙烯基醚基、二元酸酐基、乙烯 基酯基、烴烯基等的單體等。 前述乙烯基醚基係沒有特別地限制,可舉例如:丁基 乙烯基醚基等。 ® 前述二元酸酐基係沒有特別地限制,可舉例如:馬來 酸酐基、衣康酸酐基等。 前述乙烯基酯基係沒有特別地限制,可舉例如:乙酸 乙烯酯基等。 前述烴烯基係沒有特別地限制,可舉例如:丁二烯基、 異戊二烯基等。 在前述樹脂A中的其他單體之含有率係組成比爲 1~40質量。/〇爲佳,2~30質量。/。爲更佳。 一 _ 樹脂A的具體例係可舉例如:下述構造所示之化合物 (例示化合物p- 1 ~P-56}。 又,例示化合物中的X、y、及z係表示各重複單位的 組成比(質量比),以後述的較佳範圍所構成之形態爲適 宜。又,各例示化合物的重量平均分子量亦以後述的較佳 範圍所構成之形態爲適宜。 -42- 200949445-41 - 200949445 ~~ Other monomers ~~ In the resin A of the present invention, other monomers may be introduced into other groups. The other single system is not particularly limited, and examples thereof include (meth) acrylate, styrene, and a monomer having a vinyl ether group, a dibasic acid anhydride group, a vinyl ester group, or a hydrocarbon alkenyl group. The vinyl ether group is not particularly limited, and examples thereof include a butyl vinyl ether group and the like. The above-mentioned dibasic acid anhydride group is not particularly limited, and examples thereof include a maleic anhydride group and an itaconic anhydride group. The vinyl ester group is not particularly limited, and examples thereof include a vinyl acetate group and the like. The hydrocarbon alkenyl group is not particularly limited, and examples thereof include a butadienyl group and an isoprene group. The content ratio of the other monomers in the above-mentioned resin A is from 1 to 40 mass. /〇 is better, 2~30 quality. /. For better. Specific examples of the resin A include, for example, compounds represented by the following structures (exemplary compounds p-1 to P-56). Further, X, y, and z in the exemplified compounds indicate the composition of each repeating unit. The ratio (mass ratio) is preferably in the form of a preferred range to be described later. Further, the weight average molecular weight of each of the exemplified compounds is also preferably in the form of a preferred range described later. -42 - 200949445

y COOHy COOH

P-1 x:y:2=41:24:35 〇 coo、 ^ 人 COOH COO八γ八〇人&lt; x:y:z=48:22:30 P-2 φP-1 x:y:2=41:24:35 〇 coo, ^ person COOH COO eight gamma octopus &lt; x:y:z=48:22:30 P-2 φ

fy COOH P~3 OH I X:y:2=45:20:35 〇Fy COOH P~3 OH I X:y:2=45:20:35 〇

〇 P-4 x:y:z=40:25:35〇 P-4 x:y:z=40:25:35

-43- 200949445-43- 200949445

〇 coo〇 coo

COOH ch2ch2-o P-8 OH 1 x:y:z=42:23:35COOH ch2ch2-o P-8 OH 1 x:y:z=42:23:35

OO

P-10 x:y:z=50:24:26P-10 x:y:z=50:24:26

x:y:z=40:25:35x:y:z=40:25:35

COOCOO

COOHCOOH

x:y:z=30:30:40 -44- 200949445x:y:z=30:30:40 -44- 200949445

HOco〇HOco〇

x:y:z=45:15:40x:y:z=45:15:40

COO、COO,

COOHCOOH

P-17 x:y:z=45:25:30 -45 200949445P-17 x:y:z=45:25:30 -45 200949445

^ 人 coo八丫、〇人丫^ M8 OH ' x:y:z=40:25:35 o^ 人 coo gossip, 〇人丫^ M8 OH ' x:y:z=40:25:35 o

x COOx COO

cooyN 〇 P-20 x:y:z=40:30:30 〇cooyN 〇 P-20 x:y:z=40:30:30 〇

/y COOH/y COOH

COO^Y^O^f^ p_2i OH I x:y:z=45:20:35COO^Y^O^f^ p_2i OH I x:y:z=45:20:35

X cooX coo

y COOHy COOH

X cooX coo

COOH co〇y^\ 〇 P-23 HO人人〆 x:y:z=40:20:40 -46 - 200949445COOH co〇y^\ 〇 P-23 HO Everyone x:y:z=40:20:40 -46 - 200949445

y C〇〇Hy C〇〇H

COOCOO

P-25 x:l:y:z=46:2:20:32P-25 x:l:y:z=46:2:20:32

OO

COO^^^COOMe COOHCOO^^^COOMe COOH

z COO 〇z COO 〇

P-26 OH ' x:I:y:z=45· 5:2:19:33.5 cooP-26 OH ' x:I:y:z=45· 5:2:19:33.5 coo

❹ Ό❹ Ό

fy C〇〇HFy C〇〇H

P-27 x:y:z=48:22:30P-27 x:y:z=48:22:30

七^七 JL COOH 〇 P-28 OH · x:y:z=51.5:18.5:30 -47- 200949445七^七 JL COOH 〇 P-28 OH · x:y:z=51.5:18.5:30 -47- 200949445

coo^Y^o^y^ OH I P-29Coo^Y^o^y^ OH I P-29

COOijoCOOijo

COOHCOOH

x:y:z=40:25:35 O 人 OH丨 P-30 Ο x:y:z=41:24:35 coo CH2CH2~〇x:y:z=40:25:35 O People OH丨 P-30 Ο x:y:z=41:24:35 coo CH2CH2~〇

^ II COO^^Y^O^S^ OH 丨^ II COO^^Y^O^S^ OH 丨

O P-31O P-31

'y COOH'y COOH

x:y:z=39:26:35x:y:z=39:26:35

七七、 coo COOH C p-32 ❹七七, coo COOH C p-32 ❹

OH x:y:z=35:30:35OH x:y:z=35:30:35

x P-33x P-33

OH x:y:z=42:28:30 -48- 200949445OH x:y:z=42:28:30 -48- 200949445

COOHCOOH

ο OH 丨 P-35 x:y:z=39:26:35 o -49- 200949445ο OH 丨 P-35 x:y:z=39:26:35 o -49- 200949445

coo.Coo.

v COOHv COOH

coo、 ❹Coo, ❹

y COOHy COOH

COO.COO.

y COOHy COOH

G P-36 x:y:z=45:20:35 P-37 x:y:z=40:25:35 〇G P-36 x:y:z=45:20:35 P-37 x:y:z=40:25:35 〇

y COOHy COOH

\ / 卜 too、〆 COOH (\ / 卜 too, 〆 COOH (

/y P-38 x:y:z=40:20:40 COO 丫、^ 〇 P-39 x:y:z=40:30:30 P-40/y P-38 x:y:z=40:20:40 COO 丫,^ 〇 P-39 x:y:z=40:30:30 P-40

COO HOCOO HO

x:y:z=45:20:35 P-41 COOH 〇 x:y:z=40:20:40 -50 200949445x:y:z=45:20:35 P-41 COOH 〇 x:y:z=40:20:40 -50 200949445

y COOHy COOH

'X'X

rz coa COOH 〇 P-43Rz coa COOH 〇 P-43

H〇人乂〇人〆 x:y:z=35:30:35H〇人乂〇人〆 x:y:z=35:30:35

COOHCOOH

fz 〇 P—44 x:y:z=30:25:45 hctFz 〇 P—44 x:y:z=30:25:45 hct

cooCoo

COOHCOOH

-51 - 200949445-51 - 200949445

rX COOrX COO

IQIQ

f/y ^ X COOH Au If/y ^ X COOH Au I

P-46 x:y:z:St=30:24:38:8P-46 x:y:z:St=30:24:38:8

COOCOO

y COOHy COOH

P-47 x:y:z:St=34:24:36:6P-47 x:y:z:St=34:24:36:6

COOCOO

y COOHy COOH

fZfZ

COO^^Y^X) OH 〇COO^^Y^X) OH 〇

P-48 、七 」 s 卜 COCL A COOH c x:y:z:St=40:23:35:2 〇 P-49 OH 丨 x:y:z=32:25:43P-48, VII s BU COCL A COOH c x:y:z:St=40:23:35:2 〇 P-49 OH 丨 x:y:z=32:25:43

rxRx

COO COOHCOO COOH

〇 COO-^Y^O^1^ OH I〇 COO-^Y^O^1^ OH I

P-50 x:y:z:St=25:25:40:10 52 200949445P-50 x:y:z:St=25:25:40:10 52 200949445

φ coo COOH COO^Y^O&quot;Y^ 0h2CH2-〇 ou 1Qr&gt; ο ( P-53 OH ' x:y:z=46. 2:24.3:29.5φ coo COOH COO^Y^O&quot;Y^ 0h2CH2-〇 ou 1Qr&gt; ο ( P-53 OH ' x:y:z=46. 2:24.3:29.5

P-54 x: y: z: St=25:25:40 ·· 10 ❿P-54 x: y: z: St=25:25:40 ·· 10 ❿

(xHcoo “ °°〇1々 iH2CH2OCH2CH2-0-|^[3 O COO C〇〇H COO^oV· OH 1 CH2CH—〇-^Q&gt;Ah3 P-55 x:y:z=46:24:30(xHcoo “ °°〇1々 iH2CH2OCH2CH2-0-|^[3 O COO C〇〇H COO^oV· OH 1 CH2CH—〇-^Q>Ah3 P-55 x:y:z=46:24:30

P-56 x:y:z=46:24:30 -53 200949445 ~合成法~ 樹脂A係可由單體的(共)聚合反應之步驟、與導入乙 烯性不飽和基之步驟的二階段步驟來進行合成。 首先’{共)聚合反應係可由各種的單體(共)聚合反應來 製作’沒有特別地限制,可從眾所周知者之中來適當選擇。 例如’關於聚合的活性種,可適當選擇自由基聚合、陽離 子聚合、陰離子聚合、配位聚合等。此等之中,從合成爲 容易’低成本之點而言,以自由基聚合爲佳。又,關於聚 〇 合方法亦沒有特別地限制,可從眾所周知者之中來適當選 擇。例如,可適當選擇整體聚合法、懸浮聚合法、乳化聚 合法、溶液聚合法等。此等之中,尤以溶液聚合法係爲所 更爲期望的。 ~碳數~ 樹脂A的主鏈之總碳數係從彈性係數(硬度)之點而 言’以10以上爲佳。其中,總碳數係以10~30爲更佳, 特佳爲1 Ο ~ 1 5。 ® ~分子量~ 樹脂A的分子量以重量平均分子量計爲 1〇, 〇〇〇~ι〇 萬爲佳,12,000~60,000 爲更佳,15,000~45,000 爲特 佳。重量平均分子量在前述範圍内,則從樹脂(較佳爲共聚 物)的製造適性、顯像性之點而言係爲所期望的。又,藉由 溶融黏度的降低所形成之形狀係從不易塌陷之點而言,又 從不易變成交聯不良之點而言、從顯像中沒有間隔物形狀 的殘渣之點而言爲佳。 重量平均分子量係利用凝膠滲透層析法(G PC)來測 -54- 200949445 定。關於GPC係詳細表示於後記之實施例的項目中。 ~玻璃轉移溫度~ 樹脂A的玻璃轉移溫度(Tg)係以40~180°C爲佳, 45~140°C爲較佳,50~130°C爲特佳。玻璃轉移溫度(Tg) 在前述的較佳範圍内,則能得到具有良好的顯像性、力學 強度之間隔物。 ~酸價~ 樹脂A的酸價係因取得之分子構造而變動較佳的範 © 圍’惟一般係20mgKOH/g以上爲佳,40mgKOH/g以上 爲較佳,50~130mgKOH/g爲特佳。酸價在前述較佳範圍 内,則能得到具有良好的顯像性、力學強度之間隔物。 ~Tg~ 前述樹脂A係從能得到具有良好的顯像性、力學強度 之間隔物之點,以玻璃轉移溫度(Tg)爲40~180°C,且重量 平均分子量爲10,000- 100,000爲佳,Tg爲45~14CTC (更 佳爲50~130°C),且重量平均分子量爲12,000~60,000(更 © 佳爲 15,000~45,000)爲佳。 再者’前述樹脂A的較佳例更佳係前述的較佳分子 量、玻璃轉移溫度(Tg)、及酸價的組合。 在本發明中樹脂A的較佳形態,以分枝及/或脂環構 造、酸性基、與(較佳爲在與主鏈之間透過酯基而配置的) 乙烯性不飽和鍵爲分別具有於其他的重複單位(共聚合單 位)之3元共聚合以上的共聚物,從形成圖案構造物(例如 彩色濾光片用的間隔物)時的變形回復率、顯像殘渣、網狀 組織之觀點而言爲佳。 -55- 200949445 具體上,前述樹脂A係至少含有:具有分枝及/或脂環 構造之重複單位:X(x莫耳%)、具有酸性基之重複單位: Y(y莫耳%)、與具有(較佳爲在主鏈之間透過酯基而配置的) 乙烯性不飽和鍵之重複單位:Z(z莫耳。/。)之3元共聚合以 上的共聚物爲佳。再者,亦可按照需要含有其他的重複單 位:L(1莫耳。/〇)。 如此之共聚物係例如使具有分枝及/或脂環構造之單 體、具有酸性基之單體、具有乙烯性不飽和鍵之單體、與 φ 按照需要的其他單體共聚合而可得到。其中,從以體積大 的官能基能使壓縮彈性率、變形回復性變得良好之點而 言,使前述通式(4)所示之單體共聚合來做爲至少具有前述 分枝及/或脂環構造之單體,且導入具有分枝及/或脂環構 造之基而成之共聚物的情形爲佳。此時,樹脂A係在主鏈 具有來自前述通式(4)所示單體之構成單位。 關於前述樹脂A爲共聚物之情形中的共聚合組成比, 係可考量玻璃轉移溫度與酸價來決定。雖然無法一槪而 © 論,惟可在下述的範圍。 樹脂A中具有分枝及/或脂環構造之重複單位的組成 比(X)係以10-70莫耳%爲佳,15~65莫耳%爲更佳,20~60 莫耳%爲特佳。組成比(x)在前述範圍内,則能得到良好的 顯像性’同時畫像部的顯像液耐性亦爲良好。 樹脂A中具有酸性基之重複單位的組成比係以 5~70莫耳%爲佳’ ι〇~6〇莫耳。々爲更佳,2〇~5〇莫耳。/〇爲 特佳°組成比(y)在前述範圍内,則能得到良好的硬化性、 顯像性。 -56- 200949445 樹脂A中具有乙烯性不飽和鍵之重複單位的組成比(z) 係以10~70莫耳。/。爲佳,20〜70莫耳。/。爲更佳,3〇~7〇莫 耳%爲特佳。組成比(z)在前述範圍内,則顔料分散性爲優 異’同時感度及聚合硬化性爲良好,在調液後的液保存性、 及塗布後的乾膜狀態下經長期保持之際的經時安定性變得 良好》 再者,樹脂A係組成比(X)爲10~70莫耳%(更佳爲 15-65莫耳%、特佳爲20~50莫耳%),組成比(y)爲5~70 Ο 莫耳。/。(更佳爲10-60莫耳%、特佳爲30~70莫耳%),組 成比(z)係 10~70莫耳。/〇(更佳爲20〜70莫耳%、特佳爲 30~70莫耳%)之情形爲佳。 以上,說明樹脂A的較佳形態,本發明的感光性樹脂 組成物的較佳形態係以前述樹脂爲樹脂A的較佳形態,且 前述聚合性化合物爲前述構造式(I)所示之特定聚合性化合 物中的具體化合物之例示化合物(3)、例示化合物(10)、例 示化合物(M-5)、例示化合物(M-6)、例示化合物(M-7)、例 © 示化合物(M-8)、例示化合物(M-14)等進行組合之態樣爲 佳。本發明的感光性樹脂組成物係像這樣構成,則本發明 的效果係能更有效果地表現。 本發明的感光性樹脂組成物含有前述樹脂A之情形 中,樹脂A在感光性樹脂組成物中的含有比例係相對於組 成物中的全樹脂量(質量),以5~50質量%爲佳,10-40質 量%爲較佳。 樹脂A係亦可與其他的樹脂倂用,以樹脂A單獨構成 之情形爲佳。 -57- 200949445 &lt;光聚合引發劑&gt; 本發明的感光性樹脂組成物^少含有1種的光聚合引 發劑。 本發明中的光聚合引發劑係沒有特別地限定,可使用 眾所周知的光聚合引發劑。眾所周知的光聚合引發劑係可 舉例如:特開 2006-23696 號公報的段落號碼 [0010卜[0020]、特開2006-6492 1號公報的段落號碼 [0027】~[0053]中記載之引發劑。眾所周知的光聚合引發劑 © 之例從感度之點而言,係以上述以外的胺基苯乙酮系化合 物、醯基氧化膦系化合物、肟酯系化合物爲適宜。 胺基苯乙酮系化合物的具體例係可舉例如 11^八01;1^(11^)9〇7(汽巴特殊化學品(股}製)等。醯基氧化 膦系化合物的具體例係可舉例如 DAROCUR TPO、 IrgacurenrgMW(以上,汽巴特殊化學品(股)製)等。又, 聘醋系化合物的具體例係可舉例如 IRGACURE(Irg)〇XE〇1、(以上,汽巴特殊化學 品(股)製)。以下,表示此等引發劑的構造。 -58- 200949445 〈胺基苯乙酮系化合物〉P-56 x:y:z=46:24:30 -53 200949445 ~Synthesis method ~ Resin A can be a two-stage step of the (co)polymerization step of the monomer and the step of introducing the ethylenically unsaturated group. Perform the synthesis. First, the '{co)polymerization reaction can be produced by various monomer (co)polymerization reactions, and is not particularly limited, and can be appropriately selected from among those skilled in the art. For example, radical polymerization, cationic polymerization, anionic polymerization, coordination polymerization, and the like can be appropriately selected as the active species to be polymerized. Among these, radical polymerization is preferred from the point of synthesis being easy to low cost. Further, the method of the polymerization is not particularly limited, and can be appropriately selected from among those skilled in the art. For example, a bulk polymerization method, a suspension polymerization method, an emulsion polymerization method, a solution polymerization method, or the like can be appropriately selected. Among these, the solution polymerization method is particularly desirable. ~ Carbon number ~ The total carbon number of the main chain of the resin A is preferably from 10 or more from the point of elasticity coefficient (hardness). Among them, the total carbon number is preferably 10 to 30, and particularly preferably 1 to 15 . ® ~Molecular Weight ~ The molecular weight of Resin A is 1〇 by weight average molecular weight, 〇〇〇~ι〇 is better, 12,000~60,000 is better, and 15,000~45,000 is especially good. When the weight average molecular weight is within the above range, it is desirable from the viewpoint of the production suitability and developability of the resin (preferably a copolymer). Further, the shape formed by the decrease in the melt viscosity is preferably from the point where the collapse is not likely to occur, and the point where the residue is not easily broken, and the residue having no spacer shape in the development is preferable. The weight average molecular weight is determined by gel permeation chromatography (G PC) from -54 to 200949445. The GPC system is shown in detail in the item of the following example. ~ Glass transition temperature ~ The glass transition temperature (Tg) of Resin A is preferably 40 to 180 ° C, 45 to 140 ° C is preferred, and 50 to 130 ° C is particularly preferred. Glass transition temperature (Tg) Within the above preferred range, a spacer having good developability and mechanical strength can be obtained. ~ Acid value ~ The acid value of the resin A is preferably changed by the molecular structure obtained. However, it is preferably 20 mgKOH/g or more, 40 mgKOH/g or more, and 50-130 mgKOH/g. . When the acid value is within the above preferred range, a spacer having good developability and mechanical strength can be obtained. ~Tg~ The resin A is preferably a glass transition temperature (Tg) of 40 to 180 ° C and a weight average molecular weight of 10,000 to 100,000 from the viewpoint of obtaining a spacer having good developability and mechanical strength. The Tg is 45 to 14 CTC (more preferably 50 to 130 ° C), and the weight average molecular weight is preferably 12,000 to 60,000 (more preferably 15,000 to 45,000). Further, the preferred embodiment of the above resin A is more preferably a combination of the above-mentioned preferred molecular weight, glass transition temperature (Tg), and acid value. In the present invention, a preferred embodiment of the resin A has a branching and/or alicyclic structure, an acidic group, and an ethylenically unsaturated bond (preferably disposed between the main chain and the ester group). Copolymerization of the above copolymer in the other three repeating units (copolymerization units), deformation recovery rate, development residue, and network structure when forming a pattern structure (for example, a spacer for a color filter) It is better from a point of view. -55- 200949445 Specifically, the resin A contains at least: a repeating unit having a branching and/or alicyclic structure: X (x mole %), a repeating unit having an acidic group: Y (y mole %), It is preferred to copolymerize the above with a ternary unit having a repeating unit of an ethylenically unsaturated bond (preferably disposed between the main chain and having an ester group): Z (z mole). Furthermore, other repeating units may be included as needed: L (1 mol. / 〇). Such a copolymer is obtained, for example, by copolymerizing a monomer having a branched and/or alicyclic structure, a monomer having an acidic group, a monomer having an ethylenically unsaturated bond, and other monomers required as φ as needed. . In particular, the monomer represented by the above formula (4) is copolymerized to have at least the aforementioned branch and/or from the viewpoint that the compressive modulus and the recovery property of the functional group having a large volume can be improved. It is preferred that the monomer of the alicyclic structure is introduced into a copolymer having a branching and/or alicyclic structure. In this case, the resin A has a constituent unit derived from the monomer represented by the above formula (4) in the main chain. The copolymerization composition ratio in the case where the aforementioned resin A is a copolymer can be determined by considering the glass transition temperature and the acid value. Although it can't be seen at a glance, it can be found in the following range. The composition ratio (X) of the repeating unit having a branching and/or alicyclic structure in the resin A is preferably from 10 to 70 mol%, more preferably from 15 to 65 mol%, and most preferably from 20 to 60 mol%. good. When the composition ratio (x) is within the above range, good development performance can be obtained. At the same time, the image forming liquid resistance of the image portion is also good. The composition ratio of the repeating unit having an acidic group in the resin A is preferably from 5 to 70 mol%, and is preferably ’ 〇 6 〇 耳. It is better, 2〇~5〇莫耳. When the composition ratio (y) is within the above range, good hardenability and developability can be obtained. -56- 200949445 The composition ratio (z) of the repeating unit having an ethylenically unsaturated bond in the resin A is 10 to 70 m. /. For better, 20 to 70 m. /. For better, 3〇~7〇% is especially good. When the composition ratio (z) is in the above range, the pigment dispersibility is excellent, and the simultaneous sensitivity and the polymerization hardenability are good, and the liquid storage property after liquid adjustment and the dry film state after application are maintained for a long period of time. When the stability is good, the composition ratio (X) of the resin A is 10 to 70 mol% (more preferably 15 to 65 mol%, particularly preferably 20 to 50 mol%), and the composition ratio ( y) is 5~70 莫 Mo Er. /. (more preferably 10-60% by mole, especially preferably 30~70% by mole), and the composition ratio (z) is 10~70 moles. The case of /〇 (more preferably 20 to 70% by mole, and particularly preferably 30 to 70% by mole) is preferred. In the above, a preferred embodiment of the resin A is described. In a preferred embodiment of the photosensitive resin composition of the present invention, the resin is preferably a resin A, and the polymerizable compound is specific to the structural formula (I). Exemplary compounds (3), exemplified compounds (10), exemplified compounds (M-5), exemplified compounds (M-6), exemplified compounds (M-7), and exemplified compounds (M) of the specific compound in the polymerizable compound -8), an exemplary compound (M-14) or the like is preferably combined. When the photosensitive resin composition of the present invention is configured as described above, the effects of the present invention can be more effectively exhibited. In the case where the photosensitive resin composition of the present invention contains the resin A, the content ratio of the resin A in the photosensitive resin composition is preferably 5 to 50% by mass based on the total resin amount (mass) in the composition. 10-40% by mass is preferred. The resin A may be used in combination with other resins, and it is preferable to use the resin A alone. -57-200949445 &lt;Photopolymerization Initiator&gt; The photosensitive resin composition of the present invention contains one type of photopolymerization initiator. The photopolymerization initiator in the present invention is not particularly limited, and a well-known photopolymerization initiator can be used. A known photopolymerization initiator is, for example, the one described in paragraph number [0010] [0020] of JP-A-2006-23696, and paragraph number [0027] to [0053] of JP-A-2006-6492 Agent. In the case of the photopolymerization initiator, a known example is an aminoacetophenone-based compound, a mercaptophosphine oxide-based compound or an oxime ester-based compound other than the above. Specific examples of the aminoacetophenone-based compound include, for example, 11^8 01; 1^(11^)9〇7 (Ciba Specialty Chemicals Co., Ltd.), etc. Specific examples of the fluorenylphosphine oxide-based compound For example, DAROCUR TPO, Irgacurenrg MW (above, Ciba Specialty Chemicals Co., Ltd.), etc., and specific examples of the vinegar-based compound are exemplified by IRGACURE (Irg) 〇 XE 〇 1, (above, Ciba Special chemical (stock) system. The following shows the structure of these initiators. -58- 200949445 <Aminoacetophenone-based compounds>

Irg907Irg907

〈醯基氧化膦系化合物〉<醯-based phosphine oxide compound>

DAROCUR TPODAROCUR TPO

Irg 819Irg 819

〈肟酯系化合物〉 IrgOXEOI<肟 ester compound> IrgOXEOI

光聚合引發劑在感光性樹脂組成物中的總量係相對於 感光性樹脂組成物的全固體成分,以〇.5~25質量%爲佳, 卜20質量%爲較佳。 &lt;微粒&gt; 本發明中的感光性樹脂組成物係從樹脂、聚合性化合 物、光聚合引發劑以及力學強度之點而言,至少含有1種 -59- 200949445 的微粒爲佳。 微粒係沒有特別地限制,可按照目的來進行適當選 擇,例如以特開2003-302639號公報[0035]~[0041]中記 載之體質顔料爲佳,其中從能得到具有良好的顯像性、力 學強度的光間隔物之點而言,以膠態矽石爲佳。 前述微粒的平均粒徑係從在形成容易承受光間隔物等 的外力之構造的情形中可得到較高的力學強度之點,以 5~50nm爲佳,10~40nm爲較佳,15~30nm爲特佳。 ❹ 前述微粒在感光性樹脂組成物(形成光間隔物時在光 間隔物(或構成該之感光性樹脂層)中的含量,從提高力學 強度之觀點(例如,能得到具有較高的力學強度之光間隔物 的觀點)而言,相對於感光性樹脂組成物中的全固體成分 (質量),以5〜50質量%爲佳,10~40質量%爲較佳,15~30 質量%爲特佳。 &lt;其他&gt; 本發明中的感光性樹脂組成物係除了樹脂、特定聚合 ® 性化合物、光聚合引發劑、及按照需要所含有的微粒以外, 亦可按照需要含有光聚合起始助劑等的其他成分。 感光性樹脂組成物係可倂用光聚合起始助劑做爲其他 的添加成分。光聚合起始助劑由於係促進藉由光聚合引發 劑而起始聚合之聚合性化合物的聚合,所以可與光聚合引 發劑來組合使用。光聚合起始助劑係使用胺系化合物的至 少1種爲佳。 前述胺系化合物係可舉例如:三乙醇胺、甲基二乙醇 胺、三異丙醇胺、4-二甲基胺基安息香酸甲酯、4-二甲基 -60- 200949445 胺基安息香酸乙酯、4-二甲基胺基安息香酸異戊醋、安息 香酸2-二甲基胺基乙酯、4-二甲基胺基安息香酸2-乙基己 酯' N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺基)二苯基酮 (通稱米其勒酮)、4,4,-雙(二乙基胺基)二苯基酮、4,4’-雙 (乙基甲基胺基)二苯基酮等,其中尤以4,4’-雙(二乙基胺基) 二苯基酮爲佳。又,可複數組合胺系、其他的光聚合起始 助劑來使用。 上述以外之其他光聚合起始助劑係可舉例如:烷氧基 © 蒽系化合物、氧硫岫嗤系化合物、香豆素系化合物等。前 述烷氧基蒽系化合物係可舉例如:9,10 -二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基- 9,10-二乙氧基蒽等。前述氧硫卩III唱系化合物係可舉例如:2-異 丙硫基卩山醌、4-異丙硫基卩山醌、2,4-二乙硫基卩山醌、2,4-二氯氧硫卩山嘎、1-氯-4-丙氧硫基卩山醌等。 又,亦可使用市售者做爲光聚合起始助劑。市售的光 聚合起始助劑係可舉例如:商品名「EAB-F」(保土谷化學 ® X業(股)製)等。 光聚合起始助劑在感光性樹脂組成物中的含量係相對 於上述的光聚合引發劑1質量份,以0.6質量份以上、20 質量份以下爲佳,1質量份以上、15質量份以下爲更佳, 特別是以1.5質量份以上、1 5質量份以下爲佳。 又’其他的成分係可由構成眾所周知之組成物的成分 中來選擇使用,可舉例如特開2006-23696號公報的段落 號碼[0010卜[0020]、特開2006-64921號公報的段落號 碼[0027卜[0053]中記載之成分。 -61- 200949445 本發明的感光性樹脂組成物係除了適於使用於後述之 光間隔物、著色圖案、保護膜的形成以外’亦可適當使用 於圖案分隔牆(例如,黑底等)、配向控制用突起等、其他 的圖案構造物、被膜的形成。 《光間隔物及其形成方法》 本發明的光間隔物係使用先前所述之本發明的感光性 樹脂組成物而形成者。關於感光性樹脂組成物的詳細及較 佳態樣係如前所述者。 Ο 本發明的光間隔物由於係使用本發明的感光性樹脂組 成物而構成的,所以具有均一性高的剖面形狀’且能抑制 高度偏移。再者,本發明的感光性樹脂組成物在含有樹脂 A之情形中,能得到具有做爲光間隔物必要之高壓縮彈性 率、變形回復性的光間隔物。 此處,就本發明中光間隔物等的圖案構造物爲具有「均 一的剖面形狀」之狀態來加以說明。 圖案構造物爲具有「均一的剖面形狀」之狀態,係在 ® 基板内的複數處(較佳爲3處以上)中,以圖案構造物的剖 面形狀接近於矩形之形狀的狀態爲佳。前述「接近於矩形 之形狀」係平行於基板法線方向,且以從圖案構造物的基 板法線方向與緊密的邊緣(爲圓柱狀構造物之情形係邊緣 的接線)成正交的平面切斷該圖案構造物時的切剖面中,相 當於圖案構造物側面之線與相當於圖案構造物下面之線所 形成的角度(以下,亦稱爲「錐形角度」)爲80。以上、100。 以下之形狀爲較佳。 此處,前述圖案構造物下面係在圖案構造物的面之 -62- 200949445 中,所謂與形成該圖案構造物之基底的接觸面。又,前述 圖案構造物側面係在圖案構造物的面之中,所謂的不爲前 述圖案構造物下面、不爲圖案構造物上面(與前述圖案構造 物下面相對的(例如平行的)面,且不與前述下地接觸之面) 的該面。 本發明的光間隔物若爲使用本發明的感光性樹脂組成 物之方法,可以任何的方法來形成,藉由使用含有以下所 示步驟(甲)~(丙)的方法(本發明的光間隔物之製法)可最適 ® 宜的形成。 本發明的光間隔物之製法係設置有以下步驟而構成 的:(甲)在基板上形成先前所述之本發明感光性樹脂組成 物的被膜之形成步驟(以下,亦稱爲「被膜形成步驟」)、(乙) 曝光前述被膜之至少一部份的曝光步驟(以下,亦稱爲「曝 光步驟」)、與(丙)顯像曝光後的前述被膜之顯像步驟(以 下,亦稱爲「顯像步驟」),可按照需要設置(丁)加熱顯像 後的前述被膜之加熱步驟(以下,亦稱爲「被膜加熱步 ® 驟」)、及其他的步驟而構成的。 (甲)被膜形成步驟 被膜形成步驟係在基板上形成先前所述之本發明的感 光性樹脂組成物的被膜。可形成感光性樹脂層爲被膜之該 感光性樹脂層係可經由後述之曝光步驟、顯像步驟等的其 他步驟,而構成能均勻地保持晶胞厚之光間隔物。藉由使 用本發明的光間隔物,特別是在因晶胞厚的變動而容易產 生顯示不均之顯示裝置(特別是液晶顯示裝置)的畫像中, 能有效地消除顯示不均。 -63- 200949445 在基板上形成感光性樹脂層之方法,可適當舉例如: (a)塗布至少含有先前所述之樹脂、聚合性化合物、及光聚 合引發劑之感光性樹脂組成物的塗布法、及(b)使用具有前 述感光性樹脂層之感光性轉印材料,且藉由加熱及/或加壓 而積層、轉印感光性樹脂層之轉印法。 (a)塗布法 感光性樹脂組成物的塗布係可藉由眾所周知的塗布 法,例如:旋塗法、簾塗法、狹縫塗布法、浸漬塗布法、 〇 刮刀塗布法、輥塗法、金屬棒材塗布法、凹版印刷塗布法、 或使用美國專利第 268 1294號說明書中記載之沸騰床 (popper)之擠壓模塑塗布法等來進行。其中,尤以藉由特 開2004-89851號公報、特開2004-17043號公報、特開 2003-170098號公報、特開2003-164787號公報、特開 2003-10767號公報、特開 2002-79163號公報、特開 2001-310147號公報等中記載之狹縫噴嘴或狹縫塗布機 之方法爲適宜》 ® (b)轉印法 轉印係使用感光性轉印材料,使用例如加熱及/或加壓 之輥或平板將在暫時支持體上形成膜狀之感光性樹脂層藉 由進行壓延或加熱壓延來貼合至所期望的基板面之後,剝 離暫時支持體藉以將感光性樹脂層轉印至基板上。具體 上,可舉例如特開平7-110575號公報、特開平11-77942 號公報、特開2000-334836號公報、特開2002-148794 號公報中記載之層合機及積層方法,從低異物之觀點而 言’以使用特開平7-110575號公報中記載之方法者爲佳。 -64- 200949445 形成感光性樹脂層之情形中,可在感光性樹脂層與暫 時支持體之間更設置有氧遮斷層(以下,亦稱爲「氧遮斷膜」 或「中間層」)。藉此,可提昇曝光感度。又,爲了提高轉 印性,亦可設置具有緩衝性之熱可塑性樹脂層。 關於構成感光性轉印材料之暫時支持體、氧遮斷層、 熱可塑性樹脂層、其他的層、與該感光性轉印材料的製作 方法,係可應用特開 2 006-2 3 696號公報的段落號碼 [0024卜[0030】中記載之構成、製作方法。 〇 以(a)塗布法、(b)轉印法來一起形成感光性樹脂層之情 形中,其層厚係以〇.5~10.0#111爲佳,1~6#111爲較佳。 層厚在前述範圍則能在製造時的塗布形成之際防止針孔的 發生,且顯像去除未曝光部不需要長時間即可進行。 形成感光性樹脂層之基板係可舉例如:透明基板(例如 玻璃基板、塑膠基板)、附有透明導電膜(例如ITO膜)之基 板、附有彩色濾光片之基板(亦稱爲彩色濾光片基板)、附 有驅動元件(例如,薄膜電晶體[TFT])之驅動基板等。基板 © 的厚度係一般以700~1200ym爲較佳。 (乙)曝光步驟、(丙)顯像步驟 在曝光步驟中係將在前述被膜形成步驟中所形成之被 膜的至少一部份曝光,以形成潜像。在隨後的顯像步驟中, 係將在前述曝光步驟中曝光之被膜進行顯像,可形成所期 望的形狀之間隔物圖案。 此等步驟的具體例係可舉例如特開2006-6492 1號公 報的段落號碼[〇〇71]~[〇077]中記載之形成例、與特開 2006-23696號公報的段落號碼[0040卜[0051】中記載之 -65- 200949445 步驟等來做爲本發明中的合適之例。 本發明的光間隔物之製法亦可設置後述之(丁)被膜加 熱步驟’可藉由使在前述曝光中的曝光量增加等,不設置 被膜加熱步驟(以下,亦稱爲「無加熱步驟」),亦可形成 具有均一性高的剖面形狀及優異的高度均一性之光間隔 物。 藉由「無加熱步驟」,可更有效地抑制所形成之光間隔 物的惡化、已經形成之圖案構造物(著色圖案等)與保護膜 〇 的惡化。 爲「無加熱步驟」情形之曝光量係以 l~500mJ/cm2 爲佳,10~300mJ/cm2 爲佳。 (丁)被膜加熱步驟 本發明的光間隔物之製法係亦可在前述顯像步驟的顯 像後,設置加熱被膜之被膜加熱步驟。藉由加熱,可更促 進被膜的硬化,而得到具有高強度之光間隔物。又,感光 性樹脂組成物含有前述樹脂A之情形中,能得到壓縮彈性 ® 率、變形回復性更爲良好的光間隔物。 此處,在加熱的最高溫度係因加熱時間而有所不同, 在40°C~145°C爲佳,40°C~140°C爲更佳。最高溫度在40 °C ~ 1 4 5 t的範圍内則能更有效地抑制所形成之光間隔物 的惡化、已經形成之圖案構造物(著色圖案等)與保護膜的 惡化。 其中,在加熱中的最高溫度係以80°C ~140°C,加熱 時間係以Ο · 1小時~ 3 · 0小時(尤佳爲0 · 2小時~ 1小時)爲更 佳。 -66- 200949445 如上所述,可在基板上製作具備光間隔物之顯示裝置 用基板。光間隔物較佳係形成於在基板上形成之黑底等的 黑色遮光部上、TFT等的驅動元件上。又,亦可在黑底等 的黑色遮光部、TFT等的驅動元件與光間隔物之間存在有 ITO等的透明導電層(透明電極)、聚醯亞胺等的配向膜。 例如,光間隔物設置於黑色遮光部、驅動元件之上的 情形中,可以被覆預先配設於該基板之黑色遮光部(黑底 等)、驅動元件的方式,將例如感光性轉印材料的感光性樹 〇 脂層積層於支持體面,進行剝離轉印而形成感光性樹脂層 之後,對其施加曝光、顯像、加熱處理等來形成光間隔物, 而可製作顯示裝置用基板。 本發明的顯示裝置用基板中可更按照需要,設置紅色 (R)、藍色(B)、綠色(G) 3色等的著色像素。 本發明的光間隔物係可在形成含有黑底等的黑色遮蔽 部及著色像素等的著色部之彩色濾光片之後而形成。 前述黑色遮蔽部及著色部與光間隔物係可任意組合: ® 塗布感光性樹脂組成物之塗布法、與使用具有由感光性樹 脂組成物所構成之感光性樹脂層的轉印材料之轉印法而形 成的。 前述黑色遮蔽部及著色部以及前述光間隔物係可分別 由感光性樹脂組成物而形成的,具體上例如藉由將液體之 前述感光性樹脂組成物直接塗布於基板上,以形成感光性 樹脂層之後,進行曝光、顯像,將前述黑色遮蔽部及著色 部形成爲圖案狀,隨後,使用藉由將設置其他液體之前述 感光性樹脂組成物於與前述基板爲不同之其他基板(暫時 -67- 200949445 支持體)上以形成感光性樹脂層所製作之轉印材料’並在使 該轉印材料黏附於形成前述黑色遮蔽部及著色部2前$^ 板來轉印感光性樹脂層之後,藉由進行曝光、顯像’而可 將光間隔物形成爲圖案狀。 藉由如此,可製作設置光間隔物之彩色濾光片° 《保護膜》 本發明的保護膜係使用先前所述之本發明的感光性樹 脂組成物而形成者。 〇 本發明的保護膜由於係使用本發明的感光性樹脂組成 物而構成的,所以即使在以較低的加熱溫度或無加熱處理 而形成之情形中,膜厚均一性亦爲優異。 本發明的保護膜若使用本發明的感光性樹脂組成物之 方法,可以任一方法來形成,可以與前述之本發明的光間 隔物之製法相同的方法來形成。此處,在沒有對保護膜實 施圖案化之情形,亦即在形成保護膜爲所謂的貝它(beta) 膜之情形下,前述(乙)曝光步驟中係以全面曝光被膜之方 © 法爲適宜。 《著色圖案》 本發明的著色圖案係使用先前所述之本發明的感光性 樹脂組成物而形成者。此處,感光性樹脂組成物係除了先 前所述之各成分之外,更含有著色劑之至少1種的形態爲 適宜。 前述著色劑係沒有特別地限制,可從眾所周知的著色 劑之中來適當選擇。眾所周知的著色劑係具體上可舉例 如:特開2005-177 16號公報[0038卜[0054]中記載之顔 -68- 200949445 料及染料、與特開 2004-361447號公報[0 0 6 8卜[0 0 7 2 ] 中記載之顔料、特開2005-17521號公報[0080卜[0088] 中記載之著色劑等。 本發明的著色圖案由於係使用本發明的感光性樹脂組 成物而構成的,所以即使在較低的加熱溫度或無加熱處理 而形成之情形中,亦具有均一性高的剖面形狀,且膜厚均 一性亦爲優異。 此外,本發明的著色圖案爲使用具有複數色的著色圖 © 案之彩色濾光片爲一要素之情形,至少一色的著色圖案可 爲使用本發明的感光性樹脂組成物而形成的。 本發明的著色圖案若爲使用本發明的感光性樹脂組成 物之方法,可以任一的方法來形成,例如可藉由與前述之 本發明光間隔物之製法爲相同的方法而形成。 《顯示裝置用基板》 本發明的顯示裝置用基板係具備先前所述之本發明的 光間隔物、本發明的保護膜、及由本發明的著色圖案所選 ® 出之1或2個以上而構成的。 本發明的顯示裝置用基板由於具備使用本發明的感光 性樹脂組成物而形成之剖面形狀及膜厚(高度)均一性爲良 好的圖案構造物(本發明的光間隔物、本發明的保護膜、及 本發明的著色圖案之至少1者),所以使用於顯示裝置能夠 在畫像顯示之際抑制顯示不均。 此處,所謂的顯示裝置用基板係指構成顯示裝置用的 —對支持體之中的至少一者。顯示裝置用基板的具體例係 因顯示元件、顯示裝置的構成而有所不同,可舉例如:具 -69- 200949445 備著色圖案(以下,亦稱爲「著色像素」)之彩色濾光片基 板、具備驅動手段之附有驅動手段的基板(例如,無源矩陣 基板、有源矩陣基板等)、具備離隔壁之附有離隔壁的基板 (例如,具備黑底之附有黑底的基板等)、具備著色圖案與 驅動手段兩者的彩色濾光片陣列(on array)基板、沒有設 置圖案構造物、被膜之玻璃基板等。 前述彩色濾光片基板之前述著色圖案群(著色像素群) 係可由不相呈現不同顏色之2色的像素所構成者,亦可由 Φ 3色的像素、4色以上的像素所構成者。例如在3色之情 形中,以紅(R)、綠(G)及青(B)的3種色相所構成的。配置 RGB 3色的像素群之情形中,以鑲嵌型、三角形型等的配 置爲佳,配置4色以上的像素群之情形中無論是哪種配置 均可。彩色濾光片基板的製作係例如可在形成2色以上的 像素群之後以先前所述的方式形成黑底,相反地亦可在形 成黑底之後以形成像素群的方式來形成。關於RGB像素的 形成,可參照特開2004-347831號公報等。 ❹ 《顯示元件》 可使用先前所述之本發明的顯示裝置用基板來形成顯 示元件。 顯示元件之1者係可舉例如:在至少一者爲透光性之 一對支持體(包含顯示裝置用基板)之間,至少具備液晶層 與液晶驅動手段(包含無源矩陣驅動方式及有源矩陣驅動 方式)之液晶顯示元件。 在該液晶顯示元件之情形中,顯示裝置用基板係可做 爲具有複數個的RGB像素群,且構成該像素群之各像素係 -70- 200949445 彼此以黑底隔離像素之彩色濾光片基板來使用。該彩色濾 光片基板中由於設置有剖面形狀及膜厚(高度)均一性爲良 好的圖案構造物,所以具備該彩色濾光片基板之液晶顯示 元件能有效地抑制:起因於彩色濾光片基板與對向基板之 間的晶胞間距(晶胞厚)的變動,因液晶材料偏在、因低溫 發泡等所引起的顔色不均等的顯示不均的發生。藉此,所 製作之液晶顯示元件係能顯示顯明的畫像。 又,液晶顯示元件的更詳細態樣係可舉例如:在至少 © —者爲透光性之一對支持體(包含液晶顯示裝置用基板)之 間,至少具備液晶層與液晶驅動手段,前述液晶驅動手段 具有有源元件(例如TFT),且一對的基板間係由光間隔物 規定成指定寬度而構成者。 《顯示裝置》 本發明的顯示裝置係具備上述的顯示裝置用基板者》 本發明的顯示裝置由於具備設置有剖面形狀及膜厚 (高度)均一性爲良好的圖案構造物之本發明的顯示裝置用 ® 基板,$以能抑制顯示不均。 顯示裝置係可舉例如:液晶顯示裝置、電漿顯示顯示 裝置、EL顯示裝置、CRT顯示裝置等的顯示裝置等。關於 顯示裝置的定義與各顯示裝置的説明,係記載於例如「電 子顯示裝置(佐佐木昭夫著、工業(股)調査會 1990年發 行)」、「顯示裝置(伊吹順章著、產業圖書(股)平成元年發 行)」等中。 在顯示裝置之中,以液晶顯示裝置爲佳。 液晶顯示裝置係例如以光間隔物將彼此相對所對向配 -71- 200949445 置之一對基板間規定成指定的寬度,且在規定的間隙中封 入(封入部位係稱爲液晶層)液晶材料而構成的,液晶層的 厚度(晶胞厚)係保持爲所期望的均一厚度。 在液晶顯示裝置中的液晶顯示模式係可舉例如STN 型、TN型、GH型、ECB型、鐵電性液晶、反鐵電性液晶、 VA型、IPS型、OCB型、ASM型、其他各種者爲適宜。 其中,在本發明的液晶顯示裝置中,從能最有效果地表現 出本發明的效果之觀點而言,以不易因液晶胞之晶胞厚的 Φ 變動而引起顯示不均的顯示模式爲所期望的,構成晶胞厚 爲2~4/zm之VA型顯示模式、IPS型顯示模式、OCB型 顯示模式者爲佳。 又,可使用於本發明之液晶係可舉例如向列液晶、膽 甾醇液晶、層列液晶、鐵電液晶。 液晶顯示裝置的基本構成態樣係可舉例如:(a)透過光 間隔物,使具備薄膜電晶體(TFT)等的驅動元件與像素電極 (導電層)配列形成之驅動側基板、與對向電極(導電層)之對 〇 向基板成對向配置,且在其間隙部封入液晶材料而構成 者;(b)透過光間隔物,使具備驅動基板、與對向電極(導電 層)之對向基板成對向配置,且在其間隙部封入液晶材料而 構成者,本發明的液晶顯示裝置係可適於使用於各種的液 晶顯示機器。 關於液晶顯示裝置係在例如「次世代液晶顯示技術(内 田龍男編集、側工業調査會、1994年發行)」中有記載。 在本發明的液晶顯示裝置中,除了具備本發明的液晶顯示 元件以外,沒有特別地限制,可以例如前述「次世代液晶 -72- 200949445 顯示技術」中記載之各種方式來構成液晶顯示裝置。其中, 特別是在構成彩色TFT方式的液晶顯示裝置上爲有效。關 於彩色TFT方式的液晶顯示裝置係在例如「彩色TFT液晶 顯示(共立出版(股)、1996年發行)」有記載。 液晶顯示裝置係除了具備先前所述之光間隔物、著色 圖案、保護膜、液晶顯示裝置用基板、液晶顯示元件以外, 一般可使用電極基板、偏光薄膜、相位差薄膜、背光、光 間隔物、視野角補償薄膜、抗反射薄膜、光擴散薄膜、防 眩薄膜等的各式各樣的構件來構成。關於此等的構件係在 例如「’94液晶顯示周邊材料、化學品的市場(島健太郎、 CMC (股)、1994年發行)」、「2003液晶相關市場的現狀與 將來展望(下卷)(表良吉、富士 CHIMERA(股)總硏、2003 等發行)」中有記載。本專利申請係主張2008年3月31 日申請的曰本專利申請第2 0 08-09 2583號、及日本專利 申請第2008-092584號爲優先權之利益者,此等之申請 專利的揭示全部係引用於本文。 ® 實施例 以下,根據實施例更具體地說明本發明,惟本發明係 只要不超過其主旨,則不受限於以下的實施例。此外,若 沒有特別地限制,「份」爲質量基準。 此外,重量平均分子量係以凝膠滲透層析法(G PC)而測 定的。GPC係使用HLC-8020GPC(東曹(股}製},管柱係使 用 3 根的 TSKgel、Supermultipore HZ-H(東曹(股)製、 4.6mmIDxl5cm),洗提液係使用THF(四氫呋喃)。又,條 件係以試料濃度爲〇.〇45mg/mL、流速爲0.35mL/min、 -73- 200949445 試樣注入量爲l〇#L、測定溫度爲40°C,使用IR檢出器 來進行的。又,檢量線係由東曹(股)製「標準試料TSK standard , polystyrene」;「F-40」、「F-20」、「F-4」、 「F-l」、「A-5000」、「A-2500」、「A-1000」、「正丙基苯」 的8種試樣來製作的。 &lt;樹脂A的合成&gt; 首先進行先前所述的樹脂A之中做爲具體例所舉例的 例示化合物P-52、P-5 1 ' P-53、P-46、及P-47的合成, 〇 來做爲感光性樹脂組成物中所使用的樹脂。此外,在本實 施例中所使用的其他樹脂A亦可藉由變更對應之單體的類 似方法來合成。 (例示化合物P-52的合成&gt; 在反應容器中,預先加入1-甲氧基-2-丙醇(MFG、日 本EMULSION(股)製)7.48份,昇溫至90°C,將由苯乙烯 (St) 3_1份、甲基丙烯酸三環戊烯酯(日立化成工業(股)製的 TCPD-M; x}4.28份、甲基丙稀酸(MAA; y)11.7份、偶氮 ® 系聚合引發劑(和光純藥(股)製、V-60 1)2.08份、及1-甲 氧基-2-丙醇 55.2份所構成之混合溶液,在氮氣雰圍氣 下,花2小時滴下至90 °C的反應容器中。滴下後,使其反 應4小時,以得到丙烯酸樹脂溶液。 接著,在前述丙烯酸樹脂溶液中,加入氫醌單甲基醚 0.15份、及溴化四乙基銨0.34份之後,花2小時滴下甲 基丙烯酸縮水甘油酯(GLM,東京化成工業(股)製)26.4份 (GLM-MAA; z)。滴下後,一邊吹拂空氣、一邊在90°C下 使其反應4小時之後,以形成固體成分濃度爲4 5%的方 -74- 200949445 式,添加溶媒1 -甲氧基-2-丙基乙酸酯(MMPGAc、戴西爾 化學工業(股)製)來進行調製,以得到在具有不飽和基之先 前所述的例示化合物P-51中加入來自苯乙烯之構造單位 的例示化合物P-52(樹脂A)的樹脂溶液(固體成分酸價; 76.0mgKOH/g、Mw ; 25,000、1 -甲氧基-2 -丙醇 / 1 -甲氧 基-2-丙基乙酸酯 45%溶液)(x; y; z; St = 30mol%; 2 7 m ο 1 % ; 3 7 m ο 1 % ; 6 m ο 1 %)。 此處’ GLM-MAA係顯示甲基丙烯酸縮水甘油酯與甲 〇 基丙烯酸鍵結者(以下相同)。 此外,例示化合物P-5 2的分子量Mw係表示重量平均 分子量,重量平均分子量的測定係使用凝膠滲透層析法 (GPC法}來進行(以下相同)。 (例示化合物P-51的合成) 在前述例示化合物P-5 2的合成中,除了不使用苯乙 烯、使例示化合物P-51中的x;y;z爲34mol%;27mol%; 39mol%、變更 TCPD-M(x)、甲基丙烯酸(y)、及 GLM-MAA(z) ® 的添加量以外,藉由與前述例示化合物P-52的合成爲相同 的方法來進行合成,以得到具有不飽和基之例示化合物 P-51(樹脂A)的樹脂溶液(固體成分酸價;72.5mgKOH/g、 Mw; 22,000、1-甲氧基-2-丙醇/1-甲氧基-2-丙基乙酸酯 4 5 %溶液}。 (例示化合物P-53的合成) 在前述例示化合物P-5 2的合成中,除了不使用苯乙 烯、以二環戊烯基氧基乙基甲基丙烯酸酯(日立化成工業 (股)製的FANCRYL FA-512M)取代甲基丙烯酸三環戊烯 -75- 200949445 酯、使例示化合物 P-53中的x; y; z爲 46.2mol%; 24.3mol%; 29.5mol%、且變更 FA-512M(x)、甲基丙烯 酸(y)、GLM-MAA(z)的添加量以外,藉由與前述例示化合 物P-52的合成爲相同的方法來進行合成,以得到具有不飽 和基之例示化合物P-53(樹脂A)的樹脂溶液(固體成分酸 價;71.2mgKOH/g、Mw; 25,500、1-甲氧基-2-丙醇 /1-甲氧基-2-丙基乙酸酯45%溶液)。 (例示化合物P-46的合成) Ο 在前述例示化合物P-52的合成中,除了以ADMA(出 光興產(股)製)取代甲基丙烯酸三環戊烯酯、使在例示化合 物P-1中加入來自苯乙烯之構造單位的組成X; y; z; st 爲 30mol%; 24mol%; 38mol%; 8mol%、變更 ADMA(x}、 甲基丙烯酸(y)、GLM-MAA(z)、及苯乙烯的添加量以外, 藉由與前述例示化合物P-52的合成爲相同的方法來進行 合成,以得到在具有不飽和基之例示化合物P-1中加入來 自苯乙烯之構造單位的例示化合物P-46(樹脂A)的樹脂溶 ❹ 液(固體成分酸價;74· lmgKOH/g、Mw ; 29,000、1-甲 氧基-2-丙醇/1-甲氧基-2-丙基乙酸酯45%溶液)。 (例示化合物P-47的合成} 在前述例示化合物P-52的合成中,除了以甲基丙烯酸 異萡基(IBXMA,和光純藥工業(股)製)取代甲基丙烯酸三環 戊烯酯、使在例示化合物P-2中加入來自苯乙烯之構造單 位的組成 X; y; z; St 爲 34mol%; 24mol%; 36mol%; 6mol%、變更 IBXMA(x)、甲基丙烯酸(y)、GLM-MAA(z)、 及苯乙烯的添加量以外,藉由與例示化合物P-52的合成爲 -76- 200949445 相同的方法來進行合成,以得到在具有不飽和基之例示化 合物P-2中加入來自苯乙烯之構造單位的例示化合物 P-4 7(樹脂A)的樹脂溶液(固體成分酸價;72.9mgK〇H/g、 Mw; 29,000、1-甲氧基-2-丙醇/1-甲氧基-2-丙基乙酸酯 4 5%溶液)。 〔實施例1〕:塗布法 &lt;彩色濾光片基板的製作&gt; 根據特開 2005-3861 號公報的段落號碼 〇 [0084卜[0095]中記載之方法,製作具有黑底、R(紅色)像 素、G(綠色)像素、B (藍色)像素之彩色濾光片(以下,將其 稱爲彩色濾光片基板)。此處,彩色濾光片基板的基板尺寸 爲 550mmx650mm〇 接著,在所得到彩色濾光片基板的R像素、G像素、 及B像素以及黑底之上,再藉由濺鍍ITO(Indium Tin Oxide,氧化銦錫)的透明電極而形成的。 &lt;光間隔物的形成&gt; ® 在上述所製作之ITO透明電極濺鍍形成的彩色濾光片 基板之ITO透明電極上,以旋轉器,狹縫塗布由下述表1 所示之配方(實施例1中爲配方1)所構成之感光性樹脂層 用塗布液。繼而,使用真空乾燥機VCD(東京應化公司製) 以 30秒鐘使溶媒的一部份乾燥至塗布膜沒有流動性之 後,在90 °C的加熱板上預烘烤3分鐘,以形成膜厚5.2//m 的感光性樹脂層(被膜形成步驟)。 繼續,使用具有超高壓水銀燈之近接型曝光機(日立高 科技電子工程(股)製)’在遮罩(具有直徑15#111的圓形圖 -77- 200949445 方狀 向立 對豎 相的 成直 層垂 脂行 樹平 性略 光約 感現 和呈 罩爲 遮板 該基 與片 )'光 罩濾 遮色 光彩 曝之 英置 石配 之所 案式 態下,將遮罩面與感光性樹脂層的表面之間的距離設爲 100# m,透過該遮罩,以在365nm中的強度爲250W/m2 透過紫外透過濾光片(UV-35、東芝玻璃(股)製)來照射紫外 線(曝光量200mJ/cm2;曝光步驟)。 接著,使用碳酸Na系顯像液(含有0.38莫耳/升的碳 酸氫鈉、0.47莫耳/升的碳酸鈉、5%的二丁基萘磺酸鈉、 ❹ 陰離子界面活性劑、消泡劑、及安定劑;商品名:T-CD 1 (富 士軟片(股)製)以純水稀釋成10倍之稀釋液),在29°c下 30秒鐘,以圓錐型噴嘴壓力0.15M Pa進行淋浴顯像,以 形成圖案影像(顯像步驟)。繼而,使用洗淨劑(含有磷酸鹽· 矽酸鹽·非離子界面活性劑·消泡劑·安定劑;商品名: T-SD3(富士軟片(股)製))以純水稀釋成10倍之稀釋液,在 33 °C下20秒鐘,以圓錐型噴嘴壓力0.02M Pa進行淋浴且 吹拂,進行所形成之圖案影像周邊的殘渣去除,以形成圓 ® 柱狀的間隔物圖案在300/zmx300/zm中爲1根間隔物所 間隔的。 接著,藉由將設置有間隔物圖案之彩色濾光片基板在 140°C下60分鐘、進行加熱處理(加熱步驟),以在彩色濾 光片基板上製作光間隔物。此處,就所得之光間隔物1〇〇〇 個,使用三次元表面構造解析顯微鏡(製造商; ZYGOCorporation、型式:New View 5022),測定從 ITO 透明電極上面(與基板成平行的2個面之中,選離基板之側 的面)至光間隔物之最高位置的距離(以下,該距離亦稱爲 -78- 200949445 「光間隔物的高度」),並將平均値作爲光間隔物的平均高 度。 又,所得之光間隔物的底面積計測係使用SEM照相來 進行的。其結果係直徑爲15.1/zm、平均高度爲4.7ym 的圓柱形狀。 表1 感光性樹脂層用塗布液 配方1 (實施例卜17、 比較例1) 配方2 (實施例18&gt; 配方3 (實施例20) 配方4 (實施例19&gt; 配方5 (比較例2) 1-甲氧基-2-丙基乙酸酯 26 26 26 26 35 甲基乙基酮 28 28 28 28 30 膠態矽石分散物(膝態矽石:30份、甲基異 丁酮:70份、日產化學工業(股)製:MIBKst&gt; 0 0 14.1 0 0 Solospose 20000 0.42 0.42 0.42 0.42 0.42 表2所記載之聚合性化合物 13.8 13.8 13.8 6.9 0 DPHA液(二季戊四醇六丙烯酸醋:76份、 1-甲氧基-2-丙基乙酸酯:24份} 0 0 0 9.08 18.2 樹脂A的溶液(但是.樹脂爲下述表2記載之 化) 20.5 0 20.5 20.5 20.5 甲基丙嫌酸/甲基丙嫌酸嫌丙醋共聚物(莫耳 比&gt;=20/80(重置平均分子量=3.6萬) 0 9.17 0 0 0 CGI242 (汽巴特殊化學品(股)製,光聚合引發劑} 0.227 0.227 0.227 0.227 0.23 氫醌單甲基醚 0.0036 0.0036 0.0036 0.0036 0.0036 界面活酬1 (MEGAFAC F780-F、大日本油墨化學工業 股份有限公司製&gt; 0.032 0.032 0.032 0.032 0.032 維多利亞純藍-NAPS(保土谷化學工業股份 有限公司製)的5%甲醇溶液 0 0 2.05 0 0The total amount of the photopolymerization initiator in the photosensitive resin composition is preferably from 5% to 25% by mass based on the total solid content of the photosensitive resin composition, and is preferably 20% by mass. &lt;Particles&gt; The photosensitive resin composition of the present invention preferably contains at least one kind of fine particles of -59 to 200949445 from the viewpoints of a resin, a polymerizable compound, a photopolymerization initiator, and a mechanical strength. The fine particles are not particularly limited, and can be appropriately selected according to the purpose. For example, the extender pigments described in JP-A-2003-302639 [0035] to [0041] are preferred, and good development properties can be obtained. In terms of the optical spacer of the mechanical strength, colloidal vermiculite is preferred. The average particle diameter of the fine particles is a point at which a high mechanical strength can be obtained in a structure in which an external force which easily absorbs a photo spacer or the like is formed, preferably 5 to 50 nm, preferably 10 to 40 nm, and 15 to 30 nm. It is especially good.前述 The content of the fine particles in the photosensitive resin composition (the photo spacer (or the photosensitive resin layer constituting the photo spacer) is increased from the viewpoint of improving the mechanical strength (for example, high mechanical strength can be obtained). The total solid content (mass) in the photosensitive resin composition is preferably 5 to 50% by mass, preferably 10 to 40% by mass, and 15 to 30% by mass. Very good. &lt;Others&gt; The photosensitive resin composition of the present invention may contain a photopolymerization starter or the like as needed in addition to a resin, a specific polymerization compound, a photopolymerization initiator, and, if necessary, fine particles. Other ingredients. The photosensitive resin composition can be used as a further additive component by using a photopolymerization initiation aid. The photopolymerization initiation aid can be used in combination with a photopolymerization initiator because it promotes polymerization of a polymerizable compound which initiates polymerization by a photopolymerization initiator. The photopolymerization initiation aid is preferably at least one of an amine compound. Examples of the amine compound include triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, and 4-dimethyl-60-200949445 ethyl benzoic acid ethyl ester. , 4-dimethylamino benzoic acid isovalerone, 2-dimethylaminoethyl benzoate, 2-ethylhexyl 4-dimethylhexyl benzoate N,N-dimethyl pair Toluidine, 4,4'-bis(dimethylamino)diphenyl ketone (commonly known as Michlerone), 4,4,-bis(diethylamino)diphenyl ketone, 4,4' - bis(ethylmethylamino)diphenyl ketone or the like, among which 4,4'-bis(diethylamino)diphenyl ketone is particularly preferred. Further, it may be used in combination with a plurality of amine-based or other photopolymerization initiators. Other photopolymerization initiation aids other than the above may, for example, be an alkoxy group, an anthraquinone compound, an oxonium compound, or a coumarin compound. The alkoxy ruthenium compound may, for example, be 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene or 2-B. Base - 9,10-diethoxyanthracene and the like. The oxysulfonium III phonic compound may, for example, be 2-isopropylthioguanidine, 4-isopropylthioguanidine, 2,4-diethylthioguanidine, 2,4-di Sodium oxychloride sulphate, 1-chloro-4-propoxy sulphide, and so on. Further, a commercially available person can also be used as a photopolymerization starting aid. The commercially available photopolymerization starter is, for example, a trade name "EAB-F" (manufactured by Hodogaya Chemical ® X Co., Ltd.). The content of the photopolymerization initiator in the photosensitive resin composition is preferably 0.6 parts by mass or more and 20 parts by mass or less, and 1 part by mass or more and 15 parts by mass or less based on 1 part by mass of the photopolymerization initiator. More preferably, it is preferably 1.5 parts by mass or more and 15 parts by mass or less. Further, the other components may be selected and used as a component constituting a well-known composition, and may be, for example, the paragraph number of [0010] [0020] and JP-A-2006-64921. The component described in 0027 [0053]. -61- 200949445 The photosensitive resin composition of the present invention can be suitably used for pattern partition walls (for example, black matrix, etc.) and alignment, in addition to being suitable for use in forming a photo spacer, a colored pattern, and a protective film to be described later. Formation of other pattern structures and films such as protrusions for control. <<Photo spacer and method for forming the same>> The photo spacer of the present invention is formed by using the photosensitive resin composition of the present invention described above. The details and preferred aspects of the photosensitive resin composition are as described above.光 Since the photo-spacer of the present invention is formed by using the photosensitive resin composition of the present invention, it has a cross-sectional shape with high uniformity and can suppress a height shift. Further, in the case where the photosensitive resin composition of the present invention contains the resin A, a photo spacer having a high compression modulus and deformation recovery property which is necessary as a photo spacer can be obtained. Here, in the present invention, the pattern structure such as the photo spacer is described as having a "uniform cross-sectional shape". In the state in which the pattern structure has a "uniform cross-sectional shape", it is preferable that the cross-sectional shape of the pattern structure is close to the shape of the rectangle in a plurality of places (preferably three or more) in the substrate. The above-mentioned "a shape close to a rectangle" is parallel to the normal direction of the substrate, and is cut in a plane perpendicular to the normal direction of the substrate of the pattern structure and the tight edge (the wiring of the edge of the cylindrical structure). In the cross section when the pattern structure is broken, the angle formed by the line corresponding to the side surface of the pattern structure and the line corresponding to the lower surface of the pattern structure (hereinafter also referred to as "taper angle") is 80. Above, 100. The following shapes are preferred. Here, the pattern structure is hereinafter referred to as the contact surface of the substrate on which the pattern structure is formed, in the surface of the pattern structure -62-200949445. Further, the side surface of the pattern structure is formed on the surface of the pattern structure, and is not the lower surface of the pattern structure, and is not the upper surface of the pattern structure (the (for example, parallel) surface facing the lower surface of the pattern structure, and The face that is not in contact with the aforementioned lower ground). The photo spacer of the present invention can be formed by any method by using the photosensitive resin composition of the present invention by using a method comprising the steps (A) to (c) shown below (the photointerval of the present invention). The method of preparation can be optimally formed. The method for producing a photo spacer of the present invention comprises the steps of: (a) forming a film of the photosensitive resin composition of the present invention described above on a substrate (hereinafter, also referred to as "film formation step" And (b) an exposure step (hereinafter also referred to as "exposure step") of exposing at least a portion of the film, and a development step of the film after exposure to (c) exposure (hereinafter also referred to as In the "development step", a heating step (hereinafter also referred to as "film heating step") of the film after heating and development, and other steps may be provided as needed. (A) Film formation step The film formation step is a film on which a photosensitive resin composition of the present invention described above is formed on a substrate. The photosensitive resin layer in which the photosensitive resin layer is formed as a film can be formed into a photo-spacer capable of uniformly maintaining a cell thickness by a further step such as an exposure step or a developing step to be described later. By using the photo spacer of the present invention, particularly in an image of a display device (particularly a liquid crystal display device) which is liable to cause display unevenness due to variations in cell thickness, display unevenness can be effectively eliminated. -63-200949445 A method of forming a photosensitive resin layer on a substrate, for example, (a) coating method of applying a photosensitive resin composition containing at least a resin, a polymerizable compound, and a photopolymerization initiator described above And (b) a transfer method in which a photosensitive transfer material having the photosensitive resin layer is used, and a photosensitive resin layer is laminated and transferred by heating and/or pressurization. (a) Coating method The coating method of the photosensitive resin composition can be applied by a well-known coating method, for example, spin coating method, curtain coating method, slit coating method, dip coating method, squeegee coating method, roll coating method, metal The bar coating method, the gravure coating method, or the extrusion molding method using a popper described in the specification of U.S. Patent No. 2,681,294. In particular, JP-A-2004-89851, JP-A-2004-17043, JP-A-2003-170098, JP-A-2003-164787, JP-A-2003-10767, JP-A-2002- A method of a slit nozzle or a slit coater described in JP-A-2001-310147, etc. is a suitable "®" (b) transfer method using a photosensitive transfer material, for example, heating and/or Or a pressure roller or a flat plate, after the photosensitive resin layer formed on the temporary support is bonded to the desired substrate surface by calendering or heat rolling, the temporary support is peeled off to transfer the photosensitive resin layer. Printed onto the substrate. Specifically, a laminator and a lamination method described in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In view of the above, it is preferable to use the method described in Japanese Laid-Open Patent Publication No. H7-110575. -64-200949445 In the case of forming a photosensitive resin layer, an oxygen blocking layer (hereinafter also referred to as "oxygen interrupting film" or "intermediate layer") may be further provided between the photosensitive resin layer and the temporary support. Thereby, the exposure sensitivity can be improved. Further, in order to improve the transfer property, a cushioning thermoplastic resin layer may be provided. A temporary support constituting a photosensitive transfer material, an oxygen barrier layer, a thermoplastic resin layer, another layer, and a method for producing the photosensitive transfer material are disclosed in JP-A No. 2 006-2 3 696 The composition and production method described in paragraph number [0024] [0030].情 In the case where the photosensitive resin layer is formed together by the (a) coating method and the (b) transfer method, the layer thickness is preferably 〇.5~10.0#111, and 1~6#111 is preferable. When the layer thickness is in the above range, the occurrence of pinholes can be prevented at the time of coating formation at the time of production, and the development of the unexposed portion without development does not require a long time. Examples of the substrate on which the photosensitive resin layer is formed include a transparent substrate (for example, a glass substrate or a plastic substrate), a substrate with a transparent conductive film (for example, an ITO film), and a substrate with a color filter (also referred to as a color filter). A light sheet substrate), a drive substrate to which a driving element (for example, a thin film transistor [TFT]) is attached, or the like. The thickness of the substrate © is generally preferably 700 to 1200 μm. (B) Exposure step, (c) development step In the exposure step, at least a portion of the film formed in the film formation step is exposed to form a latent image. In the subsequent development step, the film exposed in the above-described exposure step is developed to form a spacer pattern of a desired shape. Specific examples of such steps include a formation example described in paragraph numbers [〇〇71] to [〇077] of JP-A-2006-6492, and a paragraph number [0040] of JP-A-2006-23696. The procedure of -65-200949445 described in [0051] is taken as a suitable example in the present invention. The photo spacer of the present invention may be provided with a (but) film heating step as described below, and the film heating step may not be provided by increasing the exposure amount during the exposure (hereinafter, also referred to as "no heating step"). It is also possible to form a photo spacer having a uniform cross-sectional shape and excellent height uniformity. By the "no heating step", it is possible to more effectively suppress deterioration of the formed photo spacer, deterioration of the already formed pattern structure (coloring pattern, etc.), and protective film 〇. The exposure amount for the "no heating step" is preferably from 1 to 500 mJ/cm2, preferably from 10 to 300 mJ/cm2. (D) Film Heating Step The photo spacer of the present invention can also be provided with a film heating step of heating the film after the development of the developing step. By heating, the hardening of the film can be further promoted, and a photo spacer having high strength can be obtained. Further, in the case where the photosensitive resin composition contains the resin A, a photo spacer having a higher compression elastic ratio and deformation recovery property can be obtained. Here, the maximum temperature at the heating varies depending on the heating time, preferably 40 ° C to 145 ° C, and more preferably 40 ° C to 140 ° C. When the maximum temperature is in the range of 40 ° C to 1 4 5 t, the deterioration of the formed photo spacer, the formation of the patterned structure (coloring pattern, etc.), and the deterioration of the protective film can be more effectively suppressed. Among them, the maximum temperature during heating is from 80 ° C to 140 ° C, and the heating time is preferably from 1 hour to 3 hours (more preferably from 0 to 2 hours to 1 hour). -66- 200949445 As described above, a substrate for a display device including a photo spacer can be fabricated on a substrate. The photo spacer is preferably formed on a black light-shielding portion such as a black matrix formed on a substrate, or a driving element such as a TFT. In addition, a transparent conductive layer (transparent electrode) such as ITO or an alignment film such as polyimide may be present between a black light-shielding portion such as a black matrix or a driving element such as a TFT and a photo spacer. For example, in the case where the photo spacer is provided on the black light-shielding portion or the driving element, a black light-shielding portion (black matrix or the like) of the substrate and a driving element may be coated in advance, for example, a photosensitive transfer material may be used. The photosensitive resin layer is laminated on the support surface, and after being subjected to release transfer to form a photosensitive resin layer, exposure, development, heat treatment, or the like is applied thereto to form a photo spacer, whereby a substrate for a display device can be produced. In the substrate for a display device of the present invention, colored pixels of three colors of red (R), blue (B), and green (G) can be provided as needed. The photo spacer of the present invention can be formed after forming a color filter including a black mask portion such as a black matrix or a colored portion such as a color pixel. The black shielding portion, the coloring portion, and the photo spacer can be arbitrarily combined: a coating method of applying a photosensitive resin composition, and a transfer of a transfer material using a photosensitive resin layer composed of a photosensitive resin composition. Formed by law. The black shielding portion, the colored portion, and the photo spacer may be formed of a photosensitive resin composition, and specifically, the photosensitive resin composition of the liquid is directly applied onto the substrate to form a photosensitive resin. After the layer, exposure and development are performed, and the black shielding portion and the colored portion are formed into a pattern, and then the photosensitive resin composition provided with another liquid is used on another substrate different from the substrate (temporary - 67-200949445 support material) is formed by forming a transfer material made of a photosensitive resin layer and after transferring the transfer material to the front side of the black masking portion and the coloring portion 2 to transfer the photosensitive resin layer The photo spacer can be formed into a pattern by performing exposure and development. Thus, a color filter in which a photo spacer is provided can be produced. "Protective film" The protective film of the present invention is formed by using the photosensitive resin composition of the present invention described above.保护 Since the protective film of the present invention is formed by using the photosensitive resin composition of the present invention, even when it is formed at a low heating temperature or without heat treatment, the film thickness uniformity is excellent. The protective film of the present invention can be formed by any method using the method of the photosensitive resin composition of the present invention, and can be formed by the same method as the above-described method of producing the optical spacer of the present invention. Here, in the case where the protective film is not patterned, that is, in the case where the protective film is formed into a so-called beta film, the above-mentioned (b) exposure step is performed by the method of fully exposing the film. suitable. <<Coloring Pattern>> The coloring pattern of the present invention is formed by using the photosensitive resin composition of the present invention described above. Here, the photosensitive resin composition is preferably in a form containing at least one of a coloring agent in addition to the components described above. The coloring agent is not particularly limited and may be appropriately selected from among known coloring agents. Specific examples of the known coloring agent include, for example, JP-A-2005-17716 [0038] [0054], which is described in JP-68-200949445, and dyes, and JP-A-2004-361447 [0 0 6 8 The pigment described in [0 0 7 2 ], and the coloring agent described in JP-A-2005-17521 [0080] [0088]. Since the colored pattern of the present invention is formed by using the photosensitive resin composition of the present invention, even in the case of forming at a low heating temperature or without heat treatment, a cross-sectional shape having high uniformity and a film thickness are obtained. Uniformity is also excellent. Further, the coloring pattern of the present invention is a case where a color filter having a plurality of colors is used as a single element, and at least one coloring pattern can be formed using the photosensitive resin composition of the present invention. The colored pattern of the present invention can be formed by any method using the photosensitive resin composition of the present invention, and can be formed, for example, by the same method as the above-described method for producing a photo spacer of the present invention. <<Substrate for Display Device>> The substrate for a display device of the present invention comprises the above-described photo spacer of the present invention, the protective film of the present invention, and one or more selected from the colored pattern of the present invention. of. The substrate for a display device of the present invention has a cross-sectional shape and uniformity of film thickness (height) formed by using the photosensitive resin composition of the present invention (the photo spacer of the present invention, the protective film of the present invention) Further, at least one of the color patterns of the present invention is used in the display device to suppress display unevenness when the image is displayed. Here, the substrate for a display device refers to at least one of the pair of support members constituting the display device. The specific example of the display device substrate differs depending on the configuration of the display device and the display device, and may be, for example, a color filter substrate having a coloring pattern of -69 to 200949445 (hereinafter also referred to as "colored pixel"). a substrate having a driving means (for example, a passive matrix substrate or an active matrix substrate), and a substrate having a partition wall attached to the partition wall (for example, a substrate having a black matrix and a black matrix) A color filter array (on array) substrate having both a colored pattern and a driving means, a glass substrate having no pattern structure or a film, and the like. The coloring pattern group (colored pixel group) of the color filter substrate may be composed of pixels of two colors that do not appear to be different colors, or may be composed of pixels of Φ three colors or pixels of four or more colors. For example, in the case of three colors, the three colors of red (R), green (G), and cyan (B) are formed. In the case of arranging pixel groups of three colors of RGB, it is preferable to arrange them in a mosaic type or a triangular type, and it is possible to arrange any of the four or more pixel groups. The color filter substrate can be formed, for example, by forming a pixel group of two or more colors in a manner as described above, or conversely, forming a pixel group after forming a black matrix. For the formation of RGB pixels, JP-A-2004-347831 and the like can be referred to. ❹ <<Display Element>> The display element can be formed using the substrate for a display device of the present invention described above. In one of the display elements, for example, at least one of the light-transmitting pair of supports (including a substrate for a display device) includes at least a liquid crystal layer and a liquid crystal driving means (including a passive matrix driving method and The liquid crystal display element of the source matrix driving method). In the case of the liquid crystal display device, the substrate for the display device can be used as a color filter substrate having a plurality of RGB pixel groups, and each pixel system constituting the pixel group is 70-200949445, which is separated from each other by a black matrix. To use. Since the color filter substrate is provided with a pattern structure having a uniform cross-sectional shape and uniformity of film thickness (height), the liquid crystal display element including the color filter substrate can be effectively suppressed: resulting from a color filter The variation in the cell pitch (cell thickness) between the substrate and the counter substrate occurs due to unevenness in color unevenness due to partial deviation of the liquid crystal material or low-temperature foaming. Thereby, the liquid crystal display element produced can display a clear image. Further, in a more detailed aspect of the liquid crystal display device, for example, at least one of the light transmissive pair of supports (including a substrate for a liquid crystal display device) includes at least a liquid crystal layer and a liquid crystal driving means. The liquid crystal driving means has an active element (for example, a TFT), and a pair of substrates is formed by defining a predetermined width of the photo spacer. In the display device of the present invention, the display device of the present invention includes a display device of the present invention having a cross-sectional shape and a uniform film thickness (height) uniformity. With the ® substrate, $ can suppress uneven display. The display device may be, for example, a display device such as a liquid crystal display device, a plasma display display device, an EL display device, or a CRT display device. The definition of the display device and the description of each display device are described in, for example, "Electronic display device (sasaki Sasaki, Industrial (stock) survey society issued in 1990)", "display device (Ibuki Shunzhang, industrial book (share) ) issued in the first year of Heisei). Among the display devices, a liquid crystal display device is preferred. For example, the liquid crystal display device defines a predetermined width between a pair of substrates facing each other with a photo spacer, and is sealed in a predetermined gap (the sealed portion is referred to as a liquid crystal layer) liquid crystal material. Further, the thickness (cell thickness) of the liquid crystal layer is maintained to a desired uniform thickness. The liquid crystal display mode in the liquid crystal display device may be, for example, STN type, TN type, GH type, ECB type, ferroelectric liquid crystal, antiferroelectric liquid crystal, VA type, IPS type, OCB type, ASM type, or the like. It is suitable. In the liquid crystal display device of the present invention, from the viewpoint of the most effective effect of the present invention, the display mode in which display unevenness is unlikely to occur due to the Φ variation of the cell thickness of the liquid crystal cell is It is desirable that the VA type display mode, the IPS type display mode, and the OCB type display mode in which the cell thickness is 2 to 4/zm is preferable. Further, the liquid crystal used in the present invention may, for example, be a nematic liquid crystal, a cholesteric liquid crystal, a smectic liquid crystal or a ferroelectric liquid crystal. In the basic configuration of the liquid crystal display device, for example, (a) a light-transmitting spacer is used, and a driving side substrate including a driving element such as a thin film transistor (TFT) and a pixel electrode (conductive layer) is arranged and aligned. The electrode (conductive layer) is disposed opposite to the substrate, and is formed by sealing a liquid crystal material in a gap portion thereof; (b) transmitting the light spacer to provide a pair of the driving substrate and the counter electrode (conductive layer) The liquid crystal display device of the present invention can be suitably used for various liquid crystal display devices, in which the substrate is disposed to face each other and a liquid crystal material is sealed in the gap portion. The liquid crystal display device is described in, for example, "Second Generation Liquid Crystal Display Technology (Edited by Uchida Natsuo, Side Industry Survey, issued in 1994)". The liquid crystal display device of the present invention is not particularly limited, except for the liquid crystal display device of the present invention. For example, the liquid crystal display device can be configured in various manners as described in the "Second Generation Liquid Crystal-72-200949445 Display Technology". Among them, it is effective particularly in a liquid crystal display device constituting a color TFT system. The liquid crystal display device of the color TFT system is described, for example, in "Color TFT liquid crystal display (Kyoritsu Publishing Co., Ltd., issued in 1996)". In addition to the above-described photo spacer, colored pattern, protective film, substrate for liquid crystal display device, and liquid crystal display device, an electrode substrate, a polarizing film, a retardation film, a backlight, a photo spacer, and the like can be generally used. A wide variety of members such as a viewing angle compensation film, an antireflection film, a light diffusion film, and an antiglare film are used. These components are, for example, "'94 Liquid Crystal Display Peripherals, Chemicals Markets (Island Kentaro, CMC (shares), issued in 1994), "2003 Liquid Crystal Related Market Status and Future Outlook (Volume 2)" There are records in Table Liangji, Fuji Chimera (shares), 2003, etc.). The present patent application claims the benefit of priority to the patent application No. 2 0 08-09 2583, filed on March 31, 2008, and the Japanese Patent Application No. 2008-092584, the entire disclosure of which is incorporated herein by reference. This article is cited in this article. ® EXAMPLES Hereinafter, the present invention will be specifically described based on examples, but the present invention is not limited to the following examples as long as it does not exceed the gist thereof. In addition, "parts" are quality standards unless otherwise specified. Further, the weight average molecular weight was measured by gel permeation chromatography (G PC). For the GPC system, HLC-8020GPC (manufactured by Tosoh Corporation) was used, and three TSKgels, Supermultipore HZ-H (manufactured by Tosoh Corporation, 4.6 mm ID x 15 cm) were used for the column, and THF (tetrahydrofuran) was used as the eluent. Further, the conditions were such that the sample concentration was 〇.〇45 mg/mL, the flow rate was 0.35 mL/min, and -73-200949445, the sample injection amount was l〇#L, and the measurement temperature was 40 ° C, and the IR detector was used. In addition, the calibration line is made by Tosoh (standard) TSK standard, polystyrene; "F-40", "F-20", "F-4", "Fl", "A-5000" Eight kinds of samples of "A-2500", "A-1000", and "n-propylbenzene" were produced. &lt;Synthesis of Resin A&gt; First, the synthesis of the exemplified compounds P-52, P-5 1 'P-53, P-46, and P-47 exemplified as the specific examples of the resin A described above was carried out. It is used as a resin used in a photosensitive resin composition. Further, the other resin A used in the present embodiment can also be synthesized by a similar method of changing the corresponding monomer. (Synthesis of exemplified compound P-52) In a reaction vessel, 7.48 parts of 1-methoxy-2-propanol (MFG, manufactured by EMULSION, Japan) was added in advance, and the temperature was raised to 90 ° C, which was obtained from styrene ( St) 3_1 parts, tricyclopentenyl methacrylate (TCPD-M manufactured by Hitachi Chemical Co., Ltd.; x} 4.28 parts, methyl acrylate (MAA; y) 11.7 parts, azo® polymerization a mixed solution of 2.08 parts of a reagent (manufactured by Wako Pure Chemical Industries Co., Ltd., V-60 1) and 55.2 parts of 1-methoxy-2-propanol, and dropped to 90 ° for 2 hours under a nitrogen atmosphere. In the reaction vessel of C. After the dropwise addition, the mixture was reacted for 4 hours to obtain an acrylic resin solution. Next, 0.15 parts of hydroquinone monomethyl ether and 0.34 parts of tetraethylammonium bromide were added to the acrylic resin solution. 26.4 parts (GLM-MAA; z) of glycidyl methacrylate (GLM, manufactured by Tokyo Chemical Industry Co., Ltd.) was dropped for 2 hours. After dropping, the reaction was carried out at 90 ° C for 4 hours while blowing air. Thereafter, a solvent of 1-methoxy-2-propyl acetate (MMPGAc) was added in the form of a formula of -74-200949445 having a solid concentration of 45%. Modification by Daisy Chemical Industry Co., Ltd. to obtain an exemplary compound P-52 (Resin A) in which a structural unit derived from styrene was added to the previously described exemplified compound P-51 having an unsaturated group. Resin solution (solid content acid value; 76.0 mg KOH / g, Mw; 25,000, 1-methoxy-2-propanol / 1-methoxy-2-propyl acetate 45% solution) (x; y; z; St = 30 mol%; 2 7 m ο 1 % ; 3 7 m ο 1 % ; 6 m ο 1 %). Here ' GLM-MAA shows glycidyl methacrylate and methacrylic acid bonded Further, the molecular weight Mw of the exemplified compound P-5 2 represents a weight average molecular weight, and the measurement of the weight average molecular weight is carried out by gel permeation chromatography (GPC method) (the same applies hereinafter). (Example compound P Synthesis of -51) In the synthesis of the above-exemplified compound P-5 2, except that styrene was not used, x; y; z in the exemplified compound P-51 was 34 mol%; 27 mol%; 39 mol%, and TCPD-M was changed. The addition of (x), methacrylic acid (y), and GLM-MAA(z) ® is the same as the synthesis of the above-exemplified compound P-52. The synthesis was carried out to obtain a resin solution of the exemplified compound P-51 (resin A) having an unsaturated group (solid content acid value; 72.5 mgKOH/g, Mw; 22,000, 1-methoxy-2-propanol/1- Methoxy-2-propyl acetate 45% solution}. (Synthesis of the exemplified compound P-53) In the synthesis of the above-exemplified compound P-5 2, except that styrene and dicyclopentenyloxyethyl methacrylate (manufactured by Hitachi Chemical Co., Ltd.) were not used. FANCRYL FA-512M) Substituting tricyclopentene methacrylate-75-200949445 ester, making x in the exemplified compound P-53; y; z is 46.2 mol%; 24.3 mol%; 29.5 mol%, and changing FA-512M In addition to the addition amount of (x), methacrylic acid (y), and GLM-MAA (z), the synthesis is carried out by the same method as the above-exemplified compound P-52 to obtain an exemplified compound having an unsaturated group. Resin solution of P-53 (Resin A) (solid content acid value; 71.2 mg KOH/g, Mw; 25,500, 1-methoxy-2-propanol/1-methoxy-2-propyl acetate 45 % solution). (Synthesis of the exemplified compound P-46) Ο In the synthesis of the above-exemplified compound P-52, in place of the triphenylpentenyl methacrylate substituted by ADMA (manufactured by Idemitsu Kosan Co., Ltd.), the compound P-1 is exemplified. Adding the composition X from the structural unit of styrene; y; z; st is 30 mol%; 24 mol%; 38 mol%; 8 mol%, changing ADMA (x}, methacrylic acid (y), GLM-MAA (z), In addition to the addition amount of styrene, the synthesis was carried out in the same manner as in the synthesis of the above-exemplified compound P-52 to obtain an example in which a structural unit derived from styrene was added to the exemplified compound P-1 having an unsaturated group. Resin solution of Compound P-46 (Resin A) (solid content acid value; 74·1 mgKOH/g, Mw; 29,000, 1-methoxy-2-propanol/1-methoxy-2-propyl Acetate 45% solution) (Synthesis of exemplified compound P-47) In the synthesis of the above-exemplified compound P-52, in place of isopropyl methacrylate (IBXMA, manufactured by Wako Pure Chemical Industries, Ltd.) Tricyclopentenyl acrylate, the composition X of the structural unit derived from styrene is added to the exemplified compound P-2; y; z; St is 34 mol% 24 mol%; 36 mol%; 6 mol%, modified IBXMA (x), methacrylic acid (y), GLM-MAA (z), and styrene added, by synthesis with the exemplified compound P-52 - 76- 200949445 The same method was used for the synthesis to obtain a resin solution (solid component acid value) of the exemplified compound P-4 7 (resin A) from the structural unit of styrene added to the exemplified compound P-2 having an unsaturated group. 72.9 mg K〇H/g, Mw; 29,000, 1-methoxy-2-propanol/1-methoxy-2-propyl acetate 45% solution) [Example 1]: Coating method &lt;Production of Color Filter Substrate&gt; A black matrix, an R (red) pixel, and a G (green) pixel are produced according to the method described in paragraph number [0084] [0095] of JP-A-2005-3861. A color filter of B (blue) pixels (hereinafter, referred to as a color filter substrate). Here, the substrate size of the color filter substrate is 550 mm x 650 mm, and then, on the R pixel, the G pixel, and the B pixel and the black matrix of the obtained color filter substrate, ITO (Indium Tin Oxide) is further sputtered. , formed by a transparent electrode of indium tin oxide. &lt;Formation of Photo Spacer&gt; ® On the ITO transparent electrode of the color filter substrate formed by the above-described ITO transparent electrode sputtering, the formulation shown in Table 1 below was applied by a rotator and a slit ( In the first embodiment, the coating liquid for a photosensitive resin layer composed of the formulation 1) was used. Then, using a vacuum dryer VCD (manufactured by Tokyo Ohka Co., Ltd.), a part of the solvent was dried for 30 seconds until the coating film had no fluidity, and then prebaked on a hot plate at 90 ° C for 3 minutes to form a film. A photosensitive resin layer having a thickness of 5.2/m (film formation step). Continue, using a proximity type exposure machine with ultra-high pressure mercury lamp (Hitachi Hi-Tech Electronic Engineering Co., Ltd.)' in the mask (circular figure with diameter 15#111 -77-200949445 square to vertical to vertical phase The straight layer of the fat-lined tree is slightly flat and the mask is used as the shutter. The base and the piece are covered by the mask. The mask is opaque and the glare is exposed. The distance between the surfaces of the resin layer was set to 100 #m, and the ultraviolet ray filter (UV-35, Toshiba Glass Co., Ltd.) was irradiated with ultraviolet light at a strength of 365 nm of 250 W/m2 through the mask. (Exposure amount 200 mJ/cm2; exposure step). Next, a Na carbonate-based developing solution (containing 0.38 mol/liter sodium hydrogencarbonate, 0.47 mol/liter sodium carbonate, 5% sodium dibutylnaphthalenesulfonate, an anionic surfactant, and an antifoaming agent) was used. And stabilizers; trade name: T-CD 1 (made by Fujifilm (manufactured by Fujifilm)) diluted with pure water to a 10-fold dilution), at 30 ° C for 30 seconds, with a cone nozzle pressure of 0.15 M Pa Shower the image to form a pattern image (development step). Then, using a detergent (containing phosphate, citrate, nonionic surfactant, antifoaming agent, stabilizer; trade name: T-SD3 (made by Fujifilm)), diluted 10 times with pure water. The diluted solution was showered at 33 ° C for 20 seconds at a conical nozzle pressure of 0.02 M Pa, and the residue around the formed pattern image was removed to form a circle® columnar spacer pattern at 300/. The zmx300/zm is separated by one spacer. Next, the color filter substrate provided with the spacer pattern was subjected to heat treatment (heating step) at 140 ° C for 60 minutes to form a photo spacer on the color filter substrate. Here, one of the obtained photo spacers was measured using a three-dimensional surface structure analysis microscope (manufacturer; ZYGO Corporation, type: New View 5022), and the upper surface of the ITO transparent electrode (two faces parallel to the substrate) was measured. Among them, the distance from the side of the substrate to the highest position of the photo spacer (hereinafter, the distance is also referred to as -78-200949445 "the height of the photo spacer"), and the average 値 is used as the photo spacer. average height. Further, the measurement of the bottom area of the obtained photo spacer was carried out using SEM photographing. The result was a cylindrical shape having a diameter of 15.1/zm and an average height of 4.7 ym. Table 1 Coating liquid formulation 1 for photosensitive resin layer (Examples 17, Comparative Example 1) Formulation 2 (Example 18 &gt; Formulation 3 (Example 20) Formulation 4 (Example 19 &gt; Formulation 5 (Comparative Example 2) 1 -Methoxy-2-propyl acetate 26 26 26 26 35 Methyl ethyl ketone 28 28 28 28 30 Colloidal vermiculite dispersion (knee vermiculite: 30 parts, methyl isobutyl ketone: 70 parts) , Nissan Chemical Industry Co., Ltd.: MIBKst&gt; 0 0 14.1 0 0 Solospose 20000 0.42 0.42 0.42 0.42 0.42 The polymerizable compound described in Table 2 13.8 13.8 13.8 6.9 0 DPHA liquid (dipentaerythritol hexaacrylate vinegar: 76 parts, 1- Methoxy-2-propyl acetate: 24 parts} 0 0 0 9.08 18.2 A solution of Resin A (however, the resin is as described in Table 2 below) 20.5 0 20.5 20.5 20.5 Methyl propylene acid/methyl Acrylic acid propylene vinegar copolymer (Morby &gt; = 20/80 (reset average molecular weight = 36,000) 0 9.17 0 0 0 CGI242 (Ciba specialty chemicals (stock), photopolymerization initiator} 0.227 0.227 0.227 0.227 0.23 Hydroquinone monomethyl ether 0.0036 0.0036 0.0036 0.0036 0.0036 Interface Remuneration 1 (MEGAFAC F780-F, Dainippon Ink Chemical Industry Co., Ltd. &Gt; 0.032 0.032 0.032 0.032 0.032 Victoria Pure Blue -NAPS (Hodogaya Chemical Industry Co., Ltd.) was 5% methanol solution of 2.05 0 0 0 0

單位:份 -79- 200949445 &lt;液晶顯示裝置的製作&gt; 另外,準備玻璃基板作爲對向基板,且在上述所得之 彩色濾光片基板的透明電極上及對向基板上分別施加PVA 模式用的圖案化,更於其上設置由聚醯亞胺所形成的配向 膜。 隨後,以圍繞彩色濾光片之像素群的方式在相當於設 置於周圍的黑底外框之位置,藉由分配器方式塗布紫外線 硬化樹脂的密封劑,滴下PVA模式用液晶,與對向基板貼 © 合之後,UV照射所貼合的基板後,進行熱處理以使得密封 齒ί硬化。在如此所得之液晶胞的兩面上,貼附SANRITZ(股) 製的偏光板HLC2-2518。 接著,使用FR1112H(STONELEY電氣(股)製的基片 型 LED)爲紅色(R)LED、使用 D G 1 1 1 2 H ( STO N E LEY 電氣 (股)製的基片型 LED)爲綠色(G)LED 、 使用 DB 1 1 1 2H(STONELEY電氣(股)製的基片型 L E D )爲藍色 (B) LED以構成側光方式的背光,將前述偏光板配置於在所 ® 設置的液晶胞之背面側,以形成液晶顯示裝置。 &lt;評價&gt; 就所得之光間隔物、液晶顯示裝置進行下述的評價。 測定評價的結果係表示於下述表2。 (光間隔物的剖面形狀) 用與基板法線方向平行的平面切斷上述 &lt;光間隔物的 形成 &gt;中所得之加熱處理後的光間隔物,且藉由掃瞄型電子 顯微鏡觀察其切剖面的形狀。觀察係針對基板周邊部及基 板中央部的共計5處來進行,並按照下述基準來評價光間 -80- 200949445 隔物的剖面形狀。 ~評價基準~ A;在全部的5處中,形成具有錐形角度45°以上、90° 以下的剖面形狀之光間隔物。 B;在全部的5處中,雖然形成具有錐形角度4 5°以 上、95°以下的剖面形狀之光間隔物,但是與上述A相比, 從錐形角度爲大者稍微有點多之點而言變差。 C;在全部的5處中,形成具有錐形角度40°以上、100° ❹ 以下的剖面形狀之光間隔物,但是與上述A及B相比,從 錐形角度大者爲更多之點而言變差。 D;在5處的1~4處中,形成錐形角度不在40°以上、 100°以下的範圍之光間隔物。 E;在全部的5處中,形成錐形角度不在40°以上、100° 以下的範圍之光間隔物。 (光間隔物的高度均一性) 從在上述 &lt;光間隔物的形成 &gt;所測定之光間隔物1000 ® 個分之高度的結果,算出最大値與最小値之差異,並按照 下述基準來進行評價。高度均一性係表示値的差異越小均 一性越優異。 ~評價基準~ A:光間隔物之高度的最大値與最小値之差異爲低於 0.2 // m。 B:光間隔物之高度的最大値與最小値之差異爲 0.2#m 以上、低於 0.3/zm。 C:光間隔物之高度的最大値與最小値之差異爲 -81 - 200949445 〇.3&quot;m 以上、低於 〇.4/zm。 D:光間隔物之高度的最大値與最小値之差異爲 〇.4//m 以上、低於 〇.5/zm。 E:光間隔物之高度的最大値與最小値之差異爲 0.5 /z m 以上》 (加熱處理條件的評價&gt; 根據以下的順序’來進行加熱處理條件的評價。 首先,除了將曝光量變更爲2 5 0mJ/cm2來進行曝光 ❹ 以外,以與上述 &lt; 光間隔物的形成&gt;同樣進行’進行至殘渣 處理後、加熱處理前的操作’以製作具有間隔物圖案之評 價用試樣。 就所得之評價用試樣’評價沒有加熱處理時、及使加 熱溫度種種變化來進行加熱處理(加熱處理時間固定爲60 分鐘)時的光間隔物之剖面形狀及光間隔物之高度均一' 性。光間隔物的剖面形狀及光間隔物的高度均一性的評價 方法係如前所述。 ® 基於光間隔物的剖面形狀及光間隔物的高度均一性的 評價結果,按照下述基準來進行加熱處理條件的評價。 此外,在下述評價基準中,所謂具有「均一性優異的 剖面形狀」之狀態,在前述光間隔物的剖面形狀的評價基 準中係指A、B、或C之狀態。又,在下述基準中,所謂具 有「優異的高度均一性」之狀態,在前述光間隔物的高度 均一性的評價基準中係指A、B、或C之狀態。 ~評價基準~ A;沒有加熱處理,得到了剖面形狀的均一性及高度均 -82- 200949445 一性優異的間隔物圖案。 B ;加熱溫度爲低於80 °C,得到的剖面形狀的均—性 及高度均一性優異的間隔物圖案。 C ;加熱溫度爲80°C以上、低於150t,得到了剖面 形狀的均一性及高度均一性優異的間隔物圖案。 D ;加熱溫度爲150°C以上、低於20CTC,得到了剖面 形狀的均一性及高度均一性優異的間隔物圖案。 E ;加熱溫度爲2 0 0 °C以上,得到了剖面形狀的均—性 〇 及高度均一性優異的間隔物圖案。 (變形回復率) 對於所得之光間隔物,藉由微小硬度計(DUH-W20 1、 島津製作所(股)製)如下述般進行測定、評價。測定係採用 5O/zm0的圓錘台壓子,以最大荷重50mN、保持時間5 秒,依照負荷-除荷試驗法來進行。從該測定値按照下述式 來求得變形回復率〔%〕,並根據下述評價基準來進行評 價。測定係在22±1°C、50%RH的環境下來進行。 〇 變形回復率(%) =(荷重開放後的回復量丨〆m】/荷重時的變形量 [μ m]) X 1 00 ~評價基準~ A:變形回復率爲90%以上》 B :變形回復率爲87%以上、低於90%。 C :變形回復率爲85%以上、低於87%。 D :變形回復率爲80%以上、低於85%。 E :變形回復率爲75%以上、低於80%。 -83- 200949445 F:變形回復率爲低於75%。 (液晶顯示裝置的顯示不均) 就上述所製作的液晶顯示裝置,以目視觀察輸入灰階 的測試信號時的灰階顯示,並依照下述評價基準來評價顯 示不均的有無發生。評價結果係表示於下述表2。 ~評價基準~ A:沒有顯示不均,得到了非常良好的顯示畫像》 B:雖然在玻璃基板的邊緣部分稍微有點不均,但是對 〇 於顯示部沒有影響且顯示畫像爲良好。 c:在顯示部觀察到稍微有點不均,但是在實用上的許 容範圍内。 D:在顯示部觀察到不均。 〔實施例2~13〕:塗布法 在實施例1中,除了將聚合性化合物的種類變更爲如 下述表2所示的以外,以與實施例1同樣地方式,製作光 間隔物及液晶顯示裝置。就所得之光間隔物及液晶顯示裝 ❹ 置,進行與實施例1同樣的評價。評價結果係表示於下述 表2。 〔實施例14~18〕:塗布法 在實施例1中,除了將聚合性化合物與樹脂的種類變 更爲如下述表2所示的以外,以與實施例1同樣地方式, 製作光間隔物及液晶顯示裝置。 此外,感光性樹脂組成物的配方在實施例14~17係前 述配方1,在實施例18係前述配方2。又,就所得之光間 隔物及液晶顯示裝置,進行與實施例1同樣的評價。評價 -84- 200949445 結果係表示於下述表2。 〔實施例1 9〕:塗布法 在實施例1中,除了將感光性樹脂組成物的配方變更 爲表1中的配方4以外,以與實施例1同樣地方式,製作 光間隔物及液晶顯示裝置。就所得之光間隔物及液晶顯示 裝置,進行與實施例1同樣的評價。評價結果係表示於下 述表2。 〔實施例2 0〕:轉印法 © 在實施例1中,除了藉由將感光性樹脂層用塗布液的 配方取代爲配方1〜配方3、將感光性樹脂層用塗布液的塗 布取代爲進行使用以下所示之間隔物用感光性轉印薄膜的 轉印,來形成感光性樹脂層以外,以與實施例1同樣的方 式,來製作光間隔物及液晶顯示裝置。所得之光間隔物係 圓柱形狀。就所得之光間隔物及液晶顯示裝置,進行與實 施例1同樣的評價。評價結果係表示於下述表2。 &lt;間隔物用感光性轉印薄膜的製作&gt; ® 將由下述配方A所構成之熱可塑性樹脂層用塗布液塗 布於厚度75#m的聚對苯二甲酸乙二酯薄膜暫時支持體 (PET暫時支持體)上,並使其乾燥,以形成乾燥層厚爲 15.0# m的熱可塑性樹脂層。 〜熱可塑性樹脂層用塗布液的配方A~ •甲基丙烯酸甲酯/丙烯酸2-乙基己酯/甲基丙烯酸苄 酯/甲基丙烯酸共聚物 25.0份 ( = 55/11.7/4.5/28.8[莫耳比]、重量平均分子量 90,000) -85- 200949445 58.4 份 •苯乙烯/丙烯酸共聚物 (=63/37[莫耳比】、熏暈平均分子量8,000) •2,2 -雙〔4-(甲基丙嫌醯氧基聚乙氧基)苯基〕丙院 39.0 份 .下述界面活性劑1 10.0份 .甲醇 9 0 · 0份 .1-甲氧基-2-丙醇 51.0份 .甲基乙基酮 700份 ❹Unit: -79-200949445 &lt;Production of Liquid Crystal Display Device&gt; In addition, a glass substrate is prepared as a counter substrate, and a PVA mode is applied to each of the transparent electrode and the counter substrate of the color filter substrate obtained above. The patterning is further provided with an alignment film formed of polyimine. Then, the sealing agent for the ultraviolet curable resin is applied by a dispenser method so as to surround the pixel group surrounding the color filter, and the liquid crystal for PVA mode is dropped and the counter substrate After the bonding, the UV-irradiated substrate is subjected to heat treatment to harden the sealing teeth. On both sides of the thus obtained liquid crystal cell, a polarizing plate HLC2-2518 made of SANRITZ (share) was attached. Next, FR1112H (a substrate type LED made by STONELEY Electric Co., Ltd.) was used as a red (R) LED, and DG 1 1 1 2 H (substrate type LED made by STO NE LEY Electric Co., Ltd.) was used as green (G). LED, DB 1 1 1 2H (base-type LED made by STONELEY Electric Co., Ltd.) is a blue (B) LED to form a backlight of the sidelight type, and the polarizing plate is disposed in the liquid crystal cell set in the ® The back side is formed to form a liquid crystal display device. &lt;Evaluation&gt; The following evaluation was performed on the obtained photo spacer and liquid crystal display device. The results of the measurement evaluation are shown in Table 2 below. (The cross-sectional shape of the photo-spacer) The heat-treated photo spacer obtained in the above-mentioned <Formation of photo spacer> is cut by a plane parallel to the normal direction of the substrate, and observed by a scanning electron microscope. Cut the shape of the section. The observation system was performed on a total of five locations on the peripheral portion of the substrate and the central portion of the substrate, and the cross-sectional shape of the spacer between -80 and 200949445 was evaluated in accordance with the following criteria. ~ Evaluation criteria ~ A; In all five places, a photo spacer having a cross-sectional shape having a taper angle of 45 or more and 90 or less is formed. B; in all of the five places, although a light spacer having a cross-sectional shape having a taper angle of 45° or more and 95° or less is formed, the angle from the taper angle is slightly larger than the above A. It is getting worse. C; a photo spacer having a cross-sectional shape having a taper angle of 40° or more and 100° ❹ or less is formed in all five places, but the point from the taper angle is larger than the above A and B. It is getting worse. D; at 1 to 4 places of 5, a photo spacer having a taper angle not in the range of 40° or more and 100° or less is formed. E; a photo spacer having a taper angle not in the range of 40° or more and 100° or less is formed in all five places. (the height uniformity of the photo spacer) The difference between the maximum 値 and the minimum 算出 is calculated from the result of the height of the photo spacer 1000 Å measured by the formation of the above-mentioned &lt;photo spacers&gt; To evaluate. The high uniformity indicates that the smaller the difference in enthalpy, the more excellent the uniformity. ~ Evaluation Criteria ~ A: The difference between the maximum 値 and the minimum 高度 of the height of the photo spacer is less than 0.2 // m. B: The difference between the maximum 値 and the minimum 高度 of the height of the photo spacer is 0.2#m or more and less than 0.3/zm. C: The difference between the maximum 値 and the minimum 高度 of the height of the photo spacer is -81 - 200949445 〇.3&quot;m or more, lower than 〇.4/zm. D: The difference between the maximum 値 and the minimum 高度 of the height of the photo spacer is 〇.4//m or more and less than 〇.5/zm. E: The difference between the maximum 値 and the minimum 高度 of the height of the photo spacer is 0.5 / zm or more. (Evaluation of heat treatment conditions &gt; Evaluation of heat treatment conditions by the following procedure.) First, in addition to changing the exposure amount to In the same manner as in the above-mentioned &lt;formation of photo spacers&gt;, the operation after the residue treatment and the heat treatment was performed to prepare a sample for evaluation having a spacer pattern. The obtained evaluation sample 'evaluates the cross-sectional shape of the photo spacer and the height uniformity of the photo spacer when the heating treatment is performed without changing the heating temperature and the heating treatment is performed (the heating treatment time is fixed to 60 minutes). The method for evaluating the cross-sectional shape of the photo spacer and the height uniformity of the photo spacer is as described above. ® Based on the evaluation results of the cross-sectional shape of the photo spacer and the height uniformity of the photo spacer, the following criteria are used. Evaluation of the heat treatment conditions. In the following evaluation criteria, the state of "cross-sectional shape excellent in uniformity" is in the above-mentioned light interval. In the evaluation criteria of the cross-sectional shape, the state of A, B, or C is used. In the following reference, the state of "excellent height uniformity" is used in the evaluation criteria of the height uniformity of the photo spacer. Refers to the state of A, B, or C. ~ Evaluation criteria ~ A; without heat treatment, the uniformity and height of the cross-sectional shape are obtained -82- 200949445 Excellent spacer pattern B. Heating temperature is lower than A spacer pattern having excellent uniformity and height uniformity in cross-sectional shape at 80 ° C. C; heating temperature of 80 ° C or more and less than 150 t, and obtaining an interval excellent in uniformity of cross-sectional shape and high uniformity D. The heating temperature is 150 ° C or higher and lower than 20 CTC, and a spacer pattern having excellent cross-sectional shape uniformity and high uniformity is obtained. E; heating temperature is 200 ° C or higher, and a cross-sectional shape is obtained. A spacer pattern having excellent homogeneity and high uniformity. (Deformation recovery rate) The obtained photo spacer was measured by a micro hardness tester (DUH-W20 1 and Shimadzu Corporation) as follows. , The measurement method is carried out by using a round hammer pressure of 5O/zm0, with a maximum load of 50 mN and a holding time of 5 seconds, according to the load-load-removal test method. From this measurement, the deformation recovery rate is obtained according to the following formula [ %], and evaluated according to the following evaluation criteria. The measurement was carried out in an environment of 22 ± 1 ° C and 50% RH. 〇 Deformation recovery rate (%) = (recovery amount after load opening 丨〆 m) / Deformation amount at load [μ m]) X 1 00 ~ Evaluation criterion ~ A: Deformation recovery rate is 90% or more" B: Deformation recovery rate is 87% or more and less than 90% C: Deformation recovery rate is 85% Above, less than 87%. D: The deformation recovery rate is 80% or more and less than 85%. E: The deformation recovery rate is 75% or more and less than 80%. -83- 200949445 F: The deformation recovery rate is less than 75%. (Display unevenness of the liquid crystal display device) The liquid crystal display device produced as described above was visually observed for the gray scale display when the test signal of the gray scale was input, and the presence or absence of the display unevenness was evaluated in accordance with the following evaluation criteria. The evaluation results are shown in Table 2 below. ~ Evaluation Criteria ~ A: No unevenness was displayed, and a very good display image was obtained. B: Although the edge portion of the glass substrate was slightly uneven, it did not affect the display portion and the display image was good. c: A slight unevenness was observed in the display section, but it was within the practical tolerance range. D: Unevenness was observed on the display unit. [Examples 2 to 13]: Coating method In the first embodiment, a photo spacer and a liquid crystal display were produced in the same manner as in Example 1 except that the type of the polymerizable compound was changed to that shown in Table 2 below. Device. The same evaluation as in Example 1 was carried out on the obtained photo spacer and liquid crystal display device. The evaluation results are shown in Table 2 below. [Examples 14 to 18]: The coating method was carried out in the same manner as in Example 1 except that the type of the polymerizable compound and the resin was changed as shown in the following Table 2, and a photo spacer was produced. Liquid crystal display device. Further, the formulation of the photosensitive resin composition was the first formulation of Examples 14 to 17 and the formulation 2 of the above Example 18 was used. Further, the same evaluation as in Example 1 was carried out on the obtained optical spacer and liquid crystal display device. Evaluation -84- 200949445 The results are shown in Table 2 below. [Example 19]: Coating method In the first embodiment, a photo spacer and a liquid crystal display were produced in the same manner as in Example 1 except that the formulation of the photosensitive resin composition was changed to the formulation 4 in Table 1. Device. The same evaluation as in Example 1 was carried out on the obtained photo spacer and liquid crystal display device. The evaluation results are shown in Table 2 below. [Example 20]: Transfer method © In Example 1, the formulation of the coating liquid for a photosensitive resin layer was replaced with the formulation of the coating liquid for the photosensitive resin layer, and the coating liquid for the photosensitive resin layer was replaced with the coating solution. A photo spacer and a liquid crystal display device were produced in the same manner as in Example 1 except that the photosensitive transfer film was transferred by the transfer of the photosensitive transfer film described below. The resulting photo spacer is cylindrical in shape. The same evaluation as in Example 1 was carried out on the obtained photo spacer and liquid crystal display device. The evaluation results are shown in Table 2 below. &lt;Production of Photosensitive Transfer Film for Spacer&gt; ® A coating liquid for a thermoplastic resin layer composed of the following Formula A was applied to a polyethylene terephthalate film temporary support having a thickness of 75 #m ( The PET was temporarily supported on the body and allowed to dry to form a thermoplastic resin layer having a dry layer thickness of 15.0 # m. ~Preparation of coating solution for thermoplastic resin layer A~•Methyl methacrylate/2-ethylhexyl acrylate/benzyl methacrylate/methacrylic acid copolymer 25.0 parts (= 55/11.7/4.5/28.8[ Mo Erbi], weight average molecular weight 90,000) -85- 200949445 58.4 parts • styrene/acrylic acid copolymer (=63/37 [mole ratio], average halo of molecular weight 8,000) • 2,2 - double [4 - (methyl propyl decyloxy polyethoxy) phenyl propyl propylate 39.0 parts. The following surfactant 1 10.0 parts. methanol 9 0 · 0 parts. 1-methoxy-2-propanol 51.0 parts . Methyl ethyl ketone 700 parts ❹

*界面活性劑1 .下述構造物1 3〇% .甲基乙基酮 70% 構造物1* Surfactant 1. The following structure 1 3 % %. Methyl ethyl ketone 70% Structure 1

-(CH2-CH)y — 0=C 0(E0)7H-(CH2-CH)y — 0=C 0(E0)7H

—(CH2-CH)x — o=c A(PO)7H -(CH2_CH)4〇 — o=c OCH2CH2CnF2n+i (n=6, x=55、y=5,—(CH2-CH)x — o=c A(PO)7H -(CH2_CH)4〇 — o=c OCH2CH2CnF2n+i (n=6, x=55, y=5,

Mw = 33940, Mw/Mn=2.55 PO:環氧丙烷、EO:環氧乙烷 接著,將由下述配方B所構成之中間層用塗布液塗布 於所形成之熱可塑性樹脂層上,並使其乾燥,以積層乾燥 層厚爲1.5;zm的中間層。 ~中間層用塗布液的配方B~ .聚乙烯醇 3.22份 (PVA-205(皂化率80%)、可樂麗(股}製) •聚乙烯基吡咯啶酮 1.49份 -86- 200949445 (PVP K-30、ISB.日本股份有限公司製) •甲醇 42.3份 •蒸餾水 5 2 4份 接著,再在所形成之中間層上塗布由前述表1所示之 配方3所構成的感光性樹脂層用塗布液,並使其乾燥,以 積層乾燥層厚爲5.0#m的感光性樹脂層。 如以上進行,構成PET暫時支持體/熱可塑性樹脂層/ 中間層/感光性樹脂層的積層構造(3層的合計層厚; ❹ 21.5μιη)之後,再對感光性樹脂層的表面加熱、加壓貼附 做爲覆蓋薄膜之厚度12/zm的聚丙烯製薄膜,以得到間隔 物用感光性轉印薄膜。 &lt;光間隔物的製作&gt; 剝離所得之間隔物用感光性轉印薄膜的覆蓋薄膜,將 露出之感光性樹脂層的表面重疊至濺鍍形成與實施例1同 樣製作之ITO透明電極而成的彩色濾光片基板之ITO透明 電極上,並使用層合機LamicII型〔日立工業(股)製〕,在 β 線壓100N/cm、130°C的加壓、加熱條件下,以搬送速度 2m/分使其貼合。隨後,將PET暫時支持體在與熱可塑性 樹脂層之界面剝離除去,並使感光性樹脂層與熱可塑性樹 脂層及中間層一同被轉印(被膜形成步驟)。 繼續,使用具有超高壓水銀燈之近接型曝光機(日立高 科技電子工程(股)製),在遮罩(具有畫像圖案之石英曝光遮 罩)、與該遮罩和熱可塑性樹脂層成相對向配置之彩色濾光 片基板爲大略平行垂直豎立之狀態下,使遮罩面與感光性 樹脂層接近中間層之側的表面之間的距離爲l〇〇Am,並 -87- 200949445 透過遮罩從熱可塑性樹脂層側以曝光量90 mJ/cm2來進行 近接曝光(曝光步驟)。 接著,將三乙醇胺系顯像液(含有三乙醇胺3 0%,商品 名:T-PD2(富士軟片(股)製)以純水稀釋成12倍(以T-PD2 爲1份與純水爲11份的比例來混合)之稀釋液)在30°C下 50秒鐘,且以扁平噴嘴壓力0.04MPa進行淋浴顯像,以 去除熱可塑性樹脂層與中間層。繼而,對該玻璃基板的上 面吹拂空氣使其液切之後,藉由淋浴純水且吹拂10秒鐘, 〇 進行純水淋浴洗淨,並吹拂空氣以減少基板上的液體。繼 續,使用碳酸Na系顯像液(0.38莫耳/升的碳酸氫鈉、0.47 莫耳/升的碳酸鈉、5%的二丁基萘磺酸鈉、陰離子界面活 性劑、消泡劑、及安定劑含有;商品名:T-CD1 (富士軟片 (股)製)用純水稀釋成10倍之稀釋液),在29°C下30秒鐘, 以圓錐型噴嘴壓力〇. 15 MPa進行淋浴顯像,以形成圖案影 像(顯像步驟}。 接著,使用以純水稀釋洗淨劑(含有磷酸鹽·矽酸鹽·非 ¥ 離子界面活性劑·消泡劑·安定劑;商品名:T-SD3(富士軟 片(股)製))成1〇倍之稀釋液,在33 °C下20秒鐘、以圓錐 型噴嘴壓力〇.〇2MPa淋浴且吹拂,進行所形成之圖案影像 的周邊殘渣去除,使圓柱狀的間隔物圖案在 300//mx300ym爲1根的間隔物間隔所形成的。 接著,藉由將設置間隔物圖案而成之彩色濾光片基板 在130°C下,進行加熱處理60分鐘(被膜加熱步驟),以在 彩色濾光片基板上製作光間隔物。所得之光間隔物係直徑 爲1 5 . 1 // m、平均高度爲4.7^zm的圓柱形狀* 88- 200949445 而且,使用製作光間隔物之彩色濾光片基板’與實施 例1同樣地,製作PVA模式液晶顯示裝置。 〔比較例1〕 在實施例1中,除了將聚合性化合物變更爲下述的比 較化合物W-1以外,以與實施例1同樣地方式,製作光間 隔物及液晶顯示裝置。就光間隔物及液晶顯示裝置,進行 與實施例1同樣的評價。評價結果係表示於下述表2。 ❹ —CH2-CH2-O-CH3Mw = 33940, Mw / Mn = 2.55 PO: propylene oxide, EO: ethylene oxide. Next, a coating liquid for an intermediate layer composed of the following Formula B is applied onto the formed thermoplastic resin layer, and Dry to a laminate dry layer thickness of 1.5; zm of the intermediate layer. ~ Formulation of coating solution for intermediate layer B~. 3.22 parts of polyvinyl alcohol (PVA-205 (saponification rate 80%), Kuraray (made by the company))) Polyvinylpyrrolidone 1.49 parts -86- 200949445 (PVP K -30, ISB. Japan Co., Ltd.) • 42.3 parts of methanol • 5 2 4 parts of distilled water, and then coating the photosensitive resin layer composed of the formulation 3 shown in Table 1 above on the formed intermediate layer The liquid was dried to form a photosensitive resin layer having a thickness of 5.0 m. The laminated structure of the PET temporary support/thermoplastic resin layer/intermediate layer/photosensitive resin layer was formed as described above (3 layers) After the total thickness of the layer is ❹ 21.5 μm, the surface of the photosensitive resin layer is heated and pressure-applied as a polypropylene film having a thickness of 12/zm covering the film to obtain a photosensitive transfer film for spacers. &lt;Production of photo spacer&gt; The spacer obtained by peeling off the spacer film of the photosensitive transfer film, and superimposing the surface of the exposed photosensitive resin layer on the ITO transparent electrode produced in the same manner as in Example 1 ITO transparent electricity of the color filter substrate In the above, a laminating machine of the type of Lamic II (manufactured by Hitachi Industrial Co., Ltd.) was used, and it was bonded at a conveying speed of 2 m/min under pressure and heating conditions of a pressure of 100 N/cm and 130 °C. The PET temporary support is peeled off at the interface with the thermoplastic resin layer, and the photosensitive resin layer is transferred together with the thermoplastic resin layer and the intermediate layer (film formation step). Continue, using a proximity type having an ultrahigh pressure mercury lamp The exposure machine (Hitachi Hi-Tech Electronic Engineering Co., Ltd.) has a color filter substrate disposed in a mask (a quartz exposure mask having an image pattern) disposed opposite to the mask and the thermoplastic resin layer. In a state of being vertically erected, the distance between the surface of the mask and the surface of the photosensitive resin layer close to the intermediate layer is l〇〇Am, and -87-200949445 is transmitted through the mask from the side of the thermoplastic resin layer with an exposure amount of 90 Next exposure (exposure step) is carried out at mJ/cm2. Next, a triethanolamine-based developing solution (containing 30% of triethanolamine, trade name: T-PD2 (made by Fujifilm)) is diluted 12 times with pure water. (to T-PD2 A dilution of 1 part of the mixture with a ratio of 11 parts of pure water) was carried out at 30 ° C for 50 seconds, and a shower nozzle was applied at a flat nozzle pressure of 0.04 MPa to remove the thermoplastic resin layer and the intermediate layer. After the air is blown on the upper surface of the glass substrate to be liquid-cut, the pure water is showered for 10 seconds, and the pure water shower is washed, and the air is blown to reduce the liquid on the substrate. Imaging solution (0.38 mol/L sodium bicarbonate, 0.47 mol/L sodium carbonate, 5% sodium dibutylnaphthalenesulfonate, anionic surfactant, antifoaming agent, and stabilizer); : T-CD1 (Fuji film (manufactured by Fujifilm)) diluted with pure water to a 10-fold dilution), at 29 ° C for 30 seconds, with a conical nozzle pressure 〇 15 MPa for shower imaging to form a pattern Image (development step}. Next, the detergent is diluted with pure water (containing phosphate, citrate, non-ion ion surfactant, defoamer, stabilizer); trade name: T-SD3 (made by Fujifilm) 〇倍的稀释液, at 33 °C for 20 seconds, with a conical nozzle pressure 〇. 〇 2MPa shower and blowing, the surrounding residue of the formed pattern image is removed, so that the cylindrical spacer pattern is 300// Mx300ym is formed by a spacer interval of one. Then, the color filter substrate having the spacer pattern was patterned and heat-treated at 130 ° C for 60 minutes (film heating step) to form a photo spacer on the color filter substrate. The obtained photo spacer has a cylindrical shape with a diameter of 15.1 μm and an average height of 4.7 μm. * 88- 200949445. Similarly, in the same manner as in the first embodiment, a color filter substrate 'made of a photo spacer is used. A PVA mode liquid crystal display device was fabricated. [Comparative Example 1] An optical spacer and a liquid crystal display device were produced in the same manner as in Example 1 except that the polymerizable compound was changed to the following comparative compound W-1. The same evaluation as in Example 1 was carried out for the photo spacer and the liquid crystal display device. The evaluation results are shown in Table 2 below. ❹—CH2-CH2-O-CH3

比較化合物W—·I 〔比較例2〕 在實施例1中,除了藉由將感光性樹脂組成物的組成 變更爲配方5、將聚合性化合物變更爲DPH A (二季戊四醇 六丙烯酸酯)以外,以與實施例1同樣地方式,製作光間隔 物及液晶顯示裝置。就光間隔物及液晶顯示裝置,進行與 實施例1同樣的評價。評價結果係表示於下述表2。Comparative Example W—·I [Comparative Example 2] In Example 1, except that the composition of the photosensitive resin composition was changed to Formulation 5 and the polymerizable compound was changed to DPH A (dipentaerythritol hexaacrylate), A photo spacer and a liquid crystal display device were produced in the same manner as in the first embodiment. The same evaluation as in Example 1 was carried out for the photo spacer and the liquid crystal display device. The evaluation results are shown in Table 2 below.

-89- 200949445 表2-89- 200949445 Table 2

聚潍化飾 (*1) 樹脂 (*2) 微粒 形成 方法 評價結果 平均 粒徑 [nm] 剖 面 高 度 均 性 加熱 處理 條件 變形 回復 率 顯 示 不 均 實施例1 例示化合物(1) P-53 挑 Μ /«、、 塗布 B B B B A 實施例2 例示化合物⑵ P-53 Jfrrt m Μ 塗布 A A A A A 實施例3 例示化合物(3} P-53 inL m 無 塗布 A A A A A 實施例4 例示化合物(M-1) P-53 無 無 挲布 A A B B A 實施例5 例示化合物(M-3} P-53 /m* 挑 Λττΐ 撕 塗布 A A B A A 實施例6 例示化合物(M-5) P-53 無 無 塗布 A A A A A 實施例7 例示化合物(M-6) P-53 /fm* m Arr m 塗布 A A A A A 實施例8 例示化調M-7) P-53 M Artr m 塗布 A A A A A 實施例Θ 例示化合物(M-8) P-53 無 Arre 無 塗布 A A A A A 實施例10 例示化合物 (M-13) P-53 無 無 塗布 A A A A A 實施例11 例示化合物 (M-14) P-53 IHr v»\\ An* m 塗布 A A A A A 實施例12 例示化合物 (M-15) P-53 無 Jfrrt 無 塗布 A A A A A 實施例13 例示化合物(12) P-53 /nrr m ΑττΤ M 塗布 A A B A A 實施例14 例示化合物(M-7) P-49 無 Jrrf 無 塗布 A A A B A 實施例15 例示化合物(M-8&gt; P-31 杯 /1\、 無 塗布 A A A A A 實施例16 例示化飾 (M-13) P-46 Μ /»&gt;&gt; An* 撕 塗布 A A A A A 實施例17 例示化合物 (M-14) P-47 Ατι* 挑 無 塗布 A A A A A 實施例18 例示化調M-7) 甲基丙烯 酸/甲基 丙烯酸醋 共聚物 Μ Arrf m 塗布 B B B C A 實施例19 例示化合物 (M-6)/DPHA=l /1 P-53 Jnf m M 塗布 A B C c A 實施例20 例示化合物(M-7) P-53 MIBK st 20 轉印 A B A A A 比較例1 W-1 P-53 ΑττΤ 無 無 塗布 C C E E A 比較例2 DPHA P-53 無 inL. 塗布 C C E E A * 1 ^聚合性化合物」之欄的例示化合物係具有構造部分⑴之聚合性化合物。 * 2 :「樹脂」之欄的P-53等的記號係表示先前所述之例示化合物編號。 -90-Polyfluorene (*1) Resin (*2) Particle formation method evaluation result Average particle diameter [nm] Profile height uniform heat treatment condition Deformation recovery rate shows unevenness Example 1 Illustrative compound (1) P-53 Provocation /«,, Coating BBBBA Example 2 Exemplary Compound (2) P-53 Jfrrt m 涂布 Coated AAAAA Example 3 Exemplary Compound (3} P-53 inL m Uncoated AAAAA Example 4 Exemplary Compound (M-1) P-53 Non-woven cloth AABBA Example 5 Exemplary compound (M-3} P-53 /m* Λ Λττΐ Tear-coated AABAA Example 6 Illustrative compound (M-5) P-53 No coating AAAAA Example 7 Illustrative compound (M- 6) P-53 /fm* m Arr m Coating AAAAA Example 8 Illustrative Modification M-7) P-53 M Artr m Coating AAAAA Example 例 Exemplary Compound (M-8) P-53 No Arre No Coating AAAAA Implementation Example 10 Illustrative Compound (M-13) P-53 No-coating AAAAA Example 11 Exemplary Compound (M-14) P-53 IHr v»\\ An* m Coated AAAAA Example 12 Exemplary Compound (M-15) P -53 No Jfrrt uncoated AAAAA Example 13 Exemplary compound (12) P-53 /nrr m ΑττΤ M Coating AABAA Example 14 Illustrative compound (M-7) P-49 No JRrf uncoated AAABA Example 15 Illustrative compound (M-8&gt; P-31 cup/1\, none Coating AAAAA Example 16 Illustrated Cosmetics (M-13) P-46 Μ /»&gt;&gt; An* Tear-coated AAAAA Example 17 Exemplary Compound (M-14) P-47 Ατι* Pick-free AAAAA Example 18 Illustrative Modification M-7) Methacrylic Acid / Methacrylic Acid Acetate Copolymer Μ Arrf m Coating BBBCA Example 19 Exemplary Compound (M-6) / DPHA = 1 / 1 P-53 Jnf m M Coating ABC c A Example 20 exemplified compound (M-7) P-53 MIBK st 20 Transfer ABAAA Comparative Example 1 W-1 P-53 ΑττΤ No coating CCEEA Comparative Example 2 DPHA P-53 No inL. Coating CCEEA * 1 ^Polymerizing compound The exemplified compound in the column is a polymerizable compound having a structural portion (1). * 2 : The symbol of P-53 or the like in the column of "resin" indicates the exemplified compound number described previously. -90-

A 200949445 如前述表2所示,實施例的光間隔物係剖面形狀的均 一性高,且能抑制高度偏移。又,在具備所得光間隔物之 液晶顯示裝置係能抑制顯示不均。 〔實施例2 1〕 &lt;保護膜的形成&gt; ‘ 在實施例8中的彩色濾光片基板的製作中,於黑底、 R像素、G像素、及B像素形成後,再在黑底及各像素上 塗布由前述配方1所構成之感光性樹脂組成物,不透過遮 〇 罩來進行曝光(全面曝光)、加熱處理,以形成保護膜。此 處,塗布、曝光、加熱處理的條件係除了不透過遮罩進行 曝光以外,係與在實施例8之光間隔物的形成中的塗布、 曝光、加熱處理的條件相同。 接著,再在所得之保護層上濺鍍ITO(Indiuin Tin Oxide)的透明電極而形成。 &lt;光間隔物的形成&gt; 在上述所形成之ITO透明電極上,除了使用在比較例 ® 2所使用的感光性樹脂組成物作爲感光性樹脂組成物以 外,藉由與實施例1同樣的方法來形成光間隔物。 &lt;液晶顯示裝置的製作及評價&gt; 接著,使用形成前述光間隔物之彩色濾光片基板,藉 由與實施例1同樣的方法來製作液晶顯示裝置。 就所得之保護膜及液晶顯示裝置,以與實施例1同樣 的方法來進行評價。此外,膜厚均一性的評價係藉由與實 施例1之「光間隔物的高度均一性」的同樣方法來進行。 評價結果係表不於表3。 -91- 200949445 ^ 〔比較例3〕 在實施例21中,除了將聚合性化合物變更爲前述比較 化合物W- 1以外,以與實施例2 1同樣的方式,製作保護 膜、光間隔物、及液晶顯示裝置,並進行同樣的評價。評 價結果係表示於下述表3。 〔實施例2 2〕 &lt;著色圖案的形成&gt; 在實施例8中的彩色濾光片基板的製作中,除了藉由 ® 下述方法形成R像素以外,以與實施例8同樣的方式製作 彩色濾光片基板。 亦即,再在前述配方1中添加顏料紅254(19.4份)及 顏料紅177(4.83份),以調製R像素用感光性樹脂組成物。 除了使用所調製的R像素用感光性樹脂組成物及使用 R像素用光罩作爲光罩以外,藉由與實施例1之光間隔物 的形成同樣的方法,來形成R像素。 在形成所製作彩色濾光片基板的R像素、G像素、及 胃 B像素後,再在各像素上藉由濺鍍以形成ITO (Indium Tin Oxide,氧化銦錫)的透明電極。 &lt;光間隔物的形成&gt; 除了在上述所形成之ITO透明電極上,使用在比較例 2所用之感光性樹脂組成物作爲感光性樹脂組成物以外, 藉由與實施例1同樣的方法,來形成光間隔物。 &lt;液晶顯示裝置的製作及評價&gt; 接著’使用形成前述光間隔物之彩色濾光片基板,藉 由與實施例1同樣的方法來製作液晶顯示裝置。/ -92- 200949445 就所得之保護膜及液晶顯示裝置,依照與實施例1同 樣的方法來進行評價。此外,膜厚均一性的評價係藉由與 實施例1之「光間隔物的高度均一性」同樣的方法來進行。 評價結果係表示於表3。 〔比較例4〕 在實施例22中,除了將聚合性化合物變更爲前述比較 化合物W-1以外,以與實施例22同樣的方式,製作著色 圖案、光間隔物、及液晶顯示裝置,並進行同樣的評價。 β 評價結果係表示於下述表3。 表3A 200949445 As shown in the above Table 2, the photo spacer of the embodiment has high uniformity in cross-sectional shape and can suppress height shift. Further, the liquid crystal display device including the obtained photo spacer can suppress display unevenness. [Embodiment 2 1] &lt;Formation of Protective Film&gt; 'In the production of the color filter substrate of Example 8, after forming a black matrix, R pixels, G pixels, and B pixels, and then on a black matrix A photosensitive resin composition composed of the above-described Formula 1 is applied to each of the pixels, and exposure (overall exposure) and heat treatment are performed without passing through a concealing cover to form a protective film. Here, the conditions of coating, exposure, and heat treatment were the same as those for coating, exposure, and heat treatment in the formation of the photo spacer of Example 8 except that the film was not exposed through the mask. Next, a transparent electrode of ITO (Indiuin Tin Oxide) was sputter-coated on the obtained protective layer. &lt;Formation of photo-spacer&gt; The ITO transparent electrode formed as described above was used in the same manner as in Example 1 except that the photosensitive resin composition used in Comparative Example® 2 was used as the photosensitive resin composition. Method to form a photo spacer. &lt;Production and Evaluation of Liquid Crystal Display Device&gt; Next, a liquid crystal display device was produced by the same method as in Example 1 using a color filter substrate on which the photo spacers were formed. The obtained protective film and liquid crystal display device were evaluated in the same manner as in Example 1. Further, the evaluation of the film thickness uniformity was carried out in the same manner as in "the height uniformity of the photo spacer" of Example 1. The evaluation results are shown in Table 3. -91-200949445 ^ [Comparative Example 3] In the same manner as in Example 21, except that the polymerizable compound was changed to the comparative compound W-1, a protective film, a photo spacer, and The liquid crystal display device was subjected to the same evaluation. The evaluation results are shown in Table 3 below. [Example 2 2] &lt;Formation of coloring pattern&gt; In the production of the color filter substrate of Example 8, the same procedure as in Example 8 was carried out except that the R pixel was formed by the following method. Color filter substrate. In other words, Pigment Red 254 (19.4 parts) and Pigment Red 177 (4.83 parts) were added to the above-mentioned Formulation 1 to prepare a photosensitive resin composition for R pixels. R pixels were formed by the same method as the formation of the photo spacers of Example 1, except that the photosensitive resin composition for R pixels to be prepared and the photomask for R pixels were used as the photomask. After the R pixel, the G pixel, and the stomach B pixel of the color filter substrate to be formed are formed, a transparent electrode of ITO (Indium Tin Oxide) is formed by sputtering on each pixel. &lt;Formation of photo-spacer&gt; The same procedure as in Example 1 was carried out except that the photosensitive resin composition used in Comparative Example 2 was used as the photosensitive resin composition on the ITO transparent electrode formed as described above. To form a photo spacer. &lt;Production and Evaluation of Liquid Crystal Display Device&gt; Next, a liquid crystal display device was produced by the same method as in Example 1 using a color filter substrate on which the photo spacer was formed. / -92- 200949445 The obtained protective film and liquid crystal display device were evaluated in the same manner as in Example 1. Further, the evaluation of the film thickness uniformity was carried out by the same method as the "height uniformity of the photo spacer" of Example 1. The evaluation results are shown in Table 3. [Comparative Example 4] A coloring pattern, a photo spacer, and a liquid crystal display device were produced in the same manner as in Example 22 except that the polymerizable compound was changed to the above-mentioned comparative compound W-1. The same evaluation. The β evaluation results are shown in Table 3 below. table 3

聚合性 化合物 構造物 F價結果 剖面 形狀 膜厚 均一性 加熱處理 條件 顯示 不均 實施例21 例示化合物 (Μ-7) 保護膜 一 A A A 比較例3 (對實施例21} W-1 保護膜 — B E A 實施例22 例示化合物 (Μ-7) 著色圖案 一 — A A 比較例4 (對實施例22) W-1 著色圖案 — — E A 如前述表3所示,在使用本發明的感光性樹脂組成物 形成保護膜及著色圖案之情形中,亦能得到與形成光間隔 物之情形同樣良好的結果。 根據本發明,能提供曝光時的聚合硬化性優異、在低 溫加熱處理或無加熱下能形成圖案構造物、保護膜之感光 性樹脂組成物。 又’根據本發明,能提供具有均一性高的剖面形狀, 且高度均一性優異之光間隔物及其製法。 4 -93- 200949445 又,根據本發明,能提供膜厚均一性優異之保護膜, 或具有均一性高的剖面形狀且膜厚均一性優異之著色圖 案。 又,根據本發明,能提供在使用於顯示裝置之際能抑 制顯示不均之顯示裝置用基板、及能抑制顯示不均之顯示 裝置。 本發明之具體態樣的前述記述係以記述與説明之目的 而提供者。不應企圖將本發明限定於所揭示的、相同的形 0 態中,或不應僅限定於其所包括之範圍者。該態樣係爲了 最適宜地說明本發明的槪念或其實際的應用而選定者,因 此,應該能適用於該業者的其他人所企圖之特定的用途, 可爲各種的態樣與各種的變形方式,而可爲該業者之其他 人理解本發明的。 記述於本說明書之全部的期刊與專利申請、以及技術 標準,特別是在彼等個別的期刊與專利申請、以及技術標 準作爲引用文獻而且個別指定編入之情形中,係將關於與 $ 該引用文獻相同的限定範圍編入本說明書中。上述本發明 的較佳實施態樣的詳細內容,當然可爲該業者根據其企圖 應用之態樣,來自由的變更成各式各樣的應用形態。本發 明的範圍係根據下述專利申請專利範圍及其相等者來決定 者。 【圖式簡單說明】 無。 【主要元件符號說明】 無。 -94-Polymeric compound structure F-price result Cross-sectional shape Film thickness uniformity Heat treatment conditions showed unevenness Example 21 Exemplary compound (Μ-7) Protective film-AAA Comparative Example 3 (for Example 21) W-1 Protective film - BEA Example 22 Exemplary Compound (Μ-7) Colored Pattern 1 - AA Comparative Example 4 (Comparative Example 22) W-1 Colored Pattern - EA As shown in Table 3 above, the photosensitive resin composition of the present invention was used to form In the case of the protective film and the colored pattern, the same results as in the case of forming the photo spacer can be obtained. According to the present invention, it is possible to provide excellent polymer hardenability at the time of exposure, and to form a pattern structure under low-temperature heat treatment or without heating. Further, according to the present invention, it is possible to provide a photo spacer having a high cross-sectional shape with high uniformity and excellent uniformity of height, and a method for producing the same. 4 - 93 - 200949445 Further, according to the present invention A protective film having excellent film thickness uniformity or a colored pattern having a uniform cross-sectional shape and excellent film thickness uniformity can be provided. It is possible to provide a display device substrate capable of suppressing display unevenness when used in a display device, and a display device capable of suppressing display unevenness. The above description of the present invention is provided for the purpose of description and description. The present invention is not intended to be limited to the scope of the invention disclosed, or to be construed as limited to the scope of the invention. The application is selected, and therefore, should be applicable to the specific use of the person attempted by the other person, and can be various forms and various modifications, and the present invention can be understood by others of the industry. All journals and patent applications and technical standards in this specification, especially in the case where their individual journals and patent applications, and technical standards are cited and individually specified, will be the same as the cited documents. The limited scope is incorporated in the present specification. The details of the preferred embodiment of the present invention described above may of course be based on the state of the applicant's application. The scope of the present invention is determined by the following patent application scope and its equivalents. [Simplified description of the drawings] None. [Main component symbol description] None. -94-

Claims (1)

200949445 七、申請專利範圍: I—種感光性樹脂組成物,其係含有樹脂、具有下述構造 部分(I)之聚合性化合物、與光聚合引發劑,200949445 VII. Patent application scope: I—a photosensitive resin composition containing a resin, a polymerizable compound having the following structural part (I), and a photopolymerization initiator, 〔構造部分(1)中’ x係表示氫原子或甲基’*係表示結 0 合鍵〕 2.如申請專利範圍第1項之感光性樹脂組成物,其中前述 聚合性化合物係在分子中具有至少2個的前述構造部分 (I)。 3·如申請專利範圍第1項之感光性樹脂組成物’其中前述 聚合性化合物係具有連結含有前述構造部分(1)的2個基 之對稱構造。 4.如申請專利範圍第1項之感光性樹脂組成物’其中前述 Q 具有構造部分⑴之聚合性化合物係爲下述構造式(π)所 表示之聚合性化合物’[In the structural part (1), the term "x is a hydrogen atom or a methyl group" is a photosensitive resin composition according to the first aspect of the invention, wherein the polymerizable compound has a molecule in the molecule. At least two of the aforementioned structural portions (I). 3. The photosensitive resin composition of the first aspect of the invention, wherein the polymerizable compound has a symmetrical structure in which two groups including the structural portion (1) are bonded. 4. The photosensitive resin composition of the first aspect of the invention, wherein the polymerizable compound having the structural portion (1) is a polymerizable compound represented by the following structural formula (π). (Λ \ 〇 〔式中,R係表示在2價烴基之碳-碳間含有至少1個醚 鍵之連結基,X係表示氫原子、甲基〕。 5.如申請專利範圍第4項之感光性樹脂組成物’其係在前 -95- 200949445 述構造式(Π)中,R係表示- CH2-0-Ra-0-CH2-,Ra係表 示選自於由伸烷基部位、伸芳基部位、及組合此等的部 位所構成群組之連結基。 6. 如申請專利範圍第1項之感光性樹脂組成物,其中前述 樹脂係在側鏈具有分枝及/或脂環構造、酸性基、以及乙 烯性不飽和鍵。 7. 如申請專利範圍第6項之感光性樹脂組成物,其中前述 樹脂的酸價爲20mgKOH/g以上。(Λ, 〇 [wherein R represents a linking group containing at least one ether bond between carbon and carbon of a divalent hydrocarbon group, and X represents a hydrogen atom or a methyl group]. 5. In the fourth aspect of the patent application The photosensitive resin composition' is in the structural formula (Π) of the former -95-200949445, the R system represents -CH2-0-Ra-0-CH2-, and the Ra system is selected from the alkyl group and the aromatic A photosensitive resin composition according to the first aspect of the invention, wherein the resin has a branching and/or alicyclic structure in a side chain, 7. The photosensitive resin composition of the sixth aspect of the invention, wherein the acid value of the resin is 20 mgKOH/g or more. 8_如申請專利範圍第6項之感光性樹脂組成物,其中前述 具有分枝及/或脂環構造之基係下述通式(3)所表示之 基,The photosensitive resin composition of claim 6, wherein the base having a branched and/or alicyclic structure is a group represented by the following formula (3), 〇 •O+X—O^—C—通式(3) 通式(3)中,X係表示2價的有機連結基,可無取代、亦 可具有取代基,5^係表示1或2,11係表示0~15的整數。 9· 一種光間隔物,其係使用如申請專利範圍第i至8項中 任一項之感光性樹脂組成物而形成的。 10, 一種光間隔物之製法,其係至少含有下述步驟(甲)〜(丙): (甲)在基板上形成如申請專利範圍第丨至8項中任—項 之感光性樹脂組成物的被膜之形成步驟; (乙)曝光前述被膜的至少一部份之曝光步驟; (丙)顯像曝光後的前述被膜之顯像步驟。 11. 如申請專利範圍第10項之光間隔物之製法,其中更具 -96- 200949445 有加熱顯像後的前述被膜之加熱步驟’且在加熱時的最 高溫度爲4 0 °C以上,1 4 5 °C以下° 12. —種保護膜,其係使用如申請專利範圍第1至8項中任 —項之感光性樹脂組成物而形成的。 13. —種著色圖案,其係使用如申請專利範圍第1至8項中 任一項之感光性樹脂組成物而形成的。 14. —種顯示裝置用基板’其係具備使用如申請專利範圍第 1至8項中任一項之感光性樹脂組成物而形成的光間隔 ® 物、保護膜、及著色圖案之至少〗者。 15. —種顯示裝置,其係具備如申請專利範圍第I*項之顯 示裝置用基板ό ❹ -97- 200949445 四、指定代表圖: (一) 本案指定代表圖為:無。 (二) 本代表圖之元件符號簡單說明: Μ 〇 jw\ 五、本案若有化學式時,請揭示最能顯示發明特徵的化學式〇•O+X—O————(3) In the formula (3), X represents a divalent organic linking group, which may be unsubstituted or substituted, and 5^ represents 1 or 2 The 11 series represents an integer from 0 to 15. A photo spacer formed by using the photosensitive resin composition according to any one of claims 1 to 8. 10, a method for producing a photo spacer, comprising at least the following steps (A) to (c): (a) forming a photosensitive resin composition on a substrate as in any one of the claims a step of forming a film; (b) exposing at least a portion of the film to an exposure step; (c) a step of developing the film after the imagewise exposure. 11. The method for preparing a photo spacer according to claim 10, wherein the method further comprises -96-200949445 heating step of the film after heating and developing, and the maximum temperature during heating is 40 ° C or more, 1 4 5 ° C or lower. 12. A protective film formed by using a photosensitive resin composition as set forth in any one of claims 1 to 8. A coloring pattern formed by using the photosensitive resin composition according to any one of claims 1 to 8. 14. A substrate for a display device comprising at least one of a light spacer®, a protective film, and a colored pattern formed using the photosensitive resin composition according to any one of claims 1 to 8. . 15. A display device comprising a substrate for a display device as claimed in the scope of claim 1 * 97 -97- 200949445 IV. Designation of representative drawings: (1) The representative representative of the case is: None. (2) A brief description of the symbol of the representative figure: Μ 〇 jw\ 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention. X OHX OH
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