TW200942776A - Angular velocity sensor - Google Patents

Angular velocity sensor

Info

Publication number
TW200942776A
TW200942776A TW97149405A TW97149405A TW200942776A TW 200942776 A TW200942776 A TW 200942776A TW 97149405 A TW97149405 A TW 97149405A TW 97149405 A TW97149405 A TW 97149405A TW 200942776 A TW200942776 A TW 200942776A
Authority
TW
Taiwan
Prior art keywords
detection
drive
portions
mass
substrate
Prior art date
Application number
TW97149405A
Other languages
English (en)
Chinese (zh)
Other versions
TWI379992B (cg-RX-API-DMAC7.html
Inventor
Yoichi Mochida
Masaya Tamura
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of TW200942776A publication Critical patent/TW200942776A/zh
Application granted granted Critical
Publication of TWI379992B publication Critical patent/TWI379992B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
TW97149405A 2007-12-19 2008-12-18 Angular velocity sensor TW200942776A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007327502 2007-12-19
JP2008265489 2008-10-14

Publications (2)

Publication Number Publication Date
TW200942776A true TW200942776A (en) 2009-10-16
TWI379992B TWI379992B (cg-RX-API-DMAC7.html) 2012-12-21

Family

ID=40795402

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97149405A TW200942776A (en) 2007-12-19 2008-12-18 Angular velocity sensor

Country Status (4)

Country Link
JP (1) JP4929489B2 (cg-RX-API-DMAC7.html)
KR (1) KR101149266B1 (cg-RX-API-DMAC7.html)
TW (1) TW200942776A (cg-RX-API-DMAC7.html)
WO (1) WO2009078284A1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102650519A (zh) * 2011-02-25 2012-08-29 索尼公司 角速度传感器

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502008002421D1 (de) * 2008-11-11 2011-03-03 Fraunhofer Ges Forschung Mikromechanischer Coriolis-Drehratensensor
DE102011057081A1 (de) 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors
KR101299731B1 (ko) * 2012-05-29 2013-08-22 삼성전기주식회사 각속도 센서
JP6891932B2 (ja) 2018-10-03 2021-06-18 株式会社村田製作所 ピエゾｚ軸ジャイロスコープ

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
JPH0791958A (ja) * 1993-09-27 1995-04-07 Canon Inc 角速度センサ
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JPH1089968A (ja) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd 角速度センサ
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
JPH10239347A (ja) * 1997-02-28 1998-09-11 Japan Aviation Electron Ind Ltd 運動センサ
JP3999377B2 (ja) * 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JP3399336B2 (ja) * 1997-12-22 2003-04-21 株式会社豊田中央研究所 検出器
JP4348759B2 (ja) * 1998-12-15 2009-10-21 ミツミ電機株式会社 回転振動型ジャイロ
JP4529203B2 (ja) * 1999-08-05 2010-08-25 パナソニック株式会社 角速度センサ
JP3627618B2 (ja) 2000-04-19 2005-03-09 株式会社デンソー 角速度センサ
JP2002296038A (ja) 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
JP3870895B2 (ja) 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
JP2004354109A (ja) * 2003-05-27 2004-12-16 Matsushita Electric Works Ltd 回転振動式角速度センサ
JP2005241500A (ja) 2004-02-27 2005-09-08 Mitsubishi Electric Corp 角速度センサ
JP4353087B2 (ja) * 2004-12-01 2009-10-28 株式会社デンソー 回転振動型角速度センサ
JP2006250850A (ja) * 2005-03-14 2006-09-21 Japan Aviation Electronics Industry Ltd 振動ジャイロ
US7240552B2 (en) * 2005-06-06 2007-07-10 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
EP1832841B1 (en) * 2006-03-10 2015-12-30 STMicroelectronics Srl Microelectromechanical integrated sensor structure with rotary driving motion
WO2009087858A1 (ja) * 2008-01-07 2009-07-16 Murata Manufacturing Co., Ltd. 角速度センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102650519A (zh) * 2011-02-25 2012-08-29 索尼公司 角速度传感器
CN102650519B (zh) * 2011-02-25 2016-06-01 索尼公司 角速度传感器

Also Published As

Publication number Publication date
KR101149266B1 (ko) 2012-07-20
JP4929489B2 (ja) 2012-05-09
TWI379992B (cg-RX-API-DMAC7.html) 2012-12-21
JPWO2009078284A1 (ja) 2011-04-28
KR20100086059A (ko) 2010-07-29
WO2009078284A1 (ja) 2009-06-25

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees