TW200941140A - Radiation sensitive composition for forming colored layer, color filter and color liquid crystal display element - Google Patents
Radiation sensitive composition for forming colored layer, color filter and color liquid crystal display element Download PDFInfo
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- TW200941140A TW200941140A TW098105364A TW98105364A TW200941140A TW 200941140 A TW200941140 A TW 200941140A TW 098105364 A TW098105364 A TW 098105364A TW 98105364 A TW98105364 A TW 98105364A TW 200941140 A TW200941140 A TW 200941140A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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Abstract
Description
200941140 六、發明說明: 【發明所屬之技術領域】 本發明係關於著色層形成用感放射線性組成物、彩色 濾光片和液晶顯示元件,更具體而言’涉及用於形成在用 於透射型或反射型彩色液晶顯示裝置、彩色攝像管元件等 的彩色濾光片中有用的著色層的感放射線性組成物、具備 使用該感放射線性組成物而形成的著色層的彩色濾光片、 以及具備該彩色濾光片的彩色液晶顯示元件。 ❹【先前技術】 作爲使用著色感放射線性組成物形成彩色濾光片的方 法,已知有:在基板上或在預先形成有所需圖案的遮光層 的基板上,形成著色感放射線性組成物的塗膜,經由具有 規定圖案的光罩照射放射線(以下,稱爲“曝光”),再進 行顯影以溶解除去未曝光部分,之後進行後烘,由此得到 各色畫素的方法(例如參照專利文獻1和2)。 _ 而且’近年來希望通過將感放射線性組成物用於監視 器或電視而得到明亮且色彩重現性良好的畫面,在提高背 光亮度的同時,必需提高感放射線性組成物中所含的著色 劑、特別是顏料的含量(非專利文獻1)。並且,有如下傾向: 將液晶監視器畫面或液晶電視畫面進—步高精細化,畫面 上每單位面積的畫素數增加。因此,要求感放射線性組成 物在用於形成黑色矩陣、形成畫素的同時,可以形成更微 細的圖案。 針對上述要求,例如專利文獻3中揭示了:通過在感 200941140 放射線性組成物中含有具特定結構的鹼可溶性樹脂,可以 形成具有髙解析度的圖案。但是,在所謂負型感放射線性 組成物中,由於接近式曝光時的繞射光的影響,所形成的 圖案的線寬較光罩的設計尺寸寬,因此存在著無法得到具 有所需線寬的微細圖案的問題。 另一方面,作爲消除上述負型感放射線性組成物的圖 案線寬變寬的方法’已知有下述方法:例如減少曝光量、 強化顯影條件、減少感放射線性組成物中感放射線性聚合 Ο 引發劑的含量或在感放射線性組成物中含有聚合抑制劑等 方法。但是,採用任一種方法,顯影時仍然有易於產生圖 案的缺損或脫落、底切的傾向,特別是感放射線性組成物 中所含的著色劑含量變高時,上述方法終究還是無法適用。 專利文獻1 :特開平2- 144502號公報 專利文獻2:特開平3-53201號公報 專利文獻3:特開2004-2 05862號公報 φ 非專利文獻1 :村上匡計著“ LCD用面/背光的新進 展”、第1版、(股)東麗硏究中心、2002年9月發行 【發明內容】 發明所要解決的課顆 本發明的目的在於提供著色層形成用感放射線性組成 物,該組成物即使在感放射線性組成物中所含的著色劑含 量高的情況下,與基板的密合性也優異,可以形成具有高 精細且優異的圖案形狀的畫素和黑色矩陣,並且在接近式 -4- 200941140 曝光中圖案線寬也不會變寬。 本發明的目的還在於提供具備由所述著色層形成用感 放射線性組成物形成的著色層的彩色濾光片、以及具備該 彩色濾光片的彩色液晶顯示元件。 解決課顆的方法 鑒於上述實際情況,本發明人等進行深入硏究時發 現:通過在著色層形成用感放射線性組成物中含有具有特 定結構的酚性化合物,可以解決上述課題,從而完成了本 Ο 發明。 即,本發明提供一種著色層形成用感放射線性組成 物,其特徵在於:含有(A)著色劑、(B)鹼可溶性樹脂、(C) 含有2個以上自由基聚合性不飽和鍵的單體、(D)感放射線 性自由基發生劑、以及(E)選自下述式(1)-(5)所表示的化合 物、具有黃烷骨架的酚性化合物、具有螺雙茚滿骨架的酚 性化合物和具有螺雙茚骨架的酚性化合物的至少一種化合 ❿ 物: (〇Η)„BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation-sensitive composition for forming a colored layer, a color filter, and a liquid crystal display element, and more particularly, to a structure for forming a transmission type. a radiation sensitive composition of a coloring layer useful in a color filter such as a reflective color liquid crystal display device or a color image sensor device, a color filter including a coloring layer formed using the radiation sensitive composition, and A color liquid crystal display element having the color filter.先前 [Prior Art] As a method of forming a color filter using a coloring sensitizing radiation composition, it is known that a color ray-forming linear composition is formed on a substrate or a substrate on which a light-shielding layer having a desired pattern is formed in advance The coating film is irradiated with radiation (hereinafter referred to as "exposure") through a mask having a predetermined pattern, and then developed to dissolve and remove the unexposed portion, followed by post-baking to obtain a method of each color pixel (for example, refer to the patent) Documents 1 and 2). _ Moreover, in recent years, it has been desired to obtain a bright and color-reproducible picture by using a radiation-sensitive composition for a monitor or a television, and it is necessary to improve the color of the backlight while improving the color of the radiation-sensitive composition. The content of the agent, particularly the pigment (Non-Patent Document 1). Further, there is a tendency to refine the LCD monitor screen or the LCD TV screen, and the number of pixels per unit area on the screen increases. Therefore, it is required that the radiation sensitive composition can form a finer pattern while forming a black matrix and forming a pixel. In view of the above-mentioned requirements, for example, Patent Document 3 discloses that a pattern having a ruthenium resolution can be formed by including an alkali-soluble resin having a specific structure in the radiation composition of 200941140. However, in the so-called negative-type radiation linear composition, the line width of the formed pattern is wider than the design size of the photomask due to the influence of the diffracted light during the proximity exposure, so that it is impossible to obtain a desired line width. The problem of fine patterns. On the other hand, as a method of eliminating the broadening of the pattern line width of the negative-type radiation-sensitive linear composition described above, there are known methods such as reducing the exposure amount, enhancing the development condition, and reducing the radiation-induced linear polymerization in the radiation-sensitive composition.含量 The content of the initiator or the method of containing a polymerization inhibitor in the radiation sensitive composition. However, according to either method, there is still a tendency to easily cause pattern defects or detachment and undercut during development, and in particular, when the content of the coloring agent contained in the radiation sensitive composition becomes high, the above method is not applicable at all. Patent Document 1: Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. New Developments, First Edition, (Dong) Dongli Research Center, September 2002 [Invention] The object of the present invention is to provide a radiation-sensitive composition for forming a colored layer. Even when the content of the coloring agent contained in the radiation sensitive composition is high, the composition is excellent in adhesion to the substrate, and a pixel and a black matrix having a high-definition and excellent pattern shape can be formed, and are close to each other. Equation -4- 200941140 The line width of the pattern will not widen during exposure. Another object of the present invention is to provide a color filter including a coloring layer formed of the photosensitive layer forming radiation composition, and a color liquid crystal display element including the color filter. In view of the above-mentioned facts, the inventors of the present invention have found that the above problems can be solved by including a phenolic compound having a specific structure in a radiation-sensitive layer-forming radiation sensitive composition, thereby completing the above problem. This invention was invented. In other words, the present invention provides a radiation sensitive composition for forming a colored layer, comprising: (A) a colorant, (B) an alkali-soluble resin, and (C) a single one or more radical polymerizable unsaturated bonds. a body, (D) a radiation radical generating agent, and (E) a compound selected from the group consisting of the following formulas (1) to (5), a phenolic compound having a flavan skeleton, and a spirobiindane skeleton. At least one compound of a phenolic compound and a phenolic compound having a spirobiindole skeleton: (〇Η) „
Ο) [式(1)中,R1表示氫原子、碳原子數爲4以下的烷基、 碳原子數爲4以下的烷氧基、苯基、萘基或-(CHz)x-COOZ 基,存在的多個R1彼此可以相同也可以不同;Z表示烷氧 基烷基、環式醚基、乙烯基氧基烷基或第三烷氧羰基烷基’ 200941140 存在的多個Z彼此可以相同也可以不同;X爲〇-4的整數; Α表示單鍵、-S-基、-0-基、-C0-基、-C00-基、-SO-基、 -S〇2-基、-C(R2)(R3)-基或 (〇H)k 基團(其中,k爲0〜4的整數。)··尺2和r3彼此可以相同也 可以不同,表示氫原子、碳原子數爲6以下的院基、碳原 子數爲6以下的醯基、苯基、萘基或- (CH2)X_C00Z基;m、 η、p和q爲0以上的整數,滿足m + n$5、P + Q刍5、n + q2 1 的關係。]Ο) [In the formula (1), R1 represents a hydrogen atom, an alkyl group having 4 or less carbon atoms, an alkoxy group having 4 or less carbon atoms, a phenyl group, a naphthyl group or a -(CHz)x-COOZ group. The plurality of R1 present may be the same or different from each other; Z represents an alkoxyalkyl group, a cyclic ether group, a vinyloxyalkyl group or a third alkoxycarbonylalkyl group. It may be different; X is an integer of 〇-4; Α represents a single bond, -S-group, -0-yl, -C0-yl, -C00-yl, -SO-yl, -S〇2-yl, -C (R2) (R3)- group or (〇H)k group (wherein k is an integer of 0 to 4.) The ruler 2 and r3 may be the same or different from each other, and represent a hydrogen atom and a carbon number of 6 The following substituents, a fluorenyl group having 6 or less carbon atoms, a phenyl group, a naphthyl group or a -(CH2)X_C00Z group; m, η, p and q are integers of 0 or more, satisfying m + n$5, P + Q刍5, n + q2 1 relationship. ]
[式(2)中,Rl表示與式⑴的Rl相同的基團;R4表示與 式(1)的R2相同的基團;n、p、q、r和δ爲〇以上的整 數,滿足 m + n容 5、P + q$5、r + s$5、n + Q + 的關係。] (°H)n R ‘^ (〇H)q 200941140 [式(3)中,R1表示與式(1)的R1相同的基團;R4表示與 式(1)的R2相同的基團,但2個R4彼此可以相同也可以不 同;A表示與式(1)的A相同的基團;m、n、p、q、r、s、t 和u爲0以上的整數,滿足m + n$5、p + qS5、r + sS5、 t + u ^ 5 ' n + q + s + u2 1 的關係。][In the formula (2), R1 represents the same group as R1 of the formula (1); R4 represents the same group as R2 of the formula (1); n, p, q, r and δ are integers above 〇, satisfying m + n capacity 5, P + q$5, r + s$5, n + Q + relationship. (°H)n R '^ (〇H)q 200941140 [In the formula (3), R1 represents the same group as R1 of the formula (1); and R4 represents the same group as R2 of the formula (1), However, two R4s may be the same or different from each other; A represents the same group as A of the formula (1); m, n, p, q, r, s, t, and u are integers of 0 or more, satisfying m + n The relationship of $5, p + qS5, r + sS5, t + u ^ 5 ' n + q + s + u2 1 . ]
[式(4)中,R1表示與式(1)的R1相同的基團;R2、R3和 R4分別表示與式(1)的R2、R3和式(2)的R4相同的基團;m、 n、p、q、r、s、t和u爲0以上的整數,滿足m + nS5、p + qS5、 ❹ r + sS5、t + uS4、n + q + s + u2 1 的關係。][In the formula (4), R1 represents the same group as R1 of the formula (1); and R2, R3 and R4 represent the same groups as R2 of the formula (1), R3 and R4 of the formula (2); , n, p, q, r, s, t, and u are integers of 0 or more, satisfying the relationship of m + nS5, p + qS5, ❹ r + sS5, t + uS4, n + q + s + u2 1 . ]
[式中,R1、R2和R3表示與式(1)的R1、R2和R3相同的 基團;m、n、p、q、r和s爲0以上的整數,滿足m + n$5、 200941140 p + qS4、r + sS5、n + q + s22的關係;1表示卜5的整數。]。 本發明還提供具有使用所述著色層形成用感放射線性 組成物而形成的著色層的彩色濾光片、以及具備該彩色滤 光片的彩色液晶顯示元件。 發明效果 通過使用本發明的含有(E)成分的感放射線性組成 物,即使在感放射線性組成物中所含的著色劑含量高的情 況下,與基板的密合性也優異,可以形成具有高精細且優 異的圖案形狀的畫素和黑色矩陣,並且在接近式曝光中圖 案線寬也不會變寬。 因此,本發明的彩色濾光片例如在透射型或反射型的 彩色液晶顯示裝置、彩色攝像管元件、彩色感測器等中有 用。 【實施方式】 (著色層形成用感放射線性組成物) 本發明的著色層形成用感放射線性組成物(以下,有時 僅稱爲“感放射線性組成物”)中的“著色層”是指由用 於彩色濾光片的畫素和/或黑色矩陣所形成的層。 以下,對本發明的著色層形成用感放射線性組成物的 構成成分進行說明。 -(A)著色劑- 本發明中的(A)著色劑沒有特別限定,可以是有機顏料 也可以是無機顔料 200941140 有機顏料可以列舉:例如染料索引(C.I. ; The Society of Dyers and Colourists社發行)中分類爲顏料的化合物,本發 明中的(A)著色劑沒有特別限定’可以列舉分類爲有機顏料 的化合物’具體有下述帶有染料索引(C. I.)編號的化合物。 C.I.顏料黃12、C.I.顏料黃13、C.I.顏料黃14、C.I.顏 料黃17、C.I.顏料黃20、C.I.顔料黃24、C.I.顏料黃31、 C.I.顔料黃55、C.I·顏料黃83、C.I·顏料黃93、C.I.顏料黃 109、C.I.顏料黃 110、C.I.顏料黃 138、C.I.顏料黃 139、C.I. 〇 顏料黃150、C.I.顔料黃153、C.I.顔料黃154、C.I.顔料黃 155、C.I.顔料黃 166、C.I.顏料黃 168、C.I.顏料黃 211; C.I.顔料橙5、C.I.顏料橙13、C.I.顏料橙14、C.I.顏料 橙24、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I. 顏料橙40、C.I.顏料橙43、C.I.顏料橙46、C.I.顔料橙49、 C.I.顏料橙61、C.I.顏料橙64、C.I.顏料橙68、C.I.顏料橙 70、C.I.顏料橙71、C.I.顏料橙72、C.I.顏料橙73、C.I.顏 φ 料橙74 ; C.I.顏料紅1、C.I.顔料紅2、C.I.顏料紅5、C.I.顏料紅 17、C.I·顏料紅31、C.I.顔料紅32、C.I.顔料紅41、C.I.顏 料紅122、C_I.顔料紅123、C.I.顏料紅144、C.I.顏料紅149、 C.I·顏料紅166、C.I.顏料紅168、C.I.顏料紅170、C.I.顏料 紅171、C.I.顏料紅175、C.I.顏料紅176、C.I.顏料紅177、 C.I.顔料紅178、C.I.顔料紅179、(:丄顏料紅180、C.I.顏料 紅185、C.I.顏料紅187、C.I.顏料紅202、C.I.顏料紅206、 200941140 " C.I.顏料紅207、C.I.顏料紅209、C.I.顔料紅214、C.I.顏料 紅220、C.I.顏料紅221' C_I·顏料紅224、c.l.顔料紅242、 C.I.顏料紅243、C.I.顏料紅254、C.I.顏料紅255、c.i.顏料 紅262、C.I.顏料紅264、C.I.顏料紅272; C.I·顏料紫1、C.I.顏料紫19、C.I.顏料紫23、C.I.顏料 紫29、C.I·顏料紫32、C.I.顏料紫36、匚丄顏料紫38; C.I·顔料藍15、C_I.顏料藍15: 3、C.I_顏料藍15: 4、 ❹ C_I.顏料藍15 : 6、c.i·顏料藍6〇、c.L顏料藍8〇 ; C.I.顏料綠7、C.I.顔料綠36、CM•顏料綠58 ; C.I.顏料棕23、C.I·顏料棕25 ; C.I.顏料黑1、C.I.顏料黑7。 本發明中’有機顏料可以經再結晶法、再沉澱法、溶 劑洗滌法、昇華法、真空加熱法或上述方法的組合純化後 使用。 另外’上述無機顏料可以列舉:例如氧化鈦、硫酸鋇、 © 碳酸鈣、氧化鋅、硫酸鉛、黃色鉛、鋅黃、氧化鐵紅(紅色 氧化鐵(III))、鎘紅、群青、普魯士藍、氧化鉻綠、姑綠、 棕土、鈦黑、合成鐵黑、炭黑等。 上述著色劑可以根據需要將其粒子表面經聚合物改性 後使用。將顏料的粒子表面改性的聚合物可以列舉:例如 特開平8-259876號公報中記載的聚合物、或市售的各種顏 料分散用聚合物或低聚物等》關於炭黑表面的聚合物包覆 法’公開於例如特開平9-7 1 7 3 3號公報、特開平9_95625號 -10- 200941140 公報、特開平9-124969號公報等中。 上述著色劑可以單獨使用或將兩種以上混合使用。 將本發明的感放射線性組成物用於畫素形成時,由於 畫素要求具有高精細的顯色和耐熱性,所以(A)著色劑較佳 爲顯色性高且耐熱性高的著色劑、特別是耐熱分解性高的 著色劑,具體而言,較佳爲有機著色劑,特佳爲使用有機 顏料。 另一方面,將本發明的感放射線性組成物用於黑色矩 β 陣的形成時,由於黑色矩陣要求具有遮光性,所以(Α)著色 劑較佳爲使用有機顏料或炭黑。 利用本發明的感放射線性組成物,即使在著色劑的含 量在感放射線性組成物的總固體成分中達到30%重量以上 時,也可以形成不會發生缺損和脫落、且線寬也不變寬的 圖案。另外,在本發明中,從確保顯影性的角度考慮,在 感放射線性組成物的總固體成分中,著色劑含量的上限較 φ 佳爲60%重量以下,特佳爲50%重量以下。其中,固體成 分是指下述溶劑以外的成分。 本發明中的著色劑,根據需要可以和分散劑、分散助 劑一同使用。 上述分散劑可以使用例如陽離子系、陰離子系 '非離 子系或兩性分散劑等的適宜分散劑,較佳爲聚合物分散 劑。具體可以列舉:改性丙烯酸系共聚物、丙烯酸系共聚 物、聚胺基甲酸酯、聚酯、高分子共聚物的烷基銨鹽或磷 -11- 200941140 酸酯鹽、陽離子性梳型接枝聚合物等。其中,陽離子性梳 型接枝聚合物是指具有在1分子含有多個鹼性基團(陽離子 性官能團)的主幹聚合物上接枝結合2分子以上枝聚合物的 結構的聚合物,可以列舉:例如幹聚合物部分由聚乙烯亞 胺構成、枝聚合物部分由e-己內酯的開環聚合物構成的聚 合物。上述分散劑中,較佳爲改性丙烯酸系共聚物、聚胺 基甲酸酯、陽離子性梳型接枝聚合物。 上述分散劑可以商業獲取,例如,改性丙烯酸系共聚 〇 物可以列舉:Disperbyk-2000、Disperbyk-2001 (以上由 BYK Chemie (BYK)社製備);聚胺基甲酸酯可以列舉: Disperbyk-161 、 Disperbyk-162 、 Disperbyk-165 、Wherein R1, R2 and R3 represent the same groups as R1, R2 and R3 of the formula (1); m, n, p, q, r and s are integers of 0 or more, satisfying m + n$5, 200941140 The relationship between p + qS4, r + sS5, n + q + s22; 1 represents the integer of Bu 5 . ]. The present invention also provides a color filter having a coloring layer formed using the photosensitive layer forming radiation sensitive composition, and a color liquid crystal display element including the color filter. According to the radiation sensitive composition containing the component (E) of the present invention, even when the content of the coloring agent contained in the radiation sensitive composition is high, the adhesion to the substrate is excellent, and it is possible to form Highly fine and excellent pattern-shaped pixels and black matrix, and the line width of the pattern does not widen in proximity exposure. Therefore, the color filter of the present invention is useful, for example, in a transmissive or reflective type color liquid crystal display device, a color image pickup device element, a color sensor, or the like. [Embodiment] (The luminescent layer for forming a colored layer) The "colored layer" of the luminescent layer forming composition for coloring layer formation (hereinafter, simply referred to as "radius-sensitive composition") is Refers to a layer formed by a pixel and/or a black matrix for a color filter. Hereinafter, the constituent components of the radiation sensitive composition for forming a colored layer of the present invention will be described. - (A) Colorant - The coloring agent (A) in the present invention is not particularly limited, and may be an organic pigment or an inorganic pigment 200941140. The organic pigment may, for example, be a dye index (CI; issued by The Society of Dyers and Colourists) The compound classified as a pigment in the present invention is not particularly limited as the (A) coloring agent in the present invention. The compound classified as an organic pigment can be specifically described as a compound having a dye index (CI) number. CI Pigment Yellow 12, CI Pigment Yellow 13, CI Pigment Yellow 14, CI Pigment Yellow 17, CI Pigment Yellow 20, CI Pigment Yellow 24, CI Pigment Yellow 31, CI Pigment Yellow 55, CI·Pig Yellow 83, CI·Pig Yellow 93, CI Pigment Yellow 109, CI Pigment Yellow 110, CI Pigment Yellow 138, CI Pigment Yellow 139, CI 〇 Pigment Yellow 150, CI Pigment Yellow 153, CI Pigment Yellow 154, CI Pigment Yellow 155, CI Pigment Yellow 166, CI Pigment Yellow 168, CI Pigment Yellow 211; CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI Pigment Orange 61, CI Pigment Orange 64, CI Pigment Orange 68, CI Pigment Orange 70, CI Pigment Orange 71, CI Pigment Orange 72, CI Pigment Orange 73, CI Yan φ Orange 74; CI Pigment Red 1, CI Pigment Red 2, CI Pigment Red 5, CI Pigment Red 17, CI·Pigment Red 31, CI Pigment Red 32, CI Pigment Red 41, CI Pigment Red 122, C_I. Pigment Red 123, CI Pigment Red 144, CI Pigment Red 149, CI·Pigment Red 166, CI Pigment Red 168, CI Pigment Red 170, CI Pigment Red 171, CI Pigment Red 175, CI Pigment Red 176, CI Pigment Red 177, CI Pigment Red 178, CI Pigment Red 179, (: 丄 Pigment Red 180, CI Pigment Red 185, CI Pigment Red 187 , CI Pigment Red 202, CI Pigment Red 206, 200941140 " CI Pigment Red 207, CI Pigment Red 209, CI Pigment Red 214, CI Pigment Red 220, CI Pigment Red 221 'C_I·Pigment Red 224, Cl Pigment Red 242, CI Pigment Red 243, CI Pigment Red 254, CI Pigment Red 255, ci Pigment Red 262, CI Pigment Red 264, CI Pigment Red 272; CI·Pigment Violet 1, CI Pigment Violet 19, CI Pigment Violet 23, CI Pigment Violet 29 , CI·Pigment Violet 32, CI Pigment Violet 36, 匚丄Pigment Violet 38; CI·Pigment Blue 15, C_I. Pigment Blue 15: 3, C.I_Pigment Blue 15: 4, ❹ C_I. Pigment Blue 15 : 6 , ci·Pigment Blue 6〇, cL Pigment Blue 8〇; CI Pigment Green 7, CI Pigment Green 36, CM•Pig Green 58; CI Pigment Brown 23, CI·Pigment Brown 25; CI Pigment Black 1, CI Pigment Black 7 . In the present invention, the 'organic pigments' can be used after being subjected to recrystallization, reprecipitation, solvent washing, sublimation, vacuum heating or a combination of the above methods. Further, 'the above inorganic pigments may, for example, be titanium oxide, barium sulfate, © calcium carbonate, zinc oxide, lead sulfate, yellow lead, zinc yellow, iron oxide red (red iron oxide (III)), cadmium red, ultramarine blue, Prussian blue. , chrome oxide green, green, brown earth, titanium black, synthetic iron black, carbon black and so on. The above coloring agent can be used by modifying the surface of its particles with a polymer as needed. For example, a polymer described in Japanese Laid-Open Patent Publication No. Hei 8-259876, or a commercially available polymer or oligomer for pigment dispersion, or the like, may be used. The coating method is disclosed in, for example, Japanese Laid-Open Patent Publication No. Hei 9-7 No. Hei. No. Hei 9- No. Hei 9-124969. The above colorants may be used singly or in combination of two or more. When the radiation sensitive composition of the present invention is used for pixel formation, since the pixel is required to have high definition color development and heat resistance, the colorant (A) is preferably a color former having high color rendering property and high heat resistance. In particular, a coloring agent having high heat decomposition resistance is preferably an organic coloring agent, and particularly preferably an organic pigment. On the other hand, when the radiation sensitive composition of the present invention is used for the formation of a black moment β array, since the black matrix is required to have light shielding properties, it is preferred to use an organic pigment or carbon black as the coloring agent. According to the radiation sensitive composition of the present invention, even when the content of the colorant reaches 30% by weight or more in the total solid content of the radiation sensitive composition, it is possible to form no defects and fall off, and the line width is not changed. Wide pattern. Further, in the present invention, from the viewpoint of ensuring developability, the upper limit of the content of the colorant in the total solid content of the radiation sensitive composition is preferably 60% by weight or less, more preferably 50% by weight or less. Here, the solid component means a component other than the following solvent. The coloring agent in the present invention can be used together with a dispersing agent or a dispersing aid as needed. As the dispersing agent, for example, a suitable dispersing agent such as a cationic system, an anionic non-ionic surfactant or an amphoteric dispersant can be used, and a polymer dispersant is preferred. Specific examples thereof include a modified acrylic copolymer, an acrylic copolymer, a polyurethane, a polyester, an alkylammonium salt of a polymer copolymer, or a phosphorus-11-200941140 acid ester salt, and a cationic comb type. Branch polymers, etc. Here, the cationic comb-type graft polymer refers to a polymer having a structure in which two molecules of a branched polymer are graft-bonded to one molecule of a main polymer containing a plurality of basic groups (cationic functional groups), and examples thereof include For example, a polymer in which the dry polymer portion is composed of polyethyleneimine and the branched polymer portion is composed of a ring-opening polymer of e-caprolactone. Among the above dispersants, preferred are modified acrylic copolymers, polyurethanes, and cationic comb-type graft polymers. The above dispersing agent is commercially available. For example, modified acrylic copolymers include Disperbyk-2000, Disperbyk-2001 (above prepared by BYK Chemie (BYK); and polyurethanes: Disperbyk-161 , Disperbyk-162, Disperbyk-165,
Disperbyk-167、Disperbyk-170、Disperbyk-182(以上由 BYK Chemie (BYK)社製備)、EFKA4046 (汽巴精化製備)、 Solsperse 76500 (Lubricol (股)社製備);陽離子性梳型接枝 聚合物可以列舉:Solsperse 24000 (Lubricol(股)社製備)、 ❹ AJISPER PB821、A JIS PER P B 8 2 2 (味之素 Fine-Techno 株式 會社製備)等。 上述分散劑可以單獨使用或將兩種以上混合使用。相 對於100重量份(A)著色劑,分散劑的含量通常爲1〇〇重量 份以下、較佳爲0.5-100重量份、更佳爲1-70重量份、特 佳爲10-50重量份。此時,若分散劑的含量超過1〇〇重量 份,則顯影性等有受損之虞。 上述分散助劑可以列舉:例如藍色顏料衍生物、黃色 -12- 200941140 顔料衍生物等,具體可以列舉:例如銅酞菁衍生物等。 —(B)鹼可溶性樹脂一 本發明的感放射線性組成物所含有的(B)鹼可溶性樹 脂,只要對形成著色層時的顯影處理步驟中使用的鹼性顯 影液具有可溶性即可,沒有特別限定,通常是具有羧基、 酚式羥基等酸性官能團的聚合物。其中,較佳爲具有羧基 的聚合物,特佳爲含有選自具有下述式(6)表示的重複單元 的聚合物(以下稱爲“聚合物(B1)”)和具有下述式(7)表示 的重複單元的聚合物(以下稱爲“聚合物(B2)”)的至少一 種。 COOH (6) (式中,R5表示氫原子或甲基。) R7Disperbyk-167, Disperbyk-170, Disperbyk-182 (prepared by BYK Chemie (BYK), EFKA4046 (made by Ciba Specialty Chemicals), Solsperse 76500 (manufactured by Lubricol); cationic comb-type graft polymerization For example, Solsperse 24000 (manufactured by Lubricol Co., Ltd.), ❹AJISPER PB821, A JIS PER PB 8 2 2 (manufactured by Ajinomoto Fine-Techno Co., Ltd.), and the like can be mentioned. The above dispersing agents may be used singly or in combination of two or more. The content of the dispersant is usually 1 part by weight or less, preferably 0.5 to 100 parts by weight, more preferably 1 to 70 parts by weight, particularly preferably 10 to 50 parts by weight, per 100 parts by weight of the (A) coloring agent. . In this case, if the content of the dispersant exceeds 1 part by weight, the developability or the like may be impaired. The dispersing aid may, for example, be a blue pigment derivative or a yellow -12-200941140 pigment derivative, and specific examples thereof include a copper phthalocyanine derivative. —(B) Alkali-soluble resin—The (B) alkali-soluble resin contained in the radiation-sensitive composition of the present invention may be soluble as long as it is soluble in the alkaline developer used in the development treatment step in forming the colored layer. Defined, it is usually a polymer having an acidic functional group such as a carboxyl group or a phenolic hydroxyl group. Among them, a polymer having a carboxyl group is preferable, and a polymer selected from a repeating unit represented by the following formula (6) (hereinafter referred to as "polymer (B1)")) and having the following formula (7) is preferable. At least one of a polymer of a repeating unit (hereinafter referred to as "polymer (B2)")). COOH (6) (wherein R5 represents a hydrogen atom or a methyl group.) R7
(式中,R6、R7和R8分別獨立表示氫原子或碳原子數爲 200941140 1-10的烷基;X表示含有丙烯醯基或甲基丙烯醯基的一價 有機基團、乙烯基或卜甲基乙烯基;Y表示二價有機基團; h表示1-5的整數。) 上述式(7)中,R6較佳爲氫原子或甲基,更佳爲氫原 子。R7和R8較佳爲氫原子。h較佳爲1。 上述式(7)中,X的含有丙烯醯基或甲基丙烯醯基的一 價有機基團較佳爲下述式(X -1)或下述式(X -2)表示的基 團。上述式(7)中的X較佳爲乙烯基或卜甲基乙烯基。 ♦(wherein R6, R7 and R8 each independently represent a hydrogen atom or an alkyl group having a carbon number of 200941140 1-10; and X represents a monovalent organic group containing a propylene fluorenyl group or a methacryl fluorenyl group, a vinyl group or a methyl group; Vinyl; Y represents a divalent organic group; h represents an integer of 1-5.) In the above formula (7), R6 is preferably a hydrogen atom or a methyl group, more preferably a hydrogen atom. R7 and R8 are preferably a hydrogen atom. h is preferably 1. In the above formula (7), the monovalent organic group containing an acrylonitrile group or a methacryl group is preferably a group represented by the following formula (X-1) or the following formula (X-2). X in the above formula (7) is preferably a vinyl group or a vinyl group. ♦
(X -1) (式中,R16表示氫原子或甲基;i表示2-5的整數;j 表示1-10的整數;”表示鍵。) R17 *-Rie—c—ο—C2H4—Ο-C-C " ch2 0 0 (X -2) (式中,r17表示氫原子或甲基;R18表示單鍵、亞甲基、 碳原子數爲2-6的亞烷基、環己烷-1,2-二基或1,2-伸苯基; “ ”表示鍵。) 上述式(7)中的Y較佳爲亞甲基、碳原子數爲2-6的亞 烷基、碳原子數爲2-6的伸烯基(其中,這些亞烷基和伸嫌 基的基團內部可以被氧原子中斷。)、環己烷二基、環己稀 -14- 200941140 二基或碳原子數爲6-12的伸芳基(其中,該伸芳基可以含有 羧基或酸酐基。),更佳爲亞甲基、伸乙基、1,3-伸丙基、 1,2-伸乙烯基、1,2-伸丙烯基、1,3-伸丙烯基、2,3-伸丙烯基、 環己烷-1,2-二基、4-環己烯-1,2-二基、1,2-伸苯基、聯苯 -2,2’-二基或-CH2-0-CH2-表示的二價基團。 本發明的感放射線性組成物所含有的(B)鹼可溶性胃 脂,較佳爲除具有上述碎(6)或上述式(7)表示的重複單元 外,還具有選自下述式(8)表示的重複單元和下述式(9)表示 ❹ 的重複單元的至少一種重複單元的聚合物。(X -1) (wherein R16 represents a hydrogen atom or a methyl group; i represents an integer of 2-5; j represents an integer of 1-10;" represents a bond.) R17 *-Rie-c-ο-C2H4-Ο -CC " ch2 0 0 (X -2) (wherein r17 represents a hydrogen atom or a methyl group; and R18 represents a single bond, a methylene group, an alkylene group having 2 to 6 carbon atoms, or cyclohexane-1 , 2-diyl or 1,2-phenylene; " " represents a bond.) Y in the above formula (7) is preferably a methylene group, an alkylene group having 2 to 6 carbon atoms, and a carbon number. Is an alkenyl group of 2 to 6 (wherein the alkylene group and the deuterated group may be interrupted by an oxygen atom), cyclohexanediyl, cyclohexyl-14-200941140 diyl or the number of carbon atoms is a aryl group of 6 to 12 (wherein the aryl group may have a carboxyl group or an acid anhydride group), more preferably a methylene group, an ethyl group, a 1,3-propyl group, a 1,2-vinyl group, 1,2-extended propenyl, 1,3-extended propenyl, 2,3-extended propenyl, cyclohexane-1,2-diyl, 4-cyclohexene-1,2-diyl, 1, a divalent group represented by 2-phenyl, biphenyl-2,2'-diyl or -CH2-0-CH2-. (B) alkali soluble contained in the radiation sensitive composition of the present invention The lipid preferably has a repeating unit represented by the following formula (8) in addition to the repeating unit represented by the above formula (6) or the above formula (7), and a repeating unit represented by the following formula (9): a polymer of at least one repeating unit.
(8) (式中,R1 2 3表示碳原子數爲1-12的直鏈狀、支鏈狀或 環狀的烷基或碳原子數爲6-12的芳基。)(8) (wherein R1 2 3 represents a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms or an aryl group having 6 to 12 carbon atoms.)
R15 R14 -15- 1 2 (式中,R1()-R15彼此獨立地表示氫原子、鹵原子、羥基、 3 羥甲基或羧基。) 200941140 上述式(8)中,R9的碳原子數爲1-12的直鏈狀、支鏈狀 或環狀的烷基可以列舉:例如甲基、乙基、正丙基、異丙 基、正丁基、異丁基、第二丁基、第三丁基、正戊基、正 己基、正庚基、正辛基、正壬基、正癸基、正十~烷基、 正十二烷基、環戊基、環己基等。 而R9的碳原子數爲6-12的芳基可以列舉:例如苯基、 鄉甲苯基、間甲苯基、對甲苯基、1-萘基、2-萘基等。 上述式(8)中,R9較佳爲環己基、苯基等,特佳爲苯基。 〇 上述式(9)中’ R1()-R15的鹵原子可以列舉:氯原子、溴 原子或碘原子,較佳爲氯原子。 上述式(9)中’ R1()-R15較佳均爲氫原子、或者較佳r·2 爲氯原子、羥基或羥甲基且Rl°和R11以及Rl3-R15均爲氫原 子,更佳R1()-R15均爲氫原子。 聚合物(B1)中’相對於聚合物(B1)的全部重複單元,上 述式(6)表示的重複單元較佳爲卜40%重量,更佳爲5-30% 〇 重量。而聚合物(B 2)中,相對於聚合物(B 2)的全部重複單 元’上述式(7)表示的重複單元較佳爲5-80%重量,更佳爲 10-60%重量。藉由使(B)鹼可溶性樹脂中式(6)或式(7)表示 的重複單元的比例在上述範圍,含有其的感放射線性組成 物的顯影性變得更良好’可以更有效地抑制顯影時殘渣的 產生,因此較佳。 相對於聚合物(B1)或聚合物(B2)的全部重複單元,較佳 爲本發明聚合物(B1)和聚合物(B2)含有5〇%重量以下的範 -16 - 200941140 圍的上述式(8)表示的重複單元,更佳含有5_4〇 %重量。另 外’相對於聚合物(B1)或聚合物(B2)的全部重複單元,較佳 爲聚合物(B1)和聚合*(B2)含有6〇 %重量以下的範圍的上 述式(9)表示的重複單元,更佳含有5_4〇%重量。並且,聚 合物(B1)和聚合物(B2)可以含有上述式(8)表示的重複單元 和上述式(9)表示的重複單元這二者,此時,相對於聚合物 (B1)或聚合物(B2)的全部重複單元,兩者的含有比例的合計 較佳爲80%重量以下’更佳爲10-70%重量。此時,上述式 e — (8)表示的重複單元或上述式(9)表示的重複單元的各自的 含有比例較佳分別爲上述値的範圍內。 通過使聚合物(B1)和聚合物(B 2)中上述式(8)表示的重 複單元和上述式(9)表示的重複單元的含有比例在上述範 圍,可以得到與基板的密合性進一步提高的優點,因此較 佳。 本發明中,(B)鹼可溶性樹脂的經由凝膠滲透色譜法 〇 (GPC,洗提溶劑:四氫呋喃)測定的聚苯乙烯換算重均分子 量(以下,有時稱爲“Mw”)通常較佳爲1,000-45,000,特佳 爲 3,000-20,000 。 另外,本發明中,(B)鹼可溶性樹脂的經由凝膠滲透色 譜法(GPC,洗提溶劑:四氫呋喃)測定的聚苯乙烯換算數均 分子量(以下,有時稱爲“ Μη”)通常較佳爲1,000-45,000, 特佳爲 3,000-20,000。 該情況下,若Mw不足1,000 ’則有所得被膜的殘膜率 -17- 200941140 等下降、或圖案形狀和耐熱性等受損、或電特性惡化之虞; 而若超過45,000,則有解析度降低、或圖案形狀受損、或 利用狹縫噴嘴方式進行塗布時容易產生乾燥異物之虞。 聚合物(B1)例如可以如下製備:將含有(甲基)丙烯酸而 形成的自由基聚合性化合物在適當的溶劑中,在2,2’-偶氮 二異丁腈、2,2’-偶氮雙(2,4-二甲基戊腈)、2,2’-偶氮雙(4-甲氧基-2,4-二甲基戊腈)等自由基聚合引發劑的存在下聚 合。 〇 另外,聚合物(B1)可以如上所述將自由基聚合性化合 物進行自由基聚合,然後經由使用2種以上極性不同的有 機溶劑的再沉澱法進行純化。即,根據需要將聚合後的良 溶劑中的溶液通過過濾或離心等除去不溶性雜質,之後注 入到大量(通常爲聚合物溶液體積的5-10倍量)的沉澱劑(不 良溶劑)中,使聚合物再沉澱來進行純化。此時,殘留在聚 合物溶液中的雜質中,可溶於沉澱劑的雜質殘留在液相 Q 中,從已純化的聚合物(B1)中分離出來。 作爲該再沉澱法所使用的良溶劑/沉澱劑的組合,可以 列舉:例如環己酮/正己烷、丙二醇一乙醚/正己烷、環己酮 /正庚烷、丙二醇一乙醚/正庚烷等。 另外,聚合物(B1)還可如下製備:在上述自由基聚合 引發劑、以及吡唑-1-二硫代羧酸氰基(二甲基)甲酯、吡嗤 -1-二硫代羧酸苄酯、二硫化四乙基秋蘭姆、雙(吡唑_丨-基 硫羰基)二硫化物、雙(3-甲基-吡唑-1-基硫羰基)二硫化物、 -18- 200941140 雙(4-甲基·吡唑-1-基硫羰基)二硫化物、雙(5-甲基-吡唑-1-基硫羰基)二硫化物、雙(3,4,5 -三甲基-吡唑-1-基硫羰基)二 硫化物、雙(吡咯-1_基硫羰基)二硫化物、雙硫代苯甲醯二 硫化物等發揮引發-轉移-終止劑(iniferter)作用的分子量控 制劑的存在下、在惰性溶劑中,反應溫度通常爲〇-1 5(TC、 較佳爲50- 1 20°C,進行活性自由基聚合。 在聚合物(B1)中’作爲較佳與(甲基)丙烯酸共聚的其他 U 自由基聚合性化合物’可以列舉:下述式(8-D表示的化合 物(以下’有時稱爲“化合物(bl)”)、下述式(9_1)表示的化 合物(以下,有時稱爲“化合物(b2)”)、以及除(甲基)丙烯 酸、化合物(bl)和化合物(b2)以外的自由基聚合性化合物 (以下’稱爲‘化合物(b3)”)。另外,在聚合物(B1)中,例 如還可以通過使2-(甲基)丙烯醯氧乙基異氰酸酯等不飽和 異氰酸酯化合物與將(甲基)丙烯酸2-羥乙酯等具有羥基的 自由基聚合性化合物共聚得到的聚合物(B1)反應,從而向 〇 聚合物側鏈中導入聚合性不飽和鍵。R15 R14 -15- 1 2 (wherein R1()-R15 independently represents a hydrogen atom, a halogen atom, a hydroxyl group, a 3-hydroxymethyl group or a carboxyl group.) 200941140 In the above formula (8), the carbon number of R9 is The linear, branched or cyclic alkyl group of 1 to 12 may, for example, be a methyl group, an ethyl group, a n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a second butyl group or a third group. Butyl, n-pentyl, n-hexyl, n-heptyl, n-octyl, n-decyl, n-decyl, n-decyl, n-dodecyl, cyclopentyl, cyclohexyl and the like. Further, examples of the aryl group having 6 to 12 carbon atoms of R9 include a phenyl group, a benzyl group, a m-tolyl group, a p-tolyl group, a 1-naphthyl group, a 2-naphthyl group and the like. In the above formula (8), R9 is preferably a cyclohexyl group, a phenyl group or the like, and particularly preferably a phenyl group.卤 The halogen atom of 'R1()-R15 in the above formula (9) may, for example, be a chlorine atom, a bromine atom or an iodine atom, preferably a chlorine atom. In the above formula (9), 'R1()-R15 is preferably a hydrogen atom, or preferably r·2 is a chlorine atom, a hydroxyl group or a hydroxymethyl group, and R1° and R11 and Rl3-R15 are each a hydrogen atom, more preferably R1()-R15 are each a hydrogen atom. In the polymer (B1), the repeating unit represented by the above formula (6) is preferably 40% by weight, more preferably 5 to 30% by weight based on the total repeating unit of the polymer (B1). In the polymer (B 2 ), the repeating unit represented by the above formula (7) with respect to all repeating units of the polymer (B 2) is preferably from 5 to 80% by weight, more preferably from 10 to 60% by weight. When the proportion of the repeating unit represented by the formula (6) or the formula (7) in the (B) alkali-soluble resin is in the above range, the developability of the radiation-sensitive composition containing the same is improved, and the development can be more effectively suppressed. The generation of residue is preferred. It is preferred that the polymer (B1) and the polymer (B2) of the present invention contain the above formula of the range of 6% to 0.001% by weight based on the total amount of the polymer (B1) or the polymer (B2). The repeating unit represented by (8) preferably contains 5 to 4% by weight. Further, it is preferred that all of the repeating units of the polymer (B1) or the polymer (B2) are represented by the above formula (9) in which the polymer (B1) and the polymerization * (B2) are contained in an amount of 6% by weight or less. The repeating unit preferably contains 5 to 4% by weight. Further, the polymer (B1) and the polymer (B2) may contain both the repeating unit represented by the above formula (8) and the repeating unit represented by the above formula (9), in this case, with respect to the polymer (B1) or polymerization. The total repeating unit of the substance (B2) preferably has a total content ratio of 80% by weight or less, more preferably 10% to 70% by weight. In this case, the respective content ratios of the repeating unit represented by the above formula e (8) or the repeating unit represented by the above formula (9) are preferably within the range of the above enthalpy. When the content ratio of the repeating unit represented by the above formula (8) and the repeating unit represented by the above formula (9) in the polymer (B1) and the polymer (B 2) is in the above range, adhesion to the substrate can be further obtained. The advantage of improvement is therefore better. In the present invention, the polystyrene-equivalent weight average molecular weight (hereinafter, sometimes referred to as "Mw") measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of the (B) alkali-soluble resin is usually preferred. It is 1,000-45,000, and the best is 3,000-20,000. In the present invention, the polystyrene-equivalent number average molecular weight (hereinafter sometimes referred to as "Μη") measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of the (B) alkali-soluble resin is usually compared with The best is 1,000-45,000, and the best is 3,000-20,000. In this case, when the Mw is less than 1,000 Å, the residual film ratio of the obtained film is lowered from -17 to 200941140, or the pattern shape and heat resistance are deteriorated, or the electrical characteristics are deteriorated. If it exceeds 45,000, the resolution is improved. When the coating is reduced, or the shape of the pattern is damaged, or when the coating is performed by the slit nozzle method, drying of foreign matter is likely to occur. The polymer (B1) can be produced, for example, by subjecting a radically polymerizable compound formed with (meth)acrylic acid in a suitable solvent to 2,2'-azobisisobutyronitrile, 2,2'-even. Polymerization in the presence of a radical polymerization initiator such as nitrogen bis(2,4-dimethylvaleronitrile) or 2,2'-azobis(4-methoxy-2,4-dimethylvaleronitrile). Further, the polymer (B1) may be subjected to radical polymerization of the radically polymerizable compound as described above, and then purified by a reprecipitation method using two or more organic solvents having different polarities. That is, the solution in the good solvent after polymerization is removed by filtration, centrifugation or the like as necessary, and then injected into a precipitant (poor solvent) in a large amount (usually 5 to 10 times the volume of the polymer solution). The polymer was reprecipitated for purification. At this time, among the impurities remaining in the polymer solution, impurities soluble in the precipitant remain in the liquid phase Q and are separated from the purified polymer (B1). Examples of the combination of the good solvent/precipitant used in the reprecipitation method include, for example, cyclohexanone/n-hexane, propylene glycol monoethyl ether/n-hexane, cyclohexanone/n-heptane, propylene glycol monoethyl ether/n-heptane, and the like. . Further, the polymer (B1) can also be produced by the above-mentioned radical polymerization initiator, and pyrazol-1-dithiocarboxylate cyano (dimethyl)methyl ester, pyridin-1-dithiocarboxylate. Benzyl acrylate, tetraethyl thiuram disulfide, bis(pyrazole-fluorenylthiocarbonyl) disulfide, bis(3-methyl-pyrazol-1-ylthiocarbonyl) disulfide, -18 - 200941140 Bis(4-methyl-pyrazol-1-ylthiocarbonyl) disulfide, bis(5-methyl-pyrazol-1-ylthiocarbonyl) disulfide, bis(3,4,5- Trimethyl-pyrazol-1-ylthiocarbonyl) disulfide, bis(pyrrole-1-ylthiocarbonyl) disulfide, dithiobenzamide disulfide, etc., function as an initiator-transfer-terminator (iniferter) In the presence of a molecular weight controlling agent in action, in an inert solvent, the reaction temperature is usually 〇-1 5 (TC, preferably 50 to 20 ° C, for living radical polymerization. In the polymer (B1)' The other U radical polymerizable compound which is preferably copolymerized with (meth)acrylic acid is a compound represented by the following formula (8-D (hereinafter sometimes referred to as "compound (bl)")), and the following formula (9_1) indicates a compound (hereinafter sometimes referred to as "compound (b2)"), and a radical polymerizable compound other than (meth)acrylic acid, compound (b1), and compound (b2) (hereinafter referred to as 'compound (b3) Further, in the polymer (B1), for example, an unsaturated isocyanate compound such as 2-(meth)acryloyloxyethyl isocyanate or 2-hydroxyethyl (meth)acrylate may be used. The polymer (B1) obtained by copolymerizing a hydroxyl group-containing radical polymerizable compound is reacted to introduce a polymerizable unsaturated bond into the side chain of the ruthenium polymer.
(式中’ R9與上述式(8)中的R9同義。) -19- 200941140 p10(wherein 'R9 is synonymous with R9 in the above formula (8).) -19- 200941140 p10
Ytt^R15 R ”人?\^kR14 R12 R13 (9-1) (式中,Rie-R15與上述式(9)中的Rl〇_Rl5同義。) 上述化合物(bl)向(B)鹼可溶性樹脂中導入上述式(8) 表示的重複單元。化合物(bl)的具體例子可列舉:例如N- 〇 甲基馬來醯亞胺、N -乙基馬來醯亞胺、N-正丙基馬來醯亞 胺、N -異丙基馬來醯亞胺、N -正丁基馬來醯亞胺、N -第三 丁基馬來醯亞胺、N -正己基馬來醯亞胺、N -環戊基馬來醯 亞胺、N -環己基馬來醯亞胺、N -苯基馬來醯亞胺、N-1-萘 基馬來醯亞胺等。上述化合物(bl)中,較佳爲N-環己基馬 來醯亞胺、N-苯基馬來醯亞胺,特佳爲N-苯基馬來醢亞胺。 在聚合物(B1)中,化合物(bl)可以單獨使用或將兩種以上混 合使用。Ytt^R15 R "人?\^kR14 R12 R13 (9-1) (wherein, Rie-R15 is synonymous with R1〇_Rl5 in the above formula (9).) The above compound (bl) is (B) alkali soluble. A repeating unit represented by the above formula (8) is introduced into the resin. Specific examples of the compound (b1) include, for example, N-fluorenylmethylmaleimide, N-ethylmaleimide, and N-n-propyl group. Maleimide, N-isopropylmaleimide, N-n-butylmaleimide, N-t-butylmaleimide, N-n-hexylmaleimide, N-cyclopentylmaleimide, N-cyclohexylmaleimide, N-phenylmaleimide, N-1-naphthylmaleimide, etc. Among the above compounds (bl) Preferably, it is N-cyclohexylmaleimide, N-phenylmaleimide, particularly preferably N-phenylmaleimide. In the polymer (B1), the compound (bl) can be Used alone or in combination of two or more.
Cl V 上述化合物(b2)向(B)鹼可溶性樹脂中導入上述式(9) 表示的重複單元。化合物(b2>的具體例子可列舉:例如苊 烯、5-氯苊烯、5-羥甲基苊烯、5-羥基苊烯等。上述化合物 (b 2)中,較佳爲苊烯、5-氯苊烯,特佳爲苊烯。在聚合物(B1) 中,不飽和化合物(b 2)可以單獨使用或將兩種以上混合使 用。 上述化合物(b3)可以列舉例如: 丁烯酸、α-氯丙烯酸、肉桂酸等不飽和一元羧酸類; -20- 200941140 馬來酸、馬來酸酐、富馬酸、衣康酸、衣康酸酐、檸 康酸、檸康酸酐、中康酸等不飽和二元羧酸或其酸酐類; 琥珀酸一 [2-(甲基)丙烯醯氧基乙基]酯、鄰苯二甲酸一 [2-(甲基)丙烯醯氧基乙基]酯等二元以上的多元羧酸的一 [(甲基)丙烯醯氧基烷基]酯類; ω-羧基聚己內酯一(甲基)丙烯酸酯等兩側末端具有羧基 和羥基的聚合物的一(甲基)丙烯酸酯類; 鄰乙烯基苯酚、間乙烯基苯酚、對乙烯基苯酚、2-甲 ❹ 基-4-乙烯基苯酚、3-甲基-4-乙烯基苯酚、鄰異丙烯基苯 酚、間異丙烯基苯酚、對異丙烯基苯酚等不飽和苯酚類; 2-乙烯基-1-萘酚、3-乙烯基-1-萘酚' 1-乙烯基-2-萘 酚、3-乙烯基-2-萘酚、2-異丙烯基-1-萘酚、3-異丙烯基-1-萘酚等不飽和萘酚類; 苯乙烯、α-甲基苯乙烯、鄰乙烯基甲苯、間乙烯基甲 苯、對乙烯基甲苯、對氯苯乙烯、鄰甲氧基苯乙烯、間甲 〇 氧基苯乙烯、對甲氧基苯乙烯、鄰乙烯基苄基甲醚、間乙 烯基苄基甲醚、對乙烯基苄基甲醚、鄰乙烯基苄基縮水甘 油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油 醚等芳族乙烯基化合物; 茚、1-甲基茚等茚類; (甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸 正丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸正丁酯、(甲 基)丙烯酸異丁酯、(甲基)丙烯酸第二丁酯、(甲基)丙烯酸 -21- 200941140 第三丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸-2-羥 基乙酯、(甲基)丙烯酸-2-羥基丙酯、(甲基)丙烯酸-3-羥基 丙酯、(甲基)丙烯酸-2-羥基丁酯、(甲基)丙烯酸-3-羥基丁 酯、(甲基)丙烯酸-4-羥基丁酯、(甲基)丙烯酸烯丙酯、(甲 基)丙烯酸苄酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸苯酯、 (甲基)丙烯酸-2-甲氧基乙酯、(甲基)丙烯酸-2-苯氧基乙 酯、(甲基)丙烯酸甲氧基二甘醇酯、(甲基)丙烯酸甲氧基三 甘醇酯、(甲基)丙烯酸甲氧基丙二醇酯、(甲基)丙烯酸甲氧 ❹ 基一縮二丙二醇酯、(甲基)丙烯酸異冰片酯、三環[5.2.1. 〇2’6] 癸-8-基(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基-3·苯氧基丙 酯、一(甲基)丙嫌酸丙三醇酯、(甲基)丙稀酸4-羥基苯酯、 對枯烯基苯酚的環氧乙烷改性(甲基)丙烯酸酯等不飽和羧 酸酯; (甲基)丙烯酸2-胺基乙酯、(甲基)丙烯酸2-二甲基胺 基乙酯、(甲基)丙烯酸2·胺基丙酯、(甲基)丙烯酸2-二甲 @ 基胺基丙酯、(甲基)丙烯酸-3-胺基丙酯、(甲基)丙稀酸3-二甲基胺基丙酯等不飽和羧酸胺基烷基酯類; (甲基)丙烯酸縮水甘油酯等不飽和羧酸縮水甘油酯 類; (甲基)丙烯腈、α -氯丙烯腈 '偏二氰乙烯等氰化乙烯 基化合物; (甲基)丙嫌醯胺、α-氯丙嫌醯胺、Ν-2-涇基乙基(甲基) 丙烯醯胺等不飽和醯胺類; -22- 200941140 乙酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯、苯甲酸乙烯 酯等羧酸乙烯酯類; 乙烯基甲基醚、乙烯基乙基醚、烯丙基縮水甘油醚等 不飽和醚類; 1,3-丁二烯、異戊二烯、氯丁二烯等脂族共軛二烯類; 聚苯乙烯、聚(甲基)丙烯酸甲酯、聚(甲基)丙烯酸正丁 酯、聚矽氧烷等聚合物分子鏈的末端具有一(甲基)丙烯醯 ^ 基的大分子單體類等。 Ο 在聚合物(B1)中,化合物(b3)較佳爲兩元以上的多元羧 酸的一[(甲基)丙烯醯氧基烷基]酯類' 兩側末端具有羧基和 羥基的聚合物的一(甲基)丙烯酸酯類、不飽和苯酚類、芳 族乙烯基化合物、不飽和羧酸酯、聚合物分子鏈的末端具 有一(甲基)丙烯醯基的大分子單體類等,特佳爲琥珀酸一 [2-(甲基)丙烯醯氧基乙基]酯、(〇_羧基聚己內酯一(甲基)丙 烯酸酯、對異丙烯基苯酚、苯乙烯、α -甲基苯乙烯、(甲基) 〇 丙烯酸甲酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸2_乙基己 酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸烯丙酯、(甲 基)丙烯酸苄酯、(甲基)丙烯酸苯酯、丙三醇一(甲基)丙烯 酸酯、(甲基)丙烯酸4-羥基苯酯、對枯烯基苯酚的環氧乙 烷改性(甲基)丙烯酸酯、聚苯乙烯大分子單體、聚甲基丙 烯酸甲酯大分子單體等。 在聚合物(Β1)中,化合物(b 3)可以單獨使用或將兩種以 上混合使用。 -23- 200941140 另外,聚合物(B2)可如下製備:在含有下述式(7-1)表 示的化合物(以下,有時稱爲“化合物(b4)”)而形成的自由 基聚合性化合物的聚合物(以下,有時稱爲“苯乙烯環氧聚 合物”)上加成下述式(7-2)表示的化合物(以下,稱爲“不 飽和一元羧酸(X)”),然後再加成下述式(7-3)表示的化合 物(以下,稱爲“多元酸酐(y)”)。Cl V The above compound (b2) is introduced into the (B) alkali-soluble resin into a repeating unit represented by the above formula (9). Specific examples of the compound (b2) include, for example, terpene, 5-chlorodecene, 5-hydroxymethyldecene, 5-hydroxydecene, etc. Among the above compounds (b 2), preferred are terpenes, 5 - Chlorodecene, particularly preferably terpene. In the polymer (B1), the unsaturated compound (b 2) may be used singly or in combination of two or more. The above compound (b3) may, for example, be a crotonic acid, Unsaturated monocarboxylic acids such as α-chloroacrylic acid and cinnamic acid; -20- 200941140 Maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid, etc. Unsaturated dicarboxylic acid or its anhydride; succinic acid mono [2-(methyl) propylene methoxyethyl] ester, mono [2-(methyl) propylene methoxyethyl] phthalate a [(meth)acryloxyalkylene] ester of a divalent or higher polycarboxylic acid; a polymer having a carboxyl group and a hydroxyl group at both terminal ends, such as ω-carboxypolycaprolactone-(meth)acrylate Mono(meth)acrylates; o-vinylphenol, m-vinylphenol, p-vinylphenol, 2-mercapto-4-vinylphenol, 3-methyl- Unsaturated phenols such as 4-vinylphenol, o-isopropenylphenol, m-isopropenylphenol, p-isopropenylphenol; 2-vinyl-1-naphthol, 3-vinyl-1-naphthol' 1 - unsaturated naphthols such as vinyl-2-naphthol, 3-vinyl-2-naphthol, 2-isopropenyl-1-naphthol, 3-isopropenyl-1-naphthol; styrene, Α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, o-methoxystyrene, m-methoxy styrene, p-methoxy styrene, o Vinylbenzyl methyl ether, m-vinylbenzyl methyl ether, p-vinylbenzyl methyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, etc. Aromatic vinyl compounds; anthracene such as hydrazine or 1-methylhydrazine; methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate , n-butyl (meth)acrylate, isobutyl (meth)acrylate, second butyl (meth)acrylate, (meth)acrylic acid-21- 200941140 tert-butyl ester , 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 3-hydroxypropyl (meth)acrylate, ( 2-hydroxybutyl methacrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, allyl (meth) acrylate, benzyl (meth) acrylate Ester, cyclohexyl (meth)acrylate, phenyl (meth)acrylate, 2-methoxyethyl (meth)acrylate, 2-phenoxyethyl (meth)acrylate, (methyl) ) methoxy diglycol acrylate, methoxy triglycol (meth) acrylate, methoxy propylene glycol (meth) acrylate, methoxy propylene dimethacrylate (meth) acrylate, ( Isobornyl methyl methacrylate, tricyclo[5.2.1. 〇2'6] 癸-8-yl (meth) acrylate, 2-hydroxy-3 phenoxypropyl (meth) acrylate, one (meth)acrylic acid glycerol ester, 4-hydroxyphenyl (meth) acrylate, unsaturated carboxylic acid ester such as ethylene oxide modified (meth) acrylate of cumenyl phenol; ( 2-Aminoethyl methacrylate, 2-dimethylaminoethyl (meth)acrylate, 2-aminopropyl (meth)acrylate, 2-dimethyl@ylamine (meth)acrylate Alkyl propyl esters of propyl acrylate, 3-aminopropyl (meth) acrylate, 3-dimethylaminopropyl (meth) acrylate, etc.; (meth)acrylic acid a glycidyl ester of an unsaturated carboxylic acid such as glycidyl ester; a vinyl cyanide compound such as (meth)acrylonitrile or α-chloroacrylonitrile dimercaptoethylene; (meth) propyl amide, α-chloropropyl Unsaturated guanamines such as decylamine, Ν-2-mercaptoethyl (meth) acrylamide; -22- 200941140 Carboxyl acetate, vinyl propionate, vinyl butyrate, vinyl benzoate, etc. Acidic vinyl esters; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether; aliphatic groups such as 1,3-butadiene, isoprene, chloroprene, etc. a conjugated diene; a polymer molecular chain such as polystyrene, poly(methyl) methacrylate, poly(methyl) methacrylate or polyoxyalkylene has a (meth) acrylonitrile at the end ^ Based on macromonomers and so on. Ο In the polymer (B1), the compound (b3) is preferably a [(meth) propylene oxyalkyl] ester of a polybasic carboxylic acid having two or more conjugated polymers having a carboxyl group and a hydroxyl group at both terminal ends. Mono(meth)acrylates, unsaturated phenols, aromatic vinyl compounds, unsaturated carboxylic acid esters, macromonomers having a (meth)acryloyl group at the end of the polymer molecular chain, Particularly preferred is [2-(methyl)propenyloxyethyl] succinate, (〇-carboxypolycaprolactone-(meth)acrylate, p-isopropenylphenol, styrene, α-A Styrene, (meth) oxime methyl acrylate, n-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, (meth) acrylate Allyl ester, benzyl (meth) acrylate, phenyl (meth) acrylate, glycerol mono (meth) acrylate, 4-hydroxyphenyl (meth) acrylate, epoxy for cumenyl phenol Ethane modified (meth) acrylate, polystyrene macromonomer, polymethyl methacrylate macromonomer, etc. In the polymer (Β1), the compound (b 3) may be used singly or in combination of two or more. -23- 200941140 In addition, the polymer (B2) can be produced as follows: It contains the following formula (7-1) The polymer of the radically polymerizable compound (hereinafter sometimes referred to as "styrene epoxy polymer") formed by the compound (hereinafter sometimes referred to as "compound (b4)")) is added to the following formula. The compound represented by (7-2) (hereinafter referred to as "unsaturated monocarboxylic acid (X)") is added to a compound represented by the following formula (7-3) (hereinafter, referred to as "polybasic acid anhydride (y) )").
(式中’ R6、R7、R8和h分別與上述式(7)中的r6、R7、 R8和h同義。) (7-2)(wherein R6, R7, R8 and h are synonymous with r6, R7, R8 and h in the above formula (7), respectively.) (7-2)
H〇〇c—X (式中,X與上述式(7)中的X同義。)H〇〇c—X (where X is synonymous with X in the above formula (7).)
0 (7-3) (式中’ Y與上述式(7)中的Y同義。) -24- 200941140 化合物(b4)的具體例子可列舉:例如鄰乙烯基苄基縮 水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水 甘油醚、α-甲基·鄰乙烯基苄基縮水甘油醚、α-甲基-間乙 烯基苄基縮水甘油醚、α -甲基-對乙烯基苄基縮水甘油 醚、2,3-二縮水甘油氧基甲基苯乙烯、2,4-二縮水甘油氧基 甲基苯乙烯、2,5-二縮水甘油氧基甲基苯乙烯、2,6-二縮水 甘油氧基甲基苯乙烯、2,3,4-三縮水甘油氧基甲基苯乙烯、 2,3,5-三縮水甘油氧基甲基苯乙烯、2,3,6-三縮水甘油氧基 〇 甲基苯乙烯、3,4,5-三縮水甘油氧基甲基苯乙烯、2,4,6-三 縮水甘油氧基甲基苯乙烯等。上述化合物(b4)中,較佳爲 鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對 乙烯基苄基縮水甘油醚,特佳爲對乙烯基苄基縮水甘油 醚。在聚合物(B 2)中’化合物(b4)可以單獨使用或將兩種以 上混合使用。 苯乙烯環氧聚合物中,較佳爲與化合物(b4)共聚的其 ❹ 他自由基聚合性化合物的例子可列舉:上述化合物(b 1)、 化合物(b2)和化合物(b3)。苯乙烯環氧聚合物中,化合物(bl) 和化合物(b 2)較佳爲與聚合物(B1)中例示的化合物相同的 化合物。另外,苯乙烯環氧聚合物中,化合物(b3)較佳爲 芳族乙烯基化合物、不飽和羧酸酯、聚合物分子鏈的末端 具有一(甲基)丙烯醯基的大分子單體類等,特佳爲苯乙 烯、甲基苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸正 丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸2-羥基乙 -25- 200941140 酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸苄酯、(甲基)丙烯 酸苯酯、丙三醇一(甲基)丙烯酸酯、對枯烯基苯酚的環氧 乙烷改性(甲基)丙烯酸酯、聚苯乙烯大分子單體、聚甲基 丙烯酸甲酯大分子單體等。 苯乙烯環氧聚合物中,化合物(bl)、化合物(b2)和化合 物(b3)各自可以單獨使用或將兩種以上混合使用。 苯乙烯環氧聚合物可以與聚合物(B1)同樣地製備,其 Mw和Μη可以根據所需的(B)鹼可溶性樹脂的Mw和Μη適 0 當設定。 上述不飽和羧酸(X)可以根據上述式(7)中所需的X的 種類適當選擇。較佳的不飽和羧酸(X)可以列舉:例如丙 烯酸、甲基丙烯酸、羧基-聚己內酯一丙烯酸酯、ω-羧 基-聚己內酯一甲基丙烯酸酯、2-丙烯醯氧基乙基琥珀酸、 2-甲基丙烯醯氧基乙基琥珀酸等。上述 ω-羧基-聚己內酯 一丙烯酸酯和ω-羧基-聚己內酯一甲基丙烯酸酯中,聚己 0 內酯的重複單元數較佳爲1-10,更佳爲2-5。上述不飽和羧 酸(X)中,由於丙烯酸或甲基丙烯酸富有反應性,因此更 佳,特佳爲丙烯酸。 不飽和羧酸(X)可以單獨使用或將兩種以上混合使 用。 不飽和一元羧酸(X)在上述苯乙烯環氧聚合物上的加 成反應可以按照公知的方法進行。相對於苯乙烯環氧聚合 物的1當量環氧基,不飽和一元羧酸(X)的使用量較佳爲 -26- 200941140 0.7-1.3當量的範圍’更佳爲〇 9 l 2當量的範圍。 上述多元酸肝(y)可以根據上述式(7)中所需的γ的種 類適虽選擇。較佳的多元酸酐(y)的例子可列舉:例如丙二 酸酐、馬來酸酐、檸康酸酐、琥珀酸酐、戊二酸酐、戊烯 二酸酐、衣康酸酐、二乙醇酸酐(diglycol anhydride)、鄰 本—甲酸酐' 環己烷-丨’八二羧酸酐、4_環己烯_丨,2二羧酸 酐、聯本酸酐等。其中,琥珀酸酐、戊二酸酐鄰苯二甲 φ 酸酐或4_環己烯-1,2·二羧酸酐富有反應性,所以特佳。 多元酸酐(y)在苯乙烯環氧聚合物上的加成反應可以 按照公知的方法進行。相對於苯乙烯環氧聚合物的1當量 環氧基’多元酸酐(y)的加成量較佳爲〇.2_1〇當量的範圍, 更佳爲0.4-0.9當量的範圍。 本發明中’聚合物(B1)和聚合物(B 2)各自可以單獨使用 或將兩種以上混合使用。另外,作爲鹼可溶性樹脂,還可 以將例如(甲基)丙烯酸與上述化合物(b 3)的共聚物和聚合 〇 物(B1)和/或聚合物(B2)—同使用。 本發明中,相對於100重量份(A)著色劑,鹼可溶性樹 脂的含量通常較佳爲10-1,000重量份,特佳爲20-500重量 份。該情況下,若鹼可溶性樹脂的含量不足1 0重量份,例 如有鹼性顯影性降低、或在未曝光部分的基板上或遮光層 上產生殘渣或污垢之虞;而若超過1,000重量份,則由於 著色劑濃度相對下降,所以有難以作爲薄膜達到目標色濃 度之虞。 -27- 200941140 -(C)具有2個以上自由基聚合性不飽和鍵的單體— 本發明中具有2個以上自由基聚合性不飽和鍵的單體 (以下,有時稱爲“多官能性單體”)可列舉例如: 乙二醇、丙二醇等亞烷基二醇的二(甲基)丙烯酸酯類; 聚乙二醇、聚丙二醇等聚亞烷基二醇的二(甲基)丙烯 酸酯類; 甘油、三羥甲基丙烷、季戊四醇、二季戊四醇等三元 以上的多元醇的聚(甲基)丙烯酸酯類或它們的二羧酸改性 〇 物; 聚酯、環氧樹脂、胺基甲酸酯樹脂、醇酸樹脂、矽樹 脂、螺烷樹脂等低聚(甲基)丙烯酸酯類; 兩側末端具有羥基的聚-1,3-丁二烯、兩側末端具有羥 基的聚異戊二烯、兩側末端具有羥基的聚己內酯等兩側末 端具有羥基的聚合物的二(甲基)丙烯酸酯類;或 三[2-(甲基)丙烯醯氧基乙基]磷酸酯;或 Q 異氰尿酸環氧乙烷改性三丙烯酸酯等。 這些多官’能性單體中,較佳爲三元以上的多元醇的聚 (甲基)丙烯酸酯類或它們的二羧酸改性物,具體而言,較 佳爲三羥甲基丙烷三丙烯酸酯、三羥甲基丙烷三甲基丙烯 酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯、 季戊四醇四丙烯酸酯、季戊四醇四甲基丙烯酸酯、二季戊 四醇五丙烯酸酯、二季戊四醇五甲基丙烯酸酯、二季戊四 醇六丙烯酸酯、二季戊四醇六甲基丙烯酸酯、季戊四醇三 -28- 200941140 丙烯酸酯與琥珀酸的單酯化物、季戊四醇三甲基丙烯酸酯 與琥珀酸的單酯化物、二季戊四醇五丙烯酸酯與琥珀酸的 單酯化物、二季戊四醇五甲基丙烯酸酯與琥珀酸的單酯化 物等。從著色層的強度高、著色層的表面平滑性優異、且 在未曝光部分的基板上和遮光層上難以產生污垢、膜殘留 等方面考慮,特佳爲三羥甲基丙烷三丙烯酸酯、季戊四醇 三丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯 酸酯、季戊四醇三丙烯酸酯與琥珀酸的單酯化物、和二季 ❹ 戊四醇五丙烯酸酯與琥珀酸的單酯化物。 上述多官能性單體可以單獨使用或將兩種以上混合使 用。 相對於100重量份(B)鹼可溶性樹脂,本發明的(C)多官 能性單體的含量通常較佳爲5-500重量份,特佳爲20-300 重量份。該情況下,如果多官能性單體的使用量不足5重 量份,則著色層的強度或表面平滑性有下降的傾向;而若 φ 超過500重量份,則例如有鹼性顯影性降低,或者在未曝 光部分的基板上或遮光層上容易產生污垢、膜殘留等的傾 向。 本發明中,還可以將多官能性單體的一部分替換成具 有1個自由基聚合性不飽和鍵的單體(以下,有時稱爲“單 官能性單體”)。 上述單官能性單體可以列舉:例如琥珀酸一 [2_(甲基) 丙烯醯氧基乙基]酯、鄰苯二甲酸一[2-(甲基)丙烯醯氧基乙 -29- 200941140 基]酯等二元以上的多元羧酸的一[(甲基)丙烯醯氧基烷基] 酯類;ω-羧基聚己內酯一(甲基)丙烯酸酯等兩側末端具有 羧基和羥基的聚合物的一(甲基)丙烯酸酯類;Ν-(甲基)丙烯 醯基嗎啉、Ν -乙烯基吡咯烷酮、Ν -乙烯基-ε -己內醯胺; 此外’還有作爲市售品的Μ-5600 (商品名,東亞合成(股) 製備)等。 這些單官能性單體可以單獨使用或將兩種以上混合使 ©用。相對於多官能性單體與單官能性單體的總量,單官能 性單體的含有比例通常爲9 0 %重量以下,較佳爲5 0 %重量 以下。該情況下,若單官能性單體的含有比例超過90%重 量,則所得著色層的強度或表面平滑性有變得不充分之虞。 .-(D)感放射線性自由基發生劑— 本發明中的感放射線性自由基發生劑是指通過可見 光、紫外線、遠紫外線、電子射線、X射線等放射線的曝 光,能引發上述多官能性單體和根據情況使用的單官能性 Q 單體的聚合,從而產生活性自由基的化合物。 上述感放射線性自由基發生劑可以列舉:例如苯乙酮 系化合物、聯咪唑系化合物、三嗪系化合物、〇-醯基肟系 化合物、苯偶姻系化合物、α-二酮系化合物等。 本發明中,感放射線性自由基發生劑可以單獨使用或 將兩種以上混合使用,但作爲本發明中的感放射線性自由 基發生劑,較佳選自苯乙酮系化合物、聯咪唑系化合物、 三嗪系化合物、0-醯基肟系化合物的至少一種》 -30- 200941140 本發明中,相對於100重量份(C)多官能性單體,感放 射線性自由基發生劑的一般含量通常爲0.01-120重量份’ 較佳爲1-100重量份。此時,若感放射線性自由基發生劑 的含量不足0.01重量份’則曝光引起的固化不充分,有難 以得到著色層圖案按規定排列配置的彩色濾光片之虞;而 若超過120重量份,則形成的著色層在顯影時有容易從基 板上脫落的傾向。 在本發明的較佳的感放射線性自由基發生劑中,苯乙 酮系化合物的具體例子可列舉:2-羥基-2-甲基-1-苯基丙-1-酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉代丙-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉代苯基)丁-卜酮、2-(4-甲基苄 基)-2-(二甲基胺基)-1-(4-嗎啉代苯基)丁 -1-酮、1-羥基環己 基·苯基酮' 2,2-二甲氧基-1,2-二苯基乙-1-酮、1,2-辛二酮 等。 這些苯乙酮系化合物中,特佳爲2-甲基-1-[4-(甲硫基) Q 苯基]-2-嗎啉代丙-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉代 苯基)丁 -1-酮、2-(4-甲基苄基)-2·(二甲基胺基)-1-(4-嗎啉代 苯基)丁 -1-酮、1,2-辛二酬等。 上述苯乙酮系化合物可以單獨使用或將兩種以上混合 使用。 在本發明中,相對於1〇〇重量份(c)多官能性單體,使 用苯乙酮系化合物作爲感放射線性自由基發生劑時的含量 通常較佳爲0.01_80重量份,更佳爲1_70重量份,特佳爲 -31 - 200941140 1-60重量份。此時,如果苯乙酮系化合物的含量不足〇 〇1 重量份’則曝光引起的固化不充分,有難以得到著色層圖 案按規定排列配置的彩色濾光片之虞;而若超過80重量 份’則形成的著色層在顯影時有容易從基板上脫落的傾 向。 另外’上述聯咪唑系化合物的具體例子可列舉:2,2,-雙(2-氯苯基)-4,4’,5,5’ -四(4-乙氧基羰基苯基)-1,2、聯咪 唑、2,2’-雙(2-溴苯基)-4,4’,5,5’-四(4-乙氧基羰基苯 〇 基聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’_四苯基-1,2’-聯咪 唑、2,2’-雙(2,4,6-三氯苯基)-4,4’,5,5’-四苯基-1,2’-聯咪 唑、2,2’-雙(2-溴苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙(2,4-二溴苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙 (2,4,6-三溴苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑等。 這些聯咪唑系化合物中,較佳爲 2,2’-雙(2-氯苯 φ 基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙(2,4-二氯苯 基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、2,2’-雙(2,4,6-三氯苯 基)-4,4’,5,5’-四苯基-1,2’-聯咪唑等,特佳爲2,2’-雙(2-氯苯 基)-4,4’,5,5’-四苯基-1,2’-聯咪唑。 這些聯咪唑系化合物在溶劑中的溶解性優異,不產生 未溶解物、析出物等雜質,而且敏感度高,通過低能量的 曝光即可使固化反應充分進行,同時在未曝光部分不產生 固化反應,因此曝光後的塗膜可以明確區分爲不溶於顯影 -32- 200941140 液的固化部分和對顯影液具有高溶解性的未固化部分,由 此,可以形成無底切的著色層圖案按規定排列配置的高精 細彩色濾光片。 上述聯咪唑系化合物可以單獨使用或將兩種以上混合 使用。 . 在本發明中,相對於總計1 0 0重量份的(C)多官能性單 體,使用聯咪唑系化合物作爲感放射線性自由基發生劑時 的含量通常較佳爲0.01-4 0重量份,更佳爲1-30重量份, 特佳爲1-20重量份。此時,如果聯咪唑系化合物的含量不 足0.01重量份,則曝光引起的固化不充分,有難以得到著 色層圖案按規定排列配置的彩色濾光片之虞;而若超過40 重量份,則在顯影時形成的著色層有容易從基板上脫落或 著色層表面的膜有容易變得粗糙的傾向。 本發明中,在使用聯咪唑系化合物作爲感放射線性自 由基發生劑時,結合使用下述給氫體可以進一步改善敏感 〇 度,因此較佳。 這裏所說的“給氫體”是指可以向通過曝光由聯咪唑 系化合物產生的自由基供給氫原子的化合物。 本發明中的給氫體較佳爲下述定義的硫醇系化合物、 胺系化合物等。 上述硫醇系化合物包括以苯環或雜環作爲母核,在 該母核上具有1個以上、較佳爲1-3個、更佳爲1-2個 直接鍵合的锍基的化合物(以下,稱爲“硫醇系給氫 -33- 200941140 . 體”)。 上述胺系化合物包括以苯環或雜環作爲母核,在該母 核上具有1個以上、較佳爲1-3個、更佳爲1-2個直接鍵合 的胺基的化合物(以下,稱爲“胺系給氫體”)。 需要說明的是,這些給氫體還可以同時具有锍基和胺 基。 以下,更具體地對給氫體加以說明。 硫醇系給氫體可以分別具有1個以上苯環或雜環,還 Ο 可以具有苯環和雜環兩者,在具有2個以上這些環時,可 以形成也可以不形成稠環。 另外’硫醇系給氫體具有2個以上毓基時,只要有至 少1個游離巯基殘存,剩餘的1個以上锍基可以被烷基、 芳烷基或芳基取代,且只要有至少1個游離锍基殘存,可 以具有2個硫原子經由亞烷基等二價的有機基團鍵合的結 構單元、或2個硫原子以二硫化物的形式鍵合的結構單元。 φ 並且’硫醇系給氫體中,锍基以外的部位可以被羧基、 烷氧基鑛基、取代烷氧基羰基、苯氧基羰基、取代苯氧基 羰基、腈基等取代。 上述硫醇系給氫體的具體例子可列舉:2-锍基苯並噻 唑、2-锍基苯並噁唑、2-毓基苯並咪唑、2,5-二锍基-1,3,4-噻二唑、2-锍基-2,5-二甲基胺基吡啶等。 這些硫醇系給氫體中,較佳爲2-锍基苯並噻唑、2-瘋 基苯並嚼哩’特佳爲2-锍基苯並噻唑。 -34- 200941140 另外,胺系給氫體可以分別具有1個以上苯環或雜 環,還可以具有苯環和雜環兩者,在具有2個以上這些環 時,可以形成也可以不形成稠環。 另外,胺系給氫體中,1個以上的胺基可以被烷基或 取代烷基取代,而且胺基以外的部位可以被羧基、烷氧基 羰基、取代烷氧基羰基、苯氧基羰基、取代苯氧基羰基、 腈基等取代。 I 上述胺系給氫體的具體例子可列舉:4,4’-雙(二甲基胺 ❹ 基)二苯甲酮、4,4’-雙(二乙基胺基)二苯甲酮、4-二乙基胺 基苯乙酮、4-二甲基胺基苯丙酮、乙基-4-二甲基胺基苯甲 酸酯、4-二甲基胺基苯甲酸、4-二甲基胺基苄腈等。 這些胺系給氫體中,較佳爲4,4’·雙(二甲基胺基)二苯 甲酮、4,4’-雙(二乙基胺基)二苯甲酮,特佳爲4,4’-雙(二乙 基胺基)二苯甲酮。 需要說明的是,胺系給氫體即使在使用聯咪哇系化合 〇 物以外的自由基發生劑時,也具有作爲增感劑的作用。 本發明中,給氫體可以單獨使用或將兩種以上混合使 用,但從形成的著色層在顯影時難以從基板上脫落、而且 著色層強度和敏感度也高的角度考慮,較佳爲將一種以上 硫醇系給氫體和一種以上胺系給氫體組合使用。 硫醇系給氫體與胺系給氫體組合的具體例子可列舉: 2-锍基苯並噻唑/4,4’-雙(二甲基胺基)二苯甲酮、2-巯基苯 並噻唑/4,4、雙(二乙基胺基)二苯甲酮、2-毓基苯並噁唑 -35- 200941140 /4,4’·雙(二甲基胺基)二苯甲酮、2-锍基苯並噁唑/4,4,-雙(二 乙基胺基)二苯甲酮等,更佳的組合爲2-锍基苯並噻唑/4,4,-雙(二乙基胺基)二苯甲酮、2-锍基苯並噁唑/4,4,-雙(二乙基 胺基)二苯甲酮,特佳的組合爲2-锍基苯並噻唑/4,4’-雙(二 乙基胺基)二苯甲酮。 在硫醇系給氫體和胺系給氫體的組合中,硫醇系給氫 體與胺系給氫體的重量比通常爲1:1-1:4,較佳爲1:1-1:3。 本發明中,相對於總計1 〇〇重量份的(C)多官能性單 ❹ 體,將給氫體與聯咪唑系化合物結合使用時的含量較佳爲 0.01-40重量份,更佳爲1-30重量份,特佳爲1·2〇重量份》 此時,如果給氫體的含量不足0.01重量份,則敏感度的改 善效果有降低的傾向;而若超過40重量份,則形成的著色 層在顯影時有容易從基板上脫落的傾向。 又,胺系給氫體在與苯乙酮系化合物等聯咪唑系化合 物以外的感放射線性自由基發生劑結合使用時,可以發揮 φ 增感劑的作用。使用胺系給氫體作爲增感劑時,其含量相 對於100重量份的聯咪唑系化合物以外的感放射線性自由 基發生劑,通常較佳爲300重量份以下,更佳爲200重量 份以下,特佳爲10 0重量份以下,但若其含量太少,則難 以得到充分的效果’所以其含量下限較佳爲2重量份,更 佳爲5重量份。 上述三嗪系化合物的具體例子可列舉:2,4,6-三(三氯 甲基)-s-三嗪、2-甲基-4,6-雙(三氯甲基)-s-三嗪、2-[2-(5- -36- 200941140 甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)_s_三嗪、2_[2_(呋 喃-2-基)乙烯基]-4,6-雙(三氯甲基)_s_三嗪、2-[2_(4-二乙基 胺基-2 -甲基苯基)乙稀基]-4,6 -雙(三氯甲基)-s.三嗪、 2-[2-(3,4-二甲氧基苯基)乙嫌基]-4,6-雙(三氯甲基)-5-三 嗪、2-(4 -甲氧基苯基)-4,6-雙(三氯甲基)_s_三嗪、2-(4 -乙氧 基苯乙烯基)-4,6-雙(三氯甲基)-s_三嗪、2_(4·正丁氧基苯 基)-4,6-雙(三氯甲基)-s-三嗪等具有鹵代甲基的三嗪系化 合物。 © 追些二嗪系化合物中,特佳爲2-[2-(3,4 -二甲氧基苯基) 乙烯基]-4,6-雙(三氯甲基)-s·三嗪。 上述三嗪系化合物可以單獨使用或將兩種以上混合使 用。 本發明中’相對於1 00重量份(C)多官能性單體,使用 三嗪系化合物作爲感放射線性自由基發生劑時的含量較佳 爲0.01-40重量份,更佳爲1-30重量份,特佳爲1-20重量 ❹ 份。此時,如果三嗪系化合物的含量不足0.01重量份,則 曝光引起的固化不充分,有難以得到著色層圖案按規定排 列配置的彩色濾光片之虞;而若超過40重量份,則形成的 著色層在顯影時有容易從基板上脫落的傾向。 上述◦-醯基肟系化合物的具體例子可列舉:1,2-辛二 酮-1-[4·(苯硫基)苯基]-2-(0-苯甲醯基肟)、1-[9-乙基-6-苯 甲醯基- 9H-咔唑-3-基]-壬烷-1,2-壬烷-2-肟-〇-苯甲酸酯、 1-[9-乙基-6-苯甲醯基-9H-咔唑-3-基]-壬烷-1,2-壬烷-2-肟 -37- 200941140 -0-乙酸酯、l-[9-乙基-6-苯甲醯基- 9H-咔唑-3-基]-戊烷-1,2-戊烷-2_肟-0-乙酸酯、1-[9-乙基-6-苯甲醯基-9H-咔唑-3-基]-辛烷-1-酮肟-0 -乙酸酯、1-[9 -乙基-6-(2 -甲基苯甲醯 基)-9H-咔唑-3-基]-乙烷-1-酮肟_〇_苯甲酸酯、i-[9-乙基 -6-(1,3,5-三甲基苯甲醯基)-911-咔唑-3-基]-乙烷-1-酮肟-〇-苯甲酸酯、1-[9-丁基-6-(2-乙基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-0·苯甲酸酯、1-[9 -乙基-6-(2 -甲基苯甲醯 基)-9H-咔唑-3-基]-1-(0-乙醯基)乙酮肟、i-[9-乙基-6-[2-甲 ❹ 基_4-(2,2-二甲基-1,3-二氧雜環戊基)甲氧基苯甲醯基]-911-味哩-3-基]-1-(0-乙酿基)乙嗣目弓等。 這些 〇-醯基肟系化合物中,特佳爲1,2-辛二酮 -1-[4-(苯硫基)苯基]-2-(0-苯甲醯基肟)、1-[9-乙基- 6-(2-甲 基苯甲醯基)-9Η-咔唑-3-基]-1-(〇-乙醯基)乙酮肟、1-[9-乙 基-6-[2-甲基-4-(2,2-二甲基-1,3-二氧雜環戊基)甲氧基苯甲 醯基]-9Η-咔唑-3-基]-1-(0-乙醯基)乙嗣肟等。 ❹ 上述0-醯基肟系化合物可以單獨使用或將兩種以上混 合使用。 本發明中,相對於100重量份的(C)多官能性單體, 使用0-醯基肟系化合物作爲感放射線性自由基發生劑時 的含量較佳爲0.01-80重量份,更佳爲1-60重量份,特佳 爲1-50重量份。此時,若0-醯基肟系化合物的含量不足 0.01重量份,則曝光引起的固化不充分,有難以得到著色 層圖案按規定排列配置的彩色濾光片之虞;而若超過80重 -38- 200941140 量份,則形成的著色層在顯影時有容易從基板上脫落的傾 向。 —(E)成分— 本發明中的(E)成分是選自上述式(1)-(5)表示的化合 物、具有黃烷骨架的酚性化合物、具有螺雙茚滿骨架的酚 性化合物和具有螺雙茚骨架的酚性化合物的至少一種化合 物。通過含有該成分,顯影時圖案不會發生缺損或脫落、 I 底切’在接近式曝光中可以抑制圖案線寬較光罩的設計尺 ❹ 寸寬。 上述式(1)表示的化合物中,式中的基 A較佳爲-CO-基、亞甲基或亞異丙基。另外,Ri較佳爲氫原子或碳原子 數爲4以下的烷基或烷氧基。 作爲上述式(1)表示的化合物的具體例子,例如: (多經基)二苯甲酮類的例子可列舉:2,3,4·三羥基二苯 甲酮、2,4,6-三羥基二苯甲酮、2,2,,4,4,-四羥基二苯甲酮、 〇 2,3,4,3’·四羥基二苯甲酮、2,3,4,4’.-四羥基二苯甲酮、 2,3,4,2’-四羥基_4,_甲基二苯甲酮、2,3,4,4’_四羥基-3’_甲氧 基二苯甲酮、2,3,4,2,,6’_ 五羥基二苯甲酮、2,4,6,3’,4’,5’_ 六經基二苯甲酮、3,4,5,3’,4,,5’_六羥基二苯甲酮等; ^ 基苯基)鏈烷烴類的例子可列舉:雙(對羥基苯基) 甲烷等; 雙(多經基苯基)鏈烷烴類的例子可列舉:雙(2,4_二羥 基苯基)甲院、雙(2,3,-4-三羥基苯基)甲烷、2,2_雙(2,3,4_三 -39- 200941140 羥基苯基)丙烷等。 上述式(2)表示的化合物中’式中的Rl較佳爲氨原子或 碳原子數爲4以下的院基’式中的R4較佳爲氫原子或碳原 子數爲6以下的烷,基。 上述式(2)表示的化合物的具體例子可列舉例如: 三(對羥基苯基)甲烷、丨,1,卜三(對羥基苯基)乙烷、雙 (2,5-二甲基-4-羥基苯基)-2-羥基苯基甲烷、2-[雙{(5-異丙 基-4-羥基-2-甲基)苯基}甲基]苯酚等。 上述式(3)表示的化合物中’式中的基A較佳亞甲基。 式中的R1較佳爲氫原子或碳原子數爲4以下的烷基;R4較 佳爲氫原子或碳原子數爲6以下的烷基。 上述式(3)表示的化合物的具體例子可列舉例如: 1,1,3-三(2,5-二甲基-4-羥基苯基)-3-苯基丙烷等。 上述式(4)表示的化合物中,式中的R1較佳爲氫原子, R2、R3、R4較佳爲氫原子或碳原子數爲6以下的烷基。 $ 上述式(4)表示的化合物的具體例子可列舉例如: 4,4’-[1-[4-[1-[4-羥基苯基]-1-甲基乙基]苯基]亞乙基] 雙酚等。 上述式(5)表示的化合物中,式中的R1較佳爲氫原子, R2、R3、R4較佳爲氫原子或碳原子數爲6以下的烷基。 上述式(5)表示的化合物的具體例子可列舉例如: 4,6-雙{1_(4_羥基苯基)_1_甲基乙基}_13_二羥基苯、 卜[1-(3-(1-(4-羥基苯基)甲基乙基卜4,6-二羥基苯基)-1- -40- 200941140 甲基乙基]-3·(1-(3-{1-(4-羥基苯基)-卜甲基乙基}-4,6-二羥 基苯基)-1-甲基乙基)苯等。 上述具有黃烷骨架的酚性化合物的具體例子可列舉例 如: 2 -甲基- 2-(2,4-二羥基苯基)-4-(4-羥基苯基)-7-羥基色 滿、2,4,4-三甲基-7,2’,4’-三羥基黃烷等。 上述具有螺雙茚滿骨架的酚性化合物的具體例子可列 舉例如:3,3,3’,3’-四甲基-1,1’-螺雙茚滿-5,6,7,5’,6’,7’-己醇 ❹ 等。 上述具有螺雙茚骨架的酚性化合物的具體例子可列舉 例如:3,3’-二甲基-1,1’-螺雙茚-5,6,7,5’,6’,7’-己醇等。 這些化合物中,較佳爲(多羥基)二苯甲酮類、上述式(4) 表示的化合物、具有黃烷骨架的酚性化合物所表示的化合 物;特佳爲2,3,4-三羥基二苯甲酮、2,3,4,4’-四羥基二苯甲 酮、2,3,4,2’,6’-五羥基二苯甲酮、4,4’-[1-[4-[1-[4-羥基苯 Q 基]-1-甲基乙基]苯基]亞乙基]雙酚、2-甲基-2-(2, 4-二羥基 苯基)-4-(4-羥基苯基)-7-羥基色滿》 本發明中,相對於1〇〇重量份的(B)鹼可溶性樹脂,(E) 成分的含量較佳爲0.1-10重量份,更佳爲1-5重量份,特 佳爲1-3重量份。此時,若(E)成分的含量不足〇.1重量份, 則有無法得到所需效果之虞。而若超過i 〇重量份,則形成 的圖案在顯影時有容易從基板上脫落的傾向。 —添加劑~ -41- 200941140 本發明的感放射線性組成物含有上述(A)-(E)成分,但 根據需要還可以進一步含有其他添加劑。 上述其他添加劑可以例舉:例如玻璃、氧化鋁等塡充 劑;聚乙烯醇、聚(氟烷基丙烯酸酯)等高分子化合物;非 離子系界面活性劑、陽離子系界面活性劑、陰離子系界面 活性劑等界面活性劑;乙烯基三甲氧基矽烷、乙烯基三乙 氧基矽烷、乙烯基三(2-甲氧基乙氧基)矽烷、N-(2-胺基乙 基)-3-胺基丙基甲基二甲氧基矽烷、N-(2-胺基乙基)-3-胺基 ❹ 丙基三甲氧基矽烷、3 -胺基丙基三乙氧基矽烷、3-縮水甘 油氧丙基三甲氧基矽烷、3-縮水甘油氧丙基甲基二甲氧基 矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-氯丙基甲 基二甲氧基矽烷、3-氯丙基三甲氧基矽烷、3-甲基丙烯醯 氧基丙基三甲氧基矽烷、3 -锍基丙基三甲氧基矽烷等密合 促進劑;2,2’-硫代雙(4-甲基-6-第三丁基苯酚)、2,6-二第三 丁基苯酚等抗氧化劑;2-(3-第三丁基-5·甲基-2-羥基苯 〇 基)-5-氯苯並三唑、烷氧基二苯甲酮類等紫外線吸收劑;聚 丙烯酸鈉等抗凝聚劑;丙二酸、己二酸、衣康酸、檸康酸、 富馬酸、中康酸等鹼溶解性改善劑等。 溶劑 本發明的著色層形成用感放射線性組成物以上述 (Α)·(Ε)成分作爲必需成分,根據需要含有上述添加劑成 分,但通常與溶劑配混製成液狀組成物。 上述溶劑只要分散或溶解構成感放射線性組成物的 -42- 200941140 (A)-(E)成分或添加劑成分、且不與這些成分反應、具有適 度的揮發性即可,可以適當選擇使用。 上述溶劑可以例舉例如: 乙二醇一甲醚、乙二醇一乙醚、乙二醇一正丙醚、乙 二醇一正丁醚、二甘醇一甲醚、二甘醇一乙醚、二甘醇一 正丙醚、二甘醇一正丁醚、三甘醇一甲醚、三甘醇一乙醚、 丙二醇一甲醚、丙二醇一乙醚、丙二醇一正丙醚、丙二醇 一正丁醚、一縮二丙二醇一甲醚、一縮二丙二醇一乙醚、 〇 一縮二丙二醇一正丙醚、一縮二丙二醇一正丁醚、二縮三 丙二醇一甲醚、二縮三丙二醇一乙醚等(聚)亞烷基二醇一 烷基醚類.; 乙二醇一甲醚乙酸酯、乙二醇一乙醚乙酸酯、二甘醇 —甲醚乙酸酯、二甘醇一乙醚乙酸酯、丙二醇一甲醚乙酸 酯、丙二醇一乙醚乙酸酯、3-甲氧基丁基乙酸酯等(聚)亞烷 基二醇一烷基醚乙酸酯類; 〇 二甘醇二甲醚、二甘醇甲基乙基醚、二甘醇二乙醚、 四氫呋喃等其他醚類; 丁酮、環己酮、2-庚酮、3-庚酮等酮類; 乳酸甲酯、乳酸乙酯等乳酸烷基酯類; 2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧 基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙 氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、 3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸 -43- 200941140 酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、 乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁 酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸 甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯乙酸甲酯、乙醯 乙酸乙酯、2-氧代丁酸乙酯等其他酯類; 甲苯、二甲苯等芳族烴類: N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯 烷酮等醯胺或內醯胺類等。 〇 這些溶劑中,從溶解性、顏料分散性、塗布性等角度 考慮’較佳爲丙二醇一甲醚、乙二醇一甲醚乙酸酯、丙二 醇一甲醚乙酸酯、丙二醇一乙醚乙酸酯、3 -甲氧基丁基乙 酸酯、二甘醇二甲醚、二甘醇甲基乙基醚、環己酮、2_庚 酮、3 -庚酮、乳酸乙酯、3 -甲氧基丙酸乙酯、3 -乙氧基丙酸 甲酯、3-乙氧基丙酸乙酯、3-甲基-3-甲氧基丁基丙酸酯、 乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙 〇 酸正丁酯、丁酸乙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸 乙酯等。 上述溶劑可以單獨使用或將兩種以上混合使用。 上述溶劑還可以與苄基乙醚、二-正己基醚、丙酮基丙 酮、異佛爾酮、己酸、辛酸、1-辛醇、丨_壬醇、苄醇、乙 酸节醋、苯甲酸乙酯、草酸二乙酯、馬來酸二乙酯、γ_ 丁 內酯、碳酸乙烯酯、碳酸丙烯酯、乙二醇一苯基醚乙酸酯 等高沸點溶劑結合使用。 -44- 200941140 上述高沸點溶劑可以單獨使用或將兩種以上混合使 用。 對溶劑的含量沒有特別限定,從所得感放射線性組成 物的塗布性、穩定性等角度考慮,該組成物除去溶劑後各 成分的總濃度通常爲5-50%重量’特佳爲10-40%重量的量。 彩色濾光片 本發明的彩色濾光片具備由本發明的著色層形成用感 放射線性組成物形成的著色層。 〇 以下,對本發明的彩色濾光片的形成方法進行說明。 首先,在基板的表面上,根據需要形成遮光層以區劃 形成畫素的部分,在該基板上塗布例如分散有紅色顏料的 感放射線性組成物的液狀組成物後,進行預烘使溶劑蒸 發,形成塗膜。然後,經由光罩對該塗膜進行曝光,之後 使用鹼性顯影液進行顯影,溶解除去塗膜的未曝光部分, 之後通過進行後烘,形成紅色的畫素圖案按規定排列配置 〇 的畫素陣列。 之後,通過使用分散有綠色或藍色顏料的各感放射線 性組成物的液狀組成物,與上述同樣進行各液狀組成物的 塗布、預烘、曝光、顯影和後烘,在同一基板上依次形成 綠色的畫素陣列和藍色的畫素陣列,得到在基板上配置有 紅色、綠色和藍色三原色的畫素陣列的彩色濾光片。但是, 本發明中各色畫素的形成順序不限於上述順序。 另外,.黑色矩陣可以使用本發明的著色層形成用感放 -45- 200941140 射線性組成物,與形成上述畫素時同樣操作而形成。 作爲形成畫素和/或黑色矩陣時所使用的基板,可以列 舉:例如玻璃、矽、聚碳酸酯、聚酯、芳族聚醯胺、聚醯 胺-醯亞胺、聚醯亞胺等。 另外,根據需要,也可以對這些基板實施利用矽烷偶 聯劑等進行的藥物處理、等離子體處理、離子鍍、濺射、 氣相反應法、真空蒸鍍等適宜的前處理》 在基板上塗布感放射線性組成物的液狀組成物時,可 Ο 以採用噴霧法、輥塗法、旋轉塗布法(旋塗法)、狹縫模頭 塗布法、刮條塗布法、噴墨法等適宜的塗布方法,特佳爲 旋塗法、狹縫模頭塗布法。 塗布厚度以乾燥後的膜厚計,通常爲0,1-10 Am,較 佳爲 0.2-8.0 #m,特佳爲 0.2-6.0 Am。 形成畫素和/或黑色矩陣時所使用的放射線,例如可以 使用可見光、紫外線、遠紫外線、電子射線、X射線等, 較佳波長在190-4 50 nm範圍的放射線。 放射線的曝光量較佳爲10-10,000 J/m2。 作爲上述鹼性顯影液,較佳例如碳酸鈉、氫氧化鈉、 氫氧化鉀、氫氧化四甲銨、膽鹼、1,8-二氮雜二環-[5.4.0]-7-十一碳烯、1,5-二氮雜二環-[4.3.0]-5-壬烯等的水溶液。 上述鹼性顯影液中還可以適量添加例如甲醇、乙醇等 水溶性有機溶劑或界面活性劑等。又,鹼性顯影後通常進 行水洗。 -46- 200941140 作爲顯影處理方法,可以適用噴淋顯影法、噴霧顯影 法、浸泡(浸漬)顯影法、攪拌(大量液體)顯影法等。顯影條 件較佳在常溫下進行5-300秒。 如此操作而得到的本發明的彩色濾光片’在高精細的 彩色液晶顯示元件、彩色攝像管元件、彩色感測器等中極 爲有用。 彩色液晶顯示元件 本發明的彩色液晶顯示元件具備本發明的彩色濾光 片。 作爲本發明的彩色液晶顯示元件的一個實施方式,可 以通過使用本發明的著色層形成用感放射線性組成物,如 上操作於薄膜電晶體基板陣列上形成畫素和/或黑色矩 陣,製作特別高精細的彩色液晶顯示元件。 [實施例1] 以下,列舉實施例,進一步具體說明本發明的實施方 式。但本發明不限於下述實施例。 下述各合成例中所得樹脂的Mw和Μη通過下述規格的 凝膠滲透色譜法(GPC)測定。 裝置:GPC-101 (昭和電工(股)製備)。 柱:將 GPC-KF-801、GPC-KF-802、GPC-KF-803 和 GPC-KF-804結合使用。 洗提溶劑:含有0.5 %重量磷酸的四氫呋喃。 鹼可溶性樹脂的合成 -47- 200941140 合成例1 向具備冷凝管、攪拌機的燒瓶中加入3重量份2,2’-偶 氮二異丁腈和2 00重量份丙二醇一甲醚乙酸酯,接著加入 20重量份甲基丙烯酸、30重量份N-苯基馬來醯亞胺、30 重量份甲基丙烯酸苄酯、20重量份苯乙烯和5重量份作爲 分子量控制劑的鏈轉移劑一 α-甲基苯乙烯二聚物’進行氮 置換,然後一邊緩慢攪拌’一邊將反應溶液升溫至80°C, 保持該溫度聚合3小時。追加0.5重量份2,2’-偶氮二異丁 ® 腈,再聚合1小時’然後將反應溶液升至100°C,繼續聚合 1小時,由此得到樹脂溶液(固體成分濃度=33.0%重量)。 所得樹脂的Mw= 9,500’(Mw/Mn)=2.0。將該樹脂作爲“樹 脂(B-1)” 。 合成例2 向具備冷凝管、攪拌機的燒瓶中加入4重量份2,2’-偶 氮二異丁腈和200重量份丙二醇一甲醚乙酸酯’接著加入 @ 15重量份甲基丙烯酸、20重量份N-苯基馬來醯亞胺、35 重量份甲基丙烯酸苄酯、1〇重量份苯乙烯、10重量份丙三 醇一甲基丙烯酸酯、1〇重量份ω-羧基聚己內酯一丙烯酸 酯和6重量份作爲分子量控制劑的鏈轉移劑一 α-甲基苯乙 燃二聚物,進行氮置換’然後一邊緩慢攪拌’一邊將反應 溶液升至80 °C,保持該溫度聚合3小時。追加0.5重量份 2,2,-偶氮二異丁腈’再聚合1小時’然後將反應溶液升至 10〇。(:,繼續聚合1小時,由此得到樹脂溶液(固體成分濃 -48- 200941140 度= 33.0%重量)。所得樹脂的Mw = 7,500, 將該樹脂作爲“樹脂(B_2)” 。 合成例3 向具備冷凝管、攪拌機的燒瓶中加入 氮二異丁腈和200重量份丙二醇一甲醚乙 15重量份甲基丙烯酸、30重量份苊烯、4〇 酸苄酯、10重量份丙三醇一甲基丙烯酸酯 ^ 羧基聚己內酯一丙烯酸酯和5重量份作爲 鏈轉移劑一α-甲基苯乙烯二聚物,進行氮 緩慢攪拌,一邊將反應溶液升溫至8(TC, 3小時。追加0.5重量份2,2’-偶氮二異丁 時,然後將反應溶液升至100°C,繼續聚合 到樹脂溶液(固體成分濃度=33.0%重量)。 =11,000,(Mw/Mn)= 2.2。將該樹脂作爲 合成例4 〇 向具備冷凝管、攪拌機的燒瓶中加入 氮二異丁腈和200重量份丙二醇一甲醚乙 15重量份甲基丙烯酸、25重量份N_苯基 重量份甲基丙烯酸苄酯、15重量份苯乙烯 醇一甲基丙烯酸酯、10重量份ω-羧基聚 醋和5重量份作爲分子量控制劑的鏈轉移 烯二聚物,進行氮置換’然後一邊緩慢攪 溶液升溫至80°C,保持該溫度聚合3小時 (Mw/Mn) = 2.1。 3重量份2,2 ’ -偶 酸酯,接著加入 重量份甲基丙烯 、5重量份ω -分子量控制劑的 置換,然後一邊 保持該溫度聚合 腈,再聚合1小 1小時,由此得 所得樹脂的Mw ‘樹脂(B-3)” 。 3重量份2,2’偶 酸酯,接著加入 馬來醯亞胺、25 、1 0重量份丙三 己內酯一丙烯酸 劑一α-甲基苯乙 拌,一邊將反應 。追加0.5重量 -49- 200941140 份2,2’-偶氮二異丁腈’再聚合1小時,然後將反應溶液升 至100°C ’繼續聚合1小時’由此得到樹脂溶液(固體成分 濃度=33.0%重量)。所得樹脂的]\4西=1〇,〇〇〇,(1^/1^11)= 2.2。將該樹脂作爲“樹脂(B-4)” 。 合成例 5 向具備冷凝管、攪拌機的燒瓶中加入4重量份2,2’ - 偶氮二異丁腈和200重量份丙二醇一乙醚,接著加入15重 量份甲基丙烯酸、30重量份苊烯、35重量份甲基丙烯酸节 酯' 20重量份丙三醇一甲基丙烯酸酯和6重量份作爲分子 量控制劑的鏈轉移劑一 α-甲基苯乙烯二聚物,進行氮置 換,然後一邊緩慢攪拌,一邊將反應溶液升溫至80°C,保 持該溫度聚合3小時。追加0.5重量份2,2’-偶氮二異丁腈, 再聚合1小時,然後將反應溶液升至l〇〇°C,繼續聚合丄 小時,由此得到樹脂溶液(固體成分濃度=33.0%重量)。所 得樹脂的Mw= 12,000,(Mw/Mn)= 2.2。將該樹脂作爲"樹 φ 脂(B-5)” 。 合成例6 在具備冷凝管和攪拌機的燒瓶中’將40重量份對乙烯 基苄基縮水甘油醚、27重量份N-苯基馬來醯亞胺、17重量 份苯乙烯和16重量份甲基丙烯酸苄酯溶解於3 00重量份丙 二醇一甲醚乙酸酯中,再加入4重量份2,2’-偶氮二異丁腈 和6重量份ct-甲基苯乙烯二聚物’之後吹掃氮氣15分鐘。 吹掃氮氣後,邊攪拌邊將反應釜加熱至80°C ’反應5小時, -50- 200941140 由此得到含有25 %重量的苯乙烯環氧樹脂的樹脂溶液。該 苯乙烯環氧樹脂的Mw= 6,000 ’(Mw/Mn)= 2.5。 向燒瓶中加入200重量份所得的含有苯乙烯環氧樹脂 的樹脂溶液、10重量份作爲不飽和一元羧酸(X)的甲基丙 烯酸、0.2重量份對甲氧基苯酚、0.2重量份溴化四丁銨和 300重量份丙二醇一甲醚乙酸酯,在120°C的溫度下反應9 小時。由此,1當量的甲基丙烯酸與苯乙烯環氧樹脂的1 當量環氧基反應。再加入16重量份作爲多元酸酐(y)的4- e 環己烯-1,2-二羧酸酐,在80t下反應6小時。將該反應混 合物的液溫保持在80°C,在此狀態下水洗2次,進行減壓 濃縮,由此得到含有20%重量鹼可溶性樹脂的樹脂溶液。 所得樹脂的Mw = 7,800,(Mw/Mn) = 2.6。將該樹脂作爲“樹 脂(B-6)” 。 顔料分散液的製備 製備例1 φ 將作爲(A)著色劑的15重量份C.I.顏料紅254/C.I.顏料 紅1 77 = 80/20(重量比)混合物、作爲分散劑的4重量份(固 體成分換算)Disperbyk-2001、作爲(B)鹼可溶性樹脂的6重 量份(固體成分換算)(B-1)和作爲溶劑的75重量份丙二醇 一甲醚乙酸酯用砂磨機進行處理,製備顏料分散液(r)。 製備例2 對作爲(A)著色劑的15重量份C.I.顏料綠36/C.I.顏料 黃138/C.I.顏料黃1 50 = 50/40/10(重量比)混合物、作爲分散 -51- 200941140 劑的4重量份(固體成分換算)Disperbyk-2001、作爲(B)鹼 可溶性樹脂的5重量份(固體成分換算)(Β·2)和作爲溶劑的 76重量份丙二醇一甲醚乙酸酯進行與實施例1相同的處 理,製備顏料分散液(g)。 製備例3 , 對作爲(A)著色劑的15重量份C.I.顔料藍15 : 6/C.I.顏 料紫23 = 95/5(重量比)混合物、作爲分散劑的4重量份(固 體成分換算)Disperbyk-2001、作爲(B)鹼可溶性樹脂的5重 量份(固體成分換算)(B-2)和作爲溶劑的76重量份丙二醇 一甲醚乙酸酯進行與實施例1相同的處理,製備顏料分散 液(b) 〇 製備例4 對作爲(A)著色劑的20重量份炭黑(御國色素(股)製 備)、作爲分散劑的 2重量份(固體成分換算) Disperbyk-2001、作爲(B)鹼可溶性樹脂的4重量份(固體成 0 分換算)(B-3)和作爲溶劑的74重量份3-甲氧基丁基乙酸酯 進行與實施例1相同的處理,製備顏料分散液(bkl)。 製備例5 對作爲(A)著色劑的20重量份炭黑(御國色素(股)製 備)、作爲分散劑的 2重量份(固體成分換算) Disperbyk-167、作爲(B)鹼可溶性樹脂的3重量份(固體成分 換算)(B-3)和作爲溶劑的75重量份3 -甲氧基丁基乙酸醋進 行與實施例1相同的處理,製備顏料分散液(bk2)。 -52- 200941140 眚施例1 液狀組成物的製備 將100重量份顏料分散液(〇、作爲(B)鹼可溶性樹脂的 6重里份(固體成分換算)樹脂(B-4)、作爲(c)多官能性單體 的8重量份二季戊四醇六丙烯酸酯、作爲(D)光聚合引發劑 的3重童份2-节基-2-二甲基胺基-1-(4 -嗎琳代苯基)丁_1· 酮(商品名IRGACURE 369、汽巴精化社製備)、作爲(E)成分 的0.丨5重量份4,4’-[1-[4-[1-[4-羥基苯基]-1-甲基乙基]苯基] 〇 亞乙基]雙酚和作爲溶劑的150重量份3 -乙氧基丙酸乙醋、 25重量份丙二醇一甲醚乙酸酯混合’製備著色層形成用液 狀組成物(R1)。 按照下述次序對液狀組成物(R1)進行評價。評價結果 見表2 ^ 圖案的形成 使用旋塗機於玻璃基板的表面上塗布液狀組成物 Q (R1),之後在90°C下預烘2分鐘,形成膜厚爲2.5 Am的 塗膜。之後,將該基板冷卻至室溫,使用高壓水銀燈,經 由光罩以200 #111的曝光間隙、1,000〗/1112的曝光量對基板 上的塗膜進行曝光。之後,對基板上的塗膜以顯影壓力2 kg f/cm2(噴嘴徑爲1mm)噴出23 °C的0.04 %重量的氫氧化鉀 水溶液,噴淋顯影50秒’之後在230°C下後烘30分鐘’在 基板上形成排列有紅色的線/間隔(L/S)圖案的畫素陣列。 評價 -53- 200941140 使用光學顯微鏡觀察基板上的畫素陣列時’沒有在畫 素圖案的邊緣確認到缺損。另外’用掃描型電子顯微鏡(SEM) 觀察基板上的畫素圖案的斷面時’沒有確認到底切。用光 學顯微鏡測定經由狹縫寬爲90广^^的光罩形成的畫素圖案 的線寬時,線寬爲93.0 A m。 眚施例2 -1 7和比鮫例1 - 6 除了將實施例1中構成成分的種類和量按表2所示變 更以外,進行與實施例1相同的操作’製備液狀組成物 〇 (R2)-(R3)、(G1)-(G3)、(B1)-(B3)和(BK1)-(BK14)。 然後,除了分別使用液狀組成物(R2)-(R3)、(G1)-(G3)、 (B1)-(B3)、(BK1)-(BK14)代替液狀組成物(R1)以外,進行與 實施例1相同的操作,進行評價。結果見表2。0 (7-3) (wherein Y is synonymous with Y in the above formula (7).) -24- 200941140 Specific examples of the compound (b4) include, for example, o-vinylbenzyl glycidyl ether and m-vinyl group. Benzyl glycidyl ether, p-vinylbenzyl glycidyl ether, α-methyl-o-vinylbenzyl glycidyl ether, α-methyl-m-vinylbenzyl glycidyl ether, α-methyl-p-ethylene Glycidyl glycidyl ether, 2,3-diglycidoxymethylstyrene, 2,4-diglycidoxymethylstyrene, 2,5-diglycidoxymethylstyrene, 2 ,6-diglycidoxymethylstyrene, 2,3,4-triglycidoxymethylstyrene, 2,3,5-triglycidoxymethylstyrene, 2,3,6 - triglycidyloxymethyl styrene, 3,4,5-triglycidoxymethylstyrene, 2,4,6-triglycidoxymethylstyrene, and the like. Among the above compounds (b4), o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether and p-vinylbenzyl glycidyl ether are preferred, and p-vinylbenzyl glycidyl ether is particularly preferred. In the polymer (B 2), the compound (b4) may be used singly or in combination of two or more. In the styrene epoxy polymer, an example of the other radical polymerizable compound copolymerized with the compound (b4) is exemplified by the above compound (b1), the compound (b2) and the compound (b3). In the styrene epoxy polymer, the compound (b1) and the compound (b2) are preferably the same compound as the compound exemplified in the polymer (B1). Further, in the styrene epoxy polymer, the compound (b3) is preferably an aromatic vinyl compound, an unsaturated carboxylic acid ester, or a macromonomer having a (meth)acryl fluorenyl group at the terminal of the polymer molecular chain. Etc., particularly preferred are styrene, methyl styrene, methyl (meth) acrylate, n-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, 2-hydroxy (meth) acrylate B-25- 200941140 Ester, allyl (meth) acrylate, benzyl (meth) acrylate, phenyl (meth) acrylate, glycerol mono (meth) acrylate, ring of p-alkenylphenol Oxyethane modified (meth) acrylate, polystyrene macromonomer, polymethyl methacrylate macromonomer, and the like. In the styrene epoxy polymer, each of the compound (b1), the compound (b2) and the compound (b3) may be used singly or in combination of two or more. The styrene epoxy polymer can be produced in the same manner as the polymer (B1), and its Mw and Μη can be set according to the Mw and Μη of the desired (B) alkali-soluble resin. The above unsaturated carboxylic acid (X) can be appropriately selected according to the kind of X required in the above formula (7). Preferred unsaturated carboxylic acids (X) include, for example, acrylic acid, methacrylic acid, carboxy-polycaprolactone monoacrylate, ω-carboxy-polycaprolactone monomethacrylate, 2-propenyloxy group. Ethyl succinic acid, 2-methyl propylene methoxyethyl succinic acid, and the like. In the above ω-carboxy-polycaprolactone monoacrylate and ω-carboxy-polycaprolactone monomethacrylate, the number of repeating units of polyhexanolactone is preferably from 1 to 10, more preferably from 2 to 5. . Among the above unsaturated carboxylic acids (X), acrylic acid or methacrylic acid is more preferred because it is highly reactive, and particularly preferably acrylic acid. The unsaturated carboxylic acid (X) may be used singly or in combination of two or more. The addition reaction of the unsaturated monocarboxylic acid (X) on the above styrene epoxy polymer can be carried out in accordance with a known method. The amount of the unsaturated monocarboxylic acid (X) to be used is preferably -26-200941140 0% with respect to 1 equivalent of the epoxy group of the styrene epoxy polymer. 7-1. The range of 3 equivalents is more preferably in the range of l 9 l 2 equivalents. The polybasic acid liver (y) may be selected according to the type of γ required in the above formula (7). Examples of preferred polybasic acid anhydrides (y) include, for example, malonic anhydride, maleic anhydride, citraconic anhydride, succinic anhydride, glutaric anhydride, glutaconic anhydride, itaconic anhydride, diglycol anhydride, O-benzoic anhydride 'cyclohexane-oxime' octacarboxylate anhydride, 4_cyclohexene oxime, 2 dicarboxylic anhydride, hydrazine anhydride, and the like. Among them, succinic anhydride, glutaric anhydride orthophthalic acid anhydride or 4-cyclohexene-1,2·dicarboxylic anhydride is particularly reactive, so that it is particularly preferable. The addition reaction of the polybasic acid anhydride (y) on the styrene epoxy polymer can be carried out in accordance with a known method. The amount of addition of 1 equivalent of the epoxy 'polyanhydride (y) to the styrene epoxy polymer is preferably 〇. 2_1 〇 equivalent range, more preferably 0. 4-0. A range of 9 equivalents. In the present invention, the polymer (B1) and the polymer (B 2) may each be used singly or in combination of two or more. Further, as the alkali-soluble resin, for example, a copolymer of (meth)acrylic acid and the above compound (b 3) and a polymerized anthracene (B1) and/or a polymer (B2) may be used together. In the present invention, the content of the alkali-soluble resin is usually preferably from 10 to 1,000 parts by weight, particularly preferably from 20 to 500 parts by weight, per 100 parts by weight of the (A) coloring agent. In this case, if the content of the alkali-soluble resin is less than 10 parts by weight, for example, the alkali developability is lowered, or a residue or dirt is generated on the unexposed portion of the substrate or the light-shielding layer; and if it exceeds 1,000 parts by weight, Then, since the concentration of the colorant is relatively lowered, it is difficult to achieve the target color density as a film. -27- 200941140 - (C) Monomer having two or more radically polymerizable unsaturated bonds - a monomer having two or more radically polymerizable unsaturated bonds in the present invention (hereinafter, sometimes referred to as "multifunctional" Examples of the monomer ") include di(meth)acrylates of alkylene glycols such as ethylene glycol and propylene glycol; and di(methyl) polyalkylene glycols such as polyethylene glycol and polypropylene glycol. Acrylates; poly(meth)acrylates of ternary or higher polyhydric alcohols such as glycerin, trimethylolpropane, pentaerythritol, dipentaerythritol or the like; or their dicarboxylic acid modified oximes; polyester, epoxy resin, Oligo(meth)acrylates such as urethane resins, alkyd resins, oxime resins, and spiro resins; poly-1,3-butadiene having hydroxyl groups at both ends, and hydroxyl groups at both ends Polyisoprene, poly(caprolactone) having a hydroxyl group at both ends, and the like, or a di(meth)acrylate of a polymer having a hydroxyl group at both ends; or a tris[2-(methyl)propenyloxyethyl group; Phosphate ester; or Q isocyanuric acid ethylene oxide modified triacrylate and the like. Among these polyfunctional monomers, poly(meth)acrylates of polyhydric alcohols having a ternary or higher or a dicarboxylic acid modification thereof are preferred, and specifically, trimethylolpropane is preferred. Triacrylate, trimethylolpropane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethyl Acrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, pentaerythritol tri-28-200941140 monoester of acrylate and succinic acid, monoester of pentaerythritol trimethacrylate and succinic acid, dipentaerythritol a monoester of acrylate and succinic acid, a monoester of dipentaerythritol pentamethyl acrylate and succinic acid, and the like. From the viewpoints of high strength of the colored layer, excellent surface smoothness of the colored layer, and difficulty in generation of dirt and film residue on the unexposed portion of the substrate and the light shielding layer, it is particularly preferable to be trimethylolpropane triacrylate or pentaerythritol. Triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, a monoester of pentaerythritol triacrylate and succinic acid, and a monoester of diquaternium pentaerythritol pentaacrylate with succinic acid. The above polyfunctional monomers may be used singly or in combination of two or more. The content of the (C) polyfunctional monomer of the present invention is usually preferably from 5 to 500 parts by weight, particularly preferably from 20 to 300 parts by weight, per 100 parts by weight of the (B) alkali-soluble resin. In this case, when the amount of the polyfunctional monomer used is less than 5 parts by weight, the strength or surface smoothness of the colored layer tends to decrease. When φ exceeds 500 parts by weight, for example, the alkali developability is lowered, or Contaminants, film residues, and the like tend to occur on the unexposed portion of the substrate or on the light shielding layer. In the present invention, a part of the polyfunctional monomer may be replaced with a monomer having one radically polymerizable unsaturated bond (hereinafter sometimes referred to as "monofunctional monomer"). The above monofunctional monomer may, for example, be succinic acid mono-[2-(methyl) propylene methoxyethyl ester], phthalic acid mono [2-(methyl) propylene oxy oxyethylene -29- 200941140 a [(meth) propylene oxiranyl] ester of a divalent or higher polycarboxylic acid such as an ester; a ω-carboxypolycaprolactone mono(meth) acrylate having a carboxyl group and a hydroxyl group at both ends One (meth) acrylate of polymer; Ν-(meth) propylene hydrazinomorph, Ν-vinyl pyrrolidone, Ν-vinyl-ε-caprolactam; Μ-5600 (trade name, East Asian synthesis (stock) preparation) and so on. These monofunctional monomers may be used singly or in combination of two or more. The content of the monofunctional monomer is usually 90% by weight or less, preferably 50% by weight or less based on the total amount of the polyfunctional monomer and the monofunctional monomer. In this case, when the content ratio of the monofunctional monomer exceeds 90% by weight, the strength or surface smoothness of the obtained colored layer may be insufficient. . - (D) Radiation-induced Radical Generating Agent - The radiation-sensitive radical generating agent in the present invention refers to exposure of radiation such as visible light, ultraviolet light, far ultraviolet light, electron beam, or X-ray to cause the above-mentioned polyfunctional single The polymerization of a monofunctional Q monomer used as the case may be, thereby producing a living radical-releasing compound. Examples of the radiation-sensitive radical generating agent include, for example, an acetophenone-based compound, a biimidazole-based compound, a triazine-based compound, an anthraquinone-based fluorene-based compound, a benzoin-based compound, and an α-diketone-based compound. In the present invention, the radiation-sensitive radical generating agent may be used singly or in combination of two or more. However, the radiation-sensitive radical generating agent in the present invention is preferably selected from the group consisting of an acetophenone-based compound and a biimidazole-based compound. At least one of a triazine-based compound and a 0-fluorenyl fluorene-based compound -30- 200941140 In the present invention, the general content of the radiation-sensitive radical generating agent is usually relative to 100 parts by weight of the (C) polyfunctional monomer. Is 0. 01-120 parts by weight' is preferably 1-100 parts by weight. At this time, if the content of the radiation-induced linear radical generator is less than 0. 01 parts by weight, the curing by exposure is insufficient, and it is difficult to obtain a color filter in which the colored layer patterns are arranged in a predetermined arrangement; and if it exceeds 120 parts by weight, the formed coloring layer is easily formed from the substrate during development. The tendency to fall off. In a preferred radiation-sensitive radical generator of the present invention, specific examples of the acetophenone-based compound include 2-hydroxy-2-methyl-1-phenylpropan-1-one and 2-methyl group. 1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl) Butyl-buxoton, 2-(4-methylbenzyl)-2-(dimethylamino)-1-(4-morpholinophenyl)butan-1-one, 1-hydroxycyclohexyl·benzene Keto' 2,2-dimethoxy-1,2-diphenylethan-1-one, 1,2-octanedione, and the like. Among these acetophenone-based compounds, particularly preferred are 2-methyl-1-[4-(methylthio) Q phenyl]-2-morpholinopropan-1-one and 2-benzyl-2-di Methylamino-1-(4-morpholinophenyl)butan-1-one, 2-(4-methylbenzyl)-2·(dimethylamino)-1-(4-morpholine Phenyl) butan-1-one, 1,2-octane, etc. The above acetophenone-based compounds may be used singly or in combination of two or more. In the present invention, the content of the acetophenone-based compound as the radiation-sensitive radical generating agent is usually preferably 0% by weight based on 1 part by weight of the (c) polyfunctional monomer. 01_80 parts by weight, more preferably 1 to 70 parts by weight, particularly preferably -31 - 200941140 1-60 parts by weight. In this case, if the content of the acetophenone-based compound is less than 重量1 part by weight, the curing by exposure is insufficient, and it is difficult to obtain a color filter in which the colored layer patterns are arranged in a predetermined arrangement; and if it exceeds 80 parts by weight 'The coloring layer formed tends to be easily detached from the substrate during development. Further, specific examples of the above biimidazole-based compound include 2,2,-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(4-ethoxycarbonylphenyl)-1. , 2, biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetrakis(4-ethoxycarbonylbenzoquinonebiimidazole, 2,2'-double (2-Chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4 ',5,5'_Tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5,5'-tetraphenyl 1,2- 2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2' -bis(2,4-dibromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-tribromo Phenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, etc. Among these biimidazole compounds, 2,2'-bis(2-chlorophenylφ group is preferred )-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5' -tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5,5'-tetraphenyl-1,2' -Link Oxazole, etc., particularly preferably 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole. These biimidazole compounds are in a solvent. It has excellent solubility, does not produce impurities such as undissolved matter and precipitates, and has high sensitivity. The curing reaction can be sufficiently carried out by low-energy exposure, and the curing reaction does not occur in the unexposed portion, so the coated film after exposure It can be clearly distinguished as a solidified portion which is insoluble in the developing-32-200941140 liquid and an uncured portion which has high solubility to the developing solution, whereby a high-definition color filter in which the undercut-cut coloring pattern is arranged in a predetermined arrangement can be formed. The above biimidazole compound may be used singly or in combination of two or more. In the present invention, the content of the biimidazole-based compound as the radiation-sensitive radical generating agent is usually preferably 0. 0 parts by weight based on the total of 100 parts by weight of the (C) polyfunctional monomer. 01-4 parts by weight, more preferably 1-30 parts by weight, particularly preferably 1-20 parts by weight. At this time, if the content of the biimidazole compound is insufficient. 01 parts by weight, the curing by exposure is insufficient, and it is difficult to obtain a color filter in which the colored layer patterns are arranged in a predetermined arrangement; and if it exceeds 40 parts by weight, the coloring layer formed at the time of development is easily obtained from the substrate. The film on the surface of the peeled or colored layer tends to be rough. In the present invention, when a biimidazole-based compound is used as the radiation-sensitive linear radical generator, it is preferred to use the following hydrogen donor in combination to further improve the sensitivity. The term "hydrogen donor" as used herein means a compound which can supply a hydrogen atom to a radical generated by a bisimidazole compound by exposure. The hydrogen donor in the present invention is preferably a thiol compound or an amine compound defined below. The thiol compound includes a compound having one or more, preferably 1-3, more preferably 1-2 directly bonded fluorenyl groups on the mother nucleus, which has a benzene ring or a heterocyclic ring as a nucleus ( Hereinafter, it is referred to as "thiol-based hydrogen supply-33-200941140. The amine-based compound includes a benzene ring or a heterocyclic ring as a core, and one or more, preferably 1-3, more preferably 1-2, directly bonded amine groups on the mother nucleus. The compound (hereinafter referred to as "amine-based hydrogen donor"). It is to be noted that these hydrogen donors may have both a mercapto group and an amine group. Hereinafter, the hydrogen donor will be described more specifically. The hydrogen donor may have one or more benzene rings or heterocycles, and may have both a benzene ring and a hetero ring. When two or more of these rings are present, the fused ring may or may not be formed. When the hydrogen donor has two or more mercapto groups, as long as at least one free mercapto group remains, the remaining one or more mercapto groups may be substituted with an alkyl group, an aralkyl group or an aryl group, and at least one free sulfhydryl group remains. It may have a structural unit in which two sulfur atoms are bonded via a divalent organic group such as an alkylene group, or a structural unit in which two sulfur atoms are bonded in the form of a disulfide. φ and 'thiol-derived hydrogen donor In the part other than the sulfhydryl group, a carboxyl group, an alkoxy ore group, or a substituted alkoxy group may be used. Substituted by a carbonyl group, a phenoxycarbonyl group, a substituted phenoxycarbonyl group, a nitrile group, etc. Specific examples of the above-mentioned thiol-based hydrogen donor include 2-mercaptobenzothiazole and 2-mercaptobenzoxazole, 2 - mercaptobenzimidazole, 2,5-dimercapto-1,3,4-thiadiazole, 2-mercapto-2,5-dimethylaminopyridine, etc. These thiols are hydrogen donors Preferably, the 2-mercaptobenzothiazole and the 2-mad benzobenzophenone are particularly preferably 2-mercaptobenzothiazole. -34- 200941140 In addition, the amine-based hydrogen donor may have one or more benzenes respectively. The ring or heterocyclic ring may have both a benzene ring and a heterocyclic ring, and when it has two or more of these rings, it may or may not form a fused ring. Further, in the amine-based hydrogen donor, one or more amine groups may be used. Substituted by an alkyl group or a substituted alkyl group, and a moiety other than the amine group may be substituted by a carboxyl group, an alkoxycarbonyl group, a substituted alkoxycarbonyl group, a phenoxycarbonyl group, a substituted phenoxycarbonyl group, a nitrile group or the like. Specific examples of the hydrogen donor include 4,4'-bis(dimethylaminoindenyl)benzophenone, 4,4'-bis(diethylamino)benzophenone, and 4-diethyl. Aminophenyl , 4-dimethylaminophenylpropanone, ethyl-4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid, 4-dimethylaminobenzonitrile, etc. These amine systems In the hydrogen donor, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, and particularly preferably 4,4 are preferred. '-bis(diethylamino)benzophenone. It is to be noted that the amine-based hydrogen donor has a sensitizer even when a radical generator other than the conjugated carbamide compound is used. In the present invention, the hydrogen donor may be used singly or in combination of two or more, but it is preferable from the viewpoint that the formed coloring layer is hard to be detached from the substrate during development, and the strength and sensitivity of the colored layer are also high. In order to use one or more thiol-based hydrogen donors and one or more amine-based hydrogen donors. Specific examples of the combination of the thiol-based hydrogen donor and the amine-based hydrogen donor include 2-mercaptobenzothiazole/4,4'-bis(dimethylamino)benzophenone and 2-mercaptobenzoene. Thiazole/4,4, bis(diethylamino)benzophenone, 2-mercaptobenzoxazole-35- 200941140 /4,4'·bis(dimethylamino)benzophenone, 2-mercaptobenzoxazole/4,4,-bis(diethylamino)benzophenone, etc., a better combination is 2-mercaptobenzothiazole/4,4,-bis (two Aminophenone) benzophenone, 2-mercaptobenzoxazole/4,4,-bis(diethylamino)benzophenone, a particularly preferred combination is 2-mercaptobenzothiazole/4 , 4'-bis(diethylamino)benzophenone. In the combination of the thiol-based hydrogen donor and the amine-based hydrogen donor, the weight ratio of the thiol-based hydrogen donor to the amine-based hydrogen donor is usually from 1:1 to 1:4, preferably from 1:1 to 1. :3. In the present invention, the content of the hydrogen donor and the biimidazole compound is preferably 0 in combination with the total of 1 part by weight of the (C) polyfunctional monoterpene. 01-40 parts by weight, more preferably 1-30 parts by weight, particularly preferably 1.2 parts by weight. At this time, if the content of the hydrogen donor is less than 0. When the amount is 0.1 part by weight, the effect of improving the sensitivity tends to be lowered. When the amount is more than 40 parts by weight, the formed coloring layer tends to fall off from the substrate during development. Further, when the amine-based hydrogen donor is used in combination with a radiation-sensitive radical generator other than a biimidazole-based compound such as an acetophenone-based compound, it can function as a φ sensitizer. When an amine-based hydrogen donor is used as the sensitizer, the content thereof is usually preferably 300 parts by weight or less, more preferably 200 parts by weight or less based on 100 parts by weight of the radiation-sensitive radical generating agent other than the biimidazole-based compound. It is particularly preferably 100 parts by weight or less, but if the content is too small, it is difficult to obtain a sufficient effect. Therefore, the lower limit of the content is preferably 2 parts by weight, more preferably 5 parts by weight. Specific examples of the above triazine-based compound include 2,4,6-tris(trichloromethyl)-s-triazine and 2-methyl-4,6-bis(trichloromethyl)-s-three. Oxazine, 2-[2-(5- -36- 200941140 methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl)_s_triazine, 2_[2_(furan-2- Vinyl]-4,6-bis(trichloromethyl)_s_triazine, 2-[2_(4-diethylamino-2-methylphenyl)ethenyl]-4,6 - bis(trichloromethyl)-s. Triazine, 2-[2-(3,4-dimethoxyphenyl)ethylidene]-4,6-bis(trichloromethyl)-5-triazine, 2-(4-methoxy) Phenyl)-4,6-bis(trichloromethyl)_s_triazine, 2-(4-ethoxystyryl)-4,6-bis(trichloromethyl)-s-triazine, A triazine-based compound having a halogenated methyl group such as 2_(4·n-butoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine. © Among these diazine-based compounds, 2-[2-(3,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine is particularly preferred. The above triazine-based compounds may be used singly or in combination of two or more. In the present invention, the content of the triazine-based compound as a radiation-sensitive radical generating agent is preferably 0% with respect to 100 parts by weight of the (C) polyfunctional monomer. 01 to 40 parts by weight, more preferably 1 to 30 parts by weight, particularly preferably 1 to 20 parts by weight. At this time, if the content of the triazine compound is less than 0. 01 parts by weight, the curing by exposure is insufficient, and it is difficult to obtain a color filter in which the colored layer patterns are arranged in a predetermined arrangement; and if it exceeds 40 parts by weight, the formed coloring layer is easily formed on the substrate during development. The tendency to fall off. Specific examples of the above fluorene-fluorenyl fluorene-based compound include 1,2-octanedione-1-[4.(phenylthio)phenyl]-2-(0-benzoguanidinopurine), 1- [9-Ethyl-6-benzylidenyl-9H-indazol-3-yl]-decane-1,2-decane-2-indole-benzoic acid ester, 1-[9-B -6-benzylidenyl-9H-indazol-3-yl]-decane-1,2-decane-2-indole-37- 200941140-0-acetate, 1-[9-ethyl -6-benzylidenyl-9H-indazol-3-yl]-pentane-1,2-pentane-2_肟-0-acetate, 1-[9-ethyl-6-benzene Mercapto-9H-carbazol-3-yl]-octane-1-one oxime-0-acetate, 1-[9-ethyl-6-(2-methylbenzomethyl)-9H- Oxazol-3-yl]-ethane-1-one oxime oxime benzoate, i-[9-ethyl-6-(1,3,5-trimethylbenzylidene)-911 -oxazol-3-yl]-ethane-1-one oxime-indole-benzoate, 1-[9-butyl-6-(2-ethylbenzylidene)-9H-carbazole- 3-yl]-ethane-1-one oxime-0·benzoate, 1-[9-ethyl-6-(2-methylbenzomethyl)-9H-indazol-3-yl] 1-(0-acetamido)ethanone oxime, i-[9-ethyl-6-[2-methylindolyl-4-(2,2-dimethyl-1,3-dioxo) Amyl)methoxybenzylidene]-911-miso-3-yl]-1-(0-ethyl-branched) acetaminophen and the like. Among these fluorene-fluorenyl lanthanide compounds, particularly preferred is 1,2-octanedione-1-[4-(phenylthio)phenyl]-2-(0-benzylidene fluorenyl), 1-[ 9-ethyl-6-(2-methylbenzhydryl)-9-indazol-3-yl]-1-(indolyl)acetone oxime, 1-[9-ethyl-6 -[2-methyl-4-(2,2-dimethyl-1,3-dioxolanyl)methoxybenzylidene]-9Η-oxazol-3-yl]-1- (0-Ethyl) Ethylene and the like. ❹ The above 0-fluorenyl lanthanide compounds may be used singly or in combination of two or more. In the present invention, the content of the 0-fluorenyl fluorene compound as the radiation-sensitive radical generating agent is preferably 0% with respect to 100 parts by weight of the (C) polyfunctional monomer. 01 to 80 parts by weight, more preferably 1 to 60 parts by weight, particularly preferably 1 to 50 parts by weight. At this time, if the content of the 0-fluorenyl lanthanide compound is less than 0. 01 parts by weight, the curing by exposure is insufficient, and it is difficult to obtain a color filter in which the colored layer patterns are arranged in a predetermined arrangement; and if it exceeds 80 parts by weight - 38 to 200941140, the formed coloring layer is developed. There is a tendency to easily fall off from the substrate. —(E) Component— The component (E) in the present invention is a compound selected from the above formulas (1) to (5), a phenolic compound having a flavan skeleton, a phenolic compound having a spirobiindane skeleton, and At least one compound having a phenolic compound of a spirobiguanide skeleton. By containing this component, the pattern does not become defective or peeled off during development, and I undercuts. In the proximity exposure, the pattern line width can be suppressed from being wider than the design of the mask. In the compound represented by the above formula (1), the group A in the formula is preferably a -CO- group, a methylene group or an isopropylidene group. Further, Ri is preferably a hydrogen atom or an alkyl group or alkoxy group having 4 or less carbon atoms. Specific examples of the compound represented by the above formula (1), for example, examples of the (poly-perylene) benzophenones include 2,3,4·trihydroxybenzophenone, 2,4,6-three. Hydroxybenzophenone, 2,2,,4,4,-tetrahydroxybenzophenone, 〇2,3,4,3'·tetrahydroxybenzophenone, 2,3,4,4'. -tetrahydroxybenzophenone, 2,3,4,2'-tetrahydroxy-4,-methylbenzophenone, 2,3,4,4'-tetrahydroxy-3'-methoxydiphenyl Methyl ketone, 2,3,4,2,,6'_ pentahydroxybenzophenone, 2,4,6,3',4',5'_ hexa-benzophenone, 3,4,5 Examples of 3,4,4,5'-hexahydroxybenzophenone and the like; ^(phenyl)alkane can be exemplified by bis(p-hydroxyphenyl)methane or the like; bis(polyphenylene) chain Examples of the alkanes include bis(2,4-dihydroxyphenyl)methyl, bis(2,3,-4-trihydroxyphenyl)methane, and 2,2_bis (2,3,4_3). -39- 200941140 Hydroxyphenyl)propane, etc. In the compound represented by the above formula (2), R1 in the formula is preferably an amino group or a group having 4 or less carbon atoms. In the formula, R4 is preferably a hydrogen atom or an alkene having 6 or less carbon atoms. . Specific examples of the compound represented by the above formula (2) include, for example, tris(p-hydroxyphenyl)methane, anthracene, 1, tris(p-hydroxyphenyl)ethane, bis(2,5-dimethyl-4) -Hydroxyphenyl)-2-hydroxyphenylmethane, 2-[bis{(5-isopropyl-4-hydroxy-2-methyl)phenyl}methyl]phenol, and the like. In the compound represented by the above formula (3), the group A in the formula is preferably a methylene group. R1 in the formula is preferably a hydrogen atom or an alkyl group having 4 or less carbon atoms; and R4 is preferably a hydrogen atom or an alkyl group having 6 or less carbon atoms. Specific examples of the compound represented by the above formula (3) include 1,1,3-tris(2,5-dimethyl-4-hydroxyphenyl)-3-phenylpropane and the like. In the compound represented by the above formula (4), R1 in the formula is preferably a hydrogen atom, and R2, R3 and R4 are preferably a hydrogen atom or an alkyl group having 6 or less carbon atoms. Specific examples of the compound represented by the above formula (4) include, for example, 4,4'-[1-[4-[1-[4-hydroxyphenyl]-1-methylethyl]phenyl]phenylene Base] Bisphenol and the like. In the compound represented by the above formula (5), R1 in the formula is preferably a hydrogen atom, and R2, R3 and R4 are preferably a hydrogen atom or an alkyl group having 6 or less carbon atoms. Specific examples of the compound represented by the above formula (5) include, for example, 4,6-bis{1_(4-hydroxyphenyl)_1-methylethyl}_13-dihydroxybenzene, and [1-(3-( 1-(4-hydroxyphenyl)methylethyl b 4,6-dihydroxyphenyl)-1- -40- 200941140 methylethyl]-3·(1-(3-{1-(4- Hydroxyphenyl)-p-methylethyl}-4,6-dihydroxyphenyl)-1-methylethyl)benzene, etc. Specific examples of the above phenolic compound having a flavan skeleton include, for example, 2-methyl group. 2-(2,4-Dihydroxyphenyl)-4-(4-hydroxyphenyl)-7-hydroxychroman, 2,4,4-trimethyl-7,2',4'-trihydroxy Specific examples of the above phenolic compound having a spirobiindane skeleton include, for example, 3,3,3',3'-tetramethyl-1,1'-spiroindole-5,6, 7,5',6',7'-hexanol oxime, etc. Specific examples of the above phenolic compound having a spirobiguanide skeleton include, for example, 3,3'-dimethyl-1,1'-spirobiguanide. -5,6,7,5',6',7'-hexanol, etc. Among these compounds, a (polyhydroxy)benzophenone, a compound represented by the above formula (4), and a flavan skeleton are preferable. Phenolic compounds a compound; particularly preferred is 2,3,4-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone, 2,3,4,2',6'-pentahydroxydiene Benzene, 4,4'-[1-[4-[1-[4-hydroxyphenyl Q-yl]-1-methylethyl]phenyl]ethylidene]bisphenol, 2-methyl-2 -(2,4-dihydroxyphenyl)-4-(4-hydroxyphenyl)-7-hydroxychroman" In the present invention, (E) with respect to 1 part by weight of (B) alkali-soluble resin The content of the component is preferably 0. It is preferably 1 to 10 parts by weight, more preferably 1 to 5 parts by weight, particularly preferably 1 to 3 parts by weight. At this time, if the content of the (E) component is insufficient. When 1 part by weight, there is a possibility that the desired effect cannot be obtained. On the other hand, if it exceeds i by weight, the formed pattern tends to be easily detached from the substrate during development. —Additive~~41- 200941140 The radiation sensitive composition of the present invention contains the above components (A) to (E), but may further contain other additives as needed. Examples of the other additives include a chelating agent such as glass or alumina, a polymer compound such as polyvinyl alcohol or poly(fluoroalkyl acrylate), a nonionic surfactant, a cationic surfactant, and an anionic interface. Surfactant such as active agent; vinyl trimethoxy decane, vinyl triethoxy decane, vinyl tris(2-methoxyethoxy) decane, N-(2-aminoethyl)-3- Aminopropylmethyldimethoxydecane, N-(2-aminoethyl)-3-aminopropylpropyltrimethoxydecane, 3-aminopropyltriethoxydecane, 3-shrinkage Glyceroxypropyltrimethoxydecane, 3-glycidoxypropylmethyldimethoxydecane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxydecane, 3-chloropropylmethyl An adhesion promoter such as dimethoxydecane, 3-chloropropyltrimethoxydecane, 3-methylpropenyloxypropyltrimethoxydecane or 3-mercaptopropyltrimethoxydecane; 2,2 Antioxidants such as '-thiobis(4-methyl-6-tert-butylphenol), 2,6-di-t-butylphenol; 2-(3-tert-butyl-5-methyl-2 -hydroxyphenyl fluorenyl)-5- Ultraviolet absorbers such as benzotriazole and alkoxybenzophenone; anti-agglomerating agents such as sodium polyacrylate; malonic acid, adipic acid, itaconic acid, citraconic acid, fumaric acid, mesaconic acid, etc. Alkali solubility improver, etc. Solvent The sensitizing radioactive composition for forming a colored layer of the present invention contains the above-mentioned (Α)·(Ε) component as an essential component, and if necessary, the above-mentioned additive component, but usually is mixed with a solvent to prepare a liquid composition. The solvent may be appropriately selected and used as long as it disperses or dissolves the -42-200941140 (A)-(E) component or the additive component constituting the radiation sensitive composition and does not react with these components and has moderate volatility. The above solvent may, for example, be exemplified by: ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, two Glycol-n-propyl ether, diethylene glycol-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, one Dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, propylene dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, etc. An alkylene glycol monoalkyl ether. ; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol methyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether (poly)alkylene glycol monoalkyl ether acetates such as acetate and 3-methoxybutyl acetate; stilbene dimethyl ether, diethylene glycol methyl ethyl ether, digan Other ethers such as alcohol diethyl ether and tetrahydrofuran; ketones such as butanone, cyclohexanone, 2-heptanone and 3-heptanone; alkyl lactates such as methyl lactate and ethyl lactate; 2-hydroxy-2- Ethyl methacrylate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethoxylate Ethyl acetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl Propionic acid-43- 200941140 Ester, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, butyric acid Ethyl ester, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, Other esters such as methyl ketone, ethyl pyruvate, n-propyl pyruvate, methyl acetate, ethyl acetate, ethyl 2-oxobutanoate, etc.; aromatic hydrocarbons such as toluene and xylene : decylamine such as N,N-dimethylformamide, N,N-dimethylacetamide or N-methylpyrrolidone or an indoleamine. Among these solvents, from the viewpoints of solubility, pigment dispersibility, coatability and the like, 'preferably propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate Ester, 3-methoxybutyl acetate, diglyme, diethylene glycol methyl ethyl ether, cyclohexanone, 2-heptanone, 3-heptanone, ethyl lactate, 3-methyl Ethyl oxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methyl-3-methoxybutylpropionate, n-butyl acetate, acetic acid Butyl ester, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, isopropyl butyrate, n-butyl butyrate, ethyl pyruvate, and the like. The above solvents may be used singly or in combination of two or more. The above solvent may also be combined with benzyl ether, di-n-hexyl ether, acetone acetone, isophorone, hexanoic acid, octanoic acid, 1-octanol, decyl decyl alcohol, benzyl alcohol, acetic acid vinegar, ethyl benzoate. A high boiling point solvent such as diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate or ethylene glycol monophenyl ether acetate is used in combination. -44- 200941140 The above high boiling point solvents may be used singly or in combination of two or more. The content of the solvent is not particularly limited, and the total concentration of each component after the solvent is removed from the composition is usually from 5 to 50% by weight, particularly preferably from 10 to 40, from the viewpoints of coatability and stability of the obtained radiation sensitive composition. The amount of % weight. Color filter The color filter of the present invention comprises a coloring layer formed of the radiation-sensitive composition for forming a colored layer of the present invention. 〇 Hereinafter, a method of forming the color filter of the present invention will be described. First, on the surface of the substrate, a light-shielding layer is formed as needed to partition a portion where a pixel is formed, and a liquid composition such as a radiation-sensitive linear composition in which a red pigment is dispersed is applied onto the substrate, and then pre-baked to evaporate the solvent. Forming a coating film. Then, the coating film is exposed through a photomask, and then developed using an alkaline developing solution to dissolve and remove the unexposed portion of the coating film, and then post-baking is performed to form a red pixel pattern. Array. Thereafter, coating, prebaking, exposure, development, and post-baking of each liquid composition are carried out on the same substrate by using a liquid composition of each of the radiation-sensitive linear compositions in which green or blue pigment is dispersed. A green pixel array and a blue pixel array are sequentially formed to obtain a color filter in which a pixel array of three primary colors of red, green, and blue is disposed on the substrate. However, the order of formation of the respective color pixels in the present invention is not limited to the above order. In addition, The black matrix can be formed by using the sensitizing layer for forming a coloring layer of the present invention -45-200941140, in the same manner as in the case of forming the above-mentioned pixels. As the substrate used in forming the pixel and/or the black matrix, there may be mentioned, for example, glass, ruthenium, polycarbonate, polyester, aromatic polyamine, polyamine-imine, polyimine or the like. Further, if necessary, these substrates may be subjected to a suitable pretreatment such as drug treatment, plasma treatment, ion plating, sputtering, gas phase reaction method, or vacuum vapor deposition using a decane coupling agent or the like. When the liquid composition of the radiation-linear composition is sensed, a spray method, a roll coating method, a spin coating method (spin coating method), a slit die coating method, a bar coating method, an inkjet method, or the like may be used. The coating method is particularly preferably a spin coating method or a slit die coating method. The coating thickness is usually 0, 1-10 Am, preferably 0. 2-8. 0 #m, especially good 0. 2-6. 0 Am. The radiation used for forming the pixels and/or the black matrix may be, for example, visible light, ultraviolet light, far ultraviolet light, electron beam, X-ray or the like, and radiation having a wavelength in the range of 190 to 50 50 nm is preferable. The exposure amount of the radiation is preferably from 10 to 10,000 J/m2. As the above alkaline developing solution, for example, sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, choline, 1,8-diazabicyclo-[5. 4. 0]-7-undecene, 1,5-diazabicyclo-[4. 3. An aqueous solution of 0]-5-pinene or the like. A water-soluble organic solvent such as methanol or ethanol or a surfactant may be added to the alkaline developing solution in an appropriate amount. Further, it is usually washed with water after alkaline development. -46- 200941140 As the development processing method, a shower development method, a spray development method, a soaking (immersion) development method, a stirring (a large amount of liquid) development method, or the like can be applied. The developing conditions are preferably carried out at room temperature for 5 to 300 seconds. The color filter 'of the present invention obtained in this manner is extremely useful in high-definition color liquid crystal display elements, color image sensor elements, color sensors, and the like. Color liquid crystal display element The color liquid crystal display element of the present invention comprises the color filter of the present invention. As one embodiment of the color liquid crystal display element of the present invention, it is possible to form a pixel and/or a black matrix by using the sensitizing radiation composition for forming a coloring layer of the present invention as described above, and to form a pixel and/or a black matrix as described above. Fine color liquid crystal display elements. [Example 1] Hereinafter, examples of the present invention will be specifically described by way of examples. However, the invention is not limited to the following embodiments. The Mw and Μη of the resin obtained in each of the following Synthesis Examples were measured by gel permeation chromatography (GPC) of the following specifications. Device: GPC-101 (prepared by Showa Denko (share)). Column: Combine GPC-KF-801, GPC-KF-802, GPC-KF-803 and GPC-KF-804. Eluent solvent: contains 0. 5% by weight of phosphoric acid in tetrahydrofuran. Synthesis of alkali-soluble resin - 47 - 200941140 Synthesis Example 1 To a flask equipped with a condenser and a stirrer, 3 parts by weight of 2,2'-azobisisobutyronitrile and 200 parts by weight of propylene glycol monomethyl ether acetate were added, followed by 20 parts by weight of methacrylic acid, 30 parts by weight of N-phenylmaleimide, 30 parts by weight of benzyl methacrylate, 20 parts by weight of styrene and 5 parts by weight of a chain transfer agent as a molecular weight controlling agent-α- The methyl styrene dimer was subjected to nitrogen substitution, and then the reaction solution was heated to 80 ° C while stirring slowly, and the temperature was maintained at this temperature for 3 hours. Add 0. 5 parts by weight of 2,2'-azobisisobutyronitrile, which was further polymerized for 1 hour', then the reaction solution was raised to 100 ° C, and polymerization was continued for 1 hour, thereby obtaining a resin solution (solid content concentration = 33. 0% by weight). The obtained resin had Mw = 9,500' (Mw/Mn) = 2. 0. This resin was referred to as "resin (B-1)". Synthesis Example 2 To a flask equipped with a condenser and a stirrer, 4 parts by weight of 2,2'-azobisisobutyronitrile and 200 parts by weight of propylene glycol monomethyl ether acetate were added, followed by @15 parts by weight of methacrylic acid, 20 Parts by weight of N-phenylmaleimide, 35 parts by weight of benzyl methacrylate, 1 part by weight of styrene, 10 parts by weight of glycerol monomethacrylate, 1 part by weight of ω-carboxypoly Ester monoacrylate and 6 parts by weight of a chain transfer agent as a molecular weight controlling agent, α-methyl benzene ethane dimer, subjected to nitrogen substitution 'and then slowly stirred' while raising the reaction solution to 80 ° C, maintaining the temperature Polymerization for 3 hours. Add 0. 5 parts by weight of 2,2,-azobisisobutyronitrile was repolymerized for 1 hour and then the reaction solution was raised to 10 Torr. (:, the polymerization was continued for 1 hour, thereby obtaining a resin solution (solid content concentration -48 - 200941140 degrees = 33. 0% by weight). The obtained resin had Mw = 7,500, and this resin was referred to as "resin (B_2)". Synthesis Example 3 To a flask equipped with a condenser and a stirrer, nitrogen diisobutyronitrile and 200 parts by weight of propylene glycol monomethyl ether 15 parts by weight of methacrylic acid, 30 parts by weight of decene, benzyl tetradecanoate, and 10 parts by weight of propylene were added. Triol-methacrylate carboxypolycaprolactone monoacrylate and 5 parts by weight as a chain transfer agent-α-methylstyrene dimer, while slowly stirring nitrogen, the reaction solution is heated to 8 (TC, 3 hours. Add 0. When 5 parts by weight of 2,2'-azobisisobutylene was used, the reaction solution was then raised to 100 ° C, and polymerization was continued to the resin solution (solid content concentration = 33. 0% by weight). =11,000, (Mw/Mn) = 2. 2. This resin was used as a synthesis example 4, and a flask equipped with a condenser and a stirrer was added with nitrogen diisobutyronitrile and 200 parts by weight of propylene glycol monomethyl ether 15 parts by weight of methacrylic acid, and 25 parts by weight of N-phenyl by weight of methyl group. Benzyl acrylate, 15 parts by weight of styrene alcohol monomethacrylate, 10 parts by weight of ω-carboxypolyacetate, and 5 parts by weight of a chain transfer olefin dimer as a molecular weight controlling agent, undergoing nitrogen substitution' and then slowly stirring the solution to raise the temperature To 80 ° C, maintain the temperature for 3 hours (Mw / Mn) = 2. 1. 3 parts by weight of 2,2'-monoester, followed by addition of parts by weight of methacrylic acid, 5 parts by weight of ω-molecular weight controlling agent, and then polymerizing the nitrile while maintaining the temperature, and further polymerizing for 1 hour and 1 hour, thereby obtaining the obtained product Mw 'resin (B-3)" of the resin. 3 parts by weight of 2,2' acrylate, followed by maleic imine, 25, 10 parts by weight of propylene tricaprolactone-acrylic acid-α-methyl Mix benzene and ethylene, and add the reaction. Add 0. 5 wt-49- 200941140 parts 2,2'-azobisisobutyronitrile'repolymerization for 1 hour, then the reaction solution was raised to 100 ° C 'to continue polymerization for 1 hour' to thereby obtain a resin solution (solid content concentration = 33 . 0% by weight). The obtained resin]\4西=1〇,〇〇〇,(1^/1^11)= 2. 2. This resin was referred to as "resin (B-4)". Synthesis Example 5 To a flask equipped with a condenser and a stirrer, 4 parts by weight of 2,2'-azobisisobutyronitrile and 200 parts by weight of propylene glycol monoethyl ether were added, followed by 15 parts by weight of methacrylic acid and 30 parts by weight of decene. 35 parts by weight of methacrylic acid ester' 20 parts by weight of glycerol monomethacrylate and 6 parts by weight of a chain transfer agent-α-methylstyrene dimer as a molecular weight controlling agent, subjected to nitrogen replacement, and then slowly The reaction solution was heated to 80 ° C while stirring, and the temperature was maintained at this temperature for 3 hours. Add 0. 5 parts by weight of 2,2'-azobisisobutyronitrile was further polymerized for 1 hour, and then the reaction solution was raised to 10 ° C, and polymerization was continued for a few hours, thereby obtaining a resin solution (solid content concentration = 33. 0% by weight). The obtained resin had Mw = 12,000, (Mw/Mn) = 2. 2. This resin was designated as "tree φ grease (B-5)". Synthesis Example 6 In a flask equipped with a condenser and a stirrer, '40 parts by weight of p-vinylbenzyl glycidyl ether and 27 parts by weight of N-phenyl horse The imine, 17 parts by weight of styrene and 16 parts by weight of benzyl methacrylate are dissolved in 300 parts by weight of propylene glycol monomethyl acetate, and then 4 parts by weight of 2,2'-azobisisobutyronitrile are added. And 6 parts by weight of ct-methylstyrene dimer' followed by purging nitrogen for 15 minutes. After purging the nitrogen, the reactor was heated to 80 ° C with stirring for 5 hours, -50-200941140 a resin solution of 25 % by weight of styrene epoxy resin. The Mw of the styrene epoxy resin is 6,000 '(Mw/Mn) = 2. 5. To the flask, 200 parts by weight of the obtained resin solution containing a styrene epoxy resin, 10 parts by weight of methyl methacrylate as the unsaturated monocarboxylic acid (X), and 0. 2 parts by weight of p-methoxyphenol, 0. 2 parts by weight of tetrabutylammonium bromide and 300 parts by weight of propylene glycol monomethyl ether acetate were reacted at a temperature of 120 ° C for 9 hours. Thus, one equivalent of methacrylic acid is reacted with one equivalent of an epoxy group of the styrene epoxy resin. Further, 16 parts by weight of 4-ecyclohexene-1,2-dicarboxylic anhydride as a polybasic acid anhydride (y) was added, and the mixture was reacted at 80 t for 6 hours. The liquid temperature of the reaction mixture was maintained at 80 ° C, and the mixture was washed twice with water in this state, and concentrated under reduced pressure to obtain a resin solution containing 20% by weight of an alkali-soluble resin. The obtained resin had Mw = 7,800, (Mw/Mn) = 2. 6. This resin was referred to as "resin (B-6)". Preparation of Pigment Dispersion Preparation Example 1 φ 15 parts by weight of C as a coloring agent (A). I. Pigment Red 254/C. I. Pigment red 1 77 = 80/20 (by weight) mixture, 4 parts by weight as a dispersing agent (in terms of solid content) Disperbyk-2001, and 6 parts by weight of (B) alkali-soluble resin (in terms of solid content) (B-1) And 75 parts by weight of propylene glycol monomethyl ether acetate as a solvent were treated with a sand mill to prepare a pigment dispersion liquid (r). Preparation Example 2 15 parts by weight of C as a coloring agent (A). I. Pigment Green 36/C. I. Pigment Yellow 138/C. I. Pigment Yellow 1 50 = 50/40/10 (by weight) mixture, 4 parts by weight of Dispersion-51-200941140 (in terms of solid content) Disperbyk-2001, and 5 parts by weight of (B) alkali-soluble resin (solid content In the same manner as in Example 1, 76 parts by weight of propylene glycol monomethyl ether acetate as a solvent was converted to prepare a pigment dispersion liquid (g). Preparation Example 3, 15 parts by weight of C as a coloring agent (A). I. Pigment Blue 15 : 6/C. I. Pigment Violet 23 = 95/5 (by weight) mixture, 4 parts by weight as a dispersant (in terms of solid content), Disperbyk-2001, and (B) 5 parts by weight of alkali-soluble resin (in terms of solid content) (B-2) And 76 parts by weight of propylene glycol monomethyl ether acetate as a solvent, the same treatment as in Example 1 was carried out to prepare a pigment dispersion liquid (b) 〇 Preparation Example 4 20 parts by weight of carbon black as (A) coloring agent 2 parts by weight of the dispersant (in terms of solid content) Disperbyk-2001, 4 parts by weight of (B) alkali-soluble resin (in terms of solids) (B-3) and as a solvent 74 parts by weight of 3-methoxybutyl acetate was subjected to the same treatment as in Example 1 to prepare a pigment dispersion (bk1). Preparation Example 5 20 parts by weight of carbon black (manufactured by Royal Chinese Co., Ltd.) as a coloring agent (A), 2 parts by weight (in terms of solid content) Disperbyk-167 as a dispersing agent, and (B) an alkali-soluble resin 3 parts by weight (in terms of solid content) (B-3) and 75 parts by weight of 3-methoxybutylacetic acid vinegar as a solvent were subjected to the same treatment as in Example 1 to prepare a pigment dispersion liquid (bk2). -52-200941140 Example 1 Preparation of a liquid composition 100 parts by weight of a pigment dispersion liquid (as a (B) alkali-soluble resin (6 parts by weight (solid content conversion) resin (B-4)) as (c 8 parts by weight of difunctional pentaerythritol hexaacrylate, 3 parts by weight of 2-hydroxy-2-meryl-2-dimethylamino-1-(4-) Phenyl)butan-1-one (trade name: IRGACURE 369, prepared by Ciba Specialty Chemicals), as component (E). 5 parts by weight of 4,4'-[1-[4-[1-[4-hydroxyphenyl]-1-methylethyl]phenyl]indenyl]bisphenol and 150 parts by weight as a solvent A liquid composition (R1) for forming a colored layer was prepared by mixing 3 - ethoxypropionic acid ethyl vinegar and 25 parts by weight of propylene glycol monomethyl ether acetate. The liquid composition (R1) was evaluated in the following order. Evaluation results See Table 2 ^ Formation of the pattern The liquid composition Q (R1) was applied onto the surface of the glass substrate by a spin coater, and then prebaked at 90 ° C for 2 minutes to form a film thickness of 2. 5 Am film. Thereafter, the substrate was cooled to room temperature, and the coating film on the substrate was exposed through a mask with an exposure gap of 200 #111 and an exposure amount of 1,000 Å/1112 using a high pressure mercury lamp. Then, the coating film on the substrate was sprayed at a temperature of 23 ° C at a developing pressure of 2 kg f/cm 2 (nozzle diameter of 1 mm). A 04% by weight aqueous solution of potassium hydroxide was spray-developed for 50 seconds' and then post-baked at 230 ° C for 30 minutes to form a pixel array in which a red line/space (L/S) pattern was arranged on the substrate. Evaluation -53- 200941140 When the pixel array on the substrate was observed using an optical microscope, no defect was confirmed at the edge of the pixel pattern. Further, when the cross section of the pixel pattern on the substrate was observed by a scanning electron microscope (SEM), the undercut was not confirmed. When the line width of the pixel pattern formed by the mask having a slit width of 90 Å was measured by an optical microscope, the line width was 93. 0 A m. Example 2 -1 7 and Comparative Example 1 - 6 The same operation as in Example 1 was carried out except that the type and amount of the constituent components in Example 1 were changed as shown in Table 2 to prepare a liquid composition ( R2)-(R3), (G1)-(G3), (B1)-(B3), and (BK1)-(BK14). Then, in addition to using the liquid compositions (R2)-(R3), (G1)-(G3), (B1)-(B3), (BK1)-(BK14) instead of the liquid composition (R1), The same operation as in Example 1 was carried out, and evaluation was performed. The results are shown in Table 2.
-54- 200941140 【I揪】 溶劑 1 ϋ ίβ 150/25 150/25 1 125/50 1 125/50 150/25 150/25 125/50 1 125/50 125/50 125/50 1 125/50 I 125/50 125/50 1 125/50 1 125/50 125/50 1 125/50 150/25 125/50 150/25 1 125/50 1 125/50 1 125/50 I 1 m EEP/PGMEAI EEP/PGMEA MBA/PGMEA! MBA/PGMEA EEP/PGMEA lS S a. 、 S MBA/PGMEA MBA/PGMEA MBA/PGMEA MBA/PGMEA MBA/PGMEA MBA/PGMEA MBA/PGMEA MBA/PGMEA S5 1 % m MBA/PGMEA MBA/PGMEA EEP/PGMEA MBA/PGMEA EEP/PGMEA MBA/PGMEA 添加劑 重貴份1 1 \ 5 s LT3 c=5 LO s s s s s tA in ΪΤ» S 1 5 s IA s 0.5/0.08 膝 郷 1 1 丄 I CM 丄 oi lL CM 丄 CM 丄 eJ 丄 C4 丄 04 丄 OJ LI. CM 丄 Csl 丄 CM 丄 CM iL CJ LL·. 1 I OJ Ul. CM JL CSJ JL F-2/F-3 E成分1 a ut> ur» —1 if» ixn 5 I I cx> 苕 3 蠢 s OP 〇e> i » 1 I 1 1 1 驟 郷 τ—· 山 Σ 山 Σ t— 山 r— ill Lli Σ r— 山 I Σ Csl 山 I 山 io 山 1 t 1 1 1 1 光聚合引發劑1 tft份 CO : c〇 : CO _| 二 <〇 Ώ esi s 9X9 Osi s ur> CN* _J &r> cnI s tr> 〇j CO 1 CO CO c*> s 3 駿 35l P X- τ— A ϊ τ— A CJ —1 Csl CO Λ CO Λ CO A CO ό CO Λ CQ Λ CO Q CO Λ CO CO 1 O 3 丄1 CSI Λ CO Λ CO Λ oo Λ S S 雜 如1 簠*份.L οο ΟΟ 〇〇 e〇 cr> <〇 CO <〇 CO CO <〇 «〇 CO eo GO丨 <〇 CO 1 P Τ Ο Λ τ— ο C-1 ▼— Λ ώ Λ C-1/C-2 ▼— 1 o T— Λ l t— Λ T— 〇 ▼— Λ 1 Λ T— Λ 驗可溶性樹脂 1 i CO CO r— r«— C〇 <〇 L〇 ir> CO CO CO CO eo CO CO CO CO CO r— CO ΙΑ CO CO | P LO 寸 CD to 丄 CD m to CD <〇 03 tr> CD u> CD CO Λ U> CD to 03 iO cL u> 占 U> 占 LO 甘 寸 丄 ΙΟ 尘 LO ώ tr> mm-wm 1 霞量份 S — S η s s s s s s S s Q s s S B O i s 1 s s 3 1 1 — s '««MJ 膝 35« W tkfl -° 1 Oj OJ oa S ou txO -O Csl § rnmtm 鯽 矮 mm 1 CNI 5 : CD B 1 CM 〇〇 i CM CO CD i ir> CQ CO m £ m GO 釜 σ> ax I BK10 3 CO _ CO ss IBK12 IBK13 I BK14 1實施例ιy 1實施例2 1 |實施例3 1 |K施例4 { |實施例5 I |實施例6 | |實施例7 | |實施例8 畔例9 _例10 |«施例11 fl I |實施例13 i 提 K. |實施例15 1實施例16 |實施例π |比難i |比較例2 1比較例3 |比較例4 |比較例5 t比較例6 -55- 200941140 表1中,各成分如下。 C-1:二季戊四醇六丙烯酸酯 C-2 :三(2-羥基乙基)異氰尿酸三丙烯酸酯(商品名 M-315、東亞合成株式會社製備) D-1 : 2-苄基-2-二甲基胺基-1-(4-嗎啉代苯基)丁 -1-酮 (商品名IRGACURE 369、汽巴精化社製備) D-2: 2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉代丙-1-酮(商 品名IRGACURE 907、汽巴精化社製備) 〇 D-3: 1-[9 -乙基-6·(2-甲基苯甲醯基)-9H-咔唑-3- 基]-l·(O-乙醯基)乙酮肟(商品名IRGACUREOX02、汽巴精 化社製備) Ε-1:4,4’ -Π-[4-[1-[4-羥基苯基]-1-甲基乙基]苯基]亞 乙基]雙酚 Ε-2 : 2,3,4-三羥基二苯甲酮 Ε-3 : 2,3,4,4’-四羥基二苯甲酮 Ε-4: 2-甲基-2-(2,4-二羥基苯基)-4-(4-羥基苯基)-7-羥 β 基色滿 Ε-5 : 2,3,4,2’,6、五羥基二苯甲酮 F-1 :丙二酸 F-2 :非離子系界面活性劑(商品名Α-60、花王(股)社 製備) F-3 :聚合抑制劑吩噻嗪 ΕΕΡ : 3-乙氧基丙酸乙酯 PGMEA :丙二醇一甲醚乙酸酯 MBA : 3-甲氧基丁基乙酸酯 -56- 200941140-54- 200941140 [I揪] Solvent 1 ϋ ίβ 150/25 150/25 1 125/50 1 125/50 150/25 150/25 125/50 1 125/50 125/50 125/50 1 125/50 I 125/50 125/50 1 125/50 1 125/50 125/50 1 125/50 150/25 125/50 150/25 1 125/50 1 125/50 1 125/50 I 1 m EEP/PGMEAI EEP/ GM/PGMEA MBA/PGMEA EEP/PGMEA lS S a. PGMEA EEP/PGMEA MBA/PGMEA EEP/PGMEA MBA/PGMEA Additives 1 1 \ 5 s LT3 c=5 LO sssss tA in ΪΤ» S 1 5 s IA s 0.5/0.08 knees 1 1 丄I CM 丄oi lL CM 丄CM 丄eJ 丄C4 丄04 丄OJ LI. CM 丄Csl 丄CM 丄CM iL CJ LL·. 1 I OJ Ul. CM JL CSJ JL F-2/F-3 E component 1 a ut> ur» —1 if» ixn 5 II cx> 苕3 stupid s OP 〇e> i » 1 I 1 1 1 郷 τ —· 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山Io mountain 1 t 1 1 1 1 photopolymerization initiator 1 tft part CO : c〇: CO _| two <〇Ώ esi s 9X9 Osi s ur> CN* _J &r> cnI s tr> 〇j CO 1 CO CO c*> s 3 Jun 35l P X- τ— A ϊ τ— A CJ —1 Csl CO Λ CO Λ CO A CO ό CO Λ CQ Λ CO Q CO Λ CO CO 1 O 3 丄1 CSI Λ CO Λ CO Λ oo Λ SS Miscellaneous 1 簠 * share. L οο ΟΟ 〇〇e〇cr><〇CO<〇CO CO <〇«〇CO eo GO丨<〇CO 1 P Τ Ο τ τ— ο C-1 ▼— Λ ώ Λ C-1/C-2 ▼— 1 o T— Λ lt— Λ T— 〇▼— Λ 1 Λ T— 可溶性 Solubility Solvent 1 i CO CO r— r «—C〇<〇L〇ir> CO CO CO CO eo CO CO CO CO CO r — CO ΙΑ CO CO | P LO inch CD to 丄CD m to CD <〇03 tr> CD u> CD CO Λ U> CD to 03 iO cL u> occupies U> occupies LO 甘 dust LO ώ tr> mm-wm 1 霞量份 S — S η ssssss S s Q ss SBO is 1 ss 3 1 1 — s '« «MJ knee 35« W tkfl -° 1 Oj OJ oa S ou txO -O Csl § rnmtm 鲫 dwarf mm 1 CNI 5 : CD B 1 CM 〇〇i CM CO CD i ir> CQ CO m £ m GO σ gt Ax I BK10 3 CO _ CO ss IBK12 IBK13 I BK14 1 embodiment ιy 1 embodiment 2 1 | example 3 1 | K example 4 { Example 5 I | Example 6 | | Example 7 | | Example 8 Example 9 - Example 10 | «Example 11 fl I | Example 13 i K. | Example 15 1 Example 16 | Example π | Ratio i i | Comparative Example 2 1 Comparative Example 3 | Comparative Example 4 | Comparative Example 5 t Comparative Example 6 - 55 - 200941140 In Table 1, the respective components are as follows. C-1: dipentaerythritol hexaacrylate C-2: tris(2-hydroxyethyl)isocyanuric acid triacrylate (trade name M-315, manufactured by Toagosei Co., Ltd.) D-1 : 2-benzyl-2 -Dimethylamino-1-(4-morpholinophenyl)butan-1-one (trade name: IRGACURE 369, prepared by Ciba Specialty Chemicals) D-2: 2-methyl-1-[4- (Methylthio)phenyl]-2-morpholinopropan-1-one (trade name: IRGACURE 907, prepared by Ciba Specialty Chemicals) 〇D-3: 1-[9-ethyl-6·(2- Methyl benzhydryl)-9H-carbazol-3-yl]-l·(O-ethinyl)ethanone oxime (trade name: IRGACUREOX02, prepared by Ciba Specialty Chemicals) Ε-1:4,4' -Π-[4-[1-[4-Hydroxyphenyl]-1-methylethyl]phenyl]ethylidene]bisphenolphthalein-2 : 2,3,4-trihydroxybenzophenone oxime -3 : 2,3,4,4'-tetrahydroxybenzophenone oxime-4: 2-methyl-2-(2,4-dihydroxyphenyl)-4-(4-hydroxyphenyl)- 7-Hydroxyβ base color Ε-5 : 2,3,4,2',6,pentahydroxybenzophenone F-1 :malonic acid F-2 :nonionic surfactant (trade name Α-60 , Kao (stock) prepared) F-3: polymerization inhibitor phenothiazine oxime: 3-ethoxypropionate ethyl ester PGMEA: propylene glycol monomethyl ether acetate MBA : 3-methoxybutyl acetate -56- 200941140
【cslm】 所形成的圖案的線寬(μιη) 1 狹縫寬爲ΙΟμπι的光罩 | 1 1 1 1 i 1 LO <〇 ip oo csi C\J CSI CO 丨圖案脫落 1 s 〇> 〇> 5 ΙΟ 亡 1 1 I ur> oo CO ffl案脫落 | 狹縫寬爲3〇nm的光罩 1 服 1 I i 1 CO esi CO oo 〇> CM S CO to CO CNI CNJ n CM CO CA CM GO 1 1 1 <£> CO 5 CO ie> <〇 CM 麵寬爲90邮的光罩 〇 CO cx> CO A ir> CsJ CO m 〇> CO CO 1 f 1 i 1 1 1 1 1 1 1 s 〇> CSI 窆 CNI 〇> 1 1 1 圖案的狀態 缺損 m 壊 m m m m 璀 摧 摧 m 摧 m m m m m m m 繼 m 摧 底切 m 壤 m .壞 摧 m m 塘 m m m m m m 壤 摧 m m 智 液體 組成物 04 τ- Ο C3 m 04 CQ BK1 I BK2 I BK3 j I BK4 1 1 BK5 1 I BK6 | L BK7 I I 6K8 I BK9 I 1 BK10 I 1 BK11 i CO oc CO e> CO CQ 丨 BK12 I I BK13 I BK14 |實施例1 I 1實施例2 1 |實施例3 1 1賁施例4 I [實施例5 I |實施例6 1 |實施例7 |實施例8 I 1賁施例9 I [實施例10 |寘施例11 1 實施例12 |實施例i3 I |實施例14 I |實施例15 I»施例16 |實施例17 I |比較例i |比較例2 |比較例3 |比較例4 I比較例5 I比較例6 -57- 200941140 產業實用性 本發明的含有(E)成分的感放射線性組成物’即使在感 放射線性組成物中所含的著色劑的含量高時’與基板的密 合性也優異,可以形成具有高精細且優異的圖案形狀、且 在接近式曝光中圖案線寬也不會變寬的畫素和黑色矩陣。 因此,本發明的感放射線性組成物非常適用於製作電 子工業領域中以彩色液晶顯示裝置用彩色濾光片或固體攝 像元件的分色用彩色濾光片爲代表的各種彩色濾光片。 【圖式簡單說明】 無。 【主要元件符號說明】 4πτ 無。[cslm] Line width of the formed pattern (μιη) 1 Mask with a slit width of ΙΟμπι | 1 1 1 1 i 1 LO <〇ip oo csi C\J CSI CO 丨 Pattern shedding 1 s 〇> 〇 > 5 ΙΟ1 1 I ur> oo CO ffl case shed | Shield 1 with a slit width of 3 〇 nm 1 I i 1 CO esi CO oo 〇> CM S CO to CO CNI CNJ n CM CO CA CM GO 1 1 1 <£> CO 5 CO ie><〇CM mask with a face width of 90 〇CO cx> CO A ir> CsJ CO m 〇> CO CO 1 f 1 i 1 1 1 1 1 1 1 s 〇> CSI 窆CNI 〇> 1 1 1 State of the pattern defect m 壊mmmm 璀 destroy m destroy mmmmmmm follow m 破 bottom cut m soil m. bad destroy mm pond mmmmmm soil destroy mm wise liquid composition 04 τ- Ο C3 m 04 CQ BK1 I BK2 I BK3 j I BK4 1 1 BK5 1 I BK6 | L BK7 II 6K8 I BK9 I 1 BK10 I 1 BK11 i CO oc CO e> CO CQ 丨BK12 II BK13 I BK14 |Example 1 I 1 Example 2 1 |Example 3 1 1贲Example 4 I [Example 5 I | Example 6 1 | Example 7 | Example 8 I 1 贲 Example 9 I [Example 10 |Example 11 1 Example 12 | Example i3 I | Example 14 I | Example 15 I»Example 16 |Example 17 I |Comparative Example i |Comparative Example 2 |Comparative Example 3 |Comparative Example 4 IComparative Example 5 IComparative Example 6 -57- 200941140 Industrial Applicability The content of the present invention (E The radiation sensitive composition of the component 'is excellent in adhesion to the substrate even when the content of the coloring agent contained in the radiation sensitive composition is high, and can be formed with a high-definition and excellent pattern shape, and is close to In the exposure, the pattern line width does not widen the pixels and the black matrix. Therefore, the radiation sensitive composition of the present invention is very suitable for use in the production of various color filters typified by color filters for color liquid crystal display devices or color separation elements for solid-state imaging devices in the field of electronics. [Simple description of the diagram] None. [Main component symbol description] 4πτ None.
-58--58-
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JP2013041156A (en) * | 2011-08-17 | 2013-02-28 | Mitsubishi Chemicals Corp | Colored resin composition, color filter, liquid crystal display device, and organic el display device |
JP5778568B2 (en) * | 2011-12-16 | 2015-09-16 | 東京応化工業株式会社 | Chemical amplification type positive photoresist composition for thick film, thick film photoresist laminate, method for producing thick film photoresist pattern, and method for producing connection terminal |
WO2015053183A1 (en) * | 2013-10-11 | 2015-04-16 | 富士フイルム株式会社 | Light-sensitive composition, dispersion composition, method for manufacturing color filter using same, color filter, and solid-state imaging element |
JP6520091B2 (en) | 2013-12-16 | 2019-05-29 | Jsr株式会社 | Colored composition, colored cured film and display device |
JP6847580B2 (en) * | 2016-02-09 | 2021-03-24 | 東京応化工業株式会社 | A photosensitive resin composition for a black column spacer, a black column spacer, a display device, and a method for forming the black column spacer. |
JP6689434B1 (en) * | 2019-02-06 | 2020-04-28 | 昭和電工株式会社 | Photosensitive resin composition, organic EL element partition wall, and organic EL element |
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JP2000214580A (en) * | 1999-01-26 | 2000-08-04 | Mitsubishi Chemicals Corp | Photopolymerizable composition for color filter and color filter |
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TWI314943B (en) * | 2002-08-29 | 2009-09-21 | Radiation-sensitive resin composition | |
JP2004264747A (en) * | 2003-03-04 | 2004-09-24 | Fuji Photo Film Co Ltd | Photosensitive lithographic printing plate |
JP4393258B2 (en) * | 2003-08-29 | 2010-01-06 | 富士フイルム株式会社 | Image recording material and planographic printing plate |
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JP4483769B2 (en) * | 2004-11-11 | 2010-06-16 | 三菱化学株式会社 | Color material dispersion, colored resin composition, color filter, and liquid crystal display device |
JP2006195425A (en) * | 2004-12-15 | 2006-07-27 | Jsr Corp | Radiation sensitive composition for forming colored layer, color filter and color liquid crystal display panel |
JP2006251562A (en) * | 2005-03-11 | 2006-09-21 | Fuji Photo Film Co Ltd | Pattern forming material, pattern forming apparatus and pattern forming method |
JP4661384B2 (en) * | 2005-06-16 | 2011-03-30 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer and color filter |
JP4685664B2 (en) * | 2005-11-25 | 2011-05-18 | 三菱製紙株式会社 | Photosensitive lithographic printing plate material |
JP2007256445A (en) * | 2006-03-22 | 2007-10-04 | Mitsubishi Paper Mills Ltd | Photopolymerizable composition and photosensitive lithographic printing plate material |
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JP4706559B2 (en) * | 2006-05-29 | 2011-06-22 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
JP4752649B2 (en) * | 2006-07-12 | 2011-08-17 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
TWI437366B (en) * | 2007-09-26 | 2014-05-11 | Fujifilm Corp | Color photosensitive composition for solid-state imaging device, color filter for solid-state imaging device and fabricating method thereof |
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