200940966 六、發明說明： 【發明所屬之技術領域】 本發明係關於用來檢測從準分子燈等的紫外線光源放 射出的紫外光之光感測器。 【先前技術】 現在’例如在液晶顯示面板的玻璃基板之紫外線照射 〇 洗淨製程等，所使用的紫外線照射裝置，係具備可放射波 長2 OOnm以下的真空紫外光之準分子燈。 使用第4圖來說明這種紫外線照射裝置。 紫外線照射裝置1〇，係具備光取出窗11、本體外殼 12、金屬塊體13，在本體外殼12的內部配置準分子燈1 〇 光取出窗11是一種光穿透構件，可讓準分子燈1所 放射的紫外光穿透，例如是由合成石英玻璃所構成。本體 ❹ 外殻12是由不鏽鋼製成，在一方的側壁形成氣體導入口 12a，在另一方的側壁形成氣體排出口 i2b。 從該氣體導入口 12a導入氮氣等的非活性氣體，從該 氣體排出口 1 2b將非活性氣體和殘存的氧氣一起排出。 符號16代表用來冷卻金屬塊體13之水冷管路。 金屬塊體13形成有溝槽部，準分子燈1的一半是嵌 合在各溝槽部。在金屬塊體13，形成有面對各個準分子燈 1的貫穿孔，在金屬塊體13上方之面對貫穿孔的位置組裝 光感測器1 5，藉由該光感測器1 5來檢測來自準分子燈1 -4- 200940966 的放射光（參照專利文獻1 )。 例如’在使用這種紫外線照射裝置之液 玻璃基板之乾式洗淨製程，通常，利用帶式 當的搬運手段來搬運被處理物（液晶用玻璃 導入紫外線照射裝置之光照射區域，並藉由 光來進行洗淨。 在這種紫外線照射裝置，爲了進行高可 〇 照射處理，必須確認準分子燈的點燈狀態是 狀態’例如是否以充分強度來照射紫外光的 要放射的光線是紫外光，故無法藉由目視來 燈的點燈狀態。 因此，爲了確認準分子燈的點燈狀態， 準分子燈所放射出的紫外線之光感測器，來 的點燈狀態的方法是已知的（參照專利文獻 第5圖係光感測器的說明圖。 Φ 光感測器15，是在配置著紫外光檢測器 檢測紫外光的半導體感測器所構成）的金屬: 披覆金屬帽蓋153，在該金屬帽蓋153形成 的貫穿孔，在該貫穿孔黏著讓紫外光穿透的 154。金屬帽蓋153和金屬基板152是利用 的手段來接合。 另外，若在金屬帽蓋1 5 3內的密閉空間 在，氧氣會吸收紫外光而使紫外光無法到達 151，因此須在金屬帽蓋153內封入氮氣等 晶顯示面板的 輸送機等的適 基板）而將其 連續照射紫外 靠性的紫外光 否處於正確的 狀態。由於主 確認該準分子 藉由用來檢測 測定準分子燈 2 )。 151 (由用來 S板1 5 2上， 讓紫外光通過 玻璃製的窗材 熔接或焊材等 內有氧氣的存 紫外光檢測器 的非活性氣體 -5- 200940966 另外，穿透窗材154的紫外光會照射金屬帽蓋153內 ’並到達紫外光檢測器1 5 1而進行紫外光的檢測。 如第4圖所示，這種光感測器15，是透過金屬塊體 1 3的貫穿孔來讓準分子燈所放射出的紫外光到達光感測器 15前方的窗材154，窗材154和金屬塊體13的貫穿孔之 間’成爲與本體外殼12內部連通的空間，且是形成不會 φ 吸收紫外光的非活性氣體氣氛。穿透窗材154的紫外光在 紫外光檢測器1 52進行檢測，以測定準分子燈的點燈狀態 〇 〔專利文獻1〕日本特開2004-221490號公報 〔專利文獻2〕日本特開2004-0371 74號公報 【發明內容】 在第5圖所示的光感測器15，是在密閉的金屬帽蓋 ® 153內封入非活性氣體，通常，爲了製造出該光感測器15 ，是將配置有紫外光檢測器151的金屬基板152和黏著有 窗材154之金屬帽蓋153兩者配置於非活性氣體氣氛中的 組裝空間，在此狀態下，將金屬帽蓋153之與金屬基板 152接觸的部分施以加熱熔融而形成密閉構造。 然而，依據這種製造方法所組裝成的光感測器15，在 組裝過程中，若在非活性氣體氣氛中混入微量的氧氣，該 氧氣就會被封入密閉的金屬帽蓋153。 結果，由於在密閉的金屬帽蓋153內有氧氣的存在， -6 - 200940966 穿透窗材154後的紫外光的一部分會被氧氣所吸收，而無 法到達紫外光檢測器1 5 1，如此會發生無法正確測定紫外 光的問題。 再者，由於紫外光的一部分被氧氣所吸收，會在金屬 帽蓋153發生臭氧’該臭氧會導致紫外光檢測器23劣化 ，而變得無法正確地測定紫外光。 苒者’金屬帽蓋153是位於紫外光照射的方向上，因 e 此容易接受紫外線照射裝置內的準分子燈的熱量，會將金 屬帽蓋153加熱而產生膨脹，又在準分子燈熄燈後金屬帽 蓋153的溫度會下降而產生收縮，隨著膨脹、收縮的反覆 進行，金屬帽蓋153和金屬基板152的接合部位會發生破 壞，金屬帽蓋1 5 3內的非活性氣體會流出而流到大氣中。 結果，氧氣會流入金屬帽蓋153，穿透窗材154的紫 外光的一部分會被氧氣吸收，而無法到達紫外光檢測器 151，或是在金屬帽蓋153內產生臭氧，該臭氧會導致紫 ® 外光檢測器23劣化，而變得無法正確測定紫外光。 再者，如第4圖所示，光感測器15和用來處理被處 理物之本體外殻12的內部空間，是透過金屬塊體13的貫 穿孔來連結，在進行被處理物的處理時產生的污染物質飛 散出時，可能會污染光感測器1 5的窗材1 5 4。 即使窗材154受到污染，由於窗材154是黏著在金屬 帽蓋153上，故無法單獨更換窗材154’使用受污染的窗 材154會減少紫外光的穿透率，而變得無法正確地測定紫 外光。 200940966 本發明是爲了解決上述問題而開發完成者，其目的是 提供一種光感測器，可將配置有紫外光檢測器的外殼內的 氧氣確實除去，以防止臭氧產生並藉由紫外光檢測器來正 確地測定紫外光，而能正確地測定準分子燈等的紫外線光 源的點燈狀態。 另外是提供一種光感測器，在讓紫外光穿透的窗材受 到污染的情況，可簡單地單獨更換窗材，而始終能正確地 f) 進行紫外光的測定。 請求項1記載的光感測器，係藉由配置於殼體內的紫 外光檢測器來檢測紫外光的光感測器，其特徵在於：前述 殼體係包含：在內部配置用來檢測紫外光的紫外光檢測器 且具有讓紫外光通過的貫穿孔之第1殼體、具有讓紫外光 通過的貫穿孔之第2殼體；前述第1殼體和第2殼體是設 置成各殻體的貫穿孔互相重疊，在前述第1殼體和前述第 2殼體之間且在與各殼體的貫穿孔相對向的位置配置讓紫 Ο 外光穿透的窗材，在前述窗材和前述第1殼體之間配置密 封構件，在前述第1殼體內配置脫氧劑。 請求項2記載的光感測器，是在請求項1記載的光感 測器中，在前述窗材和前述第2殻體之間配置密封構件。 請求項3記載的光感測器，是在請求項2記載的光感 測器中，在前述第1殼體內配置水分吸附劑。 請求項4記載的光感測器，係藉由配置於殻體內的紫 外光檢測器來檢測紫外光的光感測器，其特徵在於：前述 殻體係包含：在內部配置用來檢測紫外光的紫外光檢測器 -8 - 200940966 且具有讓紫外光通過的貫穿孔之第1殼體、具有 通過的貫穿孔之第2殼體；前述第1殼體和第2 置成各殼體的貫穿孔互相重疊，在前述第1殼體 2殼體之間且在與各殼體的貫穿孔相對向的位置 外光穿透的窗材，在前述第1殼體和前述第2殻 置密封構件，在前述窗材和前述第2殼體之間配 件，在前述第1殼體內配置脫氧劑。 φ 請求項5記載的光感測器，是在請求項4記 測器中，在前述第1殼體具備：在前述窗材的方 口之第1流通孔和第2流通孔，前述第1流通孔 通孔是和前述第1殼體內的連通孔連通，在前述 配置前述脫氧劑，且前述第1流通孔和第2流通 徑不同。 本發明的光感測器，係具備：在內部配置用 外光的紫外光檢測器且具有讓紫外光通過的貫穿 © 殼體、具有讓紫外光通過的貫穿孔之第2殼體； 和第2殼體是設置成各殻體的貫穿孔互相重疊， 體和第2殼體之間且在與各殼體的貫穿孔相對向 置讓紫外光穿透的窗材，在窗材和第1殼體之間 構件，在第1殼體內配置脫氧劑；依據此構造， 紫外光檢測器之密閉空間內氧氣不會存在，穿透 紫外光不會被氧氣吸收，而能以未衰減的狀態到 檢測器，因此能正確地測定紫外光。再者，在配 光檢測器的密閉空間內不會發生臭氧，因此也能 讓紫外光 殼體是設 和前述第 配置讓紫 體之間配 置密封構 載的光>感 向設有開 和第2流 連通孔內 孔的開口 來檢測紫 孔之第1 第1殼體 在第1殼 的位置配 配置密封 在配置有 窗材後的 達紫外光 置有紫外 防止紫外 -9- 200940966 光檢測器發生劣化。 本發明的光感測器，係具備：在內部配置用來檢測紫 外光的紫外光檢測器且具有讓紫外光通過的貫穿孔之第1 殻體、具有讓紫外光通過的貫穿孔之第2殼體；第1殼體 和第2殼體是設置成各殼體的貫穿孔互相重疊，在第1殼 體和第2殼體之間且在與各殼體的貫穿孔相對向的位置配 置讓紫外光穿透的窗材，在第1殻體和第2殼體之間配置 〇 密封構件，在窗材和第2殼體之間配置密封構件，在第1 殼體內配置脫氧劑；依據此構造，在配置有紫外光檢測器 之密閉空間內氧氣不會存在，穿透窗材後的紫外光不會被 氧氣吸收，而能以未衰減的狀態到達紫外光檢測器，因此 能正確地測定紫外光。再者，在配置有紫外光檢測器的密 閉空間內不會發生臭氧，因此也能防止紫外光檢測器發生 劣化。 本發明的光感測器，是在窗材和第1殼體之間配置密 〇 封構件，又在窗材和第2殼體之間配置其他的密封構件， 即使第2殼體反覆進行膨脹收縮，該膨脹收縮的應力也會 由配置在窗材和第2殼體間的密封構件及配置在窗材和第 1殼體間的密封構件雙方所吸收，而能將由第1殼體和窗 材區劃出的第1殼體內的密閉空間始終保持密閉狀能，而 避免外氣進行密閉空間內，因此能始終正確地藉由紫外光 檢測器來檢測紫外光。 在第1殼體具備：在窗材的方向設有開口之第1流通 孔和第2流通孔，第1流通孔和第2流通孔是和第1殻體 -10- 200940966 內的連通孔連通’在連通孔內配置脫氧劑，且第1流通孔 和第2流通孔的開口徑不同。依據此構造，窗材被加熱時 ’會產生通過第1流通孔和第2流通孔和連通孔的對流， 該對流會通過脫氧劑而能確實地將氧氣除去。 再者’由於在第1殼體內配置水分吸附劑，即使在光 感測器的組裝過程有水分侵入密閉空間內，仍能確實地用 水分吸附劑來吸附該水分，而防止水分所造成之紫外光檢 φ 測器的劣化。 【實施方式】 以下說明本發明的光感測器。 第1圖係本發明的光感測器的截面圖。 光感測器A係具備：不會因紫外光而產生劣化之金屬 製的第1殼體21和第2殻體22。 第1殼體21係具備：大徑圓盤狀的基板部211、豎設 ® 於該基板部211且在內部具有空間之筒部212(比基板部 2 1 1更小徑）；在筒部2 1 2之與基板部的相反側，形成朝 基板部211的中心方向延伸的前方緣部213，在比該前方 緣部213更接近基板211的中心方向，形成讓紫外光通過 的貫穿孔214，在筒部212的內部的底部’配置用來檢測 紫外光之半導體感測器所構成的紫外光檢測器23。 第2殻體22係具備：在內部具有空間的圓筒狀的基 體部221，形成於該基體部221的底部222 ;在底部222 的中心形成讓紫外光通過的貫穿孔223。 -11 - 200940966 第1殼體21之豎設的筒部212,是插入第2殼 之基體部221的內部，且是配置成第1殼體21的J 2 14和第2殼體22的貫穿孔223互相重疊。 在第1殼體21和第2殼體22之間，在與各殼體 22的貫穿孔214、223相對向的位置配置讓紫外光穿 窗材3 ^ 該窗材3是由石英玻璃製的。 〇 在窗材3和第1殼體21的前方緣部213之間， 作爲密封構件之可彈性變形的Ο形環41，藉由該〇 41將窗材3和第1殼體21予以密封，藉由第1殼體 窗材3使第1殻體21內成爲密閉空間，並在該密K 內配置脫氧劑5。 脫氧劑5，係設置於第1殼體21的前方緣部213 部空間側的壁面。 該脫氧劑5可分成：利用金屬的氧化作用來吸收 ® 之不可逆反應的構造，例如爲鈦、鐵、錳等；以及讓 子進入附著於微細氣泡之可逆反應的構造，例如二氧 、活性碳等。 在窗材3和第2殼體22的底部222之間，配置 密封構件之可彈性變形的Ο形環42，藉由該0形環 窗材3和第2殼體22予以密封。 另外，是藉由適當的手段（未圖示），將第1殼 和第2殼體22擠壓，使配置在各殼體21、22和窗材 間的〇形環4 1、42變形而形成密合狀態。 體22 〔穿孔 21、 〖透的 配置 形環 2 1和 丨空間 的內 :氧氣 氧分 化矽 作爲 42將 體21 3之 -12- 200940966 該光感測器A，即使是在組裝過程中在藉由第1殼體 21和窗材3所區劃出的第1殻體21內有氧氣的存在，利 用脫氧劑5能將該氧氣迅速地除去，因此在光感測器A的 密閉空間中不會有氧氣的存在。 依據該光感測器A，若從準分子燈放射出紫外光，該 紫外光會通過第2殼體22的貫穿孔22 3再穿透窗材3，接 著通過第1殼體21的貫穿孔214而照射由第1殼體21和 φ 窗材3所區劃出的第1殼體21內的密閉空間，然後到達 紫外光檢測器23而進行紫外光的檢測。 這時，在由第1殻體21和窗材3所區劃出的第1殻 體2 1內的密閉空間，可利用脫氧劑5來確實地將氧氣除 去，因此穿透窗材3後的紫外光不會被氧氣吸收，而以未 衰減的狀態到達紫外光檢測器23，故能正確地測定紫外光 。再者，在密閉空間內不會發生臭氧，故能防止紫外光檢 測器23的劣化，而能正確地測定紫外光。 〇 再者，第2殻體22，是位於紫外光照射的方向上，容 易接收紫外線照射裝置內的準分子燈的熱量，會將第2殻 體22加熱而產生膨脹，又在熄燈後第2殼體22的溫度下 降而產生收縮，且會反覆進行膨脹收縮，但該膨脹收縮的 應力能由配置於第2殼體22和窗材3間的0形環42來吸 收，又由於在窗材3和第1殼體21之間配置有Ο形環41 ，即使第2殼體22的膨脹收縮應力透過Ο形環42而傳遞 到窗材3，所傳遞的應力仍會由0形環41的吸收，因此 能使由第1殼體21和窗材3所區劃出的第1殼體21內的 -13- 200940966 密閉空間始終保持密閉狀態，而防止外氣進行密閉空間內 ，因此可始終正確地藉由紫外光檢測器23進行紫外光的 檢測。 再者，窗材3是透過Ο形環41、42而被挾持在第1 殼體21和第2殼體22之間，即使窗材3受到進行被處理 物的處理時產生的污染物質之污染，很簡單地就能單獨更 換窗材3，而能始終正確地測定紫外光。 φ 在第1圖，雖是在窗材3和第2殼體22之間配置Ο 形環42，但移除該Ο形環42，而用第2殼體22的底部 2 22，直接將窗材3朝第1殼體21的筒部212的方向推壓 亦可。 在此構造也是，能使由第1殼體21和窗材3所區劃 出的第1殻體21內成爲密閉空間，並利用配置於密閉空 間內的脫氧劑5來確實地將氧氣除去，因此穿透窗材3後 的紫外光不會被氧氣吸收，而以未衰減的狀態到達紫外光 Ο 檢測器2 3，故能正確地測定紫外光。再者，在密閉空間內 不會發生臭氧，故能防止紫外光檢測器23的劣化，而能 正確地測定紫外光。 另外，藉由第1殻體21和窗材3使第1殻體21內成 爲密閉空間，而在該密閉空間配置水分吸附劑6亦可。 水分吸附劑6是設置於第1殼體21的前方緣部213 的內部空間側的壁面。 作爲該水分吸附劑6是包括：氯化鈣、生石灰、天然 沸石、矽膠A型、矽膠B型、矽膠藍等。 -14- 200940966 如此般’藉由在密閉空間內配置水分吸附劑6，即使 是在光感測器的組裝過程中有水分侵入密閉空間內，仍可 確實地將該水分利用水分吸附劑6予以吸附，而防止水分 所造成之紫外光檢測器23的劣化。 第2圖係顯示光感測器的其他實施例。光感測器B， 是在窗材3和第2殼體22的底部222之間，配置作爲密 封構件之金屬墊45，藉由該金屬墊45將窗材3和第2殼 φ 體22予以密封。 在第1殻體21的前方緣部213形成凹部，在該凹部 配置〇形環41，藉由0形環41將窗材3和第1殼體21 予以密封。 在第1殼體21的基板部211形成凹部’在該凹部配 置0形環43，藉由該〇形環43將第1殼體21和第2殼 體22予以密封。 藉由在第1殼體21的筒部212和第2殻體22的基體 〇 部2 2 1之間形成充裕的空間，即使第2殼體2 2被加熱成 高溫，其熱量很難傳導至第1殼體21 ’而能抑制設置於第 1殼體21之紫外光檢測器23的溫度上昇’因此可防止紫 外光檢測器23之熱劣化。 作爲更確實地防止紫外光檢測器23發生熱劣化的手 段’可在第1殻體21的基板部211的上方設置冷卻手段 〇 具體而言，爲了進行空氣冷卻而在基板部211設置散 熱片，或是讓冷卻塊（冷卻水循環於其內部）接觸基板部 -15- 200940966 21 1，或是將帕耳帕（peitier )元件安裝於基板部21 1。 又在第2圖也是，將窗材3和第2殼體22間的作爲 密封構件的金屬墊45移除，而用第2殼體22的底部222 ’直接將窗材3朝第1殼體21的筒部212的方向推壓亦 可。 在此構造也是，能使由第1殻體21和窗材3所區劃 出的第1殼體21內成爲密閉空間，並利用配置於密閉空 φ 間內的脫氧劑5來確實地將氧氣除去，因此穿透窗材3後 的紫外光不會被氧氣吸收，而以未衰減的狀態到達紫外光 檢測器2 3 ’故能正確地測定紫外光。再者，在密閉空間內 不會發生臭氧’故能防止紫外光檢測器23的劣化，而能 正確地測定紫外光。 第3圖係顯示光感測器的其他實施例。光感測器C， 是在第2殻體22的基體部221的前方側形成段差部224， 在該段差部2 24和第1殻體21的筒部212的前面之間， φ 配置作爲密封構件的環狀的金屬墊44，又在窗材3和第2 殻體22的底部222之間也是，配置作爲密封構件的環狀 的金屬墊45。 另外’在第1殼體21的筒部212的上部外周刻設公 螺紋，在第2殼體22的基體部22 1的上部內周刻設母螺 紋，將筒部212旋轉插入基體部221的內部，藉此使筒部 212和基體部221螺合，藉由使筒部212朝基體部221的 前方前進’使配置於各殻體21、22和窗材3之間的金屬 墊44、45變形，而使各構件成爲密合狀態。 -16- 200940966 另外，在窗材3和第1殼體21的筒部212的內部空 間之間所形成的空間配置彈簧構件7，彈簧構件7的一端 側是抵接於窗材3，在其另一端側安裝紫外光檢測器23。 再者，在第1殻體21具備：朝窗材3方向設有開口 之第1流通孔215和第2流通孔216，第1流通孔21 5和 第2流通孔216是和第1殻體21內的連通孔217連通， 在該連通孔217內配置脫氧劑5。 〇 此外，第1流通孔2 1 5和第2流通孔2 1 6的開口徑不 同，第1流通孔21 5的開口徑爲5mm，第2流通孔216的 開口徑爲3 m m。 在該光感測器C，由於窗材3受到紫外光的照射而成 爲高溫狀態，在第1殼體21內之窗材3附近的空間溫度 變高。 於是，以與該空間連通的方式形成第1流通孔215和 第2流通孔21 6，而在此空間產生對流。又使第1流通孔 β 2 1 5的開口徑比第2流通孔2 1 6的開口徑更大，因此對流 是從第1流通孔215內流入，經過連通孔217而從第2流 通孔2 1 6排出。 再者，由於在讓對流流過的連通孔217配置脫氧劑5 ，故可確實地除去氧氣。 結果，在配置有紫外光檢測器23之密閉空間內氧氣 不會存在，穿透窗材後的紫外光不會被氧氣吸收，而能以 未衰減的狀態到達紫外光檢測器，因此能正確地測定紫外 光。再者，在配置有紫外光檢測器的密閉空間內不會發生 -17- 200940966 臭氧，因此也能防止紫外光檢測器發生劣化。 另外，在脫氧劑5無法將氧氣完全除去的情況，雖可 能會產生極微量的臭氧，但在由第1流通孔2 1 5和流通孔 217和第2流通孔216構成的流通路內，只要在對流流過 之比脫氧劑5更上游側配置活性碳等的臭氧分解觸媒，即 可確實地除去臭氧。 φ 【圖式簡單說明】 第1圖係本發明的光感測器的說明圖。 第2圖係本發明的其他實施例的光感測器的說明圖。 第3圖係本發明的其他實施例的光感測器的說明圖。 第4圖係紫外線照射裝置的說明圖。 第5圖係習知的光感測器的說明圖。 【主要元件符號說明】 φ A :光感測器 21 :第1殼體 22 :第2殻體 3 :窗材 41 : 0形環 42 : Ο形環 5 :脫氧劑 6 :水分吸附劑 -18-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensor for detecting ultraviolet light emitted from an ultraviolet light source such as an excimer lamp. [Prior Art] The ultraviolet irradiation device used in the ultraviolet irradiation of the glass substrate of the liquid crystal display panel, for example, is an excimer lamp capable of radiating vacuum ultraviolet light having a wavelength of 200 nm or less. This ultraviolet irradiation device will be described using Fig. 4. The ultraviolet irradiation device 1A includes a light extraction window 11, a main body casing 12, and a metal block 13, and an excimer lamp 1 is disposed inside the main body casing 12. The light extraction window 11 is a light penetrating member for allowing an excimer lamp The ultraviolet light emitted by 1 is made of, for example, synthetic quartz glass. The main body casing 12 is made of stainless steel, and a gas introduction port 12a is formed in one side wall, and a gas discharge port i2b is formed in the other side wall. An inert gas such as nitrogen gas is introduced from the gas introduction port 12a, and the inert gas and the remaining oxygen are discharged together from the gas discharge port 1 2b. Reference numeral 16 denotes a water-cooled pipe for cooling the metal block 13. The metal block 13 is formed with a groove portion, and half of the excimer lamp 1 is fitted to each groove portion. In the metal block 13, a through hole facing each of the excimer lamps 1 is formed, and a photo sensor 15 is assembled at a position facing the through hole above the metal block 13, by the photo sensor 15 The emitted light from the excimer lamp 1-4-200940966 was detected (refer to Patent Document 1). For example, in a dry cleaning process using a liquid glass substrate using such an ultraviolet irradiation device, generally, the object to be processed is conveyed by a belt-type conveyance means (the liquid crystal glass is introduced into the light irradiation region of the ultraviolet irradiation device, and is light-receiving In this ultraviolet irradiation device, in order to perform high-energy irradiation treatment, it is necessary to confirm that the lighting state of the excimer lamp is a state 'for example, whether or not the light to be irradiated with ultraviolet light with sufficient intensity is ultraviolet light, Therefore, the lighting state of the lamp cannot be visually observed. Therefore, in order to confirm the lighting state of the excimer lamp, the method of lighting the ultraviolet light emitted from the excimer lamp is known. Refer to the fifth section of the patent document as an explanatory diagram of the photosensor. The Φ photosensor 15 is a metal sensor configured by an ultraviolet detector to detect ultraviolet light: a metal cap 153 A through hole formed in the metal cap 153 is adhered to the through hole 154 for transmitting ultraviolet light. The metal cap 153 and the metal substrate 152 are joined by means. Further, in the sealed space in the metal cap 153, oxygen absorbs ultraviolet light and the ultraviolet light cannot reach 151. Therefore, a suitable substrate such as a conveyor for enclosing a crystal display panel such as nitrogen gas in the metal cap 153 is required. And it is in the correct state to continuously illuminate the ultraviolet light of the ultraviolet. Since the primary confirms the excimer, it is used to detect the excimer lamp 2). 151 (Inactive gas used for the presence of oxygen in the S-plate 1 5 2, allowing the ultraviolet light to pass through the glass window material or the welding material, etc. - 200940966 In addition, the penetrating window 154 The ultraviolet light will illuminate the inside of the metal cap 153 and reach the ultraviolet detector 151 to detect the ultraviolet light. As shown in Fig. 4, the photo sensor 15 is transmitted through the metal block 13 The through hole passes the ultraviolet light emitted from the excimer lamp to the window member 154 in front of the photo sensor 15, and the space between the window member 154 and the through hole of the metal block 13 becomes a space communicating with the inside of the body casing 12, and An inert gas atmosphere that does not absorb ultraviolet light is formed. The ultraviolet light that penetrates the window 154 is detected by the ultraviolet light detector 152 to measure the lighting state of the excimer lamp. [Patent Document 1] [Patent Document 2] JP-A-2004-0371 74 SUMMARY OF THE INVENTION In the photosensor 15 shown in Fig. 5, an inert gas is sealed in a sealed metal cap® 153. Usually, in order to manufacture the photo sensor 15, it will be configured Both the metal substrate 152 of the ultraviolet light detector 151 and the metal cap 153 to which the window member 154 is adhered are disposed in an assembly space in an inert gas atmosphere, and in this state, the metal cap 153 is in contact with the metal substrate 152. Part of the heat is melted to form a hermetic structure. However, according to the photosensor 15 assembled by the manufacturing method, if a small amount of oxygen is mixed in an inert gas atmosphere during assembly, the oxygen is sealed. The closed metal cap 153. As a result, due to the presence of oxygen in the closed metal cap 153, part of the ultraviolet light after the penetration of the window 154 is absorbed by the oxygen, and the ultraviolet light cannot be detected. The problem that the ultraviolet light cannot be correctly measured occurs. Further, since a part of the ultraviolet light is absorbed by the oxygen, ozone is generated in the metal cap 153, which causes the ultraviolet light detector 23 to deteriorate. It becomes impossible to measure the ultraviolet light correctly. The 'metal cap 153' is located in the direction of ultraviolet light irradiation, because it is easy to accept the excimer in the ultraviolet irradiation device. The heat of the metal cap 153 is heated to expand, and after the quasi-molecular lamp is turned off, the temperature of the metal cap 153 is lowered to cause shrinkage, and the metal cap 153 and the metal substrate 152 are repeated as the expansion and contraction are repeated. The joint portion is broken, and the inert gas in the metal cap 153 flows out to the atmosphere. As a result, oxygen flows into the metal cap 153, and a part of the ultraviolet light that penetrates the window 154 is absorbed by the oxygen. The ultraviolet light detector 151 cannot be reached, or ozone is generated in the metal cap 153, which causes the purple light external photodetector 23 to deteriorate, and it becomes impossible to accurately measure the ultraviolet light. Further, as shown in Fig. 4, the optical sensor 15 and the internal space of the main body casing 12 for processing the object to be processed are connected through the through holes of the metal block 13, and the object to be processed is processed. When the pollutants generated are scattered, the window material 1 5 4 of the photo sensor 15 may be contaminated. Even if the window member 154 is contaminated, since the window member 154 is adhered to the metal cap 153, the window member 154' cannot be replaced separately. The use of the contaminated window member 154 reduces the transmittance of ultraviolet light, and becomes impossible to correctly The ultraviolet light was measured. 200940966 The present invention has been developed to solve the above problems, and an object thereof is to provide a photo sensor capable of surely removing oxygen in a casing provided with an ultraviolet photodetector to prevent ozone generation and by an ultraviolet photodetector The ultraviolet light is accurately measured, and the lighting state of the ultraviolet light source such as an excimer lamp can be accurately measured. In addition, a light sensor is provided, which can easily replace the window material separately when the window material that penetrates the ultraviolet light is contaminated, and can always correctly f) measure the ultraviolet light. The photo sensor according to claim 1 is a photosensor for detecting ultraviolet light by an ultraviolet detector disposed in a casing, wherein the casing comprises: an ultraviolet light detector disposed therein; The ultraviolet light detector further includes a first case having a through hole through which the ultraviolet light passes, and a second case having a through hole through which the ultraviolet light passes; the first case and the second case are provided as the respective cases The through holes are overlapped with each other, and a window member through which the external light is transmitted is disposed between the first casing and the second casing at a position facing the through hole of each of the casings, and the window material and the aforementioned A sealing member is disposed between the first casings, and a deoxidizing agent is disposed in the first casing. The photosensor according to claim 2, wherein the photosensor described in claim 1 is provided with a sealing member between the window member and the second casing. The photosensor according to claim 3, wherein the photosensor according to claim 2 is provided with a moisture adsorbent in the first casing. The photo sensor according to claim 4 is a photosensor for detecting ultraviolet light by an ultraviolet detector disposed in a casing, wherein the casing comprises: an ultraviolet light detector disposed therein; Ultraviolet light detector-8 - 200940966 A first case having a through hole through which ultraviolet light passes, a second case having a through hole therethrough, and a through hole formed in the first case and the second case a window member that is light-transmitted outside the housings of the first housings 2 and that is opposed to the through holes of the respective housings, and the first housing and the second housing sealing member are In the fitting between the window material and the second casing, a deoxidizing agent is disposed in the first casing. The optical sensor according to claim 5, wherein the first housing includes: a first flow hole and a second flow hole in a square port of the window member, the first first The flow hole through hole communicates with the communication hole in the first case, and the deoxidizing agent is disposed as described above, and the first flow hole and the second flow path are different. The photosensor of the present invention includes: an ultraviolet light detector in which external light is disposed inside, and a through-shell that allows ultraviolet light to pass through, and a second case having a through hole through which ultraviolet light passes; 2 The housing is a window material which is disposed such that the through holes of the respective housings overlap each other, and between the body and the second housing, and which are opposed to the through holes of the respective housings to allow ultraviolet light to penetrate, in the window material and the first A member is disposed between the housings, and a deoxidizer is disposed in the first housing; according to the configuration, oxygen in the sealed space of the ultraviolet detector does not exist, and the ultraviolet light is not absorbed by the oxygen, but can be in an un-attenuated state. The detector is therefore able to measure the UV light correctly. Further, since ozone does not occur in the sealed space of the light distribution detector, the ultraviolet light housing can be provided with the light disposed between the first arrangement and the purple body. The second flow communicates with the opening of the inner hole of the hole to detect the first hole of the purple hole. The first case is disposed at the position of the first case. The ultraviolet light is placed in the ultraviolet light to prevent ultraviolet light. The device has deteriorated. The photosensor of the present invention includes: a first case having a through-hole for allowing ultraviolet light to pass through, and a second through hole for allowing ultraviolet light to pass through; a case in which the first case and the second case are disposed so that the through holes of the respective cases overlap each other, and are disposed between the first case and the second case at positions facing the through holes of the respective cases. a window member through which ultraviolet light is transmitted is disposed between the first casing and the second casing, and a sealing member is disposed between the window member and the second casing, and a deoxidizing agent is disposed in the first casing; In this configuration, oxygen does not exist in the sealed space in which the ultraviolet light detector is disposed, and the ultraviolet light that penetrates the window material is not absorbed by the oxygen, but can reach the ultraviolet light detector in an un-attenuated state, so that it can be correctly The ultraviolet light was measured. Further, since ozone does not occur in a sealed space in which the ultraviolet light detector is disposed, deterioration of the ultraviolet light detector can be prevented. In the photosensor of the present invention, a sealing member is disposed between the window member and the first casing, and another sealing member is disposed between the window member and the second casing, and the second casing is repeatedly expanded. The contraction, the stress of expansion and contraction is also absorbed by both the sealing member disposed between the window member and the second casing and the sealing member disposed between the window member and the first casing, and can be absorbed by the first casing and the window. The sealed space in the first casing drawn in the material area is always kept in a sealed state, and the outside air is prevented from being in the sealed space. Therefore, the ultraviolet light can be detected accurately by the ultraviolet light detector. The first housing includes a first flow hole and a second flow hole that are opened in the direction of the window member, and the first flow hole and the second flow hole communicate with the communication hole in the first case-10-200940966. 'The deoxidizer is disposed in the communication hole, and the opening diameters of the first flow hole and the second flow hole are different. According to this configuration, when the window material is heated, convection occurs through the first flow hole and the second flow hole and the communication hole, and the convection can surely remove oxygen by the deoxidizer. Furthermore, since the moisture adsorbent is disposed in the first casing, even if moisture is intruded into the sealed space during the assembly of the photosensor, the moisture adsorbent can be surely adsorbed by the moisture adsorbent to prevent ultraviolet rays from being caused by moisture. The photodetector φ detector is degraded. [Embodiment] A photosensor of the present invention will be described below. Fig. 1 is a cross-sectional view of a photosensor of the present invention. The photo sensor A includes a first case 21 and a second case 22 made of metal that are not deteriorated by ultraviolet light. The first casing 21 includes a large-diameter disk-shaped substrate portion 211, and a cylindrical portion 212 having a space inside the substrate portion 211 (having a smaller diameter than the substrate portion 2 1 1); A front edge portion 213 extending in the center direction of the substrate portion 211 is formed on the opposite side of the substrate portion, and a through hole 214 through which the ultraviolet light passes is formed closer to the center direction of the substrate 211 than the front edge portion 213. At the bottom of the inside of the cylindrical portion 212, an ultraviolet light detector 23 composed of a semiconductor sensor for detecting ultraviolet light is disposed. The second casing 22 is provided with a cylindrical base portion 221 having a space therein, and is formed at the bottom portion 222 of the base portion 221; a through hole 223 through which ultraviolet light passes is formed at the center of the bottom portion 222. -11 - 200940966 The cylindrical portion 212 of the first casing 21 is inserted into the base portion 221 of the second casing, and is disposed through the J 2 14 and the second casing 22 of the first casing 21. The holes 223 overlap each other. Between the first casing 21 and the second casing 22, the ultraviolet light is passed through the window member 3 at a position facing the through holes 214 and 223 of the casings 22. The window member 3 is made of quartz glass. . Between the window member 3 and the front edge portion 213 of the first casing 21, the elastically deformable Ο ring 41 as a sealing member seals the window member 3 and the first casing 21 by the cymbal 41. The inside of the first casing 21 is a sealed space by the first casing window member 3, and the deoxidizer 5 is disposed in the inside of the dense K. The deoxidizer 5 is provided on a wall surface on the space side of the front edge portion 213 of the first casing 21. The deoxidizer 5 can be classified into a structure that absorbs an irreversible reaction of ® by oxidation of a metal, such as titanium, iron, manganese, or the like; and a structure in which a getter enters a reversible reaction attached to the fine bubbles, such as dioxane, activated carbon. Wait. Between the window member 3 and the bottom portion 222 of the second casing 22, an elastically deformable Ο-shaped ring 42 of a sealing member is disposed, and the O-ring window member 3 and the second casing 22 are sealed. Further, the first case and the second case 22 are pressed by an appropriate means (not shown), and the ring-shaped rings 4 1 and 42 disposed between the respective cases 21 and 22 and the window member are deformed. Form a close state. Body 22 [Perforation 21, permeable configuration ring 2 1 and 丨 space: oxygen oxygen differentiation 矽 as 42 body 21 3 -12- 200940966 The light sensor A, even during the assembly process Oxygen is present in the first casing 21 partitioned by the first casing 21 and the window member 3, and the oxygen gas can be quickly removed by the deoxidizer 5, so that it does not occur in the sealed space of the photo sensor A. There is oxygen present. According to the photo sensor A, when ultraviolet light is emitted from the excimer lamp, the ultraviolet light passes through the through hole 22 of the second case 22 and penetrates the window member 3, and then passes through the through hole of the first case 21. 214, the sealed space in the first casing 21 partitioned by the first casing 21 and the φ window member 3 is irradiated, and then reaches the ultraviolet detector 23 to detect ultraviolet light. At this time, in the sealed space in the first casing 2 1 partitioned by the first casing 21 and the window member 3, the oxygen can be surely removed by the deoxidizer 5, so that the ultraviolet light after penetrating the window member 3 It is not absorbed by oxygen, but reaches the ultraviolet detector 23 in an un-attenuated state, so that ultraviolet light can be accurately measured. Further, since ozone does not occur in the sealed space, deterioration of the ultraviolet light detector 23 can be prevented, and ultraviolet light can be accurately measured. Further, the second casing 22 is located in the direction in which the ultraviolet light is irradiated, and is easy to receive the heat of the excimer lamp in the ultraviolet irradiation device, and heats the second casing 22 to expand, and the second casing 22 is turned off after the light is turned off. The temperature of the casing 22 is lowered to cause shrinkage, and expansion and contraction are repeated, but the stress of expansion and contraction can be absorbed by the O-ring 42 disposed between the second casing 22 and the window member 3, and also due to the window material. A Ο-shaped ring 41 is disposed between the third housing 21 and the first housing 21, and even if the expansion and contraction stress of the second housing 22 is transmitted to the window member 3 through the cymbal ring 42, the transmitted stress is still caused by the 0-ring 41. Since it is absorbed, the sealed space of the -13-200940966 in the first casing 21 partitioned by the first casing 21 and the window member 3 can be kept in a sealed state at all times, and the outside air can be prevented from being enclosed in the sealed space, so that it can always be correct. The ultraviolet light is detected by the ultraviolet light detector 23. Further, the window member 3 is held between the first casing 21 and the second casing 22 through the bell rings 41 and 42, and the window material 3 is contaminated by the pollutants generated when the workpiece is processed. It is very simple to replace the window material 3 alone, and the ultraviolet light can always be accurately measured. φ In Fig. 1, although the ring-shaped ring 42 is disposed between the window member 3 and the second casing 22, the ring-shaped ring 42 is removed, and the bottom portion 22 of the second casing 22 is used to directly open the window. The material 3 may be pressed in the direction of the tubular portion 212 of the first casing 21. In this configuration, the inside of the first casing 21 partitioned by the first casing 21 and the window member 3 can be used as a sealed space, and the oxygen scavenger 5 disposed in the sealed space can be used to reliably remove oxygen gas. The ultraviolet light transmitted through the window material 3 is not absorbed by the oxygen, but reaches the ultraviolet light detector 23 in an un-attenuated state, so that the ultraviolet light can be accurately measured. Further, since ozone does not occur in the sealed space, deterioration of the ultraviolet light detector 23 can be prevented, and ultraviolet light can be accurately measured. In addition, the first casing 21 and the window member 3 may be used to form a sealed space in the first casing 21, and the moisture adsorbent 6 may be disposed in the sealed space. The moisture adsorbent 6 is a wall surface provided on the inner space side of the front edge portion 213 of the first casing 21 . The moisture adsorbing agent 6 includes calcium chloride, quicklime, natural zeolite, silicone type A, silicone type B, silicone blue and the like. -14- 200940966 In this way, by arranging the moisture adsorbent 6 in a confined space, even if water intrudes into the confined space during the assembly of the photosensor, the moisture can be surely used by the moisture adsorbent 6 Adsorption prevents deterioration of the ultraviolet light detector 23 caused by moisture. Figure 2 shows another embodiment of a light sensor. The photo sensor B is disposed between the window member 3 and the bottom portion 222 of the second casing 22, and is provided with a metal pad 45 as a sealing member. The window member 3 and the second casing φ body 22 are provided by the metal pad 45. seal. A recess is formed in the front edge portion 213 of the first casing 21, and a beak ring 41 is disposed in the recess, and the window member 3 and the first casing 21 are sealed by the O-ring 41. A concave portion is formed in the substrate portion 211 of the first casing 21. An O-ring 43 is disposed in the concave portion, and the first casing 21 and the second casing 22 are sealed by the dome-shaped ring 43. By forming ample space between the cylindrical portion 212 of the first casing 21 and the base portion 2 21 of the second casing 22, even if the second casing 2 2 is heated to a high temperature, heat is hardly conducted to The first casing 21' can suppress the temperature rise of the ultraviolet light detector 23 provided in the first casing 21, so that thermal deterioration of the ultraviolet light detector 23 can be prevented. As a means for more reliably preventing thermal deterioration of the ultraviolet light detector 23, a cooling means may be provided above the substrate portion 211 of the first casing 21. Specifically, a heat sink is provided on the substrate portion 211 for air cooling. Alternatively, the cooling block (the cooling water is circulated inside thereof) is brought into contact with the substrate portion -15-200940966 21 1, or the peitier member is mounted on the substrate portion 21 1 . In addition, in FIG. 2, the metal pad 45 as a sealing member between the window member 3 and the second casing 22 is removed, and the window member 3 is directly directed to the first casing by the bottom portion 222' of the second casing 22. The direction of the tubular portion 212 of 21 may be pressed. In this configuration, the inside of the first casing 21 partitioned by the first casing 21 and the window member 3 can be used as a sealed space, and the oxygen can be reliably removed by the deoxidizer 5 disposed in the sealed space φ. Therefore, the ultraviolet light that has passed through the window material 3 is not absorbed by the oxygen, but reaches the ultraviolet light detector 2 3 in an un-attenuated state, so that the ultraviolet light can be accurately measured. Further, ozone does not occur in the sealed space, so that deterioration of the ultraviolet light detector 23 can be prevented, and ultraviolet light can be accurately measured. Figure 3 shows another embodiment of a light sensor. In the photosensor C, a step portion 224 is formed on the front side of the base portion 221 of the second casing 22, and φ is disposed as a seal between the step portion 24 and the front surface of the tubular portion 212 of the first casing 21. The annular metal pad 44 of the member is also disposed between the window member 3 and the bottom portion 222 of the second casing 22, and an annular metal pad 45 as a sealing member is disposed. Further, a male screw is formed on the outer periphery of the upper portion of the tubular portion 212 of the first casing 21, a female screw is bored in the inner periphery of the upper portion of the base portion 22 1 of the second casing 22, and the tubular portion 212 is rotated and inserted into the base portion 221. Internally, the tubular portion 212 and the base portion 221 are screwed together, and the tubular portion 212 is advanced toward the front of the base portion 221 to make the metal pads 44 and 45 disposed between the respective casings 21 and 22 and the window member 3. The deformation causes the members to be in a closed state. -16- 200940966 Further, the spring member 7 is disposed in a space formed between the window member 3 and the internal space of the tubular portion 212 of the first casing 21, and one end side of the spring member 7 abuts against the window member 3, The ultraviolet detector 23 is mounted on the other end side. In addition, the first housing 21 includes a first flow hole 215 and a second flow hole 216 that are open in the direction of the window member 3, and the first flow hole 215 and the second flow hole 216 are the first case. The communication hole 217 in 21 is in communication, and the deoxidizer 5 is disposed in the communication hole 217. Further, the opening diameters of the first flow holes 2 15 and the second flow holes 2 16 are different, the opening diameter of the first flow holes 21 5 is 5 mm, and the opening diameter of the second flow holes 216 is 3 m m. In the photosensor C, since the window material 3 is irradiated with ultraviolet light to be in a high temperature state, the space temperature in the vicinity of the window material 3 in the first casing 21 becomes high. Then, the first flow hole 215 and the second flow hole 21 6 are formed to communicate with the space, and convection is generated in this space. Further, since the opening diameter of the first flow hole β 2 1 5 is larger than the opening diameter of the second flow hole 2 16 , the convection flows in from the first flow hole 215 and passes through the communication hole 217 and passes through the second flow hole 2 . 1 6 discharge. Further, since the deoxidizer 5 is disposed in the communication hole 217 through which the convection flows, the oxygen can be surely removed. As a result, oxygen does not exist in the sealed space in which the ultraviolet light detector 23 is disposed, and the ultraviolet light that penetrates the window material is not absorbed by the oxygen, but can reach the ultraviolet light detector in an un-attenuated state, so that it can be correctly The ultraviolet light was measured. Furthermore, -17-200940966 ozone does not occur in a sealed space equipped with an ultraviolet light detector, so that the ultraviolet light detector can be prevented from deteriorating. Further, in the case where the oxygen scavenger 5 cannot completely remove oxygen, a slight amount of ozone may be generated, but in the flow path formed by the first flow hole 2 15 and the flow hole 217 and the second flow hole 216, Ozone decomposing catalyst such as activated carbon is disposed on the upstream side of the deoxidizing agent 5, and the ozone can be surely removed. φ [Simplified description of the drawings] Fig. 1 is an explanatory view of a photosensor of the present invention. Fig. 2 is an explanatory view of a photosensor of another embodiment of the present invention. Fig. 3 is an explanatory view of a photosensor of another embodiment of the present invention. Fig. 4 is an explanatory view of an ultraviolet irradiation device. Fig. 5 is an explanatory view of a conventional photo sensor. [Description of main component symbols] φ A : Photosensor 21 : First case 22 : Second case 3 : Window material 41 : O-ring 42 : Ring-shaped ring 5 : Deoxidizer 6 : Moisture adsorbent -18 -