TWI381153B - Light sensor - Google Patents

Description

Light sensor

The present invention relates to a photosensor for detecting ultraviolet light emitted from an ultraviolet light source such as an excimer lamp.

In the ultraviolet irradiation treatment process of the glass substrate of the liquid crystal display panel, for example, the ultraviolet irradiation apparatus used is an excimer lamp which can emit the vacuum ultraviolet light of the wavelength of 200 nm or less.

This ultraviolet irradiation device will be described using Fig. 4.

The ultraviolet irradiation device 10 includes a light extraction window 11, a main body casing 12, and a metal block 13, and an excimer lamp 1 is disposed inside the main body casing 12.

The light extraction window 11 is a light penetrating member that allows ultraviolet light emitted from the excimer lamp 1 to pass through, for example, composed of synthetic quartz glass. The main body casing 12 is made of stainless steel, and has a gas introduction port 12a formed in one side wall and a gas discharge port 12b in the other side wall.

An inert gas such as nitrogen gas is introduced from the gas introduction port 12a, and the inert gas and the remaining oxygen are discharged together from the gas discharge port 12b.

Reference numeral 16 denotes a water-cooled pipe for cooling the metal block 13.

The metal block 13 is formed with a groove portion, and half of the excimer lamp 1 is fitted to each groove portion. In the metal block 13, a through hole facing each of the excimer lamps 1 is formed, and a photo sensor 15 is assembled at a position facing the through hole above the metal block 13, and the photo sensor 15 detects the from the photo sensor 15 The emitted light of the excimer lamp 1 (refer to Patent Document 1).

For example, in the dry cleaning process of the glass substrate of the liquid crystal display panel using the ultraviolet irradiation device, the workpiece (liquid crystal glass substrate) is usually conveyed by an appropriate conveyance means such as a belt conveyor. The light irradiation region of the ultraviolet irradiation device is washed by continuously irradiating ultraviolet light.

In such an ultraviolet irradiation apparatus, in order to perform highly reliable ultraviolet light irradiation processing, it is necessary to confirm whether or not the lighting state of the excimer lamp is in an accurate state, for example, whether or not the ultraviolet light is irradiated with sufficient intensity. Since the main emitted light is ultraviolet light, it is impossible to visually confirm the lighting state of the excimer lamp.

Therefore, in order to confirm the lighting state of the excimer lamp, a method of measuring the lighting state of the excimer lamp by using a photosensor for detecting ultraviolet rays emitted from the excimer lamp is known (refer to the patent literature). 2).

Fig. 5 is an explanatory diagram of a photo sensor.

The photo sensor 15 is coated on the metal substrate 152 on which the ultraviolet light detector 151 (consisting of a semiconductor sensor for detecting ultraviolet light) is disposed, and a metal cap 153 is formed on the metal cap 153. A through-hole through which ultraviolet light passes, and a window member 154 made of glass that allows ultraviolet light to pass therethrough is adhered to the through-hole. The metal cap 153 and the metal substrate 152 are joined by means of welding or welding materials.

Further, if oxygen is present in the sealed space in the metal cap 153, the oxygen absorbs the ultraviolet light and the ultraviolet light cannot reach the ultraviolet detector 151. Therefore, an inert gas such as nitrogen gas is sealed in the metal cap 153. .

In addition, the ultraviolet light that penetrates the window member 154 is irradiated into the metal cap 153 and reaches the ultraviolet light detector 151 to detect ultraviolet light.

As shown in FIG. 4, the light sensor 15 transmits the ultraviolet light emitted from the excimer lamp to the window member 154 in front of the photo sensor 15 through the through hole of the metal block 13, and the window member 154 Between the through hole of the metal block 13, a space communicating with the inside of the body casing 12 is formed, and an inert gas atmosphere that does not absorb ultraviolet light is formed. The ultraviolet light that penetrates the window member 154 is detected by the ultraviolet light detector 152 to determine the lighting state of the excimer lamp.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-221490

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-037174

In the photo sensor 15 shown in FIG. 5, an inert gas is sealed in the sealed metal cap 153. Usually, in order to manufacture the photosensor 15, the metal in which the ultraviolet photodetector 151 is disposed is used. Both the substrate 152 and the metal cap 153 to which the window member 154 is adhered are disposed in an assembly space in an inert gas atmosphere. In this state, a portion of the metal cap 153 that is in contact with the metal substrate 152 is heated and melted to form a portion. Closed structure.

However, in the photosensor 15 assembled according to this manufacturing method, if a small amount of oxygen is mixed in an inert gas atmosphere during assembly, the oxygen is sealed in the sealed metal cap 153.

As a result, due to the presence of oxygen in the closed metal cap 153, a part of the ultraviolet light that penetrates the window 154 is absorbed by the oxygen and cannot reach the ultraviolet detector 151, so that the ultraviolet light cannot be accurately measured. The problem.

Further, since a part of the ultraviolet light is absorbed by the oxygen, ozone is generated in the metal cap 153, which causes the ultraviolet light detector 23 to deteriorate, and it becomes impossible to accurately measure the ultraviolet light.

Furthermore, the metal cap 153 is located in the direction in which the ultraviolet light is irradiated, so that it is easy to receive the heat of the excimer lamp in the ultraviolet irradiation device, the metal cap 153 is heated to be expanded, and the metal cap is turned off after the excimer lamp is turned off. The temperature of the cover 153 is lowered to cause contraction, and as the expansion and contraction are repeated, the joint portion of the metal cap 153 and the metal substrate 152 is broken, and the inert gas in the metal cap 153 flows out to the atmosphere. .

As a result, oxygen can flow into the metal cap 153, and a portion of the ultraviolet light that penetrates the window 154 is absorbed by the oxygen, and cannot reach the ultraviolet detector 151, or ozone is generated in the metal cap 153, which causes ultraviolet rays. The photodetector 23 is deteriorated, and it becomes impossible to accurately measure the ultraviolet light.

Further, as shown in Fig. 4, the optical sensor 15 and the internal space of the main body casing 12 for processing the workpiece are connected through the through holes of the metal block 13, and the processing of the workpiece is performed. When the generated pollutants are scattered, the window 154 of the photo sensor 15 may be contaminated.

Even if the window member 154 is contaminated, since the window member 154 is adhered to the metal cap 153, the window member 154 cannot be replaced separately, and the use of the contaminated window member 154 reduces the transmittance of ultraviolet light, and becomes impossible to correctly The ultraviolet light was measured.

The present invention has been developed to solve the above problems, and an object thereof is to provide a photo sensor capable of surely removing oxygen in a casing provided with an ultraviolet photodetector to prevent ozone generation and by an ultraviolet detector. The ultraviolet light is accurately measured, and the lighting state of the ultraviolet light source such as an excimer lamp can be accurately measured.

In addition, a light sensor is provided, and in the case where the window material through which the ultraviolet light is transmitted is contaminated, the window material can be simply replaced, and the ultraviolet light can be accurately measured at all times.

The photo sensor according to claim 1 is a photosensor for detecting ultraviolet light by an ultraviolet detector disposed in a casing, wherein the casing comprises: an ultraviolet light detector disposed therein; The ultraviolet light detector further includes a first case having a through hole through which the ultraviolet light passes, and a second case having a through hole through which the ultraviolet light passes; the first case and the second case are provided as the respective cases The through holes are overlapped with each other, and a window material for allowing ultraviolet light to pass through between the first case and the second case and facing the through hole of each case is disposed in the window member and the first A sealing member is disposed between the casings, and a deoxidizing agent is disposed in the first casing.

In the photosensor according to claim 1, the photosensor according to claim 1 is characterized in that a sealing member is disposed between the window member and the second casing.

The photosensor according to claim 3, wherein the photosensor according to claim 2 is provided with a moisture adsorbent in the first casing.

The photo sensor according to claim 4 is a photosensor for detecting ultraviolet light by an ultraviolet detector disposed in a casing, wherein the casing comprises: an ultraviolet light detector disposed therein; The ultraviolet light detector further includes a first case having a through hole through which the ultraviolet light passes, and a second case having a through hole through which the ultraviolet light passes; the first case and the second case are provided as the respective cases The through holes are overlapped with each other, and a window material for allowing ultraviolet light to pass through between the first case and the second case and facing the through hole of each case is disposed in the first case and the first case A sealing member is disposed between the second casings, and a sealing member is disposed between the window member and the second casing, and a deoxidizing agent is disposed in the first casing.

The photosensor according to claim 4, wherein the first housing includes a first flow hole and a second flow hole that are open in the direction of the window member. The first flow hole and the second flow hole communicate with the communication hole in the first case, and the deoxidizer is disposed in the communication hole, and the opening diameters of the first flow hole and the second flow hole are different.

The photosensor of the present invention includes a first case in which a UV detector for detecting ultraviolet light is disposed inside, and a first case having a through hole through which ultraviolet light passes, and a through hole having a pass through which ultraviolet light passes a case in which the first case and the second case are disposed so that the through holes of the respective cases overlap each other, and are disposed between the first case and the second case at positions facing the through holes of the respective cases. a window member that allows ultraviolet light to pass through, and a sealing member is disposed between the window member and the first casing, and a deoxidizing agent is disposed in the first casing; according to this configuration, oxygen is not contained in a sealed space in which the ultraviolet light detector is disposed. Existence, the ultraviolet light that penetrates the window material is not absorbed by oxygen, but can reach the ultraviolet light detector in an un-attenuated state, so that the ultraviolet light can be accurately measured. Furthermore, since ozone does not occur in a sealed space in which the ultraviolet light detector is disposed, deterioration of the ultraviolet light detector can be prevented.

The photosensor of the present invention includes a first case in which a UV detector for detecting ultraviolet light is disposed inside, and a first case having a through hole through which ultraviolet light passes, and a through hole having a pass through which ultraviolet light passes a case in which the first case and the second case are disposed so that the through holes of the respective cases overlap each other, and are disposed between the first case and the second case at positions facing the through holes of the respective cases. a window member that allows ultraviolet light to pass through, a sealing member is disposed between the first casing and the second casing, a sealing member is disposed between the window member and the second casing, and a deoxidizing agent is disposed in the first casing; In the closed space where the ultraviolet detector is disposed, oxygen does not exist, and the ultraviolet light that penetrates the window material is not absorbed by oxygen, but can reach the ultraviolet detector in an un-attenuated state, so that it can be correctly determined. Ultraviolet light. Furthermore, since ozone does not occur in a sealed space in which the ultraviolet light detector is disposed, deterioration of the ultraviolet light detector can be prevented.

In the photosensor of the present invention, a sealing member is disposed between the window member and the first casing, and another sealing member is disposed between the window member and the second casing, and even if the second casing repeatedly expands and contracts, The expansion and contraction stress is also absorbed by both the sealing member disposed between the window member and the second casing and the sealing member disposed between the window member and the first casing, and the first casing and the window member can be partitioned. The sealed space in the first casing is always kept in a sealed state, and the outside air is prevented from being in the sealed space. Therefore, the ultraviolet light can be accurately detected by the ultraviolet light detector.

The first housing includes a first flow hole and a second flow hole that are opened in the direction of the window member, and the first flow hole and the second flow hole communicate with the communication hole in the first case, and are in the communication hole. The deoxidizer is disposed, and the opening diameters of the first flow hole and the second flow hole are different. According to this configuration, when the window material is heated, convection through the first flow hole and the second flow hole and the communication hole occurs, and the convection can surely remove oxygen by the deoxidizer.

Further, since the moisture adsorbent is disposed in the first casing, even if moisture is intruded into the sealed space during the assembly of the photosensor, the moisture adsorbent can be surely adsorbed by the moisture adsorbent to prevent ultraviolet rays from being caused by moisture. Degradation of the photodetector.

The photo sensor of the present invention will be described below.

Fig. 1 is a cross-sectional view of a photosensor of the present invention.

The photo sensor A includes a first case 21 and a second case 22 made of metal that are not deteriorated by ultraviolet light.

The first casing 21 includes a large-diameter disk-shaped substrate portion 211, a cylindrical portion 212 that is vertically disposed in the substrate portion 211 and has a space therein (a smaller diameter than the substrate portion 211), and a tubular portion 212 On the opposite side of the substrate portion, a front edge portion 213 extending in the center direction of the substrate portion 211 is formed, and a through hole 214 through which the ultraviolet light passes is formed closer to the center direction of the substrate 211 than the front edge portion 213, and the cylindrical portion 212 is formed in the cylindrical portion 212. The bottom of the interior is configured with an ultraviolet detector 23 constructed of a semiconductor sensor for detecting ultraviolet light.

The second casing 22 is provided with a cylindrical base portion 221 having a space inside, and is formed at a bottom portion 222 of the base portion 221; and a through hole 223 through which ultraviolet light passes is formed at the center of the bottom portion 222.

The cylindrical portion 212 of the first casing 21 is inserted into the base portion 221 of the second casing 22, and is a through hole 214 of the first casing 21 and a through hole 223 of the second casing 22. Overlapping each other.

Between the first casing 21 and the second casing 22, a window member 3 through which ultraviolet light is transmitted is disposed at a position facing the through holes 214 and 223 of the casings 21 and 22.

The window material 3 is made of quartz glass.

An elastically deformable O-ring 41 as a sealing member is disposed between the window member 3 and the front edge portion 213 of the first casing 21, and the window member 3 and the first casing 21 are placed by the O-ring 41. In the first casing 21 and the window member 3, the inside of the first casing 21 is sealed, and the deoxidizer 5 is placed in the sealed space.

The deoxidizer 5 is provided on the wall surface on the inner space side of the front edge portion 213 of the first casing 21 .

The deoxidizer 5 can be classified into a structure that absorbs irreversible reaction of oxygen by oxidation of a metal, such as titanium, iron, manganese, or the like; and a structure that allows oxygen molecules to enter a reversible reaction attached to the fine bubbles, such as ruthenium dioxide, Activated carbon, etc.

An elastically deformable O-ring 42 as a sealing member is disposed between the window member 3 and the bottom portion 222 of the second casing 22, and the window member 3 and the second casing 22 are sealed by the O-ring 42.

Further, the first casing 21 and the second casing 22 are pressed by an appropriate means (not shown), and the O-ring 41 disposed between the casings 21 and 22 and the window member 3 is 42 is deformed to form a close state.

In the photosensor A, even if oxygen is present in the first casing 21 partitioned by the first casing 21 and the window member 3 during assembly, the oxygen can be quickly used by the deoxidizer 5 It is removed, so there is no oxygen present in the sealed space of the photo sensor A.

According to the photosensor A, when ultraviolet light is emitted from the excimer lamp, the ultraviolet light passes through the through hole 223 of the second case 22 and penetrates the window member 3, and then passes through the through hole 214 of the first case 21. The sealed space in the first casing 21 partitioned by the first casing 21 and the window member 3 is irradiated, and then reaches the ultraviolet detector 23 to detect ultraviolet light.

At this time, in the sealed space in the first casing 21 partitioned by the first casing 21 and the window member 3, the oxygen can be surely removed by the deoxidizer 5, so that the ultraviolet light after penetrating the window member 3 is not It is absorbed by oxygen and reaches the ultraviolet detector 23 in an un-attenuated state, so that ultraviolet light can be accurately measured. Further, since ozone does not occur in the sealed space, deterioration of the ultraviolet light detector 23 can be prevented, and ultraviolet light can be accurately measured.

Further, the second casing 22 is located in the direction in which the ultraviolet light is irradiated, and is easy to receive the heat of the excimer lamp in the ultraviolet irradiation device, and the second casing 22 is heated and expanded, and the second casing is turned off after the light is turned off. The temperature of the body 22 is lowered to cause shrinkage, and the expansion and contraction are repeated, but the stress of the expansion and contraction can be absorbed by the O-ring 42 disposed between the second casing 22 and the window member 3, and also due to the window material 3 An O-ring 41 is disposed between the first housing 21 and the first housing 21, and even if the expansion and contraction stress of the second housing 22 is transmitted to the window member 3 through the O-ring 42, the transmitted stress is absorbed by the O-ring 41. Therefore, the sealed space in the first casing 21 partitioned by the first casing 21 and the window member 3 can be kept in a sealed state at all times, and the outside air can be prevented from being in the sealed space. Therefore, the ultraviolet light can always be accurately used. The detector 23 performs detection of ultraviolet light.

Further, the window member 3 is held between the first casing 21 and the second casing 22 through the O-rings 41 and 42, and the window material 3 is contaminated by the pollutants generated when the workpiece is processed. It is very simple to replace the window material 3 alone, and the ultraviolet light can always be accurately measured.

In Fig. 1, although the O-ring 42 is disposed between the window member 3 and the second casing 22, the O-ring 42 is removed, and the window member 3 is directly used by the bottom 222 of the second casing 22. The pressing of the tubular portion 212 of the first casing 21 may be performed.

In this configuration, the inside of the first casing 21 partitioned by the first casing 21 and the window member 3 can be used as a sealed space, and the oxygen scavenger 5 disposed in the sealed space can be used to reliably remove oxygen gas. The ultraviolet light that has passed through the window member 3 is not absorbed by the oxygen, but reaches the ultraviolet light detector 23 in an un-attenuated state, so that the ultraviolet light can be accurately measured. Further, since ozone does not occur in the sealed space, deterioration of the ultraviolet light detector 23 can be prevented, and ultraviolet light can be accurately measured.

In addition, the inside of the first casing 21 may be a sealed space by the first casing 21 and the window material 3, and the moisture adsorbent 6 may be disposed in the sealed space.

The moisture adsorbent 6 is a wall surface provided on the inner space side of the front edge portion 213 of the first casing 21 .

The moisture adsorbent 6 includes calcium chloride, quicklime, natural zeolite, silicone type A, silicone type B, silicone blue, and the like.

In this manner, by arranging the moisture adsorbent 6 in the sealed space, even if moisture is intruded into the sealed space during the assembly of the photosensor, the moisture can be surely adsorbed by the moisture adsorbent 6 to prevent adsorption. Deterioration of the ultraviolet light detector 23 caused by moisture.

Figure 2 shows another embodiment of a light sensor. The photo sensor B is disposed between the window member 3 and the bottom portion 222 of the second casing 22, and is provided with a metal pad 45 as a sealing member, and the window member 3 and the second casing 22 are sealed by the metal pad 45. .

A recess is formed in the front edge portion 213 of the first casing 21, and an O-ring 41 is disposed in the recess, and the window member 3 and the first casing 21 are sealed by the O-ring 41.

A concave portion is formed in the substrate portion 211 of the first casing 21, and an O-ring 43 is disposed in the concave portion, and the first casing 21 and the second casing 22 are sealed by the O-ring 43.

By forming ample space between the cylindrical portion 212 of the first casing 21 and the base portion 221 of the second casing 22, even if the second casing 22 is heated to a high temperature, heat is hardly conducted to the first casing. 21, the temperature rise of the ultraviolet light detector 23 provided in the first casing 21 can be suppressed, so that the thermal deterioration of the ultraviolet light detector 23 can be prevented.

As means for more reliably preventing thermal deterioration of the ultraviolet light detector 23, a cooling means may be provided above the substrate portion 211 of the first casing 21.

Specifically, in order to perform air cooling, a heat sink is provided on the substrate portion 211, or a cooling block (cooling water is circulated therein) is brought into contact with the substrate portion 211, or a peltier element is attached to the substrate portion 211.

Further, in FIG. 2, the metal pad 45 as a sealing member between the window member 3 and the second casing 22 is removed, and the window member 3 is directly directed to the first casing by the bottom portion 222 of the second casing 22. The direction of the tubular portion 212 of 21 may be pressed.

In this configuration, the inside of the first casing 21 partitioned by the first casing 21 and the window member 3 can be used as a sealed space, and the oxygen scavenger 5 disposed in the sealed space can be used to reliably remove oxygen gas. The ultraviolet light that has passed through the window member 3 is not absorbed by the oxygen, but reaches the ultraviolet light detector 23 in an un-attenuated state, so that the ultraviolet light can be accurately measured. Further, since ozone does not occur in the sealed space, deterioration of the ultraviolet light detector 23 can be prevented, and ultraviolet light can be accurately measured.

Figure 3 shows another embodiment of a light sensor. In the photo sensor C, the step portion 224 is formed on the front side of the base portion 221 of the second casing 22, and the step portion 224 and the front surface of the cylindrical portion 212 of the first casing 21 are disposed as a sealing member. The annular metal pad 44 is also disposed between the window member 3 and the bottom portion 222 of the second casing 22, and an annular metal pad 45 as a sealing member is disposed.

Further, a male screw is formed on the outer periphery of the upper portion of the tubular portion 212 of the first casing 21, a female screw is bored in the inner periphery of the upper portion of the base portion 221 of the second casing 22, and the tubular portion 212 is rotated and inserted into the interior of the base portion 221. Thereby, the tubular portion 212 and the base portion 221 are screwed together, and the tubular portion 212 is advanced toward the front of the base portion 221 to deform the metal pads 44, 45 disposed between the respective casings 21, 22 and the window member 3. And the members are brought into a close state.

Further, the spring member 7 is disposed in a space formed between the window member 3 and the internal space of the tubular portion 212 of the first casing 21, and one end side of the spring member 7 abuts against the window member 3, and is mounted on the other end side thereof. Ultraviolet light detector 23.

In addition, the first housing 21 includes a first flow hole 215 and a second flow hole 216 which are opened in the direction of the window member 3, and the first flow hole 215 and the second flow hole 216 are the first case 21 The communication hole 217 in the interior communicates, and the deoxidizer 5 is disposed in the communication hole 217.

In addition, the opening diameters of the first flow hole 215 and the second flow hole 216 are different, and the opening diameter of the first flow hole 215 is 5 mm, and the opening diameter of the second flow hole 216 is 3 mm.

In the photosensor C, the window material 3 is heated to ultraviolet light to be in a high temperature state, and the space temperature in the vicinity of the window material 3 in the first casing 21 is increased.

Then, the first flow hole 215 and the second flow hole 216 are formed to communicate with the space, and convection occurs in this space. Further, since the opening diameter of the first flow hole 215 is larger than the opening diameter of the second flow hole 216, the convection flows in from the first flow hole 215, and is discharged from the second flow hole 216 through the communication hole 217.

Further, since the deoxidizer 5 is disposed in the communication hole 217 through which the convection flows, the oxygen can be surely removed.

As a result, oxygen does not exist in the sealed space in which the ultraviolet light detector 23 is disposed, and the ultraviolet light that penetrates the window material is not absorbed by the oxygen, but can reach the ultraviolet light detector in an un-attenuated state, so that it can be correctly The ultraviolet light was measured. Furthermore, since ozone does not occur in a sealed space in which the ultraviolet light detector is disposed, deterioration of the ultraviolet light detector can be prevented.

Further, in the case where the oxygen scavenger 5 cannot completely remove oxygen, a slight amount of ozone may be generated. However, in the flow path formed by the first flow hole 215, the flow hole 217, and the second flow hole 216, convection is required. Ozone decomposition catalyst such as activated carbon is disposed on the upstream side of the deoxidizer 5, and ozone can be surely removed.

A, B, C, 15‧‧‧ optical sensors

1‧‧ ‧ excimer lamp

3‧‧‧ Window materials

5‧‧‧Deoxidizer

6‧‧‧Water adsorbent

7‧‧‧Spring components

10‧‧‧UV irradiation device

11‧‧‧Light removal window

12‧‧‧ body shell

12a‧‧‧ gas inlet

12b‧‧‧ gas discharge

13‧‧‧Metal blocks

16‧‧‧Water-cooled pipeline

21‧‧‧1st housing

22‧‧‧ second housing

23, 151‧‧‧ ultraviolet detector

41, 42, 43‧ ‧ O-rings

44, 45‧‧‧Metal pads

152‧‧‧Metal substrate

153‧‧‧Metal cap

154‧‧‧ Window materials

211‧‧‧Parts Department

212‧‧‧ Tube

213‧‧‧ Front edge

214‧‧‧through holes

215‧‧‧1st flow hole

216‧‧‧2nd flow hole

217‧‧‧Connected holes

221‧‧‧ Base Department

222‧‧‧ bottom

223‧‧‧through holes

224‧‧ Section

Fig. 1 is an explanatory view of a photosensor of the present invention.

Fig. 2 is an explanatory view of a photosensor of another embodiment of the present invention.

Fig. 3 is an explanatory view of a photosensor of another embodiment of the present invention.

Fig. 4 is an explanatory view of an ultraviolet irradiation device.

Fig. 5 is an explanatory view of a conventional photo sensor.

A. . . Light sensor

3. . . Window material

5. . . Deoxidizer

6. . . Moisture adsorbent

twenty one. . . First housing

twenty two. . . Second housing

twenty three. . . Ultraviolet detector

41. . . O-ring

42. . . O-ring

211. . . Substrate part

212. . . Tube

213. . . Front edge

214. . . Through hole

221. . . Base body

222. . . bottom

223. . . Through hole

Claims (5)

A photo sensor is a photosensor for detecting ultraviolet light by an ultraviolet detector disposed in a casing, wherein the casing comprises: an ultraviolet detector internally configured to detect ultraviolet light a first case having a through hole through which ultraviolet light passes, and a second case having a through hole through which ultraviolet light passes; the first case and the second case are such that through holes of the respective cases overlap each other Between the first casing and the second casing, a window material for transmitting ultraviolet light is disposed at a position facing the through hole of each casing, between the window material and the first casing The sealing member is disposed, and a deoxidizing agent is disposed in the first casing. The photosensor according to claim 1, wherein a sealing member is disposed between the window member and the second casing. The photosensor according to claim 1 or 2, wherein the moisture adsorbent is disposed in the first casing. A photo sensor is a photosensor for detecting ultraviolet light by an ultraviolet detector disposed in a casing, wherein the casing comprises: an ultraviolet detector internally configured to detect ultraviolet light a first case having a through hole through which ultraviolet light passes, and a second case having a through hole through which ultraviolet light passes; the first case and the second case are such that through holes of the respective cases overlap each other a window member for transmitting ultraviolet light between the first case and the second case and facing the through hole of each case, wherein the first case and the second case are A sealing member is disposed between the window member and the second casing, and a deoxidizing agent is disposed in the first casing. The optical sensor according to claim 4, wherein the first casing includes a first flow hole and a second flow hole that are opened in a direction of the window material, and the first flow hole and The second flow hole communicates with the communication hole in the first case, and the deoxidizer is disposed in the communication hole, and the opening diameters of the first flow hole and the second flow hole are different.